Liquid discharge device, liquid discharge method, and manufacturing method of article

Abstract

To provide a liquid discharge device in advantageous for productivity.SOLUTION: A liquid discharge device that discharges a liquid to a plurality of target regions on a substrate for manufacturing a display panel having a plurality of pixels, comprises: a discharge head containing a first nozzle that discharges a first liquid and a second nozzle that discharges a second liquid; a driving mechanism for performing a scanning driving to scan the substrate to relatively a first direction to the discharge head; and a control part. The plurality of target regions contains a first target region and a second target region that exist on a parallel scanning line to a first direction. A width of the first direction of the second target region is narrower than a width of the first direction of the first target region. The control part performs a first scanning driving for supplying the first liquid to the first target region and a second scanning driving for supplying the second liquid to the second target region by supplying the first liquid to the first target region, and a driving mechanism is controlled so that a second scanning speed in the second scanning driving is lower than a first scanning speed in the first scanning driving.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a liquid ejection device, a liquid ejection method, and a method for manufacturing an article.

Background Art

[0002] In recent years, when manufacturing various functional elements, attempts have been made to form a pattern by applying a material for a functional element onto a substrate using a liquid ejection device (inkjet device) (patterning). Patterning using a liquid ejection device has advantages such as high material use efficiency because on-demand patterning is possible, the manufacturing device can be relatively small because it is a non-vacuum process, and the material can be applied to a large area at high speed.

[0003] Applying such a liquid ejection device to the manufacturing process of a display device has been considered. In display devices, various display methods have been proposed, and in particular, the development of a display device using an organic EL element has been underway. Since the materials for organic EL elements are expensive, a liquid ejection device with high material use efficiency and the ability to apply materials to a large area at high speed is suitable for manufacturing organic EL elements.

[0004] In recent years, in order to cope with differences in the light emission efficiency of each color of red (R), green (G), and blue (B) in the materials of organic EL elements, an organic EL display with different pixel widths (pixel widths) for each of RGB has been developed (see Patent Document 1).

[0005] When the pixel widths of RGB are different, the landing accuracy (ejection accuracy) of the liquid required for the liquid ejection device for each pixel is different, and for pixels with a narrow pixel width, a higher landing accuracy is required than for pixels with a wide pixel width. In order to improve the landing accuracy of the liquid, for example, it is conceivable to reduce the scanning speed of the substrate on which the liquid lands. By scanning the substrate at a low speed, it is possible to reduce the landing error due to variations in ejection speed that are different for each liquid ejection.

[0006] In addition, when the pixel widths of RGB are different, it is necessary to change the amount of liquid (inks of respective colors) ejected from the liquid ejection device according to the pixel widths of RGB. Specifically, it is necessary to eject a small amount of liquid onto pixels with a narrow pixel width and a large amount of liquid onto pixels with a wide pixel width. In order to eject a large amount of liquid onto a pixel, for example, it is conceivable to eject liquid onto the pixel in each scan while repeating the scanning of the substrate a plurality of times. In addition, in order to perform multiple scans efficiently (with high productivity), it is necessary to increase the scanning speed of the substrate.

Prior Art Documents

Patent Documents

[0007]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0008] However, in the prior art, without changing the scanning speed according to the pixel widths of RGB, the substrate is scanned at a low speed in accordance with pixels having a narrow pixel width, that is, pixels that require landing accuracy, so there is a risk of causing a decrease in productivity.

[0009] In view of such problems of the prior art, the present invention is made, and an exemplary object thereof is to provide a liquid ejection device that is advantageous in terms of productivity.

Means for Solving the Problems

[0010] To achieve the above object, a liquid ejection device according to one aspect of the present invention is a liquid ejection device that ejects liquid onto a plurality of target regions on a substrate for manufacturing a display panel having a plurality of pixels, the liquid ejection device including: a discharge head including a first nozzle that discharges a first liquid and a second nozzle that discharges a second liquid; a drive mechanism configured to perform a scanning drive for relatively scanning the substrate in a first direction with respect to the discharge head; and a control unit. The plurality of target regions include a first target region and a second target region that exist on a scanning line parallel to the first direction. A width of the second target region in the first direction is narrower than a width of the first target region in the first direction. The control unit performs a first scanning drive for supplying the first liquid to the first target region and a second scanning drive for supplying the first liquid to the first target region and supplying the second liquid to the second target region, and controls the drive mechanism such that a second scanning speed in the second scanning drive is slower than a first scanning speed in the first scanning drive.

[0011] A further object or another aspect of the present invention will be clarified by embodiments described below with reference to the accompanying drawings.

Effects of the Invention

[0012] According to the present invention, for example, a liquid ejection device advantageous in terms of productivity can be provided.

Brief Description of the Drawings

[0013]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Mode for Carrying Out the Invention

[0014] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the invention according to the claims. Although a plurality of features are described in the embodiments, not all of these plurality of features are essential to the invention, and the plurality of features may be arbitrarily combined. Further, in the accompanying drawings, the same or similar configurations are denoted by the same reference numerals, and redundant descriptions are omitted.

[0015] FIGS. 1(a) and 1(b) are schematic views showing the configuration of a liquid ejection device 1 as one aspect of the present invention. FIG. 1(a) shows the liquid ejection device 1 from the side, and FIG. 1(b) shows the liquid ejection device 1 from above. The liquid ejection device 1 is embodied as an inkjet device that ejects a liquid (ejection liquid) such as ink, for example. In the present embodiment, "ink" means a liquid used for forming a pattern or a film on a substrate. Further, the components of the ink are not particularly limited, but for example, a liquid containing a solute and a solvent for forming an organic film can be used.

[0016] In this specification and the accompanying drawings, directions are indicated in an XYZ coordinate system in which the direction parallel to the ejection direction of the liquid from the liquid ejection device 1 is defined as the Z axis, and two directions orthogonal to each other in a plane perpendicular to the Z axis are defined as the X axis and the Y axis. Also, the directions parallel to the X axis, Y axis, and Z axis in the XYZ coordinate system are defined as the X direction, Y direction, and Z direction, respectively, and the plane parallel to the plane on which the substrate is disposed is defined as the XY plane.

[0017] The liquid ejection device 1 has a substrate stage 3 that holds and drives a substrate 2. The substrate 2 is appropriately selected from a glass substrate, a plastic substrate, etc., according to the product to be manufactured as an article. In this embodiment, the substrate 2 is a substrate for manufacturing a display panel having a plurality of pixels. The substrate 2 is typically a plate-shaped member, but is not limited to a specific form as long as it functions as a substrate. For example, the substrate 2 may be a deformable film or a circular substrate.

[0018] As shown in FIG. 1(b), the substrate 2 is provided with a pixel region 201 and an alignment mark 203. The pixel region 201 is a region where the ink 4 ejected from the liquid ejection device 1 is supplied (arranged) to form (array) a number of functional elements, in this embodiment, a plurality of pixels. As shown in FIG. 2, the pixel region 201 includes a plurality of pixel regions 202 (target regions) arranged for each of RGB along the Y direction which is the scanning direction. FIG. 2 is a diagram showing an example of the arrangement of the pixel regions 202. In this embodiment, the pixel region 202 includes pixel regions 202r, 202g, and 202g existing on a scanning line parallel to the scanning direction. The pixel region 202r is a target region (second target region) to which red (R) ink 4r should be supplied. The pixel region 202g is a target region (first target region) to which green (G) ink 4g should be supplied, and the pixel region 202b is a target region (first target region) to which blue (B) ink 4b should be supplied. The width in the scanning direction (pixel width) of the pixel region 202r is different from the pixel widths of the pixel regions 202g and 202b. In FIG. 2, 3×2 pixel regions 202 are shown on the substrate, but actually, a very large number of pixel regions will be arranged. The alignment mark 203 is used when measuring the position of the substrate 2 held by the substrate stage 3. When measuring the position of the substrate 2, the camera 9 images (detects) the alignment mark 203 of the substrate 2 and measures the position of the alignment mark 203.

[0019] The liquid ejection device 1 has a ejection head 5 that ejects a liquid, specifically ink 4 (in the form of droplets), toward a substrate 2 (at a predetermined position). In this embodiment, the ejection head 5 has the function of individually ejecting ink 4r, ink 4g, and ink 4b as the ink 4.

[0020] The ejection head 5 includes an ejection head including a plurality of nozzles arranged along the X direction, which is a sub-scanning direction orthogonal (intersecting) to the scanning direction, for each of RGB. Specifically, the ejection head 5 is configured by arranging an ejection head 5r for ejecting ink 4r (second liquid), an ejection head 5g for ejecting ink 4g (first liquid), and an ejection head 5b for ejecting ink 4b (first liquid) in the scanning direction. The ejection head 5r includes a nozzle 51r (second nozzle) for ejecting ink 4r, the ejection head 5g includes a nozzle 51g (first nozzle) for ejecting ink 4g, and the ejection head 5b includes a nozzle 51b (first nozzle) for ejecting ink 4b.

[0021] Each of the ejection head 5, that is, the ejection head 5r, the ejection head 5g, and the ejection head 5b, has a width equal to or greater than the width of the pixel region 201 in the sub-scanning direction. Therefore, by relatively scanning (driving) the substrate 2 (held by the substrate stage 3) and the ejection head 5 in the scanning direction, the ejection head 5 can eject ink 4 onto the entire surface of the pixel region 201. In this embodiment, the substrate stage 3 functions as a drive mechanism for performing a scanning drive to relatively scan the substrate 2 with respect to the ejection head 5 in the scanning direction.

[0022] The liquid ejection device 1 has a control unit 11 configured by, for example, a computer (information processing device) including a CPU, a memory, and the like. The control unit 11 generally controls each unit of the liquid ejection device 1 in accordance with a program stored in the memory to operate the liquid ejection device 1. For example, the control unit 11 controls the ejection head 5 and the substrate stage 3 so that ink 4 is supplied to a pixel region 201 on the substrate in each scan drive while performing a scan drive multiple times to scan the substrate stage 3 (substrate 2) relatively to the ejection head 5 in the scan direction. The control unit 11 also determines the number of scan drives (number of scans) so that a predetermined amount of ink 4 (required number of ejections, i.e., a target amount of ink 4 to be supplied to the pixel region 201) is supplied to the pixel region 201.

[0023] First Embodiment The first embodiment will be described with reference to Figs. 3(a), 3(b), 3(c) and 4. As shown in Figs. 3(a), 3(b) and 3(c), in this embodiment, the RGB ratio of the pixels, i.e., the ratio of the widths (pixel widths) in the scanning direction of the pixel regions 202r, 202g and 202b, is 1.0:1.5:1.5. The pixel width of the pixel region 202r is 20.0 μm, and the pixel widths of the pixel regions 202g and 202b are 30.0 μm. Therefore, the pixel region 202r requires a higher landing accuracy than the pixel regions 202g and 202b, but the required number of ejections, i.e., the target amount of the ink 4 to be supplied to the pixel region 202, is smaller. Here, the landing accuracy means the positional accuracy of the ink 4 supplied from the ejection head 5 (nozzle) to the pixel region 202.

[0024] The ratio of the widths of the pixel regions 202r, 202g, and 202b in the scanning direction may be other ratios other than the same ratio (1.0:1.0:1.0). In the present embodiment, the pixel width of the pixel region 202r is narrower than the pixel widths of the pixel regions 202g and 202b, and the pixel widths of the pixel regions 202g and 202b are the same, but this is not limited to this. For example, the pixel width of the pixel region 202r may be wider than the pixel widths of the pixel regions 202g and 202b, or the pixel widths of the pixel regions 202g and 202b may be different.

[0025] In this embodiment, the number of ink 4r ejected to the pixel region 202r is one, the number of ink 4g ejected to the pixel region 202g is two, and the number of ink 4b ejected to the pixel region 202b is two. The number of ink 4 ejected to the pixel region 202 is determined by the area of ​​the pixel region 202, the volume of the ink 4, the concentration of the ink 4, and the like. In this embodiment, the volume and concentration of the ink 4r supplied to the pixel region 202r, the ink 4g supplied to the pixel region 202g, and the ink 4b supplied to the pixel region 202b are not particularly limited. The number of ink 4 ejected to each pixel region 202 may be different between RGB. In addition, the number of times the ink 4 is ejected to the pixel region 202 in one scan drive is not limited, and the ink 4 may be ejected to the pixel region 202 multiple times, for example, twice.

[0026] In this embodiment, the inks 4r, 4g, and 4b are supplied to the pixel regions 202r, 202g, and 202b, respectively, by performing two scan drives. Specifically, in the first scan drive, the ink 4r is not discharged from the discharge head 5r to the pixel region 202r, and the inks 4g and 4b are discharged from the discharge heads 5g and 5b to the pixel regions 202g and 202b, respectively. In other words, in the first scan drive, the ink 4r is not supplied to the pixel region 202r, and the inks 4g and 4b are supplied to the pixel regions 202g and 202b, respectively. In the second scan drive, one shot of the ink 4r is discharged from the discharge head 5r to the pixel region 202r, and one shot of the inks 4g and 4b is discharged from the discharge heads 5g and 5b to the pixel regions 202g and 202b, respectively. In other words, in the second scan drive, the ink 4r, the ink 4g, and the ink 4b are supplied to the pixel regions 202r, 202g, and 202b, respectively. Note that the number of scans in the scan drive is not limited to two, and may be two or more.

[0027] The operation sequence of the liquid ejection device 1 will be described with reference to Fig. 4. Fig. 4 is a flowchart for explaining the operation sequence of the liquid ejection device 1. As described above, this operation is performed by the control unit 11 comprehensively controlling each part of the liquid ejection device 1.

[0028] In S101, the substrate 2 is carried into the liquid ejection device 1 via a substrate transport mechanism (not shown). The substrate 2 carried into the liquid ejection device 1 is held by the substrate stage 3.

[0029] In S102, the substrate 2 is aligned (positioned). Specifically, the substrate stage 3 is driven so that the alignment mark 203 provided on the substrate 2 is positioned below the camera 9 (imaging field of view). The alignment mark 203 of the substrate 2 held by the substrate stage 3 is imaged by the camera 9 to measure the position of the alignment mark 203. Then, the position of the substrate 2 is obtained from the measurement results of the positions of all the alignment marks 203 obtained by the camera 9, and the substrate 2 is aligned by driving the substrate stage 3 in the X direction, Y direction, and rotational direction around the Z axis.

[0030] In S103, the first scanning drive is performed to supply ink 4g to pixel region 202g and ink 4b to pixel region 202b without supplying ink 4r to pixel region 202r. Specifically, while scanning substrate 2 (substrate stage 3 holding substrate 2) in the scanning direction relative to ejection head 5, inks 4g and 4b are ejected from ejection heads 5g and 5b (nozzles 51g and 51b) one by one onto pixel regions 202g and 202b, respectively. At this time, ink 4r is not ejected from ejection head 5r (nozzle 51r) onto pixel region 202r. The scanning speed (first scanning speed) of substrate stage 3 relative to ejection head 5 in the first scanning drive is set to 300 mm / sec.

[0031] Fig. 3(b) is a diagram showing the states of pixel regions 202r, 202g, and 202b after the first scanning drive has been performed. Referring to Fig. 3(b), the ink 4r is not supplied to pixel region 202r, and half the target amount of ink 4g and 4b (one out of two shots) is supplied to pixel regions 202g and 202b, respectively.

[0032] In S104, a second scan drive is performed to supply ink 4r to pixel region 202r, ink 4g to pixel region 202g, and ink 4b to pixel region 202b. Specifically, while scanning substrate 2 in the scanning direction relative to ejection head 5, inks 4r, 4g, and 4b are ejected one by one from ejection heads 5r, 5g, and 5b (nozzles 51r, 51g, and 51b) to pixel regions 202r, 202g, and 202b, respectively. In addition, the scanning speed (second scan speed) of substrate stage 3 relative to ejection head 5 in the second scan drive is set to 100 mm / sec, which is slower than the scanning speed in the first scan drive.

[0033] Fig. 3(c) is a diagram showing the states of the pixel regions 202r, 202g, and 202b after the first scanning drive and the second scanning drive are performed. Referring to Fig. 3(c), the target amounts of ink 4r, 4g, and 4b (one shot for the pixel region 202r, two shots for the pixel regions 202g and 202b) are supplied to the pixel regions 202r, 202g, and 202b, respectively.

[0034] In this embodiment, in the first scan drive, while the substrate 2 is scanned at high speed with respect to the ejection head 5, the ink 4g is supplied to the pixel region 202g, and the ink 4b is supplied to the pixel region 202b. Then, in the second scan drive, while the substrate 2 is scanned at low speed with respect to the ejection head 5, the ink 4r is supplied to the pixel region 202r, the ink 4g is supplied to the pixel region 202g, and the ink 4b is supplied to the pixel region 202b. However, in the first scan drive, the substrate 2 may be scanned at low speed with respect to the ejection head 5, and in the second scan drive, the substrate 2 may be scanned at high speed with respect to the ejection head 5. In this case, in the first scan drive, the ink 4r is supplied to the pixel region 202r, the ink 4g is supplied to the pixel region 202g, and the ink 4b is supplied to the pixel region 202b. In the second scan drive, the ink 4g is supplied to the pixel region 202g, and the ink 4b is supplied to the pixel region 202b. For example, when the pixel width of each pixel region 202 is R <G<Bである場合、3回の走査駆動を行うことで、画素領域202r、202g及び202bのそれぞれにインク4r、4g及び4bを供給してもよい。具体的には、1回目の走査駆動では、吐出ヘッド5に対して基板2を高速で走査しながら、画素領域202bにインク4bを供給する。2回目の走査駆動では、吐出ヘッド5に対して基板2を中速で走査しながら、画素領域202gにインク4gを供給し、画素領域202bにインク4bを供給する。3回目の走査駆動では、吐出ヘッド5に対して基板2を低速で走査しながら、画素領域202rにインク4rを供給し、画素領域202gにインク4gを供給し、画素領域202bにインク4bを供給する。

[0035] In S105, the substrate 2 is carried out from the liquid ejection device 1 via a substrate transport mechanism (not shown).

[0036] In this manner, in this embodiment, the scanning speed is made different between the first scanning drive and the second scanning drive according to the pixel widths of the pixel regions 202r, 202g, and 202b; specifically, the scanning speed in the second scanning drive is made slower than the scanning speed in the first scanning drive. In other words, when the pixel widths of RGB are different, pixels with narrow pixel widths are scanned at a low speed, and pixels with wide pixel widths are scanned at a high speed. As a result, in this embodiment, the productivity of the liquid ejection device 1 can be improved compared to the conventional technology in which scanning is performed at a low speed in accordance with pixels with narrow pixel widths.

[0037] <Second embodiment> With reference to FIG. 5, a method of determining a scanning speed from information related to the pixel width of a pixel region 202 will be described as a second embodiment. FIG. 5 is a diagram showing the positional relationship between the ejection head 5 and the substrate 2 held by the substrate stage 3. Factors related to the deviation of the position (landing position) of the ink 4 supplied from the ejection head 5 to the pixel region 202 include, for example, the pixel width of the pixel region 202 and the ejection characteristics of the ejection head 5 (the nozzles). The ejection characteristics include, for example, the variation in the ejection speed of the ink 4 ejected from the ejection head 5, the volume of (the droplets of) the ink 4 ejected from the ejection head 5, and the ejection angle of the ink 4 ejected from the ejection head 5. In this embodiment, the description will focus on the pixel width of the pixel region 202 and the variation in the ejection speed of the ink 4.

[0038] In this embodiment, the distance HD between the substrate 2 and the ejection head 5 is 1 mm, the average ejection speed of the ink 4 ejected from the ejection head 5 is 4.5 m / sec, and the variation in the ejection speed of the ink 4 ejected from the ejection head 5 is ±0.5 m / sec.

[0039] When the ejection speed of the ink 4 varies to the high speed side and becomes 5.0 m / sec, the time from when the ink 4 is ejected from the ejection head 5 to when it lands on the substrate 2 is 200.0 μsec. When the scanning speed is 300 mm / sec, the scanning distance SD from when the ink 4 is ejected to when it lands on the substrate 2 is 60.0 μm. On the other hand, when the ejection speed of the ink 4 varies to the low speed side and becomes 4.0 m / sec, the time from when the ink 4 is ejected from the ejection head 5 to when it lands on the substrate 2 is 250.0 μsec. When the scanning speed is 300 mm / sec, the scanning distance SD from when the ink 4 is ejected to when it lands on the substrate 2 is 75.0 μm. Therefore, the deviation of the landing position (landing error) due to the variation in the ejection speed of the ink 4 occurs in the range of 15.0 μm when the scanning speed is 300 mm / sec. Furthermore, when the scanning speed is 100 mm / sec, the scanning distance SD from when the ink 4 is discharged until it lands on the substrate 2 becomes shorter, so that the landing error due to the variation in the discharge speed of the ink 4 occurs in the range of 5.0 μm. Thus, when the scanning speed is 100 mm / sec, the landing error is smaller in range by 10.0 μm than when the scanning speed is 300 mm / sec. This means that when the scanning speed is 100 mm / sec, the ink 4 can be landed even if the pixel width of the pixel region 202 is narrower by about 10.0 μm than when the scanning speed is 300 mm / sec.

[0040] In this embodiment, the relationship between the range E μm of the landing error due to the variation in the ejection speed of the ink 4 and the scanning speed V mm / sec is expressed by the following formula (1).

[0041] E = 0.05 × V (1) Next, a method for determining the scanning speed from (information relating to) the pixel width of the pixel region 202 will be described. In this embodiment, the landing error caused by variations in the ejection speed of the ink 4 is determined by subtracting 15.0 μm from the pixel width of the pixel region 202. Here, 15.0 μm is a value determined by the landing error caused by factors other than variations in the ejection speed of the ink 4 and the width of the ink 4 (droplets) when they land on the substrate 2.

[0042] In this embodiment, the pixel width of pixel region 202r is 20.0 μm, and the pixel widths of pixel regions 202g and 202b are 30.0 μm. Therefore, the allowable amount of landing error due to variations in the ejection speed in pixel region 202r is 5.0 μm, and the allowable amount of landing error due to variations in the ejection speed in each of pixel regions 202g and 202b is 15.0 μm.

[0043] As described above, the scanning speed can be calculated from formula (1). Therefore, it can be seen that the scanning speed when supplying inks 4g and 4b to pixel regions 202g and 202b, respectively, should be 300 mm / sec or less, and the scanning speed when supplying ink 4r to pixel region 202r should be 100 mm / sec or less.

[0044] In the first scan driving (first scan driving) in which the ink 4r is not supplied to the pixel region 202r, and the inks 4g and 4b are supplied to the pixel regions 202g and 202b, respectively, the scan speed is set to 300 mm / sec. In the second scan driving (second scan driving) in which the inks 4r, 4g, and 4b are supplied to the pixel regions 202r, 202g, and 202b, respectively, the scan speed is set to 100 mm / sec.

[0045] In this way, according to this embodiment, the scanning speed for each scan drive can be determined from information related to the pixel width of the pixel region 202 and the ejection characteristics (ejection speed variation and ejection angle variation) of the ejection head 5 (nozzles).

[0046] <Third embodiment> As a third embodiment, a method of determining a scanning speed from information regarding the volume of a droplet (sphere) of ink 4 ejected from (the nozzle of) an ejection head 5 will be described with reference to Fig. 6. Fig. 6 is a diagram showing the relationship between a pixel region 202 and the ink 4 supplied to the pixel region 202. In this embodiment, as shown in Fig. 6, the value obtained by subtracting the diameter of a droplet (sphere) of ink 4 from the pixel width of the pixel region 202 is set as the allowable amount of landing error caused by variations in the ejection speed of ink 4.

[0047] The diameter BD μm of a droplet of the ink 4 is expressed by the following formula (2) using the volume BApL of the ink 4.

[0048]

number

[0049] For example, if the volume of the ink 4 is 2.0 pL, the diameter BD of the ink 4 droplet is 15.6 μm. Therefore, in this embodiment, when ink 4r is supplied to the pixel region 202r, 4.4 μm, which is the value obtained by subtracting 15.6 μm from the pixel width 20.0 μm of the pixel region 202r, is set as the allowable amount of landing error caused by the variation in the ejection speed of the ink 4. Then, as described in the second embodiment, the scanning speed is calculated from the formula (1). Specifically, from 4.4÷0.05, it can be seen that the scanning speed should be 88.0 mm / sec or less when supplying ink 4r to the pixel region 202r. Similarly, the scanning speeds when supplying ink 4g and 4b to the pixel regions 202g and 202b, respectively, are calculated. The allowable amount of landing error caused by variations in the ejection speed of ink 4 is 14.4 μm, which is the value obtained by subtracting 15.6 μm from the pixel width of each of pixel regions 202g and 202b, 30.0 μm. Therefore, from 14.4÷0.05, it can be seen that the scanning speed should be 288 mm / sec or less when inks 4g and 4b are supplied to pixel regions 202g and 202b, respectively.

[0050] Also, for example, if the volume of the ink 4 is 1.6 pL, the diameter BD of the ink 4 droplet is 14.5 μm. Therefore, when supplying the ink 4r to the pixel region 202r, it is understood that the scanning speed should be 110.0 mm / sec or less. Similarly, when supplying the inks 4g and 4b to the pixel regions 202g and 202b, respectively, it is understood that the scanning speed should be 310.0 mm / sec or less.

[0051] In this embodiment, the allowable amount of landing error is calculated from the diameter of the droplets of the ink 4, but the present invention is not limited to this. For example, the allowable amount of landing error may be calculated from the diameter of the droplets of the ink 4 when the ink 4 ejected from the ejection head 5 lands on the substrate 2.

[0052] In this way, according to this embodiment, the scanning speed in each scan drive can be determined from information related to the pixel width of the pixel region 202 and the diameter of (the droplets of) the ink 4 ejected from (the nozzles of) the ejection head 5. For example, the scanning speed in each scan drive can be determined by using the difference between the pixel width of the pixel region 202 and the diameter of the droplets of the ink 4 ejected from (the nozzles of) the ejection head 5 as the allowable amount (tolerance) of landing error.

[0053] <Fourth embodiment> As a fourth embodiment, a method for determining the scanning speed based on the positional accuracy of the ink 4 supplied from the ejection head 5 (nozzles) to the pixel region 202, that is, the landing accuracy of the ink 4, will be described.

[0054] The landing accuracy of the ink 4 can be obtained, for example, by actually discharging the ink 4 onto the substrate 2 and measuring the landing position (variation) of the ink 4 using a camera 9 or the like. In addition, since the landing accuracy of the ink 4 differs depending on the scanning speed, it is necessary to obtain the landing accuracy by measuring the landing position of the ink 4 at each scanning speed while changing the scanning speed. In other words, the variation in the landing position of the ink 4 supplied from the discharge head 5 to the pixel region 202 corresponding to each of a plurality of different scanning speeds, that is, the landing accuracy of the ink 4, is obtained. Then, the scanning speed for each scan drive can be determined (selected) from the landing accuracy required according to the pixel width of the pixel region 202 (required landing accuracy) and the landing accuracy of the ink 4 corresponding to each of the plurality of scanning speeds.

[0055] For example, assume that the required landing accuracy of the pixel region 202r is ±10 μm, and that the required landing accuracy of each of the pixel regions 202g and 202b is ±15 μm. Also assume that the landing accuracy of the ink 4 corresponding to a scanning speed of 200 mm / sec is ±10 μm, and that the landing accuracy of the ink 4 corresponding to a scanning speed of 400 mm / sec is ±15 μm. In this case, the scanning speed is set to 400 mm / sec in the first scanning drive (first scanning drive) in which the ink 4r is not supplied to the pixel region 202r, and the inks 4g and 4b are supplied to the pixel regions 202g and 202b, respectively. Also, the scanning speed is set to 200 mm / sec in the second scanning drive (second scanning drive) in which the inks 4r, 4g, and 4b are supplied to the pixel region 202r, the pixel regions 202g, and 202b, respectively.

[0056] In this way, according to this embodiment, the scanning speed for each scan drive can be determined from information relating to the pixel width of the pixel region 202 and the landing accuracy of the ink 4 corresponding to each of a plurality of scanning speeds.

[0057] <Fifth embodiment> Next, a process for generating ejection data for controlling the scanning drive of the substrate stage 3 and the ejection of the ink 4 from the ejection head 5 (ejection data generation process) will be described as a fifth embodiment with reference to Fig. 7. Fig. 7 is a flowchart for explaining the ejection data generation process. The ejection data generation process is executed by the control unit 11.

[0058] In S201, pixel information on the pixel region 202 is obtained for each of RGB. The pixel information includes information on the width of the pixel region 202 in the scanning direction, i.e., the pixel width, and information on the target amount of ink 4 to be supplied to the pixel region 202. The pixel information is obtained, for example, by a user input via an operation screen or an input from an external server.

[0059] In S202, the number of times scan driving should be performed, i.e., the number of scans, is determined for each RGB based on the pixel information acquired in S201. For example, the number of scans SN is determined from the following formula (3). Note that in formula (3), PW is the pixel width of the pixel region 202, PV is the target amount of ink 4 to be supplied to the pixel region 202, NV is the ejection amount of ink 4 ejected from the ejection head 5, and NN is the number of nozzles of the ejection head 5 assigned to the pixel region 202.

[0060] SN = PV / (NN × NV) (3) For example, consider a case where the number of nozzles NN is 3, the discharge amount NV is 2.0 pL, the target amount PV in the pixel region 202r is 6.0 pL, and the target amount PV in each of the pixel regions 202g and 202b is 12.0 pL. In this case, the number of scans SN required for the pixel region 202r is 1, and the number of scans SN required for the pixel regions 202g and 202b is 2. Note that if the target amount PV is not an integer multiple of the number of nozzles NN x the discharge amount NV, the number of nozzles NN and the discharge amount NV may be adjusted. For example, if the target amount PV in the pixel region 202r is 6.3 pL, the discharge amount NV of the ink 4r discharged from the nozzles of the discharge head 5r may be changed from 2.0 pL to 2.1 pL.

[0061] In S203, the scanning speed in each scan drive is determined for each RGB based on the pixel information acquired in S201 and the number of scans determined in S202. The method for determining the scanning speed is as described in the first to fourth embodiments, and therefore a detailed description thereof will be omitted here.

[0062] In S204, for each of RGB, ejection data is generated for controlling the scanning drive of the substrate stage 3 and the ejection of the ink 4 from the ejection head 5, based on the scanning speed determined in S204. As described above, the number of scans SN required for the pixel region 202r is 1, and the number of scans SN required for the pixel regions 202g and 202b is 2. Therefore, the ejection data generated for the pixel region 202r in the first scan drive is ejection data that does not eject the ink 4r. Also, it is possible not to generate the ejection data for the pixel region 202r in the first scan drive.

[0063] The ejection data generated in S204 is used in the first scan driving and the second scan driving performed in S103 and S104, respectively, in the operation sequence of the liquid ejection device 1 described with reference to FIG.

[0064] Sixth embodiment As a sixth embodiment, a case where the inks 4r, 4g, and 4b supplied to the pixel regions 202r, 202g, and 202b are the same ink will be described. FIG. 8 is a diagram showing an example of the configuration of a pixel of an organic light-emitting diode (OLED). As the configuration of an OLED pixel, for example, as shown in FIG. 8, a HIL (hole injection layer), a HTL (hole transport layer), an EML (light emitting layer), an ETL (electron transport layer), and an EIL (electron injection layer) are stacked on a substrate 2. Here, for layers other than the EML (light emitting layer), the same ink 4 may be supplied to the pixel regions 202r, 202g, and 202b. In this case, the ejection head 5 does not need to include the ejection heads 5r, 5g, and 5b, and the same ink 4 may be ejected from one ejection head to the pixel regions 202r, 202g, and 202b. In other words, the nozzles 51r, 51g, and 51b may be arranged in one ejection head.

[0065] Seventh embodiment The method for manufacturing an article according to the embodiment of the present invention is suitable for manufacturing an article such as a display panel for organic EL or the like, a microdevice such as a semiconductor device, or an element having a fine structure. The method for manufacturing an article according to the present embodiment includes a step of discharging a liquid (ink) onto a substrate using a liquid discharge device 1, and a step of processing the substrate onto which the liquid has been discharged in the step, specifically, drying the substrate to obtain a substrate on which a dry film has been formed. The method for manufacturing an article according to the present embodiment further includes a step of manufacturing an article from the substrate on which a dry film has been formed. Furthermore, the method for manufacturing an article according to the present embodiment includes other well-known steps (baking, cooling, cleaning, oxidation, film formation, deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). The method for manufacturing an article according to the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article, compared to conventional methods.

[0066] The disclosure of the present specification includes the following liquid ejection device, liquid ejection method, and method for manufacturing an article.

[0067] (Item 1) 1. A liquid ejection apparatus for ejecting liquid onto a plurality of target areas on a substrate for manufacturing a display panel having a plurality of pixels, comprising: an ejection head including a first nozzle that ejects a first liquid and a second nozzle that ejects a second liquid; a drive mechanism for performing a scan drive to scan the substrate relative to the ejection head in a first direction; A control unit, The plurality of target areas include a first target area and a second target area that exist on a scan line parallel to the first direction, The width of the second target area in the first direction is narrower than the width of the first target area in the first direction, the control unit performs a first scan driving for supplying the first liquid to the first target area, and a second scan driving for supplying the first liquid to the first target area and supplying the second liquid to the second target area, and controls the drive mechanism such that a second scan speed in the second scan driving is slower than a first scan speed in the first scan driving. A liquid ejection device characterized by the following.

[0068] (Item 2) The control unit In the first scanning drive, controls the ejection head so as to eject the first liquid from the first nozzle and not to eject the second liquid from the second nozzle. In the second scanning drive, controls the ejection head so as to eject the first liquid from the first nozzle and to eject the second liquid from the second nozzle. The liquid ejection device according to Item 1, characterized by the above.

[0069] (Item 3) The control unit Determines the first scanning speed based on information regarding the width of the first target area in the first direction and information regarding the ejection characteristics of the first nozzle. Determines the second scanning speed based on information regarding the width of the second target area in the first direction and information regarding the ejection characteristics of the second nozzle. The liquid ejection device according to Item 1 or 2, characterized by the above.

[0070] (Item 4) The ejection characteristics include variations in ejection speed or variations in ejection angle. The liquid ejection device according to Item 3, characterized by the above.

[0071] (Item 5) The control unit Determines the first scanning speed based on information regarding the width of the first target area in the first direction and the diameter of the first liquid ejected from the first nozzle. Determines the second scanning speed based on information regarding the width of the second target area in the first direction and the diameter of the second liquid ejected from the second nozzle. The liquid ejection device according to Item 1 or 2, characterized by the above.

[0072] (Item 6) The control unit determines the first scanning speed based on the difference between the width of the first target area in the first direction and the diameter of the first liquid discharged from the first nozzle, as the allowable value of the positional deviation in the first direction of the first liquid supplied from the first nozzle to the first target area; determines the second scanning speed based on the difference between the width of the second target area in the first direction and the diameter of the second liquid discharged from the second nozzle, as the allowable value of the positional deviation in the first direction of the second liquid supplied from the second nozzle to the second target area. The liquid discharge device according to item 5, characterized in that.

[0073] (Item 7) The control unit determines the first scanning speed based on information on the width of the first target area in the first direction and the variation in the position in the first direction of the first liquid supplied from the first nozzle to the first target area corresponding to each of a plurality of different scanning speeds; determines the second scanning speed based on information on the width of the second target area in the first direction and the variation in the position in the first direction of the second liquid supplied from the second nozzle to the second target area corresponding to each of a plurality of different scanning speeds. The liquid discharge device according to item 1 or 2, characterized in that.

[0074] (Item 8) The control unit determines the number of times of the scanning drive based on information on the width of each of the first target area and the second target area in the first direction, and the amounts of the first liquid and the second liquid to be supplied to each of the first target area and the second target area. The liquid discharge device according to any one of items 1 to 7, characterized in that.

[0075] (Item 9) The liquid discharge device according to any one of items 1 to 8, characterized in that the first liquid and the second liquid are the same liquid.

[0076] (Item 10) The liquid ejection device according to item 9, wherein the first nozzle and the second nozzle are arranged on the same ejection head.

[0077] (Item 11) A liquid ejection method using a liquid ejection device for ejecting liquid onto a plurality of target regions on a substrate for manufacturing a display panel having a plurality of pixels, the liquid ejection device including a first nozzle for ejecting a first liquid and a second nozzle for ejecting a second liquid, the method comprising: performing a scanning drive to relatively scan the substrate in a first direction with respect to the ejection head; the plurality of target regions include a first target region and a second target region existing on a scanning line parallel to the first direction; a width of the second target region in the first direction is narrower than a width of the first target region in the first direction; in the step, performing a first scanning drive for supplying the first liquid to the first target region and a second scanning drive for supplying the first liquid to the first target region and supplying the second liquid to the second target region, and making a second scanning speed in the second scanning drive slower than a first scanning speed in the first scanning drive; A liquid ejection method characterized by the above.

[0078] (Item 12) a step of ejecting liquid onto a substrate using the liquid ejection device according to any one of items 1 to 10; a step of processing the substrate on which the liquid has been ejected; a step of manufacturing an article from the processed substrate; A method for manufacturing an article, characterized by including the above steps.

[0079] The invention is not limited to the above embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Therefore, claims are attached to disclose the scope of the invention.

Explanation of Signs

[0080] 1: Liquid ejection device 2: Substrate 3: Substrate stage 4, 4r, 4g, 4b: Ink 5, 5r, 5g, 5b: Ejection head 11: Control unit

Claims

1. A liquid ejection device that ejects liquid onto a plurality of target regions on a substrate for manufacturing a display panel having a plurality of pixels, comprising: a discharge head including a first nozzle that discharges a first liquid and a second nozzle that discharges a second liquid; a drive mechanism for performing a scanning drive to scan the substrate relative to the discharge head in a first direction; a control unit; the plurality of target regions include a first target region and a second target region that exist on a scanning line parallel to the first direction; the width of the second target region in the first direction is narrower than the width of the first target region in the first direction; the control unit performs a first scanning drive for supplying the first liquid to the first target region and a second scanning drive for supplying the first liquid to the first target region and supplying the second liquid to the second target region, and controls the drive mechanism so that a second scanning speed in the second scanning drive is slower than a first scanning speed in the first scanning drive. A liquid ejection device characterized by the above.

2. The control unit controls the discharge head so that in the first scanning drive, the first liquid is discharged from the first nozzle and the second liquid is not discharged from the second nozzle; controls the discharge head so that in the second scanning drive, the first liquid is discharged from the first nozzle and the second liquid is discharged from the second nozzle. The liquid ejection device according to claim 1, characterized by the above.

3. The control unit determines the first scanning speed based on information regarding the width of the first target region in the first direction and information regarding the discharge characteristics of the first nozzle; determines the second scanning speed based on information regarding the width of the second target region in the first direction and information regarding the discharge characteristics of the second nozzle. The liquid ejection device according to claim 1, characterized by the above.

4. The discharge characteristics include variations in discharge speed or variations in discharge angle. The liquid ejection device according to claim 3, characterized by the above.

5. The control unit determines the first scanning speed based on information regarding the width of the first target region in the first direction and the diameter of the first liquid discharged from the first nozzle; determines the second scanning speed based on information regarding the width of the second target region in the first direction and the diameter of the second liquid discharged from the second nozzle. The liquid ejection device according to claim 1, characterized in that

6. The control unit determines the first scanning speed by using, as an allowable value of the positional deviation in the first direction of the first liquid supplied from the first nozzle to the first target area, the difference between the width in the first direction of the first target area and the diameter of the first liquid ejected from the first nozzle; determines the second scanning speed by using, as an allowable value of the positional deviation in the first direction of the second liquid supplied from the second nozzle to the second target area, the difference between the width in the first direction of the second target area and the diameter of the second liquid ejected from the second nozzle. The liquid ejection device according to claim 5, characterized in that

7. The control unit determines the first scanning speed based on information on the width in the first direction of the first target area and the variation in the position in the first direction of the first liquid supplied from the first nozzle to the first target area corresponding to each of a plurality of different scanning speeds; determines the second scanning speed based on information on the width in the first direction of the second target area and the variation in the position in the first direction of the second liquid supplied from the second nozzle to the second target area corresponding to each of a plurality of different scanning speeds. The liquid ejection device according to claim 1, characterized in that

8. The control unit determines the number of times of the scanning drive based on information on the width in the first direction of each of the first target area and the second target area, the amount of the first liquid and the amount of the second liquid to be supplied to each of the first target area and the second target area. The liquid ejection device according to claim 1, characterized in that

9. The liquid ejection device according to claim 1, characterized in that the first liquid and the second liquid are the same liquid.

10. The liquid ejection device according to claim 9, characterized in that the first nozzle and the second nozzle are arranged in the same ejection head.

11. A liquid ejection method using a liquid ejection device having an ejection head including a first nozzle for ejecting a first liquid and a second nozzle for ejecting a second liquid, and ejecting liquid onto a plurality of target areas on a substrate for manufacturing a display panel having a plurality of pixels, the method comprising: a step of performing a scanning drive for relatively scanning the substrate in a first direction with respect to the ejection head. The plurality of target regions include a first target region and a second target region that exist on a scanning line parallel to the first direction. The width of the second target region in the first direction is narrower than the width of the first target region in the first direction. In this step, a first scanning drive for supplying the first liquid to the first target region and a second scanning drive for supplying the first liquid to the first target region and supplying the second liquid to the second target region are performed, and the second scanning speed in the second scanning drive is made slower than the first scanning speed in the first scanning drive. A liquid ejection method characterized by the above.

12. A step of ejecting a liquid onto a substrate using the liquid ejection device according to claim 1, A step of processing the substrate on which the liquid has been ejected, A step of manufacturing an article from the processed substrate, A method for manufacturing an article, characterized by comprising the above.

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