Resist composition and method for producing resist pattern

Abstract

To provide a resist composition containing a resin which allows a resist pattern having good CD uniformity to be produced.SOLUTION: The resist composition contains: an acid generator containing a salt represented by formula (I1); and an acid generator containing a carboxylate of a specific structure. [In formula (I1), X represents a sulfur atom or an iodine atom; and AI- represents one anion selected from a sulfonic acid anion, a sulfonylmethide anion, and a sulfonylimide anion.]SELECTED DRAWING: None

Description

[Technical Field]

[0001] The present invention relates to a resist composition used in semiconductor microfabrication and a method for producing a resist pattern. [Background technology]

[0002] Patent Document 1 describes a resist composition containing an acid generator that contains a salt represented by the following formula: TIFF2025074941000001.tif54102

[0003] Patent Document 2 describes a resist composition containing an acid generator that contains a salt represented by the following formula: TIFF2025074941000002.tif5492 [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent Publication No. 2021-175722 [Patent Document 2] Patent Publication No. 2021-175723 Summary of the Invention [Problem to be solved by the invention]

[0005] The present invention provides a salt that forms a resist pattern with better CD uniformity (CDU) than a resist pattern formed with a resist composition containing the above salt. [Means for solving the problem]

[0006] The present invention includes the following inventions. [1] an acid generator containing a salt represented by formula (I1); A resist composition containing a carboxylic acid generator containing a carboxylic acid salt represented by formula (I2). TIFF2025074941000003.tif49168[In formula (I1), X represents a sulfur atom or an iodine atom. m10A represents 0 or 1, and when X is a sulfur atom, m10A is 1, and when X is an iodine atom, m10A is 0. R 1A , R 2A and R 3A are each independently a hydroxy group, *-X 2 -R 10A , or *-X 1 -L 10 -X 2 -R 10A Represents. X 1 and X 2 each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-. L 10 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 4A , R 5A and R 6A are each independently a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, a hydrocarbon group having 1 to 18 carbon atoms, *-X 2 -R 10A , or *-X 1 -L 10 -X 2 -R 10A The hydrocarbon group may have a substituent, and the —CH 2 — contained in the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO 2 —. R 7A , R 8A and R 9A are each independently a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, a hydrocarbon group having 1 to 18 carbon atoms, *-X 2 -R 10A , or *-X 1 -L 10 -X 2 -R 10AThe hydrocarbon group may have a substituent, and the —CH2— contained in the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—. 8A and R 9A are combined to form S + In this case, -CH2- contained in the ring may be replaced by -O-, -S-, -CO-, -SO- or -SO2-, and R forming the ring 8A and R 9A is S + It may also be a single bond formed between two benzene rings connecting the R 10A represents an acid labile group. A 1A , A 2A and A 3A each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group optionally having a substituent, and -CH2- contained in the hydrocarbon group optionally being replaced by -O-, -CO-, -S- or -SO2-. Ar 1A , Ar 2A and Ar 3A each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m1A represents an integer of 0 to 5, and when m1A is 2 or more, the groups in the parentheses may be the same or different. m2A represents an integer of 0 to 5, and when m2A is 2 or greater, the groups in the parentheses may be the same or different. m3A represents an integer of 0 to 5, and when m3A is 2 or more, the groups in the parentheses may be the same or different. m4A represents an integer of 0 to 4, and when m4A is 2 or more, a plurality of R 4A may be the same or different from each other. m5A represents an integer of 0 to 4, and when m5A is 2 or more, a plurality of R 5A may be the same or different from each other. m6A represents an integer of 0 to 4, and when m6A is 2 or more, a plurality of R 6A may be the same or different from each other. m7A represents an integer of 0 to 5, and when m7A is 2 or more, a plurality of R 7A may be the same or different from each other. m8A represents an integer of 0 to 5, and when m8A is 2 or more, a plurality of R 8A may be the same or different from each other. m9A represents an integer of 0 to 5, and when m9A is 2 or more, a plurality of R 9A may be the same or different from each other. provided that 0≦m1A+m7A≦5, 0≦m2A+m8A≦5, and 0≦m3A+m9A≦5, and at least one of m1A, m2A, m3A, m7A, m8A, and m9A represents an integer of 1 or more; When m10A=1 and m1A=m2A=m3A=0, R is 1 or more. 7A , R 8A and R 9A At least one of the 2 -R 10A , or *-X 1 -L 10 -X 2 -R 10A represents When m10A=0 and m1A=m2A=0, R is 1 or more. 7A and R 8A At least one of the 2 -R 10A , or *-X 1 -L 10 -X 2 -R 10A Represents. AI - represents one anion selected from a sulfonate anion, a sulfonylmethide anion, and a sulfonylimide anion. TIFF2025074941000004.tif49168[In formula (I2), Y represents a sulfur atom or an iodine atom. m10B represents 0 or 1, and when X is a sulfur atom, m10B is 1, and when X is an iodine atom, m10B is 0. R 1B , R 2B and R 3B are each independently a hydroxy group, *-X 2 -R 10B , or *-X 1 -L 10 -X 2 -R 10B Represents. X 1 and X 2 each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-. L 10 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 4B , R 5B and R 6B are each independently a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, a hydrocarbon group having 1 to 18 carbon atoms, *-X 2 -R 10B , or *-X 1 -L 10 -X 2 -R 10B The hydrocarbon group may have a substituent, and the —CH 2 — contained in the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO 2 —. R 7B , R 8B and R 9B are each independently a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, a hydrocarbon group having 1 to 18 carbon atoms, *-X 2 -R 10B , or *-X 1 -L 10 -X 2 -R 10B The hydrocarbon group may have a substituent, and the —CH2— contained in the haloalkyl group and the hydrocarbon group may be replaced by —O—, —CO—, —S— or —SO2—.8B and R 9B are combined to form S + In this case, -CH2- contained in the ring may be replaced by -O-, -S-, -CO-, -SO- or -SO2-, and R forming the ring 8B and R 9B is S + It may also be a single bond formed between two benzene rings connecting the R 10B represents an acid labile group. A 1B , A 2B and A 3B each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group optionally having a substituent, and -CH2- contained in the hydrocarbon group optionally being replaced by -O-, -CO-, -S- or -SO2-. Ar 1B , Ar 2B and Ar 3B each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m1B represents an integer of 0 to 5, and when m1B is 2 or more, the groups in the parentheses may be the same or different. m2B represents an integer of 0 to 5, and when m2B is 2 or more, the groups in the parentheses may be the same or different. m3B represents an integer of 0 to 5, and when m3B is 2 or more, the groups in the parentheses may be the same or different. m4B represents an integer of 0 to 4, and when m4B is 2 or more, a plurality of R 4B may be the same or different from each other. m5B represents an integer of 0 to 4, and when m5B is 2 or more, a plurality of R 5B may be the same or different from each other. m6B represents an integer of 0 to 4, and when m6B is 2 or more, a plurality of R 6B may be the same or different from each other. m7B represents an integer of 0 to 5, and when m7B is 2 or more, a plurality of R 7B may be the same or different from each other. m8B represents an integer of 0 to 5, and when m8B is 2 or more, a plurality of R 8B may be the same or different from each other. m9B represents an integer of 0 to 5, and when m9B is 2 or more, a plurality of R 9B may be the same or different from each other. provided that 0≦m1B+m7B≦5, 0≦m2B+m8B≦5, and 0≦m3B+m9B≦5, and at least one of m1B, m2B, m3B, m7B, m8B, and m9B represents an integer of 1 or more; When m10B=1 and m1B=m2B=m3B=0, R is 1 or more. 7B , R 8B and R 9B At least one of the 2 -R 10B , or *-X 1 -L 10 -X 2 -R 10B represents When m10B=0 and m1B=m2B=0, R is 1 or more. 7B and R 8B At least one of the 2 -R 10B , or *-X 1 -L 10 -X 2 -R 10B Represents. AII - represents a carboxyl anion. [2]A 1A But, ***-X 01A -L 01A -or***-L 01A -X 01A - and A 2A But, ***-X 02A -L 02A -or***-L 02A -X 02A - and A 3A But, ***-X03A -L 03A -or***-L 03A -X 03A - and A 1B But, ***-X 01B -L 01B -or***-L 01B -X 01B - and A 2B But, ***-X 02B -L 02B -or***-L 02B -X 02B - and A 3B But, ***-X 03B -L 03B -or***-L 03B -X 03B - and X 01A , X 02A , X 03A , X 01B , X 02B and X 03B each independently represents -O-, -CO-, -S-, or -SO2-; L 01A , L 02A , L 03A , L 01B , L 02B and L 03B each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, or -SO-), *** is Ar 1A , Ar 2A , Ar 3A , Ar 1B , Ar 2B or Ar 3B The resist composition according to [1], wherein the bond site is [3]X 01A , X 02A , X 03A , X 01B , X 02B and X 03B [2] The resist composition according to [2], wherein each of the groups independently represents -O- or -S-. [4]L 01A , L 02A , L 03A , L 01B , L 02B and L 03B are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). [5]R 10A or R 10B The resist composition according to any one of [1] to [4], wherein the acid labile groups are each independently a group represented by formula (1a) or a group represented by formula (2a). TIFF2025074941000005.tif2156 [In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining any of these; or R aa1 and R aa2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. * denotes a binding site.] TIFF2025074941000006.tif2162[In formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other and they combine -CX a Together with -, they form a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X a represents an oxygen atom or a sulfur atom. * denotes a binding site.] [6] The resist composition according to [5], wherein the group represented by formula (2a) is any one of the following groups: TIFF2025074941000007.tif62150[7] The resist composition according to any one of [1] to [6], wherein X and Y are sulfur atoms. [8]Ar 1A , Ar 2A , Ar 3A , Ar 1B , Ar 2B and Ar 3B are each independently a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring. [9] AI - is an anion represented by formula (IA). TIFF2025074941000008.tif1587[In formula (IA), L b1 represents a single bond or an (nb1+1)-valent hydrocarbon group which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. L b2 represents a single bond or a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, a plurality of -L b2 -Y b1 may be the same or different from each other.

[10] AII - 2. The resist composition according to claim 1, wherein is an anion represented by formula (ID). TIFF2025074941000009.tif844[in expression (ID) X 0 represents a hydrocarbon group having 2 to 72 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-.]

[11] The resist composition according to any one of [1] to

[10] , further comprising a resin containing one or more structural units represented by formula (a2). TIFF2025074941000010.tif4194[In formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-. L a22 represents a single bond or a chain hydrocarbon group of 1 to 12 carbon atoms which may have a fluorine atom, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. na2 represents an integer of 1 to 4. When na2 is 2 or more, a plurality of L a22 may be the same or different from each other.

[12] One or more structural units represented by formula (a2) The resist composition according to

[11] , which contains one or more structural units represented by formula (a2-A): TIFF2025074941000011.tif31127[In formula (a2-A), R a2represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 4, and when nA2 is 2 or greater, the groups in the parentheses may be the same or different from each other. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer between 0 and 2.

[13] The resist composition according to

[11] or

[12] , wherein the one or more structural units represented by formula (a2) include a structural unit represented by formula (a2-D): TIFF2025074941000012.tif51105[In formula (a2-D), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27represents a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 4. When nD2 is 2 or greater, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27 may be the same or different from each other.

[14] The resist composition according to any one of

[11] to

[13] , wherein the one or more structural units represented by formula (a2) include a structural unit represented by formula (a2-A) and a structural unit represented by formula (a2-D). TIFF2025074941000013.tif31127[In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 4, and when na2 is 2 or greater, the groups in the parentheses may be the same or different from each other. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer between 0 and 2. TIFF2025074941000014.tif51105[In formula (a2-D), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 4. When nD2 is 2 or greater, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27 may be the same or different from each other.

[15] The resist composition according to any one of [1] to

[14] , wherein the total content of the salt represented by formula (I1) and the carboxylate salt represented by formula (I2) is 90 mass % or more relative to the solid content of the resist composition.

[16] -L b2 -Y b1 or Y b1 The resist composition according to any one of [9] to

[15] , wherein the compound forms an acid labile group.

[17] (1) A step of applying the resist composition according to any one of [1] to

[16] onto a substrate; (2) drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) A method for producing a resist pattern, comprising the step of developing the composition layer after heating. [Effects of the Invention]

[0007] By using a resist composition that uses the salt of the present invention, a resist pattern with good CD uniformity (CDU) can be produced. DETAILED DESCRIPTION OF THE INVENTION

[0008] As used herein, "(meth)acrylic monomer" refers to "at least one of an acrylic monomer and a methacrylic monomer." Terms such as "(meth)acrylate" and "(meth)acrylic acid" have similar meanings. Regarding groups described herein that can have either a linear or branched structure, either is acceptable. When -CH2- in a hydrocarbon group or the like is replaced with -O-, -S-, -CO-, or -SO2-, the same applies to each group, and the number of carbon atoms before the replacement is the number of carbon atoms in the hydrocarbon group or the like. A "combined group" refers to a group formed by combining two or more of the exemplified groups, with their valence, bonding form, and other factors appropriately modified. "Derived from" or "derived from" refers to a polymerizable C=C bond in the molecule becoming a -CC- group (single bond) upon polymerization. When stereoisomers exist, all stereoisomers are included. Depending on the number of substituents, hydrogen atoms in each group may be replaced with bonds at any position and in any number. The number of carbon atoms in a substituent is not included in the number of carbon atoms of the substituted group. As used herein, the term "acid labile group" refers to a group that has a leaving group and that is eliminated upon contact with an acid, converting the structural unit into a structural unit having a hydrophilic group (e.g., a hydroxy group or a carboxy group). The term "base labile group" refers to a group that, upon contact with a base (e.g., trimethylamine), is eliminated to form a hydrophilic group (e.g., a carboxy group or a hydroxy group). The term "solid content of the resist composition" refers to the sum of the components excluding the solvent (E), which will be described later, from the total amount of the resist composition.

[0009] [Resist Composition] The resist composition of the present invention contains an acid generator containing a salt represented by formula (I1) (hereinafter may be referred to as "salt (I1)") and a carboxylic acid generator containing a carboxylic acid salt represented by formula (I2) (hereinafter may be referred to as "carboxylic acid salt (I2)"). The resist composition of the present invention may further contain a resin. Examples of the resin include a resin containing one or more structural units represented by formula (a2) (hereinafter sometimes referred to as "resin (AX)"), and resins other than resin (AX). The resist composition of the present invention may also contain an acid generator (hereinafter sometimes referred to as "acid generator (B)"), and a quencher (hereinafter sometimes referred to as "quencher (C)"), such as a salt that generates an acid with a weaker acidity than the acid generated by the acid generator. Resin (AX) containing a structural unit represented by formula (a2) is an acid-stable resin. An acid-stable resin is a resin containing structural units mainly having acid-stable groups, and the term "acid-stable groups" used herein refers to groups that are not converted into hydrophilic groups, such as carboxy groups or hydroxy groups, even when contacted with an acid. The resist composition of the present invention preferably contains a resin (AX), and more preferably contains a solvent (hereinafter sometimes referred to as "solvent (E)").

[0010] [Acid Generator] The resist composition of the present invention contains a salt represented by formula (I1) as an acid generator. <Salt represented by formula (I1)> The present invention relates to a salt represented by formula (I1). In the salt (I1), the side having a positive charge is sometimes called the "cation (I1)" and the side having a negative charge is sometimes called the "anion (I1)." [Cation (I1)] The positively charged cation (I1) of the salt represented by formula (I1) is a cation represented by formula (I-C1). TIFF2025074941000015.tif49140 [In formula (I-C1), all symbols have the same meanings as in formula (I1)]

[0011] R 1A , R 2A , R 3A , R 4A , R 5A , R 6A , R 7A , R 8A and R 9A L included in10 Examples of the hydrocarbon group in include chain hydrocarbon groups such as alkanediyl groups, monocyclic or polycyclic (including spirocyclic) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may also be groups formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and an alkanediyl group). Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl groups; Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. The terminal of the branched alkanediyl group may be a methyl group. The chain hydrocarbon group may have 1 to 24 carbon atoms, preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, and even more preferably 1 to 4. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following groups: The binding site can be any position. TIFF2025074941000016.tif46168Specifically, the alicyclic hydrocarbon group may be a monocyclic divalent cycloalkanediyl group such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, or a cyclooctane-1,5-diyl group; Examples of such groups include cycloalkyl groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, adamantane-2,6-diyl, spirocyclohexane-1,2'cyclopentane, and spiroadamantane-2,3'-cyclopentane, and polycyclic divalent alicyclic hydrocarbon groups such as spiro rings having a cycloalkyl group bonded to a norbornyl group or an adamantyl group via a spiro bond. The number of carbon atoms in the alicyclic hydrocarbon group may be 3 to 24, preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group may have 6 to 24 carbon atoms, preferably 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms. Examples of groups combining two or more groups include a group combining an alicyclic hydrocarbon group with an alkanediyl group, a group combining an aromatic hydrocarbon group with an alkanediyl group, and a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may each be combined. In addition, when any group does not have a benzene ring or Ar 1A , Ar 2A , Ar 3A may be bound to Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent aromatic hydrocarbon group-. Examples of groups combining an alicyclic saturated hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-. L 10 The —CH2— contained in the hydrocarbon group having 1 to 28 carbon atoms may be replaced with —O—, —S—, —SO2— or —CO—. L 10 When a —CH2— contained in the hydrocarbon group having 1 to 28 carbon atoms is replaced with —O—, —S—, —SO2— or —CO—, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the hydrocarbon group. Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), an oxy group (a group in which -CH2- in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- in a methylene group is replaced by -CO-), a methyl group (a group in which -CH2- in a methylene group is replaced by -CO-), a methyl group (a group in which -CH2- in a methylene group is replaced by -O ... group in which -CH2- is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO -), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-) , an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -SO2-), an alkanediylthio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -S-), a thio group (a group in which -CH2- contained in a methylene group is replaced withExamples of such groups include a group in which -CH- in a methylene group is replaced with -SO-), a sulfonyl group (a group in which -CH- in a methylene group is replaced with -SO-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group in which two or more of these groups are combined. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 27 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyl group has preferably 2 to 12 carbon atoms, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group and the alkoxycarbonyloxy group each have preferably 2 to 11 carbon atoms, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0012] Examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include the following groups. -O- or -CO- in the groups shown below may be replaced with -S- or -SO2-, respectively. The bonding site may be at any position. TIFF2025074941000017.tif46168

[0013] L 10 Examples of the substituent that may be possessed by L include a halogen atom and a cyano group. 10 In the case of a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with an alkyl group, the alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. 10 The -CH2- in the alkyl group in the formula is replaced with -O-, -CO-, -S- or -SO2-, thereby forming L 10can substantially have a substituent such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 10 The substituent in is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxy group or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and further preferably a methyl group or a fluorine atom.

[0014] L 10 is preferably an alkanediyl group having 1 to 10 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) or a group combining an alkanediyl group having 1 to 4 carbon atoms with an alicyclic hydrocarbon group having 3 to 12 carbon atoms (-CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced with -O- or -CO-), more preferably an alkanediyl group having 1 to 6 carbon atoms, and even more preferably a methylene group.

[0015] R 1A , R 2A , R 3A , R 4A , R 5A , R 6A , R 7A , R 8A and R 9A R included in 10A The acid labile group in R 10A When a leaving group including a group represented by the following formula is eliminated, it forms a carboxy group or a hydroxy group. The acid labile group is preferably a group represented by formula (1a) (hereinafter sometimes referred to as "acid labile group (1a)") or a group represented by formula (2a) (hereinafter sometimes referred to as "acid labile group (2a)"). TIFF2025074941000018.tif2156 [In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. * denotes a binding site.] TIFF2025074941000019.tif2162 [In formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other and they combine -CX a Together with -, they form a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X a represents an oxygen atom or a sulfur atom. * denotes a binding site.]

[0016] R aa1 , R aa2 and R aa3 Examples of the alkyl group of R include a methyl group, an ethyl group, a propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, and an n-octyl group. aa1 , R aa2 and R aa3 The alkyl group may have 1 to 8 carbon atoms, preferably 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms. R aa1 , R aa2and R aa3 Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. R aa1 , R aa2 and R aa3 The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (where * indicates a bonding site): aa1 , R aa2 and R aa3 The alicyclic hydrocarbon group may have 3 to 20 carbon atoms, preferably 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. TIFF2025074941000020.tif9159R aa1 , R aa2 and R aa3 Examples of the aromatic hydrocarbon group of R include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl. aa1 , R aa2 and R aa3 The aromatic hydrocarbon group may have 6 to 18 carbon atoms, preferably 6 to 14 carbon atoms, and more preferably 6 to 10 carbon atoms.

[0017] Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group.

[0018] R aa1 and R aa2 -C(R aa1 )(R aa2 )(R aa3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2025074941000021.tif28138

[0019] The group represented by formula (1a) is a 1,1,1-trialkyl group (R aa1 , R aa2 and R aa3 is an alkyl group, preferably a tert-butyl group), a 2-alkyladamantan-2-yl group (in formula (1a), R aa1 , R aa2 and the carbon atoms to which they are bonded form an adamantyl group, and R aa3 is an alkyl group) and 1-(adamantan-1-yl)-1,1-dialkyl groups (in formula (1a), R aa1 and R aa2 is an alkyl group, and R aa3is an adamantyl group).

[0020] R aa1' , R aa2' and R aa3' Examples of the hydrocarbon group include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, cyclic hydrocarbon groups such as aromatic hydrocarbon groups, and groups formed by combining these groups. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups are R aa1 , R aa2 and R aa3 Examples of the groups include the same groups as those listed in the above. R aa2' and R aa3' are bonded to each other and the carbon atoms to which they are bonded and X a When forming a heterocyclic group together with -C(R aa1' )(R aa2' )-X a -(R aa3' ) includes the following groups. * represents a bonding site. The heterocyclic group may have 3 to 20 carbon atoms, preferably 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. TIFF2025074941000022.tif21142R aa1' and R aa2' At least one of these is preferably a hydrogen atom. The acid labile group (2a) is R aa1’ and R aa2’ are each independently a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R aa3’ is a hydrocarbon group having 3 to 20 carbon atoms including a cyclic hydrocarbon group (R aa3’ The total number of carbon atoms in R is 3 to 20, or aa2’ and R aa3’ bind to each other and they combine -CX a Preferably, it forms a heterocyclic group having 3 to 20 carbon atoms together with -. Here, -CH2- contained in the hydrocarbon group and heterocyclic group may be replaced with -O- or -S-.

[0021] Specific examples of the acid labile group (1a) include the following groups: * represents a bonding site. TIFF2025074941000023.tif56163

[0022] Specific examples of the acid labile group (2a) include the following groups: * represents a bonding site. TIFF2025074941000024.tif59148Of these, the acid labile group (2a) is preferably the following group: TIFF2025074941000025.tif62150Ar 1A , Ar 2A and Ar 3A is a group derived from a benzene ring, R 1A , R 2A and R 3A Ar 1A , Ar 2A and Ar 3A The bonding positions to A are independently 1A , A 2A and A 3A The bonding position of A may be either o-position, m-position or p-position. 1A , A 2A and A 3A It is preferably bonded to the p-position or m-position relative to the bonding position of (I), and more preferably bonded to the p-position. R 1A , R 2A and R 3A each independently represents a hydroxy group, -OR 10A or -OL 10A -CO-OR 10A and each independently represents -OR 10A or -OL 10A -CO-OR 10A It is more preferable that: Also, in one embodiment, R 4A , R 5A , R 6A , R 7A , R 8A and R 9A each independently represents a hydroxy group, -OR 10A or -OL 10A-CO-OR 10A and each independently represents -OR 10A or -OL 10A -CO-OR 10A It is more preferable that:

[0023] R 4A , R 5A , R 6A , R 7A , R 8A and R 9A Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 4A , R 5A , R 6A , R 7A , R 8A and R 9A The haloalkyl group having 1 to 12 carbon atoms refers to an alkyl group having 1 to 12 carbon atoms and containing a halogen atom, and examples thereof include a fluorinated alkyl group having 1 to 12 carbon atoms, a chlorinated alkyl group having 1 to 12 carbon atoms, a brominated alkyl group having 1 to 12 carbon atoms, and an iodinated alkyl group having 1 to 12 carbon atoms. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 12 carbon atoms (e.g., a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. R 4A , R 5A , R 6A , R 7A , R 8A and R 9A Examples of the hydrocarbon group having 1 to 18 carbon atoms include chain hydrocarbon groups such as alkyl groups and alkanediyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups. The alkyl group is a linear or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The alkanediyl group is a linear or branched alkanediyl group, such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, or a hexane-1,6-diyl group; and Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The chain hydrocarbon group may have 1 to 16 carbon atoms, preferably 1 to 12, more preferably 1 to 9, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position. TIFF2025074941000026.tif46168Specifically, monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl.Polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl; cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane; and spiro rings having a cycloalkyl group bonded to a norbornyl or adamantyl group via a spiro bond.The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, and even more preferably 3 to 10. Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The aromatic hydrocarbon group preferably has 6 to 16 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0024] Examples of groups formed by combining two or more of chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups include a group combining an aromatic hydrocarbon group and a chain hydrocarbon group (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*, alkyl group-aromatic hydrocarbon group-alkanediyl group-*, where -CH2- contained in the alkanediyl group and the alkyl group may be replaced by -O-, -CO-, -S-, or -SO2-), a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group (for example, alicyclic hydrocarbon group-alkanediyl group- Examples of such groups include an alkanediyl group-*, an alkyl group-alicyclic hydrocarbon group-*, an alkyl group-alicyclic hydrocarbon group-alkanediyl group-*, where —CH— contained in the alicyclic hydrocarbon group, the alkanediyl group, and the alkyl group may be replaced by —O—, —CO—, —S—, or —SO—, and groups combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (for example, an aromatic hydrocarbon group-alicyclic hydrocarbon group-*, an alicyclic hydrocarbon group-aromatic hydrocarbon group-*, where —CH— contained in the alicyclic hydrocarbon group may be replaced by —O—, —CO—, —S—, or —SO—). * represents a bonding site. The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group. Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group. Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group. Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenylcyclohexyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group. In addition, in the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. 1 , Ar 2 , Ar 3 Alternatively, it may be bonded to a benzene ring.

[0025] R 4A , R 5A , R 6A , R 7A , R 8A and R 9A When a -CH2- in a haloalkyl group or a hydrocarbon group represented by the formula (I) is replaced with -O-, -CO-, -S-, or -SO2-, the number of carbon atoms before the replacement is the total number of carbon atoms in the haloalkyl group or the hydrocarbon group. The number may be 1 or 2 or more. Examples of haloalkyl groups and groups in which -CH2- in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), and a hydroxyl group (a group in which -CH2- at any position in an alkyl group is replaced by -O-). -CH2-CH2- at any position in the alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in the alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in the alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in the alkyl group is replaced with -O-CO-O-), alkylthio group (a group in which -CH2- at any position in the alkyl group is replaced with -S-), group), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O -), an alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -CO-O-), an alkanediylthio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -S-),Examples of the alkyl group include an alkanediylsulfonyl group (an alkanediyl group in which -CH- at any position is replaced with -SO-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a haloalkoxy group (a haloalkyl group in which -CH- at any position is replaced with -O-), a haloalkoxycarbonyl group (a haloalkyl group in which -CH-CH- at any position is replaced with -O-CO-), a haloalkylcarbonyl group (a haloalkyl group in which -CH- at any position is replaced with -CO-), a haloalkylcarbonyloxy group (a haloalkyl group in which -CH-CH- at any position is replaced with -CO-), and a combination of two or more of these groups. Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyl group has preferably 2 to 12 carbon atoms, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkoxycarbonyloxy group and the alkylcarbonyloxy group each have preferably 2 to 11 carbon atoms, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 17 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 17 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 17 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 17 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 18 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 17 carbon atoms, such as a phenyloxy group. Examples of the haloalkoxy group, haloalkoxycarbonyl group, haloalkylcarbonyl group, and haloalkylcarbonyloxy group include haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, and haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, and include groups in which one or more hydrogen atoms of the above-exemplified groups have been replaced with a halogen atom.

[0026] Furthermore, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -S-, -SO2- or -CO- include the groups shown below. -O- or -CO- in the groups shown below may be replaced with -S- or -SO2-. The bonding site may be at any position. TIFF2025074941000027.tif46168

[0027] R 4A , R 5A , R 6A , R 7A , R 8A and R 9A The substituents that the hydrocarbon group may have include a halogen atom and a cyano group. Examples of the halogen atom include the same groups as those mentioned above. The hydrocarbon group may have one or more substituents.

[0028] Ar 1A , Ar 2A and Ar 3A Examples of the aromatic hydrocarbon group having 6 to 10 carbon atoms include groups derived from a benzene ring or a naphthalene ring, such as a phenylene group or a naphthylene group. 1A , Ar 2A and Ar 3A Examples of the heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms include groups derived from a furan ring, a thiophene ring, a benzofuran ring, or a benzothiophene ring. Ar 1A , Ar 2A and Ar 3A are each independently preferably a group derived from a benzene ring, a naphthalene ring, a furan ring or a thiophene ring, and more preferably a group derived from a benzene ring.

[0029] A 1A , A 2A and A 3A Examples of the hydrocarbon group include linear or branched chain hydrocarbon groups (e.g., alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be a combination of two or more of these groups. The number of carbon atoms in the hydrocarbon group is preferably 1 to 19, more preferably 1 to 18, even more preferably 1 to 16, still more preferably 1 to 14, and even more preferably 1 to 12. Examples of the chain hydrocarbon group include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl; Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position. TIFF2025074941000028.tif46168Specifically, monocyclic alicyclic hydrocarbon groups such as monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group; Examples include polycyclic alicyclic hydrocarbon groups such as polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl; cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane; and spiro rings having a cycloalkyl group bonded to a norbornyl group or an adamantyl group via a spiro bond. The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, even more preferably 3 to 12 carbon atoms, and even more preferably 3 to 10 carbon atoms. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0030] Examples of groups formed by combining groups include a group formed by combining an alicyclic hydrocarbon group with an alkanediyl group, a group formed by combining an aromatic hydrocarbon group with an alkanediyl group, and a group formed by combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group. In the combination, two or more chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups may be combined. Furthermore, any of the groups may be bonded to a benzene ring. Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent aromatic hydrocarbon group-. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-.

[0031] A 1A , A 2A and A 3A In the case where a -CH2- in a hydrocarbon group is replaced with -O-, -CO-, -S-, or -SO2-, the number of carbon atoms before the replacement is taken as the total number of carbon atoms in the hydrocarbon group. The number may be one or more, but is preferably one or two. Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -CO-, -S-, or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2 a group in which -CH2- is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced by -O-CO-O-), an alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced by -S-), an alkyl Sulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), an alkanediyloxycarbonyl group (an alkanediyl group in which -CH2-CH2- at any position is replaced with -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced with -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced with -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced with -SO2-),Examples of such groups include an alkanediylthio group (a group in which -CH- at any position in an alkanediyl group is replaced with -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group in which two or more of these groups are combined. Examples of the alkoxy group include alkoxy groups having 1 to 19 carbon atoms, such as a methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 19 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 20 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 19 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 18 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyl group has preferably 2 to 12 carbon atoms, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group and alkoxycarbonyloxy group have preferably 2 to 11 carbon atoms, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 19 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 19 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 19 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 20 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 19 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 19 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 19 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 19 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 19 carbon atoms, such as a cyclohexylmethoxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 19 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 20 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 19 carbon atoms, such as a phenyloxy group.

[0032] Examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -CO-, -S-, or -SO2- include the groups shown below. Also included are groups in which, among the groups shown below, -O- is replaced with -S- and -CO- is replaced with -SO2-. The bonding site can be at any position. TIFF2025074941000029.tif46168A 1A , A 2A and A 3A The substituents that the hydrocarbon group may have include R 4A ~R 9A Examples of the substituents include the same groups as those exemplified as the substituents that the hydrocarbon group may have.

[0033] A 1A , A 2A and A 3A are each independently a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-, provided that at least one of -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-). Specifically, A 1A is***-L 011A -X 01A -L012A - and A 2A is***-L 021A -X 02A -L 022A - and A 3A is***-L 031A -X 03A -L 032A -is (X 01A , X 02A and X 03A each independently represents -O-, -CO-, -S- or -SO2-. 011A , L 012A , L 021A , L 022A , L 031A and L 032A are each independently a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. 011A and L 012A The total number of carbon atoms is 0 to 18, and L 021A and L 022A The total number of carbon atoms is 0 to 18, and L 031A and L 032A The total number of carbon atoms is 0 to 18. *** indicates Ar 1A , Ar 2A or Ar 3A It is more preferable that A 1A is ***-X 01A -L 01A -or***-L 01A -X 01A - and A 2A is ***-X 02A -L 02A -or***-L 02A -X 02A - and A 3A is ***-X 03A -L 03A -or***-L 03A -X 03A -is (X 01A , X 02A and X 03A each independently represents -O-, -CO-, -S- or -SO2-. 01A, L 02A and L 03A are each independently a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. *** is Ar 1A , Ar 2A or Ar 3A It is more preferable that A 1A , A 2A and A 3A is preferably one that has no substituents other than substitution with -O-, -CO-, -S- or -SO2-. L 011A , L 012A , L 021A , L 022A , L 031A , L 032A , L 01A , L 02A and L 03A The hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) may be a hydrocarbon group having 1 to 18 carbon atoms, such as A 1A , A 2A and A 3A Examples of the groups include the same groups as those listed in the above. X 01A , X 02A and X 03A are each independently preferably -O- or -S-, more preferably -O-. L 011A , L 012A , L 021A , L 022A , L 031A , L 032A , L 01A , L 02A and L 03Aare each independently preferably a single bond or a hydrocarbon group having 1 to 18 carbon atoms (wherein -CH2- may be replaced by -O-, -CO-, -S- or -SO2-), more preferably a single bond or a hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- may be replaced by -O-, -CO-, -S- or -SO2-), and are each independently preferably a single bond, a chain hydrocarbon group having 1 to 9 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or a group combining a chain hydrocarbon group having 1 to 4 carbon atoms with an alicyclic hydrocarbon group having 3 to 10 carbon atoms (wherein -CH2- in the chain hydrocarbon group and the alicyclic hydrocarbon group is replaced by -O- , -CO-, -S-, or -SO2-), even more preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (wherein -CH2- in the alkanediyl group may be replaced by -O- or -CO-), even more preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms (wherein -CH2- in the alkanediyl group may be replaced by -O- or -CO-), and even more preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms (wherein -CH2- in the alkanediyl group may be replaced by -O- or -CO-). Among these, a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, a carbonyl group, a carbonyloxy group, a carbonyloxymethylene group, an ethyleneoxy group, an ethyleneoxymethylene group, a methylenecarbonyloxy group, a methylenecarbonyloxymethylene group, or an ethyleneoxycarbonyl group is preferred, and a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, or a carbonyl group is more preferred. 011A and L 012A The total number of carbon atoms is 0 to 18, and L 021A and L 022A The total number of carbon atoms is 0 to 18, and L 031A and L 032A The total number of carbon atoms is 0 to 18. A 1A , A 2A and A3A X + The bonding positions of X to the benzene ring are each independently + The bonding position of X may be either o-position, m-position or p-position. + More specifically, when m1A, m2A, and m3A are 1, A 1A , A 2A and A 3A are each independently, X + Preferably, the bond is at the p-position or m-position relative to the bonding position of A, and more preferably at the p-position. 1A , A 2A and A 3A are each independently, X + With respect to the bonding positions of m, it is preferred that one is bonded to the o-position or the m-position, and one is bonded to the o-position or the m-position, and it is more preferred that two are bonded to the m-position. 1A , A 2A and A 3A are each independently, X + With respect to the bonding positions of m1A, m2A, and m3A, it is preferred that two are bonded to the o- or m-position and one is bonded to the p- or m-position, and it is more preferred that two are bonded to the m-position and one is bonded to the p-position. 1A , A 2A and A 3A are each independently, X + With respect to the bonding positions of the above, it is preferred that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position, and it is more preferred that two are bonded to the o-position and two are bonded to the m-position. m1A is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m2A is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m3A is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m4A is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m5A is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m6A is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m7A is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m8A is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m9A is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. However, 0≦m1A+m7A≦5, 0≦m2A+m8A≦5, and 0≦m3A+m9A≦5, and at least one of m1A, m2A, m3A, m7A, m8A, and m9A represents an integer of 1 or more. When m10A=1 and m1A=m2A=m3A=0, R is 1 or more. 7A , R 8A and R 9A At least one of the 2 -R 10A , or *-X 1 -L 10 -X 2 -R 10A Also, when m10A=0 and m1A=m2A=0, R is 1 or more. 7A and R 8A At least one of the 2 -R 10A , or *-X 1 -L 10-X 2 -R 10A Represents. R 4A , R 5A and R 6A each independently represents a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), -OR 10A , -O-CO-OR 10A or -OL 10A -CO-OR 10A is preferred, a fluorine atom, an iodine atom, a haloalkyl group of 1 to 6 carbon atoms, or an alkyl group of 1 to 6 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), is more preferred, a fluorine atom, an iodine atom, a haloalkyl group of 1 to 4 carbon atoms, or an alkyl group of 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), is still more preferred, a fluorine atom, iodine atom, a hydroxy group, an alkyl group of 1 to 4 carbon atoms, a haloalkyl group of 1 to 4 carbon atoms, or an alkoxy group of 1 to 3 carbon atoms, is still more preferred, a fluorine atom, iodine atom, a hydroxy group, an alkyl group of 1 to 4 carbon atoms, a perfluoroalkyl group of 1 to 4 carbon atoms, or an alkoxy group of 1 to 3 carbon atoms, is still more preferred, and a fluorine atom, iodine atom, a trifluoromethyl group, a methyl group, a methoxy group, an ethoxy group, or a hydroxy group. In another embodiment, one or more R 4A , R 5A and R 6A At least one of R may contain an acid labile group; 4A , R 5A , R 6A are each independently R 1A , R 2A , R 3A R may be a group similar to 1A -OR 10A In this case, one or two R 4A R 1A Same as -OR 10APreferably, R 1A Ga-O-CO-OR 10A In this case, one or two R 4A R 1A Same as -O-CO-OR 10A Preferably, R 1A Ga-OL 10A -CO-OR 10A In this case, one or two R 4A R 1A Same as -OL 10A -CO-OR 10A It is preferable that R 2A and R 5A Combination of R 3A and R 6A For each combination of 1A and R 4A The combination is similar to that of R 4A , R 5A and R 6A Ar 1A , Ar 2A and Ar 3A The bonding position to Ar is not particularly limited. 1A , Ar 2A and Ar 3A is a group derived from a benzene ring, R 4A , R 5A and R 6A Ar 1A , Ar 2A and Ar 3A The bonding positions to A are independently 1A , A 2A and A 3A In particular, when m4A, m5A, and m6A are 1, R 4A , R 5A and R 6A are each independently, A 1A , A 2A and A 3A Preferably, m4A, m5A, and m6A are bonded to the p- or m-position, more preferably to the m-position, relative to the bonding position of R 4A , R 5A and R 6Aare each independently, A 1A , A 2A and A 3A With respect to the bonding positions of m4A, m5A, and m6A, it is preferred that one is bonded to the o-position or m-position, and one is bonded to the p-position or m-position, and it is more preferred that two are bonded to the m-position. 4A , R 5A and R 6A are each independently, A 1A , A 2A and A 3A With respect to the bonding positions of m4A, m5A, and m6A, it is preferred that two of them are bonded to the o-position or m-position and one is bonded to the p-position or m-position, and it is more preferred that one is bonded to the o-position and two are bonded to the m-position. 4A , R 5A and R 6A are each independently, A 1A , A 2A and A 3A With respect to the bonding positions of the above, it is preferred that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position, and it is more preferred that two are bonded to the o-position and two are bonded to the m-position. R 7A , R 8A and R 9A each independently represents a single bond, a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), -OR 10 , -O-CO-OR 10A or -OL 10A -CO-OR 10A and a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced by —O— or —CO—), —OR 10A , -O-CO-OR 10A or -OL 10A -CO-OR 10Aand more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced by —O— or —CO—), —OR 10A , -O-CO-OR 10A or -OL 10A -CO-OR 10A More preferably, the alkyl group is a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy group, a methoxy group, a methyl group, a t-butyl group, or —OR 10A , -O-CO-OR 10A or -OL 10A -CO-OR 10A It is even more preferable that: R 7A , R 8A and R 9A The bonding positions of X to the benzene ring are each independently + The bonding position may be any of the o-position, m-position, and p-position relative to the bonding position of m1A, m2A, and m3A are 0, and R 7A , R 8A and R 9A -OR 10A , -O-CO-OR 10A or -OL 10A -CO-OR 10A If R 7A , R 8A and R 9A The bonding positions of X to the benzene ring are each independently + The bonding position of X may be either o-position, m-position or p-position. + It is preferably bonded to the p-position or m-position relative to the bonding position of (I), and more preferably bonded to the p-position. When m7A, m8A, and m9A are 1, R 7A , R 8A and R 9A are each independently, X + When m7A, m8A, and m9A are 2, R 7A , R 8A and R9A are each independently, X + With respect to the bonding positions of m7A, m8A, and m9A, it is preferred that one is bonded to the o-position or m-position and one is bonded to the p-position or m-position, and it is more preferred that one is bonded to the m-position and one is bonded to the p-position or m-position. 7A , R 8A and R 9A are each independently, X + With respect to the bonding positions of m7A, m8A, and m9A, it is preferable that two are bonded to the o-position or m-position and one is bonded to the p-position or m-position, and it is more preferable that two are bonded to the m-position and one is bonded to the p-position. 7A , R 8A and R 9A are each independently, X + With respect to the bonding positions of the above, it is preferred that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position, and it is more preferred that two are bonded to the m-position, one is bonded to the o-position and one is bonded to the p-position. Also, X is S + , and m10A=1, R 8A and R 9A are combined to form S + -CH2- in the ring may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. 8A and R 9A are combined to form S + When a ring containing the formula (I-C1′) is formed, it is preferably a cation represented by formula (I-C1′). TIFF2025074941000030.tif51155[In formula (I-C1'), R 1A , R 2A , R 3A , R 4A , R 5A , R 6A , R 7A , R 8A , R 9A , m1A, m2A, m3A, m4A, m5A, m6A, m7A, m8A, m9A, A 1A , A 2A, A 3A , Ar 1A , Ar 2A , Ar 3A The symbols have the same meanings as above. X 7A represents a single bond, -CH2-, -O-, -S-, -CO-, -SO- or -SO2-.] X 7A is preferably a single bond, —CH 2 — or —O—.

[0034] Examples of the cation represented by formula (I-C1) include cations represented by formula (I-C1-1) or formula (I-C1-2) (hereinafter, these may be referred to as "cation (I-C1-1)" and "cation (I-C1-2)," respectively). Examples of the cation represented by formula (I-C1') include cations represented by formula (I-C1'-1) (hereinafter, these may be referred to as "cation (I-C1'-1)." TIFF2025074941000031.tif135168 [In formula (I-C1-1), formula (I-C1-2) and formula (I-C1'-1), R 1A , R 2A , R 3A , R 4A , R 5A , R 6A , R 7A , R 8A , R 9A , m1A, m2A, m3A, m4A, m5A, m6A, m7A, m8A, m9A, L 01A , L 02A , L 03A , X 01A , X 02A , X 03A and X 7A The symbols have the same meanings as above.]

[0035] X 01A , X 02A and X 03A The bonding positions of A and B to the benzene ring are 1A , A 2A and A 3A The bonding position to the benzene ring is the same as that of

[0036] Examples of the cation (I1) of the salt (I1) include cations represented by the following formulae (Ic-1) to (Ic-348). TIFF2025074941000032.tif206140

[0037] TIFF2025074941000033.tif252168

[0038] TIFF2025074941000034.tif249166

[0039] TIFF2025074941000035.tif236143

[0040] TIFF2025074941000036.tif244166

[0041] JPEG2025074941000037.jpg248162

[0042] TIFF2025074941000038.tif242163

[0043] TIFF2025074941000039.tif244166

[0044] TIFF2025074941000040.tif221142

[0045] TIFF2025074941000041.tif211168

[0046] TIFF2025074941000042.tif204163

[0047] TIFF2025074941000043.tif214158

[0048] TIFF2025074941000044.tif191168

[0049] TIFF2025074941000045.tif199160

[0050] TIFF2025074941000046.tif234166

[0051] TIFF2025074941000047.tif237155

[0052] TIFF2025074941000048.tif239168

[0053] TIFF2025074941000049.tif224158

[0054] TIFF2025074941000050.tif247160

[0055] TIFF2025074941000051.tif252153

[0056] TIFF2025074941000052.tif214166

[0057] TIFF2025074941000053.tif237166

[0058] TIFF2025074941000054.tif239168

[0059] TIFF2025074941000055.tif211161

[0060] TIFF2025074941000056.tif254148

[0061] TIFF2025074941000057.tif227161

[0062] TIFF2025074941000058.tif237166

[0063] TIFF2025074941000059.tif252163

[0064] [Anion (I1)] In the salt represented by formula (I1), AI - The negatively charged anion (I1) represented by the formula (I1) is one selected from a sulfonate anion, a sulfonylmethide anion, and a sulfonylimide anion. The sulfonate anion may be, for example, an anion represented by formula (IA). TIFF2025074941000060.tif1382 [In formula (IA), all symbols are the same as above]

[0065] In formula (IA), L b1 The (nb1+1)-valent hydrocarbon group is a group obtained by removing nb1 hydrogen atoms from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, and forming one or more L b2 Examples of such groups include groups that bond to the following: The hydrocarbon group preferably has 1 to 48 carbon atoms, more preferably 1 to 42 carbon atoms, even more preferably 1 to 36 carbon atoms, even more preferably 1 to 30 carbon atoms, and even more preferably 1 to 24 carbon atoms. Examples of the chain hydrocarbon group include groups in which nb hydrogen atoms have been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, isobutyl, tert-butyl, pentyl, hexyl, heptyl, octyl, nonyl, decyl, undecyl, dodecyl, tridecyl, tetradecyl, pentanedecyl, and heptadecyl. Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, even more preferably 1 to 20, still more preferably 1 to 18, even more preferably 1 to 12, and even more preferably 1 to 10. Examples of the alicyclic hydrocarbon group include groups in which nb hydrogen atoms have been removed from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of polycyclic cycloalkyl groups include cycloalkyl groups having a bridged structure, cycloalkyl groups in which two or more rings are fused, and cycloalkyl groups in which two rings are bonded via a spiro bond. Examples of cycloalkyl groups having a bridged structure include a norbornyl group and an adamantyl group. Examples of cycloalkyl groups in which two or more rings are fused include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of cycloalkyl groups in which two rings are bonded via a spiro bond include spirocyclic cycloalkyl groups in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is bonded via a spiro bond to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, alicyclic hydrocarbon groups represented by the following formulas are included. TIFF2025074941000061.tif26168 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, still more preferably 3 to 12, even more preferably 3 to 10, and still more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, even more preferably 6 to 18, still more preferably 6 to 12, and even more preferably 7 to 12. Examples of aromatic hydrocarbon groups include groups in which nb1 hydrogen atoms have been removed from an aryl group, such as a phenyl group, naphthyl group, anthryl group, biphenyl group, and fluorenyl group. More specifically, aromatic hydrocarbon groups represented by the following formulas are included. TIFF2025074941000062.tif1184 The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, even more preferably 4 to 18, still more preferably 5 to 14, even more preferably 5 to 10, and even more preferably 6 to 10. L b1 When -CH2- in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, the number of carbon atoms before replacement is regarded as the number of carbon atoms in the hydrocarbon group. L b1Among the hydrocarbon groups in which -CH2- in a chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-, examples thereof include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2- in an ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), an oxy group (a group in which -CH2- in a methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (an alkyl group Examples of such groups include alkyl, alkylcarbonyl, alkyloxy, alkyl groups in which -CH- at any position in the alkyl group is replaced with -CO-), alkylcarbonyloxy groups (in which -CH-CH- at any position in the alkyl group is replaced with -CO-O-), alkanediyloxy groups (in which -CH- at any position in the alkanediyl group is replaced with -O-), alkanediyloxycarbonyl groups (in which -CH-CH- at any position in the alkanediyl group is replaced with -O-CO-), alkanediylcarbonyl groups (in which -CH- at any position in the alkanediyl group is replaced with -CO-), and alkanediylcarbonyloxy groups (in which -CH-CH- at any position in the alkanediyl group is replaced with -CO-). Examples of such groups in which a substitution is made include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. L b1 Among these hydrocarbon groups, groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -CO-, -S-, or -SO2- include cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, and cyclic sultones. Specific examples include alicyclic hydrocarbon groups represented by the following formulas: The bonding position of the alicyclic hydrocarbon groups represented by the following formulas can be any position. TIFF2025074941000063.tif49166L b1Among these hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and examples of groups in which -CH2- is replaced by -O- or -S- include a furan ring and a thiophene ring, respectively. Examples of the group combining two or more groups selected from the group consisting of a chain hydrocarbon group, an alicyclic hydrocarbon group, and an aromatic hydrocarbon group include a group combining the above-mentioned chain hydrocarbon group with the above-mentioned alicyclic hydrocarbon group, a group combining the above-mentioned chain hydrocarbon group with the above-mentioned aromatic hydrocarbon group, a group combining the above-mentioned alicyclic hydrocarbon group with the above-mentioned aromatic hydrocarbon group, and a group combining the above-mentioned chain hydrocarbon group with the above-mentioned alicyclic hydrocarbon group and the above-mentioned aromatic hydrocarbon group, and examples of the above-mentioned combined groups include the group combining the alicyclic hydrocarbon group with the aromatic hydrocarbon group, which may be a fused ring. L b2 The divalent hydrocarbon group is a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, or a group combining two or more of these groups, from which one hydrogen atom has been removed to form one or more Y b1 Examples of such groups include groups that bond to the following: L b2 The divalent chain hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group combining two or more of these groups are each, within the range permitted by the number of carbon atoms, L b1 Examples of the hydrocarbon groups include groups in which one hydrogen atom has been removed from the chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups that are combinations of two or more of these groups. L b1 and L b2 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L b1 and L b2 When L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. b1 and L b2The -CH2- of the chain hydrocarbon group contained in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, thereby forming L b1 and L b2 The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group. Y b1 Examples of the cyclic hydrocarbon group include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a combination of an alicyclic hydrocarbon group and an aromatic hydrocarbon group. Y b1 The alicyclic hydrogen group and aromatic hydrocarbon group are respectively represented by L b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups include those similar to those exemplified in 1., and when they have no substituent, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Y b1 The substituents that the methyl group in Y may have include a halogen atom, a cyano group, a hydroxy group, and a nitro group. b1 Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group, or a nitro group (-CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-). b1 The number of carbon atoms in the hydrocarbon group that the cyclic hydrocarbon group may have is b1 The number of hydrocarbon groups of the cyclic hydrocarbon groups is not included in the number of hydrocarbon groups. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that may be substituted on the cyclic hydrocarbon group include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups. Examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups combining two or more of these groups include, within the range permitted by the upper limit of the number of carbon atoms, L b1 Examples of the groups include the chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups in which two or more of these groups are combined, as exemplified above. Yb1 Examples of the methyl group and the hydrocarbon group having 1 to 18 carbon atoms that may have a substituent, in which -CH2- is replaced by -O-, -S-, -CO- or -SO2-, are, within the range permitted by the upper limit of the number of carbon atoms, L b1 Examples of the hydrocarbon group include the same groups as those exemplified above in which -CH2- in the hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2-. b1 The hydrocarbon group having 1 to 18 carbon atoms which may be substituted on the cyclic hydrocarbon group may constitute a protecting group or leaving group (acid labile group or base labile group) commonly used in the art.

[0066] The anion represented by formula (IA) is preferably an anion represented by the following formula (I-A1) (hereinafter, sometimes referred to as "anion (I-A1)") or an anion represented by formula (I-A2) (hereinafter, sometimes referred to as "anion (I-A2)"). TIFF2025074941000064.tif28125[In formula (I-A1), L b2 and Y b1 has the same meaning as in formula (IA). Q b1 , Q b2 , Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer of 0 to 6. When z1 is 2 or more, the groups in the parentheses may be the same or different. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or an optionally substituted hydrocarbon group having 1 to 24 carbon atoms and a valence of (nb2+1), and one -CH2- in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. nb2 represents an integer of 1 to 3. When nb2 is 2 or greater, the groups in the parentheses may be the same or different.] Q b1 , Q b2 , Q b3 and Q b4 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Q b1 , Q b2 , Q b3 and Q b4 Examples of the perfluoroalkyl group having 1 to 6 carbon atoms include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. Q b1 and Q b2 Q b1 and Q b2 At least one of the groups preferably contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4 are each preferably independently a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably an integer of 0 to 3, and is preferably 0, 1 or 2. X 1 is preferably —O—CO— or —CO—O—.

[0067] L b3As the hydrocarbon group in the formula (IA), within the range permitted by the upper limit of the number of carbon atoms, b1 The same hydrocarbon groups as those exemplified above can be mentioned. In formula (I-A1), L b3 is preferably a single bond, a chain hydrocarbon group of 1 to 12 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), an aromatic hydrocarbon group of 6 to 10 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -S-), or a group formed by combining two or more of these groups, and more preferably a single bond, a chain hydrocarbon group of 1 to 6 carbon atoms, or a group represented by the following formula (Lb3-1): When the chain hydrocarbon group is replaced with -O- or -CO-, the number of -CH2- in the chain hydrocarbon group replaced with -O- or -CO- is preferably 1 to 4, and it is preferred that one -CH2-CH2- in the chain hydrocarbon group is replaced with -O-CO- or -CO-O-, or that one -CH2-CH2-CH2- in the chain hydrocarbon group is replaced with -O-CO-O-. TIFF2025074941000065.tif1582[In formula (Lb3-1), nb2 has the same meaning as in formula (I-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, or may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, in which -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. * and ** represent binding sites, * represents X1 represents the binding site with In formula (Lb3-1), L b31 As long as the chain hydrocarbon group has an upper limit of the number of carbon atoms, b1 Examples of the chain hydrocarbon groups include the same groups as those exemplified as the chain hydrocarbon groups exemplified above. In formula (Lb3-1), W b3 The alicyclic hydrocarbon group and aromatic hydrocarbon group of L are as long as the upper limit of the carbon number allows. b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups include those exemplified above. In formula (Lb3-1), L b31 The substituents that the chain hydrocarbon group of W may have and b1 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group may have are b1 Examples of the substituent that the hydrocarbon group may have include the same groups as the substituents exemplified above. L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, W b1 The alicyclic hydrocarbon group and aromatic hydrocarbon group are preferably the alicyclic hydrocarbon group and aromatic hydrocarbon group shown below. In the alicyclic hydrocarbon group and aromatic hydrocarbon group shown below, * and ** represent a bonding site, * represents X 1 or L b31 represents a bonding site with L, and ** represents a hydrogen atom, a substituent, or L b2 represents a binding site with at least one ** b2 represents a bonding site with. In the alicyclic hydrocarbon groups represented below, -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. When -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO-, or -SO2-, it is preferable that an ether ring, ester ring (lactone), carbonate ring, sultone ring, or acetal ring is formed. TIFF2025074941000066.tif36168In formula (I-A1), L b2is preferably a single bond or an alkanediyl group having 1 to 12 carbon atoms (wherein —CH2— contained in the alkanediyl group may be replaced by —O— or —CO—), and is preferably a single bond, —O—, —O—CO—, —CO—O—, —O—CO—O— or *-L b21 -X 2 -L b22 -**(L b21 and L b22 one of the groups represents an alkanediyl group having at least 1 to 6 carbon atoms, and the other group represents a single bond or an alkanediyl group having 1 to 6 carbon atoms; and X 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-; * and ** represent bonding sites; ** represents Y b1 represents the binding site with L b21 , X 2 and L b22 The total number of carbon atoms is 12 or less. In formula (I-A1), Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and even more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. Specifically, it is preferably a group represented by the following formulae (Y1) to (Y36). In formulae (Y1) to (Y36), R Yb is a hydrogen atom or Y b1 represents an alkyl group having 1 to 4 carbon atoms among the substituents that may be possessed by the cyclic hydrocarbon group; R Yc is a hydrogen atom or Y b1 represents a substituent that the cyclic hydrocarbon group of the formula (I) may have, and * represents a substituent that the cyclic hydrocarbon group of the formula (I) may have, b2The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formulae may have other substituents, although not specifically shown in the following formulae. TIFF2025074941000067.tif94166 Also, in formula (IA) and formula (I-A1), -L b2 -Y b1 or Y b1 It is preferred that L alone forms an acid labile group. b2 But *-L b21 -X 2 -L b22 -** (wherein all symbols have the same meanings as above), Y b1 is preferably an alicyclic hydrocarbon group represented by formula (Y1), formula (Y3) or formula (Y12), and L b2 If is a single bond, Y b1 is preferably a group represented by formula (Y13) to formula (Y19).

[0068] The anion represented by formula (I-A1) is preferably an anion represented by formula (IA-1) to formula (IA-85) (hereinafter, sometimes referred to as "anion (IA-1)" or the like depending on the formula number), and more preferably an anion represented by any of formulas (IA-1) to (IA-4), (IA-9), (IA-10), (IA-24) to (IA-33), (IA-36) to (IA-40), and (IA-47) to (IA-85). TIFF2025074941000068.tif216161

[0069] TIFF2025074941000069.tif254158

[0070] TIFF2025074941000070.tif254163

[0071] where R i2 ~R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. i8is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 has the same meaning as above. Specific examples of the anion in the salt represented by formula (I-A1) include the anions described in JP-A-2010-204646.

[0072] Preferred anions represented by formula (I-A1) include anions represented by formulas (Ia-1) to (Ia-70). TIFF2025074941000071.tif181163

[0073] JPEG2025074941000072.jpg251162

[0074] TIFF2025074941000073.tif102155

[0075] Among these, anions represented by any one of formulae (Ia-1) to (Ia-3), (Ia-7) to (Ia-19), and (Ia-22) to (Ia-70) are preferred.

[0076] The anion represented by formula (I-A2) is represented by the following formula: TIFF2025074941000074.tif2394[In formula (I-A2), L b2 and Y b1 has the same meaning as in formula (IA). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and one --CH.sub.2-- contained in the alkyl group may be replaced with --O-- or --CO--. nb4 represents an integer of 1 to 5. When nb4 is 2 or greater, the groups in the parentheses may be the same or different. nb3 represents an integer of 0 to 4, and when nb3 is 2 or more, a plurality of R b1 They may be the same or different from each other. However, 1≦nb1+nb3≦5 is satisfied.

[0077] In formula (I-A2), L b2 and Y b1 Examples of the cyclic hydrocarbon group include, within the upper limit of the carbon number, L in formula (IA). b2 Examples of hydrocarbon groups and Y b1 Examples of the cyclic hydrocarbon group are the same as those of L. b2 hydrocarbon group, Y b1 The substituents that the methyl group and the cyclic hydrocarbon group may have are also defined as follows: b2 hydrocarbon group, Y b1 Examples of the substituents that the methyl group and cyclic hydrocarbon group may have are the same as those listed above. L b2 represents preferably a chain hydrocarbon group having 1 to 12 carbon atoms, in which -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and more preferably -CO-OL b41 -(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and * is SO3 - represents the bonding site with the phenyl group to which L is bonded. b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms. Y b1is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and even more preferably Y in formula (B1-A1) b1 or L b1 Specifically, preferred are groups represented by the above formulae (Y1) to (Y36), and more preferred are groups represented by the above formulae (Y1) to (Y19). Yb and R Yc is synonymous with the above. TIFF2025074941000075.tif83158 In formula (I-A2), similarly to formula (IA) and formula (I-A1), L b2 and Y b1 or a group formed by combining Y b1 It is preferred that the group alone forms an acid labile group.

[0078] In formula (I-A2), nb4 is preferably an integer of 1 to 4, more preferably an integer of 1 to 3, further preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 The bond position of SO3 - Preferably, the following structure is substituted at the m-position of the benzene ring relative to the bonding position of the above. TIFF2025074941000076.tif2697 [In the above formula, L b2 , Y b1 , R b1 , nb3 has the same meaning as in formula (I-A2). In formula (I-A2), when nb4 is 2 or more, a plurality of L b2 and Y b1 Preferably, each represents the same group.

[0079] R b1 Examples of the alkyl group having 1 to 6 carbon atoms include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 4, and more preferably 1 to 3. R b1 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of groups in which -CH2- in an alkyl group is replaced with -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, etc. Specific examples of these are the same as those described above. R b1 are each independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), and further preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a methyl group. nb3 is an integer of 0 to 4, preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 is more preferably a fluorine atom or an iodine atom. When nb3 is 2, R b1 Preferably, one of R is a halogen atom and the other is a halogen atom or an alkyl group having 1 to 4 carbon atoms, b1 It is more preferable that one of the groups is a fluorine atom or an iodine atom, and the other is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0080] Examples of the anion (I-A2) include the following anions. Among them, anions represented by formulas (I-a2-1) to (I-a2-20) are preferred, and anions represented by formulas (I-a2-1) to (I-a2-11) and (I-a2-16) to (I-a2-20) are more preferred. TIFF2025074941000077.tif102153

[0081] The sulfonylimide or sulfonylmethide includes, for example, an anion represented by formula (I-A3). TIFF2025074941000078.tif1187[In formula (I-A3), A 1 represents a nitrogen atom or a carbon atom. L b2 ' represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-, and two -L b2’ -Y b1’ Together they form A 1 may form a ring containing: nb5 represents 2 or 3. When nb5 is 2, A 1 represents a nitrogen atom, and when nb5 is 3, A 1 represents a carbon atom. Multiple groups in parentheses may be the same or different.] In formula (I-A3), L b2 ' and Y b1 Examples of L′ are b2 and Y b1 The same groups as those mentioned above can be mentioned. In formula (I-A3), L b2’ is a single bond, *-L b23 -X 2 -or*-Lb23 -X 2 -W 2 -X 3 -(L b23 represents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, and X 2 and X 3 each independently represents -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-; W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-, and * represents a bonding site with SO2.) is preferred. In formula (I-A3), Y b1’ is preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or a phenyl group which may have a substituent, and is more preferably a trifluoromethyl group or a group represented by formulas (Y1) to (Y36) in formula (I-A1). nb5 is preferably 2 or 3. In formula (I-A3), two L b2’ -Y b1’ Together they form A 1 When a ring containing the formula (I-A3′) is formed, examples thereof include anions represented by the formula (I-A3′). TIFF2025074941000079.tif21117[In formula (I-A3'), A 1 , Y b1 ', L b2 'nb5 has the same meaning as in formula (B1-A3). W b4 represents a disulfonylimide ring or disulfonylmethide ring having 3 to 12 carbon atoms which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmide ring preferably has 3 to 12 carbon atoms, more preferably 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably substituted with a fluorine atom.

[0082] Examples of the anion represented by formula (I-A3) include the following: Among these, the anions represented by formula (I-a3-1) and formula (I-a3-2) are preferred. TIFF2025074941000080.tif254163

[0083] Specific examples of the salt (I1) include salts of any combination of the above-mentioned cations and anions. In Table 1 below, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation, and "~" represents the combination of salt (I1) and anion (Al1). - or cation C1 + For example, salt (I1-1) is a salt consisting of an anion represented by formula (Ia-1) and a cation represented by formula (Ic-1), salt (I1-2) is a salt consisting of an anion represented by formula (Ia-2) and a cation represented by formula (Ic-1), and salt (I1-71) is a salt consisting of an anion represented by formula (Ia-1) and a cation represented by formula (Ic-2). In addition, salt (I1-24361) is a salt consisting of an anion represented by formula (I-a2-1) and a cation represented by formula (Ic-1), salt (I1-24362) is a salt consisting of an anion represented by formula (I-a2-2) and a cation represented by formula (Ic-1), salt (I1-31321) is a salt consisting of an anion represented by formula (I-a3-1) and a cation represented by formula (Ic-1), salt (I1-31322) is a salt consisting of an anion represented by formula (I-a3-2) and a cation represented by formula (Ic-1). These salts (I) can be obtained by conventionally known synthesis methods, for example, the synthesis method described in JP 2021-175722 A. TIFF2025074941000081.tif28107 [Table 1]

[0084] Among these, salt (I1) is preferably a salt obtained by combining an anion represented by any one of formulas (Ia-1) to (Ia-3), (Ia-7) to (Ia-19), (Ia-22) to (Ia-70), (I-a2-1) to (I-a2-20), and (I-a3-1) to (I-a3-20) with a cation represented by any one of formulas (Ic-1) to (Ic-348). These salts can be produced by known methods, or commercially available products may be used.

[0085] The acid generator in the resist composition of the present invention may contain one type of salt (I1), or may contain two or more types of salt (I1). In the resist composition of the present invention, the total content of the salt (I1) is preferably from 20 to 95 parts by mass, more preferably from 35 to 90 parts by mass, and even more preferably from 60 to 85 parts by mass, relative to 100 parts by mass of the solids content of the resist composition. The resist composition of the present invention may contain, as an acid generator, in addition to the salt (I1), a known compound that acts as an acid generator in the resist field (hereinafter, sometimes referred to as "compound (B)"). Compound (B) may be used alone or in combination of two or more types.

[0086] <Compound (B)> Compound (B) may be either a nonionic compound or an ionic compound. Examples of nonionic compounds include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), etc. Examples of ionic compounds include onium salts containing onium cations (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of anions of onium salts include sulfonate anions, sulfonylimide anions, sulfonylmethide anions, and carboxylate anions. The compound (B), like the structural unit (a7), may be a part of a structural unit that constitutes the resin contained in the resist composition.

[0087] Compound (B) that can be used is a compound that generates an acid when exposed to radiation, such as those described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Pat. No. 3,779,778, U.S. Pat. No. 3,849,137, German Patent No. 3,914,407, and European Patent No. 126,712. Compounds produced by known methods may also be used. The compound (B) may be an acid generator having an acid labile group. For example, the compound or resin serving as the acid generator may contain a partial structure that forms an acid labile group.

[0088] Compound (B) is preferably a salt represented by formula (B1) (hereinafter sometimes referred to as "compound (B1)", excluding salt (I)). More preferably, it is a salt having a salt represented by formula (B1-1) (hereinafter sometimes referred to as "compound (B1-1)", excluding salt (I)), a salt represented by formula (B1-2) (hereinafter sometimes referred to as "compound (B1-2)", excluding salt (I)), or a salt represented by formula (B1-3) (hereinafter sometimes referred to as "compound (B1-3)", excluding salt (I)). TIFF2025074941000083.tif1196 [In formula (B1), all symbols have the same meanings as above. Z1 + represents an organic cation, excluding the cation represented by formula (IC). TIFF2025074941000084.tif31133 [In formula (B1-1), all symbols have the same meanings as above. Z2 + represents an organic cation, excluding the cation represented by formula (IC). TIFF2025074941000085.tif2892 [In formula (B1-2), all symbols have the same meanings as above. Z3 + represents an organic cation, excluding the cation represented by formula (IC). TIFF2025074941000086.tif1197 [In formula (B1-3), all symbols have the same meanings as above. Z4 + represents an organic cation, excluding the cation represented by formula (IC).

[0089] L in formula (B1) b1 , L b2 , Y b1 and nb1 are L in the above formula (IA), respectively. b1 , L b2 , Y b1 and nb1, and the like. Q in formula (B1-1) b1 , Q b2 , Q b3 , Q b2 , z1, X 1 , L b3 , L b2 , Y b1 and nb4 are the same as those in the above formula (I-A1). Examples of the sulfonate anion in formula (B1-1) include the same anions as those represented by formula (I-A1). L in formula (B1-2) b4 , Y b2 , R b1 , nb4 and nb3 are L in the above formula (I-A2), respectively. b4 , Y b2 , R b1 , nb4 and nb3, and the like. Examples of the sulfonate anion in formula (B1-2) include the same anions as those represented by formula (I-A2). A in formula (B1-3) 1 , L b2 ' , Y b1 nb' and nb5 are each A in the above formula (I-A3). 1 , L b2 ' , Y b1' and nb5, and the like. The sulfonylimide anion or sulfonylmethide anion in formula (B1-3) may be the same as the anion represented by formula (I-A3).

[0090] Z1 + , Z2 + ,Z3 + and Z4 + Examples of the organic cation include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations are more preferred. Specific examples include cations represented by any of formulas (b2-1) to (b2-5) (hereinafter, sometimes referred to as "cation (b2-1)" depending on the formula number). TIFF2025074941000087.tif84160[Formula (b2-1) to formula (b2-5), R b4 ~R b6 each independently represent a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, a hydrogen atom contained in the chain hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 and may be bonded to each other to form a ring together with the sulfur atom to which they are attached, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer of 0 to 5; When m2 is 2 or more, multiple R b7 may be the same or different, and when n2 is 2 or more, multiple R b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 and may be bonded to each other to form a ring together with the sulfur atom to which they are attached, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 may be bonded to each other to form a ring including the -CH-CO- to which they are bonded, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b13 ~R b18 and R b21 ~R b26each independently represents a halogen atom, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 and may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are attached, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. L b31 , L b41 ~L b43 represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of 0 to 5. q2 and r2 each independently represent an integer of 0 to 4; u2 represents 0 or 1. o21, p22, and q23 each independently represent an integer of 0 to 4. r24, t25 and s26 each independently represent an integer of 0 to 5. When o2 is 2 or more, multiple R b13 are the same or different, and when p2 is 2 or more, multiple R b14 are the same or different, and when q2 is 2 or more, multiple R b15 are the same or different, and when r2 is 2 or more, multiple R b16 are the same or different, and when s2 is 2 or more, multiple R b17 are the same or different, and when t2 is 2 or more, multiple R b18 are the same or different. When o21, p22, q23, s26, t25 and r24 are each 2 or more, multiple R b21 ~R b26 are the same or different. When u3, u4, and u5 each represent 2 or more, the groups in parentheses are the same or different. When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and R b13 ~R b16At least one of o2, p2, s2, t2, q2 and r2 is preferably a halogen atom, and when u2 is 1, any one of o2, p2, s2, t2, q2 and r2 is 1 or more, and R b13 ~R b18 At least one of these is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. When u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom. The aliphatic hydrocarbon group refers to a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl. In particular, R b9 ~R b12 The chain hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups: TIFF2025074941000088.tif10158 In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, and more preferably has 4 to 12 carbon atoms. Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include a methylcyclohexyl group, a dimethylcyclohexyl group, a 2-methyladamantan-2-yl group, a 2-ethyladamantan-2-yl group, a 2-isopropyladamantan-2-yl group, a methylnorbornyl group, an isobornyl group, etc. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The fluorinated alkyl group refers to an alkyl group having 1 to 12 carbon atoms and a fluorine atom, and examples thereof include a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4.

[0091] Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, biphenyl, naphthyl, and phenanthryl. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples include aromatic hydrocarbon groups having a chain hydrocarbon group of 1 to 18 carbon atoms (such as tolyl, xylyl, cumenyl, mesityl, p-ethylphenyl, p-tert-butylphenyl, 2,6-diethylphenyl, and 2-methyl-6-ethylphenyl), and aromatic hydrocarbon groups having an alicyclic hydrocarbon group of 3 to 18 carbon atoms (such as p-cyclohexylphenyl and p-adamantylphenyl). When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, chain hydrocarbon groups having 1 to 18 carbon atoms and alicyclic hydrocarbon groups having 3 to 18 carbon atoms are preferred. Examples of aromatic hydrocarbon groups in which hydrogen atoms are substituted with alkoxy groups include p-methoxyphenyl groups. Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl, phenethyl, phenylpropyl, trityl, naphthylmethyl, and naphthylethyl. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkylcarbonyloxy group include a methylcarbonyloxy group, an ethylcarbonyloxy group, a propylcarbonyloxy group, an isopropylcarbonyloxy group, a butylcarbonyloxy group, a sec-butylcarbonyloxy group, a tert-butylcarbonyloxy group, a pentylcarbonyloxy group, a hexylcarbonyloxy group, an octylcarbonyloxy group, and a 2-ethylhexylcarbonyloxy group. R b4 and R b5 and bond to each other and form a ring together with the sulfur atom to which they are bonded, which may be a monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated ring. This ring may be a ring having 3 to 18 carbon atoms, preferably a ring having 4 to 18 carbon atoms. Furthermore, the ring containing a sulfur atom may be a 3- to 12-membered ring, preferably a 3- to 7-membered ring, for example, the following rings. * represents a bond. TIFF2025074941000089.tif23143R b9 and R b10 The ring formed by these together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. This ring may be a 3- to 12-membered ring, preferably a 3- to 7-membered ring. Examples thereof include a thiolan-1-ium ring (tetrahydrothiophenium ring), a thian-1-ium ring, and a 1,4-oxathian-4-ium ring. R b11 and R b12The ring formed by combining these may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include a 3- to 12-membered ring, and preferably a 3- to 7-membered ring. Examples include an oxocycloheptane ring, an oxocyclohexane ring, an oxonorbornane ring, and an oxoadamantane ring.

[0092] Among the cations (b2-1) to (b2-5), the cation (b2-1) is preferred. Examples of the cation (b2-1) include the following cations. TIFF2025074941000090.tif150163 Examples of the cation (b2-2) include the following cations. TIFF2025074941000091.tif18150 Examples of the cation (b2-3) include the following cations. TIFF2025074941000092.tif26140Examples of the cation (b2-4) include the following cations. TIFF2025074941000093.tif130168 Examples of the cation (b2-5) include the following cations. TIFF2025074941000094.tif49110

[0093] Compound (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be combined arbitrarily. Preferred examples of acid generator (B) include a combination of an anion represented by any of formulas (Ia-1) to (Ia-3), (Ia-7) to (Ia-19), and (Ia-22) to (Ia-70) with cation (b2-1), (b2-2), (b2-3), (b2-4), or (b2-5).

[0094] Preferred examples of compound (B) include those represented by formulae (B1-1) to (B1-105), (B2-1) to (B2-20), and (B3-1) to (B3-28). Among these, those containing an arylsulfonium cation are preferred, and those represented by formulae (B1-1) to (B1-3), (B1-5) to (B1-7), (B1-11) to (B1-14), (B1-20) to (B1-26), (B1-29), (B1-31) to (B1-105), (B2-1) to (B2-20), and (B3-1) to (B3-20) are particularly preferred. TIFF2025074941000095.tif247168

[0095] TIFF2025074941000096.tif242160

[0096] TIFF2025074941000097.tif254168

[0097] TIFF2025074941000098.tif254160

[0098] JPEG2025074941000099.jpg252165

[0099] TIFF2025074941000100.tif249150

[0100] TIFF2025074941000101.tif186158

[0101] As the compound (B), a salt in which the anion of the salt represented by formula (B1) is replaced with a carboxylate anion can also be suitably used. Examples of the carboxylate anion include the following anions, except for the carboxylate salt (I2) described below. TIFF2025074941000102.tif43155

[0102] When the resist composition of the present invention contains salt (I1) and compound (B) as acid generators, the total content of salt (I1) and compound (B) is preferably 20 to 95% by mass, more preferably 35 to 90% by mass, and even more preferably 35 to 80% by mass, based on the solid content of the resist composition. The ratio of salt (I1) to compound (B) (mass ratio; salt (I1):compound (B)) is usually 1:99 to 99:1, preferably 2:98 to 98:2, more preferably 5:95 to 95:5, even more preferably 10:90 to 90:10, and particularly preferably 15:85 to 85:15.

[0103] [Carboxylic Acid Generator] The resist composition of the present invention contains a salt represented by formula (I2) as a carboxylic acid generator. <Salt represented by formula (I2)> In a salt (I2), the positively charged side is sometimes called the "cation (I2)" and the negatively charged side is sometimes called the "anion (I2)."

[0104] [Cation (I2)] The cation (I2) of the carboxylate represented by formula (I2) is a cation represented by the following formula (I-C2). TIFF2025074941000103.tif49150 [In formula (I-C2), all symbols have the same meanings as in formula (I2)] The cation represented by formula (I-C2) is a cation represented by formula (I-C1) in which X and R 1A , R 2A , R 3A , R 4A , R 5A , R 6A , R 7A , R 8A , R 9A , m1A, m2A, m3A, m4A, m5A, m6A, m7A, m8A, m9A, Ar 1A , Ar 2A and Ar 3A , A 1A , A 2Aand A 3A respectively, Y, R 1B , R 2B , R 3B , R 4B , R 5B , R 6B , R 7B , R 8B , R 9B , m1B, m2B, m3B, m4B, m5B, m6B, m7B, m8B, m9B, Ar 1B , Ar 2B and Ar 3B , A 1B , A 2B and A 3B is a cation replaced by R in formula (I-C2) 1B , R 2B and R 3B As the group represented by the formula (I1) and (I-C1), R 1A and the like. R in formula (I-C2) 4B , R 5B and R 6B As the group represented by the formula (I1) and (I-C1), R 4A and the like. R in formula (I-C2) 7B , R 8B and R 9B As the group represented by the formula (I1) and (I-C1), R 7A and the like. R in formula (I-C2) 1B , R 2B , R 3B , R 4B , R 5B , R 6B , R 7B , R 8B and R 9B L included in 10B The alkanediyl group in 10A The same groups as those shown below can be mentioned. R in formula (I-C2) 1B , R 2B , R 3B , R 4B , R 5B , R6B , R 7B , R 8B and R 9B R included in 10B The acid labile group in 10A The same groups as those shown below can be mentioned. Ar of formula (I-C2) 1B , Ar 2B and Ar 3B Examples of the group represented by the formula (I1) and (I-C1) include Ar 1A and the like. A 1B , A 2B and A 3B As the group represented by the formula (I1) and (I-C1), A 1A The same groups as those mentioned above can be mentioned. 1B But, ***-X 01B -L 01B -or***-L 01B -X 01B - is preferably A 2B But, ***-X 02B -L 02B -or***-L 02B -X 02B - is preferably A 3B But, ***-X 03B -L 03B -or***-L 03B -X 03B - is preferred. X 01B , X 02B and X 03B each independently represents -O-, -CO-, -S- or -SO2-; L 01B , L 02B and L 03B each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), L 01B , L 02B and L 03B are, respectively, L 01A Groups similar to the following are preferred. In formula (I-C2), m1B is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. In formula (I-C2), m2B is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. In formula (I-C2), m3B is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. In formula (I-C2), m4B is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. In formula (I-C2), m5B is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. In formula (I-C2), m6B is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. In formula (I-C2), m7B is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. In formula (I-C2), m8B is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. In formula (I-C2), m9B is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. The cation represented by formula (I-C2) is a cation represented by formula (I-C1-1), a cation represented by formula (I-C1-2), a cation represented by formula (I-C1'), and a cation represented by formula (I-C1'-1). 1A , R 2A , R 3A , R 4A , R5A , R 6A , R 7A , R 8A , R 9A , m1A, m2A, m3A, m4A, m5A, m6A, m7A, m8A, m9A, L 01A , L 02A , L 03A , X 01A , X 02A , X 03A and X 7A respectively, R 1B , R 2B , R 3B , R 4B , R 5B , R 6B , R 7B , R 8B , R 9B , m1B, m2B, m3B, m4B, m5B, m6B, m7B, m8B, m9B, L 01B , L 02B , L 03B , X 01B , X 02B , X 03B and X 7B Similarly, cations in which the cation is replaced by are listed as suitable cations. The cation represented by formula (I-C2) is a cation represented by formula (I-C1-1), a cation represented by formula (I-C1-2), a cation represented by formula (I-C1'), and a cation represented by formula (I-C1'-1). 1A , R 2A , R 3A , R 4A , R 5A , R 6A , R 7A , R 8A , R 9A , m1A, m2A, m3A, m4A, m5A, m6A, m7A, m8A, m9A, L 01A , L 02A , L 03A , X 01A , X 02A , X 03A and X 7A respectively, R 1B , R 2B , R 3B , R 4B , R 5B , R 6B, R 7B , R 8B , R 9B , m1B, m2B, m3B, m4B, m5B, m6B, m7B, m8B, m9B, L 01B , L 02B , L 03B , X 01B , X 02B , X 03B and X 7B Similarly, cations in which the cation is replaced by are listed as suitable cations. Examples of the cation represented by formula (I-C2) include the cations represented by the above formulae (Ic-1) to (Ic-348).

[0105] [Anion (I2)] In the carboxylic acid salt represented by formula (I2), AII - The anion (I2) represented by the formula (I) is an anion represented by the formula (ID). TIFF2025074941000104.tif844 [In formula (ID), all symbols have the same meaning as in formula (I2)]

[0106] In formula (ID), X 0 Examples of the hydrocarbon group represented by the formula (I) include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkyl groups, alkenyl groups, and alkynyl groups, and alicyclic hydrocarbon groups), aromatic hydrocarbon groups, and groups combining these. The -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. In the hydrocarbon group, CO2 - The atom adjacent to is preferably a carbon atom, and in the aliphatic hydrocarbon group, CO - The atom adjacent to is more preferably a carbon atom. The number of carbon atoms in the aliphatic hydrocarbon group may be 2 to 64, for example, 2 to 48, preferably 2 to 36, more preferably 2 to 28, even more preferably 2 to 18, still more preferably 2 to 12, and even more preferably 2 to 9. Furthermore, 2 to 6 is preferable, and 2 to 4 is more preferable. Examples of the alkyl group include linear or branched alkyl groups, such as an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, a nonyl group, etc. The number of carbon atoms in the alkyl group is preferably 2 to 18, more preferably 2 to 12, still more preferably 2 to 9, still more preferably 2 to 6, and still more preferably 2 to 4. Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. Examples of the alkynyl group include an ethynyl group, a propynyl group, an isopropynyl group, a butynyl group, an isobutynyl group, a tert-butynyl group, a pentynyl group, a hexynyl group, an octynyl group, and a nonynyl group. The chain hydrocarbon group may have 2 to 36 carbon atoms, preferably 2 to 18 carbon atoms, more preferably 2 to 12 carbon atoms, even more preferably 2 to 9 carbon atoms, still more preferably 2 to 6 carbon atoms, and even more preferably 2 to 4 carbon atoms. Examples of groups in which -CH2- in a chain hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- in a methylene group is replaced by -S-), Sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (an alkyl alkylthio groups (groups in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl groups (groups in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkanediyloxy groups (groups in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl groups (groups in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO- substituted with -CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH- at any position is replaced with -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH-CH- at any position is replaced with -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH- at any position is replaced with -SO-), and an alkanediylthio group (an alkanediyl group in which -CH- at any position is replaced with -S-). Examples of the alkoxy group include alkoxy groups having 1 to 71 carbon atoms, such as methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, octyloxy, 2-ethylhexyloxy, nonyloxy, decyloxy, undecyloxy, and phenyloxy groups. The number of carbon atoms in the alkoxy group is, for example, 1 to 36, and may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 71 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group; examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 72 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group; and examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 71 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. The number of carbon atoms in the alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group is, for example, 2 to 36, and may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 71 carbon atoms, such as a methylthio group, an ethylthio group, and a propylthio group. The number of carbon atoms in the alkylthio group is, for example, 1 to 36, and may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 71 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is, for example, 1 to 36, and may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxy group, alkanediyloxycarbonyl group, alkanediylcarbonyl group, alkanediylcarbonyloxy group, alkanediylsulfonyl group, and alkanediylthio group include groups in which one hydrogen atom at any position of an alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkylthio group, or alkylsulfonyl group is replaced with a bonding site. The substitution in the alkenyl group or alkynyl group may be any of the substitutions in the alkyl group exemplified above, as long as it contains a carbon-carbon double bond or a carbon-carbon triple bond at any position.

[0107] The alicyclic hydrocarbon group may be any of monocyclic, polycyclic, and spiro rings, and may be any of saturated and unsaturated. Examples of the alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl groups, polycyclic cycloalkyl groups such as norbornyl and adamantyl groups, and spiro rings having a cycloalkyl group bonded to a cycloalkyl group, norbornyl group, or adamantyl group via a spiro bond. Examples of the alicyclic hydrocarbon group include the following groups: The bonding site can be any position. TIFF2025074941000105.tif59166 The number of carbon atoms in the alicyclic hydrocarbon group may be 3 to 48, preferably 3 to 36, more preferably 3 to 24, even more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. The group in which -CH2- in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- may form an ether ring, ketone ring, lactone ring, sultone ring or acetal ring, and specific examples thereof include the following groups. The bonding site can be at any position. TIFF2025074941000106.tif82166As the alicyclic hydrocarbon group, a group represented by any one of formulas (y1) to (y11), formulas (y44) to (y48), and formulas (y59) to (y61) is preferred, and a group represented by any one of formulas (y3), (y4), (y9), and formula (y11) is more preferred. As the group in which -CH2- in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2-, a group represented by any of formulas (y12) to (y20), (y26), (y27), (y30), (y31), (y39) to (y43), and (y49) to (y71) is preferred, and a group represented by any of formulas (y14), (y15), (y16), (y20), (y26), (y27), (y30), (y31), (y39), (y40), (y42), (y43), (y49) to (y58), and (y62) to (y71) is more preferred.

[0108] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The aromatic hydrocarbon group may have 6 to 48 carbon atoms, preferably 6 to 36, more preferably 6 to 24, still more preferably 6 to 18, even more preferably 6 to 14, and still more preferably 6 to 10. In the case of a combined group, the above groups may contain groups with different valences (such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, a cycloalkanediyl group, a cycloalkanetriyl group, or a cycloalkanetetrayl group).

[0109] The combined groups are: a group comprising a combination of an alicyclic hydrocarbon group and a chain hydrocarbon group (wherein —CH— contained in the chain hydrocarbon group or the alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—); a group comprising a combination of a chain hydrocarbon group and an aromatic hydrocarbon group (wherein -CH2- in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), and It represents a group formed by combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-). In addition, in the combination, two or more types of each of the alicyclic hydrocarbon group, the chain hydrocarbon group and the aromatic hydrocarbon group may be combined. Specifically, the combined groups include: Alicyclic hydrocarbon groups such as an adamantylmethylene group and a cyclohexylmethylene group - chain hydrocarbon group-*, (alicyclic hydrocarbon group)2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), Chain hydrocarbon groups-alicyclic hydrocarbon groups-* such as methyladamantyl group and dimethyladamantyl group, (chain hydrocarbon group)2-alicyclic hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), a chain hydrocarbon group such as a tolyl group or a xylyl group - an aromatic hydrocarbon group -* (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-); chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-* such as a methylcyclohexylmethylene group, (chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), an aromatic hydrocarbon group such as a benzyl group - a chain hydrocarbon group -* (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-); a chain hydrocarbon group such as a tolylmethyl group-aromatic hydrocarbon group-chain hydrocarbon group-* (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-*, such as methyladamantanemethyleneadamantyl group and di(methyladamantanemethylene)adamantyl group, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-alicyclic hydrocarbon group-*, (chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), Alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (alicyclic hydrocarbon group)2-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group)2-alicyclic hydrocarbon group-chain hydrocarbon group-*, (chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group)2-chain hydrocarbon group-* (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), Here, * indicates the bonding position with the carbon atom of the carbonyl group.

[0110] X0 When -CH2- in the hydrocarbon group represented by the formula (I) is replaced by -O-, -S-, -CO- or -SO2-, the number of carbon atoms before the replacement is the total number of carbon atoms in the hydrocarbon group. 0 When a substituent is bonded to a hydrocarbon group represented by the formula: Figure imgf000012_0001, the number of carbon atoms before substitution is the total number of carbon atoms in the hydrocarbon group. X 0 The hydrocarbon group represented by the formula (I) may have one or more substituents. Examples of the substituent include a hydroxy group, a halogen atom, a cyano group, and a nitro group. Also, X 0 When X is a group formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as substantially a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. 0 When -CH2- in the chain hydrocarbon group contained in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, the hydrocarbon group can essentially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group or a sulfonyl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

[0111] X 0 The hydrocarbon group represented by formula (aa) is preferably an aliphatic hydrocarbon group having 2 to 72 carbon atoms which may have a substituent (-CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), a hydrocarbon group having 6 to 72 carbon atoms which contains an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent, a group represented by formula (aa) or a group represented by formula (bb), More preferred are alicyclic hydrocarbon groups which may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), and groups which combine an alicyclic hydrocarbon group with a chain hydrocarbon group (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the alicyclic hydrocarbon group and the chain hydrocarbon group are , which may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group), an aromatic hydrocarbon group which may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group, a group combining an aromatic hydrocarbon group with a chain hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the aromatic hydrocarbon group and the chain hydrocarbon group may have a halogen atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group), a group represented by formula (aa) or a group represented by formula (bb), More preferably, * represents an alicyclic hydrocarbon group (wherein —CH— contained in the alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—, and the alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. * represents —COO - represents a bonding site with a carbon atom of the formula (I), *-alicyclic hydrocarbon group-chain hydrocarbon group (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group. * represents -COO -represents a bonding site with a carbon atom of the formula (I), *-chain hydrocarbon group-alicyclic hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and the chain hydrocarbon group and the alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (I), *-aromatic hydrocarbon group (the aromatic hydrocarbon group may have a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (I).), *-aromatic hydrocarbon group-chain hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the aromatic hydrocarbon group may have a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group, and the chain hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (I), *-chain hydrocarbon group-aromatic hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, the aromatic hydrocarbon group may have a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group, and the chain hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group. * represents -COO - represents a bonding site with the carbon atom of formula (aa), a group represented by formula (bb), More preferably, * represents a polycyclic alicyclic hydrocarbon group (wherein —CH— contained in the polycyclic alicyclic hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO—, and the polycyclic alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group). * represents —COO -represents a bonding site with a carbon atom of the formula (I), *-polycyclic alicyclic hydrocarbon group-chain hydrocarbon group (-CH2- contained in the polycyclic alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the polycyclic alicyclic hydrocarbon group and the chain hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (I), *-chain hydrocarbon group-polycyclic alicyclic hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and -CH2- contained in the polycyclic alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and the chain hydrocarbon group and the polycyclic alicyclic hydrocarbon group may have a fluorine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group. * represents -COO - represents a bonding site with a carbon atom of the formula (I), *-aromatic hydrocarbon group (the aromatic hydrocarbon group may have a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group. * represents -COO - represents a bonding site with the carbon atom of formula (aa), a group represented by formula (bb), Particularly preferred are an adamantyl group, an adamantanone group, a hydroxyadamantyl group, a group combining an adamantyl group with an alkyl group (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), a group represented by formula (Y30F), a phenyl group having a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group, a group represented by formula (aa), or a group represented by formula (bb). Also, X 0is preferably an aliphatic hydrocarbon group having 2 to 72 carbon atoms which may have a substituent (-CH2- contained in the aliphatic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), or a hydrocarbon group having 6 to 72 carbon atoms which contains an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent (-CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), X 0 represents a halogen atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alicyclic hydrocarbon group having 3 to 36 carbon atoms which may have a hydroxy group (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), a group in which an alicyclic hydrocarbon group having 3 to 36 carbon atoms is combined with a chain hydrocarbon group having 1 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the alicyclic hydrocarbon group and the chain hydrocarbon group are not halogen atoms). and a group combining an aromatic hydrocarbon group having 6 to 36 carbon atoms and a chain hydrocarbon group having 1 to 18 carbon atoms (-CH2- in the chain hydrocarbon group may be replaced by -O- or -CO-, and the aromatic hydrocarbon group and the chain hydrocarbon group may have a halogen atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms or a hydroxy group). Among them, X 0is preferably an alicyclic hydrocarbon group having 3 to 36 carbon atoms, an aromatic hydrocarbon group having 6 to 36 carbon atoms, or a group obtained by combining an acyclic hydrocarbon group having 1 to 18 carbon atoms with an alicyclic hydrocarbon group having 3 to 36 carbon atoms or an aromatic hydrocarbon group having 6 to 36 carbon atoms (the alicyclic hydrocarbon group, the acyclic hydrocarbon group, and the aromatic hydrocarbon group may have a fluorine atom, an iodine atom, a fluorinated alkyl group having 1 to 4 carbon atoms, or a hydroxy group, and -CH2- contained in the alicyclic hydrocarbon group and the acyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-). In the above groups, the alicyclic hydrocarbon group may have 3 to 48 carbon atoms, preferably 3 to 36, more preferably 3 to 24, even more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. The chain hydrocarbon group has preferably 1 to 18 carbon atoms, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, and even more preferably 1 to 4. The aromatic hydrocarbon group has preferably 6 to 36 carbon atoms, more preferably 6 to 24, even more preferably 6 to 18, still more preferably 6 to 14, and even more preferably 6 to 10. TIFF2025074941000107.tif27136[In formula (aa), X a and X b each independently represents -O- or -S-. X 1a represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. X 2a represents a hydrocarbon group having 1 to 48 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * -COO - represents the bonding site with the carbon atom of [In formula (bb), L Arepresents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, or an aromatic hydrocarbon group having 6 to 14 carbon atoms which may have a halogen atom or a perfluoroalkyl group having 1 to 4 carbon atoms. L B represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -S-, -CO- or -SO2-. R A represents a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * -COO - represents the bonding site with the carbon atom of

[0112] X a and X b are preferably the same atom, and more preferably both are oxygen atoms.

[0113] X 1a and X 2a Examples of the hydrocarbon group represented by the formula (I) include an aliphatic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these. These hydrocarbon groups may have a substituent. Furthermore, -CH2- contained in these hydrocarbon groups may be replaced with -O-, -S-, -CO-, or -SO2-. Here, the number of carbon atoms in the hydrocarbon group refers to the number of carbon atoms in the unsubstituted hydrocarbon group that does not have a substituent.

[0114] X 1a Examples of the aliphatic hydrocarbon group include chain hydrocarbon groups such as alkanetriyl groups, alicyclic hydrocarbon groups, and combinations thereof. Specific examples of the alkanetriyl group include a methine group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, and a dodecanetriyl group.

[0115] The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclobutanetriyl group, a cyclopentanetriyl group, a cyclohexanetriyl group, and a cyclooctanetriyl group. Examples of the polycyclic alicyclic hydrocarbon group include a norbornanetriyl group and an adamantanetriyl group. Examples of the aromatic hydrocarbon group include a benzenetriyl group, a naphthalenetriyl group, and an anthracenetriyl group. In the case of a combined group, the above groups may contain groups with different valences (such as an alkyl group, an alkanediyl group, an alkanetetrayl group, a cycloalkyl group, a cycloalkanediyl group, or a cycloalkanetetrayl group).

[0116] X 1a The hydrocarbon group represented by the formula (I) has 1 to 24 carbon atoms and may further have one or more substituents. Examples of the substituents include a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a group combining these. Examples of the halogen atom, alkyl group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof include the same groups as those described above.

[0117] X 1aThe hydrocarbon group represented by the formula (w1-3) is preferably an alkanetriyl group having 1 to 6 carbon atoms which may have a substituent or an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, more preferably an alkanetriyl group having 1 to 6 carbon atoms or a group represented by any of formulas (w1-1) to (w1-11), and even more preferably an alkanetriyl group having 1 to 6 carbon atoms, a polycyclic hydrocarbon group such as a group represented by formula (w1-1) or a group represented by formula (w1-3), or a monocyclic hydrocarbon group such as a group represented by formula (w1-2) or a group represented by formula (w1-6). TIFF2025074941000108.tif22154 [Formula (w1-1) to formula (w1-11), The ring may have a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a combination thereof. * indicates the bond position.]

[0118] X 2a The hydrocarbon group represented by the formula (I) preferably has 2 to 48 carbon atoms, more preferably 4 to 48 carbon atoms, even more preferably 6 to 44 carbon atoms, even more preferably 8 to 40 carbon atoms, and even more preferably 10 to 38 carbon atoms.

[0119] X 2a Examples of the substituent that the hydrocarbon group in the formula (I) may have include a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a group combining these. Examples of the halogen atom, alkyl group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof include the same groups as those described above. X 2a The hydrocarbon group having 1 to 48 carbon atoms represented by the following formula may have one or more substituents. X 2a The substituent that the hydrocarbon group in the formula (I) may have is preferably a fluorine atom, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or a hydroxy group.

[0120] X 2a Examples of the hydrocarbon group in include linear or branched chain hydrocarbon groups (for example, alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be a combination of two or more of these groups. Specific examples include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, and an octane-1,8-diyl group; branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl; monocyclic alicyclic hydrocarbon groups such as monocyclic cycloalkanediyl groups, such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; polycyclic alicyclic hydrocarbon groups such as polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl; Examples of the aromatic hydrocarbon groups include a phenylene group, a naphthylene group, a biphenylene group, an anthrylene group, a phenanthrylene group, and a binaphthylene group. In the case of a combined group, the above groups may contain groups with different valences (such as an alkyl group, an alkanetriyl group, an alkanetetrayl group, a cycloalkyl group, a cycloalkanetriyl group, or a cycloalkanetetrayl group). Examples of the combined group include a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are combined, a group in which a chain hydrocarbon group and an aromatic hydrocarbon group are combined, and a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined. Specific examples include a group in which one or more alicyclic hydrocarbon groups are bonded to a chain hydrocarbon group (e.g., -chain hydrocarbon group-alicyclic hydrocarbon group, -chain hydrocarbon group-(alicyclic hydrocarbon group)2, etc.), a group in which one or more chain hydrocarbon groups are bonded to an alicyclic hydrocarbon group (e.g., -alicyclic hydrocarbon group-chain hydrocarbon group, -alicyclic hydrocarbon group-(chain hydrocarbon group)2, etc.), and a group in which one or more alicyclic hydrocarbon groups and chain hydrocarbon groups are bonded to a chain hydrocarbon group (e.g., -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group, -chain hydrocarbon group-(alicyclic hydrocarbon group-chain hydrocarbon group)2, etc.).

[0121] X 2a The hydrocarbon group in a chain hydrocarbon group having 2 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent); an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and the alicyclic hydrocarbon group may have a substituent), or It is preferably a group (which may have a substituent) comprising a combination of a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), a chain hydrocarbon group having 4 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent), or It is more preferable that the group is a combination of a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 16 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-) (the group may have a substituent), a chain hydrocarbon group having 6 to 14 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent), or More preferably, it is a group (which may have a substituent) that combines a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) with an alicyclic hydrocarbon group having 5 to 14 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-).

[0122] Specifically, X 2a Examples of the hydrocarbon group in an alkanediyl group having 2 to 18 carbon atoms (-CH- contained in the alkanediyl group may be replaced by -O- or -CO-, and the alkanediyl group may have a substituent); an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and the alicyclic hydrocarbon group may have a substituent); a group consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-) (the group may have a substituent), or It is preferably a group (which may have a substituent) consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), an alkanediyl group having 4 to 18 carbon atoms (wherein —CH— contained in the alkanediyl group may be replaced by —O— or —CO—, and the alkanediyl group may have a substituent); a group consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 3 to 16 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-) (the group may have a substituent), or It is more preferable that the alkyl group is an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 16 carbon atoms, and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and the alkyl group may have a substituent. an alkanediyl group having 6 to 14 carbon atoms (wherein —CH— contained in the alkanediyl group may be replaced by —O— or —CO—, and the alkanediyl group may have a substituent); a group consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an adamantanediyl group (-CH2- contained in the adamantanediyl group may be replaced with -O- or -CO-) (the group may have a substituent), or More preferred are groups (which may have a substituent) consisting of an alkanediyl group having 1 to 12 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-) and an adamantanediyl group and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-).

[0123] More specifically, X 2a is the formula (X 2 -1), a group represented by the formula (X 2 -2), a group represented by the formula (X 2 -3) or a group represented by the formula (X 2 -4) is preferred. TIFF2025074941000109.tif33158[formula(X 2 -1)~Formula(X 2 -4) Medium, R 1x , R 2x , R 3x , R 4x , R 5x and R 6x each independently represents an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group combining two or more of these groups, and -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-, and the alkyl group and the alicyclic hydrocarbon group may have a substituent. * is X a and X b represents the bond position with The combined group may be a combination of one alkyl group and one alicyclic hydrocarbon group described above, or two or more of either one or two or more of both. In this case, the number of carbon atoms in the combined group is 39 or less, and preferably 37 or less.

[0124] Among them, R 1x , R 2x , R 3x , R 4x , R 5x and R 6x Examples thereof include an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-, and the alkyl group may have a substituent), an alicyclic hydrocarbon group having 5 to 12 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and the alicyclic hydrocarbon group may have a substituent), or a combination of an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-) and an alicyclic hydrocarbon group having 5 to 12 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group and more preferably a group (which may have a substituent) combining a methoxy group, an adamantyl group (wherein —CH— may be replaced by —O— or —CO— and the adamantyl group may have a substituent), or an alkyl group having 1 to 6 carbon atoms (wherein —CH— may be replaced by —O— or —CO—).

[0125] In formula (bb), L A and L BExamples of the alkanediyl group having 1 to 6 carbon atoms include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and branched alkanediyl groups such as propane-1,2-diyl, 1-methylpropane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 4, and more preferably 1 to 3. Examples of the alkanediyl group which may have a fluorine atom include perfluoroalkanediyl groups such as a difluoromethylene group, a perfluoroethylene group, a perfluoropropanediyl group, a perfluorobutanediyl group, and a perfluoropentanediyl group. When -CH2- in the alkanediyl group is replaced with -O-, -S-, -CO- or -SO2-, the number of carbon atoms before replacement is defined as the total number of carbon atoms in the alkanediyl group. Alkanediyl groups include hydroxy groups (methyl groups in which -CH2- is replaced with -O-), carboxy groups (ethyl groups in which -CH2-CH2- is replaced with -O-CO-), thiol groups (methyl groups in which -CH2- is replaced with -S-), alkoxy groups (alkyl groups in which -CH2- at any position is replaced with -O-), alkoxycarbonyl groups (alkyl groups in which -CH2-CH2- at any position is replaced with -O-CO-), alkylcarbonyl groups (alkyl groups in which -CH2- at any position is replaced with -CO-), alkylcarbonyloxy groups (alkyl groups in which -CH2-CH2- at any position is replaced with -CO-O-), alkylthio groups (alkyl groups in which -CH2- at any position is replaced with -S-), and alkylsulfonyl groups. (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), an alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), an alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-CO-), or -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -CO-O-), an alkanediylthio group (a group in which -CH2- at any position in an alkanediyl group is replaced with -S-), or an alkanediylsulfonyl group (a group in which -CH2- at any position in an alkanediyl group is replaced with -SO2-). Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkylthio group and alkylsulfonyl group are the same as those mentioned above. Examples of the alkanediyloxy group include a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, and a pentanediyloxy group. Examples of the alkanediyloxycarbonyl group include a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. Examples of the alkanediylthio group include a methylenethio group, an ethylenethio group, a propanediylthio group, a butanediylthio group, and a pentanediylthio group. Examples of the alkanediylsulfonyl group include a methylenesulfonyl group, an ethylenesulfonyl group, a propanediylsulfonyl group, a butanediylsulfonyl group, and a pentanediylsulfonyl group. L A Examples of the aromatic hydrocarbon group having 6 to 14 carbon atoms include aromatic hydrocarbon groups such as arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 10, and more preferably 6. L A Examples of the halogen atom that may be contained in include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L A Examples of the perfluoroalkyl group having 1 to 4 carbon atoms that may be contained in the aryloxy group include a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group. L Ais preferably an alkanediyl group having 1 to 4 carbon atoms which may have a fluorine atom, or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a halogen atom or a perfluoroalkyl group having 1 to 4 carbon atoms, and more preferably an alkanediyl group having 1 to 3 carbon atoms which may have a fluorine atom, or a phenylene group which may have a fluorine atom, an iodine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms. L B is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), and more preferably a single bond, a methylene group or an ethylene group.

[0126] R A Examples of the hydrocarbon group in include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkyl groups, alkenyl groups, and alkynyl groups, and alicyclic hydrocarbon groups), aromatic hydrocarbon groups, and groups formed by combining these. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, a 2-ethylhexyl group, an n-octyl group, an n-nonyl group, an n-decyl group, an n-undecyl group, an n-dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, and even more preferably 1 to 4. Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. Examples of the alkynyl group include an ethynyl group, a propynyl group, an isopropynyl group, a butynyl group, an isobutynyl group, a tert-butynyl group, a pentynyl group, a hexynyl group, an octynyl group, and a nonynyl group. Examples of groups in which -CH2- in a chain hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkylsulfonyl group, and an alkylthio group. Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkylsulfonyl group and alkylthio group include an alkoxy group having 1 to 17 carbon atoms, an alkoxycarbonyl group having 2 to 17 carbon atoms, an alkylcarbonyl group having 2 to 18 carbon atoms, an alkylcarbonyloxy group having 2 to 17 carbon atoms, an alkylsulfonyl group having 1 to 17 carbon atoms and an alkylthio group having 1 to 17 carbon atoms, and examples thereof include the same groups as those described above. The alicyclic hydrocarbon group may be monocyclic, polycyclic, or spirocyclic, and may be saturated or unsaturated. Examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl. Specific examples of the alicyclic hydrocarbon group and the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include groups represented by the above formulae (y1) to (y71). The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 36, more preferably 3 to 24, even more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 36, more preferably 6 to 24, still more preferably 6 to 18, even more preferably 6 to 14, and still more preferably 6 to 10. In the case of a combined group, the above groups may contain groups with different valences (such as an alkanediyl group, an alkanetriyl group, a cycloalkanediyl group, or a cycloalkanetriyl group). Groups formed by combination include groups combining an aromatic hydrocarbon group with a chain hydrocarbon group (e.g., aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*), groups combining an alicyclic hydrocarbon group with a chain hydrocarbon group (e.g., alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*), and groups combining an aromatic hydrocarbon group with a alicyclic hydrocarbon group (e.g., aromatic hydrocarbon group-alicyclic hydrocarbon group-*, alicyclic hydrocarbon group-aromatic hydrocarbon group-*). * represents a bonding site. The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group. Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group. Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group. Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenyladamantyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include an adamantylphenyl group. In the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. B may be bound to In addition to the groups mentioned above, examples of groups in which -CH2- in a hydrocarbon group is replaced with -O-, -S-, -CO-, or -SO2- include cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, and groups in which two or more of these groups are combined. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as a benzoyloxy group. When a -CH2- in a hydrocarbon group is replaced with -O-, -S-, -SO2-, or -CO-, the total number of carbon atoms in the hydrocarbon group is the number of carbon atoms before the replacement, which may be 1 or 2 or more.

[0127] R A Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, and an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO- or -SO2-). Examples of the halogen atom include the same groups as those mentioned above. Examples of the alkyl group having 1 to 12 carbon atoms include the same groups as those mentioned above. Examples of groups in which -CH2- in an alkyl group is replaced with -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, and an alkylcarbonyloxy group. Examples of the alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group include alkoxy groups having 1 to 11 carbon atoms, alkoxycarbonyl groups having 2 to 11 carbon atoms, alkylcarbonyl groups having 2 to 12 carbon atoms, and alkylcarbonyloxy groups having 2 to 11 carbon atoms, and include, for example, the same groups as those described above. R A The hydrocarbon group in may have one or more substituents.

[0128] R A The hydrocarbon group in is preferably an alkyl group having 1 to 12 carbon atoms which may have a substituent (provided that -CH2- contained in the alkyl group may be replaced with -O-, -S-, -CO- or -SO2-), or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), and is preferably a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-).

[0129] Examples of the cyclic hydrocarbon group include monocyclic or polycyclic alicyclic hydrocarbon groups having 3 to 18 carbon atoms and aromatic hydrocarbon groups having 6 to 18 carbon atoms, as well as combinations of these groups. Examples of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and combined group include the same groups as those described above. In the combination, two or more types of alicyclic hydrocarbon groups and two or more types of aromatic hydrocarbon groups may be combined. B may be bound to

[0130] A cyclic hydrocarbon group having 3 to 18 carbon atoms (the cyclic hydrocarbon group may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-) is an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-), or It is preferably an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms or a perfluoroalkyl group having 1 to 6 carbon atoms, More preferably, it is an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, or a perfluoroalkyl group having 1 to 6 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-). Preferred alicyclic hydrocarbon groups include cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, norbornyl, adamantyl, and the following groups (the bonding site may be any position): and preferred aromatic hydrocarbon groups include phenyl and naphthyl groups. TIFF2025074941000110.tif1687

[0131] Carboxylate anion AII in the carboxylate salt represented by formula (I2) - Examples of the anion include the carboxylate anions described below. TIFF2025074941000111.tif244166

[0132] TIFF2025074941000112.tif252168

[0133] TIFF2025074941000113.tif234168

[0134] Specific examples of the carboxylate (I2) include salts of any combination of the above-mentioned cations and anions. Specific examples of the carboxylate (I2) are shown in the table below. In the table below, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation, and "~" represents the structure of the carboxylate (I2) and the anion Al2 - , cation C2 + For example, carboxylate (I2-1) is a salt formed from an anion represented by formula (Id-1) and a cation represented by formula (Ic-1), carboxylate (I2-2) is a salt formed from an anion represented by formula (Id-2) and a cation represented by formula (Ic-1), and carboxylate (I2-101) is a salt formed from an anion represented by formula (Id-1) and a cation represented by formula (Ic-2). TIFF2025074941000114.tif2889 [Table 2]

[0135] Among these, as the carboxylate (I2), a salt obtained by combining an anion represented by any one of formulas (Id-1) to (Id-5), (Id-10) to (Id-21), and (Id-57) to (Id-66) with a cation represented by any one of formulas (Ic-1) to (Ic-348) is preferred. These carboxylates can be produced by known methods, or commercially available products may be used.

[0136] The carboxylic acid generator in the resist composition of the present invention may contain one type of carboxylic acid salt (I2), or may contain two or more types of carboxylic acid salt (I2). In the resist composition of the present invention, the total content of the carboxylate (I2) is preferably from 1 part by mass to 50 parts by mass, more preferably from 1 part by mass to 30 parts by mass, and even more preferably from 1 part by mass to 15 parts by mass, relative to 100 parts by mass of the solids content of the resist composition. The carboxylic acid generator of the present invention may contain, in addition to the carboxylic acid salt (I2), a known carboxylic acid that acts as a carboxylic acid generator in the resist field, as described below. The known carboxylic acids may be used alone or in combination of two or more. In the resist composition of the present invention, the ratio of the content of the acid generator to the content of the carboxylic acid generator (mass ratio; acid generator:carboxylic acid generator) is usually 1:99 to 99:1, preferably 60:40 to 95:5, more preferably 60:40 to 90:10, even more preferably 10:90 to 90:10, and particularly preferably 15:85 to 85:15. Furthermore, the total content of the acid generator and the carboxylic acid generator is preferably 20 to 100% by mass, more preferably 35 to 100% by mass, and even more preferably 35 to 100% by mass molar, based on the solid content of the resist composition. Furthermore, in the resist composition of the present invention, the ratio of the salt (I1) to the carboxylic acid salt (I2) (mass ratio; salt (I1):carboxylic acid salt (I2)) is preferably 60:40 to 99:1, and more preferably 60:40 to 90:10. Furthermore, the total content of the salt (I1) and the carboxylic acid (I2) is preferably 40% by mass or more and 100% by mass or less, more preferably 60% by mass or more and 100% by mass or less, and even more preferably 90% by mass or more and 100% by mass or less, based on the solid content of the resist composition.

[0137] <Resin> The resin (AX) that may be contained in the resist composition of the present invention contains a structural unit represented by formula (a2) (hereinafter, sometimes referred to as "structural unit (a2)") that has an alcoholic hydroxy group or a phenolic hydroxy group. <Resin (AX)> As described above, since the resin (AX) is an acid-stable resin, it may contain a small amount of structural unit (a1) having an acid labile group. However, the content of structural unit (a1) is preferably less than 5 mol %, more preferably less than 1 mol %, based on the total structural units of the resin (AX). It is even more preferable that the resin (AX) does not contain structural unit (a1) having an acid labile group. The resin (AX) may contain structural units other than the structural unit (a2). Examples of structural units other than the structural unit (a2) include a structural unit having a lactone ring (hereinafter sometimes referred to as "structural unit (a3)"), a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone ring (hereinafter sometimes referred to as "structural unit (a6)"), a structural unit that decomposes upon exposure to generate acid (hereinafter sometimes referred to as "structural unit (a7)"), and other structural units derived from monomers known in the art. The content of each structural unit in the resin (AX) can be measured using an NMR (Nuclear Magnetic Resonance) device.

[0138] <Structural unit (a2)> The structural unit (a2) is a structural unit represented by formula (a2) and has an alcoholic hydroxy group or a phenolic hydroxy group. TIFF2025074941000116.tif4194[In formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-. L a22 represents a chain hydrocarbon group of 1 to 12 carbon atoms which may have a single bond or a fluorine atom, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. na2 represents an integer of 1 to 4. When na2 is 2 or more, a plurality of L a22 may be the same or different from each other. R a2 Examples of the halogen atom in the formula include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. R a2 Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0139] A a21Examples of the alkanediyl group include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, a undecane-1,11-diyl group, a dodecane-1,12-diyl group, a methyl ... and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, and decane-1,9-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2. A a21 is preferably a methylene group or an ethylene group. R a28 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. Among these, an alkyl group having 1 to 4 carbon atoms is preferred, and a methyl group or an ethyl group is more preferred. a21 The alkanediyl group contains -CH2-, -O-, -CO-, or -NR a28 When the hydrocarbon group is substituted with a carbon atom, the number of carbon atoms before the substitution is regarded as the number of carbon atoms of the hydrocarbon group. A a21 Examples of the group in which -CH2- in the alkanediyl group is replaced with -O- or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), an oxy group (a group in which -CH2- in a methylene group is replaced with -O-), an amino group (a group in which -CH2- in an alkanediyl group is replaced with -NRa28 -), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylamino group (a group in which -CH2- in an alkyl group is replaced with -NR a28 These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, and an octylamino group. The number of carbon atoms in the alkylamino group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Among them, A a21 -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 The groups substituted are *-O-, *-CO-O-, *-O-CO-, *-CO-OA a22 -CO-O-, *-O-CO-A a22 -O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, and *-CO-O- and *-CO-OA are particularly mentioned. a22 -CO-O- or *-OA a22 -CO-O-, *-CO-NR a28 - is preferred, where Aa22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a2 represents the bonding site that is attached to the carbon atom to which A is attached. a22 The alkanediyl group of A is, within the limits of the upper limit of the carbon number, a21 The same alkanediyl groups as those shown in the above are exemplified. A a21 is a single bond, *-CO-O- or *-CO-OA a22 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0140] L a21 The hydrocarbon group in is a (na2+1)-valent hydrocarbon group, and examples thereof include cyclic hydrocarbon groups such as chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may also be a group combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group). L a21 Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanpentyl group. L a21 Examples of the alkanediyl group include A a21 The same alkanediyl groups as those shown in the above can be mentioned. L a21 Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decantriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, and a heptadecanetriyl group. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, and a heptadecanetetrayl group. Examples of the alkanpentyl group include a methanepentyl group, an ethanepentyl group, a propanepentyl group, a butanepentyl group, a pentanepentyl group, and a hexanepentyl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. L a21 The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of the monocyclic and polycyclic divalent alicyclic hydrocarbon groups in the above formula include the following alicyclic hydrocarbon groups: The binding site can be at any position. TIFF2025074941000117.tif46168 For example, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, and cyclodecanetetrayl group; Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, and bicyclo[3.3.0]octanetetrayl group. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, even more preferably 3 to 16 carbon atoms, even more preferably 3 to 12 carbon atoms, still more preferably 6 to 12 carbon atoms, and particularly preferably 6 to 10 carbon atoms. L a21 Examples of the divalent aromatic hydrocarbon group in include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, a phenanthrenetetrayl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, even more preferably 6 to 14, still more preferably 6 to 12, and even more preferably 6 to 10. Examples of the group combining two or more types include a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group, a group combining an aromatic hydrocarbon group with a chain hydrocarbon group, a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more types of each of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. In addition, when any group is A a21 and L a22 may be bound to L a21 The alkanediyl group may be substituted with -O- or -CO-, and La21 When the alkanediyl group is replaced by -O- or -CO-, for example, *-L a23 -X a21 -(L a23 represents an alkanediyl group having 1 to 8 carbon atoms, and X a21 represents -O-, -O-CO-, -CO-O- or -O-CO-O-, * represents X a2 It is preferable that the bond is Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group, a carboxy group, a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), an alkoxy group, an alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced by -S-), an alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -SO2-), an alkyl Carbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), oxy group, carbonyl group, thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group, alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-CO-O-), an alkanediyloxycarbonyl group (an alkanediyl group in which -CH2-CH2- at any position is replaced by -O-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced by -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced by -CO-), an alkanediyl Examples of such groups include an alkanediylsulfonyl group (an alkanediyl group in which any -CH- at any position is replaced with -SO-), an alkanediylthio group (an alkanediyl group in which any -CH- at any position is replaced with -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group combining two or more of these groups. Also included are groups in which one or more hydrogen atoms of these groups have been replaced with a bonding site. Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms in the alkylcarbonyloxy group and the alkoxycarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0141] Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 27 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0142] Examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -S-, -CO-, or -SO2- include the following groups. Further examples include groups in which -O- is replaced with -S- and -CO- is replaced with -SO2- among the groups shown below. The bonding site can be at any position. TIFF2025074941000118.tif46168 Examples of the combined group in which -CH2- is replaced by -O-, -S-, -CO- or -SO2- include the following groups: The bonding site can be at any position. TIFF2025074941000119.tif26163L a21 The hydrocarbon group in may have one or more substituents, such as a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced by —O— or —CO—). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a21The hydrocarbon group in the formula (I) can have a halogen atom as a substituent, and thereby essentially have a substituent such as a haloalkyl group. Examples of the haloalkyl group include a chloromethyl group, a bromomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, and a perfluorobutyl group. A haloalkyl group having 1 to 4 carbon atoms is preferred, and a haloalkyl group having 1 to 3 carbon atoms is more preferred. L a21 The hydrocarbon group of L a21 can substantially have a substituent such as an alkyl group. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. L a21 The hydrocarbon group of the formula (I) is replaced by -O- or -CO-. a21 can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group. L a21 The substituent that the hydrocarbon group in the formula (I) may have is preferably a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a fluorine atom, an iodine atom, a haloalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), and even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group.

[0143] L a22Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include straight-chain alkyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. Examples include a glycandiyl group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a 1-dimethylpropane-1,3-diyl group, a pentane-2,4-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, etc. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. L a22 may have one or more fluorine atoms. L a22 The -CH2- in the chain hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and these substituted groups may be in the range of L, as long as the upper limit of the number of carbon atoms allows. a21 Examples include the same as those exemplified above. na2 is preferably an integer of 1 to 4, and more preferably an integer of 1 to 3. L a21 When R is a single bond or a chain hydrocarbon group, examples of the structural unit (a2) include the following structural units: a2 A structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom or the like is also a suitable structural unit of the structural unit (a2), similar to the structural unit below. TIFF2025074941000120.tif66168

[0144] When producing a resist pattern from the resist composition of the present invention, if a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet) is used as an exposure light source, the structural unit (a2) preferably has a phenolic hydroxy group, and more preferably the structural unit (a2-A) described below. Furthermore, if an ArF excimer laser (193 nm) or the like is used, the structural unit (a2) preferably has an alcoholic hydroxy group, and more preferably the structural unit (a2-1) described below. The structural unit (a2) may contain one type alone or two or more types.

[0145] In the structural unit (a2), L a21 is a cyclic hydrocarbon group, and examples of the structural unit having a phenolic hydroxy group or a carboxy group include a structural unit represented by formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)"). TIFF2025074941000121.tif31127[In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or greater, the groups in the parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer between 0 and 2.

[0146] R a2 and R a27 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, and a bromine atom. R a2 and R a27 Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. R a2 and R a27 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0147] A a21Examples of the alkanediyl group include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, a undecane-1,11-diyl group, a dodecane-1,12-diyl group, a methyl ... and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, and decane-1,9-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2. A a21 is preferably a methylene group or an ethylene group. R a28 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a21 The alkanediyl group contains -CH2-, -O-, -CO-, or -NR a28 When the hydrocarbon group is substituted with a carbon atom, the number of carbon atoms before the substitution is regarded as the number of carbon atoms of the hydrocarbon group. A a21 Examples of the group in which -CH2- in the alkanediyl group is replaced with -O- or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), an oxy group (a group in which -CH2- in a methylene group is replaced with -O-), an amino group (a group in which -CH2- in an alkanediyl group is replaced with -NR a28-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylamino group (a group in which -CH2- in an alkyl group is replaced with -NR a28 These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Among them, A a21 -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 The groups substituted are *-O-, *-CO-O-, *-O-CO-, *-CO-OA a22 -CO-O-, *-O-CO-A a22 -O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, and *-CO-O- and *-CO-OA are particularly mentioned. a22 -CO-O- or *-OA a22 -CO-O-, *-CO-NR a28 - is preferred, where A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a2 represents the bonding site that is attached to the carbon atom to which A is attached. a22 The alkanediyl group of A is, within the limits of the upper limit of the carbon number, a21 The same alkanediyl groups as those shown in the above can be mentioned. A a21 is a single bond, *-CO-O- or *-CO-OA a22 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0148] R a27Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 4, more preferably 1 to 3, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a27 Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. R a27 Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a27 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a27is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 may be 1, 2, 3 or 4, with 1, 2 or 3 being preferred, and 1 or 2 being more preferred. na22 is preferably 0, 1 or 2, and more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH is a benzene ring, A a21 It is preferable that at least one of them is bonded to the m-position or p-position, and more preferable that it is bonded to the m-position. In the case of a naphthalene ring, A a21 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a21 When the bonding position of A is the 2nd position, it may be bonded to any of the 1st position and the 3rd to 8th positions. a21 When the bonding position of A is position 1, at least one of A is preferably bonded to position 3 to 6, and more preferably bonded to position 3 or 4. a21 When the bonding position is the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0149] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A Nos. 2010-204634 and 2012-12577. The structural unit (a2-A) includes structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), and structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), where R in the structural unit (a2-A) a2and a structural unit in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. TIFF2025074941000122.tif72114

[0150] When the structural unit (a2-A) is contained in the resin (AX), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on all structural units. It is also preferably 80 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) may be a compound from which the structural unit (a2-A) is derived (e.g., -CH2-C(-R a2 )- is the double bond CH2=C(-R a2 The structural unit (a2-A) can be incorporated into the resin (A) by polymerizing the compound (a2-A') in the state of (a1-4). Alternatively, for example, the structural unit (a1-4) can be polymerized, followed by treatment with an acid such as p-toluenesulfonic acid, to incorporate the structural unit into the resin (AX). Alternatively, the structural unit (a2-A) can be polymerized using acetoxystyrene or the like, followed by treatment with an alkali such as tetramethylammonium hydroxide, to incorporate the structural unit into the resin (AX).

[0151] Examples of the structural unit (a2) having an alcoholic hydroxy group include a structural unit represented by formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)"), a structural unit represented by formula (a2-C) (hereinafter sometimes referred to as "structural unit (a2-C)"), and a structural unit represented by formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). TIFF2025074941000124.tif46100[In formula (a2-B) and formula (a2-C), R a2 has the same meaning as formula (a2). R a27 has the same meaning as formula (a2-A). L a25 is -O- or *-O-(CH2) k2 represents —CO—O—, and k2 represents an integer of 1 to 7. * represents the bonding position with —CO—. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer of 1 to 5. When nB2 is 2 or more, a plurality of X a2 may be the same or different from each other. nB22 represents an integer of 0 to 8. When nB22 is 2 or more, a plurality of R a27 may be the same or different from each other. nC22 represents an integer of 0 to 10. When nC22 is 2 or more, a plurality of R a27 may be the same or different from each other. L a25 is preferably -O-, -O-(CH2) f1 It is —CO—O— (wherein f1 represents an integer of 1 to 4), and more preferably —O—. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably an integer of 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. nC22 is preferably an integer of 0 to 6, more preferably an integer of 0 to 3, and even more preferably 0 or 1.

[0152] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from monomers described in JP-A-2010-204646, the following structural units, and R in the following structural units: a2 In particular, structural units represented by any one of formulas (a2-B-1) to (a2-B-5) and formulas (a2-C-1) to (a2-C-9) are preferred. When the resin (AX) contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on the total structural units of the resin (AX). It may also be 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, it may be 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol% or 2 to 20 mol%, and even more preferably 1 to 10 mol% or 2 to 10 mol%.

[0153] TIFF2025074941000126.tif51105[In formula (a2-D), R a2 and A a21 have the same meaning as in formula (a2). R a27 has the same meaning as formula (a2-A). R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 4. When nD2 is 2 or greater, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27 may be the same or different from each other. R a21 and R a22 Examples of the fluorinated alkyl groups are each independently a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and the like. R a21 and R a22 As the aryl group, a trifluoromethyl group is preferred. L a24 Examples of the alkanediyl group include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group. L a24 is preferably a single bond or a methylene group.

[0154] The structural unit (a2-D) is more preferably a structural unit represented by the following formula (a2-D1) (hereinafter, sometimes referred to as "structural unit (a2-D1)"). TIFF2025074941000127.tif51107[In formula (a2-D1), R a2 , A a21 , R a27 , nD2 and nD22 have the same meaning as in formula (a2-D). In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0155] Examples of the structural unit (a2-D) include the structural units shown below. TIFF2025074941000128.tif62168

[0156] In the structural units represented by formulae (a2-D-1) to (a2-D-8), R a2 In the structural units represented by formulas (a2-D-9) to (a2-D-16), the hydrogen atom corresponding to R a2 Specific examples of the structural unit (a2-D) include structural units in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, etc. Among these, structural units represented by formulas (a2-D-1) to (a2-D-8) are preferred, structural units represented by formulas (a2-D-1) to (a2-D-4) are more preferred, and structural units represented by formula (a2-D-1) are even more preferred.

[0157] When resin (AX) contains structural unit (a2-D), its content is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of resin (AX). It is also preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%. When the resin (AX) contains the structural unit (a2-D), it is preferable to use the structural unit (a2-A) and the structural unit (a2-D) in combination, and it is even more preferable to use the structural unit (a2-A1) and the structural unit (a2-D) in combination. When the structural unit (a2-A) and the structural unit (a2-D) are used in combination, the content ratio of the structural unit (a2-A) to the structural unit (a2-D) in the resin (AX) is not particularly limited, but is preferably 1:10 to 10:1, and more preferably 5:5 to 3:7.

[0158] <Structural unit (a3)> The structural unit (a3) ​​has a lactone ring but does not have an acid labile group. The lactone ring of the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring with another ring. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0159] The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3), or formula (a3-4). One of these may be contained alone, or two or more may be contained. TIFF2025074941000129.tif48155 [In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 , L a5 and L a6 are each independently -O- or -O-(CH2) k3 It represents a group represented by —CO—O— (k3 represents an integer of 1 to 7). L a7 -O-, *-OL a8 -O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bonding site with the carbonyl group. R a18 , R a19 , R a20 and R a24 each independently represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3. w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 may be the same or different from each other.

[0160] R a21 , R a22 , R a23 and R a25 Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group. R a18 , R a19 , R a20 and R a24 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a18 , Ra19 , R a20 and R a24 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group, and preferably an alkyl group having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group. R a18 , R a19 , R a20 and R a24 Examples of the alkyl group having a halogen atom in the formula (I) include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group.

[0161] L a8 and L a9 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group.

[0162] In formulas (a3-1) to (a3-3), L a4 ~L a6 are each independently preferably -O- or -O-(CH2) k3 In -CO-O-, k3 is a group in which k3 is any integer of 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and even more preferably an oxygen atom. R a18 ~R a21 is preferably a methyl group. R a22 and R a23are each independently preferably a carboxy group, a cyano group, or a methyl group. p1, q1 and r1 each independently represent an integer of preferably 0 to 2, and more preferably 0 or 1.

[0163] In formula (a3-4), R a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a25 is preferably a carboxy group, a cyano group or a methyl group. L a7 is preferably -O- or *-OL a8 It is —CO—O—, and more preferably —O—, —O—CH 2 —CO—O— or —O—C 2 H 4 —CO—O—. w1 is preferably an integer of 0 to 2, and more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4)'. TIFF2025074941000130.tif3848 (in the formula, R a24 , L a7 has the same meaning as above.)

[0164] Examples of the structural unit (a3) ​​include structural units derived from monomers described in JP 2010-204646 A, JP 2000-122294 A, and JP 2012-41274 A. Examples of the structural unit (a3) ​​include structural units represented by any of formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the structural units, R in formulas (a3-1) to (a3-4) a18 , R a19 , R a20 and R a24 A structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom is preferred. When the resin (AX) contains the structural unit (a3), the total content thereof, based on all structural units of the resin (AX), is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more. It may also be 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it may be 1 to 70 mol%, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, even more preferably 3 to 55 mol%, even more preferably 5 to 60 mol%, and even more preferably 5 to 55 mol%. Furthermore, the content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, and even more preferably 5 mol% or more, based on the total structural units of the resin (AX). It is also preferably 60 mol% or less, more preferably 55 mol% or less, and even more preferably 50 mol% or less. Specifically, it is preferably 1 to 60 mol%, more preferably 3 to 60 mol%, even more preferably 3 to 55 mol%, even more preferably 5 to 55 mol%, and even more preferably 10 to 50 mol%.

[0165] <Structural unit (a4)> The structural unit represented by formula (a4) is shown below. TIFF2025074941000132.tif3454[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents a saturated hydrocarbon group having 1 to 24 carbon atoms and containing a halogen atom, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-.]

[0166] R 42Examples of the saturated hydrocarbon group represented by the formula (I) include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. Examples of the chain saturated hydrocarbon group include linear alkyl groups such as methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl, and octadecyl groups, and branched alkyl groups such as isopropyl and isobutyl groups. Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group; and polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkyl groups such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* indicates a bonding site): TIFF2025074941000133.tif10146 Examples of groups formed by this combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group-alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic saturated hydrocarbon group-alkyl group. Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and branched alkanediyl groups such as propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom contained in the saturated hydrocarbon group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 42Examples of the saturated hydrocarbon group in which -CH- is replaced with -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, and a group combining two or more of these groups. These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0167] The structural unit (a4) is R 42 is preferably a saturated hydrocarbon group having a fluorine atom, and R 42 However, examples of the structural unit (a4) that is a saturated hydrocarbon group having a fluorine atom include a structural unit represented by formula (a4-1) (hereinafter, sometimes referred to as structural unit (a4-1)), a structural unit represented by formula (a4-2) (hereinafter, sometimes referred to as structural unit (a4-2)), and a structural unit represented by formula (a4-3) (hereinafter, sometimes referred to as structural unit (a4-3)). The structural unit represented by formula (a4-1) is a structural unit shown below. TIFF2025074941000134.tif4964[In formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents a fluorine atom-containing alkanediyl group having 1 to 8 carbon atoms or a fluorine atom-containing cycloalkanediyl group having 3 to 12 carbon atoms. R 42f represents a hydrogen atom or a fluorine atom.

[0168] L 41Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, and butane-1,4-diyl, and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, and 2-methylpropane-1,2-diyl. The terminal of the branched alkanediyl group may be a methyl group. L 42f Examples of the alkanediyl group having a fluorine atom in the formula (I) include a straight-chain alkanediyl group having a fluorine atom, such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, and an octane-1,8-diyl group having a fluorine atom; Examples of branched alkanediyl groups having fluorine atoms include ethane-1,1-diyl groups having fluorine atoms, propane-1,1-diyl groups having fluorine atoms, propane-1,2-diyl groups having fluorine atoms, propane-2,2-diyl groups having fluorine atoms, pentane-2,4-diyl groups having fluorine atoms, 2-methylpropane-1,3-diyl groups having fluorine atoms, 2-methylpropane-1,2-diyl groups having fluorine atoms, pentane-1,4-diyl groups having fluorine atoms, and 2-methylbutane-1,4-diyl groups having fluorine atoms. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42f Examples of the cycloalkanediyl group having a fluorine atom in the formula (I) include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom; Examples of polycyclic cycloalkanediyl groups having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom. L 42f The number of fluorine atoms contained in the alkanediyl group and cycloalkanediyl group having a fluorine atom in the formula (I) may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group and cycloalkanediyl group having a fluorine atom in the formula (I) are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0169] L 42f Examples of the perfluoroalkanediyl group in the formula (I) include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3 ,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group. L 42fExamples of the perfluorocycloalkanediyl group in the formula (I) include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, and a perfluoroadamantanediyl group.

[0170] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. L 42f is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0171] The structural unit (a4-1) includes the structural units shown below and R in the structural unit (a4-1) in the structural units shown below. 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example. TIFF2025074941000135.tif97158The structural unit represented by formula (a4-2) is the structural unit shown below. TIFF2025074941000136.tif5674[In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. R 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. However, L 43f and R 43f At least one of L has a fluorine atom, 43f and R 43fThe maximum total number of carbon atoms is 21.

[0172] L 43f and R 43f Examples of the saturated hydrocarbon group in L include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. 43f and R 43f Examples of saturated hydrocarbon groups in 43f and R 43f As long as the upper limit of the total number of carbon atoms in 42 Examples of the saturated hydrocarbon group include the same groups as the exemplified saturated hydrocarbon groups.

[0173] L 43f The saturated hydrocarbon group is preferably an alkanediyl group having 1 to 6 carbon atoms or a group represented by formula (L43f-1). TIFF2025074941000137.tif13120[In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. L 47f represents a single bond or a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-. However, L 45f , L 46f , L 47f , X 46f and X 47f The total number of carbon atoms is 7 or less. * and ** are binding sites, and ** is -O-CO-R 43f ]

[0174] L in the group represented by formula (L43f-1) 45f , L 46f and L47f Examples of the divalent saturated hydrocarbon group represented by include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and a divalent saturated hydrocarbon group formed by combining an alkanediyl group with a divalent alicyclic saturated hydrocarbon group. Specific examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. Preferably, s is 0.

[0175] Examples of the group represented by formula (L43f-1) include the following groups: In the following examples, * and ** each represent a bonding site, and ** represents -O-CO-R 43f This is the binding site for TIFF2025074941000138.tif47140

[0176] R 43f is preferably a saturated hydrocarbon group having a fluorine atom. In this case, examples of the structural unit represented by formula (a4-2) include structural units represented by formula (a4-2A) or (a4-2B). TIFF2025074941000139.tif69102 [In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represents the same as in formula (a4-2). R 43fA represents a saturated hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom. A 43f represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents A 43f represents the binding site with R 43fBrepresents a saturated hydrocarbon group having 1 to 17 carbon atoms which may contain a fluorine atom. However, in formula (a4-2A), L 43f and R 43fA The total number of carbon atoms in formula (a4-2B) is 21 or less, and in formula (a4-2B), L 43f , A 43f , X 43 and R 43fB The total number of carbon atoms in A is 21 or less. 43f and R 43fB At least one of them has at least one fluorine atom.] R 43fA The saturated hydrocarbon group of R in formula (a4) is as long as the upper limit of the carbon number allows. 42 Examples of the saturated hydrocarbon groups include the saturated hydrocarbon groups similar to those exemplified above. R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and containing a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and containing a fluorine atom, or a group combining these, and *-(CF2) n43f -R 42’ (* represents the bonding site with the carbonyl group. n43f represents an integer of 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferred. A 43f and R 43fB The saturated hydrocarbon group of R in formula (a4) is as long as the upper limit of the carbon number allows. 42 Examples of the saturated hydrocarbon groups include the saturated hydrocarbon groups similar to those exemplified above. A 43f is preferably a divalent chain saturated hydrocarbon group which may have a fluorine atom, a divalent alicyclic saturated hydrocarbon group, or a combination thereof, more preferably a divalent chain saturated hydrocarbon group which has a fluorine atom, and even more preferably a fluorinated alkanediyl group having 1 to 6 carbon atoms. R 43fBThe saturated hydrocarbon group which may have a fluorine atom is preferably a chain saturated hydrocarbon group which may have a fluorine atom, an alicyclic saturated hydrocarbon group or a group combining these, more preferably an alkyl group having 1 to 12 carbon atoms which may have a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms or a group combining these, and more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4- More preferred are fluorinated alkyl groups such as an octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a heptyl group, a perfluoroheptyl group, an octyl group, and a perfluorooctyl group; a cyclopropylmethyl group, a cyclopropyl group, a cyclobutylmethyl group, a cyclopentyl group, a cyclohexyl group, a perfluorocyclohexyl group, an adamantyl group, an adamantylmethyl group, an adamantyldimethyl group, a norbornyl group, a norbornylmethyl group, a perfluoroadamantyl group, and a perfluoroadamantylmethyl group. In formula (a4-2B), *-A 43f -X 43 -R 43fB An example of a structure that the group represented by the formula (I) can take is the following structure (* indicates the bonding site with the carbonyl group). TIFF2025074941000140.tif15168

[0177] The structural unit represented by formula (a4-2A) includes the structural units shown below and R in the structural unit represented by formula (a4-2A) in the structural units shown below. 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example. TIFF2025074941000141.tif100168

[0178] The structural unit represented by formula (a4-2B) includes the structural units shown below and R in the structural unit represented by formula (a4-2B) in the structural units shown below. 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example. JPEG2025074941000142.jpg109163

[0179] The structural unit (a4) also includes a structural unit represented by formula (a4-3). TIFF2025074941000143.tif5677[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f each independently represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. R 44f each independently represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. However, L 44f and R 44f At least one of L has a fluorine atom, 44f and R 44f The maximum total carbon number of each is 21.]

[0180] L 44f and R 44f Examples of the saturated hydrocarbon group in L include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. 44f and R 44f Examples of saturated hydrocarbon groups in 43f and R 43f As long as the upper limit of the total number of carbon atoms in 42 Examples of the saturated hydrocarbon group include the same groups as the exemplified saturated hydrocarbon groups. L 44fis preferably an alkanediyl group having 1 to 13 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and is preferably -(CH2)1-, -(CH2) j2 -O-(CH2) j3 -or-(CH2) j4 -CO-O-(CH2) j5 - (j1 to j5 each independently represent an integer of 1 to 6), and more preferably an alkanediyl group having 1 to 4 carbon atoms (one -CH2- contained in the alkanediyl group may be replaced with -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced with -CO-O- or -O-CO-). R 44f is preferably a saturated hydrocarbon group having 1 to 10 carbon atoms and containing a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms and containing a fluorine atom or an alicyclic saturated hydrocarbon group having 1 to 10 carbon atoms and containing a fluorine atom, further preferably an alkyl group having 1 to 10 carbon atoms and containing a fluorine atom, and still more preferably an alkyl group having 1 to 6 carbon atoms and containing a fluorine atom.

[0181] Examples of the structural unit represented by formula (a4-3) include the following structural units and structural units represented by the following formulas: 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example. JPEG2025074941000144.jpg85167

[0182] The structural unit (a4) also includes a structural unit represented by formula (a4-A). TIFF2025074941000145.tif3686[In formula (a4-A), R 1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 11 represents a single bond or *-CO-O-. * represents R 1 represents the bonding site with the carbon atom to which it is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 1 may bond to form an alicyclic hydrocarbon group having 3 to 6 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-. mi represents an integer of 1 to 4. When mi is 2 or more, the groups in the parentheses may be the same or different.]

[0183] R 1 Examples of the alkyl group having 1 to 6 carbon atoms in the formula include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R 1 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 1 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R 1is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, further preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0184] L 1 Examples of the aliphatic hydrocarbon group in include chain hydrocarbon groups and monocyclic or polycyclic (including spiro rings, fused rings, bridged rings, etc.) alicyclic hydrocarbon groups, and may also be groups that combine two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group). Examples of the chain hydrocarbon group include chain hydrocarbon groups such as alkanediyl groups. Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl groups; Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4.

[0185] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups: The binding site can be any position. TIFF2025074941000146.tif46163 For example, alicyclic hydrocarbon groups such as cycloalkanediyl groups can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, and the like; Examples include cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, spirocyclohexane-1,2'-cyclopentane-diyl group, and spiroadamantane-2,3'-cyclopentane-diyl group; and polycyclic alicyclic hydrocarbon groups such as spiro rings having cycloalkanediyl groups bonded to norbornyl groups or adamantyl groups via spiro bonds. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, even more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms.

[0186] Examples of groups that combine two or more types include groups that combine an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups and chain hydrocarbon groups may be combined. In addition, when any of the groups is X 11 may be bound to Examples of groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), Examples of such a group include a group having a hydrocarbon group bonded thereto (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), a group having an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group bonded to a chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), and a group having an alicyclic hydrocarbon group, a chain hydrocarbon group, and a chain hydrocarbon group bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.). * is X 11 represents the binding site with

[0187] L 1 -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms may be replaced with -O-, -S-, -SO2- or -CO-. L 1 When —CH2— contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms is replaced with —O—, —S—, —SO2— or —CO—, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the aliphatic hydrocarbon group. Examples of the aliphatic hydrocarbon group in which -CH- is replaced with -O-, -S-, -SO-, or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group (), a thio group, a sulfonyl group (), an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group (), an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, and a group in which two or more of these groups are combined. Examples of these substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0188] Furthermore, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0189] L 1 The aliphatic hydrocarbon group in may have one or more substituents, such as a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced by —O— or —CO—). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of haloalkyl groups having 1 to 4 carbon atoms include fluorinated alkyl groups having 1 to 4 carbon atoms, chlorinated alkyl groups having 1 to 4 carbon atoms, brominated alkyl groups having 1 to 4 carbon atoms, and iodinated alkyl groups having 1 to 4 carbon atoms. Examples of haloalkyl groups include perfluoroalkyl groups having 1 to 4 carbon atoms (such as trifluoromethyl, pentafluoroethyl, heptafluoropropyl, and nonafluorobutyl), 2,2,2-trifluoroethyl, 3,3,3-trifluoropropyl, 4,4,4-trifluorobutyl, and 3,3,4,4,4-pentafluorobutyl groups, chloromethyl, bromomethyl, and iodomethyl. The number of carbon atoms in the haloalkyl group is preferably 1 to 3, and more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. When -CH2- in an alkyl group is replaced with -O- or -CO-, the number of carbon atoms before the replacement is counted as the total number of carbon atoms in the alkyl group. Examples of the substituted group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, and an alkylcarbonyloxy group. These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the carbon number. The alkoxy group preferably has 1 to 9 carbon atoms, more preferably 1 to 6 carbon atoms, even more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms. The alkoxycarbonyl group has preferably 2 to 9 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkylcarbonyl group has preferably 2 to 10 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkylcarbonyloxy group has preferably 2 to 9 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. L 1 The substituent that the aliphatic hydrocarbon group in the formula (I) may have is preferably a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced with —O— or —CO—), and even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group. L 1 is R 3When the alkyl group does not form an alicyclic hydrocarbon group with the alkyl group, it is preferably an optionally substituted chain hydrocarbon group of 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an optionally substituted alicyclic hydrocarbon group of 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-), or a group formed by combining an optionally substituted chain hydrocarbon group of 1 to 6 carbon atoms with an optionally substituted alicyclic hydrocarbon group of 3 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-). and more preferably a chain hydrocarbon group of 1 to 8 carbon atoms which may have a substituent, an alicyclic hydrocarbon group of 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a chain hydrocarbon group of 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and even more preferably a chain hydrocarbon group of 1 to 8 carbon atoms, an alicyclic hydrocarbon group of 6 to 12 carbon atoms, a group formed by combining a chain hydrocarbon group of 1 to 6 carbon atoms and an alicyclic hydrocarbon group of 6 to 12 carbon atoms, or a group formed by combining an alicyclic hydrocarbon group of 6 to 12 carbon atoms, a chain hydrocarbon group of 1 to 6 carbon atoms and an alicyclic hydrocarbon group of 6 to 12 carbon atoms.

[0190] R 2Examples of the fluorinated alkyl group having 1 to 8 carbon atoms in the formula (I) include a difluoromethyl group, a trifluoromethyl group, a 1,1-difluoroethyl group, a 2,2-difluoroethyl group, a 2,2,2-trifluoroethyl group, a perfluoroethyl group, a 1,1,2,2-tetrafluoropropyl group, a 1,1,2,2,3,3-hexafluoropropyl group, a perfluoroethylmethyl group, a 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 1,1,2,2-tetrafluorobutyl group, a 1,1,2,2,3,3-hexafluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluorobutyl group, a 1,1-bis(trifluoro)methyl group, a Examples of the fluorinated alkyl group include 2,2,2-trifluoroethyl, 2-(perfluoropropyl)ethyl, 1,1,2,2,3,3,4,4-octafluoropentyl, perfluoropentyl, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl, perfluoropentyl, 2-(perfluorobutyl)ethyl, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl, perfluoropentylmethyl, perfluorohexyl, perfluoroheptyl, and perfluorooctyl. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 6, more preferably 1 to 5, even more preferably 1 to 4, and even more preferably 1 to 3. R 3 The fluorinated alkyl group having 1 to 6 carbon atoms in R is as large as possible within the upper limit of the carbon number. 2 The same fluorinated alkyl groups having 1 to 6 carbon atoms as those given as examples of the fluorinated alkyl groups in the above can also be used. R 2 is R 3 When is a fluorinated alkyl group having 1 to 6 carbon atoms, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 3 carbon atoms, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group. R2 is R 3 When is a hydrogen atom, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 5 carbon atoms, and even more preferably a fluorinated alkyl group having 3 to 5 carbon atoms. R 3 L 1 When R is bonded to form an alicyclic hydrocarbon group having 3 to 6 carbon atoms, 3 L 1 Examples of groups formed by bonding with include groups represented by the following formulae: In the following formulae, * and ** represent bonding sites, and one of the two ** represents a bonding site with a hydroxy group and the other represents a bonding site with R 2 represents the binding site with L 1A L 1 It is a part of the hydrocarbon group and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. TIFF2025074941000147.tif26130R 3 is preferably a hydrogen atom or a fluorinated alkyl group having 1 to 3 carbon atoms. mi is preferably an integer of 1 to 3, more preferably 1 or 2, and even more preferably 1.

[0191] Examples of the structural unit (a4-A) include the following structural units. In these structural units, R 1 and structural units in which the methyl group corresponding to R is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or an alkyl group other than a methyl group. 1 Specific examples of the structural unit (a4-A) include structural units in which the hydrogen atom corresponding to the following is replaced with a halogen atom, a haloalkyl group, or an alkyl group. TIFF2025074941000148.tif252163

[0192] When the resin (AX) has the structural unit (a4), the content thereof is preferably from 1 to 20 mol %, more preferably from 2 to 15 mol %, and even more preferably from 3 to 10 mol %, based on all structural units of the resin (AX).

[0193] <Structural unit (a5)> The non-leaving hydrocarbon group contained in the structural unit (a5) may be a group containing a linear, branched, or cyclic hydrocarbon group, and among these, the structural unit (a5) is preferably a group containing an alicyclic hydrocarbon group. Examples of the structural unit (a5) include a structural unit represented by formula (a5-1). TIFF2025074941000149.tif3971[In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-.]

[0194] R 52 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cyclopropyl, cyclobutyl, cyclopentyl, and cyclohexyl. Examples of polycyclic alicyclic hydrocarbon groups include adamantyl and norbornyl. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl. Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and more preferably an adamantyl group, a norbornyl group, or a cyclohexyl group. L 55The divalent saturated hydrocarbon group in the formula (I) includes a divalent saturated chain hydrocarbon group and a divalent saturated alicyclic hydrocarbon group, and is preferably a divalent saturated chain hydrocarbon group. Examples of the divalent chain saturated hydrocarbon group include a methylene group, an ethylene group, and an alkanediyl group such as a propanediyl group, a butanediyl group, and a pentanediyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkanediyl groups such as cyclopentanediyl and cyclohexanediyl. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include adamantanediyl and norbornanediyl. L 55 Examples of the divalent saturated hydrocarbon group represented by formula (L1-1) in which one -CH2- is replaced with -O- or -CO- include groups represented by formula (L1-1) to formula (L1-4). In the following formulae, * and ** each represent a bonding site, and * represents a bonding site to an oxygen atom. TIFF2025074941000150.tif18165[In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents L x1 represents the binding site with ). L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 The total number of carbon atoms is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, L x3 and L x4 T...

Claims

1. an acid generator containing a salt represented by formula (I1); and a carboxylic acid generator containing a carboxylate represented by formula (I2). [In formula (I1), X represents a sulfur atom or an iodine atom. m10A represents 0 or 1. When X is a sulfur atom, m10A is 1, and when X is an iodine atom, m10A is 0. R １Ａ , R ２Ａ and R ３Ａ each independently represents a hydroxy group, *-X ２ -R １０Ａ , or *-X １ -L １０ -X ２ -R １０Ａ Represents. X １ and X ２ each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-. L １０ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R ４Ａ , R ５Ａ and R ６Ａ each independently represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, a hydrocarbon group having 1 to 18 carbon atoms, *-X ２ -R １０Ａ , or *-X １ -L １０ -X ２ -R １０Ａ The hydrocarbon group may have a substituent, and the haloalkyl group and the —CH 2 - is -O-, -CO-, -S- or -SO ２ It may be replaced with -. R ７Ａ , R ８Ａ and R ９Ａ each independently represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, a hydrocarbon group having 1 to 18 carbon atoms, *-X ２ -R １０Ａ , or *-X １ -L １０ -X ２ -R １０Ａ The hydrocarbon group may have a substituent, and the haloalkyl group and the —CH 2 - is -O-, -CO-, -S- or -SO ２ - may be substituted. ８Ａ and R ９Ａ is bonded to S ＋ may form a ring containing -CH 2 - is -O-, -S-, -CO-, -SO- or -SO ２ - may be substituted, and R forming the ring may be ８Ａ and R ９Ａ , S ＋ and a single bond formed between two benzene rings connecting the two. R １０Ａ represents an acid labile group. A １Ａ , A ２Ａ and A ３Ａ each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group optionally having a substituent, 2 - is -O-, -CO-, -S- or -SO ２ It may be replaced with -. Ar １Ａ , Ar ２Ａ and Ar ３Ａ each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m1A represents an integer of 0 to 5, and when m1A is 2 or more, the groups in the parentheses may be the same or different. m2A represents an integer of 0 to 5, and when m2A is 2 or more, the groups in multiple parentheses may be the same or different. m3A represents an integer of 0 to 5, and when m3A is 2 or more, the groups in multiple parentheses may be the same or different. m4A represents an integer of 0 to 4, and when m4A is 2 or more, a plurality of R ４Ａ may be the same or different from each other. m5A represents an integer of 0 to 4, and when m5A is 2 or more, a plurality of R ５Ａ may be the same or different from each other. m6A represents an integer of 0 to 4, and when m6A is 2 or more, a plurality of R ６Ａ may be the same or different from each other. m7A represents an integer of 0 to 5, and when m7A is 2 or more, a plurality of R ７Ａ may be the same or different from each other. m8A represents an integer of 0 to 5, and when m8A is 2 or more, a plurality of R ８Ａ may be the same or different from each other. m9A represents an integer of 0 to 5, and when m9A is 2 or more, a plurality of R ９Ａ may be the same or different from each other. provided that 0≦m1A+m7A≦5, 0≦m2A+m8A≦5, and 0≦m3A+m9A≦5, and at least one of m1A, m2A, m3A, m7A, m8A, and m9A represents an integer of 1 or more; When m10A = 1 and m1A = m2A = m3A = 0, R is 1 or more. ７Ａ , R ８Ａ and R ９Ａ At least one of the following is *-X ２ -R １０Ａ , or *-X １ -L １０ -X ２ -R １０Ａ represents When m10A = 0 and m1A = m2A = 0, R is 1 or more. ７Ａ and R ８Ａ At least one of the following is *-X ２ -R １０Ａ , or *-X １ -L １０ -X ２ -R １０Ａ Represents. AI － represents one anion selected from a sulfonate anion, a sulfonylmethide anion, and a sulfonylimide anion. [In formula (I2), Y represents a sulfur atom or an iodine atom. m10B represents 0 or 1. When X is a sulfur atom, m10B is 1, and when X is an iodine atom, m10B is 0. R １Ｂ , R ２Ｂ and R ３Ｂ each independently represents a hydroxy group, *-X ２ -R １０Ｂ , or *-X １ -L １０ -X ２ -R １０Ｂ Represents. X １ and X ２ each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-. L １０ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R ４Ｂ , R ５Ｂ and R ６Ｂ each independently represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, a hydrocarbon group having 1 to 18 carbon atoms, *-X ２ -R １０Ｂ , or *-X １ -L １０ -X ２ -R １０Ｂ The hydrocarbon group may have a substituent, and the haloalkyl group and the —CH 2 - is -O-, -CO-, -S- or -SO ２ It may be replaced with -. R ７Ｂ , R ８Ｂ and R ９Ｂ each independently represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, a hydrocarbon group having 1 to 18 carbon atoms, *-X ２ -R １０Ｂ , or *-X １ -L １０ -X ２ -R １０Ｂ The hydrocarbon group may have a substituent, and the haloalkyl group and the —CH 2 - is -O-, -CO-, -S- or -SO ２ - may be substituted. ８Ｂ and R ９Ｂ is bonded to S ＋ may form a ring containing -CH 2 - is -O-, -S-, -CO-, -SO- or -SO ２ - may be substituted, and R forming the ring may be ８Ｂ and R ９Ｂ , S ＋ and a single bond formed between two benzene rings connecting the two. R １０Ｂ represents an acid labile group. A １Ｂ , A ２Ｂ and A ３Ｂ each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group optionally having a substituent, 2 - is -O-, -CO-, -S- or -SO ２ It may be replaced with -. Ar １Ｂ , Ar ２Ｂ and Ar ３Ｂ each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m1B represents an integer of 0 to 5, and when m1B is 2 or more, the groups in the parentheses may be the same or different. m2B represents an integer of 0 to 5, and when m2B is 2 or more, the groups in the parentheses may be the same or different. m3B represents an integer of 0 to 5, and when m3B is 2 or more, the groups in multiple parentheses may be the same or different. m4B represents an integer of 0 to 4, and when m4B is 2 or more, a plurality of R ４Ｂ may be the same or different from each other. m5B represents an integer of 0 to 4, and when m5B is 2 or more, a plurality of R ５Ｂ may be the same or different from each other. m6B represents an integer of 0 to 4, and when m6B is 2 or more, a plurality of R ６Ｂ may be the same or different from each other. m7B represents an integer of 0 to 5, and when m7B is 2 or more, a plurality of R ７Ｂ may be the same or different from each other. m8B represents an integer of 0 to 5, and when m8B is 2 or more, a plurality of R ８Ｂ may be the same or different from each other. m9B represents an integer of 0 to 5, and when m9B is 2 or more, a plurality of R ９Ｂ may be the same or different from each other. provided that 0≦m1B+m7B≦5, 0≦m2B+m8B≦5, and 0≦m3B+m9B≦5, and at least one of m1B, m2B, m3B, m7B, m8B, and m9B represents an integer of 1 or more; When m10B = 1 and m1B = m2B = m3B = 0, R is 1 or more. ７Ｂ , R ８Ｂ and R ９Ｂ At least one of the following is *-X ２ -R １０Ｂ , or *-X １ -L １０ -X ２ -R １０Ｂ represents When m10B = 0 and m1B = m2B = 0, R is 1 or more. ７Ｂ and R ８Ｂ At least one of the following is *-X ２ -R １０Ｂ , or *-X １ -L １０ -X ２ -R １０Ｂ Represents. AII － represents a carboxyl anion.

2. A １Ａ But, ***-X ０１Ａ -L ０１Ａ -or***-L ０１Ａ -X ０１Ａ - and A ２Ａ But, ***-X ０２Ａ -L ０２Ａ -or***-L ０２Ａ -X ０２Ａ - and A ３Ａ But, ***-X ０３Ａ -L ０３Ａ -or***-L ０３Ａ -X ０３Ａ - and A １Ｂ But, ***-X ０１Ｂ -L ０１Ｂ -or***-L ０１Ｂ -X ０１Ｂ - and A ２Ｂ But, ***-X ０２Ｂ -L ０２Ｂ -or***-L ０２Ｂ -X ０２Ｂ - and A ３Ｂ But, ***-X ０３Ｂ -L ０３Ｂ -or***-L ０３Ｂ -X ０３Ｂ - and X ０１Ａ , X ０２Ａ , X ０３Ａ , X ０１Ｂ , X ０２Ｂ and X ０３Ｂ each independently represents -O-, -CO-, -S- or -SO ２ - represents L ０１Ａ , L ０２Ａ , L ０３Ａ , L ０１Ｂ , L ０２Ｂ and L ０３Ｂ each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S- or -SO ２ - may be replaced by . *** is Ar １Ａ , Ar ２Ａ , Ar ３Ａ , Ar １Ｂ , Ar ２Ｂ Or Ar ３Ｂ 2. The resist composition of claim 1, which exhibits a bonding site with

3. X ０１Ａ , X ０２Ａ , X ０３Ａ , X ０１Ｂ , X ０２Ｂ and X ０３Ｂ The resist composition according to claim 2, wherein each of the groups independently represents --O-- or --S--.

4. L ０１Ａ , L ０２Ａ , L ０３Ａ , L ０１Ｂ , L ０２Ｂ and L ０３Ｂ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH 2 3. The resist composition according to claim 2, wherein - may be replaced by -O- or -CO-.

5. R １０Ａ Or R １０Ｂ 3. The resist composition according to claim 1, wherein each of the acid labile groups is independently a group represented by formula (1a) or a group represented by formula (2a). [In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof; R aa1 and R aa2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. * indicates a binding site.] [In formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other and bonded to -C-X ａ Together with --, it forms a heterocyclic group having 3 to 20 carbon atoms, and the --CH contained in the hydrocarbon group and the heterocyclic group ２ - may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X a represents an oxygen atom or a sulfur atom. * indicates a binding site.]

6. 6. The resist composition according to claim 5, wherein the group represented by formula (2a) is any one of the following groups:

7. 3. The resist composition according to claim 1, wherein X and Y are sulfur atoms.

8. Ar １Ａ , Ar ２Ａ , Ar ３Ａ , Ar １Ｂ , Ar ２Ｂ and Ar ３Ｂ 3. The resist composition according to claim 1, wherein each of the groups independently represents a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

9. AI － 3. The resist composition according to claim 1, wherein the anion is represented by formula (IA). [In formula (IA), L b1 represents a single bond or a (nb1+1)-valent hydrocarbon group which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. L b2 represents a single bond or a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, a plurality of -L b2 -Y b1 may be the same or different.

10. AII － 3. The resist composition according to claim 1, wherein the anion is represented by formula (ID): [In formula (ID) X ０ represents a hydrocarbon group having 2 to 72 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ - may be replaced.

11. The resist composition according to claim 1 or 2, further comprising a resin containing one or more structural units represented by formula (a2). [In formula (a2), R a２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L ａ２１ represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and the —CH ２ - is -O-, -CO-, -S- or -SO ２ It may be replaced with -. L ａ２２ represents a chain hydrocarbon group having 1 to 12 carbon atoms which may have a single bond or a fluorine atom, and —CH 2 - may be replaced by -O- or -CO-. na2 represents an integer of 1 to 4. When na2 is 2 or more, multiple L ａ２２ may be the same or different.

12. One or more structural units represented by formula (a2) The resist composition according to claim 11, which comprises one or more structural units represented by formula (a2-A). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 4, and when nA2 is 2 or more, the groups in the multiple parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. mc represents an integer of 0 to 2.

13. One or more structural units represented by formula (a2) The resist composition according to claim 11, which comprises a structural unit represented by formula (a2-D): [In formula (a2-D), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ａ２１ and R ａ２２ each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L ａ２４ represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 4. When nD2 is 2 or more, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R ａ２７ may be the same or different.

14. One or more structural units represented by formula (a2) The resist composition according to claim 11, comprising a structural unit represented by formula (a2-A) and a structural unit represented by formula (a2-D). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 4, and when na2 is 2 or more, the groups in the multiple parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. mc represents an integer of 0 to 2. [In formula (a2-D), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ａ２１ and R ａ２２ each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L ａ２４ represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 4. When nD2 is 2 or more, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R ａ２７ may be the same or different.

15. 3. The resist composition according to claim 1, wherein the total content of the salt represented by formula (I1) and the carboxylate represented by formula (I2) is 90 mass % or more based on the solid content of the resist composition.

16. -L ｂ２ -Y ｂ１ Or Y ｂ１ The resist composition according to claim 9, wherein the compound forms an acid labile group.

17. (1) a step of applying the resist composition according to claim 1 or 2 onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

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