Pressurizing system

Abstract

To provide a pressurizing system capable of shortening a time between pressurizing treatments and executing treatment related to the pressurizing treatments.SOLUTION: A pressurizing system 1 according to the present invention is a pressurizing system that performs pressurizing treatment and associated treatment on a workpiece W. The pressurizing system includes: a pressurizing area A8 where the pressurizing treatment is performed; two associated areas A4, A7 arranged to sandwich the pressurizing area to perform associated treatment; two chamber units 20 that accommodate the workpiece and are transported back and forth between an upper space of the associated area and the upper space of the pressurizing area; and a chamber transport device 96 that transports the two chamber units back and forth simultaneously. The chamber transport device transports the chamber units back and forth so that one chamber unit is located in the pressurizing area and the other chamber unit is located in one associated area, and so that the other chamber unit is located in the pressurizing area and one chamber unit is located in the other associated area.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a pressurization system. [Background technology]

[0002] Conventionally, a pressurizing device has been used to pressurize an object to be pressurized (such as an electronic component). For example, a pressurizing device disclosed in Patent Document 1 includes an upper pressurizing unit and a lower pressurizing unit, and the object to be pressurized is clamped and pressed by the upper pressurizing unit and the lower pressurizing unit, and the object to be pressurized is heated by a heat unit included in the lower pressurizing unit. In this pressurizing device, after the pressurization and heating of the object to be pressurized are completed, the workpiece is cooled while still in the pressurized state, and the object to be pressurized is removed after cooling. In this pressurizing device, the object to be pressurized is heated and cooled by one heat unit. Therefore, it takes time to switch between heating and cooling by the heat unit, which lengthens the processing time for each pressurization process.

[0003] In the pressurizing device disclosed in Patent Document 2, the lower pressurizing unit includes a heating unit that is preheated and a cooling unit that is precooled. The heating unit and the cooling unit are configured to be movable relative to the upper pressurizing unit that holds the object to be pressurized, and are appropriately switched depending on the progress of the pressurizing process. Therefore, the time required for switching between heating and cooling by the lower pressurizing unit is shortened, and the processing time is also shortened. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2007-896 A [Patent Document 2] JP 2017-199812 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the pressurizing devices disclosed in Patent Documents 1 and 2, while each treatment (heating, pressurizing, cooling) is being performed on the pressurized object, the pressurized object is sandwiched between the upper pressurizing unit and the lower pressurizing unit. Therefore, from the start to the end of each treatment, the pressurizing device is a dedicated machine that handles only the pressurized object being treated. As a result, during a pressurizing treatment, a pressurized object for the next pressurizing treatment cannot be set in the pressurizing device. In other words, a long time is required between one pressurizing treatment and the next pressurizing treatment.

[0006] Here, the processing time can be shortened by performing a preliminary heating process on the pressurized object as a pre-processing of the pressurized object. The processing time can also be shortened by separating a cooling process from the pressurized object and performing a cooling process on the pressurized object as a post-processing of the pressurized object. In this way, the processing time in the pressurized object can be shortened and the time between pressurized objects can be shortened by making it possible to perform processes related to the pressurized object (hereinafter referred to as "related processes") in the pressurized object. However, it is not easy to perform the related processes in the pressurized object. Even if the related processes can be performed, the pressurized object is sealed only during the pressurized object in the pressurized object, so that the pressurized object is exposed to the atmosphere during the related processes and may be oxidized. Therefore, a chamber for the related processes and a large amount of inert gas (e.g., nitrogen gas) to fill the chamber are required.

[0007] An object of the present invention is to provide a pressurizing system that can shorten the time between pressurizing treatments and can perform processes related to the pressurizing treatments. [Means for solving the problem]

[0008] In one embodiment of the present invention, a pressurization system performs a pressurization treatment on a workpiece and an associated treatment related to the pressurization treatment on the workpiece, and comprises a pressurization area in which the pressurization treatment is performed, two associated areas in which the associated treatment is performed and which are arranged adjacent to the pressurization area so as to sandwich the pressurization area, two chamber units that accommodate the workpiece and are transported back and forth between an upper space of the associated area and an upper space of the pressurization area, and a chamber transport device that transports the two chamber units back and forth simultaneously, and the chamber transport device transports the chamber units back and forth so that when one of the chamber units is located in the pressurization area, the other chamber unit is located in one of the associated areas, and when the other chamber unit is located in the pressurization area, one of the chamber units is located in the other of the associated areas. Effect of the Invention

[0009] According to the present invention, it is possible to provide a pressurizing system capable of shortening the time between pressurizing treatments and executing treatments related to the pressurizing treatments. [Brief description of the drawings]

[0010] [Figure 1] 1 is a schematic perspective view showing an embodiment of a pressurizing system according to the present invention; [Diagram 2] FIG. 2 is a functional block diagram of the pressurizing system of FIG. 1. [Diagram 3] FIG. 2 is a schematic plan view of the pressurizing system of FIG. 1. [Figure 4] FIG. 4 is a schematic cross-sectional view of the pressurizing system of FIG. 3 taken along line AA. [Diagram 5] FIG. 4 is a schematic cross-sectional view of the pressurizing system of FIG. 3 taken along line BB. [Figure 6] 4 is a schematic cross-sectional view of the pressurizing system of FIG. 3 taken along line CC. [Figure 7] FIG. 4 is a schematic cross-sectional view of the pressurizing system of FIG. 3 taken along line DD. [Figure 8]2 is a schematic cross-sectional view of a chamber unit included in the pressurizing system of FIG. 1. [Figure 9] 2 is a schematic cross-sectional view illustrating the operation of the pressurizing system of FIG. 1. [Figure 10] 1. FIG. 10 is a schematic cross-sectional view illustrating the operation of the pressurizing system of FIG. [Figure 11] 11 is a schematic plan view of a fourth area of ​​the pressurizing system of FIG. 10. FIG. [Figure 12] 11 is a schematic cross-sectional view illustrating the operation of the pressurizing system of FIG. 1 subsequent to that of FIG. 10. FIG. [Figure 13] 13 is a schematic cross-sectional view illustrating the operation of the pressurizing system in FIG. 1 following that in FIG. 12. FIG. [Figure 14] 14 is a schematic cross-sectional view illustrating the operation of the pressurizing system in FIG. 1 subsequent to that in FIG. 13. FIG. [Figure 15] 15 is a schematic cross-sectional view illustrating the operation of the pressurizing system in FIG. 14 subsequent to that in FIG. 14. [Figure 16] 16 is a schematic cross-sectional view illustrating the operation of the pressurizing system in FIG. 1 following that in FIG. 15 . FIG. [Figure 17] 17 is a schematic cross-sectional view illustrating the operation of the pressurizing system in FIG. 16 subsequent to that in FIG. 16. [Figure 18] 18 is a schematic cross-sectional view illustrating the operation of the pressurizing system in FIG. 1 following that in FIG. 17. [Figure 19] 2 is a schematic plan view illustrating the operation of a workpiece conveying device provided in the pressurizing system of FIG. 1. [Figure 20] FIG. 11 is a schematic cross-sectional view of a chamber unit included in a pressurizing system according to a modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] An embodiment of a pressurizing system (hereinafter referred to as "this system") according to the present invention will be described below. In the following description, the drawings will be referred to as appropriate. In each drawing, the same members and elements are given the same reference numerals, and duplicated explanations will be omitted. Furthermore, the dimensional ratios of each element may be exaggerated for the sake of convenience of explanation, and are not limited to the ratios shown in each drawing.

[0012] In the following description and drawings, unless otherwise specified, when three mutually orthogonal axes in space are the X-axis, the Y-axis, and the Z-axis, respectively, the "X-axis direction" is a direction along the X-axis, for example, the left-right direction. The "Y-axis direction" is a direction along the Y-axis, for example, the front-back direction. The "Z-axis direction" is a direction along the Z-axis, for example, the up-down direction. In addition, the "+X-axis direction" is the left, the "-X-axis direction" is the right, the "+Y-axis direction" is the front, the "-Y-axis direction" is the rear, the "+Z-axis direction" is the up, and the "-Z-axis direction" is the down. In the following description, the X-axis direction (+X-axis direction, -X-axis direction) and the Y-axis direction (+Y-axis direction, -Y-axis direction) are mainly used to specify directions other than the up-down directions.

[0013] In the present invention, a function for performing a process related to the pressurizing process (hereinafter referred to as "related process") is added to the pressurizing device, and the present system is configured to perform a plurality of processes including the pressurizing process. In addition, two chamber units in which the workpiece is accommodated are formed by a part of the upper pressurizing unit and a part of the lower pressurizing unit, which pressurize the workpiece in the pressurizing process. The two chamber units are alternately transported back and forth between the pressurizing area and the related area arranged in the present system, and the process corresponding to each area is performed on the workpiece. As a result, the present invention is capable of performing the related process on the workpiece by transporting the chamber unit back and forth. In addition, the present invention is capable of shortening the time between the pressurizing process and the next pressurizing process (between pressurizing processes). Furthermore, the present invention is capable of performing a plurality of related processes on the workpiece by performing a plurality of related processes in one related area. Explanations of each term and specific configurations of each member will be described later.

[0014] "Pressure processing" refers to processing in which pressure is applied to a workpiece from above and below to perform a predetermined processing on the workpiece (e.g., compression, pressure welding, sintering bonding, etc.). Pressure processing includes processing in which only pressure is applied, and processing in which pressure and heat are applied.

[0015] The "workpiece" is the object to be pressurized in this system (i.e., the object to be pressurized), and is, for example, a sheet-like base material (such as a ceramic green sheet), or a substrate on which electronic components, circuits, etc. are mounted.

[0016] "Related processes" are processes related to the pressurization process in this system, and include pre-processing required for the work before the pressurization process is performed (e.g., storing the work, pre-heating the work, etc.), and post-processing required for the work after the pressurization process is performed (e.g., cooling the work, removing the work, etc.). In this embodiment, the related processes include storing processes and pre-heating processes as pre-processing, and cooling processes and removal processes as post-processing. Details of each process will be described later.

[0017] ●Pressurization system● Composition of the pressurization system FIG. 1 is a schematic perspective view showing an embodiment of the present system 1. As shown in FIG. FIG. 2 is a functional block diagram of the system 1. In FIG. 1, the boundaries of each area, which will be described later, are indicated by thick dashed dotted lines.

[0018] This system 1 performs a pressurization process and related processes on the workpiece W. This system 1 includes a housing 2, a control device 3, a first cooling device 4, a first pre-heating device 5, a second cooling device 6, a second pre-heating device 7, a pressurizing device 8, a transfer device 9, an atmosphere adjustment device 10, and two chamber units 20. In the following description, when the chamber units 20 are to be distinguished from one another, one chamber unit 20 and its components are given the symbol "A", and the other chamber unit 20 and its components are given the symbol "B".

[0019] In this system 1, pressure application and related processes are alternately performed on two workpieces W. In the following description, when each of the workpieces W is to be distinguished, one of the workpieces W is referred to as a "first workpiece W1" and the other workpiece W is referred to as a "second workpiece W2 (see FIG. 4; the same applies below)."

[0020] The housing 2 houses a control device 3, a first cooling device 4, a first pre-heating device 5, a second cooling device 6, a second pre-heating device 7, a pressurizing device 8, a transfer device 9, an atmosphere adjusting device 10, and two chamber units 20.

[0021] FIG. 3 is a schematic plan view of the system 1. As shown in FIG. For ease of explanation, some components of the system 1 are omitted in the figure. In the figure, a base member B1, which will be described later, is shown in a semi-transparent state, and the first cooling device 4 is shown by a two-dot chain line. In the following explanation, Figures 1 and 2 will also be referred to as appropriate.

[0022] When viewed from above, the shape of the housing 2 is a rectangle along the X-axis direction and the Y-axis direction (hereinafter referred to as the "XY-axis direction"), and is a hollow rectangular parallelepiped. The housing 2 is placed on a horizontal floor surface. In the following description, the "horizontal direction" is a direction parallel to the floor surface and parallel to the XY-axis directions. The horizontal direction does not only mean a completely horizontal state, but also includes slight inclinations of the floor surface and errors (slight inclinations) due to manufacturing tolerances and assembly tolerances of the components that make up the present system 1.

[0023] When viewed from above, the space inside the housing 2 is divided into a first area A1, a second area A2, a third area A3, a fourth area A4, a fifth area A5, a sixth area A6, a seventh area A7, an eighth area A8, and a ninth area A9. In other words, the system 1 has a first area A1 to a ninth area A9. In this specification, when the first area A1 to the ninth area A9 are not particularly distinguished from one another, they are simply referred to as "areas."

[0024] Among the areas, the second area A2 to the fourth area A4 and the eighth area A8 constitute a first system for handling the first workpiece W1, and the fifth area A5 to the eighth area A8 constitute a second system for handling the second workpiece W2.

[0025] The "first area A1" is an area where each workpiece W before processing is placed (waits). A belt conveyor a11 is placed in the first area A1. The first area A1 is an example of a workpiece carry-in area in the present invention.

[0026] The "second area A2" is an area where each unprocessed work W transported to the fourth area A4 is placed as the first work W1, and is also an area where each processed first work W1 transported from the fourth area A4 is placed. The second area A2 is an example of a first work transport area in the present invention.

[0027] The "third area A3" is an area where the first pre-heating device 5 is on standby (located) during the pressurizing process, the cooling process, and the removal process of the first work W1. The third area A3 is an example of a standby area in the present invention.

[0028] The "fourth area A4" is an area where the associated processes (storage process, preheating process, cooling process, and removal process) for the first work W1 are performed. The fourth area A4 is an example of one associated area in the present invention.

[0029] The "fifth area A5" is an area where the workpieces W before each processing are placed as the second workpieces W2, and is also an area where the second workpieces W2 after each processing are placed, which are transported from the seventh area A7. The fifth area A5 is an example of the second workpiece transport area in the present invention.

[0030] The "sixth area A6" is an area where the second pre-heating device 7 is on standby (located) during the pressurizing process, the cooling process, and the removal process of the second work W2. The sixth area A6 is an example of a standby area in the present invention.

[0031] The "seventh area A7" is an area where the associated processes (storage process, preheating process, cooling process, and removal process) for the second work W2 are performed. The seventh area A7 is an example of the other associated area in the present invention.

[0032] The "eighth area A8" is an area where a pressurizing process is performed on the workpiece W. The eighth area A8 is an example of a pressurizing area in the present invention.

[0033] The "ninth area A9" is, for example, an area where the workpieces W after each process are placed. A belt conveyor a91 is placed in the ninth area A9. The ninth area A9 is an example of a workpiece carrying-out area in the present invention.

[0034] In the top view, the second area A2 to the eighth area A8 are disposed between the first area A1 and the ninth area A9. The second area A2 is disposed adjacent to the first area A1 in the +X-axis direction. The third area A3 is disposed adjacent to the second area A2 in the +Y-axis direction. The fourth area A4 is disposed adjacent to the third area A3 in the +Y-axis direction. The fifth area A5 is disposed in the +X-axis direction of the second area A2 and adjacent to the -X-axis direction of the ninth area A9. The sixth area A6 is disposed adjacent to the fifth area A5 in the +Y-axis direction. The seventh area A7 is disposed adjacent to the sixth area A6 in the +Y-axis direction. The eighth area A8 is disposed adjacent to the fourth area A4 in the +X-axis direction and adjacent to the seventh area A7 in the -X-axis direction. That is, in the X-axis direction, the eighth area A8 is disposed so as to be sandwiched between the fourth area A4 and the seventh area A7.

[0035] The control device 3 controls the overall operation of the system 1. The control device 3 includes, for example, a processor such as a CPU (Central Processing Unit) 3a, a volatile memory such as a RAM (Random Access Memory) 3b that functions as a working area for the CPU 3a, and a non-volatile memory such as a ROM (Read Only Memory) 3c that stores various information such as a control program.

[0036] FIG. 4 is a schematic cross-sectional view of the present system 1 taken along line AA of FIG. FIG. 5 is a schematic cross-sectional view of the present system 1 taken along line BB in FIG. In the following description, FIG. 2 will be referred to as appropriate.

[0037] The first cooling device 4 cools the first workpiece W1 after the pressurization process housed in the chamber unit 20A. The first cooling device 4 includes a table 40, a cooling unit 41, and a lifting device 42. The first cooling device 4 is disposed in the fourth area A4.

[0038] The table 40 is a platform on which the cooling unit 41 is placed. The shape of the table 40 is, for example, an octagonal shape having four sides aligned along the XY axis directions when viewed from above (see FIG. 11), and is plate-like.

[0039] The cooling unit 41 is disposed above the table 40 and attached to the table 40. The cooling unit 41 includes a main body 41a, a heat insulating member 41b, and a plurality of refrigerant flow paths C1. The main body 41a protects the refrigerant flow paths C1. The main body 41a is made of, for example, a metal (for example, a copper alloy) having high thermal conductivity. When viewed from above, the shape of the main body 41a is, for example, the same as that of the table 40 (see FIG. 11). The heat insulating member 41b covers the periphery of the main body 41a (the entire circumference in the horizontal direction and the downward direction. The same applies below) and suppresses condensation on the main body 41a. The refrigerant flow paths C1 are flow paths through which a refrigerant (not shown. The same applies below) flows. The refrigerant is cooled by a cooling device and circulated between the refrigerant flow paths C1 and the cooling device (not shown. The same applies below). The upper surface 41c of the cooling unit 41 is flat and parallel to the horizontal direction.

[0040] The lifting device 42 lifts and lowers the table 40 and the cooling unit 41. The lifting device 42 is, for example, a known cylinder.

[0041] The first preheating device 5 heats the first workpiece W1 accommodated in the chamber unit 20A to a preheating temperature, which will be described later. The first preheating device 5 includes a table 50, a preheating unit 51, and a heat unit transport device 52.

[0042] The table 50 is a platform on which the preheating unit 51 is placed. The table 50 includes a main body 50a and an attachment portion 50b. The shape of the main body 50a is, for example, plate-like. When viewed from above, the shape of the main body 50a is similar to that of the table 40 and the cooling unit 41, and the main body 50a is slightly larger than the table 40 and the cooling unit 41 (see FIG. 11). An end portion of the main body 50a on the -Y axis direction side extends into a rectangular plate shape on the -Y axis direction side, and constitutes the attachment portion 50b.

[0043] The preheating unit 51 is disposed above the main body 50a and attached to the main body 50a. The preheating unit 51 includes a main body 51a, a heat insulating member 51b, and a plurality of heaters H1. The main body 51a protects the heaters H1. The main body 51a is made of, for example, a metal having high thermal conductivity (for example, a copper alloy). The shape of the main body 51a is, for example, a rectangular shape along the XY axis direction when viewed from above (see FIG. 11), and a rectangular parallelepiped shape. When viewed from above, the main body 51a is smaller than the main body 50a. The heat insulating member 51b covers the periphery of the main body 51a and suppresses the leakage of heat from the heaters H1 to the periphery. The heaters H1 are disposed inside the main body 51a. The upper surface 51c of the preheating unit 51 is a flat surface parallel to the horizontal direction.

[0044] The heat unit transport device 52 transports the table 50 and the pre-heating unit 51 back and forth between the third area A3 and the fourth area A4. The heat unit transport device 52 includes, for example, a motor (not shown, same below), a power transmission mechanism 52a, a connecting member 52b, a lifting member 52c, a plurality of rollers 52d, and a pair of rail members R1 and R2.

[0045] The power transmission mechanism 52a is, for example, a known ball screw that converts the rotational motion of a motor into linear motion. The power transmission mechanism 52a is arranged in the third area A3 and the fourth area A4 (the part on the third area A3 side) along the Y-axis direction. The connecting member 52b is attached to the power transmission mechanism 52a and can move back and forth in the Y-axis direction. The upper end of the lifting member 52c is attached to the mounting portion 50b. The lifting member 52c is supported by the connecting member 52b so that it can be raised and lowered in the vertical direction together with the table 50 relative to the connecting member 52b. The rollers 52d are placed on the rail members R1 and R2 and rotate to assist the transportation of the table 50 and the preheating unit 51. The rollers 52d are evenly attached to both side surfaces on the X-axis direction side of the main body portion 50a. The rail members R1 and R2 support the table 50 and the preheating unit 51 via the rollers 52d so that the table 50 and the preheating unit 51 can move horizontally in the Y-axis direction. The rail members R1 and R2 are disposed in the third area A3 and the fourth area A4 so as to extend along the Y-axis direction. The rail members R1 and R2 are supported by the housing 2.

[0046] The rollers 52d are placed on the rail members R1, R2, so that the table 50 and the preheating unit 51 are supported on the rail members R1, R2 so as to be movable back and forth in the Y-axis direction. The connecting member 52b moves back and forth in the Y-axis direction, so that the table 50 and the preheating unit 51 are transported back and forth between the third area A3 and the fourth area A4. As described below, the table 50 and the preheating unit 51 are disposed in the third area A3 during the pressurizing process, cooling process, and removal process of the first work W1, and are disposed in the fourth area A4 during the storage process and preheating process of the first work W1.

[0047] FIG. 6 is a schematic cross-sectional view of the present system 1 taken along line CC in FIG. In the following description, FIG. 3 and FIG. 4 will also be referred to as appropriate.

[0048] The second cooling device 6 cools the second workpiece W2 after the pressurization process housed in the chamber unit 20B. The configuration of the second cooling device 6 is the same as that of the first cooling device 4, so a detailed description thereof will be omitted. The second cooling device 6 includes a table 60, a cooling unit 61, and a lifting device 62. The second cooling device 6 is disposed in the seventh area A7.

[0049] The configurations of the table 60 and the lifting device 62 are the same as those of the table 40 and the lifting device 42 .

[0050] The cooling unit 61 includes a main body 61a, a heat insulating member 61b, an upper surface 61c, and a plurality of refrigerant channels C2. The configurations of the main body 61a, the heat insulating member 61b, the upper surface 61c, and the plurality of refrigerant channels C2 are the same as the configurations of the main body 41a, the heat insulating member 41b, the upper surface 41c, and the plurality of refrigerant channels C1, respectively.

[0051] The second preheating device 7 heats the second workpiece W2 accommodated in the chamber unit 20B to a preheating temperature, which will be described later. The configuration of the second preheating device 7 is the same as that of the first preheating device 5, so a detailed description thereof will be omitted. The second preheating device 7 includes a table 70, a preheating unit 71, and a heat unit transport device 72.

[0052] The table 70 includes a main body portion 70a and an attachment portion 70b. The configurations of the main body portion 70a and the attachment portion 70b are the same as the configurations of the main body portion 50a and the attachment portion 50b, respectively.

[0053] The preheating unit 71 includes a main body 71a, a heat insulating member 71b, an upper surface 71c, and a plurality of heaters H2. The main body 71a, the heat insulating member 71b, the upper surface 71c, and the heaters H2 have the same configurations as the main body 51a, the heat insulating member 51b, the upper surface 51c, and the heaters H1, respectively.

[0054] The heat unit transport device 72 includes, for example, a motor (not shown, same below), a power transmission mechanism 72a, a connecting member 72b, a lifting member 72c, a plurality of rollers 72d, and a pair of rail members R3, R4. The power transmission mechanism 72a is disposed in the sixth area A6 and the seventh area A7 (parts on the sixth area A6 side) so as to extend along the Y-axis direction. The rail members R3, R4 are disposed in the sixth area A6 and the seventh area A7 so as to extend along the Y-axis direction. The rail members R3, R4 are supported by the housing 2.

[0055] The rollers 72d are placed on the rail members R3, R4, so that the table 70 and the preheating unit 71 are supported on the rail members R3, R4 so as to be movable back and forth in the Y-axis direction. The connecting member 72b moves back and forth in the Y-axis direction, so that the table 70 and the preheating unit 71 are transported back and forth between the sixth area A6 and the seventh area A7. As described below, the table 70 and the preheating unit 71 are disposed in the sixth area A6 during the pressurizing process, cooling process, and removal process of the second work W2, and are disposed in the seventh area A7 during the storage process and preheating process of the second work W2.

[0056] In the following description, FIGS. 1 to 4 will be referred to as appropriate. The pressurizing device 8 applies pressure to the workpiece W accommodated in the chamber unit 20. The pressurizing device 8 includes a lower base member 80, a heat unit 81, and a lifting device 82. The pressurizing device 8 is disposed in an eighth area A8.

[0057] The lower base member 80 supports the thermal unit 81. The lower base member 80 is made of, for example, a metal having high rigidity (for example, stainless steel). The shape of the lower base member 80 is, for example, a rectangular shape along the XY axis direction when viewed from above, and a rectangular parallelepiped shape.

[0058] The heat unit 81 is disposed above the lower base member 80 and attached to the lower base member 80. The heat unit 81 includes a main body 81a, a heat insulating member 81b, a plurality of heaters H3, and a plurality of refrigerant flow paths C3. The main body 81a protects the heaters H3 and the refrigerant flow paths C3. The main body 81a is made of, for example, a metal having high rigidity (for example, carbon steel). The shape of the main body 81a is a rectangular shape along the XY axis direction when viewed from above, and is a rectangular parallelepiped shape. The heat insulating member 81b covers the periphery of the main body 81a and is disposed so as to divide the main body 81a into two parts, upper and lower. The heat insulating member 81b suppresses leakage of heat from the heater H3 to the surroundings and condensation on the main body 81a. The heater H3 heats the workpiece W when the workpiece W is pressurized. The heater H3 is disposed in the upper half of the main body 81a. The refrigerant flow path C3 is a flow path through which a refrigerant flows to cool the lower half of the main body 81a. The refrigerant is cooled by a cooling device and circulated between the refrigerant flow path C1 and the cooling device. The refrigerant flow path C3 is disposed within the lower half of the main body 81a. The upper surface 81c of the heat unit 81 is flat and parallel to the horizontal direction. The heat unit 81 is disposed above the lower base member 80 and attached to the lower base member 80. The heat unit 81 is an example of a pressing unit in the present invention.

[0059] The lifting device 82 lifts and lowers the lower base member 80 and the heat unit 81. The lifting device 82 is, for example, a known hydraulic cylinder.

[0060] The transfer device 9 transfers the workpiece W and the chamber unit 20. The transfer device 9 includes a workpiece transfer device 90, a platform transfer device 93, and a chamber transfer device 96.

[0061] FIG. 7 is a schematic cross-sectional view of the system 1 taken along line DD in FIG. In the following description, FIGS. 1 to 6 will also be referred to as appropriate.

[0062] The work transport device 90 transports the work W located in the first area A1 into the second area A2 and the fifth area A5, and transports the work W after the pressure treatment transported to the second area A2 and the fifth area A5 to the ninth area A9. The work transport device 90 includes a work carry-in device 91, a work carry-out device 92, a drive mechanism (not shown; the same applies below), and a pair of rail members R5 and R6.

[0063] The workpiece carrying-in device 91 carries in the workpiece W waiting in the first area A1 to the second area A2 and the fifth area A5. The workpiece carrying-in device 91 includes a support member 91a, a lifting device 91b, and a holding member 91c. The support member 91a supports the lifting device 91b. The support member 91a is supported by rail members R5 and R6 so as to be reciprocatingly movable in the X-axis direction. The lifting device 91b raises and lowers the holding member 91c. The holding member 91c holds the workpiece W (e.g., by suction). The holding member 91c is attached to the lower end of the lifting device 91b.

[0064] The workpiece unloading device 92 unloads the pressurized workpiece W transported to the second area A2 and the fifth area A5 to the ninth area A9. The workpiece unloading device 92 includes a support member 92a, a lifting device 92b, and a holding member 92c. The configurations of the support member 92a, the lifting device 92b, and the holding member 92c are common to the configurations of the support member 91a, the lifting device 91b, and the holding member 91c, respectively, and therefore detailed descriptions thereof will be omitted.

[0065] The drive mechanism generates power for individually transporting the work carry-in device 91 and the work carry-out device 92 back and forth in the X-axis direction, and transmits the power to the work carry-in device 91 and the work carry-out device 92. The drive mechanism includes, for example, a known motor and ball screw.

[0066] The rail members R5 and R6 are arranged in the upper spaces of the first area A1, the second area A2, the fifth area A5, and the ninth area A9 along the X-axis direction. The rail members R5 and R6 are supported by the housing 2. The work carry-in device 91 and the work carry-out device 92 are supported by the rail members R5 and R6 so as to be reciprocatable in the X-axis direction. The work carry-in device 91 is arranged on the -X-axis direction side of the work carry-out device 92.

[0067] The conveying device 93 conveys the first work W1 back and forth between the second area A2 and the fourth area A4, and conveys the second work W2 back and forth between the fifth area A5 and the seventh area A7. The conveying device 93 includes a first conveying device 94 and a second conveying device 95.

[0068] The first transport device 94 transports the first workpiece W1 back and forth between the second area A2 and the fourth area A4. The first transport device 94 includes a transport table 94a, a drive mechanism (not shown, same below), and a pair of rail members R7, R8.

[0069] The transport table 94a transports the first workpiece W1 together with the mounting table 21A described later. The transport table 94a has a rectangular frame shape and a plate shape when viewed from above. The transport table 94a has an octagonal central hole 94b having four sides along the XY axis direction when viewed from above. When viewed from above, the shape of the central hole 94b is similar to that of the main body 50a, and the central hole 94b is larger than the table 50 to which the roller 52d is attached (see FIG. 11). The end of the lower surface of the transport table 94a on the X axis direction side is configured (for example, uneven shape) to slidably engage with the rail members R7 and R8. The transport table 94a is slidable in the Y axis direction relative to the rail members R7 and R8.

[0070] In the present invention, the shape of the transport table 94a need only be capable of transporting the first work W1 and capable of carrying out the storage process, pre-heating process, cooling process, and removal process described below, and is not limited to the present embodiment.

[0071] The drive mechanism generates power for reciprocating the transport platform 94a in the Y-axis direction and transmits the power to the transport platform 94a. The drive mechanism includes, for example, a known motor and ball screw.

[0072] The rail members R7 and R8 are arranged in the second area A2, the third area A3, and the fourth area A4 along the Y-axis direction. In the vertical direction, the rail members R7 and R8 are arranged above the rail members R1 and R2. The rail members R7 and R8 are supported by the housing 2. The transport table 94a is placed on the rail members R7 and R8 so as to be able to move back and forth in the Y-axis direction. That is, the transport table 94a is transported back and forth between the second area A2 and the fourth area A4. When viewed from above, the transport path of the transport table 94a (the mounting table 21A, the first workpiece W1) overlaps with the transport path of the pre-heating unit 51. That is, the transport path of the pre-heating unit 51 is arranged below the transport path of the transport table 94a (the mounting table 21A, the first workpiece W1).

[0073] The second transport device 95 reciprocates the second workpiece W2 between the fifth area A5 and the seventh area A7. The second transport device 95 includes a transport table 95a, a drive mechanism (not shown, same below), and a pair of rail members R9 and R10.

[0074] The transport table 95a transports the second workpiece W2 together with the mounting table 21B described later. The configuration of the transport table 95a is the same as that of the transport table 94a, so a detailed description thereof will be omitted. The transport table 95a has a central hole 95b having the same shape as the central hole 94b. When viewed from above, the shape of the central hole 95b is similar to that of the main body 70a, and the central hole 95b is larger than the table 70 to which the roller 72d is attached.

[0075] The drive mechanism generates power for reciprocating the transport platform 95a in the Y-axis direction and transmits the power to the transport platform 95a. The drive mechanism includes, for example, a known motor and ball screw.

[0076] The rail members R9 and R10 are arranged in the fifth area A5, the sixth area A6, and the seventh area A7 along the Y-axis direction. In the vertical direction, the rail members R9 and R10 are arranged above the rail members R3 and R4. The rail members R9 and R10 are supported by the housing 2. The transport table 95a is placed on the rail members R9 and R10 so as to be able to move back and forth in the Y-axis direction. That is, the transport table 95a is transported back and forth between the fifth area A5 and the seventh area A7. When viewed from above, the transport path of the transport table 95a (the mounting table 21B, the second work W2) overlaps with the transport path of the pre-heating unit 71. That is, the transport path of the pre-heating unit 71 is arranged below the transport path of the transport table 95a (the mounting table 21B, the second work W2).

[0077] In the following description, FIGS. 3 to 5 will be referred to as appropriate. The chamber transfer device 96 simultaneously transfers two chamber units 20 back and forth between the fourth area A4 or the seventh area A7 and the eighth area A8. The chamber transfer device 96 includes two connecting members 96a, 96b, a plurality of fixing members 96c, a drive mechanism (not shown, same below), a base member 96d, and a pair of rail members R11, R12.

[0078] The connecting members 96a and 96b are, for example, prismatic. The fixing member 96c is, for example, an L-shaped fixture. The connecting members 96a and 96b are fixed to the upper surfaces of the base members 23 (chamber units 20) described later by a plurality of fixing members 96c so that the two upper units 22 (chamber units 20) described later are aligned in the X-axis direction. The lower surfaces of the connecting members 96a and 96b are configured (for example, uneven) to slidably engage with the rail members R11 and R12. The connecting members 96a and 96b are slidable in the X-axis direction relative to the rail members R11 and R12. The connecting members 96a and 96b are supported by the base member 96d, for example, via a framework (not shown).

[0079] The drive mechanism generates power for transporting the two chamber units 20 back and forth in the X-axis direction, and transmits the power to the two chamber units 20. The drive mechanism includes, for example, a motor capable of generating power capable of simultaneously transporting the two chamber units 20, which are heavy objects, and a power transmission mechanism (for example, gears, sprockets, chains, etc.) capable of transmitting the power of the motor.

[0080] The base member 96d supports the connecting members 96a and 96b. The shape of the base member 96d is, for example, a rectangular shape along the XY axis direction when viewed from above, and a rectangular parallelepiped shape. The base member 96d is disposed above the heat unit 81 in the eighth area A8, that is, in the upper space in the eighth area A8. The base member 96d is, for example, attached to the housing 2. As described later, the base member 96d is subjected to a predetermined pressure force during the pressurization process, and therefore the base member 96d is designed to have a strength capable of withstanding the pressure force. During the pressurization process, the base member 96d constitutes the upper pressurization unit 8U together with a part of the upper unit 22. The center of the lower surface of the base member 96d protrudes downward in a rectangular parallelepiped shape and constitutes a receiving portion 96e. The receiving portion 96e is abutted against the chamber unit 20 during the pressurization process, and receives a predetermined pressure force through the chamber unit 20. A lower surface 96f of the receiving portion 96e is flat and parallel to the horizontal direction.

[0081] The atmosphere adjustment device 10 adjusts the atmosphere of the accommodation chamber 20R, which will be described later. The atmosphere adjustment device 10 includes a vacuum pump P, a reduced pressure system pipe Lp, a gas system pipe Lg, two valves V1 and V2, and two connection pipes Lc1 and Lc2. The atmosphere adjustment device 10 is configured to be able to adjust the atmosphere of the accommodation chamber 20R to a reduced pressure atmosphere (vacuum atmosphere) or an inert gas atmosphere.

[0082] The vacuum pump P adjusts the atmosphere in the accommodation chamber 20R to a reduced pressure atmosphere (vacuum atmosphere). The vacuum pump P is a known vacuum pump. The vacuum pump P is connected to a through hole 27c (described later) via a reduced pressure system pipe Lp and two valves V1 and V2.

[0083] The decompression system pipe Lp is a pipe connected to the vacuum pump P. The gas system pipe Lg is a pipe connected to a supply pipe (not shown, same below) of an inert gas (e.g., nitrogen gas). The decompression system pipe Lp and the gas system pipe Lg are branched into two branches, and each branch is connected to a corresponding connection pipe Lc1, Lc2 via a corresponding valve V1, V2. The valves V1, V2 are known solenoid valves that switch the connection of the decompression system pipe Lp and the gas system pipe Lg to the connection pipes Lc1, Lc2. The connection pipe Lc1 is a pipe connected to the valve V1 and the corresponding through hole 27cA, and the connection pipe Lc2 is a pipe connected to the valve V2 and the corresponding through hole 27cB.

[0084] Chamber unit configuration FIG. 8 is a schematic cross-sectional view of the chamber unit 20. As shown in FIG. In the following description, FIG. 4 will be referred to as appropriate.

[0085] The chamber unit 20 accommodates the workpiece W and is transported back and forth between the fourth area A4 or the seventh area A7 and the eighth area A8. The chamber unit 20 includes a mounting table 21, an upper unit 22, and an accommodation chamber 20R.

[0086] The mounting table 21 transports the workpiece W and defines the accommodation chamber 20R. As described later, the mounting table 21 functions as a transport plate for the workpiece W and also functions as a lower pressurizing unit 8D when the workpiece W is pressurized. The mounting table 21 is made of, for example, a metal (for example, a copper alloy) having high thermal conductivity. The shape of the mounting table 21 is a rectangular shape along the XY axis direction when viewed from above, and is a plate shape. The mounting table 21 has a strength sufficient to withstand the force applied in the operation of the present system 1 described later, and has a thickness such that the heat capacity of the mounting table 21 during heating / cooling of the workpiece W is relatively small. The shapes of the upper surface 21a and the lower surface 21b of the mounting table 21 are flat and parallel to the horizontal direction. The mounting table 21 is configured to be detachable from the upper unit 22 (side member 27).

[0087] The upper unit 22 covers the workpiece W from above. The upper unit 22 includes a base member 23, an upper die 24, a frame member 25, a pressure pad 26, a side member 27, a first spring member 28, a second spring member 29, and two seal members 30 and 31. As described below, the base member 23, the upper die 24, and the pressure pad 26 function as an upper pressure unit 8U when the workpiece W is pressed.

[0088] The base member 23 supports the upper mold 24, the first spring member 28, and the second spring member 29. The base member 23 is made of, for example, a metal having high rigidity (for example, stainless steel). The shape of the base member 23 is a rectangular shape along the XY axis direction when viewed from above, and a rectangular parallelepiped that is flat in the up-down direction. The lower surface 23a and the upper surface 24b of the base member 23 are flat surfaces parallel to the horizontal direction.

[0089] The upper die 24 presses the workpiece W from above via a pressure pad 26. The upper die 24 is made of, for example, a metal having high rigidity (for example, stainless steel). The upper die 24 is disposed below the base member 23 and attached to the lower surface 23a of the base member 23. The shape of the upper die 24 is a rectangular parallelepiped that is smaller than the base member 23 and aligned along the XY axis directions when viewed from below. The lower surface 24a of the upper die 24 is flat and parallel to the horizontal direction.

[0090] In the present invention, the upper mold 24 may be molded integrally with the base member 23 .

[0091] The frame member 25 holds the pressure pad 26. The frame member 25 is made of, for example, a metal (for example, stainless steel) having high rigidity. When viewed from below, the frame member 25 has a rectangular frame shape along the XY axis direction. That is, when viewed from below, a rectangular internal space is formed in the center of the frame member 25. In the horizontal direction, the frame member 25 is disposed so as to surround the upper mold 24. That is, the upper mold 24 is disposed in the internal space. In the vertical direction, the lower end portion 25a of the frame member 25 is located below the lower surface 24a of the upper mold 24. The frame member 25 is supported by the base member 23 via the first spring member 28 so as to be movable relative to the upper mold 24 in the vertical direction. The frame member 25 has a groove portion 25c formed so as to go around the outer circumferential surface 25b of the frame member 25.

[0092] When the workpiece W is pressed, the pressure pad 26 deforms to follow the shape of the surface of the workpiece W, uniformly pressurizing the workpiece W and defining the accommodation chamber 20R. The pressure pad 26 is held by the lower end portion 25a of the frame member 25 and disposed below the upper die 24. The pressure pad 26 includes a flexible layer 26a and a heat insulating layer 26b.

[0093] When the workpiece W is pressurized, the flexible layer 26a transmits the pressure from the upper die 24 evenly to the workpiece W. The flexible layer 26a is made of, for example, a known elastic material having high fluidity and low resilience. The flexible layer 26a is filled, for example, between two membrane members (not shown; the same applies below) arranged above and below the flexible layer 26a. The outer edge of the membrane members is held by the lower end 25a of the frame member 25 over the entire circumference, so that the flexible layer 26a is surrounded by the lower end 25a of the frame member 25 in the horizontal direction.

[0094] When the workpiece W is pressurized, the insulating layer 26b uniformly transmits the pressure from the upper die 24 to the workpiece W and suppresses the transmission of heat from the heat unit 81 to the flexible layer 26a. The insulating layer 26b is made of, for example, a known fiber material having high flexibility and low thermal conductivity. The insulating layer 26b is disposed below the flexible layer 26a and adjacent to the flexible layer 26a. The insulating layer 26b is filled, for example, between two membrane members (not shown; the same applies below) disposed above and below the insulating layer 26b. The outer edge of the membrane member is held by the lower end 25a of the frame member 25 over the entire circumference, so that the insulating layer 26b is surrounded by the lower end 25a of the frame member 25 in the horizontal direction.

[0095] In the present invention, when the temperature of the main heating described below is lower than the heat-resistant temperature of the soft layer 26a, the pressure pad 26 does not need to include the heat insulating layer 26b.

[0096] The side member 27 defines the storage chamber 20R. The side member 27 is made of, for example, a metal (for example, stainless steel) having high rigidity. When viewed from below, the side member 27 has a rectangular frame shape along the XY axis direction. That is, when viewed from below, a rectangular internal space is formed in the center of the side member 27. In the horizontal direction, the side member 27 is disposed so as to surround the frame member 25. That is, the frame member 25 (upper mold 24, pressure pad 26) is disposed in the internal space. The side member 27 is supported by the base member 23 via the second spring member 29 so as to be movable in the up-down direction relative to the upper mold 24 and the frame member 25. The side member 27 includes a groove portion 27b formed in a lower surface 27a of the side member 27 and a through hole 27c opening on the inner surface and outer surface of the side member 27.

[0097] The first spring member 28 supports the frame member 25 so as to be movable in the vertical direction relative to the upper mold 24. The first spring member 28 is disposed between the base member 23 and the frame member 25, and is attached to the lower surface 23a of the base member 23 and the upper surface 25d of the frame member 25.

[0098] The second spring member 29 supports the side member 27 so as to be movable in the up and down direction relative to the upper mold 24 and the frame member 25. The second spring member 29 is disposed between the base member 23 and the side member 27, and is attached to the lower surface 23a of the base member 23 and the upper surface 27d of the side member 27.

[0099] The seal members 30 and 31 hermetically seal between the frame member 25 and the side member 27, and between the mounting table 21 and the side member 27. The seal members 30 and 31 are, for example, known O-rings. The seal member 30 is disposed in the groove portion 25c and abuts against the frame member 25 and the side member 27. The seal member 31 is disposed in the groove portion 27b and abuts against the mounting table 21 and the side member 27.

[0100] The accommodation chamber 20R is a space formed in the chamber unit 20 in which the workpiece W is accommodated. The accommodation chamber 20R is a sealed space partitioned by the mounting table 21, the frame member 25, the pressure pad 26, the side member 27, and the seal members 30 and 31. The accommodation chamber 20R communicates with the connection pipe Lc1 or the connection pipe Lc2 via the through hole 27c. The mounting table 21 functions as a floor member that partitions the accommodation chamber 20R, the pressure pad 26 functions as a ceiling member that partitions the accommodation chamber 20R, and the side member 27 functions as a peripheral wall member that partitions the accommodation chamber 20R. The pressure pad 26 is an example of a ceiling member in the present invention, and the side member 27 is an example of a peripheral wall member in the present invention.

[0101] Pressurization system operation Next, the following describes the operation of the system 1. In the following description, FIGS.

[0102] Here, as a premise, upper unit 22A constituting chamber unit 20A is located in the fourth area A4, and mounting table 21A constituting chamber unit 20A is placed on transport table 94a located in the second area A2. Upper unit 22B constituting chamber unit 20B is located in the eighth area A8, and mounting table 21B constituting chamber unit 20B is placed on transport table 95a located in the fifth area A5.

[0103] FIG. 9 is a schematic cross-sectional view for explaining the operation of the present system 1. As shown in FIG. This figure shows a cross section of the present system 1 taken along line DD in FIG.

[0104] First, the control device 3 controls the operation of the workpiece loading device 91 to load the workpiece W waiting in the first area A1 onto the mounting table 21A located in the second area A2 as the first workpiece W1 (first workpiece loading process). Specifically, the workpiece loading device 91 moves to the first area A1, and the lifting device 91b lowers the holding member 91c toward the workpiece W. Next, the holding member 91c holds the workpiece W, and the lifting device 91b raises the holding member 91c. Next, the workpiece loading device 91 moves to the second area A2, and the lifting device 91b lowers the holding member 91c toward the mounting table 21A. Next, the holding member 91c releases the holding of the workpiece W. At this time, the corner of the workpiece W is placed on the mounting table 21A, so that the workpiece W (first workpiece W1) is placed on the mounting table 21A. Next, the lifting device 91b raises the holding member 91c.

[0105] FIG. 10 is a schematic cross-sectional view for explaining the next operation of the system 1. As shown in FIG. This figure shows a cross section of the present system 1 taken along line BB in FIG.

[0106] Next, the control device 3 controls the operation of the first-unit transport device 94 to transport the transport table 94a on which the mounting table 21A is placed to the fourth area A4. That is, the first workpiece W1 is transported to the fourth area A4. The control device 3 also controls the operation of the heat unit transport device 52 to transport the table 50 and the preheating unit 51 to the fourth area A4. At this time, the table 50 and the preheating unit 51 are disposed above the cooling unit 41, and the mounting table 21A, the first workpiece W1, and the transport table 94a are disposed above the preheating unit 51. That is, the table 50 and the preheating unit 51 are transported between the cooling unit 41 and the mounting table 21A. Also, the upper unit 22A is disposed above the mounting table 21A and the first workpiece W1.

[0107] FIG. 11 is a schematic plan view of the fourth area A4 in FIG. In the same figure, for ease of explanation, the transport table 94a is shown in color, the mounting table 21A is shown in translucent form, the outer edges of the table 40 and the cooling unit 41 are shown in dashed lines, and the rail members R1 and R2 are shown in dashed lines.

[0108] 11, when viewed from above, the placement platform 21A, table 40, cooling unit 41, main body 50a, preheating unit 51, and transport platform 94a are arranged so that the centers of the placement platform 21A, table 40, cooling unit 41, main body 50a, mounting portion 50b, preheating unit 51, and roller 52d are arranged in the central hole 94b. When viewed from above, the table 40 and cooling unit 41 are arranged between rail members R1 and R2.

[0109] When viewed from above, the table 40, the cooling unit 41, the main body 50a, and the central hole 94b have similar shapes. The central hole 94b is larger than the main body 50a, the cooling unit 41, and the table 40. The main body 50a is larger than the cooling unit 41 and the table 40.

[0110] FIG. 12 is a schematic cross-sectional view for explaining the next operation of the system 1. As shown in FIG. This figure shows a cross section of the present system 1 taken along line AA in FIG.

[0111] Next, the control device 3 controls the operation of the lifting device 42 to raise the table 40, the cooling unit 41, the table 50, the preheating unit 51, the mounting table 21A, and the first workpiece W1. Specifically, the lifting device 42 raises the table 40 and the cooling unit 41 until the cooling unit 41 (upper surface 41c) abuts against the table 50 (lower surface 50c). At this time, the cooling unit 41 is passed between the rail members R1 and R2. Next, the lifting device 42 raises the table 50 and the preheating unit 51 together with the table 40 and the cooling unit 41 until the preheating unit 51 (upper surface 51c) abuts against the mounting table 21A (lower surface 21bA). At this time, the roller 52d leaves the rail members R1, R2, the lifting member 52c (see FIG. 5) rises with the rise of the table 50, the table 40 passes between the rail members R1, R2, and the preheating unit 51 passes through the central hole 94b. Next, the lifting device 42 raises the mounting table 21A together with the table 40, the cooling unit 41, and the preheating unit 51 until the mounting table 21A comes into close contact with the upper unit 22A (seal member 31A). At this time, an accommodation chamber 20RA is formed between the mounting table 21A and the upper unit 22A, and the first workpiece W1 is accommodated in the accommodation chamber 20RA.

[0112] During the ascent, table 50 is placed on cooling unit 41. Therefore, the position of table 50 relative to cooling unit 41 may vary due to slight tilt or vibration. Therefore, in the present invention, upper surface 41c of cooling unit 41 and lower surface 50c of table 50 may have mating concave and convex portions formed thereon (preferably, a concave portion is formed on upper surface 41c for the cooling process described later).

[0113] FIG. 13 is a schematic cross-sectional view for explaining the next operation of the system 1. As shown in FIG. This figure shows a cross section of the present system 1 taken along line AA in FIG.

[0114] Next, the atmosphere adjusting device 10 operates the vacuum pump P and the valve V1 to replace the atmosphere in the accommodation chamber 20RA with an inert gas, and then makes the atmosphere in the accommodation chamber 20RA a reduced pressure atmosphere. At this time, the mounting table 21A is in close contact (attached) with the side member 27A due to the vacuum pressure (pressure difference between the accommodation chamber 20RA and the external space of the chamber unit 20A), and the second spring member 29A contracts, causing the mounting table 21A and the side member 27A to rise. That is, in the vertical direction, the frame member 25A and the pressure pad 26A approach the mounting table 21A (first workpiece W1). In other words, the frame member 25A and the pressure pad 26A descend relative to the mounting table 21A. Then, finally, the pressure pad 26A comes into contact with the first workpiece W1, and the first workpiece W1 is pre-pressurized by a pressure force according to the vacuum pressure. Also, the frame member 25A abuts against the mounting table 21A. By the preliminary pressurization, the pressurizing pad 26A is deformed according to the shape of the surface of the first workpiece W1, and the first workpiece W1 is held by the mounting table 21A and the pressurizing pad 26A. Here, the pressurizing force applied to the first workpiece W1 in the preliminary pressurization is sufficiently smaller than the pressurizing force applied to the first workpiece W1 in the pressurizing process. In this manner, in the fourth area A4, the mounting table 21A is attached to the upper unit 22A (side member 27A), whereby the chamber unit 20A is assembled and the first workpiece W1 is accommodated in the chamber unit 20A (accommodating process). When the chamber unit 20A is assembled, the mounting table 21A is disposed below the first workpiece W1, the pressurizing pad 26A is disposed above the first workpiece W1, and the side member 27A is disposed so as to surround the entire circumference of the first workpiece W1 in the horizontal direction. Next, the lifting device 42 lifts the table 40, the cooling unit 41, the table 50, and the preheating unit 51 so that the preheating unit 51 comes into contact with the mounting table 21A.

[0115] Next, the control device 3 controls the operation of the preheating unit 51 to perform preheating processing on the first workpiece W1. Specifically, the lifting device 42 maintains the state in which the preheating unit 51 is in contact with the mounting table 21A for a predetermined time. Here, the preheating unit 51 is heated in advance to a predetermined preheating temperature. Therefore, the heat from the preheating unit 51 is transferred to the first workpiece W1 via the mounting table 21A.

[0116] The "preheating process" is a process in which the workpiece W is heated to a predetermined preheating temperature before the pressure treatment. The preheating process is a pretreatment performed before the pressure treatment in order to shorten the heating time of the workpiece W in the pressure treatment. The preheating temperature is a temperature (e.g., about 200°C) lower than the main heating temperature (e.g., about 300°C) described later.

[0117] FIG. 14 is a schematic cross-sectional view for explaining the next operation of the present system 1. As shown in FIG. This figure shows a cross section of the present system 1 taken along line AA in FIG.

[0118] Next, after a predetermined time has elapsed, the control device 3 controls the operation of the lifting device 42 to lower the table 40, the cooling unit 41, the table 50, and the pre-heating unit 51. At this time, the lifting member 52c (see FIG. 5) lowers as the table 50 lowers, and the rollers 52d come into contact with the rail members R1 and R2, so that the table 50 is placed on the rail members R1 and R2 via the rollers 52d.

[0119] Next, the control device 3 controls the operation of the chamber transfer device 96 to transfer the chamber unit 20A from the fourth area A4 to the eighth area A8 and simultaneously transfer the upper unit 22B from the eighth area A8 to the seventh area A7. As a result, the chamber unit 20A is located in the eighth area A8, and the upper unit 22B is located in the seventh area A7.

[0120] Next, the control device 3 controls the operation of the pressurizing device 8 to perform a pressurizing process on the first workpiece W1.

[0121] Specifically, the lifting device 82 raises the lower base member 80 and the heat unit 81 until the heat unit 81 (upper surface 81c) abuts against the chamber unit 20A (lower surface 21bA of the mounting table 21A). Next, the lifting device 82 raises the lower base member 80 and the heat unit 81 until a predetermined pressure force (hereinafter referred to as "main pressure force") is applied to the first workpiece W1. At this time, the mounting table 21A rises together with the frame member 25A and the side member 27A, and the upper mold 24A descends relative to the frame member 25A and the side member 27A. Therefore, the upper mold 24A presses the pressure pad 26A downward, and the pressure pad 26A deforms so as to follow the shape of the surface of the first workpiece W1, uniformly pressing the first workpiece W1. As a result, the first workpiece W1 is pressed from below against the placement table 21A, and from above against the pressure pad 26A (upper die 24A).

[0122] When the first workpiece W1 is pressurized, the chamber unit 20A is lifted slightly from the rail members R11 and R12 by the lifting device 82 and comes into contact with the receiving portion 96e of the base member 96d. That is, the base member 96d restricts the upward movement of the chamber unit 20A, and the chamber unit 20A is sandwiched between the heat unit 81 and the base member 96d. At this time, the base member 96d and the lower base member 80 function as a so-called bolster that receives the main pressurizing force by the lifting device 82. As a result, the main pressurizing force is applied to the first workpiece W1, and the main pressurizing force applied to the first workpiece W1 is stable. In this way, by receiving the main pressurizing force in the pressurizing process not only by the base member 23A alone but also by the two base members 23A and 96d, the thickness of the base member 23A can be designed to be thinner than when the main pressurizing force is received by the base member 23A alone. Therefore, the weight of the chamber unit 20A (upper unit 22A) can be reduced, and the power required for transporting them can be reduced. Furthermore, since the main pressure force is not applied to the rail members R11 and R12, no load based on the main pressure force is applied to the rail members R11 and R12.

[0123] In this manner, in the pressurization process, the base member 23A, the upper mold 24A, and the pressurization pad 26A of the chamber unit 20A function together with the base member 96d as an upper pressurization unit 8U that pressurizes the first workpiece W1 from above. Also, in the chamber unit 20A, the mounting table 21A functions together with the lower base member 80 and the heat unit 81 as a lower pressurization unit 8D that pressurizes the first workpiece W1 from below.

[0124] FIG. 15 is a schematic cross-sectional view for explaining the next operation of the present system 1. As shown in FIG. This figure shows a cross section of the present system 1 taken along line AA in FIG.

[0125] Next, the lifting device 82 maintains the state in which the main pressure force is applied to the first workpiece W1 for a predetermined time. Here, the upper half of the heat unit 81 is heated in advance to a predetermined heating temperature (hereinafter referred to as the "main pressure temperature"; for example, about 300°C). Therefore, the heat from the heat unit 81 is transferred to the first workpiece W1 via the mounting table 21A. At this time, the heat from the heat unit 81 is also transferred to the pressure pad 26A via the frame member 25A and the first workpiece W1. As described above, since the heat insulating layer 26bA is arranged below the flexible layer 26aA, the heat from the heat unit 81 is unlikely to be transferred to the flexible layer 26aA by the heat insulating layer 26bA. In other words, the flexible layer 26aA is thermally protected by the heat insulating layer 26bA.

[0126] When the pressurization process is being performed on the first workpiece W1, the control device 3 controls the operation of the heat unit transport device 52 (see FIG. 5) to transport the table 50 and the preheating unit 51 to the third area A3.

[0127] In the present invention, the table 50 and the preheating unit 51 may be transported to the third area A3 at the same time as they are transported to the eighth area A8 of the chamber unit 20A.

[0128] When the pressurization process for the first workpiece W1 is being performed, the control device 3 controls the operation of the workpiece loading device 91 to load the workpiece W waiting in the first area A1 onto the mounting table 21B located in the fifth area A5 as the second workpiece W2 (second workpiece loading process). Next, the control device 3 controls the operation of the second-unit transport device 95 and the heat unit transport device 72 to transport the second workpiece W2, the mounting table 21B, the transport table 95a, the table 70, and the preheating unit 71 to the seventh area A7. Next, the control device 3 controls the operation of the lifting device 62 and the atmosphere adjustment device 10 to assemble the chamber unit 20B in the same manner as in the above-mentioned storage process for the first workpiece W1, and store the second workpiece W2 in the storage chamber 20RB (storage process). At this time, the chamber unit 20B is located in the seventh area A7.

[0129] FIG. 16 is a schematic cross-sectional view for explaining the next operation of the system 1. As shown in FIG. This figure shows a cross section of the present system 1 taken along line AA in FIG.

[0130] Next, after a predetermined time has elapsed, the control device 3 controls the operation of the lifting device 82 to lower the lower base member 80 and the heat unit 81. The control device 3 also controls the operation of the lifting device 62 to lower the table 60, the cooling unit 61, the table 70, and the pre-heating unit 71. At this time, the lifting member 72c (see FIG. 6) descends as the table 70 descends, and the rollers 72d come into contact with the rail members R3 and R4, so that the table 70 is placed on the rail members R3 and R4 via the rollers 72d.

[0131] Next, the control device 3 controls the operation of the chamber transfer device 96 to transfer the chamber unit 20A from the eighth area A8 to the fourth area A4, and simultaneously transfer the chamber unit 20B from the seventh area A7 to the eighth area A8. As a result, the chamber unit 20A is located in the fourth area A4, and the chamber unit 20B is located in the eighth area A8.

[0132] Next, the control device 3 controls the operation of the first cooling device 4 to perform a cooling process on the first workpiece W1, and controls the operation of the pressurizing device 8 to perform a pressurizing process on the second workpiece W2. Here, the pressurizing process for the second workpiece W2 is common to the pressurizing process for the first workpiece W1, and therefore a detailed description thereof will be omitted.

[0133] The "cooling process" is a process for cooling the workpiece W after the pressure treatment to a predetermined temperature (for example, about 100°C). The cooling process is a post-pressure treatment process that is performed after the heating process in order to cool the workpiece W after the pressure treatment.

[0134] Specifically, the lifting device 42 raises the table 40 and the cooling unit 41 until the cooling unit 41 (upper surface 41c) abuts against the chamber unit 20A (lower surface 21bA of the mounting table 21A). At this time, the table 40 and the cooling unit 41 pass between the rail members R1, R2, R7, and R8 and through the central hole 94b. Next, the lifting device 42 maintains the state in which the cooling unit 41 abuts against the mounting table 21A for a predetermined time. Here, the cooling unit 41 is cooled in advance to a predetermined primary cooling temperature (for example, about 20°C). Therefore, the first workpiece W1 is cooled to about a predetermined temperature (for example, about 100°C) by the cooling unit 41 via the mounting table 21A.

[0135] FIG. 17 is a schematic cross-sectional view for explaining the next operation of the system 1. As shown in FIG. This figure shows a cross section of the present system 1 taken along line AA in FIG.

[0136] In the pressurization process, the base member 23B, the upper mold 24B, and the pressurization pad 26B of the chamber unit 20B function as an upper pressurization unit 8U that pressurizes the second workpiece W2 from above together with the base member 96d. Also, the mounting table 21B of the chamber unit 20B functions as a lower pressurization unit 8D that pressurizes the second workpiece W2 from below together with the lower base member 80 and the heat unit 81.

[0137] Next, after a predetermined time has elapsed, the lifting device 42 lowers the table 40 to end the cooling process. Next, the control device 3 controls the operation of the atmosphere adjustment device 10 and the lifting device 42 to remove the first workpiece W1 from the chamber unit 20A. Specifically, the atmosphere adjustment device 10 operates the vacuum pump P and the valve V1 to purge the atmosphere in the accommodation chamber 20RA with an inert gas, and the atmosphere in the accommodation chamber 20RA becomes an inert gas atmosphere (atmospheric pressure). At this time, the vacuum pressure disappears, and the second spring member 29A expands, and the mounting table 21A and the side member 27A descend. That is, in the vertical direction, the frame member 25A and the pressure pad 26A move away from the mounting table 21A. In other words, the frame member 25A and the pressure pad 26A rise relative to the mounting table 21A. Then, the mounting table 21A becomes removable from the upper unit 22A. Next, the lifting device 42 lowers the table 40, the cooling unit 41, the mounting table 21A, and the first workpiece W1 to remove the mounting table 21A from the upper unit 22A and to remove the first workpiece W1 from the chamber unit 20A (removal process). In this manner, in the fourth area A4, by removing the mounting table 21A from the upper unit 22A, the assembly of the chamber unit 20A is released and the first workpiece W1 is removed from the chamber unit 20A (removal process). The mounting table 21A on which the first workpiece W1 after the pressurization process is placed is placed on the transport table 94a.

[0138] In the present invention, the accommodation chamber 20R may be purged with air.

[0139] FIG. 18 is a schematic cross-sectional view for explaining the next operation of the system 1. As shown in FIG. This figure shows a cross section of the present system 1 taken along line BB in FIG.

[0140] Next, the control device 3 controls the operation of the first conveyance device 94 to convey the conveyance table 94a on which the mounting table 21A is placed to the second area A2. That is, the first work W1 after the pressure treatment is conveyed to the second area A2.

[0141] In the following description, FIGS. 2, 3, 7, and 9 to 18 will also be referred to as appropriate. Next, the control device 3 controls the operation of the workpiece unloading device 92 to unload the first workpiece W1 transported to the first area A1 to the ninth area A9 (first workpiece unloading process). Specifically, the workpiece unloading device 92 moves to the first area A1, and the lifting device 92b lowers the holding member 92c toward the first workpiece W1. Next, the holding member 92c holds the first workpiece W1, and the lifting device 92b raises the holding member 92c.

[0142] Next, the workpiece discharge device 92 moves to the ninth area A9, and the lifting device 92b lowers the holding member 92c to the belt conveyor a91. Next, the holding member 92c releases the suction of the first workpiece W1. At this time, the first workpiece W1 is placed on the belt conveyor a91. Next, the lifting device 92b raises the holding member 92c.

[0143] Next, the control device 3 controls the operation of the workpiece loading device 91, the first-unit transport device 94, and the heat unit transport device 52 to transport the next first workpiece W1, the placement table 21A, the transport table 94a, the table 50, and the preheating unit 51 to the fourth area A4. Next, the control device 3 controls the operation of the lifting device 42 and the atmosphere adjustment device 10 to assemble the chamber unit 20A and accommodate the next first workpiece W1 in the accommodation chamber 20RA. Here, when the pressurization process of the second workpiece W2 has already been completed, the lower base member 80 and the heat unit 81 have descended, and the chamber unit 20B is located in the eighth area A8.

[0144] Next, the control device 3 controls the operation of the lifting device 42, the pressurizing device 8, and the chamber transport device 96 to perform the pressurizing process on the next first workpiece W1, and also controls the operation of the second cooling device 6, the second transport device 95, and the workpiece unloading device 92 to unload the second workpiece W2 after the pressurizing process to the ninth area A9 (cooling process, removal process, second workpiece unloading process). Next, the second workpiece W2 is loaded, and thereafter, the above-mentioned processes for the first workpiece W1 (cooling process, removal process, first workpiece unloading process, first workpiece loading process, accommodation process, preheating process, pressurizing process, ...) and the processes for the second workpiece W2 (accommodation process, preheating process, pressurizing process, cooling process, removal process, second workpiece unloading process, ...) are repeated.

[0145] FIG. 19 is a schematic plan view illustrating the operation of the workpiece transport device 90. For ease of explanation, the figure shows only the outlines of the belt conveyors a11 and a91, the mounting tables 21A and 21B, the workpiece carry-in device 91, the workpiece unloading device 92, the first workpiece W1, and the second workpiece W2, and indicates the rail members R5 and R6 with dashed lines. The arrows in the figure indicate the movements of the mounting tables 21A and 21B, the workpiece carry-in device 91, and the workpiece unloading device 92.

[0146] When the first workpiece W1 is loaded onto the mounting table 21A, the workpiece loading device 91 moves from the first area A1 to the second area A2. At this time, the workpiece unloading device 92 is located in the ninth area A9. Next, the workpiece loading device 91 moves from the second area A2 to the first area A1.

[0147] Next, when the second workpiece W2 is carried in to the mounting table 21B, the workpiece carrying-in device 91 moves from the first area A1 to the fifth area A5. Next, the workpiece carrying-in device 91 moves from the fifth area A5 to the first area A1.

[0148] Next, when the first workpiece W1 after the pressure treatment is transported to the second area A2, the workpiece unloading device 92 moves from the ninth area A9 to the second area A2. At this time, the workpiece loading device 91 is located in the first area A1. Next, the workpiece unloading device 92 moves from the second area A2 to the ninth area A9. At this time, the workpiece loading device 91 moves from the first area A1 to the second area A2 and returns to the first area A1.

[0149] Next, when the second workpiece W2 after the pressure treatment is transported to the fifth area A5, the workpiece unloading device 92 moves from the ninth area A9 to the fifth area A5. At this time, the workpiece loading device 91 is located in the first area A1. Next, the workpiece unloading device 92 moves from the fifth area A5 to the ninth area A9. At this time, the workpiece loading device 91 moves from the first area A1 to the fifth area A5 and returns to the first area A1.

[0150] In this way, when loading and unloading the workpiece W, the workpiece loading device 91 moves between the first area A1 and the second area A2 and between the first area and the fifth area A5, and the workpiece unloading device 92 moves between the ninth area A9 and the second area A2 and between the ninth area A9 and the fifth area A5. The workpiece loading device 91 and the workpiece unloading device 92 move back and forth in the X-axis direction while being guided by a pair of rail members R5, R6, interlocking so as not to interfere with each other.

[0151] In the above-described operation, the present system 1 alternately performs the carrying-in process, accommodation process, preheating process, pressurization process, cooling process, removal process, and carrying-out process of the workpiece W in two systems, the first system for the first workpiece W1 and the second system for the second workpiece W2, and performs related processes for one workpiece W in parallel with the pressurization process for the other workpiece W. As a result, in the present system 1, the time required between the pressurization process for a certain workpiece W (e.g., the first workpiece W1) and the pressurization process for the next workpiece W (e.g., the second workpiece W2) is significantly shorter than the same time in a conventional pressurization device that performs the pressurization process for the workpieces in one system. In addition, in the present system 1, pre-processing and post-processing (related processes) for the pressurization process can also be performed in parallel with the pressurization process.

[0152] In addition, in the present system 1, a preliminary heating process is performed as a pre-processing of the pressurizing process. Therefore, the pressurizing process in the present system 1 can be performed in a shorter time than the pressurizing process in a conventional pressurizing device in which the preliminary heating process cannot be performed. In addition, in the present system 1, the pressurizing process and the cooling process are separated. Therefore, the pressurizing process in the present system 1 can be performed in a shorter time than the pressurizing process in a conventional pressurizing device in which the pressurizing process and the cooling process cannot be separated. In this way, in the present system 1, the storage process, the preliminary heating process, the cooling process, and the removal process can be performed alternately in the fourth area A4 and the seventh area A7 as related processes. Therefore, the total time required from the loading to the unloading of the workpiece W in the present system 1 is shorter than the total time required in a conventional pressurizing device. In other words, in the present system 1, by performing a plurality of related processes alternately in parallel with the pressurizing process, the time between the pressurizing processes is shorter than the same time in a conventional pressurizing device in which the related processes cannot be performed.

[0153] Furthermore, in the present system 1, the orientation of the workpiece W is the same in any processing. That is, the orientation of the workpiece W is the same in processing before and after the processing by the present system 1.

[0154] Furthermore, in the present system 1, the atmosphere in the accommodation chamber 20R can be adjusted by the atmosphere adjustment device 10 at all times, including during transport, while the workpiece W is accommodated in the chamber unit 20. Therefore, the reduced pressure atmosphere in the accommodation chamber 20R is always maintained. In this configuration, the workpiece W is not exposed to the outside air during the preliminary heating process, the pressurizing process, and the cooling process, and is not oxidized.

[0155] Furthermore, in the present system 1, when the upper unit 22 is located in the fourth area A4, the transport platform 94a is moved to the second area A2 and the preheating unit 51 is moved to the third area A3, thereby securing a space in the fourth area A4 where maintenance of the upper unit 22 (particularly replacement of components) can be performed. The same space can be secured in the seventh area A7 as well. Therefore, no space for maintenance is required in the eighth area A8. Therefore, it is possible to reduce the height of the eighth area A8 (housing 2).

[0156] Furthermore, in the present system 1, the rail members R1 to R4, R7 to R10 are arranged parallel to each other along the Y-axis direction. The rail members R1, R2 are arranged above the rail members R7, R8, and the rail members R3, R4 are arranged above the rail members R9, R10. That is, when viewed from above, the transport direction of the transport tables 94a, 95a (mounting table 21) is the same as the transport direction of the preheating units 51, 71, and the transport path of the preheating units 51, 71 is arranged below the transport path of the transport tables 94a, 95a (mounting table 21). Also, when viewed from above, the rail members R11, R12 are arranged along the X-axis direction and are perpendicular to the rail members R1 to R4, R7 to R10. That is, the transport direction of the preheating units 51, 71 is perpendicular to the transport direction of the chamber unit 20. In these orthogonal areas (the fourth area A4 and the seventh area A7), a plurality of related processes are executed. Furthermore, in the X-axis direction, the transport paths of the preheating units 51 and 71 are arranged parallel to each other and facing each other. In this configuration, each area is arranged compactly within the housing 2, so that the floor area of ​​the housing 2 can be reduced.

[0157] In the present invention, a sticking prevention sheet (not shown, same below) may be placed on the workpiece W at any timing from when the workpiece W is carried into the workpiece carrying-in device 91 to when the workpiece W is accommodated in the chamber unit 20. The sticking prevention sheet is a sheet that prevents the workpiece W from sticking to the pressure pad 26 after the heat treatment. The sticking prevention sheet is, for example, a sheet made of a synthetic resin (e.g., PTFE (polytetrafluoroethylene)) that has heat resistance to the main heating temperature described later.

[0158] Summary According to the embodiment described above, the system 1 includes the eighth area A8, the fourth area A4, the seventh area A7, two chamber units 20, and a chamber transfer device 96. The fourth area A4 and the seventh area A7 are arranged adjacent to the eighth area A8 so as to sandwich the eighth area A8. The chamber unit 20 accommodates the workpiece W and is transferred back and forth between the upper space of the fourth area A4 or the seventh area A7 and the upper space of the eighth area A8. The connecting members 96a and 96b of the chamber transfer device 96 are connected to the two chamber units 20. The chamber transfer device 96 transfers the chamber units 20 back and forth so that when one chamber unit 20B is located in the eighth area A8, the other chamber unit 20A is located in the fourth area A4, and when the other chamber unit 20A is located in the eighth area A8, the one chamber unit 20B is located in the seventh area A7. In this configuration, when the pressurization process of the first work W1 is being performed, the related processes (accommodation process, preliminary pressurization process, cooling process, and removal process) of the second work W2 can be performed. That is, the present system 1 can alternately and simultaneously perform the pressurization process and the related processes for the two works W. As a result, in the present system 1, the time between pressurization processes can be shortened.

[0159] According to the embodiment described above, the system 1 includes the lifting device 42 disposed in the fourth area A4 and the lifting device 62 disposed in the seventh area A7. The chamber unit 20 includes the mounting table 21, the pressure pad 26, and the side member 27. The mounting table 21 is disposed below the workpiece W and functions as a lower pressure unit 8D. The pressure pad 26 is disposed above the workpiece W and functions as an upper pressure unit 8U. The side member 27 is disposed so as to surround the entire circumference of the workpiece W in the horizontal direction, and defines the accommodation chamber 20R together with the mounting table 21 and the pressure pad 26. In the fourth area A4 and the seventh area A7, the lifting devices 42, 62 can raise and lower the mounting table 21 on which the workpiece W is placed. The mounting table 21 is attached to the side member 27 based on the rise of the lifting devices 42, 62, and the accommodation process is performed as the related process. On the other hand, the mounting table 21 is removed from the side member 27 based on the lowering of the lifting devices 42, 62, and the removal process is performed as the related process. In this configuration, in the present system 1, the pressurization process can be performed on the workpiece W accommodated in the chamber unit 20 (accommodation room 20R). Furthermore, the chamber unit 20 functioning as the upper and lower pressurization units 8U, 8D is not installed in the eighth area A8 where the pressurization process is performed, and is transported to the fourth area A4 and the seventh area A7. In addition, in the fourth area A4 and the seventh area A7, the accommodation process and the removal process are performed as the related processes. Therefore, in the present system 1, the maintenance of the upper unit 22 can be performed in the fourth area A4 and the seventh area A7, not in the pressurization device 8, and the maintainability of the upper unit 22 is improved.

[0160] Furthermore, according to the embodiment described above, the system 1 includes the cooling units 41 and 61. The cooling unit 41 is disposed in the fourth area A4 and performs the cooling process of the first workpiece W1 as an associated process, and the cooling unit 61 is disposed in the seventh area A7 and performs the cooling process of the second workpiece W2 as an associated process. When the chamber unit 20 after the pressurization process is located in the fourth area A4 or the seventh area A7, the lifting device 42 and 62 raises the cooling units 41 and 61 to bring them into contact with the mounting table 21. In this configuration, the upper space of the fourth area A4 and the seventh area A7 can be used only for transporting the chamber unit 20, and the member configuration in the upper space can be simplified. In addition, the pressurization process and the cooling process can be performed simultaneously in parallel, and the time between the pressurization processes can be shortened.

[0161] Furthermore, according to the embodiment described above, the removal process is performed after the cooling process. In the removal process, the lifting device 42, 62 lowers the cooling unit 41, 61 in contact with the mounting table 21 together with the mounting table 21. In this configuration, the cooling process and the removal process can be performed consecutively in the same area. As a result, the floor area of ​​the housing 2 can be reduced.

[0162] Furthermore, according to the embodiment described above, the system 1 includes the preheating units 51, 71 and the heat unit transport devices 52, 72. The preheating units 51, 71 preheat the workpiece W accommodated in the chamber unit 20. The heat unit transport devices 52, 72 transport the preheating unit 51 (preheating unit 71) back and forth between the third area A3 (sixth area A6) adjacent to the fourth area A4 (seventh area A7) and the fourth area A4 (seventh area A7). The preheating process is performed continuously after the accommodation process. In the accommodation process, the placement table 21 on which the workpiece W is placed is disposed above the lifting devices 42, 62, and the pressure pad 26 and the side member 27 are disposed above the placement table 21. The heat unit transport devices 52, 72 transport the preheating units 51, 71 between the cooling units 41, 61 and the placement table 21. Next, the lifting device 42, 62 raises the mounting table 21 together with the cooling unit 41, 61 and the preheating unit 51, 71. In the cooling process and the removal process, the heat unit transport device 52, 72 transports the preheating unit 51, 71 to the third area A3 (the sixth area A6). In this configuration, the system 1 can individually perform the preheating process and the cooling process as related processes in the fourth area A4 by moving the preheating unit 51 to and from the fourth area A4. Similarly, in the seventh area A7, the system 1 can individually perform the preheating process and the cooling process as related processes. In addition, the system 1 can continuously perform the preheating process immediately after the accommodation process, can continuously perform the cooling process after the pressurization process, and can continuously perform the removal process immediately after the cooling process. As a result, the switching time between each process can be shortened, and the time between the pressurization processes can be shortened.

[0163] Furthermore, according to the embodiment described above, when viewed from above, the transport direction (Y-axis direction) of the preheating units 51, 71 is perpendicular to the transport direction (X-axis direction) of the chamber unit 20. The transport directions of the preheating units 51, 71 are arranged parallel to each other and facing each other in the transport direction of the chamber unit 20. With this configuration, it is possible to reduce the floor area of ​​the housing 2.

[0164] Furthermore, according to the embodiment described above, the system 1 includes the second area A2, the fifth area A5, the first conveying device 94, and the second conveying device 95. In the second area A2 and the fifth area A5, the workpiece loading process and the workpiece unloading process are performed. The first conveying device 94 reciprocates the placement table 21A on which the first workpiece W1 is placed between the second area A2 and the fourth area A4. The second conveying device 95 reciprocates the placement table 21B on which the second workpiece W2 is placed between the fifth area A5 and the seventh area A7. When viewed from above, the conveying direction of the placement tables 21A and 21B is the same as the conveying direction of the preheating units 51 and 71, and the conveying path of the preheating units 51 and 71 is disposed below the conveying path of the placement tables 21A and 21B. In this configuration, the transport paths of the preheating units 51 and 71 and the transport paths of the mounting tables 21A and 21B are three-dimensionally arranged within a common floor area, so that the floor area of ​​the housing 2 can be further reduced.

[0165] Furthermore, according to the embodiment described above, the system 1 includes the first area A1, the ninth area A9, and the work transport device 90. In the first area A1, the work W before the related processing and the pressurizing processing is arranged, and the work W after the related processing and the pressurizing processing is arranged. In the second area A2, the first work carry-in processing and the first work carry-out processing are performed. In the fifth area A5, the second work carry-in processing and the second work carry-out processing are performed. The work transport device 90 performs the first work carry-in processing, the first work carry-out processing, the second work carry-in processing, and the second work carry-out processing. The work transport device 90 includes a work carry-in device 91 and a work carry-out device 92. The work carry-in device 91 moves between the first area A1 and the second area A2 and between the first area A1 and the fifth area A5 to carry the work W onto the mounting table 21. The workpiece unloading device 92 moves between the ninth area A9 and the second area A2 and between the ninth area A9 and the fifth area A5 to unload the workpiece W from the mounting table 21. When the workpiece loading device 91 is located in the first area A1, the workpiece unloading device 92 is located in the second area A2 or the fifth area A5, and when the workpiece unloading device 92 is located in the ninth area A9, the workpiece loading device 91 is located in the second area A2 or the fifth area A5. In this configuration, the pair of rail members R5 and R6 can guide the workpiece loading device 91 and the workpiece unloading device 92, and the floor area of ​​the housing 2 can be reduced. In addition, the first workpiece W1 and the second workpiece W2 are loaded by one workpiece loading device 91, and the first workpiece W1 and the second workpiece W2 are unloaded by one workpiece unloading device 92, so that the number of parts of the workpiece transport device 90 can be reduced.

[0166] Furthermore, according to the embodiment described above, the system 1 includes a pressurizing device 8 that is disposed in the eighth area A8 and performs pressurizing treatment. The pressurizing device 8 includes a heat unit 81 that, during pressurizing treatment, rises from below the chamber unit 20 to come into contact with the mounting table 21 and functions as a lower pressurizing unit 8D together with the mounting table 21. In this configuration, the upper space of the eighth area A8 can be used only for transporting the chamber unit 20, and the member configuration in the upper space can be simplified. In addition, since most of the mechanisms that apply the main pressurizing force to the workpiece W (particularly the lifting device 82) are disposed below the chamber unit 20, it is possible to realize a reduction in size in the height direction of the housing 2.

[0167] Furthermore, according to the embodiment described above, the atmosphere in the accommodation chamber 20R is a reduced pressure atmosphere in which the internal pressure of the accommodation chamber 20R is lower than the external pressure of the external space of the chamber unit 20. The mounting table 21 is disposed below the side member 27 and is attached to the side member 27 by the pressure difference. In this configuration, a separate member for attaching the mounting table 21 to the side member 27 is not required. That is, the number of parts of the chamber unit 20 can be reduced. Furthermore, the workpiece W is not exposed to the outside air in each process.

[0168] ●Variations● Next, modified examples of the present system 1 will be described below, focusing on the differences from the previously described embodiment (hereinafter referred to as the "first embodiment"). In this modified example, the configuration of the chamber unit and the atmosphere of the storage chamber are different from those of the first embodiment. In the following modified examples, for ease of explanation, the same components as those in the first embodiment and components having common functions are given the same reference numerals as those in the first embodiment. In the following modified examples, reference will be made as appropriate to Figs. 1 to 8.

[0169] FIG. 20 is a schematic cross-sectional view of a chamber unit 20X according to a modified example.

[0170] The chamber unit 20X includes a mounting table 21, an upper unit 22X, and a storage chamber 20R. The upper unit 22X includes a base member 23, an upper mold 24, a frame member 25, a pressure pad 26, a side member 27, a first spring member 28, a second spring member 29, two seal members 30 and 31, and a plurality of fixing members 32.

[0171] The fixing member 32 fixes the mounting table 21 to the side member 27 (upper unit 22X). The fixing member 32 is attached to the outer peripheral surface 27f of the lower part of the side member 27. The fixing member 32 includes, for example, a support portion 32a, a main body portion 32b, and a known ratchet mechanism (not shown, the same applies below). The support portion 32a supports the main body portion 32b rotatably between a fixed position and an open position. The shape of the main body portion 32b is, for example, L-shaped when viewed from the side. The main body portion 32b is rotatable toward the open position side and is not rotatable toward the fixed position side by, for example, the ratchet mechanism, and is rotatable to the fixed position when the ratchet mechanism is released. When the main body portion 32b is located at the fixed position, a part of the main body portion 32b is located below the mounting table 21 and the side member 27 and can support the mounting table 21. When the main body portion 32b is in the open position, a part of the main body portion 32b is located on the side of the side member 27 and is unable to support the mounting table 21.

[0172] When the workpiece W is accommodated in the chamber unit 20X, the atmosphere in the accommodation chamber 20R is adjusted to an inert gas atmosphere by the atmosphere adjusting device 10. That is, the accommodation chamber 20R is filled with an inert gas so that the internal pressure of the accommodation chamber 20R is the same as the external pressure (atmospheric pressure). In this case, since no vacuum pressure is generated, the mounting table 21 is fixed to the side member 27 (upper unit 22X) by the fixing member 32 rotated to the fixed position. As described above, the atmosphere in the accommodation chamber 20R can be maintained in the fourth area A4, the seventh area A7, and the eighth area A8. Therefore, a slight gap may be generated between the mounting table 21 and the seal member 31.

[0173] In this configuration, since the atmosphere in the accommodation chamber 20R is an inert gas atmosphere, the workpiece W is not exposed to the outside air during the preliminary heating process, the pressurizing process, and the cooling process, and is not oxidized. Also, the amount of inert gas required is limited to the volume of the accommodation chamber 20R (if replacement is performed several times, the volume is multiplied by the number of replacements).

[0174] In this modified example, when the workpiece W is made of a material that does not oxidize (is difficult to oxidize), the accommodation chamber 20R may be filled with air.

[0175] In addition, in this modification, the configuration of the fixing member 32 is not limited to the support portion 32a, the main body portion 32b, and a known ratchet mechanism. That is, for example, the fixing member 32 may be a rectangular "C" shape in a side view. In this case, for example, a recess or a protrusion into which the fixing member 32 is fitted is formed on the outer circumferential surface 27f of the lower end portion 27e of the side member 27, and the fixing member 32 sandwiches the lower end portion 27e of the side member 27 and the outer edge portion of the mounting table 21. Also, for example, the fixing member 32 may be a bolt that fastens the outer edge portion of the mounting table 21 and the side member 27. The first cooling device 4 and the second cooling device 6 may be provided with an attachment mechanism and a removal mechanism for the fixing member 32.

[0176] ●Other embodiments● In the present invention, the system 1 may not include the first cooling device 4 and / or the first preheating device 5. Similarly, the system 1 may not include the second cooling device 6 and / or the second preheating device 7. Specifically, for example, a cooling process may also be performed during the pressurizing process. Even in this case, the storage process and the removal process can be performed in parallel with the pressurizing process, and the processing time between the pressurizing processes can be shortened compared to conventional pressurizing devices. In addition, in this case, the system 1 can perform a process different from that of the second work W2 on the first work W1 (for example, by making the main pressurizing temperature of the first work W1 different from the main pressurizing temperature of the second work W2 and performing a preheating process on only one of them).

[0177] In the present invention, the pressurizing device 8 does not necessarily have to include the heat unit 81 .

[0178] Furthermore, in the present invention, the configuration of the chamber transport device 96 is not limited to the first embodiment as long as the chamber unit 20 and the upper unit 22 are configured to be capable of transporting the upper space of the fourth area A4, the seventh area A7, and the eighth area A8. That is, for example, the chamber unit 20 (upper unit 22) may be provided with a power source and drive wheels capable of rolling on the rail members R11 and R12. Also, for example, the rail members R11 and R12 may be provided with a plurality of rollers capable of abutting against the base member 23. Furthermore, for example, the chamber transport device 96 may be provided with a locking member configured to be detachable from the base member 23, and a moving mechanism for moving the locking member between the fourth area A4 and the seventh area A7 and the eighth area A8.

[0179] Furthermore, in each drawing, for convenience of explanation, the shape of the workpiece W accommodated in the chamber unit 20 is shown as a single flat plate, but is not limited to this. That is, for example, the chamber unit 20 may accommodate one set of workpieces W composed of multiple pressurized objects. Also, for example, the shapes of the pressurized objects constituting one set of workpieces W may be the same or different.

[0180] Furthermore, in the present invention, the configuration of the heat unit transport device 52, 72 may be any configuration that does not interfere with the transport and lifting of the tables 50, 70 and the pre-heating units 51, 71, and the lifting and lowering of the cooling units 41, 61 by the lifting devices 42, 62, and is not limited to the first embodiment.

[0181] Furthermore, in the present invention, the transport direction and transport path of the heat unit transport devices 52, 72 are not limited to those in the first embodiment. That is, for example, the transport direction and transport path of the heat unit transport devices 52, 72 may be along the X-axis direction.

[0182] Furthermore, in the present invention, the transport path of the heating unit transport device 72 may be disposed so as to extend from the seventh area A7 in the +Y-axis direction.

[0183] Furthermore, in the present invention, the shapes of table 40, cooling unit 41, table 50, and preheating unit 51 are not limited to those of the first embodiment as long as each process (storage process, preheating process, cooling process, and removal process) by lifting device 42 can be performed. That is, for example, the shapes of table 40, cooling unit 41, and table 50 may be rectangular when viewed from above. Similarly, the shapes of table 60, cooling unit 61, table 70, and preheating unit 71 are not limited to those of the first embodiment.

[0184] ●Embodiments of the present invention● Next, the embodiments of the present invention that can be understood from the above-described embodiments will be described below, using the terms and symbols described in the respective embodiments.

[0185] The first embodiment of the present invention is a pressurization system (e.g., pressurization system 1) that performs a pressurization process on a work (e.g., work W) and a related process related to the pressurization process on the work, and includes a pressurization area (e.g., 8th area A8) in which the pressurization process is performed, two related areas (e.g., 4th area A4, 7th area A7) arranged to sandwich the pressurization area at a position adjacent to the 8th area and in which the related processes are performed, and two chambers that accommodate the work and are transported back and forth between the upper space of the related area and the upper space of the pressurization area. The pressurization system includes a chamber unit (e.g., chamber unit 20, 20X) and a chamber transport device (e.g., chamber transport device 96) that transports two of the chamber units back and forth simultaneously, and the chamber transport device transports the chamber units back and forth such that when one of the chamber units is located in the pressurized area, the other chamber unit is located in one of the associated areas, and when the other chamber unit is located in the pressurized area, one of the chamber units is located in the other associated area. With this configuration, the system can alternately and simultaneously perform the pressure treatment and the related treatment on two workpieces, thereby shortening the time between pressure treatments.

[0186] A second embodiment of the present invention is the first embodiment, and further comprises an elevator (e.g., elevator 42, 62) disposed in the relevant area, and the chamber unit comprises a mounting table (e.g., mounting table 21) on which the work is mounted and which functions as a lower pressurizing unit (e.g., lower pressurizing unit 8D) that pressurizes the work from below in the pressurizing process, a ceiling member (e.g., pressure pad 26) disposed above the mounting table and which functions as an upper pressurizing unit (e.g., upper pressurizing unit 8U) that pressurizes the work from above in the pressurizing process, and a ceiling member (e.g., pressure pad 26) disposed so as to surround the entire circumference of the work in the horizontal direction and which functions as the mounting table. and a peripheral wall member (e.g., side member 27) which, together with the ceiling member, defines a storage chamber (e.g., storage chamber 20R) in which the workpiece is stored, and in the associated area, the lifting device is capable of raising and lowering the mounting table on which the workpiece is placed, and the associated process is a storage process in which the mounting table is attached to the peripheral wall member based on the raising of the lifting device and the workpiece before the pressurization treatment is stored in the storage chamber, and the associated process is a removal process in which the mounting table is detached from the peripheral wall member based on the lowering of the lifting device and the workpiece after the pressurization treatment is removed from the storage chamber. According to this configuration, in the present system, it is possible to perform a pressurization process on the workpiece accommodated in the chamber unit, and the maintainability of the upper unit is improved.

[0187] A third embodiment of the present invention is a pressurization system in which, in the second embodiment, a cooling unit (e.g., cooling unit 41, 61) is arranged in the relevant area and performs a cooling process as the relevant process, which cools the workpiece after the pressurization process housed in the chamber unit, and when the chamber unit after the pressurization process is located in the relevant area, the lifting device lifts the cooling unit to abut against the mounting table. According to this configuration, the pressurizing process and the cooling process can be performed simultaneously in parallel, and the time between the pressurizing processes can be shortened.

[0188] A fourth embodiment of the present invention is a pressurization system in which, in the third embodiment, the pressurization system includes a preheating unit (e.g., preheating unit 51, 71) that performs a preheating process as the associated process, which preheats the workpiece contained in the chamber unit before the pressurization process, a waiting area (e.g., third area A3, sixth area A6) adjacent to the associated area, and a heat unit transport device (e.g., heat unit transport device 52, 72) that transports the preheating unit back and forth between the associated area and the preheating unit, the preheating process being performed after the accommodation process, the placement table on which the workpiece is placed in the accommodation process being disposed above the lifting device, the ceiling member and the peripheral wall member being disposed above the placement table, the heat unit transport device transporting the preheating unit between the cooling unit and the placement table, the lifting device raising the placement table together with the cooling unit and the preheating unit, and the preheating unit being located in the waiting area in the cooling process and the removal process. According to this configuration, the switching time between each treatment can be shortened, and the time between pressure treatments can be shortened.

[0189] A fifth embodiment of the present invention is a pressurized system comprising, in the fourth embodiment, a work transport area (e.g., second area A2, fifth area A5) in which a work loading process in which the work is loaded onto the mounting table and a work unloading process in which the work is unloaded from the mounting table are performed, and a table transport device (e.g., first table transport device 94, second table transport device 95) that transports the mounting table on which the work is placed back and forth between the work transport area and the associated area, wherein, when viewed from above, the transport direction of the mounting table is the same as the transport direction of the pre-heating unit, and the transport path of the pre-heating unit is arranged below the transport path of the mounting table. With this configuration, it is possible to further reduce the floor area of ​​the housing.

[0190] A sixth embodiment of the present invention is a second embodiment of the present invention, comprising: a work carry-in area (for example, the first area A1) in which the work is placed before the associated processing and the pressurizing processing are performed; a work carry-out area (for example, the ninth area A9) in which the work is placed after the associated processing and the pressurizing processing are performed; a first work transport area (for example, the second area A2) in which a first work carry-in process in which the work is carried in from the work carry-in area to one of the placement tables and a first work carry-out process in which the work is carried out from the one of the placement tables to the work carry-out area are performed; a second work transport area (for example, the fifth area A5) in which a second work carry-in process in which the work is carried in from the work carry-in area to the other placement table and a second work carry-out process in which the work is carried out from the other placement table to the work carry-out area are performed; and a work transport device (e.g., work transport device 90) that performs a work carrying-in process and a work unloading process, wherein the work transport device comprises a work carrying-in device (e.g., work carry-in device 91) that moves between the work carrying-in area and the first work transport area and between the work carrying-in area and the second work transport area to carry-in the work to the placement table, and a work unloading device (e.g., work carry-out device 92) that moves between the work unloading area and the first work transport area and between the work unloading area and the second work transport area to unload the work from the placement table, wherein when the work carrying-in device is located in the work carrying-in area, the work unloading device is located in the first work transport area or the second work transport area, and when the work unloading device is located in the work unloading area, the work carrying-in device is located in the first work transport area or the second work transport area. According to this configuration, it is possible to reduce the floor area of ​​the housing and the number of parts of the workpiece transport device.

[0191] A seventh embodiment of the present invention is a pressurization system according to the second embodiment, which comprises a pressurization device (e.g., pressurization device 8) that is arranged in the pressurization area and performs the pressurization treatment, and the pressurization device includes a pressing unit (e.g., heat unit 81) that rises from below the chamber unit to abut against the mounting table during the pressurization treatment and functions as the lower pressurization unit together with the mounting table. According to this configuration, it is possible to reduce the size of the housing in the height direction.

[0192] An eighth embodiment of the present invention is a pressurized system according to the second embodiment, wherein the storage chamber is a reduced pressure atmosphere in which the internal pressure of the storage chamber is lower than the external pressure of an external space of the chamber unit, and the mounting table is disposed below the peripheral wall member and attached to the peripheral wall member by a pressure difference between the internal pressure and the external pressure. According to this configuration, the workpiece is not exposed to the outside air during each treatment.

[0193] A ninth embodiment of the present invention is a pressurized system in which, in the second embodiment, the atmosphere of the storage chamber is a gas atmosphere filled with gas so that the internal pressure of the storage chamber is the same as the external pressure of the external space of the chamber unit (e.g., chamber unit 20X), and the chamber unit is provided with a fixing member (e.g., fixing member 32) that fixes the mounting table to the peripheral wall member. According to this configuration, the workpiece is not exposed to the outside air during each process, and the amount of inert gas required is limited to the volume of the accommodation chamber. [Explanation of symbols]

[0194] 1 Pressurized System 20 Chamber unit 20R Containment Room 21 Placement table 26 Pressure pad (ceiling material) 27 Side member (peripheral wall member) 41 Cooling unit 42 Lifting device 51 Preheating unit 52 Heat unit transport device 61 Cooling Unit 62 Lifting device 71 Preheating unit 72 Heat unit transport device 8. Pressurizing Device 8U Upper pressure unit 8D Lower pressure unit 90 Work transport device 91 Work loading device 92 Work unloading device 94 First conveyor 95 Second conveyor 96 Chamber Transport Device 20X Chamber Unit 32 Fixing member A1 First area (work loading area) A2 2nd area (1st work transfer area) A3 3rd Area (Waiting Area) A4 4th Area (Related Area) A5 5th area (2nd work transport area) A6 6th Area (Waiting Area) A7 7th Area (Related Area) A8 8th area (pressurized area) A9 9th Area (Work Unloading Area)

Claims

1. A pressurizing system that performs a pressurizing process on a workpiece and a related process related to the pressurizing process on the workpiece, a pressurizing area in which the pressurizing process is performed; two related areas arranged adjacent to the pressurizing area so as to sandwich the pressurizing area, in which the related process is executed; Two chamber units that accommodate the workpiece and are transported back and forth between an upper space of the related area and an upper space of the pressurizing area; a chamber transfer device that simultaneously transfers the two chamber units back and forth; and The chamber transfer device is When one of the chamber units is located in the pressurizing area, the other of the chamber units is located in one of the associated areas; and transporting the chamber units back and forth such that one of the chamber units is positioned in the associated area of ​​the other chamber unit when the other chamber unit is positioned in the pressurizing area; Pressurized system.

2. a lifting device arranged in said relevant area; and The chamber unit includes: A mounting table on which the workpiece is placed and which functions as a lower pressurizing unit that pressurizes the workpiece from below in the pressurizing treatment; A ceiling member that is disposed above the mounting table and functions as an upper pressurizing unit that pressurizes the work from above during the pressurizing treatment; a peripheral wall member disposed to surround the entire periphery of the workpiece in the horizontal direction and defining a storage chamber in which the workpiece is stored together with the placement table and the ceiling member; With In the relevant area, The lifting device is capable of lifting and lowering the table on which the workpiece is placed, The mounting table is attached to the peripheral wall member based on the lifting device being raised, and a storage process is performed as the related process in which the work before the pressurization process is stored in the storage chamber, The lifting device is lowered to remove the mounting table from the peripheral wall member, and a removal process is performed as the associated process, in which the workpiece after the pressurization process is removed from the accommodation chamber. The pressurization system of claim 1 .

3. a cooling unit that is disposed in the associated area and performs, as the associated process, a cooling process for cooling the workpiece after the pressurization process that is accommodated in the chamber unit; and when the chamber unit after the pressurization process is located in the relevant area, the lifting device lifts the cooling unit to bring the cooling unit into contact with the mounting table. The pressurization system of claim 2 .

4. a preheating unit that performs a preheating process as the related process, the preheating process being performed on the workpiece before the pressurization process and that is accommodated in the chamber unit; a heat unit transport device that transports the preheating unit back and forth between the relevant area and a standby area adjacent to the relevant area; and The preliminary heating process is performed after the containing process, In the storage process, The table on which the workpiece is placed is disposed above the lifting device, The ceiling member and the peripheral wall member are disposed above the mounting table, The heat unit transport device transports the preheating unit between the cooling unit and the mounting table, The lifting device lifts the mounting table together with the cooling unit and the pre-heating unit, In the cooling process and the removal process, The pre-heating unit is located in the waiting area. The pressurization system of claim 3.

5. a work transport area in which a work carry-in process in which the work is carried into the placement table and a work carry-out process in which the work is carried out from the placement table are performed; a table transport device that transports the table on which the work is placed back and forth between the work transport area and the associated area; and When viewed from above, a transport direction of the mounting table is the same as a transport direction of the preheating unit, a transport path of the preheating unit is disposed below a transport path of the mounting table; The pressurization system of claim 4.

6. a workpiece carry-in area in which the workpiece is placed before the associated process and the pressurizing process are performed; a workpiece carrying-out area in which the workpiece is placed after the related process and the pressurizing process are performed; a first work transport area in which a first work carry-in process in which the work is carried in from the work carry-in area to one of the placement tables and a first work carry-out process in which the work is carried out from the one of the placement tables to the work carry-out area are performed; a second work transport area in which a second work carry-in process in which the work is carried from the work carry-in area to the other placement table and a second work carry-out process in which the work is carried out from the other placement table to the work carry-out area are performed; a work transport device that executes the first work carry-in process, the first work carry-out process, the second work carry-in process, and the second work carry-out process; and The workpiece transport device is a work carrying-in device that moves between the work carrying-in area and the first work transport area and between the work carrying-in area and the second work transport area to carry in the work onto the placement table; a workpiece carrying-out device that moves between the workpiece carrying-out area and the first workpiece transport area and between the workpiece carrying-out area and the second workpiece transport area to carry-out the workpiece from the placement table; With When the work carrying-in device is located in the work carrying-in area, the work carrying-out device is located in the first work transport area or the second work transport area, When the workpiece carrying-out device is located in the workpiece carrying-out area, the workpiece carrying-in device is located in the first workpiece transport area or the second workpiece transport area. The pressurization system of claim 2 .

7. a pressurizing device disposed in the pressurizing area and performing the pressurizing treatment; and The pressurizing device is a pressing unit that rises from below the chamber unit to come into contact with the mounting table during the pressurizing process, and functions as the lower pressurizing unit together with the mounting table; Equipped with The pressurization system of claim 2 .

8. the accommodation chamber is in a reduced pressure atmosphere, the internal pressure of the accommodation chamber being lower than the external pressure of the external space of the chamber unit; the mounting table is disposed below the peripheral wall member and is attached to the peripheral wall member by a pressure difference between the internal pressure and the external pressure; The pressurization system of claim 2 .

9. the atmosphere of the accommodation chamber is a gas atmosphere filled with a gas such that the internal pressure of the accommodation chamber is the same as the external pressure of the external space of the chamber unit; The chamber unit includes: a fixing member that fixes the mounting table to the peripheral wall member; Equipped with The pressurization system of claim 2 .

Images