Plasma irradiation device

Abstract

To obtain a plasma irradiation device that can irradiate an object with plasma, while preventing entry of liquid into a plasma injection nozzle.SOLUTION: A plasma irradiation device 100 of the present invention is for irradiating an object with active gas including both or any one of plasma and an active species generated by the plasma, and the plasma irradiation device comprises an irradiation nozzle 110 that includes an electrode for generating plasma in supplied gas, and a cover member 120 that covers the irradiation nozzle. The cover member 120 includes, at one end 124a, a closing member 123 that blocks liquid present around the object from entering an exhaust port 110b of the irradiation nozzle 110. Plasma weaker than the plasma generated inside the cover member 120 is generated through the closing member 123.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a plasma irradiation device, and more particularly to a structure in which a plasma weaker than the plasma generated inside a cover member surrounding an irradiation nozzle is generated via a closing member that blocks plasma irradiation to an object. [Background technology]

[0002] In recent years, plasma has been used for pretreatment and sterilization in various processes, and in the cosmetic field for skin activation treatment.

[0003] Furthermore, Patent Document 1 (paragraph 0002) states that in such plasma processing, the active species in the plasma rapidly decrease as the distance from the plasma generation unit to the target object increases, and the processing effect decreases, and therefore, when processing the target object with plasma, it is preferable to bring the nozzle spraying the plasma closer to the surface of the target object. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2018-32488 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, when the plasma injection nozzle is brought close to the target object, liquid present on the surface of the target object - for example, in the case of beauty treatments, liquids such as beauty serums or pack solutions - can flow back from the nozzle opening into the inside of the plasma irradiation device, causing problems such as abnormal discharge in the plasma generation section and damage to the device.

[0006] The present invention aims to provide a plasma irradiation device that can irradiate an object with plasma while preventing liquid from flowing into the device from the plasma spray nozzle even when the plasma spray nozzle is brought close to the object. [Means for solving the problem]

[0007] The present invention provides the following:

[0008] (Item 1) A plasma irradiation device for irradiating an object with an active gas containing plasma or both or either one of active species generated by the plasma, an irradiation nozzle having an electrode for generating plasma of a supplied gas; A cover member for covering the irradiation nozzle; Including, the cover member has a closing member at one end thereof for blocking liquid present around the object from entering the nozzle of the irradiation nozzle; The plasma irradiation device is configured to generate a plasma that is weaker than the plasma generated inside the cover member through the closing member. (Item 2) The cover member has a passage connecting the inside and the outside of the cover member, 2. The plasma irradiation device according to item 1, which is configured to prevent liquid accumulated in the passage from the outside of the cover member from entering the inside of the cover member.

[0009] (Item 3) The cover member includes a first cylindrical body and a second cylindrical body disposed inside the first cylindrical body, The closing member is disposed at one end of the second cylindrical body, 3. The plasma irradiation device according to item 2, wherein the passage is formed in a gap between the first cylindrical body and the second cylindrical body. (Item 4) Item 4. The plasma irradiation device according to item 3, wherein the other end of the second cylindrical body is disposed on the base end side of the closing member or the injection port of the irradiation nozzle. (Item 5) In the passageway 3. The plasma irradiation device according to item 2, further comprising a discharge means for sucking and discharging the liquid flowing through the passage or the liquid around the closing member. (Item 6) 2. The plasma irradiation device according to item 1, wherein the voltage applied to the electrode is controllable depending on the thickness of the closing member. (Item 7) The closing member includes a dielectric material and has a thickness of about 0.01 mm to about 2 mm. 2. The plasma irradiation device according to item 1, wherein the voltage applied to the electrodes is about 500V to about 20,000V.

[0010] (Item 8) Further, a light irradiation means is provided, 2. The plasma irradiation device according to item 1, wherein the closing member is configured to be transparent to light from the light irradiation means. (Item 9) Item 9. The plasma irradiation device according to item 8, wherein the light irradiation means has a light source that outputs the light, and a reflecting member that reflects the outputted light toward the plasma irradiation area. (Item 10) Item 10. The plasma irradiation device according to item 9, wherein the reflecting member constitutes a part of the cover member.

[0011] (Item 11) Item 10. The plasma irradiation device according to item 9, wherein the reflecting member is a concave mirror. (Item 12) 10. The plasma irradiation device according to item 9, wherein the light source outputs at least one of infrared light, ultraviolet light, and visible light. Effect of the Invention

[0012] According to the present invention, it is possible to obtain a plasma irradiation device capable of irradiating a target object with plasma while preventing intrusion of liquid into the plasma jet nozzle. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a diagram showing a plasma irradiation device 100 according to a first embodiment of the present invention. [Diagram 2] FIG. 2 is a diagram showing a plasma irradiation apparatus as a comparative example to be compared with the plasma irradiation apparatus 100 of the first embodiment shown in FIG. [Diagram 3] FIG. 2 is a diagram showing a plasma irradiation device 200 according to a second embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] The present invention will be described below.Unless otherwise specified, it should be understood that the terms used in this specification are used in the sense that they are commonly used in the field.Therefore, unless otherwise defined, all technical terms and scientific and technical terms used in this specification have the same meaning as those commonly understood by those skilled in the art to which this invention belongs.In the case of conflict, this specification (including definitions) shall prevail.

[0015] In this specification, the term "about" refers to a range of ±10% of the subsequent number.

[0016] The present invention aims to provide a plasma irradiation device capable of irradiating a target with plasma while preventing liquid from entering the plasma jet nozzle even when the plasma jet nozzle is brought close to the target, A plasma irradiation device for irradiating an object with an active gas containing plasma or an active species generated by the plasma, comprising: an irradiation nozzle having an electrode for generating plasma of a supplied gas; A cover member for covering the irradiation nozzle; Including, a closing member that blocks liquid present around the object from entering the irradiation nozzle; The above-mentioned problem is solved by providing a plasma irradiation device configured to generate a weak plasma through a closing member relative to the plasma generated inside the cover member. Here, the weak plasma can be said to be a plasma that is safe for the body and can suppress damage to skin and hair.

[0017] Therefore, the plasma irradiation device of the present invention is not particularly limited as long as it prevents liquid present around the target object from entering the irradiation nozzle and generates a plasma that is weaker than the plasma generated inside the nozzle via a closing member.

[0018] The gas to be supplied can be selected according to the purpose of the plasma processing. For example, argon gas, hydrogen gas, helium gas, etc. are used. The activated species generated also change depending on the type of plasma gas (gas species).

[0019] The shape, material, etc. of the irradiation nozzle may be arbitrary. For example, the irradiation nozzle is cylindrical, but is not limited thereto. It may be conical or elliptical in cross section. The material of the irradiation nozzle may be arbitrary. For example, it is preferable to use a material such as tungsten, titanium, or stainless steel, which is less susceptible to corrosion than iron, aluminum, etc.

[0020] The shape and material of the electrode may be any. For example, the shape may be a plate-like body, a cylindrical body such as a cylinder, a comb-shaped body, or the like. However, the present invention is not limited to this. The material of the electrode may be any. For example, it is preferable to use a material such as tungsten, titanium, or stainless steel, which is less likely to corrode than iron or aluminum. The shape and material of the cover member may be any as long as it covers the irradiation nozzle. For example, the cover member is a cylindrical body. The cylindrical body may be an approximately cylindrical body, an approximately conical body or a polygonal pyramid, or may have an elliptical cross section. The cover member may be one cylindrical body, or may be composed of two or more cylindrical bodies. In one embodiment, the cover member is composed of a first cylindrical body and a second cylindrical body arranged inside the first cylindrical body. With this configuration, it is possible to form the gap between the first cylindrical body and the second cylindrical body as a passage for accumulating the liquid present outside the cover member (or around the closing member). The cover member may also have a passageway connecting the outside and the inside of the cover member. Preferably, the cover member is configured so that liquid flowing from the outside of the cover member into the passageway or liquid present around the closing member does not enter the inside of the cover member. A method for preventing the liquid flowing through the passage from the outside of the cover member or the liquid present around the closing member from entering the inside of the cover member can be achieved by providing a discharge means for sucking the liquid flowing through the passage or the liquid around the closing member and discharging it to the outside. Also, by configuring the cover member from a first cylindrical body and a second cylindrical body arranged inside the first cylindrical body, the gap formed between the first cylindrical body and the second cylindrical body is formed as a passage, and the other end of the second cylindrical body is arranged on the base end side of the injection port of the irradiation nozzle. With such a configuration, compared to a conventional closing member having a through hole, even if the liquid present around the closing member or outside the cover member (the surface of the target in the actual processing situation) enters the passage, it is difficult for it to reach the inside of the cover member, so it is possible to suppress the intrusion of the liquid into the inside of the cover member. Also, this passage can have the function of delivering active species generated by plasma discharge from inside the cover member to the surface of the target. The material of the closing member may be any material as long as it can block the liquid present around the object from entering the nozzle of the irradiation nozzle. For example, it may be metal or wood, or may be a dielectric material such as ceramic or glass. Preferably, it is a dielectric material such as glass that has an excellent effect of leaking the electric field to the outside.

[0021] The thickness of the closing member may be any thickness. However, since the thicker the closing member, the higher the voltage to be applied to the electrodes must be, it is preferable to make the thickness thin. For example, the thickness of the closing member is about 0.01 mm to about 2 mm, and in this case, the voltage to be applied to the electrodes is about 500 V to about 20,000 V. The waveform of the applied voltage is preferably AC or pulsed. The frequency is, for example, about 50 Hz to about 50,000 Hz.

[0022] Furthermore, the plasma irradiation device may have a light irradiation means, and in this case, it is preferable that the closing member is configured to be able to transmit light from the light irradiation means, because the light from the light irradiation means reaches the target object.

[0023] Although the configuration of the light irradiation means is not limited, it is preferable that the light irradiation means includes a light source and a reflecting member. Here, the light source outputs light, and the reflecting member reflects the light output from the light source toward the plasma irradiation area. The wavelength of the light output from the light source is appropriately set depending on the purpose of the treatment of the object by plasma irradiation. For example, the light source outputs at least one of infrared light, ultraviolet light, and visible light. The reflective member may be part of the cover member, i.e., the inner one of the two cylindrical bodies that make up the cover member may have the function of the reflective member, or it may be separate from the cover member, for example, separate from the cylindrical bodies that make up the cover member.

[0024] The specific configuration of the reflecting member is not limited, and may be a flat mirror, a convex mirror, or a concave mirror. A concave mirror is preferable. When the reflecting member is a concave mirror, it becomes possible to focus the light from the light source on the light irradiation area of ​​the object.

[0025] moreover, As described above, the plasma irradiation device of the present invention is not particularly limited as long as it prevents liquid present around the target object from entering the irradiation nozzle and generates a plasma that is weaker than the plasma generated inside the cover member outside the cover member via a closing member that blocks the plasma irradiation. In the following embodiment 1, however, an example of the plasma irradiation device is one in which the cover member has a first cylindrical body and a second cylindrical body disposed inside the first cylindrical body, and the gap between the two cylindrical bodies serves as a passage connecting the internal and external regions of the cover member.

[0026] In the second embodiment, in addition to the configuration of the first embodiment, a light irradiation means for irradiating light onto the region of the object to be irradiated with plasma is provided.

[0027] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0028] (Embodiment 1) FIG. 1 is a diagram showing a plasma irradiation device 100 according to a first embodiment of the present invention.

[0029] This plasma irradiation device 100 generates a weak plasma Wp outside the cover member 120, which is weaker than the plasma (strong plasma Sp) generated inside the cover member 120, via a closing member 123 that blocks the liquid present around the target object from entering the nozzle of the irradiation nozzle, and will be described in detail below.

[0030] This plasma irradiation device 100 can irradiate the target Ta with an active gas containing both or either one of the plasma of the plasma gas or the active species (plasma of components in the air) generated by the plasma by turning the plasma gas Pg supplied from the outside of the cover member 120 to the inside of the cover member 120, but here, the plasma irradiation device 100 irradiates the target Ta with the plasma of the plasma gas Pg and the active species formed by this plasma. The plasma gas is a gas for generating plasma, and argon gas, hydrogen gas, helium gas, etc. are used, and changing the type (gas species) of the plasma gas also changes the active species.

[0031] This plasma irradiation device 100 includes an irradiation nozzle 110 equipped with an electrode for generating plasma of a supplied gas (plasmatized gas) Pg, a cover member 120 for covering the irradiation nozzle 110, and a high-voltage AC power supply 110a for applying a high AC voltage to the irradiation nozzle 110. Here, one end of the high-voltage AC power supply 110a is connected to the electrode (irradiation nozzle) 110, and the other end of the high-voltage AC power supply 110a is grounded, and the target object Ta is also grounded.

[0032] The cover member 120 is provided at one end with a closing member 123 without a through hole, which blocks the liquid present around the object from entering the nozzle 110b of the irradiation nozzle. The closing member 123 is made of a dielectric material such as glass, and by having the closing member 123, it is possible to suppress the liquid present around the object from entering the nozzle 110b of the irradiation nozzle. The closing member 123 also blocks the strong plasma Sp ejected from the irradiation nozzle 110 from being directly irradiated onto the object Ta. However, a weak plasma Wp is generated outside the cover member 120 through the closing member 123, which is weaker than the plasma (strong plasma) Sp generated inside the cover member 120. That is, electric charge is accumulated in the dielectric material by the internal discharge, and the electric field created by the electric charge also generates an electric discharge outside.

[0033] Moreover, the cover member 120 includes a first cylindrical body 121 and a second cylindrical body 122 arranged inside the first cylindrical body 121, and a closing member 123 made of a dielectric material such as the above-mentioned glass is fitted into an opening 120a at one end of the inner second cylindrical body 122. Here, the first cylindrical body 121 and the second cylindrical body 122 have an inverted truncated cone shape, and the radius of the first cylindrical body 121 is larger than the radius of the second cylindrical body 122.

[0034] In addition, the passage 124 is formed as an inverted truncated cone-shaped gap extending in the vertical direction between the first cylindrical body 121 and the second cylindrical body 122, and the length of the passage 124 is longer than the length (thickness) of the closing member 123.

[0035] In addition, as a configuration for blocking the liquid present on the surface of the object Ta from penetrating into the cover member 120, a configuration for removing the liquid present on the surface of the object Ta may be used instead of the configuration for making the length of the passage 124 longer than the length (thickness) of the closing member 123 as described above.

[0036] For example, the cover member 120 may have a passage 124 connecting the inside and outside of the cover member 120, and a discharge means (not shown) that sucks and discharges liquid on the surface of the object via the passage 124. In this case, the discharge means is, for example, a suction pump.

[0037] Furthermore, in this plasma irradiation device 100, the thicker the closing member 123 of the cover member 120 is, the higher the voltage applied to the electrode, which is the irradiation nozzle 110, can be controlled. For example, when the thickness of the closing member 123 is about 0.1 mm, the voltage applied to the electrode (irradiation nozzle 110) is about 5000 V. However, the thickness of the closing member is not limited to this and may be about 0 mm to about ▽ mm, in which case the voltage applied to the electrode is adjusted to about 0 V to about ▽ V.

[0038] Next, the operation of the plasma irradiation device 100 will be described.

[0039] With the plasma gas Pg introduced into the cover member 120, when a high AC voltage is applied from the high voltage AC power supply 110a to the electrode which is the irradiation nozzle 110 and the cover member 120 is brought close to the object Ta so that the closing member 123 at the tip of the cover member 120 faces the object Ta, the plasma gas Pg is turned into plasma between the irradiation nozzle 110 and the closing member 123, and a plasma discharge occurs. In other words, a strong plasma Sp is sprayed from the irradiation nozzle 110. In the plasma irradiation device 100 of the present embodiment 1 having such a configuration, even if liquid such as a pack liquid or a beauty essence is present on the surface of the object (e.g., skin) Ta, the presence of the closing member 110 without an opening can prevent such liquid from penetrating into the cover member 120. As a result, it is possible to prevent abnormal discharge at the irradiation nozzle 110 and further damage to the plasma irradiation device 100.

[0040] In addition, the effect of the change in polarity of the electric field in the strong plasma Sp due to the high AC voltage appears outside the cover member 120 through the closure member 123, thereby generating a weak plasma Wp between the closure member 123 of the cover member 120 and the object Ta, and the generated weak plasma Wp can be irradiated toward the object Ta as a plasma that can suppress damage to the skin and hair.

[0041] In addition, gas components (active species) Af in the atmosphere activated by the strong discharge caused by the strong plasma Sp generated within the cover member 120 pass through a passage 124 formed in the gap between the two cylindrical bodies 121 and 122, and are released from one end 124a adjacent to the closing member 123 located at the tip of the cover member 120, making it possible to irradiate the periphery of the irradiation area of ​​the target object Ta to which the weak plasma Wp is irradiated.

[0042] This point will be explained in detail using a comparative example.

[0043] Fig. 2 is a diagram showing a plasma irradiation device 10 as a comparative example to be compared with the plasma irradiation device 100 of the embodiment 1 shown in Fig. 1. In Fig. 2, the same reference numerals as in Fig. 1 denote the same components as those in the embodiment 1.

[0044] In the plasma irradiation device 10 of the comparative example, the cover member 12 covering the irradiation nozzle 110 is composed of a single inverted truncated cone shaped cylinder, and a plate-like body 13 made of a dielectric or metal with multiple through holes 13a is attached to the opening 20a at the tip of the cover member 12. This plate-like body 13 corresponds to the closing member 123 in the plasma irradiation device 100 of the first embodiment, and the through holes 13a allow the strong plasma Sp and active species Af generated inside the cover member 120 to pass through the cover member 120 to the outside. In this plasma irradiation device 10, when the cover member 12 is pressed against the target object Ta, the liquid Wb, such as a beauty serum or pack liquid, present on the surface of the target object Ta may flow back into the cover member 12 through the through hole 13a formed in the plate-like body 13 at the tip of the cover member 120, which may cause an abnormal discharge or even damage to the device.

[0045] In contrast, in the plasma irradiation device 100 of this embodiment 1, the opening 120a at the tip of the cover member 120 is blocked by a closing member 123 without a hole. Therefore, even if the cover member 120 is pressed against the object Ta, the liquid present on the surface of the object Ta will not penetrate into the inside of the cover member 120 through the opening 120a at the tip of the cover member 120.

[0046] In the plasma irradiation device 100 of the first embodiment, a passage 124 is formed along the peripheral wall of the cover member 120 to connect the inside and the outside of the cover member 120, and the length of the passage 124, that is, the distance from one end side (one end of the second cylindrical body 122) 124a to the other end side (the other end of the second cylindrical body 122) 124b of the passage 124, is configured to be longer than the length (thickness) of the closing member 123. Alternatively, the height of the other end side opening (the inner side opening of the other end cover member 120 of the second cylindrical body 122) 124b is arranged at a position higher than the height (thickness) of the closing member 123 or the ejection port 110b of the irradiation nozzle. When liquid infiltrates into the passage 124 in this embodiment 1, there is less risk of the liquid infiltrating into the inside of the cover member 120, as compared with the case where liquid infiltrates into the through-hole 13a formed in the plate-like body 13 of the comparative example, which corresponds to the closing member 123. Therefore, it is possible to suppress the occurrence of abnormal discharge and damage to the device due to liquid flowing into the cover member 120.

[0047] In addition, in the plasma irradiation device 10 of the comparative example, the plasma Sp ejected from the nozzle 110b of the irradiation nozzle 110 inside the cover member 12 exits the cover member 12 through the through hole 13a of the plate-like body 13 at the tip of the cover member 12, and is irradiated to the object Ta facing the plate-like body 13. At the same time, the activated species Af of the gas in the atmosphere generated by the influence of the plasma Sp are also irradiated to the object Ta through the through hole 13a of the plate-like body 13. The plasma Sp ejected from the irradiation nozzle may be too strong to be irradiated to objects such as skin and hair, and may cause damage to the skin, hair, etc.

[0048] In contrast, in the plasma irradiation device 100 of embodiment 1, it is possible to suppress damage to skin, hair, etc. by irradiating the target object with plasma that is weaker than the plasma ejected from the injection nozzle 110 generated through the closing member 110.

[0049] In addition, the plasma irradiation device 100 of embodiment 1 may have a function of treating the object Ta with light such as infrared light or ultraviolet light in addition to the function of irradiating the object Ta with plasma. A plasma irradiation device equipped with such a function will be described in the following embodiment 2.

[0050] (Embodiment 2) FIG. 3 is a diagram showing a plasma irradiation device 200 according to a second embodiment of the present invention.

[0051] The plasma irradiation device 200 of the second embodiment includes, in addition to the configuration of the plasma irradiation device 100 of the first embodiment, a light irradiation means 230 that irradiates light L onto a region (irradiation region) Per of the object Ta that is irradiated with plasma.

[0052] Details are provided below.

[0053] In this plasma irradiation device 200, the closing member 123 is configured to be able to transmit the light L from the light irradiation means 230, and is made of, for example, glass.

[0054] The light irradiation means 230 includes a light source 231 that outputs light, and a reflecting member 232 that reflects the output light toward the plasma irradiation region Per.

[0055] Here, the reflecting member 232 is a concave mirror provided inside the second cylindrical body 122 of the cover member 120. Furthermore, the light source 231 is configured to output at least one of infrared light, ultraviolet light, and visible light.

[0056] For example, when the light source 231 outputs infrared rays, a thermal effect is obtained that warms the plasma irradiated region Per of the object Ta, such as the skin.

[0057] When the light source 231 outputs ultraviolet light, in combination with plasma irradiation, a sterilizing effect is obtained that sterilizes the plasma irradiated region Per of the target object Ta, such as skin.

[0058] When the light source 231 outputs visible light, an illumination effect is obtained that illuminates the plasma irradiated region Per of the object Ta, such as the skin.

[0059] Furthermore, the reflecting member 232 is not limited to a concave mirror, and may be a flat mirror or a convex mirror depending on the application of the light irradiation means 230. However, if there is no need to collect the light emitted from the light source 231, the reflecting member 232 may be a flat mirror or a convex mirror, and if there is a need to diffuse the light emitted from the light source 231, it is preferable that the reflecting member 232 be a convex mirror.

[0060] As described above, the present invention has been illustrated using the preferred embodiment of the present invention, but the present invention should not be interpreted as being limited to this embodiment. It is understood that the scope of the present invention should be interpreted only by the claims. It is understood that a person skilled in the art can implement an equivalent scope based on the description of the present invention and technical common sense from the description of the specific preferred embodiment of the present invention. It is understood that the contents of the documents cited in this specification should be incorporated by reference to this specification as if the contents themselves were specifically described in this specification. [Industrial Applicability]

[0061] INDUSTRIAL APPLICABILITY The present invention is useful since it can provide a plasma irradiation device capable of irradiating a target with plasma while preventing intrusion of liquid into the plasma spray nozzle. [Explanation of symbols]

[0062] 10, 100, 200 Plasma irradiation device 110 Irradiation nozzle 110a high voltage ac power supply 110b spout 12, 120 Cover member 120a opening 121 First cylindrical body 122 Second cylindrical body 13, 123 Closure member 13a Through hole Aisle 124 124a One end of the passage 124b Other end of the passage 230 Light irradiation means 231 Light source 232 Reflective material Af Flow of reactive species Ler light irradiation area Sp Plasma Ta Object Wb Liquid reflux Wp Weak plasma

Claims

1. A plasma irradiation device for irradiating an object with an active gas containing plasma or both or either one of active species generated by the plasma, an irradiation nozzle having an electrode for generating plasma of a supplied gas; A cover member for covering the irradiation nozzle; Including, the cover member has a closing member at one end thereof for blocking liquid present around the object from entering the nozzle of the irradiation nozzle; The plasma irradiation device is configured to generate a plasma that is weaker than the plasma generated inside the cover member through the closing member.

2. The cover member has a passage connecting the inside and the outside of the cover member, The plasma irradiation device according to claim 1 , which is configured to prevent liquid accumulated in the passage from the outside of the cover member from entering the inside of the cover member.

3. The cover member includes a first cylindrical body and a second cylindrical body disposed inside the first cylindrical body, The closing member is disposed at one end of the second cylindrical body, The plasma irradiation device according to claim 2 , wherein the passage is formed in a gap between the first cylindrical body and the second cylindrical body.

4. The plasma irradiation device according to claim 3 , wherein the other end of the second cylindrical body is disposed closer to a base end than the closing member or the injection port of the irradiation nozzle.

5. In the passageway 3. The plasma irradiation device according to claim 2, further comprising a discharge means for sucking and discharging the liquid flowing through the passage or the liquid around the closing member.

6. The plasma irradiation device according to claim 1 , wherein the voltage applied to the electrode is controllable in accordance with a thickness of the closing member.

7. the closing member comprises a dielectric material and has a thickness of about 0.01 mm to about 2 mm; 2. The plasma irradiation device according to claim 1, wherein the voltage applied to the electrodes is about 500V to about 20,000V.

8. Further, a light irradiation means is provided, The plasma irradiation device according to claim 1 , wherein the closing member is configured to be able to transmit light from the light irradiation means.

9. 9. The plasma irradiation device according to claim 8, wherein the light irradiation means comprises a light source that outputs the light, and a reflecting member that reflects the output light toward the plasma irradiation area.

10. The plasma irradiation device according to claim 9 , wherein the reflecting member constitutes a part of the cover member.

11. The plasma irradiation device according to claim 9 , wherein the reflecting member is a concave mirror.

12. The plasma irradiation device according to claim 9 , wherein the light source outputs at least one of infrared light, ultraviolet light, and visible light.

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