Substrate support structure

The substrate support structure addresses the limitations of existing fixing methods by employing a dual-supported part with an elastic body to resonate at distinct frequencies, effectively reducing substrate vibration and facilitating easy fixation.

JP2025012058APending Publication Date: 2025-01-24DENSO CORP +1
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Patent Information

Application Number
JP2023114594
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2023-07-12
Publication Date
2025-01-24

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Abstract

To provide a substrate support structure that supports a substrate and can reduce vibrations of the substrate.SOLUTION: In a substrate support structure 10, an elastic body 24 is provided between a substrate 12 and a housing member 22. The elastic body 24 is connected to the housing member 22 between a first position fixing portion 221 and a second position fixing portion 222 of the housing member 22, and is connected to the substrate 12 between a first supported portion 121 and a second supported portion 122 of the substrate 12. The substrate 12 and the housing member 22 together form a substrate composite 30. The substrate composite 30 generates resonance due to the inclusion of the housing member 22, and resonance due to the inclusion of the substrate 12. Furthermore, a first resonance frequency, which occurs when the substrate composite 30 resonates due to the inclusion of the housing member 22, is lower than a second resonance frequency, which occurs when the substrate composite 30 resonates due to the inclusion of the substrate 12.SELECTED DRAWING: Figure 1
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Citation Information

Patent Citations

  • Substrate fixing structure

    JP2015023087A