Capillary supply module, capillary provision mechanism, and wire bonding device

Abstract

To reduce a time required for operation for exchanging a capillary.SOLUTION: A supply module 54 comprises: a magazine base 542 that includes a base mounting surface 542b to which a plurality of exchange capillaries 243T is mounted, and a base fetching-out surface 542d to which each exchange capillary 243T is contacted; a magazine cover 541 that is attached to the magazine base 542, and contains a cover covering surface 541a faced to the base mounting surface 542b, and a cover fetching-out surface 541b opposite to the base fetching-out surface 542d. A capillary supply port 54b contains a first supply port part 54b1 and a second supply port part 54b2 that are arranged along a direction directed to the tip end from the base end of each exchange capillary 243T. The open width G54a of the first supply port part 54b1 is smaller than the diameter of each exchange capillary 243T, and the open width G54b of the second supply port part 54b2 is larger than the diameter D243 of each exchange capillary 243T.SELECTED DRAWING: Figure 16

Description

Technical Field

[0001] The present invention relates to a capillary supply module, a capillary providing mechanism, and a wire bonding apparatus.

Background Art

[0002] A wire bonding apparatus electrically connects electrodes of a semiconductor chip and a lead frame using a wire. The wire is pressed from a component called a capillary onto the electrodes of the semiconductor chip and the like, and heat or ultrasonic waves or the like are applied as necessary. As a result, the wire is bonded to the electrodes of the semiconductor chip and the like. Such a bonding operation is called bonding.

[0003] When bonding is repeated, it becomes difficult to obtain a desired bonding result due to wear of the tip of the capillary or the like. Therefore, the capillary is replaced every time the replacement conditions set based on the number of bondings or the like are satisfied.

[0004] Patent Documents 1 to 3 disclose techniques related to wire bonding. Patent Document 1 discloses an apparatus and method capable of continuously performing bonding while replacing a capillary which is a bonding tool. Patent Document 2 discloses an apparatus and method for accurately detecting the position of a capillary. Patent Document 3 discloses a method for more effectively suppressing wire breakage and wire bending.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0006] The operation of replacing this capillary includes not only the operation of simply replacing the used capillary with a new one, but also the operation of making the wire inserted into the new capillary in a state where bonding can be resumed. That is, in order to resume bonding with a new capillary after stopping bonding to replace the capillary, a plurality of steps are required. Since it is necessary to interrupt bonding in order to perform the operation of replacing the capillary, in this technical field, it is desired to shorten the time required for the operation of replacing the capillary including such a plurality of steps.

[0007] The present invention provides a capillary supply module that shortens the time required for the operation of replacing a capillary, a capillary providing mechanism including the capillary supply module, and a wire bonding apparatus.

Means for Solving the Problems

[0008] A capillary supply module according to one embodiment of the present invention includes a base having a base placement surface on which a plurality of capillaries are placed and a base extraction surface in contact with the capillary to be extracted among the plurality of capillaries, and a cover attached to the base and including a cover covering surface facing the base placement surface and a cover extraction surface facing the base extraction surface. The base and the cover constitute a capillary accommodation portion that is a region formed between the base placement surface and the cover covering surface, and a capillary supply port that is a region formed between the base extraction surface and the cover extraction surface. The capillary supply port includes a first supply port portion and a second supply port portion arranged along the direction from the proximal end to the distal end of the capillary. The opening width of the first supply port portion is smaller than the diameter of the capillary, and the opening width of the second supply port portion is larger than the diameter of the capillary.

[0009] According to this capillary supply module, a new capillary for replacement can be supplied from a capillary accommodation part that houses a plurality of capillaries through a capillary supply port. That is, by replacing the capillary supply module, it becomes possible to supply a plurality of new replacement capillaries. Therefore, compared with the mode of replacing the replacement capillaries one by one, the time required for the operation of replacing the capillaries can be shortened.

[0010] In the above capillary supply module, at least one of the base extraction surface and the cover extraction surface that constitute the first supply port part may be provided with a protrusion that protrudes toward the other of the base extraction surface and the cover extraction surface. According to this configuration, the capillary can be taken out from the capillary supply port in response to an external operation.

[0011] The length of the first supply port part along the axis of the capillary of the above capillary supply module may be longer than the length of the second supply port part. According to this configuration, the posture of the capillary held at the capillary supply port can be stably maintained.

[0012] In the above capillary supply module, the base placement surface and the base extraction surface do not exist on a common virtual plane with each other, and the angle from the base placement surface to the base extraction surface may be larger than 180 degrees. According to this configuration, an arrangement with the base placement surface as an inclined surface is possible. As a result, the capillary can smoothly move from the capillary accommodation part to the capillary supply port by rolling on the inclined surface.

[0013] The above capillary supply module may further include a plurality of holding grooves in which each of the plurality of capillaries is arranged, a capillary holding member arranged on the base, a holding force generating member that generates a holding force for pressing the capillary holding member toward the cover, and a release force generating member that generates a release force for pulling the capillary holding member toward the base. According to this configuration, it is possible to prevent the capillary from falling out of the capillary supply module at an unintended timing.

[0014] Another form of the capillary providing mechanism of the present invention includes a capillary accommodating portion that accommodates a plurality of capillaries arranged side by side in a supply direction perpendicular to the axis of the capillary, a first supply port portion having an opening width smaller than the diameter of the capillary, and a second supply port portion having an opening width larger than the diameter of the capillary. A capillary supply port, and a capillary supply module that moves the capillary from the capillary accommodating portion to the capillary supply port along the supply direction, and a capillary replacement module that executes an operation of taking out the capillary by moving the capillary located at the capillary supply port along the axis from the first supply port portion to the second supply port portion.

[0015] This capillary providing mechanism includes the above-described capillary supply module. Therefore, by replacing the capillary supply module attached to the capillary replacement module, it becomes possible to supply a plurality of new replacement capillaries to the capillary replacement module. Therefore, compared with the mode of replacing the replacement capillaries one by one, the time required for the operation of replacing the capillaries can be shortened.

[0016] In the above-described capillary providing mechanism, the capillary supply module includes a base, a cover, a capillary holding member having a plurality of holding grooves in which each of the plurality of capillaries is arranged, a holding force generating member that generates a holding force for pressing the capillary holding member toward the cover, and a releasing force generating member that generates a releasing force for pulling the capillary holding member toward the base. The plurality of capillaries when the capillary supply module is not arranged in the capillary replacement module are in a state of being constrained by the capillary holding member and the holding force generating portion so as not to move from the capillary accommodating portion toward the capillary supply port, and the plurality of capillaries when the capillary supply module is arranged in the capillary replacement module may be in a state where the constraint by the capillary holding member and the holding force generating portion is released by the releasing force generating portion so as to be movable from the capillary accommodating portion toward the capillary supply port.

[0017] According to this configuration, when the capillary supply module is not attached to the capillary replacement module, it is possible to prevent the capillary from falling out of the capillary supply module. Furthermore, when the capillary supply module is attached to the capillary replacement module, the capillary can be taken out from the capillary supply module. That is, simply by attaching the capillary supply module to the capillary replacement module, it is possible to switch from a state where the fall of the capillary is suppressed to a state where the capillary can be supplied.

[0018] Another form of the wire bonding apparatus of the present invention includes a used capillary that is attached to a horn and into which a wire is inserted, and an exchange unit that exchanges the used capillary for a replacement capillary. The exchange unit conveys the used capillary pulled out from the horn along a predetermined linear direction from an exchange position to a replacement position, and conveys a replacement capillary for attaching to the horn instead of the used capillary from the replacement position to the exchange position in a direction opposite to the predetermined linear direction by a feeding mechanism. A capillary storage unit that stores a plurality of replacement capillaries arranged side by side in a supply direction orthogonal to the axis of the replacement capillary, and a capillary supply port including a first supply port portion having an opening width smaller than the diameter of the replacement capillary and a second supply port portion having an opening width larger than the diameter of the replacement capillary. A capillary supply module that moves the replacement capillary from the capillary storage unit to the capillary supply port along the supply direction, and a capillary replacement module that executes an operation of taking out the replacement capillary by moving the replacement capillary located at the capillary supply port along the axis from the first supply port portion to the second supply port portion.

[0019] This wire bonding apparatus is provided with the above-described capillary supply module. Therefore, by replacing the capillary supply module attached to the capillary replacement module, a plurality of new replacement capillaries can be supplied to the capillary replacement module. Accordingly, compared with the mode of replacing the replacement capillaries one by one, the time required for the operation of replacing the capillaries can be shortened.

Advantages of the Invention

[0020] According to the present invention, it is possible to provide a capillary replacement mechanism and a wire bonding apparatus that shorten the time required for the operation of replacing the capillaries.

Brief Description of the Drawings

[0021]

Figure 1

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Figure 21

Embodiments for Carrying Out the Invention

[0022] Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant descriptions are omitted.

[0023] FIG. 1 is a perspective view showing a wire bonding apparatus according to an embodiment of the present invention. The wire bonding apparatus 1 includes a wire bonding unit 2, a bonding stage 3, a camera unit 4, a capillary exchange unit 5, and a controller 6.

[0024] The wire bonding unit 2 bonds a bonding wire 12 to the semiconductor chip 11. The bonding stage 3 sequentially moves a plurality of semiconductor chips 11 to be wire bonded into the working area of the wire bonding unit 2. The camera unit 4 obtains an imaging image for controlling the operation of the wire bonding unit 2. The capillary exchange unit 5 exchanges a used capillary that needs to be exchanged by multiple wire bondings with a new replacement capillary. The controller 6 includes various control units that control the operations of the respective parts of the wire bonding apparatus 1 and perform various processes.

[0025] The wire bonding unit 2 includes a main base 21, an XY stage 22 for tools, and a sub base 23. Further, the wire bonding unit 2 includes a bonding module 24, a Z-axis drive unit 25, a module base 26, a lower wire clamp 27, and an upper wire clamp 28.

[0026] The XY stage 22 for tools is attached to the main base 21. The sub base 23 is attached to the movable stage of the XY stage 22 for tools. The XY stage 22 for tools moves the sub base 23 in the X-axis direction and the Y-axis direction. The bonding module 24, the lower wire clamp 27, the upper wire clamp 28, and the camera unit 4 are attached to the sub base 23. For example, when the sub base 23 moves in the X-axis direction by the XY stage 22 for tools, the bonding module 24, the lower wire clamp 27, the upper wire clamp 28, and the camera unit 4 also move in the X-axis direction integrally.

[0027] More specifically, the sub-base 23 includes a sub-base main surface 23a and a sub-base wall surface 23b. A Z-axis drive unit 25 is attached to the sub-base main surface 23a, and a module base 26 is attached to the Z-axis drive unit 25. A bonding module 24 and a lower wire clamp 27 are attached to the module base 26. On the other hand, an upper wire clamp 28 and a camera unit 4 are attached to the sub-base wall surface 23b without passing through intermediate members such as the Z-axis drive unit 25 and the module base 26. According to this configuration, the bonding module 24 and the lower wire clamp 27 reciprocate in the Z-axis direction by the Z-axis drive unit 25. More specifically, the tip of the bonding module 24 and the tip of the lower wire clamp 27 can perform a reciprocating arc motion centered on the Z-axis drive unit 25. During this reciprocating arc motion, the relative position of the lower wire clamp 27 with respect to the bonding module 24 is maintained. On the other hand, the upper wire clamp 28 and the camera unit 4 do not reciprocate in the Z-axis direction by the Z-axis drive unit 25.

[0028] In short, the bonding module 24 and the lower wire clamp 27 move in each of the X-axis direction, Y-axis direction, and Z-axis direction. In contrast, the upper wire clamp 28 and the camera unit 4 move in the X-axis direction and Y-axis direction. In the example of this embodiment, the upper wire clamp 28 and the camera unit 4 do not move in the Z-axis direction. However, it is also possible to adopt a configuration in which the upper wire clamp 28 and the camera unit 4 can move in the Z-axis direction.

[0029] <Bonding Module 24> The bonding module 24 has a horn holder 241, a ultrasonic horn 242, and a capillary 243. The base end side of the horn holder 241 is attached to the Z-axis drive unit 25. The ultrasonic horn 242 is attached to the tip side of the horn holder 241. The capillary 243 is detachably attached to the tip side portion of the ultrasonic horn 242.

[0030] The capillary 243, which is a bonding tool, bonds the bonding wire 12 to the semiconductor chip 11. The capillary 243 has a capillary main body portion 243a and a capillary tapered portion 243b. The capillary main body portion 243a has a cylindrical shape and is gripped at the tip portion of the ultrasonic horn 242. The capillary tapered portion 243b has a conical shape that tapers toward the tip, and the tip of the capillary tapered portion 243b is pressed against the pad or the like of the semiconductor chip 11. A capillary through hole 243h is formed in the capillary 243 from the base end surface of the capillary main body portion 243a to the tip end surface of the capillary tapered portion 243b. The bonding wire 12 is inserted through the capillary through hole 243h.

[0031] <Lower wire clamp 27 and upper wire clamp 28> As shown in FIG. 2, the lower wire clamp 27 and the upper wire clamp 28 can mutually switch between a state of gripping the bonding wire 12 and a state of not gripping the bonding wire 12. As described above, the lower wire clamp 27 is movable along the Z-axis direction. Therefore, the position of the lower wire clamp 27 can be mutually switched between a position close to the upper wire clamp 28 and a position away from the upper wire clamp 28 with respect to the upper wire clamp 28 whose position along the Z-axis direction is fixed. By this switching between the gripping state and the open state and the switching of the position, the lower wire clamp 27 and the upper wire clamp 28 can perform an operation of drawing the bonding wire 12 into the capillary through hole 243h and an operation of feeding the bonding wire 12 out of the capillary through hole 243h.

[0032] <Camera unit> The camera unit 4 images the semiconductor chip 11. The captured image of the semiconductor chip 11 is used for positioning the capillary 243 when wire bonding is performed on the semiconductor chip 11. Thus, the camera unit 4 functions as a camera unit for wire bonding used for performing wire bonding.

[0033] Further, the camera unit 4 is also used for the automatic replacement of the capillary 243 by the capillary replacement unit 5. For example, the camera unit 4 is used for the positioning operation of the release pin portion 511, which will be described later, during the operation of switching the locked state of the ultrasonic horn 242 to the released state. The camera unit 4 is used for the operation of determining whether the state of the bonding wire 12 protruding from the tip of the capillary 243 is in a state where bonding can be resumed.

[0034] The camera unit 4 includes a camera 41 having an image sensor, a camera arm 42 that supports the camera 41, a tool XY stage 22, and a camera control unit 66. The base end portion of the camera arm 42 is attached to the tool XY stage 22. The camera 41 is attached to the tip end portion of the camera arm 42. The camera arm 42 supports the camera 41 at a position above the bonding stage 3.

[0035] The camera 41 and the camera arm 42 are attached to the tool XY stage 22 via the sub-base 23. That is, the camera 41 and the camera arm 42 can be driven by the tool XY stage 22 to perform a parallel movement along the XY plane together with the capillary 243 and the like. In this way, the tool XY stage 22 functions as a part of the components of the wire bonding unit 2 and also functions as a part of the components of the camera unit 4. The camera control unit 66 controls various operations of the camera unit 4 and executes various processes. The details of the control performed by the camera control unit 66 will be described later.

[0036] <Capillary replacement unit> The capillary exchange unit 5 recovers the used capillary 243E attached to the ultrasonic horn 242 and mounts a new replacement capillary 243T on the ultrasonic horn 242. That is, the operation of exchanging the capillary 243 includes an operation of recovering the capillary 243 and an operation of mounting the capillary 243. When the preset conditions are satisfied, the operation of exchanging the capillary 243 is automatically performed. For example, the condition may be the number of bonding operations. That is, every time a predetermined number of bonding operations are performed, an operation of exchanging the capillary 243 may be performed.

[0037] FIG. 3 is a conceptual diagram showing the members constituting the capillary exchange unit 5. FIG. 4 is a perspective view showing a specific configuration example of the capillary exchange unit 5. The capillary exchange unit 5 includes a release module 51, a transport module 52 (capillary transport module), a replacement module 53, and a supply module 54 (capillary supply module). The release module 51, the transport module 52, and the replacement module 53 are housed in the exchange unit main body 50 so as to be an integrated device. The exchange unit main body 50 has a module slot 50a into which the supply module 54 is inserted.

[0038] <Release module> The release module 51 includes a release pin portion 511, a release shaft 512, and a release drive portion 513.

[0039] The release module 51 switches (release operation) the capillary 243 from a state where the capillary 243 is constrained by the ultrasonic horn 242 to a state where the capillary 243 is released from the ultrasonic horn 242. Further, the release module 51 switches the capillary 243 from a state where the capillary 243 is released from the ultrasonic horn 242 to a state where the capillary 243 is constrained by the ultrasonic horn 242.

[0040] <Transport module> The transfer module 52 includes a transfer carriage 521, a transfer linear shaft 522, and a transfer drive unit 523. The transfer module 52 further includes a transfer rotary rack 524 and a transfer rotary pinion 525.

[0041] The transfer module 52 extracts the used capillary 243E from the ultrasonic horn 242 at the replacement position 52S. Further, the transfer module 52 transfers the extracted used capillary 243E from the replacement position 52S to the replacement position 52E.

[0042] The transfer module 52 receives the replacement capillary 243T from the replacement module 53 at the replacement position 52E. The transfer module 52 transfers the replacement capillary 243T from the replacement position 52E to the replacement position 52S. The transfer module 52 inserts the replacement capillary 243T into the ultrasonic horn 242 at the replacement position 52S.

[0043] In this way, the movement of the transfer carriage 521 includes a linear movement between the replacement position 52S and the replacement position 52E and a rotational movement for changing the posture of the used capillary 243E. And in this embodiment, all periods of the rotational movement overlap with some periods of the linear movement. In other words, the period of the linear movement includes the period of only the linear movement and the period when the linear movement and the rotational movement are parallel.

[0044] Subsequently, with reference to FIG. 5, an example of a more specific configuration of the transfer module 52 will be described. In addition to the above-described transfer carriage 521 and the like, the transfer module 52 further includes a transfer base 526. The transfer base 526 has a transfer base bottom surface portion 52A and a transfer base standing surface portion 52B. The transfer base standing surface portion 52B stands up from the transfer base bottom surface portion 52A, and when viewed from the Y direction, the transfer base 526 has an L shape.

[0045] A motor serving as a conveyance drive unit 523 is attached to the back surface of the bottom portion 52A of the conveyance base. The output shaft of the conveyance drive unit 523 faces in the Z direction. A conveyance linear movement shaft 522 stands upright on the main surface of the bottom portion 52A of the conveyance base. The lower end side of the conveyance linear movement shaft 522 is connected to the output shaft of the conveyance drive unit 523. The upper end side of the conveyance linear movement shaft 522 is connected to a shaft support portion 528 that stands up from the main surface of the standing portion 52B of the conveyance base. The shaft support portion 528 rotatably supports the upper end of the conveyance linear movement shaft 522. A helical thread groove is formed on the outer peripheral surface of the columnar conveyance linear movement shaft 522. That is, the conveyance linear movement shaft 522 is a feed screw (lead screw). The conveyance linear movement shaft 522 rotates in response to the rotation of the output shaft of the conveyance drive unit 523. When the conveyance linear movement shaft 522 rotates, a linear movement of a conveyance carriage 521 having a thread portion that meshes with the feed screw of the conveyance linear movement shaft 522 occurs. That is, the conveyance linear movement shaft 522 is part of a member that converts the rotational movement of the conveyance drive unit 523 into the linear movement of the conveyance carriage 521.

[0046] The conveyance module 52 further includes a conveyance guide shaft 527. The conveyance guide shaft 527 restricts the movement of the conveyance carriage 521 resulting from the rotation of the conveyance linear movement shaft 522 to a linear movement along the Z axis. The conveyance guide shaft 527 is a columnar member. Since the conveyance guide shaft 527 restricts the movement direction of the conveyance carriage 521, unlike the conveyance linear movement shaft 522, a thread groove is not formed on the outer peripheral surface of the conveyance guide shaft 527, and it is not configured to be rotatable. That is, the lower end side of the conveyance guide shaft 527 is fixed to the bottom portion 52A of the conveyance base. And the upper end side of the conveyance guide shaft 527 is fixed to a shaft fixing portion that stands up from the standing portion 52B of the conveyance base.

[0047] The transfer carriage 521 has a carriage base 52C, a carriage shaft 52D, and a capillary catcher 52F. The carriage base 52C receives driving force from the transfer linear shaft 522 and moves vertically along the Z-axis. Specifically, the transfer carriage 521 can move from the replacement position 52S to the replacement position 52E. Conversely, the transfer carriage 521 can move from the replacement position 52E to the replacement position 52S. Note that the transfer carriage 521 can also stay at any position between the replacement position S and the replacement position 52E.

[0048] The carriage base 52C includes a carriage body 52C1, and carriage flanges 52C2 and 52C3. The carriage body 52C1 is provided with a through hole through which the carriage shaft 52D is inserted. A carriage flange 52C2 is provided below the first side surface of the carriage body 52C1. The carriage flange 52C2 is provided with a threaded portion that meshes with the thread groove of the transfer linear shaft 522. The feed screw mechanism is constituted by this threaded portion and the transfer linear shaft 522. A carriage flange 52C3 is provided substantially at the center of the second side surface of the carriage body 52C1. The carriage flange 52C3 is provided with a through hole 52H through which the transfer guide shaft 527 is inserted. For example, the shape of the through hole 52H is an elongated hole.

[0049] The carriage shaft 52D is passed through the through hole of the carriage body 52C1. The carriage shaft 52D is rotatable with respect to the carriage body 52C1. A capillary catcher 52F is fixed to the tip of the carriage shaft 52D.

[0050] The capillary catcher 52F rotates in response to the rotation of the carriage shaft 52D. The capillary catcher 52F extends in a direction perpendicular to the axis of the carriage shaft 52D. The capillary catcher 52F is a cylindrical member. The proximal end of the capillary catcher 52F is fixed to the distal end of the carriage shaft 52D. A catcher opening 52G is formed at the distal end of the capillary catcher 52F. The capillary taper portion 243b is inserted into this catcher opening 52G. The capillary catcher 52F has a configuration capable of holding the capillary 243. Here, the term "holding" means that the capillary 243 does not fall out of the capillary catcher 52F even when the axis of the capillary 243 is inclined with respect to the vertical direction. For example, even when the axis of the capillary 243 is orthogonal to the vertical direction, the capillary 243 does not fall off from the capillary catcher 52F.

[0051] A conveyance rotation pinion 525 is attached to the proximal end of the carriage shaft 52D. As described above, the capillary catcher 52F rotates in response to the rotation of the carriage shaft 52D. The rotation of this carriage shaft 52D is achieved by the conveyance rotation pinion 525 and the conveyance rotation rack 524. The conveyance rotation pinion 525, the carriage shaft 52D, and the capillary catcher 52F are integrally rotatable. The conveyance rotation rack 524 that meshes with the conveyance rotation pinion 525 is attached to the conveyance base vertical surface portion 52B. More specifically, the conveyance rotation rack 524 is attached below the conveyance base vertical surface portion 52B, that is, in the vicinity of the replacement position 52E. The conveyance rotation rack 524 and the conveyance rotation pinion 525 constitute a rack and pinion mechanism that converts the linear motion of the conveyance carriage 521 into the rotational motion of the capillary catcher 52F.

[0052] [First Conveyance Operation] Here, the case of transporting the used capillary 243E from the exchange position 52S to the replacement position 52E is referred to as the first transport operation. In the first transport operation, first, a linear movement downward is started, and only the linear movement is executed until the transport carriage 521 reaches the transport rotary rack 524.

[0053] The linear movement is executed by the transport linear movement shaft 522 and the transport drive unit 523. The transport carriage 521 and the transport linear movement shaft 522 constitute a so-called feed screw mechanism. When the transport drive unit 523 rotates the transport linear movement shaft 522, the transport carriage 521 installed on the transport linear movement shaft 522, which is a screw shaft, moves linearly. The moving direction of the transport carriage 521 is determined by the rotation direction of the transport linear movement shaft 522.

[0054] And after the transport carriage 521 reaches the transport rotary rack 524, the linear movement and the rotational movement in the clockwise direction are executed in parallel.

[0055] More specifically, a transport rotary rack 524 is provided on the lower end side of the transport linear movement shaft 522. As shown in Fig. 6(a), when the transport carriage 521 at the exchange position 52S approaches the lower end side of the transport linear movement shaft 522, the transport rotary pinion 525 provided on the transport carriage 521 meshes with the transport rotary rack 524 as shown in Fig. 6(b). As a result, as the transport carriage 521 moves, the transport carriage 521 rotates in a predetermined direction (see Fig. 6(c)). For example, as shown in Fig. 6(d), the transport carriage 521 rotates 90 degrees in the clockwise direction. As a result, the posture of the used capillary 243E that has moved to the replacement position 52E is different from the posture of the used capillary 243E at the exchange position 52S. Here, the posture of the used capillary 243E can be defined as the angle of the axis A of the used capillary 243E with respect to the Z-axis direction. For example, the posture of the used capillary 243E at the exchange position 52S has an angle of 0 degrees with respect to the Z-axis direction. For example, the posture of the used capillary 243E at the replacement position 52E has an angle of 90 degrees with respect to the Z-axis direction.

[0056] In addition, by defining the direction along the axis A of the used capillary 243E, the posture of the used capillary 243E can be defined in more detail. For example, the direction from the proximal end to the distal end of the used capillary 243E is defined as positive. Also in this case, the posture of the used capillary 243E at the replacement position 52S has an angle of 0 degrees with respect to the Z-axis direction. For example, when the distal end of the used capillary 243E is on the upper side and the proximal end is on the lower side due to the rotation of the transfer carriage 521, it can be said that the posture of the used capillary 243E at the replacement position 52S has an angle of 180 degrees with respect to the Z-axis direction.

[0057] [Second Transfer Operation] Next, the case of transporting the replacement capillary 243T from the replacement position 52E to the replacement position 52S is referred to as the second transfer operation. As shown in FIGS. 7(a) and 7(b), in the second transfer operation, a linear movement upward is started, and at the same time, a rotational movement counterclockwise is executed in parallel. During the period when the transfer carriage 521 is engaged with the transfer rotation rack 524, the linear movement and the rotational movement are parallel. Then, as shown in FIGS. 7(c) and 7(d), after the transfer carriage 521 is disengaged from the transfer rotation rack 524, only the linear movement upward is executed.

[0058] [Replacement Module] FIG. 8 is a perspective view showing an example of the specific configuration of the replacement module 53. The replacement module 53 includes a replacement table 531, a replacement drive unit 532, a replacement linear motion shaft 533, a replacement spring shaft 534, a replacement operating piece 535, a replacement fixing piece 536, a replacement guide shaft 537, a magazine slot 538, and a replacement base 539.

[0059] The replacement table 531, the replacement operation piece 535, and the replacement spring shaft 534 are integrally formed to constitute a replacement table unit 53S. The replacement table unit 53S is capable of reciprocating movement with respect to the replacement base 539. The replacement table unit 53S receives a driving force for reciprocating movement by the replacement drive unit 532 and the replacement linear movement shaft 533. Also, the reciprocating movement direction of the replacement table unit 53S is restricted by the replacement guide shaft 537. The replacement guide shaft 537 is inserted through a through hole of the replacement table 531. One end of the replacement guide shaft 537 is fixed to the side of the replacement drive unit 532 on the replacement base 539, and the other end of the replacement guide shaft 537 is fixed to the side of the replacement fixing piece 536 on the replacement base 539.

[0060] The replacement drive unit 532, which is a motor, is fixed to the replacement base 539. The replacement linear movement shaft 533 is connected to this replacement drive unit 532. That is, one end of the replacement linear movement shaft 533 is connected to the replacement drive unit 532. And the other end of the replacement linear movement shaft 533 is rotatably supported by a bearing provided on the replacement base 539.

[0061] The replacement operation piece 535 can move closer to the replacement table 531 and move away from the replacement table 531. In other words, the distance from the replacement operation piece 535 to the replacement table 531 is variable. The replacement spring shaft 534 has a shaft body 534a and a compression spring 534b into which the shaft body 534a is inserted. One end of the shaft body 534a is disposed on the replacement operation piece 535. The replacement operation piece 535 may be fixed to the shaft body 534a. The other end of the shaft body 534a is disposed on the replacement table 531. The replacement table 531 is relatively movable with respect to the shaft body 534a. The compression spring 534b is disposed between the replacement operation piece 535 and the replacement table 531. The compression spring 534b exerts a force to increase the distance from the replacement operation piece 535 to the replacement table 531. By this force, the distance from the replacement operation piece 535 to the replacement table 531 is maintained at a predetermined initial distance.

[0062] The replacement table 531 moves in response to the rotation of the replacement linear motion shaft 533. That is, the replacement linear motion shaft 533 and the replacement table 531 constitute a so-called feed screw mechanism. When the replacement table 531 receives a driving force from the replacement linear motion shaft 533, the replacement table unit 53S including the replacement table 531 reciprocates.

[0063] Here, in a state where the replacement operation piece 535 is in contact with the replacement fixing piece 536, the replacement table 531 may further receive a driving force in a direction toward the replacement fixing piece 536. In this case, since the replacement operation piece 535 is in contact with the replacement fixing piece 536, it does not move. On the other hand, the replacement table 531 can further move toward the replacement operation piece 535. That is, the replacement table 531 gradually approaches the replacement operation piece 535. When the replacement table 531 approaches the replacement operation piece 535, the compression spring 534b is compressed, so the replacement table 531 approaches the replacement operation piece 535 against the reaction force received from the compression spring 534b.

[0064] On the other hand, when the replacement table 531 approaches the replacement operating piece 535, the replacement table 531 may receive a driving force in a direction away from the replacement fixing piece 536. At this time, the replacement table 531 gradually moves away from the replacement fixing piece 536 and returns to a predetermined initial distance.

[0065] A receiving groove 531b for receiving the replacement capillary 243T is provided on the replacement table main surface 531S of the replacement table 531. The end on the side of the replacement operating piece 535 in the receiving groove 531b is open. On the other hand, the end on the side of the replacement driving part 532 in the receiving groove 531b is closed. On the replacement table main surface 531S, a table standing part 531a standing up from the replacement table main surface 531S is provided at the end on the side of the replacement driving part 532. The table standing part 531a presses the replacement capillary 243T waiting at the capillary supply port 54b of the supply module 54 toward the replacement fixing piece 536. By this pressing, since the replacement capillary 243T moves toward the replacement fixing piece 536, the replacement capillary 243T can be taken out from the capillary supply port 54b to the receiving groove 531b.

[0066] [Withdrawal operation] The replacement module 53 withdraws the used capillary 243E conveyed to the replacement position 52E from the transfer carriage 521. More specifically, by the operations of the replacement driving part 532 and the replacement linear motion shaft 533, the replacement table 531 and the replacement operating piece 535 are integrated and move away from the replacement fixing piece 536 (see Fig. 9(b)). Since the replacement operating piece 535 is caught by the capillary tapered part 243b of the capillary 243, when the replacement operating piece 535 moves in a direction away from the replacement fixing piece 536, the capillary 243 also moves in a direction away from the replacement fixing piece 536 along with the movement of the replacement operating piece 535. As a result, the capillary 243 is withdrawn from the transfer carriage 521.

[0067] [Replacement operation] Furthermore, the replacement module 53 inserts the replacement capillary 243T into the transport carriage 521 from which the used capillary 243E has been withdrawn. More specifically, due to the operations of the replacement drive unit 532 and the replacement linear motion shaft 533, the replacement table 531 and the replacement operation piece 535 move together and approach the replacement fixing piece 536. The operation of the replacement table 531 and the replacement operation piece 535 approaching the replacement fixing piece 536 includes several steps described below.

[0068] As the first step (see Fig. 10(a)), as the replacement table 531 moves, the replacement table upright portion 531a approaches the replacement fixing piece 536 while pressing the base end surface of the replacement capillary 243T located at the capillary supply port 54b. As a result, the replacement capillary 243T drops onto the replacement table 531 from the capillary supply port 54b (see Fig. 10(b)). As the second step, as the replacement table 531 moves, the replacement operation piece 535 contacts the replacement fixing piece 536 (see Fig. 10(c)). As the third step, as the replacement table 531 moves, the replacement table 531 approaches the replacement fixing piece 536 further. In this third step, since the replacement operation piece 535 is in contact with the replacement fixing piece 536, the replacement operation piece 535 does not move. Therefore, in the third step, the replacement table 531 carrying the replacement capillary 243T approaches the replacement operation piece 535 in contact with the replacement fixing piece 536. In other words, in the third step, the distance from the replacement table 531 carrying the replacement capillary 243T to the replacement operation piece 535 in contact with the replacement fixing piece 536 gradually becomes shorter. As the fourth step (see Fig. 10(d)), as the replacement table 531 moves, the capillary taper portion 243b of the replacement capillary 243T on the replacement table 531 passes through the replacement operation piece 535 and the replacement fixing piece 536 and is inserted into the transport carriage 521.

[0069] <Supply module> The supply module 54 includes a capillary storage portion 54a and a capillary supply port 54b.

[0070] The supply module 54 is inserted into the module slot 50a of the replacement unit main body 50 as described above. The supply module 54 can be removed from the module slot 50a as needed (see Fig. 4). The supply module 54 houses a plurality of replacement capillaries 243T in the capillary housing portion 54a. The supply module 54 supplies the replacement capillaries 243T to the replacement module 53 one by one from the capillary supply port 54b according to the operation of the replacement module 53.

[0071] Hereinafter, the structure of the supply module 54 will be described in detail with reference to Figs. 11 to 20. As shown in Fig. 11, the supply module 54 includes a magazine cover 541 and a magazine base 542. A recess for the capillary housing portion 54a is provided in the magazine base 542. The magazine cover 541 is detachably attached to the magazine base 542.

[0072] As shown in Fig. 12, when the magazine cover 541 is attached to the magazine base 542, the capillary housing portion 54a and the capillary supply port 54b are formed. The capillary housing portion 54a is an area formed between the base placement surface 542b and the cover covering surface 541a (see Fig. 12). The capillary supply port 54b is an area formed between the base extraction surface 542d and the cover extraction surface 541b (see Fig. 12).

[0073] As shown in Fig. 13, the magazine cover 541 has a cover covering surface 541a and a cover extraction surface 541b. Three cover magnets 541M are embedded in the cover covering surface 541a.

[0074] As shown in FIG. 14, the magazine base 542 includes a base connection surface 542a, a base placement surface 542b, a base groove surface 542c (base groove portion), a base extraction surface 542d, and a base back surface 542e. The magazine cover 541 contacts the base connection surface 542a. A groove having a plurality of stepped portions is provided on the base connection surface 542a. The bottom surface of the first stepped portion is the base placement surface 542b. The replacement capillary 243T is placed on the base placement surface 542b. The bottom surface of the second stepped portion is the base groove surface 542c. A capillary holding table 54S1, which will be described later, is arranged on the base groove surface 542c.

[0075] The base extraction surface 542d is connected to the base placement surface 542b. That is, the replacement capillary 243T can also contact the base extraction surface 542d. Although the base extraction surface 542d is connected to the base placement surface 542b, they do not exist on the same virtual plane. A ridge line 542k exists between the base extraction surface 542d and the base placement surface 542b. The angle 542A between the base extraction surface 542d and the base placement surface 542b is greater than, for example, 180 degrees.

[0076] View the base placement surface 542b and the base extraction surface 542d in a side view when the supply module 54 is arranged in the replacement module 53 (see FIG. 12). The base placement surface 542b is inclined with respect to the Z direction. That is, when the supply module 54 is arranged in the replacement module 53, it can be said that the base placement surface 542b is an inclined surface. In contrast, the base extraction surface 542d is parallel to the Z direction. That is, when the supply module 54 is arranged in the replacement module 53, it can be said that the capillary supply port 54b formed by the base extraction surface 542d extends vertically downward.

[0077] That is, the supply module 54 is inserted obliquely with respect to the replacement module 53. In this state, the base back surface 542e is in contact with the slot main surface 538b. Further, the base latching surface 542f is in contact with the slot upper surface 538a. The contact between the base latching surface 542f and the slot upper surface 538a determines the insertion depth of the supply module 54 with respect to the replacement module 53.

[0078] <Capillary supply port> FIG. 15 is a view seen from the direction (Y direction) of the axis AT of the replacement capillary 243T of the capillary supply port 54b. As described above, the capillary supply port 54b is formed by the cover extraction surface 541b and the base extraction surface 542d. The opening width G54b from the cover extraction surface 541b to the base extraction surface 542d is slightly larger than the diameter D243 of the replacement capillary 243T. Therefore, the replacement capillary 243T can roll down from the capillary housing portion 54a and be positioned at the capillary supply port 54b.

[0079] And, a protrusion 54T is provided on the base extraction surface 542d. This protrusion 54T is for temporarily retaining the replacement capillary 243T at the capillary supply port 54b. The protrusion 54T protrudes from the base extraction surface 542d toward the cover extraction surface 541b. Therefore, the opening width G54a from the protruding tip surface 54Ta of the protrusion 54T to the cover extraction surface 541b is smaller than the diameter of the replacement capillary 243T. Therefore, the replacement capillary 243T is caught by the protrusion 54T and does not fall from the capillary supply port 54b.

[0080] FIG. 16 is a view of the capillary supply port 54b looking vertically upward (+Z direction). The length of the capillary supply port 54b is the supply port length L54b. In the example of FIG. 16, the supply port length L54b is longer than the capillary length L243 of the replacement capillary 243T. And the protrusion 54T is provided on a part in the width direction of the base extraction surface 542d. That is, the base extraction surface 542d constituting the capillary supply port 54b includes a portion where the protrusion 54T is provided and a portion where the protrusion is not provided. The portion where the protrusion 54T is provided corresponds to the first supply port portion 54b1 in the capillary supply port 54b. The portion where the protrusion 54T is not provided corresponds to the second supply port portion 54b2 in the capillary supply port 54b. The replacement capillary 243T is caught by the portion where the protrusion 54T is provided. Therefore, as long as the replacement capillary 243T is caught by the protrusion 54T, the replacement capillary 243T does not fall from the capillary supply port 54b. On the other hand, since the length W1 of the portion where the protrusion 54T is not provided is larger than the capillary diameter 243D of the replacement capillary 243T, the replacement capillary 243T falls from the capillary supply port 54b.

[0081] The protrusion 54T is provided at a position in contact with the capillary main body portion 243a of the replacement capillary 243T. The capillary main body portion 243a is longer than the capillary taper portion 243b. Therefore, the length W1 of the portion where the protrusion 54T is provided is longer than the length W2 of the portion where the protrusion 54T is not provided. For example, the length W1 of the protrusion 54T may correspond to the capillary main body portion 243a, and the length W2 of the portion where the protrusion 54T is not provided may correspond to the capillary taper portion 243b.

[0082] The replacement capillary 243T that has fallen from the capillary housing portion 54a to the capillary supply port 54b is caught by the protrusion 54T. Then, when the replacement capillary 243T is pushed to the left side of the paper surface by the replacement table 531 of the replacement module 53, the replacement capillary 243T gradually moves to the portion where the protrusion 54T is not provided. And when the base end of the capillary main body portion 243a gradually reaches the portion where the protrusion 54T is not provided, the replacement capillary 243T falls from the capillary supply port 54b to the replacement table 531.

[0083] As described above, the capillary base end surface 243e of the replacement capillary 243T is pressed by the table standing portion 531a of the replacement table 531. Therefore, as shown in FIG. 15, when viewed from the direction of the axis AT, the table standing portion 531a overlaps a part of the replacement capillary 243T. For example, the table standing portion 531a does not overlap the axis AT of the replacement capillary 243T. In other words, the upper end surface 531c of the table standing portion 531a is located below the axis AT of the replacement capillary 243T.

[0084] According to such a positional relationship, the relationship between the replacement capillary 243T and the table standing portion 531a can take two modes. The first mode is that the table standing portion 531a moves from the right side to the left side of the paper surface. In the first mode, the replacement capillary 243T is moved to the left side of the paper surface by the table standing portion 531a moving while pressing the capillary base end surface 243e (see FIGS. 17(a) and (b)). In the first mode, the replacement capillary 243T also moves in the same direction as the table standing portion 531a as the table standing portion 531a moves. And when the replacement capillary 243T moves from the first supply port portion 54b1 to the second supply port portion 54b2, the replacement capillary 243T is taken out onto the replacement table 531 (see FIG. 17(c)).

[0085] In the second aspect, contrary to the first aspect, the table upright portion 531a moves from the left side to the right side of the paper surface. As shown in Fig. 18(a), first, the table upright portion 531a is located on the left side of the replacement capillary 243T. At this time, the table upright portion 531a does not contact the replacement capillary 243T. Then, when the table upright portion 531a moves to the right side of the paper surface, the table upright portion 531a contacts the capillary taper portion 243b (see Fig. 18(b)). Since the capillary taper portion 243b is an inclined surface, the table upright portion 531a is not caught by the capillary taper portion 243b. The table upright portion 531a moves to the right side of the paper surface while pushing up the capillary taper portion 243b. At this time, the replacement capillary 243T is pushed upward according to the height of the table upright portion 531a. However, the replacement capillary 243T does not move to the right side of the paper surface together with the table upright portion 531a in response to the movement of the table upright portion 531a to the right side of the paper surface.

[0086] Then, the table upright portion 531a moves further to the right side of the paper surface while contacting the outer peripheral surface of the capillary main body portion 243a (see Fig. 18(c)). Also at this time, the replacement capillary 243T is only slightly pushed upward and does not move toward the right side of the paper surface. And when the table upright portion 531a reaches the right side of the capillary base end surface 243e, the replacement capillary 243T returns to its original position (see Fig. 18(d)).

[0087] In this way, with the configuration that the table upright portion 531a does not overlap with the axis AT of the replacement capillary 243T located at the capillary supply port 54b, it is possible to realize a mode in which the replacement capillary 243T moves together with the table upright portion 531a and a mode in which the replacement capillary 243T does not move together with the table upright portion 531a.

[0088] Furthermore, as shown in FIG. 14, the magazine base 542 includes a holding mechanism placement hole 54H1 and a feed mechanism placement hole 54H2. The holding mechanism placement hole 54H1 is a hole having an opening in the base groove surface 542c. The holding mechanism placement hole 54H1 is a through hole extending from the base groove surface 542c to the base back surface 542e. The feed mechanism placement hole 54H2 is a hole having an opening in the base placement surface 542b. The feed mechanism placement hole 54H2 is a through hole extending from the base placement surface 542b to the base back surface 542e.

[0089] Several components are attached to the magazine base 542. A base magnet 542M and a base pin 54P are attached to the magazine base 542. These base magnet 542M and base pin 54P are for attaching the magazine cover 541 to the magazine base 542. The base magnet 542M fixes the magazine cover 541 to the magazine base 542 by attracting the cover magnet 541M. Also, due to the fixing of the base magnet 542M, the magazine cover 541 can be easily removed from the magazine base 542. Therefore, in order to fill the empty supply module 54 with a new replacement capillary 243T, the magazine cover 541 can be easily removed.

[0090] A capillary holding mechanism 54S is attached to the magazine base 542. The capillary holding mechanism 54S switches between a state where the replacement capillary 243T cannot be taken out and a state where the replacement capillary 243T can be taken out. Before or during the operation of attaching the supply module 54 to the replacement module 53, it is not necessary to take out the replacement capillary 243T. Therefore, in order to prevent the replacement capillary 243T from being discharged unintentionally, the capillary holding mechanism 54S actively holds the position of the replacement capillary 243T it houses.

[0091] More specifically, the capillary holding mechanism 54S includes a capillary holding table 54S1 (capillary holding member), a guide pin 54S2, a holding spring 54S3 (holding force generating member, see FIG. 19), and a holding magnet 54S4 (releasing force generating member, see FIG. 19). The capillary holding table 54S1 switches between a state of restraining the replacement capillary 243T and a state of releasing the restraint on the replacement capillary 243T. The capillary holding table 54S1 includes a table plate portion 54S5 and a table body portion 54S6.

[0092] The table plate portion 54S5 is disposed on the base groove surface 542c. A plurality of holding grooves 54S7 are provided on the main surface of the table plate portion 54S5. One replacement capillary 243T can be disposed in one holding groove 54S7. For example, the table plate portion 54S5 in FIG. 14 is provided with 10 holding grooves 54S7. Therefore, the supply module 54 can accommodate 10 replacement capillaries 243T.

[0093] The table body portion 54S6 is a portion that protrudes from the back surface of the table plate portion 54S5. The table body portion 54S6 is inserted into the holding mechanism arrangement hole 54H1. Two guide holes 54S8 are provided in the table body portion 54S6. A guide pin 54S2 is inserted into each of the guide holes 54S8. The guide pin 54S2 is inserted into a hole 54H3 formed in the side wall of the holding mechanism arrangement hole 54H1. The guide hole 54S8 is a long hole having the thickness direction of the magazine base 542 as its longitudinal direction. Since the guide pin 54S2 is inserted into this long hole, the capillary holding table 54S1 can reciprocate in the thickness direction of the magazine base 542 as a whole. In other words, the capillary holding table 54S1 can move closer to the magazine cover 541 and move away from the magazine cover 541.

[0094] As shown in FIG. 19, the movement of the capillary holding table 54S1 approaching the magazine cover 541 is caused by a holding spring 54S3 disposed between the magazine base 542 and the table plate portion 54S5. The holding spring 54S3 exerts a force that presses the capillary holding table 54S1 toward the magazine cover 541.

[0095] As shown in FIG. 20, the movement of the capillary holding table 54S1 away from the magazine cover 541 is caused by a holding magnet 54S4. The holding magnet 54S4 exerts a force in the direction of separating the capillary holding table 54S1 from the magazine cover 541 by attracting a slot magnet 53M provided in the magazine slot 538 of the replacement module 53.

[0096] Furthermore, a capillary feeding mechanism 54K (see FIG. 14) is attached to the magazine base 542. The capillary feeding mechanism 54K is for actively feeding the replacement capillary 243T from the capillary storage portion 54a toward the capillary supply port 54b.

[0097] More specifically, the capillary feeding mechanism 54K includes a feed shaft 54K1, a feed spring 54K2, and a feed member 54K3. The feed shaft 54K1 is inserted into the feed spring 54K2, and the feed shaft 54K1 is disposed in a feed mechanism arrangement hole 54H2 together with the feed spring 54K2. A feed member 54K3 is disposed on the upper end side of the feed shaft 54K1. The feed member 54K3 transmits the force received from the feed spring 54K2 to the replacement capillary 243T. The feed member 54K3 includes an arm portion 54K4 provided with a through hole into which the feed shaft 54K1 is inserted, and a capillary pressing portion 54K5 that contacts the replacement capillary 243T.

[0098] <Controller> As shown in FIG. 21, the controller 6 controls the operations of the wire bonding unit 2 and the capillary exchange unit 5. The controller 6 is a computer having a processor that executes various programs and a memory that stores programs and a desired database. The controller 6 receives information provided from various sensors provided in the wire bonding apparatus 1. Then, the controller 6 outputs a control signal for controlling the operations of the wire bonding unit 2 and the capillary exchange unit 5 by using the received information.

[0099] The controller 6 exhibits the functions of several functional components shown in FIG. 12 by executing a capillary exchange program. Specifically, the controller 6 includes a bonding control unit 61, a clamper control unit 62, a release control unit 63, a conveyance control unit 64, and a replacement control unit 65. The bonding control unit 61 outputs a control signal G61a to the Z-axis drive unit 25 and a control signal G61b to the XY stage 22 for the tool. The clamper control unit 62 outputs a control signal G62a to the lower wire clamper 27 and a control signal G62b to the upper wire clamper 28. The release control unit 63 outputs a control signal G63 to the release drive unit 513 of the capillary exchange unit 5. The conveyance control unit 64 outputs a control signal G64 to the conveyance drive unit 523 of the capillary exchange unit 5. The replacement control unit 65 outputs a control signal G65 to the replacement drive unit 532 of the capillary exchange unit 5.

[0100] The controller 6 functionally includes a camera control unit 66 and a detection sensor control unit 67. The camera control unit 66 processes the planar image and the elevation image acquired by the camera 41. As a result, the positions of each part in the XYZ directions are detected.

[0101] The detection sensor control unit 67 receives detection data from a plurality of detection sensors 50S provided in the capillary exchange unit 5. For example, the detection sensor 50S confirms the presence of the used capillary 243E and the replacement capillary 243T that are sequentially conveyed inside the capillary exchange unit 5 at predetermined positions. After it is confirmed that the used capillary 243E and the replacement capillary 243T are present at the predetermined positions, the controller 6 proceeds to the next operation.

[0102] <Function and Effect> The supply module 54 includes a magazine base 542 including a base placement surface 542b on which a plurality of replacement capillaries 243T are placed and a base extraction surface 542d with which the replacement capillary 243T to be extracted among the plurality of replacement capillaries 243T comes into contact, and a magazine cover 541 attached to the magazine base 542 and including a cover covering surface 541a facing the base placement surface 542b and a cover extraction surface 541b facing the base extraction surface 542d. The magazine base 542 and the magazine cover 541 constitute a capillary accommodation portion 54a which is a region formed between the base placement surface 542b and the cover covering surface 541a, and a capillary supply port 54b which is a region formed between the base extraction surface 542d and the cover extraction surface 541b. The capillary supply port 54b includes a first supply port portion 54b1 and a second supply port portion 54b2 arranged along the direction from the base end to the tip of the replacement capillary 243T. The opening width G54a of the first supply port portion 54b1 is smaller than the diameter D243 of the replacement capillary 243T, and the opening width G54b of the second supply port portion 54b2 is larger than the diameter D243 of the replacement capillary 243T.

[0103] According to this supply module 54, the replacement capillary 243T can be supplied from the capillary housing portion 54a that houses a plurality of replacement capillaries 243T through the capillary supply port 54b. That is, by replacing the supply module 54, it becomes possible to supply a plurality of replacement capillaries 243T. Therefore, compared with the mode of replacing the replacement capillaries 243T one by one, the time required for the operation of replacing the replacement capillaries 243T can be shortened.

[0104] On the base extraction surface 542d that constitutes the first supply port portion 54b1, a protrusion 54T that protrudes toward the cover extraction surface 541b is provided. According to this configuration, the replacement capillary 243T can be taken out from the capillary supply port 54b in response to an external operation.

[0105] The length of the first supply port portion 54b1 along the axis of the replacement capillary 243T is longer than the length of the second supply port portion 54b2. According to this configuration, the posture of the replacement capillary 243T held at the capillary supply port 54b can be stably maintained.

[0106] The base placement surface 542b and the base extraction surface 542d do not exist on the same virtual plane. The angle from the base placement surface 542b to the base extraction surface 542d is greater than 180 degrees. According to this configuration, an arrangement with the base placement surface 542b as an inclined surface is possible. As a result, the replacement capillary 243T can smoothly move from the capillary housing portion 54a to the capillary supply port 54b by rolling on the base placement surface 542b that is an inclined surface.

[0107] The supply module 54 has a plurality of holding grooves 54S7 in which each of the plurality of replacement capillaries 243T is arranged. The capillary holding table 54S1 disposed on the magazine base 542, a holding spring 54S3 that generates a holding force for pressing the capillary holding table 54S1 toward the magazine cover 541, and a holding magnet 54S4 that generates a release force for pulling the capillary holding table 54S1 toward the magazine base 542 are further provided. According to this configuration, it is possible to suppress the replacement capillary 243T from falling out of the supply module 54 at an unintended timing.

[0108] The capillary providing mechanism 55 includes a capillary accommodating portion 54a that accommodates a plurality of replacement capillaries 243T arranged side by side in a supply direction orthogonal to the axis of the replacement capillary 243T, a first supply port portion 54b1 having an opening width G54a smaller than the diameter of the replacement capillary 243T, and a second supply port portion 54b2 having an opening width G54b larger than the diameter of the replacement capillary 243T. The capillary supply port 54b includes a supply module 54 that moves the replacement capillary 243T from the capillary accommodating portion 54a to the capillary supply port 54b along the supply direction, and a replacement module 53 that executes an operation of taking out the replacement capillary 243T by moving the replacement capillary 243T located at the capillary supply port 54b along the axis from the first supply port portion 54b1 to the second supply port portion 54b2.

[0109] This capillary providing mechanism 55 includes the above-described supply module 54. Therefore, by replacing the supply module 54 attached to the replacement module 53, it becomes possible to supply a plurality of replacement capillaries 243T to the replacement module 53. Therefore, compared with the mode of replacing the replacement capillaries 243T one by one, the time required for the operation of replacing the replacement capillaries 243T can be shortened.

[0110] The supply module 54 includes a magazine base 542, a magazine cover 541, a capillary holding table 54S1 having a plurality of holding grooves 54S7 in which each of the plurality of replacement capillaries 243T is disposed, a holding spring 54S3 that generates a holding force for pressing the capillary holding table 54S1 toward the magazine cover 541, and a holding magnet 54S4 that generates a releasing force for pulling the capillary holding table 54S1 toward the magazine base 542. When the supply module 54 is not disposed in the replacement module 53, the plurality of replacement capillaries 243T are in a state of being constrained by the capillary holding table 54S1 and the holding spring 54S3 so as not to move from the capillary housing portion 54a toward the capillary supply port 54b. When the supply module 54 is disposed in the replacement module 53, the constraint by the capillary holding table 54S1 and the holding spring 54S3 on the plurality of replacement capillaries 243T is released by the holding magnet 54S4 so that the plurality of replacement capillaries 243T can move from the capillary housing portion 54a toward the capillary supply port 54b.

[0111] According to this configuration, when the supply module 54 is not attached to the replacement module 53, it is possible to prevent the replacement capillary 243T from falling out of the supply module 54. Further, when the supply module 54 is attached to the replacement module 53, the replacement capillary 243T can be taken out from the supply module 54. That is, simply by attaching the supply module 54 to the replacement module 53, it is possible to switch from a state of suppressing the fall of the replacement capillary 243T to a state in which the replacement capillary 243T can be supplied.

[0112] The wire bonding apparatus 1 includes a used capillary 243 that is attached to the ultrasonic horn 242 and into which the bonding wire 12 is inserted, and a capillary replacement unit 5 that replaces the used capillary 243 with a replacement capillary 243T. The capillary replacement unit 5 conveys the used capillary 243E pulled out from the ultrasonic horn 242 along a predetermined linear direction from the replacement position to the replacement position, and conveys a replacement capillary 243T for attachment to the ultrasonic horn 242 in a direction opposite to the predetermined linear direction from the replacement position to the replacement position by a feed screw mechanism. It has a conveyance module 52, a capillary storage section 54a that stores a plurality of replacement capillaries 243T arranged side by side in a supply direction orthogonal to the axis of the replacement capillary 243T, and a capillary supply port 54b that includes a first supply port 54b1 with an opening width G54a smaller than the diameter of the replacement capillary 243T and a second supply port 54b2 with an opening width G54b larger than the diameter of the replacement capillary 243T. It has a supply module 54 that moves the replacement capillary 243T from the capillary storage section 54a to the capillary supply port 54b along the supply direction, and a replacement module 53 that executes an operation of taking out the replacement capillary 243T by moving the replacement capillary 243T located at the capillary supply port 54b along the axis from the first supply port 54b1 to the second supply port 54b2.

[0113] This wire bonding apparatus 1 includes the above-described supply module 54. Therefore, by replacing the supply module 54 attached to the replacement module 53, it becomes possible to supply a plurality of new replacement capillaries 243T to the replacement module 53. Therefore, compared with the mode of replacing the replacement capillary 243T one by one, the time required for the operation of replacing the replacement capillary 243T can be shortened.

[0114] <Modification example> As described above, the method for replacing the capillary according to the present invention and the example of the wire bonding apparatus have been explained. However, the method for replacing the capillary and the wire bonding apparatus are not limited to the above-described embodiments.

Explanation of Reference Numerals

[0115] 1... Wire bonding apparatus, 41... Camera, 52... Conveying module (capillary conveying module), 52E... Replacement position, 54... Supply module (capillary supply module), 243... Capillary, 243E... Used capillary, 243h... Capillary through-hole, 243T... Replacement capillary, A... Axis.

Claims

1. A base including a base placement surface on which a plurality of capillaries are placed, and a base extraction surface in contact with the capillary to be extracted among the plurality of capillaries; A cover attached to the base and including a cover covering surface facing the base placement surface and a cover extraction surface facing the base extraction surface; The base and the cover are configured such that: A capillary accommodation part which is a region formed between the base placement surface and the cover covering surface; A capillary supply port which is a region formed between the base extraction surface and the cover extraction surface; The capillary supply port includes a first supply port part and a second supply port part arranged along the direction from the base end to the tip of the capillary; The opening width of the first supply port part is smaller than the diameter of the capillary; The opening width of the second supply port part is larger than the diameter of the capillary. A capillary supply module.

2. The capillary supply module according to claim 1, wherein at least one of the base extraction surface and the cover extraction surface constituting the first supply port part is provided with a protrusion protruding toward the other of the base extraction surface and the cover extraction surface.

3. The capillary supply module according to claim 1, wherein the length of the first supply port part along the axis of the capillary is longer than the length of the second supply port part.

4. The base placement surface and the base extraction surface do not exist on a common virtual plane; The angle from the base placement surface to the base extraction surface is greater than 180 degrees. The capillary supply module according to claim 1.

5. A capillary holding member arranged on the base and having a plurality of holding grooves in which each of the plurality of capillaries is arranged; A holding force generating member that generates a holding force for pressing the capillary holding member toward the cover; The capillary supply module according to claim 1, further comprising a release force generating member that generates a release force for pulling the capillary holding member toward the base.

6. A capillary housing part that houses a plurality of capillaries arranged in a supply direction orthogonal to the axis of the capillary, and a capillary supply port including a first supply port having an opening width smaller than the diameter of the capillary and a second supply port having an opening width larger than the diameter of the capillary, and a capillary supply module that moves the capillary from the capillary housing part to the capillary supply port along the supply direction. A capillary replacement module that executes an operation of taking out the capillary by moving the capillary located at the capillary supply port along the axis from the first supply port to the second supply port. The capillary providing mechanism is provided.

7. The capillary supply module includes a base, a cover, a capillary holding member having a plurality of holding grooves in which each of the plurality of capillaries is arranged, a holding force generating member that generates a holding force for pressing the capillary holding member toward the cover, and a releasing force generating member that generates a releasing force for pulling the capillary holding member toward the base. When the capillary supply module is not arranged in the capillary replacement module, the plurality of capillaries are in a state of being constrained by the capillary holding member and the holding force generating portion so as not to move from the capillary housing part toward the capillary supply port. When the capillary supply module is arranged in the capillary replacement module, the constraint by the capillary holding member and the holding force generating portion is released by the releasing force generating portion so that the plurality of capillaries can move from the capillary housing part toward the capillary supply port. The capillary providing mechanism according to claim 6.

8. A used capillary attached to a horn and into which a wire is inserted, and an exchange unit that exchanges the used capillary for a replacement capillary. The exchange unit includes a capillary transport module that transports the used capillary pulled out from the horn along a predetermined linear direction from an exchange position to a replacement position, and at the same time transports the replacement capillary for attaching to the horn instead of the used capillary from the replacement position to the exchange position in a direction opposite to the predetermined linear direction by a feed mechanism. A capillary housing portion that houses a plurality of the replacement capillaries arranged in a supply direction orthogonal to the axis of the replacement capillary; and a capillary supply port including a first supply port portion having an opening width smaller than the diameter of the replacement capillary and a second supply port portion having an opening width larger than the diameter of the replacement capillary, and a capillary supply module that moves the replacement capillary from the capillary housing portion to the capillary supply port along the supply direction. A wire bonding apparatus having a capillary replacement module that executes an operation of taking out the replacement capillary by moving the replacement capillary located at the capillary supply port along the axis from the first supply port portion to the second supply port portion.

Images