Stage device, lithography device, and article manufacturing method

Abstract

To provide a technique advantageous for reducing vibration that can be generated due to the drive of a stage.SOLUTION: A stage device comprises: a stage; an actuator that has a movable part that moves with the stage and a stationary part that generates thrust for the movable part, and drives the stage; a gyro moment generation unit that is coupled to the movable part; and a control unit that controls the gyro moment generation unit, so as to cancel at least part of the moment acting on the movable part generated by the actuator driving the stage, with the moment generated by the gyro moment generation unit.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a stage apparatus, a lithography apparatus, and a method for manufacturing an article. [Background technology]

[0002] In a lithography apparatus, such as an exposure apparatus or an imprint apparatus, a substrate can be driven so that a shot area of ​​the substrate and an original are aligned. In such a lithography apparatus, a stage for aligning the substrate and the original can be driven at high speed. However, when the stage is driven at high speed, a moment corresponding to the high speed is generated, which can vibrate the stage or the floor on which the lithography apparatus is installed.

[0003] Patent Document 1 describes a stage device including a movable stage, a base supporting the stage, a driving mechanism for driving the stage, and a rotor that generates a moment so as to reduce a reaction force generated with the movement of the stage. Patent Document 2 describes a moving device including a moving body, a linear motor having a movable element attached to the moving body and moving the movable element in one axial direction, and a rotary motor fixed to the moving body. A moving combination consisting of the moving body, the movable element, and the rotary motor receives a rotational torque by the linear motor moving the movable element. The rotary motor rotates the rotor so as to cancel at least a part of the rotational torque. However, Patent Documents 1 and 2 do not disclose the idea of ​​canceling at least a part of the moment generated when the movable element is moved by a gyro moment. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 11-190786 [Patent Document 2] JP 2012-161896 A Summary of the Invention [Problem to be solved by the invention]

[0005] An object of the present invention is to provide an advantageous technique for reducing vibrations that may occur due to driving of a stage. [Means for solving the problem]

[0006] One aspect of the present invention relates to a stage device, the stage device having a stage, a mover that moves together with the stage, and a stator that generates a thrust on the mover, and comprising: an actuator that drives the stage, a gyro moment generating unit coupled to the mover, and a control unit that controls the gyro moment generating unit so that at least a portion of the moment acting on the mover by driving the stage with the actuator is offset by a moment generated by the gyro moment generating unit. Effect of the Invention

[0007] According to the present invention, an advantageous technique is provided for reducing vibrations that may occur due to driving of the stage. [Brief description of the drawings]

[0008] [Figure 1] FIG. 2 is a perspective view showing the configuration of a stage device according to the first embodiment. [Diagram 2] 5A and 5B are diagrams showing a gyro moment generating unit in a standby state and in an operating state, respectively. [Diagram 3] FIG. 4 is a diagram showing a schematic diagram of how a stage is driven. [Figure 4] FIG. 2 is a diagram illustrating a configuration in which a gyro moment generating portion is coupled to a lower surface of a mover. [Diagram 5] FIG. 13 is a perspective view showing the configuration of a stage device according to a second embodiment. [Figure 6] FIG. 4 is a diagram showing a schematic diagram of the operating state of two gyro moment generating units. [Figure 7]FIG. 13 is a perspective view showing the configuration of a stage device according to a third embodiment. [Figure 8] 13A to 13C are perspective views illustrating the operation of a stage device according to the third embodiment. [Figure 9] FIG. 1 is a diagram showing the arrangement of an exposure apparatus according to an embodiment. [Figure 10] FIG. 4 is a block diagram of a control system for controlling the angular velocity of the second motor. [Figure 11] FIG. 2 is a diagram illustrating a configuration in which a gyro moment generating portion is coupled to a side surface of a mover. [Figure 12] 4 is a diagram showing an example of changes over time in the angular velocity ωY of the second motor, the angular velocity ωZ of the first motor, and the stage moment AM of the gyro moment generating unit. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0010] In this specification and drawings, the structure and operation are described according to an XYZ coordinate system. The Z axis in the XYZ coordinate system may be an axis parallel to the vertical direction. The directions parallel to the X axis, Y axis, and Z axis in the XYZ coordinate system are called the X direction, Y direction, and Z direction, respectively.

[0011] FIG. 1 is a perspective view showing the configuration of a stage device 100 of the first embodiment. The stage device 100 can be used as a stage device for a lithography device (pattern transfer device) such as an exposure device and an imprint device. The stage device 100 includes an X drive unit 12 and a Y drive unit 1 that drive a stage (movable table) 11 in the X direction and the Y direction, respectively. The Y drive unit 1 is constrained in the Z direction by a pressurizing mechanism (not shown) that is composed of a Z air ejection unit 7 that constitutes an air bearing and a magnet arranged in the vicinity of the Z air ejection unit 7. The pressurizing mechanism including the X air ejection unit 8 has a similar configuration and constrains the Y drive unit 1 in the X direction. Therefore, the Y drive unit 1 is guided in a non-contact manner by the base plate 6 via the Z air ejection unit 7 and the X air ejection unit 8, and can move only in the Y direction. The Y drive unit 1 is driven in the Y direction by a linear motor 2 (actuator) that is composed of a stator 2a and a mover 2b. The stage 11 is placed on the Y drive unit 1 and moves in the Y direction together with the Y drive unit 1. That is, the stator 2a generates a thrust in the mover 2b in the Y direction, and the mover 2b moves together with the stage 11 in the Y direction.

[0012] X driving unit 12 drives stage 11 in the X direction along Y driving unit 1 by a linear motor composed of a stator 13 and a mover (not shown). Stage 11 may be provided with an X encoder (not shown) that measures the position of stage 11 in the X direction. Y driving unit 1 may be provided with a Y encoder (not shown) that measures the position of stage 11 in the Y direction. Stage 11 may be controlled so as to be driven and positioned to an arbitrary target position based on the positions of stage 11 in the X and Y directions measured by the X and Y encoders.

[0013] A gyro moment generating unit 3 may be mounted on the mover 2b. In the example of FIG. 1, the gyro moment generating unit 3 is coupled to the upper surface of the mover 2b. The gyro moment generating unit 3 may include a rotating body 3a, a first gimbal 3b, a first motor 3z, a second gimbal 3c, and a second motor 3y. The first gimbal 3b supports the rotating body 3a rotatably around a second axis (Z axis) perpendicular to the first axis (Y axis). The first axis may be a fixed axis parallel to the Y axis. The second axis may be an axis parallel to the Z axis in a standby state, but may be an axis rotated around the first axis (Y axis) in an operating state. The first motor 3z rotates the rotating body 3a around the second axis. The second gimbal 3c supports the first gimbal 3b (rotating body 3a) rotatably around the first axis. The second motor 3y rotates the first gimbal 3b (rotating body 3a) about the first axis, which causes the second axis to also rotate about the first axis.

[0014] The stage device 100 may include a control unit CNT that controls the gyro moment generating unit 3. A moment may act on the mover 2b (and all components that move together with the mover 2b) by driving the stage 11 with the linear motor 2. Such a moment may be referred to as a stage moment below. The control unit CNT may control the gyro moment generating unit 3 so that at least a portion of the stage moment is offset by the moment generated by the gyro moment generating unit 3. The control unit CNT may include a first motor control unit 10 and a second motor control unit 9. The first motor control unit 10 controls the rotation (angular velocity) of the first motor 3z, and the second motor control unit 9 controls the rotation (angular velocity) of the second motor 3y.

[0015] Next, the principle by which the gyro moment generating unit 3 generates the gyro moment JM will be described. FIG. 2(a) shows a schematic diagram of the standby state of the gyro moment generating unit 3, and FIG. 2(b) shows a schematic diagram of the operating state of the gyro moment generating unit 3. In the standby state, the first motor 3z rotates the rotating body 3a at a predetermined angular velocity around the second axis (the Z axis in FIG. 2(a)). In the operating state, the second motor 3y rotates the rotating body 3a (the first gimbal 3b) around the first axis (the Y axis) while the first motor 3z rotates the rotating body 3a at a predetermined angular velocity around the second axis. This causes the gyro moment generating unit 3 to generate the gyro moment JM around the X axis. From the viewpoint of reducing power consumption, the first motor control unit 10 or the control unit CNT may stop the rotation of the first motor 3z when it is not necessary to generate the gyro moment JM.

[0016] FIG. 3 is a schematic diagram showing how the Y driving unit 1 is driven in the Y direction by the linear motor 2. The principle of generation of the stage moment AM generated in the movable unit when the Y driving unit 1 is driven in the Y direction will be described. Here, the movable unit means an assembly of all components that move together with the mover 2b, and more specifically includes the Y driving unit 1, the X driving unit 12, the stage 11, and the moment generating unit 3. In order to move the Y driving unit 1 in the Y direction, the mover 2b generates a thrust force AF. The position at which the thrust force AF acts and the center of gravity of the movable unit (hereinafter referred to as the stage center of gravity) SG are misaligned in the Z direction, so that a stage moment AM is generated around the X axis.

[0017] The principle of generation of the gyro moment JM is as described above, and the gyro moment JM is generated by rotating the rotating body 3a, which rotates around the first axis (Y-axis) at a predetermined angular velocity, around the first axis (Y-axis). The control unit CNT can start the gyro moment generating unit 3 before the linear motor 2 starts driving the stage 11 (before the linear motor 2 generates a thrust). More specifically, the first motor control unit 10 can start the first motor 3z to rotate the rotating body 3a at a predetermined angular velocity before starting to drive the stage 11 (before the linear motor 2 generates a thrust). In addition, the second motor control unit 9 can control the angular velocity of the second motor 3y so as to generate a gyro moment JM that is the same in magnitude as the stage moment AM in the opposite direction.

[0018] FIG. 10 is a block diagram of a control system that controls the angular velocity of the second motor 3y. The second motor control unit 9 may include a target value calculation unit 94, a feedforward (FF) controller 95, and a feedback (FB) controller 96. The target value calculation unit 94 may calculate the target angular velocity ωYi so as to satisfy JM=AM. More specifically, the target value calculation unit 94 may calculate the target angular velocity ωYi according to ωYi=AM / (IZ×ωZ). The stage moment AM may be calculated by multiplying the magnitude of the thrust force AF by the distance between the stage center of gravity SG and the action position (Z direction) of the thrust force AF. The magnitude of the thrust force AF may be calculated by multiplying the driving current of the linear motor 2 by the thrust constant of the linear motor 2. The driving current may be obtained from the linear motor control unit 93. The thrust constant of the linear motor 2 and the distance between the stage center of gravity SG and the action position (Z direction) of the thrust force AF may be calculated from design values. I z represents the moment of inertia about the second axis (Z axis) of the rotating body 3a, and can be calculated from the design value of the rotating body 3a. ω z represents a predetermined angular velocity about the second axis (Z axis) of the rotating body 3a, and can be obtained from an encoder (not shown) built into the first motor 3z.

[0019] The FB controller 96 provides a feedback manipulated variable to the motor 3y to reduce the deviation between the target angular velocity ωYi and the angular velocity ωY of the second motor 3y. The angular velocity ωY of the second motor 3y can be obtained from an encoder (not shown) built into the second motor 3y. The FF controller 95 can feedforward control the second motor 3y while providing a feedforward manipulated variable calculated from the target angular velocity ωYi to the second motor 3y. In other words, the second motor control unit 9 (control unit CNT) can feedforward control the second motor 3y based on control information for controlling the linear motor 2 (for example, the thrust AF generated in the linear motor 2, or the current supplied to the linear motor 2, etc.).

[0020] As described above, the second motor control unit 9 (control unit CNT) controls the angular velocity of the second motor 3y simultaneously with driving the linear motor 2, and generates the gyro moment JM simultaneously with the generation of the stage moment AM. This makes it possible to cancel out the entire stage moment AM around the X-axis without any time delay. Note that the target angular velocity ωYi may be generated so as to cancel out at least a portion of the stage moment AM. FIG. 12 shows an example of the time changes of the angular velocity ωY, the angular velocity ωZ, and the stage moment AM.

[0021] The gyro moment JM is expressed as IZ × ωZ × ωY. Therefore, the magnitude of the gyro moment JM is determined regardless of the position of the stage center of gravity SG. This means that even if there are individual differences in the position of the stage center of gravity SG, the stage moment AM can be accurately offset.

[0022] After canceling the stage moment AM about the X-axis, the second motor control unit 9 controls the second motor 3y so that the rotating body 3a returns to the position before the cancellation. At this time, it is preferable that the first motor control unit 10 controls the first motor 3z so that the angular velocity of the first motor 3z becomes 0 so that the gyro moment JM is not generated.

[0023] In the example shown in FIG. 1, the gyro moment generating unit 3 is coupled to the upper surface of the mover 2b, but the present invention is not limited to this. For example, as illustrated in FIG. 11, the gyro moment generating unit 3 may be coupled to the side surface of the mover 2b. In the example of FIG. 11, the position of the stage center of gravity SG in the Z direction coincides with the position of the drive shaft of the second motor 3y of the gyro moment generating unit 3 in the Z direction. This allows the acting position of the stage moment AM to coincide with the acting position of the gyro moment JM. Such an arrangement is advantageous for suppressing the torsional moment applied to the mover 2b and reducing vibrations generated by the torsional moment.

[0024] As illustrated in Fig. 4, the gyro moment generating unit 3 may be coupled to the lower surface of the mover 2b. In the example illustrated in Fig. 4, the position of the stage center of gravity SG can be moved in the negative direction of the Z direction, as compared to the example illustrated in Fig. 1. This shortens the distance LG between the stage center of gravity SG and the acting position of the thrust force AF, and the magnitude of the stage moment AM can be reduced. Such an arrangement is advantageous for reducing the magnitude of the gyro moment JM and reducing the power consumption of the second motor 3y.

[0025] In this embodiment, an example is shown in which a linear motor is used as an actuator for driving the Y drive unit 1, but a ball screw and a servo motor, for example, may also be used as the actuator. In this case, it is advantageous in terms of cost.

[0026] In this embodiment, an example is shown in which a pressurizing mechanism consisting of an air blowing part and a magnet that constitute an air bearing is used to restrain the Y drive part 1, but a slider and a guide may be used instead, which is advantageous in terms of cost.

[0027] Hereinafter, a stage device 200 according to the second embodiment will be described with reference to Figs. 5 and 6. Matters not mentioned in the second embodiment may follow those of the first embodiment. Fig. 5 is a perspective view showing the configuration of a stage device 200 according to the second embodiment. The second embodiment provides a stage device 200 provided with a plurality of gyro moment generating units 31, 32.

[0028] 5, stage device 200 includes two gyro moment generating units 31, 32. Gyro moment generating units 31, 32 have a similar configuration to gyro moment generating unit 3 of the first embodiment. Gyro moment generating units 31, 32 may be referred to as first and second gyro moment generating units 31, 32, since they are separate from each other. Gyro moment generating units 31, 32 as multiple gyro moment generating units are coupled to mover 2b.

[0029] A stage moment acts on the mover 2b by driving the stage 11 with the linear motor 2. The control unit CNT controls the first and second gyro moment generating units 31, 32 so as to cancel out at least a portion of the stage moment with the moment generated by the gyro moment generating units 31, 32. The first and second gyro moment generating units 31, 32 can be aligned along a first direction (Y direction) parallel to the first axis (Y axis).

[0030] The first gyro moment generating unit 31 may include a first rotating body 31a, a first gimbal 31b, a first motor 31z, a second gimbal 31c, and a second motor 31y. The first rotating body 31a, the first gimbal 31b, the first motor 31z, the second gimbal 31c, and the second motor 31y may have the same configurations as the rotating body 3a, the first gimbal 3b, the first motor 3z, the second gimbal 3c, and the second motor 3y of the first embodiment, respectively. The second gyro moment generating unit 32 may include a second rotating body 32a, a third gimbal 32b, a third motor 32z, a fourth gimbal 32c, and a fourth motor 32y. The second rotating body 32a, the third gimbal 32b, the third motor 32z, the fourth gimbal 32c, and the fourth motor 32y may have the same configurations as the rotating body 3a, the first gimbal 3b, the first motor 3z, the second gimbal 3c, and the second motor 3y in the first embodiment, respectively.

[0031] FIG. 6 shows the operating state of the first and second gyro moment generating units 31, 32. The principle of generation of the gyro moment and the method of calculating the angular velocities of the second and fourth motors 31y, 32y are the same as those in the first embodiment. However, in the second embodiment, since the first and second gyro moment generating units 31, 32 are provided, the angular velocities of the second and fourth motors 31y, 32y can be set to half the magnitude of the angular velocity of the second motor 37 in the first embodiment. As shown in FIG. 6, the magnitude of the angular velocities at which the first and third motors 31z, 32z rotate the first and second rotating bodies 31a, 32a are the same, but the directions in which the first and third motors 31z, 32z rotate the first and second rotating bodies 31a, 32a are different from each other. As a result, the moment generated when the first motor 31z is driven and the moment generated when the third motor 32z is driven cancel each other out, suppressing the generation of moments around the Y axis and the Z axis. Similarly, the moments generated when the second and fourth motors 31y, 32y are driven also cancel each other out, suppressing the generation of moments around the Y axis. In other words, by providing the first and second gyro moment generating units 31, 32, the generation of moments around the Z axis and the Y axis that are generated when the first and third motors 31y, 32y and the second and fourth motors 31z, 32z are driven is suppressed.

[0032] Gyro moments JM1 and JM2 are generated when the first and second gyro moment generating units 31 and 32 are operating. The angle between the drive shafts of the first and third motors 31z and 32z and the Z axis is defined as α. The gyro moment JM1 can be decomposed into a θX gyro moment JM1X acting around the X axis and a θZ gyro moment JM1Z acting around the Z axis. The gyro moment JM2 can be similarly decomposed into a θX gyro moment JM2X and a θZ gyro moment JM2Z. The magnitudes of the respective moments are expressed as JM1X=JM1×cosα, JM2X=JM2×cosα, JM1Z=JM1×sinα, and JM2Z=JM2×sinα. Because gyro moments JM1 and JM2 have the same magnitude, θX gyro moments JM1X and θX gyro moments JM2X have the same magnitude but opposite directions, and therefore cancel each other out. Therefore, the magnitude of the moment generated by gyro moment generators 31 and 32 is JM1X+JM2X. Therefore, it is possible to generate a moment only about the X-axis, regardless of angle α.

[0033] The moment around the X-axis generated by the first and second gyro moment generating units 31 and 32 is expressed as (JM1+JM2)×cosα, and is maximum when the angle α is 0° (cosα=1). Therefore, it is desirable to control the posture of the first and second rotors 31a and 32a in the standby state by the second and fourth motors 31y and 32y so that the angle α is 0° when the magnitude of the stage moment generated when the linear motor 2 is driven is maximum. Also, when the angle α is 90° or −90°, the θX gyro moments JM1X and JM2X are 0, so no moment around the X-axis is generated. Therefore, the second and fourth motors 31y and 32y can be controlled so that α is greater than −90° and less than 90°.

[0034] Although an example in which two gyro moment generating units are provided has been described here as a specific example, three or more gyro moment generating units may be provided. In this case, the angular velocity of the motor that rotates the rotating body around the Y axis and the angular velocity of the motor that rotates the rotating body around the Z axis can each be controlled so that the moments generated around the Y axis and the Z axis are cancelled out. With this configuration, the size of each gyro moment generating unit can be reduced, improving the degree of freedom in designing the stage device.

[0035] Hereinafter, a stage device 600 of the third embodiment will be described with reference to Figs. 7 and 8. Matters not mentioned in the third embodiment may follow the first embodiment. Fig. 7 is a perspective view showing the configuration of a stage device 600 of the third embodiment. The third embodiment provides a stage device 600 that includes a plurality of gyro moment generating units 605, 606 and a plurality of linear motors 602, 603.

[0036] Stage device 600 may also include a stage 612, an X driving unit 604, and a Y driving unit 601. Stage 612 can be driven or positioned to an arbitrary target position by driving X driving unit 604 in the X direction and driving Y driving unit 601 in the Y direction.

[0037] Linear motors 602 and 603 may be provided as actuators for driving Y driving unit 601 in the Y direction. Linear motor 602 includes a mover 602b and a stator 602a. Linear motor 603 includes a mover 603b and a stator 603a. Movers 602b and 603b may be provided with gyro moment generating units 605 and 606, respectively. Gyro moment generating units 605 and 606 may have a configuration similar to that of gyro moment generating unit 3 of the first embodiment. Gyro moment generating units 605 and 606 may be referred to as first and second gyro moment generating units 605 and 606 in order to be separate from each other. Each of first and second gyro moment generating units 605 and 606 may be coupled to a corresponding one of movers 602b and 603b.

[0038] A stage moment acts on movers 602b, 603b by driving stage 612 with linear motors 602, 603. Control unit CNT controls first and second gyro moment generating units 605, 606 so that at least a portion of the stage moment is offset by the moments generated by first and second gyro moment generating units 605, 606.

[0039] The first gyro moment generating unit 605 may include a first rotating body 605a, a first gimbal 605b, a first motor 605z, a second gimbal 605c, and a second motor 605y. The first rotating body 605a, the first gimbal 605b, the first motor 605z, the second gimbal 605c, and the second motor 605y may have the same configurations as the rotating body 3a, the first gimbal 3b, the first motor 3z, the second gimbal 3c, and the second motor 3y of the first embodiment, respectively. The second gyro moment generating unit 606 may include a second rotating body 606a, a third gimbal 606b, a third motor 606z, a fourth gimbal 606c, and a fourth motor 606y. The second rotating body 606a, the third gimbal 606b, the third motor 606z, the fourth gimbal 606c, and the fourth motor 606 may have the same configurations as the rotating body 3a, the first gimbal 3b, the first motor 3z, the second gimbal 3c, and the second motor 3y in the first embodiment, respectively.

[0040] 8 is a schematic diagram showing how the stage 612 is driven in the Y-axis direction when the stage 612 is located in the positive direction of the X-axis compared to FIG. 7. When the stage 612 is located in the positive direction of the X-axis, the distance in the X-direction between the stage center of gravity 6SG and the thrust acting position of the linear motor 602 is smaller than the distance in the X-direction between the stage center of gravity 6SG and the thrust acting position of the linear motor 603. When the stage 612 is driven in the Y-direction in this state, the linear motors 602 and 603 generate thrusts AF2 and AF3 different from each other in order to suppress the moment around the Z-axis acting on the Y drive unit 601. Therefore, the magnitudes of the stage moments AM2 and AM3 around the X-axis generated by the distance in the Z-direction between the stage center of gravity 6SG and the acting position of the thrust AF2 and the positional deviation in the Z-direction between the stage center of gravity 6SG and the acting position of the thrust AF3 are also different from each other.

[0041] The second motor control unit 611 can control the angular velocity of the second motor 605y so that the gyro moment JM5 generated by the gyro moment generating unit 605 has the same magnitude as the stage moment AM2 in the opposite direction. The principle of generating the gyro moment and the method of calculating the angular velocity are the same as those in the first embodiment. Similarly, the second motor control unit 611 can control the angular velocity of the fourth motor 606y so that the gyro moment JM6 has the same magnitude as the stage moment AM3 in the opposite direction. This allows the moments around the X axis to be offset at the respective moment generating positions, and can be offset without generating a torsional moment in the Y driving unit 601. Therefore, it is possible to suppress vibration of the base 607 caused by the twisting of the Y driving unit 601.

[0042] A lithography apparatus to which a stage apparatus typified by the first to third embodiments is applied will be described below. The lithography apparatus is configured to transfer a pattern of an original onto a substrate, and the stage apparatus can be configured to align the original and the substrate. When the lithography apparatus is an exposure apparatus, the stage apparatus can be applied as a substrate stage apparatus, an original stage apparatus, or a substrate stage apparatus and an original stage apparatus. When the lithography apparatus is an imprint apparatus, the stage apparatus can be applied as a substrate stage apparatus.

[0043] 9 exemplarily illustrates the configuration of an exposure apparatus 800 of one embodiment. The exposure apparatus 800 may include, for example, an illumination optical system 801, an original stage device 802 that positions an original, a projection optical system 803, and a substrate stage device 804 that positions a substrate. The exposure apparatus 800 is configured to transfer the pattern of the original onto the substrate. The exposure apparatus 800 may be configured to transfer the pattern of the original onto the substrate by a step-and-repeat method or a step-and-scan method.

[0044] The illumination optical system 801 includes a light source unit and an illumination optical system, and may be configured to illuminate the original. The light source unit may include, for example, a laser. The laser may be an ArF excimer laser with a wavelength of about 193 nm, a KrF excimer laser with a wavelength of about 248 nm, or the like. The type of laser is not limited to an excimer laser, and may be, for example, a YAG laser, and the number of lasers is not limited. When a laser is used in the light source unit, it is preferable to use a light beam shaping optical system that shapes a parallel light beam from a laser light source into a desired beam shape, and an incoherent optical system that makes a coherent laser light beam incoherent. In addition, the light source that can be used in the light source unit is not limited to a laser, and one or more lamps such as a mercury lamp or a xenon lamp may also be used. In addition, the light source unit may include an EUV light source.

[0045] The projection optical system 803 can be an optical system consisting of only a plurality of lens elements, an optical system consisting of a plurality of lens elements and at least one concave mirror, an optical system consisting of a plurality of lens elements and at least one diffractive optical element, an all-mirror type optical system, or the like.

[0046] A stage apparatus as typified by the above-mentioned embodiments can be applied to at least one of the original stage apparatus 802 and the substrate stage apparatus 804. In the case of the step-and-scan method, the stage of the original stage apparatus 802 and the stage of the substrate stage apparatus 804 are driven synchronously. The exposure apparatus 800 can be used, for example, in the manufacture of semiconductor devices such as semiconductor integrated circuits, and devices on which fine patterns are formed, such as micromachines and thin-film magnetic heads.

[0047] An article manufacturing method for manufacturing an article using the above-mentioned lithography apparatus will be described below by way of example. The article manufacturing method may include a transfer step of transferring a pattern of a master onto a substrate using the above-mentioned lithography apparatus, and a processing step of processing the substrate that has been subjected to the transfer step to obtain an article.

[0048] When the lithography apparatus is an exposure apparatus, a substrate coated with a photosensitive material is used, and a pattern of the original may be transferred as a latent image to the photosensitive material of the substrate by a transfer process. The processing process may include a development process for converting the latent image into a physical pattern. The processing process may also include a process for processing (e.g., etching) the substrate using the physical pattern formed by the development process.

[0049] When the lithography apparatus is an imprint apparatus, in the transfer step, an imprint material is applied onto the substrate and a pattern of the master is transferred to the imprint material, and the processing step may include a step of processing (e.g., etching) the substrate using the pattern transferred to the imprint material.

[0050] The present specification and drawings include the following disclosure. (Item 1) Stage and an actuator that drives the stage and has a mover that moves together with the stage and a stator that generates a thrust on the mover; A gyro moment generating unit coupled to the movable element; a control unit that controls the gyro moment generating unit so that at least a part of a moment acting on the mover by driving the stage with the actuator is offset by a moment generated by the gyro moment generating unit; A stage device comprising: (Item 2) The gyro moment generating unit includes: a first gimbal that supports a rotating body so as to be rotatable around a second axis perpendicular to a first axis that is parallel to a direction in which the actuator drives the stage; A first motor that rotates the rotor around the second shaft; a second gimbal that supports the first gimbal rotatably around the first axis; a second motor that rotates the first gimbal around the first axis; 2. The stage device according to item 1, comprising: (Item 3) The control unit performs feedforward control of the second motor based on control information for controlling the actuator. 3. The stage apparatus according to item 2, (Item 4) The control information includes a thrust to be generated by the actuator. 4. The stage apparatus according to item 3, (Item 5) the control information includes a current supplied to the actuator; 4. The stage apparatus according to item 3, (Item 6) Further comprising a base plate and a drive unit coupled to the mover so as to move on the base plate, The stage moves on the base together with the drive unit. 6. The stage device according to claim 1, (Item 7) The gyro moment generating unit is coupled to an upper surface of the mover. 7. The stage apparatus according to item 6, (Item 8) The gyro moment generating unit is coupled to a side surface of the mover. 7. The stage apparatus according to item 6, (Item 9) The gyro moment generating portion is coupled to a lower surface of the mover. 7. The stage apparatus according to item 6, (Item 10) A plurality of gyro moment generating units including the gyro moment generating unit are provided, the plurality of gyro moment generating units are coupled to the mover, the control unit controls the plurality of gyro moment generating units so that at least a portion of a moment acting on the mover by driving the stage with the actuator is offset by a moment generated by the plurality of gyro moment generating units. 10. The stage device according to any one of items 1 to 9, (Item 11) the plurality of gyro moment generating units are aligned along a direction in which the actuator drives the stage; 11. The stage apparatus according to item 10, (Item 12) Further comprising a second gyro moment generating unit coupled to the movable element, the gyro moment generating unit and the second gyro moment generating unit are aligned along a direction in which the actuator drives the stage, The second gyro moment generating unit includes: a third gimbal that supports the second rotor rotatably around the second axis; a fixed third motor that rotates the second rotor around the second axis; a fourth gimbal that supports the third gimbal rotatably around the first axis; a fourth motor that rotates the fourth gimbal around the first axis; a direction in which the first motor rotates the rotating body in the gyro moment generating unit and a direction in which the third motor rotates the second rotating body in the second gyro moment generating unit are opposite to each other, A direction in which the second motor rotates the rotating body in the gyro moment generating unit and a direction in which the fourth motor rotates the second rotating body in the second gyro moment generating unit are opposite to each other. 3. The stage apparatus according to item 2, (Item 13) a plurality of gyro moment generating units including the gyro moment generating unit, and a plurality of actuators including the actuator; each of the plurality of actuators has a mover that moves together with the stage and a stator that generates a thrust force that moves the mover; Each of the plurality of gyro moment generating units is coupled to the mover of a corresponding one of the plurality of actuators. 10. The stage device according to any one of items 1 to 9, (Item 14) the control unit feedforward controls each of the plurality of gyro moment generating units based on control information for controlling a corresponding actuator among the plurality of actuators. 14. The stage apparatus according to item 13, (Item 15) the control unit activates the gyro moment generating unit before the actuator starts driving the stage. 15. The stage device according to any one of items 1 to 14, (Item 16) A lithography apparatus for transferring a pattern of an original onto a substrate, comprising: 16. A stage apparatus according to any one of claims 1 to 15, configured to align the master and the substrate. 1. A lithography apparatus comprising: (Item 17) A transfer step of transferring a pattern of a master to a substrate using the lithography apparatus according to item 16; a processing step of processing the substrate that has been subjected to the transfer step to obtain an article; A method for manufacturing an article, comprising:

[0051] The invention is not limited to the above-described embodiments, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0052] 100, 200, 600: stage device, 11: stage, 2b: mover, 2a: stator, 2: linear motor (actuator), 3: gyro moment generating unit, CNT: control unit, 3a: rotating body, 3b: first gimbal, 3z: first motor, 3c: second gimbal, 37: second motor

Claims

1. Stage and an actuator that drives the stage and has a mover that moves together with the stage and a stator that generates a thrust on the mover; A gyro moment generating unit coupled to the movable element; a control unit that controls the gyro moment generating unit so that at least a part of a moment acting on the mover by driving the stage with the actuator is offset by a moment generated by the gyro moment generating unit; A stage device comprising:

2. The gyro moment generating unit includes: a first gimbal that supports a rotating body so as to be rotatable around a second axis perpendicular to a first axis that is parallel to a direction in which the actuator drives the stage; A first motor that rotates the rotor around the second shaft; a second gimbal supporting the first gimbal rotatably around the first axis; a second motor that rotates the first gimbal about the first axis; 2. The stage apparatus of claim 1, further comprising:

3. The control unit performs feedforward control of the second motor based on control information for controlling the actuator.

3. The stage apparatus according to claim 2.

4. The control information includes a thrust to be generated by the actuator.

4. The stage apparatus according to claim 3.

5. the control information includes a current supplied to the actuator; 4. The stage apparatus according to claim 3.

6. Further comprising a base plate and a drive unit coupled to the mover so as to move on the base plate, The stage moves on the base together with the drive unit.

2. The stage apparatus according to claim 1 .

7. The gyro moment generating unit is coupled to an upper surface of the mover.

7. The stage apparatus according to claim 6.

8. The gyro moment generating unit is coupled to a side surface of the mover.

7. The stage apparatus according to claim 6.

9. The gyro moment generating portion is coupled to a lower surface of the mover.

7. The stage apparatus according to claim 6.

10. A plurality of gyro moment generating units including the gyro moment generating unit are provided, the plurality of gyro moment generating units are coupled to the mover, the control unit controls the plurality of gyro moment generating units so that at least a portion of a moment acting on the mover by driving the stage with the actuator is offset by a moment generated by the plurality of gyro moment generating units.

2. The stage apparatus according to claim 1 .

11. the plurality of gyro moment generating units are aligned along a direction in which the actuator drives the stage; 11. The stage apparatus according to claim 10.

12. Further comprising a second gyro moment generating unit coupled to the mover, the gyro moment generating unit and the second gyro moment generating unit are aligned along a direction in which the actuator drives the stage, The second gyro moment generating unit includes: a third gimbal that supports the second rotor rotatably around the second axis; a fixed third motor for rotating the second rotor around the second axis; a fourth gimbal that supports the third gimbal rotatably around the first axis; a fourth motor that rotates the fourth gimbal around the first axis; a direction in which the first motor rotates the rotating body in the gyro moment generating unit and a direction in which the third motor rotates the second rotating body in the second gyro moment generating unit are opposite to each other, a direction in which the second motor rotates the rotating body in the gyro moment generating unit and a direction in which the fourth motor rotates the second rotating body in the second gyro moment generating unit are opposite to each other.

3. The stage apparatus according to claim 2.

13. a plurality of gyro moment generating units including the gyro moment generating unit, and a plurality of actuators including the actuator; each of the plurality of actuators has a mover that moves together with the stage and a stator that generates a thrust force on the mover; Each of the plurality of gyro moment generating units is coupled to the mover of a corresponding one of the plurality of actuators.

2. The stage apparatus according to claim 1 .

14. the control unit feedforward controls each of the plurality of gyro moment generating units based on control information for controlling a corresponding actuator among the plurality of actuators.

14. The stage apparatus according to claim 13.

15. the control unit activates the gyro moment generating unit before the actuator starts driving the stage.

2. The stage apparatus according to claim 1 .

16. A lithography apparatus for transferring a pattern of an original onto a substrate, comprising: a stage apparatus according to any one of claims 1 to 15 configured to align the master and the substrate; 1. A lithography apparatus comprising:

17. a transfer step of transferring a pattern of an original onto a substrate by using the lithography apparatus according to claim 16; a processing step of processing the substrate that has been subjected to the transfer step to obtain an article; A method for manufacturing an article, comprising:

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