Apparatus for cleaning plasma chamber

Abstract

SOLUTION: Systems and methods for cleaning a processing chamber include supplying a pre-activated cleaning gas through a collar surrounding a showerhead stem into the processing chamber to clean the processing chamber. In other embodiments, a cleaning gas is supplied to the collar, RF power is supplied to the showerhead or to a pedestal to generate plasma in the processing chamber, and the processing chamber is cleaned. In still other embodiments, an inert gas is supplied to the collar, a pre-activated cleaning gas is supplied to the showerhead stem, RF power is supplied to the showerhead or to the pedestal to generate plasma in the processing chamber, and the processing chamber is cleaned.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This disclosure is a PCT International Application of U.S. Patent Application No. 62 / 816,820, filed March 11, 2019. The entire disclosures of the above-referenced applications are hereby incorporated by reference.

[0002] The present disclosure relates generally to substrate processing systems, and more particularly to cleaning of a plasma chamber by introducing a cleaning gas through a secondary purge collar above a showerhead. [Background technology]

[0003] The background description provided herein is intended to provide a general overview of the contents of the present disclosure. Work by the currently named inventors within the scope of what is described in this Background section, as well as aspects of the description that may not otherwise be regarded as prior art at the time of filing, are not admitted, expressly or impliedly, as prior art against the present disclosure.

[0004] Substrate processing systems can be used to perform substrate processing, such as depositing or etching a film on a substrate, such as a semiconductor wafer. Substrate processing systems typically include a processing chamber with a substrate support (pedestal, plate, etc.) disposed therein. The substrate is disposed on the substrate support during processing. A gas diffusion device, such as a showerhead, can be disposed within the processing chamber to deliver and distribute process gases and to purge gases as needed. Summary of the Invention

[0005] A system for cleaning a processing chamber includes a showerhead, a collar, a gas source, a plasma generator, and a controller. The showerhead is disposed on a pedestal within the processing chamber. The showerhead includes a stem portion and a head portion. The stem portion is connected to a top plate of the processing chamber and receives process gas during processing of a substrate mounted on the pedestal. The head portion includes a plurality of through holes for dispersing process gas during processing of the substrate. The collar surrounds the stem portion of the showerhead and defines a cavity and includes a plurality of slots extending outwardly from the cavity for dispersing purge gas during processing of the substrate. The gas source provides the cleaning gas. The plasma generator is external to the processing chamber and receives the cleaning gas from the gas source and generates a plasma. The controller stops the supply of the process gas and the purge gas to the stem portion and collar of the showerhead, respectively, in response to a substrate not being processed in the processing chamber. The controller provides plasma to the collar and through the slots into the processing chamber to clean areas around the showerhead and within the processing chamber.

[0006] In another feature, the cleaning gas supplied during cleaning is different from the purge gas supplied during processing of the substrate.

[0007] In another feature, the cleaning gas comprises a halogen species.

[0008] In another feature, the cleaning gas comprises nitrogen trifluoride (NF3) or tetrafluoroethylene (C2F4).

[0009] In another feature, the controller is configured to provide the plasma for a predetermined period of time.

[0010] In other features, before and after cleaning of the processing chamber, the controller is configured to stop supplying plasma to the collar and supply process gas and purge gas to the stem and collar of the showerhead, respectively, to process the substrate.

[0011] In still other features, a system for cleaning a processing chamber includes a showerhead, a collar, a gas source, an RF generator, and a controller. The showerhead is disposed on a pedestal within the processing chamber. The showerhead includes a stem portion and a head portion. The stem portion is connected to a top plate of the processing chamber and receives process gas during processing of a substrate mounted on the pedestal. The head portion includes a plurality of through holes for dispersing process gas during processing of the substrate. The collar surrounds the stem portion of the showerhead, defines a cavity, and includes a plurality of slots extending outwardly from the cavity for dispersing purge gas during processing of the substrate. The gas source provides the cleaning gas. The RF generator provides RF power. The controller stops the supply of process gas and purge gas to the stem portion and collar of the showerhead, respectively, in response to a substrate not being processed in the processing chamber. The controller provides the cleaning gas to the collar and through the slots in the collar into the processing chamber. The controller supplies RF power to the showerhead to generate a plasma in the processing chamber to clean areas around the showerhead and within the processing chamber.

[0012] In another feature, the cleaning gas supplied during cleaning is different from the purge gas supplied during processing of the substrate.

[0013] In another feature, the cleaning gas comprises a halogen species.

[0014] In another feature, the cleaning gas comprises nitrogen trifluoride (NF3) or tetrafluoroethylene (C2F4).

[0015] In another feature, the controller is configured to supply RF power to the showerhead for a predetermined period of time.

[0016] In another feature, the controller is configured to sequentially ground a top plate of the processing chamber, a sidewall of the processing chamber, and the pedestal.

[0017] In another feature, the controller is configured to ground a top plate of the processing chamber, a sidewall of the processing chamber, and a pedestal.

[0018] In other features, before and after cleaning of the processing chamber, the controller is configured to stop supplying cleaning gas to the collar and supply process gas and purge gas to the stem and collar of the showerhead, respectively, to process the substrate.

[0019] In still other features, a system for cleaning a processing chamber includes a showerhead, a collar, a gas source, a plasma generator, an RF generator, and a controller. The showerhead is disposed on a pedestal within the processing chamber. The showerhead includes a stem portion and a head portion. The stem portion is connected to a top plate of the processing chamber and receives a process gas during processing of a substrate mounted on the pedestal. The head portion includes a plurality of through holes for dispersing the process gas during processing of the substrate. The collar surrounds the stem portion of the showerhead, defines a cavity, and includes a plurality of slots extending outwardly from the cavity for dispersing a purge gas during processing of the substrate. The gas source provides the cleaning gas and the inert gas. The plasma generator is external to the processing chamber and receives the cleaning gas and generates a first plasma. The RF generator provides RF power. The controller stops the supply of the process gas and the purge gas to the stem portion and the collar of the showerhead, respectively, in response to a substrate not being processed in the processing chamber. The controller delivers a first plasma to the stem of the showerhead and through a plurality of holes in the head of the showerhead into the processing chamber. The controller delivers an inert gas to the collar and through a slot in the collar into the processing chamber. The controller delivers RF power to the showerhead to generate a second plasma in the processing chamber to clean areas around the showerhead and within the processing chamber.

[0020] In another feature, the cleaning gas and the inert gas supplied during cleaning are different from the process gas and the purge gas, respectively, supplied during processing of the substrate.

[0021] In another feature, the cleaning gas comprises a halogen species.

[0022] In another feature, the cleaning gas comprises nitrogen trifluoride (NF3) or tetrafluoroethylene (C2F4).

[0023] In another feature, the inert gas is selected from the group consisting of argon (Ar), molecular nitrogen (N2), and helium (He).

[0024] In another feature, the controller is configured to supply the first plasma and the inert gas, respectively, to the stem and collar of the showerhead for a predetermined period of time.

[0025] In another feature, the controller is configured to sequentially ground a top plate of the processing chamber, a sidewall of the processing chamber, and the pedestal.

[0026] In another feature, the controller is configured to ground a top plate of the processing chamber, a sidewall of the processing chamber, and a pedestal.

[0027] In other features, before and after cleaning of the processing chamber, the controller is configured to stop supplying the first plasma and the inert gas, respectively, to the stem and collar of the showerhead and supply a process gas and a purge gas, respectively, to the stem and collar of the showerhead to process the substrate.

[0028] In still other features, a system for cleaning a processing chamber includes a showerhead, a collar, a gas source, an RF generator, and a controller. The showerhead is disposed on a pedestal within the processing chamber. The showerhead includes a stem portion and a head portion. The stem portion is connected to a top plate of the processing chamber and receives process gas during processing of a substrate mounted on the pedestal. The head portion includes a plurality of through holes for dispersing process gas during processing of the substrate. The collar surrounds the stem portion of the showerhead, defines a cavity, and includes a plurality of slots extending outwardly from the cavity for dispersing purge gas during processing of the substrate. The gas source provides the cleaning gas. The RF generator provides RF power. The controller stops the supply of process gas and purge gas to the stem portion and collar of the showerhead, respectively, in response to a substrate not being processed in the processing chamber. The controller provides the cleaning gas to the collar and through the slots in the collar into the processing chamber. The controller supplies RF power to the pedestal to generate a plasma in the processing chamber to clean areas around the showerhead and within the processing chamber.

[0029] In another feature, the cleaning gas supplied during cleaning is different from the purge gas supplied during processing of the substrate.

[0030] In another feature, the cleaning gas comprises a halogen species.

[0031] In another feature, the cleaning gas comprises nitrogen trifluoride (NF3) or tetrafluoroethylene (C2F4).

[0032] In another feature, the controller is configured to provide RF power to the pedestal for a predetermined period of time.

[0033] In another feature, the controller is configured to sequentially ground a top plate of the processing chamber, a sidewall of the processing chamber, and a showerhead.

[0034] In another feature, the controller is configured to ground a top plate of the processing chamber, a sidewall of the processing chamber, and a showerhead.

[0035] In other features, before and after cleaning of the processing chamber, the controller is configured to stop supplying cleaning gas to the collar and supply process gas and purge gas to the stem and collar of the showerhead, respectively, to process the substrate.

[0036] In still other features, a system for cleaning a processing chamber includes a showerhead, a collar, a gas source, a plasma generator, an RF generator, and a controller. The showerhead is disposed on a pedestal within the processing chamber. The showerhead includes a stem portion and a head portion. The stem portion is connected to a top plate of the processing chamber and receives a process gas during processing of a substrate mounted on the pedestal. The head portion includes a plurality of through holes for dispersing the process gas during processing of the substrate. The collar surrounds the stem portion of the showerhead, defines a cavity, and includes a plurality of slots extending outwardly from the cavity for dispersing a purge gas during processing of the substrate. The gas source provides the cleaning gas and the inert gas. The plasma generator is external to the processing chamber and receives the cleaning gas and generates a first plasma. The RF generator provides RF power. The controller stops the supply of the process gas and the purge gas to the stem portion and the collar of the showerhead, respectively, in response to a substrate not being processed in the processing chamber. The controller delivers a first plasma to the stem of the showerhead and through a plurality of holes in the head of the showerhead into the processing chamber. The controller delivers an inert gas to the collar and through a slot in the collar into the processing chamber. The controller delivers RF power to the pedestal to generate a second plasma in the processing chamber to clean areas around the showerhead and within the processing chamber.

[0037] In another feature, the cleaning gas and the inert gas supplied during cleaning are different from the process gas and the purge gas, respectively, supplied during processing of the substrate.

[0038] In another feature, the cleaning gas comprises a halogen species.

[0039] In another feature, the cleaning gas comprises nitrogen trifluoride (NF3) or tetrafluoroethylene (C2F4).

[0040] In another feature, the inert gas is selected from the group consisting of argon (Ar), molecular nitrogen (N2), and helium (He).

[0041] In another feature, the controller is configured to supply the first plasma and the inert gas, respectively, to the stem and collar of the showerhead for a predetermined period of time.

[0042] In another feature, the controller is configured to sequentially ground a top plate of the processing chamber, a sidewall of the processing chamber, and a showerhead.

[0043] In another feature, the controller is configured to ground a top plate of the processing chamber, a sidewall of the processing chamber, and a showerhead.

[0044] In other features, before and after cleaning of the processing chamber, the controller is configured to stop supplying the first plasma and the inert gas, respectively, to the stem and collar of the showerhead and supply a process gas and a purge gas, respectively, to the stem and collar of the showerhead to process the substrate.

[0045] In still other features, a system for cleaning a processing chamber includes a showerhead, a collar, a gas supply system, and a plasma generator. The showerhead is disposed on a pedestal within the processing chamber. The showerhead includes a stem portion and a head portion. The stem portion is connected to a top plate of the processing chamber and receives process gas during processing of a substrate mounted on the pedestal. The head portion includes a plurality of through holes for dispersing process gas during processing of the substrate. The collar surrounds the stem portion of the showerhead and defines a cavity and includes a plurality of slots extending outwardly from the cavity for dispersing purge gas during processing of the substrate. The gas supply system supplies process gas and purge gas to the stem portion and collar of the showerhead, respectively, during processing of the substrate. The gas supply system supplies cleaning gas during cleaning of the processing chamber. The plasma generator is external to the processing chamber and receives cleaning gas from the gas supply system, generates plasma, and supplies the plasma to the collar and through the slots into the processing chamber to clean areas around the showerhead and within the processing chamber.

[0046] In another feature, the cleaning gas supplied during cleaning is different from the purge gas supplied during processing of the substrate.

[0047] In another feature, the cleaning gas comprises a halogen species.

[0048] In another feature, the cleaning gas comprises nitrogen trifluoride (NF3) or tetrafluoroethylene (C2F4).

[0049] In another feature, the plasma generator is configured to provide a plasma for a predetermined period of time.

[0050] In still other features, a system for cleaning a processing chamber includes a showerhead, a collar, a gas supply system, and an RF generator. The showerhead is disposed on a pedestal within the processing chamber. The showerhead includes a stem portion and a head portion. The stem portion is connected to a top plate of the processing chamber and receives process gas during processing of a substrate mounted on the pedestal. The head portion includes a plurality of through holes for dispersing process gas during processing of the substrate. The collar surrounds the stem portion of the showerhead, defines a cavity, and includes a plurality of slots extending outwardly from the cavity for dispersing purge gas during processing of the substrate. The gas supply system supplies process gas and purge gas to the stem portion and collar of the showerhead, respectively, during processing of the substrate. The gas supply system supplies cleaning gas to the collar and through the slots in the collar into the processing chamber during cleaning of the processing chamber. The RF generator supplies RF power to the showerhead or the pedestal to generate a plasma within the processing chamber to clean areas around the showerhead and within the processing chamber.

[0051] In another feature, the cleaning gas supplied during cleaning is different from the purge gas supplied during processing of the substrate.

[0052] In another feature, the cleaning gas comprises a halogen species.

[0053] In another feature, the cleaning gas comprises nitrogen trifluoride (NF3) or tetrafluoroethylene (C2F4).

[0054] In another feature, the RF generator is configured to provide RF power to the showerhead or pedestal for a predetermined period of time.

[0055] In still other features, a system for cleaning a processing chamber includes a showerhead, a collar, a gas supply system, a plasma generator, and an RF generator. The showerhead is disposed on a pedestal within the processing chamber. The showerhead includes a stem portion and a head portion. The stem portion is connected to a top plate of the processing chamber and receives process gas during processing of a substrate mounted on the pedestal. The head portion includes a plurality of through holes for dispersing process gas during processing of the substrate. The collar surrounds the stem portion of the showerhead, defines a cavity, and includes a plurality of slots extending outwardly from the cavity for dispersing purge gas during processing of the substrate. The gas supply system supplies process gas and purge gas, respectively, to the stem portion and collar of the showerhead during processing of the substrate. The gas supply system supplies an inert gas to the collar and through the slots in the collar into the processing chamber during cleaning of the processing chamber. The gas supply system supplies cleaning gas during cleaning of the processing chamber. A plasma generator is external to the processing chamber and receives a cleaning gas from the gas delivery system, generates a first plasma, and delivers the first plasma to the stem of the showerhead and through a plurality of holes in the head of the showerhead into the processing chamber. An RF generator delivers RF power to the showerhead or pedestal to generate a second plasma in the processing chamber to clean areas around the showerhead and within the processing chamber.

[0056] In another feature, the cleaning gas and the inert gas supplied during cleaning are different from the process gas and the purge gas, respectively, supplied during processing of the substrate.

[0057] In another feature, the cleaning gas comprises a halogen species.

[0058] In another feature, the cleaning gas comprises nitrogen trifluoride (NF3) or tetrafluoroethylene (C2F4).

[0059] In another feature, the inert gas is selected from the group consisting of argon (Ar), molecular nitrogen (N2), and helium (He).

[0060] In other features, gas from the gas supply system is configured to supply an inert gas to the collar for a predetermined period of time. The plasma generator is configured to supply a first plasma to the stem of the showerhead for a predetermined period of time. The RF generator is configured to supply RF power to the showerhead or the pedestal for a predetermined period of time.

[0061] Other areas of applicability of the present disclosure will become apparent from the detailed description, claims, and drawings. The detailed description and specific examples are for purposes of illustration only and are not intended to limit the scope of the present disclosure. [Brief description of the drawings]

[0062] The present disclosure will become more fully understood from the detailed description and the accompanying drawings, wherein:

[0063] [Figure 1] FIG. 1 is a functional block diagram of an example of a substrate processing system including a processing chamber.

[0064] [Diagram 2] FIG. 2 illustrates an example of a collar that may be used around a showerhead in the processing chamber of FIG.

[0065] [Diagram 3] FIG. 3 illustrates a valve arrangement that may be used in the substrate processing system of FIG. 1 to supply gases during processing of a substrate in a processing chamber and during cleaning of the processing chamber.

[0066] [Figure 4] FIG. 4 illustrates various methods of cleaning a processing chamber in the substrate processing system of FIG. 1 using the collar of FIG. 2 and the valve arrangement of FIG. [Diagram 5] FIG. 5 illustrates various methods of cleaning a processing chamber in the substrate processing system of FIG. 1 using the collar of FIG. 2 and the valve arrangement of FIG. [Figure 6]FIG. 6 illustrates various methods of cleaning a processing chamber in the substrate processing system of FIG. 1 using the collar of FIG. 2 and the valve arrangement of FIG.

[0067] [Figure 7] FIG. 7 illustrates different grounding methods that can be used during cleaning of a processing chamber. [Figure 8] FIG. 8 illustrates different grounding methods that can be used during cleaning of a processing chamber.

[0068] [Figure 9] FIG. 9 is a diagram showing a flow model of the processing chamber.

[0069] [Figure 10] FIG. 10 illustrates an alternative configuration to FIG. 3 with a grounded showerhead and powered pedestal.

[0070] In the drawings, reference numbers may be reused to refer to similar and / or identical elements. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0071] In some applications, a film can be deposited on a substrate using plasma-enhanced chemical vapor deposition (PECVD) or plasma-enhanced atomic layer deposition (PEALD). During PEALD, one or more cycles are performed to deposit a film on a substrate. Each PEALD cycle typically includes a sequence of precursor input, dose purge, RF plasma input, and RF purge steps. During deposition, a showerhead can be used to deliver process gases to the processing chamber. During RF plasma input, RF power is supplied to the showerhead and the substrate support is grounded (or vice versa).

[0072] In each PEALD cycle, an inert gas (e.g., argon (Ar) or molecular nitrogen (N2)) is used as a primary burst purge gas that flows through the showerhead in the dose purge and RF purge steps. In addition, oxygen (O2) or molecular nitrogen (N2) is continuously supplied through the backside of the showerhead as a secondary purge gas in all steps of each PEALD cycle. The secondary purge prevents unwanted deposition in remote areas such as the backside of the showerhead, the top plate of the processing chamber, and the sidewalls of the processing chamber.

[0073] The processing chamber typically includes an upper surface, a lower surface, and a sidewall. The showerhead includes a cylindrical base portion that defines a gas plenum. A faceplate is disposed on one side of the gas plenum and includes a plurality of spaced apart through-holes. The showerhead further includes a hollow stem portion having one end connected to the upper surface of the processing chamber and an opposite end connected to the center of the cylindrical base portion. The showerhead stem portion delivers process gases to the gas plenum in the cylindrical base. The process gases flow through the spaced apart through-holes in the faceplate and are uniformly distributed to a substrate disposed on a substrate support located below the showerhead.

[0074] A collar disposed around the stem portion can be used to connect the stem portion to the upper surface of the processing chamber. The collar can include one or more gas slits that deliver and distribute a secondary purge gas into the processing chamber between the cylindrical base portion of the showerhead and the upper surface of the processing chamber during processing. A gap is defined between the radially outer edge of the cylindrical base portion of the showerhead and a sidewall of the processing chamber. The secondary purge gas flows through the slits on the collar and the gap and is then exhausted through an exhaust port. Thus, the collar may be referred to as a secondary purge collar.

[0075] Typically, oxygen is delivered through the collar during substrate processing to suppress parasitic plasma from forming above and behind the showerhead. Nevertheless, the parasitic plasma causes residue buildup on the backplate and sides of the showerhead. Cleaning the backplate and sides of the showerhead can be difficult.

[0076] The present disclosure discloses a system and method for delivering cleaning or inert gases through a collar to areas of a processing chamber that are difficult to clean (e.g., the back and sides of a showerhead). The system and method utilize a collar that is used to deliver oxygen (O2) or molecular nitrogen (N2) during substrate processing. During a chamber cleaning process, the gas supply to the showerhead and collar is switched and the collar is used to deliver reactive cleaning gases (e.g., NF3, C2F4, etc.) or inert gases (e.g., Ar, N2, or He) above and over the showerhead (i.e., the areas that are difficult to clean).

[0077] In effect, switching the gas supply as described above increases the partial pressure of reactive cleaning gas species to difficult to clean areas, decreasing the overall time to clean the process chamber. Additionally, delivering inert gas through the secondary purge collar can increase the lifetime of fluorine radicals (delivered from the showerhead faceplate) by increasing the collision distance between fluorine species through dilution.

[0078] The cleaning gas or inert gas can be delivered in different ways. In one example, the cleaning gas can be pre-activated with a remote plasma generator and then the pre-activated cleaning gas is delivered into the collar. In another example, the cleaning gas is delivered through the collar and activated in-situ by applying RF power to the showerhead with the pedestal grounded. In yet another example, the pre-activated cleaning gas is delivered through the showerhead and the inert gas is delivered through the collar to increase the mean free path of the fluorine radicals delivered from the showerhead, increasing the partial pressure of the fluorine radicals above and behind the showerhead. These and other features of the present disclosure are described in detail below.

[0079] This disclosure is organized as follows: An example of an atomic layer deposition (ALD) processing chamber is shown and described with reference to FIG. 1. An example of a collar is shown and described in detail with reference to FIG. 2. A valve arrangement for supplying various gases during substrate processing and chamber cleaning operations is shown and described with reference to FIG. 3. Various methods of cleaning the processing chamber are shown and described with reference to FIGS. 3-6. Different grounding methods that can be used during cleaning of the processing chamber are shown in FIGS. 7 and 8. A flow model of the processing chamber is shown and described with reference to FIG. 9. FIG. 10 shows an alternative configuration with a grounded showerhead and powered pedestal.

[0080] 1 illustrates an example of a substrate processing system 100 that includes a processing chamber 108. A substrate support (e.g., pedestal) 104 is disposed within the processing chamber 108. A substrate 112 is disposed on the substrate support 104 during processing. A gas distribution device, such as a showerhead 140, is disposed within the processing chamber 108 above the substrate support 104.

[0081] A gas delivery system 120 includes gas sources 122-1, 122-2, ..., and 122-N (collectively, gas sources 122) connected to valves 124-1, 124-2, ..., and 124-N (collectively, valves 124), and mass flow controllers 126-1, 126-2, ..., and 126-N (collectively, MFCs 126). The MFCs 126 control the flow of gas from the gas sources 122 to a manifold 128 where the gases mix. The output of the manifold 128 is provided to a showerhead 140. The showerhead 140 includes an internal plenum and gas passages. The showerhead 140 introduces and distributes process gases into the processing chamber 108 through the gas passages.

[0082] An RF generating system 130 generates and outputs an RF voltage to the showerhead 140 or the substrate support 104 (the other is DC grounded, AC grounded, or floating). By way of example only, the RF generating system 130 may include an RF voltage generator 132 that generates an RF voltage that is supplied to the showerhead 140 or the substrate support 104 by a matching network 134. A plasma is generated when process gases and RF power are supplied to the showerhead 140.

[0083] In some examples, during each ALD cycle while processing the substrate 112, an inert gas such as argon (Ar) or molecular nitrogen (N2) can be used as a primary purge gas flowing through the showerhead 140 in the dose purge and RF purge steps. Additionally, molecular oxygen (O2) or molecular nitrogen (N2) can be continuously flowed through the backside of the showerhead 140 as a secondary purge in all ALD steps to prevent or minimize undesired deposition on the backside of the showerhead 140 as well as remote areas such as the walls and top plate of the processing chamber 108.

[0084] A controller 150 controls the flow of process gases, monitors process parameters such as temperature, pressure, power, and controls plasma strike and extinguishment, reactant removal, and the like. The controller 150 controls gas delivery from the gas delivery system 120 and provides process gases and / or purge gases at predetermined intervals during the process. The controller 150 controls the pressure in the processing chamber 108 and / or the evacuation of reactants using valves 160 and pumps 162. The controller 150 controls the temperature of the substrate support 104 and the substrate 112 based on temperature feedback from a sensor (not shown) in the substrate support 104 and / or a sensor (not shown) measuring the coolant temperature. A purge gas source 170 and corresponding valve (shown in FIG. 3) may be used by the controller 150 to selectively supply a secondary purge gas to the collar 142, as described below with reference to FIG. 2.

[0085] In addition, the substrate processing system 100 includes a cleaning gas source 180 and a remote plasma generator 182. For example, the remote plasma generator 182 may include an inductively coupled plasma (ICP) chamber that generates a plasma when the cleaning gas source 180 provides a cleaning gas. Thus, the remote plasma generator 182 may be referred to as a remote plasma cleaning (RPC-ICP) generator. Throughout this disclosure, the plasma generated by the remote plasma generator 182 is referred to as a pre-activated cleaning gas. The pre-activated cleaning gas may also be referred to as a remote plasma cleaning (RPC) gas.

[0086] The controller 150 controls the supply of cleaning gas from a cleaning gas source 180, and in some examples, the supply of pre-activated cleaning gas from a remote plasma generator 182 to clean the process chamber 108, as described below with reference to Figures 3-6.

[0087] The substrate processing system 100 further includes a number of valves 190 that allow for delivery of process and purge gases during substrate processing and for delivery of pre-activated cleaning, inert, and cleaning gases during chamber cleaning. The controller 150 controls the valves 190 to supply appropriate process and purge gases to the processing chamber 108 while processing the substrate 112, as described below with reference to FIGS. 3-6. The controller 150 controls the valves 190 to supply other appropriate gases to the processing chamber 108 while cleaning the processing chamber 108, as described below with reference to FIGS. 3-6. The combination or subcombination of elements 120, 128, 170, 180, 190 may be collectively referred to as a gas supply system. In some embodiments, the gas supply system may include element 150 and / or element 182.

[0088] 2 shows the showerhead 140 and collar 142 in further detail. The showerhead 140 includes a stem portion 200 and a head portion 202. The head portion 202 defines an interior cavity 204. A fluid, such as a precursor or purge gas, flows through the stem portion 200, over a distribution plate 206, and into the interior cavity 204. The fluid then passes through spaced holes 208 in the bottom surface of the head portion 202 and into the processing chamber 108.

[0089] The stem portion 200 of the showerhead 140 is connected to the upper wall (i.e., top plate) of the processing chamber 108 by a collar 142. The collar 142 has a generally "T" shaped cross-section and includes a head portion 210 and a stem portion 212. The collar 142 is cylindrical and defines an interior cavity 220 that receives the stem portion 200 of the showerhead 140. A number of slots 230 are formed in the stem portion 212 of the collar 142. The slots 230 allow fluid, such as a purge gas, to flow from the interior cavity 220 to an exterior surface of the stem portion 212 of the collar 142, into the area above the showerhead 140, and into the processing chamber 108.

[0090] A fluid connector 240 may be connected to an edge of the head portion 210 of the collar 142 and is used to supply fluids, such as purge gas, during processing of the substrate 112. The fluid connector 240 includes one or more conduits and / or connectors, generally identified at 242. The head portion 210 of the collar 142 includes conduits and / or connectors, generally identified at 244, for directing the flow of fluid into the interior cavity 220 of the collar 142.

[0091] A plate 250 is disposed between the head portion 202 and the collar 142 of the showerhead 140. The plate 250 includes a top surface 252, a centering opening or bore 260, and a bottom surface 262. In some examples, the plate 250 is made of ceramic. The thickness of the plate 250 may be selected to minimize material and capacitive coupling to ground or parasitic plasma. The top surface 252 of the plate 250 is spaced from the bottom edge of the collar 142 such that fluid may pass therebetween. The centering bore 260 is also spaced from the stem portion 202 of the showerhead 140 such that fluid may pass therebetween. The bottom surface 262 of the plate 250 is spaced from the top surface of the showerhead 140 such that fluid may flow therebetween. In some examples, the plate 250 may be omitted and the processing chamber 108 may be operated without the plate 250.

[0092] Flowing purge gas through collar 142 inhibits process deposition chemicals from entering regions within cavity 220 and prevents undesired film deposition therein. The dimensions of slot 230 and other gaps may be selected to prevent ignition of a plasma therein and allow the Peclet condition to be met to prevent back-diffusion of the desired gas flow rate.

[0093] The controller 150 utilizes the showerhead 140 and collar 142 during the cleaning process, described below, in a different manner than during processing of the substrate 112. The controller 150 uses a valve arrangement (shown and described below with reference to FIG. 3 ) to vary the utilization of the showerhead 140 and collar 142 while cleaning the processing chamber 108.

[0094] 3 shows an arrangement of various valves used to supply different gases to the showerhead 140 and collar 142 during chamber cleaning operations. Valves 190 switch gas supplies, such as process gases, purge gases, pre-activated cleaning gases, inert gases, and cleaning gases, to the showerhead 140 and collar 142 during substrate processing and chamber cleaning operations. Valves 190 include valves 300-312 that deliver various gases to the showerhead 140 and collar 142 during substrate processing and chamber cleaning operations. Controller 150 controls valves 300-312 during substrate processing and chamber cleaning operations as follows:

[0095] During substrate processing, process gas is supplied to the showerhead 140 and purge gas is supplied to the collar 142. Thus, during substrate processing, the controller 150 turns on valves 300 and 302 and turns off valves 304-312. Thus, during substrate processing, process gas is supplied from the manifold 128 to the showerhead 140 via valve 300 and purge gas is supplied from the purge gas source 170 to the collar 142 via valve 302.

[0096] During the cleaning operation, the controller 150 turns off valves 300 and 302 and turns off the supply of process gas from manifold 128 and purge gas from purge gas source 170 to the showerhead 140 and collar 142, respectively. The controller 150 cleans the processing chamber 108 using one of three methods described below. During each method, the valves 300 and 302 remain off and the controller 150 turns on valves 304-312 as described below. After the cleaning operation is completed using one of the three methods, the controller 150 turns off valves 304-312 and turns on valves 300 and 302 while processing the substrate 112 in the processing chamber 108.

[0097] In the first cleaning method, cleaning gas from the cleaning gas source 180 is supplied to the remote plasma generator 182 to generate a pre-activated cleaning gas. The controller 150 turns on the valve 304 to supply the cleaning gas from the cleaning gas source 180 to the remote plasma generator 182. The controller 150 then turns off the valve 306 to supply the pre-activated cleaning gas from the remote plasma generator 182 to the collar 142 of the showerhead 140. In the first cleaning method, the valves 300, 302, and 308-312 remain off.

[0098] The pre-activated cleaning gas is dispersed into the processing chamber 108 through the collar 142 above the backside of the showerhead 140. The pre-activated cleaning gas reacts with any residue that may have been deposited in these areas during substrate processing. The pre-activated cleaning gas cleans these areas. The pre-activated cleaning gas is supplied to the collar 142 for a predetermined period of time, after which the valves 304 and 306 are turned off. The controller 150 then turns on the valves 300 and 302 to supply process and purge gases to the showerhead 140 and collar 142, respectively, while processing the substrate 112 in the processing chamber 108.

[0099] In the second cleaning method, cleaning gas is supplied from cleaning gas source 180 directly to collar 142 of showerhead 140, and RF power is supplied to showerhead 140 to activate the cleaning gas in processing chamber 108. During the second cleaning method, valves 300-306, 310, and 312 remain off.

[0100] The controller 150 turns on the valve 308 to supply cleaning gas from the cleaning gas source 180 to the collar 142 of the showerhead 140. The controller 150 supplies RF power to the showerhead 140 to activate the cleaning gas that disperses from the collar 142 into the processing chamber 108. The activated cleaning gas reacts with residues that may have been deposited above the backside of the showerhead 140 and elsewhere in the processing chamber 108 during substrate processing. The activated cleaning gas cleans these areas.

[0101] Cleaning gas is supplied to collar 142 and RF power is supplied to showerhead 140 for a predetermined period of time. After the predetermined period of time, valve 308 and the RF power source are turned off. Controller 150 then turns on valves 300 and 302 to supply process and purge gases to showerhead 140 and collar 142, respectively, while processing substrate 112 in processing chamber 108.

[0102] In some implementations, when the controller 150 provides RF power to the showerhead 140 to activate the cleaning gas dispersing from the collar 142 into the processing chamber 108, the controller 150 can sequentially ground different portions of the processing chamber 108. For example, the top plate and sidewalls of the processing chamber 108 can be connected to ground via switches 350 and 352, and the pedestal 104 can be connected to ground via switch 354. The controller 150 can sequentially ground the top plate and sidewalls of the processing chamber 108 and the pedestal 104 by selectively turning on and off the switches 350, 352, and 354. The sequential grounding can focus the plasma cleaning to specific regions or areas of the grounded processing chamber 108.

[0103] For example, the controller 150 can first ground only the top plate of the processing chamber 108 above the showerhead 140 by turning on switch 350 and turning off switches 352 and 354. Then, the controller 150 can ground only the sidewalls of the processing chamber 108 by turning on switch 352 and turning off switches 350 and 354. Then, the controller 150 can ground only the pedestal 104 by turning on switch 354 and turning off switches 350 and 352. In some examples, different sequences may be followed.

[0104] Alternatively, the controller 150 can first ground only the top plate of the processing chamber 108 above the showerhead 140 by turning on switch 350 and turning off switches 352 and 354. The controller 150 can then further ground only the sidewalls of the processing chamber 108 by turning on switch 350 and turning on switch 352 while leaving switch 354 turned off. The controller 150 can then further ground the pedestal 104 by turning on switch 354 while leaving switches 350 and 352 turned on. In some examples, different sequences may follow. In some implementations, the body of the processing chamber 108 (i.e., the top plate and sidewalls) and the pedestal 104 may be grounded together (i.e., by turning on switches 350-354 together) rather than sequentially.

[0105] In the third cleaning method, the cleaning gas from the cleaning gas source 180 is first pre-activated in the remote plasma generator 182. The controller 150 turns on the valve 304 to supply the cleaning gas from the cleaning gas source 180 to the remote plasma generator 182. The controller 150 then turns on the valve 310 to supply the pre-activated cleaning gas from the remote plasma generator 182 to the showerhead 140 of the processing chamber 108.

[0106] In addition, the controller 150 supplies an inert gas to the collar 142 of the showerhead 140. The inert gas is typically supplied to the showerhead 140 from the manifold 128 during substrate processing. To instead supply the inert gas from the manifold 128 to the collar 142, the controller 150 turns on valve 312. In the third cleaning method, the valves 300-308 remain off.

[0107] The controller 150 provides RF power to the showerhead 140. The RF power activates an inert gas that disperses from a collar 142 above the backside of the showerhead 140 into the processing chamber 108. The activated inert gas allows the pre-activated cleaning gas entering the processing chamber 108 from the showerhead 140 to react with residues that may have been deposited above the backside of the showerhead 140 and elsewhere in the processing chamber 108 during substrate processing. A plasma is generated using the pre-activated cleaning gas and the inert gas to clean these areas.

[0108] The pre-activated cleaning gas and inert gas are supplied to the showerhead 140 and collar 142, respectively, and RF power is supplied to the showerhead 140 for a predetermined period of time. After the predetermined period of time, the controller 150 turns off the valves 310 and 312, turning off the RF power to the showerhead 140. The controller 150 then turns on the valves 300 and 302, supplying the process gas and the purge gas to the showerhead 140 and collar 142, respectively, while processing the substrate 112 in the processing chamber 108. In some implementations, during the third cleaning method, the controller 150 can use the sequential grounding described above with respect to the second cleaning method.

[0109] 4 illustrates a first method 400 for cleaning the area above the backside of the showerhead 140 and within the processing chamber 108. The method 400 is performed by the controller 150. At 402, the method 400 determines whether to clean the processing chamber 108. At 404, if the processing chamber 108 is to be cleaned, the method 400 first turns off the supply of process gas and purge gas to the showerhead 140 and collar 142, respectively, that are used while processing a substrate in the processing chamber 108. Next, the method 400 pre-activates the cleaning gas in the remote plasma generator 182.

[0110] At 406, the method 400 supplies a pre-activated cleaning gas from the remote plasma generator 182 to the collar 142 of the showerhead 140. At this point, no fluid is supplied to the showerhead 140 and through the showerhead 140 into the processing chamber 108. The pre-activated cleaning gas is dispersed into the processing chamber 108 through the collar 142 in areas above the backside of the showerhead 140. The pre-activated cleaning gas reacts with and cleans residues that may have been deposited in these areas during processing of the substrate.

[0111] The method 400 supplies the pre-activated cleaning gas for a predetermined period of time at which time the cleaning operation is completed. At 408, the method 400 checks whether the predetermined period of time has elapsed, after which the method 400 stops the cleaning operation. At this point, the method 400 stops supplying the pre-activated cleaning gas to the collar 142 of the showerhead 140. The substrate can then be processed in the processing chamber 108, and a process gas and a purge gas can be supplied to the showerhead 140 and the collar 142, respectively, while the substrate is being processed.

[0112] 5 illustrates a second method 500 for cleaning the area above the backside of the showerhead 140 and within the processing chamber 108. The method 500 is implemented by the controller 150. At 502, the method 500 determines whether to clean the processing chamber 108. At 504, if the processing chamber 108 is to be cleaned, the method 500 first turns off the supply of process gas and purge gas to the showerhead 140 and collar 142, respectively, that are used while processing a substrate in the processing chamber 108. The method 500 then supplies a cleaning gas into the processing chamber 108 via the collar 142 of the showerhead 140. At this point, no fluid is supplied to the showerhead 140 and through the showerhead 140 into the processing chamber 108.

[0113] At 506, the method 500 supplies RF power to the showerhead 140 while supplying a cleaning gas to the collar 142. The pedestal and / or chamber body are grounded. The RF power activates the cleaning gas that is dispersed into the processing chamber 108 through the collar 142 above the backside of the showerhead 140. The activated cleaning gas reacts with and cleans residues that may have accumulated in these areas during processing of the substrate.

[0114] The method 500 supplies the cleaning gas to the collar 142 and activates the cleaning gas in the processing chamber 108 for a predetermined period of time at which time the cleaning operation is completed. At 508, the method 500 checks whether the predetermined period of time has elapsed, after which the method 500 stops the cleaning operation. At this point, the method 500 stops supplying the cleaning gas to the collar 142 and also stops supplying RF power to the showerhead 140 to activate the cleaning gas. A substrate can then be processed in the processing chamber 108, and a process gas and a purge gas can be supplied to the showerhead 140 and the collar 142, respectively, while the substrate is being processed.

[0115] 6 illustrates a third method 600 for cleaning the area above the backside of the showerhead 140 and within the processing chamber 108. The method 600 is performed by the controller 150. At 602, the method 600 determines whether to clean the processing chamber 108. At 604, if the processing chamber 108 is to be cleaned, the method 600 first turns off the supply of process gas and purge gas to the showerhead 140 and collar 142, respectively, that are used while processing a substrate in the processing chamber 108. Next, the method 600 pre-activates the cleaning gas in the remote plasma generator 182.

[0116] At 606, the method 600 supplies a pre-activated cleaning gas from the remote plasma generator 182 to the showerhead 140 and through the showerhead 140 into the processing chamber 108. At 608, the method 600 further supplies an inert gas to the collar 142 of the showerhead 140 and through the collar 142 into the processing chamber 108. At 610, the method 600 supplies RF power to the showerhead 140 while supplying the inert gas to the collar 142 and supplying the pre-activated cleaning gas to the showerhead 140. The pedestal and / or chamber body are grounded.

[0117] The RF power activates the inert gas that is dispersed into the processing chamber 108 through the collar 142 above the backside of the showerhead 140. The activated inert gas enables the pre-activated cleaning gas to react with residues that may have accumulated above the backside of the showerhead 140 and elsewhere in the processing chamber 108, cleaning these areas.

[0118] The method 600 supplies the pre-activated cleaning gas and inert gas to the showerhead 140 and collar 142, respectively, and activates the inert gas for a predetermined period of time at which the cleaning operation is completed. At 612, the method 600 checks whether the predetermined period of time has elapsed, after which the method 600 stops the cleaning operation. At this point, the method 600 stops the supply of the pre-activated cleaning gas and inert gas to the showerhead 140 and collar 142, respectively, and also stops the supply of RF power to the showerhead 140 to activate the inert gas. The substrate can then be processed in the processing chamber 108, and the process gas and the purge gas can be supplied to the showerhead 140 and collar 142, respectively, while the substrate is being processed.

[0119] FIG. 7 illustrates a first example of a method 700 that can be used to ground different portions of the processing chamber 108 during cleaning of the processing chamber 108. The method 700 is performed by the controller 150 while performing methods 500 and 600. At 702, the method 700 determines whether RF power is provided to the showerhead 140 (e.g., elements 506 and 610 of FIGS. 5 and 6). At 704, if RF power is provided to the showerhead 140, the method 700 grounds only the top plate of the processing chamber 108 above the showerhead 140 by turning on switch 350 and turning off switches 352 and 354. At 706, the method 700 grounds only the sidewalls of the processing chamber 108 by turning on switch 352 and turning off switches 350 and 354. At 708, the method 700 grounds only the pedestal 104 by turning on switch 354 and turning off switches 350 and 352.

[0120] FIG. 8 illustrates a second example of a method 800 that can be used to ground different portions of the processing chamber 108 during cleaning of the processing chamber 108. The method 800 is performed by the controller 150 while performing the methods 500 and 600. At 802, the method 800 determines whether RF power is provided to the showerhead 140 (e.g., elements 506 and 610 of FIGS. 5 and 6). At 804, if RF power is provided to the showerhead 140, the method 800 first grounds only the top plate of the processing chamber 108 above the showerhead 140 by turning on switch 350 and turning off switches 352 and 354. At 806, the method 800 further grounds only the sidewalls of the processing chamber 108 by turning on switch 350 and turning on switch 352 while leaving switch 354 off. At 808, the method 800 further grounds the pedestal 104 by turning on switch 354 while leaving switches 350 and 352 on.

[0121] 9 illustrates a flow model of the processing chamber 108. The flow model demonstrates that fluids, such as purge gases, flow near the edge of the showerhead without recirculation while processing a substrate in the processing chamber 108. The flow model also demonstrates that fluids, such as cleaning gases and inert gases used during different cleaning methods, flow near the edge of the showerhead without recirculation.

[0122] Figure 10 shows an alternative configuration to Figure 3 with a grounded showerhead and powered pedestal. In some implementations, instead of providing RF power to the showerhead and grounding the pedestal, RF power may be provided to the pedestal and the showerhead may be grounded. All elements in Figure 10 are the same as Figure 3, except that RF generation system 130 provides RF power to pedestal 104 and switch 354 is controlled to ground the showerhead 140.

[0123] During cleaning, an externally preactivated cleaning gas can be injected into the chamber through the collar as described above. Alternatively, a cleaning gas can be injected into the chamber through the collar and a plasma can be generated by applying RF power to the pedestal. Alternatively, an externally preactivated cleaning gas can be injected into the chamber through the showerhead, an inert gas can be injected through the collar and a plasma can be generated by applying RF power to the pedestal. Furthermore, in each of these alternatives, the showerhead, as well as the top plate and sidewalls of the chamber, can be grounded in turn in a similar manner as described above, except that the showerhead is grounded instead of the pedestal.

[0124] Additionally, in either configuration (powered showerhead with a grounded pedestal, or grounded showerhead and powered pedestal), the pedestal may include an electrostatic chuck, a vacuum chuck, or no chucking function (gravity to keep the wafer in contact with the pedestal). Additionally, the RF power supplied to the showerhead or pedestal may include high frequency (3-60 MHz) and low frequency (100-1000 KHz).

[0125] The foregoing description is merely exemplary in nature and is not intended to limit the disclosure, its application, or uses. The broad teachings of the disclosure can be embodied in various forms. Thus, while the disclosure includes specific examples, the true scope of the disclosure should not be limited to such examples, since other modifications will become apparent upon review of the drawings, the specification, and the following claims. It should be understood that one or more steps in a method may be performed in a different order (or simultaneously) without altering the principles of the disclosure. Furthermore, although each embodiment is described as having certain features, any one or more of these features described with respect to any embodiment of the disclosure can be implemented in other embodiments and / or combined with any features of the other embodiments (even if such combination is not explicitly described). In other words, the described embodiments are not mutually exclusive, and it is within the scope of the disclosure to substitute one or more embodiments for one another.

[0126] Spatial and functional relationships between elements (e.g., modules, circuit elements, semiconductor layers, etc.) are described using various terms such as "connected," "engaged," "coupled," "adjacent," "next to," "on," "above," "below," and "disposed." Also, when a relationship between a first element and a second element is described in the above disclosure, unless expressly described as "direct," the relationship may be a direct relationship in which there are no other intervening elements between the first element and the second element, but may also be an indirect relationship in which there are one or more intervening elements (spatial or functional) between the first element and the second element. As used herein, the phrase at least one of A, B, and C should be interpreted in the sense of a logic (A or B or C) using a non-exclusive logical OR, and not in the sense of "at least one of A, at least one of B, and at least one of C."

[0127] In some implementations, the controller is part of a system, such as may be part of the examples described above. Such systems may include semiconductor processing equipment including one or more processing tools, one or more chambers, one or more processing platforms, and / or specific processing components (pedestals, gas flow systems, etc.). These systems may be integrated with electronics for controlling system operation before, during, and after processing of a semiconductor wafer or substrate. Such electronics may be referred to as a "controller" and may control various components or subcomponents of one or more systems.

[0128] The controller may be programmed to control any of the processes disclosed herein depending on the processing requirements and / or type of system, including process gas delivery, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, RF generator settings, RF matching circuit settings, frequency settings, flow rate settings, fluid delivery settings, position and motion settings, wafer loading and unloading to and from the tool, and other transport tools and / or load locks connected or interfaced with the particular system.

[0129] Broadly, a controller may be defined as an electronic device having various integrated circuits, logic, memory, and / or software that receives instructions, issues instructions, controls operations, enables cleaning operations, enables endpoint measurements, etc. Integrated circuits may include chips in the form of firmware that store program instructions, digital signal processors (DSPs), chips defined as application specific integrated circuits (ASICs), and / or one or more microprocessors, i.e., microcontrollers, that execute program instructions (e.g., software).

[0130] Program instructions may be instructions communicated to the controller in the form of various individual settings (or program files) that define operational parameters for performing a particular process on or for a semiconductor wafer or for a system. The operational parameters may, in some embodiments, be part of a recipe defined by a process engineer for implementing one or more processing steps in the fabrication of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or wafer dies.

[0131] The controller, in some embodiments, may be part of a computer that is integrated or coupled with the system or otherwise networked to the system, or may be coupled to such a computer, or a combination thereof. For example, the controller may be in the "cloud" or all or part of a fab host computer system. This allows for remote access of wafer processing. The computer may allow remote access to the system to monitor the current progress of a fabrication operation, review the history of past fabrication operations, review trends or performance criteria from multiple fabrication operations, change parameters of a current process, set up processing steps following the current process, or initiate a new process.

[0132] In some examples, a remote computer (e.g., a server) can provide a process recipe to the system over a network. Such a network may include a local network or the Internet. The remote computer may include a user interface that allows entry or programming of parameters and / or settings, which are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data. Such data identifies parameters for each processing step that is performed during one or more operations. It should be understood that the parameters may be specific to the type of process being performed and the type of tool that the controller is configured to interface with or control.

[0133] Thus, as discussed above, the controller may be distributed, for example, by having one or more individual controllers networked together and working together toward a common purpose (such as the processes and controls described herein). An example of a distributed controller for such purposes would include one or more integrated circuits on the chamber in communication with one or more integrated circuits located remotely (e.g., at the platform level or as part of a remote computer) and coupled to control the processes in the chamber.

[0134] Exemplary systems may include, but are not limited to, a plasma etch chamber or module, a deposition chamber or module, a spin rinse chamber or module, a metal plating chamber or module, a cleaning chamber or module, a bevel edge etch chamber or module, a physical vapor deposition (PVD) chamber or module, a chemical vapor deposition (CVD) chamber or module, an atomic layer deposition (ALD) chamber or module, an atomic layer etch (ALE) chamber or module, an ion implantation chamber or module, a tracking chamber or module, and any other semiconductor processing system that may be associated with or used in the fabrication and / or manufacturing of semiconductor wafers.

[0135] As described above, depending on the process step or steps being performed by the tool, the controller may communicate with one or more other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, nearby tools, tools located throughout the factory, a main computer, another controller, or tools used for material transport to and from tool locations and / or load ports within a semiconductor manufacturing factory.

Claims

1. 1. A system for cleaning a processing chamber, comprising: a showerhead disposed on a pedestal within the processing chamber, the showerhead comprising: a stem portion connected to a top plate of the processing chamber and adapted to receive process gas during processing of a substrate mounted on the pedestal; and a head portion including a plurality of through holes for dispersing the process gas during the processing of the substrate; A shower head including: a collar surrounding the stem portion of the showerhead, defining a cavity, and including a plurality of slots extending outwardly from the cavity for dispersing a purge gas during the processing of the substrate; a gas source for providing a cleaning gas; a plasma generator external to the processing chamber that receives the cleaning gas from the gas source and generates a plasma; A controller, terminating the supply of the process gas and the purge gas to the stem and the collar of the showerhead, respectively, in response to the substrate not being processed in the processing chamber; a controller for delivering the plasma to the collar and through the slot into the processing chamber to clean an area around the showerhead and within the processing chamber; A system comprising:

2. 2. The system of claim 1, The system wherein the cleaning gas supplied during the cleaning is different from the purge gas supplied during the processing of the substrate.

3. 2. The system of claim 1, The system wherein the cleaning gas comprises a halogen species.

4. 2. The system of claim 1, The cleaning gas is nitrogen trifluoride (NF 3 ) or tetrafluoroethylene (C 2 F 4 ), the system.

5. 2. The system of claim 1, The system, wherein the controller is configured to provide the plasma for a predetermined period of time.

6. 2. The system of claim 1, Before and after the cleaning of the processing chamber, the controller Stopping the supply of the plasma to the collar; The process gas and the purge gas are supplied to the stem and collar of the showerhead, respectively, to process the substrate. The system is configured as follows.

7. 1. A system for cleaning a processing chamber, comprising: a showerhead disposed on a pedestal within the processing chamber, the showerhead comprising: a stem portion connected to a top plate of the processing chamber and adapted to receive process gas during processing of a substrate mounted on the pedestal; and a head portion including a plurality of through holes for dispersing the process gas during the processing of the substrate; A shower head including: a collar surrounding the stem portion of the showerhead, defining a cavity, and including a plurality of slots extending outwardly from the cavity for dispersing a purge gas during the processing of the substrate; a gas source for providing a cleaning gas; an RF generator for providing RF power; A controller, terminating the supply of the process gas and the purge gas to the stem and the collar of the showerhead, respectively, in response to the substrate not being processed in the processing chamber; delivering the cleaning gas to the collar and through the slot in the collar into the processing chamber; a controller that supplies the RF power to the showerhead to generate a plasma in the processing chamber to clean an area around the showerhead and within the processing chamber; A system comprising:

8. 8. The system of claim 7, The system wherein the cleaning gas supplied during the cleaning is different from the purge gas supplied during the processing of the substrate.

9. 8. The system of claim 7, The system wherein the cleaning gas comprises a halogen species.

10. 8. The system of claim 7, The cleaning gas is nitrogen trifluoride (NF 3 ) or tetrafluoroethylene (C 2 F 4 ), the system.

11. 8. The system of claim 7, The system, wherein the controller is configured to supply the RF power to the showerhead for a predetermined period of time.

12. 8. The system of claim 7, The system, wherein the controller is configured to sequentially ground the top plate of the processing chamber, the sidewall of the processing chamber, and the pedestal.

13. 8. The system of claim 7, The system, wherein the controller is configured to ground the top plate of the processing chamber, the sidewalls of the processing chamber, and the pedestal.

14. 8. The system of claim 7, Before and after the cleaning of the processing chamber, the controller Stopping the supply of the cleaning gas to the collar; The process gas and the purge gas are supplied to the stem and collar of the showerhead, respectively, to process the substrate. The system is configured as follows.

15. 1. A system for cleaning a processing chamber, comprising: a showerhead disposed on a pedestal within the processing chamber, the showerhead comprising: a stem portion connected to a top plate of the processing chamber and adapted to receive process gas during processing of a substrate mounted on the pedestal; and a head portion including a plurality of through holes for dispersing the process gas during the processing of the substrate; A shower head including: a collar surrounding the stem portion of the showerhead, defining a cavity, and including a plurality of slots extending outwardly from the cavity for dispersing a purge gas during the processing of the substrate; a gas source for providing a cleaning gas and an inert gas; a plasma generator external to the processing chamber that receives the cleaning gas and generates a first plasma; an RF generator for providing RF power; A controller, terminating the supply of the process gas and the purge gas to the stem and the collar of the showerhead, respectively, in response to the substrate not being processed in the processing chamber; delivering the first plasma to the stem portion of the showerhead and through the plurality of holes in the head portion of the showerhead into the processing chamber; supplying the inert gas to the collar and through the slot in the collar into the processing chamber; a controller that supplies the RF power to the showerhead to generate a second plasma in the processing chamber to clean an area around the showerhead and within the processing chamber; A system comprising:

16. 16. The system of claim 15, The system wherein the cleaning gas and the inert gas supplied during the cleaning are different from the process gas and the purge gas supplied during the processing of the substrate, respectively.

17. 16. The system of claim 15, The system wherein the cleaning gas comprises a halogen species.

18. 16. The system of claim 15, The cleaning gas is nitrogen trifluoride (NF 3 ) or tetrafluoroethylene (C 2 F 4 ), the system.

19. 16. The system of claim 15, The inert gas is argon (Ar), molecular nitrogen (N 2 ), and helium (He).

20. 16. The system of claim 15, the controller is configured to supply the first plasma and the inert gas to the stem and collar of the showerhead, respectively, for a predetermined period of time.

21. 16. The system of claim 15, The system, wherein the controller is configured to sequentially ground the top plate of the processing chamber, the sidewall of the processing chamber, and the pedestal.

22. 16. The system of claim 15, The system, wherein the controller is configured to ground the top plate of the processing chamber, the sidewalls of the processing chamber, and the pedestal.

23. 16. The system of claim 15, Before and after the cleaning of the processing chamber, the controller stopping the supply of the first plasma and the inert gas to the stem and the collar of the showerhead; The process gas and the purge gas are supplied to the stem and collar of the showerhead, respectively, to process the substrate. The system is configured as follows.

24. 1. A system for cleaning a processing chamber, comprising: a showerhead disposed on a pedestal within the processing chamber, the showerhead comprising: a stem portion connected to a top plate of the processing chamber and adapted to receive process gas during processing of a substrate mounted on the pedestal; and a head portion including a plurality of through holes for dispersing the process gas during the processing of the substrate; A shower head including: a collar surrounding the stem portion of the showerhead, defining a cavity, and including a plurality of slots extending outwardly from the cavity for dispersing a purge gas during the processing of the substrate; 1. A gas supply system comprising: supplying the process gas and the purge gas to the stem and collar of the showerhead, respectively, during the processing of the substrate; a gas supply system for supplying a cleaning gas during the cleaning of the processing chamber; a plasma generator external to the processing chamber, receiving the cleaning gas from the gas supply system; Generate plasma, a plasma generator that delivers the plasma to the collar and through the slot into the processing chamber to clean an area around the showerhead and within the processing chamber; A system comprising:

25. 25. The system of claim 24, The system wherein the cleaning gas supplied during the cleaning is different from the purge gas supplied during the processing of the substrate.

26. 25. The system of claim 24, The system wherein the cleaning gas comprises a halogen species.

27. 25. The system of claim 24, The cleaning gas is nitrogen trifluoride (NF 3 ) or tetrafluoroethylene (C 2 F 4 ), the system.

28. 25. The system of claim 24, The system, wherein the plasma generator is configured to provide the plasma for a predetermined period of time.

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