Light beam emission device

Abstract

To achieve the size reduction and high-power performance of a light beam emission device such as a light beam projection device which is not deteriorated in image quality, or a scan-type fluorescent light measurement device, related to the light beam emission device.SOLUTION: In a light beam emission device having a plurality of light emission members and light focus members, a moving amount d of the light focus members in emission spots of light beams emitted from the plurality of light emission members in an alignment direction from an optical axis is set so as to enter a range which satisfies the following condition. d=D0×(Q / 2) D0≤k×(n-n0) / NA. Here, Q is a beam size in a direction in which the light beams emitted from the emission spots of the light emission members are moved from optical axes of the light focus members of the light beams immediately after passing the light focus members, k is a proportional constant depending on a refraction index around the light focus members, n is a proportional constant of the light focus members, n0 is a refraction index around the light focus members, and NA is an opening number of the light emission members.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a light beam emitting device, and provides a light beam emitting device such as a light beam projection device or a scanning type fluorescence measuring device that can be made compact and has a simple configuration. [Background technology]

[0002] Conventionally, as an application of a light beam emitting device, there is a light beam projection device for projecting a color image using a plurality of light beams of different colors. In this case, a light beam projection device has been proposed in which a multiplexer is provided in the light beam emitting device to multiplex each light beam into one, and the multiplexed beam emitted from the light beam emitting device is two-dimensionally scanned to project an image onto a screen or the like (for example, see Patent Document 1).

[0003] On the other hand, light beam projection devices that use a light beam emitting device that does not combine multiple light beams, and directly scan the light beam emitted from the light beam emitting device to obtain an image, have been known for quite some time (see, for example, Patent Documents 2 to 4). Also, a configuration that allows for miniaturization has been proposed as a light beam emitting device that does not combine multiple light beams (see, for example, Patent Document 5). On the other hand, application of this light beam emitting device to a scanning type fluorescence measuring device is also being considered. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 5817022 [Patent Document 2] JP 2003-21800 A [Patent Document 3] European Patent 3054676 [Patent Document 4] European Patent 2977808 [Patent Document 5] Patent No. 6966144 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the case of projecting a light beam using a light beam emitting device using a multiplexer as in Patent Document 1, components for multiplexing are required, which makes the device configuration complicated and makes it difficult to reduce the size of the device itself.

[0006] On the other hand, in the light beam emitting devices that project images without combining multiple light beams as in Patent Documents 2 to 4, and the light beam projection devices using such devices, the device configuration is simple, but since the beam is not combined into one, color unevenness occurs, making it difficult to obtain high-definition images. This poses the problem of the need for complex video signal processing, such as adjusting the timing of the video output signal (see, for example, Patent Documents 3 and 4).

[0007] Also, in a light beam projection device that projects an image without combining multiple light beams as in Patent Document 5, the beam characteristics that cause color unevenness are improved by devising a method for arranging the light source, but color unevenness cannot be completely eliminated.

[0008] Therefore, the present invention aims to provide a light beam emitting device that does not cause color unevenness and that simplifies the processing of complex video signals, such as adjusting the timing of the video output signal, in a light beam projection device that projects an image without multiplexing multiple light beams, and a light beam projection device using the same. In this invention, the term "light beam emitting device" refers to a device that simply emits multiple light beams, and the term "light beam projection device" refers to a device that scans the light beam emitted from the "light beam emitting device" with an optical scanning mirror or the like, and projects an image on a screen or the like. Also, improving the beam characteristics of the light beam emitting device is an issue when performing highly accurate analysis of the fluorescence distribution in a scanning fluorescence measurement device. [Means for solving the problem]

[0009] In one embodiment, a light beam emitting device has a plurality of light emitting members and a condensing member, and a movement amount d in an arrangement direction of an emission spot of each light beam emitted from the plurality of light emitting members from an optical axis of the condensing member falls within a range that satisfies the following condition. d=D 0 ×(Q / 2) D 0 ≦k×(nn 0 ) / NA where Q is the size of the light beam emitted from the emission spot of the light output member and immediately after passing through the focusing member, in the direction of movement from the optical axis of the focusing member; k is a proportionality constant that depends on the refractive index around the focusing member; n is the refractive index of the focusing member; and n 0 is the refractive index of the surrounding light-collecting member, and NA is the numerical aperture of the light-emitting member.

[0010] In another aspect, a light beam emitting device has a plurality of light emitting members and a condensing member, and a movement amount d of an emission spot of each light beam emitted from the plurality of light emitting members in an arrangement direction from an optical axis of the condensing member falls within a range that satisfies the following condition. d≦1.7×(Q / 2) Here, Q is the size of the light beam in the direction moved from the optical axis of the condensing member immediately after the light beam emitted from the emission spot of the light emitting member passes through the condensing member. Effect of the Invention

[0011] As one aspect, the light beam projection device does not require a multiplexer and can improve the beam characteristics that cause color unevenness, simplifying the configuration of the light beam projection device and making it possible to increase the power of the light beam. This allows the light beam projection device to be made smaller and have higher power without deteriorating the image quality.

[0012] In addition, in another aspect, it is possible to improve the beam characteristics in a scanning fluorescence measuring device, and it is possible to provide a high-performance, small-sized scanning fluorescence measuring device that can analyze the fluorescence distribution with high accuracy. [Brief description of the drawings]

[0013] [Figure 1] 1 is a diagram illustrating a configuration of a light beam emission device according to an embodiment of the present invention; [Diagram 2] FIG. 1 is a diagram showing a basic configuration of a light beam emitting device. [Diagram 3] FIG. 4 is a diagram illustrating the wavelength dependency of light beam characteristics. [Figure 4] 4A and 4B are beam characteristic diagrams of the optical beam emitting device in the cases of blue beam and red beam. [Diagram 5] 4A and 4B are diagrams showing beam characteristics of a light beam emitting device in the cases of an ultraviolet beam and an infrared beam. [Figure 6] 11 is a relationship diagram between (D0 × NA of the light output member) and the refractive index of the light collecting member when the NA of the light output member is 0.087. [Figure 7] 13 is a diagram showing the relationship between (D0 × NA of the light output member) and the NA of the light output member (numerical aperture of the light output member) when the refractive index of the light collecting member is 1.52. [Figure 8] FIG. 13 is a diagram showing the relationship between (D0 × light output member NA) and the beam radius (Q / 2) immediately after the light beam passes through the light collecting member when the refractive index of the light collecting member is 1.52. [Figure 9] 1 is a conceptual configuration diagram of a light beam emission device according to a first embodiment. [Figure 10] FIG. 11 is a conceptual configuration diagram of a light beam emission device according to a second embodiment. [Figure 11] FIG. 11 is a conceptual diagram illustrating a configuration of a light beam emission device according to a third embodiment. [Figure 12] FIG. 11 is a conceptual diagram showing the configuration of a light beam emission device according to a fourth embodiment. [Figure 13] FIG. 13 is a conceptual diagram illustrating a light beam emission device according to a fifth embodiment. [Figure 14] FIG. 13 is a conceptual diagram showing the configuration of a light beam emission device according to a sixth embodiment. [Figure 15] FIG. 13 is a conceptual diagram showing the configuration of a light beam emission device according to a seventh embodiment. [Figure 16] FIG. 13 is a conceptual diagram showing the configuration of a light beam emission device according to an eighth embodiment. [Figure 17] FIG. 13 is a conceptual diagram showing the configuration of a light beam emission device according to a ninth embodiment. [Figure 18] FIG. 23 is a conceptual diagram showing the configuration of a light beam emission device according to a tenth embodiment. [Figure 19] FIG. 23 is a conceptual diagram showing the configuration of a light beam emission device according to an eleventh embodiment. [Figure 20] FIG. 23 is a conceptual diagram showing the configuration of a light beam emission device according to a twelfth embodiment. [Figure 21] FIG. 23 is a conceptual diagram showing the configuration of a light beam emission device according to a thirteenth embodiment. [Figure 22] FIG. 23 is a conceptual diagram showing the configuration of a light beam emission device according to a fourteenth embodiment. [Diagram 23] FIG. 23 is a conceptual diagram showing the configuration of a light beam emission device according to a fifteenth embodiment. [Figure 24] FIG. 23 is a conceptual diagram showing the configuration of a light beam emission device according to a sixteenth embodiment. [Diagram 25] FIG. 23 is a conceptual diagram showing the configuration of a light beam emission device according to a seventeenth embodiment. [Figure 26] FIG. 23 is a conceptual diagram showing the configuration of a light beam emission device according to an eighteenth embodiment. [Figure 27] FIG. 23 is a conceptual diagram of a light beam emission device according to a nineteenth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Here, a light beam emitting device according to an embodiment of the present invention will be described with reference to Fig. 1 to Fig. 8. Fig. 1 is a structural explanatory diagram of a light beam emitting device according to an embodiment of the present invention, with Fig. 1(a) being a plan view and Fig. 1(b) being a side view. Although Fig. 1 shows three light emitting members, the number of light emitting members is arbitrary.

[0015] A plurality of light emitting members 1 1 ~1 3 The light beam output device is configured by a single light collecting member 5. In this case, a light collecting lens is used as the light collecting member 5. 1 ~1 3 Emission spot 3 1 ~3 3 Light beam 2 emitted from 1 ~2 3 is the light trail of the central axis of the light beam 4 1 ~4 3 are parallel to each other, so that the light beams 21 ~2 3 The shape of the light advances toward the light collecting member 5 while expanding.

[0016] Then, the light is collected by the light collecting member 5, and after being collected by the light collecting member 5, the light is output as a collimated light beam to each of the light output members 1, 1 ~1 3 Light trail of the central axis of light emitted from 1 ~4 3 The light beam travels in such a way that it intersects with the light beam. A collimated light beam is a light beam that travels without changing its beam diameter. The light trace 4 of the central axis of this light 1 ~4 3 The point where these two points intersect is called the convergence point 6. The distance between this convergence point 6 and the focusing lens serving as the focusing member 5 does not need to be mathematically equal to the focal length of the focusing member.

[0017] Here, the plurality of light emitting members 1 1 ~1 3 Among them, light emitting member 1 1 is placed on the optical axis of the light collecting member 5. Therefore, the exit spot 3 1 and the distance d between the optical axis of the light collecting member 5 1 Since it is 0, it is not shown in the figure. 2 The emission spot 3 2 and the optical axis of the light collecting member 5 (in this case, the light trace of the central axis 4 1 The distance between 2 The light emitting member 1 is installed at a position where 3 The emission spot 3 3 and the optical axis of the light collecting member 5 (in this case, the light trace of the central axis 4 1 The distance between 3 Install it in a position where Here, the plurality of light emitting members 1 1 ~1 3 Emission spot 3 1 ~3 3 and the distance d between the optical axis of the light collecting member 5 1 ~d 3 However, the light emitting member 1 1 ~1 3 Emission spot 3 1 ~33 Light beam 2 emitted from 1 ~2 3 The beam size Q of the light beam just after passing through the focusing member 5 in the direction of movement from the optical axis of the focusing member 5 1 ~Q 3 In contrast, d=D 0 ×(Q / 2) D 0 ≦k×(nn 0 ) / NA In the above formula, d is set to d 1 ~d 3 Q corresponds to Q 1 ~Q 3 In addition, the NA of each light output member 1 1 ~1 3 The numerical aperture NA of each 1 ~NA 3 (Hereinafter, when simply expressed as NA, it indicates the NA of the light output member.) Here, d is d 1 When Q is Q 1 , NA to NA 1 Let d be d 2 When Q is Q 2 , NA to NA 2 Let d be d 3 When Q is Q 3 , NA to NA 3 Let us assume that. k is a proportionality constant, n is the refractive index of the light collecting member 5, and n 0 is the refractive index of the surroundings of the light-collecting member 5, and k is approximately 0.31 when the surroundings of the light-collecting member 5 are air or a vacuum. In this case, the light emitting member 1 1 is installed on the optical axis of the light collecting member 5, but d 1 If the above formula is satisfied, the light output member 1 1 It is not necessary to place it on the optical axis of the light collecting member 5.

[0018] Here, Q 1 ~Q 3 is the value where the optical power decreases by 1 / e from the value on the central axis by approximating the optical beam to a Gaussian beam. 2 (e: Napier's number) In this case, the diameter of the light output member 11 ~1 3 Since we considered the case where the light output member 1 is moved in the planar direction of the plan view, in the side view, the light output member 1 and the light output member 1 1 ~1 3 Since the light emitting member 1 overlaps the light emitting member 2, 3 Only the

[0019] Next, the mechanism of occurrence of color unevenness, color shift, etc. in the light beam emitting device according to the embodiment of the present invention and its correction will be described with reference to Fig. 2 to Fig. 8. In the case of color image projection, a color image is projected using the three primary colors of light, red, green, and blue. Specifically, using the light beam emitting device shown in Fig. 1, light emitting members of three colors, red, green, and blue, are arranged side by side, and the light beams emitted from each light emitting member are two-dimensionally beam scanned using an optical scanning mirror (usually a MEMS (Micro Electro Mechanical Systems) mirror or the like is used), and an image is projected onto a screen or directly onto the retina.

[0020] In order to prevent color unevenness and color shift in the image in this case, it is desirable that the red, green, and blue beam shapes are the same, or that the manner in which the beam shapes change when the position of the light emitting member 1 is different is the same. If the position of the light emitting member 1 is the same for red, green, and blue, these beam shapes will naturally be approximately the same, but in reality, it is of course impossible to place the red, green, and blue light emitting members in the same place. For this reason, for example, if a light emitting member that emits a blue light beam is placed on the optical axis of the light collecting member in Figure 2 as the light emitting member 1, the light emitting members that emit the remaining red and green light beams will be placed at the same position as the light emitting member 1. d In this case, the red and green beams have different emission spot positions compared to the blue beam, and the shapes of the emitted light beams are different. d The greater the distance d that the light beam moves from the optical axis, the greater the change in shape of the light beam. As a result, color unevenness and color shifts occur in the image, making it difficult to obtain a clear, easy-to-view image.

[0021] The mechanism by which color unevenness and color shifts occur in an image and how to correct them is as follows. [1] When the light beams have different shapes for red and blue, the thickness and brightness of the scanning lines obtained by scanning the screen depend on the location of the light emitting member 1. As a result, if the light emitting member emitting the blue light beam is placed on the optical axis of the light collecting member and the light emitting member emitting the red light beam is placed away from the optical axis, the reddish purple color obtained by combining the two lights will be different from the color of the main body, resulting in color shift. In addition, since the human visual sensitivity differs depending on the color, the speed of the beam scanning differs between the center and the periphery of the screen, resulting in uneven colors between the center and the periphery of the screen. This color shift and color unevenness can be corrected to a certain extent by software correction using image processing. [2] On the other hand, the change in the shape of the light beam caused by the difference in the installation location of the light-emitting member 1 in [1] above is the same even if the color is changed. However, if the change in the beam shape caused by the difference in the installation location of the light-emitting member changes depending on the color, a huge amount of image correction data processing will be required to correct the color shift and uneven color, and there will be a limit to software-based correction. As described above, preventing the shape changes for each color from differing depending on the location of the light emitting member is particularly useful in industrial applications of light beam emitting devices that simultaneously generate light beams of multiple colors. The present invention aims to prevent the change in shape for each color from differing depending on the location where the light output member is installed.

[0022] Next, the change in the beam shape will be described with reference to Fig. 3. Fig. 3 is an explanatory diagram of the wavelength dependency of the light beam characteristics, and in Fig. 3, the beam shape change is shown before the light output member is moved (light output member 1) and after the light output member is moved (light output member 1). d3(a) shows the change in shape of two light beams with different wavelengths after passing through the focusing member 5 of FIG. 3(b). In this case, since a simple single focusing lens is used as the focusing member 5, the beam shape after passing through the focusing lens before the light output member moves is assumed to be a perfect circle. Also, FIG. 3(a) shows the change in shape of the cross section of a long-wavelength light beam of two light beams with different wavelengths, and FIG. 3(b) shows the change in shape of the cross section of a short-wavelength light beam of two light beams with different wavelengths.

[0023] First, in the change in the shape of the cross section of the long-wavelength light beam in FIG. 3(a), the beam diameter Q1 in the direction of movement of the light output member before the movement of the light output member before After the light output member 1 moves a distance d from the optical axis of the light collecting member, d Beam diameter Q1 in the direction of movement after On the other hand, the beam diameter Q1' in the direction perpendicular to the moving direction of the light output member 1 changes to before After the light output member 1 moves a distance d from the optical axis, Q1′ after Similarly, in the case of the change in the shape of the short-wavelength light beam cross section in FIG. 3(b), the beam diameter Q2 in the direction of movement of the light output member before the movement of the light output member before However, the beam diameter Q2 in the moving direction of the light output member 1 after the light output member 1 has moved a distance d from the optical axis after On the other hand, the beam diameter Q2' in the direction perpendicular to the moving direction of the light output member 1 changes to before After the light output member 1 moves a distance d from the optical axis, Q2′ after In general, the change in beam diameter after the light emitting member 1 has moved a distance d from the optical axis compared to before the light emitting member 1 moved is such that the beam diameter in the moving direction of the light emitting member is larger than the beam diameter in the direction perpendicular to the moving direction of the light emitting member.

[0024] Next, an example of a simulation result in which the change in beam shape is quantitatively examined will be described with reference to FIG. 4. FIG. 4 is a beam characteristic diagram of a light beam emitting device using blue and red light beams as the light beam emitting device shown in FIG. 2. FIG. 4(a) is a beam characteristic diagram based on the flatness of the light beam emitting device using blue and red light beams, and is a simulation result showing the difference in the shape of the light beam due to the wavelength as a function of the distance d (corresponding to the difference in the installation location of the light emitting member) that the light emitting member moves from the optical axis of the light condensing member. FIG. 4(b) is a beam characteristic diagram based on the beam diameter of a light beam emitting device using blue and red light beams. Here, a light emitting member is set so that the cross-sectional shape of the light beam 2 emitted from the emission spot 3 of the light emitting member 1 installed on the optical axis of the light condensing member 5 in FIG. 2 immediately after passing through the light condensing member 5 becomes circular.

[0025] The light output member 1 when it is moved by d from the optical axis. d As shown in FIG. 3, due to the axial misalignment, the cross-sectional shape of the light beam immediately after passing through the light-collecting member 5 changes from a circle to a deviated ellipse. In the examined structure, a simple convex lens (material: BK7) with a lens diameter (EPD) of 4 mmφ was used as the light-collecting member 5 so that the beam size Q would be a circle of 1 mmφ, the distance between the light-emitting member and the lens was 5.85 mm, and the numerical aperture NA of the light-emitting member 1 was 0.087. Here, the NA of the light-emitting member 1 is calculated by dividing the total divergence angle of the light beam emitted from the light-emitting member 1 by the number of light-emitting members n 0 It is defined as sinθ. 0 represents the refractive index of the space after the light leaves the room. Since the light is usually in air after the light leaves the room, n 0 Of course, even if the medium is other than air, the refractive index of the medium can be used, and the light output member NA = n 0 The full angle 2θ of the light beam is calculated by approximating the light beam as a Gaussian beam, and the optical power is 1 / e 2 The diameter where (e: Napier's number) is the angle corresponding to the full beam width.

[0026] In Fig. 4(a), the dependence of the "difference in flattening between the normalized short-wavelength beam and the normalized long-wavelength beam" on the "normalized light output member movement distance D" by which the light output member moves from the optical axis is shown, using the "difference in flattening between the normalized short-wavelength beam and the normalized long-wavelength beam" on the vertical axis of the graph as a representative parameter to show the difference in shape due to differences in wavelength. Here, the short-wavelength beam was a blue beam (wavelength: 0.450 μm) and the long-wavelength beam was a red beam (wavelength: 0.635 μm). Therefore, the "difference in flattening between the normalized short-wavelength beam and the normalized long-wavelength beam" is expressed as "(blue beam flattening - red beam flattening) / red beam flattening)". On the other hand, the "normalized light output member movement distance D" corresponds to d / (Q / 2) and is expressed as the ratio of "the distance d that the light output member has moved from the optical axis" to half the length of "the beam size (full width) Q in the direction moved from the optical axis of the light condensing member immediately after the light beam emitted from the emission spot 3 of the short wavelength light output member placed on the optical axis among the short wavelength light output member and the long wavelength light output member passes through the light condensing member." Note that here, Q is Q2 before The simulation was performed assuming that the beam flattening rate is consistent with the beam diameter in the direction of movement of the light output member. The beam flattening rate is defined as {(beam diameter in the direction of movement of the light output member) - (beam diameter in the direction perpendicular to the direction of movement of the light output member)} / (beam diameter in the direction of movement of the light output member) x 100 (%). Therefore, in the case of a long wavelength beam, the beam flattening rate is (Q1 after -Q1′ after ) / Q1 after Defined as ×100 (%).

[0027] As shown in Figure 4(a), the "difference in flatness between the normalized short-wavelength beam and the normalized long-wavelength beam" on the vertical axis is almost constant up to the "normalized light output member travel distance D" of approximately 1.6, but when it exceeds 1.6, the "difference in flatness between the normalized short-wavelength beam and the normalized long-wavelength beam" is no longer constant and decreases rapidly. The straight lines and arrows in the figure are included to clearly indicate the locations where the "difference in flatness between the normalized short-wavelength beam and the normalized long-wavelength beam" changes. In the figure, D 0 indicates this inflection point, and D 0 =1.6.

[0028] Next, with reference to FIG. 4(b), another simulation result in which the change in beam shape was quantitatively examined will be described. FIG. 4(b) is a diagram of beam characteristics based on the beam diameter of the optical beam emitting device using blue and red optical beams as the optical beam emitting device shown in FIG. 2, and shows the beam characteristics from a different perspective from FIG. 4(a). It is a simulation result showing the difference in beam shape due to wavelength, namely, "the difference in beam diameter between the normalized long-wavelength beam and the short-wavelength beam in the moving direction of the optical output member" as a function of "the normalized moving distance D of the optical output member". Here, the beam size Q, lens material, distance between the optical output member and the lens, optical output member NA, and lens diameter (EPD) are the same values ​​as in FIG. 4(a). Here, the long wavelength corresponds to red, and the short wavelength corresponds to blue.

[0029] The difference in the beam diameter in the direction of movement of the light output member between the normalized long-wavelength beam and the normalized short-wavelength beam is {beam diameter in the direction of movement of the light output member (Q1 after )-Beam diameter in the direction of movement of the light output member (Q2 after )} / Beam diameter in the direction of movement of the light output member (Q2 before ) In this case, just like in Figure 4(a), the long-wavelength red beam has a wavelength of 0.635 μm, and the short-wavelength blue beam has a wavelength of 0.450 μm. As shown in Figure 4(b), even if the difference in beam diameter in the direction of movement of the light output member is used instead of the flattening ratio, the "difference in beam diameter between the normalized long-wavelength beam and the short-wavelength beam in the direction of movement of the light output member" remains almost constant up to a "normalized light output member movement distance D" of approximately 1.7, and then decreases rapidly when it exceeds 1.7. The straight lines and arrows in the figure are included to clearly indicate the locations where the "difference in beam diameter between the normalized long-wavelength beam and the short-wavelength beam in the direction of movement of the light output member" changes. In the figure, D 0 indicates this inflection point, and D 0 = 1.7, in the case of Fig. 4(a) (D 0 = 1.6), which is almost the same value.

[0030] Next, referring to FIG. 5, another simulation result in which the change in beam shape is quantitatively examined will be described. FIG. 5 is a beam characteristic diagram of the light beam emitting device using ultraviolet and infrared light beams as the light beam emitting device shown in FIG. 2, and FIG. 5(a) is a beam characteristic diagram based on the flatness of the light beam emitting device using ultraviolet and infrared light beams, and is a simulation result showing the difference in the shape of the light beam due to the wavelength as a function of the distance d (corresponding to the difference in the installation location of the light emitting member) that the light emitting member moves from the optical axis of the light condensing member. Also, FIG. 5(b) is a beam characteristic diagram based on the beam diameter of the light beam emitting device using ultraviolet and infrared light beams. Here, the wavelength range is expanded, and the result is examined using an ultraviolet beam as a short wavelength beam and an infrared beam as a long wavelength beam. In this study, the wavelength of the infrared beam was 0.850 μm and the wavelength of the ultraviolet beam was 0.405 μm. The beam size Q, lens material, distance between the light output member and the lens, NA of the light output member, and lens diameter (EPD) were the same as those in Figure 4.

[0031] Figure 5(a) shows the "difference in flattening between the normalized short-wavelength beam and the normalized long-wavelength beam" versus the "normalized light-emitting member travel distance D." As can be seen from the figure, even when ultraviolet and infrared beams are used, just as in the case of using the blue and red beams shown in Figure 4(a), the "difference in flattening between the short-wavelength beam and the long-wavelength beam on the vertical axis" is almost constant up to a normalized light-emitting member travel distance D of approximately 1.6, but once it reaches 1.6 or more, the "difference in flattening between the short-wavelength beam and the long-wavelength beam" is no longer constant and decreases rapidly. The straight lines and arrows in the figure are included to clearly indicate the locations where the "difference in flattening between the short-wavelength beam and the long-wavelength beam" changes. In the figure, D 0 indicates this inflection point, and D 0 =1.6.

[0032] Next, with reference to Fig. 5(b), another simulation result in which the change in beam shape was quantitatively examined will be described. Fig. 5(b) is the result of an examination in which the wavelength range was expanded and an ultraviolet beam was used as the short wavelength beam and an infrared beam was used as the long wavelength beam, as in Fig. 5(a), and the simulation result shows the "difference in beam diameter between the normalized long wavelength beam and the short wavelength beam in the moving direction of the light emitting member" as a function of the "normalized moving distance D of the light emitting member" as a difference in beam shape due to wavelength.

[0033] As shown in Figure 5(b), even if the difference in beam diameter in the direction of movement of the light output member is used instead of the flattening ratio, the "difference in beam diameter between the normalized long-wavelength beam and the short-wavelength beam in the direction of movement of the light output member" remains almost constant up to the "normalized light output member movement distance D" of approximately 1.7, and decreases rapidly when it exceeds 1.7. The straight lines and arrows in the figure are included to clearly indicate the locations where the "difference in beam diameter between the normalized long-wavelength beam and the short-wavelength beam in the direction of movement of the light output member" changes. D in the figure 0 indicates this inflection point, and D 0 = 1.7, and in the case of Fig. 5(a) (D 0 = 1.6), which is almost the same value. Note that the light beam is a collimated beam in Figs. 4 and 5.

[0034] The red, blue, green, infrared, and ultraviolet wavelengths shown above are representative wavelengths, and the same characteristics as those for each color described in this specification can be obtained if the wavelengths are approximately 0.625-0.780 μm for red, 0.430-0.490 μm for blue, 0.500-0.565 μm for green, 0.780 μm or more for infrared, and 0.430 μm or less for ultraviolet.

[0035] Next, a universal relational expression of beam characteristics and desirable conditions for the position of the light output member will be described with reference to Figures 6 to 8. From the results shown in Figures 4 and 5, the following can be seen under the condition that the light beam is collimated. (1) Whether the flattening of the light beam is used or the difference in the beam diameter in the direction of movement of the light output member is used, the "difference in the beam shape between the normalized short-wavelength beam and the long-wavelength beam" is almost constant until the "normalized light output member movement distance D" is around 1.6 to 1.7, and then rapidly decreases when it exceeds 1.6 to 1.7. The rapidly decreasing D is called D 0 Then, D 0 =1.6~1.7. (2) Even if a blue beam is used as the short wavelength beam and a red beam is used as the long wavelength beam, or even if the wavelength range is expanded to use an ultraviolet beam as the short wavelength beam and an infrared beam as the long wavelength beam, the above D 0 =1.6~1.7 is true. (3) However, D 0 = 1.6 to 1.7 is verified only for the examined structures corresponding to Figures 4 and 5. That is, in order to make the beam size Q a circular 1 mmφ, a simple convex lens (material: BK7) with a lens diameter (EPD) of 4 mm is used as the focusing member, the distance between the light output member and the lens is 5.85 mm, and the NA of the light output member is 0.087.

[0036] Next, based on the results of (1) to (3) above, various changes were made to the beam size Q, the material of the focusing member (silica glass, polymer, plastic, etc.), the distance between the light emitting member and the focusing member, the NA of the light emitting member, and the diameter of the focusing member (EPD), and the relationships shown in Figures 6 to 8 were obtained. Figures 6 to 8 show the results of an investigation using an ultraviolet beam as the short wavelength beam and an infrared beam as the long wavelength beam, but similar results were obtained when a blue beam was used as the short wavelength beam and a red beam was used as the long wavelength beam.

[0037] In FIG. 6, the NA of the light output member is fixed at 0.087, and the vertical axis is D 0 and the NA of the light beam emitted from the light emitting member (D 0The relationship between the refractive index of the light emitting member and the refractive index of the light collecting member is plotted on the horizontal axis (NA × light emitting member NA) and the refractive index of the light collecting member n. The points in the figure represent measurement points obtained by simulation. These measurement points are neatly aligned on a straight line as shown by the guide line in the figure, and the straight line is (D 0 ×NA)=0.31×(nn 0 ) (1) and n 0 is the refractive index of the surroundings of the light-collecting member, and when the surroundings are air or vacuum, n 0 = 1, so (D 0 ×NA)=0.31× (n-1) (2) It becomes.

[0038] This means that when the NA of the light output member is constant and the refractive index of the light collecting member approaches 1, which is the same as the refractive index of the surrounding air (which can be a vacuum), the curvature of the light collecting member surface must be increased in order to generate a collimated beam. As a result, the refraction angle increases and the wavelength dependency of the beam also increases. If the light output member is moved even slightly from the optical axis, the difference in beam flattening and beam diameter depending on the wavelength increases. In other words, D 0 This means that the guide line is generally (D 0 × NA) = k × [(refractive index of the light-collecting material) - (refractive index of the surroundings)] (3) However, when the surroundings are air, it can be seen that the proportional constant k, which represents the inclination of the guide line, can be expressed as k = 0.31. The lens refractive index here is the refractive index of the light collecting member (hereinafter, when the term lens refractive index is used, it has the same meaning as the refractive index of the light collecting member). The maximum variation in the vertical axis direction of the measurement points with respect to the guide line shown in Figure 8 is within the range of the band centered on the straight line in the figure, that is, ±0.015.

[0039] From the above formula (2), D 0 ≦0.31×[(refractive index of focusing material)-1] / NA (4) If this is the case, the difference in beam flattening and beam diameter due to wavelength will be kept constant, and as a result, color unevenness and color shift in the projected image will be easily corrected. Specifically, the amount of movement d of the emission spot of each light beam from the optical axis of the focusing member in the arrangement direction must be within a range that satisfies the following condition. d = D 0 × (Q / 2), D 0 ≦0.31×[(refractive index of focusing material)-1] / NA (5) Here, Q represents the beam size in the direction of movement from the optical axis of the condensing member of the light beam immediately after the light beam emitted from the emission spot of the light emitting member passes through the condensing member as described above.

[0040] If the refractive index of the surroundings is not 1, then from equation (1), d = D 0 × (Q / 2), D 0 ≦k×[(refractive index of the focusing material)-(refractive index of the surroundings)] / NA (6) However, the color unevenness and color shift of the generalized projected image can be easily corrected. 0 The proportionality constant k can be approximately set to 0.31 even when the surroundings are not air.

[0041] Incidentally, in the case of the configuration of the light beam output device shown in FIG. 4 and FIG. 5, the refractive index of the light collecting member is about 1.52, and the NA of the light output member is about 0.087. By substituting these values ​​into the above formula (4), D 0 = 1.85, which is within the expected range of variation {(D 0 × NA), the range of ±0.015 is when the light output material NA is 0.087, D 0 corresponds to a range of ±0.17}, and D obtained in Figs. 0 Matches.

[0042] FIG. 7 shows other results obtained using various configurations of the light beam emitter, with the vertical axis plotted as (D 0The relationship between the two is calculated by changing the NA of the light output member (× NA of the light output member) as in Fig. 6, but the horizontal axis is changed while the NA of the light output member is fixed in Fig. 6, and the points in the figure represent measurement points in the simulation. In this case, the refractive index of the light collecting member is fixed at 1.52, and other structural parameters are variously changed. From the figure, it can be seen that the (D 0 It can be seen that the value of (D × NA of the light emitting member) is a constant value, independent of the NA of the light emitting member. In the figure, the band-shaped area indicates the range of variation at the measurement points, and in Fig. 7, as in Fig. 6, the range of variation is ±0.015. Note that the range of light emitting member NA between 0.07 and 0.15 indicated by the arrow in the figure indicates the range of light emitting member NA in the horizontal direction (corresponding to the arrangement direction) of a typical semiconductor laser. Therefore, the (D 0 × the NA of the light emitting member) is constant is significantly greater than the range of the NA of the light emitting member of this general semiconductor laser, and it is clear that this is a universal relationship that holds true for all practical light beam emitting devices.

[0043] FIG. 8 shows other results obtained using various configurations of the light beam emitter, with the vertical axis plotted as (D 0 6 and 7, the horizontal axis represents the beam radius (Q / 2) immediately after the light beam passes through the focusing member, and the points in the figure represent the measurement points in the simulation. The beam radius (Q / 2) is the beam radius of the short wavelength beam out of the short and long wavelength beams (Q2 in the case of FIG. 3). before In this case, the refractive index of the light-collecting member is fixed at 1.52, and other structural parameters are varied. From the figure, the (D 0 It can be seen that the value of the NA × light output member (NA) is a constant value, independent of the beam radius (Q / 2). In the figure, the band-shaped area indicates the range of variation of the measurement points, and in Figure 8, as in Figures 6 and 7, the range of variation is ±0.015.

[0044] The results shown in FIGS. 6 to 8 indicate the following. [1]D 0 and the NA of the light beam emitted from the light emitting member (D0 The relationship between the refractive index of the light collecting member and the NA of the light output member is shown in Fig. 6 and formulas (1) to (3). Note that this relationship shows the case where the NA of the light output member is fixed at 0.087. However, when the refractive index of the light collecting member, which is the horizontal axis of Fig. 6, is considered to be a representative value of 1.52, as can be seen from Figs. 7 and 8, 0 × light output member NA) is independent of the light output member NA or the beam diameter. This independence of the light output member NA or the beam diameter also applies to other light collecting members. 0 The range of variation in the measurement points (x light output member NA) is ±0.015. [2] From the above, it can be seen that formulas (1) to (3) are universal relationships that hold even if the beam size Q, the material of the focusing member, the distance between the light output member and the focusing member, the NA of the light output member, and the diameter of the focusing member (EPD) change. In addition, in Figures 6 to 8, we examined the difference in characteristics due to the difference in wavelength using an ultraviolet light beam as the short wavelength beam and an infrared light beam as the long wavelength beam, but as can be seen from the fact that the same results were obtained for the blue light beam and the red light beam in Figure 4, formulas (1) to (3) are general relationships that hold for any light beam in a wide wavelength range from ultraviolet to infrared. [3] Equations (5) and (6) maintain the difference in beam flatness and beam diameter due to wavelength constant, and as a result, color unevenness and color shift in the projected image can be easily corrected. 0 In addition, taking into account the ±0.015 range of variation in the measurement points, a more desirable range can be found that allows easy correction of color unevenness and color shifts in the projected image by using the limited range of the following formula (7) instead of formula (5), and the following formula (8) instead of formula (6). d=D 0 ×(Q / 2), D 0 ≦[0.31×{(refractive index of the light-collecting member)−1}−0.015] / (NA) (7) d=D 0 ×(Q / 2), D 0 ≦[k×{(refractive index of the focusing material)-(refractive index of the surroundings)}-0.015] / (NA) (8)

[0045] In addition, although a simple single light-collecting member has been described as an example of the light-collecting member here, when the type of light-collecting member, the beam size Q, the focal length of the light-collecting member, and the like are within practical conditions, that is, when the emission angle of the light-emitting member 1 is within 30 degrees and the beam size Q is within 5 mm, the above formulas (5) to (8) generally hold true.

[0046] Furthermore, as long as the focusing element has a function of focusing light, the above formulas (5) to (8) are not only satisfied by a simple single focusing element, but also by a single convex lens, a lens combining a convex lens and a concave lens, a combined lens combining two or more lenses, a toroidal lens, a free-form lens, or a focusing element combining these, or even a focusing element combined with a reflecting mirror or a holographic lens, so long as the light beam emitting device is of a similar size, the above formulas (5) to (8) are satisfied. Note that the lens refractive index in the case of a combined lens is the average refractive index of each lens.

[0047] The light beam emitter of the present invention focuses two or more types of light beams with different wavelengths using the same focusing member. Note that, with respect to the light beam, in addition to the collimated beam, even if the focusing point is a focused beam that is somewhat distant from the focusing member, that is, when the focusing point is farther from the focusing member than the convergence point 6, the formulas (5) to (8) are also satisfied.

[0048] From the above, the optimum range of the light emitting member position for a light beam emitting device using multiple wavelengths will be explained. In a light beam emitting device using multiple wavelengths, it is necessary to install multiple light emitting members side by side, and it can be seen that it is desirable to install these light emitting members within the range of the installation direction determined by formulas (5) and (6) from the optical axis of the focusing member. Furthermore, it is more desirable to install them within the range of the installation direction determined by formulas (7) and (8).

[0049] Next, a range that makes it easy to arrange and manufacture the light output members will be described. The above clearly shows the optimum range of the structure of the light beam emitting device that focuses light beams of different wavelengths with the same focusing member, focusing on color unevenness and color shift. In the following, a sufficiently practical configuration is realized with the configuration in the above-mentioned optimum range, but in order to realize a more desirable configuration, it is better to consider other components. That is, when actually manufacturing a light beam emitting device that emits light beams of different wavelengths, there are manufacturing limitations. In particular, when the light emitting member is a semiconductor laser, for example, in order to obtain a light beam consisting of red, green, and blue, it is necessary to configure it by arranging red, green, and blue semiconductor laser chips. For this manufacturing, it is necessary to manufacture it in an assembly process called "post-process" in semiconductor manufacturing, and the interval at which the semiconductor laser chips are arranged is preferably 0.1 mm or more, more preferably 0.15 mm or more.

[0050] Furthermore, when the type of focusing member, the diameter of the light beam, the focal length of the focusing member, etc. are within practical conditions, i.e., when the emission angle of the light emitting member 1 is within 30 degrees and the diameter of the collimated beam is within 5 mm, it is desirable to arrange the semiconductor laser chips within a range of approximately half the width of the light beam, taking into account the heat dissipation from the chips, the size of the focusing member, etc.

[0051] Therefore, it is desirable that the outermost light output member has a distance D>1. For example, when one light output member is installed on the optical axis of the light collecting member and the other light output members are installed at positions away from the optical axis of the light collecting member, the distance d moved from the optical axis of the light output member installed on the outermost side among the other light output members is expressed as D=d / (Q C / 2)>1. In this case, the diameter Q of the light beam C is the diameter Q of the light beam emitted from the light emitting member closest to the optical axis of the light collecting member.

[0052] In summary, in the case of a general light-collecting member, the movement distance d of the light beam emission spot of the outermost light-emitting member from the optical axis of the light-collecting member in the arrangement direction is d>(Q C / 2), where Q Cis the beam size in the direction moved from the optical axis of the light collecting member of the light beam emitted from the light emitting member closest to the optical axis of the light collecting member.

[0053] Next, a configuration will be described in which the light output member located at the center of the array of light output members is a blue light output member. As can be seen from the plan view of FIG. 1(a), in order to project a color image, the light output members are red, green, and blue, which are the three primary colors of light. 1 The red light is emitted from the light emitting member 1 on the optical axis of the light collecting member 5. 2 Distance d from the optical axis 2 A green light emitting member 1 is placed at a distance of 3 Distance d from the optical axis 3 The distance between the two cameras is d 2 is a light emitting member 1 2 Emission spot 3 2 Light beam 2 emitted from 2 The beam size Q in the direction of movement from the optical axis of the focusing member immediately after passing through the focusing member 5 2 For d 2 =D 0 ×(Q 2 / 2), where D 0 ≦[0.31×{(refractive index of light-collecting member)−1}−0.015] / (light-emitting member 1 2 The range is NA.

[0054] Also, d 3 is a light emitting member 1 3 Emission spot 3 3 Light beam 2 emitted from 3 The beam size Q in the direction of movement from the optical axis of the focusing member immediately after passing through the focusing member 5 3 For d 3 =D 0 ×(Q 3 / 2), where D 0 ≦[0.31×{(refractive index of light-collecting member)−1}−0.015] / (light-emitting member 1 3 The range is NA.

[0055] In this way, the blue light emitting member 1, which is the light emitting member with the shortest wavelength among the red, green, and blue light emitting members, 1 By arranging the blue light emitting member 1 on the optical axis, the dependence of the flatness of the beam cross section on the distance from the optical axis of the light emitting member can be reduced, and a light emitting member that is easy to correct for color unevenness and color shift can be obtained. 1 In the above, the case where the light output members are arranged on the optical axis has been described, but depending on the arrangement of the light output members, it may be possible to assume that they cannot be arranged on the optical axis. In that case, the light output member with the shortest wavelength should be arranged closer to the optical axis than the other light output members. Similarly, when the wavelength of the light output members is expanded from ultraviolet to infrared, it is desirable to arrange the light output member with the shortest wavelength among the light output members to be installed on the optical axis or in a position closest to the optical axis. Furthermore, in FIG. 1, d 3 ≦d 2 As a green light emitting member 1 3 The red light emitting member 1 2 By placing the light emitting members closer to the optical axis than the shortest wavelengths, it is possible to obtain light emitting members that are easier to correct for color unevenness and color shift. In other words, it is desirable to place the light emitting members from the position closest to the optical axis of the light collecting member in ascending order of wavelength.

[0056] As the light emitting member, a light source such as a semiconductor laser or a light emitting diode, or a nonlinear optical element using a semiconductor laser as an excitation light source, or further, other than a semiconductor laser, a light emitting diode, or a nonlinear optical element using a semiconductor laser as an excitation light source, an optical fiber output end or an output end of a planar lightwave circuit (PLC) can be used. Also, a plurality of light emitting members in which they are mixed may be arranged.

[0057] In addition, the light beam from each light output member is preferably a single-peaked light beam having a single or nearly single transverse mode, but a multimode light beam having multiple peaks may also be used, or a light beam consisting of a combination of the above-mentioned modes may also be used. EXAMPLES

[0058] Next, a light beam emitter according to a first embodiment of the present invention will be described with reference to FIG. 9A and 9B are conceptual diagrams of a light beam emitting device according to a first embodiment of the present invention, with FIG. 9A being a plan view and FIG. 9B being a side view. A convex lens is used as the light condensing member 50, and its refractive index is 1.52. As shown in FIG. 9A, in order to project a color image, a first light emitting member 20 is used as a light emitting member for red, green, and blue, which are the three primary colors of light. 1 A blue semiconductor laser (wavelength: 0.450 μm) was irradiated onto the optical axis of the light collecting member 50, and a second light emitting member 20 was irradiated onto the optical axis of the light collecting member 50. 2 A red semiconductor laser (wavelength: 0.635 μm) is placed at a distance d from the optical axis. 2 = 0.25 mm away, the third light output member 20 3 A green semiconductor laser (wavelength: 0.520 μm) is placed at a distance d from the optical axis. 3 In this case, the light beam is a collimated beam, and the beam size in the direction of movement from the optical axis of the focusing member immediately after passing through the focusing member corresponds to the beam diameter Q for a blue beam, and Q = 0.3 mm.

[0059] In addition, d 2 The light emitting member 20 emits red light. 2 Emission spot 23 2 A light beam 21 emitted from 2 The optical axis of the light collecting member immediately after passing through the light collecting member 50 (in this case, 24 1 The beam size Q in the direction of the beam moving from 2 For d 2 =D 0 ×(Q 2 / 2). However, from equation (7), D 0 ≦[0.31×{(refractive index of light-collecting member)−1}−0.015] / (light-emitting member 20 2 The NA of the light output member 20 is in the range of [0.31×{1.52−1}−0.015] / 0.087=1.7. 2 The NA of the light output member in the moving direction is 0.087. 2 is set to a value of 0.29 mm or more. From equation (5), D0 ≦[0.31×{(refractive index of light-collecting member)−1}] / (light-emitting member 20 2 The acceptable Q range is then set to [0.31×{1.52-1}] / 0.087=1.85. 2 The size is 0.27 mm or more, but even in this case, the effect of preventing color unevenness and color shift can be obtained with almost no problem.

[0060] Also, d 3 The light emitting member 20 3 Emission spot 23 3 A light beam 21 emitted from 3 The optical axis of the light collecting member immediately after passing through the light collecting member 50 (in this case, 24 1 The beam size Q in the direction of the beam moving from 3 For d 3 =D 0 ×(Q 3 / 2), where D 0 ≦[0.31×{(refractive index of light-collecting member)−1}−0.015] / (light-emitting member 20 3 The NA of the light output member 20 is in the range of [0.31×{1.52−1}−0.015] / 0.087=1.7. 3 The NA of the light output member is 0.087 in the direction of movement. 3 is set to a value of 0.24 mm or more. From equation (5), D 0 ≦[0.31×{(refractive index of light-collecting member)−1}] / (light-emitting member 20 3 The acceptable Q range is then set to [0.31×{1.52-1}] / 0.087=1.85. 3 The size of the red, green and blue light beams is about 0.22 mm or more, but even in this case, the effect of preventing color unevenness and color shift can be obtained with almost no problem. Note that although the central axes of the red, green and blue light beams intersect at the convergence point 25, it is not an essential condition that the multiple light beams intersect at a single convergence point, and this also applies to the other embodiments described below.

[0061] In this way, by arranging the blue light-emitting member, which is the light-emitting member with the shortest wavelength among red, green, and blue, on the optical axis, it is possible to reduce the difference in the flatness of the beam cross section and the distance dependency of the beam diameter from the optical axis of the light-emitting member due to wavelength, and to obtain a light-emitting member that is easy to correct color unevenness and color shift. Specifically, the processing speed of the circuit of the light beam emitting device was increased by 20%. Furthermore, a light beam projection device using this beam emitting device was able to realize high-definition images with almost no color unevenness or color shift. EXAMPLES

[0062] Next, a light beam emitting device according to a second embodiment of the present invention will be described with reference to Fig. 10. Fig. 10 is a conceptual configuration diagram of the light beam emitting device according to the second embodiment of the present invention, with Fig. 10(a) being a plan view and Fig. 10(b) being a side view. A convex lens is used as the light collecting member 50, and its refractive index is 1.52. In the second embodiment, the light beam emitting device adds infrared light as a fourth light in addition to the three primary colors of light, red, green, and blue. When the light beam emitting device is used as a light beam projection device, this infrared light is used for detecting the projection position, etc.

[0063] First, in order to project a color image, a first light output member 20 is used as a light output member for the three primary colors of light, that is, red, green, and blue. 1 A blue semiconductor laser (wavelength: 0.450 μm) was irradiated onto the optical axis of the light collecting member 50, and a second light emitting member 20 was irradiated onto the optical axis of the light collecting member 50. 3 A green semiconductor laser (wavelength: 0.520 μm) is set at a distance d from the optical axis of the focusing member 50. 3 = 0.25 mm away, the third light output member 20 2 A red semiconductor laser (wavelength: 0.635 μm) is used as the light emitting member 20 3 On the opposite side, a distance d 2 In this case, the light beam is a collimated beam, and the beam size in the direction of movement from the optical axis of the focusing member immediately after passing through the focusing member corresponds to the beam diameter Q for the blue beam, and Q = 0.3 mm.

[0064] In addition, d 3 The light emitting member 20 emits green light. 3 Emission spot 23 3 A light beam 21 emitted from 3 The optical axis of the light collecting member immediately after passing through the light collecting member 50 (in this case, 24 1 The beam size Q in the direction of the beam moving from 3 For d 3 =D 0 ×(Q 3 / 2). However, from equation (7), D 0 ≦[0.31×{(refractive index of light-collecting member)−1}−0.015] / (light-emitting member 20 3 The NA of the light output member 20 is in the range of [0.31×{1.52−1}−0.015] / 0.087=1.7. 3 The NA of the light output member in the moving direction is 0.087. 3 is set to a value of 0.29 mm or more. From equation (5), D 0 ≦[0.31×{(refractive index of light-collecting member)−1}] / (light-emitting member 20 3 The acceptable Q range is then set to [0.31×{1.52-1}] / 0.087=1.85. 3 The size is 0.27 mm or more, but even in this case, the effect of preventing color unevenness and color shift can be obtained with almost no problem.

[0065] Also, d 2 The light emitting member 20 emits red light. 2 Emission spot 23 2 A light beam 21 emitted from 2 The optical axis of the light collecting member immediately after passing through the light collecting member 50 (in this case, 24 1 The beam size Q in the direction of the beam moving from 2 For d 2 =D 0 ×(Q 2 / 2), where D 0 ≦[0.31×{(refractive index of light-collecting member)−1}−0.015] / (light-emitting member 20 2The NA of the light output member 20 is in the range of [0.31×{1.52−1}−0.015] / 0.087=1.7. 2 The NA of the light output member is 0.087 in the direction of movement. 2 is set to a value of 0.29 mm or more. From equation (5), D 0 ≦[0.31×{(refractive index of light-collecting member)−1}] / (light-emitting member 20 2 The acceptable Q range is then set to [0.31×{1.52-1}] / 0.087=1.85. 2 The size of the ink is generally 0.27 mm or more, but even in this case, the effect of preventing color unevenness and color shift can be obtained with almost no problem.

[0066] Fourth light output member 20 4 An infrared semiconductor laser (wavelength: 0.85 μm) is used as the light emitting member 20 3 On the opposite side, at a distance d from the optical axis 4 = 0.4 mm apart. 4 a light emitting member 20 that emits infrared light; 4 Emission spot 23 4 A light beam 21 emitted from 4 The beam size Q in the direction of movement from the optical axis of the focusing member immediately after passing through the focusing member 50 4 For d 4 =D 0 ×(Q 4 / 2), where D 0 ≦[0.31×{(refractive index of light-collecting member)−1}−0.015] / (light-emitting member 20 4 The NA of the light output member 20 is in the range of [0.31×{1.52−1}−0.015] / 0.087=1.7. 4 The NA of the light output member is 0.087 in the direction of movement. 4 is set to a value of 0.47 mm or more. From equation (5), D 0 ≦[0.31×{(refractive index of light-collecting member)−1}] / (light-emitting member 20 4 The acceptable Q range is then set to [0.31×{1.52-1}] / 0.087=1.85.4 The size is 0.43 mm or more, but even in this case, the effect of preventing color unevenness and color shift can be obtained with almost no problem.

[0067] As a result, it was possible to reduce the difference in the wavelength-dependent difference in the flatness of the beam cross section and the beam diameter depending on the distance from the optical axis of the light-collecting member of the light-emitting member, and to obtain a light-emitting member that is easy to correct for color unevenness and color shift. Specifically, it was possible to increase the processing speed of the circuit of the light beam emitting device by 20%. In addition, it became possible to realize a high-definition image with almost no color unevenness or color shift, and to detect the projection position of the image with high accuracy.

[0068] In the second embodiment, the fourth light output member 20 4 In the above, a light beam emitting device in which infrared light is added as the fourth light emitting member has been shown, but the fourth light emitting member may be ultraviolet light other than infrared light, or a second light emitting member of any of red, green, and blue may be added. In addition, in order to increase the light intensity, multiple red, green, and blue light emitting members may be installed, and further, multiple light emitting members of any wavelength may be installed. In short, the distance d moved from the optical axis of the focusing member of each light emitting member is d=D 0 × (Q / 2). However, D 0 ≦[0.31×{(refractive index of the light-collecting member)−1}−0.015] / (NA of the light-emitting member). Q is the size (full width) of the light beam emitted from the emission spot of the light-emitting member in the direction moved from the optical axis of the light-collecting member immediately after passing through the light-collecting member.

[0069] The semiconductor laser may be either an edge-emitting semiconductor laser that emits light in a direction parallel to the substrate surface or a vertical cavity surface-emitting laser (VCSEL), or may be a light-emitting diode (LED). The light-emitting member may be a nonlinear optical element that uses a semiconductor laser as excitation light, the output end of an optical fiber, the output end of a planar lightwave circuit (PLC), or a multi-wavelength light-emitting member in which these are mixed within a semiconductor laser. In short, the distance d traveled from the optical axis of the focusing member to the output spot of each light beam is expressed as d=D 0 × (Q / 2). However, D 0 ≦[0.31×{(refractive index of light collecting member)−1}−0.015] / (NA of light output member). Q has the same definition as Q above. In addition, the light beam from the light output member is preferably a single-peaked light beam with a single or nearly single-mode transverse mode, but may also be a multimode light beam with multiple peaks. EXAMPLES

[0070] Next, a light beam emitting device according to a third embodiment of the present invention will be described with reference to Fig. 11. Fig. 11 is a conceptual diagram of the light beam emitting device according to the third embodiment of the present invention, with Fig. 11(a) being a plan view and Fig. 11(b) being a side view. The light condensing member 51 is made up of two convex lenses 51. 1 , 51 2 The refractive index is 1.52. In the third embodiment, an example of a light beam emitting device that emits light of the three primary colors of light, red, green, and blue, is shown.

[0071] First light output member 20 1 A blue semiconductor laser (wavelength: 0.450 μm) is irradiated onto the optical axis of the light collecting member 51, and the second light emitting member 20 is irradiated onto the optical axis of the light collecting member 51. 3 A green semiconductor laser (wavelength: 0.520 μm) is focused at a distance d from the optical axis of the focusing member 51. 3 = 0.25 mm away, the third light output member 20 2 A red semiconductor laser (wavelength: 0.635 μm) is used as the light emitting member 203 On the opposite side, a distance d from the optical axis of the light collecting member 51 2 The light beam in this case is a collimated beam. The beam size in the direction of movement from the optical axis of the focusing element immediately after passing through the focusing element is 51 mm in the figure for the blue beam. 1 and 51 2 The second convex lens of 51 2 This corresponds to the beam diameter Q immediately after passing through the focusing member, and Q = 0.3 mm. In this manner, in a configuration in which the light beam passes through many focusing members and focusing / diffusing bodies, the "beam size in the direction moving from the focusing member optical axis" of the light beam immediately after passing through all the focusing members and focusing / diffusing bodies is taken as Q (beam size in the array direction of the beam immediately after passing through the focusing member) of the light beam emitting device. Also, the light beam is a collimated beam.

[0072] In addition, d 3 The light emitting member 20 emits green light. 3 Emission spot 23 3 A light beam 21 emitted from 3 The optical axis of the light collecting member immediately after passing through the light collecting member 51 (in this case, 24 1 (same as above) 3 For d 3 =D 0 ×(Q 3 / 2). However, from equation (7), D 0 ≦[0.31×{(refractive index of light-collecting member)−1}−0.015] / (light-emitting member 20 3 The NA of the light output member 20 is in the range of [0.31×{1.52−1}−0.015] / 0.087=1.7. 3 The NA of the light output member in the moving direction is 0.087. 3 is set to a value of 0.29 mm or more. From equation (5), D 0 ≦[0.31×{(refractive index of light-collecting member)−1}] / (light-emitting member 20 3 The acceptable Q range is then set to [0.31×{1.52-1}] / 0.087=1.85. 3The size is 0.27 mm or more, but even in this case, the effect of preventing color unevenness and color shift can be obtained with almost no problem.

[0073] Also, d 2 The light emitting member 20 emits red light. 2 Emission spot 23 2 A light beam 21 emitted from 2 The light collecting member 51 2 The beam size Q in the direction of movement from the optical axis of the focusing element immediately after passing through 2 For d 2 =D 0 ×(Q 2 / 2), where D 0 ≦[0.31×{(refractive index of light-collecting member)−1}−0.015] / (light-emitting member 20 2 The NA of the light output member 20 is in the range of [0.31×{1.52−1}−0.015] / 0.087=1.7. 2 The NA of the light output member is 0.087 in the direction of movement. 2 is set to a value of 0.29 mm or more. From equation (5), D 0 ≦[0.31×{(refractive index of light-collecting member)−1}] / (light-emitting member 20 2 The acceptable Q range is then set to [0.31×{1.52-1}] / 0.087=1.85. 2 The size of the ink is generally 0.27 mm or more, but even in this case, the effect of preventing color unevenness and color shift can be obtained with almost no problem.

[0074] As a result, it was possible to reduce the difference in the wavelength-dependent difference in the flatness of the beam cross section and the beam diameter depending on the distance from the optical axis of the light-collecting member of the light-emitting member, and to obtain a light-emitting member that is easy to correct for color unevenness and color shift. Specifically, it was possible to increase the processing speed of the circuit of the light beam emitting device by 20%. In addition, it became possible to realize a high-definition image with almost no color unevenness or color shift, and to detect the projection position of the image with high accuracy.

[0075] In this embodiment, the light collecting member 51 is composed of two convex lenses 51.1 ,51 2 However, the focusing element may be a lens combining a convex lens and a concave lens, a combined lens combining two or more lenses, a toroidal lens, a free-form lens, or a focusing element combining these, or even a focusing element combined with a reflector or a holographic lens, as long as it has the function of focusing light and is a light beam emitting device of approximately the same size. The lens refractive index in the case of a combined lens is the average refractive index of each lens. EXAMPLES

[0076] Next, a light beam emitting device according to a fourth embodiment of the present invention will be described with reference to Fig. 12. Fig. 12 is a conceptual diagram of a light beam emitting device according to a fourth embodiment of the present invention. In this fourth embodiment, instead of a collimated light beam, the light beam is condensed at a position beyond the condensing member 52. 1 ~20 3 In the embodiment, the distance between the center of the light collecting member 52 and the light collecting point is set to 10 cm, and the other configurations are the same as those in the first embodiment. 1 ~20 3 The distance between the light collecting member 52 and the light collecting member 53 is made larger than that in Example 1. In Example 4 of the present invention, the same effect as in Example 1 is obtained. Note that, although a light collecting member that collects a light beam is used in Fig. 12, the same effect can be obtained in the case where the light beam diverges by using the same configuration. EXAMPLES

[0077] Next, a light beam emitting device according to a fifth embodiment of the present invention will be described with reference to Fig. 13. Fig. 13 is a conceptual configuration diagram of a light beam emitting device according to a fifth embodiment of the present invention, with Fig. 13(a) being a plan view and Fig. 13(b) being a side view, and the basic configuration is the same as that of the first embodiment except that a focusing lens having a free curved surface is used as the focusing member 53.

[0078] In this case, each light emitting member 20 1 ~20 3The cross-sectional shape of the light beam emitted from the lens does not need to be an isotropic circle, and as the light collecting member 53 having a free curved surface, if the cross section of the emitted light beam has an anisotropic shape, a lens is used that can correct the cross-sectional structure of the light beam after passing through the lens to an isotropic circle. 1 ~24 3 intersect at a convergence point 25. At this time, the light emitting member 20 emitting blue light 1 a blue semiconductor laser as a light emitting member 20 emitting red light; 2 and a light emitting member 20 emitting green light. 3 The light beams 21 emitted from the green semiconductor lasers as 1 ~21 3 Emission spot 23 1 ~23 3 The distance d from the optical axis of the focusing member of each light beam 21 1 ~21 3 Immediately after each light beam 21 passes through the light collecting member 53 made of a free curved surface, 1 ~21 3 The diameter Q of the light beam in the direction of arrangement of the light output members (the same as the direction of movement of the light output members) satisfies formula (5), and more preferably formula (7). 1 4 represents the diameter of the light beam immediately after passing through the light collecting member 53 in the direction of arrangement of the light emitting members (the same as the direction of movement of the light emitting members).

[0079] In the fifth embodiment of the present invention, the light collecting member 53 having a free curved surface is used as the light collecting member. 1 ~20 3 A light beam 21 emerging from 1 ~21 3 When the cross-sectional shape of each light output member 20 is an ellipse, it can be corrected to an isotropic circle, and color unevenness of the projected image can be easily improved, resulting in a good image. 1 ~20 3 Light beam from 21 1 ~21 3Even if the emission angle of the light beam varies for each light output member and in the vertical and horizontal directions, it is possible to convert the light beam into a relatively circular light beam. Note that, even when the cross section of the light beam is made into any shape other than a circle by using the light collecting member 53 having a free curved surface as the light collecting member, it is possible to improve color unevenness, etc. by satisfying the formula (5), and more preferably the formula (7), as in this embodiment. EXAMPLES

[0080] Next, an optical beam emitter according to a sixth embodiment of the present invention will be described with reference to Fig. 14. Fig. 14 is a conceptual diagram of an optical beam emitter according to a sixth embodiment of the present invention, in which Fig. 14(a) is a plan view and Fig. 14(b) is a side view, and the basic configuration is the same as that of the fifth embodiment except that a focusing member 54 made of cylindrical lens surfaces with orthogonal focusing directions is used as the focusing member.

[0081] In this case, each light emitting member 20 1 ~20 3 A light beam 21 emerging from 1 ~21 3 The cross-sectional shape does not need to be an isotropic circle, and as the focusing member 54 consisting of cylindrical lens surfaces with orthogonal focusing directions, if the cross section of the emitted light beam has a non-isotropic shape, a focusing member is used that can correct the cross-sectional structure of the light beam after passing through the focusing member to an isotropic circle.

[0082] The light trace 24 of the central axis of each light beam 1 ~24 3 intersect at a convergence point 25. At this time, the light emitting member 20 emitting blue light 1 a blue semiconductor laser as a light emitting member 20 emitting red light; 2 and a light emitting member 20 emitting green light. 3 The light beams 21 emitted from the green semiconductor lasers as 1 ~21 3 Emission spot 23 1 ~23 3 The distance d from the optical axis of the focusing member of each light beam 21 1 ~21 3The light beams 21 are each focused on the same direction just after passing through a focusing member 54 made of cylindrical lens surfaces whose focusing directions are perpendicular to each other. 1 ~21 3 The diameter Q of the light beam in the direction of the light output member arrangement (the same as the direction of the light output member movement) satisfies formula (5), and more preferably formula (7). 1 The light emitting member 20 1 5 represents the diameter of the light beam immediately after passing through the light collecting member 54 in the direction of arrangement of the light emitting members (the same as the direction of movement of the light emitting members).

[0083] In the sixth embodiment of the present invention, the light collecting member 54 is made of cylindrical lens surfaces whose light collecting directions are perpendicular to each other. 1 ~20 3 A light beam 21 emerging from 1 ~21 3 In the case where the cross-sectional shape of the projection lens is an ellipse, it can be corrected to an isotropic circle, and color unevenness in the projected image can be easily improved, thereby obtaining a good image. The cylindrical lens surface of the light collecting member 54, which is made up of cylindrical lens surfaces with orthogonal light collecting directions, is basically cylindrical and collects light only in the vertical or horizontal direction. However, it is possible to introduce a curved surface in the direction orthogonal to these directions to produce a corrective light collecting effect. It is also possible to change the curvature of the cylinder in the longitudinal direction of the cylindrical shape, change the focal length depending on the location, and correct the light collecting effect. Furthermore, the cross-sectional structure of the cylindrical lens surface is not limited to a simple cylindrical shape, and a pseudo-cylindrical shape such as a toroidal surface may be used. The light collecting member here is made up of an incident side light collecting surface and an exit side light collecting surface, but light collecting elements having an incident side light collecting surface and an exit side light collecting surface may be separately manufactured and installed. Alternatively, both may be combined to form one lens. In this case, an air layer may exist between the two light collecting elements. In addition, even when the cross section of the light beam is made into any shape other than circular by using a focusing member 54 consisting of cylindrical lens surfaces with orthogonal focusing directions, it is possible to improve color unevenness, etc. by satisfying formula (5), and more preferably formula (7), as in this embodiment. EXAMPLES

[0084] Next, an optical beam emitter according to a seventh embodiment of the present invention will be described with reference to Fig. 15. Fig. 15 is a conceptual diagram of an optical beam emitter according to a seventh embodiment of the present invention, with Fig. 15(a) being a plan view and Fig. 15(b) being a side view, and the basic configuration is the same as that of the fifth embodiment except that a focusing member 55 consisting of a cylindrical lens surface and a convex lens surface is used as the focusing member.

[0085] In this case, each light emitting member 20 1 ~20 3 A light beam 21 emerging from 1 ~21 3 The cross-sectional shape does not need to be an isotropic circle; by using a focusing member 55 consisting of a cylindrical lens surface and a convex lens surface, if the cross-section of the emitted light beam has a non-isotropic shape, the cross-sectional structure of the light beam after passing through the focusing member can be corrected to an isotropic circle.

[0086] The light trace 24 of the central axis of each light beam 1 ~24 3 intersect at a convergence point 25. At this time, the light emitting member 20 emitting blue light 1 a blue semiconductor laser as a light emitting member 20 emitting red light; 2 and a light emitting member 20 emitting green light. 3 The light beams 21 emitted from the green semiconductor lasers as 1 ~21 3 Emission spot 23 1 ~23 3 The distance d from the optical axis of the focusing member of each light beam 21 1 ~21 3 The respective light beams 21 immediately after passing through a condenser member 55 consisting of a cylindrical lens surface and a convex lens surface. 1 ~21 3 The diameter Q of the light beam in the direction of the light output member arrangement (the same as the direction of the light output member movement) satisfies formula (5), and more preferably formula (7). 1 The light emitting member 20 113 represents the diameter of the light beam immediately after passing through the light collecting member 55 in the direction of arrangement of the light emitting members (the same as the direction of movement of the light emitting members).

[0087] In the seventh embodiment of the present invention, a light collecting member made of a cylindrical lens surface and a convex lens surface is used as the light collecting member 55. 1 ~20 3 A light beam 21 emerging from 1 ~21 3 In the case where the cross-sectional shape of the projection lens is an ellipse, it can be corrected to an isotropic circle, and color unevenness in the projected image can be easily improved, thereby obtaining a good image.

[0088] The cylindrical lens surface described above is basically cylindrical, and it has been described that the light is focused only in the vertical or horizontal direction. However, it is possible to introduce a curved surface in the direction perpendicular to the vertical direction to produce a corrective focusing effect. It is also possible to change the curvature of the cylinder in the longitudinal direction of the cylindrical shape, change the focal length depending on the location, and correct the focusing effect. Furthermore, the cross-sectional structure of the cylindrical lens surface is not limited to a simple cylindrical shape, and a pseudo-cylindrical shape such as a toroidal surface may be used. This is the same for a convex lens surface, and an aspheric lens may be used. In addition, the focusing member here is composed of a focusing surface on the entrance side and a focusing surface on the exit side, but a focusing element having a focusing surface on the entrance side and a focusing surface on the exit side may be separately manufactured and combined to form a single focusing member. In this case, an air layer may be present between the two focusing elements. In addition, even when a focusing lens consisting of a cylindrical lens surface and a convex lens surface is used as a focusing lens to make the cross section of the light beam into any shape other than circular, color unevenness, etc. can be improved by satisfying formula (5), and more preferably formula (7), as in this embodiment. EXAMPLES

[0089] Next, an optical beam emitting device according to an eighth embodiment of the present invention will be described with reference to Fig. 16. Fig. 16 is a conceptual diagram of an optical beam emitting device according to an eighth embodiment of the present invention, with Fig. 16(a) being a plan view and Fig. 16(b) being a side view, and the optical beam emitting device according to the eighth embodiment of the present invention being the same as the above-mentioned first embodiment except for the arrangement of each light emitting member. A light emitting member 20 that emits blue light 1 a blue semiconductor laser as a light emitting member 20 emitting red light; 2 and a light emitting member 20 emitting green light. 3 The green semiconductor lasers as the light beams 21 are not arranged in parallel, but the red and green semiconductor lasers are arranged at an angle with respect to the optical axis of the light collecting member 50. In this case, each light beam 21 1 ~21 3 Light trail of the central axis 24 1 ~24 3 When the semiconductor lasers are arranged in parallel, the light traces 24 intersect at the convergence point 25. However, as shown in the figure, the light traces 24 intersect at the intersection point 26, which is closer to the condenser member 50 than the convergence point 25. 1 ~24 3 will intersect.

[0090] In this case, the light emitting member 20 that emits blue light is 1 a blue semiconductor laser as a light emitting member 20 emitting red light; 2 and a light emitting member 20 emitting green light. 3 The light beams 21 emitted from the green semiconductor lasers as 1 ~21 3 Emission spot 23 1 ~23 3 The distance d from the optical axis of the focusing member of each light beam 21 1 ~21 3 and diameter Q of the light beam in the light output member arrangement direction (same as the light output member movement direction) of each light beam immediately after passing through the light collecting member 50 satisfy formula (5), and more preferably formula (7).

[0091] Therefore, a light beam emitting device having a shorter length and a smaller size than that of the first embodiment can be obtained, and color unevenness in the projected image can be easily improved, and a good image can be obtained by a light beam projection device equipped with this light beam emitting device. 1 ~24 3 The red and green semiconductor lasers are arranged at an angle with respect to the optical axis of the focusing member 50 so that the blue and red semiconductor lasers intersect, but if miniaturization is not an issue, the red and green semiconductor lasers may be tilted in the same direction, including the blue semiconductor laser. In this case, the distance d of the emission spot from the optical axis of the focusing member and the diameter Q of each light beam are set to satisfy formula (5), more preferably formula (7). Furthermore, even in the case of three or more light emitting members, the direction of the central axis of each light beam may be tilted in either direction with respect to the optical axis of the focusing member, or may not be tilted at all. In short, it is important that the distance d of the emission spot from the optical axis of the focusing member and the diameter Q of each light beam are set to satisfy formula (5), more preferably formula (7). EXAMPLES

[0092] Next, a light beam emitting device according to a ninth embodiment of the present invention will be described with reference to Fig. 17. Fig. 17 is a conceptual diagram showing only the light emitting member portion of the light beam emitting device according to the ninth embodiment of the present invention, Fig. 17(a) is a front view, Fig. 17(b) is a plan view, and shows a plurality of light emitting members 20. 1 ~20 3 The other configurations are the same as those of the above-mentioned Example 1, and the figure conceptually explains the mounting structure of the light emitting member in the above-mentioned Examples 1 to 7.

[0093] As shown in the figure, a light emitting member 20 that emits blue light 1 a blue semiconductor laser as a light emitting member 20 emitting red light; 2 and a light emitting member 20 emitting green light. 3The green semiconductor lasers as the light beams 21 are arranged in parallel with the optical axis of the light collecting member. 1 ~21 3 The central axes of the light beams 21 are parallel to each other. 1 ~21 3 Emission spot 23 1 ~23 3 The position of the emission direction of the light emitting member 20 (corresponding to the distance between the emission spot and the light collecting member) is aligned. 1 , light emitting member 20 2 and the light emitting member 20 3 The light beams 21 may be mounted on a common base 30. 1 ~21 3 A step 31 may be provided on the light output side of the base 30 so that the base 30 does not kick the light output side of the base 30 .

[0094] As shown in FIG. 17(b), the laminated structure of a semiconductor laser generally differs depending on the semiconductor material, so that the light emitting members 20 each having a different emission wavelength are used. 1 ~20 3 Emission spot 23 1 ~23 3 The center positions in the height direction of the emission spots 23 differ. 1 ~23 3 Light beam from 21 1 ~21 3 When a raster scan image (a raster sweep with a high speed sweep in the horizontal direction and a low speed sweep in the vertical direction) is formed on a screen or the like using an optical scanning mirror, color unevenness and color shifts will occur.

[0095] In order to eliminate such color unevenness and color shift, the light emitting member 20 1 ~20 3 is placed on a stepped base 30, and the emission spot 23 1 ~23 3 The height of the center of the light emitting member 20 1 ~20 3The difference between the distances of the exit spots 23 (in the direction perpendicular to the direction of the array) should be within Δh. Δh is set to a value corresponding to half the interval between the scanning lines used to generate the nearest image repeatedly scanned in the horizontal direction in an image raster-scanned onto a screen or the like. In other words, the exit spot 23 1 ~23 3 If the position of the light emitting member 20 is changed in the height direction by Δh, the position of the light emitting member 20 changes by half the interval of the scanning lines on the screen. 1 ~20 3 The light beam 21 is aligned in the direction of the arrangement (horizontal direction). 1 ~21 3 is obtained by scanning

[0096] In addition, the light emitting member 20 1 ~20 3 The light beam 21 is arranged perpendicular to the direction of the arrangement of the 1 ~21 3 By scanning the light beam 21, a raster sweep of a low speed vertical sweep is obtained. 1 ~21 3 When an image is projected by scanning the light, a high-quality image without color unevenness or color shift can be obtained. 1 ~23 3 A light beam 21 emitted from 1 ~21 3 It is also possible to prevent the base 30 from kicking it.

[0097] For this reason, in the light beam emitting devices shown in the above-mentioned Examples 1 to 8, the light emitting member 20 1 ~20 3 Emission spot 23 1 ~23 3 The height of the center of the light emitting member 20 1 ~20 3 The difference between the distances (perpendicular to the arrangement direction of the light emitting members 20) should be within Δh. 1 ~20 3 Each light beam 21 emerges from 1 ~21 3Emission spot 23 1 ~23 3 The range in the direction perpendicular to the direction of the arrangement of the light beam 21 1 ~21 3 In the image obtained by raster scanning the light emitting member 20 used for image generation 1 ~20 3 The light beam 21 is arranged in the direction of the arrangement of 1 ~21 3 The distance between adjacent scanning lines in the horizontal direction obtained by scanning the light beam is smaller than half the distance between adjacent scanning lines in the horizontal direction.

[0098] Also, a series of exit spots 23 1 ~23 3 (For example, the emission spots of the red, green, and blue light emitting members) are aligned at the height of the center of the emission spots 23 1 ~23 3 The difference in height between the centers of the two spots is within Δh. 1 ~23 3 The height of the centers of the light emitting spots (e.g., the red, green, and blue light emitting members) is aligned to level 2, and the light emitting spots 23 1 ~23 3 The difference in height between the centers of the lasers is set within Δh. Even if the number of semiconductor lasers is doubled, Δh remains the same in that it is a value corresponding to half the spacing between the scanning lines used to generate the nearest image that is repeatedly scanned horizontally in an image raster scanned onto a screen or the like. In this case, the height difference Δd between level 1 and level 2 is set to be equivalent to twice Δh. Therefore, the spacing between the scanning lines of the light beams emitted only from level 1 or level 2 is four times Δh. In other words, this is a light beam emitting device in which multiple light emitting members are installed with the emission spots of the light emitting members separated into two or more levels.

[0099] In this way, a series of exit spots 23 for levels 1 and 2 1 ~23 3 By configuring the exit spot 23 1 ~23 3 A light beam 21 emitted from 1 ~213 When the light is scanned by an optical scanning mirror to form a raster scan image (a raster sweep with a fast horizontal sweep and a slow vertical sweep, with the horizontal sweep being the array direction) on a screen or the like, the number of scanning lines that are repeatedly scanned horizontally and used to generate an image can be doubled compared to the case of only exit spots of level 1 or only exit spots of level 2, for the same number of sweeps. As a result, for the same number of sweeps per unit time, the resolution in the slow vertical sweep direction is doubled. Also, for images with the same resolution, the number of sweeps per unit time can be halved, reducing the burden on the drive circuit. EXAMPLES

[0100] Next, a light beam emitting device according to a tenth embodiment of the present invention will be described with reference to Fig. 18. Fig. 18 is a conceptual diagram showing only the light emitting member portion of the light beam emitting device according to the tenth embodiment of the present invention, Fig. 18(a) is a front view, Fig. 18(b) is a plan view, and shows a plurality of light emitting members 20. 1 ~20 3 8 shows the positions in the light propagation direction of the emission spots of the light beams emitted from the respective light beams, or the emission directions of the light beams. The other configurations are the same as those of the above-mentioned Example 1, and this example conceptually explains the mounting structure of the light emitting member in the above-mentioned Example 8 from the viewpoint of chromatic aberration correction.

[0101] As shown in the figure, a light emitting member 20 that emits blue light 1 a blue semiconductor laser as a light emitting member 20 emitting red light; 2 and a light emitting member 20 emitting green light. 3 The green semiconductor lasers as the light beams 21 are arranged at an angle to the optical axis of the light collecting member. 1 ~21 3 The central axis of each light beam 21 is angled with the optical axis of the light collecting member. 1 ~21 3 Emission spot 23 1 ~23 3 The position of the emission direction (corresponding to the distance between the emission spot and the light collecting member) is also not constant.

[0102] In the tenth embodiment, the light emitting member 20 emitting blue light 1 A light emitting member 20 emitting green light for a blue semiconductor laser as a light emitting element 3 The green semiconductor laser as the light source is turned slightly inward in its emission direction and the emission spot 23 3 is the emission spot 23 of the blue semiconductor laser. 1 Position it so as to be farther away from the light collecting member.

[0103] On the other hand, in contrast to the blue semiconductor laser, the light emitting member 20 2 The emission direction of the red semiconductor laser is inclined slightly inward, and the inclination angle of the red semiconductor laser is made larger than the inclination angle of the green semiconductor laser. 2 is the emission spot 23 of the green semiconductor laser. 3 The light collecting member is disposed so as to be further away from the light collecting member.

[0104] By arranging it like this, the output spot 23 1 ~23 3 The light beams 21 are slightly farther away from the condenser in the order of red, green, and blue, which have longer wavelengths, and the emission directions are inclined. Therefore, the chromatic aberration of a single condenser is corrected, and all the light beams 21 are condensed. 1 ~21 3 The light beams 21 and 21 can be arranged to intersect at an intersection point 26. 1 ~21 3 Emission spot 23 1 ~23 3 The position of the light in the direction of travel and the light beam 21 1 ~21 3 However, even if only one of the directions of the light output from the light output member 20 is changed, the chromatic aberration can be corrected. 1 , light emitting member 20 2 and the light emitting member 20 3 The light beams 21 may be mounted on a common base 30. 1 ~21 3In order to prevent the light emitting element from being kicked by the base 30, a step 31 may be provided on the light emitting side of the base 30. The setting of the step 31 is the same as in the ninth embodiment. EXAMPLES

[0105] Next, a light beam projection device according to an eleventh embodiment of the present invention will be described with reference to Fig. 19. Fig. 19 is a conceptual diagram (side view) of the light beam projection device according to the eleventh embodiment of the present invention. In this embodiment, the center of mirror surface 29 of light scanning mirror substrate 28 of the light scanning mirror device is placed at convergence point 25 of the light beam projection device according to the first to tenth embodiments, and light beam 21 emitted from a green semiconductor laser is guided to mirror surface 29. 3 Light trail of the central axis 24 3 It is tilted 45 degrees from the

[0106] The mirror surface 29 of the optical scanning mirror 28 is driven by a piezoelectric drive method, with a high-speed (horizontal) axis drive frequency of 35 KHz, a high-speed (horizontal) axis swing angle of ±15 deg (mirror swing angle), a low-speed (vertical) axis drive frequency of 60 Hz, and a low-speed (vertical) axis swing angle of ±15 deg (mirror swing angle). Here, a piezoelectric drive method using the piezoelectric effect is used, but a drive device using an electrostatic drive method or an electromagnetic drive method may also be used. A high-definition projection device with 720P specifications (1280 x 720 pixels) can be realized by the optical beam projection device of the eleventh embodiment of the present invention. In addition, here, an optical scanning mirror device capable of two-dimensional optical scanning is used, but an image can also be obtained by using two single optical scanning mirror devices capable of one-dimensional scanning in succession instead of two-dimensional scanning. EXAMPLES

[0107] Next, referring to FIG. 20, a scanning fluorescence measuring device in which a light beam from a light beam emitting device of the twelfth embodiment of the present invention is scanned by a light scanning mirror will be described. FIG. 20(a) shows a device in which a light beam from a light emitting member is collected by a light collecting member, and FIG. 20(b) shows a device in which a light beam from a light emitting member is collected by an optical waveguide type multiplexer. Scanning fluorescence measuring devices are used as an indispensable tool in the bio field, and irradiate a measurement sample such as a living body with a laser beam, scan the irradiation position two-dimensionally, map the fluorescence from the irradiation site two-dimensionally, and obtain tissue information of the living body. In particular, detailed tissue information can be obtained by simultaneously irradiating and scanning a plurality of laser beams with different wavelengths. Examples of scanning fluorescence measuring devices include a laser scanning fluorescence microscope, a laser scanning confocal microscope, and a laser scanning non-confocal microscope.

[0108] 20(a) is a side view showing the basic configuration of a scanning fluorescence measuring device in which a light beam emitted from a light beam emitting device of the twelfth embodiment of the present invention is condensed by a condensing member and then scanned by a light scanning mirror, and in particular shows a conceptual configuration in the case where the light beam is obliquely incident on the light scanning mirror. 1 ~20 3 In this case, three types of light output members 20 1 ~20 3 A semiconductor laser is used as the light source. Each light beam 101 emitted from the light emitting member group 100 is collected by the light collecting member 102, passes through a wavelength selection mirror 103 which transmits only a specific narrow wavelength range and reflects light of other wavelengths, and then enters the mirror surface 29 of the optical scanning mirror substrate 28 which is inclined at 45° with respect to the traveling direction of the light beam 101, is reflected upward, and travels toward a measurement sample 104, where the sample is scanned and irradiated with light. The light collecting member 102 here may be any of the light collecting members shown in the above-mentioned embodiments 1 to 10.

[0109] The fluorescence generated on the sample by the light irradiation travels in the opposite direction to the light beam 101, is reflected by the mirror surface 29 of the light scanning mirror substrate 28, and is then reflected by the wavelength selection mirror 103 to enter the upper photodetector 105 as signal light. The wavelength selection mirror 103 uses a mirror that transmits only the narrow wavelength range of the light beam emitted from the light emitting member group 100, so light with a relatively wide wavelength range such as fluorescence is efficiently reflected upward.

[0110] Here, the light emitting member group 100 is composed of three types of light emitting members, and the wavelength of each light emitting member is selected according to the fluorescent characteristics of the sample to be measured, and three or more types of light emitting members may be used. Representative wavelengths of the light emitting members are 0.405 μm (ultraviolet light), 0.488 μm (blue light), 0.561 μm (green light), 0.637 μm (red light), etc., but are not limited to these wavelengths. By using the light beam emitting device of Example 12, not only the entire device can be made compact, but also the difference in beam flatness and beam diameter due to wavelength can be kept constant, and as a result, the analysis of the fluorescent distribution can be performed with high accuracy, and a high-performance and small-sized scanning fluorescence measuring device can be provided.

[0111] Next, referring to FIG. 20(b), a scanning fluorescence measuring device in which the light beam from the light beam emitting device of the twelfth embodiment of the present invention is condensed by an optical waveguide type multiplexer and then scanned by an optical scanning mirror will be described. In this case, the light emitting member group 100 is the above-mentioned light emitting member 20. 1 ~20 3 In this case, three types of light output members 20 1 ~20 3 A semiconductor laser is used as the light source. The light beams emitted from the light emitting member group 100 are multiplexed by an optical waveguide multiplexer 106, then focused by a light collecting member 102, pass through a wavelength selection mirror 103, and then enter a mirror surface 29 of an optical scanning mirror substrate 28 inclined at 45° to the traveling direction of the multiplexed light beam 107, and are reflected upward toward a measurement sample 104, where the sample is scanned and irradiated with light. The light collecting member 102 here may be any of the light collecting members shown in the above-mentioned embodiments 1 to 10.

[0112] 20(a), the fluorescence generated on the sample by the light irradiation travels in the opposite direction to the light beam 107, is reflected by the mirror surface 29 of the light scanning mirror substrate 28, is reflected by the wavelength selection mirror 103, and enters the upper photodetector 105 as signal light. The wavelength selection mirror 103 uses a mirror that transmits only the narrow wavelength range of the light beam emitted from the light emitting member group 100, so light with a relatively wide wavelength range such as fluorescence is efficiently reflected upward.

[0113] Here again, the light emitting member group 100 is composed of three types of light emitting members, but the wavelength of each light emitting member is selected according to the fluorescent characteristics of the sample to be measured, and three or more types of light emitting members may be used. Representative wavelengths of the light emitting members are 0.405 μm (ultraviolet light), 0.488 μm (blue light), 0.561 μm (green light), 0.637 μm (red light), etc., but are not limited to these wavelengths. By using the light beam emitting device of Example 12, not only the entire device can be made compact, but also the difference in beam flatness and beam diameter due to wavelength can be kept constant, and as a result, the analysis of the fluorescent distribution can be performed with high accuracy, and a high-performance and small-sized scanning fluorescence measuring device can be provided. EXAMPLES

[0114] Next, with reference to Fig. 21, a scanning fluorescence measurement device in which a light beam from a light beam emitting device according to a thirteenth embodiment of the present invention is scanned by a light scanning mirror will be described. Fig. 21(a) shows a case in which a light beam from a light emitting member is collected by a light collecting member, and Fig. 21(b) shows a case in which a light beam from a light emitting member is collected by an optical waveguide type multiplexer. Fig. 21(a) shows a basic configuration of a scanning fluorescence measurement device in which a light beam from a light beam emitting device according to a thirteenth embodiment of the present invention is collected by a light collecting member and then scanned by a light scanning mirror, and is in particular a side view showing a conceptual configuration in which a light beam is obliquely incident on the light scanning mirror and the beam from the light emitting member is lifted upward. Here again, the light emitting member group 100 includes the above-mentioned light emitting member 20. 1 ~20 3 In this case, three types of light output members 20 1 ~203 A semiconductor laser is used as the light source.

[0115] Each light beam 101 emitted from the light output member group 100 is collected by the light collecting member 102, and then the light beam is raised upward by the reflection type light collecting system 108, and then passes through the wavelength selection mirror 103, enters the mirror surface 29 of the light scanning mirror substrate 28 inclined at 45° with respect to the traveling direction of the light beam 101, and is reflected upward toward the measurement sample 104, and scans the sample to irradiate it with light. The light collecting member 102 here may be any of the light collecting members shown in the above-mentioned Examples 1 to 10. The reflection type light collecting system 108 is for moving the central axis of the light beam 101, and although a reflection type light collecting system is used here, any other system that moves the central axis of the light beam may be used. By moving the central axis of the light beam 101, the degree of freedom of the device configuration can be increased, and the design is facilitated.

[0116] The fluorescence generated on the sample by the light irradiation travels in the opposite direction to the light beam 101, is reflected by the mirror surface 29 of the light scanning mirror substrate 28, and is then reflected by the wavelength selection mirror 103 to enter the upper photodetector 105 as signal light. The wavelength selection mirror 103 uses a mirror that transmits only the narrow wavelength range of the light beam 101 emitted from the light emitting member group 100, so light with a relatively wide wavelength range such as fluorescence is efficiently reflected upward.

[0117] Here again, the light emitting member group 100 is composed of three types of light emitting members, but the wavelength of each light emitting member is selected according to the fluorescent characteristics of the sample to be measured, and three or more types of light emitting members may be used. Representative wavelengths of the light emitting members are 0.405 μm (ultraviolet light), 0.488 μm (blue light), 0.561 μm (green light), 0.637 μm (red light), etc., but are not limited to these wavelengths. By using the light beam emitting device of FIG. 21(a), not only the entire device can be made compact, but also the difference in beam flatness and beam diameter due to wavelength can be kept constant, and as a result, the analysis of the fluorescent distribution can be performed with high accuracy, and a high-performance and small-sized scanning fluorescence measuring device can be provided.

[0118] Next, with reference to FIG. 21(b), a scanning fluorescence measuring device in which the light beam from the light beam emitting device of the thirteenth embodiment of the present invention is condensed by an optical waveguide type multiplexer and then scanned by an optical scanning mirror will be described. 1 ~20 3 In this case, three types of light output members 20 1 ~20 3 A semiconductor laser is used as the focusing element. The light beams emitted from the light output member group 100 are multiplexed by an optical waveguide multiplexer 106, and then simultaneously focused and moved in a reflection type focusing system 108, pass through a wavelength selection mirror 103, and are incident on a mirror surface 29 of an optical scanning mirror substrate 28 inclined at 45° to the traveling direction of the multiplexed light beam 107, and are reflected upward toward a measurement sample 104, where the sample is scanned and irradiated with light. The reflection type focusing system 108 is for moving the central axis of the light beam 107, and although a reflection type focusing system is used here, any other system may be used as long as it moves the central axis of the light beam 107. By moving the central axis of the light beam, the degree of freedom of the device configuration can be increased, and the design is facilitated.

[0119] The fluorescence generated on the measurement sample 104 by the light irradiation travels in the opposite direction to the light beam 107, is reflected by the mirror surface 29 of the light scanning mirror substrate 28, and is then reflected by the wavelength selection mirror 103 to enter the photodetector 105 above as signal light. The wavelength selection mirror 103 uses a mirror that transmits only the narrow wavelength range of the light beam emitted from the light emitting member group 100, so light with a relatively wide wavelength range such as fluorescence is efficiently reflected upward. Here, the light emitting member group 100 is made up of three types of light emitting members 20 1 ~20 3The wavelength of each light emitting member is selected according to the fluorescence characteristics of the sample to be measured, and three or more types of light emitting members may be used. Representative wavelengths of light emitting members are 0.405 μm (ultraviolet light), 0.488 μm (blue light), 0.561 μm (green light), 0.637 μm (red light), etc., but are not limited to these wavelengths. By using the light beam emitting device of FIG. 21(b), not only can the entire device be made compact, but the difference in beam flatness and beam diameter due to wavelength is kept constant, and as a result, the analysis of the fluorescence distribution can be performed with high accuracy, and a high-performance, compact scanning fluorescence measuring device can be provided. EXAMPLES

[0120] Next, with reference to Fig. 22, a scanning fluorescence measurement device in which a light beam from a light beam emitting device of embodiment 14 of the present invention is scanned by an optical scanning mirror will be described. Fig. 22(a) shows that the light beam from the light emitting member is scanned by a condensing member, and Fig. 22(b) shows that the light beam from the light emitting member is scanned by an optical waveguide multiplexer. Fig. 22(a) shows the basic configuration of a scanning fluorescence measurement device in which the light beam from the light beam emitting device of embodiment 14 of the present invention is scanned by a scanning mirror after being scanned by a condensing member, and is a side view showing in particular the conceptual configuration when the light beam is perpendicularly incident on the optical scanning mirror. Here again, the light emitting member group 100 includes the above-mentioned light emitting member 20. 1 ~20 3 In this case, three types of light output members 20 1 ~20 3 A semiconductor laser is used as the light source.

[0121] Each light beam 101 emitted from the light output member group 100 is collected by the light collecting member 102, reflected downward by the half mirror 109 inclined at 45° with respect to the light beam 101, and enters the mirror surface 29 of the light scanning mirror substrate 28, reflected upward, passes through the half mirror 109 toward the measurement sample 104, and scans the sample to irradiate it with light. The light collecting member 102 here may be any of the light collecting members shown in the above-mentioned embodiments 1 to 10. In addition, the light scanning mirror substrate 28 is installed on a pedestal 110 so that the light beam 101 and the mirror surface 29 are parallel to each other. As a result, it is possible to make the entire device thinner. Here, the pedestal 110 is shown to have a step 111, but the step 111 may not be present.

[0122] The fluorescence generated on the sample by the light irradiation travels in the opposite direction to the light beam 101, and travels in the opposite direction to the light output member group 100 by the half mirror 109, and enters the photodetector 105 on the right side as signal light. The half mirror 109 reflects half the amount of light at each wavelength and transmits half the amount of light. Therefore, the intensity of the light beam 101 is halved at the reflecting surface, but the device configuration has the advantage of being simpler than that of FIG. 20(a) of the twelfth embodiment. Here, the light output member group 100 is made up of light output member 20 1 ~20 3 The wavelength of each light emitting member is selected according to the fluorescence characteristics of the sample to be measured, and three or more types of light emitting members may be used. Representative wavelengths of the light emitting members are 0.405 μm (ultraviolet light), 0.488 μm (blue light), 0.561 μm (green light), 0.637 μm (red light), etc., but are not limited to these wavelengths. By using the light beam emitting device of FIG. 22(a), not only the entire device can be made compact, but also the difference in beam flatness and beam diameter due to wavelength can be kept constant, and as a result, the analysis of the fluorescence distribution can be performed with high accuracy, and a high-performance and small-sized scanning fluorescence measuring device can be provided.

[0123] Next, referring to Fig. 22(b), a scanning fluorescence measurement device in which the light beam from the light beam emitting device of the fourteenth embodiment of the present invention is condensed by an optical waveguide type multiplexer and then scanned by an optical scanning mirror will be described. Fig. 22(b) shows the basic configuration of a scanning fluorescence measurement device in which the light beam from the light beam emitting device of the fourteenth embodiment of the present invention is scanned by an optical scanning mirror, and is in particular a side view showing the conceptual configuration when the light beam is perpendicularly incident on the optical scanning mirror. Here again, the light emitting member group 100 includes the above-mentioned light emitting member 20. 1 ~20 3 In this case, three types of light output members 20 1 ~20 3 A semiconductor laser is used as the light source.

[0124] The light beams emitted from the light output member group 100 are multiplexed by the optical waveguide multiplexer 106, then collected by the light collecting member 102, reflected downward by the half mirror 109 inclined at 45° with respect to the multiplexed light beam 107, and enter the mirror surface 29 of the light scanning mirror substrate 28, reflected upward, and passes through the half mirror 109 toward the measurement sample 104, where the light is scanned and irradiated onto the sample. The light collecting member 102 here may be any of the light collecting members shown in the above-mentioned embodiments 1 to 10. The light scanning mirror substrate 28 is placed on a pedestal 110 so that the light beam 107 and the mirror surface 29 are parallel to each other. As a result, the entire device can be made thin. Here, the pedestal 110 is shown to have a step 111, but the step 111 may not be present.

[0125] The fluorescence generated on the sample by the irradiation of light travels in the opposite direction to the light beam 107, and travels in the opposite direction to the light output member group 100 by the half mirror 109, and enters the photodetector 105 on the right as signal light. The half mirror 109 reflects half the amount of light at each wavelength and transmits half the amount of light. Therefore, the intensity of the light beam is halved at the reflecting surface, but this has the advantage that the device configuration is simpler than that of FIG. 20(b) in the twelfth embodiment. Here too, the light output member group 100 includes the light output member 20 1 ~20 3The wavelength of each light emitting member is selected according to the fluorescence characteristics of the sample to be measured, and three or more types of light emitting members may be used. Representative wavelengths of the light emitting members are 0.405 μm (ultraviolet light), 0.488 μm (blue light), 0.561 μm (green light), 0.637 μm (red light), etc., but are not limited to these wavelengths. By using the light beam emitting device of FIG. 22(b), not only can the entire device be made compact, but the difference in beam flatness and beam diameter due to wavelength is kept constant, and as a result, the analysis of the fluorescence distribution can be performed with high accuracy, and a high-performance and compact scanning fluorescence measuring device can be provided. EXAMPLES

[0126] Next, with reference to Fig. 23, a scanning fluorescence measurement device in which a light beam from a light beam emitting device according to a fifteenth embodiment of the present invention is scanned by an optical scanning mirror will be described. Fig. 23(a) shows a case in which a light beam from a light emitting member is collected by a collecting member, and Fig. 23(b) shows a case in which a light beam from a light emitting member is collected by an optical waveguide type multiplexer. Fig. 23(a) shows a basic configuration of a scanning fluorescence measurement device in which a light beam from a light beam emitting device according to a fifteenth embodiment of the present invention is collected by a collecting member and then scanned by an optical scanning mirror, and in particular is a side view showing a conceptual configuration in which a light beam is vertically incident on the optical scanning mirror and the beam from the light emitting member is lifted upward. Here again, the light emitting member group 100 includes the above-mentioned light emitting member 20. 1 ~20 3 In this case, three types of light output members 20 1 ~20 3 A semiconductor laser is used as the light source.

[0127] Each light beam emitted from the light output member group 100 is collected by the light collecting member 102, and then the light beam 101 is raised upward by the reflection type light collecting system 108, and then reflected downward by the half mirror 109 inclined at 45° with respect to the light beam 101, and travels, enters the mirror surface 29 of the light scanning mirror substrate 28, is reflected upward, passes through the half mirror 109, and travels toward the measurement sample 104, and scans the sample to irradiate it with light. The light collecting member 102 here may be any of the light collecting members shown in the above-mentioned embodiments 1 to 10. The reflection type light collecting system 108 is for moving the central axis of the light beam 101, and although a reflection type light collecting system is used here, any other system may be used as long as it moves the central axis of the light beam 101. By moving the central axis of the light beam 101, the degree of freedom of the device configuration can be increased, and the design is facilitated. The optical scanning mirror substrate 28 is placed on a pedestal 110 so that the light beam 101 and the mirror surface 29 are parallel to each other. As a result, the entire device can be made thinner. Note that, although the pedestal 110 has a step 111 in this example, the step 111 may not be necessary.

[0128] The fluorescence generated on the sample by the light irradiation travels in the opposite direction to the light beam 101, and travels in the opposite direction to the light output member group 100 by the half mirror 109, and enters the photodetector 105 on the right side as signal light. The half mirror 109 reflects half the amount of light at each wavelength and transmits half the amount of light. Therefore, the intensity of the light beam 101 is halved at the reflecting surface, but the device configuration has the advantage of being simpler than that of FIG. 21(a) in the thirteenth embodiment. Here again, the light output member group 100 includes the light output member 20. 1 ~20 3The wavelength of each light emitting member is selected according to the fluorescence characteristics of the sample to be measured, and three or more types of light emitting members may be used. Representative wavelengths of the light emitting members are 0.405 μm (ultraviolet light), 0.488 μm (blue light), 0.561 μm (green light), 0.637 μm (red light), etc., but are not limited to these wavelengths. By using the light beam emitting device of FIG. 23(a), not only the entire device can be made compact, but also the difference in beam flatness and beam diameter due to wavelength can be kept constant, and as a result, the analysis of the fluorescence distribution can be performed with high accuracy, and a high-performance and small-sized scanning fluorescence measuring device can be provided.

[0129] Next, with reference to FIG. 23(b), a scanning fluorescence measuring device in which the light beam from the light beam emitting device of the fifteenth embodiment of the present invention is condensed by an optical waveguide type multiplexer and then scanned by an optical scanning mirror will be described. In this case, three types of light emitting members 20 1 ~20 3 FIG. 23(b) shows the basic configuration of a scanning fluorescence measuring device in which a light beam from a light beam emitting device according to a fifteenth embodiment of the present invention is collected by an optical waveguide type multiplexer and then scanned by an optical scanning mirror, and is a side view showing a conceptual configuration in which the light beam is perpendicularly incident on the optical scanning mirror. Here, too, the light emitting member group 100 includes the above-mentioned light emitting member 20. 1 ~20 3 In this case, three types of light output members 20 1 ~20 3 A semiconductor laser is used as the light source.

[0130] The light beams emitted from the light output member group 100 are combined by the optical waveguide multiplexer 106, and then simultaneously focused and moved in the reflection type focusing system 108, reflected downward by the half mirror 109 tilted at 45° with respect to the combined light beam 107, and travel downward. The light beams are incident on the mirror surface 29 of the optical scanning mirror substrate 28, reflected upward, and pass through the half mirror 109 toward the measurement sample 104, scanning the sample and irradiating it with light. The reflection type focusing system 108 is for moving the central axis of the light beam 107. Here, a reflection type focusing system is used, but any other system may be used as long as it moves the central axis of the light beam 107. By moving the central axis of the light beam 107, the degree of freedom of the device configuration can be increased, and the design is facilitated. The optical scanning mirror substrate 28 is placed on a pedestal 110 so that the light beam 107 and the mirror surface 29 are parallel to each other. As a result, it is possible to make the entire device thinner. Although the base 110 has the step 111 in this embodiment, the step 111 may not be necessary.

[0131] The fluorescence generated on the sample by the light irradiation travels in the opposite direction to the light beam 107, and travels in the opposite direction to the light output member group 100 by the half mirror 109, and enters the photodetector 105 on the right side as signal light. The half mirror 109 reflects half the amount of light at each wavelength and transmits half the amount of light. Therefore, the intensity of the light beam 107 is halved at the reflecting surface, but the device configuration has the advantage of being simpler than that of FIG. 21(b) in the thirteenth embodiment. Here again, the light output member group 100 includes the light output member 20. 1 ~20 3The wavelength of each light emitting member is selected according to the fluorescence characteristics of the sample to be measured, and three or more types of light emitting members may be used. Representative wavelengths of the light emitting members are 0.405 μm (ultraviolet light), 0.488 μm (blue light), 0.561 μm (green light), 0.637 μm (red light), etc., but are not limited to these wavelengths. By using the light beam emitting device of FIG. 23(b), not only can the entire device be made compact, but the difference in beam flatness and beam diameter due to wavelength is kept constant, and as a result, the analysis of the fluorescence distribution can be performed with high accuracy, and a high-performance and small-sized scanning fluorescence measuring device can be provided. EXAMPLES

[0132] Next, referring to Fig. 24, a scanning fluorescence measurement device in which a light beam from a light beam emitting device according to a sixteenth embodiment of the present invention is scanned by a light scanning mirror will be described. Fig. 24(a) shows a case in which a light beam from a light emitting member is condensed by a condensing member, and Fig. 24(b) shows a case in which a light beam from a light emitting member is condensed by a condensing member and then lifted upward. Fig. 24(a) shows a scanning fluorescence measurement device in which a light beam from a light beam emitting device according to a sixteenth embodiment of the present invention is condensed by a condensing member and then scanned by a light scanning mirror, and is particularly a side view showing a scanning fluorescence measurement device including a light detecting element in a configuration in which a light beam is perpendicularly incident on the light scanning mirror. Here again, the light emitting member group 100 includes the above-mentioned light emitting member 20. 1 ~20 3 In this case, three types of light output members 20 1 ~20 3 A semiconductor laser is used as the light source.

[0133] Each light beam 101 emitted from the light output member group 100 is collected by the light collecting system 112, reflected downward by a half mirror 109 inclined at 45° with respect to the light beam 101, enters the mirror surface 29 of the light scanning mirror substrate 28, is reflected upward, passes through the half mirror 109, passes through the beam shaping lens 113, and proceeds toward the measurement sample 104, where the light beam 101 scans a measurement scanning range 114 indicated by an arrow to perform light irradiation. In this case, the light collecting system 112 may be either the light collecting member 102 described above or a combination of the optical waveguide type multiplexer 106 and the light collecting member 102. The beam shaping lens 113 may be provided with a function of enlarging a microscopic area as an optical microscope.

[0134] In this case, the beam shaping lens 113 is not a single lens, but a combination lens such as an objective lens that constitutes a normal optical microscope. The beam shaping lens 113 may not be necessary, and in that case, the beam shaping lens 113 can be omitted. The optical scanning mirror substrate 28 is placed on a pedestal 116 so that the light beam 101 and the mirror surface 29 are parallel to each other. As a result, the entire device can be made thin. Here, the pedestal 116 is shown to have a recess 117, but the recess 117 may not be necessary. The device may be covered with a cover 118 to prevent the intrusion of external dirt, dust, etc.

[0135] The fluorescence generated on the sample by the light irradiation travels in the opposite direction to the light beam 101, travels in the opposite direction to the light output member group 100 by the half mirror 109, is collected by the fluorescence collecting lens 115, and then enters the right photodetector 105 as signal light. 1 ~20 3The wavelength of each light emitting member is selected according to the fluorescence characteristics of the sample to be measured, and three or more types of light emitting members may be used. Representative wavelengths of the light emitting members are 0.405 μm (ultraviolet light), 0.488 μm (blue light), 0.561 μm (green light), 0.637 μm (red light), etc., but are not limited to these wavelengths. The scanning fluorescence measuring device in which the light beam from the light beam emitting device in FIG. 24(a) is scanned by a light scanning mirror not only reduces the size of the entire device, but also keeps the difference in beam flatness and beam diameter due to wavelength constant, so that the analysis of the fluorescence distribution can be performed with high accuracy, and a high-performance, small-sized scanning fluorescence measuring device can be provided.

[0136] Next, with reference to Fig. 24(b), a scanning fluorescence measurement device in which the light beam from the light beam emitting device of the sixteenth embodiment of the present invention is collected by a collecting member, then lifted upward and scanned by a light scanning mirror will be described. Fig. 24(b) shows a scanning fluorescence measurement device in which the light beam from the light beam emitting device of the sixteenth embodiment of the present invention is collected by a collecting member, then lifted upward and scanned by a light scanning mirror, and is particularly a side view showing a scanning fluorescence measurement device including a light detection element in a configuration in which the light beam is perpendicularly incident on the light scanning mirror and the beam from the light emitting member is lifted upward. Here too, the light emitting member group 100 includes the above-mentioned light emitting member 20. 1 ~20 3 In this case, three types of light output members 20 1 ~20 3 A semiconductor laser is used as the light source.

[0137] Each light beam 101 emitted from the light output member group 100 is collected by the light collecting system 112, the central axis of the light beam 101 is moved by the reflection type light collecting system 108, the light beam 101 is reflected and travels downward by the half mirror 109 inclined at 45 degrees with respect to the light beam 101, the light beam 101 is incident on the mirror surface 29 of the optical scanning mirror substrate 28, is reflected upward, passes through the half mirror 109, passes through the beam shaping lens 113, and travels toward the measurement sample 104, and the measurement scanning range 114 indicated by the arrow is scanned with the light beam 101 to perform light irradiation. In this case, the light collecting system 112 may be either the light collecting member 102 described above or a combination of the optical waveguide type multiplexer 106 and the light collecting member 102. If the reflection type light collecting system 108 is provided with a light collecting function, the light collecting system 112 may be only the optical waveguide type multiplexer 106. The reflective focusing system 108 is for moving the central axis of the light beam 101, and although a reflective focusing system is used here, any other system may be used as long as it moves the central axis of the light beam 101. By moving the central axis of the light beam, the degree of freedom of the device configuration can be increased, which has the advantage of making the design easier.

[0138] In this case, the beam shaping lens 113 is not a single lens, but a combination lens such as an objective lens that constitutes a normal optical microscope is used. The beam shaping lens 113 may not be necessary, in which case the beam shaping lens 113 can be omitted. The optical scanning mirror substrate 28 is placed on a pedestal 116 so that the light beam 101 and the mirror surface 29 are parallel. As a result, the entire device can be made thin. Here, the pedestal 116 is shown to have a recess 117, but the recess 117 may not be required.

[0139] The fluorescence generated on the sample by the light irradiation travels in the opposite direction to the light beam 101, travels in the opposite direction to the light output member group 100 by the half mirror 109, is collected by the fluorescence reflection type light collecting system 119, and then enters the right photodetector 105 as signal light. Here, the fluorescence reflection type light collecting system 119 is for moving the central axis of the light beam 101, and although a reflection type light collecting system is used here, other types may be used as long as they move the central axis of the light beam 101. By moving the central axis of the light beam 101, the degree of freedom of the device configuration can be increased, and there is a feature that the design is made easier. In addition, the device may be covered with a cover 118 to prevent the intrusion of external dirt, dust, etc. The light output member group 100 of the embodiment 16 includes a light output member 20 1 ~20 3 The wavelength of each light emitting member is selected according to the fluorescence characteristics of the sample to be measured, and three or more types of light emitting members may be used. Representative wavelengths of the light emitting members are 0.405 μm (ultraviolet light), 0.488 μm (blue light), 0.561 μm (green light), 0.637 μm (red light), etc., but are not limited to these wavelengths. The scanning fluorescence measuring device in which the light beam from the light beam emitting device in FIG. 24(b) is scanned by a light scanning mirror not only reduces the size of the entire device, but also keeps the difference in beam flatness and beam diameter due to wavelength constant, so that the analysis of the fluorescence distribution can be performed with high accuracy, and a high-performance and small-sized scanning fluorescence measuring device can be provided. EXAMPLES

[0140] Next, an image projection device and a scanning fluorescence measurement device in which a light beam from a light beam emitting device of Example 17 of the present invention is scanned by an optical scanning mirror will be described with reference to Fig. 25. Fig. 25 is a conceptual plan view showing only the light emitting member portion of the light beam emitting device of Example 17 of the present invention, which is the light beam emitting device of Example 9 to which a fourth light emitting member combining an excitation light source and a nonlinear optical element has been added. In Fig. 25, the light emitting members are drawn to be arranged at equal intervals, but this is simply drawn to make it easier to see how the light emitting members are arranged, and the light emitting members do not need to be spaced at equal intervals.

[0141] As shown in the figure, a light emitting member 20 that emits blue light 1 a blue semiconductor laser as a light emitting member 20 emitting red light; 2 and a light emitting member 20 emitting green light. 3 A green semiconductor laser as a light condenser is arranged parallel to the optical axis of the light condenser. 5 are arranged parallel to the optical axis of the light collecting member.

[0142] In this case, the light output member 20 5 The light output from the light output member 20 is obtained by converting the excitation light from the excitation light source 41 into yellow light by the nonlinear optical element 42. 1 , light emitting member 20 2 , light emitting member 20 3 and the light emitting member 20 5 The light beam 21 is placed on a common base 30. 1 ~21 3 ,twenty one 5 A step 31 may be provided on the light output side of the base 30 so that the base 30 does not kick the light output side of the base 30 .

[0143] In the seventeenth embodiment, by adding light of a fourth wavelength, it is possible to obtain a display of any color tone. When used as a light source for a scanning fluorescence measuring device, the number of wavelengths used for measurement can be increased. It is also possible to install a plurality of light emitting members each combining an excitation light source and a nonlinear optical element, and further, the light beam 21 emitted from the nonlinear optical element 42 can be 5 The wavelength is not limited to yellow, but other colors of visible light, ultraviolet light, or infrared light may be used. EXAMPLES

[0144] Next, an image projection device and a scanning type fluorescence measurement device in which a light beam from a light beam emitting device of Example 18 of the present invention is scanned by a light scanning mirror will be described with reference to Fig. 26. Fig. 26 is a conceptual plan view showing only the light emitting member portion of the light beam emitting device of Example 18 of the present invention, in which an optical fiber is added instead of the fourth light emitting member combining an excitation light source and a nonlinear optical element of the light beam emitting device of Example 17. In Fig. 26, the light emitting members are drawn to be arranged at equal intervals, but this is simply drawn to make it easier to see how the light emitting members are arranged, and the light emitting members do not need to be spaced at equal intervals.

[0145] As shown in the figure, a light emitting member 20 that emits blue light 1 a blue semiconductor laser as a light emitting member 20 emitting red light; 2 and a light emitting member 20 emitting green light. 3 A green semiconductor laser as a fourth light output member is arranged parallel to the optical axis of the light collecting member. Further, an optical fiber 43 as a fourth light output member is arranged parallel to the optical axis of the light collecting member.

[0146] In this case, the light emitting member 20 1 , light emitting member 20 2 , light emitting member 20 3 The optical fiber 43 and the optical fiber 44 are mounted on a common base 30. A light source is connected to the input end of the optical fiber 43, so that light from a light source that cannot be mounted on the base 30 can be used. 1 ~21 3 ,twenty one 6 A step 31 may be provided on the light output side of the base 30 so that the base 30 does not kick the light output side of the base 30 .

[0147] In the eighteenth embodiment, by adding a fourth wavelength of light, it is possible to obtain a display of any color tone. When used as a light source for a scanning fluorescence measuring device, the number of wavelengths used for measurement can be increased. A plurality of optical fibers may be installed, and further, the light beam 21 emitted from the optical fiber may be 6 The wavelength may be any color tone of visible light, ultraviolet light, or infrared light. EXAMPLES

[0148] Next, an image projection device and a scanning type fluorescence measuring device in which a light beam from a light beam emitting device of Example 19 of the present invention is scanned by a light scanning mirror will be described with reference to Fig. 27. Fig. 27 is a conceptual plan view showing only the light emitting member portion of the light beam emitting device of Example 19 of the present invention, and instead of the fourth light emitting member combining an excitation light source and a nonlinear optical element of the light beam emitting device of Example 17, a combination of a semiconductor laser 44 and a planar lightwave circuit (PLC) 45 is added. In Fig. 27, the light emitting members are drawn to be arranged at equal intervals, but this is simply drawn to make it easier to see how the light emitting members are arranged, and the intervals between the light emitting members do not need to be equal.

[0149] As shown in the figure, a light emitting member 20 that emits blue light 1 a blue semiconductor laser as a light emitting member 20 emitting red light; 2 and a light emitting member 20 emitting green light. 3 A green semiconductor laser as a fourth light emitting member is arranged parallel to the optical axis of the light collecting member. Furthermore, a semiconductor laser 44 and a planar light circuit 45 as a fourth light emitting member are arranged so that an optical waveguide 46 on the output end side of the planar light circuit 45 is parallel to the optical axis of the light collecting member.

[0150] In this case, the light emitting member 20 1 , light emitting member 20 2 , light emitting member 20 3 The combination of the semiconductor laser 44 and the planar lightwave circuit (PLC) 45 is placed on a common base 30. 1 ~21 3 ,twenty one 7 A step 31 may be provided on the light output side of the base 30 so that the base 30 does not kick the light output side of the base 30 .

[0151] In the nineteenth embodiment, by adding light of a fourth wavelength, it is possible to obtain a display of any color tone. When used as a light source for a scanning fluorescence measuring device, the number of wavelengths used for measurement can be increased. It is also possible to provide a plurality of light emitting members each combining a semiconductor laser and a planar lightwave circuit (PLC), and further, the light beam 21 emitted from the optical waveguide 46 may be 7 The wavelength of the light may be any color tone of visible light, ultraviolet light, or infrared light. In addition, in the seventeenth to nineteenth embodiments, the light output member is arranged parallel to the optical axis of the light collecting member, but similarly to the eighth and tenth embodiments, the light output member may be tilted from the optical axis of the light collecting member, or the distance between the light output member and the light collecting member may be changed.

[0152] Here, the following supplementary notes are added to the embodiments of the present invention including Examples 1 to 19. (Appendix 1) A plurality of light output members; A light collecting member having A light beam emitting device in which a movement amount d of an emission spot of each light beam emitted from the plurality of light emitting members in an arrangement direction from the optical axis of the light collecting member falls within a range that satisfies the following condition: d=D 0 ×(Q / 2) D 0 ≦k×(nn 0 ) / NA where Q is the size of the light beam emitted from the emission spot of the light emitting member in the direction of movement from the optical axis of the light condensing member immediately after the light beam passes through the light condensing member, k is a proportionality constant that depends on the refractive index of the surroundings of the light condensing member, n is the refractive index of the light condensing member, and n 0 is the refractive index of the surroundings of the light collecting member, and NA is the numerical aperture of the light emitting member. (Appendix 2) 2. The light beam emitting device according to claim 1, wherein the plurality of light emitting members include at least one semiconductor light emitting element. (Appendix 3) 3. The light beam emitter according to claim 1, wherein the light collecting member is surrounded by air or a vacuum. (Appendix 4) A plurality of light output members; A light collecting member having A light beam emitting device in which a movement amount d of an emission spot of each light beam emitted from the plurality of light emitting members in an arrangement direction from the optical axis of the light collecting member falls within a range that satisfies the following condition: d≦1.7×(Q / 2) Here, Q is the beam size in the direction of movement from the optical axis of the light collecting member of the light beam immediately after the light beam emitted from the emission spot of the light emitting member passes through the light collecting member. (Appendix 5) 5. The light beam emitting device according to claim 4, wherein the plurality of light emitting members include at least one semiconductor light emitting element. (Appendix 6) A movement amount d of an emission spot of a light beam of a light emitting member that is disposed at a position farthest from the optical axis of the light collecting member among the plurality of light emitting members in an arrangement direction from the optical axis of the light collecting member is d>Q c / 2 6. The light beam emitter according to claim 1, wherein However, Q c is the beam size in a direction moved from the optical axis of the light collecting member of the light beam emitted from the light emitting member that is closest to the optical axis of the light collecting member among the plurality of light emitting members. (Appendix 7) 7. The light beam emitting device according to claim 1, wherein the light emitting member having the shortest wavelength among the plurality of light emitting members is disposed on the optical axis of the focusing member or at a position closest to the optical axis of the focusing member. (Appendix 8) 8. The light beam emitting device according to claim 1, wherein the plurality of light emitting members are arranged in ascending order of wavelength so that the light emitting member having the shortest wavelength is closest to the optical axis of the focusing member. (Appendix 9) 9. The light beam emitting device according to claim 1, wherein the plurality of light emitting members are selected from red, green, blue, ultraviolet, and infrared light emitting members. (Appendix 10) 10. The optical beam emitting device according to any one of Supplementary Note 1 to Supplementary Note 9, wherein the light emitting member is a semiconductor laser, a light emitting diode, a nonlinear optical element using a semiconductor laser as excitation light, an optical fiber output end, an output end of a planar light circuit, or a semiconductor laser, a light emitting diode, a nonlinear optical element using a semiconductor laser as excitation light, and an optical fiber output end or an output end of a planar light circuit. (Appendix 11) 11. The light beam emitting device according to any one of claims 1 to 10, wherein the light beam from each of the light emitting members is a single-mode, nearly single-mode, unimodal light beam, a multimodal light beam, or a combination of the above modes. (Appendix 12) The light beam emitting device according to any one of claims 1 to 11, wherein the focusing element is a single convex lens, a lens combining a convex lens and a concave lens, a combination lens combining two or more lenses, a toroidal lens, a free-form lens, a focusing element consisting of cylindrical lens surfaces whose focusing directions are perpendicular to each other, a focusing element combining the above lenses, or a focusing element combined with a reflecting mirror or a holographic lens. (Appendix 13) 13. The light beam emitting device according to claim 1, wherein the light beam is a collimated beam, a focused beam, or a diverging beam. (Appendix 14) 14. The light beam emitting device according to claim 1, wherein the light collecting member also has a function of modifying the cross-sectional shape of the light beam emitted from each of the light emitting members into an isotropic circle. (Appendix 15) 15. The light beam emitting device according to claim 1, wherein a central axis of the light beam emitted from each of the light emitting members is inclined with respect to an optical axis of the light collecting member. (Appendix 16) 16. The light beam emitting device according to claim 1, wherein a distance between an emission spot of the light beam of each of the light emitting members and the light collecting member varies depending on the light emitting member. (Appendix 17) 17. The light beam emitting device according to any one of appendix 1 to appendix 16, wherein a range in a direction perpendicular to an arrangement direction of emission spots of each of the light beams emitted from the plurality of light emitting members is used for generating an image obtained by raster scanning the light beams and is smaller than half the spacing between adjacent scanning lines of lateral scanning lines obtained by scanning the light beams in the arrangement direction of the plurality of light emitting members. (Appendix 18) 18. The light beam emitting device according to claim 1, wherein the plurality of light emitting members are arranged so that the positions of the emission spots of the light emitting members in a height direction are at two or more levels. (Appendix 19) 19. A light beam projection device comprising: a light beam emitting device according to any one of claims 1 to 18; and a reflecting mirror that scans the light beam from the light beam emitting device. (Appendix 20) 19. A scanning fluorescence measurement device comprising: a light beam emitting device according to any one of claims 1 to 18; and a reflecting mirror that scans the light beam from the light beam emitting device. [Explanation of symbols]

[0153] 1,1 d ,1 1 ~1 3 Light emitting member 2,2 d ,2 1 ~2 3 Light beam 3,3 d ,3 1 ~3 3 Emission spot 4,4 d , 4 1 ~4 3 Light trail (central axis of light beam) 5 Light collecting member 6. Convergence Point 20 1 ~20 5 Light emitting member twenty one 1 ~21 7 Light beam twenty three 1 ~23 7 Emission spot twenty four 1 ~24 5 Light trail (central axis of light beam) 25 Convergence Point 26 intersection 28 Optical scanning mirror substrate 29 Mirror Surface 30 Pedestal 31 Steps 41 Excitation Light Source 42 Nonlinear Optical Elements 43 Optical Fiber 44 Semiconductor Laser 45 Planar optical circuit 46 Optical waveguide 50, 51, 52, 53, 54, 55 Light collecting member 51 1 , 51 2 convex lens 100 Light emitting parts group 101,107 Light beam 102 Light collecting member 103 Wavelength Selective Mirror 104 Measurement Samples 105 Photodetector 106 Optical waveguide multiplexer 108 Reflective light collecting system 109 Half Mirror 110 Pedestal 111 Step 112 Light-Concentrating System 113 Beam Shaping Lens 114 Measurement Scanning Range 115 Fluorescence Condenser Lens 116 Pedestal 117 Recess 118 Cover 119 Reflective Fluorescence Condensing System

Claims

1. A plurality of light output members; A light collecting member having A light beam emitting device in which a movement amount d of an emission spot of each of the light beams emitted from the plurality of light emitting members in an arrangement direction from an optical axis of the light condensing member falls within a range that satisfies the following condition: d=D ０ ×(Q / 2) D ０ ≦k×(n-n) ０ ) / NA where Q is the size of the light beam emitted from the emission spot of the light emitting member and immediately after passing through the condensing member, in the direction of movement from the optical axis of the condensing member; k is a proportionality constant that depends on the refractive index of the surroundings of the condensing member; n is the refractive index of the condensing member; n ０ is the refractive index of the surroundings of the light collecting member, and NA is the numerical aperture of the light emitting member.

2. 2. The light beam emitting device according to claim 1, wherein the plurality of light emitting members include at least one semiconductor light emitting element.

3. 3. The light beam emitter according to claim 1, wherein the surroundings of said light collecting member are air or a vacuum.

4. A movement amount d of an emission spot of a light beam of a light emitting member that is disposed at a position farthest from the optical axis of the light collecting member among the plurality of light emitting members in an arrangement direction from the optical axis of the light collecting member is d>Q ｃ / 2 3. The light beam emitting device according to claim 1, wherein: However, Q ｃ is the size of the light beam emitted from the light emitting member that is closest to the optical axis of the light collecting member among the plurality of light emitting members, in a direction moved from the optical axis of the light collecting member.

5. 3. The light beam emitting device according to claim 1, wherein the light emitting member having the shortest wavelength among the plurality of light emitting members is disposed on the optical axis of the light collecting member or at a position closest to the optical axis of the light collecting member.

6. 3. The light beam emitting device according to claim 1, wherein the plurality of light emitting members are arranged in ascending order of wavelength so that the light emitting member having the shortest wavelength is closest to the optical axis of the focusing member.

7. A plurality of light output members; A light collecting member having A light beam emitting device in which a movement amount d of an emission spot of each of the light beams emitted from the plurality of light emitting members in an arrangement direction from an optical axis of the light condensing member falls within a range that satisfies the following condition: d≦1.7×(Q / 2) Here, Q is the size of the light beam in a direction moved from the optical axis of the condensing member immediately after the light beam emitted from the emission spot of the light emitting member passes through the condensing member.

8. 8. The light beam emitting device according to claim 7, wherein the plurality of light emitting members include at least one semiconductor light emitting element.

9. 9. The light beam emitter according to claim 7, wherein the surroundings of said light collecting member are air or a vacuum.

10. A movement amount d of an emission spot of a light beam of a light emitting member that is disposed at a position farthest from the optical axis of the light collecting member among the plurality of light emitting members in an arrangement direction from the optical axis of the light collecting member is d>Q ｃ / 2 9. The light beam emitting device according to claim 7 or 8, wherein However, Q ｃ is the size of the light beam emitted from the light emitting member that is closest to the optical axis of the light collecting member among the plurality of light emitting members, in a direction moved from the optical axis of the light collecting member.

11. The light emitting member having the shortest wavelength among the plurality of light emitting members is located on the optical axis of the light collecting member or 9. The light beam emitter according to claim 7, wherein the light collecting member is disposed at a position closest to the optical axis of the light collecting member.

12. 9. The light beam emitting device according to claim 7, wherein the plurality of light emitting members are arranged in ascending order of wavelength so that the light emitting member having the shortest wavelength is closest to the optical axis of the focusing member.

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