Capillary replacement mechanism and wire bonding device

Abstract

To impart a function for automatically replacing a capillary while suppressing increase in a size.SOLUTION: A capillary replacement unit 5 includes: a conveyance module 52 that conveys a used capillary 243E, which has been pulled out from an ultrasonic horn 242, from a replacement position 52S to an exchange position 52E along a predetermined linear direction, and that also conveys a replacement capillary 243T, which is to be attached to the ultrasonic horn 242 in place of the used capillary 243E, in a direction opposite to the predetermined linear direction from the exchange position 52E to the replacement position 52S; and an exchange module 53 that is provided on the exchange position 52E side of the conveyance module 52 and exchanges the used capillary 243E for the replacement capillary 243T.SELECTED DRAWING: Figure 8

Description

Technical Field

[0001] The present invention relates to a capillary exchange mechanism and a wire bonding apparatus.

Background Art

[0002] A wire bonding apparatus electrically connects an electrode of a semiconductor chip and a lead frame using a wire. The wire is pressed from a component called a capillary onto the electrode of the semiconductor chip and the like, and heat or ultrasonic waves or the like are applied as necessary. As a result, the wire is bonded to the electrode of the semiconductor chip and the like. Such a bonding operation is called bonding.

[0003] When bonding is repeated, it becomes difficult to obtain a desired bonding result due to wear of the tip of the capillary. Therefore, the capillary is exchanged every time it satisfies the exchange conditions set based on the number of bondings and the like.

[0004] Patent Documents 1 to 3 each disclose a technique related to wire bonding. Patent Document 1 discloses an apparatus and a method capable of continuously performing bonding while exchanging a capillary which is a bonding tool. Patent Document 2 discloses an apparatus and a method for accurately detecting the position of a capillary. Patent Document 3 discloses a method for more effectively suppressing wire breakage and wire bending.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0006] In a factory for manufacturing semiconductor chips, a large number of various manufacturing apparatuses are arranged. Since the number of manufacturing apparatuses corresponds to the production quantity in the factory, a number of manufacturing apparatuses corresponding to the production quantity are arranged in the factory. In this case, it is difficult to expand the floor area of the factory. In order to increase the number of manufacturing apparatuses on a certain fixed floor area, it is desirable to suppress the increase in the size of the manufacturing apparatuses. Similarly, when adding a function of exchanging a capillary as described in Patent Document 1, it is also desirable to suppress the increase in the size. That is, in this technical field, a mechanism capable of imparting an automatic capillary exchange function while suppressing an increase in size has been desired.

[0007] The present invention provides a capillary exchange mechanism capable of imparting an automatic capillary exchange function while suppressing an increase in size, and a wire bonding apparatus including the capillary exchange mechanism.

Means for Solving the Problem

[0008] A capillary exchange mechanism according to one embodiment of the present invention conveys a used capillary pulled out from a horn along a predetermined linear direction from an exchange position to a replacement position, and conveys an exchange capillary for attaching to the horn instead of the used capillary from the replacement position to the exchange position in a direction opposite to the predetermined linear direction by a feed mechanism, and a replacement module provided on the replacement position side of the conveyance module for replacing the used capillary with the exchange capillary.

[0009] According to this capillary exchange mechanism, the mode of conveyance from the exchange position where the used capillary is pulled out from the horn and the exchange capillary is attached to the horn to the replacement position where the used capillary is replaced with the exchange capillary can be made a movement of one axis by the feed mechanism. Therefore, it is possible to impart an automatic capillary exchange function while suppressing an increase in size.

[0010] The transfer module of the above-described capillary exchange mechanism may perform a transfer operation of moving a used capillary withdrawn from a horn and a replacement capillary inserted into the horn along the axis of the used capillary when it is attached to the horn, and a rotation operation of rotating the used capillary and the replacement capillary so that the replacement position is defined as a position for replacing the used capillary withdrawn from the horn with the replacement capillary inserted into the horn, and the replacement postures of the used capillary and the replacement capillary located at the replacement position are different from the replacement posture of the used capillary when it is attached to the horn. According to this configuration, the configuration for replacing the used capillary with the replacement capillary at the replacement position can be simplified.

[0011] The transfer module of the above-described capillary exchange mechanism may perform a rotation operation of rotating the used capillary so that the used capillary located at the replacement position assumes the replacement posture after the transfer operation of moving the used capillary from the exchange position to the replacement position is started and during the period when the transfer operation continues. According to this configuration, since the movement of the used capillary near the exchange position is along the axis, the movement path of the used capillary can be made compact.

[0012] The transfer module of the above-described capillary exchange mechanism may simultaneously start a transfer operation of moving the replacement capillary from the replacement position to the exchange position and a rotation operation of rotating the replacement capillary so that the replacement capillary in the replacement posture assumes the exchange posture. According to this configuration, the posture of the used capillary can be changed from the exchange posture to the replacement posture near the replacement position.

[0013] In the above-described capillary exchange mechanism, the angle formed by the axis of the used capillary in the replacement posture and the axis of the used capillary in the exchange posture may be 90 degrees. This configuration can also simplify the configuration for replacing the used capillary with a replacement capillary at the replacement position.

[0014] Another form of the wire bonding apparatus of the present invention includes a horn, a capillary detachably attached to the horn, and a capillary exchange mechanism for exchanging the capillary. The used capillary pulled out from the horn is conveyed along a predetermined linear direction from the exchange position to the replacement position, and a replacement capillary for attaching to the horn in place of the used capillary is conveyed by a feeding mechanism in a direction opposite to the predetermined linear direction from the replacement position to the exchange position. A conveyance module, and a replacement module provided on the replacement position side of the conveyance module for replacing the used capillary with a replacement capillary.

[0015] This wire bonding apparatus includes the above-described capillary exchange mechanism. Therefore, the mode of conveyance from the exchange position where the used capillary is pulled out from the horn and the replacement capillary is attached to the horn to the replacement position where the used capillary is replaced with the replacement capillary can be a uniaxial movement by the feeding mechanism. Therefore, since the area required for the arrangement of the capillary exchange mechanism can be made compact, it is possible to suppress the increase in size of the wire bonding apparatus due to the addition of the automatic capillary exchange function.

Advantages of the Invention

[0016] According to the present invention, it is possible to provide a capillary exchange mechanism and a wire bonding apparatus that can provide an automatic capillary exchange function while suppressing an increase in size.

Brief Description of the Drawings

[0017]

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BEST MODE FOR CARRYING OUT THE INVENTION

[0018] Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant descriptions are omitted.

[0019] FIG. 1 is a perspective view showing a wire bonding apparatus according to an embodiment of the present invention. The wire bonding apparatus 1 includes a wire bonding unit 2, a bonding stage 3, a camera unit 4, a capillary exchange unit 5 (capillary exchange mechanism), and a controller 6.

[0020] The wire bonding unit 2 joins bonding wires 12 (see Fig. 4 etc.) to the semiconductor chip 11. The bonding stage 3 sequentially moves a plurality of semiconductor chips 11 to be wire-bonded to the working area of the wire bonding unit 2. The camera unit 4 obtains a captured image for controlling the operation of the wire bonding unit 2. The capillary exchange unit 5 exchanges a used capillary that needs to be exchanged due to multiple wire bondings for a new replacement capillary. The controller 6 includes various control units that control the operations of each part of the wire bonding apparatus 1 and perform various processes.

[0021] The wire bonding unit 2 has a main base 21, an XY stage 22 for tools, and a sub-base 23. Further, the wire bonding unit 2 has a bonding module 24, a Z-axis drive unit 25, a module base 26, a lower wire clamp 27, and an upper wire clamp 28.

[0022] The XY stage 22 for tools is attached to the main base 21. The sub-base 23 is attached to the movable stage of the XY stage 22 for tools. The XY stage 22 for tools moves the sub-base 23 in the X-axis direction and the Y-axis direction. The bonding module 24, the lower wire clamp 27, the upper wire clamp 28, and the camera unit 4 are attached to the sub-base 23. For example, when the sub-base 23 moves in the X-axis direction by the XY stage 22 for tools, the bonding module 24, the lower wire clamp 27, the upper wire clamp 28, and the camera unit 4 also move in the X-axis direction integrally.

[0023] More specifically, the sub-base 23 includes a sub-base main surface 23a and a sub-base wall surface 23b. A Z-axis drive unit 25 is attached to the sub-base main surface 23a, and a module base 26 is attached to the Z-axis drive unit 25. A bonding module 24 and a lower wire clamp 27 are attached to the module base 26. On the other hand, an upper wire clamp 28 and a camera unit 4 are attached to the sub-base wall surface 23b without passing through intermediate members such as the Z-axis drive unit 25 and the module base 26. According to this configuration, the bonding module 24 and the lower wire clamp 27 reciprocate in the Z-axis direction by the Z-axis drive unit 25. More specifically, the tip of the bonding module 24 and the tip of the lower wire clamp 27 can perform a reciprocating circular arc motion centered on the Z-axis drive unit 25. During this reciprocating circular arc motion, the relative position of the lower wire clamp 27 with respect to the bonding module 24 is maintained. On the other hand, the upper wire clamp 28 and the camera unit 4 do not reciprocate in the Z-axis direction by the Z-axis drive unit 25.

[0024] In short, the bonding module 24 and the lower wire clamp 27 move in each of the X-axis direction, Y-axis direction, and Z-axis direction. In contrast, the upper wire clamp 28 and the camera unit 4 move in the X-axis direction and Y-axis direction. In the example of this embodiment, the upper wire clamp 28 and the camera unit 4 do not move in the Z-axis direction. However, it is also possible to adopt a configuration in which the upper wire clamp 28 and the camera unit 4 can move in the Z-axis direction.

[0025] <Bonding module 24> The bonding module 24 has a horn holder 241, a ultrasonic horn 242, and a capillary 243. The base end side of the horn holder 241 is attached to the Z-axis drive unit 25. The ultrasonic horn 242 is attached to the tip side of the horn holder 241. The capillary 243 is detachably attached to the tip side portion of the ultrasonic horn 242.

[0026] More specifically, as shown in FIG. 2, a capillary mounting hole H1 and a pin insertion hole H2 are formed at the tip of the ultrasonic horn 242. The capillary mounting hole H1 and the pin insertion hole H2 penetrate the ultrasonic horn 242 along the Z-axis. In the present embodiment, the capillary mounting hole H1 is provided on the tip side of the ultrasonic horn 242 rather than the pin insertion hole H2. However, the pin insertion hole H2 may be provided on the tip side of the ultrasonic horn 242 rather than the capillary mounting hole H1.

[0027] The capillary mounting hole H1 and the pin insertion hole H2 communicate with each other. In the present embodiment, the capillary mounting hole H1 and the pin insertion hole H2 communicate with each other via a slit S1. The slit S1 penetrates the ultrasonic horn 242 in the Z-axis direction.

[0028] Further, a slit S2 is formed in the ultrasonic horn 242. The slit S2 communicates with the pin insertion hole H2. The slit S2 is formed on the base end side of the ultrasonic horn 242 rather than the pin insertion hole H2. The slit S2 penetrates the ultrasonic horn 242 in the Z-axis direction. Thus, the capillary mounting hole H1, the slit S1, the pin insertion hole H2, and the slit S2 communicate with each other.

[0029] A capillary 243 is inserted into the capillary mounting hole H1. Here, the ultrasonic horn 242 is formed of an elastically deformable material. As shown in FIG. 3(a), the capillary mounting hole H1 has a size smaller than the outer diameter of the capillary 243 in a state where the capillary 243 is not inserted. The ultrasonic horn 242 can grip the capillary 243 inserted into the capillary mounting hole H1 by elastic force by expanding the capillary mounting hole H1. That is, the capillary 243 is inserted into the capillary mounting hole H1 in a state where the capillary mounting hole H1 is expanded.

[0030] As shown in Fig. 3(a), the pin insertion hole H2 is an elliptical hole. The release pin portion 511 of the release module 51 can be inserted into the pin insertion hole H2. The release pin portion 511 is inserted into the pin insertion hole H2 to release the gripping of the capillary 243 by the ultrasonic horn 242. As shown in Figs. 2 and 3(a), the inner wall surface of the pin insertion hole H2 includes a first surface portion W1 and a second surface portion W2 that face each other. The first surface portion W1 and the second surface portion W2 face each other in the short-axis direction of the elliptical pin insertion hole H2. Note that the slit S1 and the slit S2 face each other in the long-axis direction of the elliptical pin insertion hole H2. In a state where the release pin portion 511 of the release module 51 is not inserted into the pin insertion hole H2, the length of the pin insertion hole H2 in the short-axis direction is shorter than the length L1 of the release pin portion 511 in the first direction (long-axis direction). The capillary attachment hole H1 communicates with the end portion in the long-axis direction of the elliptical pin insertion hole H2 via the slit S1.

[0031] The capillary 243, which is a bonding tool, bonds the bonding wire 12 to the semiconductor chip 11. The capillary 243 has a capillary main body portion 243a and a capillary tapered portion 243b. The capillary main body portion 243a has a cylindrical shape and is gripped by the tip portion of the ultrasonic horn 242. The capillary tapered portion 243b has a conical shape that tapers toward the tip, and the tip of the capillary tapered portion 243b is pressed against the pad or the like of the semiconductor chip 11. A capillary through hole 243h is formed in the capillary 243 from the base end surface of the capillary main body portion 243a to the tip end surface of the capillary tapered portion 243b. The bonding wire 12 is inserted through the capillary through hole 243h.

[0032] <Lower wire clamp and upper wire clamp> The lower wire clamp 27 and the upper wire clamp 28 can mutually switch between a state of gripping the bonding wire 12 and a state of not gripping the bonding wire 12. As described above, the lower wire clamp 27 is movable along the Z-axis direction. Therefore, with respect to the upper wire clamp 28 whose position along the Z-axis direction is fixed, the position of the lower wire clamp 27 can be mutually switched between a position approaching the upper wire clamp 28 (proximity position 2N) and a position away from the upper wire clamp 28 (separation position 2F). By switching between this gripping state and the open state, and by switching between the proximity position 2N and the separation position 2F, the lower wire clamp 27 and the upper wire clamp 28 can perform an operation of drawing the bonding wire 12 into the capillary through hole 243h (drawing-in operation) and an operation of feeding out the bonding wire 12 from the capillary through hole 243h (feeding-out operation).

[0033] [Drawing-in operation] With reference to FIG. 4, the drawing-in operation will be described. First, the lower wire clamp 27 at the proximity position 2N is opened, and the upper wire clamp 28 is closed (FIG. 4(a)). Next, the opened lower wire clamp 27 and the capillary 243 are moved downward toward the separation position 2F (FIG. 4(b)). At this time, since the bonding wire 12 is held by the upper wire clamp 28, it does not move. The downward movement of the capillary 243 relative to the non-moving bonding wire 12 means that, from the perspective of the bonding wire 12, the bonding wire 12 moves upward relative to the capillary 243. That is, the bonding wire 12 is drawn into the capillary 243. Next, the lower wire clamp 27 at the separation position 2F is closed, and the upper wire clamp 28 is opened (FIG. 4(c)). Next, the closed lower wire clamp 27 and the capillary 243 are moved upward toward the proximity position 2N (FIG. 4(d)). At this time, since the bonding wire 12 is held by the lower wire clamp 27, the bonding wire 12 also moves upward as the lower wire clamp 27 moves. As a result, when comparing the state of FIG. 4(a) with the state of FIG. 4(b), the position of the capillary 243 is the same, but the tip of the bonding wire 12 has moved upward. That is, the bonding wire 12 is drawn into the capillary 243. The operations from FIG. 4(a) to FIG. 4(d) are repeated until a predetermined drawing-in length is reached. The drawing-in length is the distance D1 from the tip of the bonding wire 12 located inside the capillary through-hole 243h to the tip of the capillary 243, as shown in FIG. 4(e).

[0034] [Wire Feeding Operation] With reference to FIG. 5, the feeding operation will be described. First, the lower wire clamp 27 at the proximity position 2N is closed, and the upper wire clamp 28 is opened (FIG. 5(a)). Next, the closed lower wire clamp 27 and the capillary 243 are moved downward toward the separation position 2F (FIG. 5(b)). At this time, since the bonding wire 12 is held by the lower wire clamp 27, the bonding wire 12 also moves as the lower wire clamp 27 moves downward. Next, the lower wire clamp 27 at the separation position 2F is opened, and the upper wire clamp 28 is closed (FIG. 5(c)). Next, the opened lower wire clamp 27 and the capillary 243 are moved upward toward the proximity position 2N (FIG. 5(d)). At this time, the bonding wire 12 is not held by the lower wire clamp 27. As the lower wire clamp 27 moves upward, the bonding wire 12 does not move. The capillary 243 moving upward with respect to the non-moving bonding wire 12 means that, when viewed from the bonding wire 12, the bonding wire 12 moves downward relative to the capillary 243. That is, the bonding wire 12 is fed out to the capillary 243. As a result, when comparing the state of FIG. 5(a) with the state of FIG. 5(d), the position of the capillary 243 is the same, but the tip of the bonding wire 12 has moved downward. That is, the bonding wire 12 is fed out to the capillary 243. The operations from FIG. 5(a) to FIG. 5(d) are repeated until a predetermined protruding length D2 is reached. The protruding length D2 is the distance from the tip of the capillary 243 to the tip of the bonding wire 12, as shown in FIG. 5(e).

[0035] <Camera unit> The camera unit 4 images the semiconductor chip 11. The captured image of the semiconductor chip 11 is used for positioning the capillary 243 when wire bonding is performed on the semiconductor chip 11. In this way, the camera unit 4 functions as a wire bonding camera unit used for performing wire bonding.

[0036] In addition, the camera unit 4 is also used for the automatic replacement of the capillary 243 by the capillary replacement unit 5. For example, the camera unit 4 is used for the positioning operation of the release pin portion 511, which will be described later, during the operation of switching the locked state of the ultrasonic horn 242 to the released state. The camera unit 4 is used for the operation of determining whether the state of the bonding wire 12 protruding from the tip of the capillary 243 is a state in which bonding can be resumed.

[0037] The camera unit 4 includes a camera 41 having an imaging element, a camera arm 42 that supports the camera 41, a tool XY stage 22, and a camera control unit 66. The base end portion of the camera arm 42 is attached to the tool XY stage 22. The camera 41 is attached to the tip end portion of the camera arm 42. The camera arm 42 supports the camera 41 at a position above the bonding stage 3.

[0038] The camera unit 4 may acquire the elevation images of each part by combining optical path changing means such as mirrors and prisms. For example, as shown in FIG. 6, the case of imaging the periphery of the tip of the capillary 243 is illustrated. The capillary 243 protrudes from the lower surface side of the ultrasonic horn 242. Therefore, if the camera 41 is directly above the ultrasonic horn 242, the periphery of the tip of the capillary 243 cannot be imaged. Therefore, the camera 41 is arranged at a position that does not overlap with the ultrasonic horn 242. As shown in FIG. 6, when the camera 41 and the capillary 243 are viewed from the front, the arrangement in which the axis of the capillary 243 and the optical axis of the camera 41 are shifted may be referred to as an offset arrangement. An optical component 43 that changes the direction of light, such as a prism or a mirror, is arranged directly below the camera 41. According to such an optical system, the periphery of the tip of the capillary 243 can be imaged by the camera 41 arranged in an offset arrangement. In addition, a light source component 44 such as a laser diode may be arranged as necessary. In this case, the capillary 243 is arranged between the optical component 43 and the light source component 44.

[0039] The camera 41 and the camera arm 42 are attached to the XY stage 22 for tools via the sub-base 23. That is, the camera 41 and the camera arm 42 can be driven by the XY stage 22 for tools and can be translated along the XY plane together with the capillary 243 or the like. In this way, the XY stage 22 for tools functions as a part of the components of the wire bonding unit 2 and also functions as a part of the components of the camera unit 4. The camera control unit 66 controls various operations of the camera unit 4 and executes various processes. Details of the control performed by the camera control unit 66 will be described later.

[0040] <Capillary replacement unit> The capillary replacement unit 5 recovers the used capillary 243E attached to the ultrasonic horn 242 and mounts a new replacement capillary 243T on the ultrasonic horn 242. That is, the replacement operation of the capillary 243 includes an operation of recovering the capillary 243 and an operation of mounting the capillary 243. This replacement operation of the capillary 243 is automatically performed when preset conditions are satisfied. For example, the condition may be the number of bonding operations. That is, every time a predetermined number of bonding operations are performed, the operation of replacing the capillary 243 may be performed.

[0041] FIG. 7 is a conceptual diagram showing the members constituting the capillary replacement unit 5. The capillary replacement unit 5 includes a release module 51, a transfer module 52, a replacement module 53, and a supply module 54. The release module 51, the transfer module 52, and the replacement module 53 are housed in the replacement unit main body 50 as an integral device. The replacement unit main body 50 has a module slot 50a into which the supply module 54 is inserted.

[0042] <Release module> The release module 51 includes a release pin portion 511, a release shaft 512, and a release drive portion 513.

[0043] The release module 51 switches (release operation) from the state where the capillary 243 is constrained by the ultrasonic horn 242 to the state where the capillary 243 is released from the ultrasonic horn 242. Further, the release module 51 switches (lock operation) from the state where the capillary 243 is released from the ultrasonic horn 242 to the state where the capillary 243 is constrained by the ultrasonic horn 242.

[0044] When the capillary 243 is in the state of being constrained by the ultrasonic horn 242, the capillary 243 cannot be removed from the ultrasonic horn 242. When the capillary 243 is in the state of being released from the ultrasonic horn 242, the capillary 243 can be removed from the ultrasonic horn 242. Also, when the capillary 243 is in the state of being released from the ultrasonic horn 242, the capillary 243 can be attached to the ultrasonic horn 242.

[0045] [Release operation] Next, the gripping release operation for releasing the gripping of the capillary 243 by the ultrasonic horn 242 will be described. This gripping release operation is performed by the release module 51. As shown in Fig. 3(a), the ultrasonic horn 242 grips the capillary 243 inserted into the capillary mounting hole H1 by an elastic force. When releasing this grip, the release pin portion 511 of the release module 51 is inserted into the pin insertion hole H2 of the ultrasonic horn 242. The insertion operation of the release module 51 into the pin insertion hole H2 is performed by the release drive unit 513.

[0046] As shown in Fig. 3(b), with the release pin portion 511 inserted into the pin insertion hole H2, the release pin portion 511 is rotated 90 degrees around the Z axis. As a result, the first surface portion W1 and the second surface portion W2 are pressed by both end portions in the first direction (both end portions in the longitudinal direction of the elliptical shape) of the release pin portion 511. When the first surface portion W1 and the second surface portion W2 are pressed by the release pin portion 511, the ultrasonic horn 242 elastically deforms. Thereby, the distance between the first surface portion W1 and the second surface portion W2 of the pin insertion hole H2 becomes wider. The rotation operation of the release module 51 is performed by the release drive unit 513.

[0047] Here, the pin insertion hole H2 and the capillary attachment hole H1 communicate with each other via the slit S1. Therefore, as the distance between the first surface portion W1 and the second surface portion W2 is expanded by the release pin portion 511, the capillary attachment hole H1 is also expanded. When the capillary attachment hole H1 is expanded, the gripping of the capillary 243 by the ultrasonic horn 242 is released. That is, the gripping release operation is an operation of rotating the release module 51 with the release pin portion 511 inserted into the pin insertion hole H2. And the gripping release operation is an operation of pressing the first surface portion W1 and the second surface portion W2 by both end portions in the first direction (both end portions in the longitudinal direction of the elliptical shape) of the release pin portion 511, thereby expanding the distance between the first surface portion W1 and the second surface portion W2 and expanding the capillary attachment hole H1. Thus, the release module 51 expands the pin insertion hole H2 and expands the capillary attachment hole H1, and releases the gripping of the capillary 243 by the ultrasonic horn 242.

[0048] As shown in FIG. 3(b), with the capillary attachment hole H1 expanded by the release module 51, the capillary 243 is removed from the ultrasonic horn 242, and a new capillary 243 is inserted into the capillary attachment hole H1. This replacement of the capillary 243 is performed by the capillary replacement unit 5. Then, as shown in FIG. 3(c), the release pin portion 511 is rotated 90 degrees around the Z axis to release the pressing of the first surface portion W1 and the second surface portion W2 by the release pin portion 511. That is, the gripping release operation is released. As a result, the pin insertion hole H2 and the capillary attachment hole H1 attempt to return to the original shape shown in FIG. 3(a). Due to the elastic force attempting to return to the original shape, the capillary 243 inserted into the capillary attachment hole H1 is gripped by the inner wall surface of the capillary attachment hole H1.

[0049] Thereafter, as shown in FIG. 3(d), the release pin portion 511 is removed from the pin insertion hole H2. Thus, with the ultrasonic horn 242, the release module 51 can be used to grip and release the gripping of the capillary 243 by the ultrasonic horn 242.

[0050] <Carriage Module> Refer to FIG. 7 again. The carriage module 52 includes a carriage 521, a linear carriage shaft 522, and a carriage drive unit 523. The carriage module 52 further includes a carriage rotating rack 524 and a carriage rotating pinion 525.

[0051] The carriage module 52 extracts the used capillary 243E from the ultrasonic horn 242 at the replacement position 52S. Further, the carriage module 52 conveys the extracted used capillary 243E from the replacement position 52S to the replacement position 52E.

[0052] The carriage module 52 receives the replacement capillary 243T from the replacement module 53 at the replacement position 52E. The carriage module 52 conveys the replacement capillary 243T from the replacement position 52E to the replacement position 52S. The carriage module 52 inserts the replacement capillary 243T into the ultrasonic horn 242 at the replacement position 52S.

[0053] Thus, the movement of the carriage 521 includes a linear movement between the replacement position 52S and the replacement position 52E and a rotational movement for changing the posture of the used capillary 243E. In this embodiment, all periods of the rotational movement overlap with a part of the period of the linear movement. In other words, the period of the linear movement includes a period of only linear movement and a period during which the linear movement and the rotational movement are parallel.

[0054] Subsequently, with reference to FIG. 8, an example of a more specific configuration of the carriage module 52 will be described. In addition to the above-described carriage 521 and the like, the carriage module 52 further includes a carriage base 526. The carriage base 526 has a carriage base bottom surface portion 52A and a carriage base standing surface portion 52B. The carriage base standing surface portion 52B stands up from the carriage base bottom surface portion 52A, and when viewed from the Y direction, the carriage base 526 has an L shape.

[0055] A motor, which is the conveyance driving unit 523, is attached to the back surface of the bottom portion 52A of the conveyance base. The output shaft of the conveyance driving unit 523 faces in the Z direction. A conveyance linear movement shaft 522 stands upright on the main surface of the bottom portion 52A of the conveyance base. The lower end side of the conveyance linear movement shaft 522 is connected to the output shaft of the conveyance driving unit 523. The upper end side of the conveyance linear movement shaft 522 is connected to a shaft support portion 528 that stands up from the main surface of the standing portion 52B of the conveyance base. The shaft support portion 528 rotatably supports the upper end of the conveyance linear movement shaft 522. A spiral screw groove is formed on the outer peripheral surface of the columnar conveyance linear movement shaft 522. That is, the conveyance linear movement shaft 522 is a feed screw (lead screw). The conveyance linear movement shaft 522 rotates in response to the rotation of the output shaft of the conveyance driving unit 523. When the conveyance linear movement shaft 522 rotates, a linear movement of a conveyance carriage 521 having a screw portion that meshes with the feed screw of the conveyance linear movement shaft 522 occurs. That is, the conveyance linear movement shaft 522 is a part of a member that converts the rotational movement of the conveyance driving unit 523 into the linear movement of the conveyance carriage 521. Note that the feed screw is an example of a feed mechanism, and as the feed mechanism, a ball screw, a linear motor, or the like may be employed.

[0056] The conveyance module 52 further includes a conveyance guide shaft 527. The conveyance guide shaft 527 restricts the movement of the conveyance carriage 521 resulting from the rotation of the conveyance linear movement shaft 522 to a linear movement along the Z axis. The conveyance guide shaft 527 is a columnar member. Since the conveyance guide shaft 527 restricts the movement direction of the conveyance carriage 521, unlike the conveyance linear movement shaft 522, no screw groove is formed on the outer peripheral surface of the conveyance guide shaft 527, and it is not configured to be rotatable. That is, the lower end side of the conveyance guide shaft 527 is fixed to the bottom portion 52A of the conveyance base. And the upper end side of the conveyance linear movement shaft 522 is fixed to a shaft fixing portion that stands up from the standing portion 52B of the conveyance base.

[0057] The transfer carriage 521 has a carriage base 52C, a carriage shaft 52D, and a capillary catcher 52F. The carriage base 52C receives driving force from the transfer linear shaft 522 and moves vertically along the Z-axis. Specifically, the transfer carriage 521 can move from the replacement position 52S to the replacement position 52E. Conversely, the transfer carriage 521 can move from the replacement position 52E to the replacement position S. Note that the transfer carriage 521 can also stay at any position between the replacement position S and the replacement position 52E.

[0058] The carriage base 52C includes a carriage body 52C1, and carriage flanges 52C2 and 52C3. The carriage body 52C1 is provided with a through hole through which the carriage shaft 52D is inserted. A carriage flange 52C2 is provided below the first side surface of the carriage body 52C1. The carriage flange 52C2 is provided with a threaded portion that engages with the thread groove of the transfer linear shaft 522. The feed screw mechanism is constituted by this threaded portion and the transfer linear shaft 522. A carriage flange 52C3 is provided substantially at the center of the second side surface of the carriage body 52C1. The carriage flange 52C3 is provided with a through hole 52H through which the transfer guide shaft 527 is inserted. For example, the shape of the through hole 52H is an elongated hole.

[0059] The carriage shaft 52D is passed through the through hole of the carriage body 52C1. The carriage shaft 52D is rotatable with respect to the carriage body 52C1. A capillary catcher 52F is fixed to the tip of the carriage shaft 52D.

[0060] The capillary catcher 52F rotates in response to the rotation of the carriage shaft 52D. The capillary catcher 52F extends in a direction orthogonal to the axis of the carriage shaft 52D. The capillary catcher 52F is a cylindrical member. The proximal end of the capillary catcher 52F is fixed to the distal end of the carriage shaft 52D. A catcher opening 52G is formed at the distal end of the capillary catcher 52F. The capillary taper portion 243b is inserted into this catcher opening 52G. The capillary catcher 52F has a configuration capable of holding the capillary 243. Here, the holding means that even when the axis of the capillary 243 is inclined with respect to the vertical direction, the capillary 243 does not fall out of the capillary catcher 52F. For example, even when the axis of the capillary 243 is orthogonal to the vertical direction, the capillary 243 does not drop out of the capillary catcher 52F.

[0061] A conveyance rotation pinion 525 is attached to the proximal end of the carriage shaft 52D. As already described, the capillary catcher 52F rotates in response to the rotation of the carriage shaft 52D. The rotation of this carriage shaft 52D is achieved by the conveyance rotation pinion 525 and the conveyance rotation rack 524. The conveyance rotation pinion 525, the carriage shaft 52D, and the capillary catcher 52F can rotate integrally. The conveyance rotation rack 524 that meshes with the conveyance rotation pinion 525 is attached to the conveyance base upright portion 52B. More specifically, the conveyance rotation rack 524 is attached below the conveyance base upright portion 52B, that is, in the vicinity of the replacement position 52E. The conveyance rotation rack 524 and the conveyance rotation pinion 525 constitute a rack and pinion mechanism that converts the linear motion of the conveyance carriage 521 into the rotational motion of the capillary catcher 52F.

[0062] The conveyance module 52 having the above-described configuration can execute a first conveyance operation and a second conveyance operation described below.

[0063] [First Conveyance Operation] Here, the case of transporting the used capillary 243E from the exchange position 52S to the replacement position 52E is referred to as the first transport operation. In the first transport operation, first, a linear movement downward is started, and only the linear movement is executed until the transport carriage 521 reaches the transport rotary rack 524.

[0064] The linear movement is executed by the transport linear movement shaft 522 and the transport drive unit 523. The transport carriage 521 and the transport linear movement shaft 522 constitute a so-called feed screw mechanism. When the transport drive unit 523 rotates the transport linear movement shaft 522, the transport carriage 521 installed on the transport linear movement shaft 522, which is a screw shaft, moves linearly. The moving direction of the transport carriage 521 is determined by the rotation direction of the transport linear movement shaft 522.

[0065] And after the transport carriage 521 reaches the transport rotary rack 524, the linear movement and the rotational movement in the clockwise direction are executed in parallel.

[0066] More specifically, a transport rotary rack 524 is provided on the lower end side of the transport linear movement shaft 522. As shown in FIG. 9(a), when the transport carriage 521 at the exchange position 52S approaches the lower end side of the transport linear movement shaft 522, the transport rotary pinion 525 provided on the transport carriage 521 engages with the transport rotary rack 524 as shown in FIG. 9(b). As a result, as the transport carriage 521 moves, the transport carriage 521 rotates in a predetermined direction (see FIG. 9(c)). For example, as shown in FIG. 9(d), the transport carriage 521 rotates 90 degrees in the clockwise direction. As a result, the posture (replacement posture) of the used capillary 243E that has moved to the replacement position 52E is different from the posture (exchange posture) of the used capillary 243E at the exchange position 52S. Here, the posture of the used capillary 243E can be defined as the angle of the axis A of the used capillary 243E with respect to the Z-axis direction. For example, the posture of the used capillary 243E at the exchange position 52S has an angle of 0 degrees with respect to the Z-axis direction. For example, the posture of the used capillary 243E at the replacement position 52E has an angle of 90 degrees with respect to the Z-axis direction.

[0067] In addition, if a direction definition is added to the axis A of the used capillary 243E, the posture of the used capillary 243E can be defined in more detail. For example, the direction from the proximal end to the distal end of the used capillary 243E is defined as positive. Also in this case, the posture of the used capillary 243E at the replacement position 52S has an angle of 0 degrees with respect to the Z-axis direction. For example, when the distal end of the used capillary 243E is on the upper side and the proximal end is on the lower side due to the rotation of the transfer carriage 521, it can be said that the posture of the used capillary 243E at the replacement position 52S has an angle of 180 degrees with respect to the Z-axis direction.

[0068] [Second Transfer Operation] Next, the case of transporting the replacement capillary 243T from the replacement position 52E to the replacement position 52S is referred to as the second transfer operation. As shown in FIGS. 10(a) and 10(b), in the second transfer operation, a linear movement upward is started, and at the same time, a rotational movement counterclockwise is executed in parallel. During the period when the transfer carriage 521 is engaged with the transfer rotation rack 524, the linear movement and the rotational movement are parallel. Then, as shown in FIGS. 10(c) and 10(d), after the transfer carriage 521 is disengaged from the transfer rotation rack 524, only the linear movement upward is executed.

[0069] [Replacement Module] The replacement module 53 includes a replacement table 531, a replacement drive unit 532, a replacement linear motion shaft 533, a replacement shaft 534, a replacement operating piece 535, and a replacement fixing piece 536.

[0070] [Withdrawal Operation] The replacement module 53 pulls out the used capillary 243E conveyed to the replacement position 52E from the conveyance carriage 521. More specifically, due to the operations of the replacement drive unit 532 and the replacement linear motion shaft 533, the replacement table 531 and the replacement operation piece 535 move away from the replacement fixing piece 536 integrally (see Fig. 11(b)). Since the replacement operation piece 535 is caught by the capillary taper portion 243b of the capillary 243, when the replacement operation piece 535 moves in the direction away from the replacement fixing piece 536, the capillary 243 also moves in the direction away from the replacement fixing piece 536 along with the movement of the replacement operation piece 535. As a result, the capillary 243 is pulled out from the conveyance carriage 521.

[0071] [Replacement operation] Furthermore, the replacement module 53 inserts the replacement capillary 243T into the conveyance carriage 521 from which the used capillary 243E has been pulled out. More specifically, due to the operations of the replacement drive unit 532 and the replacement linear motion shaft 533, the replacement table 531 and the replacement operation piece 535 move closer to the replacement fixing piece 536 integrally. The operation of the replacement table 531 and the replacement operation piece 535 moving closer to the replacement fixing piece 536 includes several steps described below.

[0072] As a first step (see Fig. 12(a)), as the replacement table 531 moves, the upright portion 531a of the replacement table 531 approaches the replacement fixing piece 536 while pressing the base end surface of the replacement capillary 243T located at the capillary supply port 54b. As a result, the replacement capillary 243T drops onto the replacement table 531 from the capillary supply port 54b (see Fig. 12(b)). As a second step, as the replacement table 531 moves, the replacement operating piece 535 contacts the replacement fixing piece 536 (see Fig. 12(c)). As a third step, as the replacement table 531 moves, the replacement table 531 approaches the replacement fixing piece 536 even further. In this third step, since the replacement operating piece 535 is in contact with the replacement fixing piece 536, the replacement operating piece 535 does not move. Therefore, in the third step, the replacement table 531 carrying the replacement capillary 243T approaches the replacement operating piece 535 that is in contact with the replacement fixing piece 536. In other words, in the third step, the distance from the replacement table 531 carrying the replacement capillary 243T to the replacement operating piece 535 that is in contact with the replacement fixing piece 536 gradually becomes shorter. As a fourth step (see Fig. 12(d)), as the replacement table 531 moves, the capillary tapered portion 243b of the replacement capillary 243T placed on the replacement table 531 passes through the replacement operating piece 535 and the replacement fixing piece 536 and is inserted into the transfer carriage 521.

[0073] <Supply module> The supply module 54 has a capillary storage portion 54a and a capillary supply port 54b.

[0074] The supply module 54 is inserted into the module slot 50a of the replacement unit main body 50 as described above. The supply module 54 can be removed from the module slot 50a as necessary. The supply module 54 stores a plurality of replacement capillaries 243T in the capillary storage portion 54a. The supply module 54 supplies the replacement capillaries 243T to the replacement module 53 one by one from the capillary supply port 54b according to the operation of the replacement module 53.

[0075] <Controller> The controller 6 controls the operations of the wire bonding unit 2 and the capillary exchange unit 5. The controller 6 is a computer having a processor that executes various programs and a memory that stores programs and a desired database. The controller 6 receives information provided from various sensors provided in the wire bonding apparatus 1. Then, the controller 6 uses the received information to output a control signal for controlling the operations of the wire bonding unit 2 and the capillary exchange unit 5.

[0076] The controller 6 exhibits the functions of several functional components shown in FIG. 13 by executing a capillary exchange program. Specifically, the controller 6 includes a bonding control unit 61, a clamper control unit 62, a release control unit 63, a conveyance control unit 64, and a replacement control unit 65. The bonding control unit 61 outputs a control signal G61a to the Z-axis drive unit 25 and a control signal G61b to the XY stage 22 for the tool. The clamper control unit 62 outputs a control signal G62a to the lower wire clamper 27 and a control signal G62b to the upper wire clamper 28. The release control unit 63 outputs a control signal G63 to the release drive unit 513 of the capillary exchange unit 5. The conveyance control unit 64 outputs a control signal G64 to the conveyance drive unit 523 of the capillary exchange unit 5. The replacement control unit 65 outputs a control signal G65 to the replacement drive unit 532 of the capillary exchange unit 5.

[0077] The controller 6 includes a camera control unit 66 and a detection sensor control unit 67 as functional components. The camera control unit 66 processes the planar image and the elevation image acquired by the camera 41. As a result, the positions of each part in the XYZ directions are detected.

[0078] The detection sensor control unit 67 receives detection data from a plurality of detection sensors 50S provided in the capillary exchange unit 5. For example, the detection sensor 50S confirms that the used capillary 243E and the replacement capillary 243T that are sequentially conveyed inside the capillary exchange unit 5 are present at predetermined positions. After it is confirmed that the used capillary 243E and the replacement capillary 243T are present at the predetermined positions, the controller 6 proceeds to the next operation.

[0079] <Method for replacing a capillary> The method for replacing a capillary described below is executed by the functional components of the controller 6 shown in FIG. 13. In the following description, the manner in which the controller 6 executes the method for replacing a capillary will be described in detail. The flowchart of FIG. 14 shows the main steps of the method for replacing a capillary. The three main steps constituting the method for replacing a capillary are illustrated in detail in FIGS. 15, 17, and 21, respectively.

[0080] <Preparation for capillary replacement> First, the controller 6 determines whether the conditions for capillary replacement are satisfied (S1). When the controller 6 determines that the conditions for capillary replacement are not satisfied (S1: NO), the bonding is resumed without replacing the capillary 243 in use (S5). When the controller 6 determines that the conditions for capillary replacement are satisfied (S1: YES), the controller 6 proceeds to the operation of replacing the used capillary 243E (S2, S3, S4).

[0081] The controller 6 executes the preparation for capillary replacement (S2). More specifically, as shown in FIG. 15, first, the controller 6 ends the bonding (S21). The controller 6 outputs a control signal D61a for stopping the arc reciprocating motion of the bonding module 24 to the Z-axis drive unit 25.

[0082] Next, the controller 6 forms a straight tail (S22). The straight tail is a part of the bonding wire 12 that protrudes from the tip of the capillary 243 and has no ball 122 (see FIG. 5(d)) formed at its tip. When the ball 122 is formed, the tip of the bonding wire 12 cannot be drawn into the capillary through-hole 243h, but according to the straight tail, the tip of the bonding wire 12 can be drawn into the capillary through-hole 243h. That is, forming a straight tail means removing the ball 122, and the operation of removing the ball 122 is called a so-called discard bond operation.

[0083] First, the controller 6 moves the capillary 243 onto the discard bond stage 15 (FIG. 16(a), S221). Next, the controller 6 opens the upper wire clamp 28 and lowers the capillary 243 together with the opened lower wire clamp 27. As a result, the ball 122 is joined to the discard bond stage 15. Next, the controller 6 closes the upper wire clamp 28 and raises the capillary 243 together with the opened lower wire clamp 27. Next, the controller 6 opens the upper wire clamp 28 and closes the lower wire clamp 27. Then, the controller 6 raises the capillary 243 together with the closed lower wire clamp 27. As a result, the bonding wire 12 is cut at a location where its strength is relatively reduced. For example, due to the joining, the strength of the neck part connecting the ball 122 and the bonding wire 12 is likely to be reduced, so the bonding wire 12 is cut at this location.

[0084] Then, the controller 6 draws the tip of the bonding wire 12 into the used capillary 243E (S23). This step S23 is the aforementioned [drawing-in operation] described with reference to FIG. 4.

[0085] <Replacement of capillary: S3> First, as shown in FIG. 17, the controller 6 advances the sub-base 23 toward the capillary exchange unit 5 (see S301, FIGS. 16(b) and 18(a)). According to this operation, the capillary 243 moves from above the discard bonding stage 15 to above the capillary exchange unit 5. Next, the controller 6 inserts the used capillary 243E into the capillary guide portion 55 by lowering the ultrasonic horn 242 (see S302, FIG. 18(b)).

[0086] Next, the controller 6 inserts the release pin portion 511 into the pin insertion hole H2 (see S303, FIG. 18(c)). In this operation, only the release pin portion 511 is inserted into the pin insertion hole H2, and the release operation by rotating the release pin portion 511 is not executed. Therefore, in this operation, the capillary 243 is in a state of being constrained by the ultrasonic horn 242. Next, the controller 6 moves the transfer carriage 521 upward (see S304, FIG. 18(d)). As a result, the capillary 243 is inserted into the transfer carriage 521. When the capillary 243 is inserted, the transfer carriage 521 holds the capillary 243. Next, the controller 6 rotates the release pin portion 511 clockwise (see S305, FIG. 19(a)). This step S305 is the aforementioned [release operation] described with reference to FIG. 3. As a result, the capillary 243 is released from the state of being constrained by the ultrasonic horn 242 (release state).

[0087] Next, the controller 6 moves the transfer carriage 521 from the exchange position 52S to the replacement position 52E (see S306, FIG. 19(b)). This step S306 is the aforementioned [first transfer operation] described with reference to FIG. 9. As a result of this step S306, the used capillary 243E moves from the exchange position 52S to the replacement position 52E, and the posture of the used capillary 243E changes from the exchange posture with an angle of 0 degrees with respect to the Z-axis to the replacement posture with an angle of 90 degrees with respect to the Z-axis.

[0088] Next, the controller 6 moves the replacement table 531 in the extraction direction (see S307 and FIG. 19(c)). This step S307 is the aforementioned [extraction operation] described with reference to FIG. 11. Next, the controller 6 moves the replacement table 531 in the insertion direction (see S308 and FIG. 19(d)). This step S308 is the aforementioned [replacement operation] described with reference to FIG. 12. As a result of these extraction operation (S307) and replacement operation (S308), the used capillary 243E held by the transport carriage 521 at the second position is replaced with the replacement capillary 243T.

[0089] Next, the controller 6 moves the transport carriage 521 from the replacement position 52E to the exchange position 52S (see S309 and FIG. 20(a)). This step S309 is the aforementioned [second transport operation] described with reference to FIG. 10. As a result of this step S309, the replacement capillary 243T moves from the replacement position 52E to the exchange position 52S, and the posture of the replacement capillary 243T changes from the replacement posture with an angle of 90 degrees with respect to the Z-axis to the exchange posture with an angle of 0 degrees with respect to the Z-axis. The ascending replacement capillary 243T is guided by the capillary guide portion 55 into the capillary through-hole 243h of the ultrasonic horn 242. Since the used capillary 243E is being pulled out from the ultrasonic horn 242 with the used capillary 243E in contact with the capillary guide portion 55, it can be said that the position of the used capillary 243E is saved by the capillary guide portion 55. Therefore, the replacement capillary 243T guided by the capillary guide portion 55 that has saved the position of the used capillary 243E can be accurately inserted with respect to the position of the used capillary 243E. Similarly, when pulling out the used capillary 243E, the bonding wire 12 is not affected at all. Therefore, the tip of the bonding wire 12 is guided into the capillary through-hole 243h of the replacement capillary 243T inserted so as to be in the same position as the used capillary 243E.

[0090] Next, the controller 6 rotates the release pin portion 511 in the reverse direction (see S310 and FIG. 20(b)). Due to this reverse rotation, the ultrasonic horn 242 switches from the release state to the locked state. As a result, the replacement capillary 243T is fixed to the ultrasonic horn 242. Next, the controller 6 lowers the transport carriage 521 to a predetermined position (see S311 and FIG. 20(c)). Then, the release pin portion 511 is pulled out from the pin insertion hole H2 (see S312 and FIG. 20(c)). Next, the controller 6 raises the ultrasonic horn 242 to pull out the replacement capillary 243T from the capillary guide portion 55 (see S313 and FIG. 20(d)). Then, the controller 6 retracts the sub-base 23 (see S314 and FIG. 16(c)).

[0091] <Preparation for Bonding: S4> Then, the controller 6 executes the preparation for bonding shown in FIG. 21 (S4). As conditions for resuming bonding, the first condition and the second condition may be set. The first condition is the protruding length D2 of the bonding wire 12 protruding from the tip of the capillary 243. The second condition is the shape of the ball 122 formed at the tip of the bonding wire 12. In step S4, a bonding wire 12 that satisfies the first condition and the second condition is formed. The controller 6 first makes the state satisfy the first condition, and then makes the state satisfy the second condition after the first condition is satisfied.

[0092] First, the controller 6 executes a feeding operation (S41). This step S41 is the aforementioned [feeding operation] described with reference to FIG. 5. Next, the controller 6 executes a protruding length measurement (S42). This protruding length measurement may use an image captured using the camera 41 and the optical component 43 as shown in FIG. 5. The controller 6 obtains the protruding length D2 by analyzing the image.

[0093] Next, the controller 6 determines whether the protruding length D2 of the wire is longer than the lower limit value (S43). When the controller 6 determines that the protruding length D2 is not longer than the lower limit value (S43: NO), that is, when the protruding length D2 is shorter than the lower limit value, the controller 6 executes a feeding operation (S44). Then, the controller 6 measures the protruding length again (S42). On the other hand, when the controller 6 determines that the protruding length D2 is longer than the lower limit value (S43: YES), the controller 6 determines whether the protruding length D2 of the bonding wire 12 is shorter than the upper limit value (S45).

[0094] When the controller 6 determines that the protruding length D2 is not shorter than the upper limit value (S45: NO), that is, when the protruding length D2 is longer than the upper limit value, the controller 6 executes a retracting operation (S46). Then, the controller 6 measures the protruding length again (S42). When the controller 6 determines that the protruding length D2 is shorter than the upper limit value (S45: YES), the controller 6 completes the preparation for bonding.

[0095] That is, by the controller 6 executing steps S42 to S46, the protruding length D2 within the range not less than the lower limit value and not more than the upper limit value can be obtained.

[0096] Next, the controller 6 forms a ball 122 at the tip of the bonding wire 12 (S47). The controller 6 moves the tip of the bonding wire 12 to the discharge region of the discharge device. Then, the controller 6 operates the discharge device to form a ball 122 at the tip of the bonding wire 12. Next, the controller 6 determines whether the shape of the ball 122 satisfies a predetermined condition (S48). This determination may also use an image captured using the camera 41 and the optical component 43. The controller 6 obtains information regarding the shape of the ball 122 by analyzing the image.

[0097] When the controller 6 determines that the shape of the ball 122 does not meet the conditions (S48: NO), it reforms the ball 122. Specifically, the controller 6 removes the ball 122 that did not meet the conditions by discard bonding (S49). Then, the controller 6 forms the ball 122 again by the discharge device. On the other hand, when the controller 6 determines that the shape of the ball 122 meets the conditions (S48: YES), it is ready to resume bonding. Then, the controller 6 resumes bonding (S5).

[0098] <Function and Effect> The capillary exchange unit 5 conveys the used capillary 243E pulled out from the ultrasonic horn 242 along a predetermined linear direction from the exchange position 52S to the replacement position 52E, and conveys the replacement capillary 243T for attachment to the ultrasonic horn 242 instead of the used capillary 243E from the replacement position 52E to the exchange position 52S in the direction opposite to the predetermined linear direction by a feed screw mechanism. The capillary exchange unit 5 includes a conveyance module 52 and a replacement module 53 provided on the replacement position 52E side of the conveyance module 52 for replacing the used capillary 243E with the replacement capillary 243T.

[0099] According to this capillary exchange unit 5, the mode of conveyance from the exchange position 52S where the used capillary 243E is pulled out from the ultrasonic horn 242 and the replacement capillary 243T is attached to the ultrasonic horn 242 to the replacement position 52E where the used capillary 243E is replaced with the replacement capillary 243T can be a one-axis movement. Therefore, the automatic exchange function of the capillary 243 can be provided while suppressing an increase in size.

[0100] The transfer module 52 moves the used capillary 243E withdrawn from the ultrasonic horn 242 and the replacement capillary 243T inserted into the ultrasonic horn 242 along the axis of the used capillary 243E when it is attached to the ultrasonic horn 242, and the replacement position 52E is defined as a position for replacing the used capillary 243E withdrawn from the ultrasonic horn 242 with the replacement capillary 243T inserted into the ultrasonic horn 242. The replacement postures of the used capillary 243E and the replacement capillary 243T located at the replacement position 52E are different from the replacement posture of the used capillary 243E when it is attached to the ultrasonic horn 242. The transfer module 52 performs a rotation operation of rotating the used capillary 243E and the replacement capillary 243T. According to this configuration, the configuration for replacing the used capillary 243E with the replacement capillary 243T at the replacement position 52E can be simplified.

[0101] After the transfer operation of moving the used capillary 243E from the replacement position 52S to the replacement position 52E is started, the transfer module 52 performs a rotation operation of rotating the used capillary 243E so that the used capillary 243E located at the replacement position 52E assumes the replacement posture during the period when the transfer operation continues. According to this configuration, since the movement of the used capillary 243E is along the axis in the vicinity of the replacement position 52S, the movement path of the used capillary 243E can be made compact.

[0102] The transfer module 52 simultaneously starts a transfer operation of moving the replacement capillary 243T from the replacement position 52E to the replacement position 52S and a rotation operation of rotating the replacement capillary 243T so that the replacement capillary 243T in the replacement posture assumes the replacement posture. According to this configuration, the posture of the used capillary 243E can be changed from the replacement posture to the replacement posture in the vicinity of the replacement position 52E.

[0103] In the above-described capillary exchange unit 5, the angle formed by the axis of the used capillary 243E in the replacement posture and the axis of the used capillary 243E in the exchange posture is 90 degrees. With this configuration as well, the configuration for replacing the used capillary 243E with the replacement capillary 243T at the replacement position 52E can be simplified.

[0104] The wire bonding apparatus 1 includes an ultrasonic horn 242, a capillary 243 detachably attached to the ultrasonic horn 242, and a capillary exchange unit 5 for exchanging the capillary 243. The capillary exchange unit 5 conveys the used capillary 243E pulled out from the ultrasonic horn 242 along a predetermined linear direction from the exchange position 52S to the replacement position 52E, and conveys the replacement capillary 243T for attachment to the ultrasonic horn 242 in a direction opposite to the predetermined linear direction from the replacement position 52E to the exchange position 52S. The capillary exchange unit 5 further includes a conveyance module 52 and a replacement module 53 provided on the replacement position 52E side of the conveyance module 52 for replacing the used capillary 243E with the replacement capillary 243T.

[0105] This wire bonding apparatus 1 includes the above-described capillary exchange unit 5. Therefore, the conveyance mode from the exchange position 52S for pulling out the used capillary 243E from the ultrasonic horn 242 and attaching the replacement capillary 243T to the ultrasonic horn 242 to the replacement position 52E for replacing the used capillary 243E with the replacement capillary 243T can be a single-axis movement by a feed screw mechanism. Therefore, since the area required for the arrangement of the capillary exchange unit 5 can be made compact, an increase in the size of the wire bonding apparatus 1 due to the addition of the automatic capillary exchange function can be suppressed.

[0106] <Modification Example> As described above, the capillary exchange mechanism and the wire bonding apparatus according to the present invention have been exemplified. However, the capillary exchange mechanism and the wire bonding apparatus are not limited to the above-described embodiments.

Explanation of Signs

[0107] 1... Wire bonding apparatus, 5... Capillary exchange unit (capillary exchange mechanism), 41... Camera, 52... Conveying module, 52S... Exchange position, 52E... Replacement position, 53... Replacement module, 122... Ball, 242... Ultrasonic horn (horn), 243... Capillary, 243E... Used capillary, 243h... Capillary through-hole, 243T... Replacement capillary, A... Axis.

Claims

1. A conveyance module that conveys a used capillary pulled out from a horn along a predetermined linear direction from an exchange position to a replacement position, and conveys an exchange capillary for attachment to the horn in a direction opposite to the predetermined linear direction from the replacement position to the exchange position by a feeding mechanism, and A replacement module provided on the replacement position side of the conveyance module for replacing the used capillary with the exchange capillary. A capillary exchange mechanism comprising:

2. The conveyance module A conveyance operation of moving the used capillary pulled out from the horn and the exchange capillary inserted into the horn along the axis of the used capillary when attached to the horn, and The replacement position is defined as a position for replacing the used capillary pulled out from the horn with the exchange capillary inserted into the horn, and the replacement postures of the used capillary and the exchange capillary located at the replacement position are different from the exchange posture of the used capillary when attached to the horn. The capillary exchange mechanism according to claim 1, which performs a rotation operation of rotating the used capillary and the exchange capillary.

3. After the conveyance operation of moving the used capillary from the exchange position to the replacement position by the conveyance module is started and during the period in which the conveyance operation continues, the rotation operation of rotating the used capillary so that the used capillary located at the replacement position assumes the replacement posture is performed. The capillary exchange mechanism according to claim 2.

4. The conveyance module simultaneously starts the conveyance operation of moving the exchange capillary from the replacement position to the exchange position and the rotation operation of rotating the exchange capillary so that the exchange capillary in the replacement posture assumes the exchange posture. The capillary exchange mechanism according to claim 2.

5. The angle formed between the axis of the used capillary in the replacement posture and the axis of the used capillary in the exchange posture is 90 degrees. The capillary exchange mechanism according to claim 2.

6. A horn, and A capillary detachably attached to the horn A wire bonding apparatus comprising a capillary replacement mechanism for replacing the capillary. A transfer module that transfers the used capillary pulled out from the horn along a predetermined linear direction from an exchange position to a replacement position, and transfers a replacement capillary for attachment to the horn in place of the used capillary from the replacement position to the exchange position in a direction opposite to the predetermined linear direction. A replacement module provided on the replacement position side of the transfer module for replacing the used capillary with the replacement capillary.

Images