Top open type substrate container holding device

Abstract

To provide a top open type substrate container holding device.SOLUTION: A top open type substrate container holding device includes a holding assembly used to be operated to push a substrate actuator, wherein the substrate actuator is provided outside a substrate. The holding assembly includes a holding body, and a pushing actuator, and the pushing actuator includes: a first guide inclined surface which is used for pushing and displacing the substrate corresponding between a second guide inclined surface on an inner surface of a container and the first guide inclined surface by being brought into contact with the second guide inclined surface; and a pushing part which is connected to the first guide inclined surface, correspondingly pushes the substrate actuator according to the degree of pushing displacement of the first guide inclined surface, thereby makes the substrate actuator displace the substrate, and mutually stacks the substrates and positions the substrates.SELECTED DRAWING: Figure 2B

Description

[Technical field]

[0001] The present invention provides a holding device, particularly a holding device for a top-open type substrate container, which can not only stably hold the substrates mounted thereon and prevent damage, but also adjust the number of substrates mounted thereon to suit various requirements. [Background technology]

[0002] In industrial electronic sheet products, such as sheet semiconductor workpieces, such as circuit boards, wafers, and glass, are often housed in containers for protection, mounting, and transportation. The containers carrying sheet semiconductor workpieces of these electronic products and semiconductor process related materials require a properly designed substrate container protection and retention device to prevent damage to the semiconductor workpieces mounted inside the container.

[0003] Common factors that damage the substrates of substrate workpieces include wear, scratches, particle or dust contamination due to vibration or friction, or substrates colliding with each other or breaking due to substrates shaking, jumping, or dropping due to instability of the container or the internal structure of the container. Therefore, the quality and yield of substrates are reduced during the process of loading, transporting, and shipping, and the substrates of semiconductor workpiece products are damaged. Therefore, it is said that the industry has a very high demand for a solution to how to stably hold multiple layers of substrates and avoid problems such as vibration, collision, displacement, and friction between substrates.

[0004] Furthermore, the current standards for the mounting space design of substrate containers are limited to the number of specified substrates stacked, and their functions and sizes are uniform. Substrate containers require new molds to be manufactured according to the number of substrates to be mounted, which not only results in high costs and low utilization rates, but also lacks the function of securely holding substrates.

[0005] In addition, in a conventional substrate container, when the size or quantity of substrates to be loaded is large, the overall weight becomes relatively heavy, and the gate body covering the substrate container may fall due to the weight being concentrated due to the center of gravity during transportation, which may cause deformation of the gate body and adversely affect the airtightness. Therefore, it is an extremely difficult task to provide an invention that can maintain airtightness even when a substrate container is used that loads a relatively heavy weight. Summary of the Invention [Problem to be solved by the invention]

[0006] In view of the above problems, the present invention provides a top-open type substrate container holding device that stably pushes out and fixes multiple layers of substrates, maintains airtightness, and has the multifunctionality of a container that can be shared according to the number of substrates mounted, and also provides a solution to the problems of preventing vibration, movement, and friction between substrates. [Means for solving the problem]

[0007] One embodiment of the present invention comprises: a holding device for a top-open type substrate container, the holding device including a substrate actuator provided on the outside of the substrate, and a holding assembly provided in the storage space and operable to push the substrate actuator, the holding assembly including a holding body provided on the inside of the container body and a push-out actuator provided on the holding body, the push-out actuator including a first inclined guide surface used to push out a second inclined guide surface on the inner surface of the container gate body, and a push-out section correspondingly connected to the first inclined guide surface, the first inclined guide surface pushes out and displaces the substrate actuator correspondingly between the first inclined guide surface and the second inclined guide surface in response to a contact force of the container gate body, the push-out section pushes out the substrate actuator in response to a degree of the push-out displacement of the first inclined guide surface, and the substrate actuator displaces the substrate until the substrates are stacked and positioned on top of each other.

[0008] In one embodiment, the holding body includes an inclined guide groove, and the push-out actuator includes a guide portion connected to the push-out portion, the guide portion being protruded into the inclined guide groove, and the guide portion being displaced in the inclined guide groove correspondingly in response to the contact force of the container gate body, thereby allowing the push-out actuator to move closer to or away from the holding body.

[0009] In one embodiment, the holding assembly further includes an elastic member provided between the holding body and the push-out actuator, and the elastic member is configured to provide an elastic change in displacement of the guide portion along the inclined guide groove in a direction away from the holding body, or in a direction toward the holding body along the inclined guide groove, in response to the contact force of the container gate body.

[0010] In one embodiment, the substrate actuator includes a connection portion fixedly connected to the outside of the substrate, an elastic deformation portion connected to the connection portion, and a first fixed portion provided on one side of the elastic deformation portion, the elastic deformation portion corresponding to the position of the push-out portion and providing a displacement amount for pushing out the substrate according to the degree of push-out displacement of the push-out portion, and the first fixed portion is used to fix a second fixed portion of an adjacent substrate.

[0011] In one embodiment, the bottom of the inner surface of the container body further includes a bottom positioning portion, and the substrate has a substrate positioning member corresponding to the bottom positioning portion, which is used to position the substrate closest to the bottom of the inner surface within the storage space.

[0012] In one embodiment, the bottom of the inner surface of the container body further includes a bottom engaging device, which is used to engage and fix between a substrate closest to the bottom of the inner surface in the storage space and a substrate actuator provided thereon.

[0013] In one embodiment, the upper and lower surfaces of each substrate have stacking fasteners, and adjacent substrates are secured to one another in a layered stack by the stacking fasteners.

[0014] In one embodiment, the support further includes at least one resilient abutment, the resilient abutment being provided on a bottom side of the substrate for resiliently abutting and mounting against a semiconductor workpiece on the substrate.

[0015] In one embodiment, the elastic abutment portion includes a fixed end and an elastic abutment arm, the fixed end is removably mounted on the bottom side of the substrate, one end of the elastic abutment arm is connected to the fixed end, and the other end of the elastic abutment arm elastically presses against the edge surface of the semiconductor workpiece.

[0016] In one embodiment, the inner wall of the container body is provided with error proofing to restrict the orientation of the substrate accommodated in the storage space.

[0017] An embodiment of the present invention provides a holding device for a top-open type substrate container, the holding device comprising: a frame body provided in the storage space for mounting substrates; a plurality of quick release members provided on the outer side of the frame body; and a plurality of displacement portions providing a displacement space for a holding assembly provided in the storage space, each quick release member including an abutment portion and a shoulder portion, the shoulder portions being connected to both sides of the abutment portion, a plurality of fasteners being further provided on an inner wall of the container body, the abutment portion abutting the inner wall, and each fastener being fastened to the shoulder portion to fix the frame body.

[0018] In one embodiment, when the abutment is compressed away from the inner wall, the shoulder disengages from the fastener, thereby allowing the frame body to be removed.

[0019] In one embodiment, the bottom of the inner surface of the container body further includes a bottom positioning portion, the frame body includes a frame positioning member corresponding to the bottom positioning portion, the bottom positioning portion forms a height distance between the frame body and the bottom of the inner surface of the container body by positioning the frame positioning member, and the bottom positioning portion and the fastener are provided at the same horizontal height.

[0020] In one embodiment, the inner wall of the container body is provided with error proofing to restrict the orientation of the frame body received in the storage space.

[0021] An embodiment of the present invention provides a holding device for a top-open type substrate container, the holding device comprising a top-open type substrate container including a container body and a container gate body, the container gate body being arranged to be combined with the container body, the container body having a storage space for storing a latch mechanism, the holding device including at least one flattening member provided in the storage space, the flattening member extending entirely and abutting both opposing inner side walls of the container body, and being provided parallel to the latch mechanism.

[0022] In one embodiment, the flattening member is a carbon rod, and the total height of the carbon rod is less than the total depth of the receiving space. Effect of the Invention

[0023] According to the top-open type substrate container holding device of the present invention, by providing a push-out actuator and an inclined guide tank, when the container gate is closed to the container body, a contact force is simultaneously applied to the push-out actuator, so that the push-out actuator operates and displaces along the direction of the inclined guide tank, and the push-out portion of the push-out actuator displaces toward the substrate, thereby pushing the substrate against the substrate actuator and fixing the substrate, thereby achieving the effect of stably fixing the substrates being loaded and transported. [Brief description of the drawings]

[0024] [Figure 1] 1 is an external perspective view showing a top-open type substrate container in an embodiment of the present invention. [Figure 2A] FIG. 1 is an exploded perspective view showing a schematic diagram of a top-open type substrate container in an embodiment of the present invention. [Figure 2B] FIG. 2 is another exploded perspective view showing a schematic diagram of a top-open type substrate container in an embodiment of the present invention. [Figure 3A] 11A-11C are perspective views illustrating a method of mounting a retention assembly in accordance with an embodiment of the present invention. [Figure 3B] FIG. 2 is a side view of a retention assembly according to an embodiment of the present invention. [Figure 3C] FIG. 2 is a perspective view of a container gate and retention assembly in accordance with an embodiment of the present invention. [Figure 4A] FIG. 2 is a perspective view showing a substrate and a substrate actuator in an embodiment of the present invention. [Figure 4B] FIG. 2 is a partially enlarged top view showing a substrate and a substrate actuator in an embodiment of the present invention. [Figure 4C] FIG. 2 is an exploded perspective view showing a schematic diagram of a substrate, a substrate actuator, and a holding assembly in an embodiment of the present invention. [Figure 4D] FIG. 2 is a perspective view showing an elastic deformation portion of a substrate actuator before deformation in an embodiment of the present invention. [Figure 4E] FIG. 2 is a schematic diagram illustrating a holding assembly prior to extrusion in an embodiment of the present invention. [Figure 4F] FIG. 2 is a schematic diagram showing a holding assembly after extrusion in an embodiment of the present invention. [Figure 5A] FIG. 2 is a perspective view showing an enlarged portion of a stacking and fixing portion of substrates in an embodiment of the present invention. [Figure 5B] FIG. 2 is a perspective view showing a partially enlarged portion of a container body in the embodiment of the present invention. [Figure 5C] FIG. 2 is another perspective view showing a partially enlarged portion of the container body in the embodiment of the present invention. [Figure 6A] 5A to 5C are perspective views each showing a schematic diagram of an assembly method for an elastic contact portion according to an embodiment of the present invention. [Figure 6B] FIG. 4 is a perspective view showing an elastic contact portion in the embodiment of the present invention. [Figure 6C] FIG. 11 is a perspective view showing the elastic contact portion in the embodiment of the present invention from a different viewing angle. [Figure 7A] FIG. 1 is an exploded perspective view showing a schematic diagram of a top-open type substrate container in an embodiment of the present invention. [Figure 7B] FIG. 2 is an exploded perspective view showing a schematic mounting state of a frame body in the embodiment of the present invention. [Figure 8A] FIG. 2 is a plan view showing a frame body and a quick release member according to an embodiment of the present invention. [Figure 8B] FIG. 2 is a schematic diagram showing an enlarged portion of a frame body in the embodiment of the present invention. [Figure 8C] FIG. 2 is a cross-sectional view showing a frame body according to an embodiment of the present invention. [Figure 8D] FIG. 11 is a cross-sectional view showing a schematic diagram of a modified example of the frame body in the embodiment of the present invention. [Figure 8E] FIG. 11 is a cross-sectional view showing a schematic diagram of another modified example of the frame body in the embodiment of the present invention. [Figure 9] FIG. 2 is an exploded perspective view showing a schematic diagram of a container gate body in an embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0025] In order to describe the technical contents of the present invention in detail, the following embodiments will be further described in conjunction with the drawings. It should be noted that in the present text, terms such as "first", "second", "third" and the like are used to distinguish the differences between components, and are not used to limit the components themselves, nor are they used to indicate a specific order of the components. In addition, in the present text, unless a specific quantity is specified, the article "a" refers to one component or more than one component.

[0026] In order to fully understand the objectives, features and advantages of the present invention, the present invention will be described in detail as follows in conjunction with the following specific embodiments and the accompanying drawings.

[0027] Fig. 1 is an external perspective view showing a top-open type substrate container according to an embodiment of the present invention. Fig. 2A is an exploded perspective view showing a top-open type substrate container according to an embodiment of the present invention. Fig. 2B is another exploded perspective view showing another top-open type substrate container according to an embodiment of the present invention, with the viewing angle of the members adjusted for ease of explanation.

[0028] Please refer to Figures 1, 2A and 2B at the same time. A top-open type substrate container 10 to which a top-open type substrate container holding device according to an embodiment of the present invention is applied includes a container body 100 and a container gate body 200. The container gate body 200 is adapted to be combined with the container body 100 to form a receiving space 180. The storage space 180 of the container body 100 is used to store a plurality of substrates 700, which may be a tray for mounting semiconductor workpieces (e.g., wafers or printed circuit boards (PCBs). Of course, the container body 100 can also be applied to store various types of sheet-like substrates and is suitable for storing and mounting sheet products related to industrial electronic components, including, but not limited to, semiconductor workpieces, which are sheet-like products, such as circuit boards, wafers, substrates, and glass. In one embodiment of the present invention, the container gate body 200 is located at the upper opening of the container body 100 to seal the upper opening of the container body 100, and the internal space formed by the container gate body 200 and the container body 100 becomes the storage space 180, which can store a plurality of stacked sheet-like substrates 700.

[0029] As shown in FIG. 2A and FIG. 2B, the substrate 700 can be stored in the container body 100 of the top-open type substrate container 10. In this embodiment, the substrate 700 is described using a tray as an example. The substrate 700 is used to mount and hold sheet-like semiconductor workpieces, and each semiconductor workpiece can be mounted by one substrate 700 alone, and the number of substrates 700 may be one or more. Since the multiple substrates 700 can be aligned and stacked with each other, the mounted semiconductor workpieces can be held and stored in the top-open type substrate container 10 while maintaining a certain distance from each other. It should be noted that the shape of the substrate 700 shown in the drawings is only an example, and any device of any shape structure for mounting a semiconductor workpiece may be a modified version of the substrate 700.

[0030] As shown in FIG. 2A and FIG. 2B, the holding device is applied to a top-open type substrate container 10. The holding device includes a holding assembly 300 and a substrate actuator 400 provided in the container body 100. The substrate actuator 400 is provided outside the substrate 700, and the holding assembly 300 is provided in the storage space 180. The holding assembly 300 is used to push and operate the substrate actuator 400 to hold the substrate 700. The holding assembly 300 includes a holding body 31 and a pushing actuator 320. The holding body 310 is provided inside the container body 100, and the pushing actuator 320 is provided in the holding body 310. The pushing actuator 320 includes a first guide slope 322 and a pushing portion 323. Please also refer to FIG. 3C. The first guide slope 322 is used to abut against the second guide slope 211 of the inner surface 210 of the container gate body 200. The first guide slope 322 is pushed out and displaced between the first guide slope 322 and the second guide slope 211 in response to the contact force of the container gate body 200. The pushing portion 323 is connected to the first guide slope 322, and corresponds to the position of the substrate actuator 400. The pushing portion 323 pushes out and operates the substrate actuator 400 in response to the degree of the pushing displacement of the first guide slope 322, so that the substrate actuator 400 displaces the substrates 700 until the substrates 700 are stacked and positioned on top of each other. In the embodiment of the present invention, the holding assembly 300 further includes an elastic member 330, which will be described later.

[0031] In one embodiment, there are a plurality of holding assemblies 300 (e.g., eight), each of which is provided around the periphery of the container body 100 and faces one side of the receiving space 180. This allows the edges of the substrates 700 to be stably fixed, thereby preventing the substrates 700 from vibrating, shaking, or colliding with each other. Here, the number of holding assemblies 300 can be adjusted according to needs and is not limited here.

[0032] Please refer to Figures 3A to 3C at the same time. Figure 3A is a perspective view showing a method of mounting a retention assembly 300 in an embodiment of the present invention. Figure 3B is a side view of the retention assembly 300 in an embodiment of the present invention. Figure 3C is a perspective view of a container gate and retention assembly in an embodiment of the present invention.

[0033] The holding assembly 300 is provided on an inner mounting portion 120 of the container body 100 facing the inside of the portion where the substrate 700 is stored. The inner mounting portion 120 may be, for example, a recessed groove or an engagement groove, and has an engagement structure for engaging with and fixing the holding body 310 of the holding assembly 300. This allows the holding assembly 300 to be stably fixed, and also allows the holding assembly 300 to be elastically detached and adjustable.

[0034] Here, the operation of the holding assembly 300 will be described in detail. The holding body 310 includes an inclined guide tank 311, and the push-out actuator 320 includes a guide portion 321 connected to the push-out portion 323. The guide portion 321 is protrudingly provided on the inclined guide tank 311, so that the guide portion 321 can move only along the axis of the inclined guide tank 311. Please also refer to FIG. 4C. The elastic member 330 is provided between the holding body 310 and the push-out actuator 320, and the guide portion 321 is protrudingly provided on the inclined guide tank 311, so that the push-out actuator 320 will not fall off even when attached to the holding body 310. During the process of closing the container gate body 200 relative to the container body 100, the inner surface 210 of the container gate body 200 faces the push-out actuator 320, so that the second guide slope 211 pushes the first guide slope 322 of the push-out actuator 320 downward, and the first guide slope 322 pushes out and displaces between the first guide slope 322 and the second guide slope 211 according to the contact force of the container gate body 200. At the same time, the pushing part 323 is connected to the first guide slope 322, so that the pushing part 323 operates correspondingly according to the pushing distance of the first guide slope 322. The first guide slope 322 contacts the second guide slope 211 only at the end points. Not only can the points of action be concentrated, but the contact area can be reduced, so that the problem of dust generation due to friction can be avoided.

[0035] Specifically, the pushing portion 323 corresponds to the position of the substrate actuator 400. The pushing portion 323 displaces the guide portion 321 along the axis of the inclined guide tank 311 (as shown by the arrow direction in FIG. 3B) according to the degree of the pushing displacement of the first guide slope 322 until the guide portion 321 is positioned at the closed end 312 of the inclined guide tank 311, and thus the pushing actuator 320 moves away from the holding body 310. The elastic member 330 is arranged to provide an elastic change amount (elastic stretch) for the guide portion 321 to be displaced in a direction away from the holding body 310 along the inclined guide tank 311 according to the contact force of the container gate body 200. In other words, the guide portion 321 of the pushing actuator 320 performs a process of being guided downward and displaced in the inclined guide tank 311 of the holding body 310, so that the elastic member 330 is gradually stretched, and the pushing actuator 320 moves slightly away from the holding body 310. At this time, the push-out actuator 320 moves towards the substrate actuator 400 which sandwiches the substrate 700 therebetween.

[0036] Conversely, in the process of the container gate 200 opening relative to the container body 100, the elastic member 330 provides an elastic change in displacement (elastic return) as the guide portion 321 moves away from the closed end 312 and along the inclined guide groove 311 toward the holding body 310 in response to the contact force of the container gate 200. In other words, when the container gate 200 is removed, the elastic member 330 releases the elastic displacement energy, and the guide portion 321 of the push-out actuator 320 performs a process of being guided upward in the inclined guide groove 311 of the holding body 310 and displaced, so that the push-out actuator 320 approaches the holding body 310, and the push-out actuator 320 moves away from the substrate actuator 400 and releases the state of contacting the substrate actuator 400. At the same time, when the force on the substrate actuator 400 is released, the deformation of the elastic deformation portion 420 is also released, and the interference between the first fixing portion 410 and the second fixing portion 720 is released, and the stacked substrates 700 are no longer fixed to each other. The first fixing portion 410 of the substrate actuator 400 attached to the bottommost substrate 700 also no longer interferes with the bottom engaging device 110 at the bottom of the container body 100, so that the multiple substrates 700 can be freely removed one by one or all at once by a machine stand, a robot arm, or manual means.

[0037] In this way, due to the elastic locking and releasing mechanism for the substrate 700, the top-open type substrate container 10 equipped with the holding device of the present invention has many advantages, such as simple and intuitive operation and less error-proneness. An operator or an automatic machine can stably and effectively lock and fix the substrate 700 by simply covering the container gate body 200 without requiring any additional operation steps. Moreover, the substrate 700 can be naturally restored to a non-interference state by simply removing the container gate body 200.

[0038] The elastic member 330 is provided, for example, on the opposite side of the push-out actuator 320 to the holding body 310 , one end of the elastic member 330 is fixed to the holding body 310 , and the other end of the elastic member 330 is pressed against the push-out actuator 320 .

[0039] The slope normal vector of the first guide slope 322 is parallel to the slope normal vector of the second guide slope 211, i.e., they have the same slope angle. The angle and size of the second guide slope 211 are designed to match the first guide slope 322. The slope length of the first guide slope 322 is equal to the displacement stroke length of the inclined guide tank 311. Thus, by providing the second guide slope 211 on the container gate body 200, when the container gate body 200 presses the push-out actuator 320 vertically, the first guide slope 322 can be displaced synchronously in the process of the push-out actuator 320 displacing along the inclined guide tank 311, so that it is possible to ensure that the push-out actuator 320 provides a stable downward acting force.

[0040] The first guide inclined surface 322 of the push-out actuator 320 and the second guide inclined surface 211 of the container gate body 200 may have other structural forms. In addition, structures that can slide to fit together and contact each other with a smaller contact area are also within the scope of protection of the present invention.

[0041] The operational relationship between the holding assembly 300 and the substrate actuator 400 and the detailed structure of the substrate actuator 400 will be described next. Please refer to Figs. 4A to 4F at the same time. Fig. 4A is a perspective view showing the substrate and substrate actuator in an embodiment of the present invention. Fig. 4B is a partially enlarged top view showing the substrate and substrate actuator in an embodiment of the present invention. Fig. 4C is an exploded perspective view showing the substrate, substrate actuator and holding assembly in an embodiment of the present invention. Fig. 4D is a perspective view showing an elastically deformable portion of the substrate actuator before deformation in an embodiment of the present invention. Fig. 4E is a schematic view showing the holding assembly before extrusion in an embodiment of the present invention. Fig. 4F is a schematic view showing the holding assembly after extrusion in an embodiment of the present invention. Figs. 4E and 4F are cross-sectional views taken along line A-A' in Fig. 1.

[0042] The substrate actuator 400 is applied as a buffer elastic member for buffering, sandwiching and fixing between the push-out actuator 320 and the substrate 700. The substrate actuator 400 includes a connection portion 430, an elastic deformation portion 420 and a first fixing portion 410. The connection portion 430 is fixedly connected to the outside (e.g., edge) of the substrate 700. The connection portion 430 is located at both ends of the elastic deformation portion 420 and is fixedly connected to the outside of the substrate 700 in a sandwiching manner. The elastic deformation portion 420 is connected to the connection portion 430 and is arranged to correspond to the position of the push-out portion 323. The first fixing portion 410 is provided on one side (e.g., a lower position) of the elastic deformation portion 420, and the first fixing portion 410 is used to fix the second fixing portion 720 of the adjacent substrate 700.

[0043] When the push-out actuator 320 receives the contact force of the container gate 200, moves away from the holding body 310, and applies the contact force in the direction of the elastic deformation part 420, the elastic deformation part 420 corresponds to the position of the push-out part 323, and the elastic deformation part 420 elastically deforms the substrate 700 according to the push-out displacement level of the push-out part 323 to provide a push-out displacement amount. In other words, the push-out part 323 of the push-out actuator 320 is pressed against the elastic deformation part 420, and the elastic deformation part 420 displaces toward the second fixing part 720 of the adjacent substrate 700 in conjunction with the first fixing part 410, and until the container gate 200 completely closes the container body 100, the elastic deformation part 420 receives the maximum contact force and fixes the first fixing part 410 on the second fixing part 720 of the adjacent substrate 700. Since the storage space 180 is used to accommodate multiple substrates 700, through the coordinated operation between the holding assembly 300 and the substrate actuator 400, each first fixing portion 410 is fixed sequentially to an adjacent substrate 700 layer by layer, thereby achieving the effect of positioning the multiple substrates 700 in a stacked manner.

[0044] According to the above-mentioned operating principle, the push-out actuator 320 applies a force to the elastic deformation portion 420 of the substrate actuator 400, so that the first fixing portion 410 and the second fixing portion 720 of the multiple stacked substrates 700 are combined and connected to each other, thereby providing an effect of positioning each of the substrates 700. When the container gate 200 covers the container body 100, the pushing operation of the push-out actuator 320 is stopped. The topmost substrate 700 does not need to carry a semiconductor workpiece, so as to reduce the risk of damaging the substrate.

[0045] The elastically deformable elastic portion 420 provides the substrate actuator 400 with excellent deformation elasticity and cushioning effect. Therefore, when the push-out actuator 320 is about to come into contact with the substrate actuator 400, the substrate actuator 400 can fix the substrate 700 appropriately and stably.

[0046] As a result, not only can the substrate 700 connected and fixed by the substrate actuator 400 be stably fixed by the abutment of the push-out actuator 320 of the holding assembly 300, but adjacent substrates 700 can also be abutted and fixed at the same time, thereby providing the effect of stably locking a plurality of substrates 700 stacked in layers. Furthermore, since each substrate 700 has a corresponding substrate actuator 400, which allows each substrate 700 to be abutted and fixed, it is possible to provide the effect of all substrates 700 in the top-open type substrate container 10 being stably sandwiched and fixed to each other, and friction or collision of the substrates 700 due to shaking or vibration of the container body 100 is not generated.

[0047] The elastic deformation portion 420 can realize the engagement and connection between the first fixing portion 410 and the second fixing portion 720 without requiring an excessive stroke. Furthermore, due to the structural feature of the engagement and connection, in addition to the horizontal abutment and fixation, the engagement structure itself can further provide vertical engagement and fixation, thereby increasing the strength of the abutment and fixation.

[0048] Please refer to Figures 5A to 5C. Figure 5A is a perspective view showing a partially enlarged portion of a stacking and fixing portion 710 of a substrate 700 in an embodiment of the present invention. Figure 5B is a perspective view showing a partially enlarged portion of a container body 100 in an embodiment of the present invention. Figure 5C is another perspective view showing a partially enlarged portion of a container body 100 in an embodiment of the present invention.

[0049] The inner surface bottom 190 of the container body 100 further includes a bottom positioning member 130, which is used to engage and fix the substrate 700 closest to the inner surface bottom 190 in the storage space 180 and the substrate actuator 400 provided thereon. The bottom positioning member 130 is preferably installed at an inner edge corner of the storage space 180, so that each corner of the substrate 700 can be stably fixed and positioned. The installation position and number of the bottom positioning members 130 are naturally not limited, and as long as they can be adapted to the shape of the substrate 700, they fall within the technical scope of the present invention. The upper and lower surfaces of each substrate 700 have corresponding stacking fixing parts 710, and adjacent substrates 700 are stacked and fixed to each other in layers by the stacking fixing parts 710. The stacking fixture 710 of the substrate 700 closest to the bottom inner surface 190 can simultaneously fit over the bottom positioning member 130 to align and secure the bottom positioning member 130 in position with the bottom positioning member 130 .

[0050] The container body 100 further includes a bottom engaging device 110 below the inner mounting portion 120 to which the holding assembly 300 is attached. The bottom engaging device 110 is provided so as to come into contact with the first fixing portion 410 of the substrate actuator 400 corresponding to the substrate 700 located in the bottommost layer, and stably holds the substrate 700 in the bottommost layer. The bottom engaging device 110 has a barbed hook structure, and engages with and fixes the first fixing portion 410 corresponding to the substrate 700 in the bottommost layer, thereby strengthening the fixation between all the substrates 700 and the container body 100.

[0051] An error proofing member 170 is provided on the inner wall of the container body 100. The error proofing member 170 is used to restrict the direction of the substrate 700 accommodated in the storage space 180. The error proofing member 170 is, for example, a protruding columnar structure, which corresponds to the concave structure of the edge of the substrate 700, thereby enabling the substrate 700 to be placed in the container body 100 in a position with a correct orientation.

[0052] The stacking fixing part 710 may be a concave-convex structure, which can provide the effect of positioning and accurate stacking. It should be noted that the stacking fixing part 710 is not limited to the concave-convex structure, but may be any other stackable structure for positioning that is easily conceivable according to the present invention. Other types of structures and principles other than applied mechanics may be used, such as stacking all the substrates 700 on each other by magnetic force, to stack the substrates 700 in vertical alignment with each other and reduce the side-to-side shaking between the substrates 700.

[0053] Please refer to Figures 6A to 6C at the same time. Figure 6A is a perspective view that shows a schematic assembly method of the elastic contact part 500 in the embodiment of the present invention. Figure 6B is a perspective view that shows the elastic contact part 500 in the embodiment of the present invention. Figure 6C is a perspective view that shows the elastic contact part 500 in the embodiment of the present invention from a different viewing angle.

[0054] The holding device further includes an elastic abutment portion 500 provided on the bottom side of the substrate 700 (e.g., the bottom side of the edge of the substrate 700). The elastic abutment portion 500 is used to elastically abut the semiconductor workpiece 800 mounted on the substrate 700, for example, to elastically press the edge surface of the semiconductor workpiece 800 mounted on the adjacent substrate 700 in a plane close to the edge of the substrate 700. The elastic abutment portion 500 elastically abuts and presses the semiconductor workpiece 800 mounted on the adjacent substrate 700 below, thereby preventing the semiconductor workpiece 800 from being displaced. The substrate 700 located at the top does not need to carry the semiconductor workpiece 800, and the elastic abutment of the elastic abutment portion 500 can sufficiently fix the semiconductor workpiece 800 mounted on the adjacent substrate 700 below by utilizing its pressing force. As a result, when the substrates 700 are stacked in layers, the elastic abutment portion 500 can provide abutment and fixation of the semiconductor workpiece 800 mounted on the substrate 700, thereby reducing or preventing displacement, vibration, and friction between the substrates 700 or the semiconductor workpiece 800.

[0055] The elastic abutment part 500 includes a fixed end 510 and an elastic abutment arm 520. The fixed end 510 is detachably provided adjacent to the bottom side of the edge of the substrate 700, one end of the elastic abutment arm 520 is connected to the fixed end 510, and the other end of the elastic abutment arm 520 elastically presses the edge surface of the semiconductor workpiece 800. The elastic abutment arm 520 extends from the fixed end 510 toward both ends and elastically abuts the edge surface of the semiconductor workpiece 800. Thus, the horizontal point contact can stably abut the substrate 700 while reducing the friction area.

[0056] The structural design and operation of the holding device according to the present invention, which is capable of adjusting the number of different substrates mounted, will now be described. Please refer to Figs. 7A to 8E at the same time. Fig. 7A is an exploded perspective view showing a top-open type substrate container in an embodiment of the present invention. Fig. 7B is an exploded perspective view showing a mounting state of a frame body in an embodiment of the present invention. Fig. 8A is a plan view showing a frame body and a quick release member in an embodiment of the present invention. Fig. 8B is a schematic view showing an enlarged portion of the frame body in an embodiment of the present invention.

[0057] The holding device according to the present invention is applied to a top-open type substrate container 10. The same structures, functions, and part numbers of the top-open type substrate container 10, substrate actuator 400, and holding assembly 300 used in the present invention will not be described again, and only the differences will be described. In this embodiment, only the holding device of the novel structure according to the present invention will be described to solve the problem that the top-open type substrate container 10 with a single function and size lacks elasticity due to the weight and loading number restrictions. This application solves the problem that when the number of substrates 700 to be loaded is less than the predetermined loading number of the container, the substrates 700 cannot be effectively pressed because there is no filler in the space between the top of the container body 100 and the container opening, and are easily damaged by shaking, vibration, and jumping in the container body 100. Therefore, it is possible to achieve an effect of solving the problem that the container body 100 can usually only load a preset number of substrates 700 and cannot load more or less than that number of substrates 700.

[0058] First, the detailed structural design of the holding device will be described. The holding device includes a frame body 600, a plurality of quick release members 610, and a plurality of displacement parts 620. The frame body 600 is provided in the storage space 180 and is used to mount the substrate 700. The frame body 600 includes a frame positioning member 631, and the container body 100 includes a support member 140. The support member 140 can be designed to various heights in the storage space 180, and functions as a bottom positioning member of the frame body 600 according to the mounting position of the frame body 600. This allows the frame body 600 to be raised to a certain height from the inner surface bottom 190 of the storage space 180. The frame positioning member 631 and the support member 140 are fixed to fit together, thereby providing the functions of weight support and position restriction. The support member 140 may be a protruding structure, and the design of the shape structure is not limited here, and is used to be engaged with the frame positioning member 631, thereby restricting the position of the frame body 600. The container body 100 includes a support auxiliary member 160, which can provide weight support and positional constraints to mate with the frame body 600.

[0059] The multiple quick release members 610 are provided on the outer side (e.g., edge) of the frame body 600, and each quick release member 610 includes an abutment portion 611 and a shoulder portion 612 on the opposite side. The shoulder portion 612 is connected to both sides of the abutment portion 611. The inner side wall of the container body 100 is further provided with multiple fasteners 150, and the abutment portion 611 abuts the inner side wall, and each fastener 150 is fastened to the shoulder portion 612 to fix the frame body 600. The multiple displacement portions 620 provide a displacement space for the holding assembly 300 provided in the storage space 180, so that there is no need to adjust the original structural features or structure of the container body 100 in response to the frame body 600.

[0060] An anti-misalignment member 170 is provided on the inner wall of the container body 100, which is used to restrict the orientation of the frame body 600 housed in the storage space 180. The anti-misalignment member 170 is, for example, a protruding columnar structure, which can accommodate a concave structure at the edge of the frame body 600, allowing the frame body 600 to be installed in the container body 100 in a correct orientation.

[0061] Each quick release member 610 is provided on an edge of the frame body 600 and includes a displacement structure. The abutment portion 611 is connected to the frame body 600 and bent downward to form an elastic pressing hook that is hooked at the end. The end of the pressing hook may have a flat surface to increase the pressing area against the container body 100. The shoulder portion 612 is located at the end of the abutment portion 611 and has both ends protruding compared to the flat surface of the pressing hook, so that the position can be limited within the fastener 150 of the container body 100. When the abutment portion 611 is pressed and separated from the inner wall by a certain distance, the shoulder portion 612 separates from the fastener 150, and the frame body 600 becomes removable.

[0062] The shoulder portion 612 may be an annular structure or a semi-annular structure, which provides an engagement and positioning structure with a deformation buffering function, and also provides a tool-responsive force for releasing the engagement and fixing, so that it can be detached from the fastener 150. The abutment portion 611 can be adjusted to have a high hardness depending on the structure or material, so that the frame body 600 can be easily removed by human error, which can prevent the type and number of substrates 700 to be mounted in the subsequent manufacturing process from being incorrect. It should be noted that this embodiment is not limited to the structure and shape of the quick release member 610 and the fastener 150, and any structure that engages and fixes the frame body 600 in the container body 100 falls within the technical scope of the present patent invention.

[0063] There are various installation methods for the frame body 600 provided in the storage space 180. For example, the frame body 600 includes a raised mounting surface 650 for mounting the substrate 700, so that the mounting plane for mounting the substrate 700 can be made higher. In other words, the height of the frame body 600 from the inner surface bottom 190 of the storage space 180 can be increased, so that the number of substrates 700 to be mounted can be reduced and the substrates 700 to be mounted can be moved closer to the container gate body 200.

[0064] In addition, in one embodiment, the frame body 600 includes a recessed mounting surface 660 used for mounting the substrate 700, which allows the mounting plane of the mounted substrate 700 to be further lowered compared to the height of the original mounting mat. In other words, the height of the frame body 600 from the inner surface bottom 190 of the storage space 180 can be lowered, so that the number of substrates 700 that can be mounted can be increased. Thus, the various modified raised mounting surfaces 650 and recessed mounting surfaces 660 of the frame body 600 allow the frame body 600 to be more flexibly applied to substrates 700 of various types, sizes, and thicknesses, and the versatility of the top-open type substrate container 10 can be significantly improved.

[0065] According to the frame body 600 of the holding device provided in the embodiment of the present invention, when a small amount of substrates 700 is loaded, the substrates 700 can be brought closer to the container opening and the overall center of gravity can be raised. This not only enhances safety and stability by preventing the substrates 700 from easily shaking within the frame body 600, but also provides the effect of enabling substrates 700 of different types, sizes, and thicknesses to be effectively loaded on one size of container body 100.

[0066] The frame body 600 includes a stacking alignment portion 640 used to hold and fix the substrate 700, which is used to mount the semiconductor workpiece 800. As described above, the substrate 700 has the stacking fixing portions 710 on the upper and lower surfaces, and the stacking alignment portion 640 is designed according to the structural or functional features of the stacking fixing portion 710, so that the substrate 700 can be fixed to the frame body 600 and its position can be restricted. The structural features of the frame body 600 are provided on both the front and rear surfaces of the frame body 600, so that the frame body 600 can be inserted and fixed into the container body 100 on any surface, while maintaining its structural function on both sides, which greatly improves the convenience of use.

[0067] The frame body 600 according to the present invention not only solves the problem that the container body 100 is easily shaken when only a small number of substrates 700 are transported when the substrates 700 to be mounted are raised, but also further raises the center of gravity of the whole container, so that the top-open type substrate container 10 can be safely and effectively transported and shipped even when the substrates 700 are very heavy. Furthermore, the frame body 600 according to the present invention solves the problem that a new mold for the top-open type substrate container 10 needs to be manufactured to fit various types and standards of substrates 700 so that the top-open type substrate container 10 can be designed to accommodate substrates 700 of various types, sizes, thicknesses, and density standards. The frame body 600 provided by the present invention allows the top-open type substrate container 10 of a single functional size to be applied to substrates 700 of different types, sizes, thicknesses, and density standards by redesigning only the frame body 600, thereby greatly reducing production costs and improving usage efficiency.

[0068] 9 is an exploded perspective view showing a container gate to which a holding device according to an embodiment of the present invention is applied. The holding device according to the present invention is adapted to a top-open type substrate container 10. The same structures, functions, and part numbers in the top-open type substrate container 10, substrate actuator 400, and holding assembly 300 used in the present invention will not be described again, and only the differences will be described. In this embodiment, only the holding device having a novel structure according to the present invention will be described, which has the function of still maintaining airtightness even under the condition of a top-open type substrate container 10 in which the container gate 200 carries a large weight.

[0069] The holding device according to the present invention includes at least one flattening member 240. The container gate 200 includes a gate shell 250 and a gate panel 220. The gate panel 220 is used to combine with the gate shell 250 to form a storage space 251. The storage space 251 is used to accommodate the latch mechanism 230. The flattening member 240 is provided in the storage space 251, and the flattening member 240 extends to abut the two opposing inner walls of the container gate 200 (i.e., the two opposing inner walls of the gate shell 250), and the flattening member 240 is provided parallel to the latch mechanism 230. The flattening member 240 is a carbon rod, and the height of the carbon rod as a whole is lower than the total depth of the storage space 251. The flattening member 240 may be made of a material having high rigidity, light weight, and elasticity.

[0070] The flattening member 240 provides structural support and distribution of force transmission to the gate shell 250 by its extended length extending to abut two opposing inner side walls, thus providing structural reinforcement and uniform pressure effect to the gate shell 250. The flattening member 240 is provided at the carrying position of the adjacent container gate 200, for example, at the ears 252 at both ends as shown in FIG.

[0071] Thus, by providing the flattening member 240 in the container gate 200 of the holding device, the pressure points of the flattening member 240 are concentrated on the latch mechanism 230 and the locking points of the container body 100 during loading and transporting of the container gate 200, and the large pressure of the ears on both sides can be distributed to the gate shell 250 by the extension length of the flattening member 240. Furthermore, it is possible to solve the problem that the top-open type substrate container 10 has a limited loading weight, and at the same time, it is possible to solve the problem that the container gate 200 of the top-open type substrate container 10 is likely to be distorted or deformed during frequent transportation and loading and transporting when the loading weight reaches an upper limit, which affects the airtightness and even leads to the container gate 200 being deformed and separated, resulting in falling off or damage.

[0072] Furthermore, since the weight of the flattening member 240 is much lighter than the weight of the latch mechanism 230, the problem of the flattening member 240 being attached to each part of the container gate 200 in order to stably lock the top-open type substrate container 10 can be solved. In this way, when the top-open type substrate container 10 is transferred, the load of the lifting can be distributed by the latch mechanisms 230, improving the deformation of the gate body. However, since it is necessary to use the latch mechanisms 230, not only does the weight of the top-open type substrate container 10 as a whole increase, but the assembly becomes complicated and the manufacturing cost also increases. In addition, the design of the container gate 200 and the latch mechanisms 230 is difficult to distribute the load. However, since the flattening member 240 according to the present invention is much lighter than the latch mechanism 230, the flattening member 240 can solve the problem of the flattening member 240 deforming the container gate 200 when a small number of latch mechanisms 230 is maintained, and the lightweight member can improve the airtightness of the gate body.

[0073] In one embodiment of the present invention, multiple latch mechanisms 230 can be installed, which can increase the number of locking positions and adjust to various structures. For example, two latch mechanisms 230 can be installed to effectively achieve a balance between locking and weight distribution.

[0074] In one embodiment of the present invention, there are multiple flattening members 240, which can provide different positions, different compression structural support and force distribution for the gate shell 250. The multiple flattening members 240, for example, two, are fixed on both sides of the gate shell 250, which can evenly distribute the compression of the edges of the gate shell 250 and enhance the structural support and compression distribution of the ears 252 of the gate shell 250.

[0075] In one embodiment of the invention, the extended length of the flattening member 240 runs from one end of the gate shell 250 to the other and is extruded onto two opposite inner side walls of the container gate 200. This completely distributes the forces across the entire length of the gate shell 250 and provides structural support to the entire gate shell 250.

[0076] In one embodiment of the present invention, the flattening member 240 and the latch mechanism 230 are arranged in parallel, which provides force distribution and structural support for the locking position near the latch mechanism 230. The parallel arrangement of the flattening member 240 and the latch mechanism 230 can uniformly distribute the pressure points of the ears 252 and the locking pressure points of the latch mechanism 230 in the vicinity, and also benefits the space distribution design within the gate shell 250. The flattening member 240 and the latch mechanism 230 are arranged symmetrically, which can prevent the container gate 200 from shifting or deforming by providing symmetrical support structure and pressure distribution.

[0077] In one embodiment of the present invention, the latch mechanism 230 includes a control member 231 and a latch arm 232. The control member 231 controls the latch arm 232 to selectively protrude out of the gate shell 250 so as to lock the container gate 200 to the container body 100, or controls the latch arm 232 to retract so as to release the lock between the container gate 200 and the container body 100. The control member 231 is, for example, a cam, and the latch arm 232 connected to the cam is driven to protrude or retract by rotating the cam. The flattening member 240 and the latch arm 232 of the latch mechanism 230 are arranged in parallel, which provides force distribution and structural support near the locking position of the latch arm 232 and the container gate 200, and can uniformly distribute the pressure points of the ears 252 and the locking pressure points of the latch arms 232 in the vicinity, and at the same time, it is also beneficial to the space distribution design in the gate shell 250, so that the flattening member 240 and the latch arms 232 can be reduced in overlapping state, the extension length of the flattening member 240 can be maintained, and structural support and force distribution can be effectively achieved. It should be noted that the number and positions of the flattening member 240 and the latch mechanism 230 are not limited to those illustrated in this embodiment.

[0078] According to the flattening member 240 of the holding device provided in the embodiment of the present invention, the flatness of the gate shell 250 is strengthened by distributing the overall load of the container gate 200 by the flattening member 240, and thus it is possible to prevent the occurrence of gaps in the airtight tape between the container gate 200 and the container body 100, while at the same time increasing the strength of the container gate 200 and achieving flatness and airtightness. Furthermore, the flattening member 240 can replace a part of the latch mechanisms 230, so that the number of the latch mechanisms 230 can be minimized. This not only reduces the overall weight of the container gate 200, but also reduces the wear of parts and reduces production costs.

[0079] In this way, the holding device of the present invention not only can firmly and stably fix the substrates loaded into a top-open type substrate container to prevent the substrates from shaking or colliding with each other, but also can maintain stability when loading different quantities of substrates to avoid harm caused by shaking or an excessively low center of gravity, and can maintain the structural strength and airtightness of the container gate body to keep the substrates inside the container gate body clean and reduce the risk of them falling, and further has the effect of protecting the substrate container loaded therein.

[0080] Although the present invention has been described above with better embodiments, the above embodiments are merely used to explain the present invention for those skilled in the art, and should not be construed as limiting the scope of the present invention. It should be noted that any equivalent modification or replacement of the above embodiments should be understood to be included in the scope of the present invention. Therefore, the scope of protection of the present invention is as defined in the claims, and the claims should be interpreted in the broadest sense so as to include all amendments, similar designs and processes therein. [Explanation of symbols]

[0081] 10 Top-open type substrate container 100 Container body 110 Bottom engagement tool 120 Inside mounting part 130 Bottom positioning member 140 Support material 150 Fasteners 160 Support auxiliary parts 170 Anti-displacement member 180 Storage space 190 Inner surface bottom 200 Container gate body 210 Inner surface 211 Second guide slope 220 Gate Panel 230 Latch mechanism 231 Control members 232 Latch Arm 240 Flattening member 250 Gate shell 251 Storage space 252 Ears 300 Retaining Assembly 310 Holding body 311 Inclined guide tank 320 Push-out actuator 321 Guide part 322 First guide slope 323 Extrusion section 330 Elastic Members 400 Substrate Actuator 410 First fixed part 420 Elastic deformation part 430 Connection 500 Elastic contact part 510 Fixed end 520 Elastic contact arm 600 Frame Body 610 Quick release parts 611 Contact part 612 Shoulder section 620 Displacement section 631 Frame positioning member 640 Stacking Alignment Section 650 Raised mounting surface 660 Recessed mounting surface 700 Substrates 710 Stacking Fixture 720 Second fixed part 800 Semiconductor Workpieces

Claims

1. A top-open type substrate container includes a container body and a container gate body, the container gate body is combined with the container body to form a storage space, and the storage space is used to store a plurality of substrates. A holding device for a top-open type substrate container, The holding device comprises: A substrate actuator provided outside the substrate; a holding assembly configured to press the substrate actuator and disposed in the storage space; The retention assembly includes: A holding body provided inside the container body; A push-out actuator provided on the holding body, The push actuator is a first inclined guide surface used for pushing out a second inclined guide surface on the inner surface of the container gate; a push-out portion that connects the substrate actuator to the first guide inclined surface, the first guide inclined surface is pushed out and displaced so as to correspond between the first guide inclined surface and the second guide inclined surface in response to a contact force of the container gate body, A holding device for a top-open type substrate container, characterized in that the pushing section pushes the substrate actuator in accordance with the degree of pushing displacement of the first guide inclined surface, thereby causing the substrate actuator to displace the substrates until a plurality of the substrates are stacked on top of each other and positioned.

2. The holding body includes an inclined guide groove, and the pushing actuator includes a guide portion connected to the pushing portion, 2. The holding device according to claim 1, wherein the guide portion is provided in a protruding manner in the inclined guide groove, and the guide portion is displaced in the inclined guide groove in response to the contact force of the container gate body, thereby causing the push-out actuator to approach or move away from the holding body.

3. The holding assembly further includes an elastic member provided between the holding body and the pushing actuator, 3. The holding device according to claim 2, wherein the elastic member is provided to provide an elastic change in displacement of the guide portion along the inclined guide groove in a direction away from the holding body, or in a direction toward the holding body along the inclined guide groove, in response to the contact force of the container gate body.

4. The substrate actuator includes: a connection portion fixedly connected to the outer side of the substrate; an elastic deformation portion connected to the connection portion; A first fixing portion provided on one side of the elastic deformation portion, the elastic deformation portion corresponds to a position of the push-out portion and provides a displacement amount for pushing out the substrate according to a degree of push-out displacement of the push-out portion; The holding device according to claim 1 , wherein the first fixing portion is used to fix the second fixing portion of the adjacent substrate.

5. The bottom of the inner surface of the container body further includes a bottom positioning portion; the substrate has a substrate positioning member corresponding to the bottom positioning portion; 2. The holding device of claim 1, wherein the bottom positioning portion is used to position the substrate in the storage space closest to a bottom of the inner surface.

6. The bottom of the inner surface of the container body further includes a bottom engaging device, The holding device according to claim 1, characterized in that the bottom engaging device is used to engage and fix the substrate closest to the bottom of the inner surface in the storage space and the substrate actuator provided thereon.

7. 2. The holding device according to claim 1, wherein upper and lower surfaces of each of the substrates have stacking fasteners, and adjacent substrates are stacked and fastened to each other in layers by the stacking fasteners.

8. 2. The holding device of claim 1, further comprising at least one resilient abutment, the resilient abutment being provided on a bottom side of the substrate for resiliently abutting against and mounting a semiconductor workpiece on the substrate.

9. The elastic abutment portion includes a fixed end and an elastic abutment arm, the fixed end is removably provided on the bottom side of the substrate; 9. The holding device of claim 8, wherein one end of the elastic abutment arm is connected to the fixed end, and the other end of the elastic abutment arm elastically presses against an edge surface of the semiconductor workpiece.

10. 2. The holding device according to claim 1, wherein an anti-misalignment member is provided on an inner wall of the container body to restrict a direction of the substrate accommodated in the storage space.

11. A top-open type substrate container includes a container body and a container gate body, the container gate body is combined with the container body to form a storage space, and the storage space is used to store a plurality of substrates. A holding device for a top-open type substrate container, The holding device comprises: a frame body provided in the storage space for mounting the substrate; A plurality of quick release members each provided on an outer side of the frame body; a plurality of displacement portions that provide a displacement space for the holding assembly provided in the storage space; Each of the quick release members includes an abutment portion and a shoulder portion. The shoulder portions are connected to both sides of the abutment portion, The container body further includes an inner wall provided with a plurality of fasteners, The abutment portion abuts against the inner wall, 2 is a perspective view of a substrate container holding device according to the first embodiment of the present invention; FIG. 3 is a perspective view of a substrate container holding device according to the first embodiment of the present invention;

12. The retaining device according to claim 11, characterized in that when the abutment portion is compressed away from the inner wall, the shoulder portion moves away from the fastener, thereby allowing the frame body to be removed.

13. The bottom of the inner surface of the container body further includes a bottom positioning portion, the frame body includes a frame positioning member corresponding to the bottom positioning portion, The holding device according to claim 11, characterized in that the bottom positioning portion forms a height distance between the frame body and the inner surface bottom of the container body by positioning the frame positioning member, and the bottom positioning portion and the fastener are provided at the same horizontal height.

14. The holding device according to claim 11, characterized in that an anti-shift member for restricting a direction of the frame body accommodated in the storage space is provided on an inner wall of the container body.

15. A holding device for a top-open type substrate container, the holding device including a container body and a container gate body, the container gate body being arranged to be combined with the container body, the container body having a storage space for storing a latch mechanism, The holding device includes at least one flattening member disposed in the receiving space, 2. A holding device for a top-open type substrate container, wherein the flattening member extends entirely and abuts against both opposing inner side walls of the container body, and is disposed parallel to the latch mechanism.

16. the flattening member is a carbon rod; 16. The holding device of claim 15, wherein the total height of the carbon rod is less than the total depth of the receiving space.

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