Sensor, sensor system, and electronic apparatus

Abstract

To provide a sensor, a sensor system, and an electronic apparatus that can improve characteristics.SOLUTION: According to an embodiment, a sensor includes a base body, a fixation part, and a movable part. The movable part includes a plurality of annular parts, a plurality of connection parts, and a first radial structure. The plurality of annular parts includes a first annular part and a second annular part. The second annular part is adjacent to the first annular part in the plurality of annular parts. The first radial structure is connected to the first annular part. The first radial structure extends toward the second annular part along a first radial direction. A first radial gap is provided between the first radial structure and the second annular part.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE FIELD OF THE DISCLOSURE Embodiments of the invention relate to sensors, sensor systems and electronic devices. [Background technology]

[0002] For example, there is a sensor having a MEMS (Micro Electro Mechanical Systems) structure. In some cases, electronic devices are controlled by the force obtained by the sensor. It is desirable to improve the characteristics of the sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Patent No. 7,040,163 Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE DISCLOSURE Embodiments of the present invention provide sensors, sensor systems and electronic devices that allow for improved performance. [Means for solving the problem]

[0005] According to an embodiment, the sensor includes a base body including a first surface, a fixed portion fixed to the first surface, and a movable portion supported by the fixed portion. A first gap is provided between the first surface and the movable portion. The movable portion includes a plurality of annular portions, a plurality of connecting portions, and a first radiating structure. Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface. The plurality of connecting portions extend along a radial direction. The radial direction passes through a first center of the fixed portion in the first plane and is along the first plane. One of the plurality of connecting portions connects two of the plurality of annular portions to each other. The plurality of annular portions includes a first annular portion and a second annular portion. The second annular portion is adjacent to the first annular portion among the plurality of annular portions. The first radiating structure is connected to the first annular portion. The first radiating structure extends toward the second annular portion along a first radial direction. The first radial direction passes through the first center and lies along the first plane. A first radial gap is provided between the first radiating structure and the second annular portion. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 2] FIG. 2 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Diagram 3] FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Diagram 5] FIG. 5 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 8] FIG. 8 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 9] FIG. 9 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 10] FIG. 10 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 11] FIG. 11 is a schematic view illustrating an electronic device according to the second embodiment. [Figure 12] 12(a) to 12(h) are schematic views illustrating applications of the electronic device according to the embodiment. [Figure 13] 13(a) and 13(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] (First embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. 2 to 6 are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 2 is a cross-sectional view taken along line A1-A2 in Fig. 1. Fig. 3 is a cross-sectional view taken along line A3-A4 in Fig. 1. Fig. 4 is a cross-sectional view taken along line A5-A6 in Fig. 1. Fig. 5 is a cross-sectional view taken along line A7-A8 in Fig. 1. Fig. 6 is a cross-sectional view taken along line A9-A10 in Fig. 1.

[0008] As shown in FIGS. 1 to 6, a sensor 110 according to the embodiment includes a base body 50s, a fixed part 10F, and a movable part 10M.

[0009] The base body 50s includes a first surface 50a. The fixed portion 10F is fixed to the first surface 50a. The movable portion 10M is supported by the fixed portion 10F.

[0010] 2 to 6, a first gap G1 is provided between the first surface 50a and the movable part 10M. For example, an insulating member 55 is provided on the first surface 50a. The fixed part 10F is provided on the insulating member 55. No insulating member 55 is provided between the first surface 50a and the movable part 10M.

[0011] The movable part 10M is conductive. The movable part 10M may include, for example, conductive silicon. The fixed part 10F is conductive. The fixed part 10F may include, for example, conductive silicon. The fixed part 10F is electrically connected to the movable part 10M. The insulating member 55 may include, for example, silicon oxide.

[0012] The movable portion 10M includes a plurality of annular portions 10, a plurality of connection portions 20, and a first radiation structure 28a. Each of the plurality of annular portions 10 is provided around the fixed portion 10F with the fixed portion 10F as the center on a first plane PL1 along the first surface 50a.

[0013] The direction perpendicular to the first plane PL1 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction. The first plane PL1 is parallel to the XY plane.

[0014] For example, each of the multiple annular portions 10 is concentric about the fixing portion 10F. Each of the multiple annular portions 10 extends along a circular circumferential direction Dc.

[0015] 1, the multiple connection portions 20 extend along a radial direction Dr. The radial direction Dr passes through a first center 10C in the first plane PL1 of the fixing portion 10F and is along the first plane PL1. One of the multiple connection portions 20 connects two of the multiple annular portions 10 to each other.

[0016] In this example, the multiple annular portions 10 include a first annular portion 11, a second annular portion 12, a third annular portion 13, and a fourth annular portion 14. In this example, the first annular portion 11 is the outermost. The second annular portion 12 is provided between the fixed portion 10F and the first annular portion 11. The third annular portion 13 is provided between the fixed portion 10F and the second annular portion 12. The fourth annular portion 14 is provided between the fixed portion 10F and the third annular portion 13. In an embodiment, as described below, the first annular portion 11 does not have to be the outermost. In an embodiment, the number of the multiple annular portions 10 is arbitrary.

[0017] In this example, the multiple connection portions 20 include a first connection portion 21, a second connection portion 22, a third connection portion 23, and a fourth connection portion 24. The first connection portion 21 is provided between the second annular portion 12 and the first annular portion 11. The first connection portion 21 connects the second annular portion 12 to the first annular portion 11. The second connection portion 22 is provided between the third annular portion 13 and the second annular portion 12. The second connection portion 22 connects the third annular portion 13 to the second annular portion 12. The third connection portion 23 is provided between the fourth annular portion 14 and the third annular portion 13. The third connection portion 23 connects the fourth annular portion 14 to the third annular portion 13. The fourth connection portion 24 is provided between the fixing portion 10F and the fourth annular portion 14. The fourth connection portion 24 connects the fourth annular portion 14 to the fixing portion 10F.

[0018] The second annular portion 12 is adjacent to the first annular portion 11 among the plurality of annular portions 10. The second annular portion 12 is closest to the first annular portion 11 among the plurality of annular portions 10. The second annular portion 12 may be inside the first annular portion 11. Alternatively, the first annular portion 11 may be inside the second annular portion 12.

[0019] The first radiating structure 28a is connected to the first annular portion 11. The first radiating structure 28a extends toward the second annular portion 12 along a first radial direction Dr1. The first radial direction passes through the first center 10C and is along a first plane PL1. A first radial gap g1 is provided between the first radiating structure 28a and the second annular portion 12. The first radiating structure 28a is spaced apart from the second annular portion 12.

[0020] As shown in FIG. 1, a plurality of fixed electrodes 30 are provided in the sensor 110. The plurality of fixed electrodes 30 are fixed to, for example, the first surface 50a. For example, a signal including an AC component is applied between a part of the plurality of fixed electrodes 30 and the movable part 10M. This causes the movable part 10M to vibrate. The signal may include a component in the X-axis direction and a component in the Y-axis direction. When an external force is applied to the vibrating movable part 10M, the vibration state changes. By detecting the change in the vibration state, the applied external force can be detected. The change in the vibration state is detected, for example, as a change in electrostatic capacitance. The change in the vibration state due to the external force is caused by, for example, Coriolis force. The change in the vibration state can be detected, for example, by another part of the plurality of fixed electrodes 30. The signal may be supplied, for example, by the control unit 70. The change in the vibration state may be detected, for example, by the control unit 70.

[0021] In the embodiment, for example, the multiple fixed electrodes 30 include a first fixed electrode 31. The first fixed electrode 31 is provided between the second annular portion 12 and the first annular portion 11 in the radial direction Dr. The first fixed electrode 31 is provided between the first connection portion 21 and the first radiation structure 28a in the circumferential direction Dc. In the circumferential direction Dc, one end of the first fixed electrode 31 faces the first radiation gap g1. In the circumferential direction Dc, one end of the first fixed electrode 31 is released. With this configuration, the movable portion 10M has appropriate flexibility. The movable portion 10M can vibrate with an appropriate degree of freedom. The movable portion 10M can vibrate in a stable state around the first fixed electrode 31.

[0022] For example, in the first reference example, the first connection portion 21 is also provided at the location where the first radiation structure 28a is provided. In the first reference example, the first fixed electrode 31 is surrounded by the second annular portion 12, the first annular portion 11, and the two first connection portions 21 in the radial direction Dr and the circumferential direction Dc. In the first reference example, the first radiation gap g1 is not provided. In such a first reference example, the movable portion 10M is mechanically strong, and it is difficult to obtain the desired vibration.

[0023] In contrast, in the embodiment, one end of the first fixed electrode 31 faces the first radial gap g1 in the circumferential direction Dc. The movable part 10M can vibrate with an appropriate degree of freedom. It can vibrate in a stable state. The signal strength based on the vibration is high. High sensitivity detection is possible. According to the embodiment, a sensor capable of improving characteristics can be provided.

[0024] 1, a plurality of first fixed electrodes 31 are provided along the circumferential direction Dc. The number of the plurality of first fixed electrodes 31 may be 16 or more. This makes it possible to detect, for example, a vibration state in any direction while compensating for anisotropy of the resonance frequency.

[0025] In such a configuration, a second reference example is considered in which the first connection portion 21 is not provided between the two first fixed electrodes 31. In the second reference example, the first radiation structure 28a is not provided. In the second reference example, a large gap exists between the two first fixed electrodes 31. The movable portion 10M is formed by removing a part of the movable member that becomes the movable portion 10M. In this processing, the etching rate increases locally around the large gap. Therefore, the parts of the first annular portion 11 and the second annular portion 12 that correspond to the gap are excessively etched. As a result, in the second reference example, it is difficult to obtain an annular portion 10 with a uniform width. In the second reference example, it is difficult to perform high-precision detection.

[0026] In contrast, in the embodiment, the first radiation structure 28a is provided between the two first fixed electrodes 31. This allows the area of ​​the gap between the two first fixed electrodes 31 to be smaller than that in the second reference example. Excessive etching is suppressed in the region corresponding to the space between the two first fixed electrodes 31. An annular portion 10 with a uniform width can be obtained. According to the embodiment, a plurality of annular portions 10 having a desired shape can be obtained with high accuracy. The plurality of highly accurate annular portions 10 enables highly accurate detection. According to the embodiment, a sensor capable of improving characteristics can be provided.

[0027] For example, by providing the first radiating structure 28a, the first annular portion 11 is prevented from being locally etched.

[0028] 1, in the sensor 110, the movable part 10M may further include a first opposing radiating structure 28A. The first opposing radiating structure 28A is connected to the second annular part 12. The first opposing radiating structure 28A extends toward the first radiating structure 28a along a first radial direction Dr1. A first radial gap g1 is provided between the first radiating structure 28a and the first opposing radiating structure 28A.

[0029] By providing the first opposing radiating structure 28A, the second annular portion 12 is prevented from being locally etched.

[0030] As shown in FIG. 1, the sensor 110 may include a first fixed electrode 31 and a first other fixed electrode 31A. The first fixed electrode 31 and the first other fixed electrode 31A are fixed to the first surface 50a (see FIGS. 4 to 6). As shown in FIG. 1, the first fixed electrode 31 and the first other fixed electrode 31A are provided between the second annular portion 12 and the first annular portion 11. In a circumferential direction Dc centered on the fixed portion 10F along the first plane PL1, at least a part of the first radiating structure 28a is provided between the first fixed electrode 31 and the first other fixed electrode 31A. For example, in the circumferential direction Dc, at least a part of the first opposing radiating structure 28A is provided between the first fixed electrode 31 and the first other fixed electrode 31A.

[0031] 1, in the circumferential direction Dc, the first fixed electrode 31 is provided between the first radiating structure 28a and the first connecting portion 21. In the circumferential direction Dc, the first fixed electrode 31 is provided between the first opposing radiating structure 28A and the first connecting portion 21.

[0032] As shown in FIG. 1, the movable part 10M may further include a second radiating structure 28b. In this example, the second annular part 12 is provided between the fixed part 10F and the first annular part 11. The third annular part 13 is provided between the fixed part 10F and the second annular part 12. The third annular part 13 is adjacent to the second annular part 12 among the multiple annular parts 10. The second radiating structure 28b is connected to the second annular part 12. The second radiating structure 28b extends toward the third annular part 13 along a second radial direction Dr2. The second radial direction Dr2 passes through the first center 10C and is along the first plane PL1. A second radial gap g2 is provided between the second radiating structure 28b and the third annular part 13.

[0033] By providing such a second radiating structure 28b, it is easy to obtain the desired vibration in the movable portion 10M. High-precision detection is possible. For example, it is possible to prevent the second annular portion 12 from being locally and excessively etched.

[0034] In this example, the second radial direction Dr2 intersects with the first radial direction Dr1 In an embodiment, the second radial direction Dr2 may be aligned with the first radial direction Dr1.

[0035] 1, the movable part 10M may further include a second opposing radiating structure 28B. The second opposing radiating structure 28B is connected to the third annular part 13. The second opposing radiating structure 28B extends toward the second opposing radiating structure 28b along a second radial direction Dr2. A second radial gap g2 is provided between the second radiating structure 28b and the second opposing radiating structure 28B.

[0036] By providing such a second opposing radiation structure 28B, it is easy to obtain the desired vibration in the movable portion 10M. High-precision detection is possible. For example, it is possible to prevent the third annular portion 13 from being locally and excessively etched.

[0037] 1, the sensor 110 may further include a second fixed electrode 32 and a second other fixed electrode 32A. The second fixed electrode 32 and the second other fixed electrode 32A are fixed to the first surface 50a. The second fixed electrode 32 and the second other fixed electrode 32A are provided between the third annular portion 13 and the second annular portion 12. In a circumferential direction Dc centered on the fixed portion 10F along the first plane PL1, at least a portion of the second radiation structure 28b is provided between the second fixed electrode 32 and the second other fixed electrode 32A.

[0038] For example, the second fixed electrode 32 is provided between the second connection portion 22 and the second radiating structure 28b in the circumferential direction Dc.

[0039] As shown in FIG. 1, the movable part 10M may further include a third radiating structure 28c. The plurality of annular parts 10 may further include a third annular part 13 and a fourth annular part 14. The fourth annular part 14 is adjacent to the third annular part 13 among the plurality of annular parts 10. The third radiating structure 28c is connected to the third annular part 13. The third radiating structure 28c extends toward the fourth annular part 14 along a third radial direction Dr3. The third radial direction Dr3 passes through the first center 10C and is along the first plane PL1. A third radial gap g3 is provided between the third radiating structure 28c and the fourth annular part 14.

[0040] For example, the third radial direction Dr3 is aligned with the first radial direction Dr1. In the embodiment, the third radial direction Dr3 may intersect with the first radial direction Dr1.

[0041] The movable part 10M may further include a third opposing radiating structure 28C. The third opposing radiating structure 28C is connected to the fourth annular part 14. The third opposing radiating structure 28C extends toward the third opposing radiating structure 28c along a third radial direction Dr3. A third radial gap g3 may be provided between the third radiating structure 28c and the third opposing radiating structure 28C.

[0042] The sensor 110 may further include a third fixed electrode 33 and a third other fixed electrode 33A. The third fixed electrode 33 and the third other fixed electrode 33A are fixed to the first surface 50a. The third fixed electrode 33 and the third other fixed electrode 33A are provided between the fourth annular portion 14 and the third annular portion 13. In the circumferential direction Dc centered on the fixed portion 10F along the first plane PL1, at least a portion of the third radiation structure 28c is provided between the third fixed electrode 33 and the third other fixed electrode 33A.

[0043] For example, the third fixed electrode 33 is provided between the third connection portion 23 and the third radiating structure 28c in the circumferential direction Dc.

[0044] As shown in FIG. 1, the movable part 10M may further include a fourth radiating structure 28d. The plurality of annular parts 10 further includes a fourth annular part 14. The fourth annular part 14 is provided between the fixed part 10F and the third annular part 13. The fourth radiating structure 28d is connected to the fourth annular part 14. In this example, the fourth radiating structure 28d extends toward the fixed part 10F along the second radial direction Dr2. A fourth radial gap g4 is provided between the fourth radiating structure 28d and the fixed part 10F.

[0045] 1, the movable part 10M may further include a fourth opposing radiating structure 28D. The fourth opposing radiating structure 28D is connected to the fixed part 10F. The fourth opposing radiating structure 28D extends toward the fourth opposing radiating structure 28d along the second radiation direction Dr2. A fourth radiation gap g4 is provided between the fourth radiating structure 28d and the fourth opposing radiating structure 28D.

[0046] The sensor 110 may further include a fourth fixed electrode 34 and a fourth other fixed electrode 34A. The fourth fixed electrode 34 and the fourth other fixed electrode 34A are fixed to the first surface 50a. The fourth fixed electrode 34 and the fourth other fixed electrode 34A are provided between the fixed portion 10F and the fourth annular portion 14. In the circumferential direction Dc centered on the fixed portion 10F along the first plane PL1, at least a portion of the fourth radiation structure 28d is provided between the fourth fixed electrode 34 and the fourth other fixed electrode 34A.

[0047] For example, the fourth fixed electrode 34 is provided between the fourth connection portion 24 and the fourth radiating structure 28d in the circumferential direction Dc.

[0048] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. FIG. 8 is a schematic plan view illustrating a part of the sensor according to the first embodiment. 7, in a sensor 111 according to the embodiment, a movable part 10M includes a first structure 41. Except for this, the configuration of the sensor 111 may be similar to the configuration of the sensor 110.

[0049] FIG. 8 shows an enlarged view of a portion including the first structure 41. In this example, the first structure 41 is connected to the first annular portion 11. In this example, the first annular portion 11 is the outermost portion. The first structure 41 functions, for example, as a weight. The provision of the first structure 41 stabilizes the vibration of the movable portion 10M. Noise in the signal associated with the vibration can be suppressed. Higher accuracy of detection is possible.

[0050] For example, the length of the first structure 41 in the radial direction Dr is longer than the length of the first annular portion 11 in the radial direction Dr. For example, the length of the first structure 41 in the radial direction Dr is longer than the distance between the second annular portion 12 and the first annular portion 11 in the radial direction Dr.

[0051] A plurality of first structures 41 may be provided. The plurality of first structures 41 are arranged along the circumferential direction Dc. The plurality of first structures 41 and the first annular portion 11 may satisfy at least one of a first condition, a second condition, and a third condition.

[0052] 8, the first structure 41 may include a first structure part 41p and a first structure connecting part 41a. The first structure connecting part 41a is provided between the first annular part 11 and the first structure part 41p. The first structure connecting part 41a connects the first structure part 41p to the first annular part 11. The length of the first structure connecting part 41a in the circumferential direction Dc centered on the fixing part 10F along the first surface 50a is shorter than the length of the first structure part 41p in the circumferential direction Dc.

[0053] The first structure 41 may further include a second structure connecting portion 41b. The second structure connecting portion 41b is provided between the first annular portion 11 and the first structure part 41p, and connects the first structure part 41p to the first annular portion 11. The direction from the first structure connecting portion 41a to the second structure connecting portion 41b is along the circumferential direction Dc.

[0054] At least one of the multiple fixed electrodes 30 (in this example, the second fixed electrode 32 or the second other fixed electrode 32A) includes multiple partial electrodes. The multiple partial electrodes include a first partial electrode 30a and a second partial electrode 30b. The first partial electrode 30a and the second partial electrode 30b are aligned in the circumferential direction Dc.

[0055] As shown in Fig. 8, the length of the first radial gap g1 in the first radial direction Dr1 is defined as a length dg1. The distance between the second annular portion 12 and the first annular portion 11 along the first radial direction Dr1 is defined as d11. The length dg1 is preferably, for example, 0.1 to 0.9 times the distance d11. If the length dg1 is excessively long, for example, excessive etching of the annular portion 10 is likely to occur. If the length dg1 is excessively short, for example, the mechanical strength of the first radiating structure 28a is likely to decrease.

[0056] 8, the tip of the first radiating structure 28a may be curved. The tip of the first opposing radiating structure 28A may be curved.

[0057] 8, the length of the first radiating structure 28a in the circumferential direction Dc is defined as a first radiating structure length w28a. The length of the first annular portion 11 in the radial direction Dr is defined as a first annular portion width w11. For example, the first radiating structure length w28a may be 0.2 to 2 times the first annular portion width w11.

[0058] 7, in this example, the multiple annular portions 10 include a fifth annular portion 15 and a sixth annular portion 16. The fifth annular portion 15 is provided between the fixed portion 10F and the fourth annular portion 14. The sixth annular portion 16 is provided between the fixed portion 10F and the fifth annular portion 15.

[0059] 7, in this example, the multiple connection portions 20 include a fifth connection portion 25 and a sixth connection portion 26. The fifth connection portion 25 connects the sixth annular portion 16 to the fifth annular portion 15. The sixth connection portion 26 connects the sixth annular portion 16 to the fixing portion 10F.

[0060] 7, in this example, the multiple fixed electrodes 30 include a fifth fixed electrode 35 and a sixth fixed electrode 36. The fifth fixed electrode 35 is provided between the sixth annular portion 16 and the fifth annular portion 15. The sixth fixed electrode 36 is provided between the fixed portion 10F and the sixth annular portion 16.

[0061] FIG. 9 is a schematic plan view illustrating the sensor according to the first embodiment. 9, in the sensor 112 according to the embodiment, the first annular portion 11 is not the outermost portion. In the radial direction Dr, the first annular portion 11 is between the multiple movable portions 10M. Except for this, the configuration of the sensor 112 may be similar to the configuration of the sensor 110 or the sensor 111.

[0062] In the sensor 112, the first radiating structure 28a is connected to the first annular portion 11. The first opposing radiating structure 28A is connected to the second annular portion 12. The sensor 112 is also capable of highly accurate detection.

[0063] FIG. 10 is a schematic plan view illustrating the sensor according to the first embodiment. 10 illustrates a fixed part 10F and a movable part 10M. In the sensor 120 according to the embodiment, at least one of the multiple fixed electrodes 30 includes multiple partial electrodes. The configuration of the sensor 120 other than this may be similar to the configuration of the sensor 110, etc.

[0064] In this example, at least one of the multiple fixed electrodes 30 is a second fixed electrode 32. The second fixed electrode 32 includes multiple partial electrodes. The multiple partial electrodes include a first partial electrode 30a and a second partial electrode 30b. The first partial electrode 30a and the second partial electrode 30b are aligned in the circumferential direction Dc. In this example, two second partial electrodes 30b are provided. The first partial electrode 30a is provided between the two partial electrodes in the circumferential direction Dc. Different signals may be supplied to the multiple partial electrodes. Signals obtained from the multiple partial electrodes may be processed to perform detection.

[0065] 10, in this example, the direction in which the second connection portion 22 extends is aligned with the direction in which the third connection portion 23 extends. For example, a detection signal with high intensity can be easily obtained.

[0066] As shown in FIG. 10, the sensor 120 may include a connection member 48. The connection member 48 is fixed to the first surface 50a. A fixed portion 10F is provided around the connection member 48. An electrical connection may be made through the connection member 48. In this example, the connection member 48 includes a first connection member 48a and a second connection member 48b. The connection member 48 (e.g., the first connection member 48a and the second connection member 48b, etc.) may be electrically insulated from the fixed portion 10F and the movable portion 10M. At least a part of the connection member 48 (e.g., the first connection member 48a and the second connection member 48b, etc.) may be electrically connected to the fixed portion 10F or the movable portion 10M by wiring for electrical connection or the like.

[0067] Second embodiment The second embodiment relates to an electronic device. FIG. 11 is a schematic view illustrating an electronic device according to the second embodiment. 11, an electronic device 310 according to an embodiment includes a sensor according to the first embodiment (e.g., sensor 110) and a circuit control unit 170. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a driving device 185. According to the embodiment, for example, the circuit 180 for controlling the driving device 185 can be controlled with high accuracy.

[0068] 11, a sensor system 210 according to an embodiment includes a sensor according to the first embodiment (for example, the sensor 110) and a detection target member 81. The sensor 110 is fixed to the detection target member 81. The sensor 110 can detect a signal from the detection target member 81.

[0069] 12(a) to 12(h) are schematic views illustrating applications of the electronic device according to the embodiment. As shown in FIG. 12(a), the electronic device 310 may be at least a part of a robot. As shown in FIG. 12(b), the electronic device 310 may be at least a part of a machine robot installed in a manufacturing plant or the like. As shown in FIG. 12(c), the electronic device 310 may be at least a part of an automatic guided vehicle in a factory or the like. As shown in FIG. 12(d), the electronic device 310 may be at least a part of a drone (unmanned aerial vehicle). As shown in FIG. 12(e), the electronic device 310 may be at least a part of an airplane. As shown in FIG. 12(f), the electronic device 310 may be at least a part of a ship. As shown in FIG. 12(g), the electronic device 310 may be at least a part of a submarine. As shown in FIG. 12(h), the electronic device 310 may be at least a part of a car. The electronic device 310 may include, for example, at least one of a robot and a moving object.

[0070] 13(a) and 13(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in FIG. 13(a), a sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transmitting / receiving unit 420. In the example of FIG. 13(a), the sensor 110 is depicted as the sensor. The transmitting / receiving unit 420 can transmit a signal obtained from the sensor 110, for example, by at least one of a wireless and a wired method. The sensor 430 is provided, for example, on a slope surface 410 of a road 400 or the like. The sensor 430 can monitor, for example, the state of a facility (for example, infrastructure) or the like. The sensor 430 may be, for example, a state monitoring device.

[0071] For example, the sensor 430 detects a change in the condition of the slope surface 410 of the road 400 with high accuracy. The change in the condition of the slope surface 410 includes, for example, at least one of a change in the inclination angle and a change in the vibration state. A signal (inspection result) obtained from the sensor 110 is transmitted by the transceiver unit 420. The condition of a facility (e.g., infrastructure) can be monitored, for example, continuously.

[0072] As shown in FIG. 13(b), the sensor 430 is provided, for example, in a part of a bridge 460. The bridge 460 is provided on a river 470. For example, the bridge 460 includes at least one of a main girder 450 and a pier 440. The sensor 430 is provided in at least one of the main girder 450 and the pier 440. For example, due to deterioration or the like, the angle of at least one of the main girder 450 and the pier 440 may change. For example, the vibration state of at least one of the main girder 450 and the pier 440 may change. The sensor 430 detects these changes with high accuracy. The detection result can be transmitted to any location by the transmitting / receiving unit 420. Anomalies can be effectively detected.

[0073] The embodiments may include the following technical solutions. (Technical proposal 1) a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with a first gap is provided between the first surface and the movable portion, the movable portion includes a plurality of annular portions, a plurality of connecting portions, and a first radiating structure; Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, The plurality of connection portions extend along a radial direction, the radial direction passes through a first center of the fixing portion on the first plane and is along the first plane, one of the plurality of connection portions connects two of the plurality of annular portions to each other; the plurality of annular portions include a first annular portion and a second annular portion, the second annular portion is adjacent to the first annular portion among the plurality of annular portions, the first radiating structure is connected to the first annular portion; the first radiating structure extends along a first radial direction toward the second annular portion; the first radial direction passes through the first center and is along the first plane; The sensor comprises a first radiating gap between the first radiating structure and the second annular portion.

[0074] (Technical proposal 2) The sensor described in Technical Proposal 1, wherein the second annular portion is provided between the fixed portion and the first annular portion.

[0075] (Technical proposal 3) the movable portion further includes a first opposing radiating structure; the first opposing radiating structure is connected to the second annular portion; the first opposing radiating structure extends toward the first radiating structure along the first radial direction; The sensor according to technical proposal 1 or 2, wherein the first radiating gap is provided between the first radiating structure and the first opposing radiating structure.

[0076] (Technical proposal 4) Further comprising a first fixed electrode and a first other fixed electrode fixed to the first surface, the first fixed electrode and the first other fixed electrode are provided between the second annular portion and the first annular portion, A sensor described in any one of Technical Solutions 1 to 3, wherein at least a portion of the first radiating structure is provided between the first fixed electrode and the first other fixed electrode in a circumferential direction along the first plane and centered on the fixed portion.

[0077] (Technical proposal 5) Further comprising a first fixed electrode fixed to the first surface, the first fixed electrode is provided between the second annular portion and the first annular portion, the plurality of connection portions include a first connection portion, the first connection portion is provided between the second annular portion and the first annular portion, the first connection portion connects the second annular portion to the first annular portion, A sensor described in any one of technical proposals 1 to 3, wherein the first fixed electrode is provided between the first radiating structure and the first connection portion in a circumferential direction along the first plane and centered on the fixed portion.

[0078] (Technical proposal 6) the movable portion further includes a second radiating structure; the plurality of annular portions further includes a third annular portion; The second annular portion is provided between the fixed portion and the first annular portion, The third annular portion is provided between the fixed portion and the second annular portion, the third annular portion is adjacent to the second annular portion among the plurality of annular portions; the second radiating structure is connected to the second annular portion; the second radiating structure extends along a second radial direction toward the third annular portion; the second radial direction passes through the first center and is aligned along the first plane; The sensor described in Technical Scheme 1, wherein a second radiating gap is provided between the second radiating structure and the third annular portion.

[0079] (Technical proposal 7) The sensor described in Technical Solution 6, wherein the second radiation direction is along the first radiation direction.

[0080] (Technical proposal 8) the movable portion further includes a second opposing radiating structure; the second opposing radiating structure is connected to the third annular portion; the second opposing radiating structure extends toward the second radiating structure along the second radial direction; The sensor according to technical proposal 6 or 7, wherein the second radiating gap is provided between the second radiating structure and the second opposing radiating structure.

[0081] (Technical proposal 9) Further comprising a second fixed electrode and a second other fixed electrode fixed to the first surface, the second fixed electrode and the second other fixed electrode are provided between the third annular portion and the second annular portion, A sensor described in any one of Technical Proposals 6 to 8, wherein at least a portion of the second radiation structure is provided between the second fixed electrode and the second other fixed electrode in a circumferential direction along the first plane and centered on the fixed portion.

[0082] (Technical proposal 10) the movable portion further includes a third radiating structure; the plurality of annular portions further includes a third annular portion and a fourth annular portion, the fourth annular portion is adjacent to the third annular portion among the plurality of annular portions, the third radiating structure is connected to the third annular portion; the third radiating structure extends along a third radial direction toward the fourth annular portion; the third radial direction passes through the first center and is aligned along the first plane; The sensor described in Technical Solution 1, wherein a third radiating gap is provided between the third radiating structure and the fourth annular portion.

[0083] (Technical proposal 11) The sensor described in technical proposal 10, wherein the third radiation direction intersects with the first radiation direction.

[0084] (Technical proposal 12) The second annular portion is provided between the fixed portion and the first annular portion, The third annular portion is provided between the fixed portion and the second annular portion, The sensor described in Technical Proposal 10 or 11, wherein the fourth annular portion is provided between the fixed portion and the third annular portion.

[0085] (Technical proposal 13) the movable portion further includes a third opposing radiating structure; the third opposing radiating structure is connected to the fourth annular portion; the third opposing radiating structure extends toward the third radiating structure along the third radial direction; The sensor according to any one of Technical Schemes 10 to 12, wherein the third radiating gap is provided between the third radiating structure and the third opposing radiating structure.

[0086] (Technical proposal 14) Further comprising a third fixed electrode and a third other fixed electrode fixed to the first surface, the third fixed electrode and the third other fixed electrode are provided between the fourth annular portion and the third annular portion, A sensor described in any one of Technical Solutions 10 to 13, wherein at least a portion of the third radiation structure is provided between the third fixed electrode and the third other fixed electrode in a circumferential direction along the first plane and centered on the fixed portion.

[0087] (Technical proposal 15) the movable portion further includes a fourth radiating structure; the plurality of annular portions further includes a fourth annular portion; The fourth annular portion is provided between the fixed portion and the third annular portion, the fourth radiating structure is connected to the fourth annular portion; the fourth radiating structure extends along the second radial direction toward the fixed portion, The sensor according to any one of Technical Solutions 6 to 8, wherein a fourth radiation gap is provided between the fourth radiation structure and the fixed portion.

[0088] (Technical proposal 16) the movable portion further includes a fourth opposing radiating structure; the fourth opposing radiating structure is connected to the fixed portion; the fourth opposing radiating structure extends along the second radiation direction toward the fourth radiating structure; The sensor described in technical proposal 15, wherein the fourth radiating gap is provided between the fourth radiating structure and the fourth opposing radiating structure.

[0089] (Technical proposal 17) Further comprising a fourth fixed electrode and a fourth other fixed electrode fixed to the first surface, the fourth fixed electrode and the fourth other fixed electrode are provided between the fixed portion and the fourth annular portion, The sensor described in Technical Proposal 15 or 16, wherein at least a portion of the fourth radiation structure is provided between the fourth fixed electrode and the fourth other fixed electrode in a circumferential direction along the first plane and centered on the fixed portion.

[0090] (Technical proposal 18) A sensor described in any one of Technical Proposals 1 to 17, wherein the length of the first radial gap in the first radial direction is greater than or equal to 0.1 times and less than or equal to 0.9 times the distance along the first radial direction between the second annular portion and the first annular portion.

[0091] (Technical proposal 19) A sensor according to any one of technical proposals 1 to 18; a detection target member to which the sensor is fixed; A sensor system comprising:

[0092] (Technical proposal 20) A sensor according to any one of technical proposals 1 to 18; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; An electronic device comprising:

[0093] According to the embodiments, it is possible to provide a sensor, a sensor system, and an electronic device that can improve characteristics.

[0094] In this specification, "vertical" and "parallel" do not only mean strictly vertical and strictly parallel, but also include, for example, variations in the manufacturing process, and may mean substantially vertical and substantially parallel.

[0095] The above describes the embodiments of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, specific technical solutions of each element included in the sensor, such as the member, substrate, sensor unit, housing, sensor element, base, fixed unit, movable unit, and control unit, are included in the scope of the present invention as long as a person skilled in the art can implement the present invention in the same way and obtain the same effect by appropriately selecting them from the known range.

[0096] Furthermore, any combination of two or more elements of each of the specific examples, within the scope of technical feasibility, is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0097] In addition, all sensors, sensor systems, and electronic devices that can be implemented by a person skilled in the art by appropriate design modifications based on the sensors, sensor systems, and electronic devices described above as embodiments of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0098] In addition, within the scope of the concept of the present invention, a person skilled in the art may conceive of various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0099] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0100] 10: annular portion, 10C: first center, 10F: fixed portion, 10M: movable portion, 11-16: first to sixth annular portions, 20: connection portion, 21-26: first to sixth connection portions, 28A-28D: first to fourth opposing radiating structures, 28a-28d: first to fourth radiating structures, 30: fixed electrode, 30a, 30b: first and second partial electrodes, 31-36: first to sixth fixed electrodes, 31A-34A: first to fourth other fixed electrodes, 41: first structure, 41a, 41b: first and second structure connection portion, 41p: first structure part, 48: connection member, 48a, 48b: first and second connection members, 50a: first surface, 50s: base, 55: insulating member, 70: control unit, 81: detection target member, 110-112, 120: sensor, 170: circuit control unit, 180: circuit, 185: drive unit, 210: sensor system, 310: electronic device, 400: road, 410: slope surface, 420: transmitter / receiver, 430: sensor, 440: pier, 450: main girder, 460: bridge, 470: river, Dc: circumferential direction, Dr: radial direction, Dr1-Dr3: first to third radial directions, G1: first gap, PL1: first plane, S1: signal, d11: distance, g1-g4: first to fourth radial gaps, w11: first annular portion width, w28a: first radial structure length

Claims

1. a substrate including a first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; Equipped with a first gap is provided between the first surface and the movable portion, the movable portion includes a plurality of annular portions, a plurality of connecting portions, and a first radiating structure; Each of the plurality of annular portions is provided around the fixed portion with the fixed portion as a center in a first plane along the first surface, The plurality of connection portions extend along a radial direction, the radial direction passes through a first center of the fixing portion in the first plane and is along the first plane, one of the plurality of connection portions connects two of the plurality of annular portions to each other; the plurality of annular portions include a first annular portion and a second annular portion, the second annular portion is adjacent to the first annular portion among the plurality of annular portions, the first radiating structure is connected to the first annular portion; the first radiating structure extends along a first radial direction toward the second annular portion; the first radial direction passes through the first center and is along the first plane; The sensor further comprises a first radiating gap between the first radiating structure and the second annular portion.

2. the movable portion further includes a first opposing radiating structure; the first opposing radiating structure is connected to the second annular portion; the first opposing radiating structure extends along the first radial direction toward the first radiating structure; The sensor of claim 1 , wherein the first radiating gap is disposed between the first radiating structure and the first opposing radiating structure.

3. A first fixed electrode and a first other fixed electrode are fixed to the first surface, the first fixed electrode and the first other fixed electrode are provided between the second annular portion and the first annular portion, The sensor according to claim 1 , wherein at least a portion of the first radiating structure is provided between the first fixed electrode and the first other fixed electrode in a circumferential direction along the first plane and centered on the fixed portion.

4. a first fixed electrode fixed to the first surface; the first fixed electrode is provided between the second annular portion and the first annular portion, The plurality of connection portions include a first connection portion, the first connection portion is provided between the second annular portion and the first annular portion, the first connection portion connects the second annular portion to the first annular portion, The sensor according to claim 1 , wherein the first fixed electrode is provided between the first radiating structure and the first connection portion in a circumferential direction along the first plane and centered on the fixed portion.

5. the movable portion further includes a second radiating structure; the plurality of annular portions further includes a third annular portion, The second annular portion is provided between the fixed portion and the first annular portion, The third annular portion is provided between the fixed portion and the second annular portion, the third annular portion is adjacent to the second annular portion among the plurality of annular portions, the second radiating structure is connected to the second annular portion; the second radiating structure extends along a second radial direction toward the third annular portion; the second radial direction passes through the first center and is along the first plane; The sensor of claim 1 , wherein a second radial gap is provided between the second radiating structure and the third annular portion.

6. the movable portion further includes a third radiating structure; the plurality of annular portions further includes a third annular portion and a fourth annular portion, the fourth annular portion is adjacent to the third annular portion among the plurality of annular portions, the third radiating structure is connected to the third annular portion; the third radiating structure extends along a third radial direction toward the fourth annular portion; the third radial direction passes through the first center and is along the first plane; The sensor of claim 1 , wherein a third radial gap is provided between the third radiating structure and the fourth annular portion.

7. The sensor of claim 6 , wherein the third radial direction intersects the first radial direction.

8. the movable portion further includes a third opposing radiating structure; the third opposing radiating structure is connected to the fourth annular portion; the third opposing radiating structure extends toward the third radiating structure along the third radial direction; 8. The sensor of claim 6 or 7, wherein the third radiating gap is provided between the third radiating structure and the third opposing radiating structure.

9. A sensor according to claim 1; a detection target member to which the sensor is fixed; A sensor system comprising:

10. A sensor according to claim 1; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; An electronic device comprising:

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