Dressing method of cutting blade

Abstract

To provide a dressing method of a cutting blade which enables reduction of warpage occurring in a dresser board.SOLUTION: A dressing method of a cutting blade includes: a dress step 1001 in which a dress table and a cutting blade are relatively moved in a state that the cutting blade cuts into a dresser board held by the dress table to a predetermined depth in a cutting device including the dress table, a cutting unit having the cutting blade attached to a tip of a rotatable spindle, and a moving unit which moves the spindle and the dress table relative to each other. The dress step 1001 is performed in a state that the dress table is located at a predetermined position relative to the cutting blade so that differences of numbers of the dress step 1001 performed in multiple large areas are a predetermined value or lower when the dresser board is divided into the multiple large areas.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a method for dressing a cutting blade. [Background technology]

[0002] A method of dressing a cutting blade is known in which a cutting blade attached to the tip of a rotatable spindle cuts into a dresser board while the cutting blade and the dresser board are moved relative to each other, thereby cutting the dresser board with the cutting blade and shaping the tip of the cutting blade (see, for example, Patent Documents 1 and 2). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2013-082021 A [Patent Document 2] JP 2014-069277 A Summary of the Invention [Problem to be solved by the invention]

[0004] Conventionally, after the dressing table that holds the dresser board is positioned at a predetermined position to dress the cutting blade, when it is time to dress the cutting blade again, the dresser table is positioned so that the cutting blade cuts into an area adjacent to the area cut in the previous dressing operation, and the cutting blade is dressed in that state. This causes a problem that the area where the dresser board is cut and thinned becomes solidified, causing warping and making it impossible to hold it on the dresser table.

[0005] The present invention has been made in consideration of the above problems, and an object of the present invention is to provide a method for dressing a cutting blade that can reduce warping that occurs in a dresser board. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the objective, the dressing method of a cutting blade of the present invention is a method of dressing a cutting blade, which is provided in a cutting device comprising a dressing table, a cutting unit having a cutting blade attached to the tip of a rotatable spindle, and a moving unit for moving the spindle and the dressing table relatively, and comprises a dressing step of moving the dressing table and the cutting blade relatively while the cutting blade is cut to a predetermined depth into a dresser board held on the dressing table, and the dressing step is performed with the dressing table positioned at a predetermined position relative to the cutting blade so that when the dresser board is divided into a plurality of large areas, the difference in the number of dressing steps performed in the large areas is within a predetermined value.

[0007] The dressing step may include forming large area cut grooves that divide the dresser board into the large areas, and then forming small area cut grooves that further divide the large areas into small areas.

[0008] The dress table is rotatable around the central axis of the holding surface, and the moving unit moves the spindle and the dress table relative to each other in the Y direction which is the direction of the rotational axis of the spindle, and the dressing step may be performed with the dress table rotated and positioned at a predetermined angle.

[0009] The dressing step may be performed with the dress table positioned at an angle rotated 180 degrees from the angle of the dress table at which the immediately preceding dressing step was performed. Effect of the Invention

[0010] In the present invention, by performing the next dressing step at a position where the difference in the number of times that dressing steps for forming cutting grooves are performed in each large area of ​​the dresser board is below a predetermined value, the areas in the dresser board where cutting grooves are formed and thinned are dispersed, thereby suppressing the risk of an increase in warping of the dresser board and reducing the warping that occurs in the dresser board. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is a flowchart showing a procedure of a cutting blade dressing method according to the first embodiment. [Diagram 2] FIG. 2 is a perspective view showing a configuration example of a cutting device for carrying out the method for dressing a cutting blade according to the first embodiment. [Diagram 3] FIG. 3 is a perspective view showing a main part of the cutting device shown in FIG. [Figure 4] FIG. 4 is a cross-sectional view illustrating an example of an operation process of the cutting device shown in FIG. [Diagram 5] FIG. 5 is a top view illustrating an example of the operation process of the cutting device illustrated in FIG. [Figure 6] FIG. 6 is a schematic top view illustrating the division of the dresser board into a number of large areas. [Figure 7] FIG. 7 is a schematic top view illustrating the number of dressing steps performed in each large region and the difference in the number of dressing steps performed. [Figure 8] FIG. 8 is a conceptual top view illustrating how each large area of ​​the dresser board is divided into a plurality of small areas. [Figure 9] FIG. 9 is a top conceptual diagram illustrating a large area cut groove and a small area cut groove formed in a dresser board in the cutting blade dressing method according to the second embodiment. [Figure 10] FIG. 10 is a conceptual top view illustrating the positions (angles) and order in which dressing steps are performed in the cutting blade dressing method according to the third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0013] [Embodiment 1] A method for dressing a cutting blade according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a flowchart showing a processing procedure of the method for dressing a cutting blade according to the first embodiment. As shown in Fig. 1, the method for dressing a cutting blade according to the first embodiment includes a dressing step 1001.

[0014] Fig. 2 is a perspective view showing a configuration example of a cutting device 1 that performs the dressing method of a cutting blade according to the first embodiment. Fig. 3 is a perspective view showing a main part of the cutting device 1 shown in Fig. 2. Figs. 4 and 5 are a cross-sectional view and a top view, respectively, explaining an example of an operation process of the cutting device 1 shown in Fig. 2. As shown in Fig. 2, the cutting device 1 that performs the dressing method of a cutting blade according to the first embodiment includes a holding table 10, a dressing table 20, a cutting unit 30, an X-direction moving unit 41, a Y-direction moving unit 42, a Z-direction moving unit 43, and a control unit 50.

[0015] The cutting device 1 is a device for cutting a workpiece 100 shown in FIG. 2. The workpiece 100 to be cut by the cutting device 1 is, for example, a wafer such as a disk-shaped semiconductor device wafer or an optical device wafer, whose base material is silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like, as shown in FIG. 2. The workpiece 100 has a plurality of planned division lines formed in a lattice pattern on a flat surface 101, and devices are formed in areas partitioned by the plurality of planned division lines. As shown in FIG. 2, the workpiece 100 may have a support tape 105 attached to a back surface 104 on the back side of the front surface 101, and an annular frame 106 attached to the outer edge of the support tape 105. That is, the workpiece 100 may be supported and fixed to an opening of the annular frame 106 via the support tape 105. The workpiece 100 is not limited to a wafer, and may be a circular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0016] As shown in FIG. 2, the holding table 10 is a so-called chuck table that includes a disk-shaped frame body with a recess formed therein and a disk-shaped suction part fitted into the recess. The suction part of the holding table 10 is made of porous ceramics or the like with a large number of porous holes, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction part of the holding table 10 is a holding surface 11 on which a workpiece 100 is placed and which suction-holds the placed workpiece 100 by negative pressure introduced from the vacuum suction source. The holding surface 11 and the upper surface of the frame body of the holding table 10 are arranged on the same plane and are formed parallel to the XY plane, which is a horizontal plane. The holding table 10 is provided so as to be freely movable along the X-axis direction (X direction) parallel to the horizontal direction by an X-direction moving unit 41. The holding table 10 has a rotational drive source (not shown) provided below the frame body and the suction portion, and is configured to be freely rotatable (rotatable) around the central axis of the holding surface 11, which is parallel to the Z-axis direction that passes through the center of the holding surface 11 and is parallel to the vertical direction, by the rotational drive source.

[0017] The dress table 20 is disposed adjacent to the holding table 10 as shown in FIG. 2. The dress table 20 is a so-called chuck table that includes a circular frame body with a recess formed therein and a circular suction portion fitted into the recess. The suction portion of the dress table 20 has a porous portion formed of a porous ceramic or the like with a large number of porous holes, and is connected to a suction source (not shown) through a suction path (not shown). The upper surface of the suction portion of the dress table 20 is a holding surface 21 on which a dresser board 23 formed in a circular plate shape in a plan view is placed, as shown in FIG. 2 and FIG. 3, and the dresser board 23 placed thereon is sucked and held by negative pressure introduced from the suction source. The holding surface 21 and the upper surface of the frame body of the dress table 20 are disposed on the same plane and are formed parallel to a horizontal plane.

[0018] The dress table 20 is a so-called sub-chuck table that holds a dresser board 23, while the holding table 10 is a main chuck table that suction-holds the workpiece 100. The dress table 20 is fixed adjacent to the holding table 10 so as to be moved integrally with the holding table 10 by an X-direction moving unit 41. As shown in Fig. 3, the dress table 20 is provided with a rotation drive unit 25 below the frame and the suction part, and is provided so as to be rotatable (rotatable) around a central axis 26 of the holding surface 21 that passes through the center of the holding surface 21 and is parallel to the Z-axis direction by the rotation drive unit 25.

[0019] The dresser board 23 is formed in a flat plate shape, which is an annular shape formed by combining the holding surface 21 and the upper surface of the frame of the dress table 20 in a plan view. That is, the dresser board 23 has a circular opening of the same size and shape as the circular opening provided in the dress table 20 at its center. As shown in FIG. 3, the dress table 20 holds the dresser board 23 so that the circular opening provided in the dress table 20 and the circular opening formed in the dresser board 23 face each other along the vertical direction. That is, the dress table 20 holds the dresser board 23 so that the central axis 26 of the holding surface 21 and the central axis 28 of the annular dresser board 23 coincide with each other. The dress table 20 rotates around the central axis 26 of the holding surface 21 by the rotary drive unit 25, thereby rotating the dresser board 23 held by the holding surface 21 around the central axis 28. In the present invention, the dress table 20 and the dresser board 23 are not limited to a form having a circular opening formed in the center as described above, and may not have a circular opening formed in the center.

[0020] The dresser board 23 held by suction on the dressing table 20 is processed by the cutting blade 31 of the cutting unit 30 described later, whereby the bond material covering the abrasive grains of the cutting blade 31 is removed to cause the abrasive grains to protrude, sharpening the cutting blade 31, i.e., it is used for dressing to improve the processing quality of the cutting blade 31. The dresser board 23 is formed of a binding material in which abrasive grains such as white alundum and green carbon, whose abrasive grain size is smaller than that of the cutting edge 35 of the cutting blade 31, are bound by a resin or the like.

[0021] In the first embodiment, the diameter (size in a plan view) of the dresser board 23 is formed to be smaller than the workpiece 100. Accordingly, in the cutting device 1, the diameter (size in a plan view) of the holding surface 21 of the dress table 20 that holds the dresser board 23 is smaller than the holding surface 11 of the holding table 10 that holds the workpiece 100.

[0022] In the first embodiment, the dress table 20 is formed in a circular or annular shape in a plan view and rotates around the central axis 26 by the rotary drive unit 25, but the present invention is not limited to this and may not be formed in a circular or annular shape in a plan view, i.e., may be formed in a rectangular or square shape, for example, in a plan view, or may not be provided with the rotary drive unit 25, i.e., may not be provided to be rotatable (rotatable) around the central axis 26. In the first embodiment, the dresser board 23 is formed in a circular or annular shape in a plan view, but the present invention is not limited to this and may be formed in a rectangular or square shape, for example, in a plan view, depending on the shape of the dress table 20 in a plan view.

[0023] The rotation drive unit 25 includes a motor that rotates the dress table 20 and an encoder that reads the rotation position of the motor, detects a rotation angle θ1 (see FIG. 3) of the dress table 20 based on the rotation position of the motor read by the encoder, and outputs the detected rotation angle θ1 to the control unit 50. Here, the rotation angle θ1 of the dress table 20 is represented as an angle formed by the table reference direction with respect to the device reference direction A (see FIG. 3) predetermined for the cutting device 1, and is represented as 0 degrees (0°) when the table reference direction predetermined for the dress table 20 and the device reference direction A predetermined for the cutting device 1 coincide, and 360 degrees when the table reference direction predetermined for the dress table 20 and the device reference direction A predetermined for the cutting device 1 are shifted by exactly one revolution, and is represented as 0 degrees to 360 degrees. In addition, in embodiment 1, for ease of explanation, as shown in Figure 3, the device reference direction A is set to the Y direction with the central axis 26 of the holding surface 21 of the dress table 20 as the reference point (origin), and the + direction of the rotation angle θ1 is set to be counterclockwise when viewed in a plan view from above.

[0024] As shown in FIG. 2, the cutting unit 30 has a cutting blade 31 and a spindle 32. The cutting blade 31 is attached to the tip of the spindle 32, and is rotated by the spindle 32, which serves as a rotation axis, to cut the workpiece 100 held on the holding table 10. In the first embodiment, the cutting blade 31 is a cutting grindstone having an annular cutting edge 35 formed to a predetermined thickness by fixing abrasive grains such as diamond or CBN (Cubic Boron Nitride) with a bonding material such as metal or resin. The cutting blade 31 is self-sharpened as the cutting edge 35 wears as cutting is performed, and a certain level of sharpness is always maintained. The cutting blade 31 may be a hubless blade, or may be a hub blade in which the annular cutting edge 35 is fixed to the outer periphery of an annular base. In the first embodiment, the cutting edge 35 of the cutting blade 31 is formed flat. Here, the cutting edge 35 of the cutting blade 31 being formed flat means that the cutting edge 35 of the cutting blade 31 has a rectangular cross section along the radial direction of the cutting edge 35 in the entire circumferential direction of the cutting edge 35, that is, the outer peripheral end face is flat, and the edge is formed in a shape close to a right angle. In the first embodiment, the cutting blade 31 is in such a flat state (shape) that it is cut (edge ​​trimming process described later), but the present invention is not limited to this, and it may be in a shape that is cut (cut groove forming process described later) in a state dressed to have a shape (including a flat shape) suitable for forming a cut groove of a desired shape and sharpness.

[0025] The spindle 32 is provided such that the rotation axis direction is parallel to the Y-axis direction (Y direction) which is parallel to the horizontal direction and perpendicular to the X-axis direction. That is, the spindle 32 is provided rotatably around an axis parallel to the Y-axis direction (Y direction) and rotates around the axis by a motor (not shown) connected to the spindle 32. The spindle 32 supports the cutting blade 31 attached to the tip of the spindle 32 so as to be rotatable around an axis parallel to the Y-axis direction. The cutting unit 30 is provided so as to be movable in the Y-axis direction (Y direction) and the Z-axis direction (Z direction) by a Y-direction moving unit 42 and a Z-direction moving unit 43, respectively.

[0026] In the cutting device 1, the dress table 20 is provided for each cutting unit 30. That is, when one dress table 20 and one cutting unit 30 are one pair, the cutting device 1 has one pair or a plurality of pairs of the dress table 20 and the cutting unit 30. In the example of the first embodiment shown in FIG. 2, the cutting device 1 has two pairs of the dress table 20 and the cutting unit 30, that is, a two-spindle dicer, a so-called facing dual type cutting device. Note that in this specification, the case where the dressing method for the cutting blade is performed using the pair of the dress table 20 and the cutting unit 30 in the upper right of the paper of FIG. 2 will be mainly described, and the case where the dress table 20 and the cutting unit 30 in the lower left of the paper of FIG. 2 are used will be omitted, but these cases are exactly the same except that the positional relationship is symmetrical.

[0027] The X-direction movement unit 41 moves the holding table 10 and the dress table 20 along the X-axis direction relative to the cutting unit 30. The Y-direction movement unit 42 and the Z-direction movement unit 43 move the cutting unit 30 along the Y-axis direction and the Z-axis direction, respectively, relative to the holding table 10 and the dress table 20. The Y-direction movement unit 42 is a movement unit that moves the spindle 32 of the cutting unit 30 and the dress table 20 relatively in the Y direction, which is the direction of the rotation axis of the spindle 32.

[0028] In the first embodiment, the X-direction moving unit 41, the Y-direction moving unit 42, and the Z-direction moving unit 43 are all known ball screw mechanisms having a motor, a ball screw, and a guide. The X-direction moving unit 41, the Y-direction moving unit 42, and the Z-direction moving unit 43 each include an encoder that reads the rotational position of the motor, and detects the relative positions of the holding table 10 and the dress table 20 and the cutting unit 30 in the X-axis direction, the Y-axis direction, and the Z-axis direction based on the rotational position of the motor read by the encoder, and outputs the detected relative positions to the control unit 50. Here, the relative positions in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined using a device coordinate system (XYZ coordinates, which are an orthogonal coordinate system, RΘZ coordinates, which are a cylindrical coordinate system, etc.) provided in the cutting device 1. In addition, the X-direction moving unit 41, the Y-direction moving unit 42 and the Z-direction moving unit 43 are not limited to a configuration in which the relative positions of the holding table 10, the dress table 20 and the cutting unit 30 are detected by an encoder, but may be configured with linear scales parallel to the X-axis direction, the Y-axis direction and the Z-axis direction, respectively, and reading heads that are freely movable in the X-axis direction, the Y-axis direction and the Z-axis direction by the X-direction moving unit 41, the Y-direction moving unit 42 and the Z-direction moving unit 43, respectively, and that read the graduations of the linear scales.

[0029] Under the control of the control unit 50, the cutting unit 30 positions the flat-formed cutting blade 31 at a position vertically opposite to the outer peripheral edge of the workpiece 100 held on the holding table 10 where no device is formed, and the cutting blade 31, which is rotated about an axis parallel to the Y-axis direction by the rotational movement of the spindle 32, cuts into the outer peripheral edge of the workpiece 100 to a predetermined cutting depth from the surface 101 side.In this state, the holding table 10 holding the workpiece 100 is rotated around the central axis of the holding surface 11 by the rotary drive source, and a so-called edge trimming process is performed in which the entire circumference of the outer peripheral edge of the workpiece 100 is cut in a circular shape and chamfered.

[0030] In the first embodiment, the cutting unit 30 is configured to perform edge trimming as described above, but the present invention is not limited to this, and may be configured to perform cutting groove forming processing to form a cutting groove in the workpiece 100 held on the holding table 10 as described below. In this case, under the control of the control unit 50, the cutting unit 30 performs cutting groove forming processing in which the cutting blade 31 is positioned, for example, along the planned division line with respect to the workpiece 100 held on the holding table 10, and the cutting blade 31, which is rotated around an axis parallel to the Y-axis direction by the rotation of the spindle 32, is moved along the X-axis direction by the X-direction moving unit 41 relative to the cutting blade 31 to cut into the workpiece 100 from the surface 101 side to a predetermined cutting depth, and the cutting blade 31 is cut into the workpiece 100 along the planned division line to form a cutting groove.

[0031] In addition, under the control of the control unit 50, the cutting unit 30 rotates the spindle 32 to cause the cutting blade 31 to cut a predetermined depth into the dresser board 23 held on the dress table 20, and then moves the dress table 20 and the cutting blade 31 in the Y-axis direction, which is the rotational axis direction of the spindle 32, as shown in Figures 3 and 4, to cut the dresser board 23 held on the dress table 20 with the cutting edge 35 of the cutting blade 31 along the thickness direction of the cutting edge 35, thereby performing flat dressing in which the cutting edge 35 of the cutting blade 31 is dressed flat by the dresser board 23 held on the dress table 20.

[0032] In the cutting device 1, flat dressing is performed as necessary based on the number of workpieces 100 on which edge trimming and cutting groove forming processes have been performed, the cutting distance, the amount of wear of the cutting edge 35 of the cutting blade 31, and the like. In the cutting device 1, as shown in FIG. 3, flat dressing is performed multiple times using one dresser board 23, and each time flat dressing is performed, a cut groove 29 (see FIG. 3) is formed on the dresser board 23, which is a dressing mark indicating an area where the dresser board 23 has been cut and thinned. Here, the cut groove 29 may be a so-called division groove that penetrates the dresser board 23 in the thickness direction and completely divides the dresser board 23, or a so-called half-cut groove that does not penetrate the dresser board 23 in the thickness direction and does not completely divide the dresser board 23. The dressing method of the cutting blade according to the first embodiment performs any one dressing step 1001 on the premise that the dressing step 1001 is performed multiple times for one dresser board 23.

[0033] In the first embodiment, the cutting edge 35 of the cutting blade 31 is cut into a position moved from the central axis 28 of the dresser board 23 along the Y-axis direction, and the dress table 20 and the cutting blade 31 are moved relatively along the Y-axis direction, i.e., along the radial direction of the dresser board 23 passing through the central axis 28 of the dresser board 23, thereby performing flat dressing (dressing step 1001 described later). By performing flat dressing in this manner, a cut groove 29 is formed in the dresser board 23 along the radial direction of the dresser board 23 passing through the central axis 28 of the dresser board 23.

[0034] In embodiment 1, the cutting groove 29 is thus formed radially toward the central axis 28 of the dresser board 23, so that the position on the dresser board 23 where the cutting groove 29 is formed by performing flat dressing (cutting groove formation position) can be expressed as an angle θ2 with respect to the board reference direction B predetermined for the dresser board 23, as shown in Figure 5. For example, when the cutting groove formation position and the board reference direction B predetermined for the dresser board 23 coincide, it is defined as 0 degrees (0°), and when the cutting groove formation position and the board reference direction B predetermined for the dresser board 23 are shifted by exactly one revolution, it is defined as 360 degrees, and it can be expressed as a range from 0 degrees to 360 degrees. In addition, in embodiment 1, for ease of explanation, as shown in Figure 5, the board reference direction B is set to a direction that overlaps with the apparatus reference direction A when the dresser board 23 is held on the dress table 20, i.e., the Y direction with the central axis 28 of the dresser board 23 when the dresser board 23 is held on the dress table 20 as the reference point (origin), and the + direction of angle θ2 is set to be clockwise when viewed in a plan view from above.

[0035] In the first embodiment, when the rotation angle θ1 of the dress table 20 and the angle θ2 of the cut groove forming position are set in this manner, when the rotation angle θ1 of the dress table 20 when performing flat dressing is set to θA, the angle θ2 of the cut groove forming position where the cut groove 29 is formed by this flat dressing becomes θA, and when the rotation angle θ1 of the dress table 20 when performing flat dressing is moved by θB in the counterclockwise direction (the + direction of θ1), the angle θ2 of the cut groove forming position where the cut groove 29 is formed by this flat dressing moves by θB in the clockwise direction (the + direction of θ2). Thus, in the first embodiment, by setting the rotation angle θ1 of the dress table 20 when performing flat dressing to the same value as the angle θ2, the angle θ2 of the cut groove forming position where the cut groove 29 is formed by performing flat dressing can be set.

[0036] In the first embodiment, the cutting unit 30 is in a form in which the moving unit according to the present invention is the Y-direction moving unit 42, and the Y-direction moving unit 42 moves the dress table 20 and the cutting blade 31 in the Y-axis direction, which is the rotation axis direction of the spindle 32, to perform flat dressing; however, the present invention is not limited to this, and the moving unit according to the present invention may be at least either the X-direction moving unit 41 or the Y-direction moving unit 42, and the moving unit may move the dress table 20 and the cutting blade 31 in a direction parallel to any horizontal direction (for example, a direction along the X-axis direction, a direction along the Y-axis direction, a direction intersecting both the X-axis direction and the Y-axis direction, etc.), so that the cutting edge 35 of the cutting blade 31 cuts the dresser board 23 held on the dress table 20, and dresses the dresser board 23 held on the dress table 20 so that the cutting edge 35 of the cutting blade 31 has a shape (including a flat shape) and sharpness suitable for forming a cut groove of the desired shape by the dresser board 23 held on the dress table 20. In this case, the position on the dresser board 23 where the cut groove is formed by performing dressing (cut groove forming position) can be expressed by XYZ coordinates of the device coordinate system, etc. Note that even in this case, the cut groove 29 formed may be a so-called divided groove or a so-called half-cut groove.

[0037] As shown in FIG. 2, the cutting device 1 further includes a cassette placement table 91, a pair of rails 92, and a cleaning unit 93. The cassette placement table 91 is a placement table on which a cassette (not shown), which is a container for accommodating a plurality of workpieces 100, is placed, and the placed cassette is raised and lowered in the Z-axis direction. The pair of rails 92 can approach or move away from each other while maintaining a parallel state, and the workpiece 100 can be held between the pair of rails 92 via an annular frame 106. The cleaning unit 93 includes a spinner table, and cleans the workpiece 100 held by the spinner table, thereby removing contamination such as processing chips that are generated when edge trimming is performed by the cutting unit 30 and adhere to the workpiece 100. The cutting device 1 further includes a transport unit (not shown). A transport unit (not shown) transports the workpiece 100 between inside a cassette placed on a cassette placement table 91, on a pair of rails 92, and on the holding table 10 or on the spinner table of the cleaning unit 93.

[0038] The control unit 50 controls the operation of various components of the cutting device 1 to cause the cutting device 1 to perform various processes such as edge trimming processing of the workpiece 100, flat dressing processing of the cutting edge 35 of the cutting blade 31 (processing of dressing step 1001 of the cutting blade dressing method according to embodiment 1), and dressing processing. In embodiment 1, the control unit 50 includes a computer system. The computer system included in the control unit 50 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 50 performs arithmetic processing according to a computer program stored in the storage device of the control unit 50, and outputs a control signal for controlling the cutting device 1 to each component of the cutting device 1 via the input / output interface device of the control unit 50.

[0039] Next, this specification will explain the method of dressing the cutting blade according to the embodiment 1 with reference to the drawings. The dressing step 1001 is a step of flat-dressing or dressing the cutting edge 35 of the cutting blade 31 by relatively moving the dressing table 20 and the cutting blade 31 in a state where the dressing table 20 is positioned at a predetermined position relative to the cutting blade 31 and the cutting blade 31 is cut into the dressing board 23 held on the dressing table 20 to a predetermined depth, so that the dressing step 1001 is divided into a plurality of large regions 61, including the dressing step 1001 already performed before the dressing step 1001 and the dressing step 1001, and the difference between the number of dressing steps 1001 performed in the large region 61 is within a predetermined value.

[0040] In embodiment 1, more specifically, the dressing step 1001 is a step in which, when the dresser board 23 held on the dressing table 20 is divided into multiple large areas 61, the dressing table 20 is rotated to position the rotation angle θ1 at a predetermined position, i.e., a predetermined angle, so that the difference in the number of times the dressing step 1001 is performed in the large area 61, including the dressing step 1001 already performed before the dressing step 1001 and the dressing step 1001 itself, is within a predetermined value, and while maintaining the state in which the dressing table 20 is rotated to position the rotation angle θ1 at the predetermined angle, the cutting blade 31 is cut to a predetermined depth into the dresser board 23 held on the dressing table 20, and the dressing table 20 and the cutting blade 31 are moved in the Y-axis direction, thereby flat-dressing the cutting edge 35 of the cutting blade 31.

[0041] Here, in the first embodiment, as described above, the rotation angle θ1 at which the dress table 20 is rotated and positioned in the dressing step 1001 and the position (angle θ2) on the dresser board 23 at which a new cut groove 29 is formed by the dressing step 1001 are the same value. That is, in the dressing step 1001, a new cut groove 29 is formed at a position (angle θ2) on the dresser board 23 corresponding to the predetermined angle (rotation angle θ1) of the dress table 20. For this reason, in the first embodiment, the predetermined angle at which the rotation angle θ1 of the dress table 20 is positioned in the dressing step 1001 is the rotation angle θ1 corresponding (with the same value) to the angle θ2 of the position (cut groove formation position) at which the cut groove 29 is formed such that the difference in the number of times the dressing step 1001 is performed in the large region 61 is within a predetermined value.

[0042] Therefore, in the first embodiment, the dressing step 1001 is substantially performed by selecting a position (angle θ2) on the dressing board 23 where a new cutting groove 29 is to be formed in the dressing step 1001, so that the difference in the number of dressing steps 1001 performed in the large area 61, including the dressing step 1001 performed before the dressing step 1001 and the dressing step 1001, is within a predetermined value, and rotating the dressing table 20 to select the selected position (angle θ2). This is a step in which the dress table 20 is positioned at a rotation angle θ1 corresponding (with the same value) to the position (angle θ2) on the selected dresser board 23, and while maintaining the state in which the dress table 20 is rotated to position the rotation angle θ1 at a predetermined angle, the cutting blade 31 is cut to a predetermined depth into the dresser board 23 held on the dress table 20, and the dress table 20 and the cutting blade 31 are moved in the Y-axis direction to flat-dress the cutting edge 35 of the cutting blade 31 and form a cutting groove 29 at the selected position (angle θ2) on the dresser board 23.

[0043] 6 is a top conceptual diagram illustrating the division of the dresser board 23 into a plurality of large regions 61. Dividing the dresser board 23 held on the dress table 20 into a plurality of large regions 61 means dividing the dresser board 23 held on the dress table 20 evenly (equally) into each large region 61 by a predetermined number of large region divisions (an integer of 2 or more) with the same number of straight lines (large region division lines 71) that pass through the center of gravity in a plan view and extend from the center of gravity toward the periphery, so that the areas are equal to each other. In particular, in the first embodiment in which the dresser board 23 is formed in a circular or annular shape in a plan view, dividing the dresser board 23 held on the dress table 20 into a plurality of large regions 61 means, specifically, dividing the dresser board 23 held on the dress table 20 evenly (equally) in the circumferential direction by a predetermined number of large region divisions (an integer of 2 or more), i.e., dividing so that the central angles are equal to each other, and dividing the dresser board 23 into each of the congruent fan-shaped large regions 61 having equal central angles to each other by large region division lines 71 extending in the radial direction. Here, the large region division lines 71 are formed along the radial direction toward the central axis 28 of the dresser board 23, and therefore, similar to the cutting grooves 29, they can be expressed by the angle θ2 with respect to the board reference direction B predetermined for the dresser board 23.

[0044] In the first embodiment, when the number of large area partitions is set to 2, 3, and 4, the dresser board 23 held on the dress table 20 is partitioned into each large area 61 as shown in Figs. 6(A), (B), and (C). In the example shown in Fig. 6(A), the large area partition lines 71 that partition the dresser board 23 into two large areas 61 are two lines with angles θ2 of 0 degrees and 180 degrees, in the example shown in Fig. 6(B), the large area partition lines 71 that partition the dresser board 23 into three large areas 61 are three lines with angles θ2 of 0 degrees, 120 degrees, and 240 degrees, and in the example shown in Fig. 6(C), the large area partition lines 71 that partition the dresser board 23 into four large areas 61 are four lines with angles θ2 of 0 degrees, 90 degrees, 180 degrees, and 270 degrees. In the present invention, the number of large area partitions is not limited to the above 2, 3, and 4, and may be any integer equal to or greater than 2, and may be 5 or more. In addition, in the example shown in Figures 6(A), (B), and (C), the dresser board 23 held on the dress table 20 is divided into each large area 61 based on the board reference direction B with an angle θ2 of 0 degrees, but embodiment 1 and the present invention are not limited to this, and the large areas 61 may be divided based on a direction other than the board reference direction B (a direction in which the angle θ2 is not 0 degrees), or the divisions based on the board reference direction B and the divisions based on a direction other than the board reference direction B may be used separately or in combination as appropriate.

[0045] Fig. 7 is a top view conceptual diagram for explaining the number of times the dressing step 1001 is performed in each large region 61 and the difference in the number of times the dressing step 1001 is performed. All of the examples shown in Fig. 7(A), (B), (C), and (D) show examples in which the cut grooves 29 are formed at eight locations on the dresser board 23 held on the dressing table 20 by the dressing step 1001 performed before the dressing step 1001 in question, where the angles θ2 of the cut groove formation positions are 15 degrees, 50 degrees, 70 degrees, 95 degrees, 110 degrees, 130 degrees, 195 degrees, and 220 degrees.

[0046] In a dresser board 23 in which cutting grooves 29 have been formed in eight locations by the dressing steps 1001 that have been performed as described above, if the dresser board 23 is divided into three large areas 61 by three large area dividing lines 71 with angles θ2 of 0 degrees, 120 degrees, and 240 degrees, as shown in Figure 7(A), the number of times the dressing step 1001 has been performed in each large area 61, i.e., the number (number of times) of cutting grooves 29 formed, can be calculated as 5 times, 3 times, and 0 times, respectively, clockwise from the large area 61 in the upper right corner of the paper in Figure 7(A) in the range of 0 degrees≦θ2≦120 degrees, and the difference between the maximum and minimum number of times the dressing step has been performed can be calculated as 5 times. Furthermore, in the same dresser board 23, for example, if the dresser board 23 is divided into three large areas 61 by three large area dividing lines 71 with angles θ2 of 12 degrees, 132 degrees, and 252 degrees, as shown in Figure 7 (B), the number of times the dress step 1001 is performed in each large area 61 can be calculated as 6 times, 2 times, and 0 times, respectively, clockwise from the large area 61 in the range of 12 degrees≦θ2≦132 degrees on the right side of the paper in Figure 7 (B), and the difference between the maximum and minimum number of times the dress step is performed can be calculated as 6 times.

[0047] Furthermore, in a dresser board 23 in which cutting grooves 29 have been formed in eight locations by the dressing steps 1001 that have been performed as described above, if the dresser board 23 is divided into four large areas 61 by four large area dividing lines 71 with angles θ2 of 0 degrees, 90 degrees, 180 degrees, and 270 degrees, as shown in Figure 7 (C), the number of times the dressing step 1001 is performed in each large area 61 can be calculated as 3 times, 3 times, 1.5 times, and 0.5 times, respectively, clockwise from the large area 61 in the upper right corner of the paper in Figure 7 (C) in the range of 0 degrees≦θ2≦90 degrees, and the difference between the maximum and minimum number of times the dressing step is performed can be calculated as 2.5 times. Furthermore, in the same dresser board 23, for example, if the dresser board 23 is divided into four large areas 61 by four large area dividing lines 71 with angles θ2 of 45 degrees, 135 degrees, 225 degrees, and 315 degrees, as shown in Figure 7 (D), the number of times the dress step 1001 is performed in each large area 61 can be calculated as 5 times, 2 times, 0 times, and 1 time, respectively, clockwise from the large area 61 in the range of 45 degrees≦θ2≦135 degrees on the right side of the paper in Figure 7 (B), and the difference between the maximum and minimum number of times the dress step is performed can be calculated as 5 times.

[0048] In this way, the number of times the dressing step 1001 is performed in each large region 61 essentially represents the density of the cutting grooves 29, i.e., how tightly the cutting grooves 29 are formed in each large region 61, and the difference in the number of times the dressing step 1001 is performed represents the difference in the density of the cutting grooves 29, i.e., how tightly the cutting grooves 29 are formed in each large region 61. Therefore, by performing the dressing step 1001 so as to suppress the difference in the number of times the dressing step 1001 is performed within a predetermined value, the risk of the cutting grooves 29 being formed in a tightly packed manner in each large region 61 can be suppressed. In addition, by performing the dressing step 1001 so as to reduce the difference in the number of times the dressing step 1001 is performed, the cutting grooves 29 can be formed evenly in each large region 61. In addition, when the large region dividing line 71 and the cutting grooves 29 overlap, the number (number of times) of the cutting grooves 29 formed is calculated as, for example, 0.5 times each in the two large regions 61 sandwiching the large region dividing line 71. In addition, when one cutting groove 29 is formed across multiple large areas 61 across the large area dividing line 71, the number (number of times) that cutting groove 29 is formed is calculated, for example, as a number of times that is proportionally allocated to one time in each of the multiple large areas 61 in which the cutting groove 29 is formed, depending on the length and area ratio of the portion in which the cutting groove 29 is formed.

[0049] In this way, even for dresser boards 23 in which cutting grooves 29 are formed at the same angle θ2, the number of times the dressing step 1001 is performed and the difference in the number of times it is performed in each large area 61 are calculated, which differ from one another, depending on the number of large area divisions and the way the large area division lines 71 are taken. Therefore, in embodiment 1, regardless of the number of large area divisions or the way the large area division lines 71 are taken to divide the dresser board 23 into any number of large areas 61, the dress table 20 is rotated and positioned at a predetermined angle so that the difference in the number of times the dressing step 1001 is performed in the large area 61 is within a predetermined value.

[0050] Therefore, in the dressing step 1001 of embodiment 1, for example, in a dresser board 23 in which cutting grooves 29 have been formed in eight locations by the dressing steps 1001 that have already been performed as described above, if the specified value is set to within 5 times, the rotation angle θ1 of the dressing table 20 is set to within the range of 252 degrees ≦ θ1 ≦ 0 degrees and 0 degrees ≦ θ1 ≦ 12 degrees (specified angle) so that the next dressing step 1001 is performed within the large area 61 in the range of 252 degrees ≦ θ2 ≦ 0 degrees and 0 degrees ≦ θ2 ≦ 12 degrees on the upper left side of the paper surface of Figure 7 (B), and the dressing table 20 is rotated and positioned at the set rotation angle θ1, so that the difference between the number of times the dressing step 1001 is performed in the large area 61 in the range of 12 degrees ≦ θ2 ≦ 132 degrees after the next dressing step 1001 is performed and the number of times the dressing step 1001 is performed in the large area 61 in the range of 252 degrees ≦ θ2 ≦ 0 degrees and 0 degrees ≦ θ2 ≦ 12 degrees is set to 5 times, thereby realizing the target of within the specified value.

[0051] In this way, in the dressing step 1001 of embodiment 1, when the dresser board 23 is divided into multiple large regions 61, the difference between the maximum and minimum numbers (number of times) of cutting grooves 29 formed in each large region 61 can be kept within a predetermined value, thereby suppressing the bias in the distribution of the angles θ2 of the cutting grooves 29 formed in the dresser board 23 within the dresser board 23, and reducing the risk of increased warping of the dresser board 23.

[0052] In the present invention, the predetermined value may be any natural number, but is preferably 5 times or less as in the first embodiment. In this case, even if the dressing step 1001 newly forms one cut groove 29 (once) in the dresser board 23, it is possible to suppress the bias in the distribution of the angle θ2 of the cut groove 29 formed in the dresser board 23 in the dresser board 23, thereby suppressing the risk of an increase in warpage occurring in the dresser board 23. Here, it is more preferable that the predetermined value is a natural number smaller than 5 times or less in the first embodiment (for example, 4 times or less, 3 times or less, 2 times or less). In this case, it is even more preferable that the dressing step 1001 newly forms one cut groove 29 (once) in the dresser board 23, it is possible to suppress the bias in the distribution of the angle θ2 of the cut groove 29 formed in the dresser board 23 in the dresser board 23, thereby suppressing the risk of an increase in warpage occurring in the dresser board 23.

[0053] In the dressing step 1001 of embodiment 1, when the dresser board 23 held on the dressing table 20 is divided into multiple large areas 61, it is preferable to rotate the dressing table 20 to position the rotation angle θ1 at a rotation angle θ1 that avoids the rotation angle θ1 corresponding to the angle θ2 in the large area 61 where the number of times the dressing step 1001 is performed in that large area 61 is the largest, a rotation angle θ1 that avoids the rotation angle θ1 corresponding to the angle θ2 in the large area 61 where the number of times the dressing step 1001 is performed in that large area 61 is greater (more) than the arithmetic mean value, a rotation angle θ1 corresponding to the angle θ2 in the large area 61 where the number of times the dressing step 1001 is performed in that large area 61 is smaller (less) than the arithmetic mean value, or a rotation angle θ1 corresponding to the angle θ2 in the large area 61 where the number of times the dressing step 1001 is performed in that large area 61 is the smallest, and to flat-dress the cutting edge 35 of the cutting blade 31 while maintaining the rotation angle θ1 positioned by rotating the dressing table 20. In these cases, even if one cutting groove 29 is newly formed (once) in the dresser board 23 by the dressing step 1001, the bias in the distribution of the angle θ2 of the cutting groove 29 formed in the dresser board 23 within the dresser board 23 can be preferably suppressed, thereby suppressing the risk of increased warping of the dresser board 23.

[0054] In addition, in embodiment 1, when an operator of the cutting device 1 operates the cutting device 1 to divide the dresser board 23 held on the dress table 20 into multiple large areas 61 while visually checking the position of the cutting groove 29 formed in the dresser board 23 (cutting groove formation position) or checking images or videos through an imaging unit such as a camera installed in the cutting device 1, the operator may rotate the dress table 20 to position the rotation angle θ1 at a predetermined angle so that the difference in the number of times the dress step 1001 is performed in each large area 61 is within a predetermined value, and then operate the cutting device 1 further to perform the dress step 1001.

[0055] In addition, in embodiment 1, the control unit 50 of the cutting device 1 automatically acquires information on the position of the cutting groove 29 formed in the dresser board 23 (data on the angle θ2 of the cutting groove formation position), and based on the information on the position of the cutting groove 29 formed in the dresser board 23, when the dresser board 23 held on the dress table 20 is divided into multiple large areas 61, the control unit 50 calculates a rotation angle θ1 of the dress table 20 such that the difference in the number of times the dress step 1001 is performed in each large area 61 is within a predetermined value, and after rotating the dress table 20 to position it at a predetermined angle (the rotation angle θ1), the control unit 50 of the cutting device 1 further automatically continues to perform the dress step 1001.

[0056] The dressing method of the cutting blade of embodiment 1 having the above-mentioned configuration performs the next dressing step 1001 at a predetermined position (angle θ2) where the difference in the number of times the dressing step 1001 for forming the cutting grooves 29 is performed in each large area 61 of the dresser board 23 is below a predetermined value, thereby dispersing the areas in the dresser board 23 where the cutting grooves 29 are formed and thinned, thereby suppressing the risk of an increase in warping of the dresser board 23 and achieving the effect of reducing the warping of the dresser board 23.

[0057] In addition, in the dressing method of the cutting blade according to the first embodiment, in the dressing step 1001, the dress table 20 holding the dresser board 23 is rotatable around the central axis 26 of the holding surface 21, the moving unit that relatively moves the spindle 32 and the dress table 20 is the Y-direction moving unit 42 that relatively moves the spindle 32 and the dress table 20 in the Y direction that is the rotation axis direction of the spindle 32, and the dressing step 1001 is performed in a state where the dress table 20 is rotated and positioned at a predetermined angle (rotation angle θ1). Therefore, in the dressing method of the cutting blade according to the first embodiment, the position of the cut groove 29 formed in the dresser board 23 in the dressing step 1001 can be easily managed by the rotation angle θ1 or the angle θ2, so that the region where the cut groove 29 is formed and thinned in the dresser board 23 can be more suitably dispersed, suppressing the risk of an increase in the warping generated in the dresser board 23, and reducing the warping generated in the dresser board 23.

[0058] [Embodiment 2] A method for dressing a cutting blade according to embodiment 2 of the present invention will be described. Fig. 8 is a top view conceptual diagram illustrating partitioning each large area 61 of the dresser board 23 into a plurality of small areas 62. Fig. 9 is a top view conceptual diagram illustrating a large area cutting groove 81 and a small area cutting groove 82 formed in the dresser board 23 in the method for dressing a cutting blade according to embodiment 2. In Figs. 8 and 9, the same parts as those in embodiment 1 are denoted by the same reference numerals, and the description thereof will be omitted.

[0059] The cutting blade dressing method of embodiment 2 is the same as embodiment 1 in that in dressing step 1001 of the cutting blade dressing method of embodiment 1, the specified angle for rotating the dressing table 20 to position the rotation angle θ1 is changed to be set more precisely, thereby allowing the position (angle θ2) on the dresser board 23 where the new cutting groove 29 is formed to be set more precisely, and other matters, such as the fact that the method is performed using a cutting device 1, are similar to embodiment 1.

[0060] The dressing step 1001 of the second embodiment is a step of flat-dressing the cutting edge 35 of the cutting blade 31 while rotating the dress table 20 and positioning it at a predetermined angle so as to form a large area cutting groove 81 that divides the dresser board 23 into large areas 61, and then flat-dressing the cutting edge 35 of the cutting blade 31 while rotating the dress table 20 and positioning it at a predetermined angle so as to form a small area cutting groove 82 that further divides the large area 61 into small areas 62. That is, the dressing step 1001 of the second embodiment is a step of flat-dressing the cutting edge 35 of the cutting blade 31 while rotating the dress table 20 and positioning it at a predetermined angle so as to form a small area cutting groove 82 that further divides the large area 61 when the dresser board 23 held on the dress table 20 is divided into a plurality of large areas 61, and in a case where the cutting grooves 29 (large area cutting grooves 81) are not formed in the dresser board 23 along all of the large area dividing lines 71 that divide the dresser board 23 into the large areas 61, the dressing step 1001 is performed at a rotation angle θ1 that forms the cutting grooves 29 (large area cutting grooves 81) in the dresser board 23 along the large area dividing lines 71 where the cutting grooves 29 (large area cutting grooves 81) are not formed. This is a step in which the cutting edge 35 of the cutting blade 31 is flat-dressed while the dressing table 20 is rotated and positioned, and if cutting grooves 29 (large area cutting grooves 81) have been formed in the dresser board 23 along all of the large area dividing lines 71, the dressing table 20 is rotated and positioned at a rotation angle θ1 that forms cutting grooves 29 (small area cutting grooves 82) in the dresser board 23 along the small area dividing lines 72 that further divide each large area 61 into small areas 62, and then the cutting edge 35 of the cutting blade 31 is flat-dressed.

[0061] Dividing each of the multiple large areas 61 formed by partitioning the dresser board 23 held on the dressing table 20 into multiple small areas 62 means dividing each large area 61 evenly (equally) into small areas 62 by a number of small area divisions (an integer of 2 or more) that is determined in advance independently of the number of large area divisions, and by straight lines (small area division lines 72) that pass through the center of gravity in a planar view and extend from the center of gravity toward the outer periphery, the number of lines being the same as the number of small area divisions, so that the areas are equal to each other. In particular, in the second embodiment in which the dresser board 23 is formed in a circular or annular shape in a plan view, the division of each of the large regions 61 formed by partitioning the dresser board 23 held on the dress table 20 into a plurality of small regions 62 means that each large region 61 is divided equally (equally) in the circumferential direction by a small region division number (an integer of 2 or more) determined in advance independent of the large region partition number, i.e., divided so that the central angles are equal to each other, and divided into each of the fan-shaped small regions 62 that are congruent and have equal central angles to each other by small region division lines 72 extending in the radial direction. Here, the small region division lines 72 are formed along the radial direction toward the central axis 28 of the dresser board 23, and thus can be expressed by the angle θ2 with respect to the board reference direction B determined in advance for the dresser board 23, similar to the cutting groove 29 and the large region partition lines 71.

[0062] In embodiment 2, when the combinations of the number of large area divisions and the number of small area divisions are determined to be 2 and 3, 3 and 2, 4, and 2, 4 and 3, respectively, the dresser board 23 held on the dress table 20 is divided into large areas 61, and each large area 61 is divided into small areas 62, as shown in Figures 8(A), (B), (C), and (D). In the example shown in FIG. 8(A), the small area dividing lines 72 that divide the two large areas 61 into three small areas 62 have four angles θ2 of 60 degrees, 120 degrees, 240 degrees, and 300 degrees. In the example shown in FIG. 8(B), the small area dividing lines 72 that divide the three large areas 61 into two small areas 62 have three angles θ2 of 60 degrees, 180 degrees, and 300 degrees. In the example shown in FIG. 8(C), the small area dividing lines 72 that divide the four large areas 61 into two small areas 62 have four angles θ2 of 45 degrees, 135 degrees, 225 degrees, and 315 degrees. In the example shown in FIG. 8(D), the small area dividing lines 72 that divide the four large areas 61 into three small areas 62 have eight angles θ2 of 30 degrees, 60 degrees, 120 degrees, 150 degrees, 210 degrees, 240 degrees, 300 degrees, and 330 degrees. In the present invention, the number of small region divisions is not limited to the above-mentioned 2, 3, or 4, but may be any integer equal to or greater than 2, and may be 5 or more.

[0063] In this way, the large area dividing lines 71 are formed evenly so that the distribution of positions (angle θ2) is not biased on the dresser board 23, and the small area dividing lines 72 are formed evenly together with the large area dividing lines 71 so that the distribution of positions (angle θ2) is not biased on the dresser board 23. For this reason, the large area cutting grooves 81 (see FIG. 9) formed along the large area dividing lines 71 are formed evenly so that the distribution of positions (angle θ2) is not biased on the dresser board 23, and the small area cutting grooves 82 (see FIG. 9) formed along the small area dividing lines 72 are formed evenly together with the large area cutting grooves 81 so that the distribution of positions (angle θ2) is not biased on the dresser board 23. In reality, the large area dividing line 71 and the large area cutting groove 81 overlap each other in a planar view, and the small area dividing line 72 and the small area cutting groove 82 overlap each other in a planar view; however, in Figure 9, the large area cutting groove 81 shown with a dotted line is shifted clockwise (+θ2 direction) relative to the large area dividing line 71 shown with a solid line, and the small area cutting groove 82 shown with a dotted line is shifted clockwise (+θ2 direction) relative to the small area dividing line 72 shown with a dashed line.

[0064] Here, the large area cutting groove 81 that divides the dresser board 23 into large areas 61, and the small area cutting groove 82 that further divides the large area 61 into small areas 62 may either be a so-called dividing groove that penetrates the dresser board 23 in the thickness direction and completely divides the dresser board 23, or a so-called half-cut groove that does not penetrate the dresser board 23 in the thickness direction and does not completely divide the dresser board 23, and both are included.

[0065] In the dressing step 1001 of embodiment 2, when the dresser board 23 is divided into a plurality of large areas 61, if large area cutting grooves 81 are not formed along all of the large area dividing lines 71, the dress table 20 is rotated and positioned at a rotation angle θ1 at which large area cutting grooves 81 are formed along the large area dividing lines 71 where the large area cutting grooves 81 are not formed, and the cutting edge 35 of the cutting blade 31 is flat-dressed while maintaining the rotation angle θ1 positioned by rotating the dress table 20; if large area cutting grooves 81 are formed along all of the large area dividing lines 71, the dress table 20 is rotated and positioned at a rotation angle θ1 at which small area cutting grooves 82 are formed along the small area dividing lines 72 that further divide each large area 61 into small areas 62, and the cutting edge 35 of the cutting blade 31 is flat-dressed while maintaining the rotation angle θ1 positioned by rotating the dress table 20. In this manner, in the dressing step 1001 of the second embodiment, the large area cut grooves 81 can first be formed in the dresser board 23 in sequence along all of the large area dividing lines 71, and then the small area cut grooves 82 can be formed in sequence along all of the small area dividing lines 72. As a result, in the dressing step 1001 of the second embodiment, not only is it possible to suppress the uneven distribution of the angles θ2 of the cut grooves 29 formed in the dresser board 23 within the dresser board 23, but the cut grooves 29 are formed uniformly in the dresser board 23, so that warping occurring in the dresser board 23 can be reduced and suppressed.

[0066] The dressing method of the cutting blade of embodiment 2 having the above-mentioned configuration performs the next dressing step 1001 in which large area cutting grooves 81 are first formed sequentially along all of the large area dividing lines 71 on the dresser board 23, and then small area cutting grooves 82 are formed sequentially along all of the small area dividing lines 72.This further evenly distributes the areas in the dresser board 23 where the cutting grooves 29 are formed and thinned, thereby achieving the effect of reducing and suppressing warping of the dresser board 23.

[0067] [Embodiment 3] A cutting blade dressing method according to the third embodiment of the present invention will be described. Fig. 10 is a top view conceptual diagram for explaining the position (angle θ2) and order of performing the dressing step 1001 in the cutting blade dressing method according to the third embodiment. In Fig. 10, the same parts as those in the first and second embodiments are denoted by the same reference numerals, and the description thereof will be omitted.

[0068] The cutting blade dressing method of embodiment 3 is a modification of the dressing step 1001 of the cutting blade dressing method of embodiment 1 and embodiment 2, in which the dresser board 23 is formed in a circular or annular shape in a planar view, and the predetermined angle for rotating the dress table 20 to position the rotation angle θ1 and the position on the dresser board 23 where the new cutting groove 29 is formed (angle θ2) are set more precisely, including the order in which they are performed.Other matters, such as the fact that the method is performed using a cutting device 1, are the same as those of embodiment 1 and embodiment 2.

[0069] The dressing step 1001 of the third embodiment is a step of flat-dressing the cutting edge 35 of the cutting blade 31 in a state where the dress table 20 is positioned at a second rotation angle θ1-2 obtained by rotating the dress table 20 by 180 degrees from the first rotation angle θ1-1 of the dress table 20 at which the immediately preceding dressing step 1001 was performed. That is, the dressing step 1001 of the third embodiment is a step of flat-dressing the cutting edge 35 of the cutting blade 31 in a state where the dress table 20 is rotated and positioned at the first rotation angle θ1-1 in the first of the two dressing steps 1001 performed consecutively, and flat-dressing the cutting edge 35 of the cutting blade 31 in a state where the dress table 20 is rotated and positioned at the second rotation angle θ1-2 obtained by rotating the dress table 20 by 180 degrees from the first rotation angle θ1-1 in the second of the two dressing steps 1001 performed consecutively.

[0070] In the dressing step 1001 of the third embodiment, in two consecutive dressing steps 1001, the dress table 20 is rotated and positioned at two rotation angles θ1 (first rotation angle θ1-1, second rotation angle θ1-2) that are 180 degrees apart from each other, and the cutting edge 35 of the cutting blade 31 is flat-dressed. In this manner, in the dressing step 1001 of the third embodiment, new cut grooves 29 can be formed at two positions (angle θ2) on the dresser board 23 that are 180 degrees apart from each other and correspond to the two rotation angles θ1. As a result, in the dressing step 1001 of the third embodiment, not only is it possible to suppress the uneven distribution of the angle θ2 of the cut grooves 29 formed in the dresser board 23 within the dresser board 23, but the cut grooves 29 are formed uniformly in the dresser board 23, so that the warping that occurs in the dresser board 23 can be reduced and suppressed.

[0071] In the dressing step 1001 of the third embodiment, it is preferable that, in two dressing steps 1001 performed consecutively, different from the above (different combination), the cutting edge 35 of the cutting blade 31 is flat-dressed in a state where the dress table 20 is rotated to a first rotation angle θ1-1 and positioned in the first dressing step of the two dressing steps 1001 performed consecutively, different from the above, and the cutting edge 35 of the cutting blade 31 is flat-dressed in a state where the dress table 20 is rotated to a first rotation angle θ1-1 and positioned in the second dressing step of the two dressing steps 1001 performed consecutively, where the dress table 20 is rotated from the first rotation angle θ1-1 to a second rotation angle θ1-2 obtained by rotating the dress table 20 ... In this manner, in the dressing step 1001 of the third embodiment, new cut grooves 29 can be formed at positions (angles θ2) on the two dresser boards 23 that correspond to the two rotation angles θ1 and are in a relationship of 45 degrees or more and 180 degrees or less. As a result, in the dressing step 1001 of the third embodiment, not only is it possible to suppress the uneven distribution of the angles θ2 of the cut grooves 29 formed in the dresser board 23 within the dresser board 23, but the cut grooves 29 are formed uniformly in the dresser board 23, so that warping occurring in the dresser board 23 can be reduced and suppressed.

[0072] In the dressing step 1001 of embodiment 3, in order to satisfy the above two conditions, it is preferable to flat-dress the cutting edge 35 of the cutting blade 31 in two consecutive dressing steps 1001, odd-numbered and even-numbered, by rotating and positioning the dress table 20 at two rotation angles θ1 that are 180 degrees apart from each other, and to flat-dress the cutting edge 35 of the cutting blade 31 in two consecutive dressing steps 1001, even-numbered and odd-numbered, by positioning the dress table 20 at an angle rotated at an angle between 45 degrees and 180 degrees. In the dressing step 1001 of the third embodiment, for example, as shown in FIG. 10, the rotation angle θ1 at which the dressing table 20 is positioned is set to 0 degrees, 180 degrees, 90 degrees, 270 degrees, 45 degrees, 225 degrees, 135 degrees, 315 degrees, 157.5 degrees, 337.5 degrees, 67.5 degrees, 247.5 degrees, 22.5 degrees, 202.5 degrees, 112.5 degrees, and 292.5 degrees, and flat dressing is performed. 10, the angle θ2 for forming the cut groove 29 on the dresser board 23 can be set to 0 degrees, 180 degrees, 90 degrees, 270 degrees, 45 degrees, 225 degrees, 135 degrees, 315 degrees, 157.5 degrees, 337.5 degrees, 67.5 degrees, 247.5 degrees, 22.5 degrees, 202.5 degrees, 112.5 degrees, and 292.5 degrees in order from the smallest to the largest numbers in parentheses. In the dressing step 1001 of the third embodiment, by performing the steps in this manner, not only is it possible to suppress the uneven distribution of the angle θ2 of the cut groove 29 formed in the dresser board 23 within the dresser board 23, but also to form the cut groove 29 uniformly in the dresser board 23, thereby reducing and suppressing the warpage occurring in the dresser board 23.

[0073] The dressing method for a cutting blade of embodiment 2 having the above-mentioned configuration performs two consecutive dressing steps 1001 to form new cutting grooves 29 on the dresser board 23 at positions (angle θ2) that are 180 degrees apart from each other, thereby more evenly distributing the areas in the dresser board 23 where the cutting grooves 29 are formed and thinned, thereby achieving the effect of further reducing and suppressing warping that occurs in the dresser board 23.

[0074] It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0075] 1 Cutting equipment 20 Dress Table 21 Holding surface 23 Dresser Board 26,28 center axis 29 Cutting groove 30 Cutting unit 31 Cutting blade 32 Spindle 41 X-direction movement unit 42 Y-direction movement unit 61 large area 62 small area 81 Large area cutting groove 82 Small area cutting groove 1001 Dress Step θ1 Rotation angle θ2 angle

Claims

1. 1. A method for dressing a cutting blade, comprising the steps of: A cutting device including a dress table, a cutting unit having a cutting blade attached to the tip of a rotatable spindle, and a moving unit for moving the spindle and the dress table relative to each other, a dressing step for moving the dressing table and the cutting blade relatively in a state in which the cutting blade is cut to a predetermined depth into a dresser board held on the dressing table, The dressing step is performed with the dressing table positioned at a predetermined position relative to the cutting blade so that, when the dresser board is divided into a plurality of large regions, the difference in the number of dressing steps performed in the large regions is within a predetermined value. How to dress a cutting blade.

2. The dressing step forms a large area cut groove that divides the dresser board into the large area, and then forms a small area cut groove that further divides the large area into small areas.

2. The method of dressing a cutting blade according to claim 1.

3. The dress table is rotatable about a central axis of the holding surface, The moving unit moves the spindle and the dress table relatively in a Y direction which is a direction of a rotation axis of the spindle, 3. The method for dressing a cutting blade according to claim 1, wherein the dressing step is performed with the dressing table rotated and positioned at a predetermined angle.

4. 4. The method for dressing a cutting blade as described in claim 3, characterized in that the dressing step is performed with the dress table positioned at an angle rotated 180 degrees from the angle of the dress table at which the immediately preceding dressing step was performed.

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