Detection device and method of manufacturing the same

Abstract

To provide a technique that reduces design constraints while suppressing an increase in cost.SOLUTION: A detection device is provided, comprising a conductive first member 13, a conductive second member 14 arranged away from the first member 13, and a first structure 12 configured to elastically deform at least in part when an acceleration greater than or equal to a predetermined value is applied so as to cause the second member 14 to be in contact with the first member 13.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a sensing device and a method for manufacturing a sensing device. [Background technology]

[0002] There is known an impact sensor that includes a support, a vibrator that is a cantilever supported by the support, and a detection means that is attached to the vibrator and detects the displacement of the vibrator (see, for example, Patent Document 1). The support has a silicon base, and the vibrator has a silicon thin plate that is integral with and continuous with the silicon base of the support. The detection means is a thin-film type displacement sensor formed on the vibrator, and is a thin-film type displacement sensor that is composed of a thin film having piezoelectric or electrostrictive properties, and an upper electrode and a lower electrode that sandwich the thin film. By configuring the impact sensor in this way, adhesives are not required and it is possible to manufacture the sensor by batch processing.

[0003] Also, in a piezoelectric shock sensor in which a plurality of electrodes are formed on both the front and back surfaces of a piezoelectric ceramic substrate and both ends of the piezoelectric ceramic substrate in the longitudinal direction are supported, the piezoelectric ceramic substrate is divided into two in the width direction and has two sets of electrode pairs formed on the front and back surfaces, each electrode pair being polarized in opposite directions at the longitudinal center portion and the portions outside the two inflection boundaries, and the central portions of the two electrode pairs are also polarized in opposite directions, so that the two sets of electrode pairs serve as signal detection electrodes (see, for example, Patent Document 2). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 11-51957 [Patent Document 2] JP 2007-93538 A Summary of the Invention [Problem to be solved by the invention]

[0005] An impact is a phenomenon that occurs in a short time, for example, less than 10 ms. Therefore, when using a conventional impact sensor (which may be an acceleration sensor), it is necessary to sample at least once every 10 ms. Sampling at such intervals increases power consumption, which can lead to high operating costs. In addition, conventional impact sensors have impact detection elements on a beam structure. Elements having piezoelectric or electrostrictive properties are used for these impact detection elements. These elements require an amplification circuit including an amplifier because the signals generated by impacts are very small. In addition, electrostrictive elements require a constant current to detect impacts, which increases power consumption. Furthermore, since these elements are formed on a beam structure, the manufacturing method becomes complicated, which causes variations in characteristics and increases production costs. In addition, the materials for the beam structure are limited to materials for which microfabrication technology has been established, such as silicon, and there are restrictions such as the inability to use materials with different Young's moduli, such as plastics.

[0006] In view of the above-mentioned problems, an object of the present disclosure is to provide a technique that reduces design constraints while suppressing increases in costs. [Means for solving the problem]

[0007] One aspect of the present disclosure is a detection device comprising: a conductive first member; a conductive second member arranged at a distance from the first member; and a first structure in which at least a portion of the second member elastically deforms when an acceleration equal to or greater than a predetermined value is applied to the first member, thereby causing the second member to contact the first member.

[0008] The detection device may be, for example, an impact sensor, an acceleration sensor, or a vibration sensor. The detection device in the present disclosure detects whether or not an acceleration equal to or greater than a predetermined value is applied. The predetermined value is a lower limit value of the acceleration to be detected. The predetermined value can be set arbitrarily by adjusting the material and shape of the first structure, the distance between the first member and the second member when stationary, and the like.

[0009] At least a part of the first structure elastically deforms when acceleration is applied. For example, at least a part of the first structure may have an elastic body. This elastic deformation occurs due to an inertial force acting on the first structure. The degree of deformation in this elastic deformation increases as the acceleration applied to the first structure increases. Then, when an acceleration of a predetermined value or more is applied, at least a part of the first structure deforms so that the second member comes into contact with the first member. As a result, the first member and the second member are brought into a conductive state, and by detecting this conductive state, it is possible to detect that an acceleration of a predetermined value or more has been applied.

[0010] The first structure may also include a base on which the first member is disposed, and a third member on which the second member is disposed and which, when an acceleration equal to or greater than the predetermined value is applied, elastically deforms at least a portion thereof, causing the second member to come into contact with the first member. The base on which the first member is disposed is, for example, a member fixed to an object. The object is, for example, luggage, and is an object for which it is required to detect whether an acceleration equal to or greater than a predetermined value is applied. The third member on which the second member is disposed is a member which elastically deforms at least a portion thereof when an acceleration is applied. Then, when an acceleration equal to or greater than the predetermined value is applied, at least a portion of the third member elastically deforms so that the first member and the second member come into contact. This causes the first member and the second member to be in a conductive state.

[0011] The third member may have a cantilever or doubly supported beam structure. By having the cantilever or doubly supported beam structure, when an acceleration equal to or greater than a predetermined value is applied, distortion occurs in the beam, making it possible for the first member and the second member to come into contact with each other.

[0012] Also, an insulating spacer may be provided between the base and the third member. This spacer may be a part of the first structure. By providing such an insulating spacer, the third member can be easily disposed. For example, the base and the spacer may be bonded with an adhesive, and the third member and the spacer may be bonded with an adhesive.

[0013] The device may further include a circuit for storing the contact between the first member and the second member. The contact between the first member and the second member can be monitored in real time, but if a circuit for storing the contact is provided, it is possible to know later whether or not an acceleration of a predetermined value or more has been applied. For example, if a detection device is attached to the luggage, it is possible to detect after the luggage has been transported whether or not an acceleration of a predetermined value or more has been applied during the transportation of the luggage.

[0014] The circuit may include a comparator having a reference terminal to which a first voltage is applied, an input terminal to which the second member is electrically connected and to which a second voltage higher than the first voltage is applied via a switch, and an output terminal, a first ground wiring electrically connecting the first member to ground, and a second ground wiring electrically connecting the input terminal to the ground via a capacitor. When the voltage of the input terminal of the comparator is higher than the voltage of the reference terminal, the voltage of the output terminal becomes 0, and when the voltage of the input terminal is lower than the voltage of the reference terminal, the voltage of the output terminal becomes a voltage other than 0. With this configuration, the capacitor can be charged by first placing the switch in a conductive state. Then, when charging of the capacitor is completed, the switch is placed in a cut-off state. As a result, a second voltage is applied to the input terminal. At this time, the output from the output terminal of the comparator is 0. On the other hand, when an acceleration of a predetermined value or more is applied, the second member is electrically connected to ground, so that , the charge is discharged from the capacitor. As a result, the voltage at the input terminal of the comparator becomes lower than the voltage at the reference terminal, and the voltage at the output terminal becomes non-zero. This state is maintained until the switch is turned on, so by detecting the voltage at the output terminal, it is possible to determine whether or not an acceleration greater than a predetermined value has been applied.

[0015] The circuit may also include a negative logic SR latch having a set terminal to which the second member is electrically connected and to which a first voltage is applied via a resistor, a reset terminal to which a second voltage is applied, and an output terminal, and a first ground wiring electrically connecting the first member to ground. The first voltage and the second voltage may be equal or different. When the input to the set terminal and the input to the reset terminal are both high, the SR latch maintains the previous state of the output from the output terminal. When the input to the reset terminal is high and the input to the set terminal becomes low, the output from the output terminal becomes high. Even if the input to the set terminal returns to high thereafter, the output from the output terminal remains high. On the other hand, when the input to the set terminal is high and the input to the reset terminal becomes low, the output from the output terminal becomes low. Even if the input to the reset terminal returns to high thereafter, the output from the output terminal remains low. With this configuration, when an acceleration equal to or greater than a predetermined value is not applied, the output from the output terminal remains high. On the other hand, when an acceleration equal to or greater than a predetermined value is applied, the set terminal is electrically connected to ground, and the input of the set terminal goes low. As a result, the output from the output terminal goes low. Even if the first member and the second member are subsequently separated, the output from the output terminal remains low. This state is maintained until the input of the reset terminal is made low, so by detecting the voltage of the output terminal, it is possible to determine whether or not an acceleration equal to or greater than a predetermined value has been applied.

[0016] Moreover, one aspect of the present disclosure is a method for manufacturing the above-mentioned detection device, the method including the steps of: determining a material and a shape of the third member such that, when an acceleration equal to or greater than the predetermined value is applied, at least a portion of the third member elastically deforms to cause the second member to contact the first member; forming the third member according to the determined material and shape; and fixing the third member to the base via an insulating spacer such that a space exists in a portion between the base and the third member.

[0017] There is a correlation between the predetermined value and the material and shape of the third member. Therefore, by setting a predetermined value as the acceleration to be detected, the material and shape of the third member can be determined. The relationship between the predetermined value and the material and shape of the third member may be obtained in advance. The third member may be formed by including a dry film resist, or may be formed by, for example, cutting out from a flat plate. A conductive film may be formed on this flat plate in advance. In this way, when the third member is formed from the flat plate, the second member is also formed at the same time. The base can be formed in the same manner. However, since the base does not need to elastically deform when an acceleration equal to or greater than a predetermined value is applied, it may be formed to have a predetermined shape. When the third member is fixed to the base via an insulating spacer, the base and the third member are arranged so that they protrude from the spacer. The third member elastically deforms at the portion protruding from the spacer, and the second member can come into contact with the first member. Effect of the Invention

[0018] According to the present disclosure, it is possible to provide a technique that reduces design constraints while suppressing increases in costs. [Brief description of the drawings]

[0019] [Figure 1] A cross-sectional view of an impact sensor. [Diagram 2] 11A and 11B are diagrams showing examples of the shape of a beam portion. [Diagram 3] 3 is a diagram showing an example of a schematic configuration of a first circuit of the impact sensor according to the first embodiment. FIG. [Figure 4] 13 is a diagram showing an example of a schematic configuration of a second circuit of the impact sensor according to the second embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0020] A detection device according to an embodiment of the present disclosure will be described below with reference to the drawings. Note that each configuration and their combinations in the embodiments are merely examples, and addition, omission, substitution, and other modifications of the configurations are possible as appropriate within the scope of the present disclosure. The present disclosure is not limited by the embodiments, but is limited only by the claims.

[0021] First Embodiment In the following, an impact sensor will be described as an example of a detection device. FIG. 1 is a cross-sectional view of the impact sensor 1. Note that the relative sizes of the various components are different from the actual sizes. The impact sensor 1 is attached to an object 10. The object 10 is, for example, luggage. The impact sensor 1 is attached using an adhesive to a portion of the object 10 where impacts are easily transmitted, such as near a corner of the object 10.

[0022] The impact sensor 1 has a base 11 that is attached to an object 10, and a beam 12 that is disposed at a distance from the base 11. The base 11 and the beam 12 are made of, for example, a dry film resist, but the material is not limited to this, and for example, silicon, polyethylene naphthalate (PEN), other resins, etc. can also be used. When the dry film resist is used, laser processing that is required for other materials is not required, so that the manufacturing time can be shortened. In addition, since laser processing may cause thermal damage to the edge portion, the dry film resist can suppress damage. In addition, different materials can be used for the base 11 and the beam 12. At least the material of the beam 12 is selected so that it can be elastically deformed. In the following description, the direction from the base 11 to the beam 12 (upward in FIG. 1) is defined as the upward direction, and the direction from the beam 12 to the base 11 (downward in FIG. 1) is defined as the downward direction. In addition, the direction perpendicular to the vertical direction is defined as the horizontal direction. The terms "upper" and "lower" are defined for the sake of explanation, and it is not necessary that the base 11 and the beam 12 are arranged in the vertical direction when the impact sensor 1 is attached to the object 10. For example, when detecting an impact in the horizontal direction, the impact sensor 1 can be attached to the object 10 in a state rotated 90 degrees. The beam 12 is an example of a third member or an elastic body. The beam 12 may be configured to include multiple members. It is sufficient that at least a portion of the beam 12 is configured to be elastically deformable.

[0023] A first member 13 is provided above the base 11, and a second member 14 is provided below the beam 12. The first member 13 and the second member 14 are configured to include a conductive material. The conductive material is, for example, gold (Au), but is not limited thereto. The first member 13 and the second member 14 may include different materials. The first member 13 and the second member 14 are formed in a film shape on the surfaces of the base 11 and the beam 12 by, for example, photolithography. As another example, the first member 13 and the second member 14 may be formed in a film shape on the surfaces of the base 11 and the beam 12 by plating including vapor deposition. As another example, the first member 13 and the second member 14 may be bonded to the base 11 and the beam 12, respectively, by using an adhesive. As another example, the first member 13 and the second member 14 may be formed by applying a conductive paint to the base 11 and the beam 12.

[0024] The shock sensor 1 has a spacer 15 between the base 11 and the beam 12. The spacer 15 is formed by laminating, for example, a dry film resist. This eliminates the need to apply an adhesive. As another example, the spacer may be made of an electrically insulating material such as glass. Alternatively, the spacer 15 may be a member formed as a material. In this case, the spacer may be bonded to the base 11 and the beam 12 by an adhesive. When the spacer is bonded by an adhesive, it may be difficult to apply the adhesive evenly, it may be difficult to bond the spacer at an appropriate position, vibration loss may occur, or deterioration may occur over time. On the other hand, these problems can be solved by forming the spacer 15 by laminating a dry film resist. The base 11, the beam 12, and the spacer 15 are an example of the first structure.

[0025] A first outgoing wiring 18 is adhered to the first member 13 of the base 11 with a conductive adhesive 19. Similarly, a second outgoing wiring 20 is adhered to the second member 14 of the beam portion 12 with a conductive adhesive 21. Note that the connection between the first member 13 and the first outgoing wiring 18 and the connection between the second member 14 and the second outgoing wiring 20 are not limited to the conductive adhesive, and may be made by welding, for example, or by a connector.

[0026] The base 11 and the beam 12 protrude horizontally from the spacer 15 in the same direction. Therefore, a space exists between the base 11 and the beam 12. When an acceleration in the vertical direction is applied to the impact sensor 1, the beam 12 approaches the base 11 due to elastic deformation. When an acceleration of a predetermined value or more is applied, the beam 12 comes into contact with the base 11. This brings the first member 13 and the second member 14 into contact with each other, allowing electrical conduction. The contact between the first member 13 and the second member 14 can be determined by detecting electrical conduction between the first lead-out wiring 18 connected to the first member 13 and the second lead-out wiring 20 connected to the second member 14. The circuit for detecting this electrical conduction state will be described later.

[0027] The shape of the beam portion 12 (including the thickness of the beam portion 12, the width of the beam portion 12, and the length of the beam portion 12 protruding from the spacer 15), the material of the beam portion 12, the thickness of the spacer 15 (which may be the length in the vertical direction), and the like are determined so that the first member 13 and the second member 14 come into contact when an acceleration equal to or greater than a predetermined value is applied. That is, the acceleration to be detected can be adjusted by adjusting the shape of the beam portion 12, the material of the beam portion 12, and the thickness of the spacer 15. For example, the base portion 11 and the beam portion 12 may be formed using a dry film resist, and the first member 13 and the second member 14 may be disposed using photolithography.

[0028] Therefore, when manufacturing the impact sensor 1, first, the material and shape of the beam portion 12 and the thickness of the spacer 15 are determined according to the acceleration to be detected (i.e., the predetermined value of the acceleration). One or two of the material and shape of the beam portion 12 and the thickness of the spacer 15 may be fixed values. Furthermore, the relationship between the predetermined value of the acceleration and the material and shape of the beam portion 12 and the thickness of the spacer 15 may be obtained in advance by an experiment, a simulation, or the like. This relationship may be stored in a storage unit of the manufacturing device for the impact sensor 1. Then, the operator of the manufacturing device may input the predetermined value of the acceleration into the manufacturing device to determine the material and shape of the beam portion 12 and the thickness of the spacer 15. Furthermore, the shape of the beam portion 12 may be the shape of the portion protruding from the spacer 15.

[0029] Then, the beam 12 is bonded to the spacer 15, and the spacer 15 is bonded to the base 11 so that a space exists between the base 11 and the beam 12. This space is required for the second member 14 to elastically deform so as to contact the first member 13 when an acceleration of a predetermined value or more is applied. This space is defined by the shape of the beam 12 and the thickness of the spacer 15. Therefore, the shape of the beam 12 and the thickness of the spacer 15 are first determined so that this space is secured. In this manner, the beam 12 is fixed to the base 11 via the spacer 15. Note that the base 11 does not need to elastically deform even when an acceleration of a predetermined value or more is applied, so there is no need to determine the material and shape according to the predetermined value of the acceleration. Therefore, the same material may be used for the base 11 and the first member 13 regardless of the predetermined value of the acceleration.

[0030] As another example, the base 11 and the beam 12 can be formed by, for example, laser cutting. In this case, a film can be formed by the material of the first member 13 and the second member 14 on a flat plate formed by a material determined as the material of the base 11 and the beam 12. For example, after gold (Au) is arranged in a film form on the surface of a flat plate made of polyethylene naphthalate, the base 11 and the beam 12 can be formed by laser cutting. In this case, the beam 12 is formed according to the above-mentioned determined shape. The material of the second member 14 can be determined according to the material of the beam 12, or can be determined arbitrarily regardless of the material of the beam 12. The base 11 and the first member 13 can be formed in the same manner. As another example, the base 11 and the beam 12 can be formed from a flat plate made of polyethylene naphthalate, and then the first member 13 and the second member 14 can be arranged.

[0031] Next, FIG. 2 is a diagram showing an example of the shape of the beam portion 12. In FIG. 2, the solid line indicates a state when acceleration is applied, and the two-dot chain line indicates a state when acceleration is not applied. The beam portion 12 has a base end portion 121 that is bonded to the spacer 15, a tip end portion 122 that contacts the base portion 11 when acceleration of a predetermined value or more is applied, and a connection portion 123 that connects the base end portion 121 and the tip end portion 122. The base end portion 121 and the tip end portion 122 are formed in a plate shape. The connection portion 123 is configured to include two rod-shaped members, a first connection portion 123A and a second connection portion 123B. The base end portion 121, the tip end portion 122, and the connection portion 123 are formed, for example, from one resin plate by using laser cutting. The second member 14 is disposed below the base end portion 121, the tip end portion 122, and the connection portion 123.

[0032] As shown in FIG. 2, when an acceleration is applied to the beam portion 12, the tip portion 122 approaches the base portion 11 mainly by the elastic deformation of the connection portion 123. In the example shown in FIG. 2, the connection portion 123 is configured to include two rod-shaped members, but the number of rod-shaped members is not limited to two, and may be one or three or more. However, by using two or more, the twisting of the connection portion 123 can be suppressed. Also, there may be no clear boundary between the tip portion 122 and the connection portion 123. For example, the base end portion 121, the tip portion 122, and the connection portion 123 may be formed as one flat plate-shaped member. Also, the base end portion 121, the tip portion 122, and the connection portion 123 may be separable. The shape of the tip portion 122 is not limited to a flat plate shape, and may be, for example, a rod shape orthogonal to the connection portion 123. In the beam portion 12 shown in FIG. 2, the acceleration to be detected can be adjusted by adjusting the width or length of each of the plurality of connection portions 123. Also, the acceleration to be detected can be adjusted by adjusting the number of connection portions 123. Furthermore, the acceleration to be detected can be adjusted by adjusting the shape of the tip portion 122.

[0033] Next, FIG. 3 is a diagram showing an example of the schematic configuration of the first circuit 30 of the impact sensor 1 according to the first embodiment. The first circuit 30 includes a circuit that stores that the first member 13 and the second member 14 have come into contact. Note that this first circuit 30 may be a part of the impact sensor 1. The first circuit 30 has a comparator 31. The comparator 31 compares the voltage Vin at the input terminal 31A (hereinafter referred to as the input voltage Vin) with the voltage Vref at the reference terminal 31B (hereinafter referred to as the reference voltage Vref). If the input voltage Vin is higher than the reference voltage Vref (that is, if Vin > Vref), the output voltage Vout from the output terminal 31C is set to 0, and if the input voltage Vin is lower than the reference voltage Vref (that is, if Vin < Vref), the output voltage Vout from the output terminal 31C is set to a voltage other than 0.

[0034] A second outgoing wiring 20 is connected to an input terminal 31A of the comparator 31. Meanwhile, a wiring 32 connected to a voltage supply source that outputs a first voltage (for example, 1.5 V) is connected to a reference terminal 31B of the comparator 31. Also, a voltage supply that outputs a second voltage (for example, 1.8 V) higher than the first voltage applied to the reference terminal 31B is connected to the second outgoing wiring 20. The power supply is connected via a wiring 33. A switch 34 is interposed in this wiring 33.

[0035] Moreover, the first outgoing wiring 18 is connected to the ground. The first outgoing wiring 18 and the second outgoing wiring 20 are connected by a wiring 35. A capacitor 36 is interposed in the wiring 35. Therefore, the wiring 35 connects the second outgoing wiring 20 to the ground via the capacitor 36. The first outgoing wiring 18 is an example of a first ground wiring, and the wiring 35 is an example of a second ground wiring.

[0036] An output wiring 37 is connected to the output terminal 31C of the comparator 31, and this output wiring 37 is connected to a computer 50 that detects the application of an acceleration equal to or greater than a predetermined value. Note that the computer 50 is not included in the impact sensor 1. Also, the computer 50 may be separable from the output wiring 37.

[0037] Next, the operation of the impact sensor 1 shown in FIG. 3 will be described. When starting to use the impact sensor 1, first, the switch 34 is turned on to apply a second voltage to the capacitor 36. As a result, the capacitor 36 is charged. When the charging of the capacitor 36 is completed, the switch 34 is turned off. These operations of the switch 34 may be performed by the computer 50 or manually by the user. Even when the switch 34 is turned off, since the voltage of the second lead wire 20 is maintained at the second voltage by the capacitor 36, the second voltage is applied to the input terminal 31A of the comparator 31. At this time, since the first voltage is applied to the reference terminal 31B, the input voltage Vin is higher than the reference voltage Vref (that is, since Vin > Vref), the output voltage Vout from the output terminal 31C becomes 0. This state is maintained until an acceleration equal to or greater than a predetermined value is applied. Therefore, when the output voltage Vout is 0, the computer 50 can determine that an acceleration equal to or greater than a predetermined value has not been applied.

[0038] On the other hand, when an acceleration equal to or greater than a predetermined value is applied to the impact sensor 1, the first member 13 and the second member 14 become conductive, and the second lead wire 20 is connected to the ground. As a result, the charge is discharged from the capacitor 36. After that, even when the first member 13 and the second member 14 are separated, the voltage of the second lead wire 20 remains equal to the ground. This state continues until the switch 34 is turned on. At this time, since the input voltage Vin of the comparator 31 is lower than the reference voltage Vref (since Vin < Vref), the output voltage Vout from the output terminal 31C becomes other than 0. In this way, it is stored that an acceleration equal to or greater than a predetermined value has been applied to the impact sensor 1. And when the output voltage Vout is other than 0, the computer 50 can determine that an acceleration equal to or greater than a predetermined value has been applied.

[0039] Note that after an acceleration equal to or greater than a predetermined value is applied to the impact sensor 1, if the switch 34 is turned on, the capacitor 36 can be charged again, so the impact sensor 1 can be used repeatedly.

[0040] As described above, according to the impact sensor 1 of this embodiment, since the material of the beam portion 12 can be appropriately selected from materials with different Young's moduli, such as silicon and plastic, it is easy to design the sensitivity of the impact sensor 1 to impacts. In addition, it is possible to select a manufacturing method with low processing costs. Furthermore, since the structure is simple and does not require a piezoelectric element or an electrostrictive element, production efficiency is high. Furthermore, since it can be used simply by first charging the capacitor 36, there is no current consumption during standby until an impact occurs. Furthermore, an amplifier or other amplification circuit is not required. Furthermore, by arranging multiple impact sensors 1 with different detectable accelerations, it is possible to determine the approximate acceleration. Furthermore, by arranging multiple impact sensors 1 in different directions (for example, in the XYZ axis directions), it is also possible to detect impacts in different axial directions. When acceleration equal to or greater than a predetermined value is detected, The application is stored by the first circuit 30 so that it can be determined at a later time whether or not the object 10 has been impacted.

[0041] <Second embodiment> 4 is a diagram showing an example of a schematic configuration of the second circuit 40 of the impact sensor 1 according to the second embodiment. The second circuit 40 is a circuit that replaces the first circuit 30 according to the first embodiment. The second circuit 40 may be a part of the impact sensor 1.

[0042] The second circuit 40 has an SR latch 41. The SR latch 41 is a negative logic SR latch circuit in which two NAND circuits are combined. The SR latch 41 has a set terminal 41A, a reset terminal 41B, and an output terminal 41C. When the input of the set terminal 41A and the input of the reset terminal 41B are both high (High), the output Q from the output terminal 41C is maintained in the previous state. When the input of the reset terminal 41B is high and the input of the set terminal 41A becomes low (Low), the output Q from the output terminal 41C becomes high. Even if the input of the set terminal 41A returns to high after that, the output Q from the output terminal 41C remains high. On the other hand, when the input of the set terminal 41A is high and the input of the reset terminal 41B becomes low, the output Q from the output terminal 41C becomes low. Even if the input of the reset terminal 41B returns to high after that, the output Q from the output terminal 41C remains low.

[0043] A second outgoing wiring 20 is connected to a set terminal 41A of the SR latch 41. Meanwhile, a wiring 42 connected to a voltage supply source that outputs a first voltage (e.g., 1.5 V) is connected to a reset terminal 41B of the SR latch 41. Moreover, a voltage supply source that outputs the first voltage is connected to the second outgoing wiring 20 via a wiring 43. A resistor 44 is interposed in this wiring 43.

[0044] The first outgoing wiring 18 is connected to the ground. The first outgoing wiring 18 is an example of a first ground wiring. An output wiring 45 is connected to the output terminal 41C of the SR latch 41, and this output wiring 45 is connected to a computer 50 that detects the occurrence of an impact. The computer 50 is not included in the impact sensor 1. The computer 50 may be separable from the output wiring 45. The computer 50 may be configured to include, for example, a processor (CPU, etc.) and a storage device (RAM, ROM, EPROM, etc.).

[0045] Next, the operation of the shock sensor 1 shown in FIG. 4 will be described. Before using the shock sensor 1, the input of the set terminal 41A is set to high, the input of the reset terminal 41B is set to low, and the output from the output terminal 41C is set to low. This resets the output from the output terminal 41C. After that, the inputs of the set terminal 41A and the reset terminal 41B are set to high. In this way, even if the inputs of the set terminal 41A and the reset terminal 41B are set to high, the output from the output terminal 41C is maintained, so the output from the output terminal 41C is maintained in a low state. This state is maintained until an acceleration of a predetermined value or more is applied to the shock sensor 1. Therefore, when a low signal is output from the output terminal 41C, the computer 50 can determine that an acceleration of a predetermined value or more is not being applied.

[0046] On the other hand, when an acceleration equal to or greater than a predetermined value is applied to the impact sensor 1, the first member 13 and the second member 14 are brought into a conductive state, and the second lead-out wiring 20 is connected to ground. This causes the input of the set terminal 41A to go low. Therefore, the output of the output terminal 41C changes to high. Thereafter, when the first member 13 and the second member 14 are separated from each other, the inputs of the set terminal 41A and the reset terminal 41B go high. In this case, the output from the output terminal 41C is maintained, and therefore the output from the output terminal 41C is maintained in a high state. In this way, the impact sensor 1 When the output of the output terminal 41C is high, the computer 50 can determine that an acceleration of the predetermined value or more has been applied.

[0047] Furthermore, if the input to reset terminal 41B is set to low after an acceleration equal to or greater than a predetermined value has been applied to impact sensor 1, the output of output terminal 41C can be set to low, allowing impact sensor 1 to be used repeatedly.

[0048] As described above, the second circuit 40 in this embodiment can also store the fact that an acceleration equal to or greater than a predetermined value has been applied to the impact sensor 1.

[0049] <Other embodiments> In the above embodiment, a cantilever structure is adopted for the beam portion 12, but instead of this, a double-supported beam structure can also be adopted. In this case, for example, a spacer is also disposed on the tip side of the beam portion 12.

[0050] In the above embodiment, the fact that an impact has been received is stored by a circuit, but this circuit is not an essential component. For example, a configuration that detects an impact in real time may be used. The circuit that stores the fact that an impact has been received is not limited to the circuit described in the above embodiment. In the above embodiment, the impact sensor 1 can be used repeatedly by resetting after receiving an impact, but instead, the impact sensor 1 may be configured to be disposable without having a reset function.

[0051] The computer 50 may also have a communication means for notifying the outside whether or not an acceleration equal to or greater than a predetermined value has been applied. For example, the computer 50 may communicate with a mobile communication service (e.g., telephone communication networks such as 6G (6th Generation), 5G (5th Generation), 4G (4th Generation), 3G (3rd Generation), and LTE (Long Term Evolution)), Wi-Fi (registered trademark), Blue Wireless communication such as tooth (registered trademark) Low Energy, NFC (Near Field Communication), and UWB (Ultra Wideband) may be made available.

[0052] Furthermore, in the above embodiment, the impact sensor 1 has been described, but the name of the sensor is not limited to this, and it may be an acceleration sensor or a vibration sensor.

[0053] In the above embodiment, it is detected whether or not an acceleration equal to or greater than a predetermined value has been applied. Alternatively, it is also possible to detect whether or not an impact intensity equal to or greater than a predetermined value has been applied.

[0054] Although the embodiments according to the present disclosure have been described above, each aspect disclosed in this specification can be combined with any other feature disclosed in this specification. [Explanation of symbols]

[0055] 1 Shock sensor 11 Base 12 Beam section 13 First member 14 Second member 15 Spacer 18 First lead-out wiring 19 Conductive adhesive 20 Second lead-out wiring

Claims

1. A conductive first member; A conductive second member disposed at a distance from the first member; a first structure in which at least a portion of the second member is elastically deformed when an acceleration equal to or greater than a predetermined value is applied to the second member, so that the second member comes into contact with the first member; A detection device comprising:

2. The first structure is a base on which the first member is disposed; a third member on which the second member is disposed, and at least a portion of the third member is elastically deformed when an acceleration equal to or greater than the predetermined value is applied to the third member, so that the second member comes into contact with the first member; Equipped with The detection device according to claim 1 .

3. The third member has a cantilever beam or a double-supported beam structure.

3. The detection device according to claim 2.

4. Further comprising an insulating spacer between the base and the third member.

3. The detection device according to claim 2.

5. Further comprising a circuit for storing the contact between the first member and the second member. The detection device according to claim 1 .

6. The circuit comprises: a comparator having a reference terminal to which a first voltage is applied, an input terminal to which the second member is electrically connected and to which a second voltage higher than the first voltage is applied via a switch, and an output terminal; a first ground wiring that electrically connects the first member to a ground; a second ground wiring that electrically connects the input terminal to the ground via a capacitor; The detection device according to claim 5 .

7. The circuit comprises: a negative logic SR latch having a set terminal to which the second member is electrically connected and to which a first voltage is applied via a resistor, a reset terminal to which a second voltage is applied, and an output terminal; a first ground wiring that electrically connects the first member to a ground; The detection device according to claim 5 .

8. A method for manufacturing the detection device according to claim 2, comprising the steps of: determining a material and a shape of the third member such that, when an acceleration equal to or greater than the predetermined value is applied, at least a portion of the third member is elastically deformed so that the second member comes into contact with the first member; forming the third member according to the determined material and shape; fixing the third member to the base via an insulating spacer such that a space exists between the base and the third member; A method for manufacturing a detection device comprising the steps of:

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