Information transmission method

The information transmission method addresses the challenge of error information transmission in non-networked processing devices by using identification and control codes, enabling efficient error analysis and resolution.

JP2025008802APending Publication Date: 2025-01-20DISCO CORP
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Patent Information

Application Number
JP2023111315
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-07-06
Publication Date
2025-01-20

AI Technical Summary

Technical Problem

Conventional processing devices not connected to a communication line face challenges in transmitting error information, making it difficult for response units to check and address errors efficiently.

Method used

An information transmission method that includes generating and displaying error identification codes on the processing device, using a communication device to read and transmit this information to a response unit, and enabling request and response identification codes for data exchange, along with execution control instructions.

Benefits of technology

Facilitates easy transmission of error information and control instructions to and from processing devices not connected to a network, reducing operational man-hours and enhancing error analysis and resolution efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

To provide an information transmission method that makes it possible to easily transmit, to a response section, error information on a processing device that is not connected to a communication line.SOLUTION: An information transmission method for transmitting error information on a processing device 10 that processes semiconductor wafers to an external server 30, includes: an error identification code generation step of the processing device 10 generating an error identification code indicating the error information on the processing device 10 and displaying it on a display unit 13 of the processing device 10; and an error information transmission step of a communication apparatus 20, which has an imaging unit 26 for reading the error identification code and a communication unit 25 having a communication function, reading the error identification code and transmitting the error information included in the error identification code to the external server 30.SELECTED DRAWING: Figure 2
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Description

[Technical field]

[0001] The present invention relates to a method for transmitting information. [Background technology]

[0002] There are known processing apparatuses for processing objects such as semiconductor wafers, etc. Also, a substrate processing system capable of setting processing conditions for a processing apparatus that is not connected to a network has been disclosed (for example, see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2022-159797 A Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the conventional technology, when a processing device is not connected to a communication line, it is difficult for a response unit other than the operator who operates the processing device to check the error information of the processing device. Therefore, there is a problem to be solved, which is to easily transmit error information even in a processing device that is not connected to a communication line.

[0005] The present invention has been made in consideration of the above points, and aims to provide an information transmission method that makes it possible to easily transmit error information of a processing device that is not connected to a communication line to a response unit. [Means for solving the problem]

[0006] The information transmission method of the present invention is an information transmission method for transmitting error information of a processing device that processes an object to a response unit, and includes an error identification code generation step in which the processing device generates an error identification code indicating the error information of the processing device and displays it on a display unit of the processing device, and an error information transmission step in which a communication device having an imaging unit that reads the error identification code and a communication unit with a communication function reads the error identification code and transmits the error information contained in the error identification code to the response unit.

[0007] The information transmission method of the present invention may further include a request step of transmitting to the communications device the type of data required for error analysis in the information recorded in the processing device from the response unit; a request identification code display step of displaying on the communications device a request identification code requesting the transmission of the data generated by the request from the response unit in the request step; a request reading step of reading the request identification code with an imaging unit installed on the processing device; a response identification code generation step of the processing device generating a response identification code including the data requested by the request identification code and displaying it on the display unit of the processing device; and a response transmission step of the communications device reading the response identification code and transmitting information contained in the response identification code to the response unit.

[0008] The information transmission method of the present invention may further include an execution command step of transmitting an arbitrary execution instruction value for controlling the processing device from the response unit to the communications device, an execution identification code display step of displaying on the communications device an execution identification code including the execution instruction value generated in response to a request from the response unit, and an execution control step of reading the execution identification code with an imaging unit installed on the processing device, and controlling the control unit of the processing device based on the execution instruction requested by the execution instruction value. Effect of the Invention

[0009] According to the present invention, error information of a processing device that is not connected to a network can be easily transmitted to a response unit. [Brief description of the drawings]

[0010] [Figure 1] 1 is a diagram illustrating an example of an information transmission system that executes an information transmission method according to an embodiment of the present invention. [Diagram 2] 4 is a sequence chart showing an example of a first step of the information transmission method of the present embodiment. [Diagram 3] 4 is a sequence chart showing an example of a second step in the information transmission method of the present embodiment. [Figure 4] 11 is a sequence chart showing an example of a third step in the information transmission method of the present embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The information transmission method according to the present embodiment will be described with reference to Figs. 1 to 4. The information transmission method executed by the information transmission system 1 according to the present embodiment includes a first step, a second step, and a third step, which will be described later. The first step, the second step, and the third step may be executed consecutively or independently. The first step includes an error identification code generation step and an error information transmission step. The second step includes a request step, a request identification code display step, a request reading step, a response identification code generation step, and a response transmission step. The third step includes an execution command step, an execution identification code display step, and an execution control step. Fig. 1 is a diagram showing an example of an information transmission system that executes the information transmission method according to the present embodiment. Fig. 2 is a sequence chart showing an example of the first step of the information transmission method according to the present embodiment. Fig. 3 is a sequence chart showing an example of the second step of the information transmission method according to the present embodiment. Fig. 4 is a sequence chart showing an example of the third step of the information transmission method according to the present embodiment.

[0012] The information transmission system 1 for executing the information transmission method according to the present embodiment includes a processing device 10, a communication device 20, and an external server 30 as an example of a response unit. The response unit of the information transmission system of the present invention is not limited to the external server 30. When a P2P communication method is used in which the communication device 20 and another communication device used by the responder communicate without going through an external server, the response unit is the other communication device used by the responder. The information transmission system 1 shown in FIG. 1 may also include devices other than the processing device 10, the communication device 20, and the external server 30.

[0013] The processing device 10 is a processing device for processing a processing object such as a semiconductor wafer. The processing device 10 is not connected to other devices constituting the information transmission system 1 so as to be able to communicate with each other by wire or wirelessly. As the processing device, a cutting device, a grinding device, a polishing device, a plasma processing device, a laser processing device, a bit cutting device, an inspection device, a tape application device, a tape peeling device, a cleaning device, a film forming device, a resin application device, or the like can be used. The processing device 10 includes a control unit 11, a display unit 13, an input unit 14, and an imaging unit 16.

[0014] The control unit 11 includes a control unit 111 (processor) and a storage unit 112 (memory).

[0015] The control unit 111 generates signals for controlling each part of the processing device 10. The control unit 111 controls the operation of each part of the processing device 10 by reading out and executing a program stored in the storage unit 112.

[0016] The storage unit 112 stores a program and various information for executing the control of the processing device 10 used in the control unit 111. The information stored in the storage unit 112 may include an execution instruction value for controlling the processing device 10. The execution instruction value includes a setting value for controlling the behavior of each unit constituting the processing device 10, an execution value for instructing the driving of each unit constituting the processing device 10, and an item (hereinafter also referred to as a "request item") requested by the responder 200 of the external server 30 as information on the type of data required for error analysis. The program for executing the control of the processing device 10 includes a program for controlling the processing device 10 based on an identification code read from the communication device 20 and a program for generating an identification code. In this embodiment, the identification code includes a one-dimensional code or a two-dimensional code. The one-dimensional code includes a barcode and the like. The two-dimensional code includes a QR code (registered trademark), a Data Matrix, PDF417 and the like.

[0017] The display unit 13 is, for example, an LCD monitor, and displays an operation screen, an identification code, and the like to the respondent 200 who operates the processing device 10 under the control of the control unit 111. The input unit 14 is a touch panel integrated with the display unit 13, and accepts input instructions from the respondent 200. The input information is notified to the control unit 111. The input unit 14 accepts inputs of setting values, execution instruction values, and the like, based on the input instructions from the respondent 200. The input unit 14 may be a keyboard or a mouse.

[0018] The imaging unit 16 captures an image of the identification code displayed by the communication device 20, and notifies the control unit 111 of the captured image data. The imaging unit 16 is constituted by, for example, a camera.

[0019] The communication device 20 is connected to an external server 30 so as to be able to communicate with the external server 30 via wired or wireless communication. The communication device 20 is, for example, a smartphone, a tablet terminal, a notebook PC (Personal Computer), etc. The communication device 20 includes a control unit 21 (processor), a storage unit 22 (memory), a display unit 23, an input unit 24, a communication unit 25, and an imaging unit 26.

[0020] The control unit 21 generates signals for controlling each part of the communication device 20. The control unit 21 controls the operation of each part of the communication device 20 by reading out a program stored in the storage unit 22 and executing it.

[0021] The storage unit 22 stores various information and programs for executing control of the communication device 20 used in the control unit 21. The programs for executing control of the communication device 20 include a program for transmitting error information based on error information read from the processing device 10, and a program for converting information of an identification code read from the processing device 10 into a character string.

[0022] Display unit 23 is, for example, an LCD monitor, and displays an operation screen, an identification code, and the like to worker 300 who operates communication device 20 under the control of control unit 21. Input unit 24 is a touch panel integrated with display unit 23, and accepts input instructions from worker 300. The input information is notified to control unit 21. Input unit 24 accepts input of setting values, execution instruction values, and the like, based on the input instructions from worker 300. Input unit 24 may be a keyboard or a mouse.

[0023] The communication unit 25 has a communication function and performs communication via the network of the information transmission system 1 under the control of the control unit 21. The communication device 20 transmits and receives data to and from an external server 30 of the information transmission system 1 by performing communication via the communication unit 25.

[0024] The imaging unit 26 captures an image of the identification code displayed by the external server 30, and notifies the control unit 21 of the captured image data. The imaging unit 26 is constituted by, for example, a camera.

[0025] The external server 30 is connected to the communication device 20 so as to be able to communicate with the communication device 20 via wired or wireless communication. The external server 30 is composed of a mail server, a web server, etc. The external server 30 is connected to a manufacturer's PC (not shown) via the Internet, and is accessed from the manufacturer's PC to obtain data. The external server 30 functions as a response unit that is disposed as a transmission destination of error information. The external server 30 includes a control unit 31, a storage unit 32, a display unit 33, an input unit 34, and a communication unit 35.

[0026] The control unit 31 generates signals for controlling each unit of the external server 30. The control unit 31 controls the operation of each unit of the external server 30 by reading out and executing a program stored in the storage unit 32.

[0027] The storage unit 32 stores a program for executing the control of the external server 30 used in the control unit 31 and various information.

[0028] The display unit 33 is, for example, an LCD monitor, and displays an operation screen, an identification code, and the like to the worker 300 who operates the external server 30 under the control of the control unit 31. The input unit 24 is a touch panel integrated with the display unit 33, and accepts input instructions from the worker 300. The input information is notified to the control unit 31. The input unit 34 accepts inputs of setting values, execution instruction values, and the like, based on the input instructions from the worker 300. The input unit 24 may be a keyboard or a mouse.

[0029] The communication unit 35 has a communication function, and performs communication via the network of the information transmission system 1 under the control of the control unit 31. The external server 30 transmits and receives data to and from the communication device 20 of the information transmission system 1 by performing communication via the communication unit 35.

[0030] Next, an information transmission method executed by the information transmission system 1 according to this embodiment will be described. The information transmission method according to this embodiment is preferably executed in the order of step 1, step 2, and step 3. Each step executed in the information transmission method according to this embodiment will be described below.

[0031] The first step in the information transmission method includes executing an error identification code generating step and an error information transmitting step.

[0032] In the error identification code generating step, the processing device 10 generates an error identification code as an identification code indicating error information of the processing device 10 .

[0033] The error information refers to information about an error or abnormal state that occurs during the operation of the processing device 10, and is important data that is useful for identifying and troubleshooting problems. The error information includes, for example, an error code, an error message, information about the time of occurrence, and information about the location of occurrence.

[0034] The error code may include, for example, a number or a string of characters that uniquely identifies a particular error. Identifying the error code may aid in identifying and resolving the problem associated with the fault in the processing device 10.

[0035] The error message includes text information indicating the cause and content of the error, as well as additional detailed information and context information related to the error. The error message may include the status of each unit constituting the processing device 10, a log of related events, a history of the error, etc. Identifying the error message can provide the respondent 200 with an understanding of the error and a method for dealing with it.

[0036] The time of occurrence includes the date and time stamp when the error occurred, providing a time reference point for troubleshooting and identifying the cause of the problem.

[0037] The occurrence location includes the specific location in the processing device 10 where the error occurred, the installation location of the processing device 10 in the factory, the line number of the source code, the log path, etc. By identifying the occurrence location, it is possible to identify the location where the error occurred.

[0038] The error identification code is composed of an identification code including error information. That is, the error information is embedded in the error identification code. For example, the processing device 10 generates a QR code including information such as "2023 / 04 / 17, 10:54:23, error code (E1234), 3rd sheet in full auto" as the error information of the processing device 10 as the error identification code. Also, the fact that the transport arm cannot pull out the workpiece frame specified by the frame from the cassette may be embedded in the error identification code as error information.

[0039] The processing device 10 displays the generated error identification code on the monitor of the display unit 13. For example, the processing device 10 displays a QR code including error information on the monitor of the display unit 13. By displaying the QR code on the display unit 13, it is possible to cause the communication device 20 to read the error information.

[0040] In the error information transmission step, the communication device 20 reads the error identification code and transmits the error information included in the error identification code to the external server 30. For example, when the processing device 10 displays a QR code as an error identification code on the monitor of the display unit 13, the communication device 20 can obtain the error information from the processing device 10 by starting the imaging unit 26 and reading the QR code displayed by the processing device 10 with the imaging unit 26. The communication device 20 converts the information of the error identification code into a character string. The communication device 20 transmits the converted error information to the external server 30 via the communication unit 25. This allows the communication device 20 to easily transmit the error information indicating the error state of the processing device 10 that is not connected to the communication line to the external server 30. Then, the external server 30 can display the error information on the monitor of the display unit 33. For example, since the error information includes information of "2023 / 04 / 17, 10 / 54 / 23, error code (E1234), 3rd wafer in full auto", it is possible to transmit to the responder 200 of the external server 30 that an error with the error code "E1234" occurred while transporting the 3rd wafer in full auto at 10:54:23 on April 17, 2023. This makes it possible to reduce the man-hours of the worker 300 who operates the processing device 10 when transmitting the status of the processing device 10 that is not connected to the outside, such as the external server 30, by a communication line to the external server 30.

[0041] In the second step included in the information transmission method, a request step, a request identification code display step, a request reading step, a response identification code generating step, and a response transmission step are executed.

[0042] In the request step, the external server 30 transmits from the external server 30 to the communication device 20, request items requested by the respondent 200 as information of the type of data required for error analysis in the information recorded in the processing device 10. The request items are items of information required for error analysis in the processing device 10. The request items include items of information required for the respondent 200 to analyze an error, such as a history of the same error occurring within a predetermined period from the most recent time, the number of occurrences or frequency of the same error within a predetermined period, a history of changes in setting data related to the operation of each unit of the processing device that occurred most recently, and information on the number of processed objects such as wafers since the power was last turned on. The external server 30 accepts a request for the request items inputted through the input unit 34 based on the operation of the respondent 200, for example. The external server 30 transmits the request for the request items received from the respondent 200 to the communication device 20 through a communication line such as the Internet.

[0043] In the request identification code display step, the communication device 20 generates a request identification code in response to a request for a requested item transmitted from the external server 30. Then, the communication device 20 displays the generated request identification code on the display unit 23 of the communication device 20.

[0044] The request identification code is composed of an identification code including a data item. That is, the request identification code has embedded therein information on the data item to be checked among the states of the processing device 10. The data item may be a character string.

[0045] In the request step of the above embodiment, the responder 200 who has confirmed the error information of the processing device 10 transmitted from the communication device 20 to the external server may manually specify the item of data to be requested from the processing device 10. Alternatively, an automatic response program recorded in the external server 30 may automatically specify the item of data to be requested from the processing device 10 and transmit the item of data to the communication device 20. In the case of an automatic response program, the external server has a storage unit that records the data item to be requested from the processing device 10 in association with the error information, and a program that requests data from the communication device 20 according to the acquired error information.

[0046] In the above-described embodiment, the external server 30 may request data from the communication device 20 in the form of a character string or a numerical value, and the communication device 20 may generate a request identification code and display it on the display unit 23. Alternatively, the external server 30 may generate a request identification code including items of the requested data, and transmit the information to the communication device 20 in the form of the request identification code.

[0047] In the request reading step, the processing device 10 reads the request identification code with the imaging unit 16 installed in the processing device 10. For example, when the communication device 20 displays a QR code as the request identification code on the display unit 23, the processing device 10 can obtain error analysis information from the communication device 20 by starting the imaging unit 16 and reading the QR code displayed on the communication device 20 with the imaging unit 16.

[0048] In the answer identification code generating step, the processing device 10 generates an answer identification code as an identification code including the data requested by the request identification code.

[0049] The data requested by the request identification code is information of the processing device 10 that, after the request reading step, the processing device 10 picks up from the information stored in the memory unit 112 of the processing device 10 based on the request items included in the request identification code.

[0050] The processing device 10 generates a response identification code based on information picked up based on data requested by the request identification code. The response identification code is composed of an identification code including information picked up based on data requested by the request identification code. That is, the response identification code is embedded with information picked up based on data requested by the request identification code. The picked up information may be a character string. For example, the processing device 10 generates a QR code as a response identification code including information on the occurrence history and frequency of the same error that occurred within a specified period of time picked up based on the request items included in the request identification code, such as "2022 / 12 / 23, 15:23:13" and "2022 / 12 / 20, 11:10:53", the most recent change history of the setting data of each unit of the processing device 10, "the most recent change in the transport data was a change from a pull-out height of 120.0 to 120.5", and information on the number of processed objects such as wafers since the power was last turned on, "312 sheets".

[0051] The processing device 10 displays the generated response identification code on the display unit 13 of the processing device 10. For example, the processing device 10 displays a QR code including information picked up based on the data requested by the request identification code on the monitor of the display unit 13. By displaying the QR code on the display unit 13, it is possible to cause the communication device 20 to read the information picked up based on the data requested by the request identification code.

[0052] In the answer transmission step, the communication device 20 reads the answer identification code and transmits the information picked up based on the data requested by the request identification code to the external server 30. For example, when the processing device 10 displays a QR code as the answer identification code on the monitor of the display unit 13, the communication device 20 activates the imaging unit 26 and reads the QR code displayed by the processing device 10 with the imaging unit 26, thereby obtaining the information picked up based on the data requested by the request identification code from the processing device 10. The communication device 20 has a program for converting the information of the answer identification code into a character string. The communication device 20 transmits the information picked up based on the data requested by the request identification code to the external server 30 via the communication unit 25. This allows the communication device 20 to easily obtain the information picked up by the processing device 10 that is not connected to the communication line based on the data requested by the request identification code at the external server 30. The communication device 20 may transmit the information to the external server 30 in the form of an answer identification code, and the external server 30 may have a program for converting the information of the answer identification code into a character string. The external server 30 can then display the information picked up based on the data requested by the request identification code on the display unit 33. For example, the information picked up based on the data requested by the request identification code includes information on the frequency of occurrence of the same error that occurred most recently, "2022 / 12 / 23, 15:23:13", the most recent change history of the transport data, "the most recent transport data change was a pull-out height change from 120.0 to 120.5", and information on the number of sheets processed since the power was last turned on, "312 sheets". Therefore, it is possible to communicate to the responder 200 of the external server 30 that the reference position was changed by 0.5 mm due to a change in the transport data at 15:23:13 on December 23, 2022. This can reduce the man-hours of the worker 300 who operates the processing device 10 when the processing device 10, which is not connected to the outside by a communication line such as the external server 30, conveys information picked up based on the data requested by the request identification code to the external server 30.

[0053] In the third step included in the information transmission method, an execution command step, an execution identification code display step, and an execution control step are executed.

[0054] In the execution command step, the external server 30 transmits any execution instruction value for controlling the processing device 10 from the external server 30 to the communication device 20. The any execution instruction value for controlling the processing device 10 is a setting value for controlling the behavior of the processing device 10, and an execution value for instructing the driving of each unit constituting the processing device 10. The execution instruction value includes, for example, the setting value and execution value of each unit that drives the processing device 10. The setting value may include, for example, an instruction to return the pull-out height of the transport data by 0.5 mm, that is, a setting value to set the pull-out height to 120.5 mm. The external server 30 accepts, for example, the execution instruction value input through the input unit 34 based on the operation of the respondent 200. The external server 30 transmits the execution instruction value received from the respondent 200 to the communication device 20 through a communication line such as the Internet.

[0055] In the execution identification code display step, the communication device 20 displays, on the display unit 23 of the communication device 20 , an execution identification code including an execution instruction value generated in response to a request from the external server 30 .

[0056] The execution identification code is composed of an identification code including an execution instruction value. That is, the execution identification code has embedded therein an execution instruction value for controlling the processing device 10 desired by the respondent 200. The data item may be a character string, a numerical value, a symbol, or the like.

[0057] In the above-described embodiment, when an error occurs in the processing device 10, the processing device 10 may automatically generate and display an error information identification code to be transmitted to the display unit 13. Also, in the above-described embodiment, the external server 30 may transmit an execution instruction value to the communications device 20 in the form of a character string or a numerical value, and the communications device 20 may generate an execution identification code and display it on the display unit 23. Alternatively, the external server 30 may generate an execution identification code including the execution instruction value and transmit information to the communications device 20 in the form of the execution identification code.

[0058] In the above-described embodiment, the communication device 20 may display on the display unit 23 an execution identification code generated in response to a request from the automatic response program of the external server 30. Alternatively, the communication device 20 may display on the display unit 13 an execution identification code generated in response to a request from the respondent 200 who has confirmed error information from the external server.

[0059] In the execution control step, the processing device 10 reads the execution identification code with the imaging unit 16 installed in the processing device 10. For example, when the communication device 20 displays a QR code as the execution identification code on the display unit 23, the processing device 10 can obtain an execution instruction value from the communication device 20 by starting the imaging unit 16 and reading the QR code displayed on the communication device 20 with the imaging unit 16.

[0060] Next, the processing device 10 controls the processing device 10 based on the execution instruction requested by the control unit 11 of the processing device 10 via the execution instruction value. For example, if the execution instruction value includes a setting value for setting the pull-out height to 120.5 mm by the respondent 200 via the external server 30, the control unit 111 constituting the control unit 11 of the processing device 10 executes control to set the pull-out height to 120.5 mm based on the execution instruction requested by the execution instruction value. In this way, the processing device 10 can change the setting value of the processing device 10 and drive each unit constituting the processing device 10 by including information instructing the execution of a specific process in the execution identification code.

[0061] The storage unit 112 of the processing device 10 may also store a program that outputs a specified data item as an error identification code, a program that rewrites the setting information of each unit, and a command that drives each unit, in association with an error code or an execution instruction requested or obtained from an external server. This allows the information about the data items and the execution instruction value requested by the response unit to be minimized, and the number of one-dimensional codes and two-dimensional codes to be reduced. Based on the execution instruction requested by the execution instruction value, the setting information may be rewritten and each unit may be driven by an automatic response.

[0062] Next, a first step of the information transmission method executed by the information transmission system 1 will be described with reference to FIG.

[0063] First, when an error occurs in the processing device 10, for example, such that the transport arm cannot pull out a frame from the cassette, the control unit 11 generates an alarm on the display unit 13 or the like. When an alarm clear pressing operation is received based on an input instruction to the input unit 14 by the respondent 200 who has confirmed the alarm, the control unit 11 clears the alarm. Then, when a two-dimensional code generation button is clicked based on an input instruction to the input unit 14 by the respondent 200, the processing device 10 generates an error identification code indicating error information (step S11). The processing device 10 displays the generated error identification code on the monitor of the display unit 13 (step S12).

[0064] The communication device 20 reads the error identification code generated by the processing device 10 (step S12), and transmits the error information included in the read error identification code to the external server 30 (step S13).

[0065] The external server 30 receives the error information transmitted from the communication device 20 (step S15), and displays the received error information on the monitor of the display unit 33. The error information displayed on the display unit 33 allows the respondent 200 to easily understand the content of the error information.

[0066] In the first step, an error identification code including error information is displayed on the processing device 10, and the communication device 20 reads the error identification code displayed on the processing device 10, and can transmit the error information included in the error identification code to the external server 30. This makes it possible to easily transmit error information of the processing device 10 that is not connected to a communication line to the external server 30. Then, the respondent 200 can easily grasp the content of the error information transmitted to the external server 30 through the monitor of the display unit 33.

[0067] That is, in the past, when a problem occurred in a processing device 10 that was not connected to a network capable of communicating with an external server 30, it took a lot of man-hours to notify a respondent 200, such as a manufacturer engineer of the processing device 10 or another worker in a remote location, of the status of the processing device 10. In the embodiment relating to the first step, when notifying the external server 30 of the status of a processing device 10 that is not connected to the outside by a communication line, such as the external server 30, to the external server 30, the man-hours of the worker 300 who operates the processing device 10 can be reduced.

[0068] Next, a second step of the information transmission method executed by the information transmission system 1 will be described with reference to FIG.

[0069] First, in the first step, the external server 30, which has received an input instruction to the input unit 14 from the respondent 200 who has grasped the contents of the error information, transmits to the communication device 20 the requested items requested by the respondent 200 as information on the type of data required for analyzing the error (step S31). The communication device 20 generates a request identification code based on the request transmitted from the external server 30 (step S32). The communication device 20 displays the generated request identification code on the monitor of the display unit 23 (step S33).

[0070] The processing device 10 reads the request identification code displayed by the communication device 20 with the imaging unit 16 installed in the processing device 10 (step S34). The processing device 10 picks up relevant information from the information stored in the memory unit 112 of the processing device 10 based on the request item included in the request identification code (step S35).

[0071] The processing device 10 generates a response identification code based on the information picked up based on the data requested by the request identification code (step S36). The processing device 10 displays the generated response identification code on the monitor of the display unit 13 (step S37).

[0072] The communication device 20 reads the response identification code generated by the processing device 10 (step S38), and transmits the information picked up based on the data requested by the request identification code included in the read response identification code to the external server 30 (step S39).

[0073] The external server 30 receives the information picked up based on the data requested by the request identification code transmitted from the communication device 20 (step S40), and displays the information picked up based on the data requested by the received request identification code on the monitor of the display unit 33. From the information picked up based on the data requested by the request identification code displayed on the display unit 33, the respondent 200 can easily grasp the content of the information picked up based on the data requested by the request identification code.

[0074] In the second step, the communication device 20 generates a request identification code corresponding to the request item requested by the external server 30, and displays the generated request identification code on the display unit 23. The processing device 10 reads the request identification code generated by the communication device 20. Then, it generates a response identification code corresponding to the read request identification code, and displays the generated response identification code on the display unit 13. The communication device 20 reads the response identification code generated by the processing device 10 and transmits it to the external server 30. This makes it possible to easily transmit information picked up based on data requested by the request identification code of the processing device 10 that is not connected to the communication line to the external server 30. Then, the responder 200 can easily grasp the content of the information picked up based on data requested by the request identification code transmitted to the external server 30 through the monitor of the display unit 33.

[0075] Next, a third step of the information transmission method executed by the information transmission system 1 will be described with reference to FIG.

[0076] First, in the second step, the external server 30 that has received the request based on an input instruction to the input unit 14 of the respondent 200 who has understood the contents of the requested item transmits an execution instruction value required for the respondent 200 to resolve the error to the communication device 20 (step S51). The communication device 20 generates an execution identification code based on the request transmitted from the external server 30 (step S52). The communication device 20 displays the generated execution identification code on the monitor of the display unit 23 (step S53).

[0077] The processing device 10 reads the execution identification code generated by the communication device 20 with the imaging unit 16 installed in the processing device 10 (step S54). The processing device 10 controls the processing device 10 based on the execution instruction requested by the execution instruction value (step S55).

[0078] In the third step, the execution instruction value for instructing the processing device 10 to execute a specific process is included in the execution identification code read by the processing device 10, so that the settings of the processing device 10 can be changed and the drive of each unit constituting the processing device 10 can be controlled. This makes it possible to instruct the processing device 10 that is not connected to a communication line to execute a specific process. Therefore, the respondent 200 can indirectly cause the processing device 10 to execute a process, thereby reducing the man-hours of the worker who operates the processing device 10. [Explanation of symbols]

[0079] 1: information transmission system, 10: processing device, 11: control unit, 13: display unit, 14: input unit, 16: imaging unit, 20: communication device, 21: control unit, 22: memory unit, 23: display unit, 24: input unit, 25: communication unit, 26: imaging unit, 30: external server, 31: control unit, 32: memory unit, 33: display unit, 34: input unit, 35: communication unit, 111: control unit, 112: memory unit,

Claims

1. An information transmission method for transmitting error information of a processing device that processes a processing object to a response unit, comprising: The processing device comprises: an error identification code generating step of generating an error identification code indicating the error information of the processing device and displaying the error identification code on a display unit of the processing device; A communication device having an imaging unit for reading the error identification code and a communication unit having a communication function. an error information transmission step of reading the error identification code and transmitting the error information contained in the error identification code to the response unit; An information transmission method comprising:

2. a request step of transmitting to the communication device from the response unit the type of data required for analyzing an error in the information recorded in the processing device; a request identification code display step of displaying, on the communication device, a request identification code for requesting transmission of the data generated in response to the request from the response unit in the request step; a request reading step of reading the request identification code with an imaging unit installed in the processing device; a response identification code generating step in which the processing device generates a response identification code including the data requested by the request identification code and displays the response identification code on the display unit of the processing device; a response transmission step in which the communication device reads the response identification code and transmits information included in the response identification code to the response unit; The information transmission method according to claim 1 , comprising:

3. an execution command step of transmitting an arbitrary execution command value for controlling the processing device from the response unit to the communication device; an execution identification code display step of displaying, on the communication device, an execution identification code including the execution instruction value generated in response to a request from the response unit; an execution control step of reading the execution identification code with an imaging unit installed in the processing device, and controlling a control unit of the processing device based on the execution instruction requested by the execution instruction value; The information transmission method according to claim 1 or 2, comprising:

Citation Information

Patent Citations

  • Substrate processing system

    JP2022159797A