Sheet peeling device and sheet peeling method

Abstract

To provide a sheet peeling device and a sheet peeling method that can stably peel an adhesive sheet from an adhered.SOLUTION: A sheet peeling device EA includes peeling means 20 for applying tension to an adhesive sheet AS attached to an outer surface WKE of an adherend WK, and guiding means 50 for guiding the adhesive sheet AS that has been peeled from the adherend WK. The guiding means 50 has a folded part AST that is formed by folding the adhesive sheet AS immediately after being peeled from the outer surface WKE toward a direction facing the adhesive sheet AS immediately before being peeled from the outer surface WKE. The guiding means presses the folded part AST onto the outer surface WKE in a manner to resist an elastic restraining force of the folded part AST.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a sheet peeling device and a sheet peeling method.

Background Art

[0002] A sheet peeling device for peeling an adhesive sheet attached to the outer peripheral surface of an adherend from the adherend is known (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the tape peeling system 70 (sheet peeling device) described in Patent Document 1, the protective tape 27 (adhesive sheet) peeled from the wafer W (adherend) is peeled off over a wide area all at once or is difficult to peel off from the adherend, resulting in the inconvenience that the adhesive sheet cannot be stably peeled from the adherend.

[0005] An object of the present invention is to provide a sheet peeling device and a sheet peeling method capable of stably peeling an adhesive sheet from an adherend.

Means for Solving the Problems

[0006] The present invention employs the configuration described in the claims.

Effects of the Invention

[0007] According to the present invention, the adhesive sheet is bent to form a bent portion, and the bent portion is pressed against the outer peripheral surface so as to resist the elastic restoring force of the bent portion. As a result, the adhesive sheet is prevented from being peeled off over a wide area all at once or from being difficult to peel off from the adherend, and the adhesive sheet can be stably peeled off from the adherend.

Brief Description of the Drawings

[0008]

Figure 1

Embodiments for Carrying Out the Invention

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In addition, the X-axis, Y-axis, and Z-axis in the present embodiment are in a perpendicular relationship with each other. The X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. Further, in the present embodiment, based on the case when viewed from the direction of arrow VD parallel to the Y-axis, when the direction is indicated without specifying the figure, "up" is the arrow direction of the Z-axis, "down" is the opposite direction, "left" is the arrow direction of the X-axis, "right" is the opposite direction, "front" is the arrow direction of the Y-axis, and "rear" is the opposite direction.

[0010] The sheet peeling device EA for implementing the sheet peeling method of the present invention includes a sheet holding means 10 that performs a sheet holding process of holding an adhesive sheet AS attached to the outer peripheral surface WKE of an adherend WK, a peeling means 20 that applies tension to the adhesive sheet AS attached to the outer peripheral surface WKE of the adherend WK and performs a peeling process of peeling the adhesive sheet AS from the adherend WK, a bent portion detecting means 30 that performs a bent portion detecting process of detecting the position of a bent portion AST (see FIG. 1(D)) (the bent portion detecting means 30 is omitted except in FIG. 1(A)), an energy applying means 40 that performs an energy applying process of applying heat as a predetermined energy to a peeling sheet PS as a peeling adhesive member, and a guiding means 50 that performs a guiding process of guiding the adhesive sheet AS peeled from the adherend WK. In the present embodiment, the adherend WK has a circular shape centered on the adherend center WKC.

[0011] The sheet holding means 10 includes a support member 11 that directly or indirectly supports each member constituting the sheet holding means 10, a support roller 12 that supports a belt-shaped peeling sheet PS, a guide roller 13 that guides the peeling sheet PS, a sheet support base 14 that is supported by a slide shaft 14B slidable in a guide block 14A and is biased in a direction away from the guide block 14A by a coil spring 14C as a biasing means, a pressing member 15 that is supported by an output shaft 15B of a linear motor 15A as a driving device via the energy applying means 40 and has a pressing surface 15C for pressing the adhesive sheet AS, a cutter blade 16 as a cutting means supported by an output shaft 16B of a linear motor 16A as a driving device, a receiving member 17 supported by a slider 17B of a linear motor 17A as a driving device, and a pressing member 18 attached to an output shaft 18B of a rotation motor 18A as a driving device supported by the receiving member 17. By pressing and attaching the peeling sheet PS to the adhesive sheet AS with the pressing surface 15C, the adhesive sheet AS is held via the peeling sheet PS. Note that the peeling sheet PS of the present embodiment is a heat-sensitive adhesive sheet whose adhesive force is improved by applying heat as a predetermined energy.

[0012] The peeling means 20 includes a linear motor 21 as a driving device that supports the support member 11 with the slider 21A, a rotation motor 22 as a driving device, and a support table 23 that is supported on the output shaft 22A of the rotation motor 22 and has a support surface 23A that can be suction-held by a decompression means (holding means) such as a decompression pump or a vacuum ejector (not shown), an imaging means such as a camera or a projector, and various sensors such as an optical sensor or an ultrasonic sensor, and an edge detector mechanism 24 capable of detecting the peeling start edge AS1 of the adhesive sheet AS. Note that the support table 23 of the present embodiment is configured to rotate about the table center 23C by the rotation motor 22. Further, the peeling means 20 of the present embodiment is configured to relatively rotate the sheet holding means 10 and the adherend WK based on the detection result of the bending portion detection means 30.

[0013] The bending portion detection means 30 includes a detector mechanism 31 composed of an imaging means such as a camera or a projector, and various sensors such as an optical sensor or an ultrasonic sensor, and is disposed obliquely above the left of the support table 23.

[0014] The energy applying means 40 includes a heating device 41 such as a coil heater or a heating side of a heat pipe.

[0015] The guiding means 50 includes a linear motor 51 as a driving device, a linear motor 52 as a driving device supported on the output shaft 51A of the linear motor 51, and a guide roller 53 as a guide member rotatably supported on the slider 52A of the linear motor 52. The adhesive sheet AS immediately after being peeled from the outer peripheral surface WKE is bent in the direction facing the adhesive sheet AS immediately before being peeled from the outer peripheral surface WKE to form a bent portion AST, and the bent portion AST is pressed against the outer peripheral surface WKE so as to resist the elastic restoring force of the bent portion AST. Note that, in the present embodiment, the linear motor 52 is an interval adjusting means for adjusting the interval DT (see Fig. 1(D)) between the adhesive sheet AS immediately after being peeled off from the outer peripheral surface WKE and the adhesive sheet AS immediately before being peeled off from the outer peripheral surface WKE.

[0016] The operation of the above-described sheet peeling device EA will be described. First, for the sheet peeling device EA in which each member is arranged at the initial position shown by the solid line in Fig. 1(A), a user of the sheet peeling device EA (hereinafter simply referred to as "user") inputs a signal for starting automatic operation through an operation means (not shown) such as an operation panel or a personal computer. Next, the user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK with the adhesive sheet AS attached to the outer peripheral surface WKE on the support table 23 so that the adherend center WKC of the adherend WK overlaps with the table center 23C as shown in Fig. 1(A). Then, the peeling means 20 drives a decompression means (not shown) and starts suction holding on the support surface 23A.

[0017] Thereafter, the peeling means 20 drives the rotation motor 22 and the edge detector mechanism 24, and rotates the adherend WK in the direction of arrow RD as shown in Fig. 1(B) to detect the peeling start edge AS1 of the adhesive sheet AS with the edge detector mechanism 24. Based on the detection result of the edge detector mechanism 24, the driving of the rotation motor 22 is stopped with the rear part in the rotation direction of the peeling start edge AS1 arranged to the right of the pressing member 15 (see Fig. 1(C)). Next, the sheet holding means 10 drives the linear motor 17A, and as shown in Fig. 1(B), presses the receiving member 17 against the sheet support base 14 and moves the sheet support base 14 backward together with the receiving member 17 to position the tip of the peeling sheet PS on the receiving member 17. Then, the sheet holding means 10 drives the rotation motor 18A, and as shown by the two-dot chain line in Fig. 1(B), after gripping the tip of the peeling sheet PS with the pressing member 18 and the receiving member 17, the linear motor 17A is driven, and as shown in Fig. 1(C), the receiving member 17 is returned to the initial position to pull out the peeling sheet PS by a predetermined length.

[0018] Next, the sheet holding means 10 drives the linear motor 15A, and as shown by the two-dot chain line in Fig. 1(C), after pressing the peeling sheet PS against the rear part in the rotation direction of the peeling start edge AS1 with the pressing member 15, the energy applying means 40 drives the heating device 41 to heat the peeling sheet PS and attach the peeling sheet PS to the adhesive sheet AS. Then, the sheet holding means 10 drives the linear motor 16A, and as shown by the two-dot chain line in Fig. 1(C), after inserting the cutter blade 16 into the concave groove 14D to cut the peeling sheet PS, the linear motors 15A and 16A are driven to return the pressing member 15 and the cutter blade 16 to their initial positions.

[0019] Next, the guiding means 50 drives the linear motor 51 and the linear motor 52, moves the guide roller 53 backward, and then moves the guide roller 53 to the right (see Fig. 1(D)). At this time, the linear motor 52 moves the guide roller 53 so that the distance DT between the adhesive sheet AS immediately after being peeled from the outer peripheral surface WKE and the adhesive sheet AS immediately before being peeled from the outer peripheral surface WKE by a subsequent operation becomes a preset distance. Note that the distance DT is preset to a distance that can press the bent portion AST against the outer peripheral surface WKE against the elastic restoring force of the bent portion AST to be formed later.

[0020] Then, the bent portion detecting means 30 drives the detector 31, and the peeling means 20 drives the linear motor 21. As shown in Fig. 1(D), the support member 11 is moved to the left to move away from the adherend WK, and tension is applied to the adhesive sheet AS to peel the adhesive sheet AS from the adherend WK. At this time, simultaneously with the leftward movement of the support member 11, the peeling means 20 drives the rotation motor 22 based on the detection result of the bent portion detecting means 30, and rotates the adherend WK in the direction of arrow RD or the opposite direction of arrow RD so that the bent portion AST of the adhesive sheet AS is positioned between the guide roller 53 and the adherend WK. Thereby, the adhesive sheet AS is peeled from the adherend WK while the bent portion AST is pressed against the outer peripheral surface WKE of the adherend WK against its own elastic restoring force.

[0021] Next, when the entire adhesive sheet AS is peeled off from the adherend WK and the user or a conveying means (not shown) holds the adhesive sheet AS, the peeling means 20 stops driving the linear motor 21 and the rotation motor 22. Thereafter, when the sheet holding means 10 drives the rotation motor 18A to return the pressing member 18 to the initial position, the user or a conveying means (not shown) conveys the held adhesive sheet AS to a disposal position (not shown). Next, when the peeling means 20 stops driving a decompression means (not shown) and releases the adsorption holding on the support surface 23A, after the user or a conveying means (not shown) conveys the adherend WK to the next process, the peeling means 20 drives the linear motor 21 to return the support member 11 to the initial position, and thereafter the same operation as described above is repeated.

[0022] According to the embodiment as described above, the adhesive sheet AS is bent to form the bent portion AST, and the bent portion AST is pressed against the outer peripheral surface WKE so as to resist the elastic restoring force of the bent portion AST. Therefore, the adhesive sheet AS will not be peeled off over a wide area at once or will not be easily peeled off from the adherend WK, and the adhesive sheet AS can be stably peeled off from the adherend WK.

[0023] The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps. Moreover, they are not limited to the configurations and steps of merely one embodiment shown in the above embodiment. For example, the peeling means may be any means as long as it can apply tension to the adhesive sheet attached to the outer peripheral surface of the adherend and peel the adhesive sheet from the adherend, and it is not limited as long as it is within the technical scope in light of the common general knowledge in the art at the time of filing (the same applies to other means and steps).

[0024] The sheet holding means 10 may cut the peeling sheet PS after peeling the adhesive sheet AS from the adherend WK, or may cut the peeling sheet PS before attaching the peeling sheet PS to the adherend WK, or may employ a single-sheet peeling sheet PS, or may not cut the peeling sheet PS, or may not have the cutting means 16. Instead of or in combination with the receiving member 17, the rotation motor 18A, and the pressing member 18, a configuration may be adopted in which the peeling sheet PS is held by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), an adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc. For example, the peeling sheet PS may be attached to the adhesive sheet AS attached to the outer peripheral surface WKE of the adherend WK by a driving device such as an articulated robot. The peeling sheet PS may be attached to the front portion in the rotation direction of the peeling start edge AS1. Depending on where the peeling start edge AS1 is located, the position where the peeling sheet PS is attached can be determined, and the direction in which the peeling means 20 rotates the adherend WK can be determined. The pressing member 15 may be supported by the output shaft 15B of the linear motion motor 15A without passing through the energy imparting means 40. The pressing surface 15C may have any shape, such as a concave arc shape, a convex arc shape, a V shape, an inverted V shape, a U shape, an inverted U shape, a concavo-convex rectangular shape, a linear shape, or other shapes. The sheet holding means 10 may hold the adhesive sheet AS without passing through the peeling sheet PS. For example, the adhesive sheet AS may be directly or indirectly held by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), an adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc. It may or may not be provided in the sheet peeling device EA of the present invention. When it is not provided in the sheet peeling device EA of the present invention, for example, the rear portion in the rotation direction of the peeling start edge AS1 of the adhesive sheet AS is held by another device, and the peeling means 20 may move the other device away from the adherend WK or move the adherend WK away from the other device to peel the adhesive sheet AS from the adherend WK.

[0025] As the peeling means 20, a support table 23 that cannot perform adsorption and holding on the support surface 23A may be adopted, or a gripping means such as a chuck motor or a chuck cylinder, a Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), a magnetic force, a Bernoulli adsorption, a suction adsorption, a drive device, etc. may be used to hold the adherend WK. There may also be an upper pressing member that sandwiches and holds the adherend WK with the support table 23. A drive device that moves the rotation motor 22 may be adopted, and the drive device, the linear motor 21, and the rotation motor 22 may be driven to peel the adhesive sheet AS from the adherend WK by moving the adherend WK away from the sheet holding means 10 while rotating the adherend WK. A drive device that moves the rotation motor 22 without adopting the linear motor 21 may be adopted, and the drive device and the rotation motor 22 may be driven to peel the adhesive sheet AS from the adherend WK by moving the adherend WK away from the sheet holding means 10 while rotating the adherend WK. Instead of the linear motor 21, the rotation motor 22, and the support table 23, a drive device such as an articulated robot may be used to apply tension to the adhesive sheet AS to peel the adhesive sheet AS from the adherend WK. The edge detector 24 may be eliminated, and for example, the adherend WK with the adhesive sheet AS attached may be placed on the support table 23 so that the peeling start edge AS1 is at a predetermined position. Without moving the adherend WK or the support member 11 away from the other party, for example, the peeling sheet PS and the adhesive sheet AS may be sandwiched between a sandwiching roller that is rotationally driven by a drive device and a guide roller 53, and the sandwiching roller may be rotated to apply tension to the adhesive sheet AS to peel the adhesive sheet AS from the adherend WK. Or, as shown in FIG. 1(F), a drive roller 25 that is supported by an output shaft (not shown) of a rotation motor 25A as a drive device and sandwiches the adhesive sheet AS with a pinch roller 25B may be adopted, and the rotation motor 25A may be driven to apply tension to the adhesive sheet AS to peel the adhesive sheet AS from the adherend WK.

[0026] The bending portion detection means 30 may be arranged below or on the side of the support table 23, or may be arranged anywhere as long as it can detect the position of the bending portion AST. It may or may not be provided in the sheet peeling device EA of the present invention. When it is not provided in the sheet peeling device EA of the present invention, the movement of the slider 21A and the rotation of the adherend WK may be linked by calculated values or empirical values so that the bending portion AST of the adhesive sheet AS is located between the guide roller 53 and the adherend WK.

[0027] The energy application means 40 may be any means that applies electromagnetic waves such as ultraviolet rays, infrared rays, visible light rays, sound waves, X-rays or gamma rays as a predetermined energy, or applies a heating medium such as hot water or hot air, or applies a cooling medium such as cold water or cold air. Any energy can be applied as long as it can improve the adhesive force of the peeling adhesive member in consideration of the characteristics, properties, nature, material, composition and configuration of the peeling adhesive member. It may be provided at a location other than the position shown in the above embodiment, and may be provided anywhere as long as it can apply a predetermined energy to the peeling adhesive member. It may or may not be provided in the sheet peeling device EA of the present invention.

[0028] The guiding means 50 may employ a driver mechanism for rotating the guiding roller 53, or for example, as shown in Fig. 1(E), the position of the guiding roller 53 may be adjusted so that the interval DT becomes zero, or as shown in Fig. 1(F), a driving pulley 54B supported by an output shaft (not shown) of a rotating motor 54A as a driving device, a rotatable driven pulley 54C, a belt member 54D wound around the driving pulley 54B and the driven pulley 54C, and a guiding plate 54E for guiding the belt member 54D may be adopted as a guiding member, namely, a guiding conveyor 54. Alternatively, as shown by the solid line in Fig. 1(G), a guiding plate 55 as a guiding member having an arc-shaped plate member 55A along the outer peripheral surface WKE of the adherend WK may be adopted. Or, as shown by the solid line and the two-dot chain line in Fig. 1(G), a guiding device 56 as a guiding member having the plate member 55A and the roller 56A may be adopted. The position where the bending portion AST is formed may be the position where the distance between the guiding member and the outer peripheral surface WKE is the shortest as shown in Fig. 1(D), (E), (G), or may not be the position where the distance between the guiding member and the outer peripheral surface WKE is the shortest as shown by the two-dot chain line in Fig. 1(F). A driver mechanism for moving the rotating motor 22 may be adopted, and the driver mechanism and the linear motor 52 may constitute an interval adjusting means to adjust the interval DT by moving both the guiding member and the adherend WK away from and close to each other. Or, a driver mechanism for moving the rotating motor 22 may be adopted without using the linear motor 52, and the driver mechanism may be driven to move the adherend WK away from and close to the guiding member to adjust the interval DT. As shown in Fig. 1(D), (E), (F), (G), The bending portion AST may be formed by setting the angle between the adhesive sheet AS immediately after being peeled off from the outer peripheral surface WKE and the adhesive sheet AS immediately before being peeled off from the outer peripheral surface WKE to 180 degrees. Or, as shown by the lower two-dot chain line in Fig. 1(F), the angle between the adhesive sheet AS immediately after being peeled off from the outer peripheral surface WKE and the adhesive sheet AS immediately before being peeled off from the outer peripheral surface WKE may be set to 180 degrees or less, or as shown by the upper two-dot chain line in Fig. 1(F), may be set to 180 degrees or more to form the bending portion AST.

[0029] The sheet peeling device EA may be provided with an operating means capable of inputting the distance of the interval DT adjusted by the interval adjusting means, and the interval DT may be arbitrarily set by the user.

[0030] The adhesive sheet AS may be attached to the adherend WK such that one edge portion and the other edge portion in the circumferential direction of the outer peripheral surface WKE overlap, or may be attached to the adherend WK such that one edge and the other edge are in contact, or may be attached to the adherend WK such that one edge and the other edge are separated. The planar shape may be any shape such as a straight shape, a curved shape, a refracted shape, etc. The adhesive force may be reduced by a predetermined second energy. Such an adhesive sheet AS may be, for example, an electromagnetic wave such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, a heating medium such as hot water or hot air, or a cooling medium such as cold water or cold air, etc. as the predetermined second energy. In this case, as the second energy applying means for applying the predetermined second energy to the adhesive sheet AS, for example, any means such as one for applying an electromagnetic wave, one for applying a heating medium, or one for applying a cooling medium may be adopted, and any second energy that can reduce the adhesive force of the adhesive sheet AS may be applied as long as it can reduce the adhesive force of the adhesive sheet AS in consideration of the characteristics, properties, nature, material, composition and configuration, etc. of the adhesive sheet AS. The surface shape of the adhesive sheet AS attached to the outer peripheral surface WKE of the adherend WK may be the same as or different from the shape of the outer peripheral surface WKE of the adherend WK.

[0031] The adhesive member for peeling may be a pressure-sensitive adhesive sheet or a heat-sensitive adhesive sheet. In addition to the adhesive sheet, for example, in addition to adhesive tapes, adhesive sheets, and adhesive tapes, those in which an adhesive medium such as an adhesive or an adhesive is laminated on a base material such as metal, resin, or rubber may also be used. As a predetermined energy, any energy such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, heating media such as hot water or hot air, or cooling media such as cold water or cold air may be applied to improve the adhesive strength, or it may not be improved by a predetermined energy.

[0032] The next process may be any process such as a plating process, a cleaning process, an etching process, an immersion process, a cutting process, an oxide film forming process, a nitriding process, a grinding process, a sandblasting process, a polishing process, a coating process, a lamination process, a sheet adhesion process, a surface treatment process, a drilling process, a bending process, an inspection process, a verification process, an irradiation process, etc.

[0033] In the present invention, the materials, types, shapes, etc. of the adhesive sheet AS, the peeling adhesive member, and the adherend WK are not particularly limited. For example, the adhesive sheet AS, the peeling adhesive member, and the adherend WK may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. Also, the adhesive sheet AS and the peeling adhesive member may be of an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive adhesive sheet AS or peeling adhesive member is adopted, they may be adhered by an appropriate method such as providing heating means such as an appropriate coil heater or the heating side of a heat pipe for heating the adhesive sheet AS or the peeling adhesive member. Further, such an adhesive sheet AS or peeling adhesive member may be, for example, a single-layer one having only an adhesive layer, a two-layer one in which a base material and an adhesive layer are laminated, a three-layer or more-layer one in which one or more intermediate layers are laminated between the base material and the adhesive layer, a three-layer or more-layer one in which one or more cover layers are laminated on the upper surface of the base material, one in which the base material, the intermediate layer or the cover layer is provided detachably, a single-sided adhesive sheet composed only of an adhesive layer, a double-sided adhesive sheet in which adhesive layers are laminated on both outermost surfaces of one or more intermediate layers, or the like. Furthermore, as the adherend WK, for example, it may be a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, pottery, a wooden board or resin, or a composite formed of two or more of them. Also, any form of member or article can be targeted. Note that the adhesive sheet AS may be, for example, any sheet, film, tape, etc. such as a label for information description, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a resin sheet for forming a recording layer.

[0034] The drive equipment in the above-described embodiment may employ, alone, electric equipment such as a rotary motor, a linear motor, a linear motor, a single-axis robot, a so-called multi-joint robot having two or three or more joints, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder, or may employ a combination of those electric equipment and actuators, either directly or indirectly, or may employ those capable or incapable of torque control, speed control, etc. for the output portions of those electric equipment and actuators.

[0035] In the above-described embodiment, for some object (hereinafter referred to as "object A") and an object that moves relative to the object A (hereinafter referred to as "object B"), that is, the relatively moving object A and object B, object B may move relative to object A that does not move, or object A may move relative to object B that does not move, or both object A and object B may move. As long as the result achieved by the movement is the same, either object A or object B may move. When a rotating member such as a roller is employed, a driving device for rotationally driving the rotating member may be provided. The surface of the rotating member or the rotating member itself may be composed of a deformable member such as rubber or resin, or may be composed of a member that does not deform. Instead of a roller, other members such as a shaft or blade that rotates or does not rotate may be employed. When a pressing means or pressing member such as a pressing roller or pressing head that presses an object to be pressed is employed, in addition to or in combination with those exemplified above, in addition to a roller, round bar, blade material, brush-shaped member, a means using spraying of a gas such as air or gas may be employed. The pressing member may be composed of a deformable member such as rubber, resin, or sponge, or may be composed of a member that does not deform. When a peeling means or peeling member such as a peeling plate or peeling roller that peels an object to be peeled is employed, in addition to or in combination with those exemplified above, members such as a plate-shaped member, round bar, or roller may be employed. The peeling member may be composed of a deformable member such as rubber or resin, or may be composed of a member that does not deform. When a supporting (holding) means or supporting (holding) member that supports (holds) a supported member (held member) is employed, a configuration that supports (holds) the supported member by a gripping means such as a chuck motor or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving device, etc. may be adopted. When a cutting means or cutting member that cuts a member to be cut or forms a notch or cutting line in the member to be cut is employed, in addition to or in combination with those exemplified above, a cutter blade, laser cutter, ion beam, firepower, heat, water pressure, heating wire, spraying of a gas or liquid, etc. may be adopted for cutting,It may be possible to move and cut by combining appropriate driving devices, or when biasing means are employed, they may be constituted by springs, rubbers, resins, driving devices, or the like.

Explanation of Signs

[0036] EA… Sheet peeling device 20… Peeling means 50… Guide means 52… Linear motor (spacing adjustment means) AS… Adhesive sheet AST… Bending part DT… Spacing WK… Adherend WKE… Outer peripheral surface

Claims

1. Peeling means for applying tension to an adhesive sheet attached to the outer peripheral surface of an adherend and peeling the adhesive sheet from the adherend, and In a sheet peeling device provided with guiding means for guiding the adhesive sheet peeled from the adherend, The guiding means forms a bent portion by bending the adhesive sheet immediately after being peeled from the outer peripheral surface in a direction facing the adhesive sheet immediately before being peeled from the outer peripheral surface, and presses the bent portion against the outer peripheral surface so as to resist the elastic restoring force of the bent portion. A sheet peeling device characterized by this.

2. The sheet peeling device according to claim 1, wherein the guiding means includes interval adjusting means for adjusting the interval between the adhesive sheet immediately after being peeled from the outer peripheral surface and the adhesive sheet immediately before being peeled from the outer peripheral surface.

3. A peeling step of applying tension to an adhesive sheet attached to the outer peripheral surface of an adherend and peeling the adhesive sheet from the adherend, and In a sheet peeling method for performing a guiding step of guiding the adhesive sheet peeled from the adherend, In the guiding step, a bent portion is formed by bending the adhesive sheet immediately after being peeled from the outer peripheral surface in a direction facing the adhesive sheet immediately before being peeled from the outer peripheral surface, and the bent portion is pressed against the outer peripheral surface so as to resist the elastic restoring force of the bent portion. A sheet peeling method characterized by this.

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