Radiant light temperature measuring device

Abstract

To solve the problem of a radiation pyrometer that its measurable temperature range is limited because the measurable radiance range of a radiation temperature measurement sensor for measuring the radiance of radiant light is limited.MEANS FOR SOLVING THE PROBLEM: Provided is a radiant light temperature measuring device that uses a liquid crystal shutter and / or a rotatable polarizing plate in order to adjust the radiant flux density of radiant light radiated from a temperature measurement object so as to increase or decrease at a discretionary ratio, selects a conversion function held in correspondence to a ratio at which radiant flux density is adjusted, and calculates a temperature on the basis of the selected conversion function and the measured radiance.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a radiant light temperature measuring device that measures the radiance after adjusting the radiant flux density, which is the amount of radiant flux per unit area of ​​a radiation temperature measuring sensor of radiant light emitted from a temperature measurement target, to increase or decrease the radiant flux density at an arbitrary ratio within a predetermined range, and calculates the temperature based on the measured radiance and a conversion function according to the ratio, a method for operating the radiant light temperature measuring device, and a program for causing the device to execute the method. It also relates to a storage medium that stores the program. [Background technology]

[0002] When measuring the temperature of a hot object that cannot be directly touched, or in a thermal imaging device (thermography) for observing temperature distribution, a radiation thermometer is used to determine the temperature by measuring the radiance of the radiation emitted from the object. The temperature is calculated by measuring the radiance of a specific wavelength or by calculating the ratio of the spectral radiance of two specific wavelengths.

[0003] Patent Document 1 discloses an infrared thermal imaging device that receives infrared rays radiated from an object whose temperature is to be measured by the optical system of the camera unit, generates and displays the temperature distribution of the object as a thermal image based on the output signal of an infrared detection element that detects the energy of the infrared rays, and discloses an automatic measurement temperature range switching device that switches between at least two or more previously prepared measurement temperature ranges. The device is equipped with a mechanism that automatically controls whether or not to insert an aperture and / or a filter into the optical axis of the optical system of the camera unit to switch the measurement temperature range. A range in which the relationship between the temperature of the object and the received energy of the infrared rays detected by the infrared detection element has good linearity is set as the measurement temperature range, and when the maximum temperature in the thermal image of the object exceeds the maximum temperature of the measurement temperature range, the next highest measurement temperature range is selected. To change to another selected measurement temperature range, the aperture and / or filter are moved and inserted into the optical path of the infrared rays guided by the optical system of the camera unit to the infrared detection element to control the amount of infrared rays, thereby switching the measurement temperature range. Using a temperature table corresponding to the measurement temperature range, the output of the infrared detection element is referred to to obtain temperature data. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 9-101207 Summary of the Invention [Problem to be solved by the invention]

[0005] In the specification of Patent Document 1, it is possible to automatically switch between multiple preset measurement temperature ranges, but it is necessary to incorporate at least one filter and / or aperture into the device, and it is not possible to reduce the amount of infrared rays to an arbitrary ratio. There is a problem that it may not be possible to select a measurement temperature range suitable for temperature measurement when the emissivity of the object of temperature measurement is not within a predetermined range. In addition, since it has a mechanical mechanism for switching at least one filter and / or aperture (in the embodiment of Patent Document 1, it is rotated by a stepping motor to move it in and out of the optical path), there is a problem that the size of the measurement temperature range automatic switching device becomes large.

[0006] Therefore, in the present invention, a liquid crystal shutter and / or a rotatable polarizing plate is used to adjust the radiant flux density of the radiant light emitted from the object to be measured so that it can be increased or decreased at an arbitrary ratio. A radiant light temperature measuring device is provided which selects a conversion function stored according to the adjusted ratio of the radiant flux density, and calculates the temperature based on the selected conversion function and the measured radiance. A smaller radiant light temperature measuring device can be provided without providing a variable transmittance mechanism that requires a large space. Instead of providing multiple filters and / or apertures with pre-prepared transmittances to increase or decrease the radiant flux density within a specified range, a radiant light temperature measuring device can be provided which can measure temperatures over a wide range under optimal conditions by using a filter that can be adjusted to an arbitrary transmittance. [Means for solving the problem]

[0007] In order to solve the above problems related to the synchrotron radiation temperature measuring device, the present application provides, as a first invention, A radiation temperature measuring unit (A) that measures the radiance, which is the brightness of the radiated light emitted from the temperature measuring object (including the case of spectral radiance, which is the radiance of a specific wavelength), using a radiation temperature measuring sensor to obtain the temperature of the temperature measuring object; a radiation flux density adjusting section (B) for adjusting the radiation flux density, which is the amount of radiation flux per unit area of ​​the radiation temperature sensor of the radiation temperature measuring section (A), so as to increase or decrease the radiation flux density at any ratio within a predetermined range; a conversion function storage unit (C) that stores a plurality of conversion functions that correspond to the incident radiation light luminance, which is the luminance of the radiation light incident on the radiation temperature sensor of the radiation temperature measuring unit (A), and the temperature of the object to be measured, according to the adjusted radiation flux density, in accordance with the temperature measurement temperature range of the object to be measured; a temperature calculation unit (D) that selects a stored conversion function according to the ratio at which the radiant flux density is adjusted by the radiant flux density adjustment unit (B) and calculates a temperature based on the selected conversion function and the measured radiance; The present invention provides a radiation temperature measuring device having a

[0008] As the second invention, based on the first invention, The radiation temperature measuring device further includes a radiation flux density continuous adjustment means (E) for continuously increasing or decreasing the rate at which the radiation flux density is reduced within a predetermined range.

[0009] As a third invention, based on either the first or second invention, The radiation flux density adjusting unit (B) is When the radiance measured by the radiation temperature sensor of the radiation temperature measuring unit (A) falls into a predetermined relationship with an upper limit threshold value for adjusting the radiation flux density set according to the temperature measurement temperature zone, the ratio of the radiation flux density adjustment is reviewed so as to further reduce the radiation flux density incident on the radiation temperature measuring sensor; When the radiance measured by the radiation temperature sensor of the radiation temperature measuring unit (A) falls into a predetermined relationship with a lower threshold value for adjusting the radiation flux density set according to the temperature measurement zone, the ratio of the radiation flux density adjustment is reviewed so as to further increase the radiation flux density incident on the radiation temperature measuring sensor; The temperature calculation unit (D) provides a synchrotron radiation temperature measuring device which reselects the conversion function in accordance with the revised ratio.

[0010] As a fourth invention, based on any one of the first to third inventions, The radiation flux density adjusting unit (B) provides a radiation temperature measuring device that is a liquid crystal shutter and / or a rotatable polarizing plate.

[0011] Furthermore, there are also provided a method for operating the radiation temperature measuring device which is the computer of the first to fourth inventions, and a program for causing the radiation temperature measuring device which is the computer to execute the method. The program may be recorded on a recording medium. Effect of the Invention

[0012] The synchrotron radiation thermometry device of the present invention having the above configuration provides a synchrotron radiation thermometry device that uses a liquid crystal shutter and / or a rotatable polarizing plate to adjust the radiant flux density of the synchrotron radiation emitted from the object to be measured to increase or decrease it to an arbitrary ratio, selects a conversion function stored according to the ratio to which the radiant flux density is adjusted, and calculates the temperature based on the selected conversion function and the measured radiance. It can provide a synchrotron radiation thermometry device that does not require a large space for installing a transmittance variable mechanism. It can provide a synchrotron radiation thermometry device that can measure temperatures over a wide temperature range under optimal conditions by using a filter that can be changed to an arbitrary transmittance, rather than providing multiple filters with pre-prepared transmittances to increase or decrease the radiant flux density within a predetermined range. [Brief description of the drawings]

[0013] [Figure 1] Conceptual structure diagram of the invention according to embodiment 1 [Diagram 2] Operational flow chart of the invention according to the first embodiment [Diagram 3] Hardware diagram of the invention according to embodiment 1 [Figure 4] Conceptual structure diagram of the invention according to embodiment 2 [Diagram 5] Operational flow chart of the invention according to the second embodiment [Figure 6] Hardware diagram of the invention according to the second embodiment [Figure 7] Conceptual structure diagram of the invention according to embodiment 3 [Figure 8] Operational flow chart of the invention according to the third embodiment [Figure 9] Hardware diagram of the invention according to the third embodiment [Figure 10] Conceptual structure diagram of the invention according to embodiment 4 [Figure 11] Operational flow chart of the invention according to the fourth embodiment [Figure 12] Hardware diagram of the invention according to the fourth embodiment [Figure 13] Conceptual structure diagram according to the present invention [Figure 14] Hardware diagram of the computer part according to the present invention [Figure 15] Figure 1 showing the relationship between temperature and radiance [Figure 16] Figure 2 shows the relationship between temperature and radiance [Figure 17] Figure 3 shows the relationship between temperature and radiance [Figure 18] Figure 4 shows the relationship between temperature and radiance [Figure 19] Illustrative diagram of a method for measuring temperature while keeping radiance constant [Figure 20] A diagram showing the ratio when measuring temperature while keeping the radiance constant. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] <Prerequisites for the explanation of all embodiments> <Hardware that can constitute the present invention> The present invention is, in principle, an invention that utilizes a computer, but at least a part of it is realized by software, hardware, or a combination of software and hardware. In this case, the software uses hardware resources to perform various calculations and realizes various functions through the required data and information. It can be said that information processing by software is specifically realized using hardware resources.

[0015] The hardware for realizing all or part of each of the constituent elements of the present invention is composed of an MPU including a CPU, which is the basic configuration of a computer, a memory, a bus, an input / output device, various peripheral devices, a user interface, etc. The various peripheral devices may include a storage device, an internet interface, an internet device, a LAN device, a Wifi (registered trademark) device, a display, a display interface, a keyboard, a mouse, a speaker, a microphone, a camera, a video, a television, a CD device, a DVD device, a Blu-ray device, a USB memory, a USB memory interface, a removable hard disk, a general hard disk, a projector device, an SSD, a telephone, a fax, a copy machine, a printer, a movie editing device, various sensor devices, etc.

[0016] The system does not necessarily have to be made up of a single unit, but may be made up of multiple units connected by communication. The communication may be a LAN, a WAN, Wifi (registered trademark), Bluetooth (registered trademark), infrared communication, ultrasonic communication, near field communication (NFC), or a mobile phone network, and may be partially installed across national borders.

[0017] <Fulfillment of the Laws of Nature in All Embodiments of the Present Invention>

[0018] The present invention functions in cooperation with a computer and software. In the present invention, the radiation from the object to be measured is measured by the radiation temperature sensor of the radiation temperature measuring unit (A), the radiation flux density adjusting unit (B) adjusts the radiation flux density of the radiation incident on the radiation temperature measuring sensor so as to increase or decrease it to an arbitrary ratio within a predetermined range, a conversion function stored according to the adjusted ratio is selected, and the temperature calculating unit (D) calculates the temperature based on the selected conversion function and the measured radiance. The temperature calculating unit (D) that calculates the temperature from the radiance is a computer as described later, and performs calculation processing using a conversion function based on the physical law such as Planck's law, so the present invention is an invention that utilizes the laws of nature.

[0019] <Hardware configuration>

[0020] FIG. 13 shows the overall conceptual configuration of the device and an example of using the device, in which the temperature of a temperature measurement target (1310) heated by a heater (1311) is measured. As shown in FIG. 13, the plate-shaped temperature measurement target (1310) is heated by a heater (1311) installed on the back, and heat treatment such as high temperature retention is performed. In the figure, the device (1300) is positioned in the normal direction of the plate-shaped temperature measurement target (1310), but measurement may be performed from an oblique direction shifted from the normal. The device receives radiant light such as infrared rays emitted from the temperature measurement target (1310) and measures the radiance. The radiation temperature measurement unit (A) (1301) of the device has at least a radiation temperature measurement sensor that measures the radiance of the radiant light, and can be configured to further have a preamplifier that amplifies a signal corresponding to the radiance output from the radiation temperature measurement sensor and an AD converter that performs AD conversion of the amplified signal, as shown in FIG. 13. In addition, the radiation temperature measuring unit (A) (1301) may have an optical system arranged between the object to be measured (1310) and the radiation temperature measuring sensor, such as a bandpass filter that reduces radiation outside a specified wavelength range, a lens for focusing light, and a protective filter to prevent scratches on the bandpass filter and lens exposed to the outside of the device housing.

[0021] The radiant light that has passed through an optical system such as a lens passes through a radiant flux density adjusting unit (B) (1302) that is composed of a liquid crystal shutter or a rotating polarizing plate before entering the radiation temperature sensor. The radiant flux density adjusting unit (B) (1302) can be configured to further include a radiant flux density control algorithm processing means that calculates a ratio based on the radiance measured by the radiation temperature measuring unit (A) (1301) so that the radiant flux density incident on the surface of the radiation temperature measuring sensor is increased or decreased to an arbitrary ratio within a predetermined range. The radiant flux density adjusting unit (B) adjusts the ratio at which the radiant flux density is reduced based on the ratio calculated by the radiant flux density control algorithm processing means or an instruction output for correcting the ratio based on the ratio (e.g. a voltage signal applied to the liquid crystal of the liquid crystal shutter), thereby adjusting the radiant flux density incident on the surface of the radiation temperature measuring sensor. The radiance of the radiation received by the radiation temperature sensor is sent to the calculation board, and a conversion function stored in the conversion function storage unit (C) (1303) is selected in accordance with the ratio. The temperature calculation unit (D) (1304) calculates the temperature based on the selected conversion function and the measured radiance.

[0022] The calculated temperature is output to a user interface (UI) such as a display (1354) or a LAN (1350) via a USB or LAN terminal. The temperature is sent to a server device (1351) or a PC (1352) via the LAN (1350), and further to a server device or a PC via a gateway and a firewall (1353) and an Internet line (1340). Although both a LAN and an Internet line are shown in the figure, the same effect can be obtained with only one of them. Also, although the figure shows an integrated firewall and gateway (1353) installed between the LAN (1350) and the Internet line (1340), they may be separate devices. Also, while a gateway is necessary to connect different lines, a firewall is not essential. However, a firewall can be said to be essential from the viewpoint of security.

[0023] FIG. 14 is a diagram showing an example of the hardware configuration of the computer part of the synchrotron radiation thermometry device according to each embodiment of the present invention. Taking the case of a configuration conforming to an embedded system as an example, the hardware configuration of the synchrotron radiation thermometry device according to this embodiment will be described with reference to FIG. 14. Since FIG. 14 is a diagram for explaining the hardware configuration, individual programs and data are omitted. Note that the hardware of the computer part of the device of the present invention may be configured conforming to a known PC. When a server is used in a system including the device of the present invention, the server may be configured conforming to a known PC.

[0024] <Embodiment 1 Hardware>

[0025] FIG. 14 is a conceptual diagram showing the hardware configuration of the computer part (hereinafter sometimes referred to as an embedded system) in the synchrotron radiation temperature measuring device (hereinafter sometimes abbreviated to the present device) of each embodiment of the present invention. As shown in the figure, the present device includes an MPU, a non-volatile memory (e.g., ROM, SSD, HDD, flash memory, etc.), a main memory (e.g., DRAM, SRAM, etc.), a LAN I / F (I / F: interface) for connecting to a control PC, a recorder, etc., and a USB, I / F, which is an interface for connecting to a control module, etc. 2 It also has a system bus (thick line in the figure) for sending and receiving signals between them. 2 It is also connected to the "Radiation Light Temperature Sensor, Calculation Board" via "C, SPI, etc."

[0026] <Embodiment 1 Hardware: MPU> "MPU" is an abbreviation for Microprocessor Unit, and refers to an integrated circuit that integrates a CPU, memory, input / output interface, timer, interrupt controller, etc., around a microprocessor. Integrated circuits are often manufactured in an integrated form on a single chip. In addition to the above, other examples of integrated functions include the CPU, flash memory, memory I / F, AD converter, PLL (Phase-Locked Loop), LAN I / F, USB I / F, I 2 It is possible to integrate CI / F, SPI I / F, power control I / F, graphic function, floating point calculation unit, etc. For example, if the LAN I / F is integrated, there is no need to prepare a control IC for the LAN I / F in addition to the MPU. The MPU in Figure 14 is an example where the memory I / F and graphic function are integrated with the CPU.

[0027] <Embodiment 1 Hardware: Non-volatile memory> Non-volatile memory installed in embedded systems includes ROM such as EP-ROM, EEP-ROM, flash memory, and SSD. HDD can also be used, but there are limitations to vibration resistance and shock resistance.

[0028] Non-volatile memory stores firmware, the basic program that runs the embedded system and controls the hardware. Like other programs, firmware is loaded into main memory, expanded, and executed. If the MPU is equipped with non-volatile memory, the firmware can be stored in the non-volatile memory on the MPU side and run on that memory. This reduces the amount of main memory required and the amount of memory used.

[0029] The "device driver" stored in the non-volatile memory is software used to operate hardware interfaces such as LAN and USB. At run time, it is loaded into the main memory and executed. If the MPU is equipped with non-volatile memory, the device driver may be stored in the non-volatile memory on the MPU side and run on the non-volatile memory. This reduces the amount of main memory required and its usage. The specifications and configuration of the firmware and device driver are determined when the configuration of the computer part to be incorporated in this device (including various I / F configurations) is determined.

[0030] The non-volatile memory also stores other software necessary to operate the device, and at run time, the software is loaded into the main memory and executed.

[0031] <Embodiment 1 Hardware: Main memory: Volatile memory> Main memory is used as working memory when various software is executed during embedded system operation. For this reason, DRAM and SRAM, which have fast read and write speeds, are used. Among DRAMs, SDRAM and DDR SDRAM are particularly easy to obtain, as they are widely used in PCs and mobile devices and are mass-produced.

[0032] Each functional block constituting the synchrotron radiation temperature measuring device described below can be realized by hardware, software, or both. Specifically, in the case of using an embedded system, the hardware components include an MPU, main memory, bus, or non-volatile memory, input devices such as operation buttons used for inputting information, a mouse, a touch panel, an electronic pen used solely for touching a touch panel, a joystick or a joystick-like pointer position input device, and other external peripheral devices, as well as interfaces for the external peripheral devices, communication interfaces such as LAN terminals, image processing circuits, wireless communication interfaces, driver programs and other application programs for controlling the hardware. In particular, plotters, data recording devices, personal computers for acquiring data or controlling the device, server devices for acquiring data, wired and wireless networks, and interfaces are used.

[0033] The MPU performs arithmetic processing according to the program deployed on the main memory, and processes and stores data input from input devices and other interfaces and held in the memory or hardware, and generates commands for controlling the hardware and software. Here, the above programs may be realized as multiple modularized programs, or may be realized as a single program by combining two or more programs.

[0034] The present invention may also be partially configured as software. Furthermore, storage media on which such software is recorded are naturally included within the technical scope of the present invention (this is not limited to this embodiment, but applies throughout the entire specification).

[0035] <Terminology used in the present invention>

[0036] The term "association" is used in this specification to mean not only a case where two or more pieces of information are directly associated with each other, but also a case where two or more pieces of information are indirectly associated with each other via one or more other pieces of information. An indirect association is not necessarily limited to an association within one device (a device having a single housing), but also includes a case where the association is made across multiple devices.

[0037] "Based on" includes both cases where it is based on the object itself and cases where it is based on the object after some processing has been performed. For example, "calculating temperature based on measured radiance" means "temperature" calculated by inputting "radiance acquired" by measurement into a specified formula. The "radiance acquired" by measurement itself may be input into the specified formula, or it may be input into the specified formula after processing such as averaging several "radiance acquired" by measurement.

[0038] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. First, the effect of measuring radiance by reducing it with an aperture and / or a filter, which is also used in the prior art, will be described.

[0039] <Effects of measuring with reduced radiance> In a radiation thermometer that measures temperature by measuring the radiance from an object, the measurable temperature range is shifted by reducing the radiance to a specified ratio using a filter or the like, as will be outlined using the schematic diagram in Figure 18. Figure 18 shows the relationship between temperature and spectral radiance, with the horizontal axis showing temperature and the vertical axis showing the spectral radiance at a specified wavelength (e.g. 1.55 μm), with both the vertical and horizontal axes expressed in linear notation. The temperature in Figure 18 is expressed in absolute temperature (K), but it may be converted to Celsius (°C) when creating a graph.

[0040] The graph with a ratio of 100% (solid line) in the figure is a graph of radiance measured without attenuation by a filter or the like. The graph with a ratio of 75% (dotted line) in the figure is a graph of radiance measured after attenuation to 75% using a filter. Similarly, the graph with a ratio of 50% (dashed line) in the figure is a graph of radiance measured after attenuation to 50% using a filter. Graphs using filters, etc. are graphs of measurements between the lower and upper limits of radiance measurement with a filter of the ratio of the conditions listed inserted in the light path. An example is explained using a filter to reduce radiance, but the same applies if reduction is performed using a method other than a filter (e.g. a rotatable polarizing plate).

[0041] <Effect of subtracting radiance when measuring: Upper and lower measurement limits of the sensor> A radiation temperature sensor has an upper and lower limit of the brightness at which it can measure radiance. In the graph of Figure 18, the upper and lower limits of radiance measurement are shown by thick horizontal solid lines at the top and bottom of the graph. The range between the upper and lower limits of radiance measurement is the range of radiance that can be measured by the radiation temperature sensor.

[0042] <Effect of reducing radiance when measuring: Temperature measurement during heat treatment: No filter> As an example, we will explain the case where the temperature is measured during a heat treatment in which the object is heated and held at a high temperature, and then gradually cooled down. If the temperature of the object being heated is measured without using a filter, the temperature can be calculated from the spectral radiance based on the ratio graph (solid line) in Figure 18. The low temperature side is the temperature T 1 If the measurement is continued without using a filter, the spectral radiance increases as the temperature rises. When the upper limit of the radiance measurement is reached (or exceeded) at point B in the figure, no further radiance can be measured. Therefore, without using a filter, the corresponding temperature T 4 is the upper limit of the temperature that can be measured. Therefore, in a graph of radiance that is not attenuated by a filter, the temperature T 1 From T 4The measurable range is up to (temperature measurement range 1).

[0043] <Effect of reducing radiance when measuring: Temperature measurement during heat treatment: 75% filter> When the spectral radiance measured without a filter reaches (or exceeds) the upper limit of radiance measurement, a filter that reduces the radiance to a ratio of 75% is inserted in the optical path. As shown in the graph of a ratio of 75% in Figure 18 (dotted line, using a filter that reduces to 75%), the spectral radiance is reduced to 75% compared to when there is no filter (reduced from point B to point C in the figure), and the spectral radiance of the radiant light incident on the radiation temperature sensor falls below the upper limit of the radiance measurement of the sensor. Therefore, with a 75% filter inserted in the optical path, the measurable high-temperature side temperature is temperature T corresponding to point C. 4 Then, the temperature T corresponds to point D where the 75% ratio graph intersects with the upper limit of the radiance measurement. 5 The measurement from point C to point D is performed using a 75% filter. The lower limit also shifts to the higher temperature side (T 1 From T 2 ) so when using a 75% filter, the measurable temperature is T 2 From T 5 (temperature measurement zone 2).

[0044] <Effect of reducing radiance when measuring: Temperature measurement during heat treatment: 50% filter> When the spectral radiance measurement value reaches (or exceeds) the upper limit of radiance measurement in a measurement using a 75% filter, a 50% filter is inserted in the middle of the optical path instead of the 75% filter. As shown in the graph of the 50% ratio in Figure 18 (dashed line, using a 50% filter), the spectral radiance is reduced to a ratio of 50% compared to when there is no filter (reduced from point D to point E in the figure), and the spectral radiance is 2 / 3 of that when a 75% filter is used, and the spectral radiance of the radiant light entering the radiation temperature sensor falls below the upper limit of the radiance measurement of the radiation temperature sensor. Therefore, with a 50% filter inserted in the optical path, the measurement on the high temperature side is at temperature T corresponding to point E. 5Then, the temperature T corresponds to point F where the 50% ratio graph intersects with the upper limit of the radiance measurement. 6 From point E to point F, measurements are taken with the 50% filter inserted. The lower limit also shifts to the higher temperature side (T 2 From T 3 ), when using a 50% filter, the measurable temperature is T 3 From T 6 (temperature measurement zone 3).

[0045] <Effect of measuring with reduced radiance: Temperature measurement during heat treatment: When the temperature is decreasing> Conversely to the above explanation, when measuring the temperature of an object to be measured as it decreases while the radiant light is reduced by a filter, the temperature measurement range can be shifted to the lower temperature side by increasing the filter ratio and increasing the radiant light, such as by replacing a 50% filter ratio with a 75% filter ratio each time the lower limit of radiance measurement is reached.

[0046] <Effect of measuring with reduced radiance: Filter switching> As explained above, the temperature measurement zone 1 (T 1 From T 4 ) compared to the 75% filter used for temperature measurement (T 2 From T 5 ) can measure a temperature range shifted to higher temperatures. 3 From T 6 ) can measure a temperature range that is shifted higher than temperature measurement zone 2. By performing measurements using two types of filters, 75% filter and 50% filter, as well as measurements without a filter, the temperature measurement zone T 1 From T 4 Whereas, T 1 From T 6In this way, by providing the radiation thermometer with filters of a predetermined ratio and replacing the filters during measurement (including a state in which the filters are not placed in the optical path), it is possible to switch between multiple temperature measurement zones, thereby widening the temperature range that the radiation thermometer can measure.

[0047] In the above explanation, the filter was switched using the upper or lower limit of the radiance measurement as the threshold, but a threshold may be set inside the upper or lower limit of the radiance measurement, and the filter may be switched when a predetermined relationship with the threshold is reached (e.g., when it is reached or crossed). Since it is expected that the signal-to-noise ratio is better in areas with high radiance, it is better to switch the ratio frequently in areas with high radiance. However, in the conventional technology, the number of temperature measurement zones that can be switched as described above is determined by the number of types of switching filters, etc., because it is performed by switching filters, etc., that are provided in advance in the radiation thermometer (the radiation thermometer in the present invention).

[0048] In the present invention, the number of switches can be set to any value by increasing or decreasing the radiant flux density (spectral radiance in the explanation using FIG. 18 above), which is the amount of radiant flux per unit area of ​​the radiation temperature sensor of the radiant light incident on the radiation temperature sensor, at any ratio within a predetermined range. Hereinafter, an embodiment of the present invention will be described.

[0049] <Overview of embodiment 1> Mainly claims 1, 5, and 9 The synchrotron radiation temperature measuring device of the present invention in embodiment 1 (hereinafter sometimes abbreviated as this device) is configured such that the radiant flux density adjustment unit (B) adjusts the radiant flux density of the synchrotron radiation incident on the radiation temperature measuring sensor to increase or decrease it to an arbitrary ratio within a predetermined range, and the temperature calculation unit (D) selects a conversion function stored in accordance with the ratio, and calculates the temperature based on the measured radiance using the selected conversion function.

[0050] <Functional configuration of embodiment 1> 1 shows a conceptual configuration diagram of the radiation temperature measuring device of embodiment 1. The radiation temperature measuring device (0100) of embodiment 1 has a radiation temperature measuring unit (A) (0101), a radiant flux density adjusting unit (B) (0102), a conversion function holding unit (C) (0103), and a temperature calculating unit (D) (0104).

[0051] The above-mentioned schematic structure is an example for carrying out the present invention, and the structure may be omitted or new structures may be added as appropriate within the scope that does not contradict the problems to be overcome by the present invention and its effects. The same applies to the explanations of the first embodiment and subsequent embodiments.

[0052] <Description of the configuration of embodiment 1> <Embodiment 1 Radiation temperature measuring unit (A) (0101)> The "radiation temperature measuring unit (A)" (0101) is configured to measure the radiance (including the spectral radiance, which is the radiance at a specific wavelength) of the radiant light emitted from the object to be measured with a radiation temperature measuring sensor in order to obtain the temperature of the object to be measured. When measuring the radiant light emitted from the object to be measured with a radiation temperature measuring sensor, it is preferable to measure in an environment where there is no noise or where the influence of noise is eliminated as much as possible. For example, the object to be measured and this device are placed in a darkroom and the measurement is performed. Note that if the temperature measuring range is one where the influence of the ambient temperature and infrared rays in the ambient light can be ignored, there is no need to set up a darkroom or the like.

[0053] A "radiation temperature sensor" is a sensor for measuring radiance, which is the brightness of the radiation emitted from the object to be measured. It can be selected appropriately depending on the wavelength of the object to be measured, such as a camera tube, CCD or CMOS image sensor, phototransistor, thermopile, pyroelectric sensor, bolometer, or InGaAs sensor. When measuring the temperature of a high-temperature object, infrared rays are usually measured, so an infrared sensor is selected.

[0054] The radiation temperature measuring unit (A) can be configured to include, in addition to the radiation temperature measuring sensor, optical systems such as a bandpass filter (a filter in which a film that controls transmission or reflection according to wavelength is provided on a transparent substrate so that only a specific wavelength is transmitted), a lens, a protective filter, and a preamplifier that amplifies a signal indicating the radiance measured by the radiation temperature measuring sensor, and an AD converter that converts the amplified signal into an analog value when the output from the radiation temperature measuring sensor is an analog value. When the output from the radiation temperature measuring sensor is a digital output, the AD converter is not required. A bandpass filter that transmits radiation light in a specific wavelength range (reducing the transmittance of wavelength ranges other than the specific wavelength range) may be placed between the temperature measurement target and the lens (in front of the lens), or between the lens and the radiation flux density adjustment unit (B) (after the lens). If it does not interfere with the adjustment of the radiation flux density adjustment unit (B) described later, a bandpass filter may be placed between the radiation flux density adjustment unit (B) and the radiation temperature measuring sensor.

[0055] The specific wavelength that the bandpass filter transmits may be limited to one wavelength, or, for example, the bandpass filter specifications may be changed to switch to two wavelengths, 0.9 μm and 1.55 μm, and the spectral radiance of each wavelength may be measured. A two-color thermometer can be configured.

[0056] <Embodiment 1 Radiant Flux Density Adjusting Unit (B) (0102)> The "radiant flux density adjustment unit (B)" (0102) is configured to adjust, by increasing or decreasing, the radiant flux density, which is the amount of radiant flux per unit area of ​​the radiation temperature sensor of the radiation temperature measuring unit (A) that is incident on the radiation temperature measuring sensor, to any ratio within a predetermined range.

[0057] The irradiance density adjusting unit (B) is configured to adjust the transmittance of the radiation light in order to increase or decrease the irradiance density within a predetermined range. The ratio of the magnitude of the irradiance flux density emitted toward the radiation temperature sensor to the irradiance flux density adjusting unit (B) is an arbitrary ratio within a predetermined range. The arbitrary ratio may be an almost arbitrary ratio. When a digitally processed voltage signal is used to adjust the ratio, a signal of a voltage value of any step, which is obtained by dividing a voltage between the maximum ratio and the minimum ratio into a plurality of steps, is output. In this specification, the adjustment to an almost arbitrary ratio determined in steps in this manner is also called an arbitrary ratio. Alternatively, in the case where the ratio is mechanically adjusted using a stepping motor, an almost arbitrary ratio adjusted for each minimum rotation angle of the stepping motor is also called an arbitrary ratio in this specification. In the case where the voltage or the rotation of the motor is processed in an analog manner, an arbitrary ratio within a predetermined range determined by an arbitrary voltage signal or an arbitrary motor rotation interval can also be used. When a mechanism for adjusting the arbitrary ratio is installed, the maximum transmittance of the mechanism is the upper limit of the predetermined range, and the minimum transmittance is the lower limit of the predetermined range. The necessity for adjusting the radiant flux density will be explained again in the section on the conversion function holding section (C) described later.

[0058] In the conventional technology, if there is only one mechanism (e.g., ND filter, etc.) for reducing the radiation incident on the radiation thermometer, only a specific temperature range can be measured, and measurements are performed by switching between multiple radiation thermometers with different temperature ranges. Alternatively, there is a radiation thermometer that has multiple optical systems with different temperature ranges as an integrated unit and measures by switching between them, or a radiation thermometer that has, for example, multiple ND filters as the reduction mechanism and has a mechanical switching mechanism. The switching between the filter and the diaphragm as disclosed in Patent Document 1 is a method in which a hole (for diaphragm) through which the radiation passes and a hole in which the filter is fitted are opened on the circumference, and the disk is rotated by a motor to switch between the presence or absence of the diaphragm and / or the filter. As described above, the conventional technology requires a large space for the reduction mechanism, and a mechanical drive unit such as a motor or gear for switching the ND filter, and the ratio is determined in advance by the type of ND filter placed when the device is manufactured.

[0059] In contrast to the prior art, the radiation flux density adjustment unit (B) of the radiation light temperature measuring device of the present invention has a mechanism for increasing or decreasing the transmittance without replacing the ND filter in order to increase or decrease the radiation flux density to an arbitrary ratio. Examples of mechanisms for reducing the transmittance include a rotatable polarizing plate (variable ND filter), a liquid crystal shutter that can vary the transmittance according to the applied voltage, and a digital micromirror device in which a large number of movable mirrors are arranged on an integrated circuit board. These are preferable because they do not require a large space for installation, as in the prior art. Among these, the use of a liquid crystal shutter is more preferable because it further eliminates the need for a mechanical drive unit and improves the reliability of the radiation flux density adjustment unit (B).

[0060] <Embodiment 1 Radiant Flux Density Adjustment Unit (B): Radiant Flux Density Control Algorithm Processing Means> The irradiance flux density adjusting unit (B) can be configured to further include a irradiance flux density control algorithm processing means that performs processing to determine an arbitrary ratio for increasing or decreasing the irradiance flux density within a predetermined range based on the radiance (irradiance flux density) measured by the radiation temperature measuring unit (A) and a irradiance flux density control algorithm for determining the ratio according to the radiance, and to output a signal for adjusting the ratio of the mechanism to the determined ratio, in addition to a mechanism (variable ND filter, liquid crystal shutter, etc.) that actually increases or decreases the irradiance flux density to an arbitrary ratio within a predetermined range. The irradiance flux density control algorithm processing means can be configured to automatically perform the processing when the temperature is measured. That is, the irradiance flux density adjusting unit (B) can be configured to automatically adjust the ratio to an arbitrary ratio within a predetermined range when the temperature is measured.

[0061] The "processing for outputting a signal" may be a process for outputting a signal for adjusting the ratio itself, or a process for outputting a signal that is not a process for outputting a signal itself. The process for outputting is, for example, a process for converting a ratio into an adjustment signal after the ratio is determined, or, in a case where a ratio adjustment signal generating and outputting means for generating and outputting a ratio adjustment signal from the determined ratio is further provided, a process for instructing the ratio adjustment signal generating and outputting means to generate and output an adjustment signal based on the determined ratio.

[0062] Furthermore, the apparatus may be configured to have a radiant flux density control algorithm storage means for storing a radiant flux density control algorithm, and a radiant flux density control algorithm editing means for editing (adding, modifying, deleting) the stored radiant flux density control algorithm.

[0063] An example of the radiant flux density control algorithm is that when the radiance measured as the brightness of the radiant light emitted from the temperature measurement target has a predetermined relationship with the upper threshold (e.g., the same as the upper threshold, or exceeds the upper threshold), the ratio of increase or decrease within a predetermined range is decreased to reduce the radiant flux density, thereby further reducing the radiant flux density. Conversely, when the measured radiance has a predetermined relationship with the lower threshold (e.g., the same as the lower threshold, or falls below the lower threshold), the ratio is increased to increase the radiant flux density, thereby increasing the radiant flux density more than before the ratio was changed. When the radiance is between the lower threshold and the upper threshold as described above, the measurement can be continued without increasing or decreasing the ratio. Measurement may also be performed while adjusting (increasing or decreasing) the ratio, as described below.

[0064] <Embodiment 1 Radiant Flux Density Adjustment Section (B): Ratio> When a liquid crystal shutter is used in the irradiance flux density adjusting unit (B), the amount (or rate) of the ratio to be reduced may be changed continuously by continuously changing the voltage applied to the liquid crystal of the liquid crystal shutter, or may be changed by a voltage that is a multiple of a predetermined minute voltage step to change the ratio almost continuously. To continuously change the voltage to the liquid crystal, for example, a voltage waveform generator that can continuously change the voltage value may be used, so that the ratio can be continuously and arbitrarily adjusted within a predetermined range. To adjust using a predetermined minute voltage signal step, for example, an LCD driver for driving the liquid crystal panel is used to apply a voltage to the liquid crystal of the liquid crystal shutter. If the LCD driver is used, when the transmittance is changed, the step of change in the ratio between the maximum transmittance and the minimum transmittance changes depending on the driver specifications, such as 64 gradations (6 bits), 256 gradations (8 bits), or 1024 gradations (10 bits), which is the division number between the minimum and maximum values ​​of the voltage applied to the liquid crystal. Even in the case of a ratio that is increased or decreased by such a digital output, it is referred to as an arbitrary ratio in this specification.

[0065] In the case of a rotatable polarizing plate, the motor for rotating the polarizing plate may be analog-controlled. The polarizing plate angle can be continuously changed and adjusted to any ratio within a predetermined range. In addition, when a stepping motor is used to rotate the polarizing plate, the minimum unit of rotation of the polarizing plate is determined by the rotation angle (minimum rotation angle) of one step of the stepping motor, so the arbitrary ratio is a multiple of the minimum rotation angle, but is also referred to as the arbitrary ratio in this specification.

[0066] <Embodiment 1: Conversion Function Storage Unit (C) (0103)> The "conversion function storage unit (C)" (0103) is configured to store multiple conversion functions that correspond to the incident radiation light luminance, which is the luminance of the radiation light incident on the radiation temperature sensor of the radiation temperature measuring unit (A), and the temperature of the object to be measured, according to the adjusted radiation flux density, according to the temperature measurement temperature range of the object to be measured. The conversion functions include a method of using a basic functional formula and storing the coefficients and intercepts of the terms as variables, a method of obtaining an approximate formula from the measurement results before the actual measurement, and a method of performing many measurements before the actual measurement, storing the results as a table, and using them as a function.

[0067] <Embodiment 1: Conversion function storage unit (C): Acquisition of conversion function 1: Acquisition of variables in basic function formula> The conversion function may be configured to hold, as variables, coefficients and intercepts of terms in a basic function formula, etc. When performing calibration prior to measuring the temperature of the object to be measured, the values ​​of the variables are acquired for each temperature measurement range, and are acquired and held as a function for measuring the temperature of the object to be measured.

[0068] <Embodiment 1: Conversion function storage unit (C): Acquisition of conversion function 2: Acquisition of approximate formula from measurement point> Alternatively, the temperature of the object to be measured is measured using a calibrated thermocouple, and the radiance is measured by this device to obtain multiple measurement points corresponding to the radiance and the temperature of the object to be measured, and the ratio (or temperature measurement zone) in the radiant flux density adjustment unit (B) is changed to obtain and hold the values. The ratio (or temperature measurement zone) between the measurement points can be calculated using a linear approximation, or an approximation such as a polynomial approximation can be obtained for all measurement points of a ratio (or temperature measurement zone) to use as a conversion function.

[0069] <Embodiment 1: Conversion function storage unit (C): Acquisition of conversion function 3: Correspondence table between radiance and temperature> The temperature of the object to be measured is measured using a pre-calibrated thermocouple or the like, and the device measures the radiance multiple times while changing the ratio of the radiant flux density adjustment unit (B), thereby acquiring and storing a correspondence table between the radiance and the temperature of the object to be measured. When actually measuring the object to be measured, it can also be configured to obtain a temperature according to the measured radiance and the ratio of the radiant flux density adjustment unit (B) at the time of measurement, based on the stored correspondence table.

[0070] <Embodiment 1 Conversion Function Storage Unit (C): Acquisition of Conversion Function 1: Acquisition Example> An example of the acquisition 1 of the conversion function (acquired in advance at the time of calibration with the coefficient of the term of the basic function as a variable as the conversion function stored in the conversion function storage unit (C)) will be described below. First, the necessity of adjustment in the irradiance flux density adjustment unit (B) will be explained again, and then the acquisition of the variables in the formula by adjusting the ratio will be described.

[0071] <Embodiment 1: Conversion function storage unit (C): Acquisition of conversion function 1: Necessity of adjustment: Relationship between temperature and radiance> As explained above, the higher the temperature of the object to be measured, the higher the radiance, so the temperature can only be measured up to a range whose upper limit is the temperature corresponding to the radiance corresponding to the upper measurement limit of the radiation temperature sensor. Or, similarly, the temperature can only be measured up to a range whose lower limit is the temperature corresponding to the radiance corresponding to the lower measurement limit. Therefore, it is necessary to increase or decrease the radiant flux density of the radiation light incident on the radiation temperature sensor to an arbitrary ratio within a predetermined range by the radiant flux density adjustment unit (B). This will be explained using Figs. 15, 16, and 17. Figs. 15 and 16 are graphs in which both the vertical and horizontal axes are expressed linearly, and Fig. 16 is a graph in which a part of Fig. 15 is enlarged. Fig. 17 is a graph in which the vertical axis of Fig. 15 is expressed logarithmically.

[0072] According to Planck's law, the spectral radiance L from a black body 0 is expressed as a function of wavelength λ and temperature T as shown in the following formula. Note that exp() in the formula represents e to the power of (). L 0 (λ, T) = (2hc 2 ) / (λ 5 ) / (exp(hc / (k B λT))-1) Equation 1 λ: wavelength, T: absolute temperature (K), h: Planck's constant, c: speed of light, k B :Boltzmann constant Spectral radiance of a typical object L 1 is the spectral radiance of the black body L 0 The relationship in Equation 2 is as follows: L 1 (λ, T) = εL 0 (λ, T) Equation 2 In formula 2, ε is the emissivity that depends on the material that makes up the object. If the emissivity of a black body is 1 and the emissivity of a specular body that does not radiate any radiation is 0, then the emissivity ε of a general object is between 0 and 1. The rougher the surface of an object, the higher its emissivity. The emissivity ε in formula 2 is a value that includes the effects of surface roughness.

[0073] For the sake of simplicity, the graphs in Figures 15, 16, and 17 show examples of the spectral radiance of radiation with a wavelength of 1.55 μm emitted from a black body at absolute temperature T (K), measured under ideal conditions. For this reason, in the explanation using Figures 15 and 16, ε in the above formula 2 and in formulas 3 and 4 described below is set to 1. The units of the axes of the graphs in Figures 15 and 16 are temperature (°C) converted from absolute temperature (K) to Celsius (°C) on the horizontal axis and spectral radiance (J / (s m 2 In this specification, the spectral radiance is sometimes referred to simply as radiance. In Figure 15, the vertical axis ranges from 0 to 6×10 8 , the horizontal axis indicates the range from 0 to 1200 °C, and is a diagram for explaining the vicinity of the upper limit of radiance measurement. FIG. 16 is an enlarged view of a part of FIG. 15, and the vertical axis indicates the range from 0 to 5 × 10 6 13 is a graph for explaining the vicinity of the lower limit of radiance, with the horizontal axis indicating the range from 0 to 600° C.

[0074] <Embodiment 1: Conversion function storage unit (C): Acquisition of conversion function 1: Necessity of adjustment: Ratio adjustment> Spectral radiance L from the object to be measured 1 The spectral radiance L adjusted by the radiant flux density adjustment unit (B) according to the ratio a to 2 is expressed by the following equation 3. L 2 =aL 1 =aεL 0 formula 3 Spectral radiance L adjusted by the ratio a based on Equation 1 and Equation 3 2 When transformed into an equation for calculating absolute temperature T, the following equation is obtained. When measuring the temperature of an actual substance or object, the emissivity depends on the constituent substances and their surface shape. T = ((hc) / (λk B )) / ln(((2hc 2 ) / (λ 5(L 2 / (aε))))+1) Equation 4 In Equation 4, a is a ratio adjusted by the irradiance density adjusting unit (B). The value of a in Equation 4 is changed within a predetermined range by the irradiance density adjusting unit (B). 2 The value of is reduced. In Fig. 15, Fig. 16, and Fig. 17, five types of graphs are displayed in which the spectral radiance values ​​are reduced to 40%, 10%, 2%, 0.5%, and 0.16%, corresponding to the values ​​of ratio a of 40%, 10%, 2%, 0.5%, and 0.16% obtained during calibration before starting temperature measurement, for a temperature measurement target that is a black body with emissivity ε = 1. In this explanatory example, a liquid crystal shutter is used for ratio adjustment in the radiant flux density adjustment unit (B), and the transmittance range of the shutter is from 40% to 0.16%.

[0075] <Embodiment 1: Conversion function storage unit (C): Acquisition of conversion function 1: Acquisition of variable: Timing of setting ratio> The conversion function and the ratio at which the radiant flux density adjusting unit (B) increases or decreases the radiant light within a predetermined range may be preset when the radiant light temperature measuring device of the present invention is manufactured, or may be configured to be set (automatically or manually) according to the temperature band required for temperature measurement for the object to be measured when a user who has purchased the radiant light temperature measuring device of the present invention actually starts measuring the temperature. Or a combination of these may be used. In the case of automatic setting, a formula such as the above-mentioned formula 4, which is the basic formula, may be stored in advance, and one or more values ​​of a may be determined and stored according to the temperature measurement temperature band. In that case, the conversion function storage unit (C) may be configured to store formula 4 incorporating one or more automatically set a, or the conversion function storage unit (C) may further be configured to have a conversion function correction ratio storage means for storing a corresponding to the temperature measurement temperature band. In addition, in the measurement of an actual sample (a sample that is not a black body), since the emissivity ε is not 1, the emissivity ε is separately calculated to determine the value of a, or the value of b, b=aε, is calculated and substituted into the formula, or the like.

[0076] When the form of the conversion function is different from that of Equation 4, the conversion function storage unit (C) may be configured to store the coefficients and intercepts of one or more terms for the equation corresponding to each measured temperature range, instead of the above a, or when the form of the equation does not change for each measured temperature range, the conversion function storage unit (C) may be further configured to include a conversion function correction ratio storage means for storing the coefficients and intercepts of the equation corresponding to the measured temperature range.

[0077] The acquisition and retention of the conversion functions exemplified as the acquisition 2 and 3 of the conversion functions can be similarly configured to be acquired at the time of manufacture and / or acquired and retained before the start of actual temperature measurement.

[0078] <Embodiment 1: Conversion function storage unit (C): Acquisition of conversion function 1: Effect of ratio adjustment> In Figures 15 and 16, the lower limit of measurable radiance is set to 1.0×10 6 , upper limit 5.0×10 8 In the graph of 40%, the temperatures (℃) corresponding to the lower and upper measurement limits of radiance are 326℃ and 728℃, so the temperature measurement range is 326℃ to 728℃. In the graph of 10%, the temperature range is 385℃ to 904℃, in the graph of 2%, the temperature range is 470℃ to 1205℃, in the graph of 0.5%, the temperature range is 563℃ to 1622℃, and in the graph of 0.16%, the temperature range is 658℃ to 2186℃. As shown in FIG. 15, for example, when measuring the high temperature side, the temperature can only be measured up to 728℃ under the condition of 40%, but it can be measured up to 904℃ by reducing the radiant light incident on the radiation temperature sensor to 10%. If the minimum transmittance of the liquid crystal shutter in this example is reduced to 0.16%, the temperature can be measured up to 2186℃ on the high temperature side.

[0079] <Embodiment 1: Conversion function storage unit (C): Acquisition of conversion function 1: Ratio switching> When measuring the temperature of a temperature measurement target that is about to start heating, the ratio where the reduction in the radiant flux density incident on the radiation temperature sensor is small (the radiant flux density of the incident radiation light is large), that is, the ratio is started from the larger one. Then, when the radiance reaches (or exceeds) a predetermined upper threshold, the radiant flux density incident on the sensor is adjusted so that it is further reduced (for example, the ratio is reduced from 40% to 10% in FIG. 15). The predetermined upper threshold that determines the timing of the adjustment is, for example, the upper limit of the radiance measurement. When the upper limit of the radiance measurement, which is the upper threshold, is reached during measurement at a ratio of 40%, the ratio is adjusted (reduced) so that it is further reduced, and the radiance measurement is continued. As described later, it is preferable to set the upper threshold value to a radiance smaller than the upper limit of the radiance measurement.

[0080] Conversely, when measuring the temperature of a high-temperature object during cooling, the ratio starts with a larger decrease in the radiant flux density incident on the radiation temperature sensor (the radiant flux density of the incident radiation light is small), i.e., the ratio is small. Then, when the radiance reaches (or falls below) a predetermined lower threshold, the radiant flux density incident on the sensor is adjusted to increase (for example, the ratio is increased from 0.16% to 0.5% in FIG. 16). The lower threshold that determines the timing of the adjustment is, for example, the lower limit of radiance measurement. When the lower threshold, the lower limit of radiance measurement, is reached, the ratio is adjusted (increased) to increase it further, and the radiance measurement continues. As described later, it is preferable to set the lower threshold to a radiance greater than the lower limit of radiance measurement.

[0081] <Embodiment 1: Conversion function storage unit (C): Acquisition of conversion function 1: Setting of threshold: High temperature side> When measuring the high temperature side, the upper threshold for changing the subtraction ratio may be the upper measurement limit value itself, but since there is a possibility that the error of the measured value itself may become large near the upper measurement limit, an upper threshold lower than the upper limit value is set, and the ratio is reduced so that the subtraction ratio is further reduced when the upper threshold value has a predetermined relationship (e.g., the same as a predetermined value, exceeds a predetermined value). The upper threshold value is not fixed, and a different upper threshold value may be set according to the temperature measurement zone.

[0082] <Embodiment 1: Conversion function storage unit (C): Acquisition of conversion function 1: Setting of threshold: Low temperature side> When measuring the low temperature side, there is a possibility that the error of the measured value itself will be large near the lower limit of measurement, so a lower threshold value larger than the lower limit of measurement is set, and when a predetermined relationship with the lower threshold value is reached (e.g., the same as a predetermined value, or below a predetermined value), the ratio is increased so that the value increases more. The lower threshold value is not fixed, and different lower threshold values ​​may be set according to the temperature measurement zone.

[0083] <Embodiment 1 Temperature Calculation Unit (D) (0104)> The "temperature calculation unit (D)" (0104) is configured to select a stored conversion function according to the ratio at which the radiant flux density is adjusted by the radiant flux density adjustment unit (B), and to calculate the temperature based on the selected conversion function and the measured radiance.

[0084] A conversion function corresponding to the ratio at which the radiant flux density is adjusted by the radiant flux density adjusting unit (B) is selected. When the synchrotron radiation temperature measuring device of the present invention is operated, the temperature calculating unit (D) receives and stores information indicating the ratio at which the radiant flux density adjusting unit (B) adjusts the radiant flux density, and when the radiant flux density adjusting unit (B) changes the ratio at which the radiant flux density is adjusted, the temperature calculating unit (D) can be configured to update the information indicating the stored ratio. Alternatively, the temperature calculating unit (D) can be configured to acquire the information indicating the ratio each time the temperature is calculated.

[0085] The temperature calculation unit (D) (0104) can be further configured to have a correction coefficient storage means for storing a calibration correction coefficient used when calculating the temperature in this device based on a comparison with other calibrated thermometers such as thermocouples or a result of measuring a calibrated black body furnace with this device. By storing the calibration correction coefficient and using it when calculating the temperature, a more accurate temperature can be calculated.

[0086] In the above description, when the measured radiance is between the lower threshold and the upper threshold, the measurement is continued without increasing or decreasing the ratio. For example, in the graphs of 40% in the figures, the radiance measurement is performed while maintaining the liquid crystal shutter transmittance (ratio) of 40% from the lower threshold, which is the lower limit of radiance measurement, to the upper threshold, which is the upper limit of radiance measurement. The same is true for the graphs of other ratios in the figures. Maintaining the ratio means, for example, maintaining the drive voltage so as not to increase or decrease the transmittance of the liquid crystal shutter when a liquid crystal shutter is used in the radiant flux density adjustment unit (B), and maintaining the angle between the two polarizing filters so as not to increase or decrease the transmittance when a rotatable polarizing plate is used.

[0087] <Embodiment 1: Measurement method for keeping radiance almost constant> As explained above, instead of adjusting the ratio when the upper or lower threshold and the radiance have a predetermined relationship (reached or crossed), the ratio may be adjusted while the radiance is between the upper and lower thresholds as shown in FIG. 19, and the temperature may be measured while keeping the radiance almost constant. FIG. 19 shows an example in which a liquid crystal shutter capable of arbitrarily varying the ratio of subtracting the radiance from the original radiance within a range of 40% to 0.16% is used in the radiant flux density adjusting section (B) as in the explanation of FIG. 15 to FIG. 17. FIG. 19 shows a graph of the maximum ratio of 40% (maximum transmittance of the liquid crystal shutter) and the minimum ratio of 0.16% (minimum transmittance of the liquid crystal shutter) shown in FIG. 15, a graph showing the upper limit of radiance measurement as the upper threshold and the lower limit of radiance measurement as the lower threshold, and a graph showing the relationship between radiance and temperature during temperature measurement (from point A to point D in the figure). Note that point A in the figure is the intersection point between the graph of the ratio of 40% and the lower limit of radiance measurement, which is the lower threshold. The ratio for each temperature is adjusted as shown in FIG. 20 so that the radiance is almost constant between points B and C in the figure (the measured radiance may vary within ±10%).

[0088] The deviation in the measured radiance value may be caused not only by measurement error, but also by the constraints of the ratio adjustment step (the smallest adjustable unit, e.g., the gradation of a driver IC for driving an LCD shutter) which causes the ratio to be adjusted slightly away from the optimal ratio that results in a constant radiance.

[0089] In this way, the method of measuring while keeping the radiance constant allows the measurement to be performed while keeping the radiance within a range where the radiance value can be measured most accurately due to the characteristics of the radiation temperature sensor.

[0090] <Embodiment 1: Synchrotron Radiation Temperature Measuring Device (0100)> The "radiation temperature measuring device" (0100) is composed of a radiation temperature measuring section (A) (0101), a radiation flux density adjusting section (B) (0102), a conversion function holding section (C) (0103), and a temperature calculating section (D) (0104).

[0091] <Embodiment 1: Synchrotron Radiation Temperature Measuring Device: Explanation of the System Using an Example> <Embodiment 1: Synchrotron Radiation Temperature Measuring Device: Configuration Example of This System> An example of the conceptual configuration of the system of the radiation thermometry device of the present invention will be described with reference to FIG. 13. In the example of FIG. 13, the temperature of the temperature measurement target (1310) placed in front of an electrically heated heater (1311) is measured when the target is heated, and it is confirmed that the target is normally at the desired temperature. The system can be monitored via a LAN (1350) from a PC (1352) in an office or other location away from the work site where the heat treatment is performed. The system can also be configured so that an engineer working from home can obtain the temperature measurement results via an Internet line (1340). Although the device shown in FIG. 13 is configured to be entirely housed in a single housing, it may also be configured so that, for example, the arithmetic board in the figure is housed in a separate housing and connected to the housing in which the radiation thermometry unit (A) and the radiant flux density adjustment unit (B) are located by cables or the like (or wireless communication).

[0092] <Embodiment 1: Synchrotron Radiation Temperature Measuring Device: Use of the Device: Preparation for Use> An example of temperature measurement using the configuration example of the present device shown in Fig. 13 will be described below. Note that as the conversion function, the above-mentioned formula 4 will be used as an example.

[0093] <Embodiment 1: Synchrotron Radiation Temperature Measuring Device: Use of the Device: Preparation for Use> When actually measuring the temperature of an object using the synchrotron radiation temperature measuring device of the present invention, it is advisable to calibrate the device in advance as follows: When measuring multiple objects of the same composition (material, structure) in sequence, the device may be used with the settings calibrated by performing the following steps (1) to (5) first, without calibrating each time. (1) Using a thermometer such as a pre-calibrated thermocouple, measure the temperature of an object that has been set to a specified temperature for calibration. (2) This device is adjusted so that the radiation flux density incident on the radiation temperature sensor is maximum within the specified range of adjustment of the radiation flux density adjustment unit (B), and the temperature of a calibration blackbody furnace set to the same temperature as the above-mentioned object is measured. (3) The temperature of the object that has been set to the specified temperature in (1) is measured using this device. (4) (without adjusting the ratio to subtract radiation) repeat steps (1) to (3) above for three or more different temperatures within the radiance measurement range. (5) A correction coefficient for calibration is obtained based on the temperature of the object measured by this device at three or more different temperatures and the temperature of the corresponding blackbody furnace. In order to use the above-mentioned formula 4 as a conversion function (if the form of the formula differs from that of formula 4, the necessary coefficients and intercepts are obtained), the emissivity ε is obtained by comparing the blackbody furnace with the calibration object in the above-mentioned preliminary measurement, and the ratio a is corrected by comparing the set value of the ratio a in the radiant flux density adjustment unit (B) with the measurement result.

[0094] Since the emissivity of an object may have angle dependency due to the surface shape or roughness, it is preferable to measure the radiance from the object in the positional relationship (distance and angle) where the temperature is actually measured in the above (1) to (5). Depending on the method of configuration, the correction coefficient for calibration may be applied to the measured radiance or an electric signal based on the radiance, or may be used to correct the conversion function (correction example: multiplying or subtracting the correction coefficient from the result obtained from the conversion function). The correction coefficient for calibration may be configured to set a correction coefficient for each conversion function by changing the adjustment ratio of the radiant flux density adjustment unit (B) in several ways. Alternatively, the correction coefficient determined by the above processes (1) to (5) may be configured to be applied to each conversion function.

[0095] <Embodiment 1: Synchrotron Radiation Temperature Measuring Device: Use of the Device: Temperature Measurement> After starting up the device and performing calibration, power supply to the heater (1311) is started and heating of the object to be measured (1310) is started. Temperature measurement is performed appropriately. For example, the device is configured to measure temperature at predetermined time intervals, such as once a minute. The measured temperature is output from the temperature calculation unit (1304) via a USB terminal or Modbus to a display (1354) or a recording device (not shown) such as a plotter. Alternatively, the temperature is sent to a LAN (1350) via a LAN terminal and is stored in a server device (1351) or acquired by a PC (1352).

[0096] The temperature measurement target (1310) heated by the heater (1311) emits radiant light with a brightness corresponding to the temperature. The radiant light temperature measuring device (1300) of the present invention receives the radiant light at the radiant temperature measuring section (A) (1301).

[0097] <Embodiment 1: Radiation temperature measuring device: Use of this device: Radiation temperature measuring section (A): Measurement of radiance> A protective filter may be installed on the side of the radiation temperature measuring unit (A) (1301) closest to the object to be measured to protect the optical system such as the lens. In Figure 13, a protective filter is not installed, and a bandpass filter that transmits only specific wavelengths (e.g. 1.55 μm) of radiation light is installed facing the object to be measured. The spectral radiation light that transmits only the specific wavelengths by the bandpass filter is focused by a lens. After passing through the lens, the radiation flux density is reduced by the radiation flux density adjustment unit (B). The reduced radiation light enters a radiation temperature sensor made of an InGaAs element or the like and is output as an electrical signal. The electrical signal output according to the radiance is amplified by a preamplifier, converted from analog to digital by an AD converter, and output to the calculation board as a digital signal.

[0098] <Embodiment 1: Synchrotron Radiation Temperature Measuring Device: Use of the Device: Radiant Flux Density Adjustment Unit (B): Radiant Flux Density Adjustment> The irradiance flux density adjusting unit (B) is configured to increase or decrease the radiant light emitted from the temperature measurement target (1310) to any ratio within a predetermined range as described above. One example of a mechanism for increasing or decreasing the radiant flux density is a liquid crystal shutter. In FIG. 13, it is arranged behind the lens, but it may be arranged between the band pass filter and the lens, in front of the band pass filter (the arrangement closest to the temperature measurement target), or in front of the lens in a configuration without a band pass filter.

[0099] The calculation board performs various correction calculations on the measured radiance based on the correction data stored in the correction table. The various correction calculations can be configured to perform calculations using the correction coefficients for calibration as described above, corrections required for the design of this device (such as the transmittance of the optical system including the lens and the sensitivity of the radiation temperature sensor), and corrections for manufacturing variations (such as variations in the sensitivity of the radiation temperature sensor).

[0100] Next, a ratio for reducing the radiant light is determined within a predetermined range (e.g., within the range of transmittance adjustable by the liquid crystal shutter) based on a radiant flux density control algorithm for controlling the liquid crystal shutter for adjusting the radiant flux density. In order to perform the process for determining the ratio, the radiant flux density adjusting unit (B) may further include a radiant flux density control algorithm processing means for determining a ratio for reducing the radiant light within a predetermined range based on a radiant flux density control algorithm. The determined ratio is output to the liquid crystal shutter, and the liquid crystal shutter changes the transmittance according to the obtained ratio. Alternatively, the radiant flux density control algorithm processing means may be configured to output an electric signal (e.g., a voltage signal) for driving the liquid crystal shutter based on the ratio to the liquid crystal shutter, instead of the ratio itself.

[0101] The irradiance density adjusting unit (B) is preferably configured to further include an irradiance density adjustment ratio holding means for holding a history of a ratio for increasing or decreasing the irradiance density to an arbitrary ratio within a predetermined range. The irradiance density adjusting unit (B) is configured to hold at least the adjusted ratio when the ratio is adjusted. Alternatively, the irradiance density adjusting unit (B) can be configured to include an irradiance density adjustment ratio output request acquisition and holding means for acquiring an irradiance flux density adjustment ratio output request, which is a request for outputting a ratio for increasing or decreasing the irradiance density to an arbitrary ratio within a predetermined range, and an irradiance flux density adjustment ratio output means for outputting the irradiance flux density adjustment ratio when the irradiance flux density adjustment ratio output request is acquired. For example, this is effective in a case where the temperature calculating unit (D) needs to acquire an irradiance flux density adjustment ratio to select a conversion function when calculating a temperature, and outputs a irradiance flux density adjustment ratio output request.

[0102] <Embodiment 1: Synchrotron Radiation Temperature Measuring Device: Use of the Device: Conversion Function Storage Unit (C): Conversion Function According to Ratio> The conversion function holding unit (C) is configured to hold a plurality of conversion functions corresponding to the temperature measurement zone. In the explanation using FIG. 15 and FIG. 16, it has been explained that the temperature measurement zone changes according to the ratio at which the radiant flux density is increased or decreased at an arbitrary ratio within a predetermined range. Therefore, the "conversion function corresponding to the temperature measurement zone" can be rephrased as "a conversion function corresponding to the ratio at which the radiant flux density is increased or decreased at an arbitrary ratio within a predetermined range". In other words, the conversion function holding unit (C) can be rephrased as being configured to hold a plurality of conversion functions that correspond to the incident radiant light luminance, which is the luminance of the radiant light incident on the radiant temperature measuring sensor of the radiant temperature measuring unit (A), and the temperature of the object to be measured, according to the ratio at which the radiant flux density is increased or decreased at an arbitrary ratio within a predetermined range, according to the adjusted radiant flux density. It is preferable to hold a plurality of conversion functions associated with the ratio at which the radiant flux density is increased or decreased at an arbitrary ratio within a predetermined range. The temperature calculation unit (D) can select a conversion function held in the conversion function holding unit (C) based on the "ratio at which the radiant flux density is increased or decreased at an arbitrary ratio within a predetermined range" in order to calculate the temperature from the measured radiant flux density.

[0103] <Embodiment 1: Synchrotron Radiation Temperature Measuring Device: Use of the Device: Temperature Calculation Unit (D): Temperature Calculation> The temperature calculation unit (D) acquires the ratio at which the radiant flux density adjustment unit (B) increases or decreases the radiant flux density to an arbitrary ratio within a predetermined range, selects and acquires a conversion function associated with the ratio and stored from the conversion function storage unit (C), and calculates the temperature based on the selected conversion function and the measured spectral radiance. The temperature is calculated by substituting the measured spectral radiance, the spectrally dispersed wavelength, and a correction coefficient (such as a correction coefficient derived from emissivity) into a conversion function such as Equation 4 to obtain an absolute temperature (K). If necessary, the temperature is converted to a Celsius notation. A conversion function that can directly obtain a Celsius notation may be used.

[0104] The calculated temperature is output to the display (1354) or LAN (1350) as described above.

[0105] A lower and upper threshold value is set for the radiance measured by the radiation temperature measuring unit (A), and when the threshold value (e.g., 80% of the radiation light measurement limit) is reached or crossed, the radiant flux density is increased or decreased at an arbitrary rate within a predetermined range. Once the radiance measured by the radiation temperature measuring unit (A) reaches or crosses the threshold value, it is preferable that the radiant flux density control algorithm processing means adjusts the transmittance of the liquid crystal shutter (which may be a rotatable polarizing plate) of the radiant flux density adjusting unit (B) before calculating the temperature, and the radiation temperature measuring unit (A) is calibrated again to measure the radiance with the radiation temperature measuring sensor.

[0106] In the above explanation, the process of increasing or decreasing the radiation flux density incident on a unit area of ​​the surface of the radiation temperature sensor to a ratio within a predetermined range by the radiation flux density adjustment unit (B) was performed automatically. However, instead of being automatic, it is also possible to configure the device of the present invention so that the person who intends to measure the temperature directly specifies and inputs the ratio, or directly inputs the electrical signal (e.g., voltage signal) or information (e.g., command signal to the driving IC) required to achieve the ratio.

[0107] When measuring the temperature in a state where the temperature change occurs rapidly in the same time or less than the time required for adjusting the ratio in the radiant flux density adjustment unit (B), two or more synchrotron radiation temperature measuring devices of the present invention can be configured to be linked to perform the measurement. Or, at least two or more radiant temperature measuring units (A) and radiant flux density adjustment units (B) may be provided. For example, when using two to measure the temperature during heating, the radiance is measured with the radiant flux density adjustment unit (B) of one of the configurations 1 at a large ratio and the result is used for temperature calculation, and the radiance is simultaneously measured with the ratio of the radiant flux density adjustment unit (B) of the other configuration 2 at a smaller ratio. When the radiance measured by the configuration 1 with the larger ratio reaches (reaches or exceeds) a predetermined relationship with the upper threshold, the radiance measurement value of the configuration 2 with the smaller ratio is immediately used as the measurement value and used for temperature calculation. The configuration 2 that has been switched and started to be used uses the measured radiance for temperature calculation until the measured radiance reaches a predetermined relationship with the upper threshold. Configuration 1 is adjusted to have a smaller ratio than configuration 2, and radiance measurements are performed in parallel to prepare for the time when the radiance measurement value of configuration 2 will have a predetermined relationship with the upper threshold. With this configuration, the ratio can be changed (adjusted) regardless of the adjustment time of the ratio in the radiant flux density adjustment unit (B). Note that, in temperature measurement during temperature drop, the temperature is calculated using the radiance measurement result of configuration 1, which has a smaller ratio, and when the radiance measurement value has a predetermined relationship with the lower threshold (reached or fell below), the temperature is switched to be calculated using the radiance measurement value of configuration 2, which was measured simultaneously with a ratio larger than that of configuration 1.

[0108] <Processing flow of embodiment 1> Fig. 2 is a flowchart of the operation method of the synchrotron radiation temperature measuring device, which is the computer of embodiment 1. As shown in this figure, the synchrotron radiation temperature measuring device of embodiment 1 has a conversion function holding step (c) (S0201), a radiant flux density adjustment step (b) (S0202), a radiation temperature measuring step (a) (S0203), and a temperature calculation step (d) (S0204).

[0109] Here, the operation method of the synchrotron radiation temperature measuring device, which is a computer, is as follows: The conversion function holding step (c) (S0201) performs a process of holding a plurality of conversion functions, which correspond to the incident radiant light luminance, which is the luminance of the radiant light incident on the radiation temperature measuring sensor of the radiation temperature measuring unit (A), and the temperature of the object to be measured, according to the adjusted radiant flux density, in accordance with the temperature measurement temperature range of the object to be measured; The radiation flux density adjustment step (b) (S0202) includes performing a process of adjusting the radiation flux density, which is the amount of radiation flux per unit area of ​​the radiation temperature sensor of the radiation temperature measuring unit (A), so as to increase or decrease the radiation flux density at an arbitrary ratio within a predetermined range; The radiation temperature measurement step (a) (S0203) measures the radiance, which is the brightness of the radiation light emitted from the temperature measurement object (including the case of spectral radiance, which is the radiance of a specific wavelength), using a radiation temperature sensor to obtain the temperature of the temperature measurement object. A temperature calculation step (d) (S0204) selects a stored conversion function according to the ratio at which the radiant flux density is adjusted in the radiant flux density adjustment step (b) (S0202), and calculates a temperature based on the selected conversion function and the measured radiance. This is an operating method for causing a series of such processes to be executed by a synchrotron radiation temperature measuring device, which is a computer.

[0110] <Description of Hardware in First Embodiment>

[0111] <Hardware configuration of embodiment 1> The hardware configuration of the computer part of the synchrotron radiation temperature measuring device in the first embodiment will be described with reference to FIG.

[0112] 3 is a diagram showing the hardware configuration of the computer part of the synchrotron radiation temperature measuring device in this embodiment 1. As shown in this diagram, an example of the computer part of the synchrotron radiation temperature measuring device in this embodiment includes an "MPU" that performs various calculation processes, a "main memory", a "non-volatile memory" that stores various programs and data (information), a "user I / F", a "USB, I 2 It is equipped with "USB, I / F, SPI, etc." and "LAN I / F." 2The "radiation thermometry sensor, calculation board" are connected via "USB, SPI, etc." These are then interconnected by the "system bus" shown by the thick line in the diagram, and send and receive information and perform processing. The computer part of the radiation thermometry device can also be configured in accordance with a known PC, as mentioned above.

[0113] The various programs and data (information) stored in the non-volatile memory are expanded into the main memory when the system is started up, and upon receiving an execution command, the MPU sequentially executes the programs to perform calculations using the data.

[0114] When this system starts up, the various programs and data (information) stored in the "non-volatile memory" are read, expanded, and stored in the "main memory," which also provides a work area for those programs. By receiving execution commands, the "MPU" sequentially executes calculations using the data in the programs. Note that multiple addresses are assigned to the "main memory" and "non-volatile memory," and programs executed by the "MPU" can exchange data with each other and perform processing by identifying and accessing those addresses.

[0115] In this embodiment, the programs stored in the "main memory" are a radiation temperature measurement program (a), a radiant flux density adjustment program (b), a conversion function storage program (c), and a temperature calculation program (d). In addition, the "main memory" and the "non-volatile memory" store radiance, radiant flux density, conversion functions, temperature, etc.

[0116] "MPU" is A conversion function storage program (c) stored in the "main memory" is executed to store a plurality of conversion functions that correspond, according to the adjusted radiation flux density, the incident radiation light luminance, which is the luminance of the radiation light incident on the radiation temperature sensor of the radiation temperature measuring unit (A), to the temperature of the object to be measured, according to the temperature measurement temperature range of the object to be measured. Then, the radiation flux density adjustment program (b) stored in the "main memory" is executed to adjust the radiation flux density, which is the amount of radiation flux per unit area of ​​the radiation temperature sensor of the radiation temperature measuring unit (A) that is incident on the radiation temperature measuring sensor, so as to increase or decrease it at any ratio within a specified range. Then, the radiation temperature measuring program (a) stored in the "main memory" is executed, and the radiance, which is the brightness of the radiant light emitted from the temperature measuring object (including the case of spectral radiance, which is the radiance of a specific wavelength), is measured by the radiation temperature measuring sensor to obtain the temperature of the temperature measuring object. Then, a temperature calculation program (d) stored in the "main memory" is executed to select a stored conversion function according to the ratio at which the radiant flux density adjustment program (b) adjusted the radiant flux density, and calculates the temperature based on the selected conversion function and the measured radiance. The calculated temperature is displayed on a screen via the graphics card, or output to a server device or PC from "USB, SATA, LAN terminal, etc." via a LAN line or Internet line.

[0117] <Effects of the First Embodiment> The radiation thermometer of this embodiment 1 can provide a radiation thermometer capable of measuring temperatures over a wide temperature range by adjusting the radiation flux density adjustment unit (B) to increase or decrease the radiation flux density, which is the amount of radiation flux per unit area of ​​the radiation thermometer of the radiation incident on the radiation thermometer, at an arbitrary ratio within a predetermined range.

[0118] <Overview of embodiment 2> Mainly claims 2, 6, and 10 The radiation flux density adjustment section (B) of the radiation light temperature measuring device of the present invention of embodiment 2 based on embodiment 1 is further configured to have a radiation flux density continuous adjustment means (E) for continuously increasing or decreasing the ratio at which the radiation flux density is increased or decreased to an arbitrary ratio within a predetermined range within the predetermined range.

[0119] <Functional configuration of embodiment 2> 4 shows a conceptual configuration diagram of a synchrotron radiation temperature measuring device of embodiment 2 based on embodiment 1. The synchrotron radiation temperature measuring device of embodiment 2 has a continuous irradiance flux density adjusting means (E) (0405) in a irradiance flux density adjusting section (B) (0402) in addition to the configuration of embodiment 1. Since everything except the continuous irradiance flux density adjusting means (E) (0405) has already been explained in embodiment 1, only the continuous irradiance flux density adjusting means (E) (0405) will be explained below.

[0120] <Description of the configuration of embodiment 2> <Embodiment 2: Radiant flux density continuous adjusting means (E) (0405)> The 'radiant flux density continuous adjusting means (E)' (0405) is configured in the radiant flux density adjusting section (B) (0402) so as to continuously increase or decrease the rate at which the radiant flux density is reduced within a predetermined range.

[0121] "Continuous" means that when the radiant flux density adjusting unit (B) is driven to adjust the transmittance of the radiant light by a mechanism that actually reduces the radiant flux density (e.g., liquid crystal shutter, rotatable polarizer), for example, if driven by a voltage signal, any voltage can be set from the minimum amplitude to the maximum amplitude of the voltage signal. When the voltage signal is output as a result of digital processing, for example, in the case of transmittance adjustment using a liquid crystal shutter, if the driver for driving the liquid crystal panel is a 10-bit driver, the voltage value will be 1024 steps from the minimum to the maximum value of the liquid crystal applied voltage. "Continuous" means that any of these 1024 steps can be set. When a stepping motor is used to adjust the transmittance using a rotatable polarizer (variable ND filter), the angle between the polarization axes of the two PL filters that make up the variable ND filter is adjusted between 0 and 90 degrees. A pulse signal for driving the stepping motor is output and the polarizer is rotated by an angle corresponding to the number of pulses. Therefore, "continuous" means that the polarizer can be rotated by any number of pulses between 0 and 90 degrees, with the rotation angle per pulse being the unit, to adjust the transmittance.

[0122] <Processing flow of embodiment 2> 5 is a flowchart of an operation method of a synchrotron radiation temperature measuring device which is a computer of embodiment 2 based on embodiment 1. As shown in this figure, the synchrotron radiation temperature measuring device of embodiment 2 has a conversion function holding step (c) (S0501), a radiant flux density adjustment step (b) (S0502), a radiant flux density continuous adjustment means (e) (S0503) in the radiant flux density adjustment step (b), a radiant temperature measuring step (a) (S0504), and a temperature calculation step (d) (S0505).

[0123] Here, the operation method of the synchrotron radiation temperature measuring device, which is a computer, is as follows: The conversion function holding step (c) (S0501) performs a process of holding a plurality of conversion functions, which correspond to the incident radiation light luminance, which is the luminance of the radiation light incident on the radiation temperature measuring sensor of the radiation temperature measuring unit (A), and the temperature of the object to be measured, according to the adjusted radiation flux density, in accordance with the temperature measurement temperature range of the object to be measured; The radiation flux density adjustment step (b) (S0502) performs a process of adjusting the radiation flux density, which is the amount of radiation flux per unit area of ​​the radiation temperature sensor of the radiation temperature measuring unit (A), so as to increase or decrease the radiation flux density at an arbitrary ratio within a predetermined range; The irradiance flux density continuous adjustment means (e) (S0503) in the irradiance flux density adjustment step (b) (S0502) performs a process of continuously increasing or decreasing the ratio of the irradiance flux density reduction within a predetermined range, The radiation temperature measurement step (a) (S0504) measures the radiance, which is the brightness of the radiation light emitted from the temperature measurement object (including the case of spectral radiance, which is the radiance of a specific wavelength), using a radiation temperature sensor to obtain the temperature of the temperature measurement object. A temperature calculation step (d) (S0505) selects a stored conversion function according to the ratio at which the radiant flux density is adjusted in the radiant flux density adjustment step (b) (S0502), and performs a process of calculating a temperature based on the selected conversion function and the measured radiance. This is an operating method for causing a series of such processes to be executed by a synchrotron radiation temperature measuring device, which is a computer.

[0124] <Embodiment 2: Description of Hardware>

[0125] <Hardware configuration of embodiment 2> The hardware configuration of the computer part of the synchrotron radiation temperature measuring device in the present embodiment 2 based on the embodiment 1 will be described with reference to FIG.

[0126] 6 is a diagram showing the hardware configuration of the computer part of the synchrotron radiation temperature measuring device in this embodiment 2. As shown in this diagram, an example of the computer part of the synchrotron radiation temperature measuring device in this embodiment includes an "MPU" that performs various calculation processes, a "main memory", a "non-volatile memory" that stores various programs and data (information), a "user I / F", a "USB, I 2 It is equipped with "USB, I / F, SPI, etc." and "LAN I / F." 2 The "radiation thermometry sensor, calculation board" are connected via "USB, SPI, etc." These are then interconnected by the "system bus" shown by the thick line in the diagram, and send and receive information and perform processing. The computer part of the radiation thermometry device can also be configured in accordance with a known PC, as mentioned above.

[0127] The various programs and data (information) stored in the non-volatile memory are expanded into the main memory when the system is started up, and upon receiving an execution command, the MPU sequentially executes the programs to perform calculations using the data.

[0128] When this system starts up, the various programs and data (information) stored in the "non-volatile memory" are read, expanded, and stored in the "main memory," which also provides a work area for those programs. By receiving execution commands, the "MPU" sequentially executes calculations using the data in the programs. Note that multiple addresses are assigned to the "main memory" and "non-volatile memory," and programs executed by the "MPU" can exchange data with each other and perform processing by identifying and accessing those addresses.

[0129] In this embodiment, the programs stored in the "main memory" are a radiation temperature measurement program (a), a radiant flux density adjustment program (b), a conversion function storage program (c), a temperature calculation program (d), and a radiant flux density continuous adjustment sub-program (e). In addition, the "main memory" and the "non-volatile memory" store radiance, radiant flux density, conversion functions, temperature, etc.

[0130] "MPU" is A conversion function storage program (c) stored in the "main memory" is executed to store a plurality of conversion functions that correspond, according to the adjusted radiation flux density, the incident radiation light luminance, which is the luminance of the radiation light incident on the radiation temperature sensor of the radiation temperature measuring unit (A), to the temperature of the object to be measured, according to the temperature measurement temperature range of the object to be measured. Then, the radiation flux density adjustment program (b) stored in the "main memory" is executed to adjust the radiation flux density, which is the amount of radiation flux per unit area of ​​the radiation temperature sensor of the radiation temperature measuring unit (A) that is incident on the radiation temperature measuring sensor, so as to increase or decrease it at any ratio within a specified range. Then, the subprogram (e) for continuously adjusting the irradiance is executed, which is stored in the "main memory", to continuously increase or decrease the rate at which the irradiance is reduced within a predetermined range. Then, the radiation temperature measuring program (a) stored in the "main memory" is executed, and the radiance, which is the brightness of the radiant light emitted from the temperature measuring object (including the case of spectral radiance, which is the radiance of a specific wavelength), is measured by the radiation temperature measuring sensor to obtain the temperature of the temperature measuring object. Then, a temperature calculation program (d) stored in the "main memory" is executed to select a stored conversion function according to the ratio at which the radiant flux density adjustment program (b) adjusted the radiant flux density, and calculates the temperature based on the selected conversion function and the measured radiance. The calculated temperature is displayed on a screen via the graphics card, or output to a server device or PC from "USB, SATA, LAN terminal, etc." via a LAN line or Internet line.

[0131] In this second embodiment, the device further includes a continuous irradiance flux density adjustment means (E) for continuously changing the ratio of increase or decrease in irradiance flux density within a predetermined range. This makes it possible to arbitrarily increase or decrease the reduction ratio by replacing multiple ND filters that were previously attached during manufacture, rather than varying the reduction ratio by discrete values ​​such as 1 / 4, 1 / 16, and 1 / 64.

[0132] <Overview of embodiment 3> Mainly claims 3, 7, and 11 The radiation flux density adjustment unit (B) of the radiation light temperature measuring device of the present invention in embodiment 3 based on either embodiment 1 or 2 is configured to review the rate at which the radiation flux density incident on the radiation temperature measuring sensor is increased or decreased to an arbitrary rate within a predetermined range when the radiance measured by the radiation temperature measuring sensor of the radiation temperature measuring unit (A) falls into a predetermined relationship with an upper threshold or a lower threshold.

[0133] <Functional configuration of embodiment 3> FIG. 7 shows a conceptual diagram of the synchrotron radiation temperature measuring device of embodiment 3 based on embodiment 1. The synchrotron radiation temperature measuring device of embodiment 3 has the same configuration as embodiment 1. Only the irradiance flux density adjusting unit (B) (0702) and the temperature calculating unit (D) (0704), whose functions are different from those of embodiment 1, will be explained. Note that the same effect can be obtained even if embodiment 2 is used as a base.

[0134] <Description of the configuration of embodiment 3> <Embodiment 3: Radiant flux density adjusting unit (B) (0702)> The "radiant flux density adjustment unit (B)" (0702) is When the radiance measured by the radiation temperature sensor of the radiation temperature measuring unit (A) falls into a predetermined relationship with an upper limit threshold value for adjusting the radiation flux density set according to the temperature measurement temperature zone, the ratio of the radiation flux density adjustment is reviewed so as to further reduce the radiation flux density incident on the radiation temperature measuring sensor; When the radiance measured by the radiation temperature sensor of the radiation temperature measuring unit (A) falls into a predetermined relationship with a lower threshold value for adjusting the radiation flux density set according to the temperature measurement range, the ratio of the radiation flux density adjustment is reviewed so as to further increase the radiation flux density incident on the radiation temperature measuring sensor.

[0135] An example of reviewing the ratio when adjusting the radiant flux density using a threshold has already been explained in the first embodiment, but it will be briefly explained again. As shown in Figures 15 and 16, the radiation temperature sensor has an upper limit and a lower limit of the radiance that can be measured. A radiance equal to or lower than the upper limit of the radiance measurement is set as the upper threshold, and a radiance equal to or higher than the lower limit of the radiance measurement is set as the lower threshold.

[0136] For example, the upper threshold value will be described as follows: the upper threshold value is set to 80% of the upper limit of the radiance measurement, and the ratio at the time of adjusting the radiant flux density is reviewed so that the radiant flux density incident on the radiation temperature sensor can be increased or decreased at any ratio within a specified range. This corresponds to the case where a material is heated in heat treatment and the temperature rise is monitored. In Figure 15, the upper limit of the radiant brightness measurement, 5×10 8 4×10 8 is the upper threshold. At a ratio of 40%, the upper threshold is 4×10 8 The maximum measurable temperature is 704°C. When the upper threshold is reached, the 40% ratio is reviewed. For example, one way to determine the next ratio for a graph like the one shown in Figure 15 is to lower the ratio below 40% so that the measured temperature at the upper threshold for the next ratio is 200°C higher than the measured temperature at the upper threshold for the current ratio, and then to set the ratio to 8% so that the measured temperature at the upper threshold is 904°C.

[0137] Instead of adjusting the ratio based on the predicted upper measurement limit temperature of the next ratio, the ratio is reduced in 10% increments, and when it reaches 10%, it is reduced by 1%, and when it reaches 1%, it is reduced by 0.1%, and so on until it reaches the minimum transmittance of the mechanism for increasing or decreasing the radiant flux density to an arbitrary ratio within a predetermined range. Note that the radiance of the upper threshold value for the upper measurement limit of radiance is not limited to the above 60%, and may be 80% or 90%, or may be the upper measurement limit itself. However, since it is expected that the error of the measurement value will be large near the upper measurement limit as described above, it is preferable to set the upper threshold value as low as possible below the upper measurement limit.

[0138] Similarly, it is preferable to set the lower threshold value higher than the lower limit of the radiance measurement. In the example shown in FIG. 16, the lower limit of the radiance measurement is 1×10 6 Therefore, for example, 1.5×10 6 This corresponds to the case where the temperature of the heating target is monitored while the high temperature holding is finished during heat treatment and the temperature is lowered when the ratio is set to the lower threshold. At a ratio of 0.16%, the measured temperature at the lower threshold is 698°C. Therefore, the ratio is reviewed and increased to set the temperature measurement temperature range lower. One way to increase the ratio is to increase the ratio so that the measured temperature (°C) at the lower threshold is lowered by a specified temperature, such as setting the ratio to 0.27% so that the temperature at the lower threshold at the next ratio is lowered by 50°C. Although not shown in the figure, even if the ratio is 100%, the measured temperature at the lower threshold is up to 307°C, so the temperature increment when reviewing the ratio is smaller on the low temperature side than on the high temperature side.

[0139] Instead of adjusting the ratio based on the predicted measurement lower limit temperature of the next ratio, the ratio is increased in a predetermined increment, for example, 1% increments in %, until it reaches the maximum transmittance of the mechanism for increasing or decreasing the radiant flux density to an arbitrary ratio within a predetermined range. The increments of increase do not have to be constant. It is also possible to adjust the ratio to the maximum transmittance of the adjustment mechanism by first increasing it by 0.01%, then by 0.1%, and then by 1%. The radiance of the lower threshold value for the radiance measurement lower limit is not limited to the above 1.5 times, and may be 1.2 times or 2 times, or may be the measurement lower limit itself. However, since it is expected that the error of the measurement value will be large near the measurement lower limit as described above, it is preferable to set the lower threshold value to be slightly higher than the measurement lower limit.

[0140] For example, when a liquid crystal shutter with a transmittance of 40% is used in the highest transmittance state, the 40% transmittance state is the state in which the lowest temperature is measured, and is the initial state when heating is started from a low temperature. If the irradiance density adjustment unit (B) of this device has a mechanism for moving the adjustment mechanism itself, such as the liquid crystal shutter, out of the optical path between the temperature measurement target and the radiation temperature sensor, the adjustment amount (reduction in transmittance) of the 40% transmittance is eliminated, and 100% irradiance density can be incident on the surface of the radiation temperature sensor. This is effective in widening the temperature measurement range on the low-temperature side where the radiance is low. For example, in the graph of 40% in Figure 16, the temperature at the lower limit of radiation measurement is 326°C, but if the liquid crystal shutter is removed, the temperature at the lower limit of measurement becomes 293°C, and it is expected that the temperature measurement range can be lowered to that level.

[0141] <Embodiment 3 Temperature Calculation Unit (D) (0704)> The 'temperature calculation unit (D)' (0704) is configured to reselect the conversion function in accordance with the revised ratio.

[0142] The temperature calculation unit (D) reselects the conversion function according to the ratio reviewed and adjusted as described above by the irradiance flux density adjustment unit (B). One or more upper or lower thresholds may be set, and the corresponding ratio may be reviewed when a predetermined relationship with each threshold is reached (e.g., reached or crossed).

[0143] <Processing flow of embodiment 3> Fig. 8 is a flowchart of the operation method of the radiation thermometry device, which is a computer of embodiment 3 based on embodiment 1. As shown in this figure, the radiation thermometry device of embodiment 3 has a conversion function holding step (c) (S0801), a radiation temperature measuring step (a) (S0802), a radiant flux density adjustment step (b) (S0803), and a temperature calculation step (d) (S0804). The same effect can be obtained even if embodiment 2 is used as a base.

[0144] Here, the operation method of the synchrotron radiation temperature measuring device, which is a computer, is as follows: The conversion function holding step (c) (S0801) performs a process of holding a plurality of conversion functions, which correspond to the incident radiant light luminance, which is the luminance of the radiant light incident on the radiation temperature measuring sensor of the radiation temperature measuring unit (A), and the temperature of the object to be measured, according to the adjusted radiant flux density, in accordance with the temperature measurement temperature range of the object to be measured; The radiation temperature measurement step (a) (S0802) measures the radiance, which is the brightness of the radiation light emitted from the temperature measurement object (including the case of spectral radiance, which is the radiance of a specific wavelength), using a radiation temperature sensor to obtain the temperature of the temperature measurement object. In a radiation flux density adjustment step (b) (S0803), when the radiance measured by the radiation temperature sensor in the radiation temperature measurement step (a) (S0802) falls into a predetermined relationship with an upper limit threshold for adjusting the radiation flux density set according to the temperature measurement temperature zone, the ratio at the time of adjusting the radiation flux density is reviewed and the process is returned to before the radiation temperature measurement step (a) (S0802) so as to further reduce the radiation flux density incident on the radiation temperature sensor; When the radiance measured by the radiation temperature sensor in the radiation temperature measurement step (a) (S0802) falls into a predetermined relationship with a lower threshold value for adjusting the radiation flux density set according to the temperature measurement zone, the ratio of the radiation flux density adjustment is reviewed so as to further increase the radiation flux density incident on the radiation temperature sensor, and the process is returned to before the radiation temperature measurement step (a) (S0802); A temperature calculation step (d) (S0804) reselects a stored conversion function in accordance with the ratio reviewed in the radiant flux density adjustment step (b) (S0803), and performs a process of calculating the temperature based on the selected conversion function and the measured radiance. This is an operating method for causing a series of such processes to be executed by a synchrotron radiation temperature measuring device, which is a computer.

[0145] <Embodiment 3: Description of Hardware>

[0146] <Hardware configuration of embodiment 3> The hardware configuration of the computer part of the synchrotron radiation temperature measuring device in the third embodiment will be described with reference to FIG.

[0147] 9 is a diagram showing the hardware configuration of the computer part of the synchrotron radiation temperature measuring device in the present embodiment 3 based on the embodiment 1. As shown in this diagram, an example of the computer part of the synchrotron radiation temperature measuring device in this embodiment includes an "MPU" that performs various calculation processes, a "main memory", a "non-volatile memory" that stores various programs and data (information), a "user I / F", a "USB, I 2 It is equipped with "USB, I / F, SPI, etc." and "LAN I / F." 2 The "radiation thermometry sensor, calculation board" are connected via "USB, SPI, etc." These are then interconnected by the "system bus" shown by the thick line in the diagram, and send and receive information and perform processing. The computer part of the radiation thermometry device can also be configured in accordance with a known PC, as mentioned above.

[0148] The various programs and data (information) stored in the non-volatile memory are expanded into the main memory when the system is started up, and upon receiving an execution command, the MPU sequentially executes the programs to perform calculations using the data.

[0149] When this system starts up, the various programs and data (information) stored in the "non-volatile memory" are read, expanded, and stored in the "main memory," which also provides a work area for those programs. By receiving execution commands, the "MPU" sequentially executes calculations using the data in the programs. Note that multiple addresses are assigned to the "main memory" and "non-volatile memory," and programs executed by the "MPU" can exchange data with each other and perform processing by identifying and accessing those addresses.

[0150] In this embodiment, the programs stored in the "main memory" are a radiation temperature measurement program (a), a radiant flux density adjustment program (b), a conversion function storage program (c), and a temperature calculation program (d). In addition, the "main memory" and the "non-volatile memory" store radiance, radiant flux density, conversion functions, temperature, etc.

[0151] "MPU" is A conversion function storage program (c) stored in the "main memory" is executed to store a plurality of conversion functions that correspond, according to the adjusted radiation flux density, the incident radiation light luminance, which is the luminance of the radiation light incident on the radiation temperature sensor of the radiation temperature measuring unit (A), to the temperature of the object to be measured, according to the temperature measurement temperature range of the object to be measured. Then, the radiation temperature measuring program (a) stored in the "main memory" is executed, and the radiance, which is the brightness of the radiant light emitted from the temperature measuring object (including the case of spectral radiance, which is the radiance of a specific wavelength), is measured by the radiation temperature measuring sensor to obtain the temperature of the temperature measuring object. Then, a radiation flux density adjustment program (b) stored in a "main memory" is executed, and when the radiance measured by the radiation temperature measuring sensor by executing the radiation temperature measuring program (a) comes into a predetermined relationship with an upper limit threshold for adjusting the radiation flux density set according to the temperature measuring temperature zone, the ratio of the radiation flux density adjustment is reviewed so as to further reduce the radiation flux density incident on the radiation temperature measuring sensor, When the radiation temperature measuring unit program (a) is executed and the radiance measured by the radiation temperature measuring sensor falls in a predetermined relationship with the lower threshold for adjusting the radiation flux density set according to the temperature measurement range, the ratio of the radiation flux density adjustment is reviewed so as to further increase the radiation flux density incident on the radiation temperature measuring sensor. Then, a temperature calculation program (d) stored in the "main memory" is executed to select a stored conversion function according to the ratio at which the radiant flux density adjustment program (b) adjusted the radiant flux density, and calculates the temperature based on the selected conversion function and the measured radiance. The calculated temperature is displayed on a screen via the graphics card, or output to a server device or PC from "USB, SATA, LAN terminal, etc." via a LAN line or Internet line.

[0152] In the third embodiment, when the radiance measured by the radiation temperature sensor of the radiation temperature measuring unit (A) and the upper or lower threshold value have a predetermined relationship, the ratio for adjusting the radiant flux density is reviewed and the temperature is calculated using a corresponding conversion function. This makes it possible to avoid the restriction of the temperature measurement range due to the measurable upper and lower limits of the radiation temperature measuring sensor and to widen the measurable temperature range.

[0153] <Overview of embodiment 4> Mainly claims 4, 8, and 12 The radiation flux density adjusting section (B) of the radiation temperature measuring device of the present invention according to embodiment 4, which is based on any one of embodiments 1 to 3, is configured to be a liquid crystal shutter and / or a rotatable polarizing plate.

[0154] <Functional Configuration of Fourth Embodiment> FIG. 10 shows a conceptual diagram of a synchrotron radiation temperature measuring device of embodiment 4 based on embodiment 1. The synchrotron radiation temperature measuring device of embodiment 4 has the same configuration as embodiment 1. Only the irradiance flux density adjusting unit (B) (1002), which has a different function from embodiment 1, will be described. The same effect can be obtained even if either embodiment 2 or 3 is used as a base.

[0155] <Description of the Configuration of the Fourth Embodiment> <Embodiment 4: Radiant Flux Density Adjustment Unit (B) (1002)> The "radiant flux density adjusting unit (B)" (1002) is configured to be a liquid crystal shutter and / or a rotatable polarizing plate.

[0156] <Embodiment 4 Radiant Flux Density Adjusting Unit (B): Rotatable Polarizing Plate> An example of a rotatable polarizing plate (variable ND filter) is a polarizing filter that is sandwiched between two pieces of glass, and one of the polarizing filters can be rotated so that the angle between the polarization axes of the polarizing films can be changed. The amount of light attenuation can be adjusted by rotating one of the polarizing filters. Compared to a configuration in which filters with different transmittances are replaced, the installation space can be small because it can be rotated on the spot after installation. On the other hand, the disadvantages are that a driving mechanism is required to automatically rotate one of the polarizing filters using a motor or the like, which may cause a malfunction, that there is an increased possibility of a decrease in resolution and a change in color, and that an x-shaped unevenness may appear when the light attenuation rate is increased. The latter reduction in resolution, change in color, and x-shaped unevenness are problems for cameras as imaging devices, but are not likely to be a problem when used as a radiation thermometer. The above disadvantages can be avoided by using a polarizing plate that does not affect the radiation of the specific wavelength used for temperature measurement.

[0157] <Embodiment 4: Radiant Flux Density Adjustment Unit (B): Liquid Crystal Shutter> Examples of liquid crystal shutters include the following configurations. For example, a transparent conductive film such as ITO (Indium Tin Oxide) is formed on one surface of a glass substrate, processed into a desired shape, and then an orientation film is formed on the substrate by aligning a film made of polyimide or the like. The two glass substrates are then placed face to face with the orientation film on the inside, and the orientation directions of the orientation films on the two glass substrates form a predetermined angle (e.g., 90 degrees). TN mode liquid crystal is sandwiched between the two glass substrates, and a sealant such as epoxy resin or liquid glass is applied near the edges of the glass substrates to maintain a predetermined gap (e.g., 4 μm), and the substrates are bonded together to prevent the liquid crystal from leaking. A polarizing plate is attached to each of the outer surfaces of the bonded glass substrates so that the predetermined polarization axis is set, to produce a liquid crystal panel. When using such a liquid crystal shutter, the maximum transmittance of the liquid crystal shutter is determined by the transmittance of the components, such as the two transparent substrates sandwiching the liquid crystal when no voltage is applied, the transparent conductive film, the liquid crystal alignment film, the liquid crystal, and the upper and lower polarizing plates, and by the precision of the alignment film of the alignment film and the polarization axis of the attached polarizing plate. The maximum transmittance of the liquid crystal shutter used by the inventor in the prototype of the present invention was about 40%, and the minimum transmittance was about 0.16%.

[0158] When a driver IC is used to drive the liquid crystal shutter, the transmittance of the liquid crystal shutter changes in steps depending on the specifications of the driver IC, as explained above. The range from the maximum transmittance to the minimum transmittance of the liquid crystal shutter is divided into 256 gradations for an 8-bit driver IC, and 1024 gradations for a 10-bit driver IC.

[0159] <Embodiment 4 Radiant Flux Density Adjustment Unit (B): Liquid Crystal Shutter and Rotatable Polarizing Plate> A liquid crystal shutter and a rotatable polarizer can also be combined. In that case, the rotatable polarizer is composed of one rotatable polarizer, not two polarizers as explained above. The maximum transmittance of the rotatable polarizer in this configuration example (liquid crystal shutter and rotatable polarizer) is achieved when the polarizer axis of the liquid crystal shutter on the rotatable polarizer side is parallel to the polarizer axis of the polarizer filter of the rotatable polarizer. When a driver IC is used to drive the liquid crystal shutter, the transmittance of the liquid crystal shutter changes in steps according to the specifications of the driver IC, as explained above. If it is 8 bits, there are 256 gradations, and if it is 10 bits, there are 1024 gradations. By rotating the polarizer filter of the rotatable polarizer, the transmittance between these gradations can be further divided into finer steps.

[0160] <Embodiment 4 Radiant Flux Density Adjustment Section (B): Other Configurations> Another possible configuration is to stack two liquid crystal shutters. As with the combination of a liquid crystal shutter and a rotatable polarizer, the steps of the transmittance change of the liquid crystal shutter can be divided even finer.

[0161] <Processing flow of embodiment 4> Fig. 11 is a flowchart of the operation method of the radiation thermometry device, which is a computer of embodiment 4 based on embodiment 1. As shown in this figure, the radiation thermometry device of embodiment 1 has a conversion function holding step (c) (S1101), a radiant flux density adjustment step (b) (S1102), a radiation temperature measurement step (a) (S1103), and a temperature calculation step (d) (S1104). The same effect can be obtained even if either embodiment 2 or 3 is used as a base.

[0162] Here, the operation method of the synchrotron radiation temperature measuring device, which is a computer, is as follows: The conversion function holding step (c) (S1101) performs a process of holding a plurality of conversion functions that correspond to the incident radiant light luminance, which is the luminance of the radiant light incident on the radiation temperature measuring sensor of the radiation temperature measuring unit (A), and the temperature of the object to be measured, according to the adjusted radiant flux density, in accordance with the temperature measurement temperature range of the object to be measured; The radiation flux density adjustment step (b) (S1102) includes adjusting the liquid crystal shutter and / or the rotatable polarizing plate so as to increase or decrease the radiation flux density, which is the amount of radiation flux per unit area of ​​the radiation temperature sensor of the radiation temperature measuring unit (A) of radiation light incident on the radiation temperature measuring unit, at an arbitrary ratio within a predetermined range; The radiation temperature measurement step (a) (S1103) measures the radiance, which is the brightness of the radiation light emitted from the temperature measurement object (including the case of spectral radiance, which is the radiance of a specific wavelength), using a radiation temperature sensor to obtain the temperature of the temperature measurement object; A temperature calculation step (d) (S1104) selects a stored conversion function according to the ratio at which the radiant flux density is adjusted in the radiant flux density adjustment step (b) (S1102), and calculates the temperature based on the selected conversion function and the measured radiance. This is an operating method for causing a series of such processes to be executed by a synchrotron radiation temperature measuring device, which is a computer.

[0163] <Embodiment 4: Description of Hardware>

[0164] <Fourth embodiment: Hardware configuration> The hardware configuration of the computer part of the synchrotron radiation temperature measuring device in the fourth embodiment, which is based on any one of the first to third embodiments, will be described with reference to FIG.

[0165] 12 is a diagram showing the hardware configuration of the computer part of the synchrotron radiation thermometry device in the present embodiment 4 based on the embodiment 1. As shown in this diagram, an example of the computer part of the synchrotron radiation thermometry device in this embodiment includes an "MPU" that performs various calculation processes, a "main memory", a "non-volatile memory" that stores various programs and data (information), a "user I / F", a "USB, I 2 It is equipped with "USB, I / F, SPI, etc." and "LAN I / F." 2The "radiation thermometry sensor, calculation board" are connected via "USB, SPI, etc." These are then interconnected by the "system bus" shown by the thick line in the diagram, and send and receive information and perform processing. The computer part of the radiation thermometry device can also be configured in accordance with a known PC, as mentioned above.

[0166] The various programs and data (information) stored in the non-volatile memory are expanded into the main memory when the system is started up, and upon receiving an execution command, the MPU sequentially executes the programs to perform calculations using the data.

[0167] When this system starts up, the various programs and data (information) stored in the "non-volatile memory" are read, expanded, and stored in the "main memory," which also provides a work area for those programs. By receiving execution commands, the "MPU" sequentially executes calculations using the data in the programs. Note that multiple addresses are assigned to the "main memory" and "non-volatile memory," and programs executed by the "MPU" can exchange data with each other and perform processing by identifying and accessing those addresses.

[0168] In this embodiment, the programs stored in the "main memory" are a radiation temperature measurement program (a), a radiant flux density adjustment program (b), a conversion function storage program (c), and a temperature calculation program (d). In addition, the "main memory" and the "non-volatile memory" store radiance, radiant flux density, conversion functions, temperature, etc.

[0169] "MPU" is A conversion function storage program (c) stored in the "main memory" is executed to store a plurality of conversion functions that correspond, according to the adjusted radiation flux density, the incident radiation light luminance, which is the luminance of the radiation light incident on the radiation temperature sensor of the radiation temperature measuring unit (A), to the temperature of the object to be measured, according to the temperature measurement temperature range of the object to be measured. Then, the radiation flux density adjustment program (b) stored in the "main memory" is executed to adjust the liquid crystal shutter and / or the rotatable polarizing plate so as to increase or decrease the radiation flux density, which is the amount of radiation flux per unit area of ​​the radiation temperature sensor of the radiation temperature measuring unit (A) of radiation incident on the radiation temperature measuring sensor, at an arbitrary ratio within a predetermined range. Then, the radiation temperature measuring program (a) stored in the "main memory" is executed, and the radiance, which is the brightness of the radiant light emitted from the temperature measuring object (including the case of spectral radiance, which is the radiance of a specific wavelength), is measured by the radiation temperature measuring sensor to obtain the temperature of the temperature measuring object. Then, a temperature calculation program (d) stored in the "main memory" is executed to select a stored conversion function according to the ratio at which the radiant flux density adjustment program (b) adjusted the radiant flux density, and calculates the temperature based on the selected conversion function and the measured radiance. The calculated temperature is displayed on a screen via the graphics card, or output to a server device or PC from "USB, SATA, LAN terminal, etc." via a LAN line or Internet line.

[0170] In the fourth embodiment, by using a liquid crystal shutter and / or a rotatable polarizing plate as the irradiance adjusting section (B), the rate at which the irradiance is increased or decreased at any rate within a predetermined range can be continuously adjusted within the predetermined range.

[0171] <5. Effects> A synchrotron radiation temperature measuring device having the above configuration uses a liquid crystal shutter and / or a rotatable polarizing plate to adjust the radiant flux density of the synchrotron radiation emitted from the object to be measured so as to increase or decrease it at an arbitrary ratio, selects a conversion function stored according to the ratio at which the radiant flux density is adjusted, and calculates the temperature based on the selected conversion function and the measured radiance. A synchrotron radiation temperature measuring device that is less prone to breakdowns can be provided by not providing a transmittance variable mechanism that requires a large space and not varying the transmittance using a mechanical mechanism. A synchrotron radiation temperature measuring device that can measure temperatures over a wide temperature range under optimal conditions can be provided by using a filter that can be varied to an arbitrary transmittance, rather than providing multiple filters with pre-prepared transmittances to increase or decrease the transmittance at an arbitrary ratio within a specified range. [Explanation of symbols]

[0172] Synchrotron radiation temperature measuring device··0100 Radiation temperature measuring part (A) ···0101 Radiant flux density adjustment section (B)...0102 Conversion function storage section (C) ···0103 Temperature calculation section (D)...0104

Claims

1. A radiation temperature measuring unit (A) that measures the radiance (including the spectral radiance, which is the radiance of a specific wavelength) of radiation emitted from the temperature measuring object using a radiation temperature measuring sensor in order to obtain the temperature of the temperature measuring object; a radiation flux density adjusting section (B) for adjusting a radiation flux density, which is a radiation flux amount per unit area of ​​the radiation temperature sensor of the radiation temperature measuring section (A), so as to increase or decrease the radiation flux density at an arbitrary ratio within a predetermined range; a conversion function storage unit (C) that stores a plurality of conversion functions that correspond to the incident radiation light luminance, which is the luminance of the radiation light incident on the radiation temperature sensor of the radiation temperature measuring unit (A), and the temperature of the object to be measured, according to the adjusted radiation flux density, in accordance with the temperature measurement temperature range of the object to be measured; a temperature calculation unit (D) that selects a conversion function stored in the storage unit (1) according to a ratio at which the radiant flux density is adjusted by the radiant flux density adjustment unit (B) and calculates a temperature based on the selected conversion function and the measured radiance; A radiation temperature measuring device having the above structure.

2. The radiation flux density adjusting unit (B) further includes a radiation flux density continuous adjusting means (E) for continuously increasing or decreasing the rate at which the radiation flux density is reduced within a predetermined range. The radiation temperature measuring device according to claim 1 .

3. The radiation flux density adjusting unit (B) is When the radiance measured by the radiation temperature sensor of the radiation temperature measuring unit (A) falls into a predetermined relationship with an upper limit threshold value for adjusting the radiation flux density set according to the temperature measurement temperature zone, the ratio of the radiation flux density adjustment is reviewed so as to further reduce the radiation flux density incident on the radiation temperature measuring sensor; When the radiance measured by the radiation temperature sensor of the radiation temperature measuring unit (A) falls into a predetermined relationship with a lower limit threshold for adjusting the radiation flux density set according to the temperature measurement temperature zone, the ratio of the radiation flux density adjustment is reviewed so as to further increase the radiation flux density incident on the radiation temperature measuring sensor; the temperature calculation unit (D) reselects the conversion function in accordance with the revised ratio; 3. The radiation temperature measuring device according to claim 1.

4. 3. The radiation temperature measuring device according to claim 1, wherein the radiation flux density adjusting section (B) is a liquid crystal shutter and / or a rotatable polarizing plate.

5. A radiation temperature measuring step (a) of measuring the radiance (including the spectral radiance, which is the radiance of a specific wavelength) of radiation emitted from the temperature measuring object by a radiation temperature measuring sensor in order to obtain the temperature of the temperature measuring object; a radiation flux density adjusting step (b) of adjusting the radiation flux density, which is the amount of radiation flux per unit area of ​​the radiation temperature sensor of the radiation temperature measuring step (a) of the radiation temperature measuring step, to increase or decrease the radiation flux density to an arbitrary ratio within a predetermined range; a conversion function holding step (c) for holding a plurality of conversion functions that correspond to the incident radiation light luminance, which is the luminance of the radiation light incident on the radiation temperature sensor in the radiation temperature measuring step (a), and the temperature of the object to be measured, according to the adjusted radiation flux density, in accordance with the temperature measurement temperature range of the object to be measured; and a temperature calculation step (d) of selecting a conversion function stored in accordance with a ratio at which the radiant flux density is adjusted in the radiant flux density adjustment step (b), and calculating a temperature based on the selected conversion function and the measured radiance. A method for operating a synchrotron radiation temperature measuring device that is a computer.

6. The radiation flux density adjusting step (b) further includes a radiation flux density continuous adjusting sub-step (e) of continuously increasing or decreasing the rate at which the radiation flux density is reduced within a predetermined range.

6. The method of claim 5.

7. The radiation flux density adjusting step (b) includes: when the radiance measured by the radiation temperature measuring sensor in the radiation temperature measuring step (a) has a predetermined relationship with an upper limit threshold value for adjusting the radiation flux density set according to the temperature measuring temperature zone, the ratio of the radiation flux density adjustment is reviewed so as to further reduce the radiation flux density incident on the radiation temperature measuring sensor; when the radiance measured by the radiation temperature measuring sensor in the radiation temperature measuring step (a) has a predetermined relationship with a lower threshold value for adjusting the radiation flux density set according to the temperature measuring temperature zone, the ratio of the radiation flux density adjustment is reviewed so as to further increase the radiation flux density incident on the radiation temperature measuring sensor; The temperature calculation step (d) reselects a conversion function in accordance with the revised ratio. A method according to any one of claims 5 or 6.

8. 7. The method according to claim 5 or 6, wherein the irradiance adjusting step (b) adjusts the irradiance by a liquid crystal shutter and / or a rotatable polarizer.

9. A radiation temperature measuring step (a) of measuring the radiance (including the spectral radiance, which is the radiance of a specific wavelength) of radiation emitted from the temperature measuring object by a radiation temperature measuring sensor in order to obtain the temperature of the temperature measuring object; a radiation flux density adjusting step (b) of adjusting the radiation flux density, which is the amount of radiation flux per unit area of ​​the radiation temperature sensor of the radiation temperature measuring step (a) of the radiation temperature measuring step, to increase or decrease the radiation flux density to an arbitrary ratio within a predetermined range; a conversion function holding step (c) for holding a plurality of conversion functions that correspond to the incident radiation light luminance, which is the luminance of the radiation light incident on the radiation temperature sensor in the radiation temperature measuring step (a), and the temperature of the object to be measured, according to the adjusted radiation flux density, in accordance with the temperature measurement temperature range of the object to be measured; a temperature calculation step (d) of selecting a conversion function stored in accordance with a ratio at which the radiant flux density is adjusted in the radiant flux density adjustment step (b), and calculating a temperature based on the selected conversion function and the measured radiance; A program to be executed by the synchrotron radiation temperature measuring device, which is a computer.

10. The radiation flux density adjusting step (b) further includes a radiation flux density continuous adjusting sub-step (e) of continuously increasing or decreasing the rate at which the radiation flux density is reduced within a predetermined range. The program according to claim 9.

11. The radiation flux density adjusting step (b) includes: when the radiance measured by the radiation temperature measuring sensor in the radiation temperature measuring step (a) has a predetermined relationship with an upper limit threshold value for adjusting the radiation flux density set according to the temperature measuring temperature zone, the ratio of the radiation flux density adjustment is reviewed so as to further reduce the radiation flux density incident on the radiation temperature measuring sensor; when the radiance measured by the radiation temperature measuring sensor in the radiation temperature measuring step (a) has a predetermined relationship with a lower threshold value for adjusting the radiation flux density set according to the temperature measuring temperature zone, the ratio of the radiation flux density adjustment is reviewed so as to further increase the radiation flux density incident on the radiation temperature measuring sensor; The temperature calculation step (d) reselects a conversion function in accordance with the revised ratio.

11. The program according to claim 9 or 10.

12. 11. The program according to claim 9, wherein the irradiance adjusting step (b) adjusts the irradiance by a liquid crystal shutter and / or a rotatable polarizing plate.

Images