Sheet sticking device and sheet sticking method

Abstract

To provide a sheet sticking device and a sheet sticking method that can prevent wrinkles from forming on an adhesive sheet stuck to an adherend.SOLUTION: A device for sticking an adhesive sheet AS to an adherend surface RF1 of an adherend RF includes tension application means 10 for holding the adhesive sheet AS, which has an outer edge shape smaller than the outer edge shape of the adherend surface RF1 and applying tension in multiple directions to the adhesive sheet AS, and pressing means 20 for pressing and sticking the adhesive sheet AS to which tension is applied by the tension application means 10 to the adherend surface RF1.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a sheet sticking device and a sheet sticking method. [Background technology]

[0002] 2. Description of the Related Art A sheet application device that applies an adhesive sheet to a surface of an adherend is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2017-5033 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the mounting device 2 (sheet application device) described in Patent Document 1, when applying an application tape Tb (adhesive sheet) having an outer edge shape smaller than that of a dicing frame 4 (adherend), tension is applied to the adhesive sheet only in one direction, resulting in insufficient tension in the other direction different from the one direction, which causes wrinkles to form in the adhesive sheet applied to the adherend.

[0005] An object of the present invention is to provide a sheet application device and a sheet application method that can prevent wrinkles from forming in an adhesive sheet applied to an adherend. [Means for solving the problem]

[0006] The present invention employs the configurations set forth in the claims. Effect of the Invention

[0007] According to the present invention, an adhesive sheet to which tension is applied in multiple directions is pressed against an adherend surface and attached, thereby making it possible to prevent wrinkles from forming in the adhesive sheet attached to the adherend. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is an explanatory diagram of a sheet sticking device according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes within a specified plane, and the Z-axis is an axis orthogonal to the specified plane. Furthermore, in this embodiment, the view from the front direction of Fig. 1(A) parallel to the Y-axis is used as a reference, and when indicating directions, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the direction toward the front of Fig. 1(A) parallel to the Y-axis, and "rear" is the opposite direction.

[0010] The sheet application apparatus EA is an apparatus for applying an adhesive sheet AS to an application surface RF1 of an annular ring frame RF as an adherend, and is equipped with tensioning means 10 which holds an adhesive sheet AS having an outer edge shape smaller than that of the application surface RF1 and performs a tensioning step of applying tension to the adhesive sheet AS in multiple directions, pressing means 20 which performs a pressing step of pressing the adhesive sheet AS to which tension has been applied by the tensioning means 10 against the application surface RF1 to apply it, and second pressing means 30 which performs a second pressing step of pressing the adhesive sheet AS which has been released from its holding by the tensioning means 10 against the application surface RF1 to apply it, and is located in the vicinity of supporting means 40 which performs a supporting step of supporting the ring frame RF. The adhesive sheet AS of this embodiment has an outer edge shape that is smaller than the outer edge RF2 of the ring frame RF and larger than the inner edge RF3 of the ring frame RF.

[0011] The tension applying means 10 includes a plurality of linear motors 11 as driving devices, and a holding means 12 supported on the output shaft 11A of each of the linear motors 11. The holding means 12 comprises a lower support member 12A supported by the output shaft 11A of the linear motor 11, a rotary motor 12B as a driving device supported by the lower support member 12A, and an upper support member 12D supported by the output shaft 12C of the rotary motor 12B.

[0012] The pressing means 20 includes a rotary motor 21 as a driving device having an output shaft 21A rotating around a central axis CL, a linear motor 22 as a driving device supported by the output shaft 21A, a linear motor 23 as a driving device supported by the output shaft 22A of the linear motor 22, and a pressing roller 24 rotatably supported on the output shaft 23A of the linear motor 23.

[0013] The second pressing means 30 is also used as the pressing means 20, and includes a rotary motor 21, linear motors 22 and 23, and a pressing roller .

[0014] The support means 40 includes a support table 41 having a support surface 41A that can be sucked and held by a pressure reducing means (holding means) (not shown) such as a pressure reducing pump or a vacuum ejector.

[0015] The operation of the sheet sticking apparatus EA will now be described. First, a user of the sheet sticking device EA (hereinafter, simply referred to as "user") inputs a signal to start automatic operation via an operation means (not shown) such as an operation panel or a personal computer to the sheet sticking device EA, in which each member is arranged at the initial position shown by the solid line in Fig. 1(A). Next, when the user or a conveying means (not shown) such as an articulated robot or a belt conveyer places a ring frame RF on the support table 41, the support means 40 drives a pressure reducing means (not shown) and starts suction holding on the support surface 41A. After that, when the user or the conveying means (not shown) places an adhesive sheet AS on the lower support member 12A as shown in Fig. 1(A), the tension applying means 10 drives the rotating motor 12B, and as shown by the two-dot chain line in the figure, the lower support member 12A and the upper support member 12D hold a holding area AS1, which is the outer edge of the adhesive sheet AS. Next, the tension applying means 10 drives the linear motor 11, and as shown in Fig. 1(B), the holding means 12 pulls the adhesive sheet AS radially from the position shown by the two-dot chain line to the position shown by the solid line in the figure, thereby applying tension to the adhesive sheet AS in a plurality of directions, including the front, left front, right front, left, right, rear, left rear, and right rear. Then, the pressing means 20 drives the linear motor 22 to move the pressing roller 24 above the non-holding area AS2 of the adhesive sheet AS, which is inside the holding area AS1, and then drives the linear motor 23 to press the non-holding area AS2 against the adherend surface RF1 with the pressing roller 24, as shown in Fig. 1(C). Next, the pressing means 20 drives the rotary motor 21 to rotate the pressing roller 24 around the central axis CL, and the non-holding area AS2 is attached to the adherend surface RF1. As a result, the adhesive sheet AS to which tension has been applied by the tension applying means 10 is attached to the adherend surface RF1.

[0016] Thereafter, the pressing means 20 drives the linear motor 23 to raise the pressing roller 24, and then the tensioning means 10 drives the rotary motor 12B and the linear motor 11 to return the upper support member 12D to its initial position, and then moves the holding means 12 to its retreated position (see FIG. 1(D)). Next, the second pressing means 30 drives the linear motor 22 to move the pressing roller 24 above the holding area AS1, and then drives the linear motor 23 to press the holding area AS1 against the adherend surface RF1 with the pressing roller 24, as shown in FIG. 1(D). Then, the pressing means 20 drives the rotary motor 21 to rotate the pressing roller 24 once around the central axis CL, and the holding area AS1 is attached to the adherend surface RF1. As a result, the adhesive sheet AS, which has been released from the holding by the tensioning means 10, is attached to the adherend surface RF1.

[0017] Next, the second pressing means 30 drives the rotary motor 21 and the linear motors 22 and 23 to return the pressing roller 24 to its initial position, and the supporting means 40 stops driving the decompression means (not shown) to release the suction and holding on the supporting surface 41A. After that, when the user or the conveying means (not shown) conveys the ring frame RF with the adhesive sheet AS attached to it to the next process, the tensioning means 10 drives the linear motor 11 to return the holding means 12 to its initial position, and the same operations as above are repeated thereafter.

[0018] According to the embodiment described above, the adhesive sheet AS, to which tension is applied in multiple directions, is pressed against the adhesion surface RF1 of the ring frame RF and attached, thereby preventing wrinkles from forming in the adhesive sheet AS attached to the ring frame RF.

[0019] As described above, the best configuration, method, etc. for carrying out the present invention are disclosed in the above description, but the present invention is not limited thereto. That is, the present invention is mainly illustrated and described with respect to a specific embodiment, but a person skilled in the art can make various modifications to the above-described embodiment in terms of shape, material, quantity, and other detailed configurations without departing from the scope of the technical idea and purpose of the present invention. In addition, the description of the shape, material, etc. disclosed above, which is limited, is illustratively described to facilitate understanding of the present invention, and does not limit the present invention, so that the description of the names of the members from which some or all of the limitations of the shape, material, etc. are removed is included in the present invention. Furthermore, the means and steps of the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps, and are in no way limited to the components and steps of a single embodiment shown in the above embodiment. For example, the tension applying means may be anything that holds an adhesive sheet having an outer edge shape smaller than the outer edge shape of the adherend surface and applies tension to the adhesive sheet in multiple directions, and is not limited in any way as long as it is within the technical scope in light of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0020] The tension applying means 10 may be configured such that one or more of the holding means 12 only holds the adhesive sheet AS, and the other holding means 12 apply tension to the adhesive sheet AS as in the above embodiment, or the number of holding means 12 may be two and the multiple directions in which tension is applied to the adhesive sheet AS may be two directions, for example, left and right, or the number of holding means 12 may be three or more and the directions in which tension is applied to the adhesive sheet AS may be three directions, for example, left front, right front, and rear, or four directions, for example, left, right, front, and rear, or five or more directions including the aforementioned directions and other directions.

[0021] The pressing means 20 may rotate the pressing roller 24 one or more revolutions about the central axis CL to attach the non-holding area AS2 to the adhesion surface RF1, or may employ an articulated robot instead of the rotary motor 21 and the linear motors 22, 23, or may include, instead of the rotary motor 21, the linear motors 22, 23 and the pressing roller 24, a linear motor as a driving device and a pressing member supported by the output shaft of the linear motor and formed in the same shape as the non-holding area AS2 of the adhesive sheet AS, and the pressing means 20 may rotate the pressing roller 24 one or more revolutions about the central axis CL to attach the non-holding area AS2 to the adhesion surface RF1, or may employ an articulated robot instead of the rotary motor 21, the linear motors 22, 23 and the pressing roller 24, for example. The non-holding area AS2 may be affixed to the adherend surface RF1 using a pressure member, or the entire non-holding area AS2 may be affixed to the adherend surface RF1, or only the holding area AS1 may be affixed to the adherend surface RF1, or only the non-holding area AS2 may be affixed to the adherend surface RF1, or both the holding area AS1 and the non-holding area AS2 may be affixed to the adherend surface RF1. When affixing the holding area AS1 to the adherend surface RF1, for example, only the surface opposite the adhesive surface of the adhesive sheet AS may be held by the holding means 12.

[0022] The second pressing means 30 may rotate the pressing roller 24 around the central axis CL one or more times to attach the holding area AS1 to the adherend surface RF1, or may employ a multi-joint robot instead of the rotary motor 21 and the linear motors 22, 23, and may be configured to function as the pressing means 20 as well or may not be configured to function as the pressing means 20. Alternatively, instead of the rotary motor 21, the linear motors 22, 23 and the pressing roller 24, for example, a linear motor as a driving device and a bonding system supported by the output shaft of the linear motor may be used. It is also possible to use an annular pressing member formed in a shape similar to the holding area AS1 of the sheet AS, which does not also serve as the pressing means 20, or a part of the holding area AS1 may be attached to the surface RF1, or only the holding area AS1 may be attached to the surface RF1, or only the non-holding area AS2 may be attached to the surface RF1, or both the holding area AS1 and the non-holding area AS2 may be attached to the surface RF1, and this may or may not be provided in the sheet application apparatus EA of the present invention.

[0023] The support means 40 may be a support table 41 that cannot be adsorbed and held on the support surface 41A, and may or may not be provided in the sheet application apparatus EA of the present invention.If the support means 40 is not provided in the sheet application apparatus EA of the present invention, the ring frame RF can be supported by another device.

[0024] The material, type, shape, etc. of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS and the adherend may be circular, elliptical, polygonal such as a triangle or a rectangle, or other shapes, and the adhesive sheet AS may be pressure-sensitive, heat-sensitive, or other adhesive forms. When a heat-sensitive adhesive sheet AS is used, the adhesive sheet AS may be adhered by an appropriate method such as providing a heating means such as a suitable coil heater or the heating side of a heat pipe for heating the adhesive sheet AS. In addition, such an adhesive sheet AS may be, for example, a single layer of only an adhesive layer, a two-layered sheet in which a substrate and an adhesive layer are laminated, a three-layered sheet or three or more layers in which one or more intermediate layers are laminated between the substrate and the adhesive layer, a three-layered sheet or three or more layers in which one or more cover layers are laminated on the upper surface of the substrate, a sheet in which the substrate, intermediate layer, or cover layer are provided in a peelable manner, a double-sided adhesive sheet of a single layer consisting of only an adhesive layer, a double-sided adhesive sheet in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers, etc. Furthermore, the adherend may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic plate, a wooden board, or a resin, or may be a composite formed of two or more of these, and may be a member or article of any shape. The adhesive sheet AS may be, for example, any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer-forming resin sheet, etc.

[0025] The driving equipment in the above-described embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called multi-joint robots having joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, which may be used alone, or a direct or indirect combination of such electric equipment and actuators may be used, and electric equipment, actuators, etc. may or may not be capable of torque control or speed control for the output parts of such electric equipment, actuators, etc. may be used.

[0026] In the above embodiment, there is a certain object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A. In other words, object A and object B that move relatively may be object B moving relative to object A that does not move, object A may move relative to object B that does not move, or both objects A and B may move. As long as the result achieved by the movement is the same, either object A or object B may move. When a rotating member such as a roller is used, a driving device that rotates the rotating member may be provided. The surface of the rotating member or the rotating member itself may be made of a deformable material such as rubber or resin, or the surface of the rotating member or the rotating member itself may be made of a non-deformable material. Alternatively, instead of the roller, a rotating or non-rotating shaft, blade, or other device may be used. In the case where a pressing means or pressing member such as a pressing roller or a pressing head is used to press the object to be pressed, a roller, a round bar, a blade material, a brush-like member, or a member that sprays air or gas may be used instead of or in combination with the above examples. The pressing means may be made of a deformable material such as rubber, resin, sponge, or may be made of an indeformable material such as metal or glass. In the case where a supporting (holding) means or a supporting (holding) member that supports (holds) a supported member (held member), a gripping means such as a mechanical chuck or a chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, or the like may be used to support (hold) the supported member. [Explanation of symbols]

[0027] EA…Sheet attachment device 10...Tensioning means 20...Pressing means 30...Second pressing means AS…adhesive sheet RF…Ring frame (substrate) RF1...Adhesive surface

Claims

1. A sheet application device for applying an adhesive sheet to a surface of an adherend, comprising: a tension applying means for holding the adhesive sheet having an outer edge shape smaller than an outer edge shape of the adherend surface and applying tension to the adhesive sheet in a plurality of directions; a pressing means for pressing the adhesive sheet, to which tension has been applied by the tension applying means, against the adhesion surface to adhere thereto, thereby adhering the adhesive sheet to the adhesion surface.

2. 2. A sheet sticking device according to claim 1, further comprising a second pressing means for pressing the adhesive sheet released from the tension applying means against the adherend surface to stick the sheet to the adherend surface.

3. A sheet attachment method for attaching an adhesive sheet to a surface of an adherend, comprising the steps of: a tension applying step of holding the adhesive sheet having an outer edge shape smaller than an outer edge shape of the adherend surface and applying tension to the adhesive sheet in a plurality of directions; a pressing step of pressing the adhesive sheet to which tension has been applied in the tensioning step against the adherend surface to adhere the sheet to the adherend surface.

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