Optical scanner

Abstract

To suppress unnecessary vibrations of a frame body.SOLUTION: A first resin body (310) is provided in at least a part of a first frame body (210). The first resin body (310) covers: a part of a surface on a positive direction side of the first frame body (210) in a third direction (Z); a part of a surface on a negative direction side of the first frame body (210) in the third direction (Z); a part of an inner edge in a direction perpendicular to the third direction (Z) of the first frame body (210); and a part of an outer edge in a direction perpendicular to the third direction (Z) of the first frame body (210).SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to an optical scanning device and a sensor device. [Background technology]

[0002] In recent years, various optical scanning devices have been developed. The optical scanning device includes a movable reflector that reflects light emitted from a light emitting element such as a laser diode (LD). The movable reflector may be formed by processing a semiconductor substrate such as a silicon on insulator (SOI) substrate using semiconductor manufacturing technology. In contrast, as described in Patent Document 1, for example, the movable reflector may be formed by processing a metal. Also, as described in Patent Document 1, the frame and torsion bar may be formed by processing a metal. The frame is provided in at least a part of an area surrounding the movable reflector. The torsion bar is connected to the movable reflector and the frame. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2010-2777 A Summary of the Invention [Problem to be solved by the invention]

[0004] For example, as described in Patent Document 1, a movable reflector, a frame, and a torsion bar may be formed by processing metal. However, in this case, distortion such as plastic distortion or elastic distortion may occur in the frame due to various conditions such as the rotational motion of the movable reflector, the simple harmonic motion of the movable reflector, the load of the movable reflector, and thermal stress in at least a portion of the movable reflector, the frame, and the torsion bar. If distortion occurs in the frame, unnecessary vibrations may occur in the frame.

[0005] One example of a problem to be solved by the present invention is to suppress unnecessary vibration of a frame body. [Means for solving the problem]

[0006] The first invention is A movable reflector; a first frame body made of metal and positioned in at least a part of an area surrounding the movable reflector; a first torsion bar made of metal and connected to the movable reflector and the first frame; A first resin body provided on at least a portion of the first frame body; The optical scanning device includes the following.

[0007] The second invention is The optical scanning device; A light-emitting element; a light detection element that detects light emitted from the light emitting element, reflected by the movable reflector, and reflected or scattered by an object present outside the optical scanning device; A sensor device comprising: [Brief description of the drawings]

[0008] [Figure 1] 1 is a perspective view of an optical scanning device according to an embodiment, as viewed from a side where a movable reflector is located. [Diagram 2] 1 is a perspective view of an optical scanning device according to an embodiment, seen from the opposite side to the side where a movable reflector is located. [Diagram 3] 1 is a side view of an optical scanning device according to an embodiment, seen in a direction parallel to a rotation axis of a movable reflector. [Figure 4] 2 is a side view of the optical scanning device according to the embodiment, seen in a direction parallel to the rotation axis of the first frame. FIG. [Diagram 5] 4 is a cross-sectional view taken along line AA in FIG. [Figure 6] 5A to 5C are diagrams illustrating an example of a manufacturing method for the optical scanning device according to the embodiment. [Figure 7] 5A to 5C are diagrams illustrating an example of a manufacturing method for the optical scanning device according to the embodiment. [Figure 8] FIG. 13 is a perspective view of an optical scanning device according to a modified example. [Figure 9] FIG. 1 is a diagram showing a configuration of a sensor device according to an embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, embodiments, modifications, and examples of the present invention will be described with reference to the drawings. In all the drawings, similar components are given similar reference numerals, and the description will be omitted as appropriate.

[0010] Fig. 1 is a perspective view of the optical scanning device 10 according to the embodiment, seen from the side where the movable reflector 100 is located. Fig. 2 is a perspective view of the optical scanning device 10 according to the embodiment, seen from the side opposite to the side where the movable reflector 100 is located. Fig. 3 is a side view of the optical scanning device 10 according to the embodiment, seen from a direction parallel to the rotation axis of the movable reflector 100. Fig. 4 is a side view of the optical scanning device 10 according to the embodiment, seen from a direction parallel to the rotation axis of the first frame 210. Fig. 5 is a cross-sectional view taken along line AA in Fig. 3.

[0011] In Fig. 1 to Fig. 5, an arrow showing the first direction X, the second direction Y, or the third direction Z indicates that the direction from the base end of the arrow to the tip is the positive direction of the direction shown by the arrow, and the direction from the tip of the arrow to the base end is the negative direction of the direction shown by the arrow. In Fig. 3 and Fig. 4, a white circle with a black dot showing the first direction X or the second direction Y indicates that the direction from the back of the paper to the front is the positive direction of the direction shown by the white circle, and the direction from the front of the paper to the back is the negative direction of the direction shown by the white circle. In Fig. 5, a white circle with an X showing the third direction Z indicates that the direction from the front of the paper to the back is the positive direction of the direction shown by the white circle, and the direction from the back of the paper to the front is the negative direction of the direction shown by the white circle.

[0012] The first direction X indicates a direction parallel to the rotation axis of the movable reflector 100 when the movable reflector 100 rotates relative to the first frame 210 around the first torsion bar 220 as the rotation axis. The positive direction of the first direction X is parallel to the direction from the second bar 224 to the first bar 222, which will be described later. The negative direction of the first direction X is parallel to the direction from the first bar 222 to the second bar 224. The second direction Y is perpendicular to the first direction X. The second direction Y indicates a direction parallel to the rotation axis of the first frame 210 when the first frame 210 rotates relative to the second frame 230 around the second torsion bar 240 as the rotation axis. The positive direction of the second direction Y is parallel to the direction from the fourth bar 244 to the third bar 242, which will be described later. The negative direction of the second direction Y is parallel to the direction from the third bar 242 to the fourth bar 244, which will be described later. The third direction Z is perpendicular to both the first direction X and the second direction Y. The positive direction of the third direction Z is the direction from the side of the movable reflector 100 where the reflective surface 112 is located to the side opposite the side of the movable reflector 100 where the reflective surface 112 is located. The negative direction of the third direction Z is the direction from the side of the movable reflector 100 where the reflective surface 112 is located to the side of the movable reflector 100 where the reflective surface 112 is located.

[0013] The optical scanning device 10 includes a movable reflector 100, a first frame 210, a pair of first torsion bars 220, a second frame 230, a pair of second torsion bars 240, a first resin body 310, a second resin body 320, a first magnet 410, two second magnets 420, a first light emitting element 500, and a first light detecting element 600. The pair of first torsion bars 220 includes a first bar 222 and a second bar 224. The pair of second torsion bars 240 includes a third bar 242 and a fourth bar 244.

[0014] As shown in FIG. 5, the movable reflector 100 includes a reflector 110, a first support portion 252, a second support portion 254, and a resin stage 350. The first support portion 252 and the second support portion 254 are made of a resin.

[0015] In this embodiment, the reflector 110 has a disk shape having a thickness in the third direction Z. The reflector 110 has a reflecting surface 112. The reflecting surface 112 is a flat surface facing the positive direction of the third direction Z. The shape of the movable reflector 100 is not limited to the shape according to this embodiment.

[0016] The first support portion 252 is made of metal. The first support portion 252 is connected to an end portion of the first bar 222 in the negative direction in the first direction X. The first support portion 252 is located on the positive side of the first direction X with respect to the center of the movable reflector 100 in the first direction X.

[0017] The second support 254 is made of metal. The second support 254 is connected to an end of the second bar 224 in the positive direction in the first direction X. The second support 254 is located on the negative side of the first direction X with respect to the center of the movable reflector 100 in the first direction X. In this embodiment, the second support 254 is disposed symmetrically with the first support 252 with respect to the central axis passing through the center of the movable reflector 100 in the third direction Z.

[0018] The resin stage 350 is provided on at least a part of the first support portion 252 and at least a part of the second support portion 254. Specifically, a part of the resin stage 350 located on the negative side of the first support portion 252 and the second support portion 254 in the third direction Z covers at least a part of the surface of the first support portion 252 and the second support portion 254 on the negative side of the third direction Z. Also, a part of the resin stage 350 located on the positive side of the first support portion 252 and the second support portion 254 in the third direction Z covers at least a part of the surface of the first support portion 252 and the second support portion 254 on the positive side of the third direction Z. Also, a part of the resin stage 350 surrounding the first support portion 252 and the second support portion 254 in a direction perpendicular to the third direction Z covers at least a part of the outer edge of the first support portion 252 and the second support portion 254 that is oriented in a direction perpendicular to the third direction Z.

[0019] 7, which will be described later, three support protrusions 352 are provided on a surface of the resin stage 350 on the positive side in the third direction Z. The reflector 110 is placed on the three support protrusions 352.

[0020] According to this embodiment, the accuracy of mounting the reflector 110 can be improved compared to a case where the resin stage 350 is not provided on the first support portion 252 and the second support portion 254. Specifically, when the resin stage 350 is not provided, warping may occur in the first support portion 252 and the second support portion 254. In contrast, when the resin stage 350 is provided, warping of the first support portion 252 and the second support portion 254 can be suppressed. In addition, burrs may exist on the first support portion 252 and the second support portion 254. In contrast, when the resin stage 350 is provided, the burrs on the first support portion 252 and the second support portion 254 can be covered by the resin stage 350.

[0021] In the present embodiment, the resin stage 350 can function as a guide member for determining the attachment positions of the first magnet 410 and the first light detection element 600. Therefore, compared to a case where the resin stage 350 is not provided on the first support portion 252 and the second support portion 254, the first magnet 410 and the first light detection element 600 can be installed more easily and with higher accuracy.

[0022] Moreover, according to this embodiment, the first support 252 and the second support 254 can be physically coupled by the resin stage 350 while being electrically insulated from each other. If the first support 252 and the second support 254 are in communication with each other and are electrically connected to each other, as described below, even if the anode and cathode of the first light detection element 600 are electrically connected to the first support 252 and the second support 254, a current cannot be passed through the first light detection element 600. In contrast, in this embodiment, the anode and cathode of the first light detection element 600 are electrically connected to the first support 252 and the second support 254, and a current can be passed through the first light detection element 600.

[0023] The first frame 210 is made of metal. The first frame 210 is located in at least a part of a region that surrounds the movable reflector 100 in a direction perpendicular to the third direction Z.

[0024] The first bar 222 is made of metal. As shown in Fig. 5, the first bar 222 extends in the first direction X between the outer edge of the end of the first support 252 in the positive direction of the first direction X and the inner edge of the end of the first frame 210 in the positive direction of the first direction X. One end of the first bar 222 in the negative direction of the first direction X is connected to the outer edge of the end of the first support 252 in the positive direction of the first direction X. The other end of the first bar 222 in the positive direction of the first direction X is connected to the inner edge of the end of the first frame 210 in the positive direction of the first direction X.

[0025] The second bar 224 is made of metal. As shown in Fig. 5, the second bar 224 extends in the first direction X between the outer edge of the end of the second support portion 254 in the negative direction of the first direction X and the inner edge of the end of the first frame body 210 in the negative direction of the first direction X. One end of the second bar 224 in the positive direction of the first direction X is connected to the outer edge of the end of the second support portion 254 in the negative direction of the first direction X. The other end of the second bar 224 in the negative direction of the first direction X is connected to the inner edge of the end of the first frame body 210 in the negative direction of the first direction X.

[0026] 2, a first magnet 410 is attached to the negative side of the third direction Z of the movable reflector 100. The first magnet 410 is located on the negative side of the first direction X with respect to the center of the first direction X and the second direction Y of the movable reflector 100. When the first magnet 410 receives a magnetic flux generated from a magnetic circuit (not shown), the movable reflector 100 swings relative to the first frame 210 with the first torsion bar 220 as a rotation axis. In this embodiment, the first torsion bar 220 serves as a high-speed drive shaft.

[0027] The second frame 230 is made of metal. The second frame 230 is located in at least a part of a region that surrounds the first frame 210 in a direction perpendicular to the third direction Z.

[0028] In this embodiment, the shape of the second frame 230 is substantially rectangular having a pair of long sides extending in the first direction X and a pair of short sides extending in the second direction Y. The shape of the second frame 230 is not limited to the shape according to this embodiment.

[0029] The third bar 242 is made of metal. As shown in FIG. 5, the third bar 242 extends in the second direction Y between the outer edge of the center in the first direction X of the positive portion of the second direction Y of the first frame 210 and the inner edge of the center in the first direction X of the positive portion of the second direction Y of the second frame 230. One end of the third bar 242 in the negative direction of the second direction Y is connected to the outer edge of the center in the first direction X of the positive portion of the second direction Y of the first frame 210. The other end of the third bar 242 in the positive direction of the second direction Y is connected to the inner edge of the center in the first direction X of the positive portion of the second direction Y of the second frame 230.

[0030] The fourth bar 244 is made of metal. As shown in FIG. 5, the fourth bar 244 extends in the second direction Y between the outer edge of the center in the first direction X of the negative portion of the second direction Y of the first frame 210 and the inner edge of the center in the first direction X of the negative portion of the second direction Y of the second frame 230. One end of the third bar 242 in the positive direction in the second direction Y is connected to the outer edge of the center in the first direction X of the negative portion of the second direction Y of the first frame 210. The other end of the third bar 242 in the negative direction in the second direction Y is connected to the inner edge of the center in the first direction X of the negative portion of the second direction Y of the second frame 230.

[0031] Two second magnets 420 are attached to the negative side of the third direction Z of the first frame body 210. One of the two second magnets 420 is located at an end of the first frame body 210 in the positive direction of the first direction X. The other of the two second magnets 420 is located at an end of the first frame body 210 in the negative direction of the first direction X. When the two second magnets 420 receive magnetic flux generated from a magnetic circuit (not shown), the first frame body 210 swings relative to the second frame body 230 with the second torsion bar 240 as a rotation axis. In this embodiment, the second torsion bar 240 serves as a low-speed drive shaft.

[0032] In this embodiment, the width in the second direction Y of the second magnet 420 located at the end of the first frame body 210 in the positive direction in the first direction X is substantially equal to the width in the second direction Y of the end of the first frame body 210 in the positive direction in the first direction X. For example, the width in the second direction Y of the second magnet 420 located at the end of the first frame body 210 in the positive direction in the first direction X is 95% or more and 105% or less of the width in the second direction Y of the end of the first frame body 210 in the positive direction in the first direction X. A magnetic circuit (not shown), such as a drive coil, is disposed on both sides of the end of the first frame body 210 in the positive direction in the first direction X. Therefore, according to this embodiment, the magnetic circuit and the second magnet 420 can be brought closer to each other compared to the case where the width in the second direction Y of the second magnet 420 is shorter than the width in the second direction Y of the end of the first frame body 210 in the positive direction in the first direction X. Furthermore, according to the present embodiment, the weight of the second magnet 420 can be reduced compared to a case where the width in the second direction Y of the second magnet 420 is longer than the width in the second direction Y of the end of the first frame body 210 in the positive direction of the first direction X. The width in the second direction Y of the second magnet 420 is not limited to the above-mentioned example. For example, the width in the second direction Y of the second magnet 420 may be longer than the width of the end of the second direction Y in the positive direction of the first direction X of the first frame body 210. In this case, the magnetic circuit and the second magnet 420 can be brought closer to each other compared to a case where the width in the second direction Y of the second magnet 420 is equal to or smaller than the width in the second direction Y of the end of the first frame body 210 in the positive direction of the first direction X.

[0033] The width in the second direction Y of the second magnet 420 located at the end of the first frame body 210 in the negative direction of the first direction X is substantially equal to the width in the second direction Y of the end of the first frame body 210 in the negative direction of the first direction X, similar to the width in the second direction Y of the second magnet 420 located at the end of the first frame body 210 in the positive direction of the first direction X.

[0034] The positions at which the two second magnets 420 are provided are not limited to the positions according to this embodiment. For example, the second magnet 420 located on the positive side of the first direction X of the two second magnets 420 may be located on the negative side of the first direction X from the end of the first frame 210 on the positive side of the first direction X. In this case, the width in the second direction Y of the second magnet 420 may be substantially equal to the width in the second direction Y of the portion of the first frame 210 to which the second magnet 420 is attached.

[0035] The first resin body 310 is provided on at least a portion of the first frame body 210. The first resin body 310 covers at least a portion of the surface of the first frame body 210 on the positive side in the third direction Z, at least a portion of the surface of the first frame body 210 on the negative side in the third direction Z, at least a portion of the inner edge of the first frame body 210 on the direction side perpendicular to the third direction Z, and at least a portion of the outer edge of the first frame body 210 on the direction side perpendicular to the third direction Z. In this embodiment, distortion of the first frame body 210 can be suppressed compared to a case in which the first resin body 310 is not provided on the first frame body 210.

[0036] In this embodiment, compared to a case where the first resin body 310 is not provided on the first frame body 210, it is possible to suppress unnecessary vibrations of the first frame body 210. Specifically, the material of the first frame body 210 is different from the material of the first resin body 310. Therefore, the resonance frequency of the first frame body 210 is different from the resonance frequency of the first resin body 310. Therefore, compared to a case where the first resin body 310 is not provided, it is possible to damp the resonance mode of the first frame body 210, i.e., unnecessary vibrations.

[0037] In the present embodiment, the first resin body 310 can function as a guide member for determining the attachment positions of the two second magnets 420. Therefore, compared to a case where the first resin body 310 is not provided on the first frame body 210, the two second magnets 420 can be installed more easily and with higher accuracy.

[0038] The second resin body 320 is provided on at least a portion of the second frame body 230. The second resin body 320 covers at least a portion of the surface of the second frame body 230 on the positive side of the third direction Z, at least a portion of the surface of the second frame body 230 on the negative side of the third direction Z, at least a portion of the inner edge of the second frame body 230 on the direction side perpendicular to the third direction Z, and at least a portion of the outer edge of the second frame body 230 on the direction side perpendicular to the third direction Z. In this embodiment, distortion of the second frame body 230 can be suppressed compared to a case in which the second resin body 320 is not provided on the second frame body 230. Therefore, in this embodiment, unnecessary vibration of the second frame body 230 can be suppressed compared to a case in which the second resin body 320 is not provided on the second frame body 230.

[0039] Next, the shape of the first frame 210 will be described in detail with reference to FIG.

[0040] In this embodiment, the distance in the second direction Y between two portions of the first frame body 210 that face each other in a direction parallel to the rotation axis of the first frame body 210 decreases in at least a portion of the first frame body 210 as it moves away from the rotation axis in the positive direction of the first direction X and in the negative direction of the first direction X.

[0041] Specifically, the distance in the second direction Y between the portions of the first frame 210 located on both sides of the reflector 110 in the second direction Y decreases along the width of the movable reflector 100 in the second direction Y from the center of the first direction X of the reflector 110 toward the end of the movable reflector 100 in the positive direction in the first direction X and the end of the movable reflector 100 in the negative direction in the first direction X. The distance in the second direction Y between the portions of the first frame 210 located on both sides of the first bar 222 in the second direction Y is constant from one end of the first bar 222 in the negative direction in the first direction X to the other end of the first bar 222 in the positive direction in the first direction X. The distance in the second direction Y between the portions of the first frame 210 located on both sides of the second bar 224 in the second direction Y is constant from one end of the second bar 224 in the positive direction in the first direction X to the other end of the second bar 224 in the negative direction in the first direction X.

[0042] This embodiment is compared with a case where the distance in the second direction Y between both parts of the first frame 210 facing each other in a direction parallel to the rotation axis of the first frame 210 is constant from the rotation axis to the end of the first frame 210 in the positive or negative direction of the first direction X. In this embodiment, the length of the first torsion bar 220 in the first direction X is allowed to be longer than the above-mentioned case. Specifically, it is as follows. That is, it may be necessary to relatively increase the length of the first torsion bar 220 in the first direction X. On the other hand, the longer the length of the first torsion bar 220 in the first direction X, the longer the length of the first frame 210 in the first direction X. The longer the length of the first torsion bar 220 in the first direction X, the larger the moment of inertia of the first frame 210 rotating around the second torsion bar 240 as the rotation axis. Moreover, the moment of inertia increases as the mass of the end of the first frame body 210 in the positive direction in the first direction X and the mass of the end of the first frame body 210 in the negative direction in the first direction X increase. In this embodiment, the mass of the end of the first frame body 210 in the positive direction in the first direction X and the mass of the end of the first frame body 210 in the negative direction in the first direction X can be made smaller than in the above-mentioned case. Therefore, in this embodiment, the length of the first torsion bar 220 in the first direction X can be made longer in order to keep the above-mentioned moment of inertia below a certain value, compared to the above-mentioned case.

[0043] The shape of the first frame 210 is not limited to the shape according to this embodiment. For example, the distance in the second direction Y between both portions of the first frame 210 facing each other in a direction parallel to the rotation axis of the first frame 210 may be constant from the rotation axis of the first frame 210 to the end of the first frame 210 in the positive or negative direction of the first direction X.

[0044] Next, with reference to FIG. 5, the four sets of first protrusions 210a, the four sets of second protrusions 230a, the two third protrusions 210b, the two fourth protrusions 230b, the two fifth protrusions 250c, and the two sixth protrusions 210c will be described.

[0045] In this embodiment, each set of first protrusions 210a includes two protrusions. Two sets of first protrusions 210a are provided on the outer edge of a portion of the first frame 210 that surrounds the portion of the movable reflector 100 in the positive direction of the second direction Y in the direction perpendicular to the third direction Z. These two sets of first protrusions 210a are located on both sides of the first direction X with respect to the center of the first direction X of the portion of the first frame 210. The tip of each first protrusion 210a is exposed from the outer edge of a portion of the first resin body 310 that surrounds the portion of the movable reflector 100 in the positive direction of the second direction Y in the direction perpendicular to the third direction Z. Two other sets of first protrusions 210a are provided on the outer edge of a portion of the first frame 210 that surrounds the portion of the movable reflector 100 in the negative direction of the second direction Y in the direction perpendicular to the third direction Z. These two sets of first protrusions 210a are located on both sides of the first direction X with respect to the center of the first direction X of the portion of the first frame 210. The tip of each of the first protrusions 210a is exposed from the outer edge of a portion of the first resin body 310 that surrounds the portion of the movable reflector 100 in the negative direction in the second direction Y in the direction perpendicular to the third direction Z.

[0046] In this embodiment, each set of second protrusions 230a includes two protrusions. Two sets of second protrusions 230a are provided on the inner edge of a portion of the second frame 230 located on the positive side of the second direction Y with respect to the first frame 210. These two sets of second protrusions 230a are located on both sides of the center of the first direction X of the portion of the second frame 230 in the first direction X. The tip of each second protrusion 230a is exposed from the inner edge of a portion of the second resin body 320 located on the positive side of the second direction Y with respect to the first frame 210. Two sets of second protrusions 230a are provided on the inner edge of a portion of the second frame 230 located on the negative side of the second direction Y with respect to the first frame 210. These two sets of second protrusions 230a are located on both sides of the center of the first direction X of the portion of the second frame 230 in the first direction X. The tip of each of the second protrusions 230a is exposed from the inner edge of a portion of the second resin body 320 that is located on the negative side in the second direction Y with respect to the first frame body 210.

[0047] A third protrusion 210b is provided on the outer edge of the end of the first frame 210 in the positive direction in the first direction X. This third protrusion 210b is exposed from the outer edge of the end of the first resin body 310 in the positive direction in the first direction X. Another third protrusion 210b is provided on the outer edge of the end of the first frame 210 in the negative direction in the first direction X. This third protrusion 210b is exposed from the outer edge of the end of the first resin body 310 in the negative direction in the first direction X.

[0048] A fourth protrusion 230b is provided on the inner edge of the center in the second direction Y of a portion of the second frame 230 located on the positive side of the first direction X with respect to the first frame 210. This fourth protrusion 230b is exposed from the inner edge of the center in the second direction Y of a portion of the second resin body 320 located on the positive side of the first direction X with respect to the first frame 210. Another fourth protrusion 230b is provided on the inner edge of the center in the second direction Y of a portion of the second frame 230 located on the negative side of the first direction X with respect to the first frame 210. This fourth protrusion 230b is exposed from the inner edge of the center in the second direction Y of a portion of the second resin body 320 located on the negative side of the first direction X with respect to the first frame 210.

[0049] A fifth protrusion 250c is provided at an end portion of the first support portion 252 on the negative side in the first direction X. The tip of this fifth protrusion 250c is exposed from the outer edge of the resin stage 350 on the negative side in the second direction Y. Another fifth protrusion 250c is provided at the second support portion 254 on the positive side in the first direction X. The tip of this fifth protrusion 250c is exposed from the outer edge of the resin stage 350 on the positive side in the second direction Y.

[0050] A sixth protrusion 210c is provided on the inner edge of the center in the first direction X of a portion of the first frame 210 that surrounds the positive portion of the second direction Y of the movable reflector 100 in a direction perpendicular to the third direction Z. This sixth protrusion 210c is exposed from the inner edge of the center in the first direction X of a portion of the first resin body 310 that surrounds the positive portion of the second direction Y of the movable reflector 100 in a direction perpendicular to the third direction Z. Another sixth protrusion 210c is provided on the inner edge of the center in the first direction X of a portion of the first frame 210 that surrounds the negative portion of the second direction Y of the movable reflector 100 in a direction perpendicular to the third direction Z. This sixth protrusion 210c is exposed from the inner edge of the center in the first direction X of a portion of the first resin body 310 that surrounds the negative portion of the second direction Y of the movable reflector 100 in a direction perpendicular to the third direction Z.

[0051] Some of these protrusions may not be provided. For example, the two third protrusions 210b and the two fourth protrusions 230b may not be provided. In addition, the two fifth protrusions 250c and the two sixth protrusions 210c may not be provided.

[0052] Next, the first terminal 230d, the seventh projection 230e, the second terminal 230f, and the eighth projection 230g will be described with reference to FIG.

[0053] A first terminal 230d is provided on the outer edge of the center in the first direction X of a portion of the second frame 230 located on the positive side in the second direction Y with respect to the first frame 210. The tip of the first terminal 230d is exposed from the outer edge of the center in the first direction X of a portion of the second resin body 320 located on the positive side in the second direction Y with respect to the first frame 210.

[0054] A seventh protrusion 230e is provided on the outer edge of a portion of the second frame 230 that is located on the positive side in the second direction Y with respect to the first frame 210 and on the negative side in the first direction X from the center of the first direction X. The tip of the seventh protrusion 230e is exposed from the outer edge of a portion of the second resin body 320 that is located on the positive side in the second direction Y with respect to the first frame 210 and on the negative side in the first direction X from the center of the first direction X.

[0055] A second terminal 230f is provided on the outer edge of the center in the first direction X of a portion of the second frame 230 located on the negative side of the second direction Y with respect to the first frame 210. The tip of the second terminal 230f is exposed from the outer edge of the center in the first direction X of a portion of the second resin body 320 located on the negative side of the second direction Y with respect to the first frame 210.

[0056] An eighth protrusion 230g is provided on the outer edge of a portion of the second frame 230 that is located on the negative side in the second direction Y with respect to the first frame 210 and on the positive side in the first direction X from the center of the first direction X. The tip of the eighth protrusion 230g is exposed from the outer edge of a portion of the second resin body 320 that is located on the negative side in the second direction Y with respect to the first frame 210 and on the positive side in the first direction X from the center of the first direction X.

[0057] Next, the two first dividing portions 212 and the two second dividing portions 232 will be described.

[0058] A first dividing section 212 is provided on the first frame 210 on the positive side of the second direction Y of the rotation axis of the movable reflector 100. In this embodiment, this first dividing section 212 is provided in a portion of the first frame 210 that surrounds the portion of the movable reflector 100 in the negative direction of the first direction X and the positive direction of the second direction Y in a direction perpendicular to the third direction Z. Another first dividing section 212 is provided on the first frame 210 on the negative side of the rotation axis of the movable reflector 100 in the second direction Y. In this embodiment, this first dividing section 212 is provided in a portion of the first frame 210 that surrounds the portion of the movable reflector 100 in the positive direction of the first direction X and the negative direction of the second direction Y in a direction perpendicular to the third direction Z.

[0059] By providing these two first dividing portions 212, the first bar 222 and the second bar 224 are not electrically connected via the first frame 210.

[0060] A second dividing portion 232 is provided on the second frame body 230 on the positive side of the rotation axis of the first frame body 210 in the first direction X. In this embodiment, this second dividing portion 232 is provided between the second terminal 230f and the eighth protrusion 230g. Another second dividing portion 232 is provided on the second frame body 230 on the negative side of the rotation axis of the first frame body 210 in the first direction X. In this embodiment, this second dividing portion 232 is provided between the first terminal 230d and the seventh protrusion 230e.

[0061] By providing these two second dividing portions 232, the third bar 242 and the fourth bar 244 are not electrically connected via the second frame 230.

[0062] Next, the four first wide portions 310a, the two second wide portions 310b, and the two third wide portions 310c will be described with reference to FIG.

[0063] The first wide portion 310a is provided in the portion of the first resin body 310 where the curvature of the first frame body 210 changes. In this embodiment, the first wide portion 310a is provided outside the outer edge of the first frame body 210. As a result, the amount of resin in the portion of the first resin body 310 where the curvature of the first frame body 210 changes is greater than the amount of resin in the periphery of the portion of the first resin body 310 of the first frame body 210. A large stress is likely to be applied to the first resin body 310 in the portion of the first frame body 210 where the curvature changes, compared to the periphery of the portion of the first frame body 210. Therefore, according to this embodiment, the strength of the first resin body 310 can be improved compared to a case where the first wide portion 310a is not provided in the portion of the first resin body 310 where the curvature of the first frame body 210 changes.

[0064] In this embodiment, one of the four first wide portions 310a is located between a portion of the first frame 210 that is curved along the outer edges of the movable reflector 100 on the positive side in the first direction X and the positive side in the second direction Y, and a portion of the first bar 222 that extends linearly in parallel to the first direction X on the positive side in the second direction Y. The other of the four first wide portions 310a is located between a portion of the first frame 210 that is curved along the outer edges of the movable reflector 100 on the negative side in the first direction X and the positive side in the second direction Y, and a portion of the second bar 224 that extends linearly in parallel to the first direction X on the positive side in the second direction Y. Another of the four first wide portions 310a is located between a portion of the first frame 210 that is curved along the outer edges of the movable reflector 100 on the negative side in the first direction X and the negative side in the second direction Y, and a portion of the second bar 224 that extends linearly in parallel to the first direction X on the negative side in the second direction Y. Another of the four first wide portions 310a is located between a portion of the first frame 210 that is curved along the outer edges of the movable reflector 100 on the positive side in the first direction X and the negative side in the second direction Y, and a portion of the first bar 222 that extends linearly in parallel to the first direction X on the negative side in the second direction Y.

[0065] The structure for making the amount of resin in the portion of the first resin body 310 where the curvature of the first frame body 210 changes greater than the amount of resin in the periphery of that portion of the first resin body 310 of the first frame body 210 is not limited to this embodiment. For example, the thickness in the third direction Z in the portion of the first resin body 310 where the curvature of the first frame body 210 changes may be made thicker than the thickness in the third direction Z in the periphery of that portion of the first resin body 310 of the first frame body 210.

[0066] As shown in FIG. 1, a first hole 312a is provided on the upper surface in the third direction Z of the first wide portion 310a located on the positive side of the first direction X and the negative side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310. Another first hole 312a is provided on the upper surface in the third direction Z of the first wide portion 310a located on the negative side of the first direction X and the negative side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310. The two first wide portions 310a provided with the first hole 312a are provided as gates for injecting the resin forming the first resin body 310 into a mold for molding the first resin body 310. Each of the first holes 312a remains as an injection port for injecting the resin.

[0067] In this embodiment, each of the first holes 312a does not overlap with the first frame body 210 in the third direction Z. A gate into which the resin is injected is subjected to a relatively large pressure in the entire first resin body 310. Therefore, when the first holes 312a overlap with the first frame body 210 in the third direction Z, the first frame body 210 may be deformed by the pressure of the resin. In contrast, according to this embodiment, the deformation of the first frame body 210 due to the pressure of the resin can be suppressed compared to the case where the first holes 312a overlap with the first frame body 210 in the third direction Z. The position where the first holes 312a are provided is not limited to the position according to this embodiment. For example, the first holes 312a may overlap with the first frame body 210 in the third direction Z.

[0068] In this embodiment, the two first holes 312a are disposed symmetrically with respect to the center of the first resin body 310 in the first direction X and the second direction Y.

[0069] Hereinafter, as necessary, the first hole 312a located on the positive side of the second direction Y among the two first holes 312a will be referred to as one first hole 312a. As necessary, the first hole 312a located on the negative side of the second direction Y among the two first holes 312a will be referred to as the other first hole 312a. As necessary, a portion of the first frame body 210 located on the positive side of the second direction Y with respect to the center of the second direction Y of the first frame body 210 will be referred to as one side portion of the first frame body 210. As necessary, a portion of the first frame body 210 located on the negative side of the second direction Y with respect to the center of the second direction Y of the first frame body 210 will be referred to as the other side portion of the first frame body 210. As necessary, a portion of the first frame body 210 connected to the end of the first bar 222 in the positive direction of the first direction X will be referred to as a connection portion of the first frame body 210 and the first bar 222. As necessary, the portion of the first frame 210 connected to the end of the second bar 224 in the negative direction in the first direction X will be referred to as a connection portion of the first frame 210 and the second bar 224.

[0070] One of the first holes 312a is positioned offset from a portion of one side portion of the first frame body 210 that is equidistant in the circumferential direction of the first frame body 210 from the connection portion of the first frame body 210 and the first bar 222 and the connection portion of the first frame body 210 and the second bar 224. In this embodiment, the portion of one side portion of the first frame body 210 that is equidistant in the circumferential direction of the first frame body 210 from the connection portion of the first frame body 210 and the first bar 222 and the connection portion of the first frame body 210 and the second bar 224 is the center of the one side portion of the first frame body 210 in the first direction X.

[0071] The other first hole 312a is positioned offset from a portion of the other side portion of the first frame body 210 that is equidistant in the circumferential direction of the first frame body 210 from the connection portion of the first frame body 210 and the first bar 222 and the connection portion of the first frame body 210 and the second bar 224. In this embodiment, the portion of the other side portion of the first frame body 210 that is equidistant in the circumferential direction of the first frame body 210 from the connection portion of the first frame body 210 and the first bar 222 and the connection portion of the first frame body 210 and the second bar 224 is the center of the other side portion of the first frame body 210 in the first direction X.

[0072] In this embodiment, when the resin forming the first resin body 310 is injected from the two first holes 312a, it is possible to form welds of the resin in a portion different from the connection portion of the first frame body 210 and the first bar 222 and a portion different from the connection portion of the first frame body 210 and the second bar 224. Therefore, damage to the first resin body 310 can be suppressed compared to the case where the welds are formed in the connection portion of the first frame body 210 and the first bar 222 and the connection portion of the first frame body 210 and the second bar 224.

[0073] 1, the first hole 312a is not provided on the upper surface in the third direction Z of the first wide portion 310a located on the negative side of the first direction X and the positive side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310. The first hole 312a is not provided on the upper surface in the third direction Z of the first wide portion 310a located on the positive side of the first direction X and the negative side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310. The two first wide portions 310a without the first hole 312a are arranged symmetrically with respect to the center in the second direction Y of the first resin body 310 with respect to the two first wide portions 310a with the first hole 312a provided therein. Therefore, it is easier to achieve an even fit for the first resin body 310 compared to a case in which two first wide portions 310a each having a first hole 312a are provided, but two first wide portions 310a each having a first hole 312a are not provided.

[0074] A second wide portion 310b is provided at a connection portion of the first resin body 310 between an end portion of the first frame body 210 in the positive direction in the first direction X and an end portion of the first bar 222 in the positive direction in the first direction X. Another second wide portion 310b is provided at a connection portion of the first resin body 310 between an end portion of the first frame body 210 in the negative direction in the first direction X and an end portion of the second bar 224 in the negative direction in the first direction X. As a result, the amount of resin at the connection portion of the first resin body 310 between the first frame body 210 and the first torsion bar 220 is greater than the amount of resin around the connection portion of the first resin body 310. A large stress is easily applied to the first resin body 310 at the connection portion between the first frame body 210 and the first torsion bar 220 compared to the periphery of the connection portion of the first frame body 210. Therefore, according to this embodiment, the strength of the first resin body 310 can be improved compared to a case in which the second wide portion 310b is not provided at the connection portion between the first frame body 210 and the first torsion bar 220 of the first resin body 310.

[0075] The structure for making the amount of resin at the connection portion between the first frame body 210 and the first torsion bar 220 in the first resin body 310 greater than the amount of resin around the connection portion in the first resin body 310 is not limited to this embodiment. For example, the thickness in the third direction Z at the connection portion between the first frame body 210 and the first torsion bar 220 in the first resin body 310 may be made thicker than the thickness in the third direction Z around the connection portion in the first resin body 310.

[0076] A third wide portion 310c is provided at a connection portion of the first resin body 310 between an end portion of the first frame body 210 in the positive direction in the second direction Y and an end portion of the third bar 242 in the negative direction in the second direction Y. Another third wide portion 310c is provided at a connection portion of the first resin body 310 between an end portion of the first frame body 210 in the negative direction in the second direction Y and an end portion of the fourth bar 244 in the positive direction in the first direction X. As a result, the amount of resin at the connection portion of the first resin body 310 between the first frame body 210 and the second torsion bar 240 is greater than the amount of resin around the connection portion of the first resin body 310. A large stress is easily applied to the first resin body 310 at the connection portion between the first frame body 210 and the second torsion bar 240 compared to the periphery of the connection portion of the first frame body 210. Therefore, according to this embodiment, the strength of the first resin body 310 can be improved compared to a case in which the third wide portion 310c is not provided at the connection portion between the first frame body 210 and the second torsion bar 240 of the first resin body 310.

[0077] The structure for making the amount of resin at the connection portion between the first frame body 210 and the second torsion bar 240 in the first resin body 310 greater than the amount of resin around the connection portion in the first resin body 310 is not limited to this embodiment. For example, the thickness in the third direction Z at the connection portion between the first frame body 210 and the second torsion bar 240 in the first resin body 310 may be made thicker than the thickness in the third direction Z around the connection portion in the first resin body 310.

[0078] Next, the two fourth wide portions 320a will be described with reference to FIGS.

[0079] A fourth wide portion 320a is provided on the negative side of the first direction X and the positive side of the second direction Y with respect to the center of the first direction X and the second direction Y of the second resin body 320. Another fourth wide portion 320a is provided on the positive side of the first direction X and the negative side of the second direction Y of the second resin body 320. A second hole 322a is provided on the surface of each fourth wide portion 320a on the positive side of the third direction Z. In this embodiment, the fourth wide portion 320a is provided inside the inner edge of the first torsion bar 220. The fourth wide portion 320a is provided as a gate for injecting the resin forming the second resin body 320 into a mold for molding the second resin body 320. Each second hole 322a remains as an injection port for injecting the resin.

[0080] In this embodiment, each of the second holes 322a does not overlap with the second frame body 230 in the third direction Z. Therefore, for the same reason as described for the first hole 312a, it is possible to suppress deformation of the second frame body 230 due to the pressure of the resin, compared to the case where the second holes 322a overlap with the second frame body 230 in the third direction Z. The position where the second holes 322a are provided is not limited to the position according to this embodiment. For example, the second holes 322a may overlap with the second frame body 230 in the third direction Z.

[0081] In this embodiment, the two second holes 322a are disposed symmetrically with respect to the center of the second resin body 320 in the first direction X and the second direction Y.

[0082] Hereinafter, as necessary, the second hole 322a located on the positive side of the first direction X among the two second holes 322a is referred to as one second hole 322a. As necessary, the second hole 322a located on the negative side of the first direction X among the two second holes 322a is referred to as the other second hole 322a. As necessary, a portion of the second frame body 230 located on the positive side of the first direction X with respect to the center of the first direction X of the second frame body 230 is referred to as one side portion of the second frame body 230. As necessary, a portion of the second frame body 230 located on the negative side of the first direction X with respect to the center of the first direction X of the second frame body 230 is referred to as the other side portion of the second frame body 230. As necessary, a portion of the second frame body 230 connected to the end of the third bar 242 in the positive direction of the second direction Y is referred to as a connection portion of the second frame body 230 and the third bar 242. If necessary, the portion of the second frame 230 connected to the end of the fourth bar 244 in the negative direction in the second direction Y will be referred to as a connection portion between the second frame 230 and the fourth bar 244.

[0083] One of the second holes 322a is positioned offset from a portion of one side portion of the second frame body 230 that is equidistant in the circumferential direction of the second frame body 230 from the connection portion of the second frame body 230 and the third bar 242 and the connection portion of the second frame body 230 and the fourth bar 244. In this embodiment, the portion of one side portion of the second frame body 230 that is equidistant in the circumferential direction of the second frame body 230 from the connection portion of the second frame body 230 and the third bar 242 and the connection portion of the second frame body 230 and the fourth bar 244 is the center of the one side portion of the second frame body 230 in the second direction Y.

[0084] The other second hole 322a is positioned offset from a portion of the other side portion of the second frame body 230 that is equidistant in the circumferential direction of the second frame body 230 from the connection portion of the second frame body 230 and the third bar 242 and the connection portion of the second frame body 230 and the fourth bar 244. In this embodiment, the portion of the other side portion of the second frame body 230 that is equidistant in the circumferential direction of the second frame body 230 from the connection portion of the second frame body 230 and the third bar 242 and the connection portion of the second frame body 230 and the fourth bar 244 is the center of the other side portion of the second frame body 230 in the second direction Y.

[0085] In this embodiment, when the resin forming the second resin body 320 is injected from the two second holes 322a, it is possible to form welds of the resin in a portion different from the connection portion of the second frame body 230 and the third bar 242 and a portion different from the connection portion of the second frame body 230 and the fourth bar 244. Therefore, damage to the second resin body 320 can be suppressed compared to the case where the welds are formed in the connection portion of the second frame body 230 and the third bar 242 and the connection portion of the second frame body 230 and the fourth bar 244.

[0086] Next, the first light emitting element 500 will be described.

[0087] The first light-emitting element 500 is attached to the movable reflector 100 on the side opposite to the side where the reflective surface 112 is located. If the first light-emitting element 500 is attached to the reflective surface 112, the portion of the reflective surface 112 where the first light-emitting element 500 is attached cannot reflect light. In contrast, according to this embodiment, the reflective surface 112 can be prevented from being covered by the first light-emitting element 500.

[0088] One of the anode and the cathode of the first light emitting element 500 is electrically connected to at least a portion of the first bar 222 via the first support 252. The other of the anode and the cathode of the first light emitting element 500 is electrically connected to at least a portion of the second bar 224 via the second support 254. Consider the case where the anode of the first light emitting element 500 is electrically connected to at least a portion of the first bar 222 via the first support 252, and the cathode of the first light emitting element 500 is electrically connected to at least a portion of the second bar 224 via the second support 254. In this case, a current can flow from the first terminal 230d to the second terminal 230f via the third bar 242, a portion of the first frame body 210 located on the positive side of the first direction X and the positive side of the second direction Y with respect to the center of the first frame body 210 in the first direction X and the second direction Y, the first bar 222, the first support portion 252, the first light-emitting element 500, the second support portion 254, the second bar 224, a portion of the first frame body 210 located on the negative side of the first direction X and the negative side of the second direction Y with respect to the center of the first frame body 210 in the first direction X and the second direction Y, and the fourth bar 244.

[0089] Next, the first photodetector element 600 will be described.

[0090] The first light detection element 600 is located on the negative side of the third direction Z with respect to the first light emitting element 500. The first light detection element 600 has a first light detection section 612, a second light detection section 614, a third light detection section 616, and a fourth light detection section 618.

[0091] 3, the first optical detection unit 612 and the second optical detection unit 614 are located on the positive side of the second direction Y with respect to a first imaginary plane IP1. The third optical detection unit 616 and the fourth optical detection unit 618 are located on the negative side of the second direction Y with respect to the first imaginary plane IP1. The first imaginary plane IP1 passes through the rotation axis of the movable reflector 100 and is perpendicular to the reflecting surface 112.

[0092] 4, the second optical detection unit 614 and the third optical detection unit 616 are located on the negative side of the first direction X with respect to a second imaginary plane IP2. The first optical detection unit 612 and the fourth optical detection unit 618 are located on the positive side of the first direction X with respect to the second imaginary plane IP2. The second imaginary plane IP2 passes through the rotation axis of the first frame 210 and is perpendicular to the reflecting surface 112.

[0093] When the normal of the reflecting surface 112 is parallel to the positive direction of the third direction Z, the center of the spot generated in the first light detection element 600 by the light emitted from the first light emitting element 500 coincides with the intersection of the first imaginary plane IP1 and the second imaginary plane IP2 of the first light detection element 600. When the normal of the reflecting surface 112 is parallel to the positive direction of the third direction Z, the irradiation area of ​​the first light detection unit 612 of the spot, the irradiation area of ​​the second light detection unit 614 of the spot, the irradiation area of ​​the third light detection unit 616 of the spot, and the irradiation area of ​​the fourth light detection unit 618 of the spot are equal to each other. The intensity of the signal generated by each light detection unit by the spot increases as the irradiation area of ​​each light detection unit of the spot increases.

[0094] In this embodiment, the oscillation of the movable reflector 100 can be detected according to the ratio of the intensity of the signals generated in the first optical detection unit 612, the second optical detection unit 614, the third optical detection unit 616, and the fourth optical detection unit 618 by the light emitted from the first light emitting element 500. Specifically, the oscillation angle of the movable reflector 100 around the second torsion bar 240 when the first frame 210 oscillates relative to the second frame 230 with the second torsion bar 240 as the rotation axis is estimated by X_TiltError shown by the following formula (1). Also, the oscillation angle of the movable reflector 100 around the first frame 210 when the movable reflector 100 oscillates relative to the first frame 210 with the first torsion bar 220 as the rotation axis is estimated by Y_TiltError shown by the following formula (2). X_TiltError=(A+DBC) / (A+B+C+D) (1) Y_TiltError=(A+BCD) / (A+B+C+D) (2) Here, A, B, C, and D are the intensities of signals generated in the first optical detection section 612, the second optical detection section 614, the third optical detection section 616, and the fourth optical detection section 618, respectively, by the light emitted from the first light-emitting element 500.

[0095] In the above formula (1), the sum of the intensity of the signal generated in the first optical detection section 612 and the intensity of the signal generated in the fourth optical detection section 618 is compared with the sum of the intensity of the signal generated in the second optical detection section 614 and the intensity of the signal generated in the third optical detection section 616. From this comparison, it is possible to estimate the swing angle of the movable reflector 100 around the second torsion bar 240 when the first frame 210 swings relative to the second frame 230 with the second torsion bar 240 as the rotation axis.

[0096] In the above formula (2), the sum of the intensity of the signal generated in the first optical detection unit 612 and the intensity of the signal generated in the second optical detection unit 614 is compared with the sum of the intensity of the signal generated in the third optical detection unit 616 and the intensity of the signal generated in the fourth optical detection unit 618. From this comparison, it is possible to estimate the swing angle of the movable reflector 100 around the first torsion bar 220 when the movable reflector 100 swings relative to the first frame 210 with the first torsion bar 220 as the rotation axis.

[0097] The method of detecting the oscillation of the movable reflector 100 is not limited to the method according to this embodiment.

[0098] For example, the first light detection element 600 may have a single light detection unit. In this example, the single light detection unit is provided, for example, on the positive side of the first direction X with respect to the first virtual plane IP1. In this case, when the single light detection unit detects the light emitted from the first light emitting element 500, it can be said that the normal to the reflection surface 112 is inclined toward the negative direction of the second direction Y with respect to the positive direction of the third direction Z. On the other hand, when the single light detection unit does not detect the light emitted from the first light emitting element 500, it can be said that the normal to the reflection surface 112 is inclined toward the positive direction of the second direction Y with respect to the positive direction of the third direction Z.

[0099] Moreover, the first light emitting element 500 may be attached to the reflecting surface 112. In this case, the first light detecting element 600 is provided on the positive side of the reflecting surface 112 in the third direction Z. In this example, too, the first light emitting element 500 and the first light detecting element 600 can be used to detect the oscillation of the movable reflector 100.

[0100] 6 and 7 are diagrams for explaining an example of a method for manufacturing the optical scanning device 10 according to the embodiment. In this example, the optical scanning device 10 according to the embodiment is manufactured as follows.

[0101] First, the metal body 200 shown in Fig. 6 is prepared. The metal body 200 has four first connecting portions 260a, two second connecting portions 260b, two third connecting portions 260c, a first folded portion 260d, and a second folded portion 260f.

[0102] The four first connecting parts 260a are connected to the outer edge of the first frame body 210 on the side perpendicular to the third direction Z and the inner edge of the second frame body 230 on the side perpendicular to the third direction Z. As a result, the first frame body 210 is supported by the second frame body 230 not only by the second torsion bar 240 but also by the four first connecting parts 260a. Specifically, one end of each of the first connecting parts 260a that is connected to the outer edge of the first frame body 210 is connected to the tip of the first protrusion 210a. The other end of each of the first connecting parts 260a that is connected to the inner edge of the second frame body 230 is connected to the tip of the second protrusion 230a. Each of the first connecting parts 260a has two first narrow parts 262a. One of the two first narrow portions 262a is provided at one end of the first connecting portion 260a that is connected to the tip of the first protrusion 210a, and the other of the two first narrow portions 262a is provided at the other end of the first connecting portion 260a that is connected to the tip of the second protrusion 230a.

[0103] The two second connecting portions 260b are connected to the outer edge of the first frame body 210 on the side perpendicular to the third direction Z and the inner edge of the second frame body 230 on the side perpendicular to the third direction Z. As a result, the first frame body 210 is supported by the second frame body 230 not only by the second torsion bar 240 but also by the two second connecting portions 260b. Specifically, one end of each second connecting portion 260b connected to the outer edge of the first frame body 210 is connected to the tip of the third protrusion 210b. The other end of each second connecting portion 260b connected to the inner edge of the second frame body 230 is connected to the tip of the fourth protrusion 230b. Each second connecting portion 260b has two second narrow portions 262b. One of the two second narrow portions 262b is provided at one end of the second connecting portion 260b that is connected to the tip of the third protrusion 210b, and the other of the two second narrow portions 262b is provided at the other end of the second connecting portion 260b that is connected to the tip of the fourth protrusion 230b.

[0104] One of the two third connecting parts 260c is connected to the outer edge of the end of the first support part 252 on the negative side in the first direction X and the inner edge of the part of the first frame body 210 on the negative side in the second direction Y. The other of the two third connecting parts 260c is connected to the outer edge of the end of the second support part 254 on the positive side in the first direction X and the inner edge of the part of the first frame body 210 on the positive side in the second direction Y. As a result, the first support part 252 and the second support part 254 are supported by the first frame body 210 not only by the first torsion bar 220 but also by the two third connecting parts 260c. Specifically, one end of each third connecting part 260c that is connected to the first support part 252 or the second support part 254 is connected to the tip of the fifth protrusion 250c. The other end of each of the third connecting portions 260c that is connected to the inner edge of the first frame body 210 is connected to the tip of the sixth protrusion 210c. Each of the third connecting portions 260c has two third narrow portions 262c. One of the two third narrow portions 262c is provided at one end of the third connecting portion 260c that is connected to the tip of the fifth protrusion 250c. The other of the two third narrow portions 262c is provided at the other end of the third connecting portion 260c that is connected to the tip of the sixth protrusion 210c.

[0105] The first folded portion 260d is folded back between the first terminal 230d and the seventh protrusion 230e on the outside of the outer edge of the second frame 230 in the positive direction of the second direction Y. The first folded portion 260d has two fourth narrow portions 262d. One of the two fourth narrow portions 262d is provided at one end of the first folded portion 260d that is connected to the tip of the first terminal 230d. The other of the two fourth narrow portions 262d is provided at the other end of the first folded portion 260d that is connected to the tip of the seventh protrusion 230e.

[0106] The second folded portion 260f is folded back between the second terminal 230f and the eighth protrusion 230g on the outside of the outer edge of the second frame 230 in the negative direction of the second direction Y. The second folded portion 260f has two fifth narrow portions 262f. One of the two fifth narrow portions 262f is provided at one end of the second folded portion 260f that is connected to the tip of the second terminal 230f. The other of the two fifth narrow portions 262f is provided at the other end of the second folded portion 260f that is connected to the tip of the eighth protrusion 230g.

[0107] Next, as shown in FIG. 7, the first resin body 310 is formed in the first frame body 210. Specifically, the first frame body 210 is placed in a mold for molding the first resin body 310, and the resin for forming the first resin body 310 is injected into the mold from the positive side of the third direction Z of the first frame body 210. The resin is injected from two places where the first wide portion 310a is formed, the first wide portion 310a being located on the positive side of the first direction X and the positive side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310, and the first wide portion 310a being located on the negative side of the first direction X and the negative side of the second direction Y with respect to the center of the first direction X and the second direction Y of the first resin body 310. By injecting the resin from the two places, a first hole 312a is formed in the surface of each first wide portion 310a on the positive side of the third direction Z.

[0108] Further, the second resin body 320 is formed in the second frame body 230. Specifically, the second frame body 230 is placed in a metal mold for molding the second resin body 320, and the resin for forming the second resin body 320 is injected into the metal mold from the positive side of the second frame body 230 in the third direction Z. The resin is injected from two locations where the two fourth wide portions 320a are formed. By injecting the resin from the two locations, a second hole 322a is formed in the surface of each fourth wide portion 320a on the positive side in the third direction Z.

[0109] Further, a resin stage 350 is formed in the first support portion 252 and the second support portion 254. Specifically, the first support portion 252 and the second support portion 254 are placed in a metal mold for molding the resin stage 350, and the resin for forming the resin stage 350 is injected into the metal mold. The resin is injected from a portion overlapping with the first support portion 252 in the third direction Z. By injecting the resin from this portion, a third hole 352a is formed in the surface of the resin stage 350 on the positive side in the third direction Z.

[0110] Next, the first connecting portion 260a is removed by a method such as laser cutting. Specifically, the two first narrow portions 262a are cut by a method such as laser cutting. As a result, the tip of the first protrusion 210a remains outside the outer edge of the first resin body 310 in the direction perpendicular to the third direction Z, and the tip of the second protrusion 230a remains outside the inner edge of the second resin body 320 in the direction perpendicular to the third direction Z. According to this method, damage to the outer edge of the first resin body 310 in the direction perpendicular to the third direction Z due to heat generated by the method such as laser cutting can be suppressed compared to the case where the first connecting portion 260a is removed by a method such as laser cutting so that the tip of the first protrusion 210a does not remain outside the outer edge of the first resin body 310 in the direction perpendicular to the third direction Z. Similarly, damage to the inner edge of the second resin body 320 in the direction perpendicular to the third direction Z due to heat generated by methods such as laser cutting can be suppressed, compared to the case where the first connecting portion 260a is removed by a method such as laser cutting so that the tip of the third protrusion 210b does not remain outside the outer edge of the second resin body 320 in the direction perpendicular to the third direction Z.

[0111] Similarly to the first connecting portion 260a, the two second narrow portions 262b of each second connecting portion 260b are cut by a method such as laser cutting, thereby removing each second connecting portion 260b. The two third narrow portions 262c of each third connecting portion 260c are cut by a method such as laser cutting, thereby removing each third connecting portion 260c. The two fourth narrow portions 262d are cut by a method such as laser cutting, thereby removing the first folded portion 260d. The two fifth narrow portions 262f are cut by a method such as laser cutting, thereby removing the second folded portion 260f.

[0112] Next, the reflector 110 is placed on the positive side of the third direction Z of the three support protrusions 352 of the resin stage 350. A first magnet 410 and a first light emitting element 500 are provided on the negative side of the resin stage 350 in the third direction Z. Two second magnets 420 are provided on the negative side of the first resin body 310 in the third direction Z. A first light detecting element 600 is provided on the negative side of the first light emitting element 500 in the third direction Z.

[0113] In this manner, the optical scanning device 10 is manufactured.

[0114] 8 is a perspective view of an optical scanning device 10A according to a modified example. The optical scanning device 10A according to this modified example does not include the first light emitting element 500 and the first light detecting element 600 shown in FIGS. EXAMPLES

[0115] FIG. 9 is a diagram showing a configuration of a sensor device 20 according to an embodiment.

[0116] The sensor device 20 includes the optical scanning device 10 according to the embodiment. The sensor device 20 further includes a second light emitting element 12, a second light detecting element 14, and a beam splitter 16. In this embodiment, the sensor device 20 is a LiDAR (Light Detection And Ranging).

[0117] The second light-emitting element 12 is, for example, a laser diode (LD). As indicated by a solid arrow extending from the second light-emitting element 12 via the beam splitter 16 and the movable reflector 100, the light emitted from the second light-emitting element 12 passes through the beam splitter 16 and is reflected by the movable reflector 100. The light reflected by the movable reflector 100 is reflected or scattered by an object (not shown) existing outside the optical scanning device 10.

[0118] The second light detection element 14 is, for example, an avalanche photodiode (APD). As indicated by the solid arrow extending to the second light detection element 14 via the optical scanning device 10 and the beam splitter 16, the second light detection element 14 detects light emitted from the second light emitting element 12, reflected by the movable reflector 100, and reflected or scattered by an object (not shown) present outside the optical scanning device 10. In this embodiment, the light detected by the second light detection element 14 is reflected or scattered by the object, reflected by the movable reflector 100 and the beam splitter 16, and reaches the second light detection element 14.

[0119] The structure of the sensor device 20 is not limited to the structure according to this embodiment. For example, in this embodiment, the optical axis of the light reflected by the movable reflector 100 and irradiated to an object present outside the optical scanning device 10 coincides with the optical axis of the light reflected or scattered by the object. However, the optical axis of the light reflected by the movable reflector 100 and irradiated to an object present outside the optical scanning device 10 and the optical axis of the light reflected or scattered by the object may be shifted from each other. In this case, the light reflected or scattered by the object reaches the second light detection element 14 without being reflected by the movable reflector 100.

[0120] Although the embodiment, modifications and examples of the present invention have been described above with reference to the drawings, these are merely examples of the present invention, and various configurations other than those described above can also be adopted. Below, examples of reference forms are given. 1. A movable reflector; a first frame body made of metal and positioned in at least a part of an area surrounding the movable reflector; a first torsion bar made of metal and connected to the movable reflector and the first frame; A first resin body provided on at least a portion of the first frame body; An optical scanning device comprising: 2. In the optical scanning device according to claim 1, a second frame body made of metal and located in at least a portion of an area surrounding the first frame body; a second torsion bar made of metal and connected to the first frame and the second frame; A second resin body provided on at least a portion of the second frame body; The optical scanning device further comprises: 3. In the optical scanning device according to 1. or 2., An optical scanning device, wherein the distance between two portions of the first frame that face each other in a direction parallel to the rotation axis of the first frame decreases in at least a portion of the first frame as it moves away from the rotation axis. 4. In the optical scanning device according to any one of 1. to 3., The optical scanning device further comprises a protrusion provided on at least one of an outer edge and an inner edge of the first frame body, the protrusion having a tip exposed from the first resin body. 5. In the optical scanning device according to any one of 1. to 4., an optical scanning device, wherein a weld of the resin that forms the first resin body is formed in a portion of the first frame body different from a portion connected to the first torsion bar; 6. In the optical scanning device according to any one of 1. to 5., An optical scanning device, wherein the amount of resin in the first resin body at a portion where the curvature of the first frame body changes is greater than the amount of resin in the first resin body around the portion of the first frame body. 7. In the optical scanning device according to any one of 1. to 6., An optical scanning device, wherein the amount of resin in the first resin body at a connection portion between the first frame body and the first torsion bar is greater than the amount of resin in the first resin body around the connection portion. 8. In the optical scanning device according to any one of 1. to 7., the first resin body has at least one hole formed in a surface of the portion not overlapping with the first frame body; 9. In the optical scanning device according to any one of 1. to 8., Further comprising a permanent magnet attached to the first frame, An optical scanning device, wherein the width of the permanent magnet in a direction parallel to the rotation axis of the first frame is greater than or equal to 95% and less than or equal to 105% of the width of the portion of the first frame to which the permanent magnet is attached in a direction parallel to the rotation axis of the first frame. 10. An optical scanning device according to any one of 1. to 9., A light-emitting element; a light detection element that detects light emitted from the light emitting element, reflected by the movable reflector, and reflected or scattered by an object present outside the optical scanning device; A sensor device comprising: [Explanation of symbols]

[0121] 10 Optical scanning device 10A Optical Scanner 12 Second light-emitting element 14 Second photodetector element 16 Beam splitter 20 Sensor device 100 Movable reflector 110 Reflector 112 Reflective surface 200 Metal objects 210 First Frame 210a 1st protrusion 210b 3rd protrusion 210c 6th protrusion 212 First Divide 220 First Torsion Bar 222 1st Bar 224 2nd Bar 230 Second Frame 230a 2nd protrusion 230b 4th protrusion 230d 1st terminal 230e 7th protrusion 230f 2nd terminal 232 Second Division 240 Second Torsion Bar 242 3rd Bar 244 4th Bar 250c 5th protrusion 252 1st support part 254 Second support part 260a First connection part 260b 2nd connection part 260c 3rd connection part 260d First turn-up part 260f Second turn-up part 262a 1st narrow part 262b 2nd narrow part 262c 3rd narrow part 262d 4th narrow part 262f 5th narrow section 310 First resin body 310a First wide section 310b Second wide section 310c 3rd wide section 312a 1st hole 320 Second Resin Body 320a 4th wide section 322a 2nd hole 350 Resin Stage 352 Support protrusion 352a 3rd hole 410 First Magnet 420 Second Magnet 500 First light emitting element 600 First light detection element 612 First light detection unit 614 Second optical detector 616 Third optical detector 618 Fourth Optical Detector IP1 First virtual plane IP2 Second virtual plane X 1st direction Y Second direction Z 3rd direction

Claims

[Claim 1] A movable reflector; a first frame body made of metal and positioned in at least a part of an area surrounding the movable reflector; a first torsion bar made of metal and connected to the movable reflector and the first frame; A first resin body provided on at least a portion of the first frame body; An optical scanning device comprising:

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