detector

Abstract

To realize stable detection.SOLUTION: A detector 50 comprises: a first detection part 20α including a first electrode 21α, a second electrode 22α, and a third electrode 26α; a second detection part 20β including a fourth electrode 21β, a fifth electrode 22β, and a sixth electrode 26β; and a potential supply circuit 60. The potential supply circuit 60 includes: a first coil 66A; a second coil 66B; a third coil 66C; a first core material 66E; a first resistance element 69; and a second resistance element 70. In the first coil 66A, an input side end 66A1 is connected to a DC power source 61. In the second coil 66B, an input side end 66B1 is connected to the first electrode 21α. In the third coil 66C, an input side end 66C1 is connected to the fourth electrode 21β. In the first resistance element 69, an input side end 69A is connected to an output side end 66B2 of the second coil 66B. In the second resistance element 70, an input side end 70A is connected to an output side end 66C2 of the third coil 66C, whereas an output side end 70B is connected to the input side end 66B1 of the second coil 66B.SELECTED DRAWING: Figure 7

Description

[Technical field]

[0001] The technology disclosed in this specification relates to a detector. [Background technology]

[0002] Conventionally, a radio frequency (RF) generator applied to a detector using a field asymmetric ion mobility spectrometry (FAIMS) system is disclosed in Patent Document 1. The radio frequency generator disclosed in Patent Document 1 has an active device that drives a series resonant circuit. The series resonant circuit has a self-resonant dual inductor. The radio frequency generator can be used to drive a capacitive load. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2015-524164 Summary of the Invention [Problem to be solved by the invention]

[0004] The output of the series resonant circuit included in the radio frequency generator described in Patent Document 1 is directly connected to a capacitive load included in a detector using electric field asymmetric ion mobility spectrometry. Therefore, when a load fluctuation occurs in the detector, a potential fluctuation occurs in the series resonant circuit, which may make stable detection difficult.

[0005] The technology described in this specification was developed based on the above circumstances, and aims to achieve stable detection. [Means for solving the problem]

[0006] (1) A detector according to the technology described in this specification includes a first detection unit having a first electrode, a second electrode that faces the first electrode at a distance and forms a flow path for charged particles to be detected between the first electrode and the second electrode, and a third electrode that is arranged side by side with the second electrode on the downstream side of the flow path and collects the charged particles; a second detection unit having a fourth electrode, a fifth electrode that faces the fourth electrode at a distance and forms a flow path for charged particles to be detected between the fourth electrode and the fourth electrode, and a sixth electrode that is arranged side by side with the fifth electrode on the downstream side of the flow path and collects the charged particles; and and a potential supply circuit that supplies a potential to the first winding, the potential supply circuit including a first winding, a second winding, a third winding, a first annular core material around which the first winding, the second winding, and the third winding are wound, a first resistive element, and a second resistive element, an input side end of the first winding is connected to a DC power supply, an input side end of the second winding is connected to the first electrode or the second electrode, an input side end of the third winding is connected to the fourth electrode or the fifth electrode, an input side end of the first resistive element is connected to an output side end of the second winding, and an input side end of the second resistive element is connected to an output side end of the third winding and an output side end of the second winding is connected to an input side end of the second winding.

[0007] (2) In addition to the above (1), the detector may further include a transistor and a resonant circuit, the transistor including a gate electrode, a source electrode and a drain electrode, the gate electrode being connected to a PWM signal supply unit that generates a PWM signal, and the drain electrode and the resonant circuit being directly or indirectly connected in parallel to an output side end of the first winding.

[0008] (3) In addition to the above (2), the detector may further include a configuration in which an input end of the second winding is connected to the first electrode, and an input end of the third winding is connected to the fourth electrode.

[0009] (4) In addition to the above (3), the detector may further include a first compensation potential supply unit that generates a first compensation potential and a second compensation potential supply unit that generates a second compensation potential, the second winding and the first electrode being connected in parallel to the first compensation potential supply unit, and the third winding and the fourth electrode being connected in parallel to the second compensation potential supply unit.

[0010] (5) In addition to any one of (1) to (4), the detector further comprises a third detection unit having a seventh electrode, an eighth electrode that faces the seventh electrode at a distance and forms a flow path for charged particles to be detected between the seventh electrode and the ninth electrode, and a ninth electrode that is arranged side by side with the 8th electrode on the downstream side of the flow path and collects the charged particles; a fourth detection unit having a tenth electrode, an eleventh electrode that faces the tenth electrode at a distance and forms a flow path for charged particles to be detected between the 10th electrode and the 10th electrode, and a twelfth electrode that is arranged side by side with the 11th electrode on the downstream side of the flow path and collects the charged particles; and the potential supply circuit further comprises a fourth detection unit having a tenth electrode, an eleventh electrode that faces the tenth electrode at a distance and forms a flow path for charged particles to be detected between the 10th electrode and the 12th electrode, and collects the charged particles. the fourth winding, a fifth winding, a sixth winding, a ring-shaped second core material around which the fourth winding, the fifth winding, and the sixth winding are wound, a third resistive element, and a fourth resistive element, wherein an input side end of the fourth winding is connected to an output side end of the first winding, an input side end of the fifth winding is connected to the seventh electrode or the eighth electrode, an input side end of the sixth winding is connected to the tenth electrode or the eleventh electrode, an input side end of the third resistive element is connected to an output side end of the fifth winding, and an input side end of the fourth resistive element is connected to an output side end of the sixth winding, and an output side end of the fourth resistive element is connected to an input side end of the fifth winding. Effect of the Invention

[0011] According to the technology described in this specification, stable detection can be achieved. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a schematic diagram showing the configuration of a mobility analysis device including a detector according to a first embodiment. [Diagram 2]1 is a heat map illustrating the relationship between the amount of sample ions measured by the mobility analysis device according to the first embodiment and analysis conditions; [Diagram 3] Graph showing a schematic diagram of the heat map of FIG. 2 according to the first embodiment. [Figure 4] 1 is a block diagram of a control unit provided in a mobility analysis device according to a first embodiment. [Figure 5A] 1 is a graph showing a dispersion voltage applied between one filter electrode and another filter electrode provided in a detector according to embodiment 1. [Figure 5B] 1 is a graph showing a compensation voltage applied between one filter electrode and another filter electrode provided in a detector according to embodiment 1. [Figure 6] FIG. 1 is a block diagram showing an electrical configuration of a potential supply circuit provided in a detector according to a first embodiment. [Figure 7] Circuit diagram of a potential supply circuit according to the first embodiment [Figure 8] FIG. 1 is a plan view showing a schematic configuration of a first dual inductor according to a first embodiment; [Figure 9] FIG. 2 is a diagram showing the configurations of a first detection cell, a second detection cell, and a third detection cell according to the first embodiment, and the relationship with a first output side circuit; [Figure 10] Graph showing waveforms of drain voltage, drain current, and gate voltage according to embodiment 1. [Figure 11] Graph showing a waveform of a voltage applied to one filter electrode according to the first embodiment. [Figure 12] FIG. 11 is a block diagram showing an electrical configuration of a potential supply circuit according to a second embodiment. [Figure 13] Circuit diagram of a potential supply circuit according to a second embodiment [Figure 14] FIG. 11 is a plan view showing a schematic configuration of a first dual inductor and a second dual inductor according to a second embodiment; [Figure 15] FIG. 13 is a diagram showing a relationship between the configurations of the first, second, and third detection cells and a first output side circuit according to the second embodiment, and a relationship between the configurations of the fourth, fifth, and sixth detection cells and a second output side circuit; [Figure 16]10 is a graph showing a waveform of a voltage applied to one filter electrode according to the second embodiment; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] <Embodiment 1> A first embodiment will be described with reference to Figures 1 to 11. In this embodiment, a mobility analysis device 1 (hereinafter simply referred to as "analysis device") using a field asymmetric ion mobility spectrometry system (FAIMS) is shown.

[0014] 1, the analysis device 1 includes an ionization source 10, a detection cell 20, a pump 30 (an example of an air supply device), and a control unit 40. A detector 50 disclosed herein includes at least the detection cell 20 and the control unit 40 of the analysis device 1 (see FIG. 4). Each element will be described below mainly with reference to FIG. 1.

[0015] The ionization source 10 is a device that ionizes atoms and molecules of a compound (sample) to be analyzed. When a compound is ionized by the ionization source 10, it becomes a charged particle (sample ion) that can be detected in the detection cell 20. The charged particle is the detection target of the detector 50. The ionization method of the ionization source 10 is not particularly limited, and various conventional ionization sources can be used. Specifically, the ionization method may be, for example, an electron impact (EI) method, a chemical ionization method, a gas discharge method, a photoionization method, a desorption ionization method, an electrospray ionization (ESI) method, a thermal ionization method, an ambient ionization method, or a combination of these methods, and an ionization source that can ionize the component to be detected may be appropriately selected. In this example, although not specifically shown, the ionization source 10 is provided with a needle electrode, and this needle electrode generates a corona discharge under atmospheric pressure to generate reactive ions, which react with sample atoms and sample molecules to indirectly generate charged particles. The charged particles are not limited to ions to be analyzed, but may also be reactant ions, ion clusters, and the like.

[0016] The ionization source 10 may be a nickel isotope ( 63 Ni) and americium isotopes ( 241 The ionization unit may be an ionization unit equipped with a radioactive ion source containing ions such as ions of 10Am and ionizing a sample generated from the radioactive ion source, or an ionization unit equipped with an ultraviolet pulse laser oscillator and irradiating a sample with ultraviolet pulse laser light to directly ablate and ionize the sample. The charged particles generated by the ionization source 10 are carried by an airflow generated by sending an atmospheric gas (neutral buffer gas) such as air or a carrier gas by a pump 30 described later, and are sent toward the detection cell 20.

[0017] The pump 30 is an element for moving the atmospheric gas containing the charged particles along the flow direction in the detection cell 20. The pump 30 of this embodiment is installed downstream of the detection cell 20 in the flow direction. As the pump 30, various types of air supply devices capable of sending the charged particles generated by the ionization source 10 to the detection cell 20 described later at a predetermined speed can be used. The air supply mechanism of the pump 30 is not particularly limited, and may be a diaphragm type, a rotary blade type, a piston type, a rotary vane type, or other air supply devices. Although it depends on the size of the detection cell 20, for example, a microblower with a maximum discharge pressure of about 0.03 MPa or less and an air supply amount of about 1 L / min or less can be used as the pump 30. For example, a microblower in which a diaphragm is displaced by high-frequency vibration (e.g. ultrasonic vibration) by piezoelectric ceramics is preferable as the pump 30 used in this embodiment in that it can supply air while suppressing pulsation.

[0018] The detection cell 20 is an element that separates (filters) the charged particles generated by the ionization source 10 based on differences in mobility and detects each charged particle with a predetermined mobility. The detection cell 20 includes one filter electrode 21, the other filter electrode 22, one substrate 23 (an example of a support), the other substrate 24 (an example of a support), a detection electrode 26, and a deflection electrode 27. Each of these elements of the detection cell 20 may be disposed in a chamber.

[0019] The first filter electrode 21 and the second filter electrode 22 are disposed opposite to each other. The first filter electrode 21 and the second filter electrode 22 have opposing main surfaces parallel to each other. A predetermined gap is provided between the first filter electrode 21 and the second filter electrode 22. A flow path 25 for charged particles is formed between the first filter electrode 21 and the second filter electrode 22. Hereinafter, the direction (main direction) in which the charged particles flow in the flow path 25 is referred to as the "flow direction". The flow path 25 includes an ion separation space (draft space). The first filter electrode 21 and the second filter electrode 22 in this example are provided on opposing surfaces of a first substrate 23 and a second substrate 24, which will be described later, respectively.

[0020] The shape, size, etc. of the one filter electrode 21 and the other filter electrode 22 are not particularly limited. In this example, the one filter electrode 21 and the other filter electrode 22 are each formed in a rectangular shape that is slightly elongated in the flow direction. The dimensions of the one filter electrode 21 and the other filter electrode 22 along the flow direction of the charged particles are not limited to this, but can be, for example, about 0.1 cm or more (for example, 1 cm or more) and about 50 cm or less (for example, 10 cm or less). The thickness of the one filter electrode 21 and the other filter electrode 22 is not particularly limited, and can be appropriately set, for example, independently, in the range of about 50 nm or more and 1 μm or less. The thickness of the one filter electrode 21 and the other filter electrode 22 is typically 600 nm or less, for example 400 nm or less, and can be typically 100 nm or more, for example 200 nm or more.

[0021] The distance (filter gap) between one filter electrode 21 and the other filter electrode 22 is not strictly limited. The filter gap is preferable because narrowing it can effectively increase the strength of the electric field (corresponding to the dispersion voltage described later) formed in the ion separation space. For example, Fig. 2 and Fig. 3 are a map graph and a schematic diagram of a main part thereof illustrating the relationship between the analysis conditions (compensation voltage and dispersion voltage described later) and the amount of sample ions (ion current) detected under the analysis conditions in the analysis of one analyte using the analysis device 1. In the graph of Fig. 2, the analysis conditions with a larger amount of detected sample ions are shown in a darker color. As shown in Fig. 2, in addition to the carrier gas components, the analyte contains two components A and B as shown by the arrows in the figure. Even when the same analyte is analyzed, the amount of sample ions detected varies depending on the analysis conditions, and it can be seen that generally, the components contained in one analyte can be well separated by increasing the electric field strength. However, the more the component separation progresses, the lower the concentration of charged particles detected under the analysis conditions, making them difficult to detect. Furthermore, if the filter gap is too narrow, there is a tradeoff in that discharge and turbulent airflow are likely to occur between one filter electrode 21 and the other filter electrode 22. Therefore, the filter gap is preferably, for example, about 30 μm or more (typically, 50 μm or more) and, for example, about 500 μm or less (typically, 300 μm or less).

[0022] There is no particular limitation on the material constituting the one filter electrode 21 and the other filter electrode 22. The material constituting the one filter electrode 21 and the other filter electrode 22 may be any of various conductive materials capable of generating an electric field between the two filter electrodes 21, 22, which will be described later, and may be any of metal materials, inorganic conductive materials, and organic conductive materials. When it is considered that the sample to be detected and its ions exhibit metal corrosiveness, it is preferable to adopt either an inorganic conductive material or an organic conductive material as the conductive material constituting the surfaces of the one filter electrode 21 and the other filter electrode 22. There is no particular limitation on the metal material constituting the one filter electrode 21 and the other filter electrode 22. For example, when the one filter electrode 21 and the other filter electrode 22 are produced by lithography using an ArF excimer laser, the one filter electrode 21 and the other filter electrode 22 may be made of any one metal selected from highly conductive metals such as gold (Au), copper (Cu), titanium (Ti), aluminum (Al), Cr (chromium), molybdenum (Mo), Ta (tantalum), and tungsten (W), an alloy of the metal, or an alloy containing two or more of the metals. These metal materials may be laminated, for example, from the top layer, such as W / Ta, Ti / Al, Ti / Al / Ti, or Cu / Ti, to enhance physical properties such as adhesion to the base (typically the one substrate 23 or the other substrate 24). Examples of inorganic conductive materials include ITO (Indium Tin Oxide), IZO (Indium-Zinc-Oxide), IGZO (Indium-Gallium-Zinc-Oxide), ZnO, etc. Examples of organic conductive materials include polyacetylene, polythiophenes, etc. One filter electrode 21 and the other filter electrode 22 may be formed by laminating two or more of a metal material, an inorganic conductive material, and an organic conductive material.

[0023] The one substrate 23 is an element that supports the one filter electrode 21. In this embodiment, as shown in FIG. 1, the one substrate 23 includes the one filter electrode 21 and the deflection electrode 27 at positions spaced apart in the flow direction. The other substrate 24 is an element that supports the other filter electrode 22. In this embodiment, the other substrate 24 includes the other filter electrode 22 and the detection electrode 26 at positions spaced apart in the flow direction. The one substrate 23 and the other substrate 24 are arranged so that the main surfaces (an example of the support surface) on which these electrodes 21, 22, 26, and 27 are provided face each other. The one substrate 23 and the other substrate 24 are flat plates that form a long rectangle. The air supply direction (movement direction of the charged particles) of the pump 30 in the flow path 25 coincides with the longitudinal direction of the one substrate 23 and the other substrate 24, and the one filter electrode 21 and the other filter electrode 22 are arranged on the upstream side, and the detection electrode 26 and the deflection electrode 27 are arranged on the downstream side. The specific shapes of one substrate 23 and the other substrate 24 are not particularly limited as long as they can support one filter electrode 21 and the other filter electrode 22, and detection electrode 26 and deflection electrode 27 in parallel with a predetermined gap. For example, one substrate 23 and the other substrate 24 may be integrally formed into a tubular shape (such as a rectangular tube or a cylindrical shape).

[0024] The first substrate 23 and the second substrate 24 of this embodiment can be made of various insulating materials having electrical insulation properties. 7 Ωcm or more (e.g., 10 10 Ωcm or more, 10 12 Ωcm or more, even 10 15 Examples of the material include a material having a volume resistivity of Ωcm or more, and may be, for example, an organic material or an inorganic material having the volume resistivity. In this embodiment, from the viewpoint that the electrodes can be suitably formed by lithography technology, flat glass substrates are used as the one substrate 23 and the other substrate 24, although the present invention is not limited thereto. The thickness of the one substrate 23 and the other substrate 24 is not limited, but may be, for example, about 0.1 to 1 mm (for example, 0.5 mm, 0.7 mm, etc.).

[0025] The detection electrode 26 is an element that receives the charge of the charged particles introduced into the detection cell 20 by contacting the detection electrode 26. The detection electrode 26 is arranged next to the other filter electrode 22 on the downstream side of the flow path 25. The detection electrode 26 has a collection surface 26A that receives the charged particles. The detection electrode 26 is also connected to the control unit 40. With this configuration, the detection electrode 26 allows the control unit 40 to grasp the amount of charged particles received at the collection surface 26A.

[0026] The deflection electrode 27 is an element for deflecting the charged particles introduced into the detection cell 20 toward the detection electrode 26 so that the charged particles are collected by the detection electrode 26. The deflection electrode 27 is arranged next to one of the filter electrodes 21 on the downstream side of the flow path 25. The deflection electrode 27 is arranged to face the detection electrode 26. The deflection electrode 27 is connected to a second potential adjustment unit 42 described later. The deflection electrode 27 is capable of forming an electric field between the detection electrode 26 and the deflection electrode 27 for deflecting the charged particles to the detection electrode 26 by applying a voltage to the deflection electrode 27 by the second potential adjustment unit 42. The space between the detection electrode 26 and the deflection electrode 27 is a detection space for detecting the charged particles that have passed through the ion separation space.

[0027] The shapes of the detection electrode 26 and the deflection electrode 27 are not particularly limited. The thickness of each of the detection electrode 26 and the deflection electrode 27 may be, for example, about 1 μm or less, typically 600 nm or less, for example, 500 nm or less, 400 nm or less, 200 nm or less, etc. Also, the thickness of each of the detection electrode 26 and the deflection electrode 27 may be independently about 10 nm or more, typically 50 nm or more, for example, 100 nm or more. The material and structure constituting the detection electrode 26 and the deflection electrode 27 may be the same as those of the one filter electrode 21 and the other filter electrode 22 described above.

[0028] The control unit 40 is an element that controls the operation of the analysis device 1. The control unit 40 of this embodiment is connected to the detection cell 20 as shown in FIG. 4. More specifically, the control unit 40 is connected to one of the filter electrodes 21, the detection electrode 26, and the deflection electrode 27, and is configured to be able to control the operations of these electrodes. In addition, the other filter electrode 22 of the detection cell 20 in this embodiment is grounded (grounded). In addition, the control unit 40 of this embodiment is additionally connected to the ionization source 10 and the pump 30, and is also able to be connected to an external power source for supplying power to the analysis device 1.

[0029] The control unit 40 is configured by a microcomputer having an interface (I / F) for transmitting and receiving various information, a central processing unit (CPU) for executing instructions of a control program, a ROM (read only memory) storing a program executed by the CPU, a RAM (random access memory) used as a working area for expanding the program, a memory unit M for storing various information, a timer T having a timekeeping function, etc. Although not limited thereto, the ROM may store, for example, a computer program, a database, a data table used for applying a voltage to each of the first potential adjustment unit 41 and the second potential adjustment unit 42, a computer program, a database, a table, etc. for performing various analysis processing based on the amount of detected charged particles. In addition, the memory unit M may store, for example, ID information of the analysis target, information on the amount of detected charged particles, information used in various analysis processing, information on the analysis result, etc.

[0030] The control unit 40 includes a first potential adjusting unit 41, a second potential adjusting unit 42, a measuring unit 43, an ionization source control unit 44, and a flow rate adjusting unit 45. Each of these units may be independently configured by hardware, or may be functionally realized by a CPU executing a program.

[0031] The first potential adjustment unit 41 is an element that adjusts the potential difference generated between one filter electrode 21 and the other filter electrode 22. The first potential adjustment unit 41 generates a potential difference (filter voltage) between one filter electrode 21 and the other filter electrode 22, thereby forming an electric field between one filter electrode 21 and the other filter electrode 22. Here, the mobility of ions is constant regardless of the electric field strength in a low electric field, but its value changes depending on the electric field strength in a high electric field. Therefore, the first potential adjustment unit 41 typically includes a variable voltage generator such as a pulse voltage generator, and is capable of applying, for example, a square-wave dispersion voltage (Dispersion Voltage: DV) shown in FIG. 5A. The dispersion voltage applied between one filter electrode 21 and the other filter electrode 22 is a bipolar pulse voltage that exhibits both positive and negative polarities. The potentials in both positive and negative polarities are typically switched asymmetrically. The voltage waveform is a high voltage level V that forms a high electric field. H In a period T H and a low voltage level V L In a period T L In this voltage waveform, the time average of the voltage is set to zero.

[0032] In the ion separation space between the filter electrode 21 on one side and the filter electrode 22 on the other side, a flow of carrier gas (typically neutral) containing charged particles is formed at a constant flow rate by driving the pump 30 by the flow rate adjusting unit 45 described later. H By applying the voltage, a high electric field is formed in the ion separation space. In addition, the first potential adjustment unit 41 adjusts the low voltage level V LA low electric field is formed in the ion separation space by applying a voltage of 10 V to the filter electrode 21. The high electric field and the low electric field have different polarities. When a charged particle is sent to an environment where such asymmetric electric fields are alternately generated, the charged particle moves in a zigzag manner while being alternately attracted to one filter electrode 21 and the other filter electrode 22. At this time, a charged particle that is largely deflected by one filter electrode 21 or the other filter electrode 22 collides with one filter electrode 21 or the other filter electrode 22 and cannot pass through the flow path 25. Only charged particles that are balanced between one filter electrode 21 and the other filter electrode 22 pass through the flow path 25 and are sent to the downstream detection electrode 26. The ion species passing through the flow path 25 can be changed as follows. That is, the first potential adjustment unit 41 may apply a compensation voltage (CV) shown in FIG. 5B between one filter electrode 21 and the other filter electrode 22 while changing the magnitude, by superimposing the compensation voltage DV. The compensation voltage is a DC voltage with a constant rate of change and period T for each given dispersion voltage DV. CV By varying the compensation voltage CV with a period T, ion species with different mobilities can be sent to the detection space in sequence. CV The lower limit voltage V CVH to upper limit voltage V CVH The figure shows how the signal is changed within a range of

[0033] The second potential adjustment unit 42 is an element that applies a predetermined potential difference between the detection electrode 26 and the deflection electrode 27. The second potential adjustment unit 42 in this embodiment is connected to the deflection electrode 27 and applies a potential to the deflection electrode 27. If the charged particles introduced into the detection cell 20 are positive ions, the second potential adjustment unit 42 adjusts the potential of the deflection electrode 27 so that the deflection electrode 27 has a higher potential than the detection electrode 26. If the charged particles introduced into the detection cell 20 are negative ions, the second potential adjustment unit 42 adjusts the potential of the deflection electrode 27 so that the deflection electrode 27 has a lower potential than the detection electrode 26. This makes it possible to deflect the charged particles that have passed through the ion separation space toward the detection electrode 26.

[0034] The measuring unit 43 is an element that detects the number of charged particles that have reached the detection electrode 26. The measuring unit 43 is connected to the detection electrode 26, and obtains the amount of ions by converting a current value based on the amount of charged particles that have reached the detection electrode 26 into a voltage value using a transimpedance circuit. The measuring unit 43 may be configured not only to measure the amount of charged particles, but also to qualitatively and quantitatively determine the amount of charged particles in cooperation with, for example, the first potential adjustment unit 41. Information regarding the amount of charged particles measured by the measuring unit 43 is stored in, for example, the memory unit M.

[0035] The ionization source control unit 44 is connected to the ionization source 10 and is configured to be able to control the operation of the ionization source 10. The ionization source control unit 44 is configured to be able to switch the polarity of the generated charged particles between positive ions and negative ions, for example, by switching the polarity of the voltage applied to the needle electrode in the ionization source 10 between positive and negative. Although not limited thereto, when the ionization source control unit 44 generates negative charged particles, the first potential adjustment unit 41 and the second potential adjustment unit 42 adjust the voltages applied to one of the filter electrodes 21 and the deflection electrode 27, respectively, so that the negative charged particles can pass through the flow path 25. When the ionization source control unit 44 generates positive charged particles, the first potential adjustment unit 41 and the second potential adjustment unit 42 adjust the voltages applied to one of the filter electrodes 21 and the deflection electrode 27, respectively, so that the positive charged particles can pass through the flow path 25.

[0036] The flow rate adjustment unit 45 is connected to the pump 30 and configured to be able to control the operation of the pump 30. The flow rate adjustment unit 45 is capable of adjusting the flow rate of the gas in the detection cell 20, for example, by controlling the timing of driving and stopping the pump 30 and the rotation speed of a fan provided in the pump 30.

[0037] Next, a detailed configuration of the detector 50 will be described. The detector 50 according to this embodiment includes three detection cells 20 and a control unit 40. The three detection cells 20 include a first detection cell (first detection unit) 20α, a second detection cell (second detection unit) 20β, and a third detection cell 20γ. In the following, when the three detection cells 20 are to be distinguished from one another, the subscript α is added to the reference numeral of the "first detection cell", the subscript β is added to the reference numeral of the "second detection cell", and the subscript γ is added to the reference numeral of the "third detection cell", and when the three detection cells are to be referred to collectively without distinction, no subscript is added to the reference numeral. In addition, when distinguishing between the components included in the three detection cells 20 (one filter electrode 21, the other filter electrode 22, one substrate 23, the other substrate 24, the flow path 25, the detection electrode 26, and the deflection electrode 27), the subscript α is added to the symbol of each component included in the first detection cell 20α (the “first filter electrode” which is one filter electrode 21, the “second filter electrode” which is the other filter electrode 22, the “first substrate” which is one substrate 23, the “second substrate” which is the other substrate 24, the “first flow path” which is the flow path 25, the “first detection electrode” which is the detection electrode 26, and the “first deflection electrode” which is the deflection electrode 27), and the subscript α is added to the symbol of each component included in the second detection cell 20β (the “third filter electrode” which is one filter electrode 21, the “third filter electrode” which is the other filter electrode 22, The subscript β is added to the reference symbols of the first and second detection cells 20γ (the "fifth filter electrode" which is one filter electrode 21, the "sixth filter electrode" which is the other filter electrode 22, the "fifth substrate" which is one substrate 23, the "sixth substrate" which is the other substrate 24, the "third flow path" which is the flow path 25, the "third detection electrode" which is the detection electrode 26, and the "second deflection electrode" which is the deflection electrode 27), and the subscript γ is added to the reference symbols of the respective components provided in the third detection cell 20γ (the "fifth filter electrode" which is one filter electrode 21, the "sixth filter electrode" which is the other filter electrode 22, the "fifth substrate" which is one substrate 23, the "sixth substrate" which is the other substrate 24, the "third flow path" which is the flow path 25, the "third detection electrode" which is the detection electrode 26, and the "third deflection electrode" which is the deflection electrode 27). When they are referred to collectively without distinction, the subscript is not added to the reference symbols.

[0038] The first potential adjustment unit 41 included in the control unit 40 will be described in detail with reference to FIG. 6. As shown in FIG. 6, the first potential adjustment unit 41 includes a potential supply circuit 60 as the variable voltage generator described above, which supplies a potential to each of the filter electrodes 21 (first filter electrode 21α, third filter electrode 21β, and fifth filter electrode 21γ described later) included in each detection cell 20α to 20γ. The potential supply circuit 60 is controlled by a CPU. A DC power supply 61, a PWM (Pulse Width Modulation) signal supply unit 62, a first compensation potential supply unit 63, a second compensation potential supply unit 64, and a third compensation potential supply unit 65 are connected to the potential supply circuit 60. The DC power supply 61 supplies a DC voltage of, for example, 100V to the potential supply circuit 60. The PWM signal supply unit 62, the first compensation potential supply unit 63, the second compensation potential supply unit 64, and the third compensation potential supply unit 65 are all DC power supplies. The PWM signal supplying unit 62 is controlled by the CPU to supply a PWM signal to the potential supplying circuit 60. The first compensating potential supplying unit 63, the second compensating potential supplying unit 64, and the third compensating potential supplying unit 65 are controlled by the CPU to supply the first compensating potential, the second compensating potential, and the third compensating potential, respectively, to the potential supplying circuit 60. These first compensating potential, the second compensating potential, and the third compensating potential correspond to the compensation voltage CV described above. Specifically, the first compensating potential supplying unit 63, the second compensating potential supplying unit 64, and the third compensating potential supplying unit 65 output the first compensating potential, the second compensating potential, and the third compensating potential, respectively, which are changed within a range of ±20V. Therefore, in this embodiment, the lower limit voltage V CVL becomes -20V, and the upper limit voltage V of the compensation voltage CV CVH becomes +20V (see Figure 5B).

[0039] 7, the potential supply circuit 60 includes a first dual inductor 66, a transistor 67, and a resonant circuit 68 as circuit elements. The potential supply circuit 60 includes an input circuit 60A connected to a DC power supply 61 and a PWM signal supply unit 62, and a first output circuit 60B connected to one filter electrode 21 of the detection cell 20, a first compensation potential supply unit 63, a second compensation potential supply unit 64, and a third compensation potential supply unit 65. The input circuit 60A includes at least a part of the first dual inductor 66 (a first input winding 66A described later), a transistor 67, and a resonant circuit 68. The input circuit 60A constitutes a so-called class E amplifier. The first output circuit 60B includes at least a part of the first dual inductor 66 (a first output winding 66B, a second output winding 66C, and a third output winding 66D, which will be described later) and a part of the detection cell 20 (a first filter electrode 21α, a third filter electrode 21β, and a fifth filter electrode 21γ, which are one of the filter electrodes 21). Each circuit element constituting the potential supply circuit 60 will be described below.

[0040] The first dual inductor 66 includes a first input winding (first winding) 66A, a first output winding (second winding) 66B, a second output winding (third winding) 66C, and a third output winding 66D. The first input winding 66A is a primary coil. The first input winding 66A has a first input end 66A1 which is an end on the input side, and a first output end 66A2 which is an end on the output side. The first input end 66A1 is connected to the DC power supply 61. The first output end 66A2 is connected in parallel to the transistor 67 and the resonant circuit 68. The inductance of the first input winding 66A is, for example, about 5 μH. The first input end 66A1 of the first input winding 66A and a resistor R1 are connected in parallel to the DC power supply 61. The resistance value of the resistor R1 is, for example, about 100 kΩ.

[0041] The first output winding 66B, the second output winding 66C, and the third output winding 66D are all secondary coils. That is, the first dual inductor 66 has the same number of output windings 66B to 66D as the number of detection cells 20α to 20γ. The inductances of the first output winding 66B, the second output winding 66C, and the third output winding 66D are the same as the inductance of the first input winding 66A, and are, for example, about 5 μH. The first output winding 66B, the second output winding 66C, and the third output winding 66D are connected in series with each other. The first output winding 66B has a second input end 66B1 which is an input end, and a second output end 66B2 which is an output end. The second output winding 66C has a third input end 66C1 which is an input end and a third output end 66C2 which is an output end. The third output winding 66D has a fourth input end 66D1 which is an input end and a fourth output end 66D2 which is an output end. The connection manner of the input ends 66B1 to 66D1 and the output ends 66B2 to 66D2 of the first output winding 66B, the second output winding 66C and the third output winding 66D will be described later.

[0042] As shown in Fig. 8, the first dual inductor 66 includes a first core material (first core) 66E. The first core material 66E is made of a magnetic material such as permalloy or ferrite. The first core material 66E has an annular shape. A first input winding 66A, a first output winding 66B, a second output winding 66C, and a third output winding 66D are wound around the first core material 66E. The first input winding 66A, the first output winding 66B, the second output winding 66C, and the third output winding 66D wound around the first core material 66E each have a spiral shape. The winding direction of the first input winding 66A from the first output end 66A2 to the first input end 66A1 about the first core material 66E is opposite to the winding direction of the first output winding 66B, the second output winding 66C, and the third output winding 66D from the output end 66B2-66D2 to the input end 66B1-66D1 about the first core material 66E. Specifically, the first input winding 66A has a portion seen in the foreground of the first core material 66E that faces from the upper left to the lower right, and is S-wound about the first core material 66E. The first output winding 66B, the second output winding 66C, and the third output winding 66D have a portion seen in the foreground of the first core material 66E that faces from the upper right to the lower left, and are all Z-wound about the first core material 66E. The number of turns of the first input winding 66A around the first core material 66E is, for example, approximately the same as the sum of the numbers of turns of the first output winding 66B, the second output winding 66C, and the third output winding 66D around the first core material 66E.

[0043] The transistor 67 is, for example, an N-channel MOSFET (metal-oxide-semiconductor field-effect transistor). Specifically, for example, a model number "TK12A60D" manufactured by Toshiba Electronic Devices & Storage Corporation may be used as the transistor 67. As shown in FIG. 7, the transistor 67 includes a gate electrode 67A, a source electrode 67B, a drain electrode 67C, and a channel region. The gate electrode 67A is connected to the PWM signal supply unit 62. The gate electrode 67A and a resistor R2 are connected in parallel to the PWM signal supply unit 62. The resistor R2 is connected in series to the resistor R1. The resistance value of the resistor R2 is, for example, about 150 kΩ. The drain electrode 67C is connected in parallel to the resonant circuit 68 with respect to the first output side end 66A2 of the first input side winding 66A. The source electrode 67B is grounded. When a voltage exceeding a threshold voltage is applied to the gate electrode 67A, the transistor 67 is turned on. In the transistor 67 in the ON state, a drain current flows between the source electrode 67B and the drain electrode 67C via the channel region. A high potential and a low potential are alternately and periodically supplied to the gate electrode 67A from the PWM signal supplying unit 62. During a period in which the gate electrode 67A is supplied with a high potential (hereinafter referred to as an ON period), the transistor 67 is in the ON state. During a period in which the gate electrode 67A is supplied with a low potential (hereinafter referred to as an OFF period), the transistor 67 is in the ON state. The duty ratio, which is the time ratio between the ON period and the OFF period in the PWM signal, is appropriately adjusted by the control unit 40 controlling the PWM signal supplying unit 62.

[0044] The resonant circuit 68 includes one inductor L1, two capacitors C1 and C2, and one resistor R3. The capacitors C1 and C2 are connected in parallel to the first output end 66A2 of the first input winding 66A. Of the pair of electrodes constituting the capacitor C1, the electrode opposite to the electrode connected to the first output end 66A2 is grounded. The capacitance of the capacitor C1 is, for example, about 259 pF. The capacitance of the capacitor C2 is, for example, about 755 pF. Of the pair of electrodes constituting the capacitor C1, the electrode opposite to the electrode connected to the first output end 66A2 is connected to the input end of the inductor L1. The inductance of the inductor L1 is, for example, about 0.639 μH. The input end of the resistor R3 is connected to the output end of the inductor L1. The resistance value of the resistor R3 is, for example, about 13 Ω. The output end of the resistor R3 is grounded.

[0045] 7 and 9, the first output circuit 60B of the potential supply circuit 60 according to this embodiment includes a first resistor (first resistive element) 69, a second resistor (second resistive element) 70, and a third resistor 71. The first resistor 69, the second resistor 70, and the third resistor 71 are alternately connected in series to the first output winding 66B, the second output winding 66C, and the third output winding 66D. Hereinafter, the circuit configuration of the first output circuit 60B will be described in detail together with the connection modes of the input ends 66B1 to 66D1 and the output ends 66B2 to 66D2 of the first output winding 66B, the second output winding 66C, and the third output winding 66D.

[0046] As shown in FIG. 7 and FIG. 9, the first resistor 69 has a first end 69A, which is an input end, connected to the second output end 66B2 of the first output winding 66B. The first resistor 69 has a second end 69B, which is an output end, grounded. The second resistor 70 has a third end 70A, which is an input end, connected to the third output end 66C2 of the second output winding 66C. The second resistor 70 has a fourth end 70B, which is an output end, connected to the second input end 66B1 of the first output winding 66B. The third resistor 71 has a fifth end 71A, which is an input end, connected to the fourth output end 66D2 of the third output winding 66D. The third resistor 71 has a sixth end 71B, which is an output end, connected to the third input end 66C1 of the second output winding 66C.

[0047] As shown in FIG. 7 and FIG. 9, the second input end 66B1 of the first output winding 66B is connected to the capacitor C3 in addition to the fourth end 70B of the second resistor 70. The capacitance of the capacitor C3 is, for example, about 10 nF. Of the pair of electrodes constituting the capacitor C3, the electrode opposite to the electrode connected to the second input end 66B1 is connected to the output end of the resistor R4 and the first filter electrode (first electrode) 21α, which is one of the filter electrodes 21 provided in the first detection cell 20α. The resistance value of the resistor R4 is, for example, about 10 kΩ. The input end of the resistor R4 is connected to the first compensation potential supplying unit 63. In this way, the first output winding 66B and the first filter electrode 21α are connected in parallel to the first compensation potential supplying unit 63. The first compensation potential supplied from the first compensation potential supplying unit 63 to the first filter electrode 21α is the compensation voltage CV shown in FIG. 5B. Also, the second filter electrode (second electrode) 22α, which is the other filter electrode 22 provided in the first detection cell 20α, is grounded. As shown in FIG. 9, the first detection cell 20α is configured such that the first filter electrode 21α and the first detection electrode (third electrode) 26α, which is the detection electrode 26, are provided on the first substrate 23α, which is one substrate 23, and the second filter electrode 22α and the first deflection electrode 27α, which is the deflection electrode 27, are provided on the second substrate 24α, which is the other substrate 24. In the first detection cell 20α, a first flow path (flow path) 25α is formed between the first filter electrode 21α and the first detection electrode 26α and the second filter electrode 22α and the first deflection electrode 27α. Note that, for example, a capacitance of about 20 pF is formed between the first filter electrode 21α and the second filter electrode 22α.

[0048] As shown in FIG. 7 and FIG. 9, the second output winding 66C has a third input end 66C1 connected to the sixth end 71B of the third resistor 71 and also to the capacitor C4. The capacitance of the capacitor C4 is, for example, about 10 nF. Of the pair of electrodes constituting the capacitor C4, the electrode opposite to the electrode connected to the third input end 66C1 is connected to the output end of the resistor R5 and the third filter electrode (fourth electrode) 21β, which is one of the filter electrodes 21 provided in the second detection cell 20β. The resistance value of the resistor R5 is, for example, about 10 kΩ. The input end of the resistor R5 is connected to the second compensation potential supplying unit 64. In this way, the second output winding 66C and the third filter electrode 21β are connected in parallel to the second compensation potential supplying unit 64. The second compensation potential supplied from the second compensation potential supplying unit 64 to the third filter electrode 21β is the compensation voltage CV shown in FIG. 5B. Also, the fourth filter electrode (fifth electrode) 22β, which is the other filter electrode 22 provided in the second detection cell 20β, is grounded. As shown in FIG. 9, the second detection cell 20β is configured such that the third filter electrode 21β and the second detection electrode (sixth electrode) 26β, which is the detection electrode 26, are provided on the third substrate 23β, which is one substrate 23, and the fourth filter electrode 22α and the second deflection electrode 27β, which is the deflection electrode 27, are provided on the fourth substrate 24β, which is the other substrate 24. In the second detection cell 20β, a second flow path (flow path) 25β is formed between the third filter electrode 21β and the second detection electrode 26β and the fourth filter electrode 22β and the second deflection electrode 27β. Note that, for example, a capacitance of about 20 pF is formed between the third filter electrode 21β and the fourth filter electrode 22β.

[0049] As shown in Figs. 7 and 9, the third output winding 66D has a fourth input end 66D1 connected to a capacitor C5. The capacitance of the capacitor C5 is, for example, about 10 nF. Of the pair of electrodes constituting the capacitor C5, the electrode opposite to the electrode connected to the fourth input end 66D1 is connected to the output end of the resistor R6 and the fifth filter electrode 21γ, which is one of the filter electrodes 21 provided in the third detection cell 20γ. The resistance value of the resistor R6 is, for example, about 10 kΩ. The input end of the resistor R6 is connected to the third compensation potential supplying unit 65. In this way, the third output winding 66D and the fifth filter electrode 21γ are connected in parallel to the third compensation potential supplying unit 65. The third compensation potential supplied from the third compensation potential supplying unit 65 to the fifth filter electrode 21γ is the compensation voltage CV shown in Fig. 5B. The sixth filter electrode 22γ, which is the other filter electrode 22 provided in the third detection cell 20γ, is grounded. As shown in FIG. 9, the third detection cell 20γ is configured such that the fifth filter electrode 21γ and the third detection electrode 26γ, which is the detection electrode 26, are provided on the fifth substrate 23γ, which is one substrate 23, and the sixth filter electrode 22γ and the third deflection electrode 27γ, which is the deflection electrode 27, are provided on the sixth substrate 24γ, which is the other substrate 24. In the third detection cell 20γ, a third flow path 25γ is formed between the fifth filter electrode 21γ and the third detection electrode 26γ and the sixth filter electrode 22γ and the third deflection electrode 27γ. Note that a capacitance of, for example, about 20 pF is formed between the fifth filter electrode 21γ and the sixth filter electrode 22γ.

[0050] Next, the operation of the detector 50 according to this embodiment will be described. First, the operation of the input circuit 60A of the potential supply circuit 60 will be described. A return current flows in the resonant circuit 68 included in the input circuit 60A according to the driving state of the transistor 67. Specifically, when the PWM signal output from the PWM signal supply unit 62 controlled by the control unit 40 is in an ON period and the transistor 67 is in an ON state, a drain current flows between the source electrode 67B and the drain electrode 67C through the channel region, and a return current (first return current) flows from the inductor L1 side to the capacitor C2 side in the resonant circuit 68. At this time, the drain current flowing in the transistor 67 is the current flowing from the DC power supply 61 plus the return current. Therefore, when the transistor 67 is in an ON state, no current flows in the capacitor C1, and the potential thereof is kept at 0. The potential of the capacitor C1 is equal to the drain voltage. On the other hand, when the PWM signal output from the PWM signal supplying unit 62 is in an OFF period and the transistor 67 is in an OFF state, no drain current flows through the transistor 67, and a return current (second return current) flows from the capacitor C2 side to the inductor L1 side in the resonant circuit 68. That is, the return current flowing through the resonant circuit 68 when the transistor 67 is in an OFF state is in the opposite direction to the return current flowing through the resonant circuit 68 when the transistor 67 is in an ON state. When the transistor 67 is in an OFF state, the current from the DC power supply 61 flows in a manner that it is divided between the capacitors C1 and C2. At this time, a current obtained by subtracting the return current from the current flowing from the DC power supply 61 flows through the capacitor C1. Accordingly, the capacitor C1 is charged, and the potential of the capacitor C1, that is, the drain voltage, rises. By appropriately setting the capacitors C1 and C2, the drain voltage can be set to 0 V at the timing when the transistor 67 is switched between the ON state and the OFF state (the timing when the ON period and the OFF period of the PWM signal switch), which allows the transistor 67 to be driven in a ZVS (Zero Voltage Switching) state.

[0051] Next, the operation of the first output circuit 60B of the potential supply circuit 60 will be described. When the transistor 67 in the input circuit 60A is switched between the ON state and the OFF state based on the PWM signal supplied from the PWM signal supply unit 62, the current flowing through the first input winding 66A changes in synchronization with the switching. Then, in the first output circuit 60B, induced electromotive forces are generated in the first output winding 66B, the second output winding 66C, and the third output winding 66D. In detail, a first end 69A of the first resistor 69 is connected to a second output end 66B2 of the first output winding 66B, a second input end 66B1 of the first output winding 66B is connected to a fourth end 70B of the second resistor 70, and a third end 70A of the second resistor 70 is connected to a third output end 66C2 of the second output winding 66C. Therefore, a voltage V divided according to the resistance values ​​of the first resistor 69, the second resistor 70, and the third resistor 71 is applied to the first output winding 66B, the second output winding 66C, and the third output winding 66D. fup1 ,V fup3 ,V fup3 Specifically, a voltage V corresponding to the potential of the fourth input terminal 66D1 is applied to the third output winding 66D. fup3 is applied to the second output winding 66C, and a voltage V fup2 is applied to the first output winding 66B, and a voltage V fup1 The voltage V applied to the third output winding 66D is fup3 is a value obtained by subtracting the power supply voltage V1 of the DC power supply 61 from the drain voltage Vd of the transistor 67. That is, an induced electromotive force obtained by offsetting the power supply voltage V1 of the DC power supply 61 from the drain voltage Vd is generated in the third output winding 66D.

[0052] On the other hand, the voltage V applied to the second output winding 66C fup2 is the voltage V applied to the third output winding 66D. fup3 The voltage V applied to the first output winding 66B is calculated by subtracting the voltage drop caused by the third output winding 66D and the voltage drop caused by the third resistor 71 from the voltage V fup1 is the voltage V applied to the third output winding 66D. fup3, the voltage V applied to the second output winding 66C is a difference between the voltage drops caused by the second output winding 66C, the second resistor 70, the third output winding 66D, and the third resistor 71. In this embodiment, the inductances of the first output winding 66B, the second output winding 66C, and the third output winding 66D are equal, and the resistances of the first resistor 69, the second resistor 70, and the third resistor 71 are equal. fup2 is the voltage V applied to the third output winding 66D. fup3 , and the voltage V applied to the first output winding 66B is fup1 is the voltage V applied to the third output winding 66D. fup3 The voltage V applied to the first output winding 66B is about 1 / 3 of the fup1 is applied to the first filter electrode 21α, and a voltage V fup2 is applied to the third filter electrode 21β, and a voltage V fup3 is applied to the fifth filter electrode 21γ. In this way, the first filter electrode 21α, the third filter electrode 21β, and the fifth filter electrode 21γ are applied with different voltages V fup1 ,V fup2 ,V fup3 is applied, the charged particles permitted to pass through the first flow path 25α formed between the first filter electrode 21α and the second filter electrode 22α can be made different from the charged particles permitted to pass through the second flow path 25β formed between the third filter electrode 21β and the fourth filter electrode 22β, and the charged particles permitted to pass through the third flow path 25γ formed between the fifth filter electrode 21γ and the sixth filter electrode 22γ. In other words, three types of charged particles can be detected in the three detection cells 20α, 20β, and 20γ, thereby improving convenience.

[0053] In addition, if the output ends of the three output windings are grounded, different voltages V fup1 ,V fup2 ,V fup3In order to obtain the above, it is necessary to make the winding ratio of each output winding with respect to the first core material 66E different, whereas in this embodiment, this is not necessary. Therefore, according to this embodiment, the degree of freedom regarding the winding ratio of the first output winding 66B, the second output winding 66C, and the third output winding 66D with respect to the first core material 66E is increased, so that the space occupied by the first output winding 66B, the second output winding 66C, and the third output winding 66D in the first core material 66E can be reduced. This is advantageous in increasing the number of detection cells 20 to which potential is supplied by the potential supply circuit 60.

[0054] The voltage V applied to the first filter electrode 21α, the third filter electrode 21β, and the fifth filter electrode 21γ fup1 ,V fup2 ,V fup3 The polarity of the voltage V applied to the first filter electrode 21α, the third filter electrode 21β, and the fifth filter electrode 21γ is inverted in synchronization with the switching of the transistor 67 between the ON state and the OFF state. Specifically, during an ON period in which the transistor 67 is in the ON state, a voltage of negative polarity is applied to the first filter electrode 21α, the third filter electrode 21β, and the fifth filter electrode 21γ, and during an OFF period in which the transistor 67 is in the OFF state, a voltage of positive polarity is applied to the first filter electrode 21α, the third filter electrode 21β, and the fifth filter electrode 21γ. In this manner, the voltage V applied to the first filter electrode 21α, the third filter electrode 21β, and the fifth filter electrode 21γ fup1 ,V fup2 ,V fup3 is a voltage obtained by superimposing the compensation voltages CV (see FIG. 5B) supplied from the compensation potential supplying parts 63 to 65 on the square-wave dispersion voltage DV (see FIG. 5A).

[0055] As described above, none of the first filter electrode 21α, the third filter electrode 21β, and the fifth filter electrode 21γ is directly connected to the first input winding 66A. Therefore, even if a load fluctuation occurs, for example, when the intervals between the first filter electrode 21α and the second filter electrode 22α, between the third filter electrode 21β and the fourth filter electrode 22β, or between the fifth filter electrode 21γ and the sixth filter electrode 22γ vary, the load fluctuation is prevented from causing a potential fluctuation in the first input winding 66A, the first input end 66A1 of which is connected to the DC power supply 61. This stabilizes the induced electromotive forces generated in the first output winding 66B, the second output winding 66C, and the third output winding 66D, so that the detection of charged particles can be stably performed.

[0056] Next, specific voltage waveforms etc. when the potential supply circuit 60 provided in the detector 50 configured as described above is operated will be described with reference to Figures 10 and 11. The waveforms of the drain voltage Vd and the drain current Id, which change according to the driving state of the transistor 67, are shown in the graph of Figure 10 together with the waveform of the gate voltage Vgs. The horizontal axis of the graph in Figure 10 is time (unit: μs). The vertical axis of the graph in Figure 10 is voltage (unit: V) related to the drain voltage Vd and the potential difference Vgs, and current (unit: A) related to the drain current Id.

[0057] According to FIG. 10, when a low potential is supplied from the PWM signal supply unit 62 to the gate electrode 67A, the gate voltage Vgs becomes approximately 0V. When a high potential is supplied from the PWM signal supply unit 62 to the gate electrode 67A, the gate voltage Vgs becomes a positive voltage value exceeding the threshold voltage. In FIG. 10, an OFF period in which a low potential is supplied to the gate electrode 67A is indicated as "OFF", and an ON period in which a high potential is supplied to the gate electrode 67A is indicated as "ON". According to FIG. 10, during the ON period, the drain current Id flows but the drain voltage Vd becomes approximately 0V, and during the OFF period, the drain current Id hardly flows but the drain voltage Vd becomes a positive value. The waveform of the drain voltage Vd during the OFF period is approximately a half sine wave. The peak value of the drain voltage Vd during the OFF period is higher than the power supply voltage V1 (100V) of the DC power supply 61, for example, 3.5 times or more (for example, 3.521 times) the power supply voltage V1. This is because the drain voltage Vd is amplified (boosted) by the transistor 67 and the resonant circuit 68. Therefore, if the control unit 40 controls the PWM signal supply unit 62 to output a high-frequency PWM signal, it is possible to obtain a high-frequency, high-voltage drain voltage Vd. According to FIG. 10, the drain voltage Vd is almost 0V at the timing when the ON period and the OFF period are switched. In this way, the transistor 67 according to this embodiment is driven in a ZVS state, which is suitable for achieving low power consumption. The control unit 40 controls the PWM signal supply unit 62 to supply a PWM signal whose ON period is longer than the OFF period to the gate electrode 67A.

[0058] Next, a voltage V is applied to the first filter electrode 21α, the third filter electrode 21β, and the fifth filter electrode 21γ. fup1 ~V fup3 The waveform of is shown in the graph in Figure 11. The horizontal axis of the graph in Figure 11 is time (unit: μs). The vertical axis of the graph in Figure 11 is voltage V fup1 ~V fup3 11 shows the driving state of the transistor 67 and the voltage V fup1 ~V fup3In order to show the relationship between the voltage V applied to the first filter electrode 21α, the third filter electrode 21β, and the fifth filter electrode 21γ, the OFF period during which the gate electrode 67A is supplied with a low potential is indicated as “OFF”, and the ON period during which the gate electrode 67A is supplied with a high potential is indicated as “ON”. fup1 ~V fup3 is a voltage obtained by superimposing a compensation voltage CV, which is a first compensation potential, a second compensation potential, and a third compensation potential supplied from a first compensation potential supplying unit 63, a second compensation potential supplying unit 64, and a third compensation potential supplying unit 65, on a dispersion voltage DV, which is an induced electromotive force generated in the first output winding 66B, the second output winding 66C, and the third output winding 66D depending on the driving state of the transistor 67. fup1 ~V fup3 In this example, the compensation voltage CV is 0V. When the compensation voltage CV is 0V, the dispersion voltage DV is equal to the voltage V fup1 ~V fup3 is equal to.

[0059] According to FIG. 11, the first filter electrode 21α, the third filter electrode 21β, and the fifth filter electrode 21γ receive a voltage V fup1 ~V fup3 In detail, during the OFF period of the transistor 67, the voltage V fup1 ~V fup3 In both cases, the polarity of the potential is positive. The voltage V fup1 ~V fup3 The waveform of the dispersion voltage DV is approximately a half sine wave. The voltage V applied to the fifth filter electrode 21γ during the OFF period fup3 The voltage V applied to the third filter electrode 21β during the OFF period is a value obtained by offsetting the power supply voltage V1 (100 V) of the DC power supply 61 from the drain voltage Vd, and specifically, the peak value is about 300 V. fup2 is the voltage V applied to the fifth filter electrode 21γ fup3The voltage V applied to the first filter electrode 21α during the OFF period is a difference between the voltage V and the voltage drop (approximately 100 V) caused by the third output winding 66D and the third resistor 71, and specifically, the peak value is approximately 200 V. fup1 is the voltage V applied to the fifth filter electrode 21γ fup3 The voltage V during the OFF period is calculated by subtracting the voltage drops (approximately 200 V) caused by the second output winding 66C, the second resistor 70, the third output winding 66D, and the third resistor 71 from the voltage V during the OFF period. Specifically, the peak value is approximately 100 V. fup1 ~V fup3 The peak value of the dispersion voltage DV is the high voltage level V H Thus, the OFF period of transistor 67 corresponds to the high voltage level V H In a period T H Matches.

[0060] During the ON period of transistor 67, the voltage V fup1 ~V fup3 In both cases, the polarity of the potential is negative. The voltage V fup1 ~V fup3 The waveform of the dispersion voltage DV is a substantially rectangular wave. The voltage V applied to the fifth filter electrode 21γ during the ON period fup3 The voltage V applied to the third filter electrode 21β during the ON period is approximately −100 V. fup2 is the voltage V applied to the fifth filter electrode 21γ fup3 The voltage V applied to the first filter electrode 21α during the ON period is calculated by subtracting the voltage drop (approximately 33 V) caused by the third output winding 66D and the third resistor 71 from the ON period. Specifically, the voltage V is approximately −66 V. fup1 is the voltage V applied to the fifth filter electrode 21γ fup3 This is the difference between the voltage drops (approximately 66 V) caused by the second output winding 66C, the second resistor 70, the third output winding 66D, and the third resistor 71, and is specifically approximately −33 V. fup1 ~V fup3(Dispersion voltage DV) is the low voltage level V that creates the low electric field shown in FIG. L Thus, the ON period of transistor 67 corresponds to the low voltage level V L In a period T L Matches.

[0061] The absolute value of the peak value of the distributed voltage DV during the OFF period is greater than the absolute value of the peak value of the distributed voltage DV during the ON period. In contrast, as described above, the ON period is longer than the OFF period. The area of ​​the region A1 surrounded by the graph of the distributed voltage DV during the OFF period and the horizontal axis of FIG. 11 (reference line of 0 V) ​​is equal to the area of ​​the region A2 surrounded by the graph of the distributed voltage DV during the ON period and the horizontal axis of FIG. 11. With regard to the illustration of the regions A1 and A2 in FIG. 11, the voltage V fup3 is shown as a representative, but the voltage V fup1 ,V fup2 The same is true for the voltage V fup3 11 and the horizontal axis of FIG. 11 are shown as hatched regions A1 and A2. In order to make the regions A1 and A2 equal to each other, the control unit 40 controls the PWM signal supply unit 62 to adjust the duty ratio of the PWM signal and to reduce the compensation voltage CV to the lower limit voltage V CVL The compensation voltage CV is superimposed on the dispersion voltage DV and the voltage V fup1 ~V fup3 is a bipolar pulse voltage that exhibits both positive and negative polarities, similar to the dispersion voltage DV, and the potentials of both the positive and negative polarities are switched asymmetrically. As a result, the high-frequency, high-voltage voltage V fup1 ~V fup3 can be applied to first filter electrode 21α, third filter electrode 21β, and fifth filter electrode 21γ.

[0062] As described above, the detector 50 of this embodiment includes a first detection cell (first detection unit) 20α having a first filter electrode (first electrode) 21α, a second filter electrode (second electrode) 22α that faces the first filter electrode 21α with a gap therebetween and forms a first flow path (flow path) 25α for the charged particles to be detected between the first filter electrode 21α and the first filter electrode 21α, and a first detection electrode (third electrode) 26α that is arranged next to the second filter electrode 22α on the downstream side of the first flow path 25α and collects the charged particles, and a third filter electrode (fourth electrode) 21β that faces the third filter electrode 21β with a gap therebetween. a fourth filter electrode (fifth electrode) 22β which forms a second flow path (flow path) 25β for the charged particles to be detected between the fourth filter electrode 21β and the third filter electrode 21β; and a second detection electrode (sixth electrode) 26β which is arranged in line with the fourth filter electrode 22β on the downstream side of the second flow path 25β and which collects the charged particles; and a potential supply circuit 60 which supplies a potential to at least one of the first filter electrode 21α and the second filter electrode 22α and at least one of the third filter electrode 21β and the fourth filter electrode 22β, The circuit 60 includes a first input winding (first winding) 66A, a first output winding (second winding) 66B, a second output winding (third winding) 66C, an annular first core material 66E around which the first input winding 66A, the first output winding 66B, and the second output winding 66C are wound, a first resistor (first resistance element) 69, and a second resistor (second resistance element) 70. The first input winding 66A has a first input end 66A1 which is an end on the input side connected to the DC power source 61, and the first output winding 66B has a second input end 66B1 which is an end on the input side connected to the first filter electrode 21α or the second filter electrode 21α. the second output winding 66C has a third input end 66C1, which is the input end, connected to the third filter electrode 21β or the fourth filter electrode 22β; the first resistor 69 has a first end 69A, which is the input end, connected to the second output end 66B2, which is the output end of the first output winding 66B; the second resistor 70 has a third end 70A, which is the input end, connected to the third output end 66C2, which is the output end of the second output winding 66C, and a fourth end 70B, which is the output end, connected to the second input end 66B1 of the first output winding 66B.

[0063] When a potential is supplied to at least one of the first filter electrode 21α and the second filter electrode 22α by the potential supply circuit 60, an electric field is generated between the first filter electrode 21α and the second filter electrode 22α. This electric field controls whether or not the charged particles are allowed to pass through the first flow path 25α formed between the first filter electrode 21α and the second filter electrode 22α. The charged particles that have passed through the first flow path 25α are collected and detected by the first detection electrode 26α. Similarly, when a potential is supplied to at least one of the third filter electrode 21β and the fourth filter electrode 22β by the potential supply circuit 60, an electric field is generated between the third filter electrode 21β and the fourth filter electrode 22β. This electric field controls whether or not the charged particles are allowed to pass through the second flow path 25β formed between the third filter electrode 21β and the fourth filter electrode 22β. The charged particles that have passed through the second flow path 25β are collected and detected by the second detection electrode 26β. The first filter electrode 21α or the second filter electrode 22α and the third filter electrode 21β or the fourth filter electrode 22β are not directly connected to the first input winding 66A connected to the DC power supply 61. Therefore, even if a load fluctuation occurs, for example, when the interval between the first filter electrode 21α and the second filter electrode 22α varies or when the interval between the third filter electrode 21β and the fourth filter electrode 22β varies, it is possible to prevent a potential fluctuation from occurring in the first input winding 66A connected to the DC power supply 61 due to the load fluctuation. This stabilizes the induced electromotive forces generated in the first output winding 66B and the second output winding 66C, thereby making it possible to stably detect charged particles.

[0064] The first output winding 66B and the second output winding 66C are wound around the first core material 66E shared with the first input winding 66A, so that an induced electromotive force based on the potential supplied from the DC power source 61 to the first input winding 66A is applied to the first output winding 66B and the second output winding 66C. Here, the first end 69A of the first resistor 69 is connected to the second output end 66B2 of the first output winding 66B, the second input end 66B1 of the first output winding 66B is connected to the fourth end 70B of the second resistor 70, and the third end 70A of the second resistor 70 is connected to the third output end 66C2 of the second output winding 66C. Therefore, a voltage divided according to the resistance values ​​of the first resistor 69 and the second resistor 70 is applied to the first output winding 66B and the second output winding 66C, respectively. This makes it possible to differentiate the charged particles permitted to pass through the first flow path 25α formed between the first filter electrode 21α and the second filter electrode 22α from the charged particles permitted to pass through the second flow path 25β formed between the third filter electrode 21β and the fourth filter electrode 22β. In other words, it becomes possible to detect at least two types of charged particles, improving convenience.

[0065] The potential supply circuit 60 includes a transistor 67 and a resonant circuit 68. The transistor 67 includes a gate electrode 67A, a source electrode 67B, and a drain electrode 67C. The gate electrode 67A is connected to a PWM signal supply unit 62 that generates a PWM signal. The drain electrode 67C and the resonant circuit 68 are directly or indirectly connected in parallel to a first output end 66A2, which is an end on the output side of the first input winding 66A. When a PWM signal generated from the PWM signal supply unit 62 is supplied to the gate electrode 67A, during the ON period of the PWM signal, a drain current Id flows between the source electrode 67B and the drain electrode 67C, and a return current flows to the resonant circuit 68. During the OFF period of the PWM signal, a return current flows to the resonant circuit 68 in the opposite direction to the ON period. At the timing when the ON period and the OFF period are switched, the potential of the drain electrode 67C becomes approximately 0V. That is, the transistor 67 is driven in a ZVS (Zero Voltage Switching) state. This allows for low power consumption. An induced electromotive force is generated in the first output winding 66B and the second output winding 66C in synchronization with the PWM signal. Specifically, in the ON period and the OFF period of the PWM signal, the first output winding 66B and the second output winding 66C are periodically subjected to opposite positive and negative potentials. This allows positive and negative potentials to be periodically applied to at least one of the first filter electrode 21α and the second filter electrode 22α and at least one of the third filter electrode 21β and the fourth filter electrode 22β, so that the passage of charged particles through the first flow path 25α between the first filter electrode 21α and the second filter electrode 22α and the passage of charged particles through the second flow path 25β between the third filter electrode 21β and the fourth filter electrode 22β can be effectively controlled.

[0066] The first output winding 66B has a second input end 66B1 connected to the first filter electrode 21α, and the second output winding 66C has a third input end 66C1 connected to the third filter electrode 21β. When an induced electromotive force synchronized with the PWM signal is generated in the first output winding 66B, positive and negative potentials are periodically applied to the first filter electrode 21α connected to the second input end 66B1 of the first output winding 66B. When an induced electromotive force synchronized with the PWM signal is generated in the second output winding 66C, positive and negative potentials are periodically applied to the third filter electrode 21β connected to the third input end 66C1 of the second output winding 66C. Therefore, a potential difference synchronized with the PWM signal is periodically generated between the first filter electrode 21α and the second filter electrode 22α, and between the third filter electrode 21β and the fourth filter electrode 22β. In this way, the first filter electrode 21α and the second filter electrode 22α, and the third filter electrode 21β and the fourth filter electrode 22β are electrically isolated from the transistor 67 and the resonant circuit 68 that constitute the potential supply circuit 60. Therefore, even if a load fluctuation occurs due to the first filter electrode 21α, the second filter electrode 22α, the third filter electrode 21β, and the fourth filter electrode 22β, it is possible to prevent a potential fluctuation from occurring in the transistor 67 and the resonant circuit 68 due to the load fluctuation.

[0067] The electromotive force sensor further includes a first compensation potential supplying unit 63 that generates a first compensation potential and a second compensation potential supplying unit 64 that generates a second compensation potential. The first output winding 66B and the first filter electrode 21α are connected in parallel to the first compensation potential supplying unit 63, and the second output winding 66C and the third filter electrode 21β are connected in parallel to the second compensation potential supplying unit 64. The first compensation potential generated by the first compensation potential supplying unit 63 is applied to the first filter electrode 21α in a manner superimposed on a potential based on an induced electromotive force generated in the first output winding 66B. The passage of the charged particles through the first flow path 25α is controlled according to the first compensation potential. The second compensation potential generated by the second compensation potential supplying unit 64 is applied to the third filter electrode 21β in a manner superimposed on a potential based on an induced electromotive force generated in the second output winding 66C. Whether or not the charged particles are allowed to pass through the second flow path 25β is controlled in accordance with the second compensation potential.

[0068] <Embodiment 2> A second embodiment will be described with reference to Fig. 12 to Fig. 16. In this second embodiment, the number of detection cells 120 and the configuration of the potential supply circuit 160 are changed. Note that a duplicated description of the structure, action, and effect similar to those of the first embodiment will be omitted.

[0069] The detector 150 according to this embodiment includes six detection cells 120 as shown in FIG. 12. The six detection cells 120 include a fourth detection cell (third detection unit) 120δ, a fifth detection cell (fourth detection unit) 120ε, and a sixth detection cell 120ζ in addition to the first detection cell 120α, the second detection cell 120β, and the third detection cell 120γ described in the first embodiment. The potential supply circuit 160 supplies a potential to each of the filter electrodes 121 (first filter electrode 121α, third filter electrode 121β, fifth filter electrode 121γ, seventh filter electrode 121δ, ninth filter electrode 121ε, and eleventh filter electrode 121ζ, which will be described later) provided in each of the detection cells 120α to 120ζ. The detector 150 according to this embodiment does not include the first compensation potential supply unit 63 to the third compensation potential supply unit 65 (see FIG. 6) as in the first embodiment.

[0070] In the following, when distinguishing between the fourth detection cell 120δ to the sixth detection cell 120ζ, the subscript δ is added to the reference symbol of the "fourth detection cell", the subscript ε is added to the reference symbol of the "fifth detection cell", and the subscript ζ is added to the reference symbol of the "sixth detection cell", and when referring to them collectively without distinction, no subscript is added to the reference symbols. In addition, when distinguishing between the components included in the fourth detection cell 120δ to the sixth detection cell 120ζ (one filter electrode 121, the other filter electrode 122, one substrate 123, the other substrate 124, the flow path 125, the detection electrode 126, and the deflection electrode 127), the subscript δ is added to the reference symbol of each component included in the fourth detection cell 120δ (the “seventh filter electrode” which is one filter electrode 121, the “eighth filter electrode” which is the other filter electrode 122, the “seventh substrate” which is one substrate 123, the “eighth substrate” which is the other substrate 124, the “fourth flow path” which is the flow path 125, the “fourth detection electrode” which is the detection electrode 126, and the “fourth deflection electrode” which is the deflection electrode 127), and the subscript δ is added to the reference symbol of each component included in the fifth detection cell 120ε (the “ninth filter electrode” which is one filter electrode 121, the “ninth filter electrode” which is the other filter electrode 122, the “ninth substrate” which is the one substrate 123, the “eighth substrate” which is the other substrate 124, the “fourth flow path” which is the flow path 125, the “fourth detection electrode” which is the detection electrode 126, and the “fourth deflection electrode” which is the deflection electrode 127). The subscript ε is added to the reference symbols of the sixth detection cell 120ζ (the “tenth filter electrode” which is one filter electrode 121, the “ninth filter electrode” which is the other filter electrode 122, the “ninth substrate” which is one substrate 123, the “tenth substrate” which is the other substrate 124, the “fifth flow path” which is the flow path 125, the “fifth detection electrode” which is the detection electrode 126, and the “fifth deflection electrode” which is the deflection electrode 127), and the subscript ζ is added to the reference symbols of each component included in the sixth detection cell 120ζ (the “eleventh filter electrode” which is one filter electrode 121, the “twelfth filter electrode” which is the other filter electrode 122, the “eleventh substrate” which is one substrate 123, the “twelfth substrate” which is the other substrate 124, the “sixth flow path” which is the flow path 125, the “sixth detection electrode” which is the detection electrode 126, and the “sixth deflection electrode” which is the deflection electrode 127). When they are referred to collectively without distinction, the subscript is not added to the reference symbols.

[0071] 13, the potential supply circuit 160 includes a first dual inductor 166, a transistor 167, a resonant circuit 168, and a second dual inductor 72. The potential supply circuit 160 includes a second output circuit 160C, in addition to an input circuit 160A and a first output circuit 160B. In this embodiment, the input circuit 160A includes at least a part of the first dual inductor 166 (first input winding 166A), a part of the second dual inductor 72 (second input winding 72A described later), the transistor 167, and the resonant circuit 168.

[0072] 13, the first output circuit 160B includes at least a part of the first dual inductor 166 (the first output winding 166B, the second output winding 166C, and the third output winding 166D) and parts of the first detection cell 120α, the second detection cell 120β, and the third detection cell 120γ (the first filter electrode 121α, the third filter electrode 121β, and the fifth filter electrode 121γ). The second output circuit 160C includes at least a part of the second dual inductor 72 (the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D described later) and parts of the fourth detection cell 120δ, the fifth detection cell 120ε, and the sixth detection cell 120ζ (the seventh filter electrode 121δ, the ninth filter electrode 121ε, and the eleventh filter electrode 121ζ).

[0073] As shown in FIG. 13, the second dual inductor 72 includes a second input winding (fourth winding) 72A, a fourth output winding (fifth winding) 72B, a fifth output winding (sixth winding) 72C, and a sixth output winding 72D. Of these, the second input winding 72A is a primary coil. The second input winding 72A has a fifth input end 72A1 which is an input end, and a fifth output end 72A2 which is an output end. The fifth input end 72A1 is connected to the first output end 166A2 of the first input winding 166A. That is, the first input winding 166A and the second input winding 72A are connected in series to the DC power supply 161. The fifth output end 72A2 is connected in parallel to the transistor 167 and the resonant circuit 168. The inductance of the second input winding 72A is, for example, about 10 μH. In this embodiment, the inductance of the first input winding 166A of the first dual inductor 166 is, for example, about 30 μH. In this embodiment, the DC power supply 161 supplies a DC voltage of, for example, 60 V to the potential supply circuit 160. In this embodiment, the input circuit 160A does not include the resistors R1 and R2 (see FIG. 7) described in the first embodiment.

[0074] As shown in FIG. 13, the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D are all secondary coils. That is, the second dual inductor 72 has the same number of output windings 72B to 72D as the number of detection cells 120δ to 120ζ to be connected. The inductances of the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D are the same as the inductance of the second input winding 72A, and are, for example, about 10 μH. In this embodiment, the inductances of the output windings 166B to 166D of the first dual inductor 166 are, for example, about 10 μH, and are equal to the inductances of the output windings 72B to 72D of the second dual inductor 72. The fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D are connected in series with each other. The fourth output winding 72B has a sixth input end 72B1 which is an input end and a sixth output end 72B2 which is an output end. The fifth output winding 72C has a seventh input end 72C1 which is an input end and a seventh output end 72C2 which is an output end. The sixth output winding 72D has an eighth input end 72D1 which is an input end and an eighth output end 72D2 which is an output end. The connection manner of the input ends 72B1 to 72D1 and the output ends 72B2 to 72D2 of the fourth output winding 72B, the fifth output winding 72C and the sixth output winding 72D will be described later.

[0075] As shown in Fig. 14, the second dual inductor 72 includes a second core material (second core) 72E. The second core material 72E is made of a magnetic material such as permalloy or ferrite. The second core material 72E has an annular shape. The second input winding 72A, the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D are wound around the second core material 72E. The second input winding 72A, the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D wound around the second core material 72E each have a spiral shape. The winding direction of the second input winding 72A from the fifth output end 72A2 to the fifth input end 72A1 about the second core material 72E is the same as the winding direction of the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D about the second core material 72E from each output end 72B2-72D2 to each input end 72B1-72D1 about the second core material 72E. Specifically, the second input winding 72A has a portion visible in front of the second core material 72E that faces from the upper left to the lower right, and is S-wound about the second core material 72E. The fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D have a portion visible in front of the second core material 72E that faces from the upper left to the lower right, and are all S-wound about the second core material 72E. The number of turns of the second input winding 72A around the second core material 72E is, for example, approximately the same as the sum of the numbers of turns of the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D around the second core material 72E.

[0076] 14, in the first dual inductor 166, the first output winding 166B, the second output winding 166C, and the third output winding 166D are all S-wound around the first core material 166E. That is, the first input winding 166A and the output windings 166B to 166D are wound in the same direction around the first core material 166E.

[0077] 13, the gate electrode 167A constituting the transistor 167 is connected in series with the PWM signal supply unit 162 together with a resistor R7. The resistance value of the resistor R7 is, for example, about 0.5Ω. The resonant circuit 168 includes two inductors L2 and L3, three capacitors C6, C7, and C8, one resistor R8, and one diode D1. The inductor L2 and the capacitor C7 are connected in series. The inductance of the inductor L2 is, for example, about 1.72 μH. The capacitance of the capacitor C7 is, for example, about 2.7 nF. The inductor L2, the capacitor C6, and the diode D1 are connected in parallel with the fifth output end 72A2 of the second input winding 72A. Of the pair of electrodes constituting the capacitor C6, the electrode opposite to the electrode connected to the fifth output end 72A2 is grounded. The capacitance of the capacitor C6 is, for example, about 470 pF. The anode of the diode D1 is grounded. The diode D1 is a fast recovery diode suitable for rectifying high frequency waves. For example, a model number "RF305BM6S" manufactured by ROHM Co., Ltd. may be used as the diode D1. An inductor L3 and a resistor R8 are connected in parallel to the electrode opposite to the electrode connected to the inductor L2 among a pair of electrodes constituting the capacitor C7. The inductance of the inductor L3 is, for example, about 265 nH. The capacitor C8 is connected in series to the inductor L3. The capacitance of the capacitor C8 is, for example, about 1.1 nF. Of the pair of electrodes constituting the capacitor C8, the electrode opposite to the electrode connected to the inductor L3 is grounded. The resistance value of the resistor R8 is, for example, about 50 Ω. The resistor R8 is grounded.

[0078] 13 and 15, the second output circuit 160C of the potential supply circuit 160 according to this embodiment includes a fourth resistor (third resistor element) 73, a fifth resistor (fourth resistor element) 74, and a sixth resistor 75. The fourth resistor 73, the fifth resistor 74, and the sixth resistor 75 are alternately connected in series to the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D. Hereinafter, the circuit configuration of the second output circuit 160C will be described in detail together with the connection modes of the input end portions 72B1 to 72D1 and the output end portions 72B2 to 72D2 of the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D.

[0079] As shown in FIG. 13 and FIG. 15, the seventh end 73A of the fourth resistor 73, which is an input end, is connected to the sixth output end 72B2 of the fourth output winding 72B. The eighth end 73B of the fourth resistor 73, which is an output end, is grounded. The ninth end 74A of the fifth resistor 74, which is an input end, is connected to the seventh output end 72C2 of the fifth output winding 72C. The tenth end 74B of the fifth resistor 74, which is an output end, is connected to the sixth input end 72B1 of the fourth output winding 72B. The eleventh end 75A of the sixth resistor 75, which is an input end, is connected to the eighth output end 72D2 of the sixth output winding 72D. The twelfth end 75B of the sixth resistor 75, which is an output end, is connected to the seventh input end 72C1 of the fifth output winding 72C.

[0080] As shown in Fig. 13 and Fig. 15, the sixth input side end 72B1 of the fourth output side winding 72B is connected to the capacitor C9 in addition to the tenth end 74B of the fifth resistor 74 described above. The capacitance of the capacitor C9 is, for example, about 10 nF. Of the pair of electrodes constituting the capacitor C9, the electrode opposite to the electrode connected to the sixth input side end 72B1 is connected to a seventh filter electrode (seventh electrode) 121δ, which is one of the filter electrodes 121 provided in the fourth detection cell 120δ. In addition, an eighth filter electrode (eighth electrode) 122δ, which is the other filter electrode 122 provided in the fourth detection cell 120δ, is grounded. 15, the fourth detection cell 120δ is configured such that a seventh filter electrode 121δ and a fourth detection electrode (ninth electrode) 126δ, which is the detection electrode 126, are provided on a seventh substrate 123δ, which is one substrate 123, and an eighth filter electrode 122δ and a fourth deflection electrode 127δ, which is the deflection electrode 127, are provided on an eighth substrate 124δ, which is the other substrate 124. In the fourth detection cell 120δ, a fourth flow path (flow path) 125δ is formed between the seventh filter electrode 121δ and the fourth detection electrode 126δ and the eighth filter electrode 122δ and the fourth deflection electrode 127δ. Note that an electrostatic capacitance of, for example, about 20 pF is formed between the seventh filter electrode 121δ and the eighth filter electrode 122δ.

[0081] As shown in Fig. 13 and Fig. 15, the seventh input side end 72C1 of the fifth output winding 72C is connected to the capacitor C10 in addition to the twelfth end 75B of the sixth resistor 75. The capacitance of the capacitor C10 is, for example, about 10 nF. Of the pair of electrodes constituting the capacitor C10, the electrode opposite to the electrode connected to the seventh input side end 72C1 is connected to the ninth filter electrode (tenth electrode) 121ε, which is one of the filter electrodes 121 provided in the fifth detection cell 120ε. In addition, the tenth filter electrode (eleventh electrode) 122ε, which is the other filter electrode 122 provided in the fifth detection cell 120ε, is grounded. 15, the fifth detection cell 120ε is configured such that a ninth filter electrode 121ε and a fifth detection electrode (twelfth electrode) 126ε, which is a detection electrode 126, are provided on a ninth substrate 123ε, which is one substrate 123, and a tenth filter electrode 122ε and a fifth deflection electrode 127ε, which is a deflection electrode 127, are provided on a tenth substrate 124ε, which is the other substrate 124. In the fifth detection cell 120ε, a fifth flow path (flow path) 125ε is formed between the ninth filter electrode 121ε and the fifth detection electrode 126ε and the tenth filter electrode 122ε and the fifth deflection electrode 127ε. Note that, for example, a capacitance of about 20 pF is formed between the ninth filter electrode 121ε and the tenth filter electrode 122ε.

[0082] 13 and 15, the sixth output winding 72D has an eighth input end 72D1 connected to a capacitor C5. The capacitance of the capacitor C11 is, for example, about 10 nF. Of the pair of electrodes constituting the capacitor C11, the electrode opposite to the electrode connected to the eighth input end 72D1 is connected to an eleventh filter electrode 121ζ, which is one of the filter electrodes 121 provided in the sixth detection cell 120ζ. In addition, a twelfth filter electrode 122ζ, which is the other filter electrode 122 provided in the sixth detection cell 120ζ, is grounded. 15, the sixth detection cell 120ζ is configured such that an eleventh filter electrode 121ζ and a sixth detection electrode 126ζ, which is the detection electrode 126, are provided on an eleventh substrate 123ζ, which is one substrate 123, and a twelfth filter electrode 122ζ and a sixth deflection electrode 127ζ, which is the deflection electrode 127, are provided on a twelfth substrate 124ζ, which is the other substrate 124. In the sixth detection cell 120ζ, a sixth flow path 125ζ is formed between the eleventh filter electrode 121ζ and the sixth detection electrode 126ζ and the twelfth filter electrode 122ζ and the sixth deflection electrode 127ζ. Note that an electrostatic capacitance of, for example, about 20 pF is formed between the eleventh filter electrode 121ζ and the twelfth filter electrode 122ζ.

[0083] Next, the operation of the first output circuit 160B and the second output circuit 160C of the potential supply circuit 160 will be described. When the transistor 167 in the input circuit 160A is switched between the ON state and the OFF state based on the PWM signal supplied from the PWM signal supply unit 162, the current flowing through the first input winding 166A and the second input winding 72A changes in synchronization with the switching. Then, in the first output circuit 160B, induced electromotive forces are generated in the first output winding 166B, the second output winding 166C, and the third output winding 166D, respectively, and in the second output circuit 160C, induced electromotive forces are generated in the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D, respectively. In the first output circuit 160B, as described in the first embodiment, the first output winding 166B, the second output winding 166C, and the third output winding 166D are supplied with a voltage V divided according to the resistance values ​​of the first resistor 169, the second resistor 170, and the third resistor 171. fup1 ,V fup2 ,V fup3 are applied as induced electromotive forces, respectively.

[0084] In the second output circuit 160C, as shown in FIG. 13, the seventh end 73A of the fourth resistor 73 is connected to the sixth output end 72B2 of the fourth output winding 72B, the sixth input end 72B1 of the fourth output winding 72B is connected to the tenth end 74B of the fifth resistor 74, and the ninth end 74A of the fifth resistor 74 is connected to the seventh output end 72C2 of the fifth output winding 72C. Thus, the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D are supplied with a voltage V fup4 ,V fup5 ,V fup6 Specifically, a voltage V corresponding to the potential of the eighth input end 72D1 is applied to the sixth output winding 72D. fup6 is applied to the fifth output winding 72C, and a voltage V fup5 is applied to the fourth output winding 72B, and a voltage V fup4 is applied.

[0085] The voltage V applied to the fifth output winding 72C fup5 is the voltage V applied to the sixth output winding 72D. fup6 The voltage V applied to the fourth output winding 72B is calculated by subtracting the voltage drop caused by the sixth output winding 72D and the voltage drop caused by the sixth resistor 75 from the voltage V fup4 is the voltage V applied to the sixth output winding 72D. fup6 Therefore, the voltage V applied to the fifth output winding 72C is a difference between the voltage drops caused by the fifth output winding 72C, the fifth resistor 74, the sixth output winding 72D, and the sixth resistor 75. In this embodiment, the inductances of the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D are equal, and the resistances of the fourth resistor 73, the fifth resistor 74, and the sixth resistor 75 are equal. fup5 is the voltage V applied to the sixth output winding 72D. fup6 , and the voltage V applied to the fourth output winding 72B is fup4 is the voltage V applied to the sixth output winding 72D. fup6 The voltage V applied to the fourth output winding 72B is about 1 / 3 of the fup4 is applied to the seventh filter electrode 121δ, and a voltage V fup5 is applied to the ninth filter electrode 121ε, and a voltage V fup6 In this manner, the seventh filter electrode 121δ, the ninth filter electrode 121ε, and the eleventh filter electrode 121ζ are applied with different voltages V fup4 ,V fup5 ,V fup6is applied, the charged particles permitted to pass through the fourth flow path 125δ formed between the seventh filter electrode 121δ and the eighth filter electrode 122δ can be made different from the charged particles permitted to pass through the fifth flow path 125ε formed between the ninth filter electrode 121ε and the tenth filter electrode 122ε, and the charged particles permitted to pass through the sixth flow path 125ζ formed between the eleventh filter electrode 121ζ and the twelfth filter electrode 122ζ. That is, in the second output side circuit 160C, three types of charged particles can be detected in the three detection cells 120δ, 120ε, and 120ζ, thereby improving convenience. In this embodiment, in the first output circuit 160B and the second output circuit 160C, six types of charged particles can be detected in a total of six detection cells 120α, 120β, 120γ, 120δ, 120ε, and 120ζ, thereby further improving convenience.

[0086] Next, a voltage V is applied to the first filter electrode 121α, the third filter electrode 121β, the fifth filter electrode 121γ, the seventh filter electrode 121δ, the ninth filter electrode 121ε, and the eleventh filter electrode 121ζ. fup1 ~V fup6 The waveforms of the drain voltage Vd and drain current Id and the gate voltage Vgs, which change according to the driving state of the transistor 167, are as shown in the graph of FIG. 10 in the first embodiment. The horizontal axis of the graph in FIG. 16 represents time (unit: μs). The vertical axis of the graph in FIG. 16 represents the voltage V fup1 ~V fup6 16 shows the driving state of the transistor 167 and the voltage V fup1 ~V fup6 In order to show the relationship between them, an OFF period during which a low potential is supplied to the gate electrode 167A is marked as "OFF", and an ON period during which a high potential is supplied to the gate electrode 167A is marked as "ON".

[0087] According to FIG. 16, a voltage V whose polarity is inverted is applied to the first filter electrode 121α, the third filter electrode 121β, the fifth filter electrode 121γ, the seventh filter electrode 121δ, the ninth filter electrode 121ε, and the eleventh filter electrode 121ζ in synchronization with the transistor 167 being switched between the ON state and the OFF state. fup1 ~V fup6 In detail, during the OFF period of the transistor 167, the voltage V fup1 ~V fup6 In both cases, the polarity of the potential is positive. The voltage V fup1 ~V fup6 The waveform of the dispersion voltage DV is approximately a half sine wave. The voltage V applied to the fifth filter electrode 121γ during the OFF period fup3 and the voltage V applied to the eleventh filter electrode 121ζ during the OFF period. fup6 and have values ​​according to the inductances of the first input winding 166A and the second input winding 72A connected in series to the DC power supply 161. Specifically, the voltage V fup3 The peak value of is about 235V, and the voltage V fup6 The peak value of the voltage V applied to the third filter electrode 121β during the OFF period is about 135 V. fup2 is the voltage V applied to the fifth filter electrode 121γ fup3 The voltage V applied to the first filter electrode 121α during the OFF period is calculated by subtracting the voltage drop (approximately 80 V) caused by the third output winding 166D and the third resistor 171 from the voltage V. fup1 is the voltage V applied to the fifth filter electrode 121γ fup3 The voltage V applied to the ninth filter electrode 121ε during the OFF period is a difference between the voltage drops (approximately 160 V) caused by the second output winding 166C, the second resistor 170, the third output winding 166D, and the third resistor 171, and specifically, the peak value is approximately 75 V. fup5 is the voltage V applied to the eleventh filter electrode 121ζ fup6The voltage V applied to the seventh filter electrode 121δ during the OFF period is a difference value of about 90 V between the sixth output winding 72D and the sixth resistor 75 and the voltage drop (about 45 V) caused by the sixth output winding 72D and the sixth resistor 75. fup1 is the voltage V applied to the eleventh filter electrode 121ζ fup3 Therefore, the voltage drop (about 90V) due to the fifth output winding 72C, the fifth resistor 74, the sixth output winding 72D, and the sixth resistor 75 is calculated as a difference value, and specifically, the peak value is about 45V.

[0088] During the ON period of the transistor 167, the voltage V fup1 ~V fup6 In both cases, the polarity of the potential is negative. The voltage V fup1 ~V fup6 The waveform of the dispersion voltage DV is a substantially rectangular wave. fup3 and the voltage V applied to the eleventh filter electrode 121ζ during the ON period. fup6 and have values ​​according to the inductances of the first input winding 166A and the second input winding 72A connected in series to the DC power supply 161. Specifically, the voltage V fup3 becomes about -75V, and the voltage V fup6 The peak value of the voltage V applied to the third filter electrode 121β during the ON period is about −45 V. fup2 is the voltage V applied to the fifth filter electrode 121γ fup3 The voltage V applied to the first filter electrode 121α during the ON period is calculated by subtracting the voltage drop (about 25 V) caused by the third output winding 166D and the third resistor 171 from the voltage V. fup1 is the voltage V applied to the fifth filter electrode 121γ fup3 The voltage V applied to the ninth filter electrode 121ε during the ON period is calculated by subtracting the voltage drops (approximately 50 V) caused by the second output winding 166C, the second resistor 170, the third output winding 166D, and the third resistor 171 from the voltage V. fup5 is the voltage V applied to the eleventh filter electrode 121ζ fup6The voltage V applied to the seventh filter electrode 121δ during the ON period is calculated by subtracting the voltage drop (approximately 15 V) caused by the sixth output winding 72D and the sixth resistor 75 from the voltage V. fup4 is the voltage V applied to the eleventh filter electrode 121ζ fup6 and the voltage drop (about 30V) due to the fifth output winding 72C, the fifth resistor 74, the sixth output winding 72D, and the sixth resistor 75, is equal to about -15V.

[0089] As described above, according to this embodiment, the fourth detection cell (third detection unit) 120δ includes the seventh filter electrode (seventh electrode) 121δ, the eighth filter electrode (eighth electrode) 122δ that faces the seventh filter electrode 121δ with a gap therebetween and forms a fourth flow path (flow path) 125δ for the charged particles to be detected between the seventh filter electrode 121δ and the seventh filter electrode 121δ, and the fourth detection electrode (ninth electrode) 126δ that is arranged next to the eighth filter electrode 122δ on the downstream side of the fourth flow path 125δ and collects the charged particles, and the ninth filter electrode (tenth electrode) 121ε and the ninth detection cell (third detection unit) 120δ include the seventh filter electrode (seventh electrode) 121δ, the eighth filter electrode (eighth electrode) 122δ that faces the seventh filter electrode 121δ with a gap therebetween and forms a fourth flow path (flow path) 125δ for the charged particles to be detected between the seventh filter electrode 121δ and the seventh filter electrode 121δ. a fifth detection cell (fourth detection unit) 120ε having a tenth filter electrode (eleventh electrode) 122ε which faces the filter electrode 121ε with a gap therebetween and forms a fifth flow path (flow path) 125ε for the charged particles to be detected between the tenth filter electrode 121ε and the ninth filter electrode 121ε, and a fifth detection electrode (twelfth electrode) 126ε which is arranged next to the tenth filter electrode 122ε on the downstream side of the fifth flow path 125ε and collects the charged particles; and a potential supply circuit 60 having a second input winding (fourth winding) 72A, a fourth output winding (fifth winding) 72B, a fifth output winding (sixth The fourth output winding 72B includes a fourth filter electrode 121δ or an eighth filter electrode 122δ, a fourth filter electrode 121δ or an eighth filter electrode 122δ, a fifth filter electrode 121δ or an eighth filter electrode 122δ, a fifth input end 72A1 of the second input winding 72A is connected to a first output end 166A2 of the first input winding 166A, the sixth input end 72B1 of the fourth output winding 72B is connected to the seventh filter electrode 121δ or an eighth filter electrode 122δ, and the fifth output winding 72C is wound around the fifth core 72E. The output side winding 72C has a seventh input side end 72C1, which is the input side end, connected to the ninth filter electrode 121ε or the tenth filter electrode 122ε, the fourth resistor 73 has a seventh end 73A, which is the input side end, connected to the sixth output side end 72B2, which is the output side end of the fourth output side winding 72B, and the fifth resistor 74 has a ninth end 74A, which is the input side end, connected to the seventh output side end 72C2, which is the output side end of the fifth output side winding 72C, and a tenth end 74B, which is the output side end, connected to the sixth input side end 72B1 of the fourth output side winding 72B.

[0090] When a potential is supplied to at least one of the seventh filter electrode 121δ and the eighth filter electrode 122δ by the potential supply circuit 160, an electric field is generated between the seventh filter electrode 121δ and the eighth filter electrode 122δ. This electric field controls whether or not a charged particle is allowed to pass through the fourth flow path 125δ formed between the seventh filter electrode 121δ and the eighth filter electrode 122δ. The charged particle that has passed through the fourth flow path 125δ is collected and detected by the fourth detection electrode 126δ. Similarly, when a potential is supplied to at least one of the ninth filter electrode 121ε and the tenth filter electrode 122ε by the potential supply circuit 160, an electric field is generated between the ninth filter electrode 121ε and the tenth filter electrode 122ε. This electric field controls whether or not a charged particle is allowed to pass through the fifth flow path 125ε formed between the ninth filter electrode 121ε and the tenth filter electrode 122ε. The charged particles passing through the fifth flow path 125ε are collected and detected by the fifth detection electrode 126ε. The seventh filter electrode 121δ or the eighth filter electrode 122δ and the ninth filter electrode 121ε or the tenth filter electrode 122ε are not directly connected to the second input winding 72A connected to the DC power supply 161. Therefore, even if a load fluctuation occurs, for example, when the interval between the seventh filter electrode 121δ and the eighth filter electrode 122δ varies or the interval between the ninth filter electrode 121ε and the tenth filter electrode 122ε varies, the potential fluctuation in the second input winding 72A connected to the DC power supply 161 due to the load fluctuation is prevented. As a result, the induced electromotive force generated in the fourth output winding 72B and the fifth output winding 72C is stabilized, so that the detection of the charged particles can be stably performed.

[0091] The fourth output winding 72B and the fifth output winding 72C are wound around the second core material 72E shared with the second input winding 72A, so that an induced electromotive force based on a potential supplied from the DC power source 61 to the second input winding 72A is applied to the fourth output winding 72B and the fifth output winding 72C. Here, the seventh end 73A of the fourth resistor 73 is connected to the sixth output end 72B2 of the fourth output winding 72B, the sixth input end 72B1 of the fourth output winding 72B is connected to the tenth end 74B of the fifth resistor 74, and the ninth end 74A of the fifth resistor 74 is connected to the seventh output end 72C2 of the fifth output winding 72C. Therefore, a voltage divided according to the resistance values ​​of the fourth resistor 73 and the fifth resistor 74 is applied to the fourth output winding 72B and the fifth output winding 72C, respectively. This makes it possible to differentiate the charged particles permitted to pass through the fourth flow path 125δ formed between the seventh filter electrode 121δ and the eighth filter electrode 122δ from the charged particles permitted to pass through the fifth flow path 125ε formed between the ninth filter electrode 121ε and the tenth filter electrode 122ε. As described above, it becomes possible to detect at least four types of charged particles, thereby improving convenience.

[0092] <Other embodiments> The technology disclosed in this specification is not limited to the embodiments described above and illustrated in the drawings, and the following embodiments, for example, are also included in the technical scope.

[0093] (1) The resistance values ​​of the first resistors 69, 169, the second resistors 70, 170, and the third resistors 71, 171 may all or partly be different from each other.

[0094] (2) In the configuration described in the second embodiment, all or some of the resistance values ​​of the fourth resistor 73, the fifth resistor 74, and the sixth resistor 75 may be different from each other.

[0095] (3) All or some of the inductances (number of turns) of the first output windings 66B, 166B, the second output windings 66C, 166C, and the third output windings 66D, 166D may be different.

[0096] (4) In the configuration described in the second embodiment, all or some of the inductances (number of turns) of the fourth output winding 72B, the fifth output winding 72C, and the sixth output winding 72D may be different.

[0097] (5) The output side windings 66B-66D, 166B-166D may be Z-wound around the first core material 66E, 166E. That is, the first input side windings 66A, 166A and the output side windings 66B-66D, 166B-166D may be wound in opposite directions around the first core material 66E, 166E. Also, the first input side windings 66A, 166A may be Z-wound around the first core material 66E, 166E, and the output side windings 66B-66D, 166B-166D may be S-wound around the first core material 66E, 166E.

[0098] (6) In the configuration described in the second embodiment, each of the output side windings 72B to 72D may be Z-wound around the second core material 72E. That is, the second input side winding 72A and each of the output side windings 72B to 72D may be wound in opposite directions around the second core material 72E. Alternatively, the second input side winding 72A may be Z-wound around the second core material 72E, and each of the output side windings 72B to 72D may be S-wound around the second core material 72E.

[0099] (7) In the configuration described in the first embodiment, the input ends 66B1 to 66D1 of the output windings 66B to 66D and the compensation potential supplying units 63 to 65 may be connected in parallel to the other filter electrode 22.

[0100] (8) In the configuration described in embodiment 1, the input ends 66B1-66D1 of the output windings 66B-66D may be connected to one filter electrode 21, and the compensation potential supplying units 63-65 may be connected to the other filter electrode 22. Conversely, the compensation potential supplying units 63-65 may be connected to one filter electrode 21, and the input ends 66B1-66D1 of the output windings 66B-66D may be connected to the other filter electrode 22.

[0101] (9) In the configuration described in the second embodiment, the input ends 72B1 to 72D1 of the output windings 72B to 72D and 166B to 166D may be connected to the other filter electrode 122.

[0102] (10) In order to equalize the dispersion voltage DV applied between one filter electrode 21, 121 and the other filter electrode 22, 122 in the multiple detection cells 20, 120, it is also possible to adjust the inductance (number of turns) of each output winding 66B-66D, 72B-72D, 166B-166D and the resistance value of each resistor 69-71, 73-75, 169-171. In this way, the same charged particle can be detected by the multiple detection cells 20, 120. This makes it possible to improve the detection accuracy and detection reliability of the charged particle.

[0103] (11) In the first dual inductor 66, 166, the number of output windings wound around the first core 66E may be two or four or more. In this case, the number of detection cells (one filter electrode 21, 121) 20, 120 connected to the first output circuit 60B, 160B is two or four or more.

[0104] (12) In the configuration described in the second embodiment, the number of output side windings wound around the second core material 72E in the second dual inductor 72 may be two or four or more. In this case, the number of detection cells (one filter electrode 121) 120 connected to the second output side circuit 160C is two or four or more. In addition, the number of output side windings wound around the second core material 72E may be different from the number of output side windings wound around the first core material 66E.

[0105] (13) The number of dual inductors 66, 72, 166 provided in the potential supply circuits 60, 160 may be three or more.

[0106] (14) In the configuration described in the first embodiment, similarly to the second embodiment, the compensation potential supplying units 63 to 65 may be removed.

[0107] (15) In the configuration described in embodiment 2, a compensation potential supplying unit as described in embodiment 1 may be added. For example, the number of compensation potential supplying units added may be six, which is the same as the number of output side windings 72B-72D, 166B-166D, and each compensation potential supplying unit may be connected to each filter electrode 121α-121ε.

[0108] (16) The specific circuit configuration of the potential supply circuits 60, 160 (particularly the input side circuits 60A, 160A) can be appropriately changed to other than those shown in the drawings. Circuit elements other than those shown in the drawings can be added to the potential supply circuits 60, 160. Also, the circuit elements included in the potential supply circuits 60, 160 shown in the drawings can be replaced with other circuit elements. Also, the circuit elements included in the potential supply circuits 60, 160 shown in the drawings can be deleted.

[0109] (17) Resistance elements of types other than the resistors 69-71, 73-75, and 169-171 may be connected in series to the output windings 72B-72D and 166B-166D. [Explanation of symbols]

[0110] 20α, 120α...first detection cell (first detection section), 20β, 120β...second detection cell (second detection section), 21α, 121α...first filter electrode (first electrode), 21β, 121β...third filter electrode (fourth electrode), 22α...second filter electrode (second electrode), 22β...fourth filter electrode (fifth electrode), 25α...first flow path (flow path), 25β...second flow path (flow path), 26α...first detection electrode (third electrode), 26β...second detection electrode (sixth electrode), 50, 150...detector, 60, 160...potential supply circuit, 61, 161...DC power supply, 62, 162...PWM signal supply section, 63...first compensation potential supply section, 64...second compensation potential supply section, 66A, 166A...first input side winding (first winding wire), 66A1...first input side end (input side end), 66A2...first output side end (output side end), 66B, 166B...first output side winding (second winding), 66B1...second input side end (input side end), 66B2...second output side end (output side end), 66C, 166C...second output side winding (third winding), 66C1...third input side end (input side end), 66C2...third output side end (output side end), 66E, 166E...first core material, 67, 167...transistor, 67A, 167A...gate electrode, 67B...source electrode, 67C...drain electrode, 68, 168...resonant circuit, 69, 169...first resistor (first resistive element), 69A...first end (input side end), 70,170...second resistor (second resistive element), 70A...third end (input side end), 70B...fourth end (output side end), 72A...second input side winding (fourth winding), 72A1...fifth input side end (input side end), 72B...fourth output side winding (fifth winding), 72B1...sixth input side end (input side end), 72B2...sixth output side end (output side end), 72C...fifth output side winding (sixth winding), 72C1...seventh input side end (input side end), 72C2...seventh output side end (output side end), 72E...second core material, 73...fourth resistor (third resistive element), 73A...seventh end ( input side end), 74...fifth resistor (fourth resistive element), 74A...ninth end (input side end), 74B...tenth end (output side end), 120δ...fourth detection cell (third detection section), 120ε...fifth detection cell (fourth detection section), 121δ...seventh filter electrode (seventh electrode), 121ε...ninth filter electrode (tenth electrode), 122δ...eighth filter electrode (eighth electrode), 122ε...tenth filter electrode (eleventh electrode), 125δ...fourth flow path (flow path), 125ε...fifth flow path (flow path), 126δ...fourth detection electrode (ninth electrode), 126ε...fifth detection electrode (twelfth electrode),

Claims

1. a first detection unit including a first electrode, a second electrode that faces the first electrode with a gap therebetween and forms a flow path for charged particles to be detected between the first electrode and the second electrode, and a third electrode that is arranged next to the second electrode on the downstream side of the flow path and collects the charged particles; a second detection unit including a fourth electrode, a fifth electrode that faces the fourth electrode with a gap therebetween and forms a flow path for charged particles to be detected between the fourth electrode and the fifth electrode, and a sixth electrode that is arranged next to the fifth electrode on the downstream side of the flow path and collects the charged particles; a potential supply circuit that supplies a potential to at least one of the first electrode and the second electrode, and at least one of the fourth electrode and the fifth electrode, the potential supply circuit includes a first winding, a second winding, a third winding, a first annular core around which the first winding, the second winding, and the third winding are wound, a first resistor element, and a second resistor element; The first winding has an input side end connected to a DC power source, the second winding has an input side end connected to the first electrode or the second electrode, the third winding has an input side end connected to the fourth electrode or the fifth electrode, the first resistor element has an input side end connected to an output side end of the second winding, A detector in which the second resistive element has an input side end connected to an output side end of the third winding and an output side end connected to an input side end of the second winding.

2. the potential supply circuit includes a transistor and a resonant circuit; the transistor includes a gate electrode, a source electrode, and a drain electrode; The gate electrode is connected to a PWM signal supply unit that generates a PWM signal, 2. The detector according to claim 1, wherein the drain electrode and the resonant circuit are directly or indirectly connected in parallel to an output side end of the first winding.

3. The second winding has an input side end connected to the first electrode, 3. The detector according to claim 2, wherein the third winding has an input end connected to the fourth electrode.

4. a first compensation potential supply unit that generates a first compensation potential; a second compensation potential supply unit that generates a second compensation potential, the second winding and the first electrode are connected in parallel to the first compensation potential supply unit, 4. The detector according to claim 3, wherein the third winding and the fourth electrode are connected in parallel to the second compensation potential supply.

5. a third detection unit including a seventh electrode, an eighth electrode that faces the seventh electrode with a gap therebetween and forms a flow path for charged particles to be detected between the seventh electrode and the eighth electrode, and a ninth electrode that is arranged next to the eighth electrode on the downstream side of the flow path and collects the charged particles; a fourth detection unit including a tenth electrode, an eleventh electrode that faces the tenth electrode with a gap therebetween and forms a flow path for charged particles, which are detection targets, between the tenth electrode and the eleventh electrode, and a twelfth electrode that is arranged next to the eleventh electrode on the downstream side of the flow path and collects the charged particles; the potential supply circuit includes a fourth winding, a fifth winding, a sixth winding, a second annular core material around which the fourth winding, the fifth winding, and the sixth winding are wound, a third resistor element, and a fourth resistor element; the fourth winding has an input side end connected to an output side end of the first winding, the fifth winding has an input side end connected to the seventh electrode or the eighth electrode, The sixth winding has an input side end connected to the tenth electrode or the eleventh electrode, the third resistor element has an input side end connected to an output side end of the fifth winding, 5. The detector according to claim 1, wherein an input side end of the fourth resistive element is connected to an output side end of the sixth winding and an output side end of the fourth resistive element is connected to an input side end of the fifth winding.

Images