Composite valve device and temperature control device using the same

Abstract

To provide a composite valve device that, as one valve device, can exhibit functions corresponding to a plurality of valve devices that perform distribution or mixing of fluid.SOLUTION: A composite valve device comprises: a plurality of mutually independent circulation ports; a fixed-side valve body that comprises dividing / mixing circulation ports, at least two each of which are provided corresponding to each of the circulation ports and through which fluid that flows through the circulation ports flows so as to be divided or mixed; and a movable valve body that is disposed so as to be movable while adhering to the fixed-side valve body and that has a plurality of variable communication paths that allow communication between the circulation ports and the at least two dividing / mixing circulation ports corresponding thereto with variable dividing / mixing ratios of the fluid. The composite valve device functions as a plurality of valve devices simultaneously.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a composite valve device and a temperature control device using the same. [Background technology]

[0002] 2. Description of the Related Art Conventionally, the applicant of the present invention has already proposed techniques relating to valve devices such as three-way valves and temperature control devices using the same, such as those disclosed in Patent Documents 1 and 2.

[0003] Patent Document 1 discloses a valve body having a valve seat consisting of a cylindrical cavity in which a first valve port having a rectangular cross section through which a first fluid flows and a second valve port having a rectangular cross section through which a second fluid flows; a valve element which is rotatably disposed within the valve seat of the valve body so as to switch the first valve port from a closed state to an open state and at the same time switch the second valve port from an open state to a closed state, the valve element being formed in a semi-cylindrical shape having a predetermined central angle and having both end faces along the circumferential direction formed in a curved shape; and a drive means for rotationally driving the valve element.

[0004] Patent Document 2 discloses a temperature control system including a first supply means for supplying a low-temperature fluid adjusted to a predetermined first temperature on the low-temperature side, a second supply means for supplying a high-temperature fluid adjusted to a predetermined second temperature on the high-temperature side, a first flow-control three-way valve for mixing the low-temperature fluid supplied from the first supply means and the high-temperature fluid supplied from the second supply means while controlling the flow rates of only the low-temperature fluid and the high-temperature fluid, and supplying the resulting mixture to a temperature control target, a second flow-control three-way valve for distributing the temperature-control fluid that has circulated through the temperature control target to only the first supply means and the second supply means while controlling the flow rates, and a temperature control system for distributing the temperature-control fluid that has circulated through the temperature control target to only the first supply means and the second supply means. a third flow rate control three-way valve that controls the flow rate of both the temperature control fluid circulating through the object to be temperature controlled and distributed to the first supply means by the second flow rate control three-way valve and the low-temperature side fluid that is not supplied from the first supply means to the first flow rate control three-way valve and returns to the first supply means, and a fourth flow rate control three-way valve that controls the flow rate of both the temperature control fluid circulating through the object to be temperature controlled and distributed to the second supply means by the second flow rate control three-way valve and the high-temperature side fluid that is not supplied from the second supply means to the first flow rate control three-way valve and returns to the second supply means. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 6104443 [Patent Document 2] Patent No. 6990058 Summary of the Invention [Problem to be solved by the invention]

[0006] An object of the present invention is to provide a composite valve device capable of fulfilling the functions corresponding to a plurality of valve devices that distribute and mix fluids with one valve device. [Means for solving the problem]

[0007] The invention described in claim 1 includes a fixed valve body having a plurality of flow ports independent of each other, at least two of which are provided corresponding to each of the flow ports, and through which fluids flowing through each of the flow ports are branched or mixed and flow; a movable valve body arranged in close contact with the fixed valve body so as to be movable, the movable valve body having a plurality of variable communication passages for connecting each of the flow ports to the at least two corresponding branching / mixing flow ports in a variable branching / mixing ratio of the fluid; and a composite valve device that functions as a plurality of valve devices simultaneously.

[0008] The invention described in claim 2 is characterized in that the fixed side valve body is a fixed disk formed in a flat circular shape, the plurality of flow ports are arranged along a circumferential direction on an inner peripheral side of the fixed disk, The combined valve device according to claim 1, wherein the branching / mixing flow ports, at least two of which are provided corresponding to each of the flow ports, are disposed on the outer circumferential side of the corresponding flow ports of the fixed disk in the radial direction.

[0009] The invention described in claim 3 is the combined valve device according to claim 2, wherein the plurality of circulation ports are arranged at N equal positions along the circumferential direction of the fixed disk, where N is the number of the circulation ports.

[0010] The invention described in claim 4 is the combined valve device described in claim 2, wherein the branching / mixing flow ports, at least two of which are provided corresponding to each of the flow ports, are arranged adjacent to each other along the circumferential direction of the fixed disk.

[0011] The invention described in claim 5 is the combined valve device described in claim 2, in which the branching / mixing flow ports, at least two of which are provided corresponding to each of the flow ports, are arranged at intervals along the circumferential direction of the fixed disk.

[0012] The invention described in claim 6 is characterized in that the movable valve body is a movable disk having a flat circular shape and arranged rotatably in close contact with the fixed valve body, 2. The combined valve device according to claim 1, wherein the plurality of variable communication passages are arranged apart from one another along a circumferential direction of the movable disc.

[0013] The invention recited in claim 7 is the combined valve device recited in claim 6, wherein each of the variable communication passages is formed in a groove shape that is open only on the fixed valve body side along the radial direction of the movable disc.

[0014] The invention described in claim 8 is the combined valve device described in claim 1, wherein each of the variable communication passages has an end portion on the side of each of the flow ports of the fixed side valve body and an end portion on the side of each of the branching / mixing flow ports formed in a shape corresponding to the opening shapes of each of the flow ports and each of the branching / mixing flow ports.

[0015] The invention described in claim 9 is the combined valve device according to claim 8, wherein the opening shapes of the flow ports and the branching / mixing flow ports are fan-shaped or circular.

[0016] The invention described in claim 10 is the combined valve device described in claim 9, wherein one ends of the multiple variable communication passages are always in communication with the corresponding flow ports even when the movable valve body moves.

[0017] In the invention described in claim 11, in a first position, each of the variable communication passages communicates with one of the branch / mixed flow ports among the branch / mixed flow ports provided in at least two of the fixed-side valve body, In the second position, each of the flow ports of the fixed valve body communicates with both of the branching / mixing flow ports provided in at least two of the fixed valve body, 2. The combined valve device according to claim 1, wherein, in the third position, each of the flow ports of the fixed-side valve body communicates with the other of the at least two branch / mixture flow ports provided.

[0018] The invention described in claim 12 is the combined valve device described in claim 11, wherein, among the plurality of variable communication passages, at a first position, one of the branch / mixture flow ports that communicate with each other is different from the other, among the branch / mixture flow ports that are provided at least two each corresponding to the plurality of flow ports.

[0019] The invention described in claim 13 is the combined valve gear according to claim 1, wherein the multiple flow ports include three flow ports through which a high-temperature side fluid which is the same fluid and has a relatively high temperature, a low-temperature side fluid which is the same fluid and has a relatively low temperature, and a mixed fluid obtained by mixing the high-temperature side fluid and the low-temperature side fluid flow, respectively.

[0020] The invention described in claim 14 is a combined valve device described in claim 1 or claim 13, in which the branch / mixed flow ports, at least two of which are provided corresponding to the multiple flow ports of the fixed valve body and each of the flow ports, are pre-connected on the fixed valve body side to a specific flow port and a specific branch / mixed flow port.

[0021] The invention described in claim 15 is the combined valve device described in claim 14, wherein, among the specific branch / mixed flow ports, one branch / mixed flow port is a main branch / mixed flow port through which the high temperature side fluid mainly flows, and one branch / mixed flow port is a main branch / mixed flow port through which the low temperature side fluid mainly flows.

[0022] The invention described in claim 16 is the combined valve device described in claim 14, wherein among the specific branch / mixed flow ports, one branch / mixed flow port is a secondary branch / mixed flow port through which the high temperature side fluid branches off and flows, and one branch / mixed flow port is a secondary branch / mixed flow port through which the mixed fluid branches off to the high temperature side fluid and flows.

[0023] The invention described in claim 17 is the combined valve device described in claim 14, wherein among the specific branch / mixed flow ports, one branch / mixed flow port is a secondary branch / mixed flow port through which the low-temperature side fluid branches off and flows, and one branch / mixed flow port is a secondary branch / mixed flow port through which the mixed fluid branches off to the low-temperature side fluid and flows.

[0024] The invention described in claim 18 is characterized in that the branching / mixing flow ports, at least two of which are provided corresponding to the plurality of flow ports of the fixed valve body and each of the flow ports, are the main high-temperature side branch / mixed flow port and the secondary high-temperature side branch / mixed flow port through which the high-temperature side fluid branches and flows; the main low-temperature side branch / mixed flow port and the secondary low-temperature side branch / mixed flow port through which the low-temperature side fluid branches and flows; the branch / mixed flow port on a high temperature side through which the mixed fluid branches and flows, the branch / mixed flow port on a low temperature side, and the branch / mixed flow port on a supply side through which the mixed fluid branches to a supply side of the mixed fluid; 14. The composite valve device according to claim 13, comprising:

[0025] The invention described in claim 19 is the combined valve device described in claim 18, wherein the main branch / mixed flow port on the high temperature side, the main branch / mixed flow port on the low temperature side, and the branch / mixed flow port on the supply side are pre-connected on the fixed valve body side.

[0026] The invention described in claim 20 is the combined valve device described in claim 18, in which the secondary branch / mixed flow port on the high temperature side and the branch / mixed flow port on the high temperature side are pre-connected on the fixed valve body side.

[0027] The invention described in claim 21 is the combined valve device described in claim 18, wherein the secondary branch / mixed flow port on the high temperature side, the secondary branch / mixed flow port on the low temperature side, and the branch / mixed flow port on the supply side are pre-connected on the fixed valve body side.

[0028] The invention described in claim 22 is the combined valve device according to claim 1, wherein the fixed valve body and the movable valve body are both made of ceramics.

[0029] The invention described in claim 23 is the combined valve device described in claim 22, in which the plurality of flow ports and the plurality of branching / mixing flow ports provided in the fixed side valve body, and the plurality of variable communicating passages provided in the movable valve body, have corners formed in a curved shape when viewed in a plan view.

[0030] The invention described in claim 24 provides a temperature control means having a temperature control flow path through which a temperature control fluid consisting of a low-temperature side fluid and a high-temperature side fluid whose mixing ratio is adjusted flows; A first supply means for supplying the low-temperature side fluid adjusted to a predetermined first temperature on the low-temperature side; A second supply means for supplying the high-temperature side fluid adjusted to a second predetermined temperature on the high-temperature side; a composite valve device connected to the first supply means and the second supply means, for adjusting a mixing ratio of the low-temperature side fluid supplied from the first supply means and the high-temperature side fluid supplied from the second supply means and flowing the fluid through the temperature control flow path, and for branching a mixed fluid of the low-temperature side fluid and the high-temperature side fluid that has flowed through the temperature control flow path and returning the mixed fluid to the first supply means and the second supply means; Equipped with A temperature control device using the combined valve device according to any one of claims 1 to 23 as the combined valve device. Effect of the Invention

[0031] According to the present invention, it is possible to provide a composite valve device capable of fulfilling the functions corresponding to a plurality of valve devices that distribute and mix fluids with one valve device. [Brief description of the drawings]

[0032] [Figure 1] 1 is an external perspective view showing a combined valve device according to a first embodiment of the present invention. [Diagram 2]1A to 1C are a front view, a right side view, and a plan view showing a combined valve device according to a first embodiment of the present invention. [Diagram 3] 1 is an exploded perspective view showing a combined valve device according to a first embodiment of the present invention. [Figure 4] 1A and 1B are a front view and a sectional view showing a main portion of a combined valve device according to a first embodiment of the present invention. [Diagram 5] FIG. 2 is a diagram showing the configuration of a valve body. [Figure 6] FIG. 2 is a perspective view showing a valve body and a main part. [Figure 7] FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. [Figure 8] FIG. 2 is a block diagram showing a fixed disk. [Figure 9] FIG. 2 is a diagram showing a configuration of a movable disk. [Figure 10] FIG. 13 is a plan view showing a modified example of the fixed disk and the movable disk. [Figure 11] 1 is a cross-sectional view showing a main portion of a combined valve device according to a first embodiment of the present invention. [Figure 12] FIG. 2 is a plan configuration diagram showing the operation of the combined valve device according to the first embodiment of the present invention. [Figure 13] 1 is a schematic diagram showing a temperature control device to which a combined valve device according to a first embodiment of the present invention is applied. [Figure 14] 5 is a schematic diagram showing the operation of a temperature control device to which the combined valve device according to the first embodiment of the present invention is applied. FIG. [Figure 15] FIG. 5 is a configuration diagram showing a combined valve device according to a second embodiment of the present invention. [Figure 16] FIG. 2 is a block diagram showing a fixed disk. [Figure 17] FIG. 2 is a diagram showing a configuration of a movable disk. [Figure 18] FIG. 2 is a configuration diagram showing a main part of a movable disk. [Figure 19] 10 is a schematic diagram showing a temperature control device to which a combined valve device according to a second embodiment of the present invention is applied. FIG. [Figure 20] FIG. 7 is a configuration diagram showing the operation of a combined valve device according to a second embodiment of the present invention. [Figure 21] FIG. 7 is a configuration diagram showing the operation of a combined valve device according to a second embodiment of the present invention. [Figure 22] FIG. 7 is a configuration diagram showing the operation of a combined valve device according to a second embodiment of the present invention. [Figure 23] FIG. 7 is a configuration diagram showing the operation of a combined valve device according to a second embodiment of the present invention. [Figure 24] FIG. 7 is a configuration diagram showing the operation of a combined valve device according to a second embodiment of the present invention. [Diagram 25] FIG. 11 is a perspective configuration diagram showing a main portion of a combined valve device according to a third embodiment of the present invention. [Figure 26] FIG. 10 is a configuration diagram showing a fixed disc and a movable disc of a combined valve device according to embodiment 4 of the present invention. [Figure 27] FIG. 11 is a configuration diagram showing the operation of a combined valve device according to a fourth embodiment of the present invention. [Figure 28] 10 is a graph showing measured values ​​of the flow coefficient Cv value of each fluid in a combined valve device according to Embodiment 2 of the present invention. [Figure 29] FIG. 11 is a circuit diagram showing a temperature control device according to a fifth embodiment of the present invention. [Diagram 30] FIG. 11 is an equivalent circuit diagram showing a temperature control device according to embodiment 5 of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0033] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0034] [Embodiment 1] FIG. 1 is an external perspective view showing a combined valve device according to a first embodiment of the present invention. FIGS. 2(a), (b), and (c) are a front view, a right side view, and a plan view showing the combined valve device. FIG. 3 is an exploded perspective view showing the combined valve device. FIGS. 4(a) and (b) are a back view and a cross-sectional view taken along line AA showing a main part of the combined valve device.

[0035] The combined valve device 1 is configured as a module of a disk valve driven by a motor, and functions as multiple three-way valves (three in the illustrated example). As shown in Figures 1 to 3, the combined valve device 1 is broadly composed of a valve body 2 arranged at the lower end, a valve section 3 arranged at the upper part of the valve body 2, an actuator section 4 arranged at the upper end, and a seal section 5 and a coupling section 6 arranged between the valve section 2 and the actuator section 4.

[0036] The valve body 2 is formed in a substantially cubic or rectangular parallelepiped shape from a metal such as SUS, as shown in Fig. 1 and Fig. 2. In the valve body 2, as shown in Fig. 5(b), a first inlet 7 for introducing a low-temperature fluid as an example of a first fluid is opened slightly to the right of the lower end of one side surface (the left side surface in the illustrated example) 2a, a main outlet 8 which is one of a plurality of outlets (two in the illustrated example) from which the low-temperature fluid introduced from the first inlet 7 is branched and discharged is opened on the right side of the middle part of the first inlet, a secondary outlet 9 which is the other of the two outlets from which the low-temperature fluid introduced from the first inlet 7 is branched and discharged is opened in the center of the upper end of the first inlet, and a main outlet 10 which is one of a plurality of outlets (two in the illustrated example) from which a mixed fluid as an example of a third fluid introduced from a third inlet 15 (see Fig. 5(e) described later) is branched and discharged is opened on the left side of the middle part of the first inlet.

[0037] As shown in FIG. 5(d), the valve body 2 has a second inlet 11, through which a high-temperature fluid as an example of a second fluid is introduced, opened slightly to the left of the lower end of the other side surface (the right side surface in the illustrated example) 2b, a main outlet 12, which is one of multiple (two in the illustrated example) outlets from which the high-temperature fluid introduced from the second inlet 11 is branched and discharged, opened at the center of the upper end of the valve body 2, a secondary outlet 13, which is the other of the two outlets from which the high-temperature fluid introduced from the second inlet 11 is branched and discharged, opened at the center of the upper end of the valve body 2, and a secondary outlet 14, which is the other of multiple (two in the illustrated example) outlets from which a mixed fluid as an example of a third fluid is branched and discharged, opened at the right of the intermediate portion.

[0038] 5(e), a third inlet 15 for introducing a mixed fluid as an example of a third fluid is opened in the center of the lower end of the other side surface (back surface in the illustrated example) 2c of the valve body 2. The first to third inlets 7, 11, 15 are configured independently of one another.

[0039] Here, the terms "main outlet" and "secondary outlet" are used for convenience to distinguish between multiple outlets (two in the illustrated example), and do not mean that one is "main" and the other is "secondary" in terms of function. The same applies to the "branch outlet" described below.

[0040] Each of the inlets 7, 11, 15 and each of the outlets 8, 9, 10, 12, 13, 14 of the valve body 2 is formed, for example, as a tapered female screw. However, each of the inlets 7, 11, 15 and each of the outlets 8, 9, 10, 12, 13, 14 is not limited to a tapered female screw as long as it can introduce or discharge a desired fluid, and may be formed of a non-tapered female screw or a cylindrical opening with a flange. Each of the inlets 7, 11, 15 and each of the outlets 8, 9, 10, 12, 13, 14 is provided with an identification plate (not shown) for identifying the type of fluid and whether it is an inlet or an outlet (including main or secondary).

[0041] The first inlet 7 is connected to a pipe (not shown) that introduces a low-temperature side fluid into the interior of the valve body 2. The second inlet 11 is connected to a pipe (not shown) that introduces a high-temperature side fluid into the interior of the valve body 2. The third inlet 15 is connected to a pipe (not shown) that introduces a mixed fluid into the interior of the valve body 2.

[0042] Similarly, the main outlet 8 and secondary outlet 9 for low-temperature fluid of the valve body 2 are connected to pipes (not shown) through which the low-temperature fluid introduced into the valve body 2 branches and leads out from the valve body 2. The main outlet 12 and secondary outlet 13 for high-temperature fluid are connected to pipes (not shown) through which the high-temperature fluid introduced into the valve body 2 branches and leads out from the valve body 2. The main outlet 10 and secondary outlet 14 for mixed fluid are connected to pipes (not shown) through which the mixed fluid introduced into the valve body 2 branches and leads out from the valve body 2.

[0043] The low-temperature fluid as the first fluid and the high-temperature fluid as the second fluid are, for example, fluids used for temperature control. Here, a fluid with a relatively low temperature is called the low-temperature fluid, and a fluid with a relatively high temperature is called the high-temperature fluid. Therefore, the low-temperature fluid and the high-temperature fluid are relative terms, and do not mean a low-temperature fluid with an absolutely low temperature and a high-temperature fluid with an absolutely high temperature. In addition, the mixed fluid is a fluid in which the low-temperature fluid and the high-temperature fluid are mixed in any ratio (including the case where one is zero). As the low-temperature fluid and the high-temperature fluid, for example, fluorine-based inert liquids such as Fluorinert (registered trademark) (manufactured by 3M), Opteon (registered trademark) (manufactured by Mitsui-Chemours Fluoroproducts), and Novec (registered trademark) (manufactured by 3M), which are applicable in a temperature range of about -100°C to +120°C under a pressure of 0 to 1 MPa, are used.

[0044] As shown in FIG. 5(a), the upper end surface 2d of the valve body 2, which is formed in a square shape in plan view, is provided with a mounting portion 16 to which a fixed disk 30, which is an example of a fixed valve body, is attached. The mounting portion 16 is integrally formed in a cylindrical shape that protrudes slightly upward from the upper end surface 2d of the valve body 2. An annular accommodation groove 18 for accommodating an O-seal 17 (see FIG. 4(b)) or an O-ring is drilled on the outer periphery of the mounting portion 16. The O-seal 17 is an O-ring type seal ring having excellent chemical resistance, heat resistance, and cold resistance, in which the outer periphery of a core material made of silicone rubber, fluororubber, stainless steel spring, or the like is completely covered with PFA (perfluoroalkoxyalkane) or FEP (fluorinated ethylene propylene) or the like. In this embodiment, the term heat resistance may include both heat resistance and cold resistance. An O-ring may be used instead of the O-seal 17, but it is preferable to use an O-seal having excellent chemical resistance, heat resistance, and cold resistance. Furthermore, on the upper end surface 2d of the valve body 2, a leakage prevention groove 19 having a V-shaped cross section is provided on the outer periphery of the accommodating groove 18 to prevent the fluid from leaking to the outside.

[0045] As shown in FIG. 5(a), the mounting portion 16 of the valve body 2 has a total of nine openings, including a first opening 20 corresponding to the first inlet 7, a second opening 21 corresponding to the second inlet 11, a third opening 22 corresponding to the third inlet 15, a fourth opening 23 corresponding to the main outlet 8 for the low-temperature fluid, a fifth opening 24 corresponding to the secondary outlet 9 for the low-temperature fluid, a sixth opening 25 corresponding to the main outlet 12 for the high-temperature fluid, a seventh opening 26 corresponding to the secondary outlet 13 for the high-temperature fluid, an eighth opening 27 corresponding to the main outlet 10 for the mixed fluid, and a ninth opening 28 corresponding to the secondary outlet 14 for the mixed fluid. These first to ninth openings 20-28 are formed in a circular shape having the same inner diameter. However, these first to ninth openings 20-28 do not necessarily have to have the same inner diameter, and as long as they correspond to the inlet and outlet, the inner diameters of the inlet and outlet may be different, for example. If the first to ninth openings 20 to 28 all have the same inner diameter, the processing (manufacturing) of the valve body 2 becomes easier.

[0046] As described below, the first to ninth openings 20-28 opened in the mounting portion 16 of the valve body 2 are provided in correspondence with a plurality of inlets (three in the illustrated example) of the fixed disk 30, and at least two (two in the illustrated example) are provided corresponding to each inlet, and are disposed at positions corresponding to a total of six branched outlets through which the fluid flowing in from each inlet is branched and flows out.

[0047] More specifically, the first to third openings 20-22 are arranged on the same circumference on the inner periphery of the mounting portion 16 of the valve body 2, at angles of 120 degrees to each other. The fourth to ninth openings 23-28 are arranged on the same circumference on the outer periphery of the mounting portion 16 of the valve body 2, spaced apart at symmetrical positions in the circumferential direction about the corresponding first to third openings 20-22.

[0048] As shown in Fig. 5(f), which is a cross-sectional view taken along line BB in Fig. 5(a), the first to ninth openings 20-28 opened in the mounting portion 16 of the valve body 2, for example, the fifth opening 24 is connected to the low-temperature fluid secondary outlet 9 via a passage 30 drilled in the valve body 2 so as to intersect with the fifth opening 24 and the central axis of the low-temperature fluid secondary outlet 9. Also, the seventh opening 26 is connected to the high-temperature fluid secondary outlet 13 via a passage 31 drilled in the valve body 2 so as to intersect with the seventh opening 26 and the central axis of the high-temperature fluid secondary outlet 13.

[0049] As illustrated in FIG. 4(b), for example, the third opening 22 is connected to the third inlet 15 for the mixed fluid through a passage 32 drilled inside the valve body 2 so as to intersect with the central axis of the third opening 22 and the third inlet 15 for the mixed fluid.

[0050] Similarly, the first opening 20 is connected to the first inlet 7, the second opening 21 to the second inlet 11, the fourth opening 23 to the main outlet 8 for low temperature fluid, the sixth opening 25 to the main outlet 12 for high temperature fluid, the eighth opening 27 to the main outlet 10 for the mixed fluid, and the ninth opening 28 to the secondary outlet 14 for the mixed fluid, all via passages (not shown) drilled inside the valve body 2.

[0051] As shown in Fig. 5(a), the mounting portion 16 of the valve body 2 has a support hole 33 bored in its center for rotatably supporting a lower end 41a of a movable shaft 41 that rotates a movable disk 40 (described later). Furthermore, the mounting portion 16 of the valve body 2 has a plurality of (three in the illustrated example) female threaded portions 34 for fixing the fixed disk 30 to its outer periphery. The female threaded portions 34 are disposed at positions 120 degrees apart from one another in the circumferential direction around the support hole 33. For convenience, the female threaded portion 34 is illustrated in Fig. 4(b) on the inner periphery side of the female threaded portion 34 in Fig. 5, but the position of the female threaded portion 34 may be anywhere.

[0052] As shown in FIG. 5(a), the upper end surface 2d of the valve body 2 is provided at its four corners with female threads 35 for mounting a case member 60, which will be described later.

[0053] 4(b), fixing bolts 36 are inserted with their heads embedded in the fixed disk 30 and fastened to the three female threads 34 of the mounting portion 16. The fixed disk 30 is then attached in a fixed state to the mounting portion 16 of the valve body 2.

[0054] In Fig. 5(a), reference numeral 37 denotes an insertion hole into which a positioning pin 38 (see Fig. 4(b)) is inserted for positioning the fixed disk 30 on the mounting portion 16 of the valve body 2. The positioning pin 38 is disposed on a straight line connecting the third opening 23, the support hole 33, and the center of the female threaded portion 34 in the diametrical direction. This makes it possible to mount the fixed disk 30 in a state in which it is positioned with high precision relative to the mounting portion 16 of the valve body 2. In Fig. 5(a) and Fig. 4(b), the positions of the insertion hole 37 and the positioning pin 38 are different for drawing purposes, but it goes without saying that the positioning pin 38 may be disposed on either the inner or outer periphery of the female threaded portion 34.

[0055] As shown in Fig. 6, the fixed disk 30 is attached to the mounting portion 16 of the valve body 2 as described above. The movable disk 40 is arranged in a stacked state on the upper part of the fixed disk 30. Fig. 7 is a cross-sectional view taken along the line XII-VII in Fig. 6.

[0056] As shown in Fig. 8(a) to (c), the fixed disk 30 is formed in a flat circular plate shape (disk shape) having a required thickness with a flat upper end surface 30a and a flat lower end surface 30b made of ceramics such as alumina or metal such as SUS. The material of the fixed disk 30 is preferably ceramics such as alumina from the viewpoint of heat resistance and durability, in order to handle fluids whose temperatures change in the temperature range of about -100°C to +120°C. The upper end surface 30a and the lower end surface 30b of the fixed disk 30 are formed with a significantly high degree of smoothness. The fixed disk 30 is configured to prevent leakage of fluid when it is fixedly arranged in a stacked state with other members by being in close contact with the upper end surface of the mounting portion 16 of the valve body 2 arranged at the lower part and the lower end surface of the movable disk 40 arranged at the upper part.

[0057] The fixed disc 30 is a member that serves as one valve element of a plurality of (three in the illustrated example) three-way valves together with a movable disc 40 which is an example of a movable valve element described below.

[0058] As shown in Fig. 8(b), the fixed disk 30 is divided into first to third valve regions 301 to 303 corresponding to three three-way valves. The first valve region 301 corresponds to, for example, a three-way valve for a low-temperature fluid. The second valve region 302 corresponds to a three-way valve for a high-temperature fluid. The third valve region 303 corresponds to a three-way valve for a mixed fluid. The first to third valve regions 301 to 303 are set by dividing the fixed disk 30 into three equal sector-shaped regions forming a central angle of 120 degrees along the circumferential direction with the center of the fixed disk 30 as a reference.

[0059] As shown in Figures 5 and 7, the orientation of the fixed disk 30 when attached to the mounting portion 16 of the valve body 2 is such that the first valve region 301 for low-temperature side fluid is located diagonally downward left in the figures, the second valve region 302 for high-temperature side fluid is located diagonally downward right in the figures, and the third valve region 303 for mixed fluid is located at the upper end in the figures.

[0060] In the first valve region 301 of the fixed disk 30, as a three-way valve for low-temperature fluid, a first inlet 304 as an example of a flow port through which the low-temperature fluid as the first fluid flows in, and at least two (two in the illustrated example) main low-temperature outlet 305 and secondary low-temperature outlet 306 as examples of branch outlets (branching / mixing flow ports) through which the low-temperature fluid flowing in from the first inlet 304 is branched and flows out are provided corresponding to the first inlet 304, and are opened. The main low-temperature outlet 305 and secondary low-temperature outlet 306 are arranged such that the main low-temperature outlet 305 is located upstream in the clockwise direction and the secondary low-temperature outlet 306 is located downstream in the clockwise direction with respect to the center of the fixed disk 30.

[0061] Similarly, in the second valve region 302 of the fixed disk 30, as a three-way valve for a high-temperature fluid, a second inlet 307 as an example of a flow port into which a high-temperature fluid as a second fluid flows in, and a main high-temperature outlet 308 and a secondary high-temperature outlet 309 as examples of at least two (two in the illustrated example) branch outlets (branching / mixing flow ports) corresponding to the second inlet 307 are opened. The main high-temperature outlet 307 and the secondary high-temperature outlet 308 are arranged such that the secondary high-temperature outlet 309 is located downstream in the clockwise direction and the main high-temperature outlet 308 is located upstream in the clockwise direction with respect to the center of the fixed disk 30. The main high-temperature outlet 308 and the secondary high-temperature outlet 309 are arranged in the opposite manner to the main low-temperature outlet 305 and the secondary low-temperature outlet 306 in terms of the arrangement of the main outlet and the secondary outlet in the clockwise direction. This is related to the method of use of the combined valve device 1 and the connections of the piping, but when a low-temperature fluid and a high-temperature fluid are used as two fluids, the flow rate of one of the two fluids, the low-temperature fluid, is changed from 100% to 0%, while at the same time the flow rate of the other fluid, the high-temperature fluid, is changed from 0% to 100% by driving the movable disk 40 to rotate.

[0062] Furthermore, in the third valve region 303 of the fixed disk 30, as a three-way valve for a mixed fluid, a third inlet 310 as an example of a flow port into which the mixed fluid as the third fluid flows in, and a main mixed outlet 311 and a secondary mixed outlet 312 as examples of at least two (two in the illustrated example) branch outlets (branch / mixed flow ports) corresponding to the third inlet 310 are opened. The main mixed outlet 311 and the secondary mixed outlet 312 are arranged such that the main mixed outlet 311 is located on the upstream side in the clockwise direction and the secondary mixed outlet 312 is located on the downstream side in the clockwise direction with respect to the center of the fixed disk 30. This is the same arrangement as the main low temperature outlet 305 and the secondary low temperature outlet 306.

[0063] The first to third inlets 304, 307, 310 are formed to have the same shape, and are arranged at N equal positions along the circumferential direction on the radially inner side of the fixed disk 30, where N (=3) is the number of inlets, so that they form angles of 120 degrees with respect to each other on a circumference of the same radius.

[0064] The first to third inlets 304, 307, 310 are arranged on a concentric circle on the inner periphery side along the radial direction of the fixed disk 30. The first to third inlets 304, 307, 310 are formed in a sector shape having a required central angle θ1 and a required length along the radial direction based on center lines C1 to C3 along the circumferential direction of the first to third valve regions 301 to 303.

[0065] Further, the main low temperature outlet 305 and the secondary low temperature outlet 306, the main high temperature outlet 308 and the secondary high temperature outlet 309, and the main mixed outlet 311 and the secondary mixed outlet 312 are arranged concentrically on the outer circumferential side of the first to third inlets 304, 307, and 310 along the radial direction of the fixed disk 30. The main low temperature outlet 305 and the secondary low temperature outlet 306, the main high temperature outlet 308 and the secondary high temperature outlet 309, and the main mixed outlet 311 and the secondary mixed outlet 312 are arranged at positions symmetrical on the left and right sides with respect to the center lines C1 to C3 along the circumferential direction of the first to third valve regions 301 to 303, respectively, and are formed in a sector shape having a required central angle θ2 larger than the first to third inlets 304, 307, and 310 and a required length along the radial direction substantially equal to that of the first to third inlets 304, 307, and 310 along the radial direction.

[0066] The first to third inlets 304, 307, 310 are opened so as to penetrate the fixed disk 30 along the thickness direction. The corners of the first to third inlets 304, 307, 310 in plan view are formed in a round (curved) shape having a required radius of curvature. By forming the corners of the first to third inlets 304, 307, 310 in plan view in a round (curved) shape in this way, when a fluid whose temperature changes in the temperature range of about -100°C to +120°C flows in through each of the inlets 304, 307, 310, it is possible to prevent thermal stress caused by temperature change from concentrating on the corners of the first to third inlets 304, 307, 310.

[0067] Similarly, the main low temperature outlet 305 and the secondary low temperature outlet 306, the main high temperature outlet 308 and the secondary high temperature outlet 309, and the main mixed outlet 311 and the secondary mixed outlet 312 are opened so as to penetrate the fixed disk 30 along the thickness direction. The corners of the main low temperature outlet 305 and the secondary low temperature outlet 306, the main high temperature outlet 308 and the secondary high temperature outlet 309, and the main mixed outlet 311 and the secondary mixed outlet 312 in a plan view are formed into an R (curved) shape having a required radius of curvature. In addition, the main low temperature outlet 305 and the secondary low temperature outlet 306, the main high temperature outlet 308 and the secondary high temperature outlet 309, and the main mixed outlet 311 and the secondary mixed outlet 312 are partitioned from each other by first to third partition walls 313 to 315 having a required thickness based on the center lines C1 to C3.

[0068] As shown in FIG. 7 , the fixed disk 30 is arranged such that the first inlet 304 corresponds to the first opening 20 of the mounting portion 16 of the valve body 2, the second inlet 307 corresponds to the second opening 21 of the mounting portion 16 of the valve body 2, and the third inlet 310 corresponds to the third opening 22 of the mounting portion 16 of the valve body 2.

[0069] Therefore, the low-temperature side fluid flowing in from the first opening 20 of the mounting portion 16 of the valve body 2 flows into the first inlet 304 of the fixed disk 30, the high-temperature side fluid flowing in from the second opening 21 flows into the second inlet 307 of the fixed disk 30, and the mixed fluid flowing in from the third opening 22 flows into the third inlet 310 of the fixed disk 30.

[0070] Similarly, as shown in FIG. 7 , the fixed disk 30 is arranged such that the main cold flow outlet 305 corresponds to the fourth opening 23 of the mounting portion 16 of the valve body 2, the secondary cold flow outlet 306 corresponds to the fifth opening 24 of the mounting portion 16 of the valve body 2, the main hot flow outlet 308 corresponds to the sixth opening 25 of the mounting portion 16 of the valve body 2, the secondary hot flow outlet 309 corresponds to the seventh opening 26 of the mounting portion 16 of the valve body 2, the main mixed flow outlet 311 corresponds to the eighth opening 27 of the mounting portion 16 of the valve body 2, and the secondary mixed flow outlet 312 corresponds to the ninth opening 28 of the mounting portion 16 of the valve body 2.

[0071] The main low temperature side fluid flowing out from the main low temperature outlet 305 of the fixed disk 30 flows out from the fourth opening 23 in the mounting portion 16 of the valve body 2, the secondary low temperature side fluid flowing out from the secondary low temperature outlet 306 flows out from the fifth opening 24 in the mounting portion 16 of the valve body 2, the main high temperature side fluid flowing out from the main high temperature outlet 306 flows out from the sixth opening 25 in the mounting portion 16 of the valve body 2, the secondary high temperature side fluid flowing out from the secondary high temperature outlet 307 flows out from the seventh opening 26 in the mounting portion 16 of the valve body 2, the main mixed fluid flowing out from the main mixed outlet 311 flows out from the eighth opening 27 in the mounting portion 16 of the valve body 2, and the secondary mixed fluid flowing out from the secondary mixed outlet 312 flows out from the ninth opening 28 in the mounting portion 16 of the valve body 2.

[0072] As shown in Figures 6 and 7, a movable disk 40 as an example of a movable valve body is arranged on the upper part of the fixed disk 30 in a rotatable stacked state in a movable form, in close contact with the upper end surface 30a of the fixed disk 30.

[0073] As shown in Fig. 9(a) to (c), the movable disk 40 is formed in a flat circular plate shape (disk shape) with a flat upper end surface 40a and a flat lower end surface 40b having a required thickness, made of ceramics such as alumina or metal such as SUS. As with the fixed disk 30, it is desirable to use ceramics such as alumina as the material for the movable disk 40 from the viewpoints of heat resistance and durability. The upper end surface 40a and the lower end surface 40b of the movable disk 40 are formed with a significantly high degree of smoothness. When the movable disk 40 is fixedly arranged in a stacked state with other members, it is configured to prevent leakage of fluid by closely contacting the upper end surface 30a of the fixed disk 30 arranged below.

[0074] As shown in FIG. 9, the movable disk 40 has an insertion hole 42 with a key groove 42a through which the movable shaft 41 as a central shaft is inserted. As shown in FIG. 4(b), the movable shaft 41 is attached to the center of the movable disk 40 in a fixed state via a parallel key 43. The parallel key 43 is fixed to the movable shaft 41 by a screw 44. The lower end 41a of the movable shaft 41 is rotatably supported via a bearing member 45 in the support hole 33 of the valve body 2 through a through hole 30a of the fixed disk 30. The inner diameter of the lower end 30b of the through hole 30a of the fixed disk 30 is large to accommodate the bearing member 45. The movable disk 40 is driven to rotate by the actuator unit 4 via the movable shaft 41 in a required direction by a required angle.

[0075] As shown in FIG. 9(b), the movable disk 40 is divided into first to third valve regions 401 to 403 corresponding to three three-way valves, similar to the fixed disk 30. The first valve region 401 corresponds to a three-way valve for a low-temperature fluid, for example. The second valve region 402 corresponds to a three-way valve for a high-temperature fluid. The fourth valve region 303 corresponds to a three-way valve for a mixed fluid. The first to third valve regions 401 to 403 are set by dividing the movable disk 40 into three equal sector-shaped regions forming a central angle of 120 degrees along the circumferential direction with the center of the movable disk 40 as a reference.

[0076] The movable disk 40 is configured to have a plurality of (three in the illustrated example) variable communication passages 404-406 on its lower end surface 40b, which variable the branching ratio of the fluid between each inlet of the fixed disk 30 and at least two (two in the illustrated example) corresponding branch outlets. The variable communication passages 404-406 are open only on the lower end surface 40b side of the movable disk 40, and are closed on the upper end surface 40a side of the movable disk 40.

[0077] The variable communication passages 404 to 406 of the movable disc 40 are configured in the same manner.

[0078] Here, taking the first variable communication passage 404 as an example, a low-temperature side variable communication passage 404 is provided on the lower end surface side of the first valve region 401 of the movable disk 40, which connects the first inlet 304 of the fixed disk 30 with the two corresponding main low-temperature outlets 305 and secondary low-temperature outlets 306 in a variable manner, thereby varying the branching ratio of the low-temperature side fluid as the first fluid.

[0079] The variable communication passage 404 on the low temperature side is arranged on the inner periphery side along the radial direction of the movable disk 40, and is configured to have an inner periphery side communication part 404a that is always in communication with the first inlet 304 of the fixed disk 30, and an outer periphery side communication part 404b that is arranged on the outer periphery side along the radial direction of the movable disk 40 and is selectively or simultaneously in communication with the main low temperature outlet 305 and the secondary low temperature outlet 306 of the fixed disk 30. The outer periphery side communication part 404b has an inner end along the radial direction of the movable disk 40 connected to the inner periphery side communication part 404a. Therefore, the fluid that flows in from the inner periphery side communication part 404a of the movable disk 40 flows into the outer periphery side communication part 404b.

[0080] The inner peripheral side communication portion 404a of the movable disk 40 has a large central angle θ3 so that it is always in communication with the corresponding first inlet 304 of the fixed disk 30 even when the movable disk 40 rotates, and is formed in a sector shape having a length along the radial direction equal to that of the first inlet 304.

[0081] In addition, the outer peripheral side communication portion 404b of the movable disk 40 has a central angle θ4 (=θ2) equal to those of the main low temperature outlet 305 and the secondary low temperature outlet 306 so that it selectively or simultaneously communicates with the main low temperature outlet 305 and the secondary low temperature outlet 306 of the fixed disk 30 when the movable disk 40 rotates, and is formed in a sector shape having a length longer along the radial direction than the main low temperature outlet 305 and the secondary low temperature outlet 306.

[0082] As shown in FIG. 7, for example, the movable disk 40 is arranged at a reference position (home position) such that the variable communication passage 404 for low temperature fluid corresponds to the first inlet 304 of the fixed disk 30, the variable communication passage 405 for high temperature fluid corresponds to the second inlet 307 of the fixed disk 30, and the variable communication passage 406 for mixed fluid corresponds to the third inlet 311 of the fixed disk 30.

[0083] In the illustrated embodiment 1 above, a case has been described in which the inlet and outlet of the fixed disc and the variable communication passage of the movable disc are formed in a sector shape, but the inlet and outlet of the fixed disc and the variable communication passage of the movable disc are not limited to a sector shape and may be formed in a circular shape as shown in Fig. 10. Note that Fig. 10 diagrammatically shows a state in which the fixed disc 30 and the movable disc 40 are stacked.

[0084] As shown in Figs. 3 and 4(b), a wave washer seat plate 50, a wave washer 51, and a wave washer retainer 52 are arranged in a stacked state on the upper part of the movable disc 40.

[0085] The wave washer seat plate 50 is a flat circular plate-like member made of metal such as SUS. The wave washer seat plate 50 is arranged in a stacked state on the upper end surface 40a of the movable disk 40, and is used to apply the pressing force of the wave washer 51 evenly to the upper end surface 40a of the movable disk 40. As shown in FIG. 3, the wave washer seat plate 50 has an insertion hole 501 at its center through which the movable shaft 41 is inserted. Also, as shown in FIG. 4(b), the wave washer seat plate 50 is positioned and fixed to the movable disk 40 by a positioning pin 502.

[0086] The wave washer 51 is made of a metal material having spring properties (elasticity) such as phosphorus bronze, and is formed by deforming a flat circular plate into a plurality of wave shapes (wave shapes) along the circumferential direction. The wave washer 51 is a member for pressing the upper end surface 40a of the movable disk 40 to bring the lower end surface 40b of the movable disk 40 into close contact with the upper end surface 30a of the fixed disk 30. The wave washer 51 can obtain a desired elastic restoring force (pressing force) along the thickness direction by appropriately setting the material, outer diameter, thickness, number and height of the wave shapes (wave shapes). The wave washer 51 has an insertion hole 511 at its center through which the movable shaft 41 is inserted.

[0087] Wave washer presser 52 is made of metal such as SUS, and is a flat circular plate-like member having a required thickness that is fixed to movable shaft 41. By being fixed to movable shaft 41, wave washer presser 52 is regulated in its position along the up-down direction, and generates a required pressing force by pressing wave washer 51.

[0088] The fixed disk 30, movable disk 40, wave washer seat plate 50, wave washer 51 and wave washer retainer 52 configured as described above are housed inside a case member 60, as shown in FIG. 4(b).

[0089] As shown in FIG. 3, the case member 60 is made of a metal such as SUS and has a cylindrical shape with a thick upper end surface 61 that is closed and a flat rectangular flange portion 62 that is integrally formed on the outer periphery of the lower end portion.

[0090] 3 and 4, the case member 60 is fixed to the upper end surface of the valve body 2 by fixing bolts 64 inserted into insertion holes 63 drilled in the four corners of the flange portion 62. Inside the case member 60, a space 65 is provided in the ceiling portion to reduce the thermal effect of the valve body 2 on the actuator portion 4, particularly at extremely low temperatures of about -100°C.

[0091] As shown in FIG. 3, the case member 60 has an opening H on a side surface of the flange portion 62 for detecting leaked liquid when liquid leaks from inside the case member 60.

[0092] An upper end surface 61 of the case member 60 constitutes a seal portion 5 that seals the middle portion 41b of the movable shaft 41 in a liquid-tight manner.

[0093] As shown in FIG. 11, an insertion hole 66 through which the movable shaft 41 is inserted is opened in the upper end surface 61 of the case member 60 constituting the seal portion 5. An annular flange portion 66a is provided at the lower end of the insertion hole 66 so as to protrude toward the inner circumference. The inner diameter of the insertion hole 66 is set to be larger than the outer diameter of the middle portion 41b of the movable shaft 41. Between the insertion hole 66 and the movable shaft 41, in order from the bottom, a first omni seal 67 opening downward, a first bearing member 68, a second omni seal 69 also opening downward, and a second bearing member 70 are arranged.

[0094] These first and second omni seals 67, 69 and first and second bearing members 68, 70 are members that seal the middle portion 41b of the movable shaft 41 in a rotatable and liquid-tight (air-tight) manner.

[0095] The upper end portion 41c of the movable shaft 41 is formed to have an outer diameter smaller than that of the intermediate portion 41b, and a step portion 41d is provided between the upper end portion 41c and the intermediate portion 41b.

[0096] A thrust bearing 71 that supports the movable shaft 41 in the axial direction is disposed on the upper end 41c of the movable shaft 41. The thrust bearing 71 abuts against a stepped portion 41d of the movable shaft 41 via an annular member 72, and regulates the position of the movable shaft 41 in the axial direction. The thrust bearing 71 is accommodated inside a bearing holder 73 with its vertical position fixed.

[0097] 11, the bearing holder 73 is made of a metal such as SUS and has a cylindrical shape with a closed upper end surface 74 and a flat circular flange portion 75 integrally provided on the outer periphery of the lower end. The flange portion 75 of the bearing holder 73 is fastened and fixed to the upper end surface 61 of the case member 60 together with the coupling member by a plurality of fixing bolts 76, 77 of different lengths. The upper end surface 61 of the case member 60 is provided with a plurality of female thread portions 78 corresponding to the plurality of fixing bolts 76, 77.

[0098] Flange portion 75 of bearing holder 73 is sealed by an O-ring 80 housed in a groove 79 provided in the upper end surface 61 of case member 60. In addition, upper end surface 74 of bearing holder 73 is sealed to spacer member 83 by an O-ring 82 housed in a groove 81 provided in upper end surface 74.

[0099] 1, a coupling section 6 as an example of a joining means is disposed between the valve section 3 incorporating the seal section 5 and the actuator section 4. The coupling section 6 connects and fixes the case member 60 incorporating the seal section 5 to the actuator section 4, and connects the movable shaft 41 to a rotating shaft (not shown) of the actuator section 4 that rotates the movable shaft 41.

[0100] 11, the coupling section 6 is composed of a spacer member 83 arranged between the valve section 3 and the actuator section 4, and a coupling member 85 as an example of a driving force transmission means that is housed in a cylindrical space 84 formed in a penetrating state inside the spacer member 83 and connects the movable shaft 41 and a rotating shaft (not shown). The spacer member 83 is made of a synthetic resin such as polyimide (PI) resin and is formed into a thick cylindrical tube shape with an outer diameter smaller than that of the case member 60. The spacer member 83 is attached with its lower end and middle part fixed to the ceiling part 61 of the case member 60 by fixing bolts 76, 77.

[0101] The upper end 41e of the movable shaft 41 is formed in a flat plate shape that protrudes upward. The upper end 41e of the movable shaft 41 is connected and fixed by being fitted into a concave groove 86 provided in the lower end of the coupling member 85. Meanwhile, the upper end of the coupling member 85 is provided with an insertion hole 87 into which the lower end of the drive shaft (not shown) of the actuator unit 4, which is formed in a rectangular prism shape, is inserted.

[0102] The coupling member 85 has an upper end 85a with a larger outer diameter than the lower end 85b, and a downward step 85c is provided between the upper end 85a and the lower end 85b. A cylindrical space 84 in which the coupling member 85 is accommodated is formed in a shape corresponding to the coupling member 85. The space 84 is provided with an accommodation groove 89 for accommodating an X-ring 89a as an example of a sealing means at a position corresponding to the boundary between the upper end 85a and the lower end 85b of the coupling member 85. A pressing member 89b is disposed on the outer periphery of the upper end 85a of the coupling member 85, which is inserted into the coupling member 85 and accommodated in the space 84. A lubricant 89c is applied to the X-ring 89a as necessary.

[0103] As shown in FIG. 11, the spacer member 83 is attached in a fixed state to the lower end surface of the actuator section 4 by a plurality of fixing bolts 88.

[0104] As shown in Figures 1 and 2, the actuator unit 4 as an example of a driving means includes a housing 90 formed in a substantially rectangular parallelepiped shape. A stepping motor (or a servo motor) as an example of a driving source for driving the movable shaft 41 to rotate, an encoder, a control circuit, and the like are built into the housing 90. The actuator unit 4 may be configured in any way as long as it can rotate a rotating shaft (not shown) in a desired direction with a predetermined accuracy based on a control signal. The driving means includes a stepping motor or the like, a driving force transmission mechanism that transmits the rotational driving force of the stepping motor or the like to the rotating shaft via a driving force transmission means such as a gear, and an angle sensor such as an encoder that detects the rotation angle of the rotating shaft.

[0105] 2, reference numeral 91 denotes a stepping motor side cable, and 92 denotes an angle sensor side cable. The stepping motor side cable 91 and the angle sensor side cable 92 are each connected to a control device (not shown) that controls the combined valve device 1.

[0106] As described above, the composite valve device 1 according to the first embodiment is premised on the use of a fluorine-based inert liquid such as Opteon (registered trademark) (manufactured by Mitsui-Chemours Fluoroproducts) or Novec (registered trademark) (manufactured by 3M) that is applicable in a very low temperature range of approximately -100°C.

[0107] Therefore, when the combined valve device 1 switches the flow rate of a fluid at a significantly low temperature of about -100°C, the temperatures of the valve body 2, valve section 3, etc. also become a significantly low temperature of about -100°C, which is equal to the temperature of the fluid. The valve section 3 is in contact with the actuator section 4 via a spacer member 83. When the valve section 3 becomes a low temperature of about -100°C, it is expected that the temperature of the actuator section 4 will drop to a temperature close to -100°C due to heat conduction via the spacer member 83 and the coupling member 85, even if the environmental temperature in which the combined valve device 1 is used is room temperature of about +20 to 25°C.

[0108] The actuator unit 4 is composed of a drive motor such as a stepping motor that rotates the valve shaft, a control circuit such as an IC that controls the rotation of the drive motor, and an angle sensor that detects the rotation angle of the valve shaft. If the actuator unit 4 is exposed to a significantly low temperature of -100°C, there is a risk that the drive motor such as a stepping motor and the control circuit such as an IC will malfunction, and it may become difficult to control the flow rate of the fluid at an extremely low temperature of about -100°C.

[0109] Therefore, the combined valve device 1 of this embodiment 1 is configured to form the driving force transmission means and the joining means from a material having a lower thermal conductivity than the valve body and the valve element, thereby forming a heat transfer suppression section that suppresses the transfer of heat to the driving means.

[0110] Moreover, the combined valve device 1 according to the first embodiment is configured so that the thermal conductivity of the driving force transmission means is 10 (W / m·K) or less, and the thermal conductivity of the joining means is 1 (W / m·K) or less.

[0111] In other words, the combined valve device 1 according to the first embodiment constitutes a heat transfer suppression section that suppresses the transfer of heat to the drive means by forming the spacer member 83 and the coupling member 85 from a material having a lower thermal conductivity than the valve body 2 and the movable shaft 41.

[0112] The spacer member 83 is made of a synthetic resin such as polyimide (PI) resin, polytetrafluoroethylene (PTFE), polyamide-imide (PAI) resin, ultra-high molecular weight polyethylene (UHMW-PE), polyamide (PA) resin, polyacetal (POM), etc., which has a lower thermal conductivity than the SUS that constitutes the valve body 2 and the movable shaft 41. The coupling member 85 is made of zirconia, ceramics, etc. The thermal conductivity of polyimide (PI) is 1 (W / m·K) or less, specifically about 0.16 (W / m·K). The mechanical strength (bending strength) of polyimide (PI) is about 170 MPa. On the other hand, the thermal conductivity of zirconia is 10 (W / m·K) or less, specifically 2.7 to 3.0 (W / m·K). The thermal conductivity of ceramics is about 4.0 to 10.0 (W / m·K). The mechanical strength (bending strength) of zirconia is about 600 to 1400 MPa. The thermal conductivity of stainless steel is about 12.8 to 26.9 (W / m·K).

[0113] <Environmental conditions> As described above, the combined valve device 1 according to the first embodiment is configured to be usable for fluids at temperatures of, for example, about -100 to +120°C, particularly at temperatures as low as about -100°C. Therefore, it is desirable that the surrounding environmental conditions in which the combined valve device 1 is used correspond to a temperature range of about -100 to +120°C. That is, when a fluid at about -100°C flows through the combined valve device 1, the valve body 2 and the valve section 3 themselves become at a temperature equal to that of the fluid at about -100°C. As a result, when the combined valve device 1 is used under conditions that include humidity, which is moisture in the air, the moisture in the air adheres to the combined valve device 1 and freezes, which is considered to be a factor in causing the combined valve device 1 to malfunction.

[0114] Therefore, in the first embodiment, the combined valve device 1 is used under the following environmental conditions: 2- In an environment replaced with 100% air, the ambient humidity (relative humidity) is desirably 0.10% or less, and preferably about 0.01%.

[0115] <Operation of the composite valve device> In the combined valve device 1 according to the first embodiment, the flow rates of the low-temperature side fluid, the high-temperature side fluid, and the mixed fluid are controlled as follows.

[0116] As shown in FIGS. 1 and 4, a low-temperature side fluid adjusted to a predetermined set temperature on the low-temperature side, a high-temperature side fluid adjusted to a predetermined set temperature on the high-temperature side, and a mixed fluid obtained by mixing the low-temperature side fluid and the high-temperature side fluid are supplied to the valve body 2 of the combined valve device 1 through its first to third inlets 7, 11, 15 via piping (not shown).

[0117] The low-temperature fluid supplied to the inside of the valve body 2 via the first inlet 7 is guided to the first opening 20 via a passage (not shown) connected to the first inlet 7, as shown in Fig. 5. The low-temperature fluid guided to the first opening 20 of the valve body 2 flows into the first inlet 304 of the fixed disk 30, as shown in Fig. 7.

[0118] Then, the low-temperature side fluid that flows into the first inlet 304 of the fixed disk 30 flows out from the main low-temperature outlet 305 and / or the secondary low-temperature outlet 306 of the fixed disk 30 via the variable communication passage 404 on the low-temperature side of the movable disk 40, as shown in FIG. 12.

[0119] Now, assume that the movable disk 40 is located in a position where the outer peripheral side communication portion 404b of the variable communication passage 404 faces only the main low temperature outlet 305 of the fixed disk 30, as shown in FIG. 12(a).

[0120] The movable disk 40 is rotated by the actuator unit 4 in a desired direction by a desired amount and then stopped.

[0121] At this time, the movable disk 40 is stopped at a position where the outer circumferential side communication portion 405b of the variable communication passage 405 for high temperature fluid faces only the secondary high temperature outlet 309 of the fixed disk 30, and the outer circumferential side communication portion 406b of the variable communication passage 406 for the branched fluid faces only the main mixed outlet 311 of the fixed disk 30.

[0122] Therefore, the low-temperature side fluid flowing in from the first opening 304 of the fixed disk 30 flows through the variable communication passage 404 of the movable disk 40, from the inner side communication portion 404a to the outer side communication portion 404b, and all of it (100%) flows out from the outer side communication portion 404b through the main low-temperature outlet 305 of the fixed disk 30.

[0123] In addition, the high-temperature side fluid flowing in from the second opening 307 of the fixed disk 30 flows through the variable communication passage 405 of the movable disk 40, from the inner side communication portion 405a to the outer side communication portion 405b, and all of it (100%) flows out from the outer side communication portion 405b through the secondary high-temperature outlet 309 of the fixed disk 30.

[0124] Similarly, the mixed fluid flowing in from the third opening 310 of the fixed disk 30 flows through the variable communication passage 406 of the movable disk 40, from the inner side communication portion 406a to the outer side communication portion 406b, and all of it (100%) flows out from the outer side communication portion 406b through the main mixed flow outlet 311 of the fixed disk 30.

[0125] Also, for example, the movable disk 40 is rotated and driven to a position where the outer peripheral side communication portion 404b of the variable communication passage 404 for the low-temperature fluid faces both the main low-temperature outlet 305 and the secondary low-temperature outlet 306 of the fixed disk 30, as shown in FIG. 12(b), and then stopped.

[0126] At this time, the movable disk 40 is stopped at a position where the outer circumferential communication portion 405b of the variable communication passage 405 for high temperature fluid faces both the main high temperature outlet 308 and the secondary high temperature outlet 309 of the fixed disk 30, and the outer circumferential communication portion 406b of the variable communication passage 406 for branched fluid faces both the main mixed outlet 311 and the secondary mixed outlet 312 of the fixed disk 30.

[0127] Therefore, the low-temperature side fluid flowing in from the first opening 304 of the fixed disk 30 flows through the variable communication passage 404 of the movable disk 40, from the inner side communication portion 404a to the outer side communication portion 404b, and the low-temperature side fluid according to the proportion of the area facing the outer side communication portion 404b (50% / 50% in the illustrated example) flows out from the main low-temperature outlet 305 and the secondary low-temperature outlet 306 of the fixed disk 30.

[0128] In addition, the high-temperature side fluid flowing in from the second opening 307 of the fixed disk 30 flows through the variable communication passage 405 of the movable disk 40, from the inner side communication portion 405a to the outer side communication portion 405b, and a portion of the high-temperature side fluid corresponding to the proportion of the area facing the outer side communication portion 405b (50% / 50% in the example shown) flows out from the main high-temperature outlet 308 and the secondary high-temperature outlet 309 of the fixed disk 30.

[0129] Similarly, the mixed fluid flowing in from the third opening 310 of the fixed disk 30 flows through the variable communication passage 406 of the movable disk 40, from the inner side communication portion 406a to the outer side communication portion 406b, and the mixed fluid according to the proportion of the area facing the outer side communication portion 406b (50% / 50% in the example shown) flows out from the main mixed outlet 311 and the secondary mixed outlet 312 of the fixed disk 30.

[0130] In this way, the combined valve device 1 according to the first embodiment is able to perform functions corresponding to three three-way valves that distribute fluids, etc., with one valve device. Therefore, whereas three three-way valves were originally required, the combined valve device 1 can perform the same functions with one valve device, making it possible to significantly reduce the size of the valve device itself.

[0131] Furthermore, the combined valve device 1 according to the first embodiment can linearly control the flow rates of three fluids, the low-temperature side fluid, the high-temperature side fluid, and the mixed fluid, from 0% to 100% or from 100% to 0%, by rotationally driving one movable disk 40. Therefore, it is possible to prevent a discrepancy in the timing of controlling the flow rate of each fluid, compared to a case in which the flow rates of three fluids, the low-temperature side fluid, the high-temperature side fluid, and the mixed fluid, are controlled using three three-way valves.

[0132] Furthermore, the combined valve device 1 of this embodiment 1 can control the flow rate of the low-temperature side fluid and the high-temperature side fluid by combining the fixed disk 30 and the movable disk 40, which are formed in a flat plate shape. Therefore, even when a fluid corresponding to approximately -100°C is used as the low-temperature side fluid, in addition to the low-temperature side fluid, the high-temperature side fluid flows into and out of the fixed disk 30 and the movable disk 40. Therefore, compared to the case where a low-temperature side fluid of approximately -100°C is controlled by a single three-way valve, it is possible to avoid or suppress exposure of the combined valve device 1 to extremely low temperatures of approximately -100°C, and it becomes possible to handle low-temperature side fluids of approximately -100°C.

[0133] Furthermore, since the composite valve device 1 according to the present embodiment 1 is configured by combining the fixed disc 30 and the movable disc 40 formed in a flat plate shape, the configuration is significantly simple, there is almost no risk of foreign matter being mixed in, and a strainerless system can be realized.

[0134] [Example 1] FIG. 13 is a conceptual diagram showing a constant temperature controller (chiller device) as an example of a temperature control device to which the combined valve device according to the first embodiment of the present invention is applied.

[0135] This chiller device 100 is used, for example, in a semiconductor manufacturing device that involves plasma etching processing, etc., and maintains the temperature of a semiconductor wafer or the like, which is an example of a temperature control target W, at a constant temperature. When a temperature control target W such as a semiconductor wafer is subjected to a plasma etching processing, etc., the temperature may rise due to plasma generation, discharge, etc. Also, a semiconductor wafer or the like, which is an example of a temperature control target W, may need to be switched in a short period of time to a required temperature, such as two stages, depending on the processing step, and maintained at that temperature.

[0136] The chiller device 100 includes a temperature control unit 101 including a table-shaped electrostatic chuck (ESC: Electro Static Chuck) or the like as an example of a temperature control means arranged so as to come into contact with the object of temperature control W. The temperature control unit 101 includes an internal temperature control flow path 102 through which a temperature control fluid including a low-temperature fluid and a high-temperature fluid whose mixture ratio is adjusted flows.

[0137] The combined valve device 1 according to the first embodiment is connected to the temperature control flow path 102 of the temperature control unit 101 via an on-off valve (not shown) that opens and closes the supply of the temperature control fluid to the temperature control flow path 102. A supply port of a low-temperature side fluid supply unit 104 that supplies a low-temperature side fluid adjusted to a predetermined low-temperature side set temperature is connected to a first inlet 7 of the combined valve device 1. A supply port of a high-temperature side fluid supply unit 105 that supplies a high-temperature side fluid adjusted to a predetermined high-temperature side set temperature is connected to a second inlet 11 of the combined valve device 1. A return pipe for the mixed fluid that has flowed through the temperature control flow path 102 of the temperature control unit 101 is connected to a third inlet 15 of the combined valve device 1.

[0138] Furthermore, the main outlet 8 for the low-temperature fluid of the combined valve device 1 is joined to the main outlet 12 for the high-temperature fluid at a first mixing section 106 which is outside the valve body 2 and is an example of the fixed disk 30 side, and the first mixing section 106 is connected to the inlet section of the temperature control flow path 102 of the temperature control section 101. On the other hand, the secondary outlet 9 for the low-temperature fluid of the combined valve device 1 is joined to the main outlet 10 for the mixed fluid at a second mixing section 107 which is outside the valve body 2 and is an example of the fixed disk 30 side, and the second mixing section 107 is connected to the return side of the low-temperature fluid supply section 104.

[0139] Furthermore, the secondary outlet 13 for the high temperature side fluid of the combined valve device 1 is joined to the secondary outlet 14 for the mixed fluid at a third mixing section 108 which is outside the valve body 2 as an example of the fixed disk 30 side, and the third mixing section 108 is connected to the return side of the high temperature side fluid supply section 105.

[0140] FIG. 13(b) is an equivalent circuit showing flow paths when the combined valve device 1 according to the first embodiment is replaced with three three-way valves that perform the same function.

[0141] The combined valve device 1 according to the first embodiment includes a drive motor 109, which is a stepping motor or a servo motor that rotates and drives the movable shaft 41, in the actuator unit 4. The temperature control unit 101 is also provided with a temperature sensor 110 that detects the temperature of the temperature control unit 101. The temperature sensor 110 is connected to a control device (not shown), and the control device controls the driving of the drive motor 109 of the combined valve device 1.

[0142] As shown in FIG. 13(a), the chiller device 100 detects the temperature of the temperature control target W using a temperature sensor 110, and controls the rotation of the drive motor 109 of the combined valve device 1 using a control device based on the detection result of the temperature sensor 110, thereby controlling the temperature of the temperature control target W to be equal to a predetermined set temperature.

[0143] As shown in Fig. 14, the combined valve device 1 controls the rotation of the drive motor 109 to control the mixing ratio of the low-temperature side fluid supplied from the low-temperature side fluid supply unit 104 and the high-temperature side fluid supplied from the high-temperature side fluid supply unit 105, and controls the distribution ratio of the mixed fluid returned from the temperature control unit 101 to the low-temperature side fluid supply unit 104 and the high-temperature side fluid supply unit 105, thereby controlling the temperature of the temperature control fluid, which is a mixture of the low-temperature side fluid and the high-temperature side fluid and is supplied to the temperature control flow path 102 of the temperature control unit 101. The mixing ratio of the low-temperature side fluid and the high-temperature side fluid and the distribution ratio of the mixed fluid to the low-temperature side fluid supply unit 104 and the high-temperature side fluid supply unit 105 are set to have the same relationship. That is, when the mixing ratio of the low-temperature side fluid and the high-temperature side fluid is 8:2, the distribution ratio of the mixed fluid to the low-temperature side fluid supply unit 104 and the high-temperature side fluid supply unit 105 is also set to be 8:2.

[0144] At this time, the combined valve device 1 can control the mixing ratio of the low-temperature side fluid and the high-temperature side fluid with high accuracy in accordance with the rotation angle of the movable shaft 41, making it possible to finely adjust the temperature of the temperature-control fluid. Therefore, the chiller device 100 using the combined valve device 1 according to this embodiment can control the temperature of the temperature-control target W that comes into contact with the temperature control unit 101 to a desired temperature by flowing a temperature-control fluid, the temperature of which has been adjusted to a predetermined temperature by controlling the mixing ratio of the low-temperature side fluid and the high-temperature side fluid, through the temperature-control flow path 102 of the temperature control unit 101. In the above embodiment, a case has been described in which a plurality of inlets are arranged on the inner circumference side and at least two corresponding outlets are arranged on the outer circumference side of the fixed disk, but it is also possible to configure a plurality of inlets to be arranged on the outer circumference side and at least one corresponding outlet to be arranged on the inner circumference side.

[0145] [Embodiment 2] FIG. 15 is a configuration diagram showing a combined valve device according to the second embodiment of the present invention.

[0146] The composite valve device 1 of this embodiment 2 is configured to have, in addition to the functions of the composite valve device of the embodiment 1 described above, a function of supplying the low-temperature side fluid alone to the temperature control unit 101, a function of supplying the high-temperature side fluid alone to the temperature control unit 101, and a function of supplying the mixed fluid alone to the temperature control unit 101.

[0147] As shown in FIG. 15, the combined valve device 1 according to the second embodiment includes a fixed disc 30 and a movable disc 40, similar to the first embodiment.

[0148] 16, the fixed disk 30 basically has first to third valve regions 301 to 303 corresponding to three three-way valves, similar to the first embodiment. The three-way valve constituting the third valve region 303 of the fixed disk 30 is configured to function as two three-way valves.

[0149] In the first valve region 301 of the fixed disk 30, as in the first embodiment, a three-way valve for low-temperature fluid is provided, which includes a first inlet 304 as an example of a flow port through which the low-temperature fluid as the first fluid flows in, and at least two (two in the illustrated example) main low-temperature outlet 305 and secondary low-temperature outlet 306 as examples of branch outlets (branching / mixed flow ports) through which the low-temperature fluid flowing in from the first inlet 304 is branched and flows out, respectively, as in the first embodiment. However, unlike the first embodiment, the main low-temperature outlet 305 and secondary low-temperature outlet 306 are not arranged close to each other in the circumferential direction, but are arranged apart from each other in the circumferential direction. The main low-temperature outlet 305 and secondary low-temperature outlet 306 are formed in a sector shape with a smaller central angle θ5 than in the first embodiment.

[0150] Similarly, in the second valve region 302 of the fixed disk 30, as a three-way valve for high-temperature fluid, a second inlet 307 as an example of a flow port into which a high-temperature fluid as a second fluid flows in, and at least two (two in the illustrated example) main high-temperature outlet 308 and secondary high-temperature outlet 309 as an example of a branch outlet (branch / mixed flow port) through which the high-temperature fluid flowing in from the second inlet 307 is branched and flows out are opened. However, unlike the first embodiment, the main high-temperature outlet 308 and secondary high-temperature outlet 309 are not arranged close to each other in the circumferential direction, but are arranged apart from each other in the circumferential direction. The main high-temperature outlet 308 and secondary low-temperature outlet 309 are formed in a sector shape with a smaller central angle θ5 than the first embodiment.

[0151] Furthermore, in the third valve region 303 of the fixed disk 30, as a three-way valve for mixed fluid, a third inlet 310 as an example of a flow port into which the mixed fluid as the third fluid flows in, and at least two (three in the illustrated example) main mixed outlet 311, secondary mixed outlet 312, and circulating mixed outlet 312a as examples of branch outlets (branch / mixed flow ports) through which the mixed fluid flowing in from the third inlet 310 is branched and flows out are opened. The circulating mixed outlet 312a is disposed adjacent to the main mixed outlet 311 and the secondary mixed outlet 312 at equal intervals. The main mixed outlet 311 and the secondary mixed outlet 312 are formed in a sector shape with a smaller central angle θ5 than in the first embodiment. In addition, the main low temperature outlet 305, the secondary low temperature outlet 306, the main high temperature outlet 308, the secondary high temperature outlet 309, as well as the main mixed outlet 311, the secondary mixed outlet 312, and the circulating mixed outlet 312a are all formed in a sector shape having the same central angle θ5.

[0152] 15(b), a tenth opening 28a corresponding to the circulation mixing outlet 312a is formed in the valve body 2. The tenth opening 28a is connected to a new circulation mixing outlet 15a via a passage 32a. The circulation mixing outlet 15a is opened in the center of the upper end of the back surface 2c of the valve body 2.

[0153] 17, the movable disc 40 is divided into first to third valve regions 401-403 corresponding to the three three-way valves, similar to the fixed disc 30. The movable disc 40 has, on its lower end surface 40b, three variable communication passages 404-406 that connect each inlet of the fixed disc 30 to two or three corresponding branched outlets in a variable manner in terms of the branching ratio of the fluid.

[0154] The variable communication passages 404 to 406 of the movable disc 40 have shapes different from those in the first embodiment.

[0155] Although the central angle of the outer periphery side communication portion 406b of the third variable communication passage 406 is smaller than that of the first embodiment, the third variable communication passage 406 is basically configured in the same manner. The central angle θ6 of the outer periphery side communication portion 406b is set equal to that of the main mixed outlet 311, the secondary mixed outlet 312, etc.

[0156] That is, the third variable communication passage 406 is configured so that the outer circumferential side communication portion 406b communicates with each of the main mixed outlet 311, the secondary mixed outlet 312, and the circulation mixed outlet 312a, or selectively communicates with two adjacent main mixed outlets 311 and the circulation mixed outlet 312a, or the secondary mixed outlet 312 and the circulation mixed outlet 312a.

[0157] On the other hand, the first and second variable communication passages 404, 405 differ from those of the first embodiment in the central angles of the outer periphery side communication portions 404b, 405b and in the positional relationship with the inner periphery side communication portions 404a, 405a.

[0158] To explain further, the central angle θ7 of the outer circumferential communicating portions 404b, 405b of the first and second variable communicating passages 404, 405 is different from that of embodiment 1 and is set larger than the main low temperature outlet 305 and the secondary low temperature outlet 306, as well as the main high temperature outlet 308 and the secondary high temperature outlet 309 of the fixed disk 30.

[0159] In addition, the positions of the outer circumferential side communication portions 404b, 405b of the first and second variable communication passages 404, 405 are different from those in embodiment 1, and are not located in the circumferential center of the main low temperature outlet 305 and secondary low temperature outlet 306, and the main high temperature outlet 308 and secondary high temperature outlet 309 of the fixed disk 30, but are all located at positions displaced (shifted) toward the third variable communication passage 406.

[0160] In the second embodiment, the shape, arrangement and number of the main flow outlet and secondary flow outlet of the fixed disc 30, and further the shape of the variable communication passage of the movable disc 40 are made different from those of the first embodiment, thereby realizing a function of the combined valve gear different from that of the first embodiment.

[0161] Therefore, the first and second variable communication passages 404, 405 are configured so that when the outer periphery side communication portion 404b, 405b of one of the first and second variable communication passages 404, 405, for example the outer periphery side communication portion 404b of the first variable communication passage 404, is connected to only either the main low temperature outlet 305 or the secondary low temperature outlet 306, the outer periphery side communication portion 405b of the other second variable communication passage 405 can be connected to both the main high temperature outlet 308 and the secondary high temperature outlet 309.

[0162] Similarly, the first and second variable communication passages 404, 405 are configured so that when the outer circumferential communication portion 405b of the other second variable communication passage 405 is in communication with only either the main high-temperature outlet 308 or the secondary high-temperature outlet 309, the outer circumferential communication portion 404b of one first variable communication passage 404 is in communication with both the main low-temperature outlet 305 and the secondary low-temperature outlet 306.

[0163] In the second embodiment, the upper end surface 40a of the movable disc 40 is not completely closed, and pressure action holes 407-409 are opened at positions on the upper end surface 40a corresponding to the three variable communication passages 404-406, thereby preventing the movable disc 40 from floating up by applying fluid pressure to the upper end surface 40a of the movable disc 40. The pressure action holes 407-409 apply fluid pressure to the upper end surface 40a of the movable disc 40, as shown in Fig. 18.

[0164] <Operation of the composite valve device> In the combined valve device 1 according to the second embodiment, the flow rates of the low-temperature side fluid, the high-temperature side fluid, and the mixed fluid are controlled as follows.

[0165] As shown in Fig. 15, a low-temperature side fluid adjusted to a predetermined low-temperature set temperature, a high-temperature side fluid adjusted to a predetermined high-temperature set temperature, and a mixed fluid obtained by mixing the low-temperature side fluid and the high-temperature side fluid are supplied to the valve body 2 of the combined valve device 1 through its first to third inlets 7, 11, 15 via piping (not shown). As shown in Fig. 19, the valve body 2 of the combined valve device 1 has its circulation mixing outlet 15a joined to the downstream side of the first joint 106.

[0166] Now, as shown in Figure 20, the combined valve device 1 is positioned at 0°, which is the reference rotation angle of the movable shaft 41, and is stopped at a position where the outer periphery side communication portion 404b of the variable communication passage 404 of the movable disc 40 faces only the main low temperature outlet 305 of the fixed disc 30, the outer periphery side communication portion 405b of the variable communication passage 405 of the movable disc 40 faces only the secondary high temperature outlet 309 of the fixed disc 30, and the outer periphery side communication portion 406b of the variable communication passage 406 of the movable disc 40 faces only the main mixed outlet 311 of the fixed disc 30.

[0167] Then, as shown in FIG. 19, in the combined valve device 1, only the low-temperature side fluid supply unit 104 is connected to the temperature control flow path 102 of the temperature control object 101, and the low-temperature side fluid of a predetermined temperature supplied from the low-temperature side fluid supply unit 104 flows into the temperature control flow path 102 of the temperature control object 101.

[0168] The low temperature fluid as the mixed fluid flowing through the temperature control flow path 102 of the temperature control target 101 returns to the low temperature fluid supply unit 104 .

[0169] On the other hand, in the combined valve device 1, the outer circumferential communication portion 405b of the variable communication passage 405 of the movable disc 40 faces only the secondary high temperature outlet 309 of the fixed disc 30, and the high temperature side fluid that flows from the variable communication passage 405 of the movable disc 40 into the fixed disc 30 flows out from the secondary high temperature outlet 309 of the fixed disc 30 and returns to the high temperature side fluid supply section 105 without being mixed with the low temperature side fluid supplied from the low temperature side fluid supply section 104.

[0170] Furthermore, in the combined valve device 1, the outer circumferential communication portion 406b of the variable communication passage 406 of the movable disc 40 faces only the main mixed outlet 311 of the fixed disc 30, and the low-temperature side fluid as the mixed fluid that flows from the variable communication passage 406 of the movable disc 40 to the fixed disc 30 flows out from the main mixed outlet 311 of the fixed disc 30 and returns directly to the low-temperature side fluid supply section 104.

[0171] Also, as shown in FIG. 21 , the combined valve device 1 is stopped at a position where the movable disc 40 has rotated clockwise by the required angle (11.25°) and the outer circumferential communication portion 404b of the variable communication passage 404 of the movable disc 40 faces both the main low temperature outlet 305 and the secondary low temperature outlet 306 of the fixed disc 30, the outer circumferential communication portion 405b of the variable communication passage 405 of the movable disc 40 faces only the secondary high temperature outlet 309 of the fixed disc 30, and the outer circumferential communication portion 406b of the variable communication passage 406 of the movable disc 40 faces both the main mixed outlet 311 and the circulating mixed outlet 312a of the fixed disc 30.

[0172] Then, the combined valve device 1 has the low-temperature side fluid supply section 104 and the circulating mixing outlet 312a connected to the temperature control flow path 102 of the temperature control object 101, and a portion of the low-temperature side fluid of a predetermined temperature supplied from the low-temperature side fluid supply section 104 flows into the temperature control flow path 102 of the temperature control object 101 while the flow rate of that portion is regulated.

[0173] A part of the low temperature fluid as the mixed fluid flowing through the temperature control flow path 102 of the temperature control target 101 returns to the low temperature fluid supply unit 104 .

[0174] At the same time, a portion of the low-temperature side fluid as the mixed fluid that has flowed into the temperature control flow path 102 of the temperature control target 101 is supplied as is to the temperature control flow path 102. Therefore, a portion of the low-temperature side fluid at a predetermined temperature supplied from the low-temperature side fluid supply unit 104 and the remaining portion of the low-temperature side fluid as the mixed fluid whose temperature has changed (increased) by flowing through the temperature control flow path 102 are supplied to the temperature control flow path 102 in a mixed state.

[0175] Furthermore, as shown in Figure 22, the combined valve device 1 is stopped at a position where the movable disc 40 has rotated clockwise by the required angle (22.5°) and the outer circumferential communication portion 404b of the variable communication passage 404 of the movable disc 40 faces only the secondary low temperature outlet 306 of the fixed disc 30, the outer circumferential communication portion 405b of the variable communication passage 405 of the movable disc 40 faces only the secondary high temperature outlet 309 of the fixed disc 30, and the outer circumferential communication portion 406b of the variable communication passage 406 of the movable disc 40 faces only the circulation mixture outlet 312a of the fixed disc 30.

[0176] Then, in the combined valve device 1, the flow path of the low-temperature side fluid supply unit 104, the flow path of the high-temperature side fluid supply unit 105, and the temperature control flow path 102 of the temperature control target 101 are separated from each other.

[0177] On the other hand, as shown in Figure 23, the combined valve device 1 is stopped at a position where the movable disc 40 has rotated a required angle (33.75°) in the clockwise direction, and the outer circumferential communication portion 404b of the variable communication passage 404 of the movable disc 40 faces only the secondary low temperature outlet 306 of the fixed disc 30, the outer circumferential communication portion 405b of the variable communication passage 405 of the movable disc 40 faces both the primary high temperature outlet 308 and the secondary high temperature outlet 309 of the fixed disc 30, and the outer circumferential communication portion 406b of the variable communication passage 406 of the movable disc 40 faces both the secondary mixed outlet 312 and the circulating mixed outlet 312a of the fixed disc 30.

[0178] Then, the high-temperature side fluid supply section 105 and the circulating mixing outlet 312a of the combined valve device 1 are connected to the temperature control flow path 102 of the temperature control object 101, and a portion of the low-temperature side fluid of a predetermined temperature supplied from the high-temperature side fluid supply section 105 flows into the temperature control flow path 102 of the temperature control object 101 while the flow rate of that portion is regulated.

[0179] A part of the high temperature fluid as the mixed fluid flowing through the temperature control flow path 102 of the temperature control target 101 returns to the high temperature fluid supply unit 105 .

[0180] At the same time, a part of the high-temperature side fluid as the mixed fluid that has flowed into the temperature control flow path 102 of the temperature control target 101 is supplied as is to the temperature control flow path 102. Therefore, a part of the high-temperature side fluid at a predetermined temperature supplied from the high-temperature side fluid supply unit 105 and the remaining part of the high-temperature side fluid as the mixed fluid whose temperature has changed (decreased or increased) by flowing through the temperature control flow path 102 are supplied to the temperature control flow path 102 in a mixed state.

[0181] Finally, as shown in Figure 24, the combined valve device 1 is stopped at a position where the movable disc 40 has rotated the required angle (45°) in the clockwise direction and the outer circumferential communication portion 404b of the variable communication passage 404 of the movable disc 40 faces only the secondary low temperature outlet 306 of the fixed disc 30, the outer circumferential communication portion 405b of the variable communication passage 405 of the movable disc 40 faces only the main high temperature outlet 308 of the fixed disc 30, and the outer circumferential communication portion 406b of the variable communication passage 406 of the movable disc 40 faces only the secondary mixed outlet 312 of the fixed disc 30.

[0182] Then, in the combined valve device 1, only the high-temperature side fluid supply unit 105 is connected to the temperature control flow path 102 of the temperature control object 101, and the high-temperature side fluid of a predetermined temperature supplied from the high-temperature side fluid supply unit 105 flows into the temperature control flow path 102 of the temperature control object 101.

[0183] The high temperature fluid as a mixed fluid flowing through the temperature control flow path 102 of the temperature control target 101 returns to the high temperature fluid supply unit 105 .

[0184] Experimental Example The inventors prototyped a composite valve device 1 equipped with a fixed disk 30 and a movable disk 40 as shown in Figures 16 and 17, and conducted an experiment to confirm how the flow coefficient Cv value of the low-temperature side fluid, high-temperature side fluid, and mixed fluid changes depending on the position of the movable disk 40 accompanying the rotation of the movable shaft 41. Note that Novec7200 (trade name: registered trademark, manufactured by 3M Company) with a temperature of -60°C was used as the low-temperature side fluid, and Novec7200 (trade name: registered trademark, manufactured by 3M Company) with a temperature of 50°C was used as the high-temperature side fluid.

[0185] The flow coefficient Cv values ​​of the low temperature side fluid, the high temperature side fluid, and the temperature control fluid obtained by mixing the low temperature side fluid and the high temperature side fluid were measured by moving a flow sensor with high detection accuracy individually to each inlet and each outlet of the valve body 2 while changing the rotation angle of the movable shaft 41 of the combined valve device 1.

[0186] Fig. 28 is a graph showing the results of the above-mentioned experimental example. In Fig. 28, the horizontal axis indicates the rotation angle of the movable shaft 41, and the vertical axis indicates the flow coefficient Cv value of each fluid.

[0187] In FIG. 28, "Cold Sup → Cold Main" refers to the case where the low temperature fluid flows in from the first inlet 7 of the valve body 2 and flows out from the main outlet 8 for the low temperature fluid, "Cold Sup → Cold Cycle" refers to the case where the low temperature fluid flows in from the first inlet 7 and flows out from the secondary outlet 9 for the low temperature fluid, "Hot Sup → Hot Main" refers to the case where the high temperature fluid flows in from the second inlet 11 and flows out from the main outlet 12 for the high temperature fluid, "Hot Sup → Hot Cycle" refers to the case where the high temperature fluid flows in from the second inlet 11 and flows out from the secondary outlet 13 for the high temperature fluid, "Return → Cold Ret" refers to the case where the mixed fluid flows in from the third inlet 15 and flows out from the main outlet 10 for the mixed fluid, and "Return → Hot "Ret" indicates the flow coefficient Cv value when the mixed fluid flows in through the third inlet 15 and flows out through the secondary outlet 14 for the mixed fluid, and "Return→Byp" indicates the flow coefficient Cv value when the mixed fluid flows in through the third inlet 15 and flows out through the circulation mixing outlet 15a.

[0188] As a result, as is clear from the graph shown in Figure 28, it was found that the Cv values, which indicate the flow coefficients of the high temperature side fluid and the mixed fluid, increase or decrease approximately linearly with the rotation angle of the movable shaft 41, and that the flow rates of the low temperature side fluid, the high temperature side fluid and the mixed fluid can be precisely controlled.

[0189] The other configurations and operations are the same as those of the first embodiment, and therefore the description thereof will be omitted.

[0190] [Embodiment 3] FIG. 25 is a configuration diagram showing a combined valve device according to the third embodiment of the present invention.

[0191] As shown in FIG. 25, the combined valve device 1 according to the third embodiment is configured so that the movable disc 40 is not rotationally driven by a movable shaft 41, but by a drive gear 202 which is driven via a drive shaft 201 via a gear portion 200 which is provided integrally or separately on the outer periphery of the movable disc 40.

[0192] In this way, in the case of the combined valve device 1 of this embodiment 3, it is possible to arrange the actuator unit 4 to the side of the valve body 2, making it possible to reduce the overall height of the combined valve device 1.

[0193] The other configurations and operations are the same as those of the first embodiment, and therefore the description thereof will be omitted.

[0194] [Embodiment 4] FIG. 26 is a configuration diagram showing a combined valve device according to the fourth embodiment of the present invention.

[0195] As shown in FIG. 26, in the composite valve device 1 of this embodiment 4, a fixed disc 30 as an example of a fixed side valve body and a movable disc 40 as an example of a movable valve body are not formed in the shape of a circular flat plate in plan, but rather the fixed disc 30 and the movable disc 40 are formed in the shape of a rectangular flat plate in plan.

[0196] Furthermore, in the combined valve device 1 of this embodiment 4, the movable disc 40 is configured to move relative to the fixed disc 30 by sliding in a linear manner, rather than by rotating the movable disc 40 relative to the fixed disc 30.

[0197] 26, the fixed disk 30 is provided with first to third inlets 304, 307, 310, as well as a main low temperature outlet 305 and a secondary low temperature outlet 306, a main high temperature outlet 308 and a secondary high temperature outlet 309, and a main mixed outlet 311 and a secondary mixed outlet 312 corresponding to the respective inlets 304, 307, 310. Each of the inlets 304, 307, 310 is disposed so as to be located in the center.

[0198] On the other hand, the movable disc 40 is provided with first to third variable communication passages 404 to 406, respectively.

[0199] As shown in FIG. 27, the movable disk 40 is configured to slide linearly relative to the fixed disk 30 to selectively or simultaneously connect the first to third inlets of the fixed disk 30 to the corresponding main low temperature outlet 305 and secondary low temperature outlet 306, main high temperature outlet 308 and secondary high temperature outlet 309, and main mixed outlet 311 and secondary mixed outlet 312.

[0200] In the combined valve device 1 according to the fourth embodiment, it is only necessary to move the movable disc 40 linearly, so that it is possible to reduce the size of the actuator unit 4 and the entire device.

[0201] The other configurations and operations are the same as those of the first embodiment, and therefore the description thereof will be omitted.

[0202] [Embodiment 5] FIG. 29 is a configuration diagram showing a temperature control device using a combined valve device according to the fifth embodiment of the present invention.

[0203] In the temperature control device 100 according to the fifth embodiment, the combined valve device 1 according to the first or second embodiment is used as it is.

[0204] As shown in the equivalent circuit of Figure 30, the temperature control device 100, which is also related to the method of using the combined valve device 1 of embodiment 1 or 2, is configured to switch between a low-temperature side fluid supplied from a low-temperature side fluid supply unit 104 and a high-temperature side fluid supplied from a high-temperature side fluid supply unit 105, and supply them to a temperature control flow path 102 of a temperature control target 101.

[0205] When the combined valve device 1 is switched to the state shown in Figure 14(a) or Figure 20, the low-temperature side fluid supplied from the low-temperature side fluid supply section 104 is introduced into the first inlet 7 of the valve body 2, flows through the passage and the first opening 20 into the first inlet 304 of the fixed disc 30, and all of it flows out from the variable connecting passage 404 of the movable disc 40 to the main low-temperature outlet 305, as shown in Figures 29(a) and 30(a).

[0206] In the combined valve device 1, the low-temperature side fluid flowing out to the main low-temperature outlet 305 is discharged from the passage and the main outlet 8 via the fourth inlet 23 of the valve body 2, and is supplied from the first junction 106 to the temperature control flow path 102 of the temperature control object 101.

[0207] The low-temperature fluid that flows through the temperature control flow path 102 of the temperature control object 101 is introduced through the third inlet 15 of the valve body 2, flows through the passage and the third opening 22 into the third inlet 310 of the fixed disk 30, and all of it flows out through the variable connecting passage 406 of the movable disk 40 to the main mixed outlet 311.

[0208] In the combined valve device 1, the low-temperature side fluid flowing out from the main mixed flow outlet 311 is discharged from the passage and the main outlet 10 via the eighth opening 27 of the valve body 2, and returns to the low-temperature side fluid supply section 104 from the second junction section 107.

[0209] Moreover, in the combined valve device 1, the high temperature side fluid supplied from the high temperature side fluid supply section 105 is introduced from the second inlet 11 of the valve body 2, flows into the second inlet 307 of the fixed disk 30 via the passage and the second opening 21, and all of it flows out from the variable communication passage 405 of the movable disk 40 to the secondary high temperature outlet 309. Then, the high temperature side fluid that has flowed out to the secondary high temperature outlet 309 is discharged from the secondary outlet 13 of the valve body 2 via the seventh opening 26 and the passage, and returns to the high temperature side fluid supply section 105 via the third junction 108.

[0210] Thereafter, in the combined valve device 1, the movable disc 40 is rotated by 45 degrees over a predetermined short period of time (approximately 6 to 8 seconds).

[0211] Then, the combined valve device 1 is switched to the state shown in Figure 14(e) or Figure 24, and as shown in Figures 29(a) and 30(b), the high-temperature side fluid supplied from the high-temperature side fluid supply section 105 is introduced into the second inlet 11 of the valve body 2, flows into the second inlet 307 of the fixed disc 30 via the passage and the second opening 21, and all of it flows out from the variable connecting passage 405 of the movable disc 40 to the main high-temperature outlet 308.

[0212] In the combined valve device 1, the high-temperature side fluid flowing out to the main high-temperature outlet 308 is discharged from the passage and the main outlet 12 via the sixth opening 25 of the valve body 2, and is supplied from the first junction 106 to the temperature control flow path 102 of the temperature control object 101.

[0213] The high-temperature side fluid that flows through the temperature control flow path 102 of the temperature control object 101 is introduced through the third inlet 15 of the valve body 2, flows through the passage and the third opening 22 into the third inlet 310 of the fixed disk 30, and all of it flows out from the variable connecting passage 406 of the movable disk 40 to the secondary mixed outlet 312.

[0214] In the combined valve device 1, the high-temperature side fluid flowing out from the secondary mixed outlet 312 is discharged from the passage and the secondary outlet 14 via the ninth opening 28 of the valve body 2, and returns to the high-temperature side fluid supply section 105 from the third junction section 108.

[0215] Moreover, in the combined valve device 1, the low-temperature side fluid supplied from the low-temperature side fluid supply section 104 is introduced from the first inlet 7 of the valve body 2, flows into the first inlet 304 of the fixed disk 30 via the passage and the first opening 20, and all of it flows out from the variable communication passage 404 of the movable disk 40 to the secondary low-temperature outlet 306. Then, the low-temperature side fluid that has flowed out to the secondary low-temperature outlet 306 is discharged from the secondary outlet 9 of the valve body 2 via the fifth opening 24 and the passage, and returns to the low-temperature side fluid supply section 104 via the second junction 107.

[0216] In this manner, the temperature control device 100 according to the fifth embodiment can switch between supplying a low-temperature fluid or a high-temperature fluid to the temperature control flow path 102 of the temperature control target 101.

[0217] During this time, in the temperature control device 100, when the state in which only low-temperature side fluid is supplied from the low-temperature side fluid supply unit 104 to the temperature control flow path 102 of the temperature control target 101 is switched to a state in which only high-temperature side fluid is supplied from the high-temperature side fluid supply unit 105, a state in which a mixture of low-temperature side fluid and high-temperature side fluid is supplied is intervened.

[0218] The other configurations and operations are the same as those of the first or second embodiment, and therefore the description thereof will be omitted.

[0219] In the above embodiment, the combined valve device has been described as branching fluids flowing in from a plurality of inlets. However, the combined valve device is not limited to branching fluids flowing in from a plurality of inlets, and it goes without saying that the combined valve device can also be configured as a combined valve device that mixes fluids in a desired mixing ratio by reversing the flow direction of the fluids.

[0220] To explain further, each inlet and each outlet becomes an outlet and an inlet, each inlet and each outlet becomes an outlet and an inlet, branching becomes mixing, and a main low temperature outlet and a secondary low temperature outlet as examples of branching outlets become a main low temperature inlet and a secondary low temperature inlet. However, the variable communication passages remain variable communication passages. [Explanation of symbols]

[0221] 1...Composite valve device 2. Valve body 3. Valve section 4...Actuator section 5…Sealing section 6...Coupling part 30…Fixed disk 304…First inlet 307…Second inlet 310…Third inlet 305,306,308,309,311,312... Outlet 40…Movable disc 404, 405, 406… Variable communication passage 100…Chiller unit

Claims

1. a fixed-side valve body having a plurality of flow ports independent of each other, at least two of which are provided corresponding to each of the flow ports, and through which the fluid flowing through each of the flow ports is branched or mixed and flows; a movable valve body arranged in close contact with the fixed valve body so as to be movable, the movable valve body having a plurality of variable communication passages for connecting each of the flow ports to the at least two corresponding branching / mixing flow ports in a variable branching / mixing ratio of the fluid; A composite valve device comprising:

2. The fixed valve body is a fixed disk formed in a circular shape in plan view, the plurality of flow ports are arranged along a circumferential direction on an inner peripheral side of the fixed disk, The combined valve device according to claim 1 , wherein the branching / mixing flow ports, at least two of which are provided corresponding to each of the flow ports, are disposed on the outer circumferential side of the corresponding flow ports of the fixed disk in the radial direction.

3. The combined valve device according to claim 2 , wherein the plurality of circulation ports are disposed at N equal positions along a circumferential direction of the fixed disk, where N is the number of the circulation ports.

4. The combined valve device according to claim 2 , wherein at least two of the branching / mixing flow ports provided corresponding to each of the flow ports are disposed adjacent to each other along the circumferential direction of the fixed disk.

5. The combined valve device according to claim 2 , wherein at least two of the branching / mixing flow ports provided corresponding to each of the flow ports are spaced apart from each other in the circumferential direction of the fixed disk.

6. The movable valve body is a movable disk having a circular shape in plan view and arranged rotatably in close contact with the fixed valve body, The combined valve device according to claim 1 , wherein the plurality of variable communication passages are arranged apart from one another along the circumferential direction of the movable disc.

7. The combined valve device according to claim 6, wherein each of the variable communication passages is formed in a groove shape that is open only on the fixed valve body side along a radial direction of the movable disc.

8. 2. The combined valve device according to claim 1, wherein each of the variable communication passages has an end portion on the side of each of the flow ports of the fixed valve body and an end portion on the side of each of the branching / mixing flow ports formed in a shape corresponding to the opening shape of each of the flow ports and each of the branching / mixing flow ports.

9. The combined valve device according to claim 8 , wherein an opening shape of each of the flow ports and each of the branching / mixing flow ports is a sector shape or a circle shape.

10. The combined valve device according to claim 9 , wherein one ends of the plurality of variable communication passages are always in communication with the corresponding flow ports even when the movable valve element moves.

11. each of the variable communication passages communicates with one of the branch / mixture flow ports provided in at least two of the branch / mixture flow ports of the fixed-side valve body at a first position; In the second position, the flow ports of the fixed valve body communicate with both of the branching / mixing flow ports provided in at least two of the fixed valve body, The combined valve device according to claim 1 , wherein, in the third position, each of the flow ports of the fixed-side valve body communicates with the other of the at least two branch / mixture flow ports provided.

12. 12. The combined valve device according to claim 11, wherein, in each of the plurality of variable communication passages, at a first position, one of the branch / mixture flow ports that communicate with each other is different from the other of the branch / mixture flow ports that are provided in each of the plurality of variable communication passages, and at least two of the branch / mixture flow ports are provided corresponding to the plurality of flow ports.

13. 2. The combined valve device according to claim 1, wherein the plurality of flow ports include three flow ports through which a high-temperature side fluid, which is the same fluid and has a relatively high temperature, a low-temperature side fluid, which is the same fluid and has a relatively low temperature, and a mixed fluid obtained by mixing the high-temperature side fluid and the low-temperature side fluid, respectively, flow.

14. 14. The combined valve device according to claim 1 or 13, wherein the branch / mixing flow ports, at least two of which are provided corresponding to the multiple flow ports of the fixed valve body and each of the flow ports, are such that a specific flow port and a specific branch / mixing flow port are pre-connected on the fixed valve body side.

15. 15. The combined valve device according to claim 14, wherein, among the specific branch / mixed flow ports, one branch / mixed flow port is a main branch / mixed flow port through which the high-temperature side fluid mainly flows, and one branch / mixed flow port is a main branch / mixed flow port through which the low-temperature side fluid mainly flows.

16. 15. The combined valve device according to claim 14, wherein among the specific branch / mixed flow ports, one branch / mixed flow port is a secondary branch / mixed flow port through which the high temperature side fluid branches off and flows, and one branch / mixed flow port is a secondary branch / mixed flow port through which the mixed fluid branches off to the high temperature side fluid and flows.

17. 15. The combined valve device according to claim 14, wherein among the specific branch / mixed flow ports, one branch / mixed flow port is a subordinate branch / mixed flow port through which the low-temperature side fluid branches off and flows, and one branch / mixed flow port is a subordinate branch / mixed flow port through which the mixed fluid branches off to the low-temperature side fluid and flows.

18. The branching / mixing flow ports are provided in such a manner that at least two of the branching / mixing flow ports are provided in correspondence with the plurality of flow ports of the fixed valve body and each of the flow ports. the main high-temperature side branch / mixing flow port and the secondary high-temperature side branch / mixing flow port through which the high-temperature side fluid branches and flows; the branch / mixed flow port on the main low-temperature side and the branch / mixed flow port on the secondary low-temperature side through which the low-temperature side fluid branches and flows; the branch / mixed flow port on a high temperature side through which the mixed fluid branches and flows, the branch / mixed flow port on a low temperature side, and the branch / mixed flow port on a supply side through which the mixed fluid branches to a supply side of the mixed fluid; 14. The combined valve device of claim 13, comprising:

19. The combined valve device according to claim 18 , wherein the main branch / mixed flow port on the high temperature side, the main branch / mixed flow port on the low temperature side, and the branch / mixed flow port on the supply side are pre-connected on the fixed valve body side.

20. The combined valve device according to claim 18 , wherein the branch / mixed flow port on the high temperature side and the branch / mixed flow port on the high temperature side are connected in advance on the fixed valve body side.

21. The combined valve device according to claim 18 , wherein the high temperature side secondary branch / mixed flow port, the low temperature side secondary branch / mixed flow port, and the supply side branch / mixed flow port are pre-connected on the fixed valve body side.

22. 2. The combined valve device according to claim 1, wherein the fixed valve body and the movable valve body are both made of ceramics.

23. The combined valve device according to claim 22, wherein the plurality of flow ports and the plurality of branching / mixing flow ports provided on the fixed valve body, and the plurality of variable communication passages provided on the movable valve body, have corners formed in a curved shape when viewed in a plan view.

24. a temperature control means having a temperature control flow path through which a temperature control fluid, which is made of a low-temperature side fluid and a high-temperature side fluid whose mixing ratio has been adjusted, flows; a first supply means for supplying the low-temperature fluid adjusted to a predetermined first temperature on the low-temperature side; a second supply means for supplying the high-temperature side fluid adjusted to a second predetermined temperature on the high-temperature side; a composite valve device connected to the first supply means and the second supply means, for adjusting a mixing ratio of the low-temperature side fluid supplied from the first supply means and the high-temperature side fluid supplied from the second supply means and flowing the fluid through the temperature control flow path, and for branching a mixed fluid of the low-temperature side fluid and the high-temperature side fluid that has flowed through the temperature control flow path and returning the mixed fluid to the first supply means and the second supply means; Equipped with A temperature control device using the composite valve device according to any one of claims 1 to 23 as the composite valve device.

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