Resist composition and method for producing resist pattern

Abstract

To provide a resist composition from which a resist pattern having a good pattern collapse margin can be produced.SOLUTION: The resist composition contains an acid generator containing a salt represented by formula (I). When the resist composition contains a resin containing a structural unit having an acid-labile group, the content of the resin is 30 mass% or less based on the solid content of the resist composition.SELECTED DRAWING: None

Description

Technical Field

[0001] The present invention relates to a resist composition used for semiconductor microfabrication and a method for manufacturing a resist pattern.

Background Art

[0002] Patent Document 1 describes a resist composition containing an acid generator containing a salt represented by the following formula and a resin having an acid-labile group. TIFF2025084122000001.tif25103

[0003] Patent Document 2 describes a salt represented by the following formula and a resist composition containing the salt as an acid generator, respectively. TIFF2025084122000002.tif3356

[0004] Patent Document 3 describes a salt represented by the following formula and a resist composition containing the salt as an acid generator, respectively. TIFF2025084122000003.tif5663

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0006] The present invention provides a salt that forms a resist pattern with better pattern collapse resistance (PCM) than a resist pattern formed by a resist composition containing the above salt.

Means for Solving the Problems

[0007] The present invention includes the following inventions. [1] A resist composition containing an acid generator, wherein the acid generator contains a salt represented by formula (I). TIFF2025084122000004.tif62150[In formula (I), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1. When X is a sulfur atom, m10 is 1; when X is an iodine atom, m10 is 0. R 1 、R 2 and R 3 each independently represents *-X 1 -R 10 、or *-X 1 -L 10 -X 2 -R 10 . X 1 and X 2 each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-. L 10 represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. R 4 、R 5 and R 6 each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X 1 -R 10 、or *-X 1 -L 10 -X 2 -R 10 . The hydrocarbon group may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO- or -SO 2 -. R 7 、R8 and R 9 each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X 1 -R 10 or *-X 1 -L 10 -X 2 -R 10 wherein the hydrocarbon group may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO- or -SO 2 -. Also, when X is a sulfur atom, R 7 and R 8 or R 8 and R 9 may combine to form a ring containing S + -. -CH 2 - contained in the ring may be replaced by -O-, -S-, -CO-, -SO- or -SO 2 -. R 7 and R 8 or R 8 and R 9 forming the ring may be a single bond formed between two benzene rings bonded to S + . R 10 represents a group represented by formula (IC). A 1 A 2 and A 3 each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -. Ar 1 Ar 2 and Ar 3 each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heteroaromatic hydrocarbon group having 4 to 9 carbon atoms. m1 represents any integer from 0 to 5, and when m1 is 2 or more, the groups within multiple parentheses may be the same as or different from each other. m2 represents any integer from 0 to 5. When m2 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. m3 represents any integer from 0 to 5. When m3 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. m4 represents any integer from 0 to 4. When m4 is 2 or more, the plurality of Rs 4 may be the same as or different from each other. m5 represents any integer from 0 to 4. When m5 is 2 or more, the plurality of Rs 5 may be the same as or different from each other. m6 represents any integer from 0 to 4. When m6 is 2 or more, the plurality of Rs 6 may be the same as or different from each other. m7 represents any integer from 0 to 5. When m7 is 2 or more, the plurality of Rs 7 may be the same as or different from each other. m8 represents any integer from 0 to 5. When m8 is 2 or more, the plurality of Rs 8 may be the same as or different from each other. m9 represents any integer from 0 to 5. When m9 is 2 or more, the plurality of Rs 9 may be the same as or different from each other. However, 0 ≦ m1 + m7 ≦ 5, 0 ≦ m2 + m8 ≦ 5, 0 ≦ m3 + m9 ≦ 5, and at least one of m1, m2, m3, m7, m8, and m9 represents an integer of 1 or more, and R 1 , R 2 , R 3 , R 7 , R 8 and R 9 and at least one of R 1 represents *-X 10 -R 1 or *-X 10 -L 2 -X 10 -R AI - represents an anion having a group represented by formula (IC). TIFF2025084122000005.tif2571 (In formula (IC), RA represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents any integer from 0 to 2. When u1 is 2, a plurality of Rs A are either identical or different. s1 represents 1 or 2. t1 represents 0 or 1. However, the sum of s1 and t1 is 1 or 2. L 12 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. * represents a bonding site.)] [2]A 1 is **-X 01 -L 01 - or **-L 01 -X 01 -, and A 2 is **-X 02 -L 02 - or **-L 02 -X 02 -, and A 3 is **-X 03 -L 03 - or **-L 03 -X 03 -, and X 01 , X 02 and X 03 each independently represent -O-, -CO-, -S- or -SO 2 -, and L 01 , L 02 and L 03 each independently represent a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -).), and ** represents the bonding site with the benzene ring to which X + is bonded. The resist composition according to [1].​​​​​​​​​​ [3]X 01 、X 02 and X 03 are each independently -O- or -S- in the resist composition according to [2]. [4]L 01 、L 02 and L 03 are each independently a single bond or an alkanediyl group having 1 to 6 carbon atoms (wherein -CH 2 - in the alkanediyl group may be replaced by -O- or -CO-.) in the resist composition according to [2] or [3]. [5] The resist composition according to any one of [1] to [4], wherein X is a sulfur atom. [6] Ar 1 、Ar 2 and Ar 3 are each independently a group derived from a benzene ring, a naphthalene ring, a furan ring or a thiophene ring in the resist composition according to any one of [1] to [5]. [7] AI - is an anion represented by formula (I-A) or formula (I-B) in the resist composition according to any one of [1] to [6]. TIFF2025084122000006.tif1390[In formula (I-A), L b1 represents a single bond or an optionally substituted (nb1 + 1)-valent hydrocarbon group, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. L b2 represents a single bond or an optionally substituted divalent hydrocarbon group having 1 to 24 carbon atoms, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. Y b1 represents a methyl group having one or more groups represented by formula (IC) or a cyclic hydrocarbon group having 3 to 24 carbon atoms and having one or more groups represented by formula (IC), and -CH 2 - in the cyclic hydrocarbon group may be -O-, -S-, -CO- or -SO2 - may be replaced, and the cyclic hydrocarbon group may have a substituent. nb1 represents any integer from 1 to 6. When nb1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.] TIFF2025084122000007.tif1187[In formula (I-B), A 1 represents a nitrogen atom or a carbon atom. L b2 and Y b1 represent the same meaning as in formula (I-A). nb5 represents 2 or 3. When nb5 is 2, A 1 represents a nitrogen atom, and when nb5 is 3, A 1 represents a carbon atom. The groups in the plurality of parentheses may be the same as or different from each other. The two groups in the parentheses may combine to form a ring containing A 1 .] [8]AI - The resist composition according to [7], wherein [8]AI is an anion represented by formula (I-A1) or formula (I-A2). TIFF2025084122000008.tif27129[In formula (I-A1), L b2 and Y b1 represent the same meaning as in formula (I-A). Q b1 , Q b2 , Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents any integer from 0 to 6. When z1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or a (nb2 + 1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group is -O-, -S-, -CO- or -SO2 may be replaced by -. nb2 represents any integer from 1 to 3. When nb2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. TIFF2025084122000009.tif2596 [In formula (I-A2), L b2 and Y b1 represent the same meaning as in formula (I-A). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-. nb4 represents any integer from 1 to 5. When nb4 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. nb3 represents any integer from 0 to 4. When nb3 is 2 or more, the plurality of R b1 may be the same as or different from each other. However, 1 ≦ nb4 + nb3 ≦ 5 is satisfied. [9]R 1 R 2 R 3 R 4 R 5 R 6 R 7 R 8 and R 9 The total number of the groups represented by formula (IC) contained in is 2 or more, and the resist composition according to any one of [1] to [8].

[10] The resist composition according to any one of [1] to [9], comprising a compound having a phenolic hydroxy group or a benzoic acid carboxy group, or a compound in which the phenolic hydroxy group or the benzoic acid carboxy group of these compounds is protected by an acid-labile group.

[11] The resist composition according to any one of [1] to

[10] , containing one or more resins, and at least one of the one or more resins contains a structural unit represented by one or more formulas (a2-A) or a structural unit represented by one or more formulas (a1-4). TIFF2025084122000010.tif30128[In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH 2 - contained in the alkanediyl group may be replaced by -O-, -CO-, or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5, and when nA2 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4, and when na21 is 2 or more, the plurality of R a27 may be the same as or different from each other. mc represents any integer from 0 to 2.] TIFF2025084122000011.tif31119[In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH contained in the alkanediyl group 2 - may be replaced by -O-, -CO- or -NR a18 -. R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with -C-O- to which they are bonded, and -CH contained in the hydrocarbon group and the divalent hydrocarbon group 2 - may be replaced by -O- or -S-. na1 represents any integer from 1 to 5, and when na1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. na11 represents any integer from 0 to 4, and when na11 is 2 or more, the plurality of R a17 may be the same as or different from each other. mc represents any integer from 0 to 2.

[12] The resist composition according to

[11] , containing a resin containing a structural unit represented by the formula (a2-A).

[13] The resist composition according to

[11] or

[12] , containing a resin containing a structural unit represented by the formula (a2-D). TIFF2025084122000012.tif51106[in formula (a2-D), R a2 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH 2 - contained in the alkanediyl group may be replaced by -O-, -CO-, or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R a21 and R a22 each independently represent a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents any integer from 1 to 5. When nD2 is 2 or more, the groups in multiple parentheses may be the same as or different from each other. nD22 represents any integer from 0 to 4. When nD22 is 2 or more, the multiple R a27 may be the same as or different from each other. However, 1 ≦ nD2 + nD22 ≦ 5.]

[14] With respect to the solid content of the resist composition, the resist composition according to any one of [1] to

[13] , wherein the content of the salt represented by the formula (I) is 70% by mass or more.

[15] With respect to the solid content of the resist composition, The total content of the salt represented by the formula (I) and the resin containing the structural unit represented by the formula (a2-A) or the structural unit represented by the formula (a1-4) is 80% by mass or more, and the resist composition according to any one of

[11] to

[14] .

[16] The resist composition according to any one of [1] to

[15] , further containing a salt that generates an acid having a lower acidity than the acid generated from the acid generator.

[17] (1) A step of applying the resist composition according to any one of [1] to

[16] onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer, which is a method for manufacturing a resist pattern.

Effect of the Invention

[0008] By using the resist composition using the salt of the present invention, a resist pattern can be manufactured with good pattern collapse resistance (PCM).

Mode for Carrying Out the Invention

[0009] In this specification, the “(meth)acrylic monomer” means “at least one of an acrylic monomer and a methacrylic monomer”. Descriptions such as “(meth)acrylate” and “(meth)acrylic acid” also represent the same meaning. Among the groups described in this specification, those that can take both a linear structure and a branched structure may be either one. -CH contained in a hydrocarbon group, etc. 2 - is -O-, -S-, -SO-, -CO-, -NR- or -SO 2When replaced with "-", the same examples shall apply to each group, and the number of carbon atoms before replacement shall be the number of carbon atoms of the hydrocarbon group or the like. The "combined group" means a group formed by combining two or more of the exemplified groups by appropriately changing their valences, bonding forms, etc. "Derived from" or "induced" means that the polymerizable C=C bond contained in the molecule becomes a -C-C- group (single bond) by polymerization. When stereoisomers exist, all stereoisomers are included. The "acid-labile group" has a leaving group and, when contacted with an acid (e.g., trifluoromethanesulfonic acid, etc.), the leaving group leaves to form a hydrophilic group (e.g., carboxy group or hydroxy group, etc.). The "base-labile group" has a leaving group and, when contacted with a base (e.g., trimethylamine, etc.), the leaving group leaves to form a hydrophilic group (e.g., carboxy group or hydroxy group, etc.). Each group may have any position and number of hydrogen atoms contained in the group replaced by a bond depending on the number of substituents, etc. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the group being substituted. In the present specification, the "solid content of the resist composition" means the total of the components excluding the solvent (E) described later from the total amount of the resist composition.

[0010] [Resist Composition] The resist composition of the present invention contains an acid generator. The acid generator contains a salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)"). The resist composition of the present invention may further contain an acid generator other than the salt represented by formula (I) (hereinafter sometimes referred to as "compound (B)"). Further, the resist composition of the present invention may contain a crosslinking agent and / or a resin, or may be a molecular resist that does not contain a resin. When the resist composition of the present invention contains a resin having a structural unit having an acid-labile group in which a hydroxy group such as an alcoholic hydroxy group is protected by an acid-labile group, the content of the structural unit having an acid-labile group in which a hydroxy group such as an alcoholic hydroxy group is protected by an acid-labile group is 1 mol% or less, preferably 0.1 mol% or less, based on all the structural units constituting all the resins containing the structural unit having an acid-labile group in which a hydroxy group such as an alcoholic hydroxy group is protected by an acid-labile group. Substantially, it is preferable that the resist composition of the present invention does not contain a resin having a structural unit having an acid-labile group in which a hydroxy group such as an alcoholic hydroxy group is protected by an acid-labile group. The resist composition of the present invention preferably further contains a quencher (hereinafter sometimes referred to as "quencher (C)") such as a salt that generates an acid having a lower acidity than the acid generated from the acid generator, and more preferably contains a solvent (hereinafter sometimes referred to as "solvent (E)").

[0011] 〔Acid generator〕 The resist composition of the present invention contains a salt represented by formula (I) as an acid generator. <Salt represented by formula (I)> The present invention relates to a salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)"). Among salts (I), the side having a positive charge may be referred to as "cation (I)", and the side having a negative charge may be referred to as "anion (I)". 〔Cation (I)〕 The cation (I) of the salt represented by formula (I) is a cation represented by formula (I-C). TIFF2025084122000013.tif62157 [In formula (I-C), all symbols have the same meanings as those in formula (I), respectively.]

[0012] R 1 、R 2 、R 3 、R 4 、R 5 、R6 and R 7 and R 8 and R 9 The X contained in 1 is preferably *-CO-O-, *-O- or *-O-CO-O- (* represents the bonding site to Ar 1 , Ar 2 , Ar 3 or a benzene ring). R 1 and R 2 and R 3 and R 4 and R 5 and R 6 and R 7 and R 8 and R 9 The X contained in 2 is preferably *-CO-O-, *-O-CO- or *-O-CO-O- (* represents the bonding site to L 10 ), more preferably *-CO-O- or *-O-CO-. R 1 and R 2 and R 3 and R 4 and R 5 and R 6 and R 7 and R 8 and R 9 The L contained in 10 As the hydrocarbon group in, chain hydrocarbon groups such as alkanediyl groups, monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups can be mentioned, and groups formed by combining two or more of these groups (for example, hydrocarbon groups formed from alicyclic hydrocarbon groups and alkanediyl groups, etc.) may also be used. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The ends of the branched alkanediyl groups may be alkyl groups such as methyl group. The number of carbon atoms of the chain hydrocarbon group may be 1 to 24, preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 9, even more preferably 1 to 6, and even more preferably 1 to 4. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following groups. The bonding site can be at any position. TIFF2025084122000014.tif46168Specifically, examples of the alicyclic hydrocarbon group include monocyclic divalent alicyclic hydrocarbon groups which are monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group, and Examples of the polycyclic divalent alicyclic hydrocarbon group include polycyclic spiro rings such as a spirocycloalkane diyl group having a cycloalkyl group such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, a spirocyclohexane-1,2'-cyclopentane group, a spiroadamantane-2,3'-cyclopentane group, etc., a norbornyl group or an adamantyl group, and a cycloalkyl group spiro-bonded thereto respectively. The carbon number of the alicyclic hydrocarbon group may be 3 to 24, preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc., and aromatic hydrocarbon groups. The carbon number of the aromatic hydrocarbon group may be 6 to 24, preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10. Examples of the group combined with two or more types include a group combining an alicyclic hydrocarbon group and an alkanediyl group, a group combining an aromatic hydrocarbon group and an alkanediyl group, and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to X 1 or X 2 . Examples of the group combining an alicyclic hydrocarbon group and an alkanediyl group include, for example, -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-, etc. Examples of the group combining an aromatic hydrocarbon group and an alkanediyl group include, for example, -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-, etc. Examples of a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-, and the like. L 10 The -CH contained in the hydrocarbon group having 1 to 28 carbon atoms of 2 - may be replaced by -O-, -S-, -SO 2 - or -CO-. L 10 When the -CH contained in the hydrocarbon group having 1 to 28 carbon atoms of 2 - is replaced by -O-, -S-, -SO 2 - or -CO-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the hydrocarbon group. Examples of a group in which -CH contained in the hydrocarbon group 2 - is replaced by -O-, -S-, -SO 2 - or -CO- include a hydroxy group (a group in which -CH contained in the methyl group 2 - is replaced by -O-), a carboxy group (a group in which -CH contained in the ethyl group 2 -CH 2 - is replaced by -O-CO-), a thiol group (a group in which -CH contained in the methyl group 2 - is replaced by -S-), an oxy group (a group in which -CH contained in the methylene group 2 - is replaced by -O-), a carbonyl group (a group in which -CH contained in the methylene group 2 - is replaced by -CO-), a thio group (a group in which -CH contained in the methylene group 2 - is replaced by -S-), a sulfonyl group (a group in which -CH contained in the methylene group 2 - is replaced by -SO 2 -), an alkoxy group (a group in which -CH at any position contained in the alkyl group 2 - is replaced by -O-), an alkylthio group (a group in which -CH at any position contained in the alkyl group 2 - is replaced by -S-), an alkylsulfonyl group (a group in which -CH at any position contained in the alkyl group 2 - is replaced by -SO 2-replaced group), alkoxycarbonyl group (any position -CH in the alkyl group 2 -CH 2 -is replaced by -O-CO-), alkylcarbonyl group (any position -CH in the alkyl group 2 -is replaced by -CO-), alkylcarbonyloxy group (any position -CH in the alkyl group 2 -CH 2 -is replaced by -CO-O-), alkoxycarbonyloxy group (any position -CH in the alkyl group 2 -CH 2 -CH 2 -is replaced by -O-CO-O-), alkanediyl-oxy group (any position -CH in the alkanediyl group 2 -is replaced by -O-), alkanediyl-oxycarbonyl group (any position -CH in the alkanediyl group 2 -CH 2 -is replaced by -O-CO-), alkanediyl-carbonyl group (any position -CH in the alkanediyl group 2 -is replaced by -CO-), alkanediyl-carbonyl-oxy group (any position -CH in the alkanediyl group 2 -CH 2 -is replaced by -CO-O-), alkanediyl-sulfonyl group (any position -CH in the alkanediyl group 2 -is replaced by -SO 2 -replaced group), alkanediyl-thio group (any position -CH in the alkanediyl group 2 -is replaced by -S-), cycloalkoxy group, cycloalkylalkoxy group, aromatic hydrocarbon group-carbonyl-oxy group, aromatic hydrocarbon group-carbonyl group, aromatic hydrocarbon group-oxy group, groups combined of two or more of these groups, etc. can be mentioned. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxy group include alkanediyl-oxy groups having 1 to 27 carbon atoms, such as a methylene-oxy group, an ethylene-oxy group, a propanediyl-oxy group, a butanediyl-oxy group, and a pentanediyl-oxy group. The number of carbon atoms in the alkanediyl-oxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 27 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 28 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyloxy group include alkanediyl-carbonyloxy groups having 2 to 27 carbon atoms, such as a methylene-carbonyloxy group, an ethylene-carbonyloxy group, a propanediyl-carbonyloxy group, and a butanediyl-carbonyloxy group. The number of carbon atoms in the alkanediyl-oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-sulfonyl group include alkanediyl-sulfonyl groups having 1 to 27 carbon atoms, such as a methylene-sulfonyl group, an ethylene-sulfonyl group, and a propylene-sulfonyl group. The number of carbon atoms in the alkanediyl-sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 27 carbon atoms, such as a methylene thio group, an ethylene thio group, and a propylene thio group. The number of carbon atoms of the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyl oxy group include aromatic hydrocarbon group-carbonyl oxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0013] In addition, -CH 2 - in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 - Examples of the resulting group include the following groups. -O- or -CO- in the groups represented below may each be replaced by -S- or -SO 2 -. The bonding site can be at any position. TIFF2025084122000015.tif46168 -CH in the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is replaced by -O-, -S-, -CO- or -SO 2 - Examples of the resulting group also include the following groups. The bonding site can be at any position. TIFF2025084122000016.tif26164

[0014] L 10Examples of the substituent that may be included are a halogen atom and a cyano group. L 10 When L is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Also, L 10 In the chain hydrocarbon group such as an alkyl group contained in L, the -CH 2 - can be replaced by -O-, -CO-, -S- or -SO 2 -, whereby L 1 can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, and an alkylsulfonyl group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 10 The substituent in L is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxy group or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and even more preferably a methyl group or a fluorine atom.

[0015] L 10 L may be a chain hydrocarbon group having 1 to 18 carbon atoms (the -CH 2 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group combining a chain hydrocarbon group having 1 to 8 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH 2 - contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or an alkanediyl group having 1 to 10 carbon atoms (the -CH 2 - contained in the alkanediyl group may be replaced by -O- or -CO-), or a group combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 12 carbon atoms (the -CH 2- may be replaced by -O- or -CO-. It is preferably an alkanediyl group having 1 to 6 carbon atoms, more preferably an alkanediyl group having 1 to 3 carbon atoms, even more preferably a methylene group.

[0016] R 1 、R 2 、R 3 、R 4 、R 5 、R 6 、R 7 、R 8 and R 9 The R contained in 10 is a group represented by formula (IC). TIFF2025084122000017.tif2571[In formula (IC), R A represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents any integer from 0 to 2. When u1 is 2, the plurality of R A are the same or different. s1 represents 1 or 2. t1 represents 0 or 1. However, the sum of s1 and t1 is 1 or 2. L 12 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent. The -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. * represents the bonding site.]

[0017] L 12 Examples of the hydrocarbon group having 1 to 36 carbon atoms of L include aliphatic hydrocarbon groups (chain hydrocarbon groups such as alkanediyl groups, alkenediyl groups, alkynediyl groups, and monocyclic or polycyclic alicyclic hydrocarbon groups), aromatic hydrocarbon groups, etc. A hydrocarbon group combining two or more of these groups may also be used. L 12 The -CH 2 - contained in the hydrocarbon group in 2- may be replaced with Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group and the like. Examples of the alkenediyl group include ethenediyl group, propenediyl group, isopropenediyl group, butenediyl group, isobutenediyl group, tert-butenediyl group, pentenediyl group, hexenediyl group, heptenediyl group, octenediyl group, isooctenediyl group, nonenediyl group. Examples of the alkynediyl group include ethynediyl group, propynediyl group, isopropynediyl group, butynediyl group, isobutynediyl group, tert-butynediyl group, pentynediyl group, hexynediyl group, octynediyl group, nonynediyl group and the like. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 24, more preferably 1 to 18, still more preferably 1 to 12, even more preferably 1 to 9, still even more preferably 1 to 6, still more preferably 1 to 4, and still even more preferably 1 to 3.

[0018] L 12 When -CH 2 - in the hydrocarbon group of is replaced with -O-, -CO-, -S- or -SO 2 -, the total number of carbon atoms of the hydrocarbon group before replacement is taken as the total carbon number of the hydrocarbon group of L 12 . Also, the number may be one or two or more. -CH contained in the alkanediyl group 2 -O-, -S-, -CO- or -SO 2 Examples of the group in which - is replaced by -O-, -S-, -CO- or -SO- include a hydroxy group (-CH contained in a methyl group 2 - is replaced by -O-), a carboxy group (-CH contained in an ethyl group 2 -CH 2 - is replaced by -O-CO-), an oxy group (-CH contained in a methylene group 2 - is replaced by -O-), a carbonyl group (-CH contained in a methylene group 2 - is replaced by -CO-), a thio group (-CH contained in a methylene group 2 - is replaced by -S-), a sulfonyl group (-CH contained in a methylene group 2 - is replaced by -SO 2 -), a thiol group (-CH contained in a methyl group 2 - is replaced by -S-), an alkanediyl-oxy group (-CH at any position contained in an alkanediyl group 2 - is replaced by -O-), an alkanediyl-oxycarbonyl group (-CH at any position contained in an alkanediyl group 2 -CH 2 - is replaced by -O-CO-), an alkanediyl-carbonyl group (-CH at any position contained in an alkanediyl group 2 - is replaced by -CO-), an alkanediyl-carbonyl-oxy group (-CH at any position contained in an alkanediyl group 2 -CH 2 - is replaced by -CO-O-), an alkanediyl-thio group (-CH at any position contained in an alkanediyl group 2 - is replaced by -S-), an alkanediyl-sulfonyl group (-CH at any position contained in an alkanediyl group 2 - is replaced by -SO 2 -), etc. Examples of the alkanediyl oxy group include alkanediyl oxy groups having 1 to 35 carbon atoms, such as a methylene oxy group, an ethylene oxy group, a propanediyl oxy group, a butanediyl oxy group, a pentanediyl oxy group, a hexanediyl oxy group, an octanediyl oxy group, a 2-ethylhexanediyl oxy group, a nonanediyl oxy group, a decanediyl oxy group, an undecanediyl oxy group, etc. The number of carbon atoms of the alkanediyl oxy group is preferably 1 to 17, more preferably 1 to 12, still more preferably 1 to 8, and even more preferably 1 to 5. Examples of the alkanediyl oxycarbonyl group include alkanediyl oxycarbonyl groups having 2 to 35 carbon atoms, such as a methylene oxycarbonyl group, an ethylene oxycarbonyl group, a propanediyl oxycarbonyl group, a butanediyl oxycarbonyl group, a pentanediyl oxycarbonyl group, a hexanediyl oxycarbonyl group, an octanediyl oxycarbonyl group, a 2-ethylhexanediyl oxycarbonyl group, a nonanediyl oxycarbonyl group, a decanediyl oxycarbonyl group, an undecanediyl oxycarbonyl group, etc. The number of carbon atoms of the alkanediyl oxycarbonyl group is preferably 2 to 17, more preferably 2 to 12, still more preferably 2 to 8, and even more preferably 2 to 5. Examples of the alkanediyl carbonyl group include alkanediyl carbonyl groups having 2 to 36 carbon atoms, such as a methylene carbonyl group, an ethylene carbonyl group, a propanediyl carbonyl group, a butanediyl carbonyl group, a pentanediyl carbonyl group, a hexanediyl carbonyl group, an octanediyl carbonyl group, a 2-ethylhexanediyl carbonyl group, a nonanediyl carbonyl group, a decanediyl carbonyl group, an undecanediyl carbonyl group, etc. The number of carbon atoms of the alkanediyl carbonyl group is preferably 2 to 18, more preferably 2 to 12, still more preferably 2 to 8, and even more preferably 2 to 5. Examples of the alkanediylcarbonyl-oxy group include alkanediylcarbonyl-oxy groups having 2 to 35 carbon atoms, such as a methylenecarbonyl-oxy group, an ethylenecarbonyl-oxy group, a propanediylcarbonyl-oxy group, a butanediylcarbonyl-oxy group, a pentanediylcarbonyl-oxy group, a hexanediylcarbonyl-oxy group, an octanediylcarbonyl-oxy group, a 2-ethylhexanediylcarbonyl-oxy group, a nonanediylcarbonyl-oxy group, a decanediylcarbonyl-oxy group, an undecanediylcarbonyl-oxy group, etc. The number of carbon atoms in the alkanediylcarbonyl-oxy group is preferably 2 to 17, more preferably 2 to 12, still more preferably 2 to 8, and even more preferably 2 to 5. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 35 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, a butanediylthio group, a pentanediylthio group, a hexanediylthio group, a heptanediylthio group, an octanediylthio group, a nonanediylthio group, a decanediylthio group, an undecanediylthio group, a dodecanediylthio group, a 2-methylpropanediylthio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 17, more preferably 1 to 12, still more preferably 1 to 8, and even more preferably 1 to 5. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 35 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 17, more preferably 1 to 12, still more preferably 1 to 8, and even more preferably 1 to 5. In addition, substitution in the alkenediyl group and the alkynediyl group can be those containing a carbon-carbon double bond or a carbon-carbon triple bond at any position in the examples of substitution in the above-described alkanediyl group.

[0019] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups represented below. The bonding site can be at any position. TIFF2025084122000018.tif47168Specifically, examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclohexene-3,6-diyl group, cyclooctane-1,5-diyl group, etc.; examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, 5-norbornene-2,3-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc.; spiro rings having a cycloalkyl group such as spirocyclohexane-1,2'-cyclopentane group, spiroadamantane-2,3'-cyclopentane group, etc., and a cycloalkyl group bonded to a norbornyl group or an adamantyl group by spiro bond, etc. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. In addition, for the group in which -CH 2 - in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 -, examples thereof include the groups represented below. Among the groups represented below, groups in which -O- is replaced by -S- and -CO- is replaced by -SO 2 - are also included. The bonding site can be at any position. TIFF2025084122000019.tif47168For the group in which -CH 2 - in the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 -, examples thereof include the same groups as those exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. The number of carbon atoms in the aromatic hydrocarbon group is preferably from 6 to 24, more preferably from 6 to 18, still more preferably from 6 to 14, and even more preferably from 6 to 10. When the -CH 2 - in the hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 -, the total number of carbon atoms in the hydrocarbon group is the number of carbon atoms before replacement. Also, the number may be one or two or more.

[0020] Examples of the hydrocarbon group formed by combining two or more kinds of groups include a group formed by combining an alkanediyl group with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group. In the combination, two or more kinds of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. For example, -alicyclic hydrocarbon group-alkandiyl group-, -alkandiyl group-alicyclic hydrocarbon group-, -alkandiyl group-alicyclic hydrocarbon group-alkandiyl group-, -alkandiyl group-aromatic hydrocarbon group-, -aromatic hydrocarbon group-alkandiyl group-, etc. are included. Any group may be bonded to an oxygen atom or a carbonyl group.

[0021] L 12 Examples of the substituent of the hydrocarbon group of L include a halogen atom, a cyano group, a hydroxy group, a carboxy group, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, etc. Examples of the alkoxy group having 1 to 12 carbon atoms include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group, dodecyloxy group and the like. The alkoxycarbonyl group having 2 to 13 carbon atoms, the alkylcarbonyl group having 2 to 13 carbon atoms and the alkylcarbonyloxy group having 2 to 13 carbon atoms represent groups in which a carbonyl group or a carbonyloxy group is bonded to the above-described alkyl group or alkoxy group. Examples of the alkoxycarbonyl group having 2 to 13 carbon atoms include methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group having 2 to 13 carbon atoms include acetyl group, propionyl group, butyryl group and the like. Examples of the alkylcarbonyloxy group having 2 to 13 carbon atoms include acetyloxy group, propionyloxy group, butyryloxy group and the like. L 12 The hydrocarbon group in L may have one substituent or a plurality of substituents.

[0022] L 12 is a single bond, an alkanediyl group having 1 to 6 carbon atoms (—CH contained in the alkanediyl group 2 — may be replaced by —O—, —S—, —SO 2 — or —CO—), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (—CH contained in the alicyclic hydrocarbon group 2 — may be replaced by —O—, —S—, —SO 2 — or —CO—), or a group combining an alkanediyl group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (—CH contained in the alkanediyl group and the alicyclic hydrocarbon group 2 — may be replaced by —O—, —S—, —SO 2 — or —CO—). Preferably, it is an alkanediyl group having 1 to 6 carbon atoms, more preferably an alkanediyl group having 1 to 3 carbon atoms, still more preferably a methylene group.

[0023] It is preferable that s1 is 1, it is preferable that t1 is 1, and it is preferable that the sum of s1 and t1 is 2. The group represented by formula (IC) is preferably a group represented by the following. TIFF2025084122000020.tif2396

[0024] In the group represented by formula (IC), u1 is 1, and R A is L 12 The group bonded to the carbon atom adjacent to is represented by the following formula. TIFF2025084122000021.tif3144R A Examples of the saturated hydrocarbon group of R R A include chain saturated hydrocarbon groups such as alkyl groups, alicyclic saturated hydrocarbon groups, and groups combining two or more of these. The number of carbon atoms in the chain saturated hydrocarbon group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic saturated hydrocarbon group may be monocyclic, polycyclic, or spirocyclic. Examples of the alicyclic saturated hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cyclooctyl group, cyclononyl group, cyclodecyl group, cyclododecyl group, and polycyclic cycloalkyl groups such as norbornyl group and adamantyl group. The number of carbon atoms in the alicyclic saturated hydrocarbon group is preferably 3 to 10, more preferably 3 to 8, and still more preferably 3 to 6. The combined group may be a group combining one chain saturated hydrocarbon group such as the above-mentioned alkyl group and one alicyclic saturated hydrocarbon group, or a group combining two or more of either or both. R 1 R 2 R 3 R 4 R 5, R 6 , R 7 , R 8 and R 9 The total number of the groups represented by the formula (IC) contained in R R 1 , R 2 and R 3 are each independently, -O-R 10 , -CO-O-R 10 , -O-CO-R 10 , -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is preferably, -O-R 10 , -CO-O-R 10 , -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is more preferably, -O-R 10 or -O-L 10 -CO-O-R 10 is even more preferably.

[0025] R 4 , R 5 , R 6 , R 7 , R 8 and R 9 Examples of the halogen atoms of R R 4 , R 5 , R 6 , R 7 , R 8 and R 9 Examples of the hydrocarbon groups having 1 to 18 carbon atoms of R The alkyl group is a linear or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alkanediyl group is a linear or branched alkanediyl group, and examples thereof include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, and a hexane-1,6-diyl group; and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 12, more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and examples thereof include the groups represented below. The bonding site can be at any position. TIFF2025084122000022.tif47168Specifically, examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclononyl group, cyclodecyl group, cyclododecyl group, etc. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane group, spiroadamantane-2,3'-cyclopentane group, and spiro rings having a cycloalkyl group bonded spiro to a norbornyl group or an adamantyl group, respectively. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. Examples of the aromatic hydrocarbon group include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group, etc. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10.

[0026] Among the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group, groups formed by combining two or more of these groups include a group combining an aromatic hydrocarbon group and a chain hydrocarbon group (for example, aromatic hydrocarbon group - alkanediyl group - *, alkyl group - aromatic hydrocarbon group - *, alkyl group - aromatic hydrocarbon group - alkanediyl group - *, -CH contained in the alkanediyl group and the alkyl group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -). A group combining an alicyclic hydrocarbon group and a chain hydrocarbon group (for example, alicyclic hydrocarbon group - alkanediyl group - *, alkyl group - alicyclic hydrocarbon group - *, alkyl group - alicyclic hydrocarbon group - alkanediyl group - *, -CH contained in the alicyclic hydrocarbon group, the alkanediyl group and the alkyl group 2 - may be replaced by -O-, -CO-, -S- or -SO 2- may be replaced by). A group combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (e.g., aromatic hydrocarbon group - alicyclic hydrocarbon group - *, alicyclic hydrocarbon group - aromatic hydrocarbon group - *, -CH contained in the alicyclic hydrocarbon group 2 - is, -O-, -CO-, -S- or -SO 2 - may be replaced by). * represents a bonding site. Examples of the aromatic hydrocarbon group - alkanediyl group - * include aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group - aromatic hydrocarbon group - * include tolyl group, xylyl group, cumenyl group and the like. Examples of the alicyclic hydrocarbon group - alkanediyl group - * include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group and the like. Examples of the alkyl group - alicyclic hydrocarbon group - * include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, 2-alkyladamantan-2-yl group and the like. Examples of the aromatic hydrocarbon group - alicyclic hydrocarbon group - * include phenylcyclohexyl group and the like. Examples of the alicyclic hydrocarbon group - aromatic hydrocarbon group - * include cyclohexylphenyl group and the like. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may be combined with two or more of each. Also, any group may be Ar 1 Ar 2 Ar 3 or may be bonded to the benzene ring.

[0027] R 4 R 5 R 6 R 7 R 8 and R 9 -CH contained in the hydrocarbon group represented by 2 - is, -O-, -CO-, -S-, -SO- or -SO 2- is replaced, the total number of carbon atoms before replacement is defined as the total number of carbon atoms of the hydrocarbon group. Also, the number may be one or two or more. -CH contained in the hydrocarbon group 2 - is replaced by -O-, -CO-, -S-, -SO- or -SO 2 Examples of the group replaced by - include a hydroxy group (-CH contained in a methyl group 2 - is replaced by -O-), a thiol group (-CH contained in a methyl group 2 - is replaced by -S-), a carboxy group (-CH contained in an ethyl group 2 -CH 2 - is replaced by -O-CO-), an alkoxy group (-CH at any position contained in an alkyl group 2 - is replaced by -O-), an alkoxycarbonyl group (-CH at any position contained in an alkyl group 2 -CH 2 - is replaced by -O-CO-), an alkylcarbonyl group (-CH at any position contained in an alkyl group 2 - is replaced by -CO-), an alkylcarbonyloxy group (-CH at any position contained in an alkyl group 2 -CH 2 - is replaced by -CO-O-), an alkoxycarbonyloxy group (-CH at any position contained in an alkyl group 2 -CH 2 -CH 2 - is replaced by -O-CO-O-), an alkylthio group (-CH at any position contained in an alkyl group 2 - is replaced by -S-), an alkylsulfinyl group (-CH at any position contained in an alkyl group 2 - is replaced by -SO-), an alkylsulfonyl group (-CH at any position contained in an alkyl group 2 - is replaced by -SO 2 - is replaced by -), an oxy group (-CH contained in a methylene group 2 - is replaced by -O-), a carbonyl group (-CH contained in a methylene group 2- is a group replaced by -CO-), a thio group (-CH contained in a methylene group 2 - is a group replaced by -S-), a sulfinyl group (-CH contained in a methylene group 2 - is a group replaced by -SO-), a sulfonyl group (-CH contained in a methylene group 2 - is -SO 2 - replaced group), an alkanediyl oxy group (-CH at any position contained in an alkanediyl group 2 - is a group replaced by -O-), an alkanediyl oxycarbonyl group (-CH at any position contained in an alkanediyl group 2 -CH 2 - is a group replaced by -O-CO-), an alkanediyl carbonyl group (-CH at any position contained in an alkanediyl group 2 - is a group replaced by -CO-), an alkanediyl carbonyl oxy group (-CH at any position contained in an alkanediyl group 2 -CH 2 - is a group replaced by -CO-O-), an alkanediyl thio group (-CH at any position contained in an alkanediyl group 2 - is a group replaced by -S-), an alkanediyl sulfinyl group (-CH at any position contained in an alkanediyl group 2 - is a group replaced by -SO-), an alkanediyl sulfonyl group (-CH at any position contained in an alkanediyl group 2 - is -SO 2 - replaced group), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group - carbonyloxy group, an aromatic hydrocarbon group - carbonyl group, an aromatic hydrocarbon group - oxy group, a group formed by combining two or more of these groups, etc. can be mentioned. Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylsulfinyl group include alkylsulfinyl groups having 1 to 17 carbon atoms, such as methylsulfinyl group, ethylsulfinyl group, propylsulfinyl group, butylsulfinyl group, pentylsulfinyl group, hexylsulfinyl group, octylsulfinyl group, 2-ethylhexylsulfinyl group, nonylsulfinyl group, decylsulfinyl group, undecylsulfinyl group and the like. The number of carbon atoms of the alkylsulfinyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxy group include alkanediyl-oxy groups having 1 to 17 carbon atoms, such as methylene-oxy group, ethylene-oxy group, propanediyl-oxy group, butanediyl-oxy group, pentanediyl-oxy group and the like. The number of carbon atoms of the alkanediyl-oxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 17 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 18 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyl-oxy group include alkanediyl-carbonyl-oxy groups having 2 to 17 carbon atoms, such as a methylene-carbonyl-oxy group, an ethylene-carbonyl-oxy group, a propanediyl-carbonyl-oxy group, and a butanediyl-carbonyl-oxy group. The number of carbon atoms in the alkanediyl-oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl-oxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-thio group include alkanediyl-thio groups having 1 to 17 carbon atoms, such as a methylene-thio group, an ethylene-thio group, and a propylene-thio group. The number of carbon atoms in the alkanediyl-thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-sulfinyl group include alkanediyl-sulfinyl groups having 1 to 17 carbon atoms, such as a methylene-sulfinyl group, an ethylene-sulfinyl group, and a propylene-sulfinyl group. The number of carbon atoms in the alkanediyl-sulfinyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, and the like. The number of carbon atoms of the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group, and the like. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group, and the like. Examples of the aromatic hydrocarbon group - carbonyloxy group include aromatic hydrocarbon group - carbonyloxy groups having 7 to 17 carbon atoms, such as a benzoyloxy group, and the like. Examples of the aromatic hydrocarbon group - carbonyl group include aromatic hydrocarbon group - carbonyl groups having 7 to 18 carbon atoms, such as a benzoyl group, and the like. Examples of the aromatic hydrocarbon group - oxy group include aromatic hydrocarbon group - oxy groups having 6 to 17 carbon atoms, such as a phenyloxy group, and the like.

[0028] In addition, -CH 2 - contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -SO 2 - or -CO-, and examples of the group include the groups represented below. -O- or -CO- in the groups represented below may be replaced by -S- or -SO 2 -. The bonding site can be at any position. TIFF2025084122000023.tif46168 -CH 2 - contained in the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 -, and examples of the group include the same groups as those exemplified in the present specification within the range where the upper limit of the number of carbon atoms permits.

[0029] R 4 、R 5 、R 6 、R 7 、R8 and R 9 Examples of the substituent that the hydrocarbon group of R may have include a halogen atom and a cyano group. Examples of the halogen atom include the same groups as those described above. R 4 、R 5 、R 6 、R 7 、R 8 and R 9 When R, R, R, R, R, R, and R are hydrocarbon groups having a halogen atom, examples of the hydrocarbon group having a halogen atom of R, R, R, R, R, R, and R include a chain hydrocarbon group having a halogen atom such as a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. 4 、R 5 、R 6 、R 7 、R 8 and R 9 Examples of the hydrocarbon group having a halogen atom of R, R, R, R, R, R, and R include a chain hydrocarbon group having a halogen atom such as a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. Examples of the alkyl group having a halogen atom include haloalkyl groups having 1 to 12 carbon atoms such as a fluorinated alkyl group having 1 to 12 carbon atoms, a chlorinated alkyl group having 1 to 12 carbon atoms, a brominated alkyl group having 1 to 12 carbon atoms, and an iodinated alkyl group having 1 to 12 carbon atoms. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 12 carbon atoms (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms of the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. -CH contained in the haloalkyl group 2- may be replaced by -O- or -CO-. Such groups include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, haloalkylcarbonyloxy groups, etc. Specifically, haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, etc. may be mentioned. For example, groups in which one or more hydrogen atoms of the groups exemplified above are replaced by halogen atoms may be mentioned. The hydrocarbon group may have one substituent or a plurality of substituents.

[0030] R 4 、R 5 and R 6 are each independently a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 6 carbon atoms (wherein -CH 2 - in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), -X 1 -R 10 or -X 1 -L 10 -X 2 -R 10 is preferably, more preferably an iodine atom, a fluorine atom, a haloalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 6 carbon atoms (wherein -CH 2 - in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), an iodine atom, a fluorine atom, a haloalkyl group having 1 to 4 carbon atoms or an alkyl group having 1 to 4 carbon atoms (wherein -CH 2- may be replaced by -O- or -CO-. It is more preferably a iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, a haloalkyl group having 1 to 4 carbon atoms or an alkoxy group having 1 to 3 carbon atoms, even more preferably a iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms or an alkoxy group having 1 to 3 carbon atoms, and even more preferably a iodine atom, a fluorine atom, a trifluoromethyl group, a methyl group, a methoxy group, an ethoxy group or a hydroxy group. Also, in one embodiment, one or more R 4 , R 5 and R 6 may each independently contain a group represented by formula (IC), and R 4 , R 5 , R 6 may each independently be the same group as R 1 , R 2 , R 3 . When R 1 is -O-R 10 , it is preferable that one or two R 4 are the same -O-R 1 as R 10 . When R 1 is -CO-O-R 10 , it is preferable that one or two R 4 are the same -CO-O-R 1 as R 10 . When R 1 is -O-CO-O-R 10 , it is preferable that one or two R 4 are the same -O-CO-O-R 1 as R 10 . When R 1 is -O-L 10 -CO-O-R 10 , it is preferable that one or two R 4 are the same -O-L 1 -CO-O-R 10 as R 10 . The combination of R 2 and R 5 and the combination of R 3 and R6 For the combination of R 1 and R 4 is the same as that of the combination of R

[0031] R 7 and R 8 and R 9 are each independently a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 6 carbon atoms (the -CH 2 - in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), -X 1 -R 10 or -X 1 -L 10 -X 2 -R 10 is preferably a halogen atom, a fluoroalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms (the -CH 2 - in the alkyl group may be replaced by -O- or -CO-), -O-R 10 -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms (the -CH 2 - in the alkyl group may be replaced by -O- or -CO-), -O-R 10 -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy group, a methoxy group, a methyl group, a t-butyl group, -O-R 10 -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is even more preferably. In another embodiment, R 4 and R 5 and R 6 and R 7 and R 8 and R 9is independently, -O-R 10 , -CO-O-R 10 , -O-CO-R 10 , -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is preferably, -O-R 10 , -CO-O-R 10 , -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 is more preferably, -O-R 10 or -O-L 10 -CO-O-R 10 is even more preferably.

[0032] Ar 1 , Ar 2 and Ar 3 Examples of the aromatic hydrocarbon group having 6 to 10 carbon atoms for Ar 1 , Ar 2 and Ar 3 include groups derived from a benzene ring or a naphthalene ring, such as a phenylene group or a naphthylene group. Further, examples of the heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms for Ar Ar 1 , Ar 2 and Ar 3 are preferably groups derived from a benzene ring, a naphthalene ring, a furan ring or a thiophene ring, and more preferably groups derived from a benzene ring.

[0033] A 1 , A 2 and A 3Examples of the hydrocarbon group include linear or branched chain hydrocarbon groups (e.g., alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and those obtained by combining two or more of these groups may also be used. The number of carbon atoms in the hydrocarbon group is preferably 1 to 19, more preferably 1 to 18, still more preferably 1 to 16, even more preferably 1 to 14, and even more preferably 1 to 12. Examples of the chain hydrocarbon group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 9, even more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples include the groups represented below. The bonding site can be at any position. TIFF2025084122000024.tif47168Specifically, monocyclic alicyclic hydrocarbon groups which are monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group, and Polycyclic alicyclic hydrocarbon groups which are polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc., cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane group, spiroadamantane-2,3'-cyclopentane group, etc., and spiro rings having a cycloalkyl group bonded to a norbornyl group or an adamantyl group respectively by spiro linkage, etc. are exemplified. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, still more preferably 3 to 12, and even more preferably 3 to 10. Examples of the aromatic hydrocarbon group include aromatic hydrocarbon groups such as arylene groups such as phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, etc. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10.

[0034] Examples of the group formed by combination include a group formed by combining an alicyclic hydrocarbon group and an alkanediyl group, a group formed by combining an aromatic hydrocarbon group and an alkanediyl group, and a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more kinds of the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may be combined respectively. Also, any group may be bonded to the benzene ring. Examples of the group formed by combining an alicyclic hydrocarbon group and an alkanediyl group include, for example, -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-, etc. Examples of the group formed by combining an aromatic hydrocarbon group and an alkanediyl group include, for example, -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-, etc. Examples of a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-, and the like.

[0035] A 1 , A 2 and A 3 In A 2 , -CH 2 - in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO In the hydrocarbon group, when -CH 2 - is replaced by -O-, -CO-, -S- or -SO 2 -, examples of the resulting group include a hydroxy group (a group in which -CH 2 - in a methyl group is replaced by -O-), a carboxy group (a group in which -CH 2 -CH 2 - in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH 2 - in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH 2 - at any position in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH 2 -CH 2 - at any position in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH 2 - at any position in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH 2 -CH 2 - at any position in an alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH 2 -CH 2 -CH 2 - at any position in an alkyl group is replaced by -O-CO-O-), and an alkylthio group (a group in which -CH2 - is a group replaced by -S-, an alkylsulfonyl group (any position -CH in the alkyl group 2 - is replaced by -SO 2 - is a group replaced by -O-, an oxy group (any position -CH in the methylene group 2 - is a group replaced by -CO-, a carbonyl group (any position -CH in the methylene group 2 - is a group replaced by -S-, a thio group (any position -CH in the methylene group 2 - is a group replaced by -S-, a sulfonyl group (any position -CH in the methylene group 2 - is replaced by -SO 2 - is a group replaced by -O-, an alkanediyl-oxy group (any position -CH in the alkanediyl group 2 - is a group replaced by -O-, an alkanediyl-oxycarbonyl group (any position -CH in the alkanediyl group 2 -CH 2 - is a group replaced by -O-CO-, an alkanediyl-carbonyl group (any position -CH in the alkanediyl group 2 - is a group replaced by -CO-, an alkanediyl-carbonyl group (any position -CH in the alkanediyl group 2 -CH 2 - is a group replaced by -CO-O-, an alkanediyl-sulfonyl group (any position -CH in the alkanediyl group 2 - is replaced by -SO 2 - is a group replaced by -O-, an alkanediyl-thio group (any position -CH in the alkanediyl group 2 - is a group replaced by -S-, a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, and the like. Examples of the alkoxy group include alkoxy groups having 1 to 19 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 19 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 20 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 19 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 18 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 10, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 19 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 19 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanedioloxy group, butanedioloxy group, pentanedioloxy group and the like. The number of carbon atoms of the alkanedioxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 19 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 20 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyloxy group include alkanediyl-carbonyloxy groups having 2 to 19 carbon atoms, such as a methylene-carbonyloxy group, an ethylene-carbonyloxy group, a propanediyl-carbonyloxy group, and a butanediyl-carbonyloxy group. The number of carbon atoms in the alkanediyl-oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-sulfonyl group include alkanediyl-sulfonyl groups having 1 to 19 carbon atoms, such as a methylene-sulfonyl group, an ethylene-sulfonyl group, and a propylene-sulfonyl group. The number of carbon atoms in the alkanediyl-sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-thio group include alkanediyl-thio groups having 1 to 19 carbon atoms, such as a methylene-thio group, an ethylene-thio group, and a propylene-thio group. The number of carbon atoms in the alkanediyl-thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 19 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 19 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyl oxy group include aromatic hydrocarbon group-carbonyl oxy groups having 7 to 19 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 20 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 19 carbon atoms, such as a phenyloxy group.

[0036] In addition, -CH 2 - contained in the alicyclic hydrocarbon group is replaced with -O-, -CO-, -S- or -SO 2 - Examples of the resulting group include the groups represented below. Among the groups represented below, groups in which -O- is replaced with -S- and -CO- is replaced with -SO 2 - are also included. The bonding site can be at any position. TIFF2025084122000025.tif47169 -CH contained in a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is replaced with -O-, -S-, -CO- or -SO 2 - Examples of the resulting group include the same groups as those exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. A 1 、A 2 and A 3 Examples of the substituent that the hydrocarbon group of may have include the same groups as those exemplified as the substituent that the hydrocarbon group of R 4 ~R 9 may have.

[0037] A 1 、A 2 and A 3is, independently of each other, a single bond or a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -. However, -CH contained in the hydrocarbon group 2 - at least one of which is replaced by -O-, -CO-, -S- or -SO 2 -.). Preferably, A 1 is ***-L 011 -X 01 -L 012 -, A 2 is ***-L 021 -X 02 -L 022 -, A 3 is ***-L 031 -X 03 -L 032 - (X 01 , X 02 and X 03 each independently represents -O-, -CO-, -S- or -SO 2 -. L 011 , L 012 , L 021 , L 022 , L 031 and L 032 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -. However, the total number of carbon atoms of L 011 and L 012 is 0 to 18, and the total number of carbon atoms of L 021 and L 022 is 0 to 18, and the total number of carbon atoms of L 031 and L 032 is 0 to 18. *** represents the bonding site with Ar 1 , Ar 2 or Ar 3 .) is more preferable, and A 1 is ***-X 01 -L 01- or *** - L 01 - X 01 - and A 2 is *** - X 02 - L 02 - or *** - L 02 - X 02 - and A 3 is *** - X 03 - L 03 - or *** - L 03 - X 03 - and is (X 01 X 02 and X 03 each independently represents -O-, -CO-, -S- or -SO 2 -. L 01 L 02 and L 03 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -. *** is Ar 1 Ar 2 or Ar 3 and represents the bonding site with). It is more preferable that A 1 A 2 and A 3 preferably have no substituent other than being replaced by -O-, -CO-, -S- or -SO 2 -. L 011 L 012 L 021 L 022 L 031 L 032 L 01 L 02 and L 03 The hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -) includes, within the range of 1 to 18 carbon atoms, the same groups as those exemplified for A 1 A 2 and A 3 . X 01 、 X 02 and X 03 are each independently preferably -O- or -S-, more preferably -O-. L 011 、 L 012 、 L 021 、 L 022 、 L 031 、 L 032 、 L 01 、 L 02 and L 03 are each independently preferably a single bond or a hydrocarbon group having 1 to 18 carbon atoms (wherein -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), more preferably a single bond or a hydrocarbon group having 1 to 12 carbon atoms (wherein -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), even more preferably a single bond, a chain hydrocarbon group having 1 to 9 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 10 carbon atoms (wherein -CH 2 - in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), still more preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (wherein -CH 2 - in the alkanediyl group may be replaced by -O- or -CO-), even more preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms (wherein -CH 2 - in the alkanediyl group may be replaced by -O- or -CO-), and even still more preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms (wherein -CH 2- may be replaced by -O- or -CO-. It is even more preferable that it is. Among them, a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, a carbonyl group, a carbonyloxy group, a carbonyloxymethylene group, an ethyleneoxy group, an ethyleneoxymethylene group, a methylenecarbonyloxy group, a methylenecarbonyloxymethylene group or an ethyleneoxycarbonyl group is preferable, and a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group or a carbonyl group is more preferable. However, L 011 and L 012 The total number of carbon atoms of and is 0 to 18, and L 021 and L 022 The total number of carbon atoms of and is 0 to 18, and L 031 and L 032 The total number of carbon atoms of and is 0 to 18.

[0038] m1 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m2 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m3 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m4 is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m5 is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m6 is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m7 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m8 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1. m9 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0039] R 1 , R 2 and R 3 Ar 1 , Ar 2 and Ar 3 The bond position to Ar 1 , Ar 2 and Ar 3 are each independently a group derived from a benzene ring, 1 , A 2 and A 3 The bonding position of A may be either o-position, m-position or p-position. 1 , A 2 and A 3 It is preferably bonded to the p-position or m-position, more preferably bonded to the p-position, relative to the bonding position of Ar 1 , Ar 2 and Ar 3 When A is a group derived from a naphthalene ring, for example, 1 , A 2 and A 3 When the bonding position of is the 1st position, it may be any of the 2nd to 8th positions. 1 , A 2 and A 3 When the bonding position of A is the 2-position, it may be any of the 1-position and the 3-8-positions. 1 , A 2 and A 3 When the bonding position of A is the 1st position, it is preferably bonded to the 3rd to 6th positions. 1 , A2 and A 3 When the bonding position of is the 2nd position, it is preferably bonded to the 4th to 7th positions. R 4 、R 5 and R 6 of Ar 1 、Ar 2 and Ar 3 The bonding positions to are not particularly limited. However, when Ar 1 、Ar 2 and Ar 3 are groups derived from a benzene ring, each independently, A 1 、A 2 and A 3 The bonding position may be any of the ortho, meta, or para positions with respect to the bonding positions of. Among them, when m4, m5, and m6 are 1, R 4 、R 5 and R 6 are each independently preferably bonded to the para or meta position with respect to the bonding positions of A 1 、A 2 and A 3 and more preferably bonded to the meta position. When m4, m5, and m6 are 2, R 4 、R 5 and R 6 are each independently preferably bonded such that one is bonded to the ortho or meta position and one is bonded to the para or meta position with respect to the bonding positions of A 1 、A 2 and A 3 and more preferably two are bonded to the meta position. When m4, m5, and m6 are 3, R 4 、R 5 and R 6 are each independently preferably bonded such that two are bonded to the ortho or meta position and one is bonded to the para or meta position with respect to the bonding positions of A 1 、A 2 and A 3 and more preferably one is bonded to the ortho position and two are bonded to the meta position. When m4, m5, and m6 are 4, R 4 、R 5 and R 6 are each independently A 1 、A 2 and A3 With respect to the bonding positions of two of them, it is preferable that two are bonded at the ortho or meta position and two are bonded at the para or meta position, and it is more preferable that two are bonded at the ortho position and two are bonded at the meta position. Also, Ar 1 , Ar 2 and Ar 3 are groups derived from a naphthalene ring. For example, when the bonding positions of A 1 , A 2 and A 3 are at the 1-position, any of the 2nd to 8th positions may be used. When the bonding positions of A 1 , A 2 and A 3 are at the 2-position, any of the 1st and 3rd to 8th positions may be used. Among them, when the bonding positions of A 1 , A 2 and A 3 are at the 1-position, it is preferable that at least one is bonded at the 3rd to 6th positions. When the bonding positions of A 1 , A 2 and A 3 are at the 2-position, it is preferable that at least one is bonded at the 4th to 7th positions. R 7 , R 8 and R 9 can each independently be at the ortho, meta, or para position with respect to the bonding position of X + . For example, when the bonding positions of R 7 , R 8 and R 9 to the benzene ring are such that m1, m2, m3 are 0 and R 7 , R 8 and R 9 are -O-R 10 , -CO-O-R 10 , -O-CO-R 10 , -O-CO-O-R 10 or -O-L 10 -CO-O-R 10 , they can each independently be at the ortho, meta, or para position with respect to the bonding position of X + . Among them, it is preferable that they are bonded at the para or meta position with respect to the bonding position of X + , and it is more preferable that they are bonded at the para position. Among them, when m7, m8, and m9 are 1, R 7 , R 8 and R 9 are each independently preferably bonded to the p-position or m-position relative to the bonding position of X + , and more preferably bonded to the p-position. When m7, m8, and m9 are 2, R 7 , R 8 and R 9 are each independently preferably such that one is bonded to the o-position or m-position and one is bonded to the p-position or m-position relative to the bonding position of X + , and more preferably such that one is bonded to the m-position and one is bonded to the p-position or m-position. When m7, m8, and m9 are 3, R 7 , R 8 and R 9 are each independently preferably such that two are bonded to the o-position or m-position and one is bonded to the p-position or m-position relative to the bonding position of X + , and more preferably such that two are bonded to the m-position and one is bonded to the p-position. When m7, m8, and m9 are 4, R 7 , R 8 and R 9 are each independently preferably such that two are bonded to the o-position or m-position and two are bonded to the p-position or m-position relative to the bonding position of X + , and more preferably such that two are bonded to the m-position, one is bonded to the o-position, and one is bonded to the p-position.

[0040] A 1 , A 2 and A 3 The bonding positions of X + to the benzene ring to which they are bonded can each independently be any of the o-position, m-position, and p-position relative to the bonding position of X + . Among them, it is preferably bonded to the p-position or m-position relative to the bonding position of X + . More specifically, when m1, m2, and m3 are 1, A 1 , A 2 and A 3 are each independently +It is preferably bonded to the p-position or m-position relative to the bonding position, and more preferably bonded to the p-position. When m1, m2 and m3 are 2, A 1 , A 2 and A 3 are each independently, relative to the bonding position of X + , one is bonded to the ortho-position or m-position, it is preferable that one is bonded to the ortho-position or m-position, and more preferably two are bonded to the m-position. When m1, m2 and m3 are 3, A 1 , A 2 and A 3 are each independently, relative to the bonding position of X + , two are bonded to the ortho-position or m-position, it is preferable that one is bonded to the p-position or m-position, and more preferably two are bonded to the m-position and one is bonded to the p-position. When m1, m2 and m3 are 4, A 1 , A 2 and A 3 are each independently, relative to the bonding position of X + , two are bonded to the ortho-position or m-position, it is preferable that two are bonded to the p-position or m-position, and more preferably two are bonded to the ortho-position and two are bonded to the m-position.

[0041] Further, when X is a sulfur atom and m10 = 1, R 7 and R 8 or R 8 and R 9 may combine to form a ring containing S + . Among them, it is preferable that R 8 and R 9 combine to form a ring containing S + , and it is more preferably a cation represented by formula (I-C’). TIFF2025084122000026.tif51153[In formula (I-C’), R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R9 、m1, m2, m3, m4, m5, m6, m7, m8, m9, A 1 、A 2 、A 3 、Ar 1 、Ar 2 、Ar 3 have the same meanings as described above. X 7 represents a single bond, -CH 2 -, -O-, -S-, -CO-, -SO- or -SO 2 -. X 7 preferably represents a single bond, -CH 2 - or -O-.

[0042] Examples of the cation (I) represented by formula (I-C) include the cations represented by formula (I-C-1) or formula (I-C-2) (hereinafter, they may be referred to as "cation (I-C-1)" and "cation (I-C-2)", respectively). Further, examples of the cation represented by formula (I-C') include the cation represented by formula (I-C'-1) (hereinafter, may be referred to as "cation (I-C'-1)"). TIFF2025084122000027.tif136166 [In formula (I-C-1), formula (I-C-2) and formula (I-C'-1), R 1 、R 2 、R 3 、R 4 、R 5 、R 6 、R 7 、R 8 、R 9 、m1, m2, m3, m4, m5, m6, m7, m8, m9, L 01 、L 02 、L 03 、X 01 、X 02 、X 03 and X 7 have the same meanings as described above. X 01 、X 02 and X 03 are each bonded to the benzene ring at positions A 1 、A 2and A 3 is the same as the bonding position to the benzene ring of

[0043] Examples of the cation of the salt (I) include cations represented by the following formulas (I-c-1) to (I-c-357). TIFF2025084122000028.tif213140

[0044] TIFF2025084122000029.tif252163

[0045] TIFF2025084122000030.tif248152

[0046] TIFF2025084122000031.tif253152

[0047] TIFF2025084122000032.tif226144

[0048] TIFF2025084122000033.tif233152

[0049] TIFF2025084122000034.tif184149

[0050] TIFF2025084122000035.tif214161

[0051] TIFF2025084122000036.tif240163

[0052] TIFF2025084122000037.tif240143

[0053] TIFF2025084122000038.tif249151

[0054] TIFF2025084122000039.tif247161

[0055] TIFF2025084122000040.tif219157

[0056] TIFF2025084122000041.tif236161

[0057] TIFF2025084122000042.tif252158

[0058] TIFF2025084122000043.tif209161

[0059] TIFF2025084122000044.tif252166

[0060] TIFF2025084122000045.tif247151

[0061] TIFF2025084122000046.tif209161

[0062] TIFF2025084122000047.tif238146

[0063] TIFF2025084122000048.tif242164

[0064] TIFF2025084122000049.tif252154

[0065] TIFF2025084122000050.tif211153

[0066] TIFF2025084122000051.tif229163

[0067] TIFF2025084122000052.tif252161

[0068] TIFF2025084122000053.tif229167

[0069] TIFF2025084122000054.tif236160

[0070] TIFF2025084122000055.tif247163

[0071] TIFF2025084122000056.tif251165

[0072] TIFF2025084122000057.tif85149

[0073] 〔Anion (I)〕 The anion (I) of the salt represented by formula (I) is an anion having a group represented by formula (IC). Examples of the anion having a group represented by formula (IC) include an anion represented by formula (I-A) (hereinafter sometimes referred to as "anion (I-A)") or an anion represented by formula (I-B) (hereinafter sometimes referred to as "anion (I-B)"). TIFF2025084122000058.tif1390[In formula (I-A), all symbols have the same meanings as described above.] In formula (I-A), L b1 Examples of the (nb1 + 1)-valent hydrocarbon group of include a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group formed by combining two or more of these groups, from which nb1 hydrogen atoms are removed to form a group that binds to one or more L b2 and binds to The number of carbon atoms of the hydrocarbon group is preferably from 1 to 48, more preferably from 1 to 42, still more preferably from 1 to 36, even more preferably from 1 to 30, and even more preferably from 1 to 24. Examples of the chain hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples include methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, heptadecyl group, etc. Examples of the alkenyl group include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, nonenyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, still more preferably 1 to 20, even more preferably 1 to 18, even further preferably 1 to 12, and even further preferably 1 to 10. Examples of the alicyclic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, etc. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a cross-linked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a cross-linked structure include norbornyl group, adamantyl group, etc. Examples of the cycloalkyl group in which two or more rings are condensed include bicyclo[4,4,0]decane group, steroid group (steroid skeleton), etc. Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one cycloalkyl group selected from the group consisting of cyclopentyl group, cyclohexyl group, norbornyl group and adamantyl group is spiro-bonded to a cycloalkyl group having 5 to 8 carbon atoms. Also, a double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. TIFF2025084122000059.tif26168 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 12, even still more preferably 3 to 10, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 12, and even still more preferably 7 to 12. Examples of the aromatic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, a fluorenyl group, and the like. More specifically, examples of the aromatic hydrocarbon group include those represented by the following formula. TIFF2025084122000060.tif1285 The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, still more preferably 4 to 18, even more preferably 5 to 14, even still more preferably 5 to 10, and even more preferably 6 to 10. L b1 When the -CH 2 - contained in the hydrocarbon group of is replaced by -O-, -CO-, -S- or -SO 2 -, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. L b1 Among the hydrocarbon groups of, when the -CH 2 - contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO 2Examples of the group replacing - include a hydroxy group, a carboxy group, a carbonyl group (, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyl-oxy group, etc. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. L b1 Among the hydrocarbon groups of b1 , -CH contained in the alicyclic hydrocarbon group 2 - is replaced by -O-, -CO-, -S- or -SO 2 Examples of the group replacing - include a group containing a structure such as a cyclic ether, a cyclic ketone, a cyclic ester (lactone), a cyclic thioether, a cyclic acetal, a cyclic sulfonic acid ester (sultone), etc. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding position of the alicyclic hydrocarbon groups listed in the following formulas can be any position. TIFF2025084122000061.tif48165L b1 Among the hydrocarbon groups of b1 , -CH contained in the aromatic hydrocarbon group 2 - may be replaced by -O- or -S-, and -CH 2 Examples of the group in which - is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. Specifically, aromatic hydrocarbon groups represented by the following formulas can be mentioned. TIFF2025084122000062.tif1325 Examples of the group in which -CH contained in a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is replaced by -O-, -S-, -CO- or -SO 2 Examples of the group replaced by - include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. Examples of a group formed by combining two or more of an aliphatic hydrocarbon group, an alicyclic hydrocarbon group, and an aromatic hydrocarbon group include a group formed by combining the above aliphatic hydrocarbon group and the above alicyclic hydrocarbon group, a group formed by combining the above aliphatic hydrocarbon group and the above aromatic hydrocarbon group, a group formed by combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and a group formed by combining the above aliphatic hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. The group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. L b2 Examples of the divalent hydrocarbon group of L include a divalent aliphatic hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group formed by combining two or more of these groups, and a group formed by removing one hydrogen atom from a monovalent hydrocarbon group and bonding to Y b1 is mentioned. L b2 Examples of the divalent aliphatic hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group formed by combining two or more of these groups of L are each a group formed by removing one hydrogen atom from the monovalent aliphatic hydrocarbon group, monovalent alicyclic hydrocarbon group, monovalent aromatic hydrocarbon group, and monovalent group formed by combining two or more of these groups exemplified by L within the range where the upper limit of the number of carbon atoms permits. b1 is mentioned. L b1 and L b2 Examples of the substituent that the hydrocarbon group of L and L may have include a halogen atom, a cyano group, a nitro group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L b1 and L b2 When L and L are a group formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and an aliphatic hydrocarbon group, substantially, the aliphatic hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or aromatic hydrocarbon group has. Also, when the -CH b1 - of the aliphatic hydrocarbon group contained in the hydrocarbon group of L and L is replaced by -O-, -CO-, -S-, or -SO b2 -, L 2 and L 2 b1 and L b2 ​The hydrocarbon group may substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group, etc.

[0074] Y b1 Examples of the cyclic hydrocarbon group of Y include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. Y b1 The alicyclic hydrocarbon group and the aromatic hydrocarbon group of Y are each the same as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified by L b1 and L b2 and may be a monovalent alicyclic hydrocarbon group and aromatic hydrocarbon group when having no substituent. Y b1 Examples of the substituent that the methyl group of Y may have in addition to the group represented by the formula (IC) include a halogen atom, a hydroxy group, a cyano group, a nitro group, etc. Y b1 Examples of the substituent that the cyclic hydrocarbon group of Y may have in addition to the group represented by the formula (IC) include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group or a nitro group (—CH 2 — in the hydrocarbon group may be replaced by —O—, —S—, —CO— or —SO 2 —). Y b1 The number of carbon atoms of the hydrocarbon group that the cyclic hydrocarbon group of Y may have is not included in the number of carbon atoms of the cyclic hydrocarbon group of Y b1 . Examples of the halogen atom include the same halogen atoms as the halogen atoms exemplified as the substituents of L b3 and L b2 . Y b1The hydrocarbon group having 1 to 18 carbon atoms which may have a cyclic hydrocarbon group as a substituent includes a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these groups. Examples of the chain hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and a group combining two or more of these groups include, within the range allowed by the upper limit of the number of carbon atoms, L b1 The same groups as the chain hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and a group combining two or more of these groups exemplified by b1 can be mentioned. Also, Y b1 Examples of the group in which -CH 2 - contained in the hydrocarbon group having 1 to 18 carbon atoms which may have a cyclic hydrocarbon group of Y 2 as a substituent is replaced by -O-, -S-, -CO- or -SO b1 - include, within the range allowed by the upper limit of the number of carbon atoms, the same groups as the groups exemplified by the group in which -CH 2 - contained in the hydrocarbon group of L 2 is replaced by -O-, -S-, -CO- or -SO b1 - The hydrocarbon group having 1 to 18 carbon atoms which may have a cyclic hydrocarbon group of Y

[0075] Examples of the anion represented by formula (I-A) include the anion represented by formula (I-A1) (hereinafter sometimes referred to as "anion (I-A1)") or the anion represented by formula (I-A2) (hereinafter sometimes referred to as "anion (I-A2)"). TIFF2025084122000063.tif29126 [In formula (I-A1), all symbols represent the same meaning as described above.]

[0076] Q b1 , Q b2 , Q b3 and Q b4 Examples of the alkyl group of include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group, etc. Q b1 , Qb2 , Q b3 and Q b4 Examples of the perfluoroalkyl group of Q and Q include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, a perfluorohexyl group, and the like. Q b1 and Q b2 is preferably such that at least one of Q and Q contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, even more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. b1 and Q b2 is preferably such that, independently of each other, each of Q and Q is a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, more preferably Q is a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and even more preferably Q is a hydrogen atom or a fluorine atom. Q b3 and Q b4 is preferably such that, independently of each other, each of Q and Q is a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, more preferably Q is a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and even more preferably Q is a hydrogen atom or a fluorine atom. b3 is preferably such that Q is a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 3 carbon atoms, and even more preferably Q is a hydrogen atom or a fluorine atom. b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably any integer from 0 to 3, more preferably 0, 1, or 2. X 1 is preferably -O-CO- or -CO-O-. L b3 Examples of the hydrocarbon group in L include the same hydrocarbon groups as those exemplified for L of formula (I-A) within the range permitted by the upper limit of the number of carbon atoms. b1 L b3 is a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (wherein -CH- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO 2 - may be replaced by -O- or -CO-). 2 - is -O-, -S-, -CO-, or -SO 2- may be replaced therewith.), an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent (-CH contained in the aromatic hydrocarbon group 2 - may be replaced with -O- or -S-.).) or a group formed by combining two or more of these groups is preferable, and a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms or a group represented by the following formula (Lb3-1) is more preferable. When -CH contained in the chain hydrocarbon group 2 - is replaced with -O- or -CO-, the number thereof is preferably 1 to 4, and one -CH contained in the chain hydrocarbon group 2 -CH 2 - is replaced with -O-CO- or -CO-O-, or one -CH contained in the chain hydrocarbon group 2 -CH 2 -CH 2 - is preferably replaced with -O-CO-O-. TIFF2025084122000064.tif1583[In the formula (Lb3-1), nb2 represents the same meaning as in the formula (I-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, and -CH contained in the chain hydrocarbon group 2 - may be replaced with -O- or -CO-, and the chain hydrocarbon group may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, and -CH contained in the alicyclic hydrocarbon group 2 - may be replaced with -O-, -S-, -CO- or -SO 2 -, and -CH contained in the aromatic hydrocarbon group 2 - may be replaced with -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. * and ** represent bonding sites, and * represents the bonding site with X 1 .).] In the formula (Lb3-1), the chain hydrocarbon group of L b31 is, as long as the upper limit of the number of carbon atoms permits, the same group as the chain hydrocarbon group exemplified by L b3 . In formula (Lb3-1), W b3 The alicyclic hydrocarbon group and aromatic hydrocarbon group of may, as long as the upper limit of the number of carbon atoms permits, be the same groups as the alicyclic hydrocarbon group and aromatic hydrocarbon group exemplified by L b3 are mentioned. In formula (Lb3-1), L b31 The substituents that the chain hydrocarbon group of may have and W b3 The substituents that the alicyclic hydrocarbon group and aromatic hydrocarbon group of may have are the same groups as the substituents exemplified as the substituents that the hydrocarbon group of L b3 may have. L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH 2 - contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, as the alicyclic hydrocarbon group and aromatic hydrocarbon group of W b3 the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below are preferable. In the alicyclic hydrocarbon group and aromatic hydrocarbon group represented below, * and ** represent the bonding site, * represents the bonding site with X 1 or L b31 and ** represents a hydrogen atom, a substituent or the bonding site with L b2 and at least one ** represents the bonding site with L b2 . Also, in the alicyclic hydrocarbon group represented below, the -CH 2 - contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. When the -CH 2 - contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 -, it preferably forms an ether ring, an ester ring (lactone), a carbonate ester ring, a sulfonic acid ester ring (sultone) or an acetal ring. TIFF2025084122000065.tif37168

[0077] In formula (I-A1), L b2 and Y b1Examples thereof include those similar to formula (I-A). Among them, L b2 is preferably a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH 2 - in the chain hydrocarbon group may be replaced by -O- or -CO-).), a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2b -L b22 -**(L b21 and L b22 either represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. X 2b represents -O-, -CO-O-, -O-CO- or -O-CO-O-. * and ** represent bonding sites, and ** represents the bonding site with Y b1 . However, the total number of carbon atoms of L b21 , X 2b and L b22 is 12 or less.). It is more preferably.).

[0078] In formula (I-A1), Y b1 is a methyl group having one or more groups represented by formula (IC), a cyclic hydrocarbon group having 3 to 20 carbon atoms having one or more groups represented by formula (IC) (wherein -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -).), preferably a methyl group having one or two groups represented by formula (IC), an alicyclic hydrocarbon group having 3 to 18 carbon atoms having one or two groups represented by formula (IC) (wherein -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -).) or an aromatic hydrocarbon group having 6 to 18 carbon atoms having one or two groups represented by formula (IC), more preferably a methyl group having one or two groups represented by formula (IC), an alicyclic hydrocarbon group having 3 to 16 carbon atoms having one or two groups represented by formula (IC) (wherein -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2 - may be replaced. ) Or it is more preferably an aromatic hydrocarbon group having 6 to 10 carbon atoms and having a group represented by one or two formulas (IC), a methyl group having a group represented by one or two formulas (IC), or a group represented by one or two formulas (IC). An alicyclic hydrocarbon group having 5 to 16 carbon atoms (the -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O- or -CO-. ) Or it is even more preferably a phenyl group having a group represented by one or two formulas (IC). The cyclic hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group or the phenyl group may have a substituent other than the group represented by the formula (IC). Specifically, it is preferably a group represented by the following formulas (Y1) to (Y36). In the formulas (Y1) to (Y36), R Yb represents a hydrogen atom, a group represented by the formula (IC), or another substituent that the cyclic hydrocarbon group of Y b1 may have, and represents an alkyl group having 1 to 4 carbon atoms among other substituents that the cyclic hydrocarbon group of Y Yc represents a hydrogen atom, a group represented by the formula (IC), or another substituent that the cyclic hydrocarbon group of Y b1 may have, and * represents the bonding site with L b2 . The alicyclic hydrocarbon groups and aromatic hydrocarbon groups represented by the following formulas (Y1) to (Y36) are not particularly shown in the following formulas, but may have other substituents. TIFF2025084122000066.tif88166 Specific examples of the anion represented by the formula (I-A1) include the anions described in JP-A-2011-246439, JP-A-2012-193170, and JP-A-2017-095446.

[0079] nb2 is preferably 1 or 2, and more preferably 2. Further, when nb2 is 2, L b3 is preferably a group represented by the formula (Lb3-1).

[0080] Examples of the anion (I-A1) include, for example, the following anions. Among them, anions represented by Formula (I-a-11) to Formula (I-a-22) and Formula (I-a-66) to Formula (I-a-77) are preferred. TIFF2025084122000067.tif226151

[0081] TIFF2025084122000068.tif228156

[0082] TIFF2025084122000069.tif252166

[0083] TIFF2025084122000070.tif106165

[0084] The anion represented by Formula (I-A2) is represented by the following formula. TIFF2025084122000071.tif2596[In Formula (I-A2), all symbols have the same meaning as described above.]

[0085] In Formula (I-A2), L b2 Examples of the hydrocarbon group of and Y b1 Examples of the cyclic hydrocarbon group of etc. are the same as those of the hydrocarbon group of L b2 in Formula (I-A) within the range allowed by the upper limit of the number of carbon atoms. Examples of the hydrocarbon group of L b1 in Formula (I-A), the methyl group of Y b2 and the substituents that the cyclic hydrocarbon group of Y b1 may have are the same as those of the hydrocarbon group of L b2 in Formula (I-A), the methyl group of Y b1 and the substituents that the cyclic hydrocarbon group of Y b2 may have. In Formula (I-A2), L 2 is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (the -CH b41 - contained in the chain hydrocarbon group may be replaced by -O- or -CO-).), more preferably, *-CO-O-L b41is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-. * represents the bonding site to the benzene ring to which SO 3 - is bonded. L b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms.). In formula (I-A2), Y b1 is preferably a methyl group having one or more groups represented by formula (IC) or a cyclic hydrocarbon group having 3 to 20 carbon atoms having one or more groups represented by formula (IC) (-CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -. More preferably, it is a methyl group having one or two groups represented by formula (IC), an alicyclic hydrocarbon group having 3 to 18 carbon atoms having one or two groups represented by formula (IC) (-CH contained in the alicyclic hydrocarbon group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -. Or an aromatic hydrocarbon group having 6 to 18 carbon atoms having one or two groups represented by formula (IC), and still more preferably, a methyl group having one or two groups represented by formula (IC), Y of formula (I-A1) b1 or L b1 The alicyclic hydrocarbon group or aromatic hydrocarbon group exemplified by (the group has one or two groups represented by formula (IC)). Specifically, it is preferably a group represented by the above-mentioned formula (Y1) to formula (Y36), and more preferably a group represented by the above-mentioned formula (Y1) to formula (Y19).

[0086] In formula (I-A2), nb4 is preferably any integer from 1 to 4, more preferably any integer from 1 to 3, still more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 The bonding position of is SO 3 -It is preferable that the structure be an m-position substitution of the benzene ring with respect to the bonding position as follows. TIFF2025084122000072.tif26107[wherein L b2 , Y b1 , R b1 , and nb3 have the same meanings as in formula (I-A2).] In formula (I-A2), when nb4 is 2 or more, the plurality of Ls b2 and Ys b1 are preferably the same group as each other.

[0087] Examples of the alkyl group having 1 to 6 carbon atoms for R b1 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, and hexyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3. Examples of the halogen atom for R b1 include fluorine atom, chlorine atom, bromine atom, and iodine atom. Examples of the group in which -CH 2 - contained in the alkyl group is replaced by -O- or -CO- include hydroxy group, carboxy group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, oxy group, carbonyl group, etc. Specific examples thereof are the same as those described above. Each R b1 is independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-), more preferably a fluorine atom, iodine atom, or an alkyl group having 1 to 3 carbon atoms (wherein -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-), and even more preferably a fluorine atom, iodine atom, hydroxy group, methoxy group, or methyl group. nb3 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 is more preferably a fluorine atom or an iodine atom. When nb3 is 2, one of the two R b1 is preferably a halogen atom and the other is preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms. One of the R b1 is more preferably a fluorine atom or an iodine atom, and the other is more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms.

[0088] Examples of the anion (I-A2) include, for example, the following anions. Among them, anions represented by Formula (I-a-46) to Formula (I-a-50), Formula (I-a-55) to Formula (I-a-61), and Formula (I-a-78) to Formula (I-a-101) are preferable. TIFF2025084122000073.tif86163

[0089] TIFF2025084122000074.tif187168

[0090] TIFF2025084122000075.tif228160

[0091] TIFF2025084122000076.tif241152

[0092] The anion represented by Formula (I-B) is represented by the following formula. TIFF2025084122000077.tif1187[In Formula (I-B), all symbols have the same meanings as described above.] In Formula (I-B), examples of the hydrocarbon group, cyclic hydrocarbon group and substituent of L b2 and Y b1 are the same groups as those of L b2 and Y b1 in Formula (I-A). In formula (I-B), L b2 is a single bond, *-L b23 -, *-L b23 -X 2b - or *-L b23 -X 2b -W 2 -X 3b -(L b23 represents a chain hydrocarbon group having 1 to 6 carbon atoms which may have a fluorine atom. X 2b and X 3b each independently represent -CO-O-, -O-CO-, -O-CO-O- or -O-. W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH 2 - contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with SO 2 .) is preferably the case. In formula (I-B), Y b1 is a methyl group having one or more groups represented by formula (IC) or a cyclic hydrocarbon group having 3 to 20 carbon atoms having one or more groups represented by formula (IC) (the -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -).) is preferably the case, a methyl group having one or two groups represented by formula (IC), an alicyclic hydrocarbon group having 3 to 18 carbon atoms having one or two groups represented by formula (IC) (the -CH 2 - contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -).) or an aromatic hydrocarbon group having 6 to 18 carbon atoms having one or two groups represented by formula (IC) is more preferable. Specifically, it is preferably a methyl group having one or two groups represented by formula (IC) or a group represented by formula (Y1) to formula (Y36) exemplified in formula (I-A1). In formula (I-B), when the groups in the two parentheses together form a ring containing A 1 , for example, an anion represented by formula (I-B’) can be mentioned. TIFF2025084122000078.tif21116[In formula (I-B’), A 1 , Y b1 , L b2 and nb5 have the same meanings as in formula (I-B). W b4 represents a disulfonylimide ring or a disulfonylmethide ring having 2 to 12 carbon atoms which may have a fluorine atom.] W b4 The disulfonylimide ring or disulfonylmethide ring of W preferably has 3 to 12 carbon atoms, more preferably 3 to 6 carbon atoms, and preferably the hydrogen atoms of the methylene groups contained in the ring are replaced by fluorine atoms.

[0093] Examples of the anion represented by formula (I-B) include anions represented by formula (I-a-62) to formula (I-a-65). TIFF2025084122000079.tif120170

[0094] Specific examples of salt (I) include salts obtained by arbitrarily combining the above-mentioned cations and anions. Specific examples of salt (I) are shown in the following table. In the following table, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation, and "~" indicates that each of salt (I) and anion (I) or cation (I) corresponds. For example, salt (I-1) is a salt composed of the anion represented by formula (I-a-1) and the cation represented by formula (I-c-1), salt (I-2) is a salt composed of the anion represented by formula (I-a-2) and the cation represented by formula (I-c-1), and salt (I-66) is a salt composed of the anion represented by formula (I-a-1) and the cation represented by formula (I-c-2). TIFF2025084122000080.tif33135

Table 1

[0095] Among them, the salt (I) is preferably a salt obtained by combining an anion represented by any one of the formulas (I-a-11) to (I-a-22), (I-a-46) to (I-a-50), and (I-a-55) to (I-a-101) with a cation represented by any one of the formulas (I-c-1) to (I-c-357). These salts can be produced by known methods. Commercially available products may also be used.

[0096] The resist composition of the present invention may contain one kind of the salt (I) or may contain two or more kinds of the salt (I). In the resist composition of the present invention, the total content of salt (I) is preferably 20% by mass or more, more preferably 30% by mass or more, and even more preferably 35% by mass or more, based on the solid content of the resist composition, for example, when containing a resin. Further, it is preferably 95% by mass or less, more preferably 90% by mass or less, and even more preferably 80% by mass or less. Specifically, it is preferably 20% by mass or more and 95% by mass or less, more preferably 35% by mass or more and 90% by mass or less, and even more preferably 35% by mass or more and 80% by mass or less. In this case, the total content of salt (I) and the resin is preferably 60% by mass or more, more preferably 70% by mass or more, even more preferably 75% by mass or more, and even more preferably 80% by mass or more. Further, it is preferably 99% by mass or less, more preferably 98% by mass or less, and even more preferably 97% by mass or less. Specifically, it is preferably 60% by mass or more and 99% by mass or less, more preferably 70% by mass or more and 98% by mass or less, and even more preferably 80% by mass or more and 97% by mass or less. Further, as another embodiment, for example, when not containing a resin, it is preferably 50% by mass or more, more preferably 60% by mass or more, even more preferably 65% by mass or more, and even more preferably 70% by mass or more. Further, it is preferably 99% by mass or less, more preferably 97% by mass or less, and even more preferably 95% by mass or less. Specifically, it is preferably 50% by mass or more and 99% by mass or less, more preferably 60% by mass or more and 97% by mass or less, and even more preferably 65% by mass or more and 95% by mass or less.

[0097] <Compound (B)> Compound (B) may be either a nonionic compound or an ionic compound. Examples of nonionic compounds include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxy ketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), etc. Representative examples of ionic compounds include onium salts containing an onium cation (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of anions of onium salts include sulfonic acid anions, sulfonylimide anions, sulfonylmethide anions, and carboxylic acid anions. However, compound (B) does not contain salt (I). Compound (B) may be part or all of a resin containing a structural unit having an acid-generating function, such as the structural unit (a7) described below, for example.

[0098] As compound (B), compounds that generate an acid upon irradiation, such as those described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc., can be used. Also, compounds produced by known methods may be used. Compound (B) may be used alone or in combination of two or more. Compound (B) may be an acid generator having an acid-labile group. For example, the compound or resin serving as the acid generator may contain a partial structure that becomes an acid-labile group, and the acid-labile group preferably contains the group (1) or group (2) described below. When the resist composition of the present invention contains a compound having an acid-labile group, a resin containing a structural unit having an acid-labile group may not be included.

[0099] As a preferred form of the compound (B), a salt represented by the formula (B1) (hereinafter sometimes referred to as "salt (B1)", "compound (B1)" or "acid generator (B1)") or a salt represented by the formula (B2) (hereinafter sometimes referred to as "salt (B2)", "compound (B2)" or "acid generator (B2)") is exemplified. However, salt (I) is excluded. TIFF2025084122000091.tif1392[In the formula (B1), L b1 represents a single bond or a (nb1 + 1)-valent hydrocarbon group which may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. Y represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. nb1 represents any integer from 1 to 6. When nb1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. Z1 + represents an organic cation.] L b1 Examples of the (nb1 + 1)-valent hydrocarbon group of include a monovalent chain hydrocarbon group, a monovalent alicyclic hydrocarbon group, a monovalent aromatic hydrocarbon group, and a monovalent group formed by combining two or more of these groups, from which nb1 hydrogen atoms are removed and which is bonded to one or more L b2 s. The number of carbon atoms of the hydrocarbon group is preferably 1 to 48, more preferably 1 to 42, still more preferably 1 to 36, even more preferably 1 to 30, and even more preferably 1 to 24. Examples of the chain hydrocarbon group include a group in which nb1 hydrogen atoms are removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples include methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, heptadecyl group, and the like. Examples of the alkenyl group include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, and nonenyl group. The number of carbon atoms of the chain hydrocarbon group is preferably from 1 to 36, more preferably from 1 to 24, still more preferably from 1 to 20, even more preferably from 1 to 18, still even more preferably from 1 to 12, and even more preferably from 1 to 10. Examples of the alicyclic hydrocarbon group include a group in which nb1 hydrogen atoms are removed from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, and the like. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decane group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. Further, a double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group represented by the following formula can be given. TIFF2025084122000092.tif26168 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 12, even more preferably 3 to 10, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 12, and even more preferably 7 to 12. Examples of the aromatic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. More specifically, examples of the aromatic hydrocarbon group represented by the following formula can be given. As for the number of carbon atoms of the aromatic hydrocarbon group in TIFF2025084122000093.tif1085, it is preferably 4 to 24, more preferably 4 to 20, still more preferably 4 to 18, even more preferably 5 to 14, still even more preferably 5 to 10, and even more preferably 6 to 10. L b1 In the hydrocarbon group of, -CH 2 - is replaced by -O-, -CO-, -S- or -SO 2 - When replaced, the number of carbon atoms before replacement shall be taken as the number of carbon atoms of the hydrocarbon group. L b1 Among the hydrocarbon groups of, -CH 2 - in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO 2 - The groups replaced are hydroxyl group (-CH in methyl group 2 - replaced by -O-), carboxy group (-CH in ethyl group 2 -CH 2 - replaced by -O-CO-), carbonyl group (-CH in methylene group 2 - replaced by -CO-), oxy group (-CH in methylene group 2 - replaced by -O-), alkoxy group (-CH at any position in alkyl group 2 - replaced by -O-), alkoxycarbonyl group (-CH at any position in alkyl group 2 -CH 2 - replaced by -O-CO-), alkylcarbonyl group (-CH at any position in alkyl group 2 - replaced by -CO-), alkylcarbonyloxy group (-CH at any position in alkyl group 2 -CH 2 - replaced by -CO-O-), alkoxycarbonyloxy group (-CH at any position in alkyl group 2 -CH 2 -CH 2- is a group replaced by -O-CO-O-), an alkanediyl-oxy group (any -CH in the alkanediyl group 2 - is a group replaced by -O-), an alkanediyl-oxycarbonyl group (any -CH in the alkanediyl group 2 -CH 2 - is a group replaced by -O-CO-), an alkanediyl-carbonyl group (any -CH in the alkanediyl group 2 - is a group replaced by -CO-), an alkanediyl-carbonyl-oxy group (any -CH in the alkanediyl group 2 -CH 2 - is a group replaced by -CO-O-), etc. may be mentioned. These replaced groups may be the same as the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. L b1 Among the hydrocarbon groups of, the -CH contained in the alicyclic hydrocarbon group 2 - being replaced by -O-, -CO-, -S- or -SO 2 - groups include groups containing structures such as cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sulfonic acid esters (sultones), etc. Specifically, alicyclic hydrocarbon groups represented by the following formulas may be mentioned. The bonding positions of the alicyclic hydrocarbon groups mentioned in the following formulas can be at any position. TIFF2025084122000094.tif48165L b1 Among the hydrocarbon groups of, the -CH contained in the aromatic hydrocarbon group 2 - may be replaced by -O- or -S-, and -CH 2 - groups replaced by -O- or -S- include groups derived from furan rings or thiophene rings, respectively. Specifically, aromatic hydrocarbon groups represented by the following formulas may be mentioned. As groups combining two or more of the linear hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group, examples include groups combining the above linear hydrocarbon group and the above alicyclic hydrocarbon group, groups combining the above linear hydrocarbon group and the above aromatic hydrocarbon group, groups combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and groups combining the above linear hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. As groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, they may be condensed rings. -CH contained in the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is replaced with -O-, -S-, -CO-, or -SO 2 - Examples of the resulting group include those similar to the groups exemplified in this specification within the range permitted by the upper limit of the number of carbon atoms. L b2 Examples of the divalent hydrocarbon group of include divalent linear hydrocarbon groups, divalent alicyclic hydrocarbon groups, divalent aromatic hydrocarbon groups, and groups combining two or more of these, and groups formed by removing one hydrogen atom from a monovalent hydrocarbon group and bonding to Y b1 L b2 Examples of the divalent linear hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group combining two or more of these of L are groups formed by removing one hydrogen atom from the monovalent linear hydrocarbon group, monovalent alicyclic hydrocarbon group, monovalent aromatic hydrocarbon group, and monovalent group combining two or more of these exemplified by L, respectively, within the range permitted by the upper limit of the number of carbon atoms. b1 L b1 and L b2 Examples of the substituents that the hydrocarbon groups of L and L may have include halogen atoms, cyano groups, nitro groups, etc. Examples of the halogen atom include fluorine atom, chlorine atom, bromine atom, iodine atom, etc. L b1 and L b2 ​​When it is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group, substantially, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Also, L b1 and L b2 In the hydrocarbon group of, the -CH 2 - of the chain hydrocarbon group contained in the hydrocarbon group of is replaced by -O-, -CO-, -S- or -SO 2 -, the hydrocarbon groups of L b1 and L b2 can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, an alkylthio group, an alkylsulfonyl group and the like. Examples of the cyclic hydrocarbon group of Y include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group and the aromatic hydrocarbon group of Y are respectively the same as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified by L b1 and, and when having no substituent, they may be a monovalent alicyclic hydrocarbon group and an aromatic hydrocarbon group. Examples of the substituent that the methyl group of Y may have include a halogen atom, a cyano group, a hydroxy group, a nitro group and the like. Y b1 Examples of the substituent that the cyclic hydrocarbon group of may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms which may have a halogen atom, a cyano group or a nitro group. The -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. The number of carbon atoms of the hydrocarbon group that the cyclic hydrocarbon group of Y may have is not included in the number of carbon atoms of the cyclic hydrocarbon group of Y. The hydrocarbon group having 1 to 18 carbon atoms which the cyclic hydrocarbon group of Y may have as a substituent includes a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these groups. Examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining two or more of these groups include, within the range allowed by the upper limit of the number of carbon atoms, L b1 the same groups as the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining two or more of these groups exemplified by b1 . In the hydrocarbon group having 1 to 18 carbon atoms which the cyclic hydrocarbon group of Y may have as a substituent, the -CH 2 - being replaced by -O-, -S-, -CO- or -SO 2 - Examples of the resulting group include, within the range allowed by the upper limit of the number of carbon atoms, L b1 the same groups as those exemplified for the hydrocarbon group in which -CH 2 - is replaced by -O-, -S-, -CO- or -SO 2 -. Further, as the hydrocarbon group having 1 to 18 carbon atoms which the cyclic hydrocarbon group of Y may have as a substituent, it may constitute a protecting group or a leaving group generally used in the art (an acid-labile group or a base-labile group such as group (1) or group (2)).

[0100] The anion of compound (B1) is preferably an anion represented by formula (B1-A1) (hereinafter sometimes referred to as "anion (B1-A1)") or an anion represented by formula (B1-A2) (hereinafter sometimes referred to as "anion (B1-A2)"). However, the anion of salt (I) is excluded. TIFF2025084122000096.tif29122[In formula (B1-A1), L b2 and Y represent the same meanings as in formula (B1). Q b1 、Q b2 、Q b3 and Q b4 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer from 0 to 6. When z1 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or an (nb2 + 1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. nb2 represents an integer from 1 to 3. When nb2 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other.]

[0101] Q in formula (B1 - A1) b1 、Q b2 、Q b3 、Q b4 、z1, X 1 、L b3 、L b2 、nb2 are the same as Q in formula (I - A1) or formula (B1) etc. described above respectively b1 、Q b2 、Q b3 、Q b4 、z1, X 1 、L b3 、L b2 、nb2 and the like can be mentioned. In formula (B1 - A1), Y is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (-CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (-CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and even more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (-CH 2- may be replaced by -O-, -CO-, -S- or -SO 2 - or a C6-C10 aromatic hydrocarbon group which may have a substituent is more preferable. Specifically, it is preferably a group represented by the following formulas (Y1) to (Y36) described above. However, those having a group represented by the formula (IC) as a substituent are excluded.

[0102] As the anion represented by the formula (B1-A1), anions represented by the formulas (B1-A-1) to (B1-A-85) [hereinafter, may be referred to as "anion (B1-A-1)" etc. according to the formula number] are preferable, and an anion represented by any one of the formulas (B1-A-1) to (B1-A-4), formula (B1-A-9), formula (B1-A-10), formulas (B1-A-24) to (B1-A-33), formulas (B1-A-36) to (B1-A-40), and formulas (B1-A-47) to (B1-A-85) is more preferable. TIFF2025084122000097.tif234160

[0103] TIFF2025084122000098.tif249150

[0104] TIFF2025084122000099.tif250162 Here, R i2 ~R i7 are, independently of each other, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. R i8 is, for example, a chain hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group. L A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 represent the same meaning as described above. Specific examples of the anion represented by the formula (B1-A1) include the anions described in JP-A-2010-204646.

[0105] As the anion represented by the formula (B1-A1), preferably anions represented by the formulas (B1a-1) to (B1a-70) are exemplified. Among them, an anion represented by any one of the formulas (B1a-1) to (B1a-4), (B1a-7) to (B1a-11), (B1a-14) to (B1a-30), and (B1a-35) to (B1a-70) is preferable. TIFF2025084122000100.tif185163

[0106] TIFF2025084122000101.tif252166

[0107] TIFF2025084122000102.tif70166

[0108] The anion represented by the formula (B1-A2) is represented by the following formula. TIFF2025084122000103.tif24100[In the formula (B1-A2), L b2 and Y represent the same meaning as in the formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH 2 - in the alkyl group may be replaced by -O- or -CO-. nb4 represents an integer of any one of 1 to 5. When nb4 is 2 or more, the groups in a plurality of parentheses may be the same as or different from each other. nb3 represents an integer of any one of 0 to 4. When nb3 is 2 or more, a plurality of R b1 may be the same as or different from each other. However, 1 ≦ nb4 + nb3 ≦ 5 is satisfied.] Regarding L b2 in the formula (B1-A2), R b1 , nb4, and nb3, those similar to L b2 , R b1 , nb4, and nb3 in the above-described formula (I-A2) or formula (B1), etc. are exemplified.

[0109] In formula (B1-A2), Y is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (the -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -). More preferably, it is an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -), or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. Even more preferably, it is an alicyclic hydrocarbon group or an aromatic hydrocarbon group exemplified by Y or L in formula (B1-A1) b1 . Specifically, it is preferably a group represented by the above-mentioned formulas (Y1) to (Y36), and more preferably a group represented by the above-mentioned formulas (Y1) to (Y19). However, those having a group represented by formula (IC) as a substituent are excluded.

[0110] In formula (B1-A2), when nb4 is 1 or 2, the bonding position of -L b2 -Y is preferably the following structure which is the m-position substitution of the benzene ring with respect to the bonding position of SO 3 - . TIFF2025084122000104.tif24106[In the above formula, L b2 , Y, R b1 , and nb3 represent the same meanings as in formula (B1-A2).]

[0111] Examples of the anion represented by formula (B1-A2) include the following anions. Among them, the anions represented by formulas (B2a-1) to (B2a-20) are preferred, and the anions represented by formulas (B2a-1) to (B2a-11), (B2a-16) to (B2a-20) are more preferred. In the following anions, some R b1 are omitted and may include substituents not shown in the figure. TIFF2025084122000105.tif102153

[0112] TIFF2025084122000106.tif13103[In formula (B2), A 1 represents a nitrogen atom or a carbon atom. L b2 ’ represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. Y ’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. nb5 represents an integer of 2 or 3. When nb5 is 2, A 1 is a nitrogen atom, and when nb5 is 3, A 1 is a carbon atom. The groups in a plurality of parentheses may be the same as or different from each other, and the groups in two parentheses may combine to form a ring containing A 1 . Z1 + represents an organic cation.] Regarding A 1 , L b2 ’ and nb5 in formula (B2), those similar to A 1 , L b2 , nb5 in formula (I-B) or formula (B1) etc. can be mentioned. In formula (B2), Y ’ is preferably a methyl group having a fluorine atom or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (where -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -).), and a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (where -CH 2 - in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2- may be replaced. ) Or it is more preferably an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. Specifically, it is more preferably a trifluoromethyl group or a group represented by the formula (Y1) to the formula (Y36) exemplified in the formula (B1-A1). However, those having a group represented by the formula (IC) as a substituent are excluded. In the formula (B2), when the groups in the two parentheses together form a ring containing A 1 For example, an anion represented by the formula (B2') can be mentioned. TIFF2025084122000107.tif21112 [In the formula (B2'), A 1 、Y’, L b2 ’ and nb5 represent the same meaning as in the formula (B2). W b4 represents a disulfonylimide ring or a disulfonylmethide ring having 2 to 12 carbon atoms which may have a fluorine atom.] As W in the formula (B2'), b4 the same ones as W in the formula (I-B) etc. can be mentioned. b4

[0113] Examples of the anion in the salt represented by the formula (B2) include the following. Among them, an anion represented by the formula (B3a-1) or the formula (B3a-2) is preferable. TIFF2025084122000108.tif176163

[0114] In another form of the compound (B), a salt in which the anion in the salt represented by the formula (B1) etc. is replaced with a carboxylic acid anion etc. is also preferably used as the compound (B). Examples of the carboxylic acid anion include the following. TIFF2025084122000109.tif43155

[0115] Z1 + ​Examples of the organic cation include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, organic phosphonium cations, and the like. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations or aryliodonium cations are more preferred. Specifically, cations represented by any of formula (b2-1) to formula (b2-5) (hereinafter, may be referred to as "cation (b2-1)" etc. according to the formula number) can be mentioned. TIFF2025084122000110.tif84162[In formula (b2-1) to formula (b2-5), R b4 ~R b6 each independently represents a linear hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, and the hydrogen atom contained in the linear hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and the hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and -CH 2 - contained in the ring may be replaced with -O-, -S-, or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer of 0 to 5. When m2 is 2 or more, a plurality of Rs b7 may be the same or different, and when n2 is 2 or more, a plurality of Rs b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and the -CH 2 - contained in the ring may be replaced by -O-, -S- or -CO-. R b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 may be bonded to each other to form a ring including -CH-CO- to which they are bonded, and the -CH 2 - contained in the ring may be replaced by -O-, -S- or -CO-. R b13 ~R b18 and R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are bonded, and the -CH2 - may be replaced by -O-, -S- or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid-labile group. L b31 and L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer from 0 to 5. q2 and r2 each independently represent an integer from 0 to 4. u2 represents 0 or 1. o21, p22, q23, r24, t25 and s26 each independently represent an integer from 0 to 4. u3 represents an integer from 1 to 3 and satisfies 1 ≦ u3 + q23 ≦ 5. u4 and u5 each independently represent an integer from 0 to 3 and satisfy 0 ≦ u4 + o21 ≦ 5 and 0 ≦ u5 + p22 ≦ 5. When o2 is 2 or more, the plurality of R b13 are the same or different; when p2 is 2 or more, the plurality of R b14 are the same or different; when q2 is 2 or more, the plurality of R b15 are the same or different; when r2 is 2 or more, the plurality of R b16 are the same or different; when s2 is 2 or more, the plurality of R b17 are the same or different; when t2 is 2 or more, the plurality of R b18 are the same or different. When o21, p22, q23, r24, t25 and s26 are each 2 or more, the plurality of R b21 ~R b26 are each the same or different. When u3, u4 and u5 are each 2 or more, the groups within the plurality of parentheses are each the same or different. When u2 is 0, any one of o2, p2, q2 and r2 is 1 or more, and R b13 ~R b16At least one of them is preferably a halogen atom. When u2 is 1, any one of o2, p2, s2, t2, q2 and r2 is 1 or more, and R b13 ~R b18 At least one of them is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. Also, when u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom. The aliphatic hydrocarbon group represents a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group and 2-ethylhexyl group. In particular, the chain hydrocarbon group of R b9 ~R b12 is preferably having 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group and cyclodecyl group. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups. TIFF2025084122000111.tif10158 In particular, the alicyclic hydrocarbon group of R b9 ~R b12 is preferably having 3 to 18 carbon atoms, more preferably 4 to 12 carbon atoms. Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include a methylcyclohexyl group, a dimethylcyclohexyl group, a 2-methyladamantan-2-yl group, a 2-ethyladamantan-2-yl group, a 2-isopropyladamantan-2-yl group, a methylnorbornil group, an isobornyl group, etc. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms of the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The alkyl fluoride group represents an alkyl group having 1 to 12 carbon atoms and having a fluorine atom, and examples thereof include a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. The number of carbon atoms of the alkyl fluoride group is preferably 1 to 9, more preferably 1 to 6, and still more preferably 1 to 4.

[0116] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a biphenyl group, a naphthyl group, a phenanthryl group, etc. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and aromatic hydrocarbon groups having a chain hydrocarbon group having 1 to 18 carbon atoms (tolyl group, xylyl group, cumenyl group, mesityl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), and aromatic hydrocarbon groups having an alicyclic hydrocarbon group having 3 to 18 carbon atoms (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.) etc. are mentioned. When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferable. Examples of the aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group include a p-methoxyphenyl group, etc. Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as a benzyl group, a phenethyl group, a phenylpropyl group, a trityl group, a naphthylmethyl group, a naphthylethyl group, etc. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, a dodecyloxy group, and the like. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. Examples of the alkylcarbonyloxy group include a methylcarbonyloxy group, an ethylcarbonyloxy group, a propylcarbonyloxy group, an isopropylcarbonyloxy group, a butylcarbonyloxy group, a sec-butylcarbonyloxy group, a tert-butylcarbonyloxy group, a pentylcarbonyloxy group, a hexylcarbonyloxy group, an octylcarbonyloxy group, a 2-ethylhexylcarbonyloxy group, and the like. R b4 and R b5 The ring formed by R and R being bonded to each other together with the sulfur atom to which they are bonded may be any of a monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include rings having 3 to 18 carbon atoms, preferably rings having 4 to 18 carbon atoms. Further, examples of the ring containing a sulfur atom include 3-membered to 12-membered rings, preferably 3-membered to 7-membered rings. For example, the following rings can be mentioned. * represents a bonding site. TIFF2025084122000112.tif18125R b9 and R b10 The ring formed by R and R together may be any of a monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include 3-membered to 12-membered rings, preferably 3-membered to 7-membered rings. For example, a thiolan-1-ium ring (tetrahydrothiophenium ring), a thian-1-ium ring, a 1,4-oxathian-4-ium ring, and the like can be mentioned. R b11 and R b12The ring formed by combining them may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include 3-membered rings to 12-membered rings, preferably 3-membered rings to 7-membered rings. Examples include oxocycloheptane rings, oxocyclohexane rings, oxonorbornane rings, oxoadamantane rings, and the like. R b27 ~R b29 Examples of the group containing an acid-labile group of ~R c30 include -R c30 , -CO-O-R c10 or -L c30 -CO-O-R c10 (where L c30 represents an alkanediyl group having 1 to 6 carbon atoms, and R R b27 ~R b29 Examples of the acid-labile group of include the following groups (1) and (2) and the like.

[0117] Among cations (b2-1) to (b2-5), preferably, cation (b2-1), cation (b2-4) or cation (b2-5). Examples of cation (b2-1) include the following cations. TIFF2025084122000113.tif150165 Examples of cation (b2-2) include the following cations. TIFF2025084122000114.tif14136 Examples of cation (b2-3) include the following cations. TIFF2025084122000115.tif21130 Examples of cation (b2-4) include the following cations. TIFF2025084122000116.tif124159 Examples of cation (b2-5) include the following cations. TIFF2025084122000117.tif103156

[0118] Compound (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be arbitrarily combined. As the compound (B), preferably, an anion represented by any of formula (B1a-1) to formula (B1a-4), formula (B1a-7) to formula (B1a-11), formula (B1a-14) to formula (B1a-30), formula (B1a-35) to formula (B1a-70), formula (B2a-1) to formula (B2a-11), formula (B2a-16) to formula (B2a-20), and formula (B3a-1) to formula (B3a-20), and a combination with cation (b2-1), cation (b2-2), cation (b2-3), cation (b2-4), or cation (b2-5) can be mentioned.

[0119] As the compound (B), preferably, those represented by formula (B1-1) to formula (B1-105), formula (B2-1) to formula (B2-20), and formula (B3-1) to formula (B3-28) can be mentioned. Among them, those containing an arylsulfonium cation are preferable, and those represented by formula (B1-1) to formula (B1-3), formula (B1-5) to formula (B1-7), formula (B1-11) to formula (B1-14), formula (B1-20) to formula (B1-26), formula (B1-29), formula (B1-31) to formula (B1-105), formula (B2-1) to formula (B2-20), and formula (B3-1) to formula (B3-28) are particularly preferable. TIFF2025084122000118.tif174167

[0120] TIFF2025084122000119.tif248158

[0121] TIFF2025084122000120.tif250163

[0122] TIFF2025084122000121.tif254160

[0123] TIFF2025084122000122.tif249162

[0124] TIFF2025084122000123.tif251151

[0125] TIFF2025084122000124.tif184159

[0126] When the resist composition contains salt (I) and compound (B) as an acid generator, the ratio of the contents of salt (I) and compound (B) (mass ratio; salt (I): compound (B)) is usually from 1:99 to 99:1, preferably from 2:98 to 98:2, more preferably from 5:95 to 95:5, still more preferably from 10:90 to 90:10, and particularly preferably from 15:85 to 85:15. In the resist composition of the present invention, when salt (I) and compound (B) are contained as an acid generator, the total content ratio of salt (I) and compound (B) is preferably 20% by mass or more and 95% by mass or less, more preferably 35% by mass or more and 90% by mass or less, still more preferably 35% by mass or more and 85% by mass or less, based on the solid content of the resist composition.

[0127] <Compound (L) having a phenolic hydroxy group or a benzoic acid carboxy group, etc.> The resist composition of the present invention preferably further contains a compound having a phenolic hydroxy group or a benzoic acid carboxy group, or a compound in which the phenolic hydroxy group or the benzoic acid carboxy group of these compounds is protected with an acid-labile group (hereinafter sometimes referred to as "compound (L)"). The compound also refers to a compound containing an aromatic hydrocarbon ring having a hydroxy group or a carboxy group, or a compound in which the hydroxy group or the carboxy group of these compounds is protected with an acid-labile group. Examples of the compound having a phenolic hydroxy group or a benzoic acid carboxy group, or a compound in which the phenolic hydroxy group or the benzoic acid carboxy group of these compounds is protected with an acid-labile group include compounds having a structure represented by formula (L0) (hereinafter sometimes referred to as "compound (L0)"). TIFF2025084122000125.tif2471[In formula (L0), Ar lk represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms which may have a substituent. X lkrepresents a single bond or a carbonyl group. R lk represents a hydrogen atom or an acid-labile group. lk represents an integer of 1 or more. When lk is 2 or more, the groups within multiple parentheses may be the same as or different from each other. * represents a bonding site. lo represents an integer of 1 or more.] Ar lk Examples of the aromatic hydrocarbon ring of Ar include a benzene ring, a naphthalene ring, an anthracene ring, a phenanthrene ring, and the like. Ar lk Examples of the substituent that the aromatic hydrocarbon ring of Ar may have include the same groups as those exemplified by R lk11 and R lk22 and the like. Ar lk is preferably a benzene ring or a naphthalene ring which may have a substituent, and more preferably a benzene ring which may have a substituent. R lk Examples of the acid-labile group of R include a group represented by formula (1a) (hereinafter, sometimes referred to as "acid-labile group (1a)") and a group represented by formula (2a) (hereinafter, sometimes referred to as "acid-labile group (2a)"). Among them, the group represented by formula (2a) is preferable. TIFF2025084122000126.tif2156[In formula (1a), R aa1 , R aa2 and R aa3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. * represents a bonding site.] TIFF2025084122000127.tif2160[In formula (2a), R aa1’ and Raa2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other to form, together with the -C-X a - to which they are bonded, a heterocyclic group having 3 to 20 carbon atoms, and the -CH 2 - contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X a represents an oxygen atom or a sulfur atom. * represents a bonding site.]

[0128] R aa1 、R aa2 and R aa3 Examples of the alkyl group of R aa1 、R aa2 and R aa3 include a methyl group, an ethyl group, a propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, an n-octyl group, etc. The number of carbon atoms of the alkyl group of R 、R aa1 、R aa2 and R aa3 Examples of the alkenyl group of R 、R aa1 、R aa2 and R aa3 The alicyclic hydrocarbon group of R aa1 、Raa2 and R aa3 The number of carbon atoms of the alicyclic hydrocarbon group of and R is 3 to 20, preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. TIFF2025084122000128.tif9159R aa1 , R aa2 and R aa3 Examples of the aromatic hydrocarbon group of and R include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, and phenanthryl group. R aa1 , R aa2 and R aa3 The number of carbon atoms of the aromatic hydrocarbon group of and R is 6 to 18, preferably 6 to 14, and more preferably 6 to 10. Examples of the combined group include a group combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornil group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), an aralkyl group such as benzyl group, an aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), an aryl-cycloalkyl group such as phenylcyclohexyl group, etc.

[0129] R aa1 and R aa2 When and R are bonded to each other to form an alicyclic hydrocarbon group together with the carbon atom to which they are bonded, examples of -C(R aa1 )(R aa2 )(R aa3 ) include the following groups. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. * represents the bonding site with -O-. TIFF2025084122000129.tif30140

[0130] Examples of the group represented by formula (1a) include a 1,1,1-trialkyl group (wherein R aa1 、R aa2 and R aa3 are alkyl groups, preferably a tert-butyl group), a 2-alkyladamantan-2-yl group (in formula (1a), R aa1 、R aa2 and the carbon atom to which they are attached form an adamantyl group, and R aa3 is an alkyl group), and a 1-(adamantan-1-yl)-1,1-dialkyl group (in formula (1a), R aa1 and R aa2 are alkyl groups, and R aa3 is an adamantyl group), etc.

[0131] Examples of the hydrocarbon groups of R aa1' 、R aa2' and R aa3' include chain hydrocarbon groups such as alkyl groups, cyclic hydrocarbon groups such as alicyclic hydrocarbon groups and aromatic hydrocarbon groups, and groups formed by combining these. Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and the group formed by combining these are the same as the groups exemplified for R aa1 、R aa2 and R aa3 . When R aa2' and R aa3' are bonded to each other to form a heterocyclic group together with the carbon atom to which they are attached and X a , examples of -C(R aa1' )(R aa2' )-X a -(R aa3' ) are as follows. * represents the bonding site. The number of carbon atoms of the heterocyclic group is 3 to 20, preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. TIFF2025084122000130.tif21143R aa1 、R aa2, R aa3 , R aa1' , R aa2' and R aa3' The halogen atom that may be included may be a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. R aa1' and R aa2' Among them, at least one is preferably a hydrogen atom.

[0132] Specific examples of the acid-labile group (1a) include the following groups. * represents the bonding site. TIFF2025084122000131.tif60162Specific examples of the acid-labile group (2a) include the following groups. * represents the bonding site. TIFF2025084122000132.tif58148

[0133] lk may be any integer of 2 or more. Further, lk may be, for example, any integer of 13 or less. Among them, lk is preferably any integer of 1 to 11, more preferably any integer of 1 to 9, still more preferably any integer of 1 to 7, even more preferably any integer of 1 to 6, still even more preferably any integer of 1 to 5, and yet even more preferably any integer of 1 to 4. lo may be any integer of 2 or more. Further, lo may be, for example, any integer of 13 or less. Among them, lo is preferably any integer of 1 to 11, more preferably any integer of 1 to 9, still more preferably any integer of 1 to 7, even more preferably any integer of 1 to 6, still even more preferably any integer of 1 to 5, and yet even more preferably any integer of 1 to 4.

[0134] Examples of the compound (L0) include a compound represented by the formula (LX) (hereinafter sometimes referred to as "compound (LX)"). TIFF2025084122000133.tif23130[In the formula (LX), Ar k1 and Ar k2Each independently represents an aromatic hydrocarbon ring having 6 to 18 carbon atoms. X lk1 and X lk2 Each independently represents a single bond or a carbonyl group. R lk1 and R lk2 Each independently represents a hydrogen atom or an acid-labile group. Lx represents a hydrocarbon group having 1 to 80 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -. R lk11 and R lk22 Each independently represents a halogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -, and R lk11 and R lk22 , R lk11 and Lx or R lk22 and Lx may each form a ring by bonding, the ring may have a substituent, and -CH 2 - in the ring may be replaced by -O-, -S-, -CO-, -SO- or -SO 2 -. lx2 represents any integer from 1 to 6, and when lx2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk1’ represents any integer from 1 to 13, and when lk1’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk11’ represents any integer from 0 to 12, and when lk11’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk2’ represents any integer from 1 to 13, and when lk2’ is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk22’ represents any integer from 0 to 12. When lk22’ is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. Ar k1 and Ar k2 Examples of the aromatic hydrocarbon ring of lk include the same groups as those exemplified for the aromatic hydrocarbon ring of Ar. R lk1 and R lk2 Examples of the acid-labile group of lk include the same groups as those exemplified for the acid-labile group of R. Examples of the hydrocarbon group of Lx include a chain hydrocarbon group, a monocyclic or polycyclic (including spiro ring, condensed ring, bridged ring, etc.) alicyclic hydrocarbon group, and an aromatic hydrocarbon group, and a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. The hydrocarbon group of Lx is a (lx2 + 1)-valent hydrocarbon group, and depending on lx2, it can be a 2- to 7-valent hydrocarbon group. The number of carbon atoms of the hydrocarbon group is preferably 1 to 72, more preferably 1 to 60, still more preferably 1 to 48, even more preferably 1 to 36, and even more preferably 1 to 24. Examples of the chain hydrocarbon group include an alkanediyl group and the like. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group; and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. Note that the terminal of the branched alkanediyl group may be a methyl group. In addition, examples of the chain hydrocarbon group include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, preferably 1 to 10, even more preferably 1 to 9, still more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4. Examples of the alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group; polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group; spirocyclic alicyclic hydrocarbon groups such as spirocyclohexane-1,2′-cyclopentane group, spiroadamantane-2,3′-cyclopentane group, and spiro rings having a cycloalkyl group spiro-bonded to a norbornyl group or an adamantyl group, respectively. In addition, examples of the alicyclic hydrocarbon group include groups in which one or more hydrogen atoms of the above-described groups are replaced at the bonding site. Examples of the alicyclic hydrocarbon group include the following groups and the like. The bonding site can be at any position. TIFF2025084122000134.tif45163 The number of carbon atoms in the alicyclic hydrocarbon group is, for example, 3 to 72, may be 3 to 60, preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include aromatic hydrocarbon groups such as arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. In addition, examples of the aromatic hydrocarbon group include groups in which one or more hydrogen atoms of the above-described groups are replaced at the bonding site. The number of carbon atoms in the aromatic hydrocarbon group is, for example, 6 to 72, may be 6 to 60, preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 14, and even more preferably 6 to 10. Examples of the group formed by combining two or more types include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, and a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more types. Also, any of the groups may be bonded to Ar k1 or Ar k2 and may be bonded thereto. Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include, for example, -alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, -chain hydrocarbon group-alicyclic hydrocarbon group-, and the like. Examples of the group combining an aromatic hydrocarbon group and an aliphatic hydrocarbon group include -aromatic hydrocarbon group-aliphatic hydrocarbon group-, -aliphatic hydrocarbon group-aromatic hydrocarbon group-aliphatic hydrocarbon group-, -aliphatic hydrocarbon group-aromatic hydrocarbon group-, etc. Examples of the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-, etc. Examples of the combined group also include a group in which one or more hydrogen atoms of the above-described group are replaced at the bonding site. -CH contained in the hydrocarbon group of Lx 2 - may be replaced by -O-, -S-, -SO 2 - or -CO-. -CH contained in the hydrocarbon group 2 - is replaced by -O-, -S-, -SO 2 - or -CO-. Examples of the group formed by such replacement include, as described above, a hydroxy group, a carboxy group, a thiol group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkoxy group, an alkylthio group, an alkylsulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, etc. These replaced groups include the same groups as those exemplified in the present specification within the range allowed by the upper limit of the number of carbon atoms. In addition, -CH contained in an alicyclic hydrocarbon group or a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group 2 - is replaced by -O-, -S-, -CO- or -SO 2 - The groups thus replaced include the same groups as those exemplified in the present specification within the range allowed by the upper limit of the number of carbon atoms. -CH contained in the hydrocarbon group 2 - is replaced by -O-, -S-, -SO 2 - or -CO-, and the group also includes a group in which one or more hydrogen atoms of the above-mentioned group are replaced at the bonding site. Examples of the substituent that Lx may have include a halogen atom, a cyano group, and the like. When Lx is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. -CH contained in the chain hydrocarbon group such as an alkyl group contained in Lx 2 - is replaced by -O-, -CO-, -S- or -SO 2 - By this replacement, Lx can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, and a sulfonyl group. Examples of the substituent that Lx may have include groups similar to the groups exemplified by R lk11 and R lk22 and the like.

[0135] R lk11 and R lk22 Examples of the halogen atom of R and R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R lk11 and R lk22 Examples of the hydrocarbon group of R and R include chain hydrocarbon groups such as an alkyl group and an alkanediyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. The alkyl group is a straight-chain or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The alkandiyl group is a linear or branched alkandiyl group, and examples thereof include linear alkandiyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17-diyl group, and branched alkandiyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group. The terminal of the branched alkandiyl group may be a methyl group. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 12, more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples of the alicyclic hydrocarbon group include the groups represented below. The bonding site can be at any position. TIFF2025084122000135.tif43163Specifically, examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclononyl group, cyclodecyl group, cyclododecyl group, etc. Examples of the polycyclic alicyclic hydrocarbon group include polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, etc. Examples of the spirocyclic alicyclic hydrocarbon group include cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane group, spiroadamantane-2,3'-cyclopentane group, etc., and spiro rings having a cycloalkyl group spiro-bonded to a norbornyl group or an adamantyl group respectively. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group, etc. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and even more preferably 6 to 10. Examples of the group formed by combining two or more kinds of groups include a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*, alkyl group-aromatic hydrocarbon group-alkanediyl group-*, etc., and -CH contained in the alkanediyl group and the alkyl group 2 - may be replaced by -O-, -CO-, -S- or -SO 2 -). Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*, alkyl group-alicyclic hydrocarbon group-alkanediyl group-*, etc., and -CH contained in the alicyclic hydrocarbon group, the alkanediyl group and the alkyl group 2 - may be replaced by -O-, -CO-, -S- or -SO 2- may be replaced by). A group combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (for example, aromatic hydrocarbon group - alicyclic hydrocarbon group - *, alicyclic hydrocarbon group - aromatic hydrocarbon group - *), and -CH contained in the alicyclic hydrocarbon group 2 - is -O-, -CO-, -S- or -SO 2 - may be replaced by). * represents a bonding site. Examples of the aromatic hydrocarbon group - alkanediyl group - * include aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group - aromatic hydrocarbon group - * include tolyl group, xylyl group, cumenyl group and the like. Examples of the alicyclic hydrocarbon group - alkanediyl group - * include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl group and the like. Examples of the alkyl group - alicyclic hydrocarbon group - * include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, 2-alkyladamantan-2-yl group and the like. Examples of the aromatic hydrocarbon group - alicyclic hydrocarbon group - * include phenylcyclohexyl group and the like. Examples of the alicyclic hydrocarbon group - aromatic hydrocarbon group - * include cyclohexylphenyl group and the like. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to the benzene ring. R lk11 and R lk22 In the hydrocarbon group represented by, -CH 2 - is -O-, -CO-, -S- or -SO 2 When it is replaced by -, the carbon number before replacement is taken as the total carbon number of the hydrocarbon group. Also, the number may be one or two or more. -CH contained in the hydrocarbon group 2 - is -O-, -S-, -SO 2-Or as the group replaced by -CO-, groups similar to the groups exemplified by Lx can be mentioned as long as the upper limit of the number of carbon atoms allows. R lk11 and R lk22 Examples of the substituent that the hydrocarbon group of and R may have include a halogen atom, a cyano group, and the like. R lk11 and R lk22 When and R are hydrocarbon groups having a halogen atom, examples of the hydrocarbon group having a halogen atom of R and R include a chain hydrocarbon group having a halogen atom such as a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. lk11 and R lk22 Examples of the hydrocarbon group having a halogen atom of and R include a chain hydrocarbon group having a halogen atom such as a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom. The haloalkyl group represents an alkyl group having a halogen atom. Examples of the haloalkyl group include haloalkyl groups having 1 to 12 carbon atoms such as a fluoroalkyl group having 1 to 12 carbon atoms, a chloroalkyl group having 1 to 12 carbon atoms, a bromoalkyl group having 1 to 12 carbon atoms, and an iodoalkyl group having 1 to 12 carbon atoms. Specific examples of the haloalkyl group include perfluoroalkyl groups having 1 to 12 carbon atoms (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. The number of carbon atoms of the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. -CH contained in the haloalkyl group 2- may be replaced by -O- or -CO-, etc. Such groups include haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, haloalkylcarbonyloxy groups, etc. Specifically, haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, haloalkylcarbonyloxy groups having 2 to 11 carbon atoms, etc. may be mentioned. For example, groups in which one or more hydrogen atoms of the groups exemplified above are replaced by halogen atoms may be mentioned. The hydrocarbon group may have one substituent or a plurality of substituents.

[0136] Examples of the compound (LX) include a compound represented by the formula (LX-0) (hereinafter sometimes referred to as "compound (LX-0)"). As the compound (LX-0), a compound represented by the formula (LX-1) (hereinafter sometimes referred to as "compound (LX-1)") is preferable. TIFF2025084122000136.tif23125[In the formula (LX-0), symbols other than the following have the same meanings as described above. lk1 represents any integer from 1 to 5. When lk1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk11 represents any integer from 0 to 4, satisfies 1 ≦ lk1 + lk11 ≦ 5. When lk11 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk2 represents any integer from 1 to 5. When lk2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk22 represents any integer from 0 to 4, satisfies 1 ≦ lk2 + lk22 ≦ 5. When lk22 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.] TIFF2025084122000137.tif41147[In the formula (LX-1), symbols other than the following have the same meanings as described above. X lk3 represents a single bond or a carbonyl group. R lk3 represents a hydrogen atom or an acid-labile group. Lx1 and Lx2 each independently represent a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -. R lk33 represents a halogen atom or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -. lx3 represents any integer from 0 to 6. When lx3 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk3 represents any integer from 1 to 4. When lk3 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. lk33 represents any integer from 0 to 3, satisfies 1 ≦ lk3 + lk33 ≦ 4. When lk33 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.] The hydrocarbon group which may have a substituent of Lx1 and Lx2 (where -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -) includes, within the range allowed by the upper limit of the number of carbon atoms etc., the same groups as the hydrocarbon group which may have a substituent exemplified by Lx (where -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -). R lk33 The halogen atom or the hydrocarbon group which may have a substituent of (where -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO 2 -) includes, within the range allowed by the upper limit of the number of carbon atoms etc., the halogen atom or the hydrocarbon group which may have a substituent exemplified by R lk11 and R lk22 (where -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2 - may be replaced with. Examples of the same groups are as follows. R lk11 and Lx 1 , or, R lk22 and Lx 2 may each be bonded to each other to form a ring. In this case, the ring is a condensed ring that condenses with the benzene ring or a spiro ring that is spiro-bonded to the benzene ring because R lk11 and R lk22 are each bonded to the benzene ring. Examples of the condensed ring or spiro ring include those having a total carbon number of 3 to 28, which may be 3 to 24, and preferably 3 to 20. The condensed ring or spiro ring may be a ring containing one or more -O-, -CO-, -S- or -SO 2 -. The benzene ring (-R lk11 )-Lx 1 - or the benzene ring (-R lk22 )-Lx 2 -, in R lk11 and Lx 1 or R lk22 and Lx 2 are each bonded to form a ring. Examples of the ring include the following groups. Although the description of the following groups is omitted, they have at least one R lk1 -O-X lk1 - or R lk2 -O-X lk2 - and may have other R lk11 or R lk22 . * represents the bonding site with the benzene ring. TIFF2025084122000138.tif19123R lk11 and R lk22 may be bonded to each other to form a ring. Examples of the ring in this case include a ring having a structure represented by the formula (LX-13) described later.

[0137] As the compound (LX-1), compounds represented by the formula (LX-11), the formula (LX-12) and the formula (LX-13) (hereinafter, may be referred to as "compound (LX-11)", "compound (LX-12)" and "compound (LX-13)", respectively) are preferred. TIFF2025084122000139.tif142158[In formula (LX-11), formula (LX-12), and formula (LX-13), Symbols other than the following represent the same meaning as described above. Ly represents a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -CO-, -S-, or -SO 2 -.] The hydrocarbon group which may have a substituent of Ly (where -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -CO-, -S-, or -SO 2 -) includes, within the range allowed by the upper limit of the number of carbon atoms, etc., a hydrocarbon group which may have a substituent exemplified by Lx (where -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -CO-, -S-, or -SO 2 -).) lk1 and lk2 are each independently preferably any integer from 1 to 4, more preferably any integer from 1 to 3, and still more preferably 1 or 2. lk11 and lk22 are each independently preferably any integer from 0 to 3, and more preferably any integer from 0 to 2. lk3 is preferably any integer from 1 to 3, and more preferably 1 or 2. lk33 is preferably any integer from 0 to 2. lx2 is preferably any integer from 1 to 5, more preferably any integer from 1 to 4, still more preferably any integer from 1 to 3, and still more preferably 1 or 2. lx3 is preferably any integer from 0 to 5, more preferably any integer from 0 to 4, still more preferably any integer from 0 to 3, and still more preferably any integer from 0 to 2. R lk11 、R lk22 and Rlk33 is, independently of each other, a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (wherein -CH 2 - may be replaced by -O- or -CO-).), preferably a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein -CH 2 - may be replaced by -O- or -CO-).), more preferably an iodine atom, a fluorine atom, a fluoroalkyl group having 1 to 3 carbon atoms, a hydroxy group, a carboxy group, an alkoxy group having 1 to 3 carbon atoms, a hydroxyalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 3 carbon atoms, and even more preferably an iodine atom, a fluorine atom, a trifluoromethyl group, a hydroxy group, a carboxy group, a methoxy group, or a methyl group. Lx1, Lx2, and Ly are, independently of each other, a chain hydrocarbon group having 1 to 10 carbon atoms (wherein -CH 2 - may be replaced by -O- or -CO-).) or a group combining a chain hydrocarbon group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH 2 - may be replaced by -O- or -CO-).), preferably a chain hydrocarbon group having 1 to 8 carbon atoms (wherein -CH 2 - may be replaced by -O- or -CO-).) or a group combining a chain hydrocarbon group having 1 to 4 carbon atoms and a cyclic hydrocarbon group having 3 to 16 carbon atoms (wherein -CH 2 - may be replaced by -O- or -CO-).), more preferably a chain hydrocarbon group having 1 to 6 carbon atoms or a group combining a chain hydrocarbon group having 1 to 4 carbon atoms and a cyclic hydrocarbon group having 3 to 12 carbon atoms. Also, it is also preferable that R lk11 and Lx 1 or R lk22 and Lx 2 each combine to form a ring, and it is also preferable that R lk11 and Rlk22 It is also preferable that they combine to form a ring.

[0138] In one embodiment, the compound (L0) may be a low molecular weight compound. A low molecular weight compound is a compound having a weight average molecular weight of less than 10,000. When the compound (L0) is a low molecular weight compound, the weight average molecular weight is preferably 7,500 or less, more preferably 5,000 or less, still more preferably 4,000 or less, even more preferably 3,000 or less, still even more preferably 2,500 or less, still more preferably 2,000 or less, and even more preferably 1,500 or less. Also, it is 100 or more, preferably 120 or more, more preferably 150 or more, still more preferably 200 or more, and even more preferably 300 or more.

[0139] Among the compounds (L0), as the compound (X lk is a single bond and R lk is a hydrogen atom) having a phenolic hydroxy group, compounds represented by the following formula can be mentioned. TIFF2025084122000140.tif181164 Among the compounds (L0), as the compound (X lk is a carbonyl group and R lk is a hydrogen atom) having a benzoic acid carboxy group, compounds in which the hydroxy group of the above compounds is replaced with a carboxy group can be mentioned.

[0140] Among the compounds (L0), as the compound in which the phenolic hydroxy group of the compound having a phenolic hydroxy group is protected by an acid-labile group, compounds represented by the following formula can be mentioned. TIFF2025084122000141.tif205165 Among the compounds (L0), as the compound in which the benzoic acid carboxy group of the compound having a benzoic acid carboxy group is protected by an acid-labile group, compounds in which the ethoxyethoxy group of the above compounds is replaced with an ethoxyethoxycarbonyl group can be mentioned.

[0141] In the resist composition of the present invention, when a low molecular weight compound is included as a compound having a phenolic hydroxy group or a benzoic acid carboxy group, or a compound in which the phenolic hydroxy group or benzoic acid carboxy group of these compounds is protected by an acid-labile group, the content of the low molecular weight compound is 0.1% by mass or more, preferably 0.3% by mass or more, more preferably 0.5% by mass or more, still more preferably 1% by mass or more, based on the solid content of the resist composition. Further, it is 90% by mass or less, preferably 70% by mass or less, more preferably 50% by mass or less, still more preferably 45% by mass or less, even more preferably 40% by mass or less, and still even more preferably 35% by mass or less. Specifically, it is 0.1% by mass or more and 90% by mass or less, preferably 0.3% by mass or more and 45% by mass or less, more preferably 0.5% by mass or more and 40% by mass or less, still more preferably 1% by mass or more and 35% by mass or less.

[0142] <Resin (AX)> The compound having a phenolic hydroxy group or a benzoic acid carboxy group, or the compound in which the phenolic hydroxy group or benzoic acid carboxy group of these compounds is protected by an acid-labile group may, in another embodiment, be a resin (hereinafter sometimes referred to as "resin (AX)"). The resin (AX) preferably contains a structural unit represented by the formula (a2-A) or a structural unit represented by the formula (a1-4). TIFF2025084122000142.tif31127[In the formula (a2-A), all the symbols have the same meaning as described above.] R a2 and R a27 Examples of the halogen atom in and R include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a2 and R a27Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, chloromethyl group, bromomethyl group, iodomethyl group and the like. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and still more preferably 1 or 2. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. R a27 Examples of the alkoxy group of R include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, tert-butoxy group. The number of carbon atoms of the alkoxy group is preferably 1 to 4, more preferably 1 to 3. The alkoxy group is preferably a methoxy group or an ethoxy group, and more preferably a methoxy group. R a27 Examples of the alkoxyalkyl group of R include methoxymethyl group, ethoxyethyl group, propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxymethyl group, tert-butoxymethyl group. The number of carbon atoms of the alkoxyalkyl group is preferably 2 to 8, more preferably 2 to 4. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and still more preferably a methoxymethyl group. R a27Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 8, more preferably 2 to 4. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 4, more preferably 2 to 3. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, more preferably an acetyl group. R a27 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 4, more preferably 2 to 3. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, more preferably an acetyloxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0143] A a21Examples of the alkandiyl group include linear alkandiyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkandiyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms in the alkandiyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still even more preferably 1 to 3, and even more preferably 1 or 2. R a28 Examples of the alkyl group of R include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, and tert-butyl group. A a21 When the -CH 2 - contained in the alkandiyl group of A is replaced by -O-, -CO- or -NR a28 -, the number of carbon atoms before replacement is taken as the number of carbon atoms of the alkandiyl group. A a21 When the -CH 2 - contained in the alkandiyl group of A is replaced by -O-, -CO- or -NR a28Examples of the group that replaces the - include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyl-oxy group, an alkanediylsulfonyl group, an alkanediylthio group, an alkanediylamino group, and the like. These replaced groups include those similar to the groups exemplified in this specification, within the range where the upper limit of the number of carbon atoms permits. Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, an octylamino group, and the like. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, and the like. The number of carbon atoms of the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Among them, A a21 Examples of the group in which -CH 2 - included in the alkanediyl group of is replaced by -O-, -CO-, or -NR a28 - include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a22 -CO-O-, *-O-CO-A a22 -O-, *-O-A a22 -CO-O-, *-CO-O-A a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 - are included. Among them, *-CO-O-, *-CO-O-A a22 -CO-O-, *-O-A a22 -CO-O-, *-CO-NR a28 - are preferred. Here, A a22represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a2 is bonded. A a22 The alkanediyl group of may include the same alkanediyl group as A a21 within the range allowed by the upper limit of the number of carbon atoms. A a21 is preferably a single bond, *-CO-O- or *-CO-O-A a22 -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH 2 -CO-O-, and even more preferably a single bond or *-CO-O-.

[0144] nA2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH, in the case of a benzene ring, may be bonded to any of the o-position, m-position or p-position with respect to the bonding position of A a21 . Among them, at least one is preferably bonded to the m-position or p-position, and more preferably bonded to the m-position. In the case of a naphthalene ring, when the bonding position of A a21 is at the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A a21 is at the 2nd position, it may be bonded to any of the 1st and 3rd to 8th positions. Among them, when the bonding position of A a21 is at the 1st position, at least one is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. When the bonding position of A a21 is at the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0145] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577. Examples of the structural unit (a2-A) include structural units represented by Formula (a2-2-1) to Formula (a2-2-32), Formula (a2-3-1) to Formula (a2-3-24), and structural units represented by Formula (a2-2-1) to Formula (a2-2-32), Formula (a2-3-1) to Formula (a2-3-24), in which the methyl group corresponding to R in the structural unit (a2-A) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. a2 TIFF2025084122000143.tif107170

[0146] When the structural unit (a2-A) is contained in the resin (AX), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on all the structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less, still even more preferably 50 mol% or less, still more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) is a compound that induces the structural unit (a2-A) (for example, the -CH 2 -C(-R a2 )- of the structural unit (a2-A) is CH of the double bond before cleavage 2 =C(-R a2 ​By polymerizing a compound (such as (a2-A')) in the state of ), it can be incorporated into the resin (AX). Further, for example, after polymerization using the structural unit (a1-4), it can be incorporated into the resin (AX) by treatment with an acid such as p-toluenesulfonic acid. Also, after polymerization using acetoxystyrene or the like, the structural unit (a2-A) can be incorporated into the resin (AX) by treatment with an alkali such as tetramethylammonium hydroxide.

[0147] Examples of the structural unit (a2-A) include a structural unit represented by the following formula (a2-A1) (hereinafter sometimes referred to as "structural unit (a2-A1)") and a structural unit represented by the formula (a2-A2) (hereinafter sometimes referred to as "structural unit (a2-A2)"). TIFF2025084122000145.tif52136[In the formulas (a2-A1) and (a2-A2), R a50 and A a50 have the same meanings as R a2 and A a21 in the formula (a2-A), respectively. mb1 represents an integer of any one of 0 to 4. R a52 represents a halogen atom. R a53 represents an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. mb2 and mb3 each independently represent an integer of any one of 0 to 4. When mb2 is 2 or more, a plurality of R a52 may be the same as or different from each other. When mb3 is 2 or more, a plurality of R a53 may be the same as or different from each other, and 1 ≦ mb2 + mb3 ≦ 4 is satisfied. R a52 As the halogen atom of R R a53The alkyl group having 1 to 6 carbon atoms, the alkoxy group having 1 to 6 carbon atoms, the alkoxyalkyl group having 2 to 12 carbon atoms, the alkoxyalkoxy group having 2 to 12 carbon atoms, the alkylcarbonyl group having 2 to 4 carbon atoms, the alkylcarbonyloxy group having 2 to 4 carbon atoms, the acryloyloxy group or the methacryloyloxy group is each R of formula (a2-A). a27 The same as those described above can be mentioned, and a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group is more preferable, and a methoxy group or an ethoxyethoxy group is even more preferable. mb1 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, and even more preferably 0 or 1. mb2 is preferably any integer from 0 to 3, more preferably any integer from 1 to 3, and even more preferably 1 or 2. mb3 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, and even more preferably 0 or 1.

[0148] TIFF2025084122000146.tif31119 [In formula (a1-4), all symbols have the same meanings as described above.]

[0149] R in formula (a1-4) a1 , R a17 , A a11 and R a18 are the same as R a2 , R a27 , A a21 and R a28 in formula (a2-A), respectively. R a17 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, and a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group is more preferable, and a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group is even more preferable.

[0150] na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and further preferably 0 or 1. mc is preferably 0 or 1. R a34 , R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group consisting of a combination thereof. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site): TIFF2025084122000147.tif10151 Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (e.g., alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, and norbornylethyl group), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. In particular, R a36Examples thereof include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these groups. R a35 and R a36 When bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, examples thereof include the following groups. * represents a bonding site, and one side is the bonding site with R a34 and is the bonding site with TIFF2025084122000148.tif15105

[0151] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group of is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these groups, more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. The alkyl group and alicyclic hydrocarbon group in R a36 are preferably unsubstituted. The aromatic hydrocarbon group in R a36 preferably has an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0152] -O-C(R a34 )(R a35 )-O-R a36 in the structural unit (a1-4) dissociates upon contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxy group or a carboxy group. -X a1 -O-C(R a34 )(R a35 )-O-R a36 In the case of a benzene ring, A a11It may be bonded to any of the o-position, m-position or p-position with respect to the bonding position. Among them, it is preferable that at least one is bonded to the o-position or p-position, and more preferably bonded to the p-position. In the case of a naphthalene ring, A a11 When the bonding position of is the 1-position, it may be bonded to any of the 2-position to 8-position, and A a11 When the bonding position of is the 2-position, it may be bonded to any of the 1-position and the 3-position to 8-position. Among them, A a11 When the bonding position of is the 1-position, it is preferable that at least one is bonded to the 3-position to 6-position, and more preferably bonded to the 3-position or 4-position. A a11 When the bonding position of is the 2-position, it is preferable that it is bonded to the 4-position to 7-position, and more preferably bonded to the 5-position or 6-position.

[0153] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP-A-2010-204646. Preferably, the structural units represented by the formulas (a1-4-1) to (a1-4-42) and the hydrogen atom corresponding to R in the structural unit (a1-4) a1 are replaced by a halogen atom, a haloalkyl group or an alkyl group. More preferably, the structural units represented by the formulas (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20) are included. When the resin (AX) contains the structural unit (a1-4), its content is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total of all the structural units of the resin. Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is 5 to 95 mol%, preferably 10 to 95 mol%, more preferably 15 to 90 mol%, still more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0154] When the resist composition of the present invention contains the resin (AX), the resin (AX) may contain a structural unit other than the structural unit represented by the formula (a2-A) and the structural unit represented by the formula (a1-4). Examples of the structural unit other than the structural unit represented by the formula (a2-A) and the structural unit represented by the formula (a1-4) include a structural unit having an acid-labile group other than the structural unit represented by the formula (a1-4) (hereinafter sometimes referred to as "structural unit (a1)"), a structural unit having no acid-labile group other than the structural unit represented by the formula (a2-A) (hereinafter sometimes referred to as "structural unit (s)"), a structural unit other than the structural unit (a1) and the structural unit (s), and a structural unit derived from other monomers known in the art, etc.

[0155] 〈Structural unit (a1)〉 The structural unit (a1) is derived from a monomer having an acid-labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid-labile group contained in the resin (AX) is preferably a group represented by the formula (1) (hereinafter also referred to as group (1)) and / or a group represented by the formula (2) (hereinafter also referred to as group (2)). TIFF2025084122000150.tif2298[In the formula (1), R a1 、R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R a1 and R a2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * represents a bonding site.] TIFF2025084122000151.tif2278[In the formula (2), R a1’ and R a2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded and X, and the -CH 2 - contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na’ represents 0 or 1. * represents a bonding site.]

[0156] R a1 、R a2 and R a3 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, etc. R a1 、R a2 and R a3 Examples of the alkenyl group for R R a1 、R a2 and R a3 The alicyclic hydrocarbon group for R a1 、R a2 and R a3 may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, etc. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group and the following group (* represents the bonding site), etc. The number of carbon atoms of the alicyclic hydrocarbon group for R TIFF2025084122000152.tif10159R a1 、R a2 and R a3 Examples of the aromatic hydrocarbon group for R Examples of the combined groups include groups combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl groups such as phenylcyclohexyl group, etc. Preferably, ma is 0 and na is 1. R a1 and R a2 when they are bonded to each other to form an alicyclic hydrocarbon group, -C(R a1 )(R a2 )(R a3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site to -O-. TIFF2025084122000153.tif27139

[0157] R a1’ 、R a2’ and R a3’ Examples of the hydrocarbon group in R include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. a1 、R a2 and R a3 are the same as the groups mentioned for R R a2’ and R a3’ when they are bonded to each other to form a heterocyclic group together with the carbon atom to which they are bonded and X, -C(R a1’ )(R a2’ )-X-R a3’ includes the following groups. * represents the bonding site. TIFF2025084122000154.tif19124R a1 、R a2 、R a3 、R a1 、R a2’ and R a3’ The halogen atom that R 、R a1’ and R a2’ may have includes a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. Preferably, na’ is 0.

[0158] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 are alkyl groups, ma = 0, and na = 1. As such a group, a tert-butoxycarbonyl group is preferable. In formula (1), R a1 , R a2 together with the carbon atom to which they are attached form an adamantyl group, R a3 is an alkyl group, ma = 0, and na = 1. In formula (1), R a1 and R a2 are each independently an alkyl group, R a3 is an adamantyl group, ma = 0, and na = 1. Specific examples of the group (1) include the following groups. * represents a bonding site. TIFF2025084122000155.tif149166

[0159] Specific examples of the group (2) include the following groups. * represents a bonding site. TIFF2025084122000156.tif55153

[0160] Examples of the structural unit having an acid-labile group other than the structural unit represented by formula (a1-4) include structural units derived from (meth)acrylic monomers in which hydroxy groups such as alcoholic hydroxy groups are protected by acid-labile groups. Examples of the structural unit derived from a (meth)acrylic monomer in which a hydroxy group such as an alcoholic hydroxy group is protected by the acid-labile group of the group (1) include the structural unit represented by formula (a1-0) (hereinafter sometimes referred to as the structural unit (a1-0)), the structural unit represented by formula (a1-1) (hereinafter sometimes referred to as the structural unit (a1-1)), or the structural unit represented by formula (a1-2) (hereinafter sometimes referred to as the structural unit (a1-2)). TIFF2025084122000157.tif44141[In formula (a1-0), formula (a1-1), and formula (a1-2), L a01 、L a1 and L a2 each independently represents -O- or *-O-(CH 2 ) k1 -CO-O-, k1 represents any integer from 1 to 7, and * represents the bonding site with -CO-. R a01 、R a4 and R a5 each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 、R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1 represents any integer from 0 to 14. n1 represents any integer from 0 to 10. n1’ represents any integer from 0 to 3.]

[0161] R a01 、R a4 and R a5 The halogen atoms in R a01 、R a4 and R a5Examples of the alkyl group which may have a halogen atom include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group. R a01 、R a4 and R a5 are preferably a hydrogen atom or a methyl group, and more preferably a methyl group. L a01 、L a1 and L a2 are preferably an oxygen atom or *-O-(CH 2 ) k01 -CO-O- (wherein k01 is preferably any integer from 1 to 4, and more preferably 1), and more preferably an oxygen atom. R a02 、R a03 、R a04 、R a6 and R a7 Examples of the alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and the group formed by combining these in R a1 、R a2 and R a3 are the same groups as those exemplified for R R a02 、R a03 、and R a04 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. Ra6 and R a7 The alkyl group in a7 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group or a t-butyl group, and still more preferably an ethyl group, an isopropyl group or a t-butyl group. R a6 and R a7 The alkenyl group in a7 is preferably an alkenyl group having 2 to 6 carbon atoms, more preferably an ethenyl group, a propenyl group, an isopropenyl group or a butenyl group. R a02 、R a03 、R a04 、R a6 and R a7 The number of carbon atoms of the alicyclic hydrocarbon group of a7 is preferably 5 to 12, more preferably 5 to 10. R a02 、R a03 、R a04 、R a6 and R a7 The number of carbon atoms of the aromatic hydrocarbon group of a7 is preferably 6 to 12, more preferably 6 to 10. For the group combining an alkyl group and an alicyclic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and alicyclic hydrocarbon group is 18 or less. For the group combining an alkyl group and an aromatic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and aromatic hydrocarbon group is 18 or less. R a02 and R a03 are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a phenyl group or a naphthyl group which may have a halogen atom. R a04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group which may have a halogen atom. R a6 and Ra7 is an alkyl group having 1 to 6 carbon atoms which may preferably have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group, a phenyl group or a naphthyl group which may have a halogen atom, and still more preferably an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group or a phenyl group which may have a halogen atom. m1 is preferably any integer from 0 to 3, more preferably 0 or 1. n1 is preferably any integer from 0 to 3, more preferably 0 or 1. n1’ is preferably 0 or 1.

[0162] Examples of the structural unit (a1-0) include a structural unit represented by any of Formula (a1-0-1) to Formula (a1-0-24) and a structural unit in which the methyl group corresponding to R in the structural unit (a1-0) a01 is replaced with a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom) or another alkyl group. A structural unit represented by any of Formula (a1-0-1) to Formula (a1-0-10), Formula (a1-0-13), Formula (a1-0-14), Formula (a1-0-19) to Formula (a1-0-24) is preferable. TIFF2025084122000158.tif119159

[0163] Examples of the structural unit (a1-1) include a structural unit derived from the monomers described in JP-A-2010-204646. Among them, a structural unit represented by any of Formula (a1-1-1) to Formula (a1-1-7) and a structural unit in which the methyl group corresponding to R in the structural unit (a1-1) a4 is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group is preferable, and a structural unit represented by any of Formula (a1-1-1) to Formula (a1-1-4) is more preferable. JPEG2025084122000159.jpg39169

[0164] As the structural unit (a1-2), there are a structural unit represented by any one of the formulas (a1-2-1) to (a1-2-20) and an R in the structural unit (a1-2). a5 Examples of the structural unit in which the methyl group corresponding to R is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group include structural units represented by any one of the formulas (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20), and structural units represented by any one of the formulas (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20) are preferred. When the resin (AX) contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2) in which a hydroxy group such as a hydroxy group of an alcoholic hydroxy group is protected by an acid-labile group, the total content thereof is, for example, 1 mol% or less, preferably 0.1 mol%, based on all the structural units of the resin (AX), and it is more preferable that the resin (AX) substantially does not contain the structural unit (a1-0), the structural unit (a1-1), and the structural unit (a1-2).

[0165] Examples of the structural unit derived from the (meth)acrylic monomer having the group (2) also include a structural unit represented by the formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). TIFF2025084122000161.tif4759[In the formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. Z a1 represents a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, and * represents a bonding site with L 51 . L 51 , L 52 , L 53 and L 54 each independently represent -O- or -S-. s1 represents an integer of 1 to 3. s1’ represents any integer from 0 to 3.

[0166] R in formula (a1-5) a8 As the halogen atom and the alkyl group which may have a halogen atom in, the R of formula (a1-0) to formula (a1-2) a01 , R a4 and R a5 are the same as those exemplified by. In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 Of these, it is preferable that one is -O- and the other is -S-. s1 is preferably 1. s1’ is preferably any integer from 0 to 2. Z a1 is preferably a single bond or *-CH 2 -CO-O- is preferable.

[0167] Examples of the structural unit (a1-5) include structural units derived from the monomers described in JP-A-2010-61117. Among them, the structural units represented by formula (a1-5-1) to formula (a1-5-4) are preferable, and the structural unit represented by formula (a1-5-1) or formula (a1-5-2) is more preferable. When the resin (AX) contains the structural unit (a1-5), its content is, for example, 1 mol% or less, preferably 0.1 mol% or less, based on all the structural units of the resin (AX), and the resin (AX) more preferably does not substantially contain the structural unit (a1-5).

[0168] Examples of the structural unit having the group (1) in the structural unit (a1) include the structural unit represented by formula (a1-6) (hereinafter sometimes referred to as "structural unit (a1-6)"). TIFF2025084122000163.tif3481In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a62 , R a63 and R a64 each independently represent an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atom to which they are bonded. X a61 represents a single bond, -CO-O-*, or -CO-NR a65 -*, where * represents the bonding site to -Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 represents a single bond, *-O-L a61 -, or *-CO-O-L a62 -, where * represents the bonding site to -Ar, and L a61 and L a62 each independently represent an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

[0169] For the halogen atom and the alkyl group which may have a halogen atom in R a61 in formula (a1-6), those similar to those exemplified by R a01 , R a4 and R a5 in formulas (a1-0) to (a1-2) can be mentioned. R a61 is preferably a hydrogen atom, a methyl group, or a trifluoromethyl group. R a62 , R a63 , R a64 and R a65Examples of the alkyl group in [description] include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, etc. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and even more preferably a methyl group or an ethyl group. R a62 , R a63 and R a64 Examples of the cyclic hydrocarbon group in [description] include an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, etc. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group, etc. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group, etc. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group, etc. R a62 and R a63 Examples of the ring formed by R a62 and R a63 bonding to each other include an adamantane ring, a cyclopentane ring, a cyclohexane ring, etc. Specifically, when R a62 )(R a63 )(R a64 ) as -C(R TIFF2025084122000164.tif32110

[0170] La61 and L a62 Examples of the C1-C4 alkanediyl group in a62 include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, and the like. L a61 and L a62 Preferably, each of a61 and a62 is independently a methylene group or an ethylene group. X a61 Preferably, a61 is a single bond or -CO-O-*, and more preferably, it is a single bond. X a62 Preferably, a62 is a single bond or *-O-L a61 -, and more preferably, it is a single bond.

[0171] Examples of the C6-C20 aromatic hydrocarbon group of Ar include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, and the like. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, a methacryloyloxy group, and the like.

[0172] Examples of the halogen atom include a fluorine atom, a chlorine atom, an iodine atom, a bromine atom, and the like. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group. The alkyl group is preferably a C1-C4 alkyl group, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, more preferably an acetyloxy group. Examples of the substituent include a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms. More preferred are a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group. Even more preferred are a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group.

[0173] Examples of the structural unit (a1-6) include the following structural units, and the structural units represented by Formula (a1-6-1) to Formula (a1-6-9) are preferred, and the structural units represented by Formula (a1-6-1), Formula (a1-6-2), Formula (a1-6-4), Formula (a1-6-5), Formula (a1-6-7) or Formula (a1-6-8) are more preferred, and the structural units represented by Formula (a1-6-1) or Formula (a1-6-2) are even more preferred. In the following structural units, R a61 Structural units in which the hydrogen atom corresponding to is replaced with a methyl group or the like, and structural units in which the methyl group corresponding to R a61 in the following structural units is replaced with a hydrogen atom or the like are also included as the structural unit (a1-6). TIFF2025084122000165.tif226161

[0174] When the resin (AX) contains the structural unit (a1-6), its content is, for example, 1 mol% or less, preferably 0.1 mol% or less, based on all the structural units of the resin (AX), and it is more preferred that the resin (AX) substantially does not contain the structural unit (a1-6).

[0175] Examples of the structural unit (a1) also include the following structural units. TIFF2025084122000166.tif33167 When the resin (AX) contains the structural units (a1-7-1) to (a1-7-7), its content is, for example, 1 mol% or less, preferably 0.1 mol% or less, based on all the structural units of the resin (AX), and it is more preferred that the resin (AX) substantially does not contain the structural units (a1-7-1) to (a1-7-7).

[0176] Examples of the structural unit (a1) also include the following structural units. When the resin (AX) contains the structural units (a1-8-1) to (a1-8-3), its content is, for example, 1 mol% or less, preferably 0.1 mol% or less, based on all the structural units of the resin (AX), and it is more preferable that the resin (AX) substantially does not contain the structural units (a1-8-1) to (a1-8-3).

[0177] 〈Structural unit(s)〉 The structural unit(s) is derived from a monomer having no acid-labile group (hereinafter sometimes referred to as "monomer(s)"). As the monomer that leads to the structural unit(s), a monomer having no acid-labile group known in the resist field can be used. The structural unit(s) preferably has a hydroxy group, a carboxy group or a lactone ring. If a resin containing a structural unit having a hydroxy group or a carboxy group and no acid-labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and no acid-labile group (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved. In addition to the above-described structural units, the structural unit(s) includes a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), or a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"), or other structural units well-known in the art.

[0178] 〈Structural unit (a2)〉 The structural unit (a2) is a structural unit represented by the formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group or a carboxy group. TIFF2025084122000168.tif4095[In the formula (a2), R a2represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH contained in the alkanediyl group 2 - may be replaced by -O-, -CO-, or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -CO-, -S-, or -SO 2 -. L a22 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom, and -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-. na2 represents any integer from 1 to 5. When na2 is 2 or more, a plurality of Ls a22 may be the same as or different from each other. R in formula (a2) a2 , A a21 and R a28 are the same as R a2 , A a21 and R a28 in formula (a2 - A). L a21 The hydrocarbon group in is a (na2 + 1)-valent hydrocarbon group, and examples thereof include a linear or branched chain hydrocarbon group, a monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.) alicyclic hydrocarbon group, and a cyclic hydrocarbon group such as an aromatic hydrocarbon group. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the chain hydrocarbon group include divalent to hexavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, an alkanepentayl group, and an alkanexayl group. Examples of the alkanediyl group include, for example, A a21 the same alkanediyl groups as those described above. Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, and a heptadecanetriyl group. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, and a heptadecanetetrayl group. Examples of the alkanepentayl group include a methanepentayl group, an ethanepentayl group, a propanepentayl group, a butanepentayl group, a pentanepentayl group, and a hexanepentayl group. Examples also include groups in which one or more hydrogen atoms of the above-described groups are replaced with a bonding site. L a21 The number of carbon atoms of the chain hydrocarbon group of L is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in L include the following alicyclic hydrocarbon groups and the like. The bonding site can be at any position. TIFF2025084122000169.tif46168For example, divalent to hexavalent alicyclic hydrocarbon groups such as cycloalkanediyl groups, cycloalkanetriyl groups, cycloalkanetetrayl groups, cycloalkanepentayl groups, cycloalkanexayl groups, etc. can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, cyclodecanetetrayl group and polycyclic alicyclic hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, bicyclo[3.3.0]octanetetrayl group can be mentioned. Moreover, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced by bonding sites, etc. can also be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, even more preferably 3 to 12, still even more preferably 6 to 12, and particularly preferably 6 to 10. L a21 As the aromatic hydrocarbon group in L, divalent to hexavalent aromatic hydrocarbon groups such as arylene groups, arenetriyl groups, arenetetrayl groups, arenepentayl groups, arenexayl groups, etc. can be mentioned. Specifically, examples include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, a phenanthrenetetrayl group, and the like. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, even more preferably 6 to 12, and even more preferably 6 to 10. Examples of the group formed by combining two or more types include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group, and the like. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more types. Also, any group may be bonded to A a21 and L a22 and may be bonded thereto. -CH 2 - contained in the hydrocarbon group is -O-, -S-, -SO 2-Or as the group replaced by -CO-, as described above, a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, etc. may be mentioned. Further, a group in which one or more hydrogen atoms of these groups are replaced by a bonding site, etc. may also be mentioned. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. In addition, the -CH 2 - contained in the alicyclic hydrocarbon group and the group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO 2 - As the replaced group, those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits may be mentioned. L a21 The hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, an alkyl group having 1 to 16 carbon atoms (the -CH 2 - contained in the alkyl group may be replaced by -O- or -CO-), an acryloyloxy group or a methacryloyloxy group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L a21The hydrocarbon group in [description] can have a substituent such as a haloalkyl group by having a halogen atom as a substituent. Examples of the haloalkyl group include alkyl fluoride groups, alkyl chloride groups, alkyl bromide groups, alkyl iodide groups, etc. For example, chloromethyl group, bromomethyl group, iodomethyl group, fluoromethyl group, difluoromethyl group, trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluorobutyl group, etc. can be mentioned. The number of carbon atoms in the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. L a21 The hydrocarbon group of [description] can have a substituent such as an alkyl group by including a branched structure. a21 L L a21 The -CH 2 - in the hydrocarbon group of [description] is replaced by a group such as -O- or -CO-, etc., and a21 L L a21 As the substituent that the hydrocarbon group in [description] may have, there are a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (the -CH 2- may be replaced by -O- or -CO-. ) is preferable, and a halogen atom, a haloalkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 10 carbon atoms (the -CH contained in the alkyl group 2 - may be replaced by -O- or -CO-. ) is more preferable, a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms is even more preferable, a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group is still more preferable, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group or an ethoxyethoxy group is even still more preferable. Also, when the alkandiyl group of L a21 is replaced by -O- or -CO- etc., for example, *-L a23 -X a21 -(L a23 represents an alkandiyl group having 1 to 8 carbon atoms, X a21 represents -O-, -O-CO-, -CO-O- or -O-CO-O-, and * represents the bonding site with A a21 . ) is also preferable. L a21 is a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (provided that the -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-. ), a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (provided that the -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -CO- or -SO 2 -. ) or a group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent and a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (provided that the -CH contained in the chain hydrocarbon group 2 - may be replaced by -O- or -CO-, and the -CH contained in the cyclic hydrocarbon group 2 - may be replaced by -O-, -S-, -SO 2-Or it may be replaced by -CO-. It is preferably such that, a chain hydrocarbon group having 1 to 10 carbon atoms which may have a substituent (however, -CH contained in the chain hydrocarbon group 2 -May be replaced by -O- or -CO-.), a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (however, -CH contained in the cyclic hydrocarbon group 2 -May be replaced by -O-, -S-, -CO- or -SO 2 -.), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (however, -CH contained in the chain hydrocarbon group 2 -May be replaced by -O- or -CO-, and -CH contained in the cyclic hydrocarbon group 2 -May be replaced by -O-, -S-, -SO 2 -. It is more preferably such that.)

[0179] L a22 Examples of the chain hydrocarbon group having 1 to 12 carbon atoms for L include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, and even more preferably 1 to 4. L a22The fluorine atom it has may be one or two or more. L a22 In the chain hydrocarbon group of a22 , -CH 2 - may be replaced by -O- or -CO-, and these replaced groups are the same as those exemplified by L a21 within the range allowed by the upper limit of the number of carbon atoms. na2 is preferably any integer from 1 to 4, and more preferably any integer from 1 to 3. L a21 When L is a single bond or a chain hydrocarbon group, examples of the structural unit (a2) include the following structural units. Among the following structural units, structural units in which the methyl group corresponding to R a2 is replaced by a hydrogen atom or the like are also suitable structural units of the structural unit (a2) in the same manner as the following structural units. TIFF2025084122000170.tif67168

[0180] When producing a resist pattern from the resist composition of the present invention, when using a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) as the exposure light source, as the structural unit (a2), a structural unit (a2) having a phenolic hydroxy group is preferable, and it is more preferable to use the above-described structural unit (a2-A). When using an ArF excimer laser (193 nm) or the like, as the structural unit (a2), a structural unit (a2) having an alcoholic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-C) described later. The structural unit (a2) may be included alone or in combination of two or more.

[0181] In the structural unit (a2), L a21When it is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include a structural unit represented by formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)"), a structural unit represented by formula (a2-C) (hereinafter sometimes referred to as "structural unit (a2-C)"), and a structural unit represented by formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). TIFF2025084122000171.tif46100[In formula (a2-B) and formula (a2-C), R a2 represents the same meaning as in formula (a2). R a27 represents the same meaning as in formula (a2-A). L a25 is -O- or *-O-(CH 2 ) k2 -CO-O-, k2 represents an integer of 1 to 7. * represents the bonding site with -CO-. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represent a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer of 1 to 5. When nB2 is 2 or more, a plurality of X a2 may be the same as or different from each other. nB22 represents an integer of 0 to 8. When nB22 is 2 or more, a plurality of R a27 may be the same as or different from each other. nC22 represents an integer of 0 to 10. When nC22 is 2 or more, a plurality of R a27 may be the same as or different from each other.] L a25 is preferably -O-, -O-(CH 2 ) f1 -CO-O- (wherein f1 represents an integer of 1 to 4), more preferably -O-. R a2 is preferably a methyl group. Xa2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated C1-4 alkyl group, a C1-4 alkoxy group or a C2-8 alkoxyalkoxy group, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, still more preferably 1 or 2. nB22 is preferably any integer from 0 to 3, more preferably 0, 1 or 2, still more preferably 0 or 1. nC22 is preferably any integer from 0 to 6, more preferably any integer from 0 to 3, still more preferably 0 or 1.

[0182] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from the monomers described in JP-A-2010-204646, the following structural units, and methyl groups or hydrogen atoms corresponding to R in the following structural units which are replaced with hydrogen atoms, halogen atoms, haloalkyl groups or other alkyl groups. Among them, structural units represented by any of formula (a2-B-1) to formula (a2-B-5) and formula (a2-C-1) to formula (a2-C-9) are preferred. a2 Examples thereof include structural units in which the methyl group or hydrogen atom corresponding to R is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. Among them, structural units represented by any of formula (a2-B-1) to formula (a2-B-5) and formula (a2-C-1) to formula (a2-C-9) are preferred. When the resin (AX) contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin (AX). Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, still more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, it is 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, still more preferably 1 to 20 mol%, and even more preferably 1 to 10 mol%.

[0183] TIFF2025084122000173.tif51106[In formula (a2-D), R a2 、A a21 and R a27 each represent the same meaning as in formula (a2-A). R a21 and R a22 each independently represent a fluoroalkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents any integer from 1 to 5. When nD2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. nD22 represents any integer from 0 to 4. When nD22 is 2 or more, the plurality of R a27 may be the same as or different from each other. However, 1 ≦ nD2 + nD22 ≦ 5.] R a21 and R a22 As the fluoroalkyl groups of, each independently, a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, etc. may be mentioned. R a21 and R a22 are preferably a trifluoromethyl group. L a24 Examples of the alkanediyl group of a24 include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, and the like. L a24 is preferably a single bond or a methylene group. nD2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, still more preferably 1 or 2, and even more preferably 1. Further, preferably, nD2 is 1 and the group in parentheses is bonded to the para position. nD22 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, still more preferably 0 or 1, and even more preferably 0.

[0184] As the structural unit (a2-D), a structural unit represented by the following formula (a2-D1) (hereinafter, may be referred to as "structural unit (a2-D1)") is more preferable. TIFF2025084122000174.tif51107[In formula (a2-D1), R a2 、A a21 、R a27 、nD2 and nD22 represent the same meaning as in formula (a2-D).] In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0185] Examples of the structural unit (a2-D) include the structural units described below. TIFF2025084122000175.tif62167

[0186] In the structural units represented by formula (a2-D-1) to formula (a2-D-8), the structural unit in which the hydrogen atom corresponding to R a2 is replaced with a methyl group or the like, and in the structural units represented by formula (a2-D-9) to formula (a2-D-16), R a2A structural unit in which a methyl group corresponding to the following is replaced by a hydrogen atom or the like can also be cited as a specific example of the structural unit (a2-D). Among them, the structural units represented by the formulas (a2-D-1) to (a2-D-8) are preferable, the structural units represented by the formulas (a2-D-1) to (a2-D-4) are more preferable, and the structural unit represented by the formula (a2-D-1) is even more preferable.

[0187] When the resin (AX) contains the structural unit (a2-D), its content is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more with respect to all the structural units of the resin (AX). Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and still more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and still more preferably 10 to 65 mol%.

[0188] 〈Structural unit (a3)〉 The lactone ring contained in the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring and another ring. Preferably, a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)) can be cited.

[0189] The structural unit (a3) is preferably a structural unit represented by the formula (a3-1), the formula (a3-2), the formula (a3-3), or the formula (a3-4). These may be contained alone or in combination of two or more. TIFF2025084122000176.tif51164[In the formulas (a3-1), (a3-2), (a3-3), and (a3-4), L a4 、L a5 and L a6 are each independently -O- or *-O-(CH 2 ) k3-CO-O- (where k3 represents any integer from 1 to 7). L a7 is -O-, *-O-L a8 -O-, *-O-L a8 -CO-O-, *-O-L a8 -CO-O-L a9 -CO-O- or *-O-L a8 -O-CO-L a9 represents -O-. L a8 and L a9 each independently represent an alkanediyl group having 1 to 6 carbon atoms. * represents the bonding site with the carbonyl group. R a18 、R a19 、R a20 and R a24 each independently represent a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a3 is -CH 2 - or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 、R a23 and R a25 each independently represent a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents any integer from 0 to 5. q1 represents any integer from 0 to 3. r1 represents any integer from 0 to 3. w1 represents any integer from 0 to 8. When p1, q1, r1, and / or w1 is 2 or more, the plurality of R a21 、R a22 、R a23 and / or R a25 may be the same as or different from each other.]

[0190] R a21 、R a22 、R a23 and R a25Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group. R a18 , R a19 , R a20 and R a24 Examples of the halogen atom and the alkyl group which may have a halogen atom in the formula (a2) include R a2 Examples of the above-mentioned examples are the same as those given above. L a8 and L a9 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. L a4 ~L a6 are each independently preferably -O- or *-O-(CH 2 ) k3 In the -CO-O- group, k3 is an integer of 1 to 4, and more preferably -O- and *-O-CH 2 It is preferably an oxygen atom. L a7 is preferably -O- or *-OL a8 -CO-O-, more preferably -O-, -O-CH 2 -CO-O- or -OC 2 H 4 -CO-O-. R a18 , R a19 , R a20 and R a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. Ra22 , R a23 and R a25 is each independently preferably a carboxy group, a cyano group or a methyl group. p1, q1 and r1 are each independently preferably an integer of any one of 0 to 2, more preferably 0 or 1. w1 is preferably an integer of any one of 0 to 2, more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4)'. TIFF2025084122000177.tif4051 (wherein R a24 , L a7 represents the same meaning as described above.)

[0191] Examples of the structural unit (a3) include structural units derived from the monomers described in JP-A-2010-204646, the monomers described in JP-A-2000-122294, and the monomers described in JP-A-2012-41274. Examples of the structural unit (a3) include structural units represented by any of the formula (a3-1-1), the formula (a3-1-2), the formula (a3-2-1), the formula (a3-2-2), the formula (a3-3-1), the formula (a3-3-2), and the formula (a3-4-1) to the formula (a3-4-12), and, in the above structural units, the methyl groups corresponding to R a18 , R a19 , R a20 and R a24 in which the methyl groups corresponding to R are replaced with hydrogen atoms are preferred. When the resin (AX) contains the structural unit (a3), the total content is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more, based on all the structural units of the resin (AX). Further, it is 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and still even more preferably 20 mol% or less. Specifically, it is 1 to 70 mol%, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, still more preferably 5 to 65 mol%, even more preferably 5 to 60 mol%, and still even more preferably 10 to 60 mol%. Further, the content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, and still more preferably 10 mol% or more, based on all the structural units of the resin (AX). Further, it is preferably 60 mol% or less, more preferably 55 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and still even more preferably 20 mol% or less. Specifically, 1 to 60 mol% is preferable, 3 to 60 mol% is more preferable, 3 to 55 mol% is still more preferable, 5 to 55 mol% is still more preferably, 5 to 50 mol% is even more preferably, and 10 to 50 mol% is still even more preferably.

[0192] 〈Structural unit (a4)〉 The structural unit represented by the formula (a4) is shown below. TIFF2025084122000179.tif3255[In the formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents a saturated hydrocarbon group having a halogen atom with 1 to 24 carbon atoms, and the -CH 2 - in the saturated hydrocarbon group may be replaced by -O- or -CO-.

[0193] R 42 The saturated hydrocarbon group represented by may include a linear or branched chain saturated hydrocarbon group, a monocyclic or polycyclic alicyclic saturated hydrocarbon group, and a group formed by combining these, etc. Examples of the chain saturated hydrocarbon group include linear alkyl groups such as methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group and octadecyl group, and branched alkyl groups such as isopropyl group and isobutyl group. Examples of the monocyclic or polycyclic alicyclic saturated hydrocarbon group include monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group and cyclooctyl group; polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group and the following group (* represents the bonding site). Examples of the group formed by combination include a group formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group - alicyclic saturated hydrocarbon group, - alicyclic saturated hydrocarbon group - alkyl group, - alkanediyl group - alicyclic saturated hydrocarbon group - alkyl group, etc. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group; and branched alkanediyl groups such as propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4-diyl group, 2-methylbutane-1,4-diyl group. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom included in the saturated hydrocarbon group contained in 42 include a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. R 42 Examples of the group in which -CH 2 - contained in the saturated hydrocarbon group contained in 42 is replaced with -O- or -CO- include a hydroxy group (a group in which -CH 2 - contained in the methyl group is replaced with -O-), a carboxy group (a group in which -CH 2 -CH 2 - contained in the ethyl group is replaced with -O-CO-), a carbonyl group (a group in which -CH 2 - contained in the methylene group is replaced with -CO-), an oxy group (a group in which -CH 2 - contained in the methylene group is replaced with -O-), an alkoxy group (a group in which -CH 2 - at any position contained in the alkyl group is replaced with -O-), an alkoxycarbonyl group (a group in which -CH 2 -CH 2 - at any position contained in the alkyl group is replaced with -O-CO-), an alkylcarbonyl group (a group in which -CH 2 - at any position contained in the alkyl group is replaced with -CO-), an alkylcarbonyloxy group (a group in which -CH 2 -CH 2 - at any position contained in the alkyl group is replaced with -CO-O-), an alkanediyl-oxy group (a group in which -CH 2 - at any position contained in the alkanediyl group is replaced with -O-), an alkanediyl-oxycarbonyl group (a group in which -CH 2-CH 2 - is a group replaced by -O-CO-, an alkanediylcarbonyl group (any -CH at any position contained in the alkanediyl group) 2 - is a group replaced by -CO-, an alkanediylcarbonyloxy group (any -CH at any position contained in the alkanediyl group) 2 -CH 2 - is a group replaced by -CO-O-, a cycloalkoxy group, a cycloalkylalkoxy group, a group formed by combining two or more of these groups, etc. Examples of these replaced groups include those similar to the groups exemplified in this specification within the range permitted by the upper limit of the number of carbon atoms.

[0194] As the structural unit (a4), R 42 is preferably a saturated hydrocarbon group having a fluorine atom. R 42 Examples of the structural unit (a4) in which R is a saturated hydrocarbon group having a fluorine atom include a structural unit represented by the formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), a structural unit represented by the formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), a structural unit represented by the formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and a structural unit represented by the formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by the formula (a4-1) is the structural unit shown below. TIFF2025084122000181.tif4764[In the formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents an alkanediyl group having 1 to 8 carbon atoms having a fluorine atom or a cycloalkanediyl group having 3 to 12 carbon atoms having a fluorine atom. R 42f represents a hydrogen atom or a fluorine atom.]

[0195] L 41Examples of the alkanediyl group in [substance] include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, and 2-methylpropane-1,2-diyl group. The terminal of the branched alkanediyl group may be a methyl group. L 42f Examples of the alkanediyl group having a fluorine atom in [substance] include linear alkanediyl groups having a fluorine atom such as methylene group having a fluorine atom, ethylene group having a fluorine atom, propane-1,3-diyl group having a fluorine atom, butane-1,4-diyl group having a fluorine atom, pentane-1,5-diyl group having a fluorine atom, hexane-1,6-diyl group having a fluorine atom, heptane-1,7-diyl group having a fluorine atom, octane-1,8-diyl group having a fluorine atom, etc.; branched alkanediyl groups having a fluorine atom such as ethane-1,1-diyl group having a fluorine atom, propane-1,1-diyl group having a fluorine atom, propane-1,2-diyl group having a fluorine atom, propane-2,2-diyl group having a fluorine atom, pentane-2,4-diyl group having a fluorine atom, 2-methylpropane-1,3-diyl group having a fluorine atom, 2-methylpropane-1,2-diyl group having a fluorine atom, pentane-1,4-diyl group having a fluorine atom, 2-methylbutane-1,4-diyl group having a fluorine atom. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42f Examples of the cycloalkanediyl group having a fluorine atom in [substance] include monocyclic cycloalkanediyl groups having a fluorine atom such as cyclobutane-1,3-diyl group having a fluorine atom, cyclopentane-1,3-diyl group having a fluorine atom, cyclohexane-1,4-diyl group having a fluorine atom, cyclohexene-3,6-diyl group having a fluorine atom, cycloheptane-1,4-diyl gr...

Claims

1. A resist composition containing an acid generator, The resist composition, wherein the acid generator contains a salt represented by formula (I): [In formula (I), X represents a sulfur atom or an iodine atom. m10 represents 0 or 1, and when X is a sulfur atom, m10 is 1, and when X is an iodine atom, m10 is 0. R １ , R ２ and R ３ are each independently *-X １ -R １０ , or *-X １ -L １０ -X ２ -R １０ Represents. X １ and X ２ each independently represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-. L １０ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -SO ２ It may be replaced by --or --CO--. R ４ , R ５ and R ６ each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X １ -R １０ , or *-X １ -L １０ -X ２ -R １０ The hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S-, -SO- or -SO ２ It may be replaced by -. R ７ , R ８ and R ９ each independently represents a halogen atom, a hydrocarbon group having 1 to 18 carbon atoms, *-X １ -R １０ , or *-X １ -L １０ -X ２ -R １０ The hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S-, -SO- or -SO ２ When X is a sulfur atom, R ７ and R ８ Or R ８ and R ９ is bonded to S ＋ The ring may contain —CH 2 - is -O-, -S-, -CO-, -SO- or -SO ２ R forming the ring may be replaced with -. ７ and R ８ Or R ８ and R ９ , S ＋ and a single bond formed between two benzene rings connecting the two. R １０ represents a group represented by formula (IC). A １ , A ２ and A ３ each independently represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group optionally having a substituent, 2 - is -O-, -CO-, -S- or -SO ２ It may be replaced by -. Ar １ , Ar ２ and Ar ３ each independently represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m1 represents an integer of 0 to 5, and when m1 is 2 or more, the groups in multiple parentheses may be the same or different. m2 represents an integer of 0 to 5, and when m2 is 2 or more, the groups in the parentheses may be the same or different. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m4 represents an integer of 0 to 4, and when m4 is 2 or more, a plurality of R ４ may be the same or different from each other. m5 represents an integer of 0 to 4, and when m5 is 2 or more, a plurality of R ５ may be the same or different from each other. m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other. m7 represents an integer of 0 to 5, and when m7 is 2 or more, a plurality of R ７ may be the same or different from each other. m8 represents an integer of 0 to 5, and when m8 is 2 or more, a plurality of R ８ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 0≦m1+m7≦5, 0≦m2+m8≦5, and 0≦m3+m9≦5, and at least one of m1, m2, m3, m7, m8, and m9 represents an integer of 1 or more; R １ , R ２ , R ３ , R ７ , R ８ and R ９ At least one of the following is *-X １ -R １０ Or *-X １ -L １０ -X ２ -R １０ Represents. AI － represents an anion having a group represented by formula (IC). (In formula (IC), R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents an integer of 0 to 2, and when u1 is 2, a plurality of R Ａ are either the same or different. s1 represents 1 or 2. t1 represents 0 or 1, provided that the sum of s1 and t1 is 1 or 2. L １２ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO ２ It may be replaced with -. * indicates a binding site.)

2. A １ But, **-X ０１ -L ０１ - or **-L ０１ -X ０１ - and A ２ But, **-X ０２ -L ０２ - or **-L ０２ -X ０２ - and A ３ But, **-X ０３ -L ０３ - or **-L ０３ -X ０３ - and X ０１ , X ０２ and X ０３ each independently represents -O-, -CO-, -S- or -SO ２ - represents L ０１ , L ０２ and L ０３ each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH 2 - is -O-, -CO-, -S- or -SO ２ - may be replaced by . ** is X ＋ 2. The resist composition according to claim 1, wherein the bond site to the benzene ring is

3. X ０１ , X ０２ and X ０３ The resist composition according to claim 2, wherein each of the groups independently represents --O-- or --S--.

4. L ０１ , L ０２ and L ０３ each independently represents a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH 2 3. The resist composition according to claim 2, wherein - may be replaced by -O- or -CO-.

5. 3. The resist composition according to claim 1, wherein X is a sulfur atom.

6. Ar １ , Ar ２ and Ar ３ 3. The resist composition according to claim 1, wherein each of the groups independently represents a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

7. AI － 3. The resist composition according to claim 1, wherein is an anion represented by formula (IA) or formula (IB): [In formula (IA), L b1 represents a single bond or a (nb1+1)-valent hydrocarbon group which may have a substituent, and —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced by -. L b2 represents a single bond or a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and the —CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced by -. Y ｂ１ represents a methyl group having one or more groups represented by formula (IC) or a cyclic hydrocarbon group having 3 to 24 carbon atoms having one or more groups represented by formula (IC), ２ - is -O-, -S-, -CO- or -SO ２ The cyclic hydrocarbon group may be substituted with -, and the cyclic hydrocarbon group may have a substituent. nb1 represents an integer of 1 to 6. When nb1 is 2 or more, the groups in the parentheses may be the same or different.] [In formula (IB), A １ represents a nitrogen atom or a carbon atom. L ｂ２ and Y ｂ１ has the same meaning as in formula (IA). nb5 represents 2 or 3. When nb5 is 2, A １ represents a nitrogen atom; when nb5 is 3, A １ represents a carbon atom. The groups in the brackets may be the same or different. Two groups in the brackets taken together form A １ may form a ring containing the following.

8. AI － The resist composition according to claim 7, wherein is an anion represented by formula (I-A1) or formula (I-A2). [In formula (I-A1), L ｂ２ and Y ｂ１ has the same meaning as in formula (IA). Q b1 , Q b2 , Q b3 and Q. b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents an integer of 0 to 6. When z1 is 2 or more, the groups in the parentheses may be the same or different. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or a (nb2+1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH 2 - is -O-, -S-, -CO- or -SO 2 It may be replaced by -. nb2 represents an integer of 1 to 3. When nb2 is 2 or more, the groups in the parentheses may be the same or different.] [In formula (I-A2), L ｂ２ and Y ｂ１ has the same meaning as in formula (IA). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and the —CH 2 - may be replaced by -O- or -CO-. nb4 represents an integer of 1 to 5. When nb4 is 2 or more, the groups in the multiple parentheses may be the same or different. nb3 represents an integer of 0 to 4. When nb3 is 2 or more, a plurality of R b1 may be the same or different from each other. However, 1≦nb4+nb3≦5 is satisfied.

9. R １ , R ２ , R ３ , R ４ , R ５ , R ６ , R ７ , R ８ and R ９ 3. The resist composition according to claim 1, wherein the total number of groups represented by formula (IC) contained in said compound is 2 or more.

10. 3. The resist composition according to claim 1, which contains a compound having a phenolic hydroxy group or a benzoic carboxy group, or a compound in which the phenolic hydroxy group or the benzoic carboxy group of such a compound is protected with an acid labile group.

11. Contains one or more resins, At least one resin of the one or more resins is 3. The resist composition according to claim 1, which comprises one or more structural units represented by formula (a2-A) or one or more structural units represented by formula (a1-4). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or more, the groups in the parentheses may be the same or different. na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. mc represents an integer of 0 to 2. [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ１８ May be replaced with -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and the hydrocarbon group and the -CH 2 - may be replaced by -O- or -S-. na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R ａ１７ may be the same or different from each other. mc represents an integer of 0 to 2.

12. The resist composition according to claim 11, which contains a resin containing one or more structural units represented by formula (a2-A).

13. The resist composition according to claim 11, which contains a resin containing a structural unit represented by formula (a2-D). [In formula (a2-D), R ａ２ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and the —CH ２ - is -O-, -CO- or -NR ａ２８ May be replaced with -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ａ２１ and R ａ２２ each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L ａ２４ represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents an integer of 1 to 5. When nD2 is 2 or more, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R ａ２７ may be the same or different from each other. However, 1≦nD2+nD22≦5.

14. Relative to the solid content of the resist composition, 3. The resist composition according to claim 1, wherein the content of the salt represented by formula (I) is 70 mass % or more.

15. Relative to the solid content of the resist composition, 12. The resist composition according to claim 11, wherein a total content of the salt represented by formula (I) and the resin containing the structural unit represented by formula (a2-A) or the structural unit represented by formula (a1-4) is 80 mass % or more.

16. 3. The resist composition according to claim 1, further comprising a salt capable of generating an acid having a weaker acidity than the acid generated from the acid generator.

17. (1) a step of applying the resist composition according to claim 1 or 2 onto a substrate; (2) A step of drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

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