Piezoelectric actuator, liquid discharge head, and method for manufacturing piezoelectric actuator

Abstract

To suppress occurrence of cracking of a diaphragm of a piezoelectric actuator.SOLUTION: A piezoelectric actuator includes a piezoelectric element having a piezoelectric layer, and a diaphragm having an insulating layer connected to the piezoelectric element. When viewed in a lamination direction toward the piezoelectric element from the diaphragm, a region in which the diaphragm and the piezoelectric layer overlap each other is represented by a first region and a region in which the diaphragm and the piezoelectric layer do not overlap each other is represented by a second region, the insulating layer in the first region has a phase having different membrane stress from that of the insulating layer in the second region.SELECTED DRAWING: Figure 6

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