Movement device and movement method

Abstract

To provide a movement device and a movement method, capable of preventing a generation of a movement time difference of a piece-like body in a mounting destination of the piece-like body.SOLUTION: A movement device EA that fetches out a piece-like body CP from a plurality of piece-like bodies CP forming a first collection shape AF1, and moves each piece-like bodies CP to a support body BP so as to form a second collector shape AF2 by the piece-like bodies CP to be fetched, comprises: fetching-out means 10 of fetching out the piece-like body CP from the plurality of piece-like bodies CP forming the first collection shape AF1; and collective support means 20 that collectively supporting the plurality of piece-like bodies CP so as to form the second collector shape AF2 before the piece-like bodies CP fetched in the fetching means 10 is mounted to the support body BP, and collectively mounting the plurality of piece-like bodies CP that is collectively supported to the supporting body BP.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a transfer device and a transfer method. [Background technology]

[0002] 2. Description of the Related Art A transfer device for transferring a plurality of strips is known (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-48201 Summary of the Invention [Problem to be solved by the invention]

[0004] In the die bonder 10 (transfer device) described in Patent Document 1, when a flake is removed from a plurality of dies D (flak-like bodies) forming the shape (first collective shape) of a wafer 11, and the removed flakes are mounted (transferred) on a substrate S (support) so that the plurality of removed flakes form the mounting position shape (second collective shape) of the substrate S, the flakes are transferred one by one, so that a time difference occurs in the transfer of the flakes at the transfer destination. If a time difference occurs in the transfer of the flakes at the transfer destination, for example, when the die attachment film 18 is heat-sensitive adhesive and the support is heated as a whole, excessive heat is applied to the die attachment film 18 of the flakes transferred at the early stage, while only a small amount of heat is applied to the die attachment film 18 of the flakes transferred at the later stage, causing an inconvenience that the adhesive strength of the flakes differs depending on the location on the support. Note that such an inconvenience also occurs when, for example, cooling is required for transferring the flakes to the support.

[0005] An object of the present invention is to provide a transfer device and a transfer method that can prevent the occurrence of a time lag in the transfer of a flake-like object at the transfer destination of the flake-like object. [Means for solving the problem]

[0006] The present invention employs the configurations set forth in the claims. Effect of the Invention

[0007] According to the present invention, before the flakes are transferred to the support, a plurality of flakes are supported collectively to form a second collective shape, and the collectively supported plurality of flakes are transferred collectively to the support, thereby preventing a time lag in the transfer of the flakes at their destination. [Brief description of the drawings]

[0008] [Figure 1] 1A to 1N are explanatory views of a transfer device according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are mutually orthogonal, the X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Furthermore, in this embodiment, the view from the front in Fig. 1(A) is used as a reference, and when directions are indicated without specifying the view, "up" is the direction of the Z-axis arrow, "down" is the opposite direction, "left" is the direction of the X-axis arrow, "right" is the opposite direction, "front" is the direction of the Y-axis arrow, and "rear" is the opposite direction. Note that Figs. 1(E) to (N) are views from the same direction as Fig. 1(A), so the notations of the X-axis, Y-axis, and Z-axis are omitted.

[0010] The transfer device EA for carrying out the transfer method of the present invention is an apparatus for removing a flake-like body CP from a plurality of flake-like bodies CP forming a first collective shape AF1 (see FIG. 1(B)) and transferring the flake-like body CP to a base BP as a support so that the removed flake-like bodies CP form a second collective shape AF2 (see the diagram marked with BB in FIG. 1(A)). The transfer device EA includes removal means 10 for carrying out a removal step of removing the flake-like body CP from the plurality of flake-like bodies CP forming the first collective shape AF1, and the flake-like body CP removed by the removal means 10. The apparatus includes a collective support means 20 that performs a collective support process in which a plurality of flake-like objects CP are collectively supported so as to form a second collective shape AF2 before they are transferred to the substrate BP (see FIG. 1(D)) and the collectively supported plurality of flake-like objects CP are collectively transferred to the substrate BP, and an inspection means 30 that performs an inspection process in which the flake-like objects CP are inspected, and is disposed near a supply means 40 that performs a supply process in which a plurality of flake-like objects CP having the first collective shape AF1 are supplied, and a support transport means 50 that performs a support transport process in which the substrate BP is transported. In this embodiment, the plurality of flakes CP are formed from a circular base material BM attached to one side of an adhesive sheet AS serving as a flake-holding member, as shown in Fig. 1(B). The base material BM is cut at equal intervals along two perpendicular axial directions to give the flakes CP a square outer shape, forming a first collective shape AF1 (circle) on the adhesive sheet AS and being integrated with the adhesive sheet AS to form an integral object UP.

[0011] The removal means 10 is composed of multiple arms and includes a so-called articulated robot 11 as a driving device that can displace what is supported by a tip arm 11A, which is a working part, to any position and any angle within its working range, and a holding member 12 that is supported by the tip arm 11A and can be sucked and held by a decompression means (holding means) (not shown), such as a decompression pump or a vacuum ejector. The removal means 10 of this embodiment is configured to remove only the flakes CP for which no abnormality has been detected by the inspection means 30 from the multiple flakes CP forming the first collective shape AF1.

[0012] The collective support means 20 includes a first collective support means 20A and a second collective support means 20B, and is configured to transfer a plurality of flakes CP collectively supported by the first collective support means 20A to the second collective support means 20B. The first collective support means 20A includes a rotary motor 21 as a driving device that supports the base member 21B with an output shaft 21A, a linear motor 22 as a spacing means and driving device supported by the base member 21B and widening the spacing between the multiple collectively supported strip-like bodies CP so that the multiple strip-like bodies CP form a second collective shape AF2, a receiving plate 23A supported by the slider 22A of each linear motor 22, the rotary motor 23 as a driving device that drives a chuck member 23B that grips the spacing adhesive sheet ASE as a spacing member with the receiving plate 23A, and a detector 24 such as a camera or optical sensor arranged above the base member 21B. The second collective support means 20B includes a linear motor 25 as a drive device, a support table 25D supported by an output shaft 25A of the linear motor 25, and arranged so that nine individual support sections 25C, which support the flake-like objects CP one by one on support surfaces 25B having the same shape as the outer shape of the flake-like objects CP, form a second collective shape AF2 (see the drawing marked with AA in FIG. 1(A)), and a water supply passage 25E (see FIG. 1(G)) that opens into the support surfaces 25B to supply a liquid LQ (see FIG. 1(H)) such as water or a mixed liquid to each of the support surfaces 25B, and individually position each of the flake-like objects CP collectively supported by the support surfaces 25B. the liquid supply means 26 as a positioning means for collecting the liquid LQ from each holding surface 25B via the water supply passage 25E and for adsorbing and holding the flakes CP via the water supply passage 25E; cooling means 28 such as a Peltier element or the cooling side of a heat pipe that is built into the base member 21B and for solidifying the liquid LQ supplied to each holding surface 25B; and heating means 29 (see FIG. 1(G)) such as a coil heater or the heating side of a heat pipe that is built into the holding table 25D and for melting the solidified liquid LQ. The linear motor 25, the holding table 25D, the liquid supply means 26, and the decompression means 27 are provided at positions where they do not interfere with the base member 21B or the members that rotate together with it when the base member 21B rotates.

[0013] The inspection means 30 is equipped with inspection equipment 31 such as a camera or optical sensor that inspects the flake-like object CP supplied to the supply means 40, and is capable of detecting abnormalities in the external shape of the flake-like object CP and specified defective product marks marked on the individual piece CP.

[0014] The supplying means 40 includes a supplying table 41 having a holding surface 41A capable of being sucked and held by a decompression means (holding means) (not shown) such as a decompression pump or a vacuum ejector.

[0015] The support transport means 50 includes a linear motor 51 as a driving device, and a substrate holding arm 52 supported by an output shaft 51A of the linear motor 51 and having an adsorption pad 52A that can be adsorbed and held by a pressure reduction means (holding means) such as a vacuum pump or a vacuum ejector (not shown). As shown in the diagram marked with BB in Fig. 1(A), the substrate BP is arranged such that nine individual transfer sections BP2, to which the flakes CP are transferred one by one, form a second collective shape AF2 on a transfer surface BP1 having the same shape as the outer shape of the flakes CP. A heat-sensitive adhesive (not shown) is laminated on the transfer surface BP1. The support transport means 50 is provided at a position such that it does not interfere with the base member 21B or the members rotating therewith when the base member 21B rotates.

[0016] The operation of the transfer device EA will now be described. First, a user of the transfer device EA (hereinafter, simply referred to as "user") inputs a signal to start automatic operation via an operation means, not shown, such as an operation panel or a personal computer, to the transfer device EA in which each member is arranged at the initial position shown by the solid line in Fig. 1(A). Next, the user or a conveying means, not shown, such as an articulated robot or a belt conveyor, places the separating adhesive sheet ASE on the receiving plate 23A so that the adhesive surface of the separating adhesive sheet ASE is on the upper side, as shown in Fig. 1(A). Then, the collective support means 20 drives the rotating motor 23, and the receiving plate 23A and the chuck member 23B grip the outer edge of the separating adhesive sheet ASE as shown by the two-dot chain line in the figure. After that, the user or the conveying means, not shown, supplies the integrated object UP onto the supply table 41 so that the piece-like object CP is on the upper side, as shown in Fig. 1(A), and the supplying means 40 drives a pressure reducing means, not shown, to start suction and holding on the holding surface 41A. In addition, when a user or a conveying means not shown in the figure brings the substrate BP into contact with the suction pad 52A so that the transfer surface BP1 is facing downward, as shown in FIG. 1(A), the support conveying means 50 drives a pressure reducing means not shown in the figure and begins suction holding by the suction pad 52A.

[0017] Next, the inspection means 30 drives the inspection device 31, and the removal means 10 drives the articulated robot 11 and the decompression means (not shown), so that the holding member 12 sucks and holds the flakes CP one by one, and as shown by the two-dot chain line in Fig. 1(A), the sucked and held flakes CP are adhered to the adhesive surface of the separating adhesive sheet ASE. At this time, the removal means 10 is adapted to deliver the flakes CP by adhering them to the adhesive surface of the separating adhesive sheet ASE so as to form an intermediate collective shape AFM, which is a reduced shape of the second collective shape AF2, in the same arrangement as the individual holding section 25C, as shown in Fig. 1(C). Also, the removal means 10 is adapted to select only flakes CP that are free of abnormalities in their external shape or that are not marked with a predetermined defective product mark, based on the inspection result of the inspection means 30, and remove the flakes CP from the plurality of flakes CP forming the first collective shape AF1.

[0018] Then, when a predetermined number (9 in this embodiment) of flakes CP are delivered to the collective support means 20, the collective support means 20 drives the linear motor 22 and the detector 24, and pulls the separating adhesive sheet ASE so that the collective shape of the flakes CP on the separating adhesive sheet ASE becomes the second collective shape AF2, as shown in Fig. 1(D), based on the detection result of the detector 24. Next, when the collective shape of the flakes CP on the separating adhesive sheet ASE becomes the second collective shape AF2, the collective support means 20 stops driving the linear motor 22, and then drives the rotary motor 21 to turn the base member 21B upside down, as shown in Fig. 1(E), and drives the liquid supply means 26 to supply the liquid LQ to each holding surface 25B, as shown in Fig. 1(H). Thereafter, the collective support means 20 drives the linear motor 25, and as shown by the two-dot chain line in Fig. 1(E), raises the holding table 25D to bring each holding surface 25B to which the liquid LQ has been supplied into contact with the lower surface of the flake CP, and then drives the cooling means 28 to solidify the liquid LQ and hold the flake CP on each holding surface 25B. Next, the collective support means 20 drives the linear motor 25 to return the holding table 25D to its initial position as shown in Fig. 1(F), and the flake CP on the separating adhesive sheet ASE is transferred to the holding table 25D. When the flake CP has been transferred to the holding table 25D, the collective support means 20 drives the rotating motor 21 to return the base member 21B to its initial position, and then drives the rotating motor 23 to return the chuck member 23B to its initial position.

[0019] Then, when a user or a conveying means (not shown) holds the separating adhesive sheet ASE on the receiving plate 23A and conveys the separating adhesive sheet AS to a disposal position, the collective support means 20 drives the linear motor 22 to return the slider 22A to its initial position, and then the collective support means 20 drives the heating means 29 to melt the liquid LQ. At this time, even if the flake-like objects CP supported by the liquid LQ before melting are displaced relative to the holding surface 25B as shown in Figs. 1(I) and (J), each flake-like object CP is supported by the holding surface 25B via the liquid LQ in the melted state, and is positioned so as to be in the same position and in the same orientation as the holding surface 25B as shown in Fig. 1(K). Next, the collective support means 20 drives the decompression means 27, and as shown in Fig. 1(L), the liquid LQ is collected from each holding surface 25B via the water supply passage 25E, and the flake-like objects CP are adsorbed and held by each holding surface 25B.

[0020] Thereafter, the support conveying means 50 drives the linear motor 51 to move the substrate BP above the holder 25D as shown in FIG. 1(M), and then the collective support means 20 drives the linear motor 25 to raise the holder 25D as shown by the two-dot chain line in the figure, and bring the flake CP into contact with the transfer surface BP1. Next, the collective support means 20 drives the heating means 29 to heat the adhesive (not shown) laminated on the transfer surface BP1 to attach the flake CP to the transfer surface BP1, and then stops driving the decompression means 27 to release the suction and holding on each holding surface 25B. Then, the collective support means 20 drives the linear motor 25 to return the holder 25D to its initial position, and the flake CP is transferred to the substrate BP as shown in FIG. 1(N). Next, the support conveying means 50 drives the linear motor 51 to return the substrate BP to its initial position, and the substrate BP is held by a user or a conveying means (not shown). Thereafter, the support transport means 50 stops driving the pressure reducing means (not shown) and releases the suction hold by the suction pad 52A, and then the user or the transport means (not shown) transports the substrate BP to the next process, and the same operations as described above are repeated.

[0021] According to the above embodiment, before the flake-like objects CP are transferred to the substrate BP, multiple flake-like objects CP are supported collectively to form a second collective shape AF2, and the multiple collectively supported flake-like objects CP are transferred collectively to the substrate BP, thereby preventing a time lag in the transfer of the flake-like objects CP at their destination.

[0022] The means and steps of the present invention are not limited in any way as long as they perform the operations, functions, or steps described for those means and steps, and are in no way limited to the components and steps of a single embodiment shown in the above embodiment. For example, the removal means may be anything that is capable of removing a strip from the plurality of strips forming the first collective shape, and is not limited in any way as long as it is within the scope of the common general technical knowledge at the time of filing (the same applies to other means and steps).

[0023] The removal means 10 may remove the flake-like pieces CP one by one or multiple by multiple from the multiple flake-like pieces CP forming the first collective shape AF1, or may remove the flake-like pieces CP from the multiple flake-like pieces CP forming the first collective shape AF1 by grasping or gluing them, or may support the flake-like pieces CP removed from the multiple flake-like pieces CP forming the first collective shape AF1 by turning them upside down or standing them on their side on the collectively supporting means 20, or may remove a flake-like piece CP in which an abnormality has been detected by the inspection means 30 from the multiple flake-like pieces CP forming the first collective shape AF1 and hand it over to the collectively supporting means 20 or hand it over to something other than the collectively supporting means 20. The number of flake-like bodies CP that the removal means 10 removes from the multiple flake-like bodies CP forming the first collective shape AF1 and transfers the flake-like bodies CP to the collective support means 20 is not limited to two or more, and may be, for example, greater than or equal to the number of flake-like bodies CP contained in one integral body UP, or any number required to form the second collective shape AF2.

[0024] The collective support means 20 may be composed of only the first collective support means 20A or only the second collective support means 20B, and when the collective support means 20 is composed of only the first collective support means 20A, the first collective support means 20A supports the plurality of flake-like bodies CP collectively so that the plurality of flake-like bodies CP taken out by the take-out means 10 form the second collective shape AF2, and then the plurality of flake-like bodies CP can be transferred collectively to the substrate BP without the second collective support means 20B. When the collective support means 20 is composed of only the second collective support means 20B, the second collective support means 20B supports the plurality of flake-like bodies CP collectively so that the plurality of flake-like bodies CP taken out by the take-out means 10 form the second collective shape AF2, and then the plurality of flake-like bodies CP can be transferred collectively to the substrate BP without the first collective support means 20A. The first batch support means 20A may not employ a separating means, but may instead collectively support multiple flake-like objects CP by providing a driving device such as a chuck cylinder or an adsorption holding mechanism on the base member 21B, or when transferring the flake-like objects CP to the second batch support means 20B or onto the support, the flake-like objects CP may be pressed against the second batch support means 20B or onto the support by a pressing member such as a roller or a gas blower, or the second batch support means 20B or the support may be placed above the supported flake-like objects CP without inverting the base member 21B, and the detector 24 may not be required. The second collective support means 20B may not have a positioning means, the holding surface 25B may have a shape different from the outer shape of the flake-like objects CP, it may support multiple flake-like objects CP collectively without using individual holding sections 25C, for example, by providing a driving device such as a chuck cylinder or an adsorption holding mechanism on the holding table 25D, it may support multiple flake-like objects CP collectively via an adhesive sheet or adhesive, when transferring the flake-like objects CP to the support, the flake-like objects CP may be pressed against the support by a pressing member, the flake-like objects CP may be held on the holding surface 25B by a driving device such as a chuck cylinder or a pressure reducing means 27 without using liquid supply means 26 or cooling means 28, the cooling means 28 or heating means 29 may not be required, or the holding table 25D may be inverted and multiple flake-like objects CP may be transferred to the transfer surface BP1 from above the substrate BP. The number of the individual holding portions 25C is not limited as long as it is two or more, and may be any number necessary to form the second collective shape AF2.

[0025] The inspection means 30 receives abnormality information about the flake-like objects CP as data from another device, and the removal means 10, based on that data, removes only the flake-like objects CP in which no abnormalities were detected from the multiple flake-like objects CP forming the first collective shape AF1, and this may or may not be provided in the transfer device EA of the present invention.

[0026] The supply means 40 may hold a plurality of flakes CP forming a first collective shape AF1 that are not attached to the adhesive sheet AS on a holding surface 41A, or a supply table 41 that cannot be adsorbed and held on the holding surface 41A may be adopted, and may or may not be provided in the transfer device EA of the present invention.

[0027] The support transport means 50 employs an adsorption table as a support, and may transfer multiple flake-like objects CP supported by the collective support means 20 all at once to form a second collective shape AF2, or may invert the multiple transferred flake-like objects CP, and may or may not be provided in the transfer device EA of the present invention.

[0028] The transfer device EA may be provided with an energy applying means for applying the predetermined energy to at least one of the adhesive sheet AS and the separating adhesive sheet ASE, when at least one of them is one whose adhesive strength decreases by applying a predetermined energy. Such a predetermined energy may be any energy, such as an energy applying means for applying electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, an energy applying means for applying a heating medium such as hot water or hot air, or an energy applying means for applying a cooling medium such as cold water or cold air, and the energy applying means may be any energy applying means that can apply the predetermined energy to the adhesive sheet AS in consideration of the characteristics, properties, properties, material, composition, and configuration of the adhesive sheet AS.

[0029] The strips CP may form the first collective shape AF1 on the holding surface 41A without being attached to the strip holding member, and they may not be formed by cutting the base material BM; for example, they may be formed into the first collective shape AF1 by bringing together multiple strips that have been formed in a predetermined shape in advance. The flake-like object holding member may be any material capable of supporting the flake-like objects CP forming the first collective shape AF1, such as an iron plate, a resin plate, paper, adhesive tape, wood, or pottery. The spacing member may be any material, such as rubber, cloth, net, or spring, that can widen the gap between the multiple plates CP supported together. The first collective shape AF1 and the second collective shape AF2 may be any shape, such as a circle, an ellipse, a polygon such as a triangle or a rectangle, or any other shape, and are not limited in any way as long as the first collective shape AF1 and the second collective shape AF2 are different. The intermediate aggregate shape AFM can be any shape, such as a circle, an ellipse, a polygon such as a triangle or a square, or any other shape. The number of flake-like bodies CP forming the first aggregate shape AF1, the second aggregate shape AF2, and the intermediate aggregate shape AFM is not limited to a number as long as it is two or more, and may be, for example, greater than or equal to the number of flake-like bodies CP possessed by one integral body UP, or any number required to form the second aggregate shape AF2. The number of substrates BP is not limited as long as there are two or more individual transfer parts BP2, and there may be no individual transfer parts BP2, a pressure-sensitive adhesive may be laminated thereon, or no adhesive may be laminated thereon. The support may be any material such as an adhesive sheet or a suction table. The holding surface 41A, the flake holding member, the spacing member and the support body may have a function capable of holding the flake CP, such as adhesiveness for adhering the flake CP, magnetic property for magnetically attracting the flake CP, or adhesiveness for adsorbing the flake CP, or they may not have a function capable of holding the flake CP.

[0030] The next process may be any process, such as a plating process, a cleaning process, an etching process, a dipping process, a cutting process, an oxide film formation process, a nitriding process, a grinding process, a sandblasting process, a polishing process, a painting process, a lamination process, a sheet bonding process, a surface treatment process, a drilling process, a bending process, an inspection process, a verification process, an irradiation process, etc.

[0031] The material, type, shape, etc. of the flakes CP, base material BM, flake holding member, spacing member, and support in the present invention are not particularly limited. For example, the flakes CP, base material BM, flake holding member, spacing member, and support may be circular, elliptical, polygonal such as triangular or rectangular, or other shape, and the adhesive properties of the flake holding member and spacing member may be pressure-sensitive adhesive, heat-sensitive adhesive, etc. When heat-sensitive adhesives are used, they may be bonded by an appropriate method such as providing heating means such as an appropriate coil heater or the heating side of a heat pipe for heating the flake holding member and spacing member. In addition, when an adhesive sheet is used as the flake-shaped object holding member or the spacing member, the adhesive sheet may be, for example, a single layer of only an adhesive layer, a two-layered sheet in which a substrate and an adhesive layer are laminated, a three-layered sheet or a three-layered sheet in which one or more intermediate layers are laminated between the substrate and the adhesive layer, a three-layered sheet or a three-layered sheet in which one or more cover layers are laminated on the upper surface of the substrate, a sheet in which the substrate, the intermediate layer or the cover layer are provided in a peelable manner, a double-sided adhesive sheet of a single layer consisting of only an adhesive layer, a double-sided adhesive sheet in which an adhesive layer is laminated on both outermost surfaces of one or more intermediate layers, etc. Furthermore, the base material BM and the flake-shaped object CP may be, for example, a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, a ceramic, a wooden board, or a resin, or a composite formed of two or more of these, and may be a member or an article of any shape. The adhesive sheet AS and the separating adhesive sheet ASE may be any sheet, film, tape, etc., such as an information label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, or a recording layer forming resin sheet.

[0032] The driving equipment in the above-described embodiments may be electric equipment such as rotary motors, linear motors, single-axis robots, so-called multi-joint robots having joints on two or three or more axes, actuators such as air cylinders, hydraulic cylinders, rodless cylinders, and rotary cylinders, which may be used alone, or a direct or indirect combination of such electric equipment and actuators may be used, and electric equipment, actuators, etc. may or may not be capable of torque control or speed control for the output parts of such electric equipment, actuators, etc. may be used.

[0033] In the above embodiment, some object (hereinafter referred to as "object A") and an object (hereinafter referred to as "object B") that moves relative to object A, that is, object A and object B that move relatively may be object B moving relative to object A that does not move, object A may move relative to object B that does not move, or both objects A and B may move. If the result achieved by the movement is the same, either object A or object B may move. When a rotating member such as a roller is used, a driving device that rotates the rotating member may be provided. The surface of the rotating member or the rotating member itself may be made of a deformable member such as rubber or resin. The surface of the rotating member or the rotating member itself may be made of a non-deformable member. Other members such as a rotating or non-rotating shaft or blade may be used instead of the roller. When a pressing means or pressing member such as a pressing roller or a pressing head that presses an object to be pressed is used, a roller, a round bar, a blade material, a brush-like member, or a member that blows air or gas may be used instead of or in combination with the above-mentioned examples. The peeling means may be made of a deformable material such as rubber, resin, sponge, etc., or may be made of a non-deformable material such as metal or glass. When a peeling means or peeling member such as a peeling plate or peeling roller is used to peel off the peeled object, a plate-shaped member, a round bar, a roller, etc. may be used instead of or in combination with the above examples. The peeling means may be made of a deformable material such as rubber or resin, or may be made of a non-deformable material. When a supporting (holding) means or supporting (holding) member that supports (holds) the supported member (held member), etc. is used. In this case, a configuration may be adopted in which the supported member is supported (held) by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), pressure sensitive adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving equipment, etc., or in the case where a cutting means or cutting member that cuts the member to be cut or forms an incision or cutting line in the member to be cut is used, cutting means that use a cutter blade, laser cutter, ion beam, fire, heat, water pressure, electric heating wire, spraying of gas or liquid, etc., may be used instead of or in combination with the above examples,It is also possible to move the cutting object by combining appropriate driving devices. [Explanation of symbols]

[0034] EA…Transfer equipment 10...Removal means 20... Collective support means 22...Linear motor (spacing means) 26...Liquid supply means (positioning means) 30...Testing methods AF1…1st set shape AF2…Second set shape BP...Substrate (support) CP: Schistosoma

Claims

1. A transfer device that removes a flake from a plurality of flakes forming a first collective shape and transfers the removed flakes to a support so that the plurality of flakes form a second collective shape, a removal means for removing a piece from the plurality of pieces forming the first collective shape; a collective support means for collectively supporting a plurality of the flakes so as to form the second collective shape before the flakes removed by the removal means are transferred to the support body, and for transferring the plurality of collectively supported flakes to the support body at once.

2. The transfer device according to claim 1 , wherein the removal means removes only those flakes for which no abnormalities have been detected by an inspection means for inspecting the flakes from the plurality of flakes forming the first collective shape.

3. The transfer device according to claim 1 or claim 2, characterized in that the collective support means is provided with a spacing means for widening the spaces between the multiple strips supported collectively, so that the multiple strips form the second collective shape.

4. 3. The transfer apparatus according to claim 1, wherein the collective support means includes positioning means for individually positioning each of the strips collectively supported by the collective support means.

5. A method for removing a flake from a plurality of flakes forming a first collective shape, and transferring the removed flakes to a support so that the plurality of removed flakes form a second collective shape, comprising: removing a piece from the plurality of pieces forming the first collective shape; This transfer method is characterized by carrying out a collective support process in which, before the flakes removed in the removal process are transferred to the support, a plurality of the flakes are supported collectively to form the second collective shape, and the plurality of collectively supported flakes are transferred collectively to the support.

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