Suction jig, suction device, and conveying device

Abstract

To provide a suction jig which can maintain a state that the suction jig suctions a workpiece, and to provide a suction device having the suction jig and a conveying device having the suction device.SOLUTION: A suction jig 20 comprises: a housing 21 including a main body 22 having an internal space 23, a suction hole 24 penetrating through the main body 22 and communicating with the internal space 23, and a communicating hole 25 penetrating through the main body 22 and communicating with the internal space 23; a workpiece suction portion 70 which is attached to the main body 22 and which has a fluid flow passage that communicates with the communicating hole 25; a shaft 40 provided in the internal space 23; and a resilient body 50 which is provided in the internal space 23 and which holds the shaft 40 movably along an axial direction. The shaft 40 has a sealing portion 90 for sealing the suction hole 24.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a suction jig for sucking a workpiece, a suction device having the suction jig, and a transfer device having the suction device.

Background Art

[0002] In a manufacturing line of electronic components, for example, workpieces are sequentially transferred to stations by a belt conveyor. Then, predetermined processing (processing, assembly, inspection, etc.) is performed on the workpieces transferred to the stations. As a transfer device for transferring such workpieces, Patent Document 1 describes a transfer device having a transfer rail on which pallets are mounted and a fluid rail provided along the transfer rail.

[0003] A pallet is a movable table for transferring a workpiece and is provided with a suction nozzle capable of sucking the workpiece. Inside the fluid rail, a fluid passage is formed. The fluid passage is connected to a fluid pump via a first communication pipe and to the suction nozzle via a second communication pipe. Therefore, the fluid pump, the fluid passage, and the suction nozzle are in communication with each other. When the fluid pump operates, the gas inside the fluid passage is sucked by the fluid pump, and the suction nozzle sucks the workpiece placed on the pallet. As a result, the workpiece is held on the pallet, and the workpiece can be transferred to the station without falling off the pallet.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, in the conveying device of Patent Document 1, when the operation of the fluid pump stops, the gas inside the fluid passage is not sucked, and the suction nozzle cannot suck the workpiece. Therefore, in order to maintain the state in which the workpiece is sucked by the suction nozzle, it is necessary to continuously suck the gas inside the fluid passage by the fluid pump. However, if the fluid pump continues to operate, problems such as an increase in power consumption and noise will occur.

[0006] In view of such a situation, the present invention has been made, and an object thereof is to provide a suction jig capable of maintaining a state in which a workpiece is sucked, a suction device having the suction jig, and a conveying device having the suction device.

Means for Solving the Problems

[0007] In order to achieve the above object, the suction jig according to the present invention includes a main body having an internal space, a housing having a suction hole penetrating the main body and communicating with the internal space, and a communication hole penetrating the main body and communicating with the internal space, a workpiece suction portion attached to the main body and having a fluid flow path communicating with the communication hole, a shaft provided in the internal space, and an elastic body provided in the internal space and holding the shaft so as to press the shaft toward the suction hole. The shaft has a sealing portion that seals the suction hole.

[0008] In the suction jig according to the present invention, the elastic body holds the shaft so as to press the shaft toward the suction hole. Therefore, as long as a force that resists the elastic force of the elastic body does not act on the shaft, the sealing portion maintains the state of sealing the suction hole. Here, when an external force (a force that resists the elastic force of the elastic body) is applied to the sealing portion from the outside of the housing when the workpiece suction portion is not sucking the workpiece, the sealing portion moves toward the internal space, and a gap is formed between the suction hole and the sealing portion. As a result, the suction hole, the internal space, the communication hole, and the fluid flow path of the workpiece suction portion communicate with each other. In this state, by sucking the gas in the internal space through the suction hole, the workpiece suction portion can suck the workpiece.

[0009] After that, when the external force applied to the sealing portion becomes smaller than the elastic force of the elastic body, the sealing portion moves toward the outside of the housing due to the elastic force of the elastic body. Then, the sealing portion maintains the state of sealing the suction hole again. In this state, the internal space is blocked from the outside of the housing, and the sealing of the internal space is maintained. Therefore, the work suction portion can continue to adsorb the work without sucking the gas in the internal space through the suction hole. Thus, in the suction jig according to the present invention, the state of adsorbing the work can be maintained without continuously sucking the gas in the internal space through the suction hole.

[0010] After that, when the external force applied to the sealing portion becomes larger than the elastic force of the elastic body, the sealing portion moves toward the internal space, and a gap is formed between the suction hole and the sealing portion. As a result, the suction hole, the internal space, the communication hole, and the fluid flow path of the work suction portion communicate with each other. In this state, when the internal space communicates with the space outside the housing through the suction hole, gas flows into the internal space from the outside space of the housing, and the negative pressure in the internal space is released. Thereby, the work suction portion can end the suction of the work.

[0011] The sealing portion may seal the suction hole according to the elastic deformation of the elastic body. In this case, the sealing portion can seal the suction hole without being driven by a driving source. Therefore, the mechanism for the sealing portion to seal the suction hole can be simplified, and the suction jig can be made smaller or more space-saving.

[0012] The shaft may have a columnar shaft body, and the sealing portion may protrude from the tip of the shaft body and have a convex portion that fits into the suction hole. In this case, the sealing portion can seal the suction hole according to the fitting state of the convex portion into the suction hole. Therefore, the mechanism for the sealing portion to seal the suction hole can be simplified, and the suction jig can be made smaller or more space-saving.

[0013] The sealing portion may have a resin sealing body provided around the convex portion. In this case, when the convex portion fits into the suction hole, the resin sealing body is disposed around the suction hole so as to fill a minute gap between the outer peripheral surface of the convex portion and the inner wall surface of the suction hole. Thereby, the sealing portion can seal the suction hole airtightly.

[0014] The resin sealing body may be configured to be able to seal a gap between the outer peripheral surface of the convex portion that fits into the suction hole and the inner wall surface of the suction hole from the inside of the main body. Thereby, as described above, the sealing portion can seal the suction hole (gap) airtightly.

[0015] The main body has a housing recess formed on the inner wall surface of the main body and extending along the opening edge of the suction hole, and the resin sealing body may be configured to be housed in the housing recess. In this case, when the resin sealing body is housed in the housing recess, the resin sealing body is disposed along the opening edge of the housing hole. Thereby, the resin sealing body can seal the gap between the outer peripheral surface of the convex portion and the inner wall surface of the suction hole airtightly.

[0016] The work suction portion may have a nozzle for sucking a work and a pad provided around the nozzle for disposing the work. With the work disposed on the pad, the nozzle sucks the work, whereby the work can be held in a stable state.

[0017] To achieve the above object, the suction device according to the present invention has any one of the above-described suction jigs, and a pushing member that pushes the sealing portion for sealing the suction hole into the internal space from the outside of the main body.

[0018] When the pushing member pushes the sealing portion into the internal space from the outside of the main body, the sealing portion moves toward the internal space. Therefore, a gap is formed between the suction hole and the sealing portion, and the suction hole communicates with the internal space. When the workpiece suction portion is not sucking the workpiece, the workpiece suction portion can suck the workpiece by sucking the gas in the internal space through the suction hole.

[0019] After that, when the pushing member weakens the pushing of the sealing portion, the elastic force of the elastic body acting on the shaft causes the sealing portion to move toward the outside of the housing. Then, the sealing portion maintains the state of sealing the suction hole again. Thereby, the sealing of the internal space is maintained, and the workpiece suction portion can continue to suck the workpiece without sucking the gas in the internal space through the suction hole.

[0020] After that, when the pushing member pushes the sealing portion into the internal space, the sealing portion moves toward the internal space. Therefore, a gap is formed between the suction hole and the sealing portion, and the suction hole communicates with the internal space. In this state, when the internal space communicates with the space outside the housing through the suction hole, gas enters the internal space from the space outside the housing, and the negative pressure in the internal space is released. Thereby, the workpiece suction portion can end the suction of the workpiece.

[0021] The pushing member may have a cylindrical body connectable to a suction source and a hole portion formed at an axial end of the cylindrical body. In this case, the sealing portion can be pushed into the internal space by the cylindrical body. Thereby, a gap is formed between the suction hole and the sealing portion, and the internal space communicates with the pushing member through the gap. In this state, by driving the suction source, the gas in the internal space can be sucked through the hole portion.

[0022] When the sealing portion of the cylinder body that seals the suction hole is pushed into the internal space, the suction source, the inside of the cylinder body, the suction hole, the internal space, the communication hole, and the fluid flow path may communicate with each other. In this case, when the suction source operates, gas flows into the suction source through the inside of the cylinder body, the suction hole, the internal space, the communication hole, and the fluid flow path. Thereby, the work suction portion can suck the work.

[0023] The pushing member may have a cylindrical cover portion attached to the outer surface of the cylinder body, and the cover portion may be configured to cover the suction hole. When the cylinder body pushes the sealing portion toward the internal space, the cover portion abuts against the periphery (outer edge) of the suction hole from the outside of the main body. Then, the suction hole is covered from the outside of the main body by the cover portion. Therefore, the space inside the cover portion is blocked from the space outside the cover portion, and the cylinder body communicates airtightly with the internal space of the housing through the internal space of the cover portion and the suction hole. Thereby, the gas in the internal space of the housing can be efficiently sucked through the internal space of the cover portion and the suction hole.

[0024] In order to achieve the above object, the transfer device according to the present invention any of the adsorption devices described above, a pallet on which an adsorption jig is mounted, and a transfer line for transferring the pallet.

[0025] In the transfer device according to the present invention, as described above, even if the suction source does not continuously suck the gas in the internal space, the work suction portion can maintain the state of sucking the work. Therefore, while the work is being transferred by the pallet, the suction source can be stopped, and problems such as an increase in power consumption and noise can be prevented. Further, even if the adsorption device is not physically connected to the suction source, the work suction portion can maintain the state of sucking the work. Therefore, the transfer device can be downsized and space-saving.

[0026] The transfer line has a suction start portion for connecting the internal space to a suction source through the suction hole, and a suction end portion for connecting the internal space to the outside of the housing through the suction hole. The suction start portion may be provided on the upstream side of the transfer line with respect to the suction end portion. When the internal space is connected to the suction source through the suction hole at the suction start portion, the suction source sucks the gas in the internal space. Thereby, the work suction portion can start sucking the work. Further, when the internal space is connected to the outside of the housing through the suction hole at the suction end portion, gas flows into the internal space from the outside of the housing. Thereby, the work holding portion can end the suction of the work.

[0027] Thus, in the transfer device according to the present invention, once the work holding portion starts sucking the work at the suction start portion, the work suction portion can maintain the state of sucking the work until the work holding portion ends the suction of the work at the suction end portion.

Brief Description of the Drawings

[0028]

Figure 1

Figure 2A

Figure 2B

Figure 3

Figure 4

Figure 5

Figure 6A

Figure 6B

Figure 6C

Figure 6D

Figure 6E

Figure 6F

Figure 7

Figure 8A

Figure 8B

Figure 9A

Figure 9B

Embodiments for Carrying Out the Invention

[0029] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the illustrated content is only schematically and exemplarily shown for the understanding of the present invention, and the appearance and dimensional ratios may be different from the actual ones. Further, the present invention is not limited to the following embodiments.

[0030] First Embodiment The transport device 1 according to the first embodiment of the present invention shown in FIG. 1 is a device for transporting the workpiece 9. The transport device 1 has at least a suction device 10 having a suction jig 20, a pallet 5 on which the suction jig 20 is mounted, and a transport line 3 for transporting the pallet 5. In addition to these configurations, the transport device 1 further has, for example, a support base 2. However, these configurations are not essential and may be omitted from the transport device 1.

[0031] The number of the suction devices 10 is plural, but it may also be singular. Also, the number of the suction jigs 20 is plural, but it may also be singular. Further, the number of the pallets 5 is plural, but it may also be singular. The workpiece 9 is not particularly limited, but it is an electronic component such as a coil, a capacitor, or a resistor, an electronic device on which electronic components are mounted, a component (such as a ferrite core or a magnet) constituting an electronic component or an electronic device, or other members. In the present embodiment, the workpiece 9 is a rectangular parallelepiped electronic component.

[0032] The pallet 5 is conveyed from the upstream side to the downstream side of the conveyance line 3 (belt 7 described later) by the conveyance line 3. At a predetermined position on the upstream side of the conveyance line 3 (a suction start portion 3a described later), pallets 5 on which the suction jigs 20 (however, the suction jigs 20 on which the workpiece 9 is not arranged) are mounted are sequentially conveyed. Then, at this position, a process of placing the workpiece 9 on the suction jig 20 is performed.

[0033] On the other hand, at a predetermined position on the downstream side of the conveyance line 3 (a suction end portion 3b described later), pallets 5 on which the workpiece 9 is arranged on the suction jig 20 are sequentially conveyed. Then, at this position, a process of taking out the workpiece 9 from the suction jig 20 is performed. In this way, the workpiece 9 is conveyed between the facilities (or processes) on the upstream side and the facilities (or processes) on the downstream side of the conveyance line 3. The process of placing the workpiece 9 on the suction jig 20 and the process of taking out the workpiece 9 from the suction jig 20 are performed by mechanical means such as a robot arm or by artificial means.

[0034] Although detailed illustrations are omitted, before the workpiece 9 is conveyed from the upstream side to the downstream side of the conveying line 3, a predetermined process (processing, assembly, and / or inspection) is performed on the workpiece 9. Such a process on the workpiece 9 is performed at at least one location on the conveying line 3. Hereinafter, the detailed configuration of the conveying device 1 will be described. In FIG. 1 and the like, the X-axis is an axis along the moving direction of the conveying line 3, the Y-axis is an axis along a direction orthogonal to the moving direction of the conveying line 3, and the Z-axis is an axis along the vertical direction. The positive direction side of the Z-axis is defined as "upward", and the negative direction side of the Z-axis is defined as "downward". Also, the negative direction side of the Y-axis is defined as "front", and the positive direction side of the Y-axis is defined as "rear". Further, the negative direction side of the X-axis is defined as "upstream side", and the positive direction side of the X-axis is defined as "downstream side".

[0035] The support base 2 is a mechanism for holding the conveying line 3 at a predetermined height, and is made of a metal such as, for example, SUS material, aluminum material, steel material, or casting. The support base 2 has, for example, legs 2a and a base 2b supported by the legs 2a. The base 2b has a flat surface for installing the conveying line 3.

[0036] The conveying line 3 has, for example, at least one conveying rail 4, an upstream roller 6a, a downstream roller 6b, and a belt 7. The conveying line 3 is a belt conveyor, but the configuration of the conveying line 3 is not limited thereto. For example, the conveying line 3 may not include the conveying rail 4. Alternatively, the conveying line 3 may not include the upstream roller 6a, the downstream roller 6b, and the belt 7. Also, the conveying line 3 may be another conveying line such as, for example, a roller conveyor.

[0037] As shown in FIG. 2A, the pallet 5 is a base for mounting the suction jig 20. The pallet 5 is not particularly limited, but is made of, for example, plastic or metal. The pallet 5 has a pallet body 50 and a plurality of locking portions 51 attached to the pallet body 50. The pallet body 50 is a flat plate. As shown in FIG. 1, the pallet body 50 is disposed on the conveying rail 4 and moves while sliding on the conveying rail 4 as the belt 7 moves.

[0038] Four locking portions 51 are attached to the pallet body 50. As can be inferred from FIG. 2A, the four locking portions 51 are respectively attached to the four corners of the pallet body 50. The locking portion 51 protrudes downward from the bottom of the pallet body 50.

[0039] The locking portion 51 is a mechanism for locking to the belt 7 (FIG. 1). The four locking portions 51 are respectively fixed to the belt 7 by bolts (not shown). Thereby, as shown in FIG. 1, when the pallet 5 moves to the lower side of the base 2b, it is possible to prevent the pallet 5 from falling off the belt 7. Note that the number of the locking portions 51 is not limited to four, and may be two or three, or five or more.

[0040] As shown in FIG. 1, the transport rail 4 is disposed on the base 2b and is formed of a rod-shaped member extending along the X axis. The transport rail 4 is a mechanism for guiding the pallet 5 from the upstream side to the downstream side of the transport line 3. Although detailed illustration is omitted, a pair of transport rails 4 are disposed on the base 2b. The pair of transport rails 4 are spaced apart in the Y-axis direction and are parallel to each other. By providing the transport rail 4 on the transport line 3, the pallet 5 can be transported from the upstream side to the downstream side of the transport line 3 along the transport rail 4.

[0041] The belt 7 is a mechanism for transporting the pallet 5 from the upstream side to the downstream side of the transport line 3. The belt 7 is not particularly limited, but is a rubber belt or a resin belt commonly used in a belt conveyor or the like. The belt 7 is supported by an upstream roller 6a and a downstream roller 6b. A plurality of pallets 5 are attached to the belt 7 at intervals along the extending direction of the belt 7. When the belt 7 moves from the upstream side to the downstream side of the transport line 3, the plurality of pallets 5 move from the upstream side to the downstream side of the transport line 3.

[0042] The upstream roller 6a is provided at one end of the support base 2 in the X-axis direction. The downstream roller 6b is provided at the other end of the support base 2 in the X-axis direction. The upstream roller 6a and the downstream roller 6b are integrally provided on the support base 2, but may be provided separately from the support base 2. The upstream roller 6a and the downstream roller 6b rotate continuously to send out the belt 7 from the upstream side to the downstream side of the conveyance line 3 and further from the downstream side to the upstream side of the conveyance line 3. Thereby, above the base 2b, the belt 7 moves from the upstream side to the downstream side of the conveyance line 3. Also, below the base 2b, the belt 7 moves from the downstream side to the upstream side of the conveyance line 3. The mechanism for sending out the belt 7 is not limited to rollers, and other mechanisms such as pulleys may be used.

[0043] As shown in Fig. 2A, the suction device 10 has at least a pushing member 11 and a suction jig 20. In addition to these components, the suction device 10 further has, for example, a connecting portion 14, a communication pipe 15, a connector 16, a suction source 17, and a driving portion 18. However, these components are not essential and may be omitted from the suction device 10.

[0044] As shown in Figs. 2B and 3, the suction jig 20 has at least a housing 21, a shaft 40, an elastic body 50, and a work suction portion 70. In addition to these components, the suction jig 20 further has, for example, a first resin sealing body 60 and a guide 80. However, these components are not essential and may be omitted from the suction jig 20.

[0045] The housing 21 is not particularly limited, but is made of a metal such as SUS material, aluminum material, steel material, or casting. As shown in Fig. 3, the housing 21 has at least a main body 22, a suction hole 24, and a communication hole 25. The main body 22 is a box having an internal space 23 and has, for example, a substantially rectangular parallelepiped outer shape (see Fig. 2B). The internal space 23 extends along the Y-axis, and the cross-sectional shape of the internal space 23 (the cross-sectional shape along the XZ plane) is circular. The shaft 40, the elastic body 50, and the guide 80 are accommodated in the internal space 23.

[0046] The main body 22 is disposed on the upper surface of the pallet 5. The main body 22 is fixed to the pallet 5 by a fixture such as a bolt or an adhesive. The main body 22 has a first portion 221 and a second portion 222 that is separate from the first portion 221. The first portion 221 has a bottomed cylindrical shape. The bottom of the first portion 221 corresponds to the rear wall portion of the main body 22. The first portion 221 has an internal space 23.

[0047] The second portion 221 is a flat plate body. The second portion 222 is attached to the front opening of the first portion 221 so as to close the internal space 23. By attaching the second portion 221 to the first portion 221, the internal space 23 can be sealed. The second portion 221 is fixed to the first portion 221 by a fixture such as a bolt or an adhesive.

[0048] The suction hole 24 penetrates the rear wall portion of the main body 22 (the first portion 221) along the Y axis so as to communicate with the internal space 23. The suction hole 24 extends linearly, but may be bent. The cross-sectional shape of the suction hole 24 is circular. However, the cross-sectional shape of the suction hole 24 may be elliptical, square, other polygon, or other shape. In the rear portion of the suction hole 24, the diameter of the suction hole 24 is constant along the Y axis. On the other hand, in the front portion of the suction hole 24, the diameter of the suction hole 24 increases toward the front. This is because, as will be described later, a first accommodation recess 26 is formed in the front portion of the suction hole 24.

[0049] The communication hole 25 penetrates the upper wall portion of the main body 22 (the first portion 221) along the Z axis so as to communicate with the internal space 23. The communication hole 25 extends linearly, but may be bent. The cross-sectional shape of the communication hole 25 is circular. However, the cross-sectional shape of the communication hole 25 may be elliptical, square, other polygon, or other shape. The diameter of the communication hole 25 is constant along the Z axis, but may increase, for example, upward or downward.

[0050] On the rear inner surface 224 of the main body 22 (the inner wall surface of the rear wall portion of the main body 22), a first accommodation recess 26 is formed. The first accommodation recess 26 is a ring-shaped recess surrounding the periphery (opening edge) of the accommodation hole 24 and is recessed rearward. The shape of the second accommodation recess 26 as viewed from the front is not particularly limited, but is circular. The first accommodation recess 26 is integral (continuous) with the accommodation hole 24.

[0051] The first accommodation recess 26 is configured to be able to accommodate the first resin sealing body 60. The first resin sealing body 60 is a ring-shaped resin molded body (so-called O-ring) formed of rubber or elastomer and functions as a sealing material. The first resin sealing body 60 has a shape corresponding to the first accommodation recess 26, that is, a ring shape. The first resin sealing body 60 is attached to the tip surface of the shaft main body 41 (the outer peripheral surface of the convex portion 42 described later). When the convex portion 42 fits into the suction hole 24, the first resin sealing body 60 enters the first accommodation recess 26. Thereby, the first resin sealing body 60 can be accommodated in the first accommodation recess 26.

[0052] On the upper surface 223 of the main body 22 (the upper surface of the upper wall portion of the main body 22), a second accommodation recess 27 is formed. As shown in FIG. 5, the second accommodation recess 27 is a ring-shaped recess and is recessed downward. The shape of the second accommodation recess 27 as viewed from above is not particularly limited, but is triangular. A second resin sealing body 62 is accommodated in the second accommodation recess 27.

[0053] The second resin sealing body 62 is a ring-shaped resin molded body (so-called O-ring) formed of rubber or elastomer and functions as a sealing material. The second resin sealing body 62 has a shape corresponding to the second accommodation recess 27, that is, a ring shape. As shown in FIG. 4, when the second resin sealing body 62 is accommodated in the second accommodation recess 27, a minute gap that can be formed between the upper surface 223 and the bottom surface of the work suction portion 70 (pad 72) is sealed by the second resin molded body 62. Thereby, it is possible to prevent the internal space 23 (FIG. 3) from communicating with the space outside the housing 21 through the gap.

[0054] As shown in FIG. 3, a third accommodation recess 28 is formed in the front end face 225 (the front end face of the first part 221) of the main body 22. Although detailed illustration is omitted, the front end face 225 is a ring-shaped face. The shape of the outer periphery of the front end face 225 as viewed from the front is not particularly limited, but is a quadrilateral. The shape of the inner periphery of the front end face 225 as viewed from the front is not particularly limited, but is a circle. The third accommodation recess 28 is a ring-shaped recess and is recessed rearward. The shape of the third accommodation recess 28 as viewed from the front is not particularly limited, but is a circle.

[0055] A third resin sealing body 64 is accommodated in the third accommodation recess 28. The third resin sealing body 64 is a ring-shaped resin molded body (so-called O-ring) formed of rubber or elastomer and functions as a sealing material. The third resin sealing body 64 has a shape corresponding to the third accommodation recess 28, that is, a ring shape (see FIG. 2B). When the third resin sealing body 64 is accommodated in the third accommodation recess 28, a minute gap that may be formed between the front end face 225 and the second part 222 is sealed by the third resin molded body 64. Thereby, it is possible to prevent the internal space 23 from communicating with the space outside the housing 21 through the gap.

[0056] As shown in FIG. 4, the housing 21 further has a recess 29 formed in the upper surface 223. The recess 29 is recessed downward from the upper surface 223. A communication hole 25 is formed in the bottom surface of the recess 29. The bottom surface of the recess 29 is a flat surface except at the position where the communication hole 25 is formed. As shown in FIG. 5, the recess 29 is adjacent to the second accommodation recess 27 and is formed inside the second accommodation recess 27 so as to be surrounded by the second accommodation recess 27. The outer peripheral shape of the recess 29 corresponds to the inner peripheral shape of the second accommodation recess 27 and is a triangle.

[0057] As shown in FIG. 4, a communication space 30 is formed between the bottom surface of the work suction portion 70 (pad 72) and the bottom surface of the concave portion 29. The communication space 30 is formed inside the outer periphery of the concave portion 29. The height of the communication space 30 corresponds to the depth D of the concave portion 29. A communication hole 25 and a fluid flow path 73 of the work suction portion 70 described later communicate with the communication space 30. Therefore, the communication hole 25 communicates with the fluid flow path 73 through the communication space 30. Since the communication space 30 is formed between the communication hole 25 and the fluid flow path 73, the fluid flow path 73 can communicate with the communication hole 25 even if the position of the communication hole 25 and the position of the fluid flow path 73 do not correspond when viewed from the Z-axis direction. The communication space 30 is surrounded by the second resin sealing body 62 and is sealed by the second resin sealing body 62.

[0058] The depth D of the concave portion 29 (the height of the communication space 30) is shallower than the depth of the second accommodation concave portion 27. By appropriately setting the depth D of the concave portion 29, gas can easily pass through the communication space 30 from the communication hole 25 to the fluid flow path 73.

[0059] As shown in FIG. 3, the elastic body 50 holds the shaft 40 so as to be movable along its axial direction. Further, the elastic body 50 holds the shaft 40 so as to press the shaft 40 toward the suction hole 24. The elastic body 50 is composed of an elastically deformable member, and is a compression spring in this embodiment. The elastic body 50 is a metal spring, but may be a rubber spring or the like. Further, the elastic body 50 is a coil spring, but may be a leaf spring or the like. Further, the elastic body 50 is not limited to a spring as long as it is composed of a member capable of elastic deformation in the front and rear directions. For example, the elastic body 50 may be composed of an elastically deformable resin.

[0060] One end of the elastic body 50 is fixed to the main body 22. Further, the other end of the elastic body 50 is fixed to the shaft 40.

[0061] The elastic body 50 shown in FIG. 3 is in a state of being contracted from its natural length and is attempting to extend rearward due to the restoring force. However, the shaft 40 is disposed at the tip of the elastic body 50, and in the internal space 23, the elastic body 50 cannot extend to its natural length. Therefore, the elastic body 50 always maintains a compressed state. Further, the elastic body 50 always maintains a state of pressing the shaft 40 rearward by the elastic force. Accordingly, the shaft 40 is always biased (pressed) rearward by receiving the elastic force of the elastic body 50.

[0062] The guide 80 is composed of a cylindrical member and is housed in the internal space 23. The guide 80 is fitted (press-fitted) into a recess formed in the inner wall surface of the internal space 23. The guide 80 is disposed so as to surround the outer peripheral surface of the shaft 40. The shaft 40 is disposed in the space inside the guide 80 so as to be movable forward and backward. The guide 80 is a member for assisting the smooth movement of the shaft 40 forward and backward.

[0063] The shaft 40 is not particularly limited, but is made of a metal such as, for example, a SUS material, an aluminum material, a steel material, or a casting. The shaft 40 is configured to be movable forward or backward by the elastic body 50. The axial direction of the shaft 40 corresponds to the Y-axis direction. The shaft 40 has, for example, a shaft body 41, a convex portion 42, and a shaft recess 43. However, the configuration of the shaft 40 is not limited to this.

[0064] The shaft body 41 is composed of a columnar or cylindrical member. The shaft recess 43 is formed in front of the shaft body 41. The shaft recess 43 is recessed rearward from the front end surface of the shaft body 41. At least a part of the elastic body 50 is housed inside the shaft recess 43. The rear end (tip) of the elastic body 50 is connected to the bottom surface of the shaft recess 43.

[0065] The convex portion 42 is integrally formed with the shaft body 41 and protrudes rearward from the tip of the shaft body 41. At least a part of the convex portion 42 is fitted into the suction hole 24. The protruding length of the convex portion 42 is longer than the length along the Y-axis of the suction hole 24 (i.e., the thickness of the rear wall portion of the main body 22). Therefore, when the convex portion 42 is fitted into the suction hole 24, the tip of the convex portion 42 is exposed outside the housing 21 from the suction hole 24. However, the protruding length of the convex portion 42 may be equal to or shorter than the length along the Y-axis of the suction hole 24. The cross-sectional shape of the convex portion 42 corresponds to the cross-sectional shape of the suction hole 24 and is circular.

[0066] In the front portion of the convex portion 42, a stepped surface for attaching the first resin sealing body 60 is formed on the outer peripheral surface of the convex portion 42. The stepped surface extends along the circumferential direction of the convex portion 42. By fitting the first resin sealing body 60 into the stepped surface, displacement along the Y-axis of the first resin sealing body 60 can be prevented. The first resin sealing body 60 is in close contact with the outer peripheral surface of the convex portion 42. However, a gap may be formed between the inner peripheral surface of the first resin sealing body 60 and the outer peripheral surface of the convex portion 42.

[0067] The convex portion 42 is fitted into the suction hole 24 so as to block the suction hole 24. A minute gap 100 may inevitably be formed between the outer peripheral surface of the convex portion 42 and the inner wall surface of the suction hole 24. Therefore, the convex portion 42 alone cannot seal the suction hole 24 airtightly. Thus, in the present embodiment, the first resin sealing body 60 is attached to the outer peripheral surface of the convex portion 42. The first resin sealing body 60 is attached to the front portion (the tip portion of the shaft body 41) of the convex portion 42.

[0068] When the convex portion 42 is fitted into the suction hole 24, the first resin sealing body 60 attached to the convex portion 42 enters the first accommodation recess 26. Therefore, the gap 100 is blocked from the internal space 23 side by the first resin sealing body 60. As a result, the internal space 23 is blocked from the space outside the housing 21 by the convex portion 42 and the first resin sealing body 60. In this way, the convex portion 42 and the first resin sealing body 60 function together as a sealing portion for sealing the suction hole 24.

[0069] Hereinafter, the sealing portion composed of the convex portion 42 and the first resin sealing body 60 will be referred to as "sealing portion 90". The shaft 40 has a sealing portion 90 that seals the suction hole 24. The sealing portion 90 seals the suction hole 24 in accordance with the elastic deformation of the elastic body 50. As shown in FIG. 3, the elastic body 50 always maintains a state of pressing the shaft body 41 backward by an elastic force. Therefore, as long as the shaft body 41 is not pressed forward from the outside of the housing 21, the tip surface of the shaft body 41 maintains a state of contacting the rear inner surface 224.

[0070] In this state, the convex portion 42 fits into the suction hole 24 and maintains a state of closing the suction hole 24. Further, the first resin sealing body 60 enters the first housing recess 26. Then, the first resin sealing body 60 maintains a state of airtightly sealing the gap 100 formed between the outer peripheral surface of the convex portion 42 and the inner wall surface of the suction hole 24. Thereby, the sealing portion 90 can airtightly seal the suction hole 24 (gap 100).

[0071] On the other hand, when the convex portion 42 fitted in the suction hole 24 is pressed forward from the outside of the housing 21, the elastic body 50 contracts from the state shown in FIG. 3. Therefore, the shaft body 41 moves forward, and the tip surface of the shaft body 41 moves away from the rear inner surface 224 forward. As a result, the convex portion 42 moves forward inside the suction hole 24 toward the internal space 23. Further, the first resin sealing body 60 moves forward so as to come out (be exposed) outside the first housing recess 26.

[0072] In this state, the first resin sealing body 60 cannot airtightly seal the gap 100. Therefore, the internal space 23 communicates with the space outside the housing 21 through the gap 100. Even if a part of the convex portion 42 is disposed inside the suction hole 24, the internal space 23 communicates with the space outside the housing 21 through the gap 100. Therefore, the airtight sealing of the suction hole 24 (gap 100) by the sealing portion 90 is released.

[0073] As shown in FIG. 4, the work suction part 70 is a mechanism for sucking and arranging the work 9, and is provided in the housing 21 (the first part 221 of the main body 22). The work suction part 70 is detachably attached to the main body 22 by a fixture such as a bolt or an adhesive. The work suction part 70 has at least one nozzle 71, a pad 72, and at least one fluid flow path 73.

[0074] The pad 72 is a mechanism for arranging the work 9, and is made of a resin such as polyethylene, polypropylene, polystyrene, or polyamide. The pad 72 is provided around the nozzle 71. The pad 72 has a shape suitable for arranging the work 9. In the present embodiment, the work 9 is a rectangular parallelepiped electronic component and is arranged on the upper surface of the pad 72.

[0075] The nozzle 71 is a mechanism for sucking the work 9, and is provided inside a recess 720 formed in the pad 72. The recess 720 is recessed downward from the upper surface of the pad 72. The nozzle 71 is fixed to the bottom surface of the recess 720 by a fastening member (for example, a nut). At least the lower part of the nozzle 71 is fitted into the fluid flow path 73. At least the upper part of the nozzle 71 is exposed from the fluid flow path 73 and protrudes upward from the bottom of the recess 720. When the tip of the nozzle 71 abuts on the work 9, the nozzle 71 can suck the work 9.

[0076] The fluid flow path 73 penetrates the pad 72 along the Z-axis and extends from the bottom surface of the recess 720 to the bottom surface of the pad 72. The fluid flow path 73 extends linearly along the Z-axis, but may be bent. The fluid flow path 73 communicates with the internal space of the nozzle 71 that fits into the fluid flow path 73. The lower end in the axial direction of the fluid flow path 73 communicates with the communication space 30. Therefore, the fluid flow path 73 communicates with the communication hole 25 through the communication space 30. As described above, since the communication hole 25 communicates with the internal space 23 (FIG. 3), the fluid flow path 73, the communication space 30, the communication hole 25, and the internal space 23 communicate with each other.

[0077] As shown in FIG. 3, the opening of the communication hole 25 may be blocked by the outer peripheral surface of the shaft body 41. Even in such a case, the communication hole 25 communicates with the internal space 23 through a minute gap formed between the outer peripheral surface of the shaft body 41 and the inner peripheral surface of the guide 80. Therefore, the fluid flow path 73 (FIG. 4), the communication space 30 (FIG. 4), the communication hole 25, and the internal space 23 are always in communication with each other.

[0078] As shown in FIG. 5, the work suction portion 70 is provided with two nozzles 71 and two fluid flow paths 73. However, the number of nozzles 71 may be one, or may be three or more. Also, the number of fluid flow paths 73 may be one, or may be three or more. The two fluid flow paths 73 are spaced apart along the X-axis. The two fluid flow paths 73 communicate with the communication space 30 at positions different from the communication hole 25. One fluid flow path 73, the other fluid flow path 73, and the communication hole 25 are respectively located at positions corresponding to three vertices of the communication space 30 having a triangular shape in plan view. However, the positions of one fluid flow path 73, the other fluid flow path 73, and the communication hole 25 are not particularly limited, and the communication hole 25 may be located directly below either of the two fluid flow paths 73.

[0079] As shown in FIG. 2A, the pushing member 11 is separate from the suction jig 20 and is configured to be attachable to the suction jig 20. The pushing member 11 is a mechanism for pushing the sealing portion 90 (FIG. 3) toward the internal space 23 from the outside of the main body 22. As shown in FIG. 3, the pushing member 11 has a cylindrical body 12 and a cover portion 13. The cylindrical body 12 is formed of a member having a bottomed cylindrical shape. The material constituting the cylindrical body 12 is not particularly limited, but is, for example, a metal such as a SUS material, an aluminum material, a steel material, or a casting. The cylindrical body 12 is configured to be connectable directly or indirectly to the suction source 17 (FIG. 2A).

[0080] The cylinder body 12 has a fluid flow path 120 and a hole portion 121. The fluid flow path 120 extends linearly along the axial direction of the cylinder body 12. The fluid flow path 120 extends forward from the rear end portion of the cylinder body 12 along the axial direction of the cylinder body 12. The fluid flow path 120 does not penetrate the cylinder body 12 along the axial direction, and the front end portion of the fluid flow path 120 is blocked. The shape of the tip of the cylinder body 12 is a shape that allows the cylinder body 12 to enter the suction hole 24, for example, a cylindrical shape. The diameter of the tip of the cylinder body 12 is equal to the diameter of the convex portion 42, but it may also be smaller than this.

[0081] The hole portion 121 is formed at the axial end of the cylinder body 12. The hole portion 121 is located at the front end of the cylinder body 12 and penetrates the cylinder body 12 along the radial direction of the cylinder body 12. The hole portion 121 communicates with the fluid flow path 120. Therefore, gas can flow from the outside of the cylinder body 12 into the fluid flow path 120 through the hole portion 121. Also, gas can flow from the fluid flow path 120 to the outside of the cylinder body 12 through the hole portion 121.

[0082] The cover portion 13 is a cylindrical member and is made of an elastic body such as rubber or elastomer. The cover portion 13 is, for example, a vacuum pad. At least a part of the cover portion 13 has a bellows shape. Therefore, the cover portion 13 can be easily compressed or stretched along the Y-axis. A part of the cover portion 13 (mainly the rear part) is attached to the outer surface of the cylinder body 12 so as to be in close contact with the outer surface of the cylinder body 12. A part of the cover portion 13 (mainly the front part) is separated from the outer surface of the cylinder body 12. Therefore, a sealing space 130 is formed between the cover portion 13 and the outer surface of the cylinder body 12. The cover portion 13 covers the hole portion 121 from the outside of the cylinder body 12. The front end portion of the cover portion 13 protrudes forward from the front end portion of the cylinder body 12.

[0083] When the cover portion 13 is pressed toward the rear end face 226 of the main body 22 (the end face of the wall portion at the rear of the main body 22), the tip of the cover portion 13 abuts against the rear end face 226 so as to be in close contact therewith. As a result, the sealing space 130 becomes a closed space surrounded by the cover portion 13, the rear end face 226, and the outer surface of the cylindrical body 12. In this state, no minute gap is formed between the tip of the cover portion 13 and the rear end face 226. Therefore, it is possible to prevent gas from flowing into the inside of the sealing space 130 through the minute gap.

[0084] When the cylindrical body 12 is pushed forward from the outside of the main body 22 toward the inside space 23 with the sealing portion 90 (the convex portion 42) facing the inside space 23, the sealing portion 90 moves forward toward the inside space 23. Therefore, the first resin sealing body 60 moves forward so as to protrude (expose) outside the first housing recess 26. As a result, the inside space 23, the sealing space 130, and the fluid flow path 120 communicate with each other through the gap 100 formed between the outer peripheral surface of the convex portion 42 and the inner wall surface of the suction hole 24. In this state, when the suction source 17 (FIG. 2A) operates, the gas in the inside space 23 can be sucked.

[0085] As described above, as long as no external force is applied to the sealing portion 90 from the outside of the main body 22 toward the front, the convex portion 42 always fits into the suction hole 24 and the first resin sealing body 60 is housed in the first housing recess 26. Therefore, the sealing portion 90 maintains the state of sealing the suction hole 24. In order to release the sealing of the suction hole 24 by the sealing portion 90, it is necessary to push the sealing portion 90 from the outside of the main body 22 through the suction hole 24 toward the inside space 23. As a means for realizing this, the pushing member 11 is provided in the suction device 10.

[0086] As shown in FIG. 2A, the connecting portion 14 is connected to the rear end of the pushing member 11 (the cylindrical body 12). In addition to the cylindrical body 12, a communication pipe 15 is connected to the connecting portion 14 by a connector 16. The communication pipe 15 is a pipe through which gas can flow. A fluid flow path is formed inside the connecting portion 14, and the cylindrical body 12 communicates with the communication pipe 15 through the fluid flow path.

[0087] The suction source 17 is connected to one end of the communication pipe 15. The suction source 17 is a pump having a function of sucking gas. Further, the suction source 17 is a negative pressure generation source for making the internal space 23 into a negative pressure. The suction source 17 may be a pump having not only a gas suction function but also a gas discharge function. When the suction source 17 operates and sucks the gas in the internal space 23 in a state where the internal space 23 (FIG. 3), the suction hole 24 (FIG. 3), the gap 100 (FIG. 3), the fluid flow path 120 (FIG. 3), and the communication pipe 15 communicate with each other, the internal space 23 becomes a negative pressure.

[0088] The drive unit 18 can appropriately use, for example, an air cylinder or a hydraulic cylinder, etc., and drives the connecting part 14 forward or backward. The drive unit 18 has a fixed part 180 and a movable part 181. The movable part 181 is connected to the fixed part 180 via, for example, a rod. When the rod moves forward or backward, the movable part 181 moves forward or backward in conjunction with the movement of the rod. Thereby, the connecting part 14 connected to the movable part 181 can move forward or backward.

[0089] When the connecting part 14 moves forward, the pushing member 11 moves forward in conjunction with this. Thereby, the cylinder 12 shown in FIG. 3 abuts against the tip of the convex part 42, and the sealing part 90 can be pushed forward from the outside of the main body 22. When the connecting part 14 shown in FIG. 2A moves backward, the pushing member 11 moves backward in conjunction with this. Thereby, the cylinder 12 shown in FIG. 3 separates from the tip of the convex part 42, and the pushing of the sealing part 90 forward by the cylinder 12 can be released.

[0090] Next, while referring to FIGS. 6A to 6F, the operation of the suction device 10 will be described. In FIGS. 6A to 6F, in order to prevent the drawing from becoming complicated, illustrations of some configurations arranged between the pushing member 11 and the suction source 17 are omitted and simplified. First, the operation of the suction device 10 when the nozzle 71 starts sucking the workpiece 9 will be described. The state shown in FIG. 6A is the state before the suction source 17 starts suction, and the internal space 23 is not in a negative pressure but is at normal pressure (atmospheric pressure). Therefore, although the workpiece 9 is placed on the pad 72, the nozzle 71 does not suck the workpiece 9.

[0091] Also, the elastic body 50 is in a state compressed from its natural length and is trying to expand rearward. Therefore, the elastic force of the elastic body 50 acts on the shaft 40. As a result, the shaft 40 is pressed outward (rearward) of the housing 21 by the elastic body 50 until the tip surface of the shaft body 41 abuts against the rear inner surface 224 of the main body 22.

[0092] In this state, as long as a force acting against the elastic force of the elastic body 50 (a force directed forward of the housing 21) does not act on the shaft 40, the sealing portion 90 maintains the state of sealing the suction hole 24. That is, the convex portion 42 enters the suction hole 24 and maintains the state of closing the suction hole 24. Further, the first resin sealing body 60 enters the first accommodation recess 26. Then, the first resin sealing body 60 maintains the state of sealing the minute gap 100 formed between the outer peripheral surface of the convex portion 42 and the inner wall surface of the suction hole 24.

[0093] Here, when the driving unit 18 shown in FIG. 2A drives the pushing member 11 forward, as shown in FIG. 6B, the pushing member 11 moves forward toward the housing 21. Then, the pressing member 11 (cylindrical body 12) presses the sealing portion 90 (protrusion 42) forward. FIG. 6B shows the state immediately before or immediately after the cylindrical body 12 presses the protrusion 42 forward. Therefore, the tip of the cylindrical body 12 is in contact with the tip of the protrusion 42 exposed from the suction hole 24. Also, the tip of the cover portion 13 is in contact with the rear end face 226 of the main body 22. As a result, the sealing space 130 is a closed space surrounded by the cover portion 13, the rear end face 226, and the outer surface of the cylindrical body 12.

[0094] As shown in FIG. 6C, when the cylindrical body 12 moves further forward toward the housing 21, the cover portion 13 is compressed forward and presses the rear end face 226 with a stronger force. As a result, the cover portion 13 adheres closely to the rear end face 226, and the sealing space 130 is sealed with a higher degree of tightness. Also, since the elastic body 50 shrinks forward, the shaft 40 moves forward. More specifically, the shaft 40 moves forward until the position where the force F1 by which the cylindrical body 12 presses the protrusion 42 balances with the elastic force F2 of the elastic body 50. As a result, the tip of the cylindrical body 12 enters into the inside of the suction hole 24. Then, the protrusion 42 moves to a position further forward (inside space 23) than the position shown in FIG. 6B inside the suction hole 24.

[0095] Along with this, the first resin sealing body 60 moves to a position further forward than the position shown in FIG. 6B together with the protrusion 42. As a result, the first resin sealing body 60 moves outside the first accommodation recess 26 and is exposed from (separated from) the first accommodation recess 26. In this state, the first resin sealing body 60 cannot seal the gap 100 airtightly. Therefore, the inside space 23 communicates with the sealing space 130 through the gap 100.

[0096] As a result, the fluid flow path 120 of the cylinder 12, the hole 121, the sealing space 130, the gap 100 (suction hole 24), the internal space 23, the communication hole 25, the communication space 30, the fluid flow path 73 of the work suction part 70, and the nozzle 71 communicate with each other. In this state, when the suction source 17 operates and starts suction, the gas existing in the fluid flow path 120, the hole 121, the sealing space 130, the gap 100, the internal space 23, the communication hole 25, the communication space 30, the fluid flow path 73, and the nozzle 71 is suctioned, and the internal space 23 becomes a negative pressure. Thereby, the nozzle 71 can adsorb the work 9 disposed on the pad 72.

[0097] Here, when the drive part 18 shown in Fig. 2A drives the pushing member 11 backward, the pushing member 11 moves backward so as to be separated from the housing 21. Along with this, as shown in Fig. 6D, the elastic body 50 extends backward. Therefore, the shaft 40 is pressed to the outside (rear) of the housing 21 by the elastic body 50. And the shaft 40 moves backward until the front end surface of the shaft main body 41 abuts against the rear inner surface 224 of the main body 22.

[0098] As the shaft 40 moves backward, the sealing part 90 moves to the rear of the housing 21. And the sealing part 90 maintains the state of sealing the suction hole 24 again. That is, the convex part 42 enters the suction hole 24 and maintains the state of blocking the suction hole 24. Also, the first resin sealing body 60 enters the first accommodation recess 26 and maintains the state of sealing the gap 100.

[0099] In this state, since the first resin sealing body 60 seals the gap 100, the internal space 23 is blocked from the space outside the housing 21. Therefore, the sealing of the internal space 23 is maintained, and the negative pressure of the internal space 23 is maintained even if the suction source 17 does not perform suction. Therefore, even if the suction source 17 does not perform suction, the nozzle 71 can continue to adsorb the work 9. Thus, in the suction device 10 of the present embodiment, once the internal space 23 becomes a negative pressure, thereafter, even if the suction source 17 stops suction, the nozzle 71 can maintain the state of adsorbing the work 9.

[0100] In the state shown in FIG. 6D, the tip of the cylinder body 12 is in contact with the tip of the convex portion 42 exposed from the suction hole 24. Also, the tip of the cover portion 13 is in contact with the rear end face 226. Here, when the drive unit 18 shown in FIG. 2A drives the pushing member 11 further rearward, as shown in FIG. 6E, the tip of the cylinder body 12 separates from the convex portion 42, and the tip of the cover portion 13 separates from the rear end face 226 of the main body 22. In this way, even when the pushing member 11 completely separates from the suction jig 20 (housing 21) and the physical connection between the suction jig 20 and the suction source 17 is cut off, the negative pressure in the internal space 23 is maintained. Therefore, the nozzle 71 can maintain the state of sucking the workpiece 9.

[0101] Next, the operation of the suction device 10 when the nozzle 71 finishes sucking the workpiece 9 will be described. As shown in FIG. 6F, when the nozzle 71 finishes sucking the workpiece 9, the cover portion 13 is in a state of being removed from the pushing member 11. When the drive unit 18 shown in FIG. 2A drives the pushing member 11 forward from the position shown in FIG. 6E, as shown in FIG. 6F, the pushing member 11 moves forward toward the housing 21.

[0102] When the cylinder body 12 comes into contact with the convex portion 42 and presses the convex portion 42 forward, the elastic body 50 contracts forward. Therefore, the shaft 40 moves forward. More specifically, the shaft 40 moves forward until the force F1 with which the cylinder body 12 presses the convex portion 42 balances with the elastic force F2 of the elastic body 50. As a result, the tip of the cylinder body 12 enters the inside of the suction hole 24. And the convex portion 42 moves to a position further forward inside the suction hole 24 than the position shown in FIG. 6E.

[0103] Accordingly, the first resin sealing body 60 moves together with the convex portion 42 to a position further forward than the position shown in FIG. 6E. As a result, the first resin sealing body 60 moves outside the first accommodation recess 26 and exposes (separates) from the first accommodation recess 26. In this state, the first resin sealing body 60 cannot seal the gap 100 airtight. Also, the pushing member 11 is not provided with the cover portion 13, and the sealing space 130 (FIG. 6C) is not formed around the suction hole 24. Therefore, the internal space 23 communicates with the space outside the housing 21 through the gap 100.

[0104] As a result, the space outside the housing 21, the gap 100, the internal space 23, the communication hole 25, the communication space 30, the fluid flow path 73, and the nozzle 71 communicate with each other. Therefore, gas flows from the space outside the housing 21 into the internal space 23 through the gap 100, and the gap 100, the internal space 23, the communication hole 25, the communication space 30, the fluid flow path 73, and the nozzle 71 are filled with gas. Thereby, the negative pressure in the internal space 23 is released, and the nozzle 71 can end the adsorption of the workpiece 9.

[0105] As described above, in the present embodiment, in the adsorption jig 20 in which the internal space 23 shown in FIG. 6C is not in a negative pressure state, the pushing member 11 (cylindrical body 12) is connected to the suction hole 24. Then, when the pushing member 11 pushes the sealing portion 90 toward the internal space 23, the suction source 17 operates, and the nozzle 71 starts adsorbing the workpiece 9. When the nozzle 71 starts adsorbing the workpiece 9, thereafter, as shown in FIGS. 6D and 6E, the connection between the pushing member 11 and the suction hole 24 is released. Thereafter, the nozzle 71 maintains the state of adsorbing the workpiece 9. In the transfer device 1 shown in FIG. 1, the position where the pushing member 11 is connected to the suction hole 24 and the nozzle 71 starts adsorbing the workpiece 9, that is, the adsorption start portion 3a is predetermined. In other words, the adsorption start portion 3a is a position for directly or indirectly connecting the internal space 23 to the suction source 17 through the suction hole 24.

[0106] As shown in FIG. 1, when the pallet 5 on which the adsorption jig 20 is mounted reaches the adsorption start portion 3a, as shown in FIGS. 6A to 6C, the pushing member 11 is connected to the suction hole 24. Then, when the pushing member 11 pushes the sealing portion 90 toward the internal space 23 by a predetermined distance (for example, the predetermined distance D satisfies 0 < D ≦ 3 mm), the suction source 17 operates, and the nozzle 71 starts adsorbing the workpiece 9. After the nozzle 71 starts adsorbing the workpiece 9, as shown in FIGS. 6D and 6E, the connection between the pushing member 11 and the suction hole 24 is released. Then, as shown in FIG. 1, the pallet 5 is conveyed to the downstream side of the conveyance line 3. The adsorption device 10 repeats such processing every time the pallet 5 reaches the adsorption start portion 3a.

[0107] Note that the timing at which the suction source 17 operates may be before the pushing member 11 pushes the sealing portion 90 toward the internal space 23. Alternatively, the timing at which the suction source 17 operates may be when the workpiece 9 is disposed in the workpiece adsorption portion 70, or before or after the workpiece 9 is disposed in the workpiece adsorption portion 70.

[0108] Also, as shown in FIG. 6F, in the present embodiment, in the adsorption jig 20 in which the internal space 23 is at a negative pressure, the pushing member 11 (cylindrical body 12) is connected to the suction hole 24. Then, when the pushing member 11 pushes the sealing portion 90 toward the internal space 23, the internal space 23 communicates with the space outside the housing 21, and the nozzle 71 ends the adsorption of the workpiece 9. In the transfer device 1 shown in FIG. 1, the position where the pushing member 11 is connected to the suction hole 24 and the nozzle 71 ends the adsorption of the workpiece 9, that is, the adsorption end portion 3b, is predetermined. In other words, the adsorption end portion 3b is a position for connecting the internal space 23 to the space outside the housing 21 via the suction hole 24. The adsorption start portion 3a is provided upstream of the conveyance line 3 from the adsorption end portion 3b.

[0109] As shown in FIG. 1, when the pallet 5 on which the adsorption jig 20 is mounted reaches the adsorption end portion 3b, the pushing member 11 is connected to the suction hole 24. As shown in FIG. 6F, when the pushing member 11 pushes the sealing portion 90 into the internal space 23 by a predetermined distance, the internal space 23 communicates with the space outside the housing 21, and the nozzle 71 finishes adsorbing the workpiece 9. When the nozzle 71 finishes adsorbing the workpiece 9, the connection between the pushing member 11 and the suction hole 24 is released, and the pallet 5 is conveyed to the downstream side of the conveying line 3. The adsorption device 10 repeats such processing every time the pallet 5 reaches the adsorption end portion 3b.

[0110] Between the adsorption start portion 3a and the adsorption end portion 3b, the negative pressure in the internal space 23 of the adsorption jig 20 is maintained. In this way, once the nozzle 71 starts adsorbing the workpiece 9 at the adsorption start portion 3a, the nozzle 71 can maintain the state of adsorbing the workpiece 9 until the nozzle 71 finishes adsorbing the workpiece 9 at the adsorption end portion 3b, even without a physical connection between the suction source 17 (FIG. 2A) and the adsorption jig 20.

[0111] As described above, in the present embodiment, as shown in FIG. 1, only the suction source 17 (FIG. 2A) is connected to the adsorption jig 20 conveyed to the adsorption start portion 3a by the pallet 5. After the pallet 5 passes through the adsorption start portion 3a, it is not necessary to connect the suction source 17 (FIG. 2A) to the adsorption jig 20 mounted on the pallet 5. Also, it is not necessary to connect a plurality of suction sources 17 to each of the plurality of adsorption jigs 20. Therefore, the configuration of the conveying device 1 can be simplified.

[0112] Also, as shown in FIG. 3, the sealing portion 90 seals the suction hole 24 in response to the elastic deformation of the elastic body 50. Therefore, it is not necessary to provide a driving source for driving the sealing portion 90 in the adsorption jig 20 in order to seal the suction hole 24. Thereby, the mechanism for the sealing portion 90 to seal the suction hole 24 can be simplified, and the adsorption jig 20 can be reduced in size or space.

[0113] Also, even if the suction source 17 (Fig. 2A) stops sucking the gas in the internal space 23, the nozzle 71 can maintain the state of adsorbing the workpiece 9. Therefore, as shown in Fig. 1, while the pallet 5 is transporting the workpiece 9 (particularly between the adsorption start portion 3a and the adsorption end portion 3b), the suction source 17 can be stopped. Thereby, problems such as an increase in power consumption and noise can be prevented, and an energy-saving effect and a noise reduction effect can be obtained. Also, as shown in Fig. 6E, even if the adsorption device 10 is not physically connected to the suction source 17, the nozzle 71 can maintain the state of adsorbing the workpiece 9. Therefore, the size reduction and space saving of the transfer device 10 can be achieved.

[0114] Also, as shown in Fig. 3, the shaft 40 has a shaft body 41, and the sealing portion 90 protrudes from the tip of the shaft body 41 and has a convex portion 42 that fits into the suction hole 24. Therefore, according to the fitting state of the convex portion 42 with respect to the suction hole 24, the sealing portion 90 can seal the suction hole 24. Thereby, the mechanism for the sealing portion 90 to seal the suction hole 24 can be simplified, and the size reduction or space saving of the adsorption jig 20 can be achieved.

[0115] Also, the sealing portion 90 has a first resin sealing body 60 provided around the convex portion 42. Therefore, when the convex portion 42 fits into the suction hole 24, the first resin sealing body 60 is arranged around the suction hole 24 so as to fill the gap 100 between the outer peripheral surface of the convex portion 42 and the inner wall surface of the suction hole 24. Thereby, the sealing portion 90 can seal the suction hole 24 airtightly.

[0116] Also, the workpiece adsorption portion 70 has a nozzle 71 that adsorbs the workpiece 9 and a pad 72 provided around the nozzle 71 for arranging the workpiece 9. With the workpiece 9 arranged on the pad 72, when the nozzle 71 adsorbs the workpiece 9, the workpiece 9 can be held in a stable state.

[0117] Further, the pushing member 11 has a cylindrical body 12 that can be connected to a suction source 17 (FIG. 2A), and a hole portion 121 formed at an axial end of the cylindrical body 12. When the cylindrical body 12 pushes the sealing portion 90 toward the internal space 23, the internal space 23 communicates with the pushing member 11 through a gap 100 (suction hole 24). In this state, when the suction source 17 (FIG. 2A) operates, the gas in the internal space 23 can be sucked through the hole portion 121.

[0118] Further, the pushing member 11 has a cover portion 13 attached to the outer surface of the cylindrical body 12, and the cover portion 13 is configured to cover the suction hole 24 from the outside of the cylindrical body 12. As shown in FIG. 6C, when the cylindrical body 12 pushes the sealing portion 90 toward the internal space 23, the cover portion 13 abuts against the periphery of the suction hole 24 (rear end face 226) from the outside of the main body 22. Therefore, the suction hole 24 is covered from the outside of the main body 22 by the cover portion 13. As a result, the sealed space 130 is blocked from the space outside the cover portion 13, and the suction source 17 (FIG. 2A) can efficiently suck the gas in the internal space 23 through the suction hole 24.

[0119] Second Embodiment The conveying device 1A of the second embodiment shown in FIG. 7 has the same configuration as the conveying device 1 of the first embodiment, except for the points shown below. The same reference numerals are given to the parts overlapping with the conveying device 1, and the detailed description thereof is omitted. In FIG. 7 and the like, the illustration of the connecting portion 14, the suction source 17, the driving portion 18, etc. shown in FIG. 2A is omitted.

[0120] As shown in FIG. 7, the conveying device 1A has a suction device 10A. The conveying device 1A conveys the workpiece 9 from the upstream side to the downstream side of the conveying line 3 in a state where the pallet 5 on which the suction device 10A is mounted is suspended from the belt 7. The pallet 5 is connected to the belt 7 by a locking member (refer to the locking portion 51 in FIG. 2A) or a fastener such as a bolt. The configurations of the support base 2, the roller 6a, the roller 6b, and the belt 7 are examples and are not limited to the configurations shown in FIG. 7.

[0121] As shown in FIG. 8A, the adsorption device 10A includes an adsorption jig 20A, a workpiece adsorption portion 70A, a communication pipe 31, connectors 32a and 32b, a connecting jig 33, and a nut 34. The adsorption jig 20A has a housing 21A. In the housing 21A, a bottomed cylindrical first portion 221 and a lid-shaped second portion 222A are arranged vertically. The first portion 221 is located above the second portion 222A. As shown in FIG. 9A, the second portion 222A has a through hole 227. The through hole 227 penetrates the second portion 222A along the Z axis.

[0122] The communication pipe 31 is, for example, a resin tube made of urethane, but it may also be a metal tube. One end of the communication pipe 31 is connected to the through hole 227 via the connector 32a. The connector 32a is fitted into the through hole 227. One end of the communication pipe 31 may be directly fitted into the through hole 227 without passing through the connector 32a. The internal space 23 of the main body 22A communicates with the communication pipe 31 through the connector 32a.

[0123] As shown in FIG. 8A, the connecting jig 33 is attached to the outer surface of the main body 22A and connects the main body 22A and the workpiece adsorption portion 70A. The connecting jig 33 has an L-shaped bent shape. The workpiece adsorption portion 70A is fixed so as to be suspended from the connecting jig 33.

[0124] The nozzle 71 is fixed to the connecting jig 33 by the nut 34. However, the means for fixing the nozzle 71 to the connecting jig 33 is not limited to the nut 34, and other fastening members may also be used.

[0125] The other end of the communication pipe 31 is connected to the nozzle 71 via the connector 32b. The communication pipe 31 may be directly connected to the nozzle 71 without passing through the connector 32b. Alternatively, the nozzle 71 and the communication pipe 31 may be integrated. The internal space of the nozzle 71 communicates with the communication pipe 31 through the connector 32b.

[0126] The work suction part 70A has a pad 72A. The pad 72A is formed of, for example, rubber and is attached to the tip (lower end) of the nozzle 71. The pad 72A has a through hole that penetrates the pad 72A along the Z axis. The through hole of the pad 72A communicates with the internal space of the nozzle 71. The nozzle 71 sucks the work 9 so that the work 9 abuts against the pad 72A. Therefore, it is possible to prevent gas from flowing into the nozzle 71 through a minute gap that can be formed between the nozzle 71 and the work 9.

[0127] Also in this embodiment, the suction jig 20A performs the same operation as the suction jig 20 of the first embodiment described with reference to FIGS. 6A to 6F. That is, when the pushing member 11 (cylindrical body 12) shown in FIG. 9A presses the sealing portion 90 (protrusion 42) downward, as shown in FIG. 9B, the first resin sealing body 60 is exposed outside (downward) the first housing recess 26. As a result, through the gap 100 between the outer peripheral surface of the protrusion 42 and the inner wall surface of the suction hole 24, the fluid flow path 120 of the cylindrical body 12, the hole portion 121, the sealing space 130, the gap 100 (suction hole 24), the internal space 23, the through hole 227 (connector 32a), the communication pipe 31, the nozzle 71, and the inside of the pad 72A communicate with each other. In this state, when the suction source starts suction, the gas in the fluid flow path 120, the hole portion 121, the sealing space 130, the gap 100, the internal space 23, the through hole 227, the communication pipe 31, the nozzle 71, and the inside of the pad 72A is sucked by the suction source. Therefore, the internal space 23 becomes negative pressure, and the nozzle 71 can suck the work 9.

[0128] As shown in FIG. 8B, when the pushing member 11 is separated upward from the housing 21 and the physical connection between the pushing member 11 and the suction hole 24 is released, the pushing member 11 releases the downward pressure on the sealing portion 90. As a result, as shown in FIG. 9A, due to the elastic force of the elastic body 50, the shaft 40 moves upward, and again, the sealing portion 90 seals the gap 100 (suction hole 24). Therefore, even if the suction source does not perform suction, the negative pressure in the internal space 23 is maintained, and the nozzle 71 can continue to suck the work 9.

[0129] Thus, also in this embodiment, even if the suction source does not continuously suck the gas in the internal space 23, the nozzle 71 can maintain the state of adsorbing the work 9. Therefore, as shown in FIG. 7, while the pallet 5 is transporting the work 9 (particularly, between the adsorption start portion 3a and the adsorption end portion 3b), the suction source can be stopped, and problems such as an increase in power consumption and noise can be prevented.

[0130] Note that the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the present invention.

[0131] In each of the above embodiments, as shown in FIG. 3, the sealing portion 90 is composed of a convex portion 42 integrally formed with the shaft body 41 and a first resin sealing body 60 provided around the convex portion 42. However, the sealing portion 90 may be composed of a convex portion formed separately from the shaft body 41 and a first resin sealing body 60 provided around the convex portion.

[0132] Further, the sealing portion 90 may be composed of a resin molded body having the same shape as the convex portion 42. Also, the first resin sealing body 60 may be integrated with this resin molded body. That is, the sealing portion 90 may be composed of one resin molded body capable of sealing the suction hole 24.

[0133] In each of the above embodiments, as shown in FIG. 6F, when the internal space 23 communicates with the space outside the housing 21 through the gap 100, gas flows into the internal space 23 from the space outside the housing 21, and the negative pressure in the internal space 23 is released. However, the method of releasing the negative pressure in the internal space 23 is not limited to this. For example, as shown in FIG. 6C, the pushing member 11 is connected to the suction hole 24, and gas is sent into the internal space 23 from the suction source 17 through the fluid flow path 120, hole portion 121, sealing space 130, gap 100 (suction hole 24), internal space 23, communication hole 25, fluid flow path 73 of the work adsorption portion 70, and nozzle 71, thereby releasing the negative pressure in the internal space 23.

[0134] In each of the above embodiments, as shown in FIG. 6F, when the nozzle 71 finishes adsorbing the workpiece 9, the cover portion 13 was removed from the pushing member 11. However, if measures are taken to ensure communication between the external space and the internal space 23 of the housing 21 through the gap 100, the cover portion 13 may remain attached to the pushing member 11.

[0135] In each of the above embodiments, as shown in FIG. 1, the pushing member 11 was arranged only at the suction start portion 3a and the suction end portion 3b. However, at least one pushing member 11 may be arranged at an arbitrary position between the suction start portion 3a and the suction end portion 3b in addition to these positions.

[0136] In each of the above embodiments, as shown in FIG. 3, when the convex portion 42 is fitted into the suction hole 24, the sealing portion 90 seals the suction hole 24 (gap 100). However, the sealing portion 90 may seal the suction hole 24 by covering the opening of the suction hole 24 from the internal space 23 side. In this case, the sealing portion 90 may have a cover (plate-shaped or dome-shaped cover) capable of covering the opening of the suction hole 24.

[0137] In each of the above embodiments, as shown in FIG. 6C, when the pushing member 11 is connected to the suction hole 24, the hole portion 121 was located outside (rearward) of the suction hole 24. However, the hole portion 121 may enter the inside of the suction hole 24 (or the internal space 23).

[0138] The pad 72A shown in FIG. 8A may be attached to the tip of the nozzle 71 shown in FIG. 4. In this case, it is possible to prevent gas from flowing into the nozzle 71 through the minute gap that can be formed between the nozzle 71 and the workpiece 9.

[0139] In the conveying line 3 shown in FIG. 1, the belt 7 may be configured to be rotatable clockwise or counterclockwise along a horizontal plane.

Explanation of Reference Numerals

[0140] 1,1A... Conveyor device 2... Support table 2a... Legs 2b... Table 3... Conveyor line 3a... Suction start section 3b... Suction end section 4... Conveyor rail 5... Pallet 50... Pallet body 51... Locking part 6a... Upstream roller 6b... Downstream roller 7... Belt 9... Workpiece 10,10A... Suction device 11... Pushing member 12... Cylinder body 120... Fluid flow path 121... Hole part 13... Cover part 130... Sealed space 14... Connecting part 15... Connecting pipe 16... Connector 17... Suction source 18... Driving part 180... Fixed part 181... Movable part 20,20A... Suction jig 21,21A... Housing 22,22A... Body 221... First part 222,222A... Second part 223... Upper surface 224... Rear inner surface 225... Front end face 226... Rear end face 227... Through hole 23... Internal space 24... Suction hole 25... Communication hole 26... First accommodation recess 27... Second accommodation recess 28... Third accommodation recess 29... Recess 30... Communication space 31... Connecting pipe 32a,32b... Connector 33... Connecting jig 34... Nut 40... Shaft 41... Shaft body 42... Protrusion 43... Shaft recess 50... Elastic body 60... First resin sealing body 62... Second resin sealing body 64... Third resin sealing body 70, 70A... Work suction part 71... Nozzle 72, 72A... Pad 720... Recess 73... Fluid flow path 80... Guide 90... Sealing part 100... Gap

Claims

1. A housing having a main body with an internal space, a suction hole penetrating the main body and communicating with the internal space, and a communication hole penetrating the main body and communicating with the internal space; A work suction part attached to the main body and having a fluid flow path communicating with the communication hole; A shaft provided in the internal space; An elastic body provided in the internal space and holding the shaft so as to press the shaft toward the suction hole; and The shaft is a suction jig having a sealing part for sealing the suction hole.

2. The suction jig according to claim 1, wherein the sealing part seals the suction hole in accordance with elastic deformation of the elastic body.

3. The shaft has a columnar shaft body, The suction jig according to claim 1 or 2, wherein the sealing part protrudes from a tip of the shaft body and has a convex part fitted into the suction hole.

4. The suction jig according to claim 3, wherein the sealing part has a resin sealing body provided around the convex part.

5. The suction jig according to claim 4, wherein the resin sealing body is configured to be able to seal a gap between an outer peripheral surface of the convex part fitted into the suction hole and an inner wall surface of the suction hole from inside the main body.

6. The main body has a housing recess formed on an inner wall surface of the main body and extending along an opening edge of the suction hole, The suction jig according to claim 4, wherein the resin sealing body is configured to be accommodated in the housing recess.

7. The suction jig according to claim 1 or 2, wherein the work suction part has a nozzle for sucking a work and a pad provided around the nozzle for arranging the work.

8. A suction device having the suction jig according to any one of claims 1 to 7, and A pushing member that pushes the sealing part for sealing the suction hole into the internal space from outside the main body.

9. The suction device according to claim 8, wherein the pushing member has a cylindrical body connectable to a suction source and a hole formed at an axial end of the cylindrical body.

10. When the cylindrical body pushes the sealing part for sealing the suction hole into the internal space, the suction source, the inside of the cylindrical body, the suction hole, the internal space, the communication hole, and the fluid flow path communicate with each other. The suction device according to claim 9.

11. The pushing member has a cylindrical cover part attached to an outer surface of the cylindrical body, The suction device according to claim 8, wherein the cover part is configured to cover the suction hole.

12. The adsorption device according to any one of claims 8 to 11, a pallet on which the adsorption jig is mounted, and a transfer line for transferring the pallet, a transfer device having the same.

13. The transfer line has an adsorption start portion for connecting the internal space to a suction source through the suction hole, and an adsorption end portion for connecting the internal space to the outside of the housing through the suction hole, The adsorption start portion is provided on the upstream side of the transfer line with respect to the adsorption end portion. The transfer device according to claim 12.

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