Processing system

Abstract

To provide a processing system that can easily execute cleaning of a conveyance path.SOLUTION: A processing system 1 that executes optional processing on a processing object, comprises: a plurality of processing devices 100; a conveyance path 10 that is installed on each processing device 100 over the plurality of processing devices 100; a conveyance vehicle 20 that travels in the conveyance path 10, and conveys a material to each processing device 100; and a cleaning vehicle 30 that cleans the conveyance path 10. The cleaning vehicle 30 includes: a cleaning part that cleans the conveyance path 10 installed on a surface opposite to the conveyance path 10; and a first lifting mechanism that lifts the cleaning part.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a processing system. [Background technology]

[0002] There is known a processing system in which a transport vehicle (automated transport vehicle) transports the objects to be processed, tools used for processing, consumables, and other items to a processing device that processes multiple objects to be processed (see, for example, Patent Documents 1 and 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-163920 [Patent Document 2] JP 2019-204929 A Summary of the Invention [Problem to be solved by the invention]

[0004] In such a processing system, cleaning of the transport path has been an issue.

[0005] The present invention has been made in consideration of the above problems, and an object of the present invention is to provide a processing system in which cleaning of the transport path can be easily performed. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the objective, the processing system of the present invention is a processing system that applies any processing to an object to be processed, and the processing system comprises a plurality of processing devices, a transport path installed on the processing devices spanning the plurality of processing devices, a transport vehicle that runs on the transport path and transports objects to the processing devices, and a cleaning vehicle that cleans the transport path, and the cleaning vehicle has a cleaning unit that is installed on a surface opposite the transport path and cleans the transport path, and a first lifting mechanism that raises and lowers the cleaning unit.

[0007] The cleaning unit may include at least one of a nonwoven fabric, a sponge, and a brush that contacts the transport path.

[0008] The transport vehicle may have a cassette for storing articles, and a second lifting mechanism for raising and lowering the cassette relative to the processing device.

[0009] The article may be an object to be treated or a consumable item used in the treatment device. Effect of the Invention

[0010] The present invention is equipped with a cleaning vehicle for cleaning the conveying path, which has a cleaning unit that cleans the conveying path and is installed on the surface opposite the conveying path, and a first lifting mechanism that raises and lowers the cleaning unit, so that cleaning of the conveying path can be easily performed by the cleaning vehicle cleaning the conveying path while running over it. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a processing system according to the first embodiment. [Diagram 2] FIG. 2 is a perspective view of a portion of the processing system of FIG. [Diagram 3] FIG. 3 is a perspective view showing a transport vehicle of the processing system of FIG. [Figure 4] 4 is a side cross-sectional view showing a first lifting mechanism of the transport vehicle of FIG. [Diagram 5] FIG. 5 is a perspective view of the cleaning vehicle of the processing system of FIG. [Figure 6] FIG. 6 is a side cross-sectional view showing a portion of the cleaning vehicle of FIG. [Figure 7] FIG. 7 is a side cross-sectional view of a portion of the processing system of FIG. [Figure 8] FIG. 8 is a bottom cross-sectional view showing a main part of the processing system according to the second embodiment. [Figure 9] FIG. 9 is a side cross-sectional view showing a main part of a processing system according to the third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0013] [Embodiment 1] A processing system 1 according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the processing system 1 according to the first embodiment. FIG. 2 is a perspective view showing a part of the processing system 1 of FIG. 1. As shown in FIG. 1, the processing system 1 includes a plurality of processing devices 100 that perform any processing on a processing object 300 (see FIG. 2), a cleaning vehicle station 200 that cleans or replaces a cleaning unit 33 (see FIG. 5, etc.) of a cleaning vehicle 30, a conveying path 10 that is installed above the processing device 100 and the cleaning vehicle station 200 across the plurality of processing devices 100 and the cleaning vehicle station 200, a conveying vehicle 20 that travels on the conveying path 10 and conveys an article 310 including the processing object 300 to the processing device 100, a cleaning vehicle 30 that travels on the conveying path 10 and has a cleaning unit 33 that cleans the conveying path 10, and a management unit 40 that centrally manages the overall control of the processing system 1.

[0014] In the example of the first embodiment shown in Fig. 1, the processing system 1 has four processing devices 100 and one cleaning vehicle station 200 installed, but the present invention is not limited to this, and any number of processing devices 100 and cleaning vehicle stations 200 may be installed, and any combination of processing devices 100 may be used. In the example of the first embodiment shown in Fig. 1, the processing system 1 has one transport vehicle 20 and one cleaning vehicle 30, but the present invention is not limited to this, and it is sufficient that the processing system 1 includes at least one transport vehicle 20 and one cleaning vehicle 30, and may include multiple vehicles of each.

[0015] The processing object 300 is an example of an object 310 to be processed by the processing device 100 and transported by the transport vehicle 20. In the first embodiment, the processing object 300 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass, or the like, as shown in FIG. 2. The processing object 300 has a flat surface, and chip-shaped devices are formed in each area partitioned by a plurality of planned division lines that intersect with each other. The processing object 300 is processed by the processing device 100 and divided along the planned division lines to manufacture a plurality of device chips (device chips). The device chips manufactured from the processing object 300 are included in the object 310 to be transported by the transport vehicle 20.

[0016] The processing object 300 has a support tape attached to the back surface of the back side of the front surface, and an annular frame is attached to the outer edge of the support tape. That is, the processing object 300 is supported and fixed to the opening of the annular frame via the support tape. Note that the processing object 300 is not limited to this in the present invention, and may not have a ring frame attached or a support tape attached. In addition, in the present invention, the processing object 300 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0017] The article 310 to be transported by the transport vehicle 20 includes, in addition to the processing object 300 and the device chip manufactured from the processing object 300, tools used to process the processing object 300, consumables used to inspect the state of the tools, cleaning tools for cleaning the processing device 100, maintenance parts for maintaining the processing device 100, etc. The tools used to process the processing object 300 are, for example, cutting blades, grinding wheels, etc. Other consumables used to process the processing object 300 are, for example, dressing boards, precut boards, dummy workpieces, dummy workpieces, adhesive tapes, carbon pieces, etc. The cleaning tools are cleaning supplies such as cleaning grindstones for cleaning the support surface on which the tools are attached, etc. The maintenance parts are maintenance tools for maintaining any other mechanism provided in the processing device 100, etc. Regarding the object to be processed 300 and the item 310 other than the device chip manufactured from the object to be processed 300, in embodiment 1, a support tape (adhesive tape) is attached to the back surface and an annular frame is attached to the outer edge of the support tape, but the present invention is not limited to this, and it is also possible that an annular frame is not attached and that a support tape is not attached.

[0018] The article 310 is provided with a barcode, ID (IDentification), RFID (Radio Frequency IDentification) tag, or the like (all not shown) indicating the type of the article 310. Here, the type of the article 310 refers to the type of the article 310, the specifications of the article 310, and information for distinguishing each article 310. The type of the article 310 is, for example, the processing object 300 (or a device chip manufactured from the processing object 300), a substrate, a cutting blade, a grinding wheel, a dressing board, a precut board, a dummy work, a dummy workpiece, an adhesive tape, a carbon piece, a cleaning tool, a maintenance tool, and the like. For example, when the article 310 is the processing object 300, the specifications of the article 310 are the diameter, thickness, composition and configuration of the base material, the type and specifications of the device, the interval (index width), width, and number of the planned division lines, the material, configuration, type, and specifications of the attached support tape, the material, configuration, type, and specifications of the annular frame, and the like. Even when the item 310 is something other than the processing object 300, the specification items of the item 310 are appropriately determined according to the type of the item 310. The information for distinguishing each item 310 is, for example, an identification number provided for each item 310. Furthermore, when the item 310 is the processing object 300, the information for distinguishing each item 310 may include the lot number of the processing object 300.

[0019] As shown in Figs. 1 and 2, the transport path 10 of the processing system 1 includes a passage area 11, a transfer area 12, a guide unit 13, and a cleaning unit maintenance area 15. The passage area 11 is disposed above the housings 110 of the multiple processing devices 100 and above the housing 210 (see Fig. 7) of the cleaning vehicle station 200. The transfer area 12 is disposed adjacent to the passage area 11 above the housing 110 for each processing device 100. The cleaning unit maintenance area 15 is disposed adjacent to the passage area 11 above the housing 210 for each cleaning vehicle station 200. The passage area 11, the transfer area 12, and the cleaning unit maintenance area 15 are provided with vertical and horizontal lines (not shown) that can be detected by sensors 21-3 and 21-4 of the transport vehicle 20 and sensors 31-3 and 31-4 of the cleaning vehicle 30, which will be described later.

[0020] As shown in Figures 1 and 2, in the transfer area 12, directly above the opening 112 of the housing 110 of the processing device 100, an opening 14 of a size and shape that prevents the body 21 of the transport vehicle 20 from passing through but allows the cassette 23 of the transport vehicle 20 to pass through is formed.

[0021] The guide parts 13 are disposed on both widthwise ends of the passage area 11, the transfer area 12, and the cleaning unit maintenance area 15. The guide parts 13 are formed higher than the wheels 22 of the transport vehicle 20, thereby preventing the transport vehicle 20 from climbing over the guide parts 13 and falling off the passage area 11, the transfer area 12, and the cleaning unit maintenance area 15.

[0022] As shown in Figure 1, in the cleaning unit maintenance area 15, directly above the opening 212 (see Figure 7) of the housing 210 of the cleaning vehicle station 200, an opening 16 of a size and shape which prevents the body 31 (see Figure 5, etc.) of the cleaning vehicle 30 from passing through, but which allows the cleaning unit 33 of the cleaning vehicle 30 to pass through, is formed.

[0023] As shown in Fig. 1, the passage area 11 is formed with a suction port 18 (opening) of a size and shape that prevents the vehicle body 21 and cassette 23 of the transport vehicle 20, and the vehicle body 31, wheels 32 (see Fig. 5, etc.) and cleaning unit 33 of the cleaning vehicle 30 from passing through. A suction duct 19 communicating with a suction source (not shown) is connected to the suction port 18 on the opposite side to the traveling side of the transport vehicle 20 and the cleaning vehicle 30, and when the cleaning vehicle 30 travels and passes over the suction port 18, the foreign matter collected by the cleaning vehicle 30 cleaning the transport path 10 with the cleaning unit 33 is sucked and collected from the cleaning unit 33. The suction port 18 may have a lattice-shaped cover fixed to the opening, such as a grating, to prevent vibration when the transport vehicle 20 passes through.

[0024] Fig. 3 is a perspective view showing the transport vehicle 20 of the processing system 1 in Fig. 1. Fig. 4 is a side cross-sectional view showing the second lifting mechanism 24 of the transport vehicle 20 in Fig. 3. Fig. 4 also shows the first lifting mechanism 34 of the cleaning vehicle 30 in Fig. 5. The transport vehicle 20 is an automated guided vehicle (AGV) that travels unmanned, and as shown in Fig. 3, has a vehicle body 21, wheels 22, a cassette 23, a second lifting mechanism 24, a receiving unit 27, a transmitting unit 28, and a control unit 29.

[0025] The vehicle body 21 includes a flat first frame 21-1 and a flat second frame 21-2 arranged above the first frame 21-1 at a distance from the first frame 21-1. The transport vehicle 20 includes sensors 21-3 (only the rear end is shown in FIG. 3) at the front end (the end on the left rear side in FIG. 3) and the rear end (the end on the right front side in FIG. 3) of the first frame 21-1, and a pair of sensors 21-4 (only the left end is shown in FIG. 3) at both ends of the first frame 21-1. The sensors 21-3 and 21-4 are mounted so as to face the passage area 11, the transfer area 12, and the cleaning unit maintenance area 15 of the transport path 10 along which the transport vehicle 20 travels, respectively, and detect vertical and horizontal lines (not shown) provided in the passage area 11, the transfer area 12, and the cleaning unit maintenance area 15. The sensors 21-3 and 21-4 output the detection results to the control unit 29.

[0026] The transport vehicle 20 is provided with a collision sensor 21-5 at the front end of the first frame 21-1 to detect when the transport vehicle 20 collides with an obstacle. For example, a push button switch is used as the collision sensor 21-5. When the front end of the transport vehicle 20 collides with an obstacle, the collision sensor 21-5 detects the collision of the transport vehicle 20 and outputs the detection result to the control unit 29.

[0027] The transport vehicle 20 is also provided with a cover 21-6 on the underside of the rear end of the first frame 21-1. The cover 21-6 covers the opening 23-1 of the cassette 23 when the cassette 23 is positioned in a storage position between the front wheels 22 and the rear wheels 22 on the underside of the first frame 21-1. By covering the opening 23-1, the cover 21-6 prevents foreign matter from entering the cassette 23 while the transport vehicle 20 is traveling, prevents foreign matter from adhering to the article 310 (processing object 300), and prevents the article 310 (processing object 300) from falling out of the cassette 23.

[0028] The wheels 22 include a pair of front wheels 22 provided at both ends of the front side of the lower surface of the first frame 21-1, and a pair of rear wheels 22 provided at both ends of the rear side of the lower surface of the first frame 21-1. The wheels 22 are provided to be rotatable independently of each other about their axes, and the orientation of the rotation axes and the rotation directions are controlled independently of each other. The outer circumferential surfaces of the wheels 22 contact the passage area 11, the transfer area 12, or the cleaning unit maintenance area 15 of the conveying path 10. The wheels 22 are each connected to a motor 22-1, and are rotated about their axes by the motor 22-1 to travel on the passage area 11, the transfer area 12, or the cleaning unit maintenance area 15 of the conveying path 10. The motor 22-1 is connected to a battery 22-2, and is driven by power supplied from the battery 22-2. In the first embodiment, the wheels 22 are, for example, Mecanum wheels having a plurality of inclined barrel-shaped (cylindrical) rotating bodies attached to the outer circumferential surface.

[0029] The cassette 23 stores at least one of the object to be processed 300 and the article 310 used in the processing device 100. The cassette 23 is provided on the underside of the first frame 21-1, and is formed in a flat box shape capable of storing the article 310 (object to be processed 300) inside. The cassette 23 has an opening 23-1 at the rear side of the transport vehicle 20 through which the article 310 (object to be processed 300) can be freely inserted and removed. The cassette 23 has guide rails on the inside for holding the ends of the stored object 310 (object to be processed 300) and an annular frame supporting the stored object 310 (object to be processed 300).

[0030] The second lifting mechanism 24 raises and lowers the cassette 23 relative to the first frame 21-1 of the vehicle body 21. The second lifting mechanism 24 raises and lowers the cassette 23 between a storage position where the cassette 23 is positioned between the front wheels 22 and the rear wheels 22 on the underside of the first frame 21-1, and a lowered position where the cassette 23 is positioned below the wheels 22. In the storage position, the bottom surface of the cassette 23 is positioned above the bottom ends of the wheels 22 that run on the conveying path 10. Therefore, the cassette 23 does not come into contact with the conveying path 10 while the conveying vehicle 20 is traveling on the conveying path 10.

[0031] Each component of the second lifting mechanism 24, except for the hanging member 59 whose lower end is attached and connected to the cassette 23, is disposed in the space between the first frame 21-1 and the second frame 21-2. When the transport vehicle 20 is positioned above the opening 14 of the transfer area 12, the second lifting mechanism 24 lowers the cassette 23 positioned at the storage position, and positions the cassette 23 on the landing part 120 (see FIG. 2) of the processing device 100. In addition, the second lifting mechanism 24 raises the cassette 23 positioned on the landing part 120 of the processing device 100, and positions the cassette 23 at the storage position.

[0032] As shown in FIG. 4, the second lifting mechanism 24 comprises a motor 52 fixed to the upper surface of the first frame 21-1 and having a rotating shaft 51, a first rotating shaft 53 and a second rotating shaft 54 ​​supported rotatably on the upper surface of the first frame 21-1 and parallel to each other, a pulley 56 fixed to one end of the first rotating shaft 53 and around which an endless connecting member 55 such as a belt or chain is hung between the rotating shaft 51 of the motor 52, pulleys (not shown) fixed to the other ends of the first rotating shaft 53 and the second rotating shaft 54 ​​and around which endless connecting members such as a belt or chain are hung, cylindrical reels 57 fixed to both ends of the first rotating shaft 53 and around which a hanging member 59 is wound, cylindrical reels 58 fixed to both ends of the second rotating shaft 54 ​​and around which a hanging member 59 is wound, and a hanging member 59.

[0033] The second lifting mechanism 24 rotates the first rotating shaft 53 and the second rotating shaft 54 ​​about their axes using the motor 52, and rotates the reels 57, 58 about their axes, thereby winding up the hanging member 59 onto the reels 57, 58 and paying out the hanging member 59 from the reels 57, 58.

[0034] When the second lifting mechanism 24 has wound the hanging members 59 onto the reels 57, 58, it positions the cassette 23 at the stored position. When the second lifting mechanism 24 has unwound the hanging members 59 from the reels 57, 58, it positions the cassette 23 at the lowered position.

[0035] In the first embodiment, four hanging members 59 are provided. For example, a belt having a predetermined width is used as the hanging members 59. The lower ends of the four hanging members 59 are attached to the upper surface of the cassette 23 at intervals from each other. Note that in the present invention, instead of a belt, a wire rope that can be wound up and let out may be used as the hanging member 59.

[0036] When the transport vehicle 20 is first set on the transport path 10 of the processing system 1, the location where the transport vehicle 20 is set and the type of the transport vehicle 20 are registered in the control unit 29 and the management unit 40. After the transport vehicle 20 is set, as described above, in the first embodiment, the position of the transport vehicle 20 on the transport path 10 is detected by the sensors 21-3 and 21-4. Note that the transport vehicle 20 is not limited to this configuration in the present invention, and may be configured to detect a mark (not shown) by a line sensor instead of this configuration, or to detect the position of the transport vehicle 20 by a plurality of sensors installed on the transport path 10, or to wirelessly connect the transport vehicle 20 to a GPS (Global Positioning System) so as to be able to communicate information, and to acquire the position of the transport vehicle 20 using the GPS. Any configuration capable of acquiring the position of the transport vehicle 20 may be used.

[0037] The receiving unit 27 is connected to the management unit 40 so as to be able to communicate with it, receives information transmitted from the management unit 40, and outputs the received information to the control unit 29. In the first embodiment, the receiving unit 27 is connected to the management unit 40 so as to be able to communicate with it wirelessly, but the present invention is not limited to this, and the receiving unit 27 may be connected to the management unit 40 so as to be able to communicate with it by wire. In the first embodiment, the information received by the receiving unit 27 from the management unit 40 is, for example, command information regarding the operation related to the travel of the transport vehicle 20 and the lifting and lowering of the cassette 23, and request information for prompting the transmission of the transport status and transport history of the transport vehicle 20 including the position of the transport vehicle 20 and the position of the cassette 23, etc.

[0038] The transmission unit 28 is connected to the management unit 40 so as to be able to communicate with the management unit 40, and transmits information output from the control unit 29 to the management unit 40. In the first embodiment, the transmission unit 28 is connected to the management unit 40 so as to be able to communicate with the management unit 40 wirelessly, but the present invention is not limited to this, and the transmission unit 28 may be connected to the management unit 40 so as to be able to communicate with the management unit 40 via a wire. In the first embodiment, the information transmitted by the transmission unit 28 to the management unit 40 is, for example, information on the transportation status and transportation history of the transportation vehicle 20.

[0039] The control unit 29 controls the operation of each component of the transport vehicle 20, and causes the transport vehicle 20 to perform operations related to the travel of the transport vehicle 20 and the lifting and lowering of the cassette 23. The control unit 29 controls the travel of the transport vehicle 20 by controlling the motor 22-1 connected to the wheels 22 and the angle of the wheels 22, etc. The control unit 29 controls the motor 52 of the second lifting mechanism 24, thereby controlling the lifting and lowering movement of the cassette 23.

[0040] The control unit 29 controls the sensors 21-3 and 21-4 to acquire the position of the transport vehicle 20 on the transport path 10. The control unit 29 generates information on the transport status and transport history of the transport vehicle 20 based on information on the position of the transport vehicle 20 on the transport path 10 and information on the type of the article 310 (processing object 300) transported by the transport vehicle 20.

[0041] The control unit 29 acquires information received by the receiving unit 27 from the management unit 40, and outputs information to be transmitted to the management unit 40 to the transmitting unit 28. The control unit 29 causes the transport vehicle 20 to perform an operation according to the command information received by the receiving unit 27 from the management unit 40. The control unit 29 causes the transmitting unit 28 to transmit information on the transport status and transport history of the transport vehicle 20 to the management unit 40 in response to request information received by the receiving unit 27 from the management unit 40. Even if the control unit 29 does not receive request information from the management unit 40, it can also cause the transmitting unit 28 to transmit information on the transport status and transport history of the transport vehicle 20 to the management unit 40 on its own initiative.

[0042] Here, the transportation status of the transport vehicle 20 includes, for example, the item 310 (processing object 300) being transported, the type of transport vehicle 20 being transported, the type of transport path 10 the transport vehicle 20 is transporting along and the position on the transport path 10, the transport speed, and error status related to errors that occurred in the transport vehicle 20 being transported and the processing object 300 during and after transport. In addition, the transportation history of the transport vehicle 20 includes, for each transported item 310 (processing object 300), the type of the transport vehicle 20 that transported the item, the history of the type of the transport path 10 along which the transport vehicle 20 transported the item, the passing history of the position on the transport path 10, the transport speed history, and the error history related to errors that occurred in the transport vehicle 20 being transported and the processing object 300 during and after transport, all of which are associated with the time when the transport was performed and the type of the item 310 (processing object 300).

[0043] In the first embodiment, the control unit 29 includes a computer system. The computer system included in the control unit 29 is a computer having an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 29 performs arithmetic processing according to a computer program stored in the storage device of the control unit 29, and outputs control signals for controlling the carrier 20 to each component of the carrier 20 via the input / output interface device of the control unit 29.

[0044] Fig. 5 is a perspective view showing the cleaning vehicle 30 of the processing system 1 of Fig. 1. Fig. 6 is a side cross-sectional view showing a part of the cleaning vehicle 30 of Fig. 5. The cleaning vehicle 30 travels unmanned like the transport vehicle 20, and as shown in Fig. 5, has a vehicle body 31, wheels 32, a cleaning unit 33, a first lifting mechanism 34, a receiving unit 37, a transmitting unit 38, and a control unit 39. Note that Fig. 5 shows the cleaning unit 33 in a simplified manner, and Fig. 6 shows the components other than the cleaning unit 33 in a simplified manner.

[0045] The vehicle body 31 has the same configuration as the vehicle body 21. That is, the vehicle body 31 includes a flat first frame 31-1 and a flat second frame 31-2 arranged above the first frame 31-1 at a distance from the first frame 31-1. The cleaning vehicle 30 includes sensors 31-3 (only the rear end is shown in FIG. 3) at the front end (the end on the left rear side in FIG. 3) and the rear end (the end on the right front side in FIG. 3) of the first frame 31-1, and a pair of sensors 31-4 (only the left end is shown in FIG. 3) at both side ends of the first frame 31-1. The sensors 31-3 and 31-4 are mounted so as to face the passage area 11, the transfer area 12, and the cleaning unit maintenance area 15 of the conveying path 10 along which the cleaning vehicle 30 travels, respectively, and detect vertical and horizontal lines (not shown) provided in the passage area 11, the transfer area 12, and the cleaning unit maintenance area 15. The sensors 31-3 and 31-4 output the detection results to the control unit 39.

[0046] The cleaning vehicle 30 is also provided with a collision sensor 31-5 at the front end of the first frame 31-1, which detects when the cleaning vehicle 30 collides with an obstacle. For example, a push button switch is used as the collision sensor 31-5. When the front end of the cleaning vehicle 30 collides with an obstacle, the collision sensor 31-5 detects the collision of the cleaning vehicle 30 and outputs the detection result to the control unit 39. The cleaning vehicle 30 does not have the cover 21-6 that is provided in the transport vehicle 20.

[0047] The wheels 32 include a pair of front wheels 32 provided at both ends of the front side of the lower surface of the first frame 31-1, and a pair of rear wheels 32 provided at both ends of the rear side of the lower surface of the first frame 31-1. The wheels 32 are provided to be rotatable independently of each other about their axes, and the orientation of the rotation axes and the rotation directions are controlled independently of each other. The outer circumferential surfaces of the wheels 32 contact the passage area 11, the transfer area 12, or the cleaning unit maintenance area 15 of the conveying path 10. The wheels 32 are each connected to a motor 32-1, and are rotated about their axes by the motor 32-1 to travel on the passage area 11, the transfer area 12, or the cleaning unit maintenance area 15 of the conveying path 10. The motor 32-1 is connected to a battery 32-2, and is driven by power supplied from the battery 32-2. In the first embodiment, the wheels 32 are, for example, Mecanum wheels having a plurality of inclined barrel-shaped (cylindrical) rotating bodies attached to the outer circumferential surface.

[0048] The cleaning unit 33 is installed on a surface facing the conveying path 10, and cleans the conveying path 10. Specifically, the cleaning unit 33 is installed below the first frame 31-1 of the body 31 of the cleaning vehicle 30, with the part of the cleaning unit 33 that cleans the conveying path 10 facing downward.

[0049] 6, in the first embodiment, the cleaning unit 33 includes a frame member 61, a mounting member 62, a cleaning member 63, and a biasing member 64. The frame member 61 is formed in a flat plate shape, and the lower end of the hanging member 59 of the first lifting mechanism 34 is attached to the upper surface of the frame member 61. In other words, the frame member 61 is supported from above by the hanging member 59 of the first lifting mechanism 34.

[0050] The cleaning member 63 is detachably attached to the tip of the mounting member 62. In the first embodiment, the cleaning member 63 is a member that comes into contact with the transport path 10 to clean the transport path 10, and is at least one of a nonwoven fabric, a sponge, and a brush. The mounting member 62 is disposed on the lower surface side of the frame member 61 via the biasing member 64, with the tip to which the cleaning member 63 is attached facing downward. As a result, the cleaning member 63 attached to the mounting member 62 is biased downward by the biasing member 64. The biasing member 64 is, for example, a spring member, as shown in FIG. 6, and is provided to bias the mounting member 62 downward relative to the frame member 61.

[0051] 6, the cleaning unit 33 is provided with one set of mounting members 62, cleaning members 63, and urging members 64 on the underside of the frame member 61, but the present invention is not limited to this and may be provided with multiple sets of mounting members 62, cleaning members 63, and urging members 64. In addition, the cleaning unit 33 is not limited to the size, shape, and structure of the mounting members 62, cleaning members 63, and urging members 64 shown in FIG. 6, and may be of any size, shape, and structure as long as it can clean the transport path 10 and can be washed or replaced at the cleaning car station 200.

[0052] The cleaning unit 33 is provided with a barcode, ID, RFID tag, or the like (all not shown) indicating the type of the cleaning unit 33. Here, the type of the cleaning unit 33 refers to the type of the cleaning unit 33, the specifications of the cleaning unit 33, and information for distinguishing each cleaning unit 33. For example, in the case of the first embodiment, the type of the cleaning unit 33 is that the cleaning unit 33 is configured to include a frame member 61, a mounting member 62, a cleaning member 63, and a biasing member 64, that the cleaning member 63 is brought into contact with the transport path 10 to clean the transport path 10, and the type of the cleaning member 63. For example, in the case of the first embodiment, the specifications of the cleaning unit 33 are the size and shape of each component of the cleaning unit 33, a predetermined threshold value of the travel (cleaning) time and the travel (cleaning) distance, and the like. Even if the cleaning unit 33 has a configuration other than that of the first embodiment, the specification items of the cleaning unit 33 are appropriately determined according to the type of the cleaning unit 33. The information for distinguishing each cleaning unit 33 is, for example, an identification number provided for each cleaning unit 33.

[0053] The first lifting mechanism 34 raises and lowers the cleaning unit 33 relative to the first frame 31-1 of the vehicle body 31. The first lifting mechanism 34 raises and lowers the cleaning unit 33 between a storage position located between the front wheel 32 and the rear wheel 32 on the underside of the first frame 31-1, and a lowered position located below the wheels 32. In the storage position, in the first embodiment, the underside of the cleaning unit 33 is positioned in a position where it contacts the conveyor path 10 on which the cleaning vehicle 30 travels and urges the cleaning unit 33 toward the conveyor path 10. Therefore, in the first embodiment, the cleaning vehicle 30 is positioned in the storage position while traveling on the conveyor path 10, and cleans the conveyor path 10 with the cleaning unit 33 urging the cleaning unit 33 toward the conveyor path 10.

[0054] As shown in FIG. 4, the first lifting mechanism 34 is the same as the second lifting mechanism 24 except that the object to which the hanging member 59 is attached and connected is changed from the cassette 23 to the cleaning unit 33, and the controlling entity is changed from the control unit 29 to the control unit 39. The first lifting mechanism 34 has the same configuration as the second lifting mechanism 24. The components of the first lifting mechanism 34, except for the hanging member 59, the lower end of which is attached and connected to the cleaning unit 33, are arranged in the space between the first frame 31-1 and the second frame 31-2. When the cleaning car 30 is positioned above the opening 16 of the cleaning unit maintenance area 15, the first lifting mechanism 34 lowers the cleaning unit 33 positioned in the storage position and positions the cleaning unit 33 at the cleaning unit positioning portion 220 (see FIG. 7) of the cleaning car station 200. In addition, the first lifting mechanism 34 raises the cleaning unit 33 positioned on the cleaning unit positioning portion 220 of the cleaning vehicle station 200, and positions the cleaning unit 33 in the storage position.

[0055] When the cleaning vehicle 30 is first set on the transport path 10 of the processing system 1, the location where the cleaning vehicle 30 is set and the type of the cleaning vehicle 30 are registered in the control unit 39 and the management unit 40. After the cleaning vehicle 30 is set, as described above, in the first embodiment, the position of the cleaning vehicle 30 on the transport path 10 is detected by the sensors 31-3 and 31-4. Note that the cleaning vehicle 30 is not limited to this configuration in the present invention, and may be configured to detect a mark (not shown) by a line sensor instead of this configuration, or to detect the position of the cleaning vehicle 30 by a plurality of sensors installed on the transport path 10, or to wirelessly connect the cleaning vehicle 30 to a GPS (Global Positioning System) so that information can be communicated, and the position of the cleaning vehicle 30 may be acquired using the GPS. Any configuration that can acquire the position of the cleaning vehicle 30 may be used.

[0056] The receiving unit 37 is connected to the management unit 40 so as to be able to communicate with it, receives information transmitted from the management unit 40, and outputs the received information to the control unit 39. In the first embodiment, the receiving unit 37 is connected to the management unit 40 so as to be able to communicate with it wirelessly, but the present invention is not limited to this, and the receiving unit 37 may be connected to the management unit 40 so as to be able to communicate with it by wire. In the first embodiment, the information received by the receiving unit 37 from the management unit 40 is, for example, command information regarding the operation related to the travel of the cleaning car 30 and the lifting and lowering of the cleaning section 33, and request information for prompting the transmission of the cleaning status and cleaning history of the cleaning car 30 including the position of the cleaning car 30 and the position of the cleaning section 33.

[0057] The transmission unit 38 is connected to the management unit 40 so as to be able to communicate with the management unit 40, and transmits information output from the control unit 39 to the management unit 40. In the first embodiment, the transmission unit 38 is connected to the management unit 40 so as to be able to communicate with the management unit 40 wirelessly, but the present invention is not limited to this, and the transmission unit 38 may be connected to the management unit 40 so as to be able to communicate with the management unit 40 via a wire. In the first embodiment, the information transmitted by the transmission unit 38 to the management unit 40 is, for example, information on the cleaning status and cleaning history of the cleaning car 30.

[0058] The control unit 39 controls the operation of each component of the cleaning vehicle 30 to cause the cleaning vehicle 30 to perform operations related to the travel of the cleaning vehicle 30 and the lifting and lowering of the cleaning unit 33. The control unit 39 controls the travel of the cleaning vehicle 30 by controlling the motor 32-1 connected to the wheels 32 and the angle of the wheels 32, etc. The control unit 39 controls the lifting and lowering movement of the cleaning unit 33 by controlling the motor 52 of the first lifting mechanism 34.

[0059] The control unit 39 controls the sensors 31-3 and 31-4 to acquire the position of the cleaning car 30 on the transport path 10. The control unit 39 generates information on the cleaning status and cleaning history of the cleaning car 30 based on information on the position of the cleaning car 30 on the transport path 10 and information on the type of cleaning unit 33 to which the cleaning car 30 is attached.

[0060] The control unit 39 acquires information received by the receiving unit 37 from the management unit 40, and outputs information to be transmitted to the management unit 40 to the transmitting unit 38. The control unit 39 causes the cleaning car 30 to perform an operation according to the command information received by the receiving unit 37 from the management unit 40. The control unit 39 causes the transmitting unit 38 to transmit information on the cleaning status and cleaning history of the cleaning car 30 to the management unit 40 in response to request information received by the receiving unit 37 from the management unit 40. Even if the control unit 39 does not receive request information from the management unit 40, it can also cause the transmitting unit 38 to transmit information on the cleaning status and cleaning history of the cleaning car 30 to the management unit 40 on its own initiative.

[0061] Here, the cleaning status of the cleaning vehicle 30 is, for example, the type of the cleaning vehicle 30 while it is running (cleaning), the type of the transport path 10 while the cleaning vehicle 30 is running (cleaning) and the position on the transport path 10, the error status regarding errors that occurred in the cleaning vehicle 30 while it was running (cleaning) and after it was running (after cleaning), etc. Also, the cleaning history of the cleaning vehicle 30 is the type of the cleaning vehicle 30 that ran (cleaned), the history of the type of the transport path 10 along which the cleaning vehicle 30 ran (cleaned), the running (cleaning) history of the position on the transport path 10, the history of the running (cleaning) speed, and the error history regarding errors that occurred in the cleaning vehicle 30 while it was running (cleaning) and after it was running (after cleaning), all of which are associated with the time when the running (cleaning) was performed.

[0062] Based on the cleaning status and cleaning history of the cleaning vehicle 30, the control unit 39 determines whether the travel (cleaning) time and travel (cleaning) distance traveled (cleaned) with the currently installed cleaning unit 33 installed exceed the respective predetermined thresholds previously set for the cleaning unit 33, and if it determines that at least one of the travel (cleaning) time and travel (cleaning) distance exceeds the respective predetermined thresholds, it can perform a process of moving the cleaning vehicle 30 over the opening 16 of the cleaning unit maintenance area 15 to prompt the cleaning unit 33 of the cleaning vehicle 30 to be cleaned or replaced, or moving the cleaning vehicle 30 over the suction port 18 to which the suction duct 19 is connected to prompt the cleaning vehicle 30 to suck up and collect foreign matter collected by the cleaning vehicle 30 cleaning the conveying path 10 with the cleaning unit 33 from the cleaning unit 33.

[0063] In the first embodiment, the control unit 39 includes a computer system similar to that of the above-described control unit 29. The arithmetic processing device of the control unit 39 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 39, and outputs control signals for controlling the cleaning vehicle 30 to each component of the cleaning vehicle 30 via the input / output interface device of the control unit 39.

[0064] 2, the processing device 100 of the processing system 1 includes a housing 110, a landing unit 120, a transport unit 130, a processing unit 140, a receiving unit 150, a transmitting unit 160, and a control unit 170. The housing 110 houses each of the components of the processing device 100 except for the housing 110. An opening 112 is formed in a ceiling 111 above the housing 110, the opening being of a size and shape that allows a cassette 23 of a transport vehicle 20 that houses an article 310 (processing target 300) to pass through.

[0065] The landing section 120 is disposed inside the housing 110, directly below the opening 112. The cassette 23 that has passed through the opening 14 of the transport path 10 and the opening 112 of the housing 110 and descended by the second lifting mechanism 24, which moves the cassette 23 up and down, lands on the landing section 120. The landing section 120 supports the landed cassette 23 facing upward on its upper surface.

[0066] As shown in Fig. 2, the landing portion 120 is provided with a plurality of positioning blocks 121 (four in the example shown in Fig. 2) on the outer periphery side. The plurality of positioning blocks 121 are arranged on the inner periphery side at positions where the outer periphery side of the cassette 23 can be fitted. The positioning blocks 121 have an inclined surface formed on the inner periphery side, which is curved and inclined in a direction protruding toward the inner periphery as it goes downward. Therefore, even if the horizontal position of the cassette 23 is misaligned when the cassette 23 is lowered, the positioning blocks 121 can correct the horizontal position of the cassette 23 by using the inclined surface, and can accurately fit the cassette 23 on the inner periphery side, so that the cassette 23 can land in an accurate position on the landing portion 120.

[0067] The transport unit 130 is installed adjacent to the landing section 120, as shown in Fig. 2. The transport unit 130 carries out the article 310 (processing object 300) contained in the cassette 23 that has landed on the landing section 120 and places it at a predetermined position relative to the processing unit 140, and also carries the article 310 (processing object 300) placed at a predetermined position around the processing unit 140 into the cassette 23 that has landed on the landing section 120. Here, the predetermined position relative to the processing unit 140 is on a holding table (chuck table) around the processing unit 140-1 (cutting unit) and the processing unit 140-3 (imaging unit, inspection unit), or on a spinner table of the processing unit 140-2 (cleaning unit) in the example of the first embodiment shown in Fig. 2.

[0068] In the first embodiment, the transport unit 130 includes, for example, a first transport arm 131, a second transport arm 132, and a pair of rails 133. The first transport arm 131 transports the article 310 (processing object 300) between inside the cassette 23 that has landed on the landing portion 120 and on the pair of rails 133. The second transport arm 132 transports the article 310 (processing object 300) between on the pair of rails 133 and a predetermined position around the processing unit 140. The pair of rails 133 can approach or move away from each other while maintaining a parallel state, and the article 310 (processing object 300) can be held between the pair of rails 133 via an annular frame. In addition, the transport unit 130 is equipped with a reader that reads the barcode or ID of the item 310 (object to be processed 300) when the item 310 (object to be processed 300) is transported out of the cassette 23 or transported into the cassette 23, etc., to obtain information on the type of the item 310 (object to be processed 300) and outputs the information to the control unit 170.

[0069] The processing unit 140 processes the processing object 300. In the first embodiment, the processing unit 140 is, for example, a storage unit that stores the processing object 300, a processing unit that processes the processing object 300, a cleaning unit that cleans the processing object 300, an imaging unit that images the processing object 300, an inspection unit that inspects the processing object 300, a tape attachment unit that attaches or peels off a support tape or the like to the processing object 300, a film formation unit that forms a film on the processing object 300, or the like. That is, the processing device 100 including the processing unit 140 can perform at least one of storage, processing, cleaning, inspection, imaging, attaching a support tape or the like, peeling off a support tape or the like, and forming a film on the processing object 300.

[0070] When the processing unit 140 is a storage unit, it stores the object 310 (object 300 to be processed) to be transported by the processing system 1. When the processing unit 140 is a storage unit, the processing device 100 is a so-called stocker that stores the object 310 (object 300 to be processed) to be transported by the processing system 1 in the processing unit 140 and transports the object 310 to and from the transport vehicle 20 through an opening 112 in a ceiling 111 above the housing 110. In the example of embodiment 1 shown in FIG. 1, the processing device 100-2 is a stocker.

[0071] When the processing unit 140 is a processing unit, it may be, for example, a cutting processing unit having a spindle on which a cutting blade is rotatably mounted and cutting the processing object 300 with the cutting blade, a grinding processing unit having a spindle on which a grinding wheel with a grinding wheel disposed thereon is rotatably mounted and grinding the processing object 300 with the grinding wheel, a laser processing unit having a laser beam irradiator that irradiates the processing object 300 with a laser beam and laser processing the processing object 300 with the laser beam, a plasma processing unit that supplies plasmatized gas to the processing object 300 for etching, an ultraviolet processing unit having an ultraviolet irradiator that irradiates ultraviolet rays to the processing object 300 and ultraviolet irradiation processing the processing object 300, a tape expansion unit that expands a support tape attached to the processing object 300, divides the processing object 300 based on the division starting point to manufacture device chips and widens the intervals between the device chips, or performs a tape expansion process to widen the intervals between the device chips manufactured by dividing the processing object 300, etc. When the processing unit 140 is a processing unit, the processing device 100 is a processing device that processes the processing object 300.

[0072] When the processing unit 140 is a cleaning unit, it is provided with a nozzle for supplying a cleaning liquid, a cleaning gas, or the like to the processing object 300, and cleans the processing object 300. When the processing unit 140 is a cleaning unit, the processing device 100 is a cleaning device that cleans the processing object 300.

[0073] When the processing unit 140 is an imaging unit, it includes an imaging device that images the processing object 300, and a work mover that moves the processing object 300 to change and adjust the position and orientation of the processing object 300 relative to the imaging device, and performs imaging processing of the processing object 300. When the processing unit 140 is an imaging unit, the processing device 100 is an imaging device that performs imaging processing of the processing object 300.

[0074] When the processing unit 140 is an inspection unit, it includes a laser beam irradiator that irradiates the processing object 300 with a laser beam for inspection, an electromagnetic wave irradiator that irradiates the processing object 300 with electromagnetic waves for inspection, an ultraviolet irradiator that irradiates the processing object 300 with ultraviolet rays for inspection, an imager that captures an inspection image of the processing object 300, and an inspection and determination section that inspects and determines the processing object 300 based on the results of the irradiation and imaging, and inspects and processes the processing object 300. When the processing unit 140 is an inspection unit, the processing device 100 is an inspection device that inspects and processes the processing object 300.

[0075] When the processing unit 140 is a tape application unit, it includes a support tape etc. supplying section which supplies the support tape 205 etc. to the processing object 300, an application section which applies the supplied support tape 205 etc. to the processing object 300, and a peeling section which peels off the support tape 205 etc. applied to the processing object 300, and performs an application process or a peeling process on the processing object 300. When the processing unit 140 is a tape application unit, the processing device 100 is a tape application device which performs an application process or a peeling process on the processing object 300.

[0076] When the processing unit 140 is a film forming unit, it includes a film forming part that forms a film on the processing object 300, and performs a film formation process on the processing object 300. When the processing unit 140 is a film forming unit, the processing device 100 is a film forming device that performs a film formation process on the processing object 300.

[0077] In the example shown in Fig. 2, the processing apparatus 100 includes processing units 140-1, 140-2, and 140-3 as the processing units 140. In the processing apparatus 100 shown in Fig. 2, one of the processing units 140, 140-1, is a processing apparatus (cutting apparatus) that is a cutting processing unit, and can perform cutting processing on the processing object 300. In addition, in the processing apparatus 100 shown in Fig. 2, one of the processing units 140, 140-2, is a cleaning unit, and can perform cleaning processing on the processing object 300. In addition, in the processing apparatus 100 shown in Fig. 2, one of the processing units 140, 140-3, is an imaging unit, and can perform imaging processing on the processing object 300. Furthermore, in the processing device 100 shown in FIG. 2, the processing unit 140-3 can have a function as an imager, and the control unit 170 can have a function as an inspection and judgment section, so that the processing device 100 essentially has an inspection unit and can perform inspection processing such as a so-called kerf check that automatically checks whether or not the cutting processing of the processing object 300 has been performed within a normal range.

[0078] The processing device 100 may include an exchange unit (not shown) corresponding to the processing unit 140. The exchange unit performs an exchange process for exchanging items 310 other than the processing object 300, such as consumables including processing tools used to process the processing object 300, cleaning tools for cleaning the processing device 100, maintenance parts for maintaining the processing device 100, etc., in the processing unit 140. The exchange unit performs the exchange process by collecting used processing tools, consumables, etc. from the processing unit 140 and replenishing and mounting new processing tools, consumables, etc. in the processing unit 140.

[0079] After the replacement process is performed, the replacement unit recovers used processing tools and consumables, etc., from the processing unit 140 and stores them in the cassette 23 that has landed and been placed on the landing section 120, and carries them out of the processing device 100 through the opening 112, and new processing tools and consumables, etc., are carried in from outside the processing device 100 through the opening 112 and replenished to the replacement unit from the cassette 23 that has landed and been placed on the landing section 120. In the processing device 100 that is a cutting device shown in Fig. 2, the replacement unit is, for example, a cutting blade replacement unit that replaces a cutting blade attached to the processing unit 140 that is a cutting processing unit.

[0080] The receiving unit 150 is connected to the management unit 40 of the processing system 1 so as to be capable of communicating information, receives information transmitted from the management unit 40, and outputs the received information to the control unit 170. In the first embodiment, the receiving unit 150 is connected to the management unit 40 so as to be capable of communicating information by wire, but the present invention is not limited to this, and the receiving unit 150 may be connected to the management unit 40 so as to be capable of communicating information wirelessly. In the first embodiment, the information received by the receiving unit 150 from the management unit 40 is, for example, command information for an operation related to processing by the processing device 100, request information for prompting transmission of information such as a transport status and transport history of the item 310 (processing target 300) in the processing device 100, a processing status and processing history, and information on the position of the item 310 (processing target 300).

[0081] The transmission unit 160 is connected to the management unit 40 so as to be able to communicate information, and transmits information output from the control unit 170 to the management unit 40. In the first embodiment, the transmission unit 160 is connected to the management unit 40 so as to be able to communicate information by wire, but the present invention is not limited to this, and the transmission unit 160 may be connected to the management unit 40 so as to be able to communicate information wirelessly. In the first embodiment, the information transmitted by the transmission unit 160 to the management unit 40 is, for example, information such as the transport status and transport history of the item 310 (processing target 300) in the processing device 100, the processing status and processing history, and information on the position of the item 310 (processing target 300).

[0082] The control unit 170 controls the operation of each component of the processing device 100 to cause the processing device 100 to perform various processing operations on the article 310 (processing object 300). The control unit 170 controls the transport unit 130 to control the transport of the article 310 (processing object 300) between the cassette 23 and a predetermined position of the processing unit 140, and acquires information on the transport status and transport history of the article 310 (processing object 300), the position of the article 310 (processing object 300), and the like from the transport unit 130. The control unit 170 controls the processing unit 140 to control the processing of the article 310 (processing object 300) by the processing unit 140, and acquires information on the processing status and processing history of the article 310 (processing object 300), the position of the article 310 (processing object 300), and the like from the processing unit 140. In this way, the control unit 170 obtains information from the transport unit 130 and the processing unit 140 regarding the transport status and transport history of the item 310 (processing object 300) in the processing device 100, the processing status and processing history, and the position of the item 310 (processing object 300).

[0083] The control unit 170 acquires information received by the receiving unit 150 from the management unit 40, and outputs information to be transmitted to the management unit 40 to the transmitting unit 160. The control unit 170 causes the processing device 100 to perform an operation according to the command information received by the receiving unit 150 from the management unit 40. The control unit 170 causes the transmitting unit 160 to transmit information such as the transport status and transport history, the processing status and processing history, and the position of the item 310 (processing object 300) in the processing device 100 to the management unit 40 in response to the request information received by the receiving unit 150 from the management unit 40. Even if the control unit 170 does not receive request information from the management unit 40, it can also cause the transmitting unit 160 to transmit information such as the transport status and transport history, the processing status and processing history, and the position of the item 310 (processing object 300) in the processing device 100 to the management unit 40.

[0084] Here, the information on the transport status and transport history of the article 310 (processing object 300) and the position of the article 310 (processing object 300) acquired from the transport unit 130 and the processing unit 140 is information that links the type of the article 310 (processing object 300) and the type of processing device 100 into which the article 310 (processing object 300) of that type was carried in and out with the date and time (time) at which the article was carried in and out of the processing device 100. The type of processing device 100 refers to information that distinguishes each processing device 100, such as the type of processing performed by the processing device 100 or an identification number provided for each processing device 100.

[0085] The processing status of the processing device 100 may include, for example, the type of processing device 100 being processed, the item 310 (processing object 300) brought into the housing 110 of the processing device 100, the transport status including positional information of the item 310 (processing object 300) inside the housing 110 of the processing device 100, the processing status of the processing object 300 by the processing unit 140, an error status regarding errors that have occurred in the processing unit 140 during processing or in the processing object 300 during and after processing, and the replacement processing status by the replacement unit.

[0086] In addition, the processing history of the processing device 100 refers to the type of processing device 100, the transportation history, processing history, error history, and replacement processing history of the item 310 (object to be processed 300) carried into the housing 110 of the processing device 100, for each item 310 (object to be processed 300) brought into the housing 110 of the processing device 100. Specifically, for each item 310 (object to be processed 300), information on the transportation processing within the housing 110 of the processing device 100 and the history of the location information when the transportation processing was performed, information on the processing, the processing conditions at the time of processing, and the history of the processing data obtained during the processing, error history regarding errors that occurred in the processing unit 140 during processing or in the object to be processed 300 during and after processing, information on the replacement processing, the replacement processing conditions at the time of the replacement processing, and the history of the replacement processing data obtained during the replacement processing, all of which are linked to the date and time (time) when these processes were performed and the type of the item 310 (object to be processed 300).

[0087] In the first embodiment, the control unit 170 includes a computer system similar to the above-described control units 29 and 39. The arithmetic processing device of the control unit 170 performs arithmetic processing in accordance with a computer program stored in a storage device of the control unit 170, and outputs control signals for controlling the processing device 100 to each component of the processing device 100 via an input / output interface device of the control unit 170.

[0088] 7 is a side cross-sectional view showing a part of the processing system 1 of FIG. 1. As shown in FIG. 7, the cleaning car station 200 of the processing system 1 includes a housing 210, a cleaning unit positioning unit 220, a cleaning unit maintenance unit 240, a receiving unit 250, a transmission unit 260, and a control unit 270. That is, the cleaning car station 200 is a processing device 100 in which the landing unit 120 is changed to the cleaning unit positioning unit 220, the transport unit 130 and the processing unit 140 are changed to the cleaning unit maintenance unit 240, and in accordance with these changes, the housing 110, the receiving unit 150, the transmission unit 160, and the control unit 170 are changed to the housing 210, the receiving unit 250, the transmission unit 260, and the control unit 270, respectively. The housing 210 accommodates each component of the cleaning car station 200 except for the housing 210. An opening 212 having a size and shape that allows the cleaning part 33 of the cleaning vehicle 30 to pass through is formed in a ceiling 211 above the housing 210.

[0089] The cleaning unit positioning unit 220 is disposed inside the housing 210, directly below the opening 212. The cleaning unit positioning unit 220 positions the cleaning unit 33 that has passed through the opening 16 of the transport path 10 and the opening 212 of the housing 210 and lowered by a first lifting mechanism 34 that moves the cleaning unit 33 up and down. The cleaning unit positioning unit 220 supports the positioned cleaning unit 33 facing upward.

[0090] The cleaning unit positioning unit 220 is formed in a size, shape, etc. in accordance with the cleaning unit 33. 7, in the first embodiment, the cleaning unit positioning unit 220 includes a main body 221 formed in a flat plate shape, and an opening 222 formed in the main body 221, which has a size and shape that prevents the frame member 61 from passing through, but allows other components of the cleaning unit 33 other than the frame member 61 to pass through. In the first embodiment, the cleaning unit positioning unit 220 supports the outer periphery of the frame member 61 of the cleaning unit 33 positioned in the lowered position upward at an opening end surrounding the opening 222 of the main body 221, and causes the other components of the cleaning unit 33 other than the frame member 61 to be stably raised so that they can be washed or replaced from below through the opening 222 by the cleaning unit maintenance unit 240 installed below the cleaning unit positioning unit 220.

[0091] In addition, the cleaning unit positioning unit 220 is equipped with a reader that reads the barcode or ID of the cleaning unit 33 when the cleaning unit 33 is positioned in the lowered position, etc., to obtain information on the type of cleaning unit 33 and output it to the control unit 270.

[0092] The cleaning unit maintenance unit 240 is installed below the cleaning unit positioning unit 220, and includes a cleaning unit cleaning unit 241 that cleans the cleaning unit 33, and a cleaning unit replacement unit 242 that replaces the cleaning unit 33. In the first embodiment, the cleaning unit cleaning unit 241 is used in a form in which, for example, a cleaning solution or air is sprayed onto the cleaning unit 33 positioned in the lowered position to clean the cleaning unit 33, or a form in which a cleaning tool is brought into contact with the cleaning unit 33 positioned in the lowered position to clean the cleaning unit 33, or the like.

[0093] In embodiment 1, the cleaning part replacement unit 242 is used in a form in which, for example, the mounting member 62 is replaced by removing the used cleaning member 63 of the cleaning part 33 positioned in the lowered position from the mounting member 62 and attaching a new cleaning member 63 to the mounting member 62, a form in which the mounting member 62 and cleaning member 63 of the cleaning part 33 positioned in the lowered position are replaced, and a form in which the mounting member 62, cleaning member 63 and biasing member 64 of the cleaning part 33 positioned in the lowered position are replaced.

[0094] In embodiment 1, the cleaning unit maintenance unit 240 automatically performs cleaning unit maintenance to clean or replace the cleaning unit 33 of the cleaning car 30 positioned in the lowered position where the cleaning unit positioning unit 220 is installed, and generates information such as the maintenance status, which is the cleaning status and replacement status, and the maintenance history, which is the cleaning history and replacement history, of the cleaning unit 33 of the cleaning car 30. However, the present invention is not limited to this, and an operator may manually perform cleaning unit maintenance to clean or replace the cleaning unit 33 of the cleaning car 30 positioned in the lowered position where the cleaning unit positioning unit 220 is installed, and input information such as the maintenance status and maintenance history of the cleaning unit 33 of the cleaning car 30.

[0095] The receiving unit 250 is connected to the management unit 40 of the processing system 1 so as to be able to communicate with the management unit 40, receives information transmitted from the management unit 40, and outputs the received information to the control unit 270. In the first embodiment, the receiving unit 250 is connected to the management unit 40 so as to be able to communicate with the management unit 40 by wire, but the present invention is not limited to this, and the receiving unit 250 may be connected to the management unit 40 so as to be able to communicate with the management unit 40 wirelessly. In the first embodiment, the information received by the receiving unit 250 from the management unit 40 is, for example, command information for an operation related to the processing of the cleaning car station 200, request information for prompting the transmission of information such as the maintenance status and maintenance history of the cleaning unit 33 of the cleaning car 30 in the cleaning car station 200, etc.

[0096] The transmission unit 260 is connected to the management unit 40 so as to be able to communicate with the management unit 40, and transmits information output from the control unit 270 to the management unit 40. In the first embodiment, the transmission unit 260 is connected to the management unit 40 so as to be able to communicate with the management unit 40 via a wire, but the present invention is not limited to this, and the transmission unit 260 may be connected to the management unit 40 so as to be able to communicate with the management unit 40 wirelessly. In the first embodiment, the information transmitted by the transmission unit 260 to the management unit 40 is, for example, information such as the maintenance status and maintenance history of the cleaning section 33 of the cleaning car 30 in the cleaning car station 200.

[0097] The control unit 270 controls the operation of each component of the cleaning car station 200, and causes the cleaning car station 200 to carry out various processing operations for the cleaning unit 33 of the cleaning car 30. The control unit 270 reads the barcode or ID of the cleaning unit 33 positioned in the lowered position using a reader in the cleaning unit positioning unit 220, and obtains information on the type of cleaning unit 33. The control unit 270 controls the cleaning unit maintenance unit 240, and controls the cleaning unit maintenance processing by the cleaning unit maintenance unit 240 of the cleaning unit 33 positioned in the lowered position.

[0098] The control unit 270 acquires information received by the receiving unit 250 from the management unit 40, and outputs information to be transmitted to the management unit 40 to the transmitting unit 260. The control unit 270 causes the cleaning car station 200 to perform an operation according to the command information received by the receiving unit 250 from the management unit 40. The control unit 270 causes the transmitting unit 260 to transmit information such as the maintenance status and maintenance history of the cleaning unit 33 of the cleaning car 30 in the cleaning car station 200 to the management unit 40 in response to the request information received by the receiving unit 250 from the management unit 40. Even if the control unit 270 does not receive request information from the management unit 40, it can also cause the transmitting unit 260 to transmit information such as the maintenance status and maintenance history of the cleaning unit 33 of the cleaning car 30 in the cleaning car station 200 to the management unit 40 on its own initiative.

[0099] Here, the maintenance status of the cleaning unit 33 of the cleaning vehicle 30 includes, for example, the type of cleaning vehicle station 200 undergoing maintenance, the cleaning unit 33 brought into the housing 210 of the cleaning vehicle station 200, the maintenance status of the cleaning unit 33 in the housing 210 of the cleaning vehicle station 200, the error status regarding errors that have occurred in the cleaning unit maintenance unit 240 undergoing maintenance or in the cleaning unit 33 during and after maintenance, etc.

[0100] In addition, the maintenance history of the cleaning unit 33 of the cleaning vehicle 30 refers to the type of cleaning vehicle station 200, the history of maintenance of the cleaning unit 33 performed within the housing 210 of the cleaning vehicle station 200, and the error history for each cleaning unit 33 brought into the housing 210 of the cleaning vehicle station 200. Specifically, for each cleaning unit 33, the history of maintenance within the housing 210 of the cleaning vehicle station 200, information on the fact that maintenance was performed, the maintenance conditions at the time of maintenance and the history of maintenance data obtained during maintenance, and the error history regarding errors that occurred in the cleaning unit maintenance section 240 during maintenance and in the cleaning unit 33 during and after maintenance are linked to the date and time (time) when these processes were performed and the type of cleaning unit 33.

[0101] In the first embodiment, the control unit 270 includes a computer system similar to the above-described control units 29, 39, and 170. The arithmetic processing device of the control unit 270 performs arithmetic processing in accordance with a computer program stored in the storage device of the control unit 270, and outputs control signals for controlling the cleaning car station 200 to each component of the cleaning car station 200 via the input / output interface device of the control unit 270.

[0102] The management unit 40 centrally manages and controls the entire processing system 1. The management unit 40 is connected to the receiving unit 27 and the transmitting unit 28 of each transport vehicle 20 so as to be able to communicate with each other, to the receiving unit 37 and the transmitting unit 38 of each cleaning vehicle 30 so as to be able to communicate with each other, to the receiving unit 150 and the transmitting unit 160 of each processing device 100 so as to be able to communicate with each other, and to the receiving unit 250 and the transmitting unit 260 of each cleaning vehicle station 200 so as to be able to communicate with each other. The management unit 40 transmits command information to each receiving unit 27, 37, 150, 250, thereby remotely controlling and operating each transport vehicle 20, each cleaning vehicle 30, each processing device 100, and each cleaning vehicle station 200 via each control unit 29, 39, 170, 270.

[0103] In addition, the management unit 40 can receive and grasp information on the transportation status and transportation history of each transport vehicle 20 from the transmission unit 28, can receive and grasp information on the cleaning status and cleaning history of each cleaning vehicle 30 from the transmission unit 38, can receive and grasp information on the processing status and processing history of each processing device 100 from the transmission unit 160, and can receive and grasp information on the maintenance status and maintenance history of each cleaning vehicle station 200 from the transmission unit 260. In this way, the management unit 40 can comprehensively control and operate each transport vehicle 20, each cleaning vehicle 30, each processing device 100, and each cleaning vehicle station 200, which are components of the processing system 1. In addition, the management unit 40 functions as a server that collectively manages various information (data) received from each transport vehicle 20, various information (data) received from each cleaning vehicle 30, various information (data) received from each processing device 100, and various information (data) received from each cleaning vehicle station 200.

[0104] In this way, the management unit 40 can comprehensively manage and control the overall control of the processing system 1, divide the processing object 300 to manufacture multiple device chips, and clean the transport path 10 with each cleaning car 30 to keep it clean.

[0105] In the first embodiment, the management unit 40 includes a computer system similar to the above-described control units 29, 39, 170, and 270. The arithmetic processing device of the management unit 40 performs arithmetic processing in accordance with a computer program stored in a storage device of the management unit 40, and outputs control signals for controlling the processing system 1 to each component of the processing system 1 via an input / output interface device of the management unit 40.

[0106] The processing system 1 of embodiment 1 having the above-mentioned configuration is equipped with a cleaning cart 30 for cleaning the transport path 10, which has a cleaning unit 33 for cleaning the transport path 10 installed on the surface opposite the transport path 10, and a first lifting mechanism 34 for raising and lowering the cleaning unit 33.Therefore, the cleaning cart 30 cleans the transport path 10 while running over it, thereby easily cleaning the transport path 10, and further, by raising and lowering the cleaning unit 33, the cleaning unit 33 can be easily washed or replaced.

[0107] In addition, in the processing system 1 of embodiment 1, the cleaning section 33 includes a cleaning member 63 which is at least one of a nonwoven fabric, a sponge, or a brush that contacts the transport path 10, so that it is possible to effectively remove dirt such as foreign matter adhering to the transport path 10 and clean the transport path 10.

[0108] [Embodiment 2] A treatment system 1 according to a second embodiment of the present invention will be described. Fig. 8 is a bottom cross-sectional view showing a main part of the treatment system 1 according to the second embodiment. Fig. 8 shows the cleaning unit 33-2 of the cleaning vehicle 30-2 of the treatment system 1 according to the second embodiment. In Fig. 8, the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0109] The processing system 1 according to the second embodiment is the same as that of the processing system 1 according to the first embodiment except that the cleaning vehicle 30 is replaced with a cleaning vehicle 30-2. The other configurations are the same as those of the processing system 1 according to the second embodiment. The cleaning vehicle 30-2 of the processing system 1 according to the second embodiment is the same as that of the processing system 1 according to the first embodiment except that the cleaning unit 33 is replaced with a cleaning unit 33-2.

[0110] The cleaning unit 33-2 of the second embodiment is a modification of the cleaning unit 33 of the first embodiment in that at least some of the sets of mounting members 62, cleaning members 63 and biasing members 64 provided on the underside of the frame member 61 are provided with cleaning member moving parts 65. The cleaning unit 33-2 is raised and lowered by the first lifting mechanism 34, similar to the cleaning unit 33 of the first embodiment.

[0111] As shown in FIG. 8, the cleaning member moving part 65 includes a cylinder tube 66, a piston 67, a rod 68, and a guide 69. The cylinder tube 66 is fixed to the lower surface of the frame member 61 and extends between a pair of guides 69 in a predetermined direction parallel to the horizontal direction. The piston 67 is provided in the cylinder tube 66 so as to be movable along the predetermined direction. The rod 68 extends in the predetermined direction from the inside to the outside of the cylinder tube 66 and is provided so as to be movable along the predetermined direction. The piston 67 is connected to the inner end of the cylinder tube 66, and a set of the mounting member 62, the cleaning member 63, and the biasing member 64 is connected to the outer end of the cylinder tube 66. The movement of the rod 68 along the predetermined direction is guided and restricted by the pair of guides 69.

[0112] In embodiment 2, the control unit 39 controls the pressure inside the cylinder tube 66, thereby controlling the movement of the piston 67 inside the cylinder tube 66 along a predetermined direction, and via the rod 68 to which the piston 67 is connected, controls the movement of a set of mounting member 62, cleaning member 63 and biasing member 64 connected to the rod 68 along the predetermined direction.

[0113] In this way, the cleaning unit 33-2 can move the set of mounting members 62, cleaning members 63, and biasing members 64 along a predetermined direction by the cleaning member moving part 65. Note that in the present invention, the cleaning member moving part 65 is not limited to a configuration including the cylinder tube 66, the piston 67, the rod 68, and the guide 69, and may have any configuration as long as it can move the set of mounting members 62, cleaning members 63, and biasing members 64 along a predetermined direction.

[0114] In embodiment 2, the specified direction in which one set of mounting member 62, cleaning member 63 and urging member 64 is moved is a direction perpendicular to the traveling direction of the cleaning vehicle 30, but this is not limited to this in the present invention, and it may be a direction that is not perpendicular to the traveling direction of the cleaning vehicle 30 but intersects with it, or it may be a direction parallel to the traveling direction of the cleaning vehicle 30.

[0115] Since the cleaning unit 33-2 has such a configuration, cleaning or replacement of the cleaning unit 33 is performed by the cleaning unit maintenance unit 240 of the cleaning vehicle station 200. At this time, in addition to the cleaning or replacement of the cleaning unit 33-2 in the same manner as the cleaning unit 33, cleaning or replacement of the cleaning member moving unit 65 is also performed.

[0116] In the processing system 1 of embodiment 2 having the above-mentioned configuration, the cleaning vehicle 30-2 is equipped with a cleaning member moving part 65 that can move the cleaning member 63 of the cleaning unit 33-2 along a predetermined direction. Therefore, by using the cleaning member moving part 65 to move the cleaning member 63 of the cleaning unit 33-2 so that it protrudes to the outside of the vehicle body 31, the cleaning member 63 can reach and clean corners of the conveying path 10 where it is difficult for the cleaning vehicle 30-2 to travel.

[0117] [Embodiment 3] A processing system 1 according to a third embodiment of the present invention will be described. Fig. 9 is a side cross-sectional view showing a main part of the processing system 1 according to the third embodiment. Fig. 9 shows a cleaning unit 33-3 of a cleaning vehicle 30-3 of the processing system 1 according to the third embodiment. In Fig. 9, the same parts as those in the first and second embodiments are denoted by the same reference numerals, and the description thereof will be omitted.

[0118] The processing system 1 according to the embodiment 3 is the processing system 1 according to the embodiment 1, in which the cleaning vehicle 30 is changed to a cleaning vehicle 30-3, and other configurations are the same as those of the embodiment 1. The cleaning vehicle 30-3 of the processing system 1 according to the embodiment 3 is the processing system 1 according to the embodiment 1, in which the cleaning unit 33 is changed to a cleaning unit 33-3.

[0119] 9, the cleaning unit 33-3 includes a suction unit 71, a dust box 72, a filter 73, a fan 74, and a battery 75. The lower end of the hanging member 59 of the first lifting mechanism 34 is attached to the upper surface of a housing that houses the suction unit 71, the dust box 72, the filter 73, the fan 74, and the battery 75 inside the cleaning unit 33-3, and thus the cleaning unit 33-3 is supported from above by the hanging member 59 of the first lifting mechanism 34.

[0120] The suction unit 71 is a nozzle-shaped or tubular member, with a suction hole on one side facing downward and a base end on the other side connected and communicating with the dust box 72. Therefore, the suction hole of the suction unit 71 faces onto the conveying path 10 while the cleaning vehicle 30-3 is traveling along the conveying path 10. The dust box 72 is formed in a box shape, and is provided therein with a filter 73 that divides the internal space in two, with the base end of the suction unit 71 connected and communicating with one side, and a fan 74 provided on the other side. A battery 75 is connected to the fan 74, and the fan 74 is driven by power supplied from the battery 75.

[0121] In embodiment 3, while the cleaning vehicle 30-3 is traveling along the conveying path 10, the control unit 39 controls the supply of power from the battery 75 to the fan 74, and controls the operation of the fan 74 to form an air flow from the suction section 71 side in the dust box 72 toward the fan 74 side via the filter 73, and sucks in air on the conveying path 10 through the suction hole of the suction section 71, and captures foreign matter and the like contained in the sucked air with the filter 73, thereby causing the cleaning section 33-3 to clean the upper surface (running surface) of the conveying path 10 and the air above the conveying path 10.

[0122] Since the cleaning unit 33-3 has such a configuration, cleaning or replacement of the cleaning unit 33-3 is performed by the cleaning unit maintenance unit 240 of the cleaning vehicle station 200. At this time, for example, cleaning or replacement of the filter 73, charging or replacement of the battery 75, cleaning or replacement of each cleaning unit 33-3, etc. are performed.

[0123] In the processing system 1 of embodiment 3 having the above-mentioned configuration, the cleaning vehicle 30-3 is equipped with a cleaning unit 33-3 that sucks in and cleans the air on the conveying path 10, so that the cleaning unit 33-3 can clean the upper surface (running surface) of the conveying path 10 and the air above the conveying path 10, and the cleaning of the upper surface (running surface) of the conveying path 10 can reduce the risk of scratching the upper surface (running surface) of the conveying path 10.

[0124] The present invention is not limited to the above-mentioned embodiment. That is, various modifications can be made without departing from the gist of the present invention. For example, in the first, second and third embodiments, the cleaning units 33, 33-2 and 33-3 are configured to include at least one of a nonwoven fabric, a sponge or a brush that contacts the conveying path 10 to clean the conveying path 10, or to suck air on the conveying path 10 and clean it through a filter 73, but the present invention is not limited to this, and may include a nozzle that supplies a cleaning liquid to the conveying path 10 to clean the conveying path 10, or may include a suction hole and a suction source that sucks air on the conveying path 10 and thereby sucks in foreign matter. [Explanation of symbols]

[0125] 1 Processing System 100, 100-2 Processing device 10 Transport path 20 Transport vehicle 23 Cassette 24 Second lifting mechanism 30,30-2,30-3 Cleaning truck 33,33-2,33-3 Cleaning Department 34 First lifting mechanism 300 Processing Objects 310 Goods

Claims

1. A processing system for performing any processing on a processing object, The processing system includes: A plurality of processing devices; a conveying path disposed on the processing apparatus across a plurality of the processing apparatuses; a transport vehicle that travels along the transport path and transports the article to the processing device; A cleaning vehicle for cleaning the conveying path, The cleaning vehicle is a cleaning unit that cleans the conveying path and is disposed on a surface opposite the conveying path; A first lifting mechanism that lifts and lowers the cleaning unit; A processing system having:

2. 2. The processing system according to claim 1, wherein the cleaning unit includes at least one of a nonwoven fabric, a sponge, and a brush that contacts the transport path.

3. The transport vehicle is A cassette for containing the article; a second lifting mechanism for lifting the cassette relative to the processing device; 2. The processing system of claim 1 , comprising:

4. 4. The processing system according to claim 1, wherein the article is a processing object or a consumable item used in the processing apparatus.

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