Acid generator, resist composition, method for producing resist pattern, and salt

Abstract

To provide an acid generator or the like and a resist composition which allow a resist pattern having a good pattern collapse margin (PCM) to be produced.SOLUTION: The acid generator or the like and the resist composition contain a salt represented by formula (I). [X represents an S atom or the like; m10 represents 0 or 1; R1-R3 each represent -X1-R10 or the like and X1 represents -CO-O-, -O-CO- or the like; R10 represents a specific group; R4-R6 each represent a halogen atom, a hydrocarbon group, -X1-R10 or the like; R7-R9 each represent a halogen atom, a hydrocarbon group, -X1-R10 or the like; A1-A3 each represent a hydrocarbon group; and Ar1-Ar3 each represent an aromatic hydrocarbon group or the like.]SELECTED DRAWING: None

Description

[Technical field]

[0001] The present invention relates to an acid generator, a resist composition, a method for producing a resist pattern, and a salt. [Background technology]

[0002] Patent Document 1 describes a resist composition that contains an acid generator that contains a salt represented by the following formula, and a resin that has an acid labile group. TIFF2025077020000001.tif25103 [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2021-178814 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention provides a salt that forms a resist pattern that has better pattern collapse resistance (PCM) than a resist pattern formed using a resist composition containing the above salt. [Means for solving the problem]

[0005] The present invention includes the following inventions. [1] An acid generator containing a salt represented by formula (I). TIFF2025077020000002.tif55153 [In formula (I), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1. When X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0. R 1 , R 2 and R 3 are each independently *-X 1 -R 10 or *-X1 -L 10 -X 2 -R 10 Represents. X 1 and X 2 are each independently *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (wherein * represents Ar 1 , Ar 2 , Ar 3 , benzene ring or L 10 ) represents the binding site with. L 10 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 10 represents a group represented by formula (IC). R 4 , R 5 and R 6 each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X 1 -R 10 or *-X 1 -L 10 -X 2 -R 10 The hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO- or -SO2-. R 7 , R 8 and R 9 each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X 1 -R 10 or *-X 1 -L 10 -X 2 -R 10 The hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO- or -SO2-. When X is a sulfur atom, R 7 and R 8 or R 8 and R 9 Combined, S +The -CH2- contained in the ring may be replaced by -O-, -S-, -CO-, -SO- or -SO2-. 7 and R 8 or R 8 and R 9 is S + and a single bond formed between two benzene rings connecting the two. A 1 , A 2 and A 3 each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group optionally having a substituent, and -CH2- contained in the hydrocarbon group optionally being replaced by -O-, -CO-, -S- or -SO2-. Ar 1 , Ar 2 and Ar 3 each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m1 represents an integer of 0 to 5, and when m1 is 2 or greater, the groups in multiple parentheses may be the same or different. m2 represents an integer of 0 to 5, and when m2 is 2 or greater, the groups in multiple parentheses may be the same or different. m3 represents an integer of 0 to 5, and when m3 is 2 or greater, the groups in multiple parentheses may be the same or different. m4 represents an integer of 0 to 4, and when m4 is 2 or more, a plurality of R 4 may be the same or different from each other. m5 represents an integer of 0 to 4, and when m5 is 2 or more, a plurality of R 5 may be the same or different from each other. m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R 6 may be the same or different from each other. m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R 7 may be the same or different from each other. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R 8 may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R 9 may be the same or different from each other. However, 0≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5, and at least one of m1, m2, m3, m7, m8, and m9 represents an integer of 1 or more; R 1 , R 2 , R 3 , R 7 , R 8 and R 9 At least one of the following is *-X 1 -R 10 or *-X 1 -L 10 -X 2 -R 10 Represents. A represents a nitrogen atom or a carbon atom. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. nb5 represents an integer of 2 or 3, and when A is a nitrogen atom, nb5=2 is satisfied, and when A is a carbon atom, nb5=3 is satisfied, and the groups in the multiple parentheses may be the same or different from each other, and the two groups in the two parentheses may be joined together to form a ring containing A.] TIFF2025077020000003.tif2571(in formula (IC), R A represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R A are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 1 or 2. L 12 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * indicates a binding site.) [2]A 1 But, **-X 01 -L 01 -or**-L 01 -X 01 - and A 2 But, **-X 02 -L 02 -or**-L 02 -X 02 - and A 3 But, **-X 03 -L 03 -or**-L 03 -X 03 - and X 01 , X 02 and X 03 each independently represents -O-, -CO-, -S- or -SO2-; L 01 , L 02 and L 03 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), ** is X + and a bonding site on the benzene ring to which the compound is bonded. [3]X 01 , X 02 and X 03 each independently represents -O- or -S-. [4] L 01 , L 02 and L 03are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). [5] The acid generator according to any one of [1] to [4], wherein X is a sulfur atom. [6] Ar 1 , Ar 2 and Ar 3 each independently represents a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring. [7]R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 and R 9 The acid generator according to any one of [1] to [6], wherein the total number of groups represented by formula (IC) contained in [8] A resist composition comprising the acid generator according to any one of [1] to [7]. [9] The resist composition according to [8], further comprising a compound having a phenolic hydroxy group or a benzoic carboxy group, or a compound in which the phenolic hydroxy group or the benzoic carboxy group of such a compound is protected with an acid labile group.

[10] The resist composition according to [8] or [9], further comprising a resin containing one or more structural units represented by formula (a2): TIFF2025077020000004.tif4095[In formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced. R a28represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group optionally having a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. L a22 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. na2 represents an integer of 1 to 5. When na2 is 2 or more, a plurality of L a22 may be the same or different.

[11] At least one structural unit represented by formula (a2) The resist composition according to

[10] , which contains one or more structural units represented by formula (a2-A): TIFF2025077020000005.tif31128[In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or greater, the groups in the multiple parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer from 0 to 2.

[12] At least one structural unit represented by formula (a2) The resist composition according to

[10] or

[11] , which contains a structural unit represented by formula (a2-D): TIFF2025077020000006.tif51106[In formula (a2-D), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 5. When nD2 is 2 or more, the groups in the multiple parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27 may be the same or different from each other. However, 1≦nD2+nD22≦5.

[13] The resist composition according to any one of [8] to

[12] , further comprising a salt that generates an acid having a weaker acidity than the acid generated from the acid generator.

[14] The resist composition according to any one of [8] to

[13] , wherein the content of the salt represented by formula (I) in the solid content of the resist composition is 80 mass % or more.

[15] (1) A step of applying the resist composition according to any one of [8] to

[14] onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) A method for producing a resist pattern, comprising the step of developing the composition layer after heating.

[16] A salt represented by the above formula (I).

[17] A 1 But, **-X 01 -L 01 -or**-L 01 -X 01 - and A 2 But, **-X 02 -L 02 -or**-L 02 -X 02 - and A 3 But, **-X 03 -L 03 -or**-L 03 -X 03 - and X 01 , X 02 and X 03 each independently represents -O-, -CO-, -S- or -SO2-; L 01 , L 02 and L 03each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), ** is X + and the benzene ring is bonded to the salt according to

[16] .

[18] X 01 , X 02 and X 03 are each independently -O- or -S-.

[19] L 01 , L 02 and L 03 are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-).

[20] The salt according to any one of

[16] to

[19] , wherein X is a sulfur atom.

[21] Ar 1 , Ar 2 and Ar 3 are each independently a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

[22] R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 and R 9 The salt according to any one of

[16] to

[21] , wherein the total number of groups represented by formula (IC) contained in Effect of the Invention

[0006] By using a resist composition that uses the salt of the present invention, a resist pattern with good pattern collapse resistance (PCM) can be produced. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] In this specification, "(meth)acrylic monomer" means "at least one of acrylic monomer and methacrylic monomer". The expressions "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. In the group described in this specification, both a straight chain structure and a branched structure may be used. When -CH2- contained in a hydrocarbon group or the like is replaced with -O-, -S-, -CO- or -SO2-, the same example applies to each group, and the number of carbon atoms before the replacement is the number of carbon atoms of the hydrocarbon group or the like. "Combined group" means a group in which two or more of the exemplified groups are bonded, and the valence of these groups may be appropriately changed depending on the bond form. "Derived from" or "derived from" refers to a polymerizable C=C bond contained in the molecule becoming a -CC- group (single bond) by polymerization. When stereoisomers exist, all stereoisomers are included. Depending on the number of substituents, etc., hydrogen atoms in each group at any position and number may be replaced with bonds. The number of carbon atoms in a substituent is not included in the number of carbon atoms of the substituted group. An acid labile group means a group that, when contacted with an acid (e.g., trifluoromethanesulfonic acid, etc.), the leaving group is eliminated to form a hydrophilic group (e.g., a hydroxyl group or a carboxyl group, etc.). A base labile group means a group that, when contacted with a base (e.g., trimethylamine, etc.), the leaving group is eliminated to form a hydrophilic group (e.g., a carboxyl group or a hydroxyl group, etc.). In this specification, the term "solids content of a resist composition" refers to the sum of the components excluding the solvent (E), which will be described later, from the total amount of the resist composition.

[0008] <Salt represented by formula (I)> The present invention relates to a salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)"). In the salt (I), the side having a positive charge is sometimes called the "cation (I)" and the side having a negative charge is sometimes called the "anion (I)".

[0009] [Cation (I)] The cation (I) of the salt represented by formula (I) is a cation represented by formula (IC). TIFF2025077020000007.tif62156 [In formula (IC), all symbols have the same meaning as in formula (I)]

[0010] R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 and R 9 X in 1 is *-CO-O-, *-O- or *-O-CO-O- (* is Ar 1 , Ar 2 , Ar 3 or represents the bonding site with the benzene ring. R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 and R 9 X in 2 is *-CO-O-, *-O-CO- or *-O-CO-O- (* is L 10 It is preferable that the bond is *-CO-O- or *-O-CO-. R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 and R 9 L included in 10 Examples of the hydrocarbon group in include chain hydrocarbon groups such as an alkanediyl group, monocyclic or polycyclic (including spiro ring) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be a group consisting of a combination of two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and an alkanediyl group). Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl groups. The terminal of the branched alkanediyl group may be an alkyl group such as a methyl group. The chain hydrocarbon group preferably has 1 to 18 carbon atoms, more preferably 1 to 12 carbon atoms, even more preferably 1 to 9 carbon atoms, still more preferably 1 to 6 carbon atoms, and even more preferably 1 to 4 carbon atoms. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following groups: The binding site may be any position. TIFF2025077020000008.tif46168Specifically, the alicyclic hydrocarbon group may be a monocyclic divalent alicyclic hydrocarbon group such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, or a cyclooctane-1,5-diyl group, and the like. Examples of the divalent alicyclic hydrocarbon group include a cycloalkyl group such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, spirocyclohexane-1,2'-cyclopentane group, and spiroadamantane-2,3'-cyclopentane group, and a polycyclic cycloalkanediyl group such as a spiro ring having a cycloalkyl group bonded to a norbornyl group or an adamantyl group via a spiro bond. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and further preferably 6 to 10. Examples of the group combining two or more types include a group combining an alicyclic hydrocarbon group with an alkanediyl group, a group combining an aromatic hydrocarbon group with an alkanediyl group, and a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group. In the combination, two or more types of each of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. In addition, when any group is X 1 Or X 2 may be bound to Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-, and the like. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-. L 10 The --CH2-- contained in the hydrocarbon group having 1 to 28 carbon atoms may be replaced with --O--, --S--, --SO2-- or --CO--. L 10 When --CH2-- contained in the hydrocarbon group having 1 to 28 carbon atoms is replaced with --O--, --S--, --SO2-- or --CO--, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the hydrocarbon group. Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), an oxy group (a group in which -CH2- in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- in a methylene group is replaced with -S-), a sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), an alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), an alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), an alkoxycarbonyl group (a group in which -CH 2-CH2- is replaced by -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced by -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced by -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced by -O- an alkanediyloxycarbonyl group (an alkanediyl group in which -CH2-CH2- at any position is replaced with -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced with -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced with -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced with -SO2-),Examples of such groups include an alkanediylthio group (a group in which -CH- at any position in an alkanediyl group is replaced with -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group in which two or more of these groups are combined. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkylthio group includes an alkylthio group having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediyloxy group includes an alkanediyloxy group having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediylthio group includes an alkanediylthio group having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0011] Examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the following groups. -O- or -CO- in the groups shown below may be replaced by -S- or -SO2-, respectively. The bonding site may be at any position. TIFF2025077020000009.tif46168

[0012] L 10 The substituents which may be contained in L include a halogen atom and a cyano group. 10 In the case of a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. 10 The -CH2- in the chain hydrocarbon group such as the alkyl group in the formula (I) is replaced with -O-, -CO-, -S- or -SO2-, thereby forming L 1can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, or an alkylsulfonyl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 10 The substituent in is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxyl group or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and further preferably a methyl group or a fluorine atom.

[0013] L 10 may be a chain hydrocarbon group having 1 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-) or a group combining a chain hydrocarbon group having 1 to 8 carbon atoms with an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or an alkanediyl group having 1 to 10 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O - or -CO-) or a group combining an alkanediyl group having 1 to 4 carbon atoms with an alicyclic hydrocarbon group having 3 to 12 carbon atoms (-CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced by -O- or -CO-), more preferably an alkanediyl group having 1 to 6 carbon atoms, even more preferably an alkanediyl group having 1 to 3 carbon atoms, and even more preferably a methylene group.

[0014] R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 and R 9 R included in 10 is a group represented by formula (IC). TIFF2025077020000010.tif2571[In formula (IC), R A represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R A are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 1 or 2. L 12 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. * denotes a binding site.]

[0015] L 12 Examples of the hydrocarbon group having 1 to 36 carbon atoms include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkanediyl groups, alkenediyl groups, and alkynediyl groups, and monocyclic or polycyclic alicyclic hydrocarbon groups), and aromatic hydrocarbon groups, and may be a hydrocarbon group formed by combining two or more of these groups. 12 The --CH2-- contained in the hydrocarbon group in the formula (I) may be replaced by --O--, --S--, --CO-- or --SO2--. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, and a dodecane-1,12-diyl group; Branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. Examples include: Examples of the alkenediyl group include an ethenediyl group, a propenediyl group, an isopropenediyl group, a butenediyl group, an isobutenediyl group, a tert-butenediyl group, a pentenediyl group, a hexenediyl group, a heptenediyl group, an octenediyl group, an isooctenediyl group, and a nonenediyl group. Examples of the alkynediyl group include an ethynediyl group, a propynediyl group, an isopropynediyl group, a butynediyl group, an isobutynediyl group, a tert-butynediyl group, a pentynediyl group, a hexynediyl group, an octynediyl group, and a nonynediyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 24, more preferably 1 to 18, even more preferably 1 to 12, still more preferably 1 to 9, even more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0016] L 12 When -CH2- in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-, the number of carbon atoms before the replacement is L 12 The total number of carbon atoms in the hydrocarbon group is defined as the total number of carbon atoms in the hydrocarbon group. The number may be one or more than one. Examples of the group in which -CH2- in an alkanediyl group is replaced by -O-, -S-, -CO- or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), an oxy group (a group in which -CH2- in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- in a methylene group is replaced by -SO2-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), an alkanediyloxy group (an alkanediyloxy ... Examples of such an alkanediyl group include an alkanediyl group in which -CH- at any position is replaced with -O-), an alkanediyloxycarbonyl group (a group in which -CH-CH- at any position is replaced with -O-CO-), an alkanediylcarbonyl group (a group in which -CH- at any position in an alkanediyl group is replaced with -CO-), an alkanediylcarbonyloxy group (a group in which -CH-CH- at any position in an alkanediyl group is replaced with -CO-O-), an alkanediylthio group (a group in which -CH- at any position in an alkanediyl group is replaced with -S-), and an alkanediylsulfonyl group (a group in which -CH- at any position in an alkanediyl group is replaced with -SO-). Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 35 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, a hexanediyloxy group, an octanediyloxy group, a 2-ethylhexanediyloxy group, a nonanediyloxy group, a decanediyloxy group, an undecanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 17, more preferably 1 to 12, further preferably 1 to 8, and further more preferably 1 to 5. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 35 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, pentanediyloxycarbonyl group, hexanediyloxycarbonyl group, octanediyloxycarbonyl group, 2-ethylhexanediyloxycarbonyl group, nonanediyloxycarbonyl group, decanediyloxycarbonyl group, undecanediyloxycarbonyl group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 17, more preferably 2 to 12, further preferably 2 to 8, and further more preferably 2 to 5. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 36 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, a pentanediylcarbonyl group, a hexanediylcarbonyl group, an octanediylcarbonyl group, a 2-ethylhexanediylcarbonyl group, a nonanediylcarbonyl group, a decanediylcarbonyl group, an undecanediylcarbonyl group, etc. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 18, more preferably 2 to 12, further preferably 2 to 8, and further more preferably 2 to 5. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 35 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, a butanediylcarbonyloxy group, a pentanediylcarbonyloxy group, a hexanediylcarbonyloxy group, an octanediylcarbonyloxy group, a 2-ethylhexanediylcarbonyloxy group, a nonanediylcarbonyloxy group, a decanediylcarbonyloxy group, an undecanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 17, more preferably 2 to 12, even more preferably 2 to 8, and even more preferably 2 to 5. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 35 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, a butanediylthio group, a pentanediylthio group, a hexanediylthio group, a heptanediylthio group, an octanediylthio group, a nonanediylthio group, a decanediylthio group, an undecanediylthio group, a dodecanediylthio group, a 2-methylpropanediylthio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 17, more preferably 1 to 12, still more preferably 1 to 8, and still more preferably 1 to 5. The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 17, more preferably 1 to 12, further preferably 1 to 8, and further more preferably 1 to 5. In addition, the substitutions in the alkenediyl group and alkynediyl group may include a carbon-carbon double bond or a carbon-carbon triple bond at any position in the above-mentioned examples of substitutions in the alkanediyl group.

[0017] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below. The bonding site may be any position. TIFF2025077020000011.tif46169Specifically, examples of monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclohexene-3,6-diyl group, and cyclooctane-1,5-diyl group. Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-1,5-diyl group, and Examples of such cycloalkanediyl groups include polycyclic cycloalkanediyl groups such as 5-norbornene-2,5-diyl group, 5-norbornene-2,3-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group; cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane group and spiroadamantane-2,3'-cyclopentane group; and spiro rings having a cycloalkyl group bonded to a norbornyl group or an adamantyl group via a spiro bond. The alicyclic hydrocarbon group preferably has 3 to 24 carbon atoms, more preferably 3 to 18 carbon atoms, further preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. Examples of the group in which -CH2- in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the groups shown below. Also included are the groups shown below in which -O- is replaced by -S- and -CO- is replaced by -SO2-. The bonding site may be any position. TIFF2025077020000012.tif46169 Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 24, more preferably 6 to 18, still more preferably 6 to 14, and even more preferably 6 to 10. When -CH2- in a hydrocarbon group is replaced by -O-, -S-, -CO-, or -SO2-, the number of carbon atoms before the replacement is the total number of carbon atoms in the hydrocarbon group. In addition, the number may be 1 or 2 or more.

[0018] Examples of the hydrocarbon group combining two or more groups include a group combining an alkanediyl group with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group, and the combination may include a combination of two or more of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group. For example, -alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-aromatic hydrocarbon group-, -aromatic hydrocarbon group-alkanediyl group-, etc. Any of the groups may be bonded to an oxygen atom or a carbonyl group.

[0019] L 12 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a hydroxy group, a carboxy group, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkoxy group having 1 to 12 carbon atoms include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and a dodecyloxy group. The alkoxycarbonyl group having 2 to 13 carbon atoms, the alkylcarbonyl group having 2 to 13 carbon atoms, and the alkylcarbonyloxy group having 2 to 13 carbon atoms represent groups in which a carbonyl group or a carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group. Examples of the alkoxycarbonyl group having 2 to 13 carbon atoms include a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group having 2 to 13 carbon atoms include an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group having 2 to 13 carbon atoms include an acetyloxy group, a propionyloxy group, and a butyryloxy group. L 12 The hydrocarbon group in may have one or more substituents.

[0020] L 12 is preferably a single bond, an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O-, -S-, -SO2- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-), or a group combining an alkanediyl group having 1 to 6 carbon atoms with an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alkanediyl group and the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-), more preferably an alkanediyl group having 1 to 6 carbon atoms, even more preferably an alkanediyl group having 1 to 3 carbon atoms, and even more preferably a methylene group.

[0021] s1 is preferably 1, t1 is preferably 1, and the sum of s1 and t1 is preferably 2. The group represented by formula (IC) is preferably a group represented by the following formula: TIFF2025077020000013.tif2396

[0022] In the group represented by formula (IC), u1 is 1, and R A L 12 The group bonded to the carbon atom adjacent to is represented by the following formula: TIFF2025077020000014.tif3144R AExamples of the saturated hydrocarbon group include chain saturated hydrocarbon groups such as alkyl groups, alicyclic saturated hydrocarbon groups, and groups in which two or more of these groups are combined. R A Examples of the alkyl group include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, hexyl, octyl, nonyl, etc. The number of carbon atoms in the chain saturated hydrocarbon group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic saturated hydrocarbon group may be any of monocyclic, polycyclic and spirocyclic. Examples of the alicyclic saturated hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclooctyl, cyclononyl, cyclodecyl and cyclododecyl, and polycyclic cycloalkyl groups such as norbornyl and adamantyl. The number of carbon atoms in the alicyclic saturated hydrocarbon group is preferably 3 to 10, more preferably 3 to 8, and even more preferably 3 to 6. The combined group may be a group in which one chain saturated hydrocarbon group such as the above-mentioned alkyl group and one alicyclic saturated hydrocarbon group are combined, or a group in which two or more of either one or two or more of both are combined. R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 and R 9 The total number of groups represented by formula (IC) contained in is preferably 2 or more, and more preferably 3 or more. R 1 , R 2 and R 3 are each independently: -OR 10 , -CO-OR 10 , -O-CO-R 10 , -O-CO-OR 10 Or -OL 10 -CO-OR 10 Preferably, -OR10 , -CO-OR 10 , -O-CO-OR 10 Or -OL 10 -CO-OR 10 More preferably, -OR 10 Or -OL 10 -CO-OR 10 It is even more preferable that:

[0023] R 4 , R 5 , R 6 , R 7 , R 8 and R 9 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 4 , R 5 , R 6 , R 7 , R 8 and R 9 Examples of the hydrocarbon group having 1 to 18 carbon atoms include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. The alkyl group is a linear or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 9, still more preferably 1 to 6, still more preferably 1 to 4, and still more preferably 1 to 3. The alkanediyl group is a linear or branched alkanediyl group, such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, or a hexane-1,6-diyl group; and Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The chain hydrocarbon group preferably has 1 to 12 carbon atoms, more preferably 1 to 9 carbon atoms, even more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below. The bonding site may be any position. TIFF2025077020000015.tif46168Specifically, the monocyclic alicyclic hydrocarbon group includes monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, cyclononyl, cyclodecyl, and cyclododecyl. The polycyclic alicyclic hydrocarbon group includes polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl, cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane, and spiroadamantane-2,3'-cyclopentane, and spiro rings having cycloalkyl groups bonded to norbornyl or adamantyl groups via spiro. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and further preferably 6 to 10.

[0024] Examples of groups formed by combining two or more of the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group include a group formed by combining an aromatic hydrocarbon group with a chain hydrocarbon group (for example, an aromatic hydrocarbon group-alkanediyl group-*, an alkyl group-aromatic hydrocarbon group-*, an alkyl group-aromatic hydrocarbon group-alkanediyl group-*, where -CH2- contained in the alkanediyl group and the alkyl group may be replaced by -O-, -CO-, -S-, or -SO2-), a group formed by combining an alicyclic hydrocarbon group with a chain hydrocarbon group (for example, an alicyclic hydrocarbon group-alkanediyl group-*, Examples of such groups include an alkyl group-alicyclic hydrocarbon group-*, an alkyl group-alicyclic hydrocarbon group-alkanediyl group-*, an alkyl group-alicyclic hydrocarbon group-alkanediyl group-*, -CH2- contained in the alicyclic hydrocarbon group, the alkanediyl group and the alkyl group may be replaced with -O-, -CO-, -S- or -SO2-, and a group combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (for example, an aromatic hydrocarbon group-alicyclic hydrocarbon group-*, an alicyclic hydrocarbon group-aromatic hydrocarbon group-*, -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-). * represents a bonding site. The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group. Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group. Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group. Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenylcyclohexyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group. In the combination, two or more of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. 1 , Ar 2 , Ar 3 Alternatively, it may be bonded to a benzene ring.

[0025] R 4 , R 5 , R 6 , R 7 , R 8 and R 9 When -CH2- in the hydrocarbon group represented by the formula (I) is replaced by -O-, -CO-, -S-, -SO-, or -SO2-, the number of carbon atoms before the replacement is regarded as the total number of carbon atoms in the hydrocarbon group. In addition, the number may be 1 or 2 or more. Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -CO-, -S-, -SO- or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2 -CH2- is replaced by -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced by -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced by -O-CO-O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced by -S-), alkylsulfil group (a group in which -CH2- at any position in an alkyl group is replaced with -SO-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfyl group (a group in which -CH2- in a methylene group is replaced with -SO-), sulfonyl group (methylene an alkanediyloxy group (an alkanediyl group in which -CH2- at any position is replaced with -O-), an alkanediyloxycarbonyl group (an alkanediyl group in which -CH2- at any position is replaced with -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced with -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced withExamples of such groups include an alkanediyl group in which -CO-O- is replaced by -CO-O-, an alkanediylthio group (an alkanediyl group in which -CH- at any position is replaced by -S-), an alkanediylsulfyl group (an alkanediyl group in which -CH- at any position is replaced by -SO-), an alkanediylsulfonyl group (an alkanediyl group in which -CH- at any position is replaced by -SO-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group in which two or more of these groups are combined. Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as butoxycarbonyloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkylthio group includes an alkylthio group having 1 to 17 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkylsulfyl group includes alkylsulfyl groups having 1 to 17 carbon atoms, such as methylsulfyl group, ethylsulfyl group, propylsulfyl group, butylsulfyl group, pentylsulfyl group, hexylsulfyl group, octylsulfyl group, 2-ethylhexylsulfyl group, nonylsulfyl group, decylsulfyl group, undecylsulfyl group, etc. The number of carbon atoms in the alkylsulfyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 17 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediyloxy group includes an alkanediyloxy group having 1 to 17 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 17 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 17 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkanediylthio group includes an alkanediylthio group having 1 to 17 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediylsulfyl group includes an alkanediylsulfyl group having 1 to 17 carbon atoms, such as a methylenesulfyl group, an ethylenesulfyl group, a propylenesulfyl group, etc. The number of carbon atoms in the alkanediylsulfyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 18 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 17 carbon atoms, such as a phenyloxy group.

[0026] Examples of the group in which -CH2- in the alicyclic hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include the groups shown below. -O- or -CO- in the groups shown below may be replaced by -S- or -SO2-. The bonding site may be at any position. TIFF2025077020000016.tif46168

[0027] R 4 , R 5 , R 6 , R 7 , R 8 and R 9 The substituents which the hydrocarbon group may have include a halogen atom and a cyano group. Examples of the halogen atom include the same groups as those mentioned above. R 4 , R 5 , R 6, R 7 , R 8 and R 9 When R is a hydrocarbon group having a halogen atom, 4 , R 5 , R 6 , R 7 , R 8 and R 9 Examples of the hydrocarbon group having a halogen atom include a chain hydrocarbon group having a halogen atom, such as a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. Examples of the alkyl group having a halogen atom include haloalkyl groups having 1 to 12 carbon atoms, such as fluorinated alkyl groups having 1 to 12 carbon atoms, chlorinated alkyl groups having 1 to 12 carbon atoms, brominated alkyl groups having 1 to 12 carbon atoms, and iodinated alkyl groups having 1 to 12 carbon atoms. Examples of the haloalkyl groups include perfluoroalkyl groups having 1 to 12 carbon atoms (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The -CH2- contained in the haloalkyl group may be replaced by -O- or -CO-, and examples of such groups include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, haloalkylcarbonyloxy groups, etc. Specific examples include haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, etc., and examples thereof include groups in which one or more hydrogen atoms of the above-exemplified groups are replaced by halogen atoms. The hydrocarbon group may have one substituent or multiple substituents.

[0028] R 4 , R5 and R 6 each independently represents a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), -X 2 -R 10 or -X 2 -L 10 -X 3 -R 10 is preferable, an iodine atom, a fluorine atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), is more preferable, an iodine atom, a fluorine atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), is even more preferable, an iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, a haloalkyl group having 1 to 4 carbon atoms, or an alkoxy group having 1 to 3 carbon atoms is even more preferable, an iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkoxy group having 1 to 3 carbon atoms is even more preferable, and an iodine atom, a fluorine atom, a trifluoromethyl group, a methyl group, a methoxy group, an ethoxy group, or a hydroxy group is even more preferable. Also, in one embodiment, one or more R 4 , R 5 and R 6 At least one of the groups may contain a group represented by formula (IC), and R 4 , R 5 , R 6 are each independently R 1 , R 2 , R 3 R may be a group similar to 1 -OR 10 In the case of 1 or 2 R 4 R 1 Same as -OR 10 Preferably, R 1 -CO-OR 10In the case of 1 or 2 R 4 R 1 Same as -CO-OR 10 Preferably, R 1 Ga-O-CO-OR 10 In the case of 1 or 2 R 4 R 1 Same as -O-CO-OR 10 Preferably, R 1 Ga-OL 10 -CO-OR 10 In the case of 1 or 2 R 4 R 1 Same as -OL 10 -CO-OR 10 It is preferable that R 2 and R 5 Combination of R 3 and R 6 For each combination, R 1 and R 4 This is similar to the combination of

[0029] R 7 , R 8 and R 9 each independently represents a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), -X 2 -R 10 or -X 2 -L 10 -X 3 -R 10 is preferable, and a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced by -O- or -CO-), -OR 10 , -O-CO-OR 10 Or -OL 10 -CO-OR 10 More preferably, the alkyl group is a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), -OR10 , -O-CO-OR 10 Or -OL 10 -CO-OR 10 More preferably, the group is a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy group, a methoxy group, a methyl group, a t-butyl group, -OR 10 , -O-CO-OR 10 Or -OL 10 -CO-OR 10 It is even more preferable that: In another embodiment, R 4 , R 5 , R 6 , R 7 , R 8 and R 9 are each independently: -OR 10 , -CO-OR 10 , -O-CO-R 10 , -O-CO-OR 10 Or -OL 10 -CO-OR 10 Preferably, -OR 10 , -CO-OR 10 , -O-CO-OR 10 Or -OL 10 -CO-OR 10 More preferably, -OR 10 Or -OL 10 -CO-OR 10 It is even more preferable that:

[0030] Ar 1 , Ar 2 and Ar 3 Examples of the aromatic hydrocarbon group having 6 to 10 carbon atoms include groups derived from a benzene ring or a naphthalene ring, such as a phenylene group or a naphthylene group. 1 , Ar 2 and Ar 3 Examples of the heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms include groups derived from a furan ring, a thiophene ring, a benzofuran ring, a benzothiophene ring, or the like. Ar 1 , Ar 2 and Ar3 are each independently preferably a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring, and more preferably a group derived from a benzene ring.

[0031] A 1 , A 2 and A 3 Examples of the hydrocarbon group include linear or branched chain hydrocarbon groups (e.g., alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be a combination of two or more of these groups. The number of carbon atoms in the hydrocarbon group is preferably 1 to 19, more preferably 1 to 18, still more preferably 1 to 16, still more preferably 1 to 14, and still more preferably 1 to 12. Examples of the chain hydrocarbon group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The chain hydrocarbon group has preferably 1 to 18 carbon atoms, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below. The bonding site may be any position. TIFF2025077020000017.tif46168Specifically, monocyclic alicyclic hydrocarbon groups such as monocyclic cycloalkanediyl groups, such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group, and Examples of such groups include polycyclic alicyclic hydrocarbon groups, such as polycyclic cycloalkanediyl groups, such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl groups; cycloalkyl groups, such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane; and spiro rings having a cycloalkyl group bonded to a norbornyl group or an adamantyl group via a spiro bond. The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, further preferably 3 to 12 carbon atoms, and further preferably 3 to 10 carbon atoms. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and further preferably 6 to 10.

[0032] Examples of groups formed by combining include a group formed by combining an alicyclic hydrocarbon group with an alkanediyl group, a group formed by combining an aromatic hydrocarbon group with an alkanediyl group, and a group formed by combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group. In the combination, two or more types of chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups may be combined. Any of the groups may be bonded to a benzene ring. Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-. Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-, and the like. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-.

[0033] A 1 , A 2 and A 3 In the case where -CH2- in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, the number of carbon atoms before the replacement is regarded as the total number of carbon atoms in the hydrocarbon group. The number may be 1 or 2 or more, but is preferably 1 or 2. Examples of groups in which -CH2- in a hydrocarbon group is replaced by -O-, -CO-, -S-, or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2 -CH2- is replaced by -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced by -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced by -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced by -O-CO-O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced by -S-), alkyl Sulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-) an alkanediyloxycarbonyl group (an alkanediyl group in which -CH2-CH2- at any position is replaced with -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced with -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced with -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced with -SO2-),Examples of such groups include an alkanediylthio group (a group in which -CH- at any position in an alkanediyl group is replaced with -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group in which two or more of these groups are combined. Examples of the alkoxy group include alkoxy groups having 1 to 19 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 19 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 20 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 19 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 18 carbon atoms, such as butoxycarbonyloxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkylthio group includes an alkylthio group having 1 to 19 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkylsulfonyl group includes alkylsulfonyl groups having 1 to 19 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediyloxy group includes an alkanediyloxy group having 1 to 19 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 19 carbon atoms, such as methyleneoxycarbonyl group, ethyleneoxycarbonyl group, propanediyloxycarbonyl group, butanediyloxycarbonyl group, etc. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 20 carbon atoms, such as methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, pentanediylcarbonyl group, etc. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 19 carbon atoms, such as methylenecarbonyloxy group, ethylenecarbonyloxy group, propanediylcarbonyloxy group, butanediylcarbonyloxy group, etc. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The alkanediylsulfonyl group includes an alkanediylsulfonyl group having 1 to 19 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediylthio group includes an alkanediylthio group having 1 to 19 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 19 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 19 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyloxy group include aromatic hydrocarbon group-carbonyloxy groups having 7 to 19 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 20 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 19 carbon atoms, such as a phenyloxy group.

[0034] Examples of the group in which -CH2- in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include the groups shown below. Also included are the groups shown below in which -O- is replaced by -S- and -CO- is replaced by -SO2-. The bonding site may be any position. TIFF2025077020000018.tif46169A 1 , A 2 and A 3 The substituents that the hydrocarbon group may have include R 4 ~R 9 The substituents which the hydrocarbon group may have include the same groups as those exemplified above as the substituents which the hydrocarbon group may have.

[0035] A 1 , A 2 and A 3 are each independently a single bond or a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-. However, at least one of -CH2- contained in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-). Specifically, A 1 is***-L 011 -X 01-L 012 - and A 2 is***-L 021 -X 02 -L 022 - and A 3 is***-L 031 -X 03 -L 032 - is (X 01 , X 02 and X 03 Each independently represents -O-, -CO-, -S- or -SO2-. 011 , L 012 , L 021 , L 022 , L 031 and L 032 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. 011 and L 012 The total number of carbon atoms is 0 to 18. 021 and L 022 The total number of carbon atoms is 0 to 18. 031 and L 032 The total number of carbon atoms is 0 to 18. *** is Ar 1 , Ar 2 Or Ar 3 It is more preferable that A 1 is***-X 01 -L 01 -or***-L 01 -X 01 - and A 2 is***-X 02 -L 02 -or***-L 02 -X 02 - and A 3 is***-X 03 -L 03 -or***-L 03 -X 03 - is (X 01 , X 02 and X 03 Each independently represents -O-, -CO-, -S- or -SO2-.01 , L 02 and L 03 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. 1 , Ar 2 Or Ar 3 It is more preferable that A represents a binding site with 1 , A 2 and A 3 It is preferred that the group has no substituents other than the substitution with -O-, -CO-, -S- or -SO2-. L 011 , L 012 , L 021 , L 022 , L 031 , L 032 , L 01 , L 02 and L 03 The hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) may be a hydrocarbon group having 1 to 18 carbon atoms, 1 , A 2 and A 3 Examples of the groups include the same groups as those listed in the above. X 01 , X 02 and X 03 are each independently preferably -O- or -S-, and more preferably -O-. L 011 , L 012 , L 021 , L 022 , L 031 , L 032 , L 01 , L 02 and L 03are each independently preferably a single bond or a hydrocarbon group having 1 to 18 carbon atoms (-CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), more preferably a single bond or a hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), and are each independently preferably a single bond, a chain hydrocarbon group having 1 to 9 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or a group combining a chain hydrocarbon group having 1 to 4 carbon atoms with an alicyclic hydrocarbon group having 3 to 10 carbon atoms (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group is -O- , -CO-, -S- or -SO2-), still more preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), still more preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and still more preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among these, a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, a carbonyl group, a carbonyloxy group, a carbonyloxymethylene group, an ethyleneoxy group, an ethyleneoxymethylene group, a methylenecarbonyloxy group, a methylenecarbonyloxymethylene group, or an ethyleneoxycarbonyl group is preferred, and a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, or a carbonyl group is more preferred. 011 and L 012 The total number of carbon atoms is 0 to 18. 021 and L 022 The total number of carbon atoms is 0 to 18. 031 and L 032 The total number of carbon atoms is 0 to 18.

[0036] m1 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m2 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m3 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m4 is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m5 is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m6 is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m7 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m8 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m9 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0037] R 1 , R 2 and R 3 Ar 1 , Ar 2 and Ar 3 The bond position to Ar 1 , Ar 2 and Ar 3 are each independently a group derived from a benzene ring, 1 , A 2 and A3 The bonding position of A may be either o-position, m-position or p-position. 1 , A 2 and A 3 It is preferably bonded to the p-position or m-position, more preferably bonded to the p-position, relative to the bonding position of Ar 1 , Ar 2 and Ar 3 When A is a group derived from a naphthalene ring, for example, 1 , A 2 and A 3 When the bonding position of is the 1st position, it may be any of the 2nd to 8th positions. 1 , A 2 and A 3 When the bonding position of A is the 2-position, it may be any of the 1-position and the 3-8-positions. 1 , A 2 and A 3 When the bonding position of A is the 1st position, it is preferably bonded to the 3rd to 6th positions. 1 , A 2 and A 3 When the bonding position is the 2-position, it is preferably bonded to the 4- to 7-positions. R 4 , R 5 and R 6 Ar 1 , Ar 2 and Ar 3 The bonding position to Ar 1 , Ar 2 and Ar 3 are each independently a group derived from a benzene ring, 1 , A 2 and A 3 In particular, when m4, m5, and m6 are 1, R 4 , R 5 and R 6 are each independently 1 , A 2 and A 3 It is preferable that m4, m5, and m6 are bonded to the p-position or m-position, and more preferable that m-position is bonded to the m-position with respect to the bonding position of R 4 , R5 and R 6 are each independently 1 , A 2 and A 3 With respect to the bonding positions of R, it is preferable that one is bonded to the o-position or m-position, and one is bonded to the p-position or m-position, and it is more preferable that two are bonded to the m-position. 4 , R 5 and R 6 are each independently 1 , A 2 and A 3 With respect to the bonding positions of m4, m5, and m6, it is preferable that two of them are bonded to the o-position or m-position and one is bonded to the p-position or m-position, and it is more preferable that one is bonded to the o-position and two are bonded to the m-position. 4 , R 5 and R 6 are each independently 1 , A 2 and A 3 With respect to the bonding positions of Ar, it is preferable that two are bonded to the o-position or m-position, and two are bonded to the p-position or m-position, and it is more preferable that two are bonded to the o-position and two are bonded to the m-position. 1 , Ar 2 and Ar 3 When A is a group derived from a naphthalene ring, for example, 1 , A 2 and A 3 When the bonding position of is the 1st position, it may be any of the 2nd to 8th positions. 1 , A 2 and A 3 When the bonding position of A is the 2-position, it may be any of the 1-position and the 3-8-positions. 1 , A 2 and A 3 When the bonding position of A is the 1st position, it is preferable that at least one of A is bonded to the 3rd to 6th positions. 1 , A 2 and A 3 When the bonding position is the 2-position, at least one of them is preferably bonded to the 4- to 7-positions. R 7 , R 8 and R9 The bonding positions of X to the benzene ring are each independently + For example, R 7 , R 8 and R 9 The bonding positions of m1, m2, and m3 to the benzene ring are 0, and R 7 , R 8 and R 9 -OR 10 , -CO-OR 10 , -O-CO-R 10 , -O-CO-OR 10 Or -OL 10 -CO-OR 10 then, independently, X + The bonding position of X may be either o-position, m-position or p-position. + It is preferably bonded to the p-position or m-position, and more preferably bonded to the p-position, relative to the bonding position of the above. Among them, when m7, m8, and m9 are 1, R 7 , R 8 and R 9 are each independently, X + Preferably, m7, m8, and m9 are bonded to the p-position or m-position, and more preferably to the p-position, relative to the bonding position of R 7 , R 8 and R 9 are each independently, X + With respect to the bonding positions of m7, m8, and m9, it is preferable that one is bonded to the o-position or m-position and one is bonded to the p-position or m-position, and it is more preferable that one is bonded to the m-position and one is bonded to the p-position or m-position. 7 , R 8 and R 9 are each independently, X + With respect to the bonding positions of m7, m8, and m9, it is preferable that two of them are bonded to the o-position or m-position and one is bonded to the p-position or m-position, and it is more preferable that two are bonded to the m-position and one is bonded to the p-position. 7 , R 8 and R 9are each independently, X + With respect to the bonding positions of the above, it is preferable that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position, and it is more preferable that two are bonded to the m-position, one is bonded to the o-position, and one is bonded to the p-position.

[0038] A 1 , A 2 and A 3 X + The bonding positions of X to the benzene ring are each independently + The bonding position of X may be either o-position, m-position or p-position. + More specifically, when m1, m2, and m3 are 1, A 1 , A 2 and A 3 are each independently, X + It is preferable that m1, m2, and m3 are bonded to the p-position or m-position, and more preferable that m1, m2, and m3 are bonded to the p-position. 1 , A 2 and A 3 are each independently, X + With respect to the bonding positions of A, one is bonded to the o-position or m-position, preferably one is bonded to the o-position or m-position, and more preferably two are bonded to the m-position. 1 , A 2 and A 3 are each independently, X + With respect to the bonding positions of m1, m2, and m3, it is preferable that two of them are bonded to the o-position or m-position and one is bonded to the p-position or m-position, and it is more preferable that two are bonded to the m-position and one is bonded to the p-position. 1 , A 2 and A 3 are each independently, X + With respect to the bonding positions of the above, it is preferable that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position, and it is more preferable that two are bonded to the o-position and two are bonded to the m-position.

[0039] In addition, when X is a sulfur atom and m10=1, R 7 and R 8 or R 8 and R 9 and combine to form S + In particular, R 8 and R 9 Combined to form S + It is preferable that the cation is a cation represented by the formula (IC'). TIFF2025077020000019.tif51153[In formula (I-C'), R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , m1, m2, m3, m4, m5, m6, m7, m8, m9, A 1 , A 2 , A 3 , Ar 1 , Ar 2 , Ar 3 The symbols have the same meanings as above. X 7 represents a single bond, -CH2-, -O-, -S-, -CO-, -SO- or -SO2-.] X 7 is preferably a single bond, -CH2- or -O-.

[0040] Examples of the cation (I) represented by formula (IC) include cations represented by formula (IC-1) or formula (IC-2) (hereinafter, these may be referred to as "cation (IC-1)" and "cation (IC-2)", respectively). Examples of the cation represented by formula (I-C') include cations represented by formula (I-C'-1) (hereinafter, these may be referred to as "cation (I-C'-1)". TIFF2025077020000020.tif135165 [In formula (IC-1), formula (IC-2) and formula (I-C'-1), R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 , m1, m2, m3, m4, m5, m6, m7, m8, m9, L 01 , L 02 , L 03 , X 01 , X 02 , X 03 and X 7 The symbols have the same meanings as above.]

[0041] X 01 , X 02 and X 03 The bonding positions of A to the benzene ring are 1 , A 2 and A 3 The bonding position of the aryl group to the benzene ring is the same as that of the aryl group.

[0042] Examples of the cation of the salt (I) include the cations represented by the following formulae (Ic-1) to (Ic-390). TIFF2025077020000021.tif249141

[0043] TIFF2025077020000022.tif252163

[0044] TIFF2025077020000023.tif248152

[0045] TIFF2025077020000024.tif253152

[0046] TIFF2025077020000025.tif226144

[0047] TIFF2025077020000026.tif233152

[0048] TIFF2025077020000027.tif185149

[0049] TIFF2025077020000028.tif214161

[0050] TIFF2025077020000029.tif240163

[0051] TIFF2025077020000030.tif240143

[0052] TIFF2025077020000031.tif249151

[0053] TIFF2025077020000032.tif247161

[0054] TIFF2025077020000033.tif219157

[0055] TIFF2025077020000034.tif236161

[0056] TIFF2025077020000035.tif252158

[0057] TIFF2025077020000036.tif209161

[0058] TIFF2025077020000037.tif252167

[0059] TIFF2025077020000038.tif247150

[0060] TIFF2025077020000039.tif209161

[0061] TIFF2025077020000040.tif238146

[0062] TIFF2025077020000041.tif242164

[0063] TIFF2025077020000042.tif252154

[0064] TIFF2025077020000043.tif211153

[0065] TIFF2025077020000044.tif229163

[0066] TIFF2025077020000045.tif252161

[0067] TIFF2025077020000046.tif229167

[0068] TIFF2025077020000047.tif236160

[0069] TIFF2025077020000048.tif253162

[0070] TIFF2025077020000049.tif238158

[0071] TIFF2025077020000050.tif233153

[0072] TIFF2025077020000051.tif219161

[0073] TIFF2025077020000052.tif249153

[0074] TIFF2025077020000053.tif218165

[0075] [Anion (I)] The anion (I) of the salt represented by formula (I) is represented by formula (I-A3). TIFF2025077020000054.tif1184 [In formula (I-A3), all symbols have the same meaning as above.]

[0076] L b2 The divalent hydrocarbon group is a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, or a monovalent group formed by combining two or more of these groups, and is formed by removing one hydrogen atom to form Y b1 Examples of such groups include groups that bond to the The hydrocarbon group preferably has 1-48 carbon atoms, more preferably 1-42 carbon atoms, even more preferably 1-36 carbon atoms, even more preferably 1-30 carbon atoms, and even more preferably 1-24 carbon atoms. Examples of the chain hydrocarbon group include a group in which one hydrogen atom has been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentanedecyl group, and a heptadecyl group. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, even more preferably 1 to 20, still more preferably 1 to 18, even more preferably 1 to 12, and even more preferably 1 to 10. Alicyclic hydrocarbon groups include groups in which one hydrogen atom has been removed from a monocyclic or polycyclic cycloalkyl group. Examples of monocyclic cycloalkyl groups include cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups. Examples of polycyclic cycloalkyl groups include cycloalkyl groups having a bridged structure, cycloalkyl groups in which two or more rings are condensed, and cycloalkyl groups in which two rings are bonded by a spiro bond. Examples of cycloalkyl groups having a bridged structure include a norbornyl group and an adamantyl group. Examples of cycloalkyl groups in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of cycloalkyl groups in which two rings are bonded by a spiro bond include spirocyclic cycloalkyl groups in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group are bonded by a spiro bond to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, alicyclic hydrocarbon groups represented by the following formulas are included. TIFF2025077020000055.tif26168When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, even more preferably 3 to 12, even more preferably 3 to 10, and even more preferably 3 to 8.When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, even more preferably 6 to 18, even more preferably 6 to 12, and even more preferably 7 to 12. Examples of the aromatic hydrocarbon group include a group in which one hydrogen atom has been removed from an aryl group, such as a phenyl group, naphthyl group, anthryl group, biphenyl group, and fluorenyl group. More specifically, aromatic hydrocarbon groups represented by the following formulas are included. TIFF2025077020000056.tif1285The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, even more preferably 4 to 18, even more preferably 5 to 14, even more preferably 5 to 10, and even more preferably 6 to 10. L b2 When --CH2-- in the hydrocarbon group is replaced with --O--, --CO--, --S-- or --SO2--, the number of carbon atoms before the replacement is regarded as the number of carbon atoms in the hydrocarbon group. L b2 Among these hydrocarbon groups, examples of groups in which -CH2- in a chain hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, etc. Examples of these replaced groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. L b2 Among the above hydrocarbon groups, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2- include groups containing structures such as cyclic ether, cyclic ketone, cyclic ester (lactone), cyclic thioether, cyclic acetal, and cyclic sulfonate ester (sultone). Specific examples include alicyclic hydrocarbon groups represented by the following formulas. The bonding position of the alicyclic hydrocarbon groups listed in the following formulas can be any position. TIFF2025077020000057.tif48165L b2 Among these hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and examples of the group in which -CH2- is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. Specific examples include aromatic hydrocarbon groups represented by the following formulas: TIFF2025077020000058.tif1325 Examples of the group that combines two or more groups of a chain hydrocarbon group, an alicyclic hydrocarbon group, and an aromatic hydrocarbon group include a group that combines the above chain hydrocarbon group and the above alicyclic hydrocarbon group, a group that combines the above chain hydrocarbon group and the above aromatic hydrocarbon group, a group that combines the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and a group that combines the above chain hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. The group that combines an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. In any of the chain hydrocarbon group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group, -CH2- contained therein may be replaced with -O-, -S-, -SO2-, or -CO-. L b2 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L b2 In the case where L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. b2 The -CH2- of the chain hydrocarbon group contained in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, thereby forming L b2 The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group. L b2 is a single bond, *-L b23 -, *-L b23 -X 2 -or*-L b23 -X 2 -W 2 -X 3 -(L b23 represents a chain hydrocarbon group having 1 to 6 carbon atoms which may have a fluorine atom; X 2 and X 3each independently represents -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-; W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-, and * represents a bonding site with SO2.) is preferable.

[0077] Y b1 Examples of the cyclic hydrocarbon group include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined. Y b1 The alicyclic hydrocarbon group and the aromatic hydrocarbon group are represented by L b2 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups are the same as those exemplified in 1. When the alicyclic hydrocarbon groups and aromatic hydrocarbon groups do not have a substituent, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Y b1 Examples of the substituent that the methyl group may have include a halogen atom, a cyano group, a hydroxy group, and a nitro group. Y b1 Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group or a nitro group (-CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-). Y b1 The number of carbon atoms in the hydrocarbon group that may be contained in the cyclic hydrocarbon group is b1 The carbon number of the cyclic hydrocarbon group is not included in the carbon number of the cyclic hydrocarbon group. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that may be substituted on the cyclic hydrocarbon group include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups. Examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups combining two or more of these groups include, within the range permitted by the upper limit of the carbon number, b2 Examples of the alkyl group include the chain hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group obtained by combining two or more of these groups.b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms in which -CH2- is replaced with -O-, -S-, -CO- or -SO2- that may be substituted on the cyclic hydrocarbon group include, within the upper limit of the carbon number, L b2 Examples of the hydrocarbon group include the same groups as those exemplified above in which -CH2- in the hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2-. b1 The hydrocarbon group having 1 to 18 carbon atoms which the cyclic hydrocarbon group may have as a substituent may constitute a protecting group or leaving group (acid labile group or base labile group) generally used in the art. Y b1 is preferably a methyl group having a fluorine atom or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), and more preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. Specifically, it is more preferably a trifluoromethyl group or a group represented by formulae (Y1) to (Y36). In the following formulae, R Yb is a hydrogen atom or Y b1 Among the substituents that the cyclic hydrocarbon group may have, R represents an alkyl group having 1 to 4 carbon atoms. Yc is a hydrogen atom or Y b1 represents a substituent that the cyclic hydrocarbon group may have, and * represents L b2 The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formulae may have other substituents, which are not shown in the figures. TIFF2025077020000059.tif95165 In formula (I-A3), two -SO2-L b2 -Y b1 When these are taken together to form a ring containing A, examples include an anion represented by the formula (I-A3'). TIFF2025077020000060.tif21118[In formula (I-A3'), A, Y b1’ , L b2’ and nb5 represents A, Y in formula (I-A3). b1 , L b2 and nb5. W b4 represents a disulfonylimide ring or disulfonylmethide ring having 2 to 12 carbon atoms which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmethide ring preferably has 3 to 12 carbon atoms, more preferably 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably replaced with a fluorine atom.

[0078] Examples of the anion represented by formula (I-A3) include the following. Among them, the anions represented by formulae (I-a3-1), (I-a3-2), (I-a3-12), and (I-a3-13) are preferred. TIFF2025077020000061.tif187164

[0079] Specific examples of the salt (I) include salts of any combination of the above-mentioned cations and anions. Specific examples of the salt (I) are shown in the table below. In the following table, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation, and "~" indicates that the salt (I) corresponds to the anion (I) or cation (I). For example, salt (I-1) is a salt consisting of an anion represented by formula (I-a3-1) and a cation represented by formula (Ic-1), salt (I-2) is a salt consisting of an anion represented by formula (I-a3-2) and a cation represented by formula (Ic-1), and salt (I-21) is a salt consisting of an anion represented by formula (I-a3-1) and a cation represented by formula (Ic-2). TIFF2025077020000062.tif33134 [Table 1] TIFF2025077020000064.tif239157 TIFF2025077020000065.tif244159 TIFF2025077020000066.tif244159 TIFF2025077020000067.tif244159 TIFF2025077020000068.tif244159 TIFF2025077020000069.tif244159 TIFF2025077020000070.tif244159 TIFF2025077020000071.tif239160

[0080] Among these, the salt (I) is preferably a salt obtained by combining an anion represented by any one of formulas (I-a3-1), (I-a3-2), (I-a3-12), and (I-a3-13) with a cation represented by any one of formulas (Ic-1) to (Ic-390). These salts can be produced by known methods, and commercially available products may also be used.

[0081] <Method for producing salt (I)> The salt (I) can be produced by reacting a salt represented by the formula (Ia) with a salt represented by the formula (Ib) in a solvent. TIFF2025077020000072.tif111170 [wherein all symbols have the same meanings as defined above.] Examples of the solvent include chloroform, monochlorobenzene, acetonitrile, and water. The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours.

[0082] Examples of the salt represented by formula (Ia) include salts represented by the following formula: These salts can be easily produced by known production methods. TIFF2025077020000073.tif228148

[0083] TIFF2025077020000074.tif250146

[0084] TIFF2025077020000075.tif60144

[0085] Examples of the compound represented by formula (Ib) include compounds represented by the following formula, which are commercially available or can be easily produced by known methods. TIFF2025077020000076.tif44158

[0086] <Acid generator> The acid generator of the present invention may contain one type of salt (I) or may contain two or more types of salt (I). The acid generator of the present invention may contain, in addition to the salt (I), a known compound that acts as an acid generator in the resist field (hereinafter, sometimes referred to as "compound (B)" or "acid generator (B)", but excluding salt (I).) The compound (B) may be used alone or in combination of two or more kinds.

[0087] The compound (B) may be either a nonionic compound or an ionic compound. Examples of the nonionic compound include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), and the like. Examples of the ionic compound include onium salts containing onium cations (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of the anions of the onium salts include sulfonate anions, sulfonylimide anions, sulfonylmethide anions, and carboxylate anions. However, the compound (B) does not include the salt (I). The compound (B) may be a part of a structural unit that constitutes the resin contained in the resist composition of the present invention, like the structural unit (a7) described below.

[0088] As the compound (B), compounds that generate an acid when exposed to radiation, such as those described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, and European Patent No. 126,712, can be used. Compounds produced by known methods may also be used. Compound (B) may be an acid generator having an acid labile group. For example, a compound or resin serving as an acid generator may contain a partial structure that becomes an acid labile group, and the acid labile group preferably contains a group (1) or group (2) described below. When the resist composition of the present invention contains a compound having an acid labile group, it is not necessary to contain a resin containing a structural unit having an acid labile group.

[0089] A preferred embodiment of the compound (B) is a salt represented by formula (B1) (hereinafter may be referred to as "compound (B1)", "acid generator (B1)" or "salt (B1)") or a salt represented by formula (B2) (hereinafter may be referred to as "compound (B2)", "acid generator (B2)" or "salt (B2)", except for salt (I)). The anion of the salt represented by formula (B1) is preferably an anion represented by formula (B1-1) (hereinafter may be referred to as "anion (B1-1)") and an anion represented by formula (B1-2) (hereinafter may be referred to as "anion (B1-2)"). TIFF2025077020000077.tif1395[In formula (B1), L b1 represents a single bond or an (nb1+1)-valent hydrocarbon group which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. L b2represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the multiple parentheses may be the same or different. ZI + represents an organic cation. L b1 The (nb1+1)-valent hydrocarbon group is a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, or a monovalent group that is a combination of two or more of these groups, from which nb1 hydrogen atoms have been removed to form one or more L b2 Examples of such groups include groups that bond to the The hydrocarbon group preferably has 1-48 carbon atoms, more preferably 1-42 carbon atoms, even more preferably 1-36 carbon atoms, even more preferably 1-30 carbon atoms, and even more preferably 1-24 carbon atoms. Examples of the chain hydrocarbon group include a group in which nb1 hydrogen atoms have been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentanedecyl group, and a heptadecyl group. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, even more preferably 1 to 20, still more preferably 1 to 18, even more preferably 1 to 12, and even more preferably 1 to 10. Examples of the alicyclic hydrocarbon group include a group in which nb1 hydrogen atoms have been removed from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of polycyclic cycloalkyl groups include cycloalkyl groups having a bridged structure, cycloalkyl groups in which two or more rings are condensed, and cycloalkyl groups in which two rings are bonded by a spiro bond. Examples of cycloalkyl groups having a bridged structure include a norbornyl group and an adamantyl group. Examples of cycloalkyl groups in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of cycloalkyl groups in which two rings are bonded by a spiro bond include spirocyclic cycloalkyl groups in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group are bonded by a spiro bond to a cycloalkyl group having 5 to 8 carbon atoms. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, alicyclic hydrocarbon groups represented by the following formulas are included. TIFF2025077020000078.tif26168When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, even more preferably 3 to 12, even more preferably 3 to 10, and even more preferably 3 to 8.When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, even more preferably 6 to 18, even more preferably 6 to 12, and even more preferably 7 to 12. Examples of the aromatic hydrocarbon group include groups in which nb1 hydrogen atoms have been removed from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. More specifically, examples of the aromatic hydrocarbon group include the aromatic hydrocarbon groups represented by the following formula: TIFF2025077020000079.tif1384The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, even more preferably 4 to 18, even more preferably 5 to 14, even more preferably 5 to 10, and even more preferably 6 to 10. L b1 When --CH2-- in the hydrocarbon group is replaced with --O--, --CO--, --S-- or --SO2--, the number of carbon atoms before the replacement is regarded as the number of carbon atoms in the hydrocarbon group. L b1 Among these hydrocarbon groups, examples of groups in which -CH2- in a chain hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, etc. Examples of these replaced groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. L b1 Among the hydrocarbon groups, examples of the groups in which -CH2- in the alicyclic hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2- include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. L b1 Among these hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and examples of the group in which -CH2- is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. Specific examples include aromatic hydrocarbon groups represented by the following formulas: TIFF2025077020000080.tif1325 Examples of the group that combines two or more groups selected from the chain hydrocarbon group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group include a group that combines the above chain hydrocarbon group with the above alicyclic hydrocarbon group, a group that combines the above chain hydrocarbon group with the above aromatic hydrocarbon group, a group that combines the above alicyclic hydrocarbon group with the above aromatic hydrocarbon group, and a group that combines the above chain hydrocarbon group with the above alicyclic hydrocarbon group with the above aromatic hydrocarbon group. The group that combines the alicyclic hydrocarbon group with the aromatic hydrocarbon group may be a condensed ring. L b2 The divalent hydrocarbon group includes a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group combining two or more of these groups. b1 Examples of such groups include groups that bond to the L b2 The divalent chain hydrocarbon group, the divalent alicyclic hydrocarbon group, the divalent aromatic hydrocarbon group, and the divalent group formed by combining two or more of these groups are each, within the range permitted by the upper limit of the number of carbon atoms, of L in the anion of formula (I). b2 and L b1 Examples of the monovalent hydrocarbon group include a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group obtained by combining two or more of these groups from which one hydrogen atom has been removed. L b1 and L b2Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L b1 and L b2 In the case where L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. b1 and L b2 The -CH2- of the chain hydrocarbon group contained in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, thereby forming L b1 and L b2 The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, or an alkylsulfonyl group. Y b1 Examples of the cyclic hydrocarbon group include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are combined. Y b1 The alicyclic hydrocarbon group and the aromatic hydrocarbon group are each represented by Y in the anion of formula (I). b1 and L b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups are the same as those exemplified in 1. When the alicyclic hydrocarbon groups and aromatic hydrocarbon groups do not have a substituent, they may be monovalent alicyclic hydrocarbon groups and aromatic hydrocarbon groups. Y b1 Examples of the substituent that the methyl group may have include a halogen atom, a cyano group, a hydroxy group, and a nitro group. Y b1 Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group or a nitro group (-CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-). Y b1The number of carbon atoms in the hydrocarbon group that may be contained in the cyclic hydrocarbon group is b1 The carbon number of the cyclic hydrocarbon group is not included in the carbon number of the cyclic hydrocarbon group. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group may have as a substituent include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups. Examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups combining two or more of these groups include, within the range permitted by the upper limit of the carbon number, Y in the anion of formula (I). b1 and L b1 Examples of the alkyl group include the chain hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group obtained by combining two or more of these groups. b1 Examples of the groups in which -CH2- contained in the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group may have as a substituent are replaced with -O-, -S-, -CO- or -SO2-, within the upper limit of the carbon number, such as Y in the anion of formula (I). b1 and L b1 Examples of the hydrocarbon group include the same groups as those exemplified above in which -CH2- in the hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2-. b1 The hydrocarbon group having 1 to 18 carbon atoms which the cyclic hydrocarbon group may have as a substituent may constitute a protecting group or leaving group (acid labile group or base labile group) generally used in the art. The anion of the salt represented by formula (B1) is preferably an anion represented by the following formula (B1-A1) (hereinafter, may be referred to as "anion (B1-A1)") or an anion represented by formula (B1-A2) (hereinafter, may be referred to as "anion (B1-A2)"). TIFF2025077020000081.tif30124[In formula (B1-A1), L b2 and Y b1 has the same meaning as in formula (B1). Q b1 , Q b2 , Q b3 and Q b4each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer of 0 to 6. When z1 is 2 or more, the groups in the multiple parentheses may be the same or different. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or a (nb2+1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. nb2 represents an integer of 1 to 3. When nb2 is 2 or more, the groups in the parentheses may be the same or different.] Q b1 , Q b2 , Q b3 and Q b4 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Q b1 , Q b2 , Q b3 and Q b4 Examples of the perfluoroalkyl group include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. Q b1 and Q b2 Q b1 and Q b2 At least one of the groups preferably contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4are each preferably independently a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably an integer of 0 to 3, and more preferably 0, 1 or 2. X 1 is preferably -O-CO- or -CO-O-.

[0090] L b3 As the hydrocarbon group in the formula (B1), within the range permitted by the upper limit of the number of carbon atoms, b1 The same hydrocarbon groups as those exemplified above are included. In formula (B1-A1), L b3 is preferably a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent (-CH2- contained in the aromatic hydrocarbon group may be replaced with -O- or -S-), or a group consisting of a combination of two or more of these groups, and more preferably a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms, or a group represented by the following formula (Lb3-1). In addition, when the chain hydrocarbon group is replaced by -O- or -CO-, the number of -CH2- contained in the chain hydrocarbon group replaced by -O- or -CO- is preferably 1 to 4, and it is preferable that one -CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO- or -CO-O-, or one -CH2-CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO-O-. TIFF2025077020000082.tif1481[In formula (Lb3-1), nb2 has the same meaning as in formula (B1-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. * and ** represent binding sites, * represents X 1 represents the binding site for In formula (Lb3-1), L b31 The chain hydrocarbon group of L is as long as the upper limit of the carbon number allows. b1 Examples of the chain hydrocarbon groups include the same groups as those exemplified above. W b3 The alicyclic and aromatic hydrocarbon groups of L are as long as the upper limit of the carbon number permits. b1 Examples of the alicyclic hydrocarbon groups and aromatic hydrocarbon groups are the same as those exemplified by 1. L b31 The substituents which the chain hydrocarbon group may have and W b3 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group may have are b1 The substituents which the hydrocarbon group may have include the same groups as those exemplified above. L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, W b3 The alicyclic hydrocarbon group and aromatic hydrocarbon group of the formula (I) include the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below. In the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below, * and ** represent a bonding site, * represents X 1 Or L b31represents a bonding site with L, and ** represents a hydrogen atom, a substituent, or L b2 At least one ** represents a binding site for L b2 represents a bonding site with the alicyclic hydrocarbon group. In the alicyclic hydrocarbon groups represented below, -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-. When -CH2- contained in the alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2-, it is preferable that an ether ring, an ester ring (lactone), a carbonate ring, a sulfonate ring (sultone) or an acetal ring is formed. TIFF2025077020000083.tif37168In the formula (B1-A1), L b2 is preferably a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and is preferably a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -**(L b21 and L b22 one of X represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms; 2 represents -O-, -CO-O-, -O-CO-, or -O-CO-O-; * and ** represent binding sites; ** represents Y b1 where L b21 , X 2 and L b22 The total number of carbon atoms is 12 or less. In formula (B1-A1), Y b1is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and even more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. Specifically, it is more preferable that it is a group represented by the above formulas (Y1) to (Y36).

[0091] The anion represented by formula (B1-A1) is preferably an anion represented by formula (B1-A1-1) to formula (B1-A1-85) [hereinafter, may be referred to as "anion (B1-A1-1)" depending on the formula number.], and more preferably an anion represented by any of formula (B1-A1-1) to formula (B1-A1-4), formula (B1-A1-9), formula (B1-A1-10), formula (B1-A1-24) to formula (B1-A1-33), formula (B1-A1-36) to formula (B1-A1-40), and formula (B1-A1-47) to formula (B1-A1-85). TIFF2025077020000084.tif234160

[0092] TIFF2025077020000085.tif250152

[0093] TIFF2025077020000086.tif254163

[0094] In formulae (B1-A1-1) to (B1-A1-85), R i2 ~R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. i8L is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 has the same meaning as above. Specific examples of the anion represented by formula (B1-A1) include the anions described in JP-A-2010-204646.

[0095] Preferred anions represented by formula (B1-A1) include the anions represented by formulas (B1a-1) to (B1a-70). TIFF2025077020000087.tif185163

[0096] TIFF2025077020000088.tif252165

[0097] TIFF2025077020000089.tif95156

[0098] Of these, anions represented by any of formulae (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), and (B1a-35) to (B1a-70) are preferred.

[0099] The anion represented by formula (B1-A2) is represented by the following formula: TIFF2025077020000090.tif24100[In formula (B1-A2), L b2 and Y b1 has the same meaning as in formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkyl group may be replaced with -O- or -CO-. nb4 represents an integer of 1 to 5. When nb4 is 2 or more, the groups in the multiple parentheses may be the same or different. nb3 represents an integer of 0 to 4. When nb3 is 2 or more, a plurality of R b1 may be the same or different from each other. However, 1≦nb4+nb3≦5 is satisfied.

[0100] In formula (B1-A2), L b2 Hydrocarbon groups and Y b1 Examples of the cyclic hydrocarbon group include, within the upper limit of the carbon number, L in formula (B1). b2 Hydrocarbon groups and Y b1 Examples of the cyclic hydrocarbon group are the same as those of L. b2 Hydrocarbon radical, Y b1 The substituents which the methyl group and the cyclic hydrocarbon group may have are also defined as follows: b2 Hydrocarbon radical, Y b1 Examples of the substituent that the methyl group and the cyclic hydrocarbon group may have include the same as those mentioned above. In formula (B1-A2), L b2 is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and more preferably *-CO-OL b41 -(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. * is SO3 - It represents the bonding site with the benzene ring to which L is attached. b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms. In formula (B1-A2), Y b1is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and further preferably Y in formula (B1-A1) b1 Or L b1 Specifically, the groups represented by the above formulae (Y1) to (Y36) are preferred, and the groups represented by the above formulae (Y1) to (Y19) are more preferred.

[0101] In formula (B1-A2), nb4 is preferably any integer of 1 to 4, more preferably any integer of 1 to 3, further preferably 1 or 2, and further more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 The bond position of SO3 - It is preferable that the structure be the following structure in which the m-position of the benzene ring is substituted with respect to the bonding position of the above. TIFF2025077020000091.tif27107[In the above formula, L b2 , Y b1 , R b1 , nb3 has the same meaning as in formula (B1-A2). If nb4 is 2 or more, multiple L b2 and Y b1 are preferably the same groups.

[0102] R b1 Examples of the alkyl group having 1 to 6 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 4, and more preferably 1 to 3. R b1Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group in which -CH2- is replaced with -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, etc. Specific examples of these are the same as those mentioned above. R b1 are each independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), more preferably a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and further preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group, or a methyl group. nb3 is preferably an integer of 0 to 3, and more preferably an integer of 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 More preferably, nb3 is a fluorine atom or an iodine atom. When nb3 is 2, R b1 It is preferable that one of R is a halogen atom and the other is a halogen atom or an alkyl group having 1 to 4 carbon atoms. b1 It is more preferable that one of them is a fluorine atom or an iodine atom, and the other is a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0103] Examples of the anion represented by formula (B1-A2) include the following anions. Among them, the anions represented by formulae (B2a-1) to (B2a-20) are preferred, and the anions represented by formulae (B2a-1) to (B2a-11) and (B2a-16) to (B2a-20) are more preferred. The following anions are preferred in the case of some R b1is omitted, and may contain substituents not shown. TIFF2025077020000092.tif102153

[0104] In another embodiment of the compound (B), a salt in which the sulfonate anion in the salt represented by formula (B1) is replaced with a sulfonylimide anion, a sulfonylmethide anion, or a carboxylate anion is also preferably used as the compound (B). As the salt using the sulfonylimide anion or the sulfonylmethide anion, a salt represented by formula (B2) (hereinafter, sometimes referred to as "salt (B2)") is preferable. TIFF2025077020000093.tif13103[In formula (B2), A 1 represents a nitrogen atom or a carbon atom. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. nb5 represents an integer of 2 or 3. When nb5 is 2, A 1 is a nitrogen atom, and when nb5 is 3, A 1 A is a carbon atom. The groups in the parentheses may be the same or different from each other, and two groups in the parentheses are bonded to form A 1 may form a ring comprising: ZI + represents an organic cation. In formula (B2), L b2 ' and Y b1 Examples of the hydrocarbon group, cyclic hydrocarbon group and substituent of L′ are b2 and Y b1 or L in formula (B1-A1) b2 and Y b1The same groups as those shown below can be mentioned. In addition, in formula (B2), two -SO2-L b2’ -Y b1’ Together, A 1 When a ring containing the formula (I-A3′) is formed, examples of the anion include the anion represented by formula (I-A3′).

[0105] Examples of the anion in the salt represented by formula (B2) include the same anions as those represented by formulae (I-a3-1) to (I-a3-20). Here, the anions represented by formulae (I-a3-1) to (I-a3-20) are represented as the anions represented by formulae (B3a-1) to (B3a-20).

[0106] Examples of carboxylate anions include the following: TIFF2025077020000094.tif41156

[0107] ZI + Examples of the organic cation include organic onium cation, organic sulfonium cation, organic iodonium cation, organic ammonium cation, benzothiazolium cation, and organic phosphonium cation. Among these, organic sulfonium cation and organic iodonium cation are preferred, and arylsulfonium cation or aryl iodonium cation are more preferred. Specifically, the organic cation includes cations represented by any of formulas (b2-1) to (b2-5) (hereinafter, may be referred to as "cation (b2-1)" depending on the formula number). TIFF2025077020000095.tif82160[Formula (b2-1) to formula (b2-5), R b4 ~R b6each independently represent a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, a hydrogen atom contained in the chain hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer of 0 to 5. When m2 is 2 or more, multiple R b7 may be the same or different, and when n2 is 2 or more, multiple R b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and -CH2- contained in the ring may be replaced with -O-, -S- or -CO-. R b11represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents an open chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, a hydrogen atom contained in the open chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 may be bonded to each other to form a ring including the -CH-CO- to which they are bonded, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b13 ~R b18 and R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are attached, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid labile group. L b31 and L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of 0 to 5. q2 and r2 each independently represent an integer of 0 to 4. u2 represents 0 or 1. o21, p22, q23, r24, t25 and s26 each independently represent an integer of 0 to 4. u3 represents an integer of 1 to 3, and satisfies 1≦u3+q23≦5. u4 and u5 each independently represent an integer of 0 to 3, and satisfy 0≦u4+o21≦5 and 0≦u5+p22≦5. When o2 is 2 or more, multiple R b13 are the same or different, and when p2 is 2 or more, multiple R b14 are the same or different, and when q2 is 2 or more, multiple R b15 are the same or different, and when r2 is 2 or more, multiple R b16 are the same or different, and when s2 is 2 or more, multiple R b17 are the same or different, and when t2 is 2 or more, multiple R b18 are the same or different. When o21, p22, q23, r24, t25, and s26 are each 2 or more, multiple R b21 ~R b26 are the same or different. When u3, u4, and u5 each are 2 or more, the groups in the multiple parentheses are the same or different. When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and R b13 ~R b16 At least one of them is preferably a halogen atom, and when u2 is 1, any one of o2, p2, s2, t2, q2, and r2 is 1 or more, and R b13 ~R b18 At least one of these is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. When u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom. The aliphatic hydrocarbon group refers to a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl. In particular, R b9 ~R b12 The chain hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups: TIFF2025077020000096.tif10158 In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, and more preferably has 4 to 12 carbon atoms. Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include a methylcyclohexyl group, a dimethylcyclohexyl group, a 2-methyladamantan-2-yl group, a 2-ethyladamantan-2-yl group, a 2-isopropyladamantan-2-yl group, a methylnorbornyl group, an isobornyl group, etc. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The fluorinated alkyl group refers to an alkyl group having 1 to 12 carbon atoms and a fluorine atom, and examples of such groups include a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, more preferably 1 to 6, and further preferably 1 to 4.

[0108] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a biphenyl group, a naphthyl group, and a phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples thereof include aromatic hydrocarbon groups having a chain hydrocarbon group with 1 to 18 carbon atoms (tolyl group, xylyl group, cumenyl group, mesityl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.) and aromatic hydrocarbon groups having an alicyclic hydrocarbon group with 3 to 18 carbon atoms (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.). When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group with 1 to 18 carbon atoms and an alicyclic hydrocarbon group with 3 to 18 carbon atoms are preferred. An example of the aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group is a p-methoxyphenyl group. Examples of the chain hydrocarbon group in which a hydrogen atom has been substituted with an aromatic hydrocarbon group include aralkyl groups such as a benzyl group, a phenethyl group, a phenylpropyl group, a trityl group, a naphthylmethyl group, and a naphthylethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkylcarbonyloxy group include a methylcarbonyloxy group, an ethylcarbonyloxy group, a propylcarbonyloxy group, an isopropylcarbonyloxy group, a butylcarbonyloxy group, a sec-butylcarbonyloxy group, a tert-butylcarbonyloxy group, a pentylcarbonyloxy group, a hexylcarbonyloxy group, an octylcarbonyloxy group, and a 2-ethylhexylcarbonyloxy group. R b4 and R b5The ring formed by bonding to each other together with the sulfur atom to which they are bonded may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include rings having 3 to 18 carbon atoms, and preferably rings having 4 to 18 carbon atoms. Examples of the ring containing a sulfur atom include 3-membered to 12-membered rings, and preferably 3-membered to 7-membered rings, and examples of such rings include the following rings. * represents a bonding site. TIFF2025077020000097.tif23143R b9 and R b10 The ring formed by these together may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. This ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. For example, it may be a thiolane-1-ium ring (tetrahydrothiophenium ring), a thiane-1-ium ring, a 1,4-oxathiane-4-ium ring, etc. R b11 and R b12 The ring formed by combining with may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. The ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. Examples of the ring include an oxocycloheptane ring, an oxocyclohexane ring, an oxonorbornane ring, and an oxoadamantane ring. R b27 ~R b29 Examples of groups containing an acid labile group include -R c30 , -CO-OR c30 Or -L c10 -CO-OR c30 A group represented by (L c10 represents an alkanediyl group having 1 to 6 carbon atoms, R c30 represents an acid labile group. R b27 ~R b29 Examples of the acid labile group include group (1) or group (2) exemplified in this specification.

[0109] Among the cations (b2-1) to (b2-5), the cation (b2-1), the cation (b2-4) or the cation (b2-5) is preferred. Examples of the cation (b2-1) include the following cations. TIFF2025077020000098.tif158165Examples of the cation (b2-2) include the following cations. TIFF2025077020000099.tif18150Examples of the cation (b2-3) include the following cations. TIFF2025077020000100.tif26140Examples of the cation (b2-4) include the following cations. TIFF2025077020000101.tif122163Examples of the cation (b2-5) include the following cations. TIFF2025077020000102.tif115158

[0110] Compound (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, which can be combined arbitrarily. Compound (B) is preferably a combination of an anion represented by any of formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), (B1a-35) to (B1a-70), (B2a-1) to (B2a-11), (B2a-16) to (B2a-20), and (B3a-1) to (B3a-20) and a cation (b2-1), a cation (b2-2), a cation (b2-3), a cation (b2-4), or a cation (b2-5).

[0111] Compound (B) is preferably one represented by formula (B1-1) to formula (B1-105), formula (B2-1) to formula (B2-20), and formula (B3-1) to formula (B3-28). Among them, one containing an arylsulfonium cation is preferred, and one represented by formula (B1-1) to formula (B1-3), formula (B1-5) to formula (B1-7), formula (B1-11) to formula (B1-14), formula (B1-20) to formula (B1-26), formula (B1-29), formula (B1-31) to formula (B1-105), formula (B2-1) to formula (B2-20), and formula (B3-1) to formula (B3-28) is particularly preferred. TIFF2025077020000103.tif174167

[0112] TIFF2025077020000104.tif250160

[0113] TIFF2025077020000105.tif250164

[0114] TIFF2025077020000106.tif252160

[0115] TIFF2025077020000107.tif249162

[0116] TIFF2025077020000108.tif250151

[0117] TIFF2025077020000109.tif187159

[0118] When the acid generator contains salt (I) and compound (B), the content ratio of salt (I) to compound (B) (mass ratio; salt (I):compound (B)) is usually 1:99 to 99:1, preferably 2:98 to 98:2, more preferably 5:95 to 95:5, even more preferably 10:90 to 90:10, and particularly preferably 15:85 to 85:15.

[0119] [Resist Composition] The resist composition of the present invention contains an acid generator containing a salt (I). In this case, the resist composition may be a molecular resist that does not contain a resin. The resist composition of the present invention preferably contains a quencher such as a salt that generates an acid having a weaker acidity than the acid generated from the acid generator (hereinafter may be referred to as "quencher (C)"), and preferably contains a solvent (hereinafter may be referred to as "solvent (E)"). The resist composition of the present invention may further contain a compound having a phenolic hydroxy group or a benzoic carboxy group, or a compound in which the phenolic hydroxy group or the benzoic carboxy group of such a compound is protected with an acid labile group, and a resin. Here, the term "acid labile group" refers to a group that has a leaving group and that is eliminated by contact with an acid, converting the structural unit into a structural unit having a hydrophilic group (e.g., a hydroxy group or a carboxy group). The resist composition of the present invention may also contain a resin. Examples of the resin include a resin that includes a structural unit having an acid labile group (hereinafter sometimes referred to as "resin (A)") and / or a resin other than resin (A).

[0120] <Acid generator> In the resist composition of the present invention, the total content of the acid generator is preferably from 20 mass% to 100 mass%, more preferably from 35 mass% to 100 mass%, even more preferably from 40 mass% to 90 mass%, still more preferably from 45 mass% to 85 mass%, and even more preferably from 80 mass% to 85 mass%. When a resin described later (e.g., resin (A)) is contained, the total content of the acid generators is preferably 1 part by mass or more and 200 parts by mass or less, more preferably 50 parts by mass or more and 200 parts by mass or less, and even more preferably 80 parts by mass or more and 200 parts by mass or less, per 100 parts by mass of the resins described later in total.

[0121] <Compounds containing phenolic hydroxyl groups, etc.> The resist composition of the present invention preferably further comprises a compound having a phenolic hydroxy group or a benzoic carboxy group, or a compound in which the phenolic hydroxy group or the benzoic carboxy group of such a compound is protected with an acid labile group. Examples of such compounds include compounds represented by formula (LX). TIFF2025077020000110.tif23121[In formula (LX), X ln1 and X lm1each independently represents a single bond or a carbonyl group. R ln1 and R lm2 each independently represents a hydrogen atom or an acid labile group. Lx represents a hydrocarbon group having a total of 1 to 20 carbon atoms including a chain hydrocarbon group having 1 to 6 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, and the chain hydrocarbon group and the aromatic hydrocarbon group may have a substituent. R ln2 and R lm3 each independently represents a halogen atom, a fluorinated alkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms, and -CH2- contained in the alkyl group may be replaced by -O- or -CO-. ln1 represents an integer of 1 to 5, and when ln1 is 2 or more, the groups in the multiple parentheses may be the same or different. ln2 represents an integer from 0 to 4, and satisfies 1≦ln1+ln2≦5. When ln2 is 2 or more, multiple R ln2 may be the same or different from each other. Im1 represents an integer of 1 to 3, and when lm1 is 2 or more, the groups in multiple parentheses may be the same or different. Im2 represents an integer of 1 to 5, and when Im2 is 2 or more, the groups in the parentheses may be the same or different. lm3 represents an integer of 0 to 4, satisfies 1≦lm2+lm3≦5, and when lm3 is 2 or more, multiple Rlm3 may be the same or different.] Examples of the acid labile group include a group represented by formula (1a) (hereinafter sometimes referred to as "acid labile group (1a)") and a group represented by formula (2a) (hereinafter sometimes referred to as "acid labile group (2a)"). Among these, the group represented by formula (2a) is preferred. TIFF2025077020000111.tif2156 [In formula (1a), R aa1 , R aa2 and R aa3each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, or R aa1 and R aa2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. * denotes a binding site.] TIFF2025077020000112.tif2161 [In formula (2a), R aa1’ and R aa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ bind to each other and they combine -CX a Together with -, it forms a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X a represents an oxygen atom or a sulfur atom. * denotes a binding site.]

[0122] R aa1 , R aa2 and R aa3 Examples of the alkyl group of R include a methyl group, an ethyl group, a propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, and an n-octyl group. aa1 , R aa2 and R aa3 The alkyl group may have 1 to 8 carbon atoms, preferably 1 to 6 carbon atoms, more preferably 1 to 4 carbon atoms, and further preferably 1 to 3 carbon atoms. R aa1 , R aa2 and R aa3Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. R aa1 , R aa2 and R aa3 The alicyclic hydrocarbon group of may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site). R aa1 , R aa2 and R aa3 The alicyclic hydrocarbon group may have 3 to 20 carbon atoms, preferably 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms. TIFF2025077020000113.tif9159R aa1 , R aa2 and R aa3 Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. aa1 , R aa2 and R aa3 The aromatic hydrocarbon group has 6 to 18 carbon atoms, preferably 6 to 14 carbon atoms, and more preferably 6 to 10 carbon atoms. Examples of the combined group include a group in which the above-mentioned alkyl group and an alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or a cycloalkylalkyl group such as a methylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group.

[0123] R aa1 and R aa2 -C(R aa1 )(R aa2 )(R aa3 ) includes the following groups. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and further preferably 3 to 12. * represents a bonding site with -O-. TIFF2025077020000114.tif30140

[0124] The group represented by formula (1a) is a 1,1,1-trialkyl group (R aa1 , R aa2 and R aa3 is an alkyl group, preferably a tert-butyl group), a 2-alkyladamantan-2-yl group (in formula (1a), R aa1 , R aa2 and the carbon atoms to which they are attached form an adamantyl group, R aa3 is an alkyl group) and 1-(adamantan-1-yl)-1,1-dialkyl group (wherein R aa1 and R aa2 is an alkyl group, and R aa3is an adamantyl group).

[0125] R aa1' , R aa2' and R aa3' Examples of the hydrocarbon group include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, cyclic hydrocarbon groups such as aromatic hydrocarbon groups, and groups formed by combining these groups. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups are R aa1 , R aa2 and R aa3 Examples of the groups include the same groups as those listed in the above. R aa2' and R aa3' are bonded to each other and the carbon atom to which they are bonded and X a When forming a heterocyclic group together with -C(R aa1' )(R aa2' )-X a -(R aa3' ) includes the following groups. * represents a bonding site. The heterocyclic group may have 3 to 20 carbon atoms, preferably 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms. TIFF2025077020000115.tif21143R aa1 , R aa2 , R aa3 , R aa1' , R aa2' and R aa3' The halogen atom which may be contained includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R aa1' and R aa2' At least one of these is preferably a hydrogen atom.

[0126] Specific examples of the acid labile group (1a) include the following groups, where * represents a bonding site. TIFF2025077020000116.tif60162Specific examples of the acid labile group (2a) include the following groups: * represents a binding site. TIFF2025077020000117.tif59148 Examples of halogen atoms include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms. Examples of the fluorinated alkyl group include a trifluoromethyl group, a difluoromethyl group, a monofluoroalkyl group, a perfluoroethyl group, and a perfluoropropyl group. The alkyl group is a straight-chain or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. Examples of the group in which -CH2- in an alkyl group is replaced with -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, etc. These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Examples of the hydrocarbon group include chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, condensed rings, or bridged rings, etc.) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be groups formed by combining two or more of these groups (for example, a hydrocarbon group formed from an aromatic hydrocarbon group and a chain hydrocarbon group). The hydrocarbon group of Lx is a (lm1+1)-valent hydrocarbon group, and can be a divalent to tetravalent hydrocarbon group depending on lm1. The hydrocarbon group contains at least a chain hydrocarbon group having 1 to 6 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, and is a hydrocarbon group having a total of 1 to 20 carbon atoms. Examples of the chain hydrocarbon group include an alkanediyl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, and a decane-1,10-diyl group. Alkanediyl groups: branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The chain hydrocarbon group preferably has 1 to 10 carbon atoms, more preferably 1 to 8 carbon atoms, even more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms. Examples of the alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, and a cyclooctane-1,5-diyl group; and polycyclic cycloalkanediyl groups such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group. Examples of the alicyclic hydrocarbon group include the following groups: The binding site can be any position. The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms, more preferably 3 to 12 carbon atoms, and even more preferably 3 to 10 carbon atoms. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. The aromatic hydrocarbon group preferably has 6 to 14 carbon atoms, more preferably 6 to 10 carbon atoms, and further preferably 6 carbon atoms. Examples of the group combining two or more types include a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group combining an aromatic hydrocarbon group and a chain hydrocarbon group, and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more types of each of the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may be combined. In addition, any of the groups may be bonded to a benzene ring. Examples of groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group include -alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-, and the like. Examples of groups combining an aromatic hydrocarbon group and a chain hydrocarbon group include -aromatic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-aromatic hydrocarbon group-, and the like. Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-. Furthermore, examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group and combinations thereof include groups in which one or more hydrogen atoms of the above groups are replaced with a bonding site. The substituents include a hydroxy group or a halogen atom. Lx is preferably a chain hydrocarbon group having 1 to 6 carbon atoms, an aromatic hydrocarbon group having 6 to 10 carbon atoms, or a group combining a chain hydrocarbon group having 1 to 4 carbon atoms with an aromatic hydrocarbon group having 6 to 10 carbon atoms, and more preferably a chain hydrocarbon group having 1 to 4 carbon atoms or a group combining a chain hydrocarbon group having 1 to 3 carbon atoms with an aromatic hydrocarbon group having 6 carbon atoms.

[0127] The compound having a phenolic hydroxy group or a benzoic carboxy group, or the compound in which the hydroxy group or the carboxy group is protected with an acid labile group, may be either a low molecular weight compound or a resin. A low molecular weight compound is a compound having a weight average molecular weight of less than 10,000. The weight average molecular weight is preferably 5,000 or less, more preferably 2,500 or less, even more preferably 2,000 or less, and even more preferably 1,500 or less. In addition, it is 100 or more, preferably 120 or more, and more preferably 150 or more. Examples of the low molecular weight compound having a phenolic hydroxy group include compounds represented by the following formula: TIFF2025077020000119.tif72163 Also, examples of low molecular weight compounds having a benzoic acid carboxy group include compounds in which the hydroxy group of the above compounds is replaced with a carboxy group. Examples of low molecular weight compounds in which the phenolic hydroxy group is protected with an acid labile group include compounds represented by the following formula. TIFF2025077020000120.tif86167 Also, examples of low molecular weight compounds in which the carboxy group of a benzoic acid carboxy group is protected with an acid labile group include compounds in which the ethoxyethoxy group of the above compound is replaced with an ethoxyethoxycarbonyl group. When the resist composition of the present invention contains a low molecular weight compound having a phenolic hydroxy group or a benzoic carboxy group, or a low molecular weight compound in which the hydroxy group of a phenolic hydroxy group or the carboxy group of a benzoic carboxy group is protected with an acid labile group, the content of the low molecular weight compound having a phenolic hydroxy group or a benzoic carboxy group and / or the low molecular weight compound in which the hydroxy group of a phenolic hydroxy group or the carboxy group of a benzoic carboxy group is protected with an acid labile group is, relative to the solids content of the resist composition, 0.1 to 90 mass%, preferably 0.3 to 45 mass%, more preferably 0.5 to 35 mass%, and even more preferably 0.5 to 10 mass%.

[0128] <Resin containing phenolic hydroxyl groups, etc.> When a compound having a phenolic hydroxy group or a benzoic carboxy group, or a compound in which the phenolic hydroxy group or the benzoic carboxy group of such a compound is protected with an acid labile group, is a resin, examples of such a resin include those containing a structural unit represented by formula (a2-A) and / or a structural unit represented by formula (a1-4). TIFF2025077020000121.tif30128 [In formula (a2-A), all symbols have the same meanings as defined above.]

[0129] R a2 Examples of the halogen atom in include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a2 Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and further preferably a hydrogen atom or a methyl group.

[0130] A a21Examples of the alkanediyl group include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl groups. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, decane-1,9-diyl, and undecane-1,10-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2. A a21 is also preferably a methylene group or an ethylene group. R a28 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a21 The -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 When it is replaced with -, the number of carbon atoms before the replacement is regarded as the number of carbon atoms of the alkanediyl group. A a21 The -CH2- in the alkanediyl group is -O-, -CO- or -NR a28Examples of the group substituted for - include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, an alkanediylamino group, etc. These substituted groups include the same groups exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. The alkylamino group includes alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, an octylamino group, etc. The number of carbon atoms in the alkylamino group is preferably 1 to 8, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. The alkanediylamino group includes an alkanediylamino group having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Among them, A a21 The -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 Groups substituted with - include *-O-, *-CO-O-, *-O-CO-, *-CO-OA a22 -CO-O-, *-O-CO-A a22 -O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 Among them, *-CO-O- and *-CO-OA a22 -CO-O- or *-OA a22 -CO-O-, *-CO-NR a28 - is preferred, where A a22represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a2 A represents the bonding site with the carbon atom to which it is attached. a22 The alkanediyl group of A is as follows, within the upper limit of the carbon number. a21 Examples of the alkanediyl groups include those shown above. A a21 is a single bond, *-CO-O- or *-CO-OA a22 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0131] R a27 Examples of the halogen atom include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a27 Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, further preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a27 Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, further preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a27Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and further preferably a methoxymethyl group. R a27 Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. R a27 The alkylcarbonyloxy group includes an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and further preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH is a benzene ring, A a21 It is preferable that at least one of them is bonded to the m-position or p-position, and more preferable that it is bonded to the m-position. In the case of a naphthalene ring, A a21 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a21 When the bonding position of A is the 2-position, it may be bonded to any of the 1-position and the 3-8-positions. a21 When the bonding position of A is the 1st position, at least one of them is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. a21 When the bonding position is the 2-position, it is preferably bonded to the 4- to 7-positions, and more preferably bonded to the 5- or 6-position.

[0132] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577. The structural unit (a2-A) includes structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), and structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), and R in the structural unit (a2-A) a2 and the like, in which the methyl group corresponding to the following formula (I) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. TIFF2025077020000122.tif107170

[0133] TIFF2025077020000123.tif83165 The content of the structural unit (a2-A) in the resin when the structural unit (a2-A) is contained is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on the total structural units. It is also preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, even more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) may be a compound from which the structural unit (a2-A) is derived (e.g., -CH2-C(-R a2 )- is the double bond CH2=C(-R a2 The structural unit (a2-A) can be incorporated into the resin by polymerizing a compound (a2-A') in the state of (a1-4) or the like. Alternatively, the structural unit (a2-A) can be incorporated into the resin by polymerizing the structural unit (a1-4) and then treating with an acid such as p-toluenesulfonic acid. Alternatively, the structural unit (a2-A) can be incorporated into the resin by polymerizing the structural unit (a1-4) and then treating with an alkali such as tetramethylammonium hydroxide.

[0134] TIFF2025077020000124.tif31119 [In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a18 - may be replaced. R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -CO- to which they are bonded, and the -CH2- contained in the hydrocarbon group and the divalent hydrocarbon group may be replaced by -O- or -S-. na1 represents an integer of any one of 1 to 5, and when na1 is 2 or more, the groups in the multiple parentheses may be the same or different. na11 represents an integer of 0 to 4. When na11 is 2 or more, multiple R a17 may be the same or different from each other. mc represents an integer from 0 to 2.

[0135] R a1 and R a17 is R in formula (a2-A). a2 and R a27 Examples of the above-mentioned examples are the same as those given above. R a1is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and further preferably a hydrogen atom or a methyl group. R a17 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0136] A a11 is A in formula (a2-A) a21 Examples of the above-mentioned examples are the same as those given above. A a11 is a single bond, *-CO-O- or *-CO-OA a12 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred. na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and further preferably 0 or 1. mc is preferably 0 or 1.

[0137] R a34 , R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group consisting of a combination thereof. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site): TIFF2025077020000125.tif10151 Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (e.g., alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, and norbornylethyl group), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. In particular, R a36 Examples of the alkyl group include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these groups. R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms that is formed by bonding together with the -CO- to which they are bonded include the following groups. * represents a bonding site, and one of the groups is R a34 This is the binding site for TIFF2025077020000126.tif15105

[0138] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group in R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36 The alkyl group and the alicyclic hydrocarbon group in R are preferably unsubstituted. a36 The aromatic hydrocarbon group in is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0139] -OC(R a34 )(R a35 )-OR a36 is eliminated on contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxy group or a carboxy group. -X a1 -OC(R a34 )(R a35 )-OR a36 In the case of a benzene ring, A a11 It is preferable that at least one of them is bonded to the o-position or the m-position, and more preferable that it is bonded to the p-position. In the case of a naphthalene ring, A a11 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a11 When the bonding position of A is the 2-position, it may be bonded to any of the 1-position and the 3-8-positions. a11 When the bonding position of A is the 1st position, at least one of them is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. a11 When the bonding position is the 2-position, it is preferably bonded to the 4- to 7-positions, and more preferably bonded to the 5- or 6-position.

[0140] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP 2010-204646 A. Preferably, the structural units represented by formulas (a1-4-1) to (a1-4-42) and R in the structural unit (a1-4) are a1 and more preferably, the structural units represented by formulae (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20), respectively. TIFF2025077020000127.tif228165

[0141] When the resin contains the structural unit (a1-4), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total of all structural units in the resin. Also, the content is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the content is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and even more preferably 20 to 60 mol%.

[0142] When the resist composition of the present invention contains a resin, the resin may contain structural units other than the structural unit represented by formula (a2-A) and the structural unit represented by formula (a1-4). Examples of structural units other than the structural unit represented by formula (a2-A) and the structural unit represented by formula (a1-4) include structural units having an acid labile group other than the structural unit represented by formula (a1-4) (hereinafter may be referred to as "structural unit (a1)"), structural units not having an acid labile group other than the structural unit represented by formula (a2-A) (hereinafter may be referred to as "structural unit (s)"), structural units other than the structural unit (a1) and the structural unit (s) (for example, a structural unit having a halogen atom described below (hereinafter may be referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group described below (hereinafter may be referred to as "structural unit (a5)"), and other structural units derived from monomers known in the field.

[0143] <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid labile group contained in the resin is preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)). TIFF2025077020000128.tif2298[In formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, or R a1 and R a2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * denotes a binding site.] TIFF2025077020000129.tif2278[In formula (2), R a1’ and R a2’each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form, together with the carbon atom to which they are bonded and X, a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na′ represents 0 or 1. * denotes a binding site.]

[0144] R a1 , R a2 and R a3 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. R a1 , R a2 and R a3 Examples of the alkenyl group in include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. R a1 , R a2 and R a3 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site). R a1 , R a2 and R a3 The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms. TIFF2025077020000130.tif10159R a1 , R a2 and R a3Examples of the aromatic hydrocarbon group in include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and an alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or a cycloalkylalkyl group such as a methylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. Preferably, ma is 0 and na is 1. R a1 and R a2 When they are bonded to each other to form an alicyclic hydrocarbon group, -C(R a1 )(R a2 )(R a3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2025077020000131.tif28139

[0145] R a1’ , R a2’ and R a3’ Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups are R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above. R a2’ and Ra3’ When they are bonded to each other to form a heterocyclic group together with the carbon atom to which they are bonded and X, -C(R a1’ )(R a2’ )-XR a3’ Examples of the group include the following: * represents a binding site. TIFF2025077020000132.tif19124R a1 , R a2 , R a3 , R a1 , R a2’ and R a3’ The halogen atom which may be contained includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a1’ and R a2’ At least one of these is preferably a hydrogen atom. na' is preferably 0.

[0146] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 is an alkyl group, ma = 0, and na = 1. As the group, a tert-butoxycarbonyl group is preferable. In formula (1), R a1 , R a2 together with the carbon atom to which they are attached form an adamantyl group, R a3 is an alkyl group, ma=0, and na=1. In formula (1), R a1 and R a2 are each independently an alkyl group; R a3 is an adamantyl group, ma=0, and na=1. Specific examples of the group (1) include the following groups: * represents a binding site. TIFF2025077020000133.tif149166

[0147] Specific examples of the group (2) include the following groups: * represents a bonding site. TIFF2025077020000134.tif55153

[0148] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group. Of the (meth)acrylic monomers having an acid labile group, preferred are those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. By using a resin having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group in a resist composition, the resolution of the resist pattern can be improved.

[0149] Examples of the structural unit derived from the (meth)acrylic monomer having the group (1) include a structural unit represented by formula (a1-0) (hereinafter, sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter, sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter, sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1) and the structural unit (a1-2), more preferably at least one or two structural units selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2025077020000135.tif44141 [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or *-O-(CH2) k1 represents --CO--O--, k1 represents an integer of 1 to 7, and * represents a bonding site with --CO--. R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. Ra02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof, and the alkyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group and aromatic hydrocarbon group may have a halogen atom. m1 represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1' represents an integer of 0 to 3.

[0150] R a01 , R a4 and R a5 The halogen atom in the formula (I) includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a01 , R a4 and R a5Examples of the alkyl group which may have a halogen atom in the above formula include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group. R a01 , R a4 and R a5 is preferably a hydrogen atom or a methyl group, and more preferably a methyl group. L a01 , L a1 and L a2 is preferably an oxygen atom or *-O-(CH2) k01 It is -CO-O- (wherein k01 is preferably an integer of any one of 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 , R a03 , R a04 , R a6 and R a7 The alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof in the formula (1) include R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above. R a02 , R a03 , and R a04 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a6 and Ra7 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group. R a02 , R a03 , R a04 , R a6 and R a7 The alicyclic hydrocarbon group preferably has 5 to 12 carbon atoms, and more preferably 5 to 10 carbon atoms. R a02 , R a03 , R a04 , R a6 and R a7 The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms. In the group in which an alkyl group and an alicyclic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the alicyclic hydrocarbon group is preferably 18 or less. In the group in which an alkyl group and an aromatic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the aromatic hydrocarbon group is preferably 18 or less. R a02 and R a03 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, phenyl group or naphthyl group which may have a halogen atom. R a04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, cyclohexyl group or adamantyl group which may have a halogen atom. R a6 and R a7is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group or naphthyl group which may have a halogen atom, and even more preferably an ethyl group, isopropyl group, t-butyl group, ethenyl group or phenyl group which may have a halogen atom. m1 is preferably an integer of 0 to 3, and more preferably 0 or 1. n1 is preferably an integer of 0 to 3, and more preferably 0 or 1. n1' is preferably 0 or 1.

[0151] Examples of the structural unit (a1-0) include a structural unit represented by any one of formulas (a1-0-1) to (a1-0-24) and R a01 and structural units in which the methyl group corresponding to the formula (a1-0-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom) or another alkyl group. Structural units represented by any of formulas (a1-0-1) to (a1-0-10), (a1-0-13), (a1-0-14) and (a1-0-19) to (a1-0-24) are preferred. TIFF2025077020000136.tif120160

[0152] Examples of the structural unit (a1-1) include structural units derived from monomers described in JP 2010-204646 A. Among them, structural units represented by any one of formulas (a1-1-1) to (a1-1-7) and R in the structural unit (a1-1) are a4 In the above formula (a1-1-1), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-2), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-3), a methyl group is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. In the above formula (a1-1-4), a structural unit is more preferred. JPEG2025077020000137.jpg39169

[0153] The structural unit (a1-2) includes a structural unit represented by any one of formulas (a1-2-1) to (a1-2-20) and R a5 and structural units in which a methyl group corresponding to the formula (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20) are replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. TIFF2025077020000138.tif91163 When the resin contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these units is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin. Also, 95 mol% or less is included, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, 10 to 95 mol% is included, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%. When the resin contains the structural unit (a1-0), the content thereof is 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, even more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, and even more preferably 35 mol% or more, based on the total structural units of the resin. Also, the content is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, and even more preferably 60 mol% or less. Specifically, the content is 5 to 80 mol%, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%. When the resin contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these units relative to the total structural units of the resin is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. Also, 95 mol% or less is included, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, 10 to 95 mol% is included, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, even more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and even more preferably 20 to 70 mol%.

[0154] Examples of structural units derived from a (meth)acrylic monomer having a group (2) include, in addition to the structural unit (a1-4) described above, a structural unit represented by formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). TIFF2025077020000139.tif4759[In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. Z a1 is a single bond or -(CH2) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 It represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-. s1 represents an integer of 1 to 3. s1' represents an integer of 0 to 3.

[0155] R in formula (a1-5) a8 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples of the above-mentioned examples are the same as those given above. In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 Of these, it is preferred that one is -O- and the other is -S-. It is preferable that s1 is 1. s1' is preferably an integer of 0 to 2. Z a1 is preferably a single bond or -CH2-CO-O-.

[0156] Examples of the structural unit (a1-5) include structural units derived from monomers described in JP 2010-61117 A. Among them, the structural units represented by formulae (a1-5-1) to (a1-5-4) are preferred, and the structural unit represented by formula (a1-5-1) or (a1-5-2) is more preferred. TIFF2025077020000140.tif31130 When the resin contains the structural unit (a1-5), the content thereof is 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, and even more preferably 25 mol% or more, based on the total structural units of the resin. Also, 80 mol% or less is mentioned, preferably 70 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, 1 to 50 mol% is preferred, 3 to 45 mol% is more preferred, 5 to 40 mol% is even more preferred, and 5 to 30 mol% is even more preferred.

[0157] An example of the structural unit (a1) having a group (1) is a structural unit represented by formula (a1-6) (hereinafter, sometimes referred to as "structural unit (a1-6)"). TIFF2025077020000141.tif3481[In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached. X a61 is a single bond, -CO-O-* or -CO-NR a65 -*, where * represents the bonding site with Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-OL a61 -or*-CO-OLa62 -, * represents the bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

[0158] R in formula (a1-6) a61 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples of the above-mentioned examples are the same as those given above. R a61 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group. R a62 , R a63 , R a64 and R a65 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, etc. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and further preferably a methyl group or an ethyl group. R a62 , R a63 and R a64 The cyclic hydrocarbon group in the formula (I) includes an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, and a norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenylene group and a naphthylene group. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. R a62 and R a63 Examples of the ring formed by bonding with each other include an adamantane ring, a cyclopentane ring, and a cyclohexane ring. a62 and R a63 When they are bonded to each other to form a ring, -C(R a62 )(R a63 )(R a64 ) includes the following groups. * represents a bonding site with an oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, and more preferably 3 to 12. TIFF2025077020000142.tif32110

[0159] L a61 and L a62 Examples of the alkanediyl group having 1 to 4 carbon atoms include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. L a61 and L a62 is preferably each independently a methylene group or an ethylene group. X a61 is preferably a single bond or -CO-O-*, and more preferably a single bond. X a62 is preferably a single bond or *-OL a61 -, and more preferably a single bond.

[0160] Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms for Ar include a phenylene group, a 1-naphthylene group, a 2-naphthylene group, a 1-anthrylene group, a 9-anthrylene group, a biphenylene group, a 1-phenanthrylene group, and a 2-phenanthrylene group. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0161] Examples of the halogen atom include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and further preferably a methyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and further preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and further preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. The substituent is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group.

[0162] Examples of the structural unit (a1-6) include structural units represented by formulae (a1-6-1) to (a1-6-44), preferably structural units represented by formulae (a1-6-1) to (a1-6-9), more preferably structural units represented by formulae (a1-6-1), (a1-6-2), (a1-6-4), (a1-6-5), (a1-6-7) or (a1-6-8), and even more preferably structural units represented by formulae (a1-6-1) or (a1-6-2). a61The structural unit in which the hydrogen atom corresponding to is replaced by a methyl group, etc., and the structural unit in which R a61 The structural unit (a1-6) also includes a structural unit in which the methyl group corresponding to the following formula is replaced with a hydrogen atom or the like. TIFF2025077020000143.tif226166

[0163] When the resin contains the structural unit (a1-6), the content thereof is 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more, based on the total structural units of the resin. Also, the content is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the content is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 65 mol%.

[0164] Further, examples of the structural unit (a1) include the following structural units. TIFF2025077020000144.tif33167

[0165] When the resin contains structural units represented by formulae (a1-7-1) to (a1-7-7), the content of the structural units is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin. Also, the content is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, the content is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0166] Further, examples of the structural unit (a1) include the following structural units. TIFF2025077020000145.tif51120When the resin contains the structural units represented by formulas (a1-8-1) to (a1-8-3), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total structural units of the resin. Also, 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, it is preferably 10 to 60 mol %, more preferably 15 to 55 mol %, even more preferably 20 to 50 mol %, even more preferably 20 to 45 mol %, and particularly preferably 20 to 40 mol %.

[0167] Structural unit(s) The structural unit (s) is derived from a monomer having no acid labile group (hereinafter, may be referred to as "monomer (s)"). As the monomer from which the structural unit (s) is derived, a monomer having no acid labile group known in the resist field can be used. The structural unit (s) preferably has a hydroxy group, a carboxy group, or a lactone ring. If a resin containing a structural unit having a hydroxy group or a carboxy group and no acid labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and no acid labile group (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and adhesion to the substrate can be improved. In addition to the above-mentioned structural units, the structural unit (s) may also include a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), or a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)").

[0168] <Structural unit (a2)> The structural unit (a2) is a structural unit represented by formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group, or a carboxy group. TIFF2025077020000146.tif4095 [In formula (a2), all symbols have the same meanings as defined above.] R in formula (a2) a2 and A a21 Examples of the substituent include the same ones as those exemplified in formula (a2-A).

[0169] A a21 is a single bond, *-CO-O- or *-CO-OA a22 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0170] L a21 The hydrocarbon group in is a (na2+1)-valent hydrocarbon group, and examples of such cyclic hydrocarbon groups include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings or bridged rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be groups formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group). L a21 Examples of the chain hydrocarbon group include divalent to hexavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, an alkanepentyl group, and an alkanehexyl group. Examples of the alkanediyl group include A a21 Examples of the alkanediyl groups include those shown above. Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, and a heptadecanetriyl group. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, and a heptadecanetetrayl group. Examples of the alkanol groups include a methane pentaylene group, an ethane pentaylene group, a propane pentaylene group, a butane pentaylene group, a pentane pentaylene group, and a hexane pentaylene group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in the formula (I) include the following alicyclic hydrocarbon groups: The binding site may be any position. TIFF2025077020000147.tif46168 For example, divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, a cycloalkanepentyl group, and a cycloalkanehexyl group are exemplified. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, and cyclodecanetetrayl group; Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, and bicyclo[3.3.0]octanetetrayl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group has preferably 3 to 20 carbon atoms, more preferably 3 to 18, even more preferably 3 to 16, still more preferably 3 to 12, still more preferably 6 to 12, and particularly preferably 6 to 10. L a21 Examples of the aromatic hydrocarbon group in include divalent to hexavalent aromatic hydrocarbon groups such as an arylene group, an arenetriyl group, an arenettetrayl group, an arenetyl group, and an arenethexyl group. Specific examples thereof include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, and a phenanthrenetetrayl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The aromatic hydrocarbon group preferably has 6 to 20 carbon atoms, more preferably 6 to 18 carbon atoms, further preferably 6 to 14 carbon atoms, even further preferably 6 to 12 carbon atoms, and even further preferably 6 to 10 carbon atoms. Examples of groups that combine two or more of these groups include a group that combines an alicyclic hydrocarbon group with a chain hydrocarbon group, a group that combines an aromatic hydrocarbon group with a chain hydrocarbon group, a group that combines an alicyclic hydrocarbon group with an aromatic hydrocarbon group, and a group that combines an alicyclic hydrocarbon group with a chain hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more of each of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. In addition, when any of the groups is A a21 and L a22 may be bound to Examples of the group in which -CH2- in the hydrocarbon group is replaced with -O-, -S-, -SO2- or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and a group in which two or more of these groups are combined. Examples of these replaced groups include groups in which one or more hydrogen atoms of these groups are replaced with a bonding site, within the range permitted by the upper limit of the carbon number. Furthermore, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the same groups as exemplified in this specification, within the upper limit of the number of carbon atoms permitted. Examples of the combined groups in which --CH2-- is replaced by --O--, --S--, --CO-- or --SO2-- include the following groups: The bonding site may be any position. TIFF2025077020000148.tif27164L a21 The hydrocarbon group in may have one or more substituents, such as a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, an alkyl group having 1 to 16 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), an acryloyloxy group, or a methacryloyloxy group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a21The hydrocarbon group in the formula (I) can have a halogen atom as a substituent, and thus can substantially have a substituent such as a haloalkyl group. Examples of the haloalkyl group include a fluorinated alkyl group, a chlorinated alkyl group, a brominated alkyl group, and an iodinated alkyl group, and examples thereof include a chloromethyl group, a bromomethyl group, an iodomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, and a perfluorobutyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. L a21 The hydrocarbon group of L a21 can substantially have a substituent such as an alkyl group. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 10, still more preferably 1 to 8, still more preferably 1 to 6, still more preferably 1 to 4, and still more preferably 1 to 3. L a21 L is a group in which -CH2- in the hydrocarbon group is replaced with -O- or -CO-, etc. a21can substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, a thiol group, a sulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an acryloyloxy group, or a methacryloyloxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 12, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms in the alkoxycarbonyl group, the alkylcarbonyl group, or the alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 to 3. The number of carbon atoms in the alkoxyalkyl group or the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, even more preferably 2 to 6, and even more preferably 2 to 4. The above groups also include the same groups as those exemplified in this specification. L a21 The substituents which the hydrocarbon group in the formula (I) may have are preferably a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), more preferably a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), still more preferably a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, still more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and still more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, or an ethoxyethoxy group. Also, L a21 In the case where the alkanediyl group is replaced by -O- or -CO-, for example, *-L a23 -X a21 -(La23 represents an alkanediyl group having 1 to 8 carbon atoms; X a21 represents -O-, -O-CO-, -CO-O-, or -O-CO-O-, and * represents A a21 It is also preferred that the bond is L a21 is preferably a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (however, -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (however, -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), or a group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent and a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (however, -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO- and -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-). and more preferably an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO- and -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-).

[0171] L a22Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, and dodecane-1,12-diyl group. Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, 1-methylpropane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-dimethylpropane-1,3-diyl, pentane-2,4-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl groups. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. L a22 may have one fluorine atom or two or more fluorine atoms. L a22 The -CH2- in the chain hydrocarbon group may be replaced by -O- or -CO-, and these replaced groups may be, within the range permitted by the upper limit of the carbon number, a21 Examples of the above-mentioned examples are the same as those given above. na2 is preferably an integer of 1 to 4, and more preferably an integer of 1 to 3. L a21 In the case where R is a single bond or a chain hydrocarbon group, examples of the structural unit (a2) include the following structural units. a2 In the same manner as the following structural unit, a structural unit in which a methyl group corresponding to the following formula is replaced with a hydrogen atom or the like is also a suitable structural unit of the structural unit (a2). TIFF2025077020000149.tif67168

[0172] When a resist pattern is produced from the resist composition of the present invention, when a high energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) is used as an exposure light source, the structural unit (a2) having a phenolic hydroxyl group is preferred, and the structural unit (a2-A) is more preferred. When an ArF excimer laser (193 nm) or the like is used, the structural unit (a2) having an alcoholic hydroxyl group is preferred, and the structural unit (a2-C) and the structural unit (a2-D) described below are more preferred. The structural unit (a2) may contain one type alone or two or more types.

[0173] In the structural unit (a2), L a21 is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include a structural unit represented by formula (a2-B) (hereinafter may be referred to as "structural unit (a2-B)"), a structural unit represented by formula (a2-C) (hereinafter may be referred to as "structural unit (a2-C)"), and a structural unit represented by formula (a2-D) (hereinafter may be referred to as "structural unit (a2-D)"). TIFF2025077020000150.tif46100 [In formula (a2-B) and formula (a2-C), R a2 has the same meaning as formula (a2). R a27 has the same meaning as in formula (a2-A). a25 is -O- or *-O-(CH2) k2 represents --CO--O--, and k2 represents an integer of 1 to 7. * represents a bonding site with --CO--. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer of 1 to 5. When nB2 is 2 or more, a plurality of X a2 may be the same or different from each other. nB22 represents an integer of 0 to 8. When nB22 is 2 or more, a plurality of R a27 may be the same or different from each other. nC22 represents an integer of 0 to 10. When nC22 is 2 or more, multiple R a27 may be the same or different. L a25 is preferably -O-, -O-(CH2) f1 It is -CO-O- (wherein f1 represents an integer of 1 to 4), and more preferably -O-. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably an integer of 0 to 3, more preferably 0, 1 or 2, and further preferably 0 or 1. nC22 is preferably an integer of 0 to 6, more preferably an integer of 0 to 3, and further preferably 0 or 1.

[0174] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from monomers described in JP-A-2010-204646, the following structural units, and R a2 In particular, structural units represented by any one of formulae (a2-B-1) to (a2-B-5) and formulae (a2-C-1) to (a2-C-9) are preferred. TIFF2025077020000151.tif80164 When the resin contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on the total structural units of the resin. Also, 45 mol% or less is mentioned, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, 1 to 45 mol% is mentioned, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and even more preferably 1 to 10 mol%.

[0175] TIFF2025077020000152.tif51106 [In formula (a2-D), all symbols have the same meaning as defined above.] R a2 and A a21 The examples of the formula (a2) include the same as those exemplified for the formula (a2). R a27 Examples of the substituent include the same ones as those exemplified in formula (a2-A). R a21 and R a22 Examples of the fluorinated alkyl groups are each independently a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and the like. R a21 and R a22 As the alkyl group, a trifluoromethyl group is preferable. L a24Examples of the alkanediyl group include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group. L a24 is preferably a single bond or a methylene group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nD2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, even more preferably 1 or 2, and even more preferably 1. Also preferably, nD2 is 1 and the group in parentheses is bonded to the para position. nD22 is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, further preferably 0 or 1, and even more preferably 0.

[0176] The structural unit (a2-D) is more preferably a structural unit represented by the following formula (a2-D1) (hereinafter, sometimes referred to as "structural unit (a2-D1)"). TIFF2025077020000153.tif51107[In formula (a2-D1), R a2 , A a21 , R a27 , nD2 and nD22 have the same meaning as in formula (a2-D). In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0177] Examples of the structural unit (a2-D) include the structural units shown below. TIFF2025077020000154.tif62167

[0178] In the structural units represented by formulae (a2-D-1) to (a2-D-8), R a2 In the structural units represented by formulae (a2-D-9) to (a2-D-16), the hydrogen atom corresponding to R a2 Specific examples of the structural unit (a2-D) include structural units in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, etc. Among these, the structural units represented by formulae (a2-D-1) to (a2-D-8) are preferred, the structural units represented by formulae (a2-D-1) to (a2-D-4) are more preferred, and the structural unit represented by formula (a2-D-1) is even more preferred.

[0179] When the resin contains the structural unit (a2-D), the content thereof is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin. Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0180] <Structural unit (a3)> The lactone ring of the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring and another ring. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0181] The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), (a3-2), (a3-3) or (a3-4). One of these may be contained alone, or two or more of them may be contained. TIFF2025077020000155.tif51164 [In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 , L a5 and L a6 are each independently -O- or *-O-(CH2) k3 It represents a group represented by -CO-O- (k3 represents an integer of any of 1 to 7). L a7 , -O-, *-OL a8 -O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bonding site with the carbonyl group. R a18 , R a19 , R a20 and R a24 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3. w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , Ra23 and / or R a25 may be the same or different.]

[0182] R a21 , R a22 , R a23 and R a25 Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group. R a18 , R a19 , R a20 and R a24 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples of the above-mentioned examples are the same as those given above. L a8 and L a9 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. L a4 ~L a6 are each independently preferably -O- or *-O-(CH2) k3 In the -CO-O- group, k3 is a group in which k3 is any integer of 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and further preferably an oxygen atom. L a7 is preferably -O- or *-OL a8 It is —CO—O—, and more preferably —O—, —O—CH2—CO—O— or —O—C2H4—CO—O—. R a18 , R a19 , R a20 and R a24is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 , R a23 and R a25 are each independently preferably a carboxy group, a cyano group, or a methyl group. p1, q1 and r1 each independently represent an integer of preferably 0 to 2, and more preferably 0 or 1. w1 is preferably an integer of 0 to 2, and more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4)'. TIFF2025077020000156.tif4051 (in the formula, R a24 , L a7 has the same meaning as above.)

[0183] Examples of the structural unit (a3) ​​include structural units derived from monomers described in JP 2010-204646 A, JP 2000-122294 A, and JP 2012-41274 A. Examples of the structural unit (a3) ​​include structural units represented by any one of formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the structural unit, R in formulas (a3-1) to (a3-4) a18 , R a19 , R a20 and R a24 A structural unit in which a methyl group corresponding to the following formula is replaced with a hydrogen atom is preferred. TIFF2025077020000157.tif108164 When the resin contains the structural unit (a3), the total content thereof is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin. Also, 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, 1 to 70 mol% is mentioned, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, even more preferably 5 to 65 mol%, even more preferably 5 to 60 mol%, and even more preferably 10 to 60 mol%. The content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3) or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin. Also, it is preferably 60 mol% or less, more preferably 55 mol% or less, even more preferably 50 mol% or less, still more preferably 40 mol% or less, even more preferably 30 mol% or less, still more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it is preferably 1 to 60 mol%, more preferably 3 to 60 mol%, more preferably 3 to 55 mol%, even more preferably 5 to 55 mol%, even more preferably 5 to 50 mol%, and even more preferably 10 to 50 mol%.

[0184] <Structural unit (a4)> The structural unit represented by formula (a4) is shown below. TIFF2025077020000158.tif3354[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R42 represents a saturated hydrocarbon group having 1 to 24 carbon atoms and containing a halogen atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.]

[0185] R 42 Examples of the saturated hydrocarbon group represented by the formula (I) include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. Examples of the chain saturated hydrocarbon group include linear alkyl groups such as a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a decyl group, a dodecyl group, a pentadecyl group, a hexadecyl group, a heptadecyl group, and an octadecyl group, and branched alkyl groups such as an isopropyl group and an isobutyl group. Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkyl groups, such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group; and polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkyl groups, such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* represents a bonding site): TIFF2025077020000159.tif10146 Examples of groups formed by combinations include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group-alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic saturated hydrocarbon group-alkyl group. Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl groups, and branched alkanediyl groups such as propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl groups. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom contained in the saturated hydrocarbon group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 42 Examples of the saturated hydrocarbon group in which -CH- is replaced with -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, and a group combining two or more of these groups. Examples of these replaced groups include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0186] The structural unit (a4) is R 42 is preferably a saturated hydrocarbon group having a fluorine atom. 42 Examples of the structural unit (a4) which is a saturated hydrocarbon group having a fluorine atom include a structural unit represented by formula (a4-1) (hereinafter may be referred to as "structural unit (a4-1)"), a structural unit represented by formula (a4-2) (hereinafter may be referred to as "structural unit (a4-2)"), a structural unit represented by formula (a4-3) (hereinafter may be referred to as "structural unit (a4-3)"), and a structural unit represented by formula (a4-A) (hereinafter may be referred to as "structural unit (a4-A)"). The structural unit represented by formula (a4-1) is a structural unit shown below. TIFF2025077020000160.tif4964[In formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents a fluorine atom-containing alkanediyl group having 1 to 8 carbon atoms or a fluorine atom-containing cycloalkanediyl group having 3 to 12 carbon atoms. R42f represents a hydrogen atom or a fluorine atom.

[0187] L 41 Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, and butane-1,4-diyl, and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, and 2-methylpropane-1,2-diyl. The terminal of the branched alkanediyl group may be a methyl group. L 42f Examples of the alkanediyl group having a fluorine atom in the formula (I) include linear alkanediyl groups having a fluorine atom, such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, and an octane-1,8-diyl group having a fluorine atom; Examples of branched alkanediyl groups having fluorine atoms include ethane-1,1-diyl groups having fluorine atoms, propane-1,1-diyl groups having fluorine atoms, propane-1,2-diyl groups having fluorine atoms, propane-2,2-diyl groups having fluorine atoms, pentane-2,4-diyl groups having fluorine atoms, 2-methylpropane-1,3-diyl groups having fluorine atoms, 2-methylpropane-1,2-diyl groups having fluorine atoms, pentane-1,4-diyl groups having fluorine atoms, and 2-methylbutane-1,4-diyl groups having fluorine atoms. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42fExamples of the cycloalkanediyl group having a fluorine atom in the formula (I) include monocyclic cycloalkanediyl groups having a fluorine atom, such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cycloheptane-1,4-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom; Examples of polycyclic cycloalkanediyl groups having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom. L 42f The number of fluorine atoms contained in the alkanediyl group and cycloalkanediyl group having a fluorine atom in the above formula may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group and cycloalkanediyl group having a fluorine atom in the above formula (I) are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0188] L 42fExamples of the perfluoroalkanediyl group in the formula (I) include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3 ,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group. L 42f Examples of the perfluorocycloalkanediyl group in the formula (I) include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, and a perfluoroadamantanediyl group.

[0189] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group, or an ethylene group, and even more preferably a single bond or a methylene group. L 42f is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0190] The structural unit (a4-1) may be any of the structural units shown below and R in the structural unit (a4-1) in the structural unit shown below. 41In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025077020000161.tif98159The structural unit represented by formula (a4-2) is the structural unit shown below. TIFF2025077020000162.tif5574[In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. R 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. However, L 43f and R 43f At least one of L has a fluorine atom. 43f and R 43f The maximum total carbon number is 21.

[0191] L 43f and R 43f Examples of the saturated hydrocarbon group in include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. 43f and R 43f Examples of saturated hydrocarbon groups in the formula are L 43f and R 43f As long as the upper limit of the total number of carbon atoms in 42 Examples of the saturated hydrocarbon group include the same groups as the saturated hydrocarbon groups exemplified above.

[0192] L 43f The saturated hydrocarbon group is preferably an alkanediyl group having 1 to 6 carbon atoms or a group represented by the formula (L43f-1). TIFF2025077020000163.tif14120[In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. L 47f represents a single bond or a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-. However, L 45f , L 46f , L 47f , X 46f and X 47f The total number of carbon atoms is 7 or less. * and ** are binding sites, ** is -O-CO-R 43f This is the binding site for

[0193] L in the group represented by formula (L43f-1) 45f , L 46f and L 47f Examples of the divalent saturated hydrocarbon group represented by include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and a divalent saturated hydrocarbon group formed by combining an alkanediyl group and a divalent alicyclic saturated hydrocarbon group, etc. Specific examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, etc. It is preferred that s is 0.

[0194] Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** represents -O-CO-R 43f This is the binding site for TIFF2025077020000164.tif47140

[0195] R 43fis preferably a saturated hydrocarbon group having a fluorine atom. In this case, examples of the structural unit represented by formula (a4-2) include structural units represented by formula (a4-2A) or (a4-2B). TIFF2025077020000165.tif69102 [In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represents the same as in formula (a4-2). R 43fA represents a saturated hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom. A 43f represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents A 43f It represents the binding site with R 43fB represents a saturated hydrocarbon group having 1 to 17 carbon atoms which may contain a fluorine atom. However, in formula (a4-2A), L 43f and R 43fA The total number of carbon atoms in formula (a4-2B) is 21 or less, and in formula (a4-2B), L 43f , A 43f , X 43 and R 43fB The total number of carbon atoms in A is 21 or less. 43f and R 43fB At least one of them has at least one fluorine atom. R 43fA The saturated hydrocarbon group of R is as long as the upper limit of the carbon number permits. 42 Examples of the saturated hydrocarbon groups include the saturated hydrocarbon groups exemplified by the above. R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and containing a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and containing a fluorine atom, or a group combining these, *-(CF2) n43f -R 42’(* represents the bonding site with the carbonyl group. n43f represents an integer of 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. A 43f and R 43fB The saturated hydrocarbon group represented by R in formula (a4) is as large as possible within the upper limit of the number of carbon atoms. 42 Examples of the saturated hydrocarbon groups include the saturated hydrocarbon groups exemplified by the above. A 43f is preferably a divalent chain saturated hydrocarbon group which may have a fluorine atom, a divalent alicyclic saturated hydrocarbon group, or a combination thereof, more preferably a divalent chain saturated hydrocarbon group which has a fluorine atom, and further preferably a fluorinated alkanediyl group having 1 to 6 carbon atoms. R 43fB The saturated hydrocarbon group which may have a fluorine atom is preferably a chain saturated hydrocarbon group which may have a fluorine atom, an alicyclic saturated hydrocarbon group or a group combining these, more preferably an alkyl group having 1 to 12 carbon atoms which may have a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms or a group combining these, and more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4- More preferred are fluorinated alkyl groups such as an octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a heptyl group, a perfluoroheptyl group, an octyl group, and a perfluorooctyl group; a cyclopropylmethyl group, a cyclopropyl group, a cyclobutylmethyl group, a cyclopentyl group, a cyclohexyl group, a perfluorocyclohexyl group, an adamantyl group, an adamantylmethyl group, an adamantyldimethyl group, a norbornyl group, a norbornylmethyl group, a perfluoroadamantyl group, and a perfluoroadamantylmethyl group. In formula (a4-2B), *-A f43 -X 43 -R f43B An example of a structure that the group represented by the formula (I) can take is the following structure (* indicates the bonding site with the carbonyl group). TIFF2025077020000166.tif15170 The structural unit represented by formula (a4-2A) includes the structural units shown below and R in the structural unit represented by formula (a4-2A) in the structural units shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025077020000167.tif99167

[0196] The structural unit represented by formula (a4-2B) includes the structural units shown below and R in the structural unit represented by formula (a4-2B) in the structural units shown below. 41 In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025077020000168.tif111163

[0197] The structural unit (a4) also includes a structural unit represented by formula (a4-3). TIFF2025077020000169.tif5576[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. R 44f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. However, L 44f and R 44f At least one of L has a fluorine atom. 44f and R 44f The total number of carbon atoms in the molecule is limited to 21.

[0198] L 44f and R 44f Examples of the saturated hydrocarbon group in include linear or branched chain saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these groups. 44f and R 44f Examples of saturated hydrocarbon groups in the formula are L 44f and R 44f As long as the upper limit of the total number of carbon atoms in 42 Examples of the saturated hydrocarbon group include the same groups as the saturated hydrocarbon groups exemplified above. L 44f is preferably an alkanediyl group having 1 to 14 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and -(CH2) j1 -, -(CH2) j2 -O-(CH2) j3 -or-(CH2) j4 -CO-O-(CH2) j5 It is more preferably a group represented by the formula - (j1 to j5 each independently represent an integer of 1 to 6). It is also preferably an alkanediyl group having 1 to 4 carbon atoms (one -CH2- contained in the alkanediyl group may be replaced by -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f is preferably a saturated hydrocarbon group having 1 to 10 carbon atoms and having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, an alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms and having a fluorine atom, or a group combining these, further preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms and having a fluorine atom.

[0199] Examples of the structural unit represented by formula (a4-3) include the following structural units and structural units represented by the following formulas: 41In the structural unit, a methyl group corresponding to the above formula is replaced with a hydrogen atom. TIFF2025077020000170.tif85170

[0200] TIFF2025077020000171.tif3686[In formula (a4-A), R 1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 11 represents a single bond or *-CO-O-. * represents R 1 represents the bonding site with the carbon atom to which it is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 1 may be bonded to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-. mi represents an integer of 1 to 4. When mi is 2 or more, the groups in the parentheses may be the same or different.

[0201] R 1 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples of the above-mentioned examples are the same as those given above. R 1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. L1 Examples of the aliphatic hydrocarbon group in include chain hydrocarbon groups and monocyclic or polycyclic (including spiro rings, fused rings, bridged rings, etc.) alicyclic hydrocarbon groups, and may be groups combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group). Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanpentyl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4.

[0202] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups: The binding site may be any position. TIFF2025077020000172.tif45164For example, divalent to pentavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, and a cycloalkanepentyl group can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, etc. Examples of such groups include cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, spirocyclohexane-1,2'-cyclopentane-diyl group, and spiroadamantane-2,3'-cyclopentane-diyl group, and polycyclic alicyclic hydrocarbon groups such as spiro rings having a cycloalkanediyl group bonded to a norbornanediyl group or an adamantanediyl group via a spiro bond. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, further preferably 3 to 16 carbon atoms, and further preferably 3 to 12 carbon atoms.

[0203] Examples of groups that combine two or more types include a group that combines an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups and chain hydrocarbon groups may be combined. In addition, when any group is X 11 may be bound to Examples of groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), Examples of such an alkyl group include a group in which a hydroxyl group is bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group- etc.), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group- etc.), and a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group- etc.). * is X 11 It represents the binding site with Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites.

[0204] L 1 -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms may be replaced by -O-, -S-, -SO2- or -CO-. L 1 When --CH2-- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms is replaced with --O--, --S--, --SO2-- or --CO--, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the aliphatic hydrocarbon group. Examples of groups in which -CH2- in an aliphatic hydrocarbon group is replaced with -O-, -S-, -SO2- or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, and groups in which two or more of these groups are combined, etc. Examples of these replaced groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. Furthermore, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the same groups as exemplified in this specification, within the upper limit of the number of carbon atoms permitted.

[0205] L 1 The aliphatic hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms (-CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the haloalkyl group having 1 to 4 carbon atoms include a fluorinated alkyl group having 1 to 4 carbon atoms, a chlorinated alkyl group having 1 to 4 carbon atoms, a brominated alkyl group having 1 to 4 carbon atoms, and an iodinated alkyl group having 1 to 4 carbon atoms. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 4 carbon atoms (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 3, and more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, further preferably 1 to 4, and further more preferably 1 to 3. Examples of the alicyclic hydrocarbon group having 3 to 18 carbon atoms include monocyclic cycloalkyl groups such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, and a cyclodecyl group, and polycyclic cycloalkyl groups such as a decahydronaphthyl group, an adamantyl group, and a norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, and further preferably 3 to 10. Examples of the aromatic hydrocarbon group having 6 to 18 carbon atoms include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 12, and further preferably 6 to 10. When -CH2- in the alkyl group is replaced with -O- or -CO-, the number of carbon atoms before the replacement is regarded as the total number of carbon atoms in the alkyl group. Examples of the replaced group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, and an alkylcarbonyloxy group. These replaced groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. The alkoxy group preferably has 1 to 9 carbon atoms, more preferably 1 to 6 carbon atoms, further preferably 1 to 4 carbon atoms, and further preferably 1 to 3 carbon atoms. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 9, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 9, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Furthermore, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced by -O- or -CO- include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms. L 1 The substituents which the aliphatic hydrocarbon group in the formula (I) may have are preferably a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (-CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced with -O- or -CO-), more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and further preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group. L 1 is R 3When the fluorinated alkyl group does not form an alicyclic hydrocarbon group with the fluorinated alkyl group, it is preferably a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-), or a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and a alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent. and a cycloaliphatic hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-). It is preferably a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a cycloaliphatic hydrocarbon group and a cycloaliphatic hydrocarbon group (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-). A group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms with an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), is more preferred, and examples thereof include a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a chain hydrocarbon group having 1 to 6 carbon atoms and It is more preferable that the group is a group formed by combining an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) or a group formed by combining an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a chain hydrocarbon group having 1 to 6 carbon atoms, and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-).

[0206] R 2Examples of the fluorinated alkyl group having 1 to 8 carbon atoms in the formula (I) include a difluoromethyl group, a trifluoromethyl group, a 1,1-difluoroethyl group, a 2,2-difluoroethyl group, a 2,2,2-trifluoroethyl group, a perfluoroethyl group, a 1,1,2,2-tetrafluoropropyl group, a 1,1,2,2,3,3-hexafluoropropyl group, a perfluoroethylmethyl group, a 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 1,1,2,2-tetrafluorobutyl group, a 1,1,2,2,3,3-hexafluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluorobutyl group, a 1,1-bis(trifluoro)methyl group, Examples of the fluorinated alkyl group include -2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, and perfluorooctyl group. The number of carbon atoms of the fluorinated alkyl group is preferably 1 to 6, more preferably 1 to 5, even more preferably 1 to 4, and even more preferably 1 to 3. R 3 The fluorinated alkyl group having 1 to 6 carbon atoms in R is as long as the upper limit of the carbon number allows. 2 The same examples of the fluorinated alkyl groups having 1 to 6 carbon atoms as those given as examples of the fluorinated alkyl groups above are also included. R 2 is R 3 When is a fluorinated alkyl group having 1 to 6 carbon atoms, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 3 carbon atoms, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group. R2 is R 3 When is a hydrogen atom, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 5 carbon atoms, and even more preferably a fluorinated alkyl group having 3 to 5 carbon atoms. R 3 L 1 When R is bonded to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, 3 L 1 Examples of the group formed by bonding with include groups represented by the following formulas: In the following formulas, * and ** represent bonding sites, and one of the two ** represents a bonding site with a hydroxy group and the other represents a bonding site with R 2 represents the binding site with L 1A , L 1 R is a part of a hydrocarbon group and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. 3 L 1 The alicyclic hydrocarbon group formed by bonding with the above preferably has 3 to 10 carbon atoms, more preferably 3 to 8 carbon atoms, and further preferably 3 to 6 carbon atoms. TIFF2025077020000173.tif25130R 3 is preferably a hydrogen atom or a fluorinated alkyl group having 1 to 3 carbon atoms. mi is preferably an integer of 1 to 3, more preferably 1 or 2, and even more preferably 1.

[0207] Examples of the structural unit (a4-A) include the following structural units. In the following structural units, R 1 and R 1 Specific examples of the structural unit (a4-A) include structural units in which a hydrogen atom corresponding to the following is replaced with a halogen atom, a haloalkyl group or an alkyl group. TIFF2025077020000174.tif192169

[0208] When the resin contains the structural unit (a4), the content thereof is preferably from 1 to 20 mol %, more preferably from 2 to 15 mol %, and even more preferably from 3 to 10 mol %, based on all structural units in the resin.

[0209] <Structural unit (a5)> The non-leaving hydrocarbon group contained in the structural unit (a5) may be a group containing a linear, branched or cyclic hydrocarbon group. Among these, the structural unit (a5) is preferably a group containing an alicyclic hydrocarbon group. An example of the structural unit (a5) is a structural unit represented by the formula (a5-1). TIFF2025077020000175.tif3971[In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-.]

[0210] R 52 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group, a norbornyl group, and the like. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group...

Claims

1. An acid generator comprising a salt represented by formula (I): [In formula (I), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1, and when X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0. R １ , R ２ and R ３ are each independently *-X １ -R １０ Or *-X １ -L １０ -X ２ -R １０ Represents. X １ and X ２ are each independently *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (wherein * is Ar １ , Ar ２ , Ar ３ , a benzene ring or L １０ ) represents the binding site with L １０ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R １０ represents a group represented by formula (IC). R ４ , R ５ and R ６ each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X １ -R １０ Or *-X １ -L １０ -X ２ -R １０ The hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S-, -SO- or -SO ２ It may be replaced with -. R ７ , R ８ and R ９ each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X １ -R １０ Or *-X １ -L １０ -X ２ -R １０ The hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S-, -SO- or -SO ２ When X is a sulfur atom, R ７ and R ８ Or R ８ and R ９ is bonded to S ＋ The ring may contain —CH 2 - is -O-, -S-, -CO-, -SO- or -SO ２ R forming the ring may be replaced with -. ７ and R ８ Or R ８ and R ９ , S ＋ and a single bond formed between two benzene rings connecting the two. A １ , A ２ and A ３ each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group optionally having a substituent, 2 - is -O-, -CO-, -S- or -SO ２ It may be replaced by -. Ar １ , Ar ２ and Ar ３ each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m1 represents an integer of 0 to 5, and when m1 is 2 or more, the groups in multiple parentheses may be the same or different. m2 represents an integer of 0 to 5, and when m2 is 2 or more, the groups in the parentheses may be the same or different. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m4 represents an integer of 0 to 4, and when m4 is 2 or more, a plurality of R ４ may be the same or different from each other. m5 represents an integer of 0 to 4, and when m5 is 2 or more, a plurality of R ５ may be the same or different from each other. m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other. m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R ７ may be the same or different from each other. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R ８ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 0≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5, and at least one of m1, m2, m3, m7, m8, and m9 represents an integer of 1 or more; R １ , R ２ , R ３ , R ７ , R ８ and R ９ At least one of the following is *-X １ -R １０ Or *-X １ -L １０ -X ２ -R １０ Represents. A represents a nitrogen atom or a carbon atom. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced by -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO 2 It may be replaced by --or --CO--. nb5 represents an integer of 2 or 3, and when A is a nitrogen atom, nb5=2 is satisfied, and when A is a carbon atom, nb5=3 is satisfied, and the groups in the multiple parentheses may be the same or different from each other, and the two groups in the two parentheses may be joined together to form a ring containing A.] (In formula (IC), R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R Ａ are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 1 or 2. L １２ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. * indicates a binding site.)

2. A １ But, **-X ０１ -L ０１ - or **-L ０１ -X ０１ - and A ２ But, **-X ０２ -L ０２ - or **-L ０２ -X ０２ - and A ３ But, **-X ０３ -L ０３ - or **-L ０３ -X ０３ - and X ０１ , X ０２ and X ０３ each independently represents -O-, -CO-, -S- or -SO ２ - represents L ０１ , L ０２ and L ０３ each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S- or -SO ２ - may be replaced by . ** is X ＋ and a bonding site on the benzene ring that is bonded to said compound according to claim 1 .

3. X ０１ , X ０２ and X ０３ The acid generator according to claim 2, wherein each of the groups independently represents --O-- or --S--.

4. L ０１ , L ０２ and L ０３ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH 2 3. The acid generator according to claim 2, wherein - may be replaced by -O- or -CO-.

5. 2. The acid generator according to claim 1, wherein X is a sulfur atom.

6. Ar １ , Ar ２ and Ar ３ The acid generator according to claim 1 , wherein each of the groups independently represents a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

7. R １ , R ２ , R ３ , R ４ , R ５ , R ６ , R ７ , R ８ and R ９ The acid generator according to claim 1 , wherein the total number of groups represented by formula (IC) contained in the formula (IC) is 2 or more.

8. A resist composition comprising the acid generator according to any one of claims 1 to 7.

9. 9. The resist composition according to claim 8, further comprising a compound having a phenolic hydroxy group or a benzoic carboxy group, or a compound in which the phenolic hydroxy group or the benzoic carboxy group of such a compound is protected with an acid labile group.

10. The resist composition according to claim 8, further comprising a resin containing one or more structural units represented by formula (a2). [In formula (a2), R a２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L ａ２１ represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and the —CH ２ - is -O-, -CO-, -S- or -SO ２ It may be replaced with -. L ａ２２ represents a chain hydrocarbon group having 1 to 12 carbon atoms which may have a single bond or a fluorine atom, and —CH 2 - may be replaced by -O- or -CO-. na2 represents an integer of 1 to 5. When na2 is 2 or more, multiple L ａ２２ may be the same or different.

11. One or more structural units represented by formula (a2) The resist composition according to claim 10, which comprises one or more structural units represented by formula (a2-A). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or more, the groups in the parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. mc represents an integer of 0 to 2.

12. One or more structural units represented by formula (a2) The resist composition according to claim 10, which contains a structural unit represented by formula (a2-D): [In formula (a2-D), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ａ２１ and R ａ２２ each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L ａ２４ represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 5. When nD2 is 2 or more, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. However, 1≦nD2+nD22≦5.

13. 9. The resist composition according to claim 8, further comprising a salt capable of generating an acid having a weaker acidity than the acid generated from the acid generator.

14. 9. The resist composition according to claim 8, wherein the content of the salt represented by formula (I) is 80 mass % or more relative to the solid content of the resist composition.

15. (1) A step of applying the resist composition according to claim 8 onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

16. A salt represented by formula (I): [In formula (I), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1, and when X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0. R １ , R ２ and R ３ are each independently *-X １ -R １０ Or *-X １ -L １０ -X ２ -R １０ Represents. X １ and X ２ are each independently *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (wherein * is Ar １ , Ar ２ , Ar ３ , a benzene ring or L １０ ) represents the binding site with L １０ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R １０ represents a group represented by formula (IC). R ４ , R ５ and R ６ each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X １ -R １０ Or *-X １ -L １０ -X ２ -R １０ The hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S-, -SO- or -SO ２ It may be replaced by -. R ７ , R ８ and R ９ each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X １ -R １０ Or *-X １ -L １０ -X ２ -R １０ The hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S-, -SO- or -SO ２ When X is a sulfur atom, R ７ and R ８ Or R ８ and R ９ is bonded to S ＋ The ring may contain —CH 2 - is -O-, -S-, -CO-, -SO- or -SO ２ R forming the ring may be replaced with -. ７ and R ８ Or R ８ and R ９ , S ＋ and a single bond formed between two benzene rings connecting the two. A １ , A ２ and A ３ each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group optionally having a substituent, 2 - is -O-, -CO-, -S- or -SO ２ It may be replaced by -. Ar １ , Ar ２ and Ar ３ each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m1 represents an integer of 0 to 5, and when m1 is 2 or more, the groups in multiple parentheses may be the same or different. m2 represents an integer of 0 to 5, and when m2 is 2 or more, the groups in the parentheses may be the same or different. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m4 represents an integer of 0 to 4, and when m4 is 2 or more, a plurality of R ４ may be the same or different from each other. m5 represents an integer of 0 to 4, and when m5 is 2 or more, a plurality of R ５ may be the same or different from each other. m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other. m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R ７ may be the same or different from each other. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R ８ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 0≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5, and at least one of m1, m2, m3, m7, m8, and m9 represents an integer of 1 or more; R １ , R ２ , R ３ , R ７ , R ８ and R ９ At least one of the following is *-X １ -R １０ Or *-X １ -L １０ -X ２ -R １０ Represents. A represents a nitrogen atom or a carbon atom. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced with -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -SO 2 It may be replaced by --or --CO--. nb5 represents an integer of 2 or 3, and when A is a nitrogen atom, nb5=2 is satisfied, and when A is a carbon atom, nb5=3 is satisfied, and the groups in the multiple parentheses may be the same or different from each other, and the two groups in the two parentheses may be joined together to form a ring containing A.] (In formula (IC), R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R Ａ are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 1 or 2. L １２ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. * indicates a binding site.)

17. A １ But, **-X ０１ -L ０１ - or **-L ０１ -X ０１ - and A ２ But, **-X ０２ -L ０２ - or **-L ０２ -X ０２ - and A ３ But, **-X ０３ -L ０３ - or **-L ０３ -X ０３ - and X ０１ , X ０２ and X ０３ each independently represents -O-, -CO-, -S- or -SO ２ - represents L ０１ , L ０２ and L ０３ each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S- or -SO ２ - may be replaced by . ** is X ＋ 17. The salt of claim 16, which represents a bonding site with a benzene ring that is bonded to

18. X ０１ , X ０２ and X ０３ The salt according to claim 17, wherein each of the groups independently represents -O- or -S-.

19. L ０１ , L ０２ and L ０３ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH 2 The salt according to claim 17, wherein - may be replaced by -O- or -CO-.

20. 18. The salt according to claim 16 or 17, wherein X is a sulfur atom.

21. Ar １ , Ar ２ and Ar ３ The salt according to claim 16 or 17, wherein each of the following is independently a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

22. R １ , R ２ , R ３ , R ４ , R ５ , R ６ , R ７ , R ８ and R ９ The salt according to claim 16 or 17, wherein the total number of groups represented by formula (IC) contained in the formula is 2 or more.

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