Contact cleaning surface assembly and production method thereof

Abstract

To provide a contact cleaning surface assembly and a production method thereof.SOLUTION: A contact cleaning surface assembly comprises an elastomeric layer with bulk conductivity (e.g., electrical conductivity). The elastomeric layer 112 has a conductive surface 114 in contact with a part to be cleaned, and a further conductive surface 113 in electrical contact with a conductive pathway 110 for charge extraction from the conductive layer 112.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a contact cleaning surface assembly used in a contact cleaning process, and more particularly, but not limited to, a contact cleaning surface assembly comprising an elastomeric layer having bulk conductivity. The present invention also relates to a method of manufacturing a contact cleaning surface assembly.

Background Art

[0002] Contact cleaning is used to clean a substrate surface. After cleaning, the substrate surface can be used in various delicate processes in the manufacture of electronic devices, photovoltaic devices, and flat panel displays. Usually, a cleaning roller made of rubber or elastomer is used to remove contaminant particles from the substrate surface, and then an adhesive roller can be used to remove the contaminant particles from the cleaning roller.

[0003] During operation, the contact cleaning roller contacts at least the upper surface of the substrate and removes debris by an adhesion removal mechanism (e.g., van der Waals forces and adhesive forces). In this case, due to the inherent properties of the material used to form the contact cleaning roller, debris is attracted and adheres to the surface of the contact cleaning roller. Thus, it is conceivable that the contact cleaning roller pulls contaminant particles away from the substrate surface due to the attractive force by the van der Waals force between the particles and the roller. Therefore, existing contact cleaning rollers can ensure the effectiveness of removing contaminant particles by maximizing contact with the substrate surface.

[0004] Apart from the weak van der Waals electrostatic force inherent in the material of the contact cleaning roller, other electrostatic charges can also occur. The contact cleaning process due to contact between different surfaces has the potential to be a charge source due to the triboelectric charging effect and the accumulation of electrostatic charges. Therefore, any equipment used very proximally to the substrate (e.g., within 100 mm) in an electronic device assembly factory must be non-insulating and have a surface resistance small enough to prevent damage to the substrate by electrostatic charges.

[0005] When the contact cleaning roller has sufficient surface adhesion to clean the substrate (i.e., the part to be cleaned), electrostatic charges are likely to be generated during the contact cleaning process.

[0006] Surface resistance R s is defined by the ratio of voltage to current across the surface of the material. The property of the material measured in ohms (Ω) is defined as follows. R s =U / Is where U is the DC voltage and the surface current is I s is.

[0007] A well-known method for measuring surface resistance is given in ANSI's ESD STM11.11-2015. According to this method, any equipment in an electronic device assembly factory used within 100 mm of the substrate must have a surface resistance of less than 1×10 9 Ω.

[0008] Bulk conductivity is usually established by measuring volume resistance. A well-known method for measuring volume resistance is given in ANSI's ESD STM11.12-2015.

[0009] Cleaning rollers made of ordinary rubber or elastomer have a surface resistance of 1×10 9It is normal not to have a surface resistance below Ω. In other words, a cleaning roller made of ordinary rubber or elastomer is insulating and not conductive. It is desirable to provide a cleaning roller that dissipates electrostatic charges from the substrate to be cleaned.

[0010] It is not uncommon to use one or more additives during the manufacturing process to change the properties of materials such as those used for the contact cleaning roller. However, additives necessarily have different properties from the original material, and the changes to the original material pose a risk of inhibiting its main function, namely contact cleaning. This risk is particularly high when attempting to change the surface properties of the contact cleaning roller, especially when the same surface is important for the cleaning effectiveness of the roller. Reducing the amount of elastomer on the roller surface potentially means reducing the ability of the elastomer to contact the substrate to be cleaned and the ability to contact and attract dirt and debris. Furthermore, the modifying additive may interfere with the normal process of attracting debris to the surface of the cleaning roller as described above. In both situations, the cleaning effectiveness of the roller is inhibited or reduced.

[0011] Ordinary conductive additives such as fibers and fine particles may not be uniformly dispersed throughout the elastomer matrix. This results in non-uniform surface resistance of the roller, with a mixture of portions that conduct charge externally from the cleaning surface and portions where charge accumulates and damages the substrate.

[0012] It is further considered that adding additives to the elastomer should not affect the integrity of the elastomer or the roller. Loss of integrity or reduction in wear resistance may cause the roller to wear out very quickly, or its surface to be damaged or perforated, thereby further reducing its effectiveness. All of these factors can potentially increase the running cost of the contact cleaning process.

[0013] Furthermore, for additive materials that are not sufficiently similar to the elastomer, such as those with a small binding surface area, the surrounding elastomer cannot effectively bind or adhere to the additive. If this material is not securely embedded within the elastomer, when the roller operates, the material moves away from the roller surface, thereby contaminating the substrate that is being cleaned and / or picked up by the adhesive roller, which shortens the lifespan of the substrate and increases running costs. Additionally, when the material moves away from the roller, it may cause damage to the roller surface, again reducing the cleaning efficacy and increasing costs.

[0014] Since the material becomes less cost-effective and the cost of the contact cleaning roller can become prohibitively high, it is important not to use an excessive amount of additive in order to achieve a suitable reduction in surface resistance. Therefore, it is important to maximize the electrical connectivity provided by the additive while minimizing its usage.

[0015] A further consequence associated with using a large amount of additive is that as the amount of that material increases on the roller surface, the amount of elastomer decreases. The problem of elastomer reduction on the roller surface has already been described above.

[0016] When the cleaning roller wears, it is important that its surface resistance is not affected. Otherwise, the risk of electrostatic charge accumulation increases over the lifespan of the cleaning roller. When this occurs, the roller may need to be replaced earlier, increasing operating costs. Therefore, it is important that anything that improves the surface resistance of the roller continues to improve the surface resistance without losing efficacy over the lifespan of the roller.

[0017] As described above, the conditions for a particular cleaning application are that the surface resistance of the cleaning surface is less than 1 × 10 9 Ω. This means that the contact cleaning roller should have a surface resistance of 1 × 10 9Not only is the requirement imposed that the surface resistance be less than Ω, but necessarily the roller must be able to allow the static charge to leave the cleaning surface and be conducted to ground. Also this must be done while in continuous operation, i.e., the roller must always be able to conduct the charge while rotating. Thus, it may be insufficient to provide a roller with low resistance in a local area, and it must always be possible to conduct the charge from the substrate surface to a suitable grounding device (i.e., ground) during operation. SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION

[0018] An object of the present invention is to alleviate or reduce at least one or more of the above problems.

[0019] An object of the present invention is to alleviate or reduce the problem of static charge accumulation resulting from a contact cleaning surface assembly.

[0020] A further object is to alleviate or reduce the static charge problem without reducing or inhibiting the cleaning effectiveness of the contact cleaning roller, or without reducing the operating life of the contact cleaning surface assembly or the adhesive roller.

[0021] A still further object of the present invention is to reduce the surface resistance of the contact cleaning surface assembly to less than 1×10 9 Ω and further achieve this while providing a path through which the static charge can be conducted to ground.

[0022] A further object of the present invention is to reduce the surface resistance while minimizing the amount of non-insulating additive and maximizing its electrical connectivity.

[0023] A further object of the present invention is to improve the connectivity while alleviating a reduction in the integrity of the contact cleaning surface assembly or even further improving its integrity.

[0024] A further object of the present invention is to mitigate or reduce static charge when using a contact cleaning surface assembly used in a suitable contact cleaning apparatus.

[0025] A further object is to provide a method of manufacturing a contact cleaning surface assembly capable of mitigating or reducing static charge.

Means for Solving the Problems

[0026] According to one aspect of the present invention, in a contact cleaning surface assembly comprising an elastomeric layer having bulk conductivity (e.g., electrical conductivity), the elastomeric layer has a conductive surface that contacts the portion to be cleaned and a further conductive surface that makes electrical contact with a conductive path for extracting charge from the conductive layer. A contact cleaning surface assembly is provided.

[0027] In certain embodiments, the elastomeric layer makes electrical contact with the conductive path.

[0028] In certain embodiments, the elastomeric layer is in close proximity to the conductive path.

[0029] In certain embodiments, the conductive path results in charge extraction from the elastomeric layer to ground (i.e., electrical earth).

[0030] In certain embodiments, the conductive path includes a metallic charge extraction element that contacts the conductive surface of the elastomeric layer.

[0031] In certain embodiments, the conductive path is a conductive support for the elastomeric layer.

[0032] In certain embodiments, the elastomeric layer is in close proximity to the support.

[0033] In certain embodiments, the charge extraction path is from the conductive layer to the conductive path.

[0034] In one embodiment, the elastomer layer is attached to a conductive support.

[0035] In one embodiment, the elastomer layer is in intimate contact with the conductive support. More specifically, the elastomer layer is in intimate contact with the support over the further conductive surface of the elastomer layer. In this way, charge extraction from the elastomer layer to the support occurs over the further conductive surface of the elastomer layer.

[0036] In one embodiment, the conductive support is formed of a metallic conductor material. More specifically, the metallic conductor support is stainless steel.

[0037] In one embodiment, the conductive support is formed of a non-metallic conductor material. More specifically, the non-metallic conductor support is carbon fiber.

[0038] In one embodiment, the support is a shaft.

[0039] In one embodiment, the charge extraction path is from the conductive layer to the conductive support. More specifically, the charge extraction path goes from the conductive surface of the elastomer material through the elastomer material to the further conductive surface of the elastomer material and then to the conductive support.

[0040] In one embodiment, the assembly is a roller.

[0041] In one embodiment, the assembly comprises a flat (or substantially flat) sheet.

[0042] In one embodiment, the elastomer layer includes a conductive element. More specifically, the elastomer layer includes a modifier that includes a conductive element. In this way, the modifier reduces the bulk resistance and surface resistance of the elastomer layer and imparts bulk conductivity to the elastomer layer.

[0043] In one embodiment, the conductive elements form a network. More specifically, the network of conductive elements is electrically conductive. The conductive elements within the elastomeric layer are proximal to or in contact with each other such that the network of conductive elements provides a charge path from the conductive outer surface of the elastomeric layer, through the elastomeric layer, to the conductive support from a further conductive surface of the elastomeric layer. In this way, charge can be extracted from the substrate (i.e., the portion to be cleaned) through the elastomeric layer to the conductive support and to ground.

[0044] In one embodiment, the elastomeric layer includes an interconnected network of conductive elements.

[0045] In one embodiment, the conductive elements are elongated. In this way, the surface area of the conductive elements in contact with the elastomer of the elastomeric layer is increased, enhancing their retention within the elastomeric layer.

[0046] In one embodiment, the elongated conductive elements are hollow.

[0047] In one embodiment, the conductive element is carbon.

[0048] In one embodiment, the conductive element is a nanotube.

[0049] In one embodiment, the conductive element is a carbon nanotube.

[0050] In one embodiment, the nanotube is a single-walled carbon nanotube. In this way, a balance is maintained between the cleaning properties of the elastomeric layer and its bulk conductivity. The large surface area of the nanotubes improves the binding of carbon to the elastomer as compared to carbon particles or carbon fibers.

[0051] More specifically, the carbon nanotube has a wall thickness of one carbon atom.

[0052] In one embodiment, the surface resistance of the conductive surface is less than 1×10 9 Ω. More specifically, the surface resistance of both the conductive surface of the elastomer layer and the further conductive surface is less than 1×10 9 Ω. Even more specifically, the surface resistances of both the conductive surface of the elastomer layer and the further conductive surface are substantially equal.

[0053] In one embodiment, the surface resistance of the conductive surface is in the range of about 1×10 6 Ω to about 1×10 9 Ω. More specifically, the surface resistances of both the conductive surface of the elastomer layer and the further conductive surface are in the range of about 1×10 6 Ω to about 1×10 9 Ω. Even more specifically, the surface resistances of both the conductive surface of the elastomer layer and the further conductive surface are substantially equal.

[0054] In one embodiment, the elongated conductive elements are uniformly dispersed throughout the elastomeric material.

[0055] In one embodiment, the conductive elements are dispersed so as to be embedded and held within the elastomeric material.

[0056] In one embodiment, the conductive elements are randomly oriented within the elastomeric material.

[0057] In one embodiment, the conductive elements have a length in the range of about 5 μm to about 30 μm.

[0058] In one embodiment, the conductive elements have a diameter in the range of about 1 nm to about 200 nm.

[0059] In one embodiment, the concentration of the conductive elements within the elastomer is at least about 0.015% of the weight of the elastomer.

[0060] In one embodiment, the elastomer comprises one of silicone rubber or polyurethane.

[0061] In one embodiment, the elastomer includes silicone. In this way, a conductive silicone layer can be formed when carbon nanotubes are dispersed in the silicone material. The nanotubes are retained within the silicone polymer matrix through covalent bonding. Other additives, such as particulate materials, tend to flow out of the silicone matrix due to the fluidity of the silicone matrix. Thus, the carbon nanotubes provide a modifier that is retained while being retained within the silicone matrix.

[0062] In one embodiment, the elastomer is a two-component room temperature curable silicone rubber.

[0063] According to a further aspect of the present invention, in a contact cleaning surface roller, a core region, and a surface region covering the core region, and a contact cleaning surface roller is provided in which the surface region includes an elastomer and a plurality of elongated elements dispersed within the elastomer material, and the elongated elements are formed of an electrically non-insulating material.

[0064] According to yet a further aspect of the present invention, there is provided the use of a contact cleaning surface assembly according to the present invention in a contact cleaning process.

[0065] According to another aspect of the present invention, there is provided a contact cleaning device comprising a contact cleaning surface assembly according to the present invention.

[0066] According to a further aspect of the present invention, in a method of manufacturing a contact cleaning roller, providing an elastomer in fluid form, and dispersing elongated elements formed of an electrically non-insulating material in the elastomer, and providing a core region of the contact cleaning roller, and A method is provided that includes coating a core region with an elastomer.

[0067] In certain embodiments, the method further includes curing the elastomer.

[0068] According to yet a further aspect of the present invention, in a method of manufacturing a contact cleaning surface assembly, providing a prepolymer of an elastomer, adding a polymer modifier formed of an electrically non-insulating material to the prepolymer, polymerizing the prepolymer, and curing the polymer to form an elastomeric cleaning surface having bulk conductivity is provided.

[0069] In certain embodiments, after curing, the conductive elements are dispersed throughout the elastomer.

[0070] In certain embodiments, after curing, the conductive elements form a network.

[0071] In certain embodiments, the conductive elements are oriented in a random direction.

[0072] Here, the present invention will be described merely by way of example with reference to the accompanying drawings.

Brief Description of the Drawings

[0073]

Figure 1

Figure 2

Figure 3

Figure 4

Embodiments for Carrying Out the Invention

[0074] FIG. 1 is a schematic side view of a contact cleaning apparatus using a contact cleaning surface assembly which is a roller according to an embodiment of the present invention. The contact cleaning apparatus 1 includes a contact cleaning roller 2 and an adhesion roller 3, and these rollers are attached on a conveyor 4 on which a plurality of substrates 5 to be cleaned are held. The contact cleaning roller 2 is elongated and generally cylindrical, and is attached on a holder (not shown) having an axis perpendicular to the plane of the figure, and the contact cleaning roller 2 rotates freely around its axis. The specific structure of the contact cleaning roller 2 will be described in more detail below. The adhesion roller 3 is generally cylindrical and includes a main body having a surface where an adhesive exists, and similarly, is attached on a holder (not shown) having an axis perpendicular to the plane of the figure and parallel to the axis of the contact cleaning roller 2, and the adhesion roller 3 rotates freely around its axis. The contact cleaning roller 2 and the adhesion roller 3 are attached so as to be in contact with each other such that the clockwise rotational movement of the contact cleaning roller 2 results in the counterclockwise rotational movement of the adhesion roller 3, and vice versa. The necessity of bringing the contact cleaning roller 2 into contact with the adhesion roller 3 will become apparent from the following description of the use. Further, the contact cleaning roller 2 is attached so as to be able to contact the surface of the substrate 5 to be cleaned when the substrate 5 passes on the conveyor located under the axis of the conveyor 4.

[0075] The substrate 5 to be cleaned is processed as follows. The substrate 5 is positioned on the upper surface 6 of a conveyor 4 that moves from right to left as indicated by arrow A in FIG. 1. The substrate 5 to be cleaned passes under a contact cleaning roller 2 that rotates in a clockwise direction as indicated by arrow B. Before contacting the contact cleaning roller 2, the upper surface of the substrate 5 is covered with debris 7 that requires removal of dust and the like. The contact cleaning roller 2 contacts the upper surface of the substrate 5 and removes the debris 7 by an electrostatic removal mechanism. Here, due to the inherent polarity of the material used to form the contact cleaning roller 2, the debris 7 is attracted and adhered to the surface of the contact cleaning roller 2. The relative attractive force between the surface of the contact cleaning roller 2 and the debris 7 is greater than the attractive force between the debris 7 and the surface of the substrate 5, so the debris 7 is removed. The substrate 5 that has been cleaned here then continues to move along the conveyor 4 towards a removal station (not shown), and the lower surface 8 of the conveyor returns in the left-to-right direction in FIG. 1 as indicated by arrow D while forming a loop. To clean the contact cleaning roller 2, an adhesive roller that rotates in a counterclockwise direction as indicated by arrow C contacts the surface of the contact cleaning roller 2. In this regard, the adhesive force between the debris 7 and the adhesive present on the surface of the adhesive roller 3 is greater than the adhesive force that holds the debris 7 on the surface of the contact cleaning roller 2, so the debris is removed. Then, the contact cleaning roller 3 rotates and presents a clean surface for the next substrate 5 to be cleaned.

[0076] Figure 2 is a schematic cross-sectional view of a contact cleaning surface assembly according to a first embodiment of the present invention. The contact cleaning surface assembly in the form of a roller is used as a contact cleaning roller in the contact cleaning system 1 as described above. The roller 102 has a conductive path that is a conductive support 110 coated with a conductive elastomer layer 112. The roller 102 is elongated and generally cylindrical, and is attached via a mounting mechanism to a holder (not shown) used in the contact cleaning device 1. The conductive shaft 110 is coaxial with the conductive elastomer layer 112. The shaft 110 can be used to attach the roller 102 and can be used in the rotational movement of the roller 102 during use. Appropriately, such a shaft 110 is formed from a conductive material such as, for example, metal or non-metal or a conductive composite material (such as stainless steel or carbon fiber composite). The conductive shaft 110 is coated with an elastomer material 112 such as, for example, rubber or other natural or synthetic elastomer material. The elastomer material is substantially homogeneous.

[0077] The conductive elastomer layer 112 has a conductive outer surface 114 with a surface resistance of less than 1×10 9 Ω. The conductive elastomer layer 112 has a surface resistance of less than 1×10 9 Ω and has a conductive inner surface 113 that contacts the conductive shaft 110. In this way, a conductive path is formed from the outer surface 114 to the inner surface 113 and then to the shaft 110. The electrostatic charge generated at the surface 114 during the use of the contact cleaning roller 102 to clean a certain portion (not shown) is conducted through the layer 112 to the conductive path provided by the conductive shaft 110.

[0078] Figure 3a is a schematic cross-sectional view of a contact cleaning surface assembly in the form of a roller 102 according to an embodiment of the present invention. Figure 3b is a schematic enlarged cross-sectional view of a portion of the same roller 102. The roller 102 includes an elastomer layer 112 having a conductive outer surface 114 and a conductive inner surface 113. The conductive elastomer layer 112 covers and is attached to a conductive stainless steel shaft 110. The outer surface 114 is available for cleaning debris from the substrate surface in the manner described above.

[0079] In the illustrated configuration, the elastomer layer is a two-component room temperature curable silicone rubber.

[0080] The elastomer layer 112 includes a plurality of elongated single-walled carbon nanotubes 116 dispersed and embedded within the elastomer material. The elongated single-walled carbon nanotubes 116 are dispersed within the elastomer of layer 112 to form an interconnected network 118 of carbon nanotubes. The dispersion of nanotubes 116 within the elastomer is such that these elements extend in a random orientation substantially across the total thickness of the surface region 112 from the conductive inner surface 113 in contact with the conductive shaft 110 to the conductive outer surface 114. The nanotubes also extend substantially across the axial width of the roller 102. Further, when the nanotubes 116 include an electrically non-insulating material, the entire surface region 112 has a reduced electrical resistance or an increased electrical conductivity compared to the elastomer alone. In this way, the elastomer layer 112 has a bulk conductivity provided by the interconnected network 118 of carbon nanotubes.

[0081] The bulk conductivity of the elastomer material within layer 112 provides a charge path to ground for the charges generated during the cleaning operation. Thus, the roller not only has a reduced electrical resistance when new, but the effect continues over its service life even as the outer surface 114 wears.

[0082] The dispersion of the elongated carbon elements 116 and the formation of the network 118 are such that the reduced surface resistance at the conductive surfaces 113 and 114 is less than 1×10 9 Ω as measured in accordance with ANSI's ESD STM11.11-2015. Further, if the entire elastomer layer 114 has a reduced electrical resistance, the roller 102 can provide a path for conducting the static charge from the substrate surface to ground.

[0083] Figure 4 shows an elongated single-walled carbon nanotube 116 of one embodiment of the present invention. The nanotube 116 is one of a plurality of similar elongated single-walled carbon nanotubes dispersed within the elastomer layer 112.

[0084] Each single-walled carbon nanotube 116 can vary in length within the range of 5 μm to 30 μm and have a diameter within the range of 1 nm to 200 nm. In the embodiments of FIGS. 3a and 3b, the single-walled carbon nanotubes account for 0.02% of the weight of the elastomer including the elastomer layer 112.

[0085] The elongated single-walled carbon nanotubes 116 are dispersed to form a conductive network (118, FIG. 3b) that substantially extends throughout the elastomer layer 112. Thus, if a static charge begins to accumulate on the outer surface 114, the static charge will immediately dissipate from the surface substrate to the shaft 110 before damaging the substrate.

[0086] The elongated single-walled carbon nanotubes 116 enable efficient interconnection in the network 118. In other words, because the nanotubes 116 have a low weight per unit length and a large surface area per unit length, they can sufficiently reduce the electrical insulation of the elastomer with a very small amount of addition. Thus, compared to other conductive additives, only a small amount is required to ensure an effective reduction in the surface resistance of the roller 102 and to provide the bulk conductivity required in the elastomer layer.

[0087] The hollow shape of the elongated single-walled carbon nanotubes 116 provides a large surface area for a given weight of the element and ensures sufficient bonding with the surrounding elastomer so that each elongated element 116 is securely embedded within the elastomer layer 112. Thus, when the conductive surface 114 of the elastomer layer wears during use, there is no possibility that the elongated elements 116 will fall off or peel from the roller 102.

[0088] Furthermore, by embedding the elongated single-walled carbon nanotubes 116, it is ensured that the integrity of the elastomer is not impaired and, moreover, that the surface area 112 can be improved or reinforced.

[0089] The nanotubes 116 form a charge path from the conductive outer surface 114 through the interconnect network 118 to the conductive inner surface 113 and the conductive shaft 110. The charge can be grounded from the shaft 110 by any suitable grounding device (not shown).

[0090] Various variations and embodiments are envisioned for the described embodiments. For example, the grounding device can be electrically connected to the contact cleaning roller by any suitable means.

[0091] In a further embodiment of the present invention, the elastomer of the surface area 112 includes polyurethane or silicone rubber. In yet a further embodiment, the elastomer can also be a thermosetting silicone or other material suitable for contact cleaning rollers known to those skilled in the art.

[0092] In an embodiment of the present invention, the cleaning surface assembly can clean both sides of a substrate (i.e., the part to be cleaned). It can clean both sides simultaneously or separately.

[0093] Throughout the description and claims of this specification, the terms "comprise" and "include" and their inflected forms mean "including but not limited to", and are not intended (not excluding) to exclude other components, additives, elements, wholes or steps. Throughout the description and claims of this specification, the singular forms include the plural forms unless the context requires otherwise. In particular, when no number is specified, this specification should be understood to contemplate both singular and plural unless the context requires otherwise.

[0094] Features, wholes, characteristics, compositions, chemical components or groups described in connection with particular aspects, embodiments or examples of the invention are to be understood as applicable to those other aspects, embodiments or examples described herein unless they are inconsistent therewith. All of the features disclosed in this specification (including any appended claims, abstract and drawings), and / or all of the steps of any method or process so disclosed, may be combined in any combination, except combinations where at least some of such features and / or steps are mutually inconsistent. The invention is not limited to the details of any of the above embodiments. The invention extends to any novel one or any novel combination of the features disclosed in this specification (including any appended claims, abstract and drawings), or to any novel one or any novel combination of the steps of any method or process so disclosed.

Explanation of Reference Numerals

[0095] 1 Contact cleaning device 2 Contact cleaning roller 3 Adhesive roller 4 Conveyor 5 Substrate 6 Upper surface 7 Debris 8 Lower surface 102 Contact cleaning roller 110 Conductive support 112 Conductive elastomer layer 113 Conductive inner surface 114 Conductive outer surface 116 Carbon element 118 Interconnection network

Claims

1. In a contact cleaning surface assembly comprising an elastomeric layer having bulk conductivity (e.g., electrical conductivity), the elastomeric layer has a conductive surface that contacts a portion to be cleaned and a further conductive surface that makes electrical contact with a conductive path for extracting charge from the conductive layer. A contact cleaning surface assembly.

2. The contact cleaning surface assembly according to claim 1, wherein the elastomeric layer makes electrical contact with the conductive path.

3. The contact cleaning surface assembly according to claim 2, wherein the elastomeric layer is in close proximity to the conductive path.

4. The contact cleaning assembly according to claim 1 or 2, wherein the conductive path is a conductive support for the elastomeric layer.

5. The contact cleaning surface assembly according to claim 3, wherein the elastomeric layer is in close proximity to the support.

6. The contact cleaning surface assembly according to any one of claims 1 to 5, wherein the charge extraction path is from the conductive layer to the conductive path.

7. The contact cleaning surface assembly according to any one of claims 1 to 6, wherein the assembly is a roller.

8. The contact cleaning surface assembly according to any one of claims 1 to 6, wherein the assembly comprises a flat (or substantially flat) sheet.

9. The contact cleaning surface assembly according to any one of claims 1 to 8, wherein the elastomeric layer contains a conductive element.

10. The contact cleaning surface assembly according to claim 9, wherein the conductive elements form a network.

11. The contact cleaning surface assembly according to claim 9 or 10, wherein the network is electrically conductive (e.g., proximal to or in contact with each other).

12. The contact cleaning surface assembly according to any one of claims 1 to 11, wherein the elastomeric layer comprises an interconnected network of conductive elements.

13. The contact cleaning surface assembly according to claim 12, wherein the conductive elements are elongated.

14. The contact cleaning surface assembly according to claim 12 or 13, wherein the elongated conductive element is hollow.

15. The contact cleaning surface assembly according to any one of claims 12 to 14, wherein the conductive element is carbon.

16. The contact cleaning surface assembly according to any one of claims 12 to 15, wherein the conductive element is a nanotube.

17. The contact cleaning surface assembly according to any one of claims 12 to 16, wherein the conductive element is a carbon nanotube.

18. The contact cleaning surface assembly according to claim 16 or 17, wherein the nanotube is a single-walled carbon nanotube.

19. The contact cleaning surface assembly according to claim 18, wherein the carbon nanotube has a wall thickness corresponding to one carbon atom.

20. The surface resistance of the conductive surface is less than 1 × 10 9 Ω, and the contact cleaning surface assembly according to any one of claims 1 to 19.

21. The surface resistance of the conductive surface is about 1×10 6 Ω to about 1×10 9 Ω, and the contact cleaning surface assembly according to any one of claims 1 to 20.

22. The contact cleaning surface assembly according to any one of claims 4 to 21, wherein the support is a shaft.

23. The contact cleaning surface assembly according to any one of claims 1 to 22, wherein the elongated conductive element is uniformly dispersed throughout the elastomeric material.

24. The contact cleaning surface assembly according to any one of claims 9 to 23, wherein the conductive element is dispersed so as to be embedded and held within the elastomeric material.

25. The contact cleaning roller according to any one of claims 9 to 24, wherein the conductive element is randomly oriented within the elastomeric material.

26. The contact cleaning surface assembly according to any one of claims 9 to 25, wherein the conductive element has a length in the range of about 5 μm to about 30 μm.

27. The contact cleaning surface assembly according to any one of claims 9 to 26, wherein the conductive element has a diameter in the range of about 1 nm to about 200 nm.

28. The contact cleaning surface assembly according to any one of claims 9 to 28, wherein the concentration of the conductive element in the elastomer is at least about 0.015% of the weight of the elastomer.

29. The contact cleaning surface assembly according to any one of claims 1 to 28, wherein the elastomer comprises one of silicone rubber or polyurethane.

30. The contact cleaning surface assembly according to any one of claims 1 to 29, wherein the elastomer comprises one of thermosetting silicone or polyurethane.

31. The contact cleaning surface assembly according to claim 30, wherein the elastomer is a two-component room temperature curable silicone rubber.

32. In the contact cleaning surface roller, a core region, and a surface region covering the core region, and has The surface area includes an elastomer and a plurality of elongated elements dispersed within the elastomer material, and the elongated elements are formed of an electrically non-insulating material, a contact cleaning surface roller.

33. Use of the contact cleaning surface assembly according to any one of claims 1 to 31 in a contact cleaning process.

34. A contact cleaning device comprising the contact cleaning surface assembly according to any one of claims 1 to 31.

35. In a method of manufacturing a contact cleaning roller, providing an elastomer in fluid form, dispersing elongated elements formed of an electrically non-insulating material in the elastomer, providing the core region of the contact cleaning roller, covering the core region with the elastomer.

36. The method according to claim 35, further comprising subsequently curing the elastomer.

37. In a method of manufacturing a contact cleaning surface assembly, providing a prepolymer of an elastomer, adding a polymer modifier formed of an electrically non-insulating material to the prepolymer, polymerizing the prepolymer, curing the polymer to form an elastomer cleaning surface having bulk conductivity.

38. The method according to any one of claims 35 to 37, wherein after curing, the conductive elements are dispersed throughout the elastomer.

39. The method according to any one of claims 35 to 38, wherein after curing, the conductive elements form a network.

40. The method according to any one of claims 35 to 39, wherein the conductive elements are oriented in a random direction.

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