Semiconductor wafer, semiconductor device, and gas concentration measuring device

Abstract

To provide a semiconductor wafer, a semiconductor device, and a gas concentration measuring device which can be smaller than those provided by existing techniques by reducing warpage.SOLUTION: The semiconductor wafer includes: a wafer substrate; a semiconductor laminate unit formed on a first surface of the wafer substrate, the semiconductor laminate unit being capable of receiving or emitting infrared rays of 2-10 μm; and an optical filter formed on a second surface of the wafer substrate, the second surface facing the first surface of the wafer substrate. The thickness of the wafer substrate Twaf[μm] and the thickness of the optical filter Topt[μm] satisfy the relations of Topt≥4 and Topt≤0.000053×Twaf2.0488.SELECTED DRAWING: Figure 8

Description

[Technical field]

[0001] The present invention relates to a semiconductor wafer, a semiconductor device, and a gas concentration measuring apparatus. [Background technology]

[0002] In recent years, further miniaturization is being demanded for various electronic devices. Accordingly, miniaturization is also being demanded for semiconductor devices mounted on electronic devices. Here, semiconductor devices include, for example, infrared receiving devices that receive infrared rays and infrared emitting devices that emit infrared rays. Furthermore, miniaturization of semiconductor devices includes, for example, reducing the mounting area and reducing the thickness direction (reducing the height).

[0003] For example, the technology of Prior Art Document 1 discloses an infrared receiving device that is smaller in size than when the lens and the infrared receiving element are placed on one side of the substrate by placing the lens and the infrared receiving element on the other side of the substrate. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2016-090377 A Summary of the Invention [Problem to be solved by the invention]

[0005] Here, in an infrared receiving device or an infrared emitting device, an optical filter (hereinafter, simply referred to as a "filter") is used to receive or emit light in a specific wavelength band. Filters generally have a multi-layer structure and may warp, and the smaller the size of each element, the more obvious the effect of the warp. The occurrence of warp is particularly noticeable when the element is in a wafer state. Furthermore, since infrared filters have a thicker film thickness than visible light filters, they are subject to greater stress and are more affected by warp. For example, even if an infrared filter is placed instead of a lens in the technology of Patent Document 1, the part of the substrate having a hole is strongly affected by the warp of the filter, and the stress reaches the infrared receiving element. Thus, it has been difficult to miniaturize semiconductor wafers and semiconductor devices equipped with infrared light filters.

[0006] An object of the present invention is to provide a semiconductor wafer and a semiconductor device that can be miniaturized while suppressing warpage. [Means for solving the problem]

[0007] In one embodiment of the present invention, the semiconductor wafer comprises: A wafer substrate; A semiconductor laminate formed on a first surface of the wafer substrate and capable of receiving or emitting infrared radiation of 2 to 10 μm; an optical filter formed on a second surface of the wafer substrate opposite the first surface of the wafer substrate; The thickness Twaf [μm] of the wafer substrate and the thickness Topt [μm] of the optical filter are Topt≧4 and Topt≦0.000053×Twaf 2.0488 Satisfy the relationship.

[0008] In another embodiment of the present invention, the semiconductor wafer comprises: A wafer substrate; a semiconductor laminate portion formed on a first surface of the wafer substrate and capable of receiving or emitting infrared light; an optical filter formed on a second surface of the wafer substrate opposite the first surface; The optical filter has an intermediate layer made of Si with a thickness of 50 μm or more and 300 μm or less between the optical filter and the wafer substrate, and the thickness of the optical filter is 10% or less of the thickness of the wafer substrate.

[0009] In one embodiment of the present invention, the semiconductor device comprises: A substrate; a semiconductor laminate portion formed on a first surface of the substrate and capable of receiving or emitting infrared radiation of 2 to 10 μm; an optical filter formed on a second surface of the substrate opposite the first surface of the substrate; a sealing portion that seals the substrate, the semiconductor laminate, and the optical filter so as to expose at least a portion of the optical filter; The thickness Tsub [μm] of the substrate and the thickness Topt [μm] of the optical filter are Topt≧4 and Topt≦0.000053×Tsub 2.0488の Fulfilling relationships.

[0010] In another embodiment of the present invention, the semiconductor device comprises: A substrate with a thickness of Tsub [μm], a semiconductor laminate portion formed on a first surface of the substrate and capable of receiving or emitting infrared light; an optical filter having a thickness of Topt [μm] formed on a second surface of the substrate opposite to the first surface; The optical filter has an intermediate layer made of Si and having a thickness of 50 μm or more and 300 μm or less between the substrate and the optical filter, and the thickness of the optical filter is 10% or less of the thickness of the substrate.

[0011] In one embodiment of the present invention, a gas concentration measurement device includes: a light emitting unit that outputs infrared rays that are absorbed by the gas to be detected; a gas cell for introducing the detection gas; a light receiving unit that receives infrared light output from the light emitting unit and that has passed through the gas cell, and outputs a signal corresponding to the amount of infrared light received, At least one of the light emitting section and the light receiving section is the semiconductor device described above. Effect of the Invention

[0012] According to the present invention, by reducing warpage, it is possible to provide a semiconductor wafer, a semiconductor device, and a gas concentration measuring apparatus that can be made even smaller than those of the conventional techniques. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is an external perspective view showing a schematic configuration of a semiconductor device according to one embodiment of the present invention. [Diagram 2] FIG. 2 is a cross-sectional view of the semiconductor device of FIG. 1 taken along line AA. [Diagram 3] FIG. 3 is a cross-sectional view of the light emitting / receiving element. [Figure 4] FIG. 4 is a cross-sectional view of an optical filter. [Diagram 5] FIG. 5 is a diagram showing an example of the configuration of a gas concentration measuring apparatus including a semiconductor device according to an embodiment of the present invention. [Figure 6] FIG. 6 is a cross-sectional view of a semiconductor device according to another embodiment of the present invention. [Figure 7] FIG. 7 is a cross-sectional view of a conventional semiconductor device. [Figure 8] FIG. 8 is a diagram showing an example of a method for manufacturing a semiconductor device according to an embodiment of the present invention. [Figure 9] FIG. 9 is a diagram illustrating an example of a method for manufacturing a semiconductor device according to another embodiment of the present invention. [Figure 10] FIG. 10 is a diagram showing the structure of the optical filter according to the first embodiment. [Figure 11] FIG. 11 is a diagram showing the spectral sensitivity of the first embodiment. [Figure 12] FIG. 12 is a diagram showing the structure of the optical filter according to the second embodiment. [Figure 13] FIG. 13 is a diagram showing the luminescence intensity in Example 2. [Figure 14] FIG. 14 is a diagram showing the structure of the optical filter according to the third embodiment. [Figure 15] FIG. 15 is a diagram showing the spectral sensitivity of the third embodiment. [Figure 16] FIG. 16 is a diagram showing the structure of the optical filter according to the fourth embodiment. [Figure 17] FIG. 17 is a diagram showing the spectral sensitivity of Example 4. [Figure 18] FIG. 18 is a diagram showing the relationship between the thickness Twaf of the GaAs substrate and the wafer warpage. [Figure 19] FIG. 19 is a diagram showing the allowable thickness Topt of an optical filter in an integrated configuration with respect to the thickness Twaf or Tsub of a GaAs substrate. [Figure 20] FIG. 20 is a diagram showing the structure of the optical filter of Comparative Example 8. As shown in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, an embodiment of the present invention will be described.

[0015] <Semiconductor wafer> <Semiconductor Wafer of First Embodiment> A semiconductor wafer according to a first embodiment of the present invention includes a wafer substrate, a semiconductor laminate formed on a first surface of the wafer substrate and capable of receiving or emitting infrared radiation of 2 to 10 μm, and an optical filter formed on a second surface of the wafer substrate opposite to the first surface of the wafer substrate. 2.0488 Satisfy the relationship.

[0016] In the semiconductor wafer of the first embodiment, the thickness Twaf [μm] of the wafer substrate and the thickness Topt [μm] of the optical filter are Topt≧4 and Topt≦0.000053×Twaf 2.0488 By satisfying the above relationship, the effect of sufficiently reducing the warpage of the semiconductor wafer is achieved.

[0017] From the viewpoint of sufficiently reducing warpage of the semiconductor wafer, the thickness Twaf of the wafer substrate in the semiconductor wafer of the first embodiment is preferably 240 μm to 600 μm.

[0018] From the viewpoint of sufficiently reducing warpage of the semiconductor wafer, the thickness Topt of the optical filter in the semiconductor wafer of the first embodiment is preferably 4 μm to 26 μm.

[0019] <Semiconductor Wafer of Second Embodiment> A semiconductor wafer according to a second embodiment of the present invention includes a wafer substrate, a semiconductor laminate formed on a first surface of the wafer substrate and capable of receiving or emitting infrared radiation, and an optical filter formed on a second surface of the wafer substrate opposite the first surface. The optical filter has an intermediate layer made of Si and having a thickness of 50 μm or more and 300 μm or less between the wafer substrate and the optical filter, and the thickness of the optical filter is 10% or less of the thickness of the wafer substrate.

[0020] In the semiconductor wafer of the second embodiment, the optical filter has an intermediate layer made of Si with a thickness of 50 μm or more and 300 μm or less between the optical filter and the wafer substrate, and the thickness of the optical filter is 10% or less of the thickness of the wafer substrate, thereby achieving the effect of sufficiently reducing warping of the semiconductor wafer.

[0021] From the viewpoint of sufficiently reducing warpage of the semiconductor wafer, the thickness Topt of the optical filter in the semiconductor wafer of the second embodiment is preferably 1.5 μm to 60 μm.

[0022] From the viewpoint of suppressing chipping during dicing, the semiconductor wafers of the first and second embodiments preferably have a warpage of 300 μm or less, the warpage being defined as the difference in height between the center of the wafer and the outermost periphery of the wafer.

[0023] The intermediate layer in the semiconductor wafer of the second embodiment has a thickness of 50 μm or more and 300 μm or less, preferably 75 μm or more and 250 μm or less, and more preferably 100 μm or more and 200 μm or less. There are no particular limitations on the material as long as it is made of Si. One example is a Si substrate with mirror polished on both sides.

[0024] <Semiconductor devices> <Semiconductor Device of First Embodiment> A semiconductor device according to a first embodiment of the present invention includes a substrate, a semiconductor laminate formed on a first surface of the substrate and capable of receiving or emitting infrared radiation of 2 to 10 μm, an optical filter formed on a second surface of the substrate opposite to the first surface of the substrate, and a sealing portion that seals the substrate, the semiconductor laminate, and the optical filter so as to expose at least a part of the optical filter. 2.0488の Fulfilling relationships.

[0025] In the semiconductor device of the first embodiment, the thickness Tsub [μm] of the substrate and the thickness Topt [μm] of the optical filter are Topt≧4 and Topt≦0.000053×Tsub 2.0488 By satisfying the relationship above, it is possible to realize a light receiving and emitting component with excellent wavelength selectivity, while also achieving the effects of sufficiently reducing internal stress in the semiconductor device and suppressing fluctuations in diode characteristics due to changes in the external environment, such as temperature and humidity, and suppressing failures due to peeling of the optical thin film.

[0026] <Semiconductor Device of Second Embodiment> A semiconductor device of a second embodiment of the present invention comprises a substrate, a semiconductor laminate formed on a first surface of the substrate and capable of receiving or emitting infrared radiation, and an optical filter formed on a second surface of the substrate opposite the first surface, wherein the optical filter has an intermediate layer made of Si and having a thickness of 50 μm or more and 300 μm or less between the substrate and the optical filter, and the thickness of the optical filter is 10% or less of the thickness of the substrate.

[0027] The semiconductor device of the second embodiment has an intermediate layer made of Si with a thickness of 50 μm or more and 300 μm or less between the substrate and the optical filter, and the film thickness of the optical filter is 10% or less of the thickness of the substrate, thereby sufficiently reducing the internal stress of the semiconductor device and suppressing fluctuations in diode characteristics due to changes in the external environment such as temperature and humidity, and failures due to peeling of the optical thin film.

[0028] <Gas concentration measuring device> A gas concentration measurement device according to a first embodiment of the present invention includes a light-emitting unit that outputs infrared light absorbed by a detection target gas, a gas cell into which the detection target gas is introduced, and a light-receiving unit that receives the infrared light output from the light-emitting unit and passed through the gas cell, and outputs a signal corresponding to the amount of the received infrared light. At least one of the light-emitting unit and the light-receiving unit is the semiconductor device according to the first or second embodiment.

[0029] The gas concentration measurement device of the first embodiment has an effect of achieving both a compact module size and high detection performance as a gas sensor, since at least one of the light-emitting unit and the light-receiving unit is the semiconductor device of the first or second embodiment.

[0030] Hereinafter, each constituent element of the semiconductor wafer of the above-mentioned first and second embodiments (hereinafter referred to as "semiconductor wafer of this embodiment") and the semiconductor device of the first and second embodiments (hereinafter referred to as "semiconductor device of this embodiment") will be described.

[0031] <<Wafer substrate>> The wafer substrate in the semiconductor wafer of this embodiment is not particularly limited as long as it has a semiconductor laminate portion capable of receiving or emitting infrared light on its first surface. From the viewpoint of high productivity of semiconductor devices, the wafer substrate is preferably 2 inches or more and 8 inches or less. Examples of materials for the wafer substrate include a silicon substrate and a gallium arsenide substrate.

[0032] <<Substrate>> The substrate in the semiconductor device of this embodiment is not particularly limited as long as it has a semiconductor laminate portion capable of receiving or emitting infrared light on its first surface. Examples of the material of the substrate include a silicon substrate and a gallium arsenide substrate. From the viewpoint of achieving both a miniaturized module size and a high detection performance as a gas sensor, in the first embodiment, the thickness of the substrate is preferably 240 μm or more and 600 μm or less.

[0033] <<Semiconductor laminate>> The semiconductor laminate portion in the semiconductor wafer of this embodiment and the semiconductor device of this embodiment is not particularly limited as long as it is capable of receiving or emitting infrared rays.

[0034] The semiconductor laminate preferably has an active layer. From the viewpoint of realizing a sensor having selective spectral characteristics for a desired wavelength in the mid-infrared range, the active layer is preferably made of Al. x In 1-x Sb(0≦x≦0.20) or InAs y Sb 1-y (0.10≦y≦0.20) or InAs y Sb 1-y It is preferable that (0.75≦y≦1).

[0035] <<Optical filters>> From the viewpoint of simplifying the design of the interference filter and reducing wafer warpage, the optical filter in the semiconductor wafer of this embodiment and the semiconductor device of this embodiment preferably has a first layer having a refractive index of 1.2 or more and 2.5 or less for infrared rays with a wavelength of 2.4 μm or more and 6 μm or less, and a second layer having a refractive index of 2 or more and 4.2 or less for infrared rays with a wavelength of 2.4 μm or more and 6 μm or less, and more preferably is formed by stacking the first layer and the second layer alternately 2 or more and 25 or less times.

[0036] From the viewpoint of having little absorption in the mid-infrared region and efficiently transmitting infrared rays of a desired wavelength, the optical filter in the semiconductor wafer and the semiconductor device of this embodiment is made of SiO, SiO 2 , TiO 2and ZnS.

[0037] From the viewpoint of having little absorption in the mid-infrared range and efficiently transmitting infrared rays of a desired wavelength, the optical filter in the semiconductor wafer of this embodiment and the semiconductor device of this embodiment preferably contains at least one of Si and Ge. From the viewpoint of mass productivity, it may be preferable that the size of the wafer substrate or substrate and the size of the optical filter are approximately equal in plan view. Approximately equal means within a range that does not deviate from the purpose, and specifically may mean that the difference in relative area ratio is 10% or less.

[0038] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this specification and the drawings, components having substantially the same functional configurations are denoted by the same reference numerals, and duplicated explanations will be omitted.

[0039] (Semiconductor Devices) 1 is an external perspective view showing a schematic configuration of a semiconductor device 1 according to an embodiment of the present invention. As shown in FIG 1, the semiconductor device 1 includes an optical filter 10 that can be seen from the outside, a sealing portion 20, and an electrode 30.

[0040] Fig. 2 is a cross-sectional view taken along line AA of the semiconductor device 1 in Fig. 1. As shown in Fig. 2, the semiconductor device 1 includes a light emitting / receiving element 40 covered by a sealing portion 20 and an optical filter 10. As shown in Fig. 1 and Fig. 2, the semiconductor device 1 includes the optical filter 10, the sealing portion 20, an electrode 30, and the light emitting / receiving element 40.

[0041] (Light emitting / receiving element) The light emitting / receiving element 40 includes a substrate 41 and a semiconductor laminate portion 42. The light emitting / receiving element 40 is a light receiving element that receives infrared rays, or a light emitting element that emits infrared rays.

[0042] (substrate) 2, the substrate 41 of the light emitting / receiving element 40 includes a first surface 411 which is a main surface on the semiconductor laminate portion 42 side, and a second surface 412 which is a main surface on the optical filter 10 side opposite to the first surface 411. The substrate 41 is, for example, a GaAs substrate (see FIG. 3), but is not limited thereto. The substrate 41 may be, for example, another substrate such as a Si substrate.

[0043] (Semiconductor laminate) 3 is a cross-sectional view of the light emitting / receiving element 40. The semiconductor laminate 42 of the light emitting / receiving element 40 includes an active layer 424 of a compound semiconductor, and emits infrared rays toward the substrate 41 side or receives infrared rays from the substrate 41 side. The active layer 424 is a light absorption layer when the light emitting / receiving element 40 is a light receiving element, and is a light emitting layer when the light emitting / receiving element 40 is a light emitting element. The semiconductor laminate 42 is formed on the first surface 411 of the substrate 41.

[0044] Here, the term "on" in the expression "the semiconductor laminate 42 is formed on the first surface 411 of the substrate 41" includes the case where the semiconductor laminate 42 is formed in contact with the first surface 411 of the substrate 41, as well as the case where another layer is present between the first surface 411 of the substrate 41 and the semiconductor laminate 42. The meaning is the same when the term "on" is used to express the relationship between other layers. For example, in the layer structure of the semiconductor laminate 42 in FIG. 3 described later, the second n-type compound semiconductor layer 422, the n-type barrier layer 423, the active layer 424, the p-type barrier layer 425, and the p-type compound semiconductor layer 426 are all formed on the first n-type compound semiconductor layer 421.

[0045] The semiconductor laminate 42 includes a first n-type compound semiconductor layer 421, a second n-type compound semiconductor layer 422, an n-type barrier layer 423, an active layer 424, a p-type barrier layer 425, and a p-type compound semiconductor layer 426. The first n-type compound semiconductor layer 421 functions as a buffer layer for lattice relaxation and transmits infrared rays in a desired mid-infrared range. The first n-type compound semiconductor layer 421 includes, for example, InSb doped to n-type. The second n-type compound semiconductor layer 422 functions as an n-layer of a PIN diode and transmits infrared rays in a desired mid-infrared range. The second n-type compound semiconductor layer 422 includes, for example, AlInSb doped to n-type. The n-type barrier layer 423, together with the p-type barrier layer 425, has a carrier confinement function in the light-emitting element and a function of preventing leakage due to thermally excited carriers. The n-type barrier layer 423 includes, for example, Al doped to n-type. y In 1-y The active layer 424 functions as a photoelectric conversion layer in a light receiving element and as a light emitting layer in a light emitting element. The active layer 424 is p-type or non-doped Al x In 1-x The p-type barrier layer 425, together with the n-type barrier layer 423, has a function of confining carriers in the light emitting device and a function of preventing leakage due to thermally excited carriers. The p-type barrier layer 425 is, for example, p-type doped Al z In 1-z Sb (0.15≦z≦0.40). The p-type compound semiconductor layer 426 functions as a p-layer of a PIN diode. The p-type compound semiconductor layer 426 includes, for example, AlInSb doped to be p-type.

[0046] Here, the composition of each layer is an example. For example, the active layer 424 is made of a compound semiconductor, Al x In 1-x Sb(0≦x≦0.20) or InAs y Sb 1-y (0.10≦y≦0.20) or InAs y Sb 1-y(0.75≦y≦1). For example, the second n-type compound semiconductor layer 422 may include n-type doped AlInSb or InSb. For example, the p-type compound semiconductor layer 426 may include p-type doped AlInSb or InSb.

[0047] Here, the word "contains" in the expression "the first n-type compound semiconductor layer 421 contains InSb" means that the first n-type compound semiconductor layer 421 mainly contains InSb, but this expression also includes cases where other elements are contained. Specifically, this expression also includes cases where the composition of this layer is slightly changed by adding small amounts of other elements (for example, elements such as As, Al, Ga, Si, Sn, Zn, and N at a few percent or less). The word "contains" used when describing the composition of other layers has a similar meaning.

[0048] (Optical Filter) 4 is a cross-sectional view of optical filter 10. Optical filter 10 includes a first layer 101 having a refractive index of 1.2 or more and 2.5 or less for infrared rays in the wavelength range of 2.4 μm or more and 6 μm or less, and a second layer 102 having a refractive index of 2 or more and 4.2 or less for infrared rays in the wavelength range of 2.4 μm or more and 6 μm or less. Optical filter 10 is formed on second surface 412 of substrate 41.

[0049] Here, the optical filter 10 is preferably formed by alternately laminating the first layer 101 and the second layer 102 in a range of 2 to 25 times. By laminating in a range of 2 to 25 times, it is possible to realize a light receiving and emitting component that can be easily assembled with low stress. In order to realize a selective and highly accurate gas detection function, the multilayer film needs to be laminated to a certain thickness or more, and it is preferable to satisfy the relationship Topt≧4. In addition, from the viewpoint of reducing the height and reducing costs, the thickness Topt [μm] of the optical filter is set to a value that satisfies the following relationship: Topt≦0.000053×Tsub [μm] with respect to the thickness Tsub [μm] of the substrate. 2.0488The relationship is satisfied. Alternatively, it is preferably 26 μm or less. Alternatively, when an intermediate layer made of Si and having a film thickness of 50 μm or more and 300 μm or less is provided between the substrate and the optical filter, it is preferably 10% or less of the thickness of the substrate, or 60 μm or less.

[0050] If the above thickness range is satisfied, SiO, SiO 2 , TiO 2 When an optical thin film, for example ZnS, is used as the material for the optical filter, warping of the substrate due to stress can be particularly suppressed.

[0051] The first layer 101 is, for example, SiO, SiO 2 , TiO 2 and ZnS. The second layer 102 contains at least one of Si and Ge.

[0052] Furthermore, the optical filter 10 may change the characteristics of the first layer 101 and the second layer 102 in accordance with the wavelength range of the infrared light received or emitted by the light receiving / emitting element 40. For example, when the wavelength range of the infrared light received or emitted by the light receiving / emitting element 40 is 2.4 μm or more and 10 μm or less, the optical filter 10 may include the first layer 101 having a refractive index of 1.2 or more and 2.5 or less for infrared light with a wavelength of 2.4 μm or more and 6 μm or less, and the second layer 102 having a refractive index of 2 or more and 4.2 or less.

[0053] (Sealing part) 1 and 2, the semiconductor device 1 includes a sealing portion 20 that seals the substrate 41, the semiconductor laminate 42, and the optical filter 10 so as to expose a portion of the optical filter 10. The sealing portion 20 may be a resin such as a mold resin or a potting resin. As shown in Fig. 2, the side surfaces (surfaces parallel to the z-axis) of the substrate 41, the semiconductor laminate 42, and the optical filter 10 are covered by the sealing portion 20, which has the effect of providing excellent resistance to vibration.

[0054] (electrode) The electrodes 30 are conductors for supplying power to or extracting current from the light emitting / receiving element 40. The electrodes 30 may be made of, for example, Cu or an alloy thereof.

[0055] (Gas concentration measuring device) 5 is a diagram showing an example of the configuration of a gas concentration measurement device 100 including a semiconductor device 1. The gas concentration measurement device 100 includes a light emitting unit 2, a light receiving unit 3, a gas cell 4, a gas inlet unit 5, and a gas outlet unit 6.

[0056] In the gas concentration measuring device 100, the infrared rays output from the light emitting unit 2 are absorbed by the detectable gas in the gas cell 4. The light receiving unit 3 receives the infrared rays that have passed through the gas cell 4, i.e., the infrared rays after being absorbed by the detectable gas. The light receiving unit 3 outputs a signal according to the amount of infrared light received. Here, the amount of infrared light absorbed changes according to the concentration of the detectable gas. Therefore, the gas concentration measuring device 100 can measure the concentration of the detectable gas based on the output signal from the light receiving unit 3. The concentration of the detectable gas may be calculated by a calculation unit such as a processor provided in the gas concentration measuring device 100 or provided outside the gas concentration measuring device 100 based on the output signal from the light receiving unit 3. The detectable gas may be, for example, CO 2 , CO, C.H. 4 , H 2 O, C 2 H 5 OH, CH 2 O, C 3 H 8 , N.H. 3 , NO, etc., which are introduced into the gas cell 4 from the gas inlet 5 and exhausted from the gas exhaust 6.

[0057] The semiconductor device 1 can be used as at least one of the light emitting section 2 and the light receiving section 3 of the gas concentration measurement apparatus 100. For example, the semiconductor device 1 may be used as the light emitting section 2 of the gas concentration measurement apparatus 100, with the light receiving / emitting element 40 being a light emitting element. At this time, the semiconductor device 1 is provided in the gas concentration measurement apparatus 100 so that the exposed portion of the optical filter 10 faces the light receiving section 3. Also, for example, the semiconductor device 1 may be used as the light receiving section 3 of the gas concentration measurement apparatus 100, with the light receiving / emitting element 40 being a light receiving element. At this time, the semiconductor device 1 is provided in the gas concentration measurement apparatus 100 so that the exposed portion of the optical filter 10 faces the light emitting section 2. Also, a semiconductor device 1 in which the light receiving / emitting element 40 is a light emitting element and another semiconductor device 1 in which the light receiving / emitting element 40 is a light receiving element may be used as the light emitting section 2 and the light receiving section 3 of the gas concentration measurement apparatus 100, respectively.

[0058] As described above, the semiconductor device 1 includes the substrate 41, the semiconductor laminate 42 formed on the first surface 411 of the substrate 41, which includes an active layer of a compound semiconductor and emits infrared rays toward the substrate 41 or receives infrared rays from the substrate 41, and the optical filter 10 formed on the second surface 412 of the substrate 41, which includes the first layer 101 and the second layer 102. Here, FIG. 7 is a cross-sectional view of a conventional semiconductor device 1001. The semiconductor device 1001 is configured by connecting the sealing portion 22 that supports the optical filter 10 to the sealing portion 21 that seals the light receiving and emitting element 40. The semiconductor device 1001 has a structure in which the optical filter 10, which is an independent component, is mounted on a part of the sealing portion 22 with an adhesive or the like. In the semiconductor device 1001, an air layer is inevitably generated between the substrate 41 and the optical filter 10, but in order to avoid optical interference in the air layer, the optical filter 10 needs to be spaced apart from the substrate 41 by a certain distance or more. However, with the above-described configuration, the semiconductor device 1 has the optical filter 10 provided in contact with the first surface 411 of the substrate 41, and therefore can be made even smaller than the conventional technology.

[0059] (Another embodiment) Fig. 6 is a cross-sectional view of a semiconductor device 1 according to another embodiment of the present invention. Fig. 6 corresponds to Fig. 2 of the above embodiment. Here, the external perspective view of the semiconductor device 1 according to the other embodiment, the configuration of the optical filter 10, and the configuration of the light emitting / receiving element 40 are similar to those of the above embodiment, so their explanation will be omitted.

[0060] The semiconductor device 1 according to another embodiment includes an optical filter 10, an intermediate layer 11, a sealing portion 20, an electrode 30, and a light receiving / emitting element 40. Unlike the above embodiment, the semiconductor device 1 according to another embodiment includes an intermediate layer 11 between the substrate 41 and the optical filter 10. The intermediate layer 11 is, for example, Si. The intermediate layer 11 of Si improves the robustness of the semiconductor device 1 according to the other embodiment, in addition to the effects of the semiconductor device 1 according to the above embodiment, and can increase the stability in the assembly process. Here, if the thickness of the intermediate layer 11 is too thin, the robustness of the semiconductor device 1 is not easily achieved, and the influence of the warping of the intermediate layer 11 on the semiconductor device 1 may become large. In addition, if the thickness of the intermediate layer 11 is too thick, it may hinder miniaturization (low height reduction). From the above viewpoint, the thickness of the intermediate layer 11 is preferably, for example, 50 μm or more and 300 μm or less. It is more preferable that the thickness of the intermediate layer 11 is, for example, 100 μm or more and 250 μm or less. The thickness of the intermediate layer 11 is more preferably, for example, 150 μm or more and 200 μm or less.

[0061] (Example) The present invention will be described in detail below based on examples. However, the present invention is not limited to the following examples and can be modified in various ways without departing from the spirit of the invention.

[0062] [Example 1] The semiconductor wafer and semiconductor device of this embodiment will be described based on a manufacturing example of an IR sensor equipped with an optical filter on the back surface of an infrared light emitting element. First, a PIN diode structure was fabricated by MBE on a GaAs substrate with a diameter of 4 inches. The active layer was Al 0.04 In 0.96 Sb, and the n-type semiconductor layer is Sn at 1.0×1019 atoms / cm 3 By doping, the energy band is degenerated, making it transparent to infrared light with wavelengths longer than 2000 nm. In addition, n-type Al 0.22 In 0.78 Sb and p-type Al 0.22 In 0.78 Sb was provided as a barrier layer. FIG. 3 shows the laminated structure of each layer of the infrared light emitting device according to Example 1. A positive type photoresist for i-line was applied to the surface of the semiconductor wafer thus prepared, and exposure was performed using i-line by a reduced projection exposure machine. Development was then performed, and multiple resist patterns were regularly formed on the surface of the semiconductor laminate. Next, multiple mesas were formed by dry etching. SiO was applied as a hard mask to the element having a mesa shape. 2 After forming the film, the elements were separated by dry etching, then a SiN film was formed as a protective film, and contact holes were formed by photolithography and dry etching. After that, multiple mesas were connected in series by photolithography and sputtering. After that, a polyimide resin was formed as a protective film to cover the surface of the elements.

[0063] The back surface of the compound semiconductor wafer processed in this manner is polished to a thickness of 350 μm, and then an optical filter as shown in FIG. 10 is formed on the back surface of the compound semiconductor wafer using a deposition apparatus, thereby producing the semiconductor wafer according to this embodiment.

[0064] The optical filter was designed by simulation. A known calculation method using Fresnel coefficients was used for the simulation. In addition, literature values ​​were used for the wavelength dispersion data of the complex refractive index of the optical thin film materials (Ge and SiO) in the simulation.

[0065] The semiconductor wafer obtained in Example 1 had a thickness Twaf (350 μm) of the wafer substrate and a thickness Topt (7.8 μm) of the optical filter, which were Topt≧4 and Topt≦0.000053×Twaf 2.0488 Satisfy the relationship.

[0066] The amount of warpage of the above-mentioned semiconductor wafer was estimated using a known bimetal formula, resulting in a result of approximately 275 μm. Here, the amount of warpage of the semiconductor wafer is the amount of warpage of the wafer defined by the height difference between the center of the wafer and the outermost periphery of the wafer. From the viewpoint of suppressing chipping during dicing, it is desirable for the amount of warpage of the wafer to be 300 μm or less, and this is satisfied in this embodiment.

[0067] The filter-integrated sensor wafer produced by the above-mentioned pre-process is diced into individual pieces, Au wires are bonded to the lead frame, and the light-emitting surface is exposed and sealed with an epoxy-based molding resin to produce the semiconductor device according to this embodiment. A semiconductor device that does not include an intermediate layer, as in Example 1, is produced, for example, according to the manufacturing method shown in FIG.

[0068] The spectral sensitivity spectrum of the infrared receiving element thus fabricated was calculated, and the results shown in FIG. 11 were obtained. FIG. 11 shows the spectral sensitivity spectrum of the infrared light emitting element according to Example 1. As shown in this result, by integrating the IR-sensor and the optical filter, which were structurally independent in the past, it is possible to reduce the PKG (package) size to 3.0 mm×3.0 mm×0.52 mm (length×width×thickness, the same applies below) while maintaining the same spectral sensitivity spectrum. The IR-sensor of the conventional example shown in FIG. 7 was 3.0 mm×3.0 mm×1.1 mm, so the thickness has been reduced by about half.

[0069] Furthermore, with this structure, the process of packaging the optical filter, which was necessary for the conventional IR sensor with an optical filter shown in FIG. 7, is not necessary, and therefore it is also superior in terms of ease of processing.

[0070] [Example 2] This paper describes an IR-LED with an intermediate layer of a Si substrate and an optical filter on the back side of the infrared light emitting element. A PIN diode structure was fabricated by MBE on a GaAs substrate with a diameter of 4 inches. The active layer is Al 0.04 In0.96 Sb, and the n-type semiconductor layer is Sn at 1.0×10 19 atoms / cm 3 By doping, the energy band is degenerated, making it transparent to infrared light with wavelengths longer than 2000 nm. 0.22 In 0.78 Sb and p-type Al 0.22 In 0.78 Example 2. Sb was provided as a barrier layer. FIG. 3 shows the laminated structure of each layer of the infrared light emitting device according to Example 2.

[0071] A positive type photoresist for i-line was applied to the surface of the semiconductor wafer thus prepared, and exposure was performed using i-line with a reduced projection exposure machine. Development was then performed, and multiple resist patterns were regularly formed on the surface of the semiconductor laminate. Next, multiple mesas were formed by dry etching. SiO 2 After forming the film, the elements were separated by dry etching, then a SiN film was formed as a protective film, and contact holes were formed by photolithography and dry etching. After that, multiple mesas were connected in series by photolithography and sputtering. After that, a polyimide resin was formed as a protective film to cover the surface of the elements.

[0072] The back surface of the compound semiconductor wafer processed in this manner is polished to a thickness of 200 μm, and the optical filter of FIG. 12 is provided via an intermediate layer of a 150 μm Si substrate to obtain the semiconductor wafer according to this embodiment. The manufacturing method is to form an optical filter on a Si substrate, polish the back surface of the Si substrate to a thickness of 150 μm, and then activate the back surface of the compound semiconductor wafer and the back surface of the filter wafer with plasma to form a covalent bond. The optical filter was designed by simulation. The same method as in Example 1 was adopted for the simulation method.

[0073] In the semiconductor wafer obtained in Example 2, the thickness Topt (6.8 μm) of the optical filter is 3.4% of the thickness Twaf (200 μm) of the wafer substrate, which satisfies the relationship of 10% or less specified in the present invention.

[0074] With the manufacturing method described above, the wafer has high rigidity and is less susceptible to the bimetal effect, so changes in wafer warpage due to filter integration are small, making it possible to perform dicing that suppresses the occurrence of chipping during the assembly process.

[0075] The filter-integrated wafer produced by the above-mentioned method is diced into individual pieces, Au wires are bonded to the lead frame, and the light-emitting surface is exposed and sealed with an epoxy-based molding resin to produce the semiconductor device according to this embodiment. As in Example 2, a semiconductor device including an intermediate layer is produced, for example, according to the production method shown in FIG.

[0076] The emission intensity spectrum of the infrared light-emitting device thus fabricated was calculated, and the results shown in FIG. 13 were obtained. FIG. 13 shows the emission intensity spectrum of the infrared light-emitting device according to Example 2. As this result shows, by integrating the IR-LED and the optical filter, which were structurally independent in the past, it is possible to reduce the package size from 3.0 mm×3.0 mm×1.1 mm to 3.0 mm×3.0 mm×0.52 mm while maintaining an equivalent spectral sensitivity spectrum. Furthermore, with this structure, the process of incorporating the optical filter into the package can be omitted. Furthermore, the CO 2 By designing an IR-LED with emission intensity only in the absorption band, the degree of freedom in the optical path design of the gas sensor module is increased. This is because the conventional configuration in which an optical filter is placed in front of the IR-sensor places restrictions on the relative position of the sensor and the LED, as well as the optical path design, due to the large incidence angle dependency of the optical filter.

[0077] [Example 3] This paper describes an IR sensor equipped with an optical filter on the back side of an infrared light emitting element. First, a PIN diode structure was fabricated by MBE on a GaAs substrate with a diameter of 4 inches. The active layer is Al 0.09 In 0.91 Sb, and the n-type semiconductor layer is Sn at 1.0×10 19 atoms / cm 3 By doping, the energy band is degenerated, making it transparent to infrared light with wavelengths longer than 2000 nm. In addition, n-type Al 0.30 In 0.70 Sb and p-type Al 0.30 In 0.70 Example 3 was implemented by providing a barrier layer made of Sb.

[0078] A positive type photoresist for i-line was applied to the surface of the semiconductor wafer thus prepared, and exposure was performed using i-line with a reduced projection exposure machine. Development was then performed, and multiple resist patterns were regularly formed on the surface of the semiconductor laminate. Next, multiple mesas were formed by dry etching. SiO 2 After forming the film, the elements were separated by dry etching, then a SiN film was formed as a protective film, and contact holes were formed by photolithography and dry etching. After that, multiple mesas were connected in series by photolithography and sputtering. After that, a polyimide resin was formed as a protective film to cover the surface of the elements.

[0079] The back surface of the compound semiconductor wafer processed in this manner is polished to a thickness of 300 μm, and the optical filter shown in FIG. 14 is formed on the back surface of the compound semiconductor wafer using a deposition device, thereby producing the semiconductor wafer according to this embodiment. The optical filter was designed by simulation. The same method as in Example 1 was used for the simulation.

[0080] The semiconductor wafer obtained in Example 3 had a thickness Twaf (300 μm) of the wafer substrate and a thickness Topt (5.7 μm) of the optical filter, which were Topt≧4 and Topt≦0.000053×Twaf 2.0488 Satisfy the relationship.

[0081] The amount of warpage of the above-mentioned semiconductor wafer was estimated using a known bimetal formula, resulting in a result of approximately 275 μm. Here, the amount of warpage of the semiconductor wafer is the amount of warpage of the wafer defined by the height difference between the center of the wafer and the outermost periphery of the wafer. From the viewpoint of suppressing chipping during dicing, it is desirable for the amount of warpage of the wafer to be 300 μm or less, and this is satisfied in this embodiment.

[0082] The filter-integrated sensor wafer produced by the above-mentioned front-end process is diced into individual pieces, Au wires are bonded to the lead frame, and the semiconductor device of this embodiment can be produced by sealing the sensor wafer with an epoxy-based molding resin so that the light-emitting surface is exposed.

[0083] The spectral sensitivity spectrum of the infrared receiving element thus fabricated was calculated, and the results shown in FIG. 15 were obtained. FIG. 15 shows the spectral sensitivity spectrum of the infrared light emitting element according to Example 3. As shown in this result, by integrating the IR sensor and the optical filter, which were structurally independent in the past, it is possible to reduce the package size from 3.0 mm×3.0 mm×1.1 mm to 3.0 mm×3.0 mm×0.52 mm while maintaining the same spectral sensitivity spectrum. Furthermore, with this structure, the process of incorporating the optical filter into the package can be omitted.

[0084] [Example 4] This paper describes an IR sensor equipped with an intermediate layer of a Si substrate and an optical filter on the back side of an infrared light emitting element. First, a PIN diode structure was fabricated by MBE on a GaAs substrate with a diameter of 4 inches. The active layer is In 0.14 As 0.86 Sb, and the n-type semiconductor layer is Sn at 1.0×10 19 atoms / cm 3By doping, the energy band is degenerated, making it transparent to infrared light with wavelengths longer than 2000 nm. In addition, p-type Al is inserted between the active layer and the p-type semiconductor layer. 0.22 In 0.78 A barrier layer was formed of Sb. FIG. 3 shows a laminated structure of each layer of the infrared light emitting device according to the fourth embodiment.

[0085] A positive type photoresist for i-line was applied to the surface of the semiconductor wafer thus prepared, and exposure was performed using i-line with a reduced projection exposure machine. Development was then performed, and multiple resist patterns were regularly formed on the surface of the semiconductor laminate. Next, multiple mesas were formed by dry etching. SiO 2 After forming the film, the elements were separated by dry etching, then a SiN film was formed as a protective film, and contact holes were formed by photolithography and dry etching. After that, multiple mesas were connected in series by photolithography and sputtering. After that, a polyimide resin was formed as a protective film to cover the surface of the elements.

[0086] The back surface of the compound semiconductor wafer processed in this manner is polished to a thickness of 200 μm, and the optical filter of FIG. 16 is provided via an intermediate layer of a 150 μm Si substrate to obtain the semiconductor wafer according to this embodiment. The manufacturing method is to form an optical filter on a Si substrate, polish the back surface of the Si substrate to a thickness of 150 μm, and then activate the back surface of the compound semiconductor wafer and the back surface of the filter wafer with plasma to form a covalent bond. The optical filter was designed by simulation. The simulation method was the same as that of Example 1, except that the literature values ​​of the wavelength dispersion data of the complex refractive index of the materials Ge and ZnS of the optical thin film were used.

[0087] In the semiconductor wafer obtained in Example 4, the thickness Topt (16.0 μm) of the optical filter is 8.0% of the thickness Twaf (200 μm) of the wafer substrate, which satisfies the relationship of 10% or less specified in the present invention.

[0088] With the manufacturing method described above, the wafer has high rigidity and is less susceptible to the bimetal effect, so changes in wafer warpage due to filter integration are small, making it possible to perform dicing that suppresses the occurrence of chipping during the assembly process.

[0089] The filter-integrated sensor wafer produced by the above-mentioned manufacturing method is diced into individual pieces, Au wires are bonded to the lead frame, and the semiconductor device of this embodiment can be produced by sealing the sensor wafer with an epoxy-based molding resin so that the light-emitting surface is exposed.

[0090] The spectral sensitivity spectrum of the infrared receiving element thus fabricated was calculated, and the result shown in Fig. 17 was obtained. Fig. 17 shows the spectral sensitivity spectrum of the infrared emitting element according to Example 4. As shown in this result, by integrating the filter and the sensor, it is possible to realize a sensor that is selectively sensitive to the absorption band of alcohol.

[0091] [Comparative Example 1] A semiconductor wafer and an infrared receiving element were obtained in the same manner as in Example 1, except that no optical filter was formed.

[0092] The spectral sensitivity spectrum of the obtained infrared receiving element was calculated and the results are shown in FIG. 11. Compared with the infrared receiving element obtained in Example 1, it has a wide sensitivity band from 2 to 5.5 μm. 2 It is not suitable for selectively detecting absorption of

[0093] [Comparative Example 2] A semiconductor wafer and an infrared light emitting device were obtained in the same manner as in Example 2, except that the optical filter and the intermediate layer were not formed.

[0094] The emission intensity spectrum of the obtained infrared light-emitting device was calculated, and the results are shown in FIG. 13. Compared with the infrared light-emitting device obtained in Example 2, it has a wide sensitivity band from 3 to 5.5 μm. 2 It is not suitable for selectively detecting absorption of

[0095] [Comparative Example 3] A semiconductor wafer and an infrared receiving element were obtained in the same manner as in Example 3, except that no optical filter was formed.

[0096] The results of calculating the spectral sensitivity spectrum of the obtained infrared receiving element are shown in Figure 15. Compared to the infrared receiving element obtained in Example 3, it has a wide sensitivity band from 2 to 4 μm, so it is not suitable for selectively detecting absorption of CH4.

[0097] [Comparative Example 4] A semiconductor wafer and an infrared receiving element were obtained in the same manner as in Example 4, except that no optical filter was formed.

[0098] The results of calculating the spectral sensitivity spectrum of the obtained infrared receiving element are shown in Figure 17. Compared with the infrared receiving element obtained in Example 4, it has a wide sensitivity band from 2 to 13 µm, so it is not suitable for selectively detecting the absorption of alcohol.

[0099] [Comparative Example 5] The sensor package was the same as that of Comparative Example 1, and a separately manufactured filter package was mounted on the sensor package to obtain an infrared receiving element. The optical filter mounted on the filter package was a bandpass filter designed without considering the wavelength selectivity of the infrared receiving element, and 2 The optical filter block infrared rays in at least a wavelength band of 1 to 9 μm, excluding the absorption wavelength band of the infrared rays. The thickness of the optical filter portion is 20 μm or more. The optical filter wafer is diced into individual pieces, and the filter chips are sealed with an epoxy-based molding resin so that both sides are exposed, thereby producing the semiconductor device according to this embodiment.

[0100] The results of calculating the spectral sensitivity spectrum of the obtained infrared receiving element are shown in FIG. 11. The results were equivalent to those of the infrared receiving element obtained in Example 1. On the other hand, in Comparative Example 5, it is difficult to reduce the size because the structure combines the sensor PKG and the filter PKG. The IR-sensor in Comparative Example 5 is 3.0 mm x 3.0 mm x 1.1 mm, so the device height is about twice that of Example 1.

[0101] [Comparative Example 6] The LED PKG was the same as in Comparative Example 2, and a separately manufactured filter PKG was mounted on the sensor PKG to obtain an infrared light emitting element. The optical filter mounted on the filter PKG is a bandpass filter designed without considering the wavelength selectivity of the infrared light emitting element, and 2 The optical filter block infrared rays in at least a wavelength band of 1 to 9 μm, excluding the absorption wavelength band of the infrared rays. The thickness of the optical filter portion is 20 μm or more. The optical filter wafer is diced into individual pieces, and the filter chips are sealed with an epoxy-based molding resin so that both sides are exposed, thereby producing the semiconductor device according to this embodiment.

[0102] The emission intensity spectrum of the obtained infrared emitting device was calculated and the result is shown in Fig. 13. The same results as those of the infrared receiving device obtained in Example 2 were obtained.

[0103] On the other hand, in Comparative Example 6, it is difficult to reduce the size because the LED PKG and the filter PKG are combined. The IR-LED in Comparative Example 6 is 3.0 mm × 3.0 mm × 1.1 mm, so the device height is about twice as high as that in Example 2.

[0104] [Comparative Example 7] The sensor PKG was the same as that of Comparative Example 3, and a separately manufactured filter PKG was mounted on the sensor PKG to obtain an infrared receiving element. The optical filter mounted on the filter PKG is a bandpass filter designed without considering the wavelength selectivity of the infrared receiving element, and blocks infrared rays in at least a wavelength band of 1 to 9 μm, excluding the absorption wavelength band of CH4. The thickness of the optical filter portion is 20 μm or more. The optical filter wafer is diced into individual pieces, and the filter chips are sealed with an epoxy-based molding resin so that both sides are exposed, thereby producing a semiconductor device according to this embodiment.

[0105] The results of calculating the spectral sensitivity spectrum of the obtained infrared receiving element are shown in Fig. 15. The results were equivalent to those of the infrared receiving element obtained in Example 3.

[0106] On the other hand, in Comparative Example 7, it is difficult to reduce the size because the structure is a combination of the sensor PKG and the filter PKG. The IR sensor in Comparative Example 7 is 3.0 mm × 3.0 mm × 1.1 mm, so the device height is about twice as high as that in Example 3.

[0107] [Comparative Example 8] A semiconductor wafer and an infrared receiving element were obtained in the same manner as in Example 1, except that the thickness of the optical filter formed on the back surface of the compound semiconductor wafer was set to 3.9 μm as shown in FIG.

[0108] The spectral sensitivity spectrum of the obtained infrared receiving element was calculated and the results are shown in Figure 11. Compared with the infrared receiving element obtained in Example 1, the peak sensitivity is about 20% lower and the half-value width is 50% narrower. 2 The sensitivity in the absorption band drops to below 40%.

[0109] FIG. 18 is a diagram showing the relationship between the GaAs substrate thickness and the wafer warpage when an optical filter is integrated with a sensor wafer.

[0110] The points plotted as actual measured values ​​are the results of measuring the amount of wafer warpage, defined as the difference in height between the center of the wafer and the outermost periphery, when the thickness of a 4-inch GaAs substrate was changed in the range of 400 μm to 580 μm and the thickness of the optical filter (made of SiO) was set to 14.3 μm.

[0111] On the other hand, the values ​​plotted as calculated values ​​are the results of fitting to the measured values ​​based on known bimetal theories, and the Young's modulus and linear expansion coefficient of the material were taken from literature values ​​for the fitting.

[0112] Next, using this calculation model, the relationship between the GaAs substrate thickness [μm] and the filter thickness [μm] at which the wafer warp is 300 μm or less is calculated and plotted in Figure 19. The plot in Figure 19 was approximated by the least squares method, and Topt≦0.000053×Twaf 2.0488 The results show that when the relationship between the thickness of the substrate Tsub [μm] and the thickness of the optical filter Topt [μm] is satisfied, the wafer warpage is 300 μm or less. The results based on FIG. 18 and FIG. 19 are the same for semiconductor devices. That is, when the thickness of the substrate Tsub [μm] and the thickness of the optical filter Topt [μm] are satisfied, Topt≦0.000053×Tsub 2.0488の When the relationship is satisfied, warpage is suppressed and the internal stress of the semiconductor device is sufficiently reduced.

[0113] Details of the examples are shown in Table 1. Details of the comparative examples compared to the examples are shown in Table 2.

[0114] [Table 1]

[0115] [Table 2]

[0116] The present invention is not limited to the embodiments described above. Design changes and the like can be added to each embodiment based on the knowledge of a person skilled in the art, and such changes and the like are included in the scope of the present invention. [Explanation of symbols]

[0117] 1. Semiconductor devices 2 Light emitting unit 3 Light receiving section 4 Gas Cell 5 Gas inlet 6 Gas exhaust section 10 Optical Filters 11 Middle Class 20 Sealing part 21 Sealing part 22 Sealing part 30 electrodes 40 Light emitting / receiving element 41 Substrate 42 Semiconductor laminate 100 Gas concentration measuring device 101 1st layer 102 2nd layer 411 Page 1 412 2nd page 421 First n-type compound semiconductor layer 422 Second n-type compound semiconductor layer 423 n-type barrier layer 424 Active layer 425 p-type barrier layer 426 p-type compound semiconductor layer 1001 Semiconductor Devices

Claims

1. A wafer substrate; a semiconductor laminate formed on a first surface of the wafer substrate and capable of receiving or emitting infrared radiation of 2 to 10 μm; an optical filter formed directly on a second surface of the wafer substrate opposite the first surface of the wafer substrate; the wafer substrate is a compound semiconductor; the semiconductor laminate portion includes at least one of InSb, AlInSb, InAs, and InAsSb, The optical filter is made of Si, Ge, SiO, SiO ２ , TiO ２ and ZnS, The thickness T of the wafer substrate is 600 μm or less, The thickness Twaf [μm] of the wafer substrate and the thickness Topt [μm] of the optical filter are Topt≧4 and Topt≦0.000053×Twaf ２．０４８８ A semiconductor wafer that satisfies the above relationship.

2. 2. The semiconductor wafer according to claim 1, wherein the wafer substrate has a thickness Twaf of 150 μm to 350 μm.

3. 3. The semiconductor wafer according to claim 1, wherein the optical filter has a thickness Topt of 4 μm to 26 μm.

4. A wafer substrate; a semiconductor laminate portion formed on a first surface of the wafer substrate and capable of receiving or emitting infrared light; an optical filter formed on a second surface of the wafer substrate opposite the first surface; the wafer substrate is a compound semiconductor; the semiconductor laminate portion includes at least one of InSb, AlInSb, InAs, and InAsSb, The optical filter is made of Si, Ge, SiO, SiO ２ , TiO ２ and ZnS, The thickness T of the wafer substrate is 600 μm or less, A semiconductor wafer, wherein the optical filter has an intermediate layer made of Si and having a thickness of 50 μm or more and 300 μm or less between the optical filter and the wafer substrate, the optical filter is formed directly on the intermediate layer, and the thickness of the optical filter is 10% or less of the thickness of the wafer substrate.

5. 5. The semiconductor wafer according to claim 4, wherein the optical filter has a thickness Topt of 1.5 μm to 60 μm.

6. The active layer of the semiconductor laminate is Al ｘ In １－ｘ Sb (0≦x≦0.20) or InAs ｙ Sb １－ｙ (0.10≦y≦0.20) or InAs ｙ Sb １－ｙ 6. The semiconductor wafer according to claim 1, wherein y is 0.75≦y≦1.

7. 7. The semiconductor wafer according to claim 1, wherein the optical filter has a first layer having a refractive index of 1.2 to 2.5 for infrared rays having a wavelength of 2.4 μm or more and 6 μm or less, and a second layer having a refractive index of 2 to 4.2 for infrared rays having a wavelength of 2.4 μm or more and 6 μm or less.

8. 8. The semiconductor wafer according to claim 7, wherein the optical filter is formed by alternately laminating the first layer and the second layer in a range of 2 to 25 times.

9. 9. The semiconductor wafer according to claim 1, wherein an amount of warpage of the wafer, defined by a difference in height between the center of the wafer and the outermost periphery of the wafer, is 300 μm or less.

10. 10. The semiconductor wafer of claim 1, wherein the diameter of the wafer substrate is 2 inches or more and 8 inches or less.

11. The semiconductor wafer according to claim 1 , wherein a size of the wafer substrate and a size of the optical filter are approximately equal in plan view.

12. A substrate; a semiconductor laminate portion formed on a first surface of the substrate and capable of receiving or emitting infrared radiation of 2 to 10 μm; an optical filter formed directly on a second surface of the substrate opposite the first surface of the substrate; a sealing portion that seals the substrate, the semiconductor laminate, and the optical filter so as to expose at least a portion of the optical filter; the substrate is a compound semiconductor; the semiconductor laminate portion includes at least one of InSb, AlInSb, InAs, and InAsSb, The optical filter is made of Si, Ge, SiO, SiO ２ , TiO ２ and ZnS, The thickness Tsub of the substrate is 600 μm or less, The thickness Tsub [μm] of the substrate and the thickness T opt [μm] of the optical filter are T opt ≧4 and T opt ≦0.000053×T ２．０４８８の Semiconductor devices that meet the requirements.

13. A substrate having a thickness of Tsub [μm]; a semiconductor laminate portion formed on a first surface of the substrate and capable of receiving or emitting infrared light; an optical filter having a thickness T opt [μm] formed on a second surface of the substrate opposite to the first surface; the substrate is a compound semiconductor; the semiconductor laminate portion includes at least one of InSb, AlInSb, InAs, and InAsSb, The optical filter is made of Si, Ge, SiO, SiO ２ , TiO ２ and ZnS, The thickness Tsub of the substrate is 600 μm or less, A semiconductor device, wherein the optical filter has an intermediate layer made of Si and having a thickness of 50 μm or more and 300 μm or less between the optical filter and the substrate, the optical filter is formed directly on the intermediate layer, and the thickness of the optical filter is 10% or less of the thickness of the substrate.

14. The semiconductor device according to claim 12 or 13, wherein the thickness Tsub of the substrate is 150 μm to 600 μm.

15. The semiconductor device according to any one of claims 12 to 14, wherein the optical filter has a thickness T opt of 1.5 μm to 26 μm.

16. The semiconductor device according to claim 12 , wherein a size of the substrate and a size of the optical filter are substantially equal in plan view.

17. a light emitting unit that outputs infrared rays that are absorbed by the gas to be detected; a gas cell for introducing the detection gas; a light receiving unit that receives infrared light output from the light emitting unit and that has passed through the gas cell, and outputs a signal corresponding to the amount of infrared light received, 17. A gas concentration measuring apparatus, wherein at least one of the light emitting section and the light receiving section is the semiconductor device according to claim 12.

18. The semiconductor wafer of claim 1 , wherein the wafer substrate comprises GaAs.

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