Method for manufacturing mask device

Abstract

To provide a method for manufacturing a mask device, capable of preventing a frame from deforming.SOLUTION: A frame supports a mask including a plurality of open holes in the state of pulling the mask. A method for manufacturing a mask device comprises steps of: fixing the mask to the frame in the state of pulling the mask; and inserting the frame into the inside of a case in the state of supporting the frame from below by the fork of a lifter. The case includes: a side part including a bottom; a lower end positioned on the side of the bottom and an upper end positioned on the side opposite to the lower end and having a side part opening reaching the upper end; a closing tool capable of being brought into a closing state of closing the side part opening and an opening state of opening the side part opening; a frame support tool including a frame support surface for supporting the frame above the bottom; and a cover positioned above the upper end of the side part.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE An embodiment of the present disclosure relates to a method for manufacturing a mask device. [Background technology]

[0002] In the field of display devices used in portable devices such as smartphones and tablet PCs, organic electroluminescence display devices have been attracting attention. As a manufacturing method and a manufacturing apparatus for an organic semiconductor device such as an organic electroluminescence display device, a method and an apparatus for forming pixels in a desired pattern using a mask in which through-holes arranged in a desired pattern are known. For example, a mask fixed to a frame is first combined with a substrate for an organic electroluminescence display device. Then, a deposition material containing an organic material is attached to the substrate through the through-holes of the mask. By carrying out such a deposition process, pixels having a deposition layer containing a deposition material can be formed on the substrate in a pattern corresponding to the pattern of the through-holes of the deposition mask. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 5382259 Summary of the Invention [Problem to be solved by the invention]

[0004] If the frame is deformed, the positional accuracy of the through holes of the mask fixed to the frame will decrease, and the positional accuracy of the deposition material attached to the substrate will also decrease. For this reason, it is necessary to handle the frame in a way that suppresses deformation of the frame. [Means for solving the problem]

[0005] According to one embodiment of the present disclosure, a case for housing a frame includes: The bottom and a side portion including a lower end located on the bottom side and an upper end located opposite to the lower end, the side portion having a side opening reaching the upper end; A closure member that can assume a closed state in which the side opening is closed and an open state in which the side opening is open; a frame support including a frame support surface that supports the frame above the bottom; and a cover positioned over the top end of the side portion. Effect of the Invention

[0006] According to the present disclosure, deformation of the frame can be suppressed. [Brief description of the drawings]

[0007] [Figure 1] FIG. 1 is a diagram showing an example of a deposition apparatus equipped with a mask. [Diagram 2] FIG. 1 is a cross-sectional view showing an example of an organic EL display device manufactured using a vapor deposition apparatus. [Diagram 3] FIG. 2 is a plan view showing an example of a mask device. [Figure 4] FIG. 2 is a perspective view showing an example of a case with the door in a closed state. [Diagram 5] FIG. 11 is a perspective view showing an example of a case with a door in an open state. [Figure 6] FIG. 2 is a plan view showing an example of a case with the cover removed. [Figure 7] 7 is a plan view showing a state in which the frame is removed from the case in FIG. 6. FIG. [Figure 8] FIG. 2 is a perspective view showing an example of a frame support for a case. [Figure 9] FIG. 4 is a cross-sectional view showing an example of a frame support. [Figure 10] FIG. 2 is a cross-sectional view showing an example of a case in which a frame is housed. [Figure 11] 11 is a cross-sectional view showing the case of FIG. 10 with the cover removed and the door open. FIG. [Figure 12]11 is a plan view showing the case of FIG. 10 with the cover removed and the door open. FIG. [Figure 13] 13 is a plan view showing a step of inserting a fork into the case through a side opening of the case. FIG. [Figure 14] 11 is a cross-sectional view showing a process of inserting a fork into the case through a side opening of the case. FIG. [Figure 15A] 11 is a cross-sectional view showing a process of lifting the frame with a fork. [Figure 15B] FIG. 13 is a cross-sectional view showing the frame being lifted by the forks. [Figure 16] FIG. 2 is a plan view showing an example of a case with the cover removed. [Figure 17A] FIG. 17 is a cross-sectional view of the case of FIG. 16. [Figure 17B] FIG. 17 is a cross-sectional view of the case of FIG. 16. [Figure 18] FIG. 2 is a plan view showing an example of a case with the cover removed. [Figure 19] FIG. 2 is a plan view showing an example of a case with the cover removed and the door open. [Figure 20] FIG. 2 is a plan view showing an example of a case with the cover removed and the door open. [Figure 21] FIG. 2 is a plan view showing an example of a case with the cover removed. [Figure 22] FIG. 2 is a plan view showing an example of a lifter 70. [Figure 23] 23 is a cross-sectional view of the fork and receiver of FIG. 22 taken along line CC. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] In this specification and drawings, unless otherwise specified, terms that refer to a material that serves as the basis of a certain configuration, such as "substrate," "base material," "plate," "sheet," and "film," are not to be distinguished from one another solely on the basis of differences in name.

[0009] In this specification and drawings, unless otherwise specified, terms that specify shapes, geometric conditions, and the extent thereof, such as "parallel" and "orthogonal," and values ​​of lengths and angles, are not to be bound by strict meanings, but are to be interpreted within a range within which similar functions can be expected.

[0010] In this specification and drawings, unless otherwise specified, when a certain configuration such as a certain member or a certain region is described as being "on" or "under", "upper" or "lower" or "above" or "below" another configuration such as another member or another region, this includes the case where the certain configuration is in direct contact with the other configuration. It also includes the case where another configuration is included between a certain configuration and the other configuration, that is, where the configuration is indirectly in contact. Furthermore, unless otherwise specified, the words "on", "upper side", "upper", or "lower", "lower side", and "lower" may be used in the up-down direction.

[0011] In this specification and drawings, unless otherwise specified, the same or similar parts or parts having similar functions are denoted by the same or similar symbols, and repeated explanations may be omitted. In addition, the dimensional ratios of the drawings may differ from the actual ratios for the convenience of explanation, and some components may be omitted from the drawings.

[0012] In this specification and the drawings, unless otherwise specified, one embodiment of this specification may be combined with other embodiments to the extent that no contradiction occurs. In addition, other embodiments may be combined with each other to the extent that no contradiction occurs.

[0013] In this specification and drawings, unless otherwise specified, when a plurality of steps are disclosed in a method such as a manufacturing method, other steps that are not disclosed may be performed between the disclosed steps. In addition, the order of the disclosed steps is arbitrary within the range that does not cause contradiction.

[0014] In this specification and drawings, unless otherwise specified, a numerical range expressed by the symbol "~" includes the numerical values ​​before and after the symbol "~". For example, the numerical range defined by the expression "34 to 38% by mass" is the same as the numerical range defined by the expression "34% by mass or more and 38% by mass or less".

[0015] Hereinafter, an embodiment of the present disclosure will be described in detail with reference to the drawings. Note that the embodiment described below is an example of the present disclosure, and the present disclosure is not to be interpreted as being limited to only these embodiments.

[0016] A first aspect of the present disclosure is a case for housing a frame, comprising: The bottom and a side portion including a lower end located on the bottom side and an upper end located opposite to the lower end, the side portion having a side opening reaching the upper end; A closure member that can assume a closed state in which the side opening is closed and an open state in which the side opening is open; a frame support including a frame support surface that supports the frame above the bottom; and a cover positioned over the top end of the side.

[0017] In a second aspect of the present disclosure, the case according to the above-mentioned first aspect may further include a bottom support that supports the bottom from below.

[0018] A third aspect of the present disclosure is a case according to the above-mentioned second aspect, wherein the bottom support may include casters.

[0019] A fourth aspect of the present disclosure is that in each of the first to third aspects described above, the closure may include a door that is rotatable about an axis attached to the side or the bottom.

[0020] A fifth aspect of the present disclosure is such that in each of the first to third aspects described above, the closure may include a closure member that is separable from the side portion.

[0021] A sixth aspect of the present disclosure is such that, in each of the first to fifth aspects described above, the frame support may include a frame base that contains resin and constitutes the frame support surface.

[0022] A seventh aspect of the present disclosure is a case according to the sixth aspect described above, wherein the frame support may include a support pillar located between the frame base and the bottom and including metal.

[0023] An eighth aspect of the present disclosure is a case according to the sixth aspect or the seventh aspect described above, wherein the frame base includes a protrusion protruding upward from the frame support surface along an inner surface of the side portion, The frame support may include a presser that contains resin and is attached to an upper surface of the protrusion, the presser including an opposing region that faces the frame support surface of the frame base.

[0024] A ninth aspect of the present disclosure is such that, in each of the first to eighth aspects described above, the bottom may include a guide for guiding a foam inserted from the side opening.

[0025] A tenth aspect of the present disclosure is a case according to the above-mentioned ninth aspect, wherein the guide may include a guide protrusion protruding upward from the bottom.

[0026] An eleventh aspect of the present disclosure is a case according to each of the first to tenth aspects described above, wherein the side opening includes a first side opening and a second side opening, The side portion may include an intermediate support positioned between the first side opening and the second side opening and extending vertically from the bottom portion to the cover.

[0027] A twelfth aspect of the present disclosure is such that, in each of the first aspect to the eleventh aspect described above, the sides include a pair of first sides and a pair of second sides, and a dimension of the first sides may be 1200 mm or more and a dimension of the second sides may be 1800 mm or more.

[0028] A thirteenth aspect of the present disclosure is a case according to the twelfth aspect described above, wherein the side opening is formed in the second side, and a ratio of a distance from the first first side to the side opening to a dimension of the second side is 0.1 or more, and a ratio of a distance from the second first side to the side opening to a dimension of the second side is 0.1 or more.

[0029] A fourteenth aspect of the present disclosure is a method for removing a frame stored in a case according to any one of the first to thirteenth aspects described above, comprising the steps of: inserting a fork between the lower surface of the frame and the bottom of the case through the side opening in the open state; and a step of raising the forks and lifting the frame supported by the frame support with the forks.

[0030] A fifteenth aspect of the present disclosure is the removal method according to the fourteenth aspect described above, wherein a mask including a through hole may be supported in a tensioned state by the frame.

[0031] A sixteenth aspect of the present disclosure is a method for storing a frame in a case according to any one of the first to thirteenth aspects described above, comprising: a step of inserting the frame and a fork supporting the frame from below into the inside of the case through the side opening in the open state; and lowering the forks to place the frame on the frame support surface of the frame support.

[0032] A seventeenth aspect of the present disclosure is the method for storing according to the sixteenth aspect described above, wherein a mask including a through hole may be supported in a tensioned state by the frame.

[0033] An 18th aspect of the present disclosure is a case according to each of the first aspect to the thirteenth aspect described above, and a frame supported by the frame support of the case.

[0034] A nineteenth aspect of the present disclosure is a frame holder according to the sixteenth aspect described above, wherein a mask including a through hole may be supported in a tensioned state by the frame.

[0035] According to the case according to the embodiment of the present disclosure, the frame stored in the case can be easily removed, and therefore deformation of the frame caused by the operation of removing the frame from the case can be suppressed.

[0036] First, a deposition apparatus 1 equipped with a mask device including a frame and a mask will be described with reference to Fig. 1. The deposition apparatus 1 performs a deposition process for depositing a deposition material on a target object.

[0037] The deposition apparatus 1 may include therein a deposition source 6, a heater 8, and a mask device 40. The deposition apparatus 1 may further include an exhaust means for creating a vacuum atmosphere inside the deposition apparatus 1. The deposition source 6 is, for example, a crucible, and contains a deposition material 7 such as an organic light-emitting material. The heater 8 heats the deposition source 6 to evaporate the deposition material 7 under a vacuum atmosphere. The mask device 40 is disposed to face the crucible 6.

[0038] As shown in FIG. 1, the mask device 40 may include at least one mask 50 and a frame 41 supporting the mask 50. The frame 41 may include a first frame surface 41a to which the mask 50 is fixed, and a second frame surface 41b located on the opposite side of the first frame surface 41a. The frame 41 may also include an opening 42 penetrating from the first frame surface 41a to the second frame surface 41b. The mask 50 may be fixed to the frame 41 so as to cross the opening 42 in a plan view. The frame 41 may also support the mask 50 in a state of being pulled in the direction of its surface so as to suppress bending of the mask 50.

[0039] 1, the mask device 40 is disposed in the deposition apparatus 1 such that the mask 50 faces a substrate 110 which is an object to which the deposition material 7 is to be attached. The mask 50 includes a plurality of through holes 56 through which the deposition material 7 coming from the deposition source 6 passes. In the following description, of the surfaces of the mask 50, a surface located on the substrate 110 side is referred to as a first surface 55a, and a surface located opposite the first surface 55a is referred to as a second surface 55b.

[0040] As shown in FIG. 1, the deposition apparatus 1 may include a magnet 4 disposed on the surface of the substrate 110 opposite to the mask 50. By providing the magnet 4, the mask 50 can be attracted to the magnet 4 side by magnetic force. This makes it possible to reduce or eliminate the gap between the mask 50 and the substrate 110. This makes it possible to suppress the occurrence of a shadow in the deposition process, and to improve the dimensional accuracy and positional accuracy of the deposition layer formed on the substrate 110. Although not shown, the mask 50 may be attracted to the substrate 110 side by an electrostatic chuck that utilizes electrostatic force. The shadow is a phenomenon in which the adhesion of the deposition material to the substrate 110 is hindered by the wall surface of the through hole 56.

[0041] FIG. 2 is a cross-sectional view showing an example of an organic EL display device 100 manufactured using the deposition apparatus 1 of FIG. 1. The organic EL display device 100 may include a substrate 110 and a pixel having a deposition layer 98 including a deposition material 7 attached to the substrate 110. Although not shown, the organic EL display device 100 may further include an electrode electrically connected to the pixel including the deposition layer 98. The electrode may be provided in advance on the substrate 110 before the deposition material 7 is attached to the substrate 110 by the deposition process. The organic EL display device 100 may further include other components such as a sealing member that seals the space around the pixel including the deposition layer 98 from the outside. Therefore, the organic EL display device 100 of FIG. 2 can also be said to be an organic EL display device intermediate generated at an intermediate stage in manufacturing an organic EL display device.

[0042] When a color display using a plurality of colors is desired, a deposition apparatus 1 equipped with a mask 50 corresponding to each color is prepared, and the substrate 110 is sequentially placed in each deposition apparatus 1. In this way, for example, a red organic light-emitting material, a green organic light-emitting material, and a blue organic light-emitting material can be sequentially deposited on the substrate 110.

[0043] Next, the mask 50 will be described in detail. FIG. 3 is a plan view showing the mask device 40 as viewed from the first surface 55a side of the mask 50. As shown in FIG. 3, the mask device 40 may include a plurality of masks 50. In this embodiment, the shape of each mask 50 may be a rectangle extending in a first direction D1. In the mask device 40, the plurality of masks 50 are arranged in a second direction D2 intersecting the first direction D1, which is the longitudinal direction of the masks 50. Each mask 50 may be fixed to the frame 41 at both ends of the mask 50 in the longitudinal direction, for example, by welding.

[0044] The frame 41 may have a rectangular outline including a pair of first regions 411 extending in a first direction D1 and a pair of second regions 412 extending in a second direction D2. As shown in FIG. 3, the second region 412 to which the mask 50 is fixed may be longer than the first region 411. The opening 42 of the frame 41 may be surrounded by the pair of first regions 411 and the pair of second regions 412.

[0045] A dimension L1 of the first region 411 in the first direction D1 and a dimension L2 of the second region 412 in the second direction D2 are determined according to the dimensions of the substrate 110. When a large substrate 110 such as an 8th generation, 9th generation, or 10th generation is used, the dimensions L1 and L2 are also large.

[0046] The dimension L1 of the first region 411 may be, for example, 1000 mm or more, 1500 mm or more, or 2000 mm or more. The dimension L1 may be, for example, 3000 mm or less, 3500 mm or less, or 4000 mm or less. The range of the dimension L1 may be determined by a first group consisting of 1000 mm, 1500 mm, and 2000 mm, and / or a second group consisting of 3000 mm, 3500 mm, and 4000 mm. The range of the dimension L1 may be determined by a combination of any one of the values ​​included in the above-mentioned first group and any one of the values ​​included in the above-mentioned second group. The range of the dimension L1 may be determined by a combination of any two of the values ​​included in the above-mentioned first group. The range of the dimension L1 may be determined by a combination of any two of the values ​​included in the above-mentioned second group. For example, it may be 1000 mm or more and 4000 mm or less, 1000 mm or more and 3500 mm or less, 1000 mm or more and 3000 mm or less, 1000 mm or more and 2000 mm or less, 1000 mm or more and 1500 mm or less, 1500 mm or more and 4000 mm or less, 1500 mm or more and 3500 mm or less, 1500 mm or more and 3000 mm or less, 1500 mm or more and 2000 mm or more and 2000 mm or more and 4000 mm or less, 2000 mm or more and 3500 mm or less, 2000 mm or more and 3000 mm or more and 3000 mm or more and 4000 mm or less, 3000 mm or more and 3500 mm or less, or 3500 mm or more and 4000 mm or less.

[0047] The dimension L2 of the second region 412 may be, for example, 1600 mm or more, 2100 mm or more, or 2600 mm or more. The dimension L2 may be, for example, 3300 mm or less, 3800 mm or less, or 4300 mm or less. The range of the dimension L2 may be determined by a first group consisting of 1600 mm, 2100 mm, and 2600 mm, and / or a second group consisting of 3300 mm, 3800 mm, and 4300 mm. The range of the dimension L2 may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The range of the dimension L2 may be determined by a combination of any two of the values ​​included in the first group described above. The range of the dimension L2 may be determined by a combination of any two of the values ​​included in the second group described above. For example, it may be 1600 mm or more and 4300 mm or less, 1600 mm or more and 3800 mm or less, 1600 mm or more and 3300 mm or less, 1600 mm or more and 2600 mm or less, 1600 mm or more and 2100 mm or more and 2100 mm or more and 4300 mm or less, 2100 mm or more and 3800 mm or less, 2100 mm or more and 3300 mm or less, 2100 mm or more and 2600 mm or more and 4300 mm or less, 2600 mm or more and 3800 mm or less, 2600 mm or more and 3300 mm or less, 3300 mm or more and 4300 mm or less, 3300 mm or more and 3800 mm or less, or 3800 mm or more and 4300 mm or less.

[0048] When a large substrate 110 is used, the weight of the frame 41 also becomes large. The weight of the frame 41 may be, for example, 70 kg or more, 100 kg or more, or 150 kg or more. The weight of the frame 41 may be, for example, 300 kg or less, 400 kg or less, or 500 kg or less. The weight range of the frame 41 may be determined by a first group consisting of 70 kg, 100 kg, and 150 kg, and / or a second group consisting of 300 kg, 400 kg, and 500 kg. The weight range of the frame 41 may be determined by a combination of any one of the values ​​included in the above-mentioned first group and any one of the values ​​included in the above-mentioned second group. The weight range of the frame 41 may be determined by a combination of any two of the values ​​included in the above-mentioned first group. The weight range of the frame 41 may be determined by a combination of any two of the values ​​included in the above-mentioned second group. For example, it may be 70kg or more and 500kg or less, 70kg or more and 400kg or less, 70kg or more and 300kg or less, 70kg or more and 150kg or less, 70kg or more and 100kg or more and 100kg or more and 500kg or less, 100kg or more and 400kg or less, 100kg or more and 300kg or less, 100kg or more and 150kg or more and 150kg or more and 500kg or less, 150kg or more and 400kg or less, 150kg or more and 300kg or less, 300kg or more and 500kg or less, 300kg or more and 400kg or less, or 400kg or more and 500kg or less.

[0049] The mask device 40 may include a member fixed to the frame 41 and partially overlapping the mask 50 in the thickness direction of the mask 50. For example, the mask device 40 may include a support member 43 extending in a second direction D2 intersecting the first direction D1 and supporting the mask 50 from below. The support member 43 may be in contact with the mask 50. Alternatively, the support member 43 may indirectly support the mask 50 from below via another member. Although not shown, the mask device 40 may include a member fixed to the frame 41 and overlapping a gap between two adjacent masks 50.

[0050] As shown in FIG. 3, the mask 50 may have a pair of ears 51 overlapping the frame 41 and an intermediate portion 52 located between the ears 51. The intermediate portion 52 may have at least one effective area 53 and a peripheral area 54 located around the effective area 53. In the example shown in FIG. 3, the intermediate portion 52 includes a plurality of effective areas 53 arranged at a predetermined interval along the first direction D1. The peripheral area 54 surrounds the plurality of effective areas 53. The effective area 53 may include a plurality of through holes 56 through which the deposition material 7 passes. The deposition material that passes through each through hole 56 of the effective area 53 and adheres to the substrate 110 may constitute the above-mentioned deposition layer 98.

[0051] The opening dimension r of the through hole 56 is determined according to the dimension of the deposition layer 98 formed on the substrate 110. The opening dimension r of the through hole 56 is the dimension of the through region of the through hole 56 penetrating the metal plate constituting the mask 50 in a plan view. The opening dimension r can be determined by the light passing through the through hole 56. For example, parallel light is made incident on one of the first surface 55a or the second surface 55b of the mask 50 along the normal direction of the mask 50, and is made to pass through the through hole 56 and exit from the other of the first surface 55a or the second surface 55b. The dimension of the region occupied by the exiting light in the surface direction of the mask 50 is adopted as the opening dimension r of the through hole 56.

[0052] The opening dimension r of the through hole 56 may be, for example, 10 μm or more, 15 μm or more, 20 μm or more, or 25 μm or more. The opening dimension r of the through hole 56 may be, for example, 40 μm or less, 45 μm or less, 50 μm or less, or 55 μm or less. The range of the opening dimension r of the through hole 56 may be determined by a first group consisting of 10 μm, 15 μm, 20 μm, and 25 μm, and / or a second group consisting of 40 μm, 45 μm, 50 μm, and 55 μm. The range of the opening dimension r of the through hole 56 may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The range of the opening dimension r of the through hole 56 may be determined by a combination of any two of the values ​​included in the first group described above. The range of the opening dimension r of the through-hole 56 may be determined by a combination of any two of the values ​​included in the second group described above.For example, it may be 10 μm or more and 55 μm or less, 10 μm or more and 50 μm or less, 10 μm or more and 45 μm or less, 10 μm or more and 40 μm or less, 10 μm or more and 25 μm or less, 10 μm or more and 20 μm or less, 10 μm or more and 15 μm or more and 15 μm or more and 55 μm or less, 15 μm or more and 50 μm or less, 15 μm or more and 45 μm or less, 15 μm or more and 40 μm or less, 15 μm or more and 25 μm or less, 15 μm or more and 20 μm or more and 20 μm or more and 55 μm or less. Alternatively, it may be 20 μm or more and 50 μm or less, 20 μm or more and 45 μm or less, 20 μm or more and 40 μm or less, 20 μm or more and 25 μm or less, 25 μm or more and 55 μm or less, 25 μm or more and 50 μm or less, 25 μm or more and 45 μm or less, 25 μm or more and 40 μm or less, 40 μm or more and 55 μm or less, 40 μm or more and 50 μm or less, 40 μm or more and 45 μm or less, 45 μm or more and 55 μm or less, 45 μm or more and 50 μm or less, 50 μm or more and 55 μm or less.

[0053] When a display device such as an organic EL display device is manufactured using the mask 50, one effective area 53 may correspond to a display area of ​​one organic EL display device. Note that one effective area 53 may correspond to a plurality of display areas. Although not shown, a plurality of effective areas 53 may also be arranged at predetermined intervals in the width direction of the mask 50.

[0054] The effective area 53 may have a rectangular outline in a plan view. The effective area 53 may have an outline of various shapes depending on the shape of the display area of ​​the organic EL display device. For example, the effective area 53 may have a circular outline.

[0055] Next, the materials of the mask 50 and the frame 41 of the mask device 40 will be described. An iron alloy containing nickel can be used as the main material of the mask 50 and the frame 41. The iron alloy may further contain cobalt in addition to nickel. For example, an iron alloy containing nickel and cobalt in total of 28% by mass or more and 54% by mass or less and containing cobalt in total of 0% by mass or more and 6% by mass or less can be used as the material of the mask 50 and the frame 41. This can reduce the difference between the thermal expansion coefficient of the mask 50 and the frame 41 and the thermal expansion coefficient of the substrate 110 containing glass. This can prevent the dimensional accuracy and positional accuracy of the deposition layer 98 formed on the substrate 110 from being reduced due to the thermal expansion of the mask 50, the frame 41, the substrate 110, etc.

[0056] The total content of nickel and cobalt in the iron alloy constituting the mask 50 and the frame 41 may be 28% by mass or more and 38% by mass or less. In this case, specific examples of the iron alloy include Invar, Super Invar, and Ultra Invar. The Invar is an iron alloy containing 34% by mass or more and 38% by mass or less of nickel, the balance being iron and unavoidable impurities. The Super Invar is an iron alloy containing 30% by mass or more and 34% by mass or less of nickel, cobalt, and the balance being iron and unavoidable impurities. The Ultra Invar is an iron alloy containing 28% by mass or more and 34% by mass or less of nickel, 2% by mass or more and 7% by mass or less of cobalt, 0.1% by mass or more and 1.0% by mass or less of manganese, 0.10% by mass or less of silicon, 0.01% by mass or less of carbon, and the balance being iron and unavoidable impurities.

[0057] The total content of nickel and cobalt in the iron alloy constituting the mask 50 and the frame 41 may be 38% by mass or more and 54% by mass or less. In this case, a specific example of the iron alloy is a low-thermal expansion Fe-Ni-based plating alloy. The low-thermal expansion Fe-Ni-based plating alloy is an iron alloy containing 38% by mass or more and 54% by mass or less of nickel, with the balance being iron and unavoidable impurities.

[0058] If the temperatures of the mask 50, the frame 41, and the substrate 110 do not reach high temperatures during the deposition process, it is not necessary to set the thermal expansion coefficients of the mask 50 and the frame 41 to values ​​equivalent to that of the substrate 110. In this case, materials other than the above-mentioned iron alloys may be used as the iron alloys constituting the mask 50 and the frame 41. For example, iron alloys other than the above-mentioned iron alloys containing nickel, such as iron alloys containing chromium, may be used. As the iron alloy containing chromium, for example, an iron alloy so-called stainless steel may be used. In addition, alloys other than iron alloys, such as nickel and nickel-cobalt alloys, may be used.

[0059] The thickness T1 of the mask 50 may be, for example, 8 μm or more, 10 μm or more, 13 μm or more, or 15 μm or more. The thickness T1 of the mask 50 may be, for example, 20 μm or less, 30 μm or less, 40 μm or less, or 50 μm or less. The range of the thickness T1 of the mask 50 may be determined by a first group consisting of 8 μm, 10 μm, 13 μm, and 15 μm, and / or a second group consisting of 20 μm, 30 μm, 40 μm, and 50 μm. The range of the thickness T1 of the mask 50 may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The range of the thickness T1 of the mask 50 may be determined by a combination of any two of the values ​​included in the first group described above. The range of the thickness T1 of the mask 50 may be determined by a combination of any two of the values ​​included in the second group described above. For example, it may be 8 μm or more and 50 μm or less, 8 μm or more and 40 μm or less, 8 μm or more and 30 μm or less, 8 μm or more and 20 μm or less, 8 μm or more and 15 μm or less, 8 μm or more and 13 μm or less, 8 μm or more and 10 μm or less, 10 μm or more and 50 μm or less, 10 μm or more and 40 μm or less, 10 μm or more and 30 μm or less, 10 μm or more and 20 μm or less, 10 μm or more and 15 μm or less, 10 μm or more and 13 μm or less, 13 μm or more and 50 μm or less, or 1 It may be 3 μm or more and 40 μm or less, 13 μm or more and 30 μm or less, 13 μm or more and 20 μm or less, 13 μm or more and 15 μm or less, 15 μm or more and 50 μm or less, 15 μm or more and 40 μm or less, 15 μm or more and 30 μm or less, 15 μm or more and 20 μm or less, 20 μm or more and 50 μm or less, 20 μm or more and 40 μm or less, 20 μm or more and 30 μm or less, 30 μm or more and 50 μm or less, 30 μm or more and 40 μm or less, or 40 μm or more and 50 μm or less.

[0060] By setting the thickness T1 of the mask 50 to 50 μm or less, it is possible to reduce the ratio of the deposition material 7 that gets caught on the wall surface of the through-hole 56 before passing through the through-hole 56, thereby improving the utilization efficiency of the deposition material 7. In addition, by setting the thickness T1 of the mask 50 to 8 μm or more, it is possible to ensure the strength of the mask 50 and prevent the mask 50 from being damaged or deformed.

[0061] The thickness T2 of the frame 41 may be, for example, 5 mm or more, 10 mm or more, 15 mm or more, or 20 mm or more. The thickness T2 of the frame 41 may be, for example, 25 mm or less, 30 mm or less, 35 mm or less, or 40 mm or less. The range of the thickness T2 of the frame 41 may be determined by a first group consisting of 5 mm, 10 mm, 15 mm, and 20 mm, and / or a second group consisting of 25 mm, 30 mm, 35 mm, and 40 mm. The range of the thickness T2 of the frame 41 may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The range of the thickness T2 of the frame 41 may be determined by a combination of any two of the values ​​included in the first group described above. The range of the thickness T2 of the frame 41 may be determined by a combination of any two of the values ​​included in the second group described above.For example, it may be 5 mm or more and 40 mm or less, may be 5 mm or more and 35 mm or less, may be 5 mm or more and 30 mm or less, may be 5 mm or more and 25 mm or less, may be 5 mm or more and 20 mm or less, may be 5 mm or more and 15 mm or less, may be 5 mm or more and 10 mm or less, may be 10 mm or more and 40 mm or less, may be 10 mm or more and 35 mm or less, may be 10 mm or more and 30 mm or less, may be 10 mm or more and 25 mm or less, may be 10 mm or more and 20 mm or less, may be 10 mm or more and 15 mm or less, may be 15 mm or more and 40 mm or less, may be 1 It may be 5mm or more and 35mm or less, or 15mm or more and 30mm or less, or 15mm or more and 25mm or less, or 15mm or more and 20mm or less, or 20mm or more and 40mm or less, or 20mm or more and 35mm or less, or 20mm or more and 30mm or less, or 20mm or more and 25mm or less, or 25mm or more and 40mm or less, or 25mm or more and 35mm or less, or 25mm or more and 30mm or less, or 30mm or more and 40mm or less, or 30mm or more and 35mm or less, or 35mm or more and 40mm or less.

[0062] By making the thickness T2 of the frame 41 5 mm or more, it is possible to prevent deformation such as bending of the frame 41. Furthermore, by making the thickness T2 of the frame 41 40 mm or less, it is possible to prevent the weight of the frame 41 from becoming excessively large. This improves the handleability of the frame 41. For example, the frame 41 can be transported using a small lifter.

[0063] A contact type measuring method is adopted as a method for measuring the thickness T1 of the mask 50 and the thickness T2 of the frame 41. For the contact type measuring method, a length gauge "MT1271" of HEIDENHAIM-METRO manufactured by HEIDENHAIN AG, which is equipped with a ball bush guide type plunger, is used.

[0064] Next, an overview of the case 10 that houses the frame 41 of the mask device 40 will be described. Fig. 4 is a perspective view showing an example of the case 10 in a closed state, and Fig. 5 is a perspective view showing an example of the case 10 in an open state. The case 10 may include a bottom 15, sides 20, a frame support 25, a closure 30, and a cover 35.

[0065] 6 is a plan view showing an example of case 10 with cover 35 removed. Case 10 may have a contour corresponding to frame 41 in a plan view. For example, the contour of case 10 in a plan view may be rectangular like frame 41.

[0066] The frame 41 may be stored in the case 10 with the first region 411 and the second region 412 parallel to the horizontal direction. In this case, the bottom 15 of the case 10 may be a plate member extending in the horizontal direction. The material of the bottom 15 may be aluminum, stainless steel, or the like. The bottom 15 may be provided with a bottom support 16 that supports the bottom 15 from below. In this case, when the case 10 is placed on the floor, a gap can be provided between the floor surface and the bottom 15. This allows the base 74 of the lifter 70, which will be described later, to be inserted into the gap between the floor surface and the bottom 15.

[0067] The bottom support 16 may include casters 161 that are rotatable about axes extending parallel to the surface direction of the bottom 15. By rotating the casters 161, the case 10 can be moved on the floor.

[0068] The distance H1 from the floor surface to the bottom 15 may be, for example, 50 mm or more, 100 mm or more, 150 mm or more, or 200 mm or more. The distance H1 may be, for example, 250 mm or less, 300 mm or less, 350 mm or less, or 400 mm or less. The range of the distance H1 may be determined by a first group consisting of 50 mm, 100 mm, 150 mm, and 200 mm, and / or a second group consisting of 250 mm, 300 mm, 350 mm, and 400 mm. The range of the distance H1 may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The range of the distance H1 may be determined by a combination of any two of the values ​​included in the first group described above. The range of the distance H1 may be determined by a combination of any two of the values ​​included in the second group described above.For example, it may be 50 mm or more and 400 mm or less, 50 mm or more and 350 mm or less, 50 mm or more and 300 mm or less, 50 mm or more and 250 mm or less, 50 mm or more and 200 mm or less, 50 mm or more and 150 mm or less, 50 mm or more and 100 mm or more and 100 mm or more and 400 mm or less, 100 mm or more and 350 mm or less, 100 mm or more and 300 mm or less, 100 mm or more and 250 mm or less, 100 mm or more and 200 mm or less, 100 mm or more and 150 mm or less, 150 mm or more and 400 mm or less, and 1 It may be 50mm or more and 350mm or less, may be 150mm or more and 300mm or less, may be 150mm or more and 250mm or less, may be 150mm or more and 200mm or less, may be 200mm or more and 400mm or less, may be 200mm or more and 350mm or less, may be 200mm or more and 300mm or less, may be 200mm or more and 250mm or less, may be 250mm or more and 400mm or less, may be 250mm or more and 350mm or less, may be 250mm or more and 300mm or less, may be 300mm or more and 400mm or less, may be 300mm or more and 350mm or less, may be 350mm or more and 400mm or less.

[0069] Next, the side portion 20 will be described. The side portion 20 includes a lower end 201 located on the bottom portion 15 side and an upper end 202 located on the opposite side to the lower end 201, and may extend in the vertical direction from the bottom portion 15 side to the cover 35 side. For example, the side portion 20 may be a plate member extending in the vertical direction. The material of the side portion 20 may be aluminum, stainless steel, or the like.

[0070] The side portion 20 may be configured as a separate member from the bottom portion 15. Alternatively, the side portion 20 may be configured integrally with the bottom portion 15.

[0071] 6, the side portion 20 may have a rectangular outline including a first side portion 21 extending in the first direction D1 and a second side portion 22 extending in the second direction D1. The frame 41 may be stored in the case 10 such that the first region 411 of the frame 41 is parallel to the first side portion 21 of the side portion 20 of the case 10, and the second frame surface 41b is parallel to the second side portion 22 of the side portion 20. The second side portion 22 of the side portion 20 may be longer than the first side portion 21.

[0072] A dimension L3 of the first side portion 21 in the first direction D1 and a dimension L4 of the second side portion 22 in the second direction D2 are determined according to the dimensions of the frame 41. When a large substrate 110 is used, the frame 41 becomes larger, and the dimensions L3 and L4 also become larger.

[0073] The dimension L3 of the first side 21 may be, for example, 1200 mm or more, 1700 mm or more, or 2200 mm or more. L3 may be, for example, 3200 mm or less, 3700 mm or less, or 4200 mm or less. The range of L3 may be determined by a first group consisting of 1200 mm, 1700 mm, and 2200 mm, and / or a second group consisting of 3200 mm, 3700 mm, and 4200 mm. The range of L3 may be determined by a combination of any one of the values ​​included in the above-mentioned first group and any one of the values ​​included in the above-mentioned second group. The range of L3 may be determined by a combination of any two of the values ​​included in the above-mentioned first group. The range of L3 may be determined by a combination of any two of the values ​​included in the above-mentioned second group. For example, it may be 1200 mm or more and 4200 mm or less, 1200 mm or more and 3700 mm or less, 1200 mm or more and 3200 mm or less, 1200 mm or more and 2200 mm or less, 1200 mm or more and 1700 mm or less, 1700 mm or more and 4200 mm or less, 1700 mm or more and 3700 mm or less, 1700 mm or more and 3200 mm or less, 1700 mm or more and 2200 mm or less, 2200 mm or more and 4200 mm or less, 2200 mm or more and 3700 mm or less, 2200 mm or more and 3200 mm or less, 3200 mm or more and 4200 mm or less, 3200 mm or more and 3700 mm or less, or 3700 mm or more and 4200 mm or less.

[0074] The dimension L4 of the second side 22 may be, for example, 1800 mm or more, 2300 mm or more, or 2800 mm or more. L4 may be, for example, 3500 mm or less, 4000 mm or less, or 4500 mm or less. The range of L4 may be determined by a first group consisting of 1800 mm, 2300 mm, and 2800 mm, and / or a second group consisting of 3500 mm, 4000 mm, and 4500 mm. The range of L4 may be determined by a combination of any one of the values ​​included in the above-mentioned first group and any one of the values ​​included in the above-mentioned second group. The range of L4 may be determined by a combination of any two of the values ​​included in the above-mentioned first group. The range of L4 may be determined by a combination of any two of the values ​​included in the above-mentioned second group. For example, it may be 1800 mm or more and 4500 mm or less, 1800 mm or more and 4000 mm or less, 1800 mm or more and 3500 mm or less, 1800 mm or more and 2800 mm or less, 1800 mm or more and 2300 mm or less, 2300 mm or more and 4500 mm or less, 2300 mm or more and 4000 mm or less, 2300 mm or more and 3500 mm or less, 2300 mm or more and 2800 mm or less, 2800 mm or more and 4500 mm or less, 2800 mm or more and 4000 mm or less, 2800 mm or more and 3500 mm or less, 3500 mm or more and 4500 mm or less, 3500 mm or more and 4000 mm or less, or 4000 mm or more and 4500 mm or less.

[0075] A side opening 23 reaching the upper end 202 may be formed in a portion of the side portion 20 as shown in Fig. 5. The side opening 23 may extend from the lower end 201 to the upper end 202 as shown in Fig. 5. Alternatively, the side opening 23 may reach the upper end 202 but not reach the lower end 201, although this is not shown.

[0076] As shown in Figs. 5 and 6, the side opening 23 may be formed in the second side 22 of the side 20. The side opening 23 may include a first side opening 231 and a second side opening 232 located in the second side 22 of the side 20. In this case, the side 20 may include an intermediate support 24 located between the first side opening 231 and the second side opening 232. As shown in Fig. 5, the intermediate support 24 may extend in the vertical direction from the bottom 15 to the cover 35. By providing the intermediate support 24, it is possible to suppress a decrease in the rigidity of the side 20 and deformation of the side 20 when the side opening 23 is in an open state. As the intermediate support 24, a support including aluminum, stainless steel, or the like can be used.

[0077] Next, the closure 30 will be described. The closure 30 is an element that can take a closed state in which the side opening 23 is closed, and an open state in which the side opening 23 is open. The closure 30 may include a door 31 that can close the side opening 23. The door 31 may be rotatable around an axis 311 attached to the side portion 20, as shown in Figs. 4 and 5. Although not shown, the axis 311 of the door 31 may be attached to the bottom portion 15.

[0078] As shown in FIG. 4, a handle 312 may be provided on the outer surface of the door 31. A fixing device 313 may be provided on the inner surface of the door 31. A fixing device 241 may be provided on the side 20 to fix the fixing device 313 by interacting with the fixing device 313. For example, one of the fixing device 313 and the fixing device 241 may be a magnetic material such as iron, and the other may be a magnet that attracts magnetic materials. As shown in FIG. 5, the fixing device 241 may be attached to the intermediate support 24. The "inner surface" refers to the surface of the components of the case 10 that is located on the side where the frame 41 is housed. The "outer surface" refers to the surface that is located opposite the "inner surface".

[0079] 6, frame 41 housed in case 10 may be supported from below by a frame support 25 (not shown). In this case, case 10 may include a retainer 28 located above frame 41 and fixed to frame support 25. This makes it possible to prevent frame 41 housed in case 10 from being displaced in the up-down direction.

[0080] Next, the cover 35 will be described. The cover 35 may be a plate member located on the upper end 202 of the side portion 20 and extending horizontally. The cover 35 can prevent foreign matter from entering the inside of the case 10. The cover 35 may be made of aluminum, stainless steel, or the like.

[0081] Next, frame support 25 will be described with reference to Fig. 7 to Fig. 9. Fig. 7 is a plan view showing a state in which frame 41 has been removed from case 10 of Fig. 6. Fig. 8 is a perspective view showing an example of frame support 25. Fig. 9 is a cross-sectional view showing an example of frame support 25.

[0082] The frame support 25 is a member that supports the frame 41 from below above the bottom 15. As shown in FIG. 7, the frame support 25 may be installed on the bottom 15 at a plurality of positions inside the case 10. At least one frame support 25 may be installed on one first side 21 or one second side 22. For example, two or more frame supports 25 may be installed on one first side 21, and two or more frame supports 25 may be installed on one second side 22. As shown in FIG. 7, a frame support 25 does not have to be installed at the position of the door 31.

[0083] As shown in FIG. 8 and FIG. 9, the frame support 25 may include a frame base 26 and a support 27. The frame base 26 is a member including a frame support surface 261 that supports the frame 41 from below. The frame base 26 may include a resin. For example, the frame support surface 261 may be made of a resin. This makes it possible to suppress damage to the frame 41 caused by contact with the frame base 26, compared to when the frame support surface 261 is made of a metal. As the resin constituting the frame support surface 261, polyvinyl chloride, silicone resin, etc. may be used. Note that the portion of the frame base 26 other than the frame support surface 261 may include a material other than resin. For example, the frame base 26 may include a main body including a metal such as aluminum or stainless steel, and a resin sheet such as a silicone resin sheet that is located on the upper surface of the main body and constitutes the frame support surface 261. The resin sheet functions as a buffer material, making it possible to suppress damage to the frame 41 caused by contact with the frame base 26.

[0084] 9, the frame base 26 may include an outer surface 263 that faces the inner surface 203 of the side portion 20. The outer surface 263 may or may not be in contact with the inner surface 203.

[0085] The reference L5 in FIG. 9 denotes the distance from the outer surface 263 to the inner end of the frame support surface 261. The distance L5 is measured along the normal direction of the inner surface 203 of the side 20 to which the frame base 26 is attached. The distance L5 is determined according to the width of the frame 41. The distance L5 may be, for example, 60 mm or more, 100 mm or more, or 150 mm or more. The distance L5 may be, for example, 250 mm or less, 300 mm or less, or 400 mm or less. The range of the distance L5 may be determined by a first group consisting of 60 mm, 100 mm, and 150 mm, and / or a second group consisting of 250 mm, 300 mm, and 400 mm. The range of the distance L5 may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The range of the distance L5 may be determined by a combination of any two of the values ​​included in the first group described above. The range of the distance L5 may be determined by a combination of any two of the values ​​included in the second group described above. For example, it may be 60 mm or more and 400 mm or less, 60 mm or more and 300 mm or less, 60 mm or more and 250 mm or less, 60 mm or more and 150 mm or less, 60 mm or more and 100 mm or less, 100 mm or more and 400 mm or less, 100 mm or more and 300 mm or less, 100 mm or more and 250 mm or less, 100 mm or more and 150 mm or less, 150 mm or more and 400 mm or less, 150 mm or more and 300 mm or less, 150 mm or more and 250 mm or less, 250 mm or more and 400 mm or less, 250 mm or more and 300 mm or less, or 300 mm or more and 400 mm or less.

[0086] The support pillars 27 are members that include a metal and are located between the frame base 26 and the bottom portion 15. The metal for the support pillars 27 may be aluminum, stainless steel, or the like.

[0087] 8 and 9, the frame base 26 may include a protrusion 262 that protrudes upward from a frame support surface 261 along the inner surface 203 of the side portion 20. The height of the protrusion 262 may be equal to or greater than the thickness of the frame 41. In this case, the above-mentioned presser 28 may be attached to the upper surface of the protrusion 262 by a fastener 282 or the like.

[0088] The reference character L6 in FIG. 9 indicates the width of the protruding portion 262. The width L6 is the maximum value of the dimension of the protruding portion 262 measured along the normal direction of the inner surface 203 of the side portion 20 to which the frame base 26 is attached. The width L6 may be, for example, 20 mm or more, 40 mm or more, or 70 mm or more. The width L6 may be, for example, 100 mm or less, 150 mm or less, or 200 mm or less. The range of the width L6 may be determined by a first group consisting of 20 mm, 40 mm, and 70 mm, and / or a second group consisting of 100 mm, 150 mm, and 200 mm. The range of the width L6 may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The range of the width L6 may be determined by a combination of any two of the values ​​included in the first group described above. The range of the width L6 may be determined by a combination of any two of the values ​​included in the second group described above. For example, it may be 20 mm or more and 200 mm or less, 20 mm or more and 150 mm or less, 20 mm or more and 100 mm or less, 20 mm or more and 70 mm or less, 20 mm or more and 40 mm or less, 40 mm or more and 200 mm or less, 40 mm or more and 150 mm or less, 40 mm or more and 100 mm or less, 40 mm or more and 70 mm or less, 70 mm or more and 200 mm or less, 70 mm or more and 150 mm or less, 70 mm or more and 100 mm or less, 100 mm or more and 200 mm or less, 100 mm or more and 150 mm or less, or 150 mm or more and 200 mm or less.

[0089] 9, the presser 28 may include a facing region 281 that faces the frame support surface 261 of the frame base 26 in the up-down direction. The facing region 281 may overlap the frame 41 stored in the case 10 in a plan view.

[0090] The facing region 281 of the presser 28 may be in contact with the frame 41 or may not be in contact with the frame 41. When the facing region 281 of the presser 28 is not in contact with the frame 41, the gap between the facing region 281 of the presser 28 and the frame 41 may be, for example, 1 mm or more, 2 mm or more, 3 mm or more, or 5 mm or more. The gap may be, for example, 10 mm or less, 20 mm or less, 30 mm or less, or 50 mm or less. The range of the gap may be determined by a first group consisting of 1 mm, 2 mm, 3 mm, and 5 mm, and / or a second group consisting of 10 mm, 20 mm, 30 mm, and 50 mm. The range of the gap may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The range of the gap may be determined by a combination of any two of the values ​​included in the first group described above. The gap range may be defined by a combination of any two of the values ​​included in the second group mentioned above.For example, it may be 1 mm or more and 50 mm or less, may be 1 mm or more and 30 mm or less, may be 1 mm or more and 20 mm or less, may be 1 mm or more and 10 mm or less, may be 1 mm or more and 5 mm or less, may be 1 mm or more and 3 mm or less, may be 1 mm or more and 2 mm or less, may be 2 mm or more and 50 mm or less, may be 2 mm or more and 30 mm or less, may be 2 mm or more and 20 mm or less, may be 2 mm or more and 10 mm or less, may be 2 mm or more and 5 mm or less, may be 2 mm or more and 3 mm or less, may be 3 mm or more and 50 mm or less, or 3 mm or more and 30 mm or less, or may be 3 mm or more and 20 mm or less, or may be 3 mm or more and 10 mm or less, or may be 3 mm or more and 5 mm or less, or may be 5 mm or more and 50 mm or less, or may be 5 mm or more and 30 mm or less, or may be 5 mm or more and 20 mm or less, or may be 5 mm or more and 10 mm or less, or may be 10 mm or more and 50 mm or less, or may be 10 mm or more and 30 mm or less, or may be 10 mm or more and 20 mm or less, or may be 20 mm or more and 50 mm or less, or may be 20 mm or more and 30 mm or less and 30 mm or more and 50 mm or less.

[0091] The presser 28 may contain a resin. For example, the lower surface of the facing region 281 of the presser 28 may be made of a resin. This makes it possible to suppress damage to the frame 41 caused by contact with the presser 28, compared to when the presser 28 is made of a metal. As the resin of the presser 28, polyvinyl chloride, silicone resin, etc. can be used. Note that the portion of the presser 28 other than the lower surface of the facing region 281 may contain a material other than resin. For example, the presser 28 may include a main body containing a metal such as aluminum or stainless steel, and a resin sheet such as a silicone resin sheet that is located on the lower surface of the main body and forms the lower surface of the presser 28. The resin sheet functions as a buffer material, making it possible to suppress damage to the frame 41 caused by contact with the presser 28.

[0092] 9, the presser 28 may include an outer surface 283 that faces the inner surface 203 of the side portion 20. The outer surface 283 may or may not be in contact with the inner surface 203.

[0093] The reference character L7 in FIG. 9 indicates the distance from the outer surface 283 to the inner end of the lower surface of the presser 28. The distance L7 is greater than the width L6 of the protruding portion 262. The distance L7 may be, for example, 30 mm or more, 50 mm or more, or 100 mm or more. The distance L7 may be, for example, 150 mm or less, 200 mm or less, or 250 mm or less. The range of the distance L7 may be determined by a first group consisting of 30 mm, 50 mm, and 100 mm, and / or a second group consisting of 150 mm, 200 mm, and 250 mm. The range of the distance L7 may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The range of the distance L7 may be determined by a combination of any two of the values ​​included in the first group described above. The range of the distance L7 may be determined by a combination of any two of the values ​​included in the second group described above. For example, it may be 30 mm or more and 250 mm or less, 30 mm or more and 200 mm or less, 30 mm or more and 150 mm or less, 30 mm or more and 100 mm or less, 30 mm or more and 50 mm or less, 50 mm or more and 250 mm or less, 50 mm or more and 200 mm or less, 50 mm or more and 150 mm or less, 50 mm or more and 100 mm or less, 100 mm or more and 250 mm or less, 100 mm or more and 200 mm or less, 100 mm or more and 150 mm or less, 150 mm or more and 250 mm or less, 150 mm or more and 200 mm or less, or 200 mm or more and 250 mm or less.

[0094] 9, the upper surface of the frame 41 may include a third frame surface 41c that is located on the second frame surface 41b side in the vertical direction from the first frame surface 41a to which the mask 50 is fixed and is located on the outer side in the horizontal direction. In this case, the facing region 281 of the presser 28 may overlap with the third frame surface 41c of the frame 41 in a plan view. The frame 41 may also include an inner side surface 41d that is displaced outward from the first frame surface 41a side toward the second frame surface 41b side. The "outer side" refers to the side that is away from the center point of the opening 42 of the frame 41 in a plan view.

[0095] As shown in Fig. 9, the presser 28 includes an upper surface 284. The upper surface 284 is located on the opposite side of the lower surface of the presser 28 facing the frame 41 in the vertical direction D3. As shown in Fig. 9, the upper surface 284 may be located above the first frame surface 41a. This makes it possible to prevent the worker or the tool from coming into contact with the frame 41 or the mask 50 fixed to the frame 41 when the worker or the tool removes the presser 28. Although not shown, the upper surface 284 may be located on the same plane as the first frame surface 41a, or may be located below the first frame surface 41a.

[0096] Next, a method for removing the frame 41 stored in the case 10 will be described with reference to Figs. 10 to 15B. Fig. 10 is a cross-sectional view showing an example of the case 10 in which the frame 41 is stored. The case 10 in which the frame 41 is stored is also referred to as a frame storage body. Figs. 11 and 12 are a cross-sectional view and a plan view showing a state in which the cover 35 is removed from the case 10 in Fig. 10 and the door 31 is opened. Figs. 13 and 14 are a plan view and a cross-sectional view showing a process of inserting the fork 71 into the case 10 through the side opening 23 of the case 10. Fig. 15A is a cross-sectional view showing a process of lifting the frame 41 with the fork 71. The cross-sectional views of Figs. 10, 11, 14, and 15A are cross-sectional views of the case 10 cut at the position of the line AA shown in Fig. 6.

[0097] First, as shown in Figures 11 and 12, the cover 35 is removed from the upper end 202 of the side portion 20. Also, a closure 30 such as a door 31 is moved to open the side opening 23 of the side portion 20. If the case 10 is equipped with a retainer 28, the retainer 28 is removed by an operator or a tool.

[0098] Also, as shown in FIG. 12, a lifter 70 is prepared. The lifter 70 may include a fork 71, a fork frame 72, a frame 73, and a base 74. The fork 71 may be attached to the fork frame 72. The fork frame 72 may be driven in the vertical direction along the frame 73 by a driving mechanism (not shown). The base 74 may support the frame 73 from below. The base 74 may be supported from below by a moving mechanism such as casters. Alternatively, the base 74 may be supported from below by a member (not shown) that does not move along the floor surface 9, such as a support column.

[0099] As shown in FIG. 12, the second side portion 22 includes a first boundary surface 221 and a second boundary surface 222. The first boundary surface 221 defines a first end of the side opening 23 in the second direction D2. The second boundary surface 222 defines a second end of the side opening 23 in the second direction D2. Reference character L8 indicates the distance in the second direction D2 from the first first side portion 21 to the first boundary surface 221. Reference character L9 indicates the distance in the second direction D2 from the second first side portion 21 to the second boundary surface 222. The distances L8 and L9 may be determined so that the fork 71 contacts the second region 412 at a position somewhat away from the first region 411. This allows the distances L10 and L11, which will be described later, to be increased.

[0100] The distances L8 and L9 may be, for example, 200 mm or more, 300 mm or more, or 500 mm or more. The distances L8 and L9 may be, for example, 700 mm or less, 1000 mm or less, or 1300 mm or less. The ranges of the distances L8 and L9 may be determined by a first group consisting of 200 mm, 300 mm, and 500 mm, and / or a second group consisting of 700 mm, 1000 mm, and 1300 mm. The ranges of the distances L8 and L9 may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The ranges of the distances L8 and L9 may be determined by a combination of any two of the values ​​included in the first group described above. The ranges of the distances L8 and L9 may be determined by a combination of any two of the values ​​included in the second group described above. For example, it may be 200 mm or more and 1300 mm or less, 200 mm or more and 1000 mm or less, 200 mm or more and 700 mm or less, 200 mm or more and 500 mm or less, 200 mm or more and 300 mm or less, 300 mm or more and 1300 mm or less, 300 mm or more and 1000 mm or less, 300 mm or more and 700 mm or less, 300 mm or more and 500 mm or less, 500 mm or more and 1300 mm or less, 500 mm or more and 1000 mm or less, 500 mm or more and 700 mm or less, 700 mm or more and 1300 mm or less, 700 mm or more and 1000 mm or less, or 1000 mm or more and 1300 mm or less. Distance L8 may be the same as distance L9 or may be different.

[0101] The ratios L8 / L4 and L9 / L4 of the distances L8 and L9 to the dimension L4 of the second side portion 22 may be, for example, 0.1 or more, 0.15 or more, or 0.20 or more. L8 / L4 and L9 / L4 may be, for example, 0.25 or less, 0.30 or less, or 0.35 or less. The ranges of L8 / L4 and L9 / L4 may be defined by a first group consisting of 0.1, 0.15, and 0.20, and / or a second group consisting of 0.25, 0.30, and 0.35. The ranges of L8 / L4 and L9 / L4 may be defined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The ranges of L8 / L4 and L9 / L4 may be defined by a combination of any two of the values ​​included in the first group described above. The ranges of L8 / L4 and L9 / L4 may be determined by a combination of any two of the values ​​included in the second group described above. For example, they may be 0.1 to 0.35, 0.1 to 0.30, 0.1 to 0.25, 0.1 to 0.20, 0.1 to 0.15, 0.15 to 0.35, 0.15 to 0.30, 0.15 to 0.25, 0.15 to 0.20, 0.20 to 0.35, 0.20 to 0.30, 0.20 to 0.25, 0.25 to 0.35, 0.25 to 0.30, or 0.30 to 0.35.

[0102] 13 and 14, an insertion step is performed in which the forks 71 are inserted between the lower surface of the frame 41 and the bottom 15 of the case 10 along the first direction D1 through the side opening 23. For example, one of the two forks 71 is inserted into the first side opening 231, and the other is inserted into the second side opening 232. In this embodiment, since the frame 41 is supported above the bottom 15 by the above-mentioned frame support 25, the forks 71 can be inserted as shown in FIG.

[0103] 14, the maximum distance H2 of the base 74 or the casters 75 from the floor surface 9 may be smaller than the distance H1 from the floor surface 9 to the bottom 15. This allows the base 74 and casters 75 of the lifter 70 to be inserted between the floor surface 9 and the bottom 15 of the case 10.

[0104] 15A, a lifting step is performed in which the forks 71 are raised to lift the frame 41 supported by the frame support 25. For example, as shown in FIG. 15A, the forks 71 are raised to a position above the upper end 202 of the side portion 20 of the case 10. In this manner, the frame 41 can be removed from the case 10.

[0105] 15B is a cross-sectional view showing frame 41 being lifted by fork 71. FIG. 15B is a cross-sectional view of case 10 cut at line BB shown in FIG. 13. Frame 41 includes opening 42. Frame 41 including opening 42 has a smaller weight than frame 41 not including opening 42. For this reason, when frame 41 is lifted by fork 71 while being parallel to the horizontal direction, frame 41 is unlikely to bend. If a member not including an opening, such as a glass plate, is lifted by fork 71, it is expected that a large bend will occur.

[0106] 15B, symbols L10 and L11 represent the dimensions of the portions of frame 41 located outside fork 71. The dimensions L10 and L11 can be increased by increasing the distances L8 and L9 described above. This makes it easier for fork 71 to place frame 41 on a platform such as a stage.

[0107] Thereafter, the frame 41 may be carried into an attachment device for attaching the mask 50 to the frame 41. For example, the frame 41 may be placed on a stage inside the attachment device using a fork 71. In the attachment device, the mask 50 may be attached to the frame 41 such that the mask 50 including the through-holes 56 is supported by the frame 41 in a state where the mask 50 is pulled in the surface direction of the mask 50. In this manner, the mask device 40 including the frame 41 and the mask 50 can be obtained.

[0108] After the mask device 40 is fabricated by attaching the mask 50 to the frame 41, the mask device 40 may be stored in the case 10. Fig. 16 and Fig. 17A are a plan view and a cross-sectional view showing the case 10 in a state in which the mask device 40 is stored, with the cover 35 removed. As shown in Fig. 17A, the upper surface 284 of the presser 28 may be located lower than the first surface 55a of the mask 50.

[0109] 17B is a cross-sectional view showing another example of the case 10 in a state where the cover 35 is removed. As shown in FIG. 17B, the upper surface 284 of the presser 28 may be located above the first surface 55a of the mask 50.

[0110] In a method for storing the mask device 40 or the frame 41 in the case 10, the steps may be reversed from the above-described removal method.

[0111] For example, first, an insertion step is performed in which the frame 41 and the fork 71 supporting the frame 41 from below are inserted into the inside of the case 10 through the open side opening 23. Next, a lowering step is performed in which the fork 71 is lowered to place the frame 41 on the frame support surface 261 of the frame support 25. After that, the fork 71 is pulled out of the case 10. Also, the door 31 is moved to close the side opening 23. Also, the cover 35 is placed over the upper end 202 of the side 20. In this manner, the case 10 in which the frame 41 or the mask device 40 is stored can be obtained.

[0112] Further, as a method for removing the mask device 40 stored in the case 10, the above-mentioned removal method may be used.

[0113] According to this embodiment, the frame 41 or the mask device 40 can be removed from the case 10 by using a machine such as the lifter 70. This makes it possible to improve the stability of the removal process compared to a case where a person lifts the frame 41 or the mask device 40 to remove the frame 41 or the mask device 40 from the case 10. This makes it possible to prevent damage such as deformation of the frame 41 or the mask device 40.

[0114] It should be noted that various modifications can be made to the above-described embodiment. Hereinafter, other embodiments will be described with reference to the drawings as necessary. In the following description and the drawings used in the following description, the same reference numerals as those used for the corresponding parts in the above-described embodiment will be used for parts that can be configured similarly to the above-described embodiment, and duplicated descriptions will be omitted. In addition, if it is clear that the effects obtained in the above-described embodiment can also be obtained in other embodiments, the description may be omitted.

[0115] In the above-described embodiment, an example has been shown in which the side opening 23 is formed in the second side portion 22, which is longer than the first side portion 21, of the side portions 20 of the case 10. However, this is not limited to this, and as shown in Fig. 18, the side opening 23 may be formed in the first side portion 21, which is shorter than the second side portion 22, and a closing device 30, such as a door 31, may be provided at the side opening 23.

[0116] In the above embodiment, an example has been shown in which the door 31 is rotatable around the shaft 311. However, the form of the door 31 is not particularly limited. For example, as shown in Fig. 19, the door 31 may be configured to slide along the second direction D2.

[0117] In the example shown in Fig. 19, the dimension of case 10 in first direction D1 is larger than that of the example shown in Fig. 6 by the thickness of door 31. From the viewpoint of miniaturization of case 10, case 10 shown in Fig. 6 is more advantageous than the case shown in Fig. 19.

[0118] In the above embodiment, an example has been shown in which the closure 30 provided in the side opening 23 includes a door 31 that can rotate around an axis 311 attached to the side 20 or the bottom 15. That is, an example has been shown in which the closure 30 is attached to the side 20 or the bottom 15 in both the closed and open states. However, this is not limited thereto, and the closure 30 may include a closure member 32 that can be separated from the side 20 as shown in FIG. 20. That is, the closure 30 may be an element that is separated from the side 20 in the open state. The closure member 32 is, for example, a plate. When the closure 30 is a member that is separated from the side 20 in the open state, the closure 30 may be a member that is integral with the cover 35, or may be a member that is separate from the cover 35.

[0119] Fig. 21 is a plan view showing an example of the case 10 with the cover 35 removed and the frame 41 not stored. As shown in Fig. 21, the bottom 15 may include a guide 18 that guides the fork 71 inserted from the side opening 23. This makes it possible to prevent the insertion direction of the fork 71 from deviating from the first direction D1 or the second direction D2.

[0120] The guide 18 may include, for example, guide protrusions 181 protruding upward from the bottom 15. In this case, the space between the guide protrusions 181 may serve as a guide path for guiding the forks 71. The width of the guide path is determined by the distance W between the guide protrusions 181 in a direction perpendicular to the insertion direction of the forks 71.

[0121] The distance W may be, for example, 100 mm or more, 150 mm or more, 200 mm or more, or 250 mm or more. The distance W may be, for example, 300 mm or less, 350 mm or less, 400 mm or less, or 450 mm or less. The range of the distance W may be determined by a first group consisting of 100 mm, 150 mm, 200 mm, and 250 mm, and / or a second group consisting of 300 mm, 350 mm, 400 mm, and 450 mm. The range of the distance W may be determined by a combination of any one of the values ​​included in the first group described above and any one of the values ​​included in the second group described above. The range of the distance W may be determined by a combination of any two of the values ​​included in the first group described above. The range of the distance W may be determined by a combination of any two of the values ​​included in the second group described above.For example, it may be 100 mm or more and 450 mm or less, 100 mm or more and 400 mm or less, 100 mm or more and 350 mm or less, 100 mm or more and 300 mm or less, 100 mm or more and 250 mm or less, 100 mm or more and 200 mm or less, 100 mm or more and 150 mm or more and 150 mm or more and 450 mm or less, 150 mm or more and 400 mm or less, 150 mm or more and 350 mm or less, 150 mm or more and 300 mm or less, 150 mm or more and 250 mm or less, 150 mm or more and 200 mm or more and 450 mm or less. Alternatively, it may be 200 mm or more and 400 mm or less, 200 mm or more and 350 mm or less, 200 mm or more and 300 mm or less, 200 mm or more and 250 mm or less, 250 mm or more and 450 mm or less, 250 mm or more and 400 mm or less, 250 mm or more and 350 mm or less, 250 mm or more and 300 mm or less, 300 mm or more and 450 mm or less, 300 mm or more and 400 mm or less, 300 mm or more and 350 mm or less, 350 mm or more and 450 mm or less, 350 mm or more and 400 mm or less, 400 mm or more and 450 mm or less.

[0122] 22 is a plan view showing an example of the lifter 70. The lifter 70 may include a receiver 76 located on the fork 71. When the lifter 70 lifts the frame 41, the receiver 76 is located between the frame 41 and the fork 71.

[0123] The receiver 76 may contain resin, which can prevent damage to the frame 41 caused by contact with the lifter 70. The resin that can be used to form the receiver 76 may be polyvinyl chloride, silicone resin, or the like.

[0124] Fig. 23 is a cross-sectional view of the fork 71 and the receiver 76 of Fig. 22 taken along line CC. The receiver 76 may include a first portion 761, a second portion 762, and a third portion 763. The first portion 761 supports the frame 41 from below. The second portion 762 and the third portion 763 may protrude upward from the first portion 761. The frame 41 may be located between the second portion 762 and the third portion 763 in the horizontal direction. The second portion 762 and the third portion 763 can suppress movement of the frame 41 in the horizontal direction.

Claims

[Claim 1] A method for manufacturing a mask device comprising a mask and a frame, comprising the steps of: the mask includes a plurality of through holes; the frame supports the mask in a tensioned state; The manufacturing method includes: fixing the mask to the frame in a tensioned state; and inserting the frame into the case while the frame is supported from below by a fork of a lifter. The case is The bottom and a side portion including a lower end located on the bottom side and an upper end located opposite to the lower end, the side portion having a side opening formed therein and reaching the upper end; A closure member that can assume a closed state in which the side opening is closed and an open state in which the side opening is open; a frame support including a frame support surface that supports the frame above the bottom; and a cover positioned over the top end of the side portion.

Images