Display processing apparatus, substrate processing apparatus, display method, substrate processing method, method for manufacturing semiconductor device, and program

Abstract

To provide a technology that makes it possible to easily identify information pertaining to valid setting items to be used in a substrate processing apparatus in the file editing operation in a display processing apparatus.SOLUTION: A display processing apparatus has a memory unit that stores a file having a plurality of items provided for each of categories, setting values for the items, and validity information indicating whether the setting values for the items are valid or not by classifying the processing conditions of the substrate into a plurality of categories, a display unit that displays on a screen for each category the validity information and the set values for the items classified by each category, and an operation unit for editing the validity information displayed on the screen.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present disclosure relates to a display processing apparatus, a substrate processing apparatus, a display method, a substrate processing method, a manufacturing method of a semiconductor device, and a program. [Background technology]

[0002] Conventionally, as described in Patent Document 1, a technique is known that clarifies whether or not there is a change to a setting item when editing a file such as a recipe. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2001-189248 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique that enables easy identification of information related to valid setting items used in a substrate processing apparatus during a file editing operation in a display processing apparatus. [Means for solving the problem]

[0005] According to one aspect of the present disclosure, a technology is provided that includes a memory unit that classifies substrate processing conditions into a plurality of categories, and stores a file having a plurality of items provided for each of the categories, setting values ​​for the items, and validity information indicating whether the setting values ​​for the items are valid or not, a display unit that displays the validity information and the setting values ​​of the items classified into the categories on a screen for each of the categories, and an operation unit that performs editing operations on the validity information displayed on the screen. Effect of the Invention

[0006] According to the present disclosure, in a file editing operation in a display processing device, it is possible to easily specify information related to valid setting items used in a substrate processing device. [Brief description of the drawings]

[0007] [Figure 1] 1 is a perspective view showing an example of a substrate processing apparatus according to an embodiment; [Diagram 2] 1 is a cross-sectional side view of a substrate processing apparatus according to an embodiment of the present invention; [Diagram 3] 1 is a block diagram showing an example of a configuration of a substrate processing apparatus and a display processing apparatus according to an embodiment of the present disclosure. [Figure 4] 2 is a block diagram showing an example of a configuration of a process control unit and a transfer control unit of the substrate processing apparatus according to an embodiment of the present disclosure. FIG. [Diagram 5] FIG. 2 is a diagram illustrating an example of a screen of a display processing device according to an embodiment of the present disclosure. [Figure 6] 1 is an example of a file structure according to an embodiment of the present disclosure (part 1). [Figure 7] 2 is a second example of a file structure according to an embodiment of the present disclosure. [Figure 8] 11 is a flowchart of a file editing process according to an embodiment of the present disclosure. [Figure 9] 1A to 1C are diagrams for explaining screen transitions of a display processing device according to an embodiment of the present disclosure. [Figure 10] 1 is a flowchart of a process of a substrate processing apparatus according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, one embodiment of the present disclosure will be described mainly with reference to Figs. 1 to 10. Note that all drawings used in the following description are schematic, and the dimensional relationship of each element, the ratio of each element, and the like shown in the drawings do not necessarily match the actual ones. Furthermore, the dimensional relationship of each element, the ratio of each element, and the like between multiple drawings do not necessarily match. Furthermore, the present disclosure is not limited to the following embodiment in any way, and can be implemented with appropriate modifications within the scope of the present disclosure.

[0009] It should be noted that a "file" is a file in which processing conditions for substrates, such as commands for the substrate processing apparatus, setting information for various items, and combinations with parameters, are recorded, and in the following explanation, will be referred to as a "recipe file" or "parameter file."

[0010] In the following description, a worker refers to a person who uses a substrate processing apparatus or a person who processes substrates using the substrate processing apparatus.

[0011] First, an overview of a substrate processing apparatus 1 according to the present embodiment will be described with reference to FIGS.

[0012] Fig. 1 is a perspective view showing an example of a substrate processing apparatus 1 according to this embodiment. Fig. 2 is a cross-sectional view of the substrate processing apparatus 1 according to this embodiment when viewed from the side. Figs. 1 and 2 show a vertical substrate processing apparatus 1 as an example of the substrate processing apparatus. Note that, as an example of the substrate processed in the substrate processing apparatus 1, a semiconductor wafer made of silicon or the like is shown.

[0013] As shown in Figures 1 and 2, the substrate processing apparatus 1 has a housing 2, and a front maintenance port 4 is provided in the lower part of a front wall 3 of the housing 2 as an opening for maintenance, and the front maintenance port 4 is opened and closed by a front maintenance door 5.

[0014] A pod loading / unloading opening 6 is opened in the front wall 3 of the housing 2 so as to communicate between the inside and the outside of the housing 2, and the pod loading / unloading opening 6 is opened and closed by a front shutter 7 which is an loading / unloading opening opening mechanism. A load port 8 which is a substrate transport container delivery table is installed on the front side of the pod loading / unloading opening 6, and the load port 8 is configured to align a pod 9 placed thereon.

[0015] The pod 9 is a sealed substrate transport container, and is adapted to be carried onto the load port 8 and to be carried out from the load port 8 by an in-process transport device (not shown).

[0016] A rotating pod shelf 11, which is a shelf for storing substrate transport containers, is installed at the upper part of the approximate center in the front-rear direction within the housing 2, and the rotating pod shelf 11 is configured to store a plurality of pods 9.

[0017] The rotating pod shelf 11 includes support columns 12 that are vertically erected and intermittently rotated, and shelf boards 13 that are substrate transport container mounting shelves and are supported radially at upper, middle and lower positions on the support columns 12. The shelf boards 13 are configured to store at least one pod 9 mounted thereon.

[0018] A pod opener 14 which is a substrate transport container lid opening and closing mechanism is provided below the rotary pod shelf 11. The pod opener 14 has a structure capable of placing the pod 9 thereon and opening and closing the lid of the pod 9.

[0019] A pod transfer mechanism 15, which is a container transfer mechanism, is installed between the load port 8 and the rotary pod shelf 11 and pod opener 14, and the pod transfer mechanism 15 is capable of ascending and descending while holding a pod 9, and of moving forward and backward in the horizontal direction. It is configured to transfer the pod 9 between the load port 8, the rotary pod shelf 11, and the pod opener 14.

[0020] A sub-housing 16 is provided extending to the rear end at the lower portion approximately in the center in the front-to-rear direction inside the housing 2. A pair of wafer loading / unloading openings 19, which are substrate loading / unloading openings for loading / unloading wafers 18, which are substrates, into and out of the sub-housing 16, are opened in a front wall 17 of the sub-housing 16, lined up vertically in two tiers, and pod openers 14 are provided for the upper and lower wafer loading / unloading openings 19, respectively.

[0021] The pod opener 14 includes a mounting table 21 on which the pod 9 is mounted, and an opening / closing mechanism 22 that opens and closes the lid of the pod 9. The pod opener 14 is configured to open and close the wafer entrance / exit of the pod 9 by opening and closing the lid of the pod 9 mounted on the mounting table 21 using the opening / closing mechanism 22.

[0022] The sub-housing 16 constitutes a transfer chamber 23 that is airtight from the space (pod transfer space) in which the pod transport mechanism 15 and the rotating pod shelf 11 are disposed. A wafer transfer mechanism 24, which is a substrate transfer mechanism, is installed in the front region of the transfer chamber 23, and the wafer transfer mechanism 24 is equipped with a required number of wafer mounting plates 25 for mounting the wafers 18 (for example, five in the figure), and the wafer mounting plates 25 are movable in a horizontal direction, rotatable in a horizontal direction, and capable of being raised and lowered. The wafer transfer mechanism 24 is configured to load and unload the wafers 18 into and from a boat 26, which is a substrate holder.

[0023] A standby section 27 for accommodating the boat 26 and allowing it to wait is provided in the rear region of the transfer chamber 23, and a vertical processing furnace 28 is provided above the standby section 27. The processing furnace 28 has a processing chamber 29 formed therein, the lower end of which serves as a furnace opening section, and the furnace opening section is adapted to be opened and closed by a furnace opening shutter 31 which is a furnace opening opening and closing mechanism. The processing chamber 29 is an example of a processing container for processing substrates.

[0024] A boat elevator 32, which is a substrate holder lifting mechanism for lifting and lowering the boat 26, is installed between the right end of the housing 2 and the right end of the standby section 27 of the sub-housing 16. A seal cap 34 serving as a lid is attached horizontally to an arm 33 connected to the lifting platform of the boat elevator 32. The seal cap 34 supports the boat 26 vertically and can air-tightly close the furnace throat when the boat 26 is loaded into the processing chamber 29.

[0025] The boat 26 is configured to hold multiple wafers 18 (for example, 50 to 125) in a horizontal position with the centers aligned in multiple stages. In this specification, a numerical range such as "50 to 125" means that the lower and upper limits are included in the range. Thus, for example, "50 to 125" means "50 or more and 125 or less." The same applies to other numerical ranges.

[0026] A clean unit 35 is disposed at a position facing the boat elevator 32, and is configured with a supply fan and a dust filter to supply clean air 36, which is a purified atmosphere or an inert gas. For example, a nitrogen (N)-containing gas can be used as the inert gas. For example, nitrogen (N2) gas, ammonia (NH3) gas, etc. can be used as the N-containing gas. One or more of these can be used as the N-containing gas. A notch alignment device (not shown) is installed between the wafer transfer mechanism 24 and the clean unit 35 as a substrate alignment device that aligns the circumferential position of the wafer 18.

[0027] The clean air 36 blown out from the clean unit 35 is circulated to a notch alignment device (not shown), the wafer transfer mechanism 24, and the boat 26, and then sucked in by a duct (not shown) and exhausted to the outside of the housing 2, or is blown out into the transfer chamber 23 by the clean unit 35.

[0028] Next, the operation of the substrate processing apparatus 1 will be described.

[0029] When the pod 9 is supplied to the load port 8, the pod loading / unloading opening 6 is opened by the front shutter 7. The pod 9 on the load port 8 is carried into the housing 2 through the pod loading / unloading opening 6 by the pod transport mechanism 15 and placed on a designated shelf 13 of the rotating pod shelf 11. After being temporarily stored on the rotating pod shelf 11, the pod 9 is transported by the pod transport mechanism 15 from the shelf 13 to one of the pod openers 14 and transferred to the placement table 21, or is transferred directly from the load port 8 to the placement table 21.

[0030] At this time, the wafer loading / unloading port 19 is closed by the opening / closing mechanism 22, and the transfer chamber 23 is filled with clean air 36. For example, the transfer chamber 23 is filled with N-containing gas as the clean air 36, so that the oxygen concentration is set to, for example, 20 ppm or less, which is lower than the oxygen concentration inside the housing 2 (air atmosphere).

[0031] The open end face of the pod 9 placed on the mounting table 21 is pressed against the opening edge of the wafer loading / unloading opening 19 in the front wall 17 of the sub-housing 16, and the lid is removed by the opening / closing mechanism 22 to open the wafer entrance / exit.

[0032] When the pod 9 is opened by the pod opener 14, the wafers 18 are removed from the pod 9 by the wafer transfer mechanism 24 and transported to a notch alignment device (not shown). After the wafers 18 are aligned by the notch alignment device, the wafer transfer mechanism 24 transports the wafers 18 to the waiting section 27 at the rear of the transfer chamber 23 and charges them into the boat 26.

[0033] After transferring the wafers 18 to the boat 26 , the wafer transfer mechanism 24 returns to the pod 9 and loads the next wafer 18 into the boat 26 .

[0034] While the wafers 18 are being loaded into the boat 26 by the wafer transfer mechanism 24 in one (upper or lower) pod opener 14, another pod 9 is transported from the rotating pod shelf 11 and transferred to the other (lower or upper) pod opener 14 by the pod transport mechanism 15, and the other pod opener 14 simultaneously begins opening the pod 9.

[0035] When a pre-specified number of wafers 18 are loaded into the boat 26, the furnace port of the processing furnace 28, which has been closed by the furnace port shutter 31, is opened by the furnace port shutter 31. Then, the boat 26 is raised by the boat elevator 32 and loaded into the processing chamber 29.

[0036] After loading, the furnace throat is airtightly closed by the seal cap 34. Note that, in this embodiment, at this timing (after loading), a purging step (pre-purging step) is performed in which the gas in the processing chamber 29 is replaced with an inert gas.

[0037] The processing chamber 29 is evacuated to a desired pressure (vacuum level) by a gas exhaust mechanism (not shown), and is heated to a predetermined temperature by a heater driving unit (not shown) to achieve a desired temperature distribution in the processing chamber 29.

[0038] A gas supply mechanism (not shown) supplies a process gas controlled at a predetermined flow rate, and as the process gas flows through the process chamber 29, it comes into contact with the surface of the wafer 18, and a predetermined process is performed on the surface of the wafer 18. Furthermore, the process gas after reaction is exhausted from the process chamber 29 by a gas exhaust mechanism. In this specification, the process gas means the gas supplied into the process chamber 29. The same applies in the following explanations.

[0039] When a preset processing time has elapsed, the gas supply mechanism supplies the inert gas from the inert gas supply source (not shown). Inert gas is supplied from the upstream side of the processing chamber 29 to replace the air in the processing chamber 29 with the inert gas, and the pressure in the processing chamber 29 is returned to normal pressure (after-purging step). Then, the boat 26 is lowered by the boat elevator 32 via the seal cap 34. In this specification, the processing time means the time that the processing continues. This also applies to the following explanations.

[0040] Regarding removal of the processed wafers 18, the above-described procedure is reversed, and the wafers 18 and the pod 9 are discharged to the outside of the housing 2. Unprocessed wafers 18 are further loaded into the boat 26, and the batch processing of the wafers 18 is repeated.

[0041] 1 and 2, the substrate processing apparatus 1 includes a control device 100, which controls the substrate processing apparatus 1. The control device 100 may be built into the substrate processing apparatus 1, or may be provided so as to be accessible to the substrate processing apparatus 1 from outside the substrate processing apparatus 1. In the following, a case in which the control device 100 according to this embodiment is applied to the substrate processing apparatus 1 will be described, but the control device 100 may also control an apparatus other than the substrate processing apparatus 1.

[0042] Next, the configuration of a control system of the substrate processing apparatus 1 according to this embodiment will be described with reference to Fig. 3 and Fig. 4. Fig. 3 and Fig. 4 are block diagrams showing an example of a functional configuration of the substrate processing apparatus 1 according to this embodiment.

[0043] As shown in FIG. 3, the substrate processing apparatus 1 includes a control device 100 which is a main controller, an external communication unit 201, an external memory unit 202, an operation unit 203, a display unit 204, a process control unit 205, and a transport control unit 206.

[0044] The control device 100 is configured as a computer including a CPU (Central Processing Unit) 102, a memory 103, a storage unit 104, and an I / O (also referred to as an I / O port) 105. The storage unit 104 stores recipe files such as recipes in which processing conditions and processing procedures are defined, control program files (such as recipe execution programs) for executing these recipe files, parameter files (setting value files) for setting processing conditions and processing procedures, error processing program files and error processing parameter files, as well as various screen files including an input screen for inputting process parameters, various icon files, and the like (none of which are shown). The control device 100 is connected to a network such as the Internet, a LAN (Local Area Network), or a WAN (Wide Area Network) by using an external communication unit 201, and is capable of communicating with external devices via the network.

[0045] The control device 100 is connected to a process control unit 205 and a transport control unit 206 via an I / O 105. The control device 100 is electrically connected to each of the process control unit 205 and the transport control unit 206 via the I / O 105, and is therefore configured to be capable of transmitting and receiving each data, downloading and uploading each file, and the like.

[0046] The control device 100 is connected to an external host computer (not shown) via an external communication unit 201. Therefore, even if the substrate processing apparatus 1 is installed in a clean room, the host computer can be placed in an office or the like outside the clean room. In addition, an external storage unit 202 is connected to the control device 100 as an attachment unit into which a USB (Universal Serial Bus) memory or the like, which is an example of a recording medium, is inserted and removed.

[0047] The display unit 204 is a display device (not shown) such as a liquid crystal display panel, which displays a screen. The operation unit 203 performs operation input using an input device (not shown) such as a keyboard for inputting operation input. The operation unit 203 and the display unit 204 can be integrated together, for example, in the case of a touch panel.

[0048] The display unit 204 displays a screen for checking the status of the substrate process system controlled by the process control unit 205 and the substrate transport system controlled by the transport control unit 206. The display unit 204 can also display on the screen various operation buttons as an input unit for inputting operation instructions to the substrate process system and the substrate transport system.

[0049] Furthermore, the display unit 204 can display a screen for editing setting values ​​included in a recipe file that defines processing conditions for substrate processing by the display processing device 106 disclosed in the present application and validity information indicating whether the items of these setting values ​​are valid or invalid. The display processing device 106 will be described in detail later.

[0050] 4, the process control unit 205 includes at least one of a temperature control unit 207, a gas flow rate control unit 208, and a pressure control unit 209. The temperature control unit 207, the gas flow rate control unit 208, and the pressure control unit 209 each constitute a sub-controller and are electrically connected to the process control unit 205, enabling transmission and reception of each data, downloading and uploading of each file, etc. The process control unit 205 and each sub-controller (the temperature control unit, the gas flow rate control unit, and the pressure control unit) may be configured separately or integrally.

[0051] 4, the transfer control unit 206 is configured to control each of the rotation unit 210, the lifting unit 211, and the transfer unit 212, which are the drive system of the substrate processing apparatus 1. The transfer control unit 206 is configured to, for example, control the rotary pod shelf 11 by the rotation unit 210, control the boat elevator 32 by the lifting unit 211, and control the transfer operations of the pod transfer mechanism 15, the wafer transfer mechanism 24, and the boat 26 by the transfer unit 212.

[0052] The control device 100, the process control unit 205, and the transport control unit 206 according to the present embodiment can be realized by using a normal computer system, not by a dedicated system. For example, each controller that executes a predetermined process can be configured by installing a program for executing the above-mentioned process from a recording medium (CD-ROM, USB, etc.) that stores the program in a general-purpose computer.

[0053] The means for supplying these programs is arbitrary. As described above, the programs can be supplied via a predetermined recording medium, or, for example, via a communication network.

[0054] A recipe file including processing conditions for substrate processing such as a recipe may be acquired from another device via the external communication unit 201, or may be acquired via the external storage unit 202 from a recording medium such as a USB.

[0055] The storage unit 104 is, for example, an auxiliary storage device such as a hard disk drive (HDD), a solid state drive (SSD), or a flash memory. The storage unit 104 stores a recording medium for recording an operation program executed by the CPU 102 and a recording medium for recording a recipe file. The operation program stored in the storage unit 104 is transferred to the memory (main storage device) 103 of the control unit 101 and executed, for example, at the start-up of the substrate manufacturing apparatus.

[0056] Further, the storage unit 104 stores a display processing program for executing the display processing according to this embodiment. The display processing program is, for example, pre-installed in the substrate processing apparatus 1, which functions as the display processing apparatus 106 disclosed in the present application. The display processing program may be realized by recording it on a non-volatile recording medium or distributing it via a network and appropriately installing it in the substrate processing apparatus 1. Examples of the non-volatile recording medium include a CD-ROM, a magneto-optical disk, a HDD, a DVD-ROM, a flash memory, a memory card, and a USB.

[0057] In addition, the display processing device 106 disclosed in the present application is composed of a CPU 102, a memory 103, a storage unit 104, a calculation unit 107, an operation unit 203, and a display unit 204, and functions as the display processing device 106 by the CPU 102 executing a display processing program placed on the memory 103 when the control device 100 is started.

[0058] The display unit 204 displays a screen on which it is possible to edit the validity information and the set values ​​included in a recipe file that defines the processing conditions for substrate processing. The processing conditions for the substrate are classified into a plurality of categories, and the screen displays a plurality of items included in each category, and the validity information and the set values ​​for each of the items. The display unit 204 may also be provided with operation buttons for editing the validity information and the set values, so as to function as the operation unit 203.

[0059] As shown in Fig. 6, the recipe file includes a plurality of groups, and each group has substrate processing conditions configured into a plurality of categories into which the substrate processing conditions of each group correspond to recipes prepared in advance for various substrate processing.

[0060] The display unit 204 displays on the screen the validity information and the set value of a plurality of items included in a plurality of categories of one of the groups so that the validity information and the set value of the items can be edited. As shown in FIG. 5, the display unit 204 has a group display area 50 on the left side of the screen, a category selection area 51 at the top center of the screen, and a category editing area 52 at the bottom center of the screen. The display unit 204 reads a recipe file from the storage unit 104 in accordance with an instruction to display a recipe file by an operator, for example, and displays a list of group names of groups included in the recipe file in the group display area 50. When an operation input to select a group name is performed from the operation unit 203, the display unit 204 displays the category names of the categories included in the group of the selected group name in the category selection area 51, and displays the names of items included in each category, the validity information and the set value for each of the items in the category editing area 52. The validity information and the set value displayed in the category editing area 52 can be edited in accordance with an operation input from the operation unit 203. The category editing area 52 can be scrolled, and items that cannot be displayed within the range of the category editing area 52 can be confirmed and edited by scrolling.

[0061] Furthermore, the display unit 204 has a command selection area 53 on the right side of the screen, and displays command buttons. In the example of FIG. 5, command buttons corresponding to the "Close" command and the "Save" command are displayed. The "Close" command is a command for discarding the edited contents and ending the editing. The "Save" command is a command for ending the editing and storing all the edited data, including the validity information and the setting values, in the storage unit 104 as a recipe file. The display unit 204 may further display any command button having an appropriate function as necessary.

[0062] Furthermore, when a selection operation (operation input) is performed from operation unit 203 to select a category name displayed in category selection area 51, display unit 204 displays the items included in the category of the selected category name and the validity information and setting value for each of the items in category editing area 52. When a selection operation is performed from operation unit 203 to select another category, display unit 204 switches to displaying the items included in the other category and the validity information and setting value for each of the items in category editing area 52.

[0063] 5, group names "Group 1," "Group 2," "Group 3,"... "Group n" are displayed in group display area 50. Category names "Category 1," "Category 2," "Category 3," and "Category 4" are displayed in the upper section of category selection area 51, and names of subcategories of the selected category, "Subcategory 1," "Subcategory 2," and "Subcategory 3," are displayed in the lower section of category selection area 51. The selected category and subcategory are displayed in a highlighted manner, for example, so that it is easy to recognize that they have been selected.

[0064] FIG. 5 shows a state in which category 1 is selected, and the lower part of category selection area 51 displays subcategories of category 1, "subcategory 1," "subcategory 2," and "subcategory 3" (selected categories are indicated by hatching). Also, a state in which "subcategory 3" is selected from among the subcategories of category 1, is shown in category editing area 52, and items of subcategory 3 of category 1 are displayed. Also, in the example of FIG. 5, items included in subcategory 3 of category 1 selected in category editing area 52, their validity information, and setting values ​​(upper limit value, lower limit value) are displayed in category editing area 52. In the case of performing substrate processing, specifically, the category names are "temperature," "gas flow rate," "pressure," etc., and the subcategory names may be, for example, "main heater," "sub heater," etc. when the category name is "temperature."

[0065] Furthermore, the storage unit 104 stores the validity information and the setting values ​​of the edited items as a recipe file.

[0066] An example of the structure of a recipe file is shown in Figures 6 and 7. As shown in Figure 6, the recipe file has a hierarchical structure. The recipe file is composed of group information representing the top-level group, category information representing multiple categories that each group has, and item information representing multiple items included in each category. In the example of Figure 6, the recipe file includes information on groups 1 to l.

[0067] The group information includes a group name and information on categories 1 to m that the group has, and each piece of category information from categories 1 to m includes a category name and item information on items 1 to n that are included in the category. Furthermore, as shown in FIG. 7, each piece of item information from items 1 to n includes an item name, validity information, and set values ​​1 to i. The validity information is stored for each item. In the example of FIG. 7, multiple set values ​​are stored for one item. For example, two set values ​​may be stored for one item, such as an upper limit and a lower limit. In the example of FIG. 5, the validity information for names 1, 3, and 4 is set to "valid", and the validity information for names 2 and 5 is set to "invalid".

[0068] The recipe file may also include processing conditions for performing substrate processing, alarm conditions that define upper and lower limit values ​​of the setting values ​​of the items, and processing to be performed when the upper and lower limit values ​​of the setting values ​​of the items are exceeded. While an example is shown in Fig. 7 in which validity information and setting values ​​for each item are stored, for each item, for example, an alarm processing such as error processing, output of an alarm, or ending substrate processing according to the recipe when the upper and lower limit values ​​are exceeded (end of recipe) may be further stored (see Fig. 5).

[0069] The counting unit 107 counts the validity information recorded in the recipe file for each category (subcategory) and counts the number of items included in each category (subcategory) whose validity information is set to "valid." Furthermore, the counting unit 107 counts, for each group, the total number of items whose validity information is set to "valid" among the items included in all categories of each group as the number of items that are valid for the group.

[0070] The display unit 204 displays each category displayed in the category selection area 51 so that it is possible to recognize whether the set value of the item included in the category is valid or not based on the validity information. That is, the display mode is made different between when the set value of the item included in the category is valid and when the set value of the item included in the category is not valid. Specifically, for each of the categories displayed in the category selection area 51, the counting unit 107 determines whether the set value of the item included in each category is valid or not based on the validity information. For example, as shown in FIG. 5, if there is a valid item in the category, the category name is underlined, and if there is no valid item in the category, the category name is not underlined. Alternatively, the color of the category name may be changed depending on whether there is a valid item in the category, or the category name may be displayed in a blinking manner when there is a valid item in the category. Furthermore, as shown in FIG. 5, it is preferable to display the number of valid items in the category counted by the counting unit 107 next to the category name. The above display format is merely an example, and the category name may be displayed in any suitable display format that allows the user to distinguish whether or not the category contains valid items.

[0071] As for subcategories, similarly to categories, the names of the subcategories are displayed so that it is possible to recognize whether the setting values ​​of the items included in the subcategories are valid or not. As this is the same as the display mode of the category names, a detailed description will be omitted.

[0072] Furthermore, the display unit 204 displays each of the groups displayed in the group display area 50 so that it can be recognized whether the set values ​​of the items included in the multiple categories of the group are valid or not based on the validity information. That is, the display mode of the group name in the group display area 50 is made different between when the items included in the categories of the group include valid items and when the items included in the categories of the group do not include valid items. Specifically, for each of the groups displayed in the group display area 50, the counting unit 107 determines whether there are valid items in all the categories of each group from the values ​​counted based on the validity information. For example, as shown in FIG. 5, when there are valid items in the group, the group name is underlined, and when there are no valid items in the group, the group name is displayed without being underlined. Alternatively, the color of the group name may be changed depending on whether there are valid items in the group, or when there are valid items in the group, the group name may be displayed in a flashing manner. 5, if there are valid items, it is desirable to display the number of valid items in the group, counted by counting unit 107, next to the group name. The above display format is an example, and the group name may be displayed in an appropriate display format that allows distinction as to whether or not there are valid items in the group.

[0073] In the example of FIG. 5, the group display area 50 indicates that eleven items in group 1 are valid and five items in group 3 are valid. The group display area 50 also indicates that group 1 is selected, and the category selection area 51 displays the category of group 1. The category selection area 51 also indicates that four items in category 1 of group 1 are valid, two items in category 3 of group 1 are valid, and five items in category 4 of group 1 are valid. The category selection area 51 also indicates that category 1 is selected, and furthermore, the subcategories of category 1 are displayed in the lower part of the category selection area 51. It also indicates that one item in subcategory 1 of category 1 is valid, and three items in subcategory 3 of category 1 are valid. The category selection area 51 also indicates that subcategory 3 is selected, and the category editing area 52 displays the validity information and the setting value of the items in subcategory 3 of the selected category 1.

[0074] Next, the flow of processing by the display processing device will be described with reference to the flowchart in FIG.

[0075] After the display device 106 is started, for example, when recipe editing is selected by the operation unit 203, the display processing device 106 reads out the recipe file stored in the storage unit 104 and expands it on the memory 103 (step S101). Next, the group names included in the recipe file are read out, and the display unit 204 displays a list of the group names in the group display area 50 of the screen (step S102), and displays the category name and subcategory name of the group selected as the default, for example, group 1, in the category selection area 51 and the category editing area 52 (step S103), and further displays a list of validity information and setting values ​​of items in subcategory 1 of category 1 in the category editing area 52 (step S104). Next, the counting unit 107 counts the number of enabled items for each group, category, and subcategory (step S105), and the display unit 204 displays the category names of categories and subcategory names with enabled items underlined in the category selection area 51, and changes the number of enabled items beside the category names and subcategory names to the number counted by the counting unit 107 (step S106). Here, the underline is hidden for the category names of categories and subcategory names with no enabled items, and the number of items in the category names and subcategory names is hidden. Note that the number of items in the category names and subcategory names of categories with no enabled items may be displayed as, for example, "0", as long as they can be distinguished from categories and subcategories with enabled items. Furthermore, the display unit 204 displays in the group display area 50 the group names of groups that include categories with enabled items underlined, and changes the number of enabled items beside the group names to the number newly counted by the counting unit 107 (step S107). Here, the underline is not displayed for group names of groups that have no enabled items. Also, the number of enabled items is not displayed beside the group names. Note that when there are no enabled items, for example, "0" may be displayed, as long as it is possible to distinguish the group from groups that have enabled items.

[0076] Next, it is determined whether or not an instruction (operation input) to select a group from the list of groups displayed in the group display area 50 has been given from the operation unit 203 (step S108). In order to check the edited validity information and setting values, the worker selects the group to be checked from the underlined groups in FIG. 5. For example, when an instruction to select group 3 is given from the operation unit 203 (step S108-YES), the display unit 204 switches the category selection area 51 to display the category of group 3 (step S103). Furthermore, the display unit 204 displays the items and setting values ​​of the categories included in group 3 in the category editing area 52 (step S104). FIG. 9 shows an example of the screen when group 3 is selected.

[0077] If the operation input from the operation unit 203 made subsequently is not a selection instruction to select a group, the process proceeds to a judgment as to whether or not a selection instruction to select a category has been made (step S108--NO, step S109). Since the worker wants to display and check the items that are enabled among many items, the worker selects, for example, category 3, which has an underlined category name, from among the category names displayed in the upper part of the category selection area 51 (see FIG. 9). When category 3 is selected, the subcategories displayed in the lower part of the category selection area 51 are switched to the subcategory names of category 3. Therefore, by selecting subcategory 3, which has an underlined subcategory name, from among the subcategories displayed in the lower part of the category selection area 51 (step S109--YES), the enabled / disabled information and the set values ​​of the items included in subcategory 3 of the selected category 3 are displayed in the category editing area 52 (step S104). Every time a group selection instruction or a category selection instruction is made, the processes from step S104 to step S109 are repeated.

[0078] As described above, the group names, category names, and subcategory names that include items with enabled setting values ​​are underlined, and by selecting an underlined group name, category name, or subcategory name, a list of items that include enabled setting values ​​can be displayed in category editing area 52, allowing you to quickly check the enabled setting values.

[0079] Next, the validity information of the items displayed in the category editing area 52 is edited. It is determined whether or not an editing operation (operation input) for editing the validity information displayed in the category editing area 52 has been performed from the operation unit 203 (step S110). The system waits for input until an editing operation is performed (step S110-NO), and when an editing operation is performed (step S110-YES), the validity information is changed in accordance with the editing operation (step S111). Alternatively, the setting value or the contents of the error processing may also be edited as necessary. Note that if an instruction to select a group or a category is given while waiting for input of the editing operation, the display of the category selection area 51 and the category editing area 52 is switched as described above.

[0080] The processes of steps S103 to S111 are repeated until the "Save" button in command selection area 53 on the screen is pressed from operation unit 203 (step S112-NO). When the "Save" button in command selection area 53 on the screen is pressed from operation unit 203, it is determined that editing has ended (step S112-YES), and a recipe file including validity information and setting values ​​is stored in storage unit 104 (step S113).

[0081] As described above in detail, in this embodiment, the category selection area 51 on the screen displays whether any of the items included in each of a plurality of categories have enabled settings, making it possible to select a category that has enabled items and display the items and their settings in the category editing area 52, thereby improving the work efficiency of the operator and preventing erroneous editing. It also becomes easy to check under what conditions an enabled item will generate an alarm.

[0082] Furthermore, when applied to substrate processing equipment, by dividing the categories into, for example, "temperature," "gas flow rate," "pressure," etc., only related items can be displayed, thereby preventing operators from making incorrect settings.

[0083] Next, a process of executing a recipe and performing substrate processing after saving a recipe file will be described with reference to the flowchart of FIG.

[0084] First, one of the groups is selected from the saved recipe files as a recipe to be executed for substrate processing (step S201). When the recipe execution program is started, the control unit 101 shown in FIG. 3 functions as a control execution unit. Also, the setting values ​​and valid / invalid information of each item included in the category of the group stored in the recipe file are loaded onto the memory 103, and the control execution unit executes each step of the substrate processing according to the recipe (step S202), and outputs a control signal from the control device 100 of the substrate processing apparatus 1 to each control unit of the process control unit 205 and the transfer control unit 206 (step S203). The transfer control unit 206 controls the rotation unit 210, the lift unit 211, and the transfer unit 212 to transfer the wafer 18 to the waiting unit 27, the processing furnace 28, and the processing chamber 29. Meanwhile, the process control unit 205 controls the temperature control unit 207, the gas flow rate control unit 208, and the pressure control unit 209 to control the temperature, the flow of the processing gas, and the pressure. Furthermore, when the temperature control unit 207, the gas flow rate control unit 208, and the pressure control unit 209 detect that the temperature, the gas flow rate, or the pressure exceeds the upper limit or the lower limit for which the validity information of each item specified in the recipe is valid, an alarm process is executed. When all the steps are completed, the substrate processing ends.

[0085] The configurations of the display processing device and the substrate processing device described in the above embodiments are merely examples, and may be changed according to circumstances without departing from the spirit of the invention.

[0086] Furthermore, the process flow described in the above embodiment is also one example, and unnecessary steps may be deleted, new steps may be added, or the process order may be changed, without departing from the spirit of the invention.

[0087] In the above embodiment, the processing according to the embodiment is realized by a software configuration using a computer by executing a program, but the present invention is not limited to this. The embodiment may be realized by, for example, a hardware configuration or a combination of a hardware configuration and a software configuration.

[0088] The present disclosure can be applied not only to substrate manufacturing equipment for semiconductor manufacturing, but also to equipment for processing glass substrates, such as LCD (Liquid Crystal Display) manufacturing equipment, and other substrate manufacturing equipment. The contents of the substrate processing may be not only film formation processing for forming CVD (Chemical Vapor Deposition), PVD (Physical Vapor Deposition), epitaxial growth film, oxide film, nitride film, metal-containing film, etc., but also annealing processing, oxidation processing, diffusion processing, etching processing, exposure processing, lithography, coating processing, molding processing, development processing, dicing processing, wire bonding processing, inspection processing, etc.

[0089] In the above-mentioned embodiment, an example of forming a film using a batch-type substrate processing apparatus that processes multiple substrates at a time has been described. The present disclosure is not limited to the above-mentioned embodiment, and can be suitably applied to, for example, a case where a film is formed using a single-wafer type substrate processing apparatus that processes one or several substrates at a time. Also, in the above-mentioned embodiment, an example of forming a film using a substrate processing apparatus having a hot-wall type processing furnace has been described. The present disclosure is not limited to the above-mentioned embodiment, and can be suitably applied to, for example, a case where a film is formed using a substrate processing apparatus having a cold-wall type processing furnace.

[0090] When using these substrate processing apparatuses, each process can be performed according to the same process procedures and under the same process conditions as in the above-mentioned aspects and modifications, and the same effects as in the above-mentioned aspects and modifications can be obtained. [Explanation of symbols]

[0091] 104 Storage section 203 Operation section 204 Display section

Claims

1. a storage unit that classifies substrate processing conditions into a plurality of categories, and stores a file having a plurality of items provided for each of the categories, setting values ​​for the items, and validity information indicating whether the setting values ​​for the items are valid; a display unit that displays the validity information and the setting value of the items classified into the categories on a screen for each of the categories; an operation unit for editing the validity information displayed on the screen; A display processing device comprising:

2. The file has a plurality of groups, the group includes processing conditions for the substrate that are classified into the plurality of categories; The display unit displays the validity information of the plurality of items included in the plurality of categories of one of the groups on the screen in an editable manner for each of the categories. The display processing device according to claim 1 .

3. the display unit provides a group display area on the screen for displaying a list of the plurality of groups; For each of the groups displayed in the group display area, whether or not the items included in the categories of the group include a valid item is displayed in a recognizable manner based on the validity information. The display processing device according to claim 2 .

4. the display unit provides a category selection area on the screen that selectably displays any one of the plurality of categories; For each of the categories displayed in the category selection area, whether or not the items included in the category include a valid item is displayed in a recognizable manner based on the validity information. The display processing device according to claim 1 .

5. The display unit displays a category editing area in which the validity information of the plurality of items included in the selected category is displayed in an editable manner in response to an operation input of the operation unit to select one of the plurality of categories displayed in the category selection area. The display processing device according to claim 4.

6. The display unit displays, for each of the categories displayed in the category selection area, the number of valid items among the validity information of the items included in the category. The display processing device according to claim 4.

7. The display unit displays, for each of the groups displayed in the group display area, the number of valid items among the validity information of the items included in the category of the group. The display processing device according to claim 3 .

8. When the category displayed in the category selection area includes an item for which the validity presence information is valid, the display unit displays a category name of the category displayed in the category selection area in a display mode different from a category name of the category that does not include an item for which the validity presence information is valid.

5. The display processing device according to claim 4.

9. The display unit underlines the category name of a category having an item for which the validity information is valid, among the categories displayed in the category selection area. The display processing device according to claim 8.

10. When the group displayed in the group display area has an item for which the validity presence information of the item included in the category of the group is valid, the display unit displays a group name of the group displayed in the group display area in a display mode different from a group name of a group for which the group does not have an item for which the validity presence information of the item included in the category of the group is valid.

4. The display processing device according to claim 3.

11. The display unit underlines the group name of a group that includes an item whose validity information is valid and is included in the category, among the groups displayed in the group display area. The display processing device according to claim 10.

12. The file includes processing conditions for processing the substrate, alarm conditions that define upper and lower limit values ​​of the setting values ​​of the items, and an alarm that is executed when the setting values ​​of the items exceed the upper and lower limit values. The display processing device according to claim 1 .

13. A display processing device according to claim 1 ; a control unit capable of controlling processing of the substrate using the file; The substrate processing apparatus includes:

14. classifying substrate processing conditions into a plurality of categories, and storing a file having a plurality of items provided for each of the categories, setting values ​​for the items, and validity information indicating whether the setting values ​​for the items are valid; displaying the validity information classified by category on a screen for each category; performing an editing operation of the validity information displayed on the screen; A display method having the following structure:

15. Processing the substrate with the file of claim 14; The method for processing a substrate further comprises:

16. Processing the substrate with the file of claim 14; The method for manufacturing a semiconductor device further comprises:

17. a step of classifying substrate processing conditions into a plurality of categories, and storing a file having a plurality of items provided for each of the categories, setting values ​​for the items, and validity information indicating whether the setting values ​​for the items are valid; a step of displaying the validity information classified by category on a screen for each category; a step of editing the validity information displayed on the screen; A program that causes a computer to execute the following.

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