Position fine-tuning structure

Abstract

To provide a position fine-tuning structure.SOLUTION: A position fine-tuning structure is provided, comprising: a first plate having a first linear groove formed on a top surface thereof; a second plate having a second linear plate formed on a bottom surface thereof, the bottom surface being configured to directly cover the top surface of the first plate in such a way that the second linear groove is perpendicular to and in communication with the first linear groove; and a guide slider including first and second pillars. The first pillar overlaps with the second pillar in a perpendicular direction, is parallel to the first linear groove, and is slidably located within the first linear groove. The second pillar is parallel to the second linear groove and slidably located within the second linear groove.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a fine adjustment structure, and particularly to a position fine adjustment structure.

Background Art

[0002] Generally, when measuring a workpiece to be measured (e.g., an IC chip) on a machine base, it is necessary to accurately align the measuring unit with the workpiece to be measured. Otherwise, the measuring effect of the workpiece to be measured will be incorrect or the workpiece to be measured will be damaged.

Summary of the Invention

Problems to be Solved by the Invention

[0003] However, when it is noticed that the above-mentioned measuring unit is not accurately aligned with the workpiece to be measured, the operator generally needs to perform position fine adjustment work through a complicated program. The conventional jig structure has the characteristic of a large volume. The process of performing position fine adjustment work each time is quite labor-intensive, wastes measurement time, and needs to be improved.

Means for Solving the Problems

[0004] One object of the present invention is to provide a position fine adjustment structure to solve the difficulties described in the above-mentioned prior art.

[0005] According to an embodiment of the present invention, the present invention provides a position fine adjustment structure including a first plate body provided with a first linear groove on the top surface, a second plate body provided with a second linear groove on the bottom surface, the bottom surface directly covering the top surface of the first plate body such that the second linear groove is orthogonal and communicated with the first linear groove, and a guide slider including a first column body and a second column body, the first column body overlapping and orthogonal to the second column body, parallel to the first linear groove, and slidably positioned within the first linear groove, and the second column body being parallel to the second linear groove and slidably positioned within the second linear groove.

[0006] According to one or more embodiments of the present invention, in the above-described position fine adjustment structure, the first plate body and the second plate body are each a rectangular plate body, and the second column body is directly connected to a part of the first column body and is close to one vertex of the first plate body.

[0007] According to one or more embodiments of the present invention, in the above-described position fine adjustment structure, the top surface of the first plate body further has blind vias, the second plate body further has through holes, one end of the through hole is connected to the bottom surface of the second plate body and is coaxially aligned and communicated with the blind vias, and the through hole is close to the vertex of the first plate body, and the second column body is directly connected to a part of the first column body.

[0008] According to one or more embodiments of the present invention, the above-described position fine adjustment structure further includes a locking member for fixing the first plate body and the second plate body such that the guide slider is sandwiched between the first plate body and the second plate body.

[0009] According to one or more embodiments of the present invention, the above-described position fine adjustment structure further includes a pressing member for pressing the second plate body against the first plate body.

[0010] According to one or more embodiments of the present invention, the above-described position fine adjustment structure includes a first fine adjustment movement set fixedly connected to one side surface of the first plate body for relatively moving the second plate body on the first plate body along the first major axis direction of the first linear groove, and a second fine adjustment movement set fixedly connected to another side surface adjacent to the side surface of the first plate body for relatively moving the second plate body on the first plate body along the second major axis direction of the second linear groove.

[0011] According to one or more embodiments of the present invention, in the above position fine adjustment structure, the first fine adjustment movement set includes a first receiving seat fixedly connected to the side surface of the first plate body, a first pressing block fixedly connected to one side surface of the second plate body facing the same common direction as the side surface of the first plate body, and a first locking screw provided to be screw-engageable with the first receiving seat and detachably connected to the first pressing block. When the first locking screw rotates and presses the first pressing block along the first major axis direction of the first linear groove, the first locking screw linearly presses the second plate body on the first plate body by the first pressing block.

[0012] According to one or more embodiments of the present invention, in the above position fine adjustment structure, the first locking screw is directly connected to a part of the first cylinder body through the second cylinder body along the orthographic projection of the first major axis direction of the first linear groove.

[0013] According to one or more embodiments of the present invention, in the above position fine adjustment structure, the first fine adjustment movement set further includes at least one first fixing stud located on the first receiving seat and fixedly connected to the first pressing block, and at least one first spring fitted on the first fixing stud and abutting against the first receiving seat and the first fixing stud respectively. When the first locking screw presses the second plate body by the first pressing block, the first receiving seat compresses the first spring to generate a recovery elastic force in the first spring. When the first locking screw rotates and separates from the first pressing block, the recovery elastic force of the first spring linearly pulls the second plate body by the first pressing block.

[0014] According to one or more embodiments of the present invention, in the above position fine adjustment structure, the second fine adjustment movement set includes a second receiving seat fixedly connected to another side surface of the first plate body, a second pressing block fixedly connected to another side surface of the second plate body facing another common direction with another side surface of the first plate body, and a second locking screw provided to be screw-engageable with the second receiving seat and detachably connected to the second pressing block. When the second locking screw rotates and presses the second pressing block along the second major axis direction of the second linear groove, the second locking screw linearly presses the second plate body on the second plate body by the second pressing block.

[0015] According to one or more embodiments of the present invention, in the above position fine adjustment structure, the second locking screw is directly connected to a part of the first column body through the second column body along the positive projection of the second linear groove in the second major axis direction.

[0016] According to one or more embodiments of the present invention, in the above position fine adjustment structure, the second fine adjustment moving set further includes at least one second fixing stud located in the second receiving seat and fixedly connected to the second pressing block, and at least one second spring fitted on the second fixing stud and abutted against the second receiving seat and the second fixing stud respectively. When the second locking screw presses the second plate body by the second pressing block, the second receiving seat compresses the second spring to generate a recovery elastic force in the second spring. When the second locking screw rotates and moves away from the second pressing block, the recovery elastic force of the second spring linearly pulls the second plate body by the second pressing block.

Advantages of the Invention

[0017] Thus, with the above configurations of each of the above embodiments, the position fine adjustment structure of the present application does not use a regular rail structure, and the first plate body can be directly stacked on the second plate body, thereby reducing the overall volume thickness. Moreover, due to the guide slider in the position fine adjustment structure, the combined first plate body and second plate body will not be displaced due to the gap problem.

[0018] The above is only used to explain the problems to be solved by the present invention, the technical means for solving the problems, and their effects, etc. The specific details of the present invention will be introduced in detail in the following embodiments and related drawings.

Brief Description of the Drawings

[0019] In order to make the above and other objects, features, advantages and embodiments of the present invention more clearly understood, the drawings are described as follows.

Figure 1

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Figure 8

[0020] In the following, several embodiments of the present invention are disclosed in the drawings, and in order to clearly explain them, many practical details are described in the following description. However, it should be understood that these practical details are not applied to limit the present invention. That is, these practical details are not necessary in each embodiment of the present invention. Furthermore, in order to simplify the drawings, some of the conventional structures and elements are simply and diagrammatically illustrated in the drawings.

[0021] FIG. 1 is a perspective view of a fine position adjustment structure 10 according to an embodiment of the present invention. FIG. 2 is an exploded view of the fine position adjustment structure 10 of FIG. 1. FIG. 3 is a cross-sectional view of the fine position adjustment structure 10 of FIG. 1 along the line AA. As shown in FIGS. 1 to 3, the fine position adjustment structure 10 includes a first plate 100, a second plate 200, and a guide slider 300. The second plate 200 directly overlaps the first plate 100 along the Z axis and is slidably positioned on the first plate 100, and is used to adjust the position of the first plate 100 along different vectors (e.g., X and Y axes). The guide slider 300 has a cross shape (or at least an L-shape), is embedded in the first plate 100 and the second plate 200, and is used to linearly guide the movement of the second plate 200.

[0022] Furthermore, the first plate body 100 includes a first top surface 101, a first bottom surface 102, and a plurality of first side surfaces (see the first front side surface 103 and the first side side surface 104). The first top surface 101 and the first bottom surface 102 face each other, and the first side surfaces surround the first top surface 101 and the first bottom surface 102, and two of the adjacent first side surfaces among them are called the first front side surface 103 and the first side side surface 104. The second plate body 200 includes a second top surface 201, a second bottom surface 202, and a plurality of second side surfaces (see the second front side surface 203 and the second side side surface 204). The second top surface 201 and the second bottom surface 202 face each other, and the second side surfaces surround the second top surface 201 and the second bottom surface 202, and two of the adjacent second side surfaces among them are called the second front side surface 203 and the second side side surface 204. The second front side surface 203 and the first front side surface 103 both face the same common direction (e.g., the X-axis), and the second side side surface 204 and the first side side surface 104 both face another common direction (e.g., the Y-axis).

[0023] A first linear groove 110 is recessed in the first top surface 101 of the first plate body 100. A second linear groove 210 is recessed in the second bottom surface 202 of the second plate body 200. The second linear groove 210 is orthogonal to the first linear groove 110, that is, the major axis direction (e.g., the Y-axis) of the second linear groove 210 and the major axis direction (e.g., the X-axis) of the first linear groove 110 are orthogonal to each other. The second bottom surface 202 of the second plate body 200 directly covers the first top surface 101 of the first plate body 100 such that the second linear groove 210 overlaps the first linear groove 110 and is communicated with the first linear groove 110.

[0024] FIG. 4 is a cross-sectional view along line segment BB of the position fine-tuning structure 10 in FIG. 1. As shown in FIGS. 2 and 4, the guide slider 300 includes a first column body 310 and a second column body 320. The second column body 320 is connected to be integrally formed with the first column body 310 and is orthogonal to the first column body 310, that is, the major axis direction of the first column body 310 (for example, the X-axis) and the major axis direction of the second column body 320 (for example, the Y-axis) are orthogonal to each other. In this embodiment, the first column body 310 and the second column body 320 each extend linearly, and the second column body 320 overlaps a part of the first column body 310. The first column body 310 of the guide slider 300 is parallel to the first linear groove 110 and is slidably positioned within the first linear groove 110 (FIG. 3). The second column body 320 is parallel to the second linear groove 210 and is slidably positioned within the second linear groove 210 (FIG. 4).

[0025] In this embodiment, more specifically, as shown in FIGS. 2 and 3, the first plate body 100 and the second plate body 200 are each a rectangular plate body, and the second column body 320 is directly connected to a part 330 of the first column body 310 and is close to one vertex 101A on the first plate body 100.

[0026] In this embodiment, as shown in FIGS. 1 and 3, the position fine-tuning structure 10 further includes two locking members 600. Each locking member 600 is locked to the first plate body 100 and the second plate body 200 such that the guide slider 300 is tightly sandwiched between the first plate body 100 and the second plate body 200. For example, each locking member 600 includes a first screw 610 and a gasket 620. The gasket 620 is located on the second top surface 201 of the second plate body 200. Each first screw 610 is inserted into the via hole 621 of the gasket 620, the via hole 220 of the second plate body 200, and the via hole 120 of the first plate body 100 such that the first plate body 100 and the second plate body 200 are tightly connected to each other.

[0027] In this embodiment, as shown in FIGS. 1 and 4, the position fine adjustment structure 10 further includes a pressing member 700. The pressing member 700 presses the second plate body 200 against the first plate body 100. More specifically, the pressing member 700 includes a plurality of second screws 710, a plurality of compression springs 720, and a crimping pad 730. The second screw 710 includes a screw body 711 and a screw head 712, and the screw head 712 is fixedly provided at one end of the screw body 711. The crimping pad 730 is located on the second top surface 201 of the second plate body 200. These second screws 710 are arranged at intervals with respect to the crimping pad 730. The screw body 711 of each second screw 710 is inserted into one of the compression springs 720, the via hole 731 of the crimping pad 730, the via hole 221 of the second plate body 200, and the via hole 121 of the first plate body 100. Each of the compression springs 720 is abutted against the screw head 712 of the second screw 710 and the second plate body 200 to press the second plate body 200 against the first plate body 100.

[0028] FIG. 5 is a schematic operation diagram of the position fine adjustment structure 10 of this embodiment. In this embodiment, as shown in FIGS. 2 and 5, the first plate body 100 has a plurality of screw holes 130 and a lock plug G, and these screw holes 130 are distributed at intervals on the first plate body 100. By inserting the lock plug G into one of the screw holes 130, the first plate body 100 can be fixed to a platform (not shown).

[0029] A blind via 140 is recessed in the first top surface 101 of the first plate body 100. The second plate body 200 further has a through hole 230 that penetrates the second plate body 200, and both ends of the through hole 230 are respectively connected to the first top surface 101 and the first bottom surface 102. One end of the through hole 230 is coaxially aligned and communicated with the blind via 140. The through hole 230 is close to the vertex 101A of the first plate body 100, and the second column body 320 is directly connected to a part 330 of the first column body 310.

[0030] As described above, the position fine-tuning structure 10 of this embodiment can be used in various situations where the user can intuitively adjust the position of the second plate body 200 on the first plate body 100 and determine the required position with the naked eye. For example, when the user attempts to finely adjust the position of the second plate body 200 on the first plate body 100, first, the first plate body 100 is fixed to the platform. Then, after loosening the locking member 600, in order to insert the spanner K into the through hole 230 and abut it against the blind via 140, when rotating the spanner K in the direction D with the end E of the spanner K as the fulcrum, the spanner K presses the second plate body 200 against the inner wall of the through hole 230. As a result, the second plate body 200 is linearly moved along the X-axis (or Y-axis) on the first plate body 100 by a certain distance (for example, several millimeters), thereby completing the fine-tuning operation (referred to here as a large fine-tuning).

[0031] It should be understood that since the guide slider 300 is fitted to be compatible with the first linear groove 110 and the second linear groove 210, when the spanner K presses the second plate body 200 and the guide slider 300 along the X-axis, due to the position restriction of the first column 310 by the first linear groove 110, the second plate body 200 can only move linearly straight along the X-axis. When the spanner K presses the second plate body 200 along the Y-axis, due to the position restriction of the second column 320 by the second linear groove 210, the second plate body 200 can only move linearly straight along the Y-axis.

[0032] FIG. 6 is a perspective view of the position fine-tuning structure 11 of an embodiment of the present invention. FIG. 7 is an exploded view of the first fine-tuning movement set 400 in FIG. 6. FIG. 8 is an exploded view of the second fine-tuning movement set 500 in FIG. 6. As shown in FIGS. 6 to 8, the position fine-tuning structure 11 of this embodiment is substantially the same as the position fine-tuning structure 10 in FIG. 1, and the difference is that the position fine-tuning structure 11 further includes a first fine-tuning movement set 400 and a second fine-tuning movement set 500. The first fine-tuning movement set 400 and the second fine-tuning movement set 500 can respectively perform position fine-tuning of the second plate body 200 along different vectors (for example, X, Y axes) on the first plate body 100.

[0033] The first fine adjustment moving set 400 is fixedly connected to the first side surface 104 of the first plate body 100 and is used to relatively move the second plate body 200 along the X-axis on the first plate body 100. The second fine adjustment moving set 500 is fixedly connected to the first front surface 103 of the first plate body 100 and is used to relatively move the second plate body 200 along the Y-axis on the first plate body 100.

[0034] As shown in FIGS. 6 and 7, more specifically, the first fine adjustment moving set 400 includes a first receiving seat 410, a first pushing block 420, and a first locking screw 430. The first receiving seat 410 is fixedly connected to the first side surface 104 of the first plate body 100. The first pushing block 420 is fixedly connected to the second side surface 204 of the second plate body 200. The first locking screw 430 is provided to be screw-engageable with the first receiving seat 410 and is separably connected to the first pushing block 420.

[0035] In addition, the first fine adjustment moving set 400 further includes a plurality of first fixing studs 440 and a plurality of first springs 450. The first fixing studs 440 are arranged in parallel at intervals from each other, and each first fixing stud 440 is located on the first receiving seat 410 and is fixedly connected to the first pushing block 420. Each first spring 450 is fitted on one of the first fixing studs 440 and abuts against the first receiving seat 410 and the first fixing stud 440, respectively.

[0036] The first receiving seat 410 includes a first seat body 411 and a first flange 412. The first seat body 411 is locked to the first side surface 104 of the first plate body 100. The first flange 412 protrudes from the first seat body 411 and has a first long hole 413. The first locking screw 430 passes through the first flange 412 and is provided to be threadably engaged with the first flange 412, and the end 431 of the first locking screw 430 is detachably abutted against the first push block 420. Each of these first fixing studs 440 passes through the first long hole 413 and is fixedly connected to the first push block 420. Each first fixing stud 440 includes a first body 441 and a bolt head 442. The bolt head 442 is located at one end of the first body 441. Each first body 441 is positioned to pass through the first long hole 413, and the other end of the first body 441 is fixedly connected to the first push block 420. Each first spring 450 is fitted onto one of the first bodies 441 and abuts against the first flange 412 and the bolt head 442 respectively.

[0037] In this way, the position fine-tuning structure 11 of this embodiment can be used in various situations where it is necessary to accurately control the position because the user can fine-tune the position of the second plate body 200 on the first plate body 100 through the fine-tuning screw.

[0038] For example, when the user attempts to push the second plate body 200 along the X-axis, the first locking screw 430 is rotated. As a result, the rotated first locking screw 430 begins to advance along the X-axis and gradually pushes the first pushing block 420. In this way, the first locking screw 430 linearly pushes the second plate body 200 in the first plate body 100 by a certain distance (for example, several microns) by means of the first pushing block 420 to complete a fine adjustment operation (referred to here as a small fine adjustment). At this time, the bolt head 442 of the first fixed stud 440 compresses the first spring 450 together with the first flange 412, thereby generating a restoring elastic force in the first spring 450. Conversely, when the user attempts to pull the second plate body 200 along the X-axis, the first locking screw 430 is rotated. As a result, the rotated first locking screw 430 begins to retreat along the X-axis and gradually separates from the first pushing block 420. At the same time, the restoring elastic force of the first spring 450 gradually pulls the second plate body 200 by means of the first pushing block 420.

[0039] It should be understood that since the first locking screw 430 is directly connected to the part 330 of the first cylinder body 310 through the second cylinder body 320 along the positive projection of the X-axis, the first locking screw 430 can push the second plate body 200 more labor-savingly and make the second plate body 200 move linearly more smoothly according to the guide slider 300.

[0040] As shown in FIGS. 6 and 8, more specifically, the second fine adjustment moving set 500 includes a second receiving seat 510, a second pushing block 520, and a second locking screw 530. The second receiving seat 510 is fixedly connected to the first front side surface 103 of the first plate body 100. The second pushing block 520 is fixedly connected to the second front side surface 203 of the second plate body 200. The second locking screw 530 is provided to be screwable with the second receiving seat 510 and is separably connected to the second pushing block 520.

[0041] In addition, the second fine adjustment movement set 500 further includes a plurality of second fixed studs 540 and a plurality of second springs 550. The second fixed studs 540 are arranged in parallel at intervals from each other, and are respectively located on the second receiving seats 510 and fixedly connected to the second pressing blocks 520. Each second spring 550 is fitted on one of the second fixed studs 540, and is respectively abutted against the second receiving seat 510 and the second fixed stud 540.

[0042] The second receiving seat 510 includes a second seat body 511 and a second flange 512. The second seat body 511 is locked to the first front side surface 103 of the first plate body 100. The second flange 512 protrudes from the second seat body 511 and has a second long hole 513. The second locking screw 530 penetrates through the second flange 512 and is provided to be threadable with the second flange 512, and the end 531 of the second locking screw 530 is separably abutted against the second pressing block 520. Each second fixed stud 540 includes a second main body 541 and a bolt head 542. The bolt head 542 is located at one end of the second main body 541. Each second main body 541 is positioned to penetrate through the second long hole 513, and the other end of the second main body 541 is fixedly connected to the second pressing block 520. Each second spring 550 is fitted on one of the second main bodies 541, and is respectively abutted against the second flange 512 and the bolt head 542.

[0043] For example, when the user tries to push the second plate body 200 along the Y-axis, the user rotates the second locking screw 530, whereby the rotated second locking screw 530 begins to advance along the Y-axis and gradually presses the second pressing block 520. In this way, the second locking screw 530 linearly presses the second plate body 200 on the first plate body 100 by a certain distance (for example, several microns) by the second pressing block 520 to complete a fine adjustment operation (referred to as a small fine adjustment here). At this time, the bolt head 542 of the second fixed stud 540 compresses the second spring 550 together with the second flange 512, so as to generate a restoring elastic force in the second spring 550.

[0044] Conversely, when the user attempts to pull the second plate body 200 along the Y-axis, the user rotates the second locking screw 530. As a result, the rotated second locking screw 530 begins to retract along the Y-axis and gradually moves away from the second push block 520. At the same time, the restoring elastic force of the second spring 550 gradually pulls the second plate body 200 by the second push block 520.

[0045] Note that since these first fixing studs 440 are arranged in sequence along the Y-axis within the first long hole 413, when the second fine adjustment moving set 500 moves the second plate body 200 along the Y-axis, these first fixing studs 440 can be displaced within the first long hole 413 without being interfered by the first seat 410. Conversely, since these second fixing studs 540 are arranged in sequence along the X-axis within the second long hole 513, when the second fine adjustment moving set 500 moves the first plate body 100 along the X-axis, these second fixing studs 540 can be displaced within the second long hole 513 without being interfered by the second seat 510.

[0046] It should be understood that since the second locking screw 530 is directly connected to the part 330 of the first column body 310 through the second column body 320 along the positive projection of the Y-axis, the second locking screw 530 can push the second plate body 200 more labor-savingly and make the second plate body 200 move linearly more smoothly according to the guide slider 300.

[0047] However, the present invention is not limited thereto. In other embodiments, the position fine adjustment structure 10 may only have the first fine adjustment moving set 400 or the second fine adjustment moving set 500. The first fine adjustment moving set 400 may omit the first spring 450 and the first fixing studs 440, or the second fine adjustment moving set 500 may not have the second spring 550 and the second fixing studs 540.

[0048] In this way, with the above-described configurations of each of the embodiments, the position fine-tuning structure of the present application does not use a regular rail structure, and the first plate body can be directly stacked on the second plate body, thereby reducing the overall volume thickness. Moreover, due to the guide slider within the position fine-tuning structure, the combined first plate body and second plate body will not be displaced due to the gap problem.

[0049] Finally, each of the above-described disclosed embodiments is not used for limiting the present invention. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and all of these various changes and refinements can be protected by the present invention. Therefore, the protection scope of the present invention shall be in accordance with that defined by the appended claims.

Explanation of Reference Numerals

[0050] 10, 11: Position fine-tuning structure 100: First plate body 101: First top surface 101A: Vertex 102: First bottom surface 103: First front side surface 104: First side side surface 110: First linear groove 120, 121: Via hole 130: Screw hole 140: Blind via 200: Second plate body 201: Second top surface 202: Second bottom surface 203: Second front side surface 204: Second side side surface 210: Second linear groove 220, 221: Via hole 230: Through hole 300: Guide slider 310: First column body 320: Second column body 330: Part 400: First fine-tuning movement set 410: First receiving seat 411: First seat body 412: First flange 413: First long hole 420: First pressing block 430: First locking screw 431: End 440: First fixing stud 441: First main body 442: Bolt head 450: First spring 500: Second fine adjustment moving set 510: Second receiving seat 511: Second seat body 512: Second flange 513: Second long hole 520: Second pressing block 530: Second locking screw 531: End 540: Second fixing stud 541: Second main body 542: Bolt head 550: Second spring 600: Locking member 610: First screw 620: Gasket 621: Via hole 700: Pressing member 710: Second screw 711: Screw main body 712: Screw head 720: Compression spring 730: Crimping pad 731: Via hole AA, BB: Line segment D: Direction E: End G: Locking plug K: Spanner X, Y, Z: Axis

Claims

1. A first plate body provided with a first linear groove on its top surface, A second plate body provided with a second linear groove on its bottom surface, and the bottom surface directly covers the top surface of the first plate body such that the second linear groove is orthogonal and communicated with the first linear groove, Including a first column body and a second column body, the first column body overlaps and is orthogonal to the second column body, is parallel to the first linear groove, and is slidably positioned within the first linear groove, and the second column body is parallel to the second linear groove and is slidably positioned within the second linear groove, a guide slider, A position fine-tuning structure comprising the above.

2. The first plate body and the second plate body are each a rectangular plate body, and the second column body is directly connected to a part of the first column body and is close to one vertex of the first plate body. The position fine-tuning structure according to Claim 1.

3. The top surface of the first plate body further has a blind via, the second plate body further has a through hole, one end of the through hole is connected to the bottom surface of the second plate body, and is coaxially aligned and communicated with the blind via, and the through hole is close to one vertex of the first plate body, and the second column body is directly connected to the part of the first column body. The position fine-tuning structure according to Claim 2.

4. The position fine-tuning structure according to any one of Claims 1 to 3, further including a locking member for fixing the first plate body and the second plate body such that the guide slider is sandwiched between the first plate body and the second plate body.

5. The position fine-tuning structure according to any one of Claims 1 to 4, further including a pressing member for pressing the second plate body against the first plate body.

6. A first fine-tuning movement set fixedly connected to one side surface of the first plate body for relatively moving the second plate body with respect to the first plate body along the first major axis direction of the first linear groove, A second fine-tuning movement set fixedly connected to another side surface adjacent to the side surface of the first plate body for relatively moving the second plate body with respect to the first plate body along the second major axis direction of the second linear groove, The position fine-tuning structure according to any one of Claims 1 to 5, further including the above.

7. The first fine-tuning movement set includes, A first receiving seat fixedly connected to the side surface of the first plate body, A first pushing block fixedly connected to one side surface of the second plate body facing the same direction as the side surface of the first plate body, A first locking screw that is provided to be threadably engaged with the first receiving seat and is detachably connected to the first pressing block, comprising, When the first locking screw rotates and presses the first pressing block along the first major axis direction of the first linear groove, the first locking screw linearly presses the second plate body on the first plate body by the first pressing block. The position fine adjustment structure according to claim 6. **Claim 8** The first locking screw is directly connected to a part of the first column body through the second column body along the orthographic projection of the first linear groove in the first major axis direction. The position fine adjustment structure according to claim 7. **Claim 9** The first fine adjustment moving set, At least one first fixing stud that is located on the first receiving seat and is fixedly connected to the first pressing block, At least one first spring that is fitted on the first fixing stud and abuts against the first receiving seat and the first fixing stud respectively, further comprising, When the first locking screw presses the second plate body by the first pressing block, the first receiving seat compresses the first spring to generate a restoring elastic force in the first spring, When the first locking screw rotates and moves away from the first pressing block, the restoring elastic force of the first spring linearly pulls the second plate body by the first pressing block. The position fine adjustment structure according to claim 7. **Claim 10** The second fine adjustment moving set, A second receiving seat fixedly connected to another side surface of the first plate body, A second pressing block fixedly connected to another side surface of the second plate body that faces another common direction together with another side surface of the first plate body, A second locking screw that is provided to be threadably engaged with the second receiving seat and is detachably connected to the second pressing block, comprising, When the second locking screw rotates and presses the second pressing block along the second major axis direction of the second linear groove, the second locking screw linearly presses the second plate body on the second plate body by the second pressing block. The position fine adjustment structure according to claim 6. **Claim 11** The second locking screw is directly connected to a part of the first column body through the second column body along the orthographic projection of the second linear groove in the second major axis direction. The position fine adjustment structure according to claim 10. **Claim 12** The second fine adjustment moving set, At least one second fixing stud that is located on the second receiving seat and is fixedly connected to the second pressing block, At least one second spring that is fitted in the second fixed stud and abuts against the second receiving seat and the second fixed stud respectively, further comprising, when the second locking screw presses the second plate body by the second pressing block, the second receiving seat compresses the second spring to generate a restoring elastic force in the second spring, when the second locking screw rotates and moves away from the second pressing block, the restoring elastic force of the second spring linearly pulls the second plate body by the second pressing block. The position fine-tuning structure according to claim 10.

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