Robot, method for controlling the same, drive device, method for controlling the same, method for manufacturing article, program, and recording medium

Abstract

To provide a robot capable of suppressing injury of a finger due to pinching near a joint.SOLUTION: This robot comprises: a first link; and a second link supported by first and second supports included in the first link and movable at the arm about a rotation axis. Within the movable range of the arm, the inner side surface of the first support and the outer side surface of the arm are spaced apart by a prescribed distance, and the inner side surface of the second support and the outer side surface of the arm are spaced apart by a prescribed distance.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a robot having a movable part such as an arm. [Background technology]

[0002] For example, robots having movable parts such as arms are expected to perform various tasks in various places such as manufacturing lines, and inevitably, opportunities for robots and humans to come into close contact with each other are increasing. For example, when teaching an operation by so-called direct teaching, a method may be used in which a worker directly holds a movable part such as an arm and moves the robot in the same manner as when the robot operates, and the movement trajectory is registered in the control unit of the robot. In addition, for actual work other than teaching, there is an increasing need for collaborative work in which humans and robots work together in close proximity.

[0003] When a robot and a human are performing a task in close proximity to each other in this way, it is desirable, from the perspective of worker safety, to prevent the human body from becoming trapped in the operating robot.

[0004] Patent Document 1 describes an arm in which multiple links are connected. Each link has a shape in which the width in a direction intersecting the longitudinal direction increases continuously toward the rotation axis of the joint, and the structure is such that pinching is unlikely to occur even when the joint is in a position at the maximum angle within its movable range. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2020-192624 A Summary of the Invention [Problem to be solved by the invention]

[0006] In the case of a joint mechanism with a double-support structure in which the movable link is supported on both sides by the fixed link, there was a risk that an operator's fingers, for example, could be pinched between the side of the fixed link and the side of the movable link, causing damage.

[0007] The robot described in Patent Document 1 is configured to ensure a space near the center of the longitudinal direction of the links even when adjacent joints are displaced to the maximum angle. However, Patent Document 1 did not consider the possibility of fingers or other objects being pinched between the side of the fixed link and the side of the movable link near the joint of a double-supported joint.

[0008] Therefore, there has been a demand for a robot that can prevent fingers, etc. from being pinched and damaged near a joint with a double-supported structure. In addition, there has been a demand for a robot that can prevent fingers, etc. from being pinched and damaged in a joint that has a built-in torque sensor, etc., regardless of whether the joint has a double-supported structure. [Means for solving the problem]

[0009] A first aspect of the present invention is a robot comprising a first link and a second link supported by a first support part and a second support part provided on the first link, the second link having an arm movable around a rotation axis, wherein within the movable range of the arm, an inner side of the first support part and an outer side of the arm are separated by a predetermined distance, and an inner side of the second support part and an outer side of the arm are separated by a predetermined distance.

[0010] In addition, a second aspect of the present invention is a robot comprising a first link, a second link supported by the first link and rotatable around a rotation axis, and a torque sensor measuring a force applied to the second link, wherein the torque sensor comprises a primary side flange, a secondary side flange, an elastic body connecting the primary side flange and the secondary side flange, a sensor measuring the relative displacement of the secondary side flange with respect to the primary side flange, and a cylindrical cover fixed to a side of either the primary side flange or the secondary side flange.

[0011] In addition, a third aspect of the present invention is a drive device comprising a second link supported by a first support portion and a second support portion provided on a first link, the arm portion being movable around a rotation axis, and a drive portion that drives the second link, wherein, within the movable range of the arm, the inner side surface of the first support portion and the outer side surface of the arm portion are separated by a predetermined distance, and the inner side surface of the second support portion and the outer side surface of the arm portion are separated by a predetermined distance. Effect of the Invention

[0012] According to the present invention, it is possible to provide a robot that can prevent fingers or the like from being pinched and damaged near joints. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic external perspective view illustrating a robot system according to an embodiment. [Diagram 2] FIG. 1 is a schematic block diagram illustrating a control system of a robot according to an embodiment. [Diagram 3] 1A is a perspective view of the tip portion of the robot according to embodiment 1. FIG. [Figure 4] (a) A perspective view of the joint when the second link on the movable side has been rotated to its limit of motion, (b) A front view of the joint as viewed from a direction perpendicular to the rotation axis (RX), and (c) A side view of the joint as viewed from a direction along the rotation axis (RX). [Diagram 5] 10A and 10B are cross-sectional views of the stopper mechanism when the second link is rotated to its movable limit and when the second link is extended; [Figure 6] FIG. 11 is a front view of the tip portion according to the second embodiment. [Figure 7] (a) A perspective view showing a state in which the joint at the tip end according to embodiment 3 is extended, (b) A perspective view showing the appearance of the joint when the second link has been rotated to its movable limit, and (c) A front view showing the appearance of the joint when the second link has been rotated to its movable limit. [Figure 8]13(a) is a cross-sectional view of a joint of a robot according to embodiment 7. (b) is a perspective view for explaining a torque sensor. [Figure 9] 1A is an exploded perspective view illustrating a dustproof structure of a torque sensor, FIG. 1B is a cross-sectional view of an example of a torque sensor, and FIG. [Figure 10] (a) A cross-sectional view showing a preferred embodiment of the joint, (b) A cross-sectional view showing another preferred embodiment of the joint. [Figure 11] (a) is a perspective view showing a state in which the joint of the tip portion according to embodiment 4 is extended, (b) is a perspective view showing the state in which the joint of the tip portion is extended from another direction, and (c) is a perspective view showing the state in which the joint of the tip portion is extended from yet another direction. [Figure 12] (a) A perspective view showing the appearance of the joint according to embodiment 4 when the second link has been rotated to its movable limit, (b) A front view showing the appearance of the joint when the second link has been rotated to its movable limit, and (c) A cross-sectional view of the joint when the second link has been rotated to its movable limit. [Figure 13] (a) is a perspective view showing a state in which the joint of the tip portion according to embodiment 5 is extended, (b) is a perspective view showing the state in which the joint of the tip portion is extended from another direction, and (c) is a perspective view showing the state in which the joint of the tip portion is extended from yet another direction. [Figure 14] (a) is a perspective view showing a state in which the joint of the tip portion according to embodiment 6 is extended, (b) is a perspective view showing the state in which the joint of the tip portion is extended from another direction, and (c) is a perspective view showing the state in which the joint of the tip portion is extended from yet another direction. [Figure 15] FIG. 2 is an external perspective view illustrating the configuration of an operation unit. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] A robot or the like according to an embodiment of the present invention will be described with reference to the drawings. The embodiment described below is merely an example, and those skilled in the art can appropriately modify and implement the detailed configuration without departing from the spirit and scope of the present invention.

[0015] In the drawings referred to in the following description of the embodiments, elements denoted by the same reference numerals have the same functions unless otherwise noted. When a plurality of identical elements are arranged in a drawing, the reference numerals and their descriptions may be omitted.

[0016] In addition, since the drawings may be represented diagrammatically for the convenience of illustration and explanation, the shape, size, arrangement, etc. of the elements depicted in the drawings may not strictly correspond to the actual objects.

[0017] In addition, the description of "XX or more and YY or less" or "XX to YY" expressing a numerical range means a numerical range including the endpoints XX (lower limit) and YY (upper limit), unless otherwise specified. When a numerical range is described in stages, the upper and lower limits of each numerical range can be combined in any combination.

[0018] [Embodiment] First, the overall configuration of the robot and the control system will be described, and then the configuration of the joints of the robot arm will be described.

[0019] [Overall configuration of the robot] Fig. 1 is a schematic external perspective view for explaining the overall configuration of an example of a robot system according to an embodiment. As shown in Fig. 1, the robot system 100 includes a multi-joint robot 200 and a control device 300 that controls the operation of the robot 200. The robot system 100 also includes a teaching pendant 400 as a teaching device that transmits teaching data to the control device 300. The teaching pendant 400 is operated by an operator and is used to specify the operation of the robot 200 and the control device 300.

[0020] As shown in the figure, the robot 200 has a joint with a so-called double-supported structure (hereinafter, may be referred to as a double-supported joint). By providing a joint with a double-supported structure, the robot 200 can operate at high speed and with high precision.

[0021] An input unit 225 is provided on the arm tip 299 of the robot 200, which is used by an operator when teaching or operating the robot. The input unit 225 may be configured with a button, a pressure sensor, a stick, or the like that an operator can touch to input information. Information (e.g., a command) input via the input unit 225 is transmitted to the control device 300, and the control device 300 controls the operation of the robot 200 based on the information input by the operator. In the illustrated example, the input unit 225 is disposed near a joint of the arm tip 299 in consideration of operability in an operation in which an operator holds the arm tip 299 and performs direct teaching. However, the installation position of the input unit 225 is not limited to this example, and the input unit 225 may be provided on another part of the robot arm, or may be disposed in a plurality of locations.

[0022] For example, using a direct teach function, a human may teach the posture of the robot 200 while touching the robot 200. When changing the posture of the robot 200, the worker may, for example, grasp and operate the arm tip 299, and at that time, the worker may change the posture of the robot 200 while operating the input unit 225. As will be described later, the robot of this embodiment is provided with a robot arm having a structure that makes it difficult for fingers to be pinched, even when the worker performs such an operation.

[0023] [Control System] Next, a control system for controlling the robot 200 will be described. Fig. 2 is a schematic block diagram showing a control system for a robot according to an embodiment. The control device 300 is configured as a computer, and includes a CPU 301 (Central Processing Unit) as a control unit (processing unit). The control device 300 also includes a ROM 302 (Read Only Memory), a RAM 303 (Random Access Memory), and a HDD 304 (Hard Disk Drive) as storage units. The control device 300 also includes a recording disk drive 305, and various interfaces 306 to 309.

[0024] A ROM 302, a RAM 303, a HDD 304, a recording disk drive 305, and various interfaces 306 to 309 are connected to the CPU 301 via a bus 310. Basic programs such as a BIOS are stored in the ROM 302. The RAM 303 is a storage device that temporarily stores various data such as the results of calculations performed by the CPU 301.

[0025] The HDD 304 is a storage device that stores the results of the arithmetic processing of the CPU 301 and various data acquired from the outside, and also records a program 330 for causing the CPU 301 to execute arithmetic processing, which will be described later. The CPU 301 executes each step of the robot control method based on the program 330 recorded (stored) in the HDD 304. The recording disk drive 305 can read various data, programs, and the like recorded on a recording disk 331 .

[0026] The teaching pendant 400 is connected to the interface 306. The CPU 301 receives teaching data from the teaching pendant 400 via the interface 306 and the bus 310.

[0027] The motor control unit 240 is connected to an interface 309. The CPU 301 acquires detection results from each sensor unit via the motor control unit 240, the interface 309, and the bus 310. The CPU 301 also outputs torque command value data for each joint to the motor control unit 240 via the bus 310 and the interface 309 at predetermined time intervals. The motor control unit 240 sends drive control signals to the servo motors 201 to 206 as drive units provided in each joint of the robot arm, and the operation of each joint is controlled.

[0028] A monitor 321 is connected to the interface 307, and various images are displayed on the monitor 321 under the control of the CPU 301. The interface 308 is configured to be connectable to an external storage device 322, which is a storage unit such as a rewritable non-volatile memory or an external HDD.

[0029] The torque command value for each joint calculated by CPU 301 is determined with reference to the angle of the robot joint. The angles of the robot joints that would trap a finger are stored in advance, so a torque command value that would cause an operation exceeding this angle is not usually output. However, if the components or programs that make up control device 300 go out of control, there remains the possibility that the robot joints will be driven into a position that traps a finger. For this reason, the robot of this embodiment is provided with joints that are designed to prevent fingers from being pinched even if the robot arm goes out of control, as described below.

[0030] [Embodiment 1] Fig. 3(a) is a perspective view of an arm tip 299 of the robot 200 according to the first embodiment, and Fig. 3(b) is a front view of the arm tip 299. These show a state in which the joint of the arm tip 299 is extended (not bent). A first link 210 on the fixed side and a second link 220 on the movable side are arranged on the arm tip 299.

[0031] First link 210 has a U-shaped double-supported structure made up of support parts 211 and 212 that hold second link 220, and base part 213 that connects these support parts. Second link 220 has a cylindrical part 221 and an arm part 222, and cylindrical part 221 is supported from both sides (double-supported) by support parts 211 and 212 of first link 210. Second link 220 is supported rotatably with respect to first link 210.

[0032] A structure for preventing fingers or the like from being pinched and damaged will be described with reference to Fig. 3(b). The rotation axis of the joint is designated as RX. For the first link 210 on the fixed side and the second link 220 on the movable side, the direction along the rotation axis RX is called the width direction of the link, and the direction perpendicular to the rotation axis RX is called the longitudinal direction of the link. The center line of the link in the width direction is designated as WX.

[0033] In the direction parallel to the rotation axis RX, the inner side surfaces of the support portions 211 and 212 that are disposed opposite to each other on both sides with the cylindrical portion 221 therebetween are arranged at a distance a from the center in the width direction. Further, in the direction parallel to the rotation axis RX, the outer side surface of the arm portion 222 of the second link 220 is arranged at a distance b from the center in the width direction. In FIG. 3(b), for the sake of illustration, only the distances a and b are shown on the support portion 211 side, but the distances on the support portion 212 side are the same.

[0034] In the present embodiment, the shapes of the respective parts are configured such that b < a. In particular, in order to prevent pinching that may damage the operator's finger during direct teaching work or when operating the input unit 225, the shapes of the respective parts are set such that (a - b)> 25 mm is satisfied throughout the movable range of the second link 220. Considering the thickness of a realistic human finger and the thickness of a glove when wearing a glove, it is desirable to make the distance between the inner side surface of the support portion of the fixed-side link and the outer side surface of the movable-side link larger than 25 mm as a predetermined distance. This is because if the distance is made larger than 25 mm, even if a finger enters that space, it is possible to suppress the finger from being pinched and damaged. Also, if the distance is made too large, the robot may become larger in size and it may become impossible to place objects around it. Also, if the distance is made too large, the movable range of the joint may become narrow. Considering these, it is more desirable to make the distance larger than 25 mm and 40 mm or less, including the embodiments described later.

[0035] As described above, the present embodiment has a structure capable of suppressing the occurrence of finger damage due to pinching between the support portion 211 or the support portion 212 of the fixed-side first link 210 and the arm portion 222 of the movable-side second link 220 in the joint of the double-arm structure.

[0036] Next, a structure for suppressing the occurrence of injury to fingers or the like due to pinching between the base 213 connecting the two support parts of the first link 210 on the fixed side and the arm part 222 of the second link 220 on the movable side in a joint with a double-support structure will be described. Figures 4(a) to 4(c) show the appearance of the joint in a state in which the second link 220 on the movable side has rotated to its movable limit. Figure 4(a) is a perspective view, Figure 4(b) is a front view seen from a direction perpendicular to the rotation axis (RX), and Figure 4(c) is a side view seen from a direction along the rotation axis (RX) of the joint. Note that, for convenience of illustration, Figure 4(c) shows only the outline of the outer shape. Also, it can be said that Figure 4(c) shows a schematic outline of the outer shape that appears in a cross section when cut along the line AA in Figure 4(b). Note that 230 indicates the end of the cylindrical part 221 of the second link 220, that is, the boundary between the cylindrical part 221 and the first link 210.

[0037] Cylindrical portion 221 of second link 220 is rotatably supported by support portions 211 and 212 via bearings (not shown), and is driven by a drive portion (motor, reducer, etc.) that is not visible from the outside. Each figure shows a state in which arm portion 222 of second link 220 has rotated to the limit of movement (to the end of the movable range) in the forward direction on the paper surface of FIG. 4(a).

[0038] As shown in FIG. 4(b), even at the limit of movement, a gap larger than 25 mm is secured between support portion 211 of first link 210 on the fixed side and arm portion 222 of second link 220 on the movable side, and between support portion 212 of first link 210 and second link 220.

[0039] 4(c), a distance Y is ensured between the base 213 of the first link 210 on the fixed side and the arm 222 of the second link 220 on the movable side. In this embodiment, the distance Y is also set to be greater than 25 mm to prevent damage to fingers, etc., due to pinching. In other words, when the arm 222 rotates to the limit of movement, the arm 222 and the base 213 face each other at a distance exceeding 25 mm.

[0040] Next, the stopper mechanism will be described. In this embodiment, a stopper mechanism is provided to prevent the second link 220 on the movable side from rotating beyond the movable limit, and the stopper mechanism is built into the joint to prevent the operator's fingers from being pinched between the stopper mechanism and the second link 220. A specific description will be given with reference to Figs. 5(a) and 5(b). In order to show the internal structure in the vicinity of the boundary 230, cross sections cut along line BB in Fig. 4(b) are shown in Figs. 5(a) and 5(b). Fig. 5(a) shows a state in which the second link 220 on the movable side has rotated to the movable limit as shown in Fig. 4(c), and Fig. 5(b) shows a state in which the second link 220 on the movable side has been extended (not bent) as shown in Fig. 3(a).

[0041] On the second link 220 side, a C-shaped groove 223 is formed along a part of the circumference centered on the rotation axis (RX) of the joint, and a boss 314 is formed on the support part 211 facing this. The groove 223 and the boss 314 are engaged with each other. As shown in Fig. 5(a), when the movable limit is reached, the boss 314 and the end of the groove 223 butt against each other, stopping the pivoting movement of the arm part 222.

[0042] Therefore, according to this embodiment, even if the robot control device goes out of control, the distance Y greater than 25 mm can be ensured as shown in Fig. 4(c). Also, as shown in Fig. 5(b), during normal operation, the stopper mechanism is not exposed to the outside of the joint, so that the operator's fingers, etc. will not be caught in the stopper mechanism.

[0043] Incidentally, boss 314 may be disposed on the second link 220 side, and C-shaped groove 223 may be formed on the support portion 211 side. A slit may be formed instead of a groove (recess). Also, instead of engaging a boss (protrusion) with a groove (recess), a protrusion may be provided on each of second link 220 and support portion 211, and the protrusions may butt against each other at the limit of movement.

[0044] In addition, although the case has been described where the stopper mechanism is provided on the support portion 211 side of the double-supported support portion, the stopper mechanism may be provided on the support portion 212 side, or the stopper mechanism may be provided on both the support portion 211 side and the support portion 212 side.

[0045] According to this embodiment, in a robot having a joint with a double-support structure in which a fixed link supports a movable link from both sides, the risk of an operator's fingers, etc. being pinched and damaged between the side of the fixed link and the side of the movable link can be significantly reduced. Even when the movable second link 220 is at its limit of movement, the risk of an operator's fingers, etc. being pinched and damaged between the base 213 of the fixed first link 210 and the arm 222 of the movable second link 220 can be significantly reduced. In addition, since a stopper mechanism for preventing the movable link from rotating beyond its limit of movement is built-in and not exposed, the risk of an operator's fingers, etc. being pinched and damaged by the stopper mechanism can be significantly reduced.

[0046] In this embodiment, the arm tip 299 (FIG. 1) where the operator's fingers are likely to get caught has been described as an example, but the present invention may be applied to any joint that is a joint of a double-supported structure that constitutes a robot arm. The joint of this embodiment can drive a robot arm while significantly reducing the risk of an operator's fingers getting caught and damaged, and therefore can be considered as a driving device for a robot with high safety.

[0047] [Embodiment 2] A second embodiment will be described, but the description of matters similar to the first embodiment will be simplified or omitted. In the first embodiment, the difference between the distance a from the center line WX in the width direction of the link to the support portion 211 (support portion 212) and the distance b from the center line WX to the outer surface of the arm portion 222 of the second link 220 is configured to exceed 25 mm. In the present embodiment, (ab)>25 mm is ensured as in the first embodiment, but in this embodiment, the rigidity (mechanical strength) of the first link 210 is improved without increasing the outer dimension of the first link 210 in the width direction.

[0048] This embodiment will also be described using the arm tip 299 (FIG. 1) as an example where the operator's fingers are likely to get caught, but the present invention may be applied to any joint that constitutes a robot arm and has a double-supported structure.

[0049] Fig. 6 is a front view of an arm tip 299 according to embodiment 2. As with Fig. 3(b) referred to in the description of embodiment 1, this shows a state in which the joint of the arm tip 299 is extended (not bent).

[0050] In this embodiment as well, (ab)>25 mm, and a space exceeding 50 mm in total is secured on both sides of arm portion 222 of second link 220, but the position of boundary 230 is closer to center line WX in the width direction than in embodiment 1. Boundary 230 is the end of cylindrical portion 221 of second link 220, i.e., the boundary between cylindrical portion 221 and the member on the first link 210 side. By moving boundary 230 closer to the width center of second link 220, it is possible to ensure thickness c of first link 210 near boundary 230, and it is possible to improve rigidity, particularly against torsion.

[0051] If boundary 230 were to be brought closer to the width center of second link 220 than outer surface d of arm portion 222 of second link 220, the torsional rigidity could be further improved, but the structure would be prone to fingers and the like becoming entangled. Therefore, in this embodiment, boundary 230 and outer surface d are aligned to improve the rigidity of the fixed link while preventing fingers and the like from becoming entangled.

[0052] According to this embodiment, in a robot having a joint with a double-support structure in which a fixed link supports a movable link from both sides, the risk of an operator's fingers, etc. being pinched and damaged between the side of the fixed link and the side of the movable link can be significantly reduced. Even when the movable second link 220 is at its limit of movement, the risk of an operator's fingers, etc. being pinched and damaged between the base 213 of the fixed first link 210 and the arm 222 of the movable second link 220 can be significantly reduced. In addition, since the stopper mechanism for preventing the movable link from rotating beyond its limit of movement is not exposed, the risk of an operator's fingers, etc. being pinched and damaged can be significantly reduced.

[0053] Furthermore, according to this embodiment, the torsional rigidity of the joints, which tends to be weak especially in vertical articulated robots, can be improved, and the control gain of precision positioning and impedance control using torque sensors can be significantly improved by more than three times. As a result, for example, when using robots in production work, it is possible to shorten the cycle time, thereby improving productivity.

[0054] [Embodiment 3] The third embodiment will be described, but the description of the same matters as those of the first or second embodiment will be simplified or omitted. In the first embodiment, the difference between the distance a from the center line WX in the width direction of the link to the support 211 (support 212) and the distance b from the center line WX to the outer surface of the arm 222 of the second link 220 is set to exceed 25 mm. In addition, when the second link 220 moves to the movable limit, a distance Y exceeding 25 mm is set to be secured between the base 213 of the first link 210 on the fixed side and the arm 222 of the second link 220 on the movable side. In the third embodiment, (ab)>25 mm and Y>25 mm are secured as in the first embodiment, but in the third embodiment, high torsional rigidity is realized by devising the shapes of the base 213, the support 211, and the support 212 of the first link 210.

[0055] In this embodiment, the arm tip 299 (FIG. 1) where the operator's fingers are likely to get caught will be described as an example, but the present invention may be implemented in any joint (e.g., the second joint) that constitutes a robot arm and has a double-support structure.

[0056] Fig. 7(a) is a perspective view of an arm tip 299 according to embodiment 3. As with Fig. 3(a) referred to in the description of embodiment 1, this shows a state in which the joint of the arm tip 299 is extended (not bent). Fig. 7(b) and Fig. 7(c) show the appearance of the joint in a state in which the second link 220 on the movable side has rotated to its movable limit, Fig. 7(b) is a perspective view, and Fig. 7(c) is a front view seen from a direction perpendicular to the rotation axis (RX).

[0057] With reference to the posture when the movable limit is reached as shown in FIG. 7(b), the shapes of the arm 222 of the second link 220 and the base 213, support 211, and support 212 of the first link 210 will be described. In this embodiment, when the arm 222 having a smooth outer surface of a substantially cylindrical shape is moved to the movable limit, a space of Y>25 mm is formed along a smooth curved surface between the base 213, support 211, and support 212 of the first link 210 and the arm 222 on the movable side. The support 211 and support 212 of the first link 210 form a smooth curved outer surface connected by the base 213, so that the thickness e of the joint between the base 213, support 211, and support 212 shown in FIG. 7(b) can be increased. This can significantly improve the torsional rigidity. Furthermore, if the distance Y between arm portion 222 and base portion 213, support portion 211, and support portion 212 is configured to be constant, the stress can be dispersed in the event that an object is pinched, thereby reducing damage to the object or robot.

[0058] According to this embodiment, in a robot having a joint with a double-support structure in which a fixed link supports a movable link from both sides, the risk of an operator's fingers, etc. being pinched and damaged between the side of the fixed link and the side of the movable link can be significantly reduced. Even when the movable second link 220 is at its limit of movement, the risk of an operator's fingers, etc. being pinched and damaged between the base 213 of the fixed first link 210 and the arm 222 of the movable second link 220 can be significantly reduced. In addition, since the stopper mechanism for preventing the movable link from rotating beyond its limit of movement is not exposed, the risk of an operator's fingers, etc. being pinched and damaged can be significantly reduced.

[0059] Furthermore, according to this embodiment, the torsional rigidity of the joints, which tends to be weak especially in vertical articulated robots, can be improved, and the control gain of precision positioning and impedance control using torque sensors can be significantly improved by more than four times. As a result, for example, when using robots in production work, it is possible to shorten the cycle time, thereby improving productivity.

[0060] [Embodiment 4] The fourth embodiment will be described, but the description of the same matters as those of the first to third embodiments will be simplified or omitted. In the first embodiment, the difference between the distance a from the center line WX in the width direction of the link to the support 211 (support 212) and the distance b from the center line WX to the outer surface of the arm 222 of the second link 220 is configured to exceed 25 mm. In addition, when the second link 220 moves to the movable limit, a distance Y exceeding 25 mm is secured between the base 213 of the first link 210 on the fixed side and the arm 222 of the second link 220 on the movable side. In the fourth embodiment, (ab)>25 mm and Y>25 mm are secured as in the first embodiment, but in the fourth embodiment, a reinforcing plate (reinforcing member) is provided in the first link 210 to improve the collapse rigidity.

[0061] This embodiment will also be described using the arm tip 299 (FIG. 1) as an example where the operator's fingers are likely to get caught, but the present invention may be applied to any joint that constitutes a robot arm and has a double-supported structure.

[0062] Figures 11(a) to 11(c) are external views seen from different directions in a state in which the joint of the arm tip portion 299 according to embodiment 4 is extended (not bent). Figures 12(a) to 12(c) show a state in which the joint of the arm tip portion 299 according to embodiment 4 is rotated to its movable limit, with Figure 12(a) being a perspective view, Figure 12(b) being a front view seen from a direction perpendicular to the rotation axis (RX), and Figure 12(c) being a cross-sectional view.

[0063] In this embodiment, a reinforcing plate 214 is added to the first link 210. The reinforcing plate 214 improves the collapse rigidity of the double-supported structure. Specifically, when a force is applied to the first link 210 or the second link 220 from the right side in FIG. 11(a), deformation can be suppressed by providing the reinforcing plate 214 protruding toward the cylindrical portion 221. This improves the accuracy of the hand position of the robot.

[0064] 12(c), also in this embodiment, a space of distance Y (>25 mm) is secured between base 213 of first link 210 on the fixed side and arm 222 of second link 220 on the movable side. In this embodiment, even if an operator's finger or the like gets into the space of distance Y, the space of distance Y becomes a dead end due to the presence of reinforcing plate 214 protruding toward cylindrical portion 221, so that the finger will not get into the other side of the joint, thereby improving safety.

[0065] According to this embodiment, in a robot having a joint with a double-support structure in which a fixed link supports a movable link from both sides, the risk of an operator's fingers, etc. being pinched and damaged between the side of the fixed link and the side of the movable link can be significantly reduced. Also, even when the movable second link 220 is at the limit of movement, the risk of an operator's fingers, etc. being pinched and damaged between the base 213 of the fixed first link 210 and the arm 222 of the movable second link 220 can be significantly reduced. Furthermore, in this embodiment, the reinforcing plate is provided to limit the depth of the space between the base 213 of the fixed first link 210 and the arm 222 of the movable second link 220, so that the fingers do not get into the other side of the joint, and safety is high. Also, since the stopper mechanism for preventing the movable link from rotating beyond the limit of movement is not exposed, the risk of an operator's fingers, etc. being pinched and damaged can be significantly reduced.

[0066] Furthermore, according to this embodiment, the tilt rigidity of the joints, which tend to be weak especially in vertical articulated robots, can be improved by using reinforcing plates, thereby improving the accuracy of the robot's hand position and enabling precision work to be performed safely and with high accuracy.

[0067] [Embodiment 5] The fifth embodiment will be described, but the description of the same matters as those of the first to fourth embodiments will be simplified or omitted. In the first embodiment, the difference between the distance a from the center line WX of the link in the width direction to the support 211 (support 212) and the distance b from the center line WX to the outer surface of the arm 222 of the second link 220 was set to exceed 25 mm. In addition, when the second link 220 moves to the movable limit, a distance Y exceeding 25 mm is set to be secured between the base 213 of the first link 210 on the fixed side and the arm 222 of the second link 220 on the movable side. In the fifth embodiment, (ab)>25 mm and Y>25 mm are secured as in the first embodiment.

[0068] In the fifth embodiment, of the joints of the double-support structure constituting the robot arm, a joint (e.g., a third joint) connected to the middle part of the robot arm instead of the tip part is taken as an example. This embodiment is common to the fourth embodiment in that a reinforcing plate is provided to improve the toppling rigidity, but the reinforcing plate (reinforcing member) is provided on the cylindrical part 221 of the second link 220, and the shape is different.

[0069] 13(a) to 13(c) are external perspective views of the arm tip 299 according to the fifth embodiment in a state in which the joint is extended (not bent), as viewed from different directions. In this embodiment, the reinforcing plate 224 has a sloped portion that abuts against or is close to the first link 210. When the reinforcing plate 224 abuts against or is close to the first link 210, the angle between the reinforcing plate 224 and the first link 210 becomes an obtuse angle. This sloped shape allows a finger or the like to be pushed out when it comes into contact with the first link 210, thereby improving the effect of preventing entrapment.

[0070] According to this embodiment, in a robot having a joint with a double-support structure in which a fixed link supports a movable link from both sides, the risk of an operator's fingers, etc. being pinched and damaged between the side of the fixed link and the side of the movable link can be significantly reduced. Also, even when the movable second link 220 is at the limit of movement, the risk of an operator's fingers, etc. being pinched and damaged between the base 213 of the fixed first link 210 and the arm 222 of the movable second link 220 can be significantly reduced. Furthermore, in this embodiment, a reinforcing plate with a slope shape is provided on the second link, so that a finger, etc. can be pushed out when it comes into contact with it, thereby improving the effect of preventing entrapment. Also, since the stopper mechanism for preventing the movable link from rotating beyond the limit of movement is not exposed, the risk of an operator's fingers, etc. being pinched and damaged can be significantly reduced.

[0071] Furthermore, according to this embodiment, the collapse rigidity of the joints, which tends to be weak particularly in vertical articulated robots, can be improved by using reinforcing plates, thereby improving the accuracy of the robot's hand position and enabling precision work to be performed safely.

[0072] [Embodiment 6] A sixth embodiment will be described, but the description of matters similar to any of the above-mentioned embodiments will be simplified or omitted. In the first embodiment, the difference between the distance a from the center line WX of the link in the width direction to the support 211 (support 212) and the distance b from the center line WX to the outer surface of the arm 222 of the second link 220 was set to exceed 25 mm. In addition, when the second link 220 moves to the movable limit, a distance Y exceeding 25 mm is set to be secured between the base 213 of the first link 210 on the fixed side and the arm 222 of the second link 220 on the movable side. In the sixth embodiment, (ab)>25 mm and Y>25 mm are secured as in the first embodiment.

[0073] In the sixth embodiment, the input unit 225 is provided on the second link 220, thereby improving the workability when the operator performs a teaching operation or a collaborative operation.

[0074] This embodiment will also be described using the arm tip 299 (FIG. 1) as an example where the operator's fingers are likely to get caught, but the present invention may be applied to any joint that constitutes a robot arm and has a double-supported structure.

[0075] 14(a) to 14(c) are external perspective views of the arm tip 299 according to the sixth embodiment in a state in which the joints are extended (not bent), as viewed from different directions. The input unit 225 includes input devices such as a button, a pressure sensor, and a stick, and can transmit input contents by an operator to the control device 300 (FIG. 1). In order to facilitate teaching work and collaborative work, the input unit 225 is mounted at a position where the operator can easily operate the input unit 225 while working with the robot, for example, on a link on the tip side of the robot arm. When an operator performs direct teaching, typically, the operator inputs information from the input unit 225 while holding the arm 222 of the robot in his / her hand.

[0076] The input unit 225 will be described with reference to Fig. 15. Fig. 15 is an external perspective view illustrating a configuration in which the input unit 225 is equipped with buttons arranged two-dimensionally. In consideration of operability when an operator operates the buttons while holding the robot, the input unit 225 is equipped with a first button 2251, a second button 2252, and a third button 2253 so that the operator can operate the buttons with the index finger, middle finger, and ring finger while supporting the arm 222 with the palm of the hand.

[0077] The outer periphery of the buttons 2251 to 2253 is provided with depressions 2254, which are structured to be depressed more than the surrounding area when pressed. The buttons are provided with projections and recesses that can be identified by the worker's sense of touch. Specifically, the buttons are each provided with a different number of protrusions 2255, and the worker can recognize and operate the buttons 2251 to 2253 by the touch of his or her fingertips without having to see them. The robot can be operated without having to look at the buttons and without worrying about fingers getting caught in the joints, so the worker can concentrate on teaching work while watching the overall status of the robot, thereby improving work efficiency and safety.

[0078] According to this embodiment, in a robot having a joint with a double-support structure, even when an operator works while operating the operation unit, the risk of the operator's fingers, etc. being pinched and damaged between the side of the fixed link and the side of the movable link can be significantly reduced. Also, even when the movable second link 220 is at the limit of movement, the risk of the operator's fingers, etc. being pinched and damaged between the base 213 of the fixed first link 210 and the arm 222 of the movable second link 220 can be significantly reduced.

[0079] [Embodiment 7] In the above embodiments, a joint with a double-support structure in which the movable link bends relative to the fixed link has been given as an example. In embodiment 7, however, a method for preventing fingers and other objects from getting pinched in a joint in which the movable link is arranged coaxially with the fixed link and rotates in a torsional direction will be described.

[0080] For example, the arm tip 299 may be equipped with a joint that rotates the robot's flange, and since there is a possibility that the operator's fingers may come into contact with the internal mechanism of such a joint, safety can be improved by making the structure less susceptible to snagging, etc. In such a rotating joint, a torque sensor is provided to detect the force applied to the movable link.

[0081] 8(a) is a cross-sectional view of the joint, which is equipped with a servo motor 206 and a reducer 2221 that amplifies and transmits the torque of the servo motor 206. The output of the reducer 2221 rotates a flange 2223 at the tip via a connected torque sensor 2222.

[0082] 8(b) is a perspective view for explaining the torque sensor 2222. The torque sensor 2222 has a structure in which a primary side flange 22221 and a secondary side flange 22222 are connected via a spring 22223 which is an elastic body. When torque is applied to the secondary side flange 22221, the spring 22223 is distorted and displaced relative to the primary side flange 22221. This displacement is detected by a displacement sensor 22224 and converted into torque.

[0083] Returning to Fig. 8(a), the flange 2223 rotates relative to the frame 2225 of the fixed link. If the gap between them is large, dust will get into the torque sensor 2222 and the protection rating will not be met. Therefore, in this example, dust is prevented by a contact seal 2224. However, friction generated in the contact seal 2224 due to the rotational motion is transmitted to the torque sensor 2222, reducing the torque detection accuracy and there is a possibility that a finger or the like may get caught in this part.

[0084] Therefore, a structure that enables dust protection for the torque sensor alone will be described. Fig. 9(a) is an exploded perspective view, showing a structure in which a cover 22225 is placed over the torque sensor 2222. In this example, one end of the cover 22225 is joined to the secondary flange. That is, a cylindrical cover is fixed to the side of either the primary flange or the secondary flange. A gap is formed between the cover and the other of the primary flange or the secondary flange to which the cover is not fixed.

[0085] An example will be described with reference to the cross-sectional view of Figure 9(b). There is a gap between the cover 22225 and the primary flange 22221, as shown in the dotted circle, and the structure is such that no friction occurs when the flanges move relative to each other. Although a gap occurs here, the relative movement between the flanges is only a few tens of micrometers, so fingers will not get caught. The gap between the cover and either the primary flange or the secondary flange to which the cover is not fixed is set to 1 mm or less.

[0086] 9(c), another example of the relationship with the primary side flange 22221 will be described. A seal 22226 (sealing member) is mounted between the cover 22225 and the primary side flange 22221 to completely prevent dust from entering. If the seal 22226 is a non-contact type labyrinth seal or a contact type seal such as a low elasticity sponge, friction is not generated and the measurement accuracy of the torque sensor is not affected.

[0087] If a torque sensor with this structure is applied to the joint shown in Fig. 8(a), the frame 2225 and the contact seal 2224 are not required, so there is no friction and no entrapment. However, the mechanical unevenness increases, which is not preferable from the standpoint of safety.

[0088] 10(a) shows a cross-sectional view of a more preferable embodiment. The output of the servo motor 206 is reduced by a reducer 2221 to drive the flange 2223. These are connected to a frame 2225 in a form supported by a torque sensor 2222. A cover 22225 is attached to the reducer 2221, and a seal portion 22226 is provided between the cover 22225 and the primary flange 22221 of the torque sensor 2222. Safety can be improved by eliminating the seam between the cover 22225 and the frame 2225. The seal portion 22226 may also be provided between the cover 22225 and the frame 2225.

[0089] Fig. 10(b) shows a cross-sectional view of another more preferable embodiment. The output of the servo motor 206 is reduced in speed by a reducer 2221 to drive a flange 2223. The torque sensor 2222 supports the servo motor 206 and connects them to a frame 2225. The frame 2225 is configured to cover the torque sensor 2222. By eliminating the joint between the reducer 2221 and the frame 2225, safety can be improved. Also, the portion indicated by the dotted circle is a narrow gap, but a seal portion 22226 may be provided.

[0090] In this embodiment, the robot has a structure that makes it difficult for an operator to pinch his / her fingers when the tip of the robot is rotationally driven or when the operator holds the tip of the robot to perform teaching, etc., thereby realizing a robot with high safety. The embodiment also includes a robot control method in which a control unit controls the operation of the robot using values ​​measured by the above-mentioned torque sensor. The embodiment also includes a drive device that drives the robot and a control method for controlling the drive device of the robot using values ​​measured by the above-mentioned torque sensor.

[0091] [Other embodiments] The present invention is not limited to the above-described embodiment, and many modifications are possible within the technical spirit of the present invention. For example, the above-described different embodiments and examples may be combined in whole or in part.

[0092] The operations executed by the robot device according to the embodiment are typically operations related to the manufacture of an article, representative examples of which include part assembly, transport, processing (including cutting, polishing, drilling, painting, gluing, welding, etc.), and cleaning. However, the robot device may also be caused to execute operations other than these. An embodiment also includes an article manufacturing method in which an article is manufactured using the robot device according to the embodiment.

[0093] The joint mechanism according to the embodiment can be applied to various machines and equipment, such as industrial robots, service robots, and processing machines that operate under numerical control by a computer. For example, the joint mechanism can be applied to the joints of machines and equipment that can automatically perform operations such as expansion and contraction, bending and stretching, vertical movement, horizontal movement, or rotation, or a combination of these operations, based on information in a storage device provided in a control device. A driving device for driving the robot according to the embodiment, a control method or control program for operating the robot according to the embodiment, and a computer-readable recording medium storing the control program are also included in the embodiments of the present invention.

[0094] The present invention can also be realized by a process in which a program for implementing one or more functions of the embodiments is supplied to a system or device via a network or a storage medium, and one or more processors in a computer of the system or device read and execute the program. The present invention can also be realized by a circuit (e.g., ASIC) that implements one or more functions.

[0095] This specification discloses at least the following: [Matter 1] The first link, a second link supported by a first support portion and a second support portion of the first link, the second link having an arm portion movable about a rotation axis; In the movable range of the arm, the inner side surface of the first support portion and the outer side surface of the arm are separated by a predetermined distance, and the inner side surface of the second support portion and the outer side surface of the arm are separated by a predetermined distance. A robot characterized by: [Matter 2] In the movable range of the arm, the inner side surface of the first support portion and the outer side surface of the arm are separated by a distance of more than 25 mm, and the inner side surface of the second support portion and the outer side surface of the arm are separated by a distance of more than 25 mm. 2. The robot according to item 1, [Matter 3] the first link includes a base portion connecting the first support portion and the second support portion; When the arm portion is rotated to the limit of its movement, the arm portion and the base portion face each other with a distance of more than 25 mm therebetween. 3. The robot according to item 1 or 2, [Matter 4] the first link includes a base portion connecting the first support portion and the second support portion; An outer surface of the first link extending from the first support portion through the base portion to the second support portion along the direction of the rotation axis has a smooth curved surface. 4. The robot according to any one of claims 1 to 3. [Matter 5] the arm has a smooth side; When the arm is rotated to the limit of its range of motion, the smooth side surface of the arm and the smooth curved surface of the base face each other at a distance of more than 25 mm. 5. The robot according to item 4, [Matter 6] At least one of the first support portion and the second support portion has a built-in stopper mechanism for limiting the movable range of the arm portion. 6. A robot according to any one of claims 1 to 5. [Matter 7] The stopper mechanism includes: a convex portion provided on one of the first link and the second link, and a concave portion or a slit provided on the other of the first link and the second link, The protrusion is engaged with the recess or the slit. 7. The robot according to item 6, [Matter 8] The recess or the slit is provided along a part of a circumference centered on the rotation axis. 8. The robot according to item 7, [Matter 9] The stopper mechanism includes: a convex portion provided on one of the first link and the second link, and a convex portion provided on the other of the first link and the second link, The protrusions are configured to butt against each other at the position of the movable limit of the arm portion. 7. The robot according to item 6, [Matter 10] the first link includes a base portion that connects the first support portion and the second support portion, and a reinforcing member that reinforces the base portion, the second link includes a cylindrical portion supported by the first support portion and the second support portion, The reinforcing member protrudes toward the cylindrical portion. 10. A robot according to any one of claims 1 to 9. [Matter 11] The second link includes a cylindrical portion supported by the first support portion and the second support portion, and a reinforcing member that reinforces the cylindrical portion. 10. A robot according to any one of claims 1 to 9. [Matter 12] The reinforcing member and the angle between the reinforcing member and the first link are obtuse angles. 12. The robot according to item 11, [Matter 13] The arm is provided with an input unit through which an operator inputs information. 13. A robot according to any one of claims 1 to 12. [Matter 14] The input unit includes a plurality of buttons each having a recess on its outer periphery. 14. The robot according to item 13, [Matter 15] Each of the plurality of buttons is provided with projections and recesses that can be tactilely identified by an operator. 15. The robot according to item 14, [Matter 16] In the movable range of the arm, the inner side surface of the first support portion and the outer side surface of the arm are separated by a distance of more than 25 mm and not more than 40 mm, and the inner side surface of the second support portion and the outer side surface of the arm are separated by a distance of more than 25 mm and not more than 40 mm. 16. A robot according to any one of claims 1 to 15, characterized in that [Matter 17] The first link, A second link supported by the first link and rotatable around a rotation axis; a torque sensor that measures a force applied to the second link, The torque sensor includes a primary flange, a secondary flange, an elastic body connecting the primary flange and the secondary flange, a sensor measuring a relative displacement of the secondary flange with respect to the primary flange, and a cylindrical cover fixed to a side surface of either the primary flange or the secondary flange. A robot characterized by: [Matter 18] A seal member is disposed between the cover and the other of the primary side flange and the secondary side flange. 18. The robot according to item 17, [Matter 19] A gap between the cover and the other of the primary flange and the secondary flange is 1 mm or less. 18. The robot according to item 17, [Matter 20] A method for controlling a robot according to any one of claims 17 to 19, comprising: a control unit acquires information regarding a force applied to the second link from the torque sensor, and controls rotation of the second link using the information. A method for controlling a robot comprising the steps of: [Matter 21] A robot drive device for driving the robot according to any one of items 17 to 19, acquiring information about a force acting on the second link from the torque sensor, and controlling rotation of the second link using the information; A drive device characterized by: [Matter 22] a second link supported by a first support portion and a second support portion of the first link, the second link having an arm portion movable about a rotation axis; a drive unit that drives the second link, In the movable range of the arm, the inner side surface of the first support portion and the outer side surface of the arm are separated by a predetermined distance, and the inner side surface of the second support portion and the outer side surface of the arm are separated by a predetermined distance. A drive device characterized by: [Matter 23] 23. A method for controlling a drive device according to item 22, comprising the steps of: the second link is provided with an input unit through which an operator inputs information, Controlling the operation of the drive device in accordance with the information input to the input unit. A method for controlling a drive device comprising: [Matter 24] Manufacture of an article using the robot according to any one of items 1 to 19. A method for producing an article. [Matter 25] 21. A program for causing a computer that controls a robot to execute the robot control method according to item 20. [Matter 26] 26. A computer-readable recording medium storing the program according to item 25. [Explanation of symbols]

[0096] 100···Robot system / 200···Robot / 201~206···Servo motor / 225···Input section / 299···Tip of arm / 300···Control device / 400···Teaching pendant / 210···First link / 211···Support section / 212···Support section / 213···Base / 214···Reinforcing plate / 220···Second link / 221···Cylindrical section / 222···Arm section / 223···Groove section / 230···Boundary / 314···Boss / 2222···Torque sensor / 2251~2253···Button / 2254···Depression / 2255···Protrusion

Claims

1. A first link; a second link supported by a first support portion and a second support portion of the first link, the second link having an arm portion movable about a rotation axis; In the movable range of the arm, an inner side surface of the first support portion and an outer side surface of the arm are separated by a predetermined distance, and an inner side surface of the second support portion and an outer side surface of the arm are separated by a predetermined distance. A robot characterized by:

2. In the movable range of the arm, the inner side surface of the first support portion and the outer side surface of the arm are separated by a distance of more than 25 mm, and the inner side surface of the second support portion and the outer side surface of the arm are separated by a distance of more than 25 mm.

2. The robot according to claim 1 .

3. the first link includes a base portion connecting the first support portion and the second support portion, When the arm portion is rotated to the limit of its movement, the arm portion and the base portion face each other with a distance of more than 25 mm therebetween.

2. The robot according to claim 1 .

4. the first link includes a base portion connecting the first support portion and the second support portion, an outer surface of the first link extending from the first support portion through the base portion to the second support portion along the direction of the rotation axis has a smooth curved surface; 2. The robot according to claim 1 .

5. the arm has smooth sides; When the arm portion is rotated to the limit of its movement, the smooth side surface of the arm portion and the smooth curved surface of the base portion face each other at a distance of more than 25 mm.

5. The robot according to claim 4.

6. At least one of the first support portion and the second support portion has a built-in stopper mechanism for limiting the movable range of the arm portion.

6. The robot according to claim 1, wherein the first and second movable members are arranged in a first and second direction.

7. The stopper mechanism includes: a convex portion provided on one of the first link and the second link, and a concave portion or a slit provided on the other of the first link and the second link, The protrusion is engaged with the recess or the slit.

7. The robot according to claim 6.

8. The recess or the slit is provided along a part of a circumference centered on the rotation axis.

8. The robot according to claim 7 .

9. The stopper mechanism includes: a convex portion provided on one of the first link and the second link, and a convex portion provided on the other of the first link and the second link, The protrusions are configured to butt against each other at the position of the movable limit of the arm portion.

7. The robot according to claim 6.

10. the first link includes a base portion that connects the first support portion and the second support portion, and a reinforcing member that reinforces the base portion, the second link includes a cylindrical portion supported by the first support portion and the second support portion, The reinforcing member protrudes toward the cylindrical portion.

6. The robot according to claim 1, wherein the first and second movable members are arranged in a first and second direction.

11. The second link includes a cylindrical portion supported by the first support portion and the second support portion, and a reinforcing member that reinforces the cylindrical portion.

6. The robot according to claim 1, wherein the first and second movable members are arranged in a first and second direction.

12. the reinforcing member and the angle between the reinforcing member and the first link are obtuse angles; 12. The robot according to claim 11 .

13. The arm is provided with an input unit through which an operator inputs information.

6. The robot according to claim 1, wherein the first and second movable members are arranged in a first and second direction.

14. The input unit includes a plurality of buttons each having a recess on its outer periphery.

14. The robot according to claim 13.

15. Each of the plurality of buttons is provided with projections and recesses that can be tactilely identified by an operator.

15. The robot according to claim 14.

16. In the movable range of the arm, the inner side surface of the first support portion and the outer side surface of the arm are separated by a distance that exceeds 25 mm and is equal to or less than 40 mm, and the inner side surface of the second support portion and the outer side surface of the arm are separated by a distance that exceeds 25 mm and is equal to or less than 40 mm.

2. The robot according to claim 1 .

17. A first link; a second link supported by the first link and rotatable about a rotation axis; a torque sensor that measures a force applied to the second link, The torque sensor includes a primary flange, a secondary flange, an elastic body connecting the primary flange and the secondary flange, a sensor measuring a relative displacement of the secondary flange with respect to the primary flange, and a cylindrical cover fixed to a side surface of either the primary flange or the secondary flange. A robot characterized by:

18. A seal member is disposed between the cover and the other of the primary side flange and the secondary side flange.

18. The robot according to claim 17 .

19. A gap between the cover and the other of the primary side flange and the secondary side flange is 1 mm or less.

18. The robot according to claim 17 .

20. A method for controlling a robot according to any one of claims 17 to 19, comprising the steps of: a control unit that acquires information regarding a force applied to the second link from the torque sensor and controls rotation of the second link using the information. A method for controlling a robot comprising the steps of:

21. A robot drive device for driving the robot according to any one of claims 17 to 19, comprising: acquiring information about a force acting on the second link from the torque sensor, and controlling rotation of the second link using the information; A drive device characterized by:

22. a second link supported by a first support portion and a second support portion of the first link, the second link having an arm portion movable about a rotation axis; a drive unit that drives the second link, In the movable range of the arm, an inner side surface of the first support portion and an outer side surface of the arm are separated by a predetermined distance, and an inner side surface of the second support portion and an outer side surface of the arm are separated by a predetermined distance. A drive device characterized by:

23. A control method for controlling the drive device according to claim 22, comprising the steps of: the second link is provided with an input unit through which an operator inputs information, Controlling the operation of the drive device in accordance with the information input to the input unit. A method for controlling a drive device comprising:

24. Manufacturing an article using the robot according to any one of claims 1 to 5 or any one of claims 17 to 19. A method for producing an article.

25. A program for causing a computer that controls a robot to execute the robot control method according to claim 20.

26. A computer-readable recording medium storing the program according to claim 25.

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