Correction jig

Abstract

To provide a correction jig which can make a plurality of measurement target elements face different directions without requiring a plurality of operation controls.SOLUTION: The present invention relates to a correction jig 300A for correcting a measurement device for measuring the three-dimensional shape of a measurement target W. The correction jig includes: a plurality of measurement target elements 331; a frame part 340 to which the measurement target elements are attached; and a mechanism part 400 for moving the frame part. The mechanism part 400 includes: a rotary mechanism 405 for rotating the frame part 340 around a first axis; a first swing mechanism 410 for swinging the frame part 340 around a second axis perpendicular to the first axis; and a second swing mechanism 420 for swinging the frame part 340 around a third axis perpendicular to the first axis and the second axis.SELECTED DRAWING: Figure 11

Description

[Technical field]

[0001] The present invention relates to a calibration jig. [Background technology]

[0002] There is known a measuring device that includes multiple imaging devices and that measures the three-dimensional shape of a measurement object in a non-contact manner based on the results of imaging the measurement object from multiple directions (see, for example, Patent Document 1). In such a measuring device, the multiple imaging devices image the same calibration jig, or the multiple imaging devices image a calibration jig of known dimensions, thereby calibrating the device. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2019-507885 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the conventional calibration jig, there is a problem that the multiple elements to be measured provided on the calibration jig cannot be oriented in various directions. In addition, it is desirable not to require complicated operation control when operating the multiple elements to be measured.

[0005] Therefore, the present invention has been made in consideration of these points, and aims to provide a calibration jig that can orient multiple measured elements in a desired direction without requiring complex operational control. [Means for solving the problem]

[0006] One form of the calibration jig of the present invention is a calibration jig for calibrating a measuring device for measuring the three-dimensional shape of a measurement object, and comprises a plurality of elements to be measured, a frame portion to which the plurality of elements to be measured are attached, and a mechanism for moving the frame portion, the mechanism comprising a rotation mechanism for rotating the frame portion around a first axis, a first oscillation mechanism for oscillating the frame portion around a second axis perpendicular to the first axis, and a second oscillation mechanism for oscillating the frame portion around a third axis perpendicular to the first axis and the second axis.

[0007] The mechanism may have a support member that supports the frame portion, and the first oscillating mechanism may have a first movable part connected to the support member and a first linear actuator that moves the first movable part, and may be configured such that the support member oscillates around the second axis when the first linear actuator moves the first movable part.

[0008] The second oscillating mechanism may have a second movable part connected to the support member and a second linear actuator that moves the second movable part, and may be configured such that the second linear actuator moves the second movable part, causing the support member to oscillate around the third axis.

[0009] The connecting portion between the first movable part and the support member and the connecting portion between the second movable part and the support member may be ball joints, the centers of the multiple ball joints may be located in a plane perpendicular to the first axis, and the swing center of the support member may also be located in the plane.

[0010] The first movable part may have a first connecting arm, the ball joint being provided at one end of the first connecting arm, and the other end of the first connecting arm being connected to the first linear actuator, and the first connecting arm and the first linear actuator may be connected by a knuckle joint that supports the first connecting arm rotatably around a single axis.

[0011] The second movable part may have a second connecting arm, the ball joint being provided at one end of the second connecting arm, the other end of the second connecting arm being connected to the second linear actuator, and the second connecting arm and the second linear actuator may be connected by a knuckle joint that supports the second connecting arm rotatably around a single axis.

[0012] The rotation mechanism may have a driving source that generates a driving force to rotate the frame portion, the first linear actuator and the second linear actuator may be arranged at a first position in a direction along the first axis, and the driving source of the rotation mechanism may be arranged at a second position closer to the support member than the first position in the direction along the first axis.

[0013] The frame portion may have a spherical or ellipsoidal shape with a plurality of the elements to be measured provided on its surface, and at least a portion of the mechanism portion may be arranged to be located inside the sphere or ellipsoid of the frame portion.

[0014] The frame portion may be provided such that the center of the sphere or ellipsoid is located at a swing center that is an intersection of the second axis and the third axis.

[0015] The mechanism may have a shape that fits within an outer shape of the frame when the mechanism and the frame are projected in the direction of the first axis.

[0016] The element to be measured may have a main body portion of a predetermined shape, and a label portion provided on the main body portion or a member attached to the main body portion and displaying an identification code for identifying the element to be measured. Effect of the Invention

[0017] According to the present invention, it is possible to provide a calibration jig that can orient a plurality of elements under test in a desired direction without requiring complex operational control. [Brief description of the drawings]

[0018] [Figure 1] 1 shows an example of the configuration of a measurement system. [Diagram 2] An example is shown in which a measurement device is equipped with a calibration jig. [Diagram 3] 2 shows an example of the configuration of a control unit. [Figure 4] 4 shows an example of an operation flow of the measurement device. [Diagram 5] 1 shows a first configuration example of a calibration jig. [Figure 6] 2 shows an example of the configuration of a device to be measured. [Figure 7] 13 shows a second configuration example of the calibration jig. [Figure 8] FIG. 1 is a side view of a calibration jig according to an embodiment of the present invention. [Figure 9] 9 is a diagram showing a state in which a frame member is removed from the calibration jig in FIG. 8. FIG. [Figure 10] FIG. 2 is a perspective view of the calibration jig with a frame member removed. [Figure 11] 13 is a perspective view of the calibration jig with the frame member removed, as viewed from another direction. FIG. [Figure 12] 13 is an enlarged view of a structure for supporting a frame portion in a swingable manner in the mechanism portion. FIG. [Figure 13] 11 is a diagram showing the positional relationship between a frame portion and a swing center. FIG. [Figure 14] 11A and 11B are diagrams illustrating the swinging of a support member and a frame portion supported by the support member; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] <Example of measurement system S configuration> 1 shows an example of the configuration of a measurement system S according to this embodiment. The measurement system S includes a measurement device 10 and a calibration jig 30.

[0020] The measuring device 10 irradiates light from multiple directions onto a measurement object W (hereinafter also referred to as workpiece W) arranged in a three-dimensional space, and receives the reflected light to measure the three-dimensional shape of the measurement object W. The measuring device 10 also irradiates light from multiple directions onto a calibration jig 30 arranged in a three-dimensional space, and receives the reflected light to identify calibration parameters used for its own calibration. The measuring device 10 includes a stage 110, a moving section 120, an optical unit 130, and a control unit 140.

[0021] The stage 110 carries a measurement target W. When the measurement system S calibrates the measurement device 10, the stage 110 carries a calibration jig 30. The stage 110 is configured to be movable in a plurality of predetermined directions. In this embodiment, an example will be described in which the stage 110 is configured to be movable in a first direction and a second direction different from the first direction. The first direction and the second direction are, for example, perpendicular to each other.

[0022] For example, the stage 110 has a function of an XY stage that is movable in the X and Y directions on an XY plane. In this case, the first direction is the X or Y direction, and the second direction is the Y or X direction.

[0023] Moreover, the stage 110 is configured to be rotatable around a plurality of predetermined directions as axes. In this embodiment, an example will be described in which the stage 110 is configured to be rotatable around a third direction and a fourth direction different from the third direction as axes. The third direction and the fourth direction are, for example, perpendicular to each other. Here, the first direction and the third direction may be the same, and the second direction and the fourth direction may be the same.

[0024] For example, the stage 110 has a function of a rotation stage that can rotate about an axis in the X direction and a function of a rotation stage that can rotate about an axis in the Y direction. In this case, the third direction is the X direction or the Y direction, and the fourth direction is the Y direction or the X direction. Note that the measuring device 10 only needs to be configured to be able to move the calibration jig 30, and instead of the stage 110, a movable arm or the like that can move the calibration jig 30 while fixing it may be provided.

[0025] The moving unit 120 moves the stage 110. In other words, when the stage 110 has a measurement target W mounted thereon, the moving unit 120 moves the measurement target W. Furthermore, when the stage 110 has a calibration jig 30 mounted thereon, the moving unit 120 moves the calibration jig 30. The moving unit 120 has an actuator such as a motor, and moves the stage 110 in a first direction or a second direction. Furthermore, the moving unit 120 rotates the stage 110 around an axis in the third direction. Similarly, the moving unit 120 rotates the stage 110 around an axis in the fourth direction.

[0026] The optical unit 130 has a light source 131 and an imaging section 132. The light source 131 irradiates light onto the measurement object W. The light source 131 has at least one of a halogen lamp, an LED, a laser, or the like. The light source 131 is, for example, a projector that irradiates light of a predetermined pattern. The light irradiated from the light source 131 is reflected by the measurement object W. The imaging section 132 receives the reflected light from the measurement object W and images the measurement object W. The imaging section 132 has a camera capable of capturing still images, videos, and the like. The imaging section 132 may have multiple cameras.

[0027] The optical units 130 are provided at different positions in the measurement device 10. In other words, the light sources 131 irradiate different regions of the measurement target W with light, and the imaging units 132 image different regions of the measurement target W, respectively. The imaging units 132 of the optical units 130 image different parts of the measurement target W, for example. In this case, it is desirable that the optical units 130 are arranged so that the overall configuration of the measurement target W can be grasped by combining the imaging results of the imaging units 132. In this embodiment, for the sake of simplicity, an example in which two optical units 130 are arranged will be described, but the present invention is not limited to this. Three or more optical units 130 may be arranged.

[0028] The control unit 140 controls the moving section 120 and the optical unit 130. When the stage 110 is carrying the measurement object W, the control unit 140 acquires an imaging result of the measurement object W by the imaging section 132 from the optical unit 130, and measures the three-dimensional shape of the measurement object W based on the acquired imaging result. When the stage 110 is carrying the calibration jig 30, the control unit 140 acquires an imaging result of the calibration jig 30 by the imaging section 132 from the optical unit 130, and identifies calibration parameters to be used for calibrating the measuring device 10 based on the acquired imaging result. The control unit 140 will be described later.

[0029] The calibration jig 30 has a plurality of elements to be measured 31 of a predetermined shape, and is a jig for calibrating the measuring device 10. In this embodiment, an example will be described in which the calibration jig 30 has the elements to be measured 31 on its upper surface. It is desirable that the calibration jig 30 is provided with the plurality of elements to be measured 31 so that the plurality of elements to be measured 31 are within the field of view of the imaging section 132 of one optical unit 130 when the calibration jig 30 is mounted on the stage 110.

[0030] Fig. 2 shows an example in which the measuring device 10 according to this embodiment is equipped with the calibration jig 30. Fig. 2 shows an example in which a first measured element 31a is included in a field of view 133a of a first imaging section 132a of a first optical unit 130a, and a second measured element 31b is included in a field of view 133b of a second imaging section 132b of a second optical unit 130b.

[0031] In this embodiment, an example has been shown in which different elements 31 are included in the field of view 133a of the first imaging section 132a and the field of view 133b of the second imaging section 132b, but the present invention is not limited to this. For example, a part or all of the first element 31a may be included in the field of view 133a of the first imaging section 132a, and a part or all of the first element 31a may be included in the field of view 133b of the second imaging section 132b.

[0032] Each optical unit 130 can image the measured element 31 in the field of view by irradiating the calibration jig 30 with light from the light source 131 and capturing an image with the imaging section 132. Then, the control unit 140 acquires the image capturing result from the imaging section 132 and measures the three-dimensional shape of the measured element 31. The measured element 31 has a predetermined size and a predetermined shape. The measured element 31 may be formed with predetermined dimensions. Furthermore, the measured elements 31 may each have a different shape, mark, color, etc. In this embodiment, an example will be described in which the measured element 31 has a spherical shape, and the control unit 140 measures the center position of the sphere.

[0033] Here, the dimensions and positional relationship of the multiple elements under measurement 31 provided on the calibration jig 30 may be known in advance. In this case, the control unit 140 can calibrate the measuring apparatus 10 by comparing the known dimensions and positional relationship of the elements under measurement 31 with the measurement results of the three-dimensional shape of the elements under measurement 31. For example, the control unit 140 specifies, as calibration parameters, coefficients or the like to be multiplied with the measurement results of the three-dimensional shape of the elements under measurement 31 so that the measurement results of the three-dimensional shape of the elements under measurement 31 match the dimensions and positional relationship of the elements under measurement 31.

[0034] However, in the case of a measuring device 10 for measuring a large measurement target, the calibration jig 30 also becomes large, which can make it difficult to measure precise dimensions. Also, in the case of a measuring device 10 for measuring a complex measurement target, the shape, arrangement, etc. of the calibration jig 30 becomes complex, which can make it difficult to measure precise dimensions.

[0035] On the other hand, even if the dimensions of such a calibration jig 30 can be measured, the dimensions may fluctuate due to environmental changes, or may be subject to impacts, causing dimensional deviations, making it difficult to easily calibrate the measuring device 10. Therefore, the measuring system S according to this embodiment makes it possible to calibrate the measuring device 10 even when using a calibration jig 30 in which the dimensions and positional relationship of multiple elements to be measured 31 are unknown. The control unit 140 of such a measuring device 10 will be described next.

[0036] <Configuration example of control unit 140> 3 shows an example of the configuration of the control unit 140 according to this embodiment. The control unit 140 is, for example, a computer. The control unit 140 includes a communication unit 210, a storage unit 220, a display unit 230, and a control unit 240.

[0037] The communication unit 210 communicates with the moving unit 120 and the optical unit 130. The communication unit 210 transmits, for example, a control signal for moving the measurement target W or the calibration jig 30 to the moving unit 120. The communication unit 210 may also transmit a control signal for controlling the light source 131 and the imaging unit 132 to the optical unit 130. The communication unit 210 may receive an imaging result of the imaging unit 132 from the optical unit 130.

[0038] The communication unit 210 communicates via a dedicated connection line, a communication network, etc. The communication unit 210 may function as an interface for connecting to a communication network such as an Internet line, a wireless LAN, or a mobile phone network.

[0039] The storage unit 220 is a storage medium including, for example, a read only memory (ROM) and a random access memory (RAM). The storage unit 220 may also include a large-capacity storage device such as a hard disk drive (HDD) and / or a solid state drive (SSD). For example, when a computer functions as the control unit 140, the storage unit 220 may store information such as an operating system (OS) that causes the computer to function, and programs. The storage unit 220 may also store various information including data referenced when a program is executed.

[0040] The storage unit 220 may also store intermediate data, calculation results, thresholds, reference values, parameters, etc. that are generated (or used) by the control unit 140 during the operation process. The storage unit 220 may also supply the stored data to a request source in response to a request from each section in the control unit 140.

[0041] Display unit 230 displays information related to the measurement by measurement device 10. Display unit 230 displays information such as measurement conditions, measurement items, and measurement results. Display unit 230 may also display the communication state of control unit 140, the OS, the execution state of applications, and the like. Display unit 230 is, for example, a liquid crystal display or the like, a monitor, or the like.

[0042] The control unit 240 controls each unit of the measuring device 10. For example, the control unit 240 transmits and receives various information via the communication unit 210. The control unit 240 is, for example, a CPU (Central Processing Unit). The control unit 240 controls the moving unit 120 and the imaging unit 132 to measure the three-dimensional shape of the measurement target W based on the imaging results of the multiple imaging units 132.

[0043] The control unit 240 has a signal output unit 241, an acquisition unit 242, a measurement unit 243, a rotation matrix identification unit 244, and a translation vector identification unit 245. In other words, the CPU executes a program stored in the storage unit 220 to function as the control unit 240 having the signal output unit 241, the acquisition unit 242, the measurement unit 243, the rotation matrix identification unit 244, and the translation vector identification unit 245.

[0044] The signal output unit 241 outputs a control signal for controlling each unit of the measurement device 10 to the communication unit 210. The signal output unit 241 outputs, for example, a control signal for controlling the light source 131 and the imaging unit 132 of the optical unit 130. As an example, the signal output unit 241 outputs a control signal for causing the light source 131 of the one optical unit 130 to emit light in a predetermined pattern, and a control signal for causing the imaging unit 132 of the one optical unit 130 to capture an image. As a result, the communication unit 210 transmits the control signal to the one optical unit 130, and the one optical unit 130 captures an image of a subject (for example, the measured element 31) in the field of view.

[0045] Furthermore, the signal output unit 241 outputs a control signal for driving the moving unit 120. The signal output unit 241 may output a control signal for displaying information or the like on the display unit 230. The signal output unit 241 may generate a control signal corresponding to an operation purpose, or may output a control signal of a predetermined signal pattern. The signal pattern of the control signal may be stored in the storage unit 220.

[0046] The acquisition section 242 acquires data of an image captured by the imaging section 132 of the optical unit 130 as an imaging result. The acquisition section 242 may store the acquired imaging result of the imaging section 132 in the storage section 220. The acquisition section 242 may also acquire information on the current position of the stage 110.

[0047] The measuring unit 243 measures the three-dimensional shape of the measurement object W or the calibration jig 30 based on the imaging results of the imaging unit 132 acquired by the acquiring unit 242. The measuring unit 243 measures, for example, the length of a predetermined portion of the measurement object W, the dimensions of a predetermined shape, etc. By using the imaging results of the multiple imaging units 132, the measuring unit 243 can also measure the length and shape of a predetermined portion of the measurement object W that cannot fit within the field of view of one imaging unit 132. The operation of the measuring unit 243 to measure the three-dimensional shape of the measurement object W from the imaging results of the multiple imaging units 132 is known, so a detailed description will be omitted here.

[0048] The rotation matrix identifying unit 244 identifies a rotation matrix used for calibrating the measurement device 10. The translation vector identifying unit 245 identifies a translation vector used for calibrating the measurement device 10. The operations of the rotation matrix identifying unit 244 and the translation vector identifying unit 245 will be described next.

[0049] <An example of an operation flow of the measuring device 10> Fig. 4 shows an example of an operation flow of the measurement device 10 according to this embodiment. The measurement device 10 executes the operations from S51 to S66 shown in Fig. 4 to identify calibration parameters used for its own calibration. Although the measurement device 10 is configured to include multiple optical units 130, this operation flow will be simplified and an operation example using the first optical unit 130a and the second optical unit 130b will be described.

[0050] First, the measuring device 10 calibrates each optical unit 130 before calibrating the measuring device 10 using the calibration jig 30. In this case, the measuring device 10 calibrates each optical unit 130 using a reference jig that is smaller in size than the calibration jig 30. The size of the reference jig is, for example, large enough to fit within the field of view of the imaging section 132 included in one optical unit 130.

[0051] The reference jig has a plurality of reference measurement elements whose dimensions and / or positional relationship are known. As an example, the reference measurement elements have substantially the same shape as the measured element 31. Alternatively, the reference jig may have a shape whose dimensions are known. Such a small reference jig is a commonly used jig whose dimensions change little over time and is easy to handle. Calibration of each optical unit 130 using such a reference jig is known, so the calibration operation will be briefly described here.

[0052] First, a reference jig is mounted on stage 110 of measuring device 10 (S51). A plurality of reference jigs may be mounted on stage 110, or alternatively, a single reference jig may be mounted. When a plurality of reference jigs are mounted on stage 110, it is desirable to arrange the plurality of reference jigs so that they are within the field of view of each of optical units 130. Then, control unit 240 performs calibration for each optical unit 130 (S52).

[0053] For example, the control unit 240 captures an image of the reference jig with the first imaging unit 132a of the first optical unit 130a, and calibrates a first coordinate indicating a coordinate position in the field of view 133a of the first imaging unit 132a based on the imaging result of the first imaging unit 132a. Then, the control unit 240 specifies a first coefficient by which to multiply the measurement result of the three-dimensional shape of the reference measuring element of the reference jig so that the measurement result of the three-dimensional shape of the reference measuring element coincides with the known dimensions and positional relationship of the reference measuring element.

[0054] Next, the control unit 240 captures an image of the reference jig with the second imaging unit 132b of the second optical unit 130b, and calibrates second coordinates indicating a coordinate position in the field of view 133b of the second imaging unit 132b based on the imaging result of the second imaging unit 132b. Note that when one reference jig is mounted on the stage 110, for example, when the calibration of the first optical unit 130a is completed, the control unit 240 moves the stage 110 so that the reference jig is included in the field of view of the second optical unit 130b to be calibrated next, and then starts the calibration of the second optical unit 130b.

[0055] The control unit 240, similar to the calibration of the first optical unit 130a, specifies a second coefficient by which to multiply the measurement result of the three-dimensional shape of the reference measurement element based on the imaging result of the second imaging unit 132b so that the measurement result of the three-dimensional shape of the reference measurement element based on the imaging result of the second imaging unit 132b matches the known dimensions and positional relationship of the reference measurement element. As described above, the control unit 240 calibrates each of the multiple optical units 130. The control unit 240 may store the specified coefficient in the storage unit 220.

[0056] Next, the stage 110 of the measuring device 10 mounts the calibration jig 30 (S53). Next, the control unit 240 captures an image of the calibration jig 30 placed at the first reference position (S54). The first reference position is a predetermined position, such as the initial position of the stage 110. For example, it is desirable that the positional relationship between the calibration jig 30, the multiple optical units 130, and the first reference position is determined in advance so that multiple elements to be measured 31 of the calibration jig 30 fall within the fields of view 133 of the multiple imaging units 132 when the calibration jig 30 is placed at the first reference position.

[0057] The control unit 240, for example, moves the stage 110 to place the calibration jig 30 at a first reference position. Then, the control unit 240 turns on the light sources 131 of the multiple optical units 130 and then images the calibration jig 30 with the imaging unit 132. As a result, at the first reference position, among the multiple measured elements 31 included in the calibration jig 30, the first imaging unit 132a images the first measured element 31a, and the second imaging unit 132b, which is different from the first measured element 31a, images the second measured element 31b, which is different from the first imaging unit 132a.

[0058] Next, the control unit 240 moves the calibration jig 30 in a predetermined first direction from the first reference position (S55). The control unit 240 moves, for example, the stage 110 in the first direction by a predetermined distance. Note that it is desirable for the control unit 240 to move the stage 110 in the first direction within a range in which a plurality of elements to be measured 31 of the calibration jig 30 are included in the fields of view of the plurality of imaging units 132.

[0059] Then, the control unit 240 images the calibration jig 30 using the multiple optical units 130 (S56). The control unit 240 turns on the light sources 131 of the multiple optical units 130 and then images the calibration jig 30 with the imaging unit 132. As a result, the first imaging unit 132a images the first measured element 31a that has moved in the first direction, and the second imaging unit 132b images the second measured element 31b that has moved in the first direction.

[0060] Next, the control unit 240 moves the calibration jig 30 from the first reference position in a predetermined second direction different from the first direction (S57). For example, the control unit 240 returns the stage 110 to the first reference position and then moves it a predetermined distance in the second direction. Alternatively, the control unit 240 may move the stage 110 a predetermined distance in the second direction and then return it in the direction opposite to the first direction by the distance moved in S55.

[0061] Alternatively, the control unit 240 may move the stage 110 a predetermined distance in the second direction and subtract the distance moved in S55 from the measurement result. It is desirable that the control unit 240 moves the stage 110 in the second direction within a range in which a plurality of elements to be measured 31 of the calibration jig 30 are included in the fields of view of the plurality of imaging units 132.

[0062] Then, the control unit 240 captures an image of the calibration jig 30 using the multiple optical units 130 (S58). The control unit 240 captures an image of the calibration jig 30 by the same operation as in S56. As a result, the first imaging unit 132a captures an image of the first measured element 31a that has moved in the second direction, and the second imaging unit 132b captures an image of the second measured element 31b that has moved in the second direction.

[0063] Next, the control unit 240 captures an image of the calibration jig 30 placed at the second reference position (S59). The second reference position is a predetermined position, for example, an initial position of the stage 110. The second reference position is a position where, like the first reference position, a plurality of elements to be measured 31 of the calibration jig 30 fall within the fields of view 133 of the imaging units 132 when the calibration jig 30 is placed at the second reference position.

[0064] For example, the control unit 240 moves the stage 110 to the second reference position, and then captures an image of the calibration jig 30 with the imaging unit 132 in the same manner as in the operation of S54. The second reference position may be a position after the calibration jig 30 is moved in the second direction. In this case, the operation of S59 will have the same result as the operation of S58, so the operation of S59 may be omitted. The second reference position may be the same position as the first reference position, and in this case, the result of the operation of S59 will be the same as the result of the operation of S54, so the control unit 240 may simply move the calibration jig 30 to the second reference position.

[0065] Next, the control unit 240 rotates the calibration jig 30 in a predetermined direction around a predetermined third direction as an axis (S60). The control unit 240 rotates the stage 110 by a predetermined angle θ within a range in which a plurality of elements to be measured 31 of the calibration jig 30 are included in the fields of view 133 of the plurality of imaging units 132, for example.

[0066] Then, the control unit 240 captures an image of the calibration jig 30 using the multiple optical units 130 (S61). The control unit 240 captures an image of the calibration jig 30 by the same operation as in S56. As a result, the first imaging unit 132a captures an image of the first measured element 31a after it has been rotated about the third direction as an axis, and the second imaging unit 132b captures an image of the second measured element 31b after it has been rotated about the third direction as an axis.

[0067] Next, the control unit 240 rotates the calibration jig 30 in a predetermined direction around a predetermined fourth direction different from the third direction as an axis (S62). For example, the control unit 240 returns the stage 110 by a predetermined angle θ around the third direction as an axis, and then rotates the stage 110 by a predetermined angle φ around the fourth direction as an axis within a range in which a plurality of elements to be measured 31 of the calibration jig 30 are included in the fields of view 133 of the plurality of imaging units 132.

[0068] Alternatively, the control unit 240 may rotate the stage 110 by a predetermined angle φ around the fourth direction as an axis, and then return it by a predetermined angle θ around the third direction as an axis. Alternatively, the control unit 240 may rotate the stage 110 by a predetermined angle φ around the fourth direction as an axis, and subtract from the measurement result the amount of rotation by the predetermined angle φ around the fourth direction as an axis.

[0069] Then, the control unit 240 captures an image of the calibration jig 30 using the multiple optical units 130 (S63). The control unit 240 captures an image of the calibration jig 30 by the same operation as in S61. As described above, the control unit 240 outputs a control signal from the signal output unit 241 to move the calibration jig 30, while capturing images of the measured elements 31 by the multiple imaging units 132 before and after the movement of the calibration jig 30. Then, the acquisition unit 242 acquires the imaging results of the imaging units 132.

[0070] 4, an example in which the control unit 240 executes the movement of the calibration jig 30 in the first direction, the movement in the second direction, the rotation by the angle θ, and the rotation by the angle φ in this order has been described, but the present invention is not limited to this. The control unit 240 may execute the movement of the calibration jig 30 in the first direction, the movement in the second direction, the rotation by the angle θ, and the rotation by the angle φ in an order different from that shown in FIG.

[0071] Next, the control unit 240 specifies the coordinate position of the measured element 31 for each position to which the calibration jig 30 has been moved based on the imaging results of the multiple imaging units 132 (S64). For example, the measurement unit 243 specifies a first coordinate position indicating the position of the first measured element 31a in the first coordinate based on the field of view of the first imaging unit 132a in the multiple captured images captured by the first imaging unit 132a. The measurement unit 243 also specifies a second coordinate position indicating the position of the second measured element 31b in the second coordinate based on the field of view of the second imaging unit 132b in the multiple captured images captured by the second imaging unit 132b. After the operation of S64 in FIG. 4, the rotation matrix specification unit 244 of the control unit 240 specifies a rotation matrix for rotating the coordinates such that the direction in which the first coordinate position has moved and the direction in which the second coordinate position has moved match each other before and after the movement of the calibration jig 30 in the first and second directions (S65). In FIG. 4, after the operation of S65, the translation vector determination unit 245 determines a translation vector for translating the coordinates so that the distance between the first measured element 31a and the second measured element 31b matches before and after the rotation of the calibration jig (S66).

[0072] <Configuration example of calibration jig 300> 5 shows a first configuration example of the calibration jig 300 according to this embodiment. In the calibration jig 300 shown in FIG. 5, parts that operate substantially the same as those in the calibration jig 30 according to this embodiment shown in FIG. 2 are given the same reference numerals, and duplicated explanations will be omitted. In other words, the calibration jig 300 functions as the calibration jig 30 shown in FIG. 2. The calibration jig 300 may be formed as a reference jig for performing calibration for each optical unit 130. The calibration jig 300 includes a plurality of elements to be measured 31 and a frame portion 40.

[0073] A plurality of elements to be measured 31 are attached to the frame portion 40. Fig. 5 shows an example in which the frame portion 40 is a plate-shaped member, but the present invention is not limited to this. The frame portion 40 may be any member capable of fixing the elements to be measured 31, and may be a rod-shaped member or the like.

[0074] Fig. 5 shows an example in which a first measured element 31a is included in a field of view 133a of a first imaging section 132a of a first optical unit 130a, and a second measured element 31b is included in a field of view 133b of a second imaging section 132b of a second optical unit 130b, similar to Fig. 2. Note that Fig. 5 shows fewer measured elements 31 than Fig. 2, but more measured elements 31 may be attached to the frame section 40.

[0075] <Configuration example of the measured element 31> 6 shows an example of the configuration of a measured element 31 according to this embodiment. As shown in FIG. 6(A), the measured element 31 has a main body 32, a label part 33, and a plate-like member 34. The main body 32 has a predetermined shape. The shape of the main body 32 is, for example, a body of revolution such as a sphere, an ellipsoid, or a cylinder. Alternatively, the shape of the main body 32 may be a polyhedron.

[0076] 6 shows an example in which a plurality of label parts 33 are attached to a plate-like member 34 by a known method such as printing or pasting, and the label parts 33 are provided to the main body part 32 via the plate-like member 34. It is desirable that the label parts 33 are provided in as many places as possible on the main body part 32. For example, the main body part 32 has a plurality of plate-like members 34, and the plurality of label parts 33 are provided in a plurality of different positions on the main body part 32 to the extent that at least one label part 33 is included in the captured image when the measured element 31 is captured from various angles.

[0077] The plate-shaped member 34 is a band-shaped member provided around the main body 32. A plurality of label units 33 may be provided on the plate-shaped member 34. It is desirable that a plurality of label units 33 are provided on the front and back surfaces of the plate-shaped member 34. FIG. 6 shows an example in which four label units 33 are provided on one surface of the plate-shaped member 34. In this way, the label units 33 may be provided on the plate-shaped member 34, or alternatively or in addition, the label units 33 may be provided on the main body 32 other than the plate-shaped member 34.

[0078] Fig. 6(B) shows an example in which one label unit 33 displayed between L1 and L2 of the plate-like member 34 shown in Fig. 6(A) is displayed in a rectangular shape. The label unit 33 has, for example, a recognition code 35 and an identification code 36.

[0079] The recognition code 35 is a code common to the multiple measured elements 31 for recognizing the label portion 33. The identification code 36 is a code for identifying the measured element 31. It is desirable that the recognition code 35 and the identification code 36 are codes of different shapes or different types. For example, the identification code 36 is composed of a combination of basic parts of a predetermined first shape, and the recognition code 35 is composed of a combination of basic parts of a predetermined second shape that is different in size from the first shape.

[0080] 6 shows an example in which the recognition code 35 and the identification code 36 are displayed as barcodes with different line widths. As an example, the minimum line width d of the recognition code 35 is half the minimum line width D of the identification code 36. Furthermore, the recognition code 35 and the identification code 36 each indicate a predetermined value. As an example, the recognition code 35 indicates a predetermined 8-bit value (01010101), and the identification code 36 indicates a predetermined 8-bit value (01001010).

[0081] <Second Configuration Example of Calibration Tool 300> 7 shows a second configuration example of the calibration jig 300 according to this embodiment. Second Configuration Example This calibration jig 300 shows an example in which the frame portion 40 has a spherical or ellipsoidal shape. At least a part of the frame portion 40 may be configured to have a spherical or ellipsoidal shape by combining a plurality of rod-shaped members or the like. Furthermore, the frame portion 40 may have a member having at least a part of the shape of a sphere or an ellipsoid.

[0082] The frame unit 40 has, for example, a plurality of arc-shaped bar-shaped members 41, a columnar member 42, and a pedestal 43. The plurality of bar-shaped members 41 may be attached to the columnar member 42 so as to be rotatable about the columnar member 42 as an axis. The columnar member 42 is attached to the pedestal 43. It is desirable that the surface of the plurality of bar-shaped members 41 that contacts the outside is configured to be spherical or ellipsoidal.

[0083] Each of the arc-shaped rod members 41 is provided so as to be movable in the Z direction. Each of the arc-shaped rod members 41 may be configured so as to be movable in the circumferential direction of the circle described by the arc. A plurality of elements to be measured 31 are fixed to the outside of the rod members 41. This allows the plurality of elements to be measured 31 to be arranged in a spherical or ellipsoidal shape. FIG. 7 shows an example of a spherical frame part 40 in which a columnar member 42 extends in the Z direction and a plurality of rod members 41 are provided so as to be rotatable about an axis in the Z direction.

[0084] The positions and / or orientations of the multiple imaging units 132 may be changed depending on the measurement target. By arranging the multiple measured elements 31 in such a spherical manner, even if the position and / or orientation of the imaging units 132 is changed, the multiple measured elements 31 can be included within the field of view of each imaging unit 132. Furthermore, the imaging units 132 may be arranged so as to surround the measurement target. In this case, the positions and orientations of the imaging units 132 differ from one another. Even in such a case, by arranging the multiple measured elements 31 in a spherical manner, the multiple measured elements 31 can be included within the field of view of each imaging unit 132.

[0085] Each of the multiple elements under test 31 is provided on the spherical or ellipsoidal surface of the frame section 40. The multiple elements under test 31 are provided, for example, on the spherical surface of the sphere formed by the frame section 40 so that adjacent elements under test 31 are within a predetermined distance. Here, the predetermined distance is, for example, about two to four times the diameter of the sphere when the main body section 32 of the element under test 31 is a sphere. The predetermined distance may be about two to four times the major axis of the ellipsoid when the main body section 32 of the element under test 31 is an ellipsoid.

[0086] It is desirable that the elements to be measured 31 are arranged so that the label section 33 falls within the field of view of as many imaging sections 132 as possible. For example, the frame section 40 is regarded as a spheroid with the Z direction as the axis of rotation, and is considered in spherical coordinates similar to those of celestial bodies. It is desirable that the multiple elements to be measured 31 are arranged in the same latitude direction and / or the same longitude direction of such a spheroid. Also, each of the elements to be measured 31 is arranged, for example, so that at least one label section 33 is displayed on a surface that is perpendicular to the normal direction of the spheroid and faces the outside of the frame section 40.

[0087] For example, it is desirable that the multiple elements to be measured 31 are densely arranged on the spherical surface of a sphere so that multiple elements to be measured 31 whose label portions 33 can be read are included in the captured image even if the imaging section 132 captures an image of a portion of the calibration jig 300. Thereby, by simply mounting only one calibration jig 300 of the second configuration example on the stage 110, the multiple elements to be measured 31 can be identified in the captured image of the calibration jig 300 captured by the multiple imaging sections 132.

[0088] Therefore, as described above, it is possible to identify calibration parameters used for calibrating the multiple imaging units 132 based on images of the calibration jig 300 captured by the multiple imaging units 132 before and after the movement of the calibration jig 300. Note that, in the above-mentioned identification of the calibration parameters, an example has been described in which the calibration jig 300 is mounted on the stage 110 and moved, but the present invention is not limited to this. Apart from the movement of the stage 110, the calibration jig 300 may be configured to be able to move the multiple elements to be measured 31 while maintaining the relative positional relationship between the multiple elements to be measured 31.

[0089] The calibration jig 300 further includes, for example, a frame moving unit that moves the frame unit 40 together with the plurality of elements 31 to be measured. The frame moving unit has an actuator such as a motor and moves the frame unit 40 in a plurality of predetermined directions. The frame moving unit may also rotate the frame unit 40 around an axis in a predetermined direction. The frame moving unit is configured to be able to move the plurality of elements 31 to be measured in, for example, the X direction, the Y direction, and the Z direction. The frame moving unit may also be configured to be able to rotate the plurality of elements 31 to be measured around the X direction, the Y direction, and the Z direction, respectively, as rotation axes. This allows the measuring apparatus 10 to identify the calibration parameters used for calibration by moving the frame unit 40 of the calibration jig 300 without moving the stage 110.

[0090] For example, in S54 of the operation flow shown in Fig. 4, the control unit 240 images the calibration jig 300 placed at the first reference position. The first imaging unit 132a images the calibration jig 300 so that some of the first measured elements 31a among the multiple measured elements 31 provided in the calibration jig 300 are within the field of view. In addition, the second imaging unit 132b different from the first imaging unit 132a images the calibration jig 300 so that some of the second measured elements 31b different from the first measured elements 31a imaged by the first imaging unit 132a are within the field of view.

[0091] It should be noted that the imaging of the calibration jig 300 in S58, S59, S61, and S63 is similar to that in S54. In addition, in S55, S57, S60, and S62, the control unit 240 may move the stage 110, or alternatively, may control a frame moving unit of the calibration jig 300 to move the calibration jig 300.

[0092] Then, in S64, the measurement unit 243 analyzes the label portion 33 of the measured element 31 from the captured image captured by the first imaging unit 132a to identify the first measured element 31a. The measurement unit 243 identifies a first coordinate position indicating the position of the identified first measured element 31a in the first coordinate based on the field of view of the first imaging unit 132a.

[0093] Similarly, the measurement unit 243 analyzes the label portion 33 of the element to be measured from the image captured by the second imaging unit 132b to identify the second element to be measured 31b. The measurement unit 243 identifies a second coordinate position indicating the position of the identified second element to be measured 31b in the second coordinate based on the field of view of the second imaging unit 132b.

[0094] After S64, as described above, calibration parameters for calibrating the first imaging section 132a and the second imaging section 132b can be identified from the identified positional relationship between the first measured element 31a and the second measured element 31b.

[0095] 4, an example has been described in which the optical unit 130 is calibrated using a reference jig smaller in size than the calibration jig 30. Here, the size of the calibration jig 300 in the second configuration example can be made smaller than the size of the calibration jig 30, and therefore it may also function as a reference jig.

[0096] For example, the calibration jig 300 can be used as a reference jig by previously measuring the dimensions and positional relationships of at least some of the multiple elements under test 31 and storing them in the storage unit 220, etc. In other words, the measuring apparatus 10 can execute the operation flow shown in FIG.

[0097] <Third example of the calibration jig configuration> As described above, the calibration jig may be configured to be capable of moving a plurality of elements under test while maintaining the relative positional relationship between the elements under test. An example of such a calibration jig will be described below with reference to Figs. 8 to 14.

[0098] Fig. 8 is a side view of a calibration jig 300A according to one embodiment of the present invention. Fig. 9 is a diagram showing a state in which a frame member is removed from the calibration jig 300A of Fig. 8. Fig. 10 is a perspective view of the calibration jig 300A in a state in which the frame member is removed. Fig. 11 is a perspective view of the calibration jig 300A in a state in which the frame member is removed, viewed from another direction.

[0099] 8, the calibration jig 300A includes a plurality of elements to be measured 331, a frame section 340, and a mechanism section 400. The elements to be measured 331 and the frame section 340 have the same configuration as the elements to be measured 31 and the frame section 40 described above, and therefore detailed description will be omitted. One of the features of the calibration jig 300A is that the plurality of elements to be measured 331 and the frame section 340 are configured to be movable around each of the central axis Lx (roll axis), central axis Ly (pitch axis), and central axis Lz (yaw axis) shown in FIG.

[0100] As shown in Fig. 8, the measured element 331 has a main body 332 and a label part 333. The main body 332 is, for example, a sphere. The label part 333 is formed on an annular plate-like member provided on the outer circumferential surface of the main body 332. The label part 333 is similar to the one exemplified in Fig. 6, and includes an identification code display for identifying the measured element 331, etc.

[0101] Frame section 340 is a member that forms the outer peripheral surface of the sphere, and a plurality of elements to be measured 331 are attached to this outer peripheral surface. Frame section 340 has frame member 341, columnar member 342, and base 343, as shown in Figs. 8 and 9.

[0102] As described with reference to Fig. 7, the frame member 341 has an outer periphery that describes a circular arc. The frame member 341 is removably attached to the columnar member 342. In the example of Fig. 8, a plurality of frame members 341 are provided so as to extend radially from the columnar member 342 as a center. The plurality of frame members 341 provided in this manner form a spherical outer periphery on which the device to be measured 331 is attached.

[0103] The frame members 341 are connected to each other to form a spherical subassembly, for example. This spherical subassembly is removably attached to the columnar member 342.

[0104] The spherical outer circumferential surface formed by the multiple frame members 341 is not completely closed, and an opening 340h (FIG. 8) is provided at a portion of the lower end side. In this manner, by having a portion of the sphere open, it is possible to insert a portion of the mechanism unit 400 into the inside of the sphere.

[0105] As shown in FIG. 9, the frame section 340 is supported by the mechanism section 400 by mounting a base 343 having a columnar member 342 on the upper surface thereof to a support member 403 (described in detail later).

[0106] (Mechanism section 400) The mechanism section 400 is a mechanism for moving the frame section 340 in a predetermined direction, for example, on a stage of a three-dimensional measuring device. As shown in FIG. 9, the mechanism section 400 has a support body 401, a support member 403, a rotation mechanism 405, a first rocking mechanism 410, and a second rocking mechanism 420.

[0107] The support 401 extends in the Z-axis direction, and supports various components that constitute the mechanical unit 400. Specifically, the support 401 supports a first oscillating mechanism 410, a second oscillating mechanism 420, and a support member 403.

[0108] The support member 403 is a member that supports the frame portion 340, and is provided on the upper part of the support body 401. As shown in Figs. 10 and 11, the support member 403 is, for example, a plate-shaped member. The contour shape of the support member 403 is, for example, a rectangle. As shown in Fig. 11, the support member 403 is configured to be swingable around a central axis Lx extending in the X-axis direction and a central axis Ly extending in the Y-axis direction. The structure that supports the support member 403 to be swingable will be described later with reference to other drawings.

[0109] (Rotation mechanism 405) The rotation mechanism 405 (FIG. 9) is a mechanism that rotates the frame portion 340 around the central axis Lz in the Z-axis direction. In this example, the rotation mechanism 405 rotates the frame portion 340, for example, through 360° or more. The rotation mechanism 405 may also rotate the frame portion 340 within an angular range less than 360°.

[0110] The rotation mechanism 405 has a rotary motor 405a as a driving source that generates a driving force for rotating the frame portion 340. As an example, the rotary motor 405a is attached to the lower surface of the support member 403. The driving force from the rotary motor 405a is transmitted to the base 343 via a transmission mechanism (not shown), causing the frame portion 340 to rotate around the central axis Lz in the Z-axis direction. Note that although the frame member 340 rotates on the support member 403, the support member 403 itself does not rotate.

[0111] Regarding the arrangement of the rotation mechanism 405, the first oscillating mechanism 410, and the second oscillating mechanism 420, it is also possible to arrange all of these mechanisms together at approximately the same position (approximately the same height) in the direction along the central axis Lz. However, in the case of such a configuration, the size of the mechanism parts increases when projected onto the XY plane.

[0112] Such a mechanism is not suitable for arranging the mechanism so that a part of the mechanism is housed inside the spherical frame member 341. In addition, in a configuration in which such a mechanism is arranged outside the sphere (for example, below the sphere), a large-sized mechanism is present below the frame member 341, which causes a problem in that it becomes difficult to image the measured element 331 from below.

[0113] Therefore, in the calibration tool 300A, the first oscillating mechanism 410 and the second oscillating mechanism 420 are disposed at a first position in the direction along the central axis Lz, and the rotation mechanism 405 is disposed at a second position closer to the support member 403 than the first position. Specifically, the first linear actuator 415 of the first oscillating mechanism 410 and the second linear actuator 425 of the second oscillating mechanism 420 are provided below the rotation mechanism 405, as shown in Fig. 9. With this configuration, it is possible to compactly arrange the rotation mechanism 405, the first oscillating mechanism 410, and the second oscillating mechanism 420 around the central axis Lz.

[0114] (First swing mechanism 410) 11, the first swing mechanism 410 is a mechanism for swinging the frame portion 340 around the central axis Ly. The first swing mechanism 410 has a first movable portion 411 and a first linear actuator 415.

[0115] Specifically, the first movable part 411 has a first connecting arm 412, a ball joint 413a, and a knuckle joint 413b. One end of the first movable part 411 is connected to the support member 403, and the first movable part 411 receives a force from the first linear actuator 415 and moves in the Z-axis direction, thereby applying a force to the support member 403 and moving the support member 403.

[0116] The first linear actuator 415 has a linear motor 415a and a linear guide 415b. The linear motor 415a moves the movable arm 417 in the Z-axis direction by the driving force of, for example, a pulse motor.

[0117] The linear guide 415b is provided so as to be located between the linear motor 415a and the first movable part 411. The linear guide 415b has a rail provided so as to extend in the Z-axis direction, and a moving block that reciprocates along the rail. The linear guide 415b transmits the force from the linear motor 415a to the first movable part 411.

[0118] The first connecting arm 412 connects the first linear actuator 415 and the support member 403. A ball joint 413a is provided at one end (upper end) of the first connecting arm 412. The first connecting arm 412 is connected to the support member 403 via this ball joint 413a. Specifically, the upper end of the first connecting arm 412 is connected to a position close to the outer periphery on the lower surface of the support member 403. In the calibration jig 300A, a ball joint is thus used in the connecting portion between the first movable part 411 and the support member 403. As described below, a ball joint 423a is also used in the connecting portion between the second connecting arm 422 of the second oscillating mechanism 420 and the support member 403.

[0119] The centers of the ball joints 413a and 423a may be located in different planes perpendicular to the Z axis, but in the calibration jig 300A, the centers of the ball joints 413a and 423a are located in the same plane. The effect of such a configuration will be described later together with the explanation of the oscillation center of the frame portion 340.

[0120] The knuckle joint 413b is provided at the lower end of the first connecting arm 412. The first connecting arm 412 and the first linear actuator 415 are connected via this knuckle joint 413b. The knuckle joint 413b is a component that rotates an object only around one axis. In the example of FIG. 11, the first connecting arm 412 is connected to the movable arm 417 of the first linear actuator 415 by the knuckle joint 413b that supports the first connecting arm 412 rotatably around a central axis parallel to the central axis Ly (around one axis). Although a ball joint may be used at this connection point, by using a knuckle joint as in FIG. 11, the accuracy of the movement of the first connecting arm 412 is improved, and as a result, the positional accuracy of the support member 403 and the multiple measured elements 331 that move together with it can be improved.

[0121] (Second swing mechanism 420) The second rocking mechanism 420 is similar to the first rocking mechanism 410, except that the second rocking mechanism 420 is disposed at a different position in the mechanism section 400 and that the lower end of the second connecting arm 422 is a ball joint 423b. The second rocking mechanism 420 is a mechanism that rocks the frame section 340 around the central axis Lx. As shown in FIG. 11, the second rocking mechanism 420 is disposed at a position shifted by 90° in the circumferential direction of the central axis Lz with respect to the first rocking mechanism 410.

[0122] Similar to the configuration of the first swing mechanism 410, the second swing mechanism 420 has a second movable part 421 and a second linear actuator 425. In addition, the second movable part 421 has a second connecting arm 422, and a ball joint 423a and a ball joint 423b.

[0123] The second movable portion 421 has one end connected to the support member 403, and receives a force from the second linear actuator 425 to move in the Z-axis direction, thereby applying a force to the support member 403 and moving the support member 403.

[0124] The linear motor 425a moves the movable arm 427 in the Z-axis direction by the driving force of the pulse motor. The linear guide 425b transmits the force from the linear motor 425a to the second connecting arm 422.

[0125] The second connecting arm 422 connects the second linear actuator 425 and the support member 403. The second connecting arm 422 is provided with a ball joint 423a and a ball joint 423b at both its upper and lower ends, respectively. Similar to the first movable part 411, the second connecting arm 422 is connected to the lower surface of the support member 403 via the ball joint 423a. In this example, the distance from the central axis Lx to the ball joint 413a is the same as the distance from the central axis Lx to the ball joint 423a.

[0126] A knuckle joint may be used to connect the second connecting arm 422 and the second linear actuator 425. In this manner, when a knuckle joint is used in both the first connecting arm 412 and the second connecting arm 422, it is expected that the positional accuracy of the frame section 340 and the measured element 331 attached thereto will be improved. However, high dimensional accuracy is required when assembling the mechanism section 400. Therefore, in one embodiment of the calibration jig of the present invention, one side is a knuckle joint and the other is a ball joint, as shown in FIG. 11. Whether to use a ball joint or a knuckle joint at the end of the connecting arm may be appropriately selected depending on the accuracy required for the calibration jig, etc.

[0127] The mechanism section 400 configured as described above is provided in a shape such that, when the mechanism section 400 and the frame section 340 are projected in the Z direction, the mechanism section 400 fits inside a circle that is the outer shape of the frame section 340. With this configuration, the projection area of ​​the calibration jig 300A becomes small, and it becomes easier to photograph the spherically arranged multiple elements to be measured 331 from below.

[0128] (Regarding the swing of the support member 403 and the frame portion 340 supported thereby) Fig. 12 is an enlarged view of the structure that supports the frame portion 340 in a swingable manner in the mechanism. Fig. 13 is a view showing the positional relationship between the frame portion 340 and the swing center 455a. Fig. 14 is a view showing the swing of the support member 403 and the frame portion 340 supported thereby.

[0129] 12 and 13, the support member 403 is connected to the central support column 402 via a ball joint 455 provided at the upper end of the central support column 402 of the support body 401. The support member 403 is thus provided so as to be able to change its orientation with respect to the central support column 402 within the movable range of the ball joint 455. Specifically, the support member 403 is provided so as to be able to change its orientation around a swing center 455a, which is the center of the ball of the ball joint 455.

[0130] 12 and 13, the initial state of the calibration tool 300A is a state in which the central support 402 of the mechanism section 400 and the columnar member 342 of the frame section 340 extend along the central axis Lz. In this state, the plate-shaped support member 403 extends in a plane perpendicular to the central axis Lz. The central axis Lx (FIG. 11) and the central axis Ly pass through the oscillation center 455a and are perpendicular to each other.

[0131] 13, the frame section 340 is disposed so that the center of the sphere of the frame member 341 coincides with the oscillation center 455a. Since the oscillation center 455a and the center of the sphere of the frame member 341 are located at the same position in this way, the sphere of the frame member 341 rotates around the center of the sphere when the support member 403 is oscillated. With this configuration, complicated calculations are not required for the calculation of calibration based on the captured images of the multiple elements to be measured 31.

[0132] (Operation of calibration jig 300A) As shown in FIG. 14(a), from the initial state of the calibrating jig 300A, for example, the second linear actuator 425 of the second oscillating mechanism 420 is operated to move the second movable part 421 forward.

[0133] 14(b), the second movable part 421 pushes the support member 403 upward, which causes the support member 403 to swing together with the frame part 340 on the support member 403. Specifically, the frame part 340 swings by a predetermined angle around the central axis Lx. When the second movable part 421 is retreated from the state of FIG. 14(a) in the direction opposite to the advancing direction, the frame part 340 swings in the direction opposite to the above.

[0134] Although not shown in FIG. 14, when the first linear actuator 415 of the first swing mechanism 410 is operated to move the first movable part 411, the frame part 340 swings around the central axis Ly by a predetermined angle.

[0135] When rotating the frame portion 340 around the central axis Lz, as described above, it is only necessary to operate the rotation mechanism 405. The frame portion 340 can rotate in either the clockwise or counterclockwise direction.

[0136] In the calibration tool 300A, as described above, the frame portion 340 can be moved in a desired direction by appropriately operating each of the rotation mechanism 405, the first swing mechanism 410, and the second swing mechanism 420 independently.

[0137] (Effect of calibration jig 300A) According to the calibration jig 300A as described above, a mechanism section 400 is provided, which includes a rotation mechanism 405 that rotates the frame section 340 around the central axis Lz, a first oscillation mechanism 410 that oscillates the frame section 340 around the central axis Ly, and a second oscillation mechanism 420 that oscillates the frame section 340 around the central axis Lx. Therefore, by operating each mechanism, the device under test 331 can be moved in a desired direction.

[0138] In particular, the respective operations of the rotation mechanism 405, the first rocking mechanism 410, and the second rocking mechanism 420 correspond to each other in terms of yaw component, pitch component, and roll component, so that control is easy. In order to rock the frame part 340, for example, around the central axis Lx or the central axis Ly, for example, a configuration in which the first rocking mechanism 410 and the second rocking mechanism 420 are operated simultaneously to move the frame part 340 around a predetermined axis is also conceivable. However, in this case, since synchronous control of the two mechanisms is required, the control becomes complicated, and since the trajectory along which the support member 403 moves becomes complicated, there is a concern that the positioning accuracy of the multiple measured elements 331 may decrease. In contrast, in the calibration jig 300A, since the frame part 340 can be rocked by the independent operation of the first rocking mechanism 410 or the second rocking mechanism 420, complicated control is not required, and the positioning accuracy of the frame part 340 can also be improved.

[0139] In the calibration jig 300A, the first oscillating mechanism 410 and the second oscillating mechanism 420 operate the movable part by a linear actuator. In order to oscillate the frame part 340 around the central axis Lx or the central axis Ly, a configuration using a rotation mechanism such as the rotation mechanism 405 may be considered. However, according to a configuration using a linear actuator like the calibration jig 300A, it is not necessary to arrange various mechanisms near the oscillation center 455a compared to a rotation mechanism, and the mechanism near the oscillation center 455a can be made smaller. Such a configuration is particularly advantageous in a configuration in which a part of the mechanism part 400 is arranged inside the frame part 340 as shown in FIG. 11.

[0140] 11, in the calibration jig 300A, the center of the ball joint 413a and the center of the ball joint 423b are located on the same plane. Furthermore, the oscillation center 455a is located on this plane. With this configuration, the support member 403 and the frame portion 340 supported thereby can be moved satisfactorily around the oscillation center 455a in response to the operation of the first oscillation mechanism 410 and the second oscillation mechanism 420.

[0141] <Modification> Although the specific structure of the calibration jig 300A has been described above, the calibration jig 300A is not necessarily limited to the above structure. For example, if the size of the frame part 340 is sufficiently large, not only a part of the mechanism part 400 but the entire mechanism part 400 may be disposed inside the frame part 340.

[0142] As described above, the shape of the frame portion 340 is not limited to a sphere, and therefore a part or the whole of the mechanism portion 400 may be disposed inside the frame portion 340 that is, for example, an ellipsoid.

[0143] The mechanism section 400 may further include an XY stage at its bottom, and may be configured such that the frame section 340 can be moved to any position within the XY plane by operating this XY stage.

[0144] Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments, and various modifications and changes are possible within the scope of the gist of the present invention. For example, all or part of the device can be configured by distributing or integrating functionally or physically in any unit. In addition, new embodiments resulting from any combination of multiple embodiments are also included in the embodiments of the present invention. The effect of the new embodiment resulting from the combination combines the effect of the original embodiment. [Explanation of symbols]

[0145] 10. Measuring Equipment 30 Calibration fixture 31 Element to be measured 31 Multiple elements to be measured 32 Main body 33 Label section 34 Plate-shaped members 35 Recognition Code 36 Identification Code 40 Frame section 41 Rod-shaped member 42 Columnar member 43 Pedestal 110 Stages 120 Mobile Unit 130 Optical Unit 131 Light source 132 Imaging unit 133 Field of view 210 Communications Department 220 Storage section 230 Display section 240 Control Unit 241 Signal output section 242 Acquisition Department 243 Measuring section 244 Rotation matrix specification part 245 Translation Vector Identification Unit 300 Calibration fixture 300A Calibration Fixture 331 Element to be measured 332 Main body 333 Label section 340 Frame section 341 Frame members 342 Columnar Members 343 Pedestal 400 Mechanism Department 401 Support 402 Central pillar 403 Support member 405 Rotation Mechanism 405a Rotary Motor 410 First swing mechanism 411 1st moving part 412 First connecting arm 413a Ball joint 413b Knuckle joint 415 First Linear Actuator 415a Linear motor 415b Linear Guide 417 Movable Arm 420 Second Oscillating Mechanism 421 2nd moving part 422 Second connecting arm 423a Ball joint 423b Ball joint 425 Second Linear Actuator 425a Linear Motor 425b Linear Guide 427 Movable Arm 455 Ball Joint 455a Swing Center Lx center axis Ly center axis Lz center axis S Measurement System W Measurement target

Claims

1. A calibration jig for calibrating a measurement device for measuring a three-dimensional shape of a measurement object, comprising: A plurality of devices under test; a frame portion to which a plurality of the devices under test are attached; A mechanism for moving the frame portion; Equipped with The mechanism unit includes: a rotation mechanism that rotates the frame portion about a first axis; a first swing mechanism that swings the frame portion around a second axis perpendicular to the first axis; a second swing mechanism that swings the frame portion about a third axis perpendicular to the first axis and the second axis; A calibration fixture comprising:

2. the mechanism portion has a support member that supports the frame portion, The first swing mechanism includes: A first movable portion connected to the support member; A first linear actuator that moves the first movable part; having The first linear actuator is configured to move the first movable part, thereby causing the support member to swing around the second axis. The calibration jig according to claim 1 .

3. The second rocking mechanism includes: A second movable portion connected to the support member; A second linear actuator that moves the second movable part; having The second linear actuator is configured to move the second movable part so that the support member swings around the third axis. The calibration jig according to claim 2 .

4. a connecting portion between the first movable portion and the support member and a connecting portion between the second movable portion and the support member are ball joints, centers of the plurality of ball joints are located in a plane perpendicular to the first axis, and a swing center of the support member is also located in the plane. The calibration tool according to claim 3 .

5. The first movable portion has a first connecting arm, The ball joint is provided at one end of the first connecting arm, and the other end of the first connecting arm is connected to the first linear actuator, The first connecting arm and the first linear actuator are connected to each other by a knuckle joint that supports the first connecting arm rotatably around one axis. The calibration tool according to claim 4 .

6. The second movable portion has a second connecting arm, The ball joint is provided at one end of the second connecting arm, and the other end of the second connecting arm is connected to the second linear actuator, The second connecting arm and the second linear actuator are connected to each other by a knuckle joint that supports the second connecting arm rotatably around one axis. The calibration tool according to claim 5 .

7. the rotation mechanism has a drive source that generates a drive force to rotate the frame portion, the first linear actuator and the second linear actuator are disposed at a first position in a direction along the first axis, The drive source of the rotation mechanism is disposed at a second position closer to the support member than the first position in a direction along the first axis. The calibration tool according to claim 3 .

8. the frame portion has a spherical or ellipsoidal shape with a plurality of the elements to be measured provided on a surface thereof, At least a part of the mechanism is provided so as to be located inside the sphere or ellipsoid of the frame part. The calibration jig according to claim 1 or 2.

9. The frame portion is provided such that the center of the sphere or ellipsoid is located at a swing center that is an intersection point of the second axis and the third axis. The calibration tool according to claim 8.

10. The mechanism unit includes: When the mechanism and the frame are projected in the direction of the first axis, the mechanism and the frame have a shape that fits within an outer shape of the frame. The calibration tool according to claim 8.

11. The device under test is A body portion having a predetermined shape; a label portion provided on the main body portion or a member attached to the main body portion and displaying an identification code for identifying the device under test; having The calibration jig according to claim 1 or 2.

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