Sheet peeling device and sheet peeling method

Abstract

To provide a sheet peeling device and a sheet peeling method that can reliably cause a change specific to predetermined energy in an adhesive sheet part that is located on an adherend side in a lamination area to peel an adhesive sheet from the adherend.SOLUTION: A sheet peeling device comprises: sheet holding means 10 that holds an adhesive sheet AS pasted to an outer peripheral surface WK1 of an adherend WK; peeling means 20 that applies tensile force to the adhesive sheet AS held by the sheet holding means 10 to peel the adhesive sheet AS from the adherend WK; and energy providing means 30 that provides predetermined energy UV to the adhesive sheet AS. The adhesive sheet AS is configured to cause a change specific to the predetermined energy UV upon provision of the predetermined energy UV, and includes a lamination area ASA that is pasted and laminated on the adherend WK. The energy providing means 30 provides more predetermined energy UV to the lamination area ASA than the other areas.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a sheet peeling device and a sheet peeling method.

Background Art

[0002] A sheet peeling device for peeling an adhesive sheet attached to an annular outer peripheral surface of an adherend from the adherend is known (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the tape peeling system 70 (sheet peeling device) described in Patent Document 1, even when ultraviolet rays (predetermined energy) are irradiated on the protective tape 27 (adhesive sheet) attached to the peripheral edge (outer peripheral surface) of the wafer W (adherend), if there is an area (laminated area) where the adhesive sheet is laminated on the adherend, there is a problem that the adhesive sheet portion located on the lower side, that is, the adherend side, in the laminated area is difficult to undergo curing (change specific to the predetermined energy).

[0005] An object of the present invention is to provide a sheet peeling device and a sheet peeling method capable of surely causing a change specific to a predetermined energy in the adhesive sheet portion located on the adherend side in the laminated area and peeling the adhesive sheet from the adherend.

Means for Solving the Problems

[0006] The present invention employs the configuration described in the claims.

Effects of the Invention

[0007] According to the present invention, since a larger amount of predetermined energy is applied to the laminated region than to other regions, a change specific to the predetermined energy is surely caused in the adhesive sheet portion located on the adherend side in the laminated region, and the adhesive sheet can be peeled off from the adherend.

Brief Description of the Drawings

[0008]

Figure 1

Embodiments for Carrying Out the Invention

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In addition, the X-axis, Y-axis, and Z-axis in the present embodiment are in a perpendicular relationship with each other. The X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis perpendicular to the predetermined plane. Further, in the present embodiment, based on the case when viewed from the direction of arrow VD parallel to the Y-axis, when the direction is indicated without specifying the figure, "up" is the arrow direction of the Z-axis, "down" is the reverse direction, "left" is the arrow direction of the X-axis, "right" is the reverse direction, "front" is the arrow direction of the Y-axis, and "rear" is the reverse direction.

[0010] A sheet peeling device EA for implementing the sheet peeling method of the present invention includes a sheet holding means 10 for implementing a sheet holding step of holding an adhesive sheet AS attached to the outer peripheral surface WK1 of an adherend WK, a peeling means 20 for implementing a peeling step of applying tension to the adhesive sheet AS held by the sheet holding means 10 and peeling the adhesive sheet AS from the adherend WK, and an energy applying means 30 for implementing an energy applying step of applying ultraviolet rays UV as a predetermined energy to the adhesive sheet AS. The adhesive sheet AS is configured to cause a decrease in adhesive force as a change specific to the ultraviolet rays UV by the application of the ultraviolet rays UV, and is also attached so as to wrap around one surface WK2 and the other surface WK3 of the adherend WK, and includes a laminated region ASA that is laminated on the adherend WK. Note that the adherend WK of this embodiment has a circular shape centered on the adherend center WKC. An annular convex portion CV is provided at the outer edge of the other surface WK3. A cover sheet CS that causes a decrease in adhesive force as a change peculiar to the ultraviolet ray UV is applied to the other surface WK3 side including the annular convex portion CV. An adhesive sheet AS is attached so as to partially overlap on the cover sheet CS.

[0011] The sheet holding means 10 includes a support member 11 that directly or indirectly supports each member constituting the sheet holding means 10, a support roller 12 that supports a strip-shaped peeling sheet PS, a guide roller 13 that guides the peeling sheet PS, a slide shaft 14B that is slidable on a guide block 14A, and a sheet support base 14 that is biased in a direction away from the guide block 14A by a coil spring 14C as a biasing means. A pressing member 15 having a pressing surface 15C that presses the adhesive sheet AS is supported on the output shaft 15B of a linear motor 15A as a driving device. A cutter blade 16 as a cutting means is supported on the output shaft 16B of a linear motor 16A as a driving device. A receiving member 17 is supported on a slider 17B of a linear motor 17A as a driving device. A pressing member 18 is attached to the output shaft 18B of a rotation motor 18A as a driving device supported by the receiving member 17. A heating device 19 such as a coil heater or a heating side of a heat pipe that heats the pressing member 15 is provided. Note that the peeling sheet PS of this embodiment is a heat-sensitive adhesive sheet whose adhesive force is improved when heat as a predetermined energy is applied. By pressing and attaching the peeling sheet PS to the adhesive sheet AS with the pressing surface 15C heated by the heating device 19, the adhesive sheet AS is held via the peeling sheet PS.

[0012] The peeling means 20 includes a linear motor 21 as a driving device, a rotation motor 22 as a driving device supported by a slider 21A of the linear motor 21, a support table 23 supported by an output shaft 22A of the rotation motor 22 and having a support surface 23A capable of being adsorbed and held by a decompression means (holding means) such as a decompression pump or a vacuum ejector (not shown), an imaging means such as a camera or a projector, and various sensors such as an optical sensor or an ultrasonic sensor. The detector mechanism 24 can detect the peeling start edge AS1 and the laminated region ASA of the adhesive sheet AS. The peeling means 20 applies tension to the adhesive sheet AS through a peeling sheet PS attached to the adhesive sheet AS, and peels the adhesive sheet AS from the adherend WK. Note that the support table 23 of the present embodiment is configured to rotate about a table center 23C by a rotation motor 22.

[0013] The energy application means 30 is a relative movement means and includes a linear motion motor 31 as a driving device, a bracket 32 supported by an output shaft 31A of the linear motion motor 31, and an energy application device 33 such as a light-emitting diode or a mercury lamp supported by the bracket 32. The energy application means 30 applies more ultraviolet rays UV to the laminated region ASA than to other regions. As shown in FIG. 1(C), the energy application device 33 includes a first application device 33A that applies ultraviolet rays UV to the adhesive sheet AS from one surface WK2 side of the adherend WK, and a second application device 33B that applies ultraviolet rays UV to the adhesive sheet AS from the other surface WK3 side of the adherend WK. The energy application device 33 is configured to apply ultraviolet rays UV to the adhesive sheet AS from one surface WK2 side and the other surface WK3 side of the adherend WK. Note that the energy application means 30 of the present embodiment applies ultraviolet rays UV with a predetermined light amount to the laminated region ASA a plurality of times as energy in an amount that causes the adhesive sheet AS to reduce its adhesive force and in an amount that does not cause the cover sheet CS to reduce its adhesive force with respect to the cover sheet CS. In addition, in the present embodiment, relative movement means for relatively moving the adherend WK and the energy applying device 33 is constituted by the linear motor 31, the bracket 32C, the rotary motor 22, and the support table 23.

[0014] The operation of the above-described sheet peeling device EA will be described. First, with respect to the sheet peeling device EA in which each member is arranged at the initial position shown by the solid line in FIG. 1(A), a user of the sheet peeling device EA (hereinafter simply referred to as "user") inputs a signal for starting automatic operation via an operation means (not shown) such as an operation panel or a personal computer. Next, the user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK on the support table 23 so that the adherend center WKC of the adherend WK with the adhesive sheet AS attached to the outer peripheral surface WK1 overlaps with the table center 23C as shown in FIG. 1(A). Then, the peeling means 20 drives a decompression means (not shown) and starts adsorption and holding on the support surface 23A.

[0015] Thereafter, the peeling means 20 drives the rotation motor 22 and the detector unit 24, rotates the adherend WK in the direction of arrow RD1, and the detector unit 24 detects the peeling start edge AS1 and the lamination region ASA. Based on the detection result of the detector unit 24, when the rear part in the rotation direction of the lamination region AS1 is positioned in front of the energy application device 33 as shown in Fig. 1(A), the peeling means 20 stops driving the rotation motor 22. Next, the energy application means 30 drives the linear motion motor 31, moves the energy application device 33 forward, drives the first application device 33A and the second application device 33B, emits ultraviolet light UV, and then the peeling means 20 drives the rotation motor 22, rotates the adherend WK in the direction of arrow RD1, and irradiates the cover sheet CS and the adhesive sheet AS passing between the first and second application devices 33A and 33B with ultraviolet light UV as shown in Fig. 1(B). Then, after the adherend WK rotates 360 degrees, when another region adjacent to the rear part in the rotation direction of the lamination region ASA is positioned to the right of the energy application device 33, the energy application means 30 stops driving the first application device 33A and the second application device 33B, stops emitting ultraviolet light UV, and the energy application means 30 drives the linear motion motor 31 to return the energy application device 33 to the initial position. As a result, ultraviolet light UV is applied to the lamination region ASA a plurality of times, and more ultraviolet light UV is applied to the lamination region ASA than to other regions, causing the adhesive force of the adhesive sheet AS portion located on the adherend WK side in the lamination region ASA to decrease.

[0016] After that, the rotation of the adherend WK in the direction of arrow RD1 continues. When the rear part in the rotation direction of the peeling start edge AS1 is positioned to the right of the pressing member 15, the peeling means 20 stops driving the rotation motor 22 (see Fig. 1(D)). Next, the sheet holding means 10 drives the linear motor 17A, and as shown in Fig. 1(B), presses the receiving member 17 against the sheet support base 14 and moves the sheet support base 14 backward together with the receiving member 17 to position the tip of the peeling sheet PS on the receiving member 17. Then, the sheet holding means 10 drives the rotation motor 18A, and as shown by the two-dot chain line in Fig. 1(B), sandwiches and holds the tip of the peeling sheet PS between the pressing member 18 and the receiving member 17. Then, the linear motor 17A is driven, and as shown in Fig. 1(D), the receiving member 17 is returned to the initial position to pull out the peeling sheet PS by a predetermined length.

[0017] Next, the sheet holding means 10 drives the linear motor 15A, and as shown by the two-dot chain line in Fig. 1(D), drives the heating device 19 to heat the pressing member 15. While pressing the peeling sheet PS against the rear part in the rotation direction of the peeling start edge AS1 with the pressing member 15, the peeling sheet PS is heated and attached to the adhesive sheet AS. Then, the sheet holding means 10 drives the linear motor 16A, and as shown by the two-dot chain line in Fig. 1(D), inserts the cutter blade 16 into the concave groove 14D to cut the peeling sheet PS. Then, the linear motors 15A and 16A are driven to return the pressing member 15 and the cutter blade 16 to the initial positions.

[0018] Next, the peeling means 20 drives the linear motor 21 and the rotation motor 22, and as shown in Fig. 1(E), rotates the adherend WK in the direction of arrow RD1 while moving the adherend WK to the right. As a result, tension is applied to the adhesive sheet AS via the peeling sheet PS, and the adhesive sheet AS is peeled off from the adherend WK. At this time, since ultraviolet rays UV are applied to the cover sheet CS so as not to cause a decrease in adhesive force, the cover sheet CS is not peeled off from the adherend WK.

[0019] Thereafter, as shown by the two-dot chain line in FIG. 1(E), when the entire adhesive sheet AS is peeled off from the adherend WK and the user or conveying means (not shown) holds the adhesive sheet AS, the peeling means 20 stops driving the linear motor 21 and the rotation motor 22. Next, when the sheet holding means 10 drives the rotation motor 18A to return the pressing member 18 to the initial position, the user or conveying means (not shown) conveys the held adhesive sheet AS to a disposal position (not shown). Then, when the peeling means 20 stops driving a decompression means (not shown) and releases the adsorption and holding on the support surface 23A, after the user or conveying means (not shown) conveys the adherend WK to the next process, the peeling means 20 drives the linear motor 21 to return the support table 23 to the initial position, and thereafter the same operations as described above are repeated.

[0020] According to the above-described embodiment, since more ultraviolet rays UV are applied to the laminated region ASA than to other regions, the adhesive force of the portion of the adhesive sheet AS located on the adherend WK side in the laminated region ASA is surely reduced, and the adhesive sheet AS can be peeled off from the adherend WK.

[0021] The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps. Moreover, they are not limited at all to the configurations and steps of merely one embodiment shown in the above-described embodiment. For example, the sheet holding means may be any means that can hold an adhesive sheet attached to the outer peripheral surface of the adherend, and is not limited as long as it is within the technical scope in light of the common general knowledge in the art at the time of filing (the same applies to other means and steps).

[0022] The sheet holding means 10 may cut the peeling sheet PS after peeling the adhesive sheet AS from the adherend WK, or may cut the peeling sheet PS before attaching the peeling sheet PS to the adherend WK, or may employ a single-sheet peeling sheet PS, or may not cut the peeling sheet PS, or may not have the cutting means 16, or may hold and pull out the peeling sheet PS while irradiating the adhesive sheet AS with ultraviolet rays UV. Instead of or in combination with the receiving member 17, the rotation motor 18A, and the pressing member 18, a configuration for holding the peeling sheet PS by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a drive device, etc. may be adopted. For example, the peeling sheet PS may be attached to the adhesive sheet AS attached to the outer peripheral surface WK1 of the adherend WK by a drive device such as an articulated robot. The pressing surface 15C may have any shape such as, for example, a concave arc shape, a convex arc shape, a V shape, an inverted V shape, a U shape, an inverted U shape, a concavo-convex rectangular shape, a linear shape, or other shapes.

[0023] As the peeling means 20, a support table 23 that cannot perform adsorption and holding on the support surface 23A may be adopted, or the adherend WK may be held by a gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a drive device, etc. There may also be an upper pressing member that sandwiches and holds the adherend WK with the support table 23. In the embodiment, with the sheet holding means 10 stationary, the adherend WK is separated from the sheet holding means 10 and the adherend WK is rotated to peel the adhesive sheet AS from the adherend WK. However, with the adherend WK stationary, the sheet holding means 10 may be separated from the adherend WK and the sheet holding means 10 may be rotationally moved around the adherend WK to peel the adhesive sheet AS from the adherend WK. Also, while moving the sheet holding means 10 to the left, the adherend WK may be separated from the sheet holding means 10 and the adherend WK may be rotated to peel the adhesive sheet AS from the adherend WK. Or, while moving the sheet holding means 10 to the left and rotationally moving the sheet holding means 10 around the adherend WK, the adherend WK may be separated from the sheet holding means 10 to peel the adhesive sheet AS from the adherend WK. Instead of the linear motor 21, the rotation motor 22, and the support table 23, the sheet holding means 10 and the adherend WK may be relatively moved by a drive device such as an articulated robot or other devices to peel the adhesive sheet AS from the adherend WK.

[0024] The energy applying means 30 can apply various types of energy as predetermined energy, such as electromagnetic waves like ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, heating media like hot water or hot air, cooling media like cold water or cold air, etc. Any energy that can cause a change specific to that energy in the adhesive sheet AS considering the characteristics, properties, nature, material, composition, and structure of the adhesive sheet AS is acceptable. It may be provided at a location other than the positions shown in the above embodiment. As long as it is a position where predetermined energy can be applied to the adhesive sheet AS from one surface WK2 side and the other surface WK3 side of the adherend WK, it may be provided anywhere. When irradiating the ultraviolet ray UV to the lamination region ASA, the adherend WK may be rotated at the first rotation speed, and when irradiating the ultraviolet ray UV to other regions, the adherend WK may be rotated at the second rotation speed faster than the first rotation speed so as to apply more ultraviolet ray UV to the lamination region ASA than to other regions. Or, the ultraviolet ray UV may be irradiated to the lamination region ASA at a predetermined first illuminance, and the ultraviolet ray UV with an illuminance lower than the first illuminance may be irradiated to other regions so as to apply more ultraviolet ray UV to the lamination region ASA than to other regions. Or, ultraviolet ray UV with a predetermined light amount may be applied to the lamination region ASA three or more times. It may further include a cover that surrounds part or all of the adherend WK or the energy applying device 33 so that the ultraviolet ray UV does not leak. It may have a configuration that condenses the ultraviolet ray UV on the adhesive sheet AS, and the cover sheet CS may be configured not to be irradiated with the ultraviolet ray UV. It may be configured to irradiate the adhesive sheet AS with the ultraviolet ray UV all at once without relatively moving the adherend WK and the energy applying device 33, and the illuminance of the ultraviolet ray UV irradiated to the lamination region ASA may be made higher than the illuminance of the ultraviolet ray UV irradiated to other regions. The linear motion motor 31 and the bracket 32 may not be provided. At least one of the first applying device 33A and the second applying device 33B may be provided in a plurality on a circumference centered on the adherend center WKC when rotating the adherend WK. The first applying device 33A and the second applying device 33B may irradiate the same light amount of ultraviolet ray UV or different light amounts of ultraviolet ray UV. Regarding the cover sheet CS,The cover sheet CS may be configured to apply an amount of energy that causes a change specific to a predetermined energy, or may be configured to condense ultraviolet rays UV onto the adhesive sheet AS and not irradiate the cover sheet CS with ultraviolet rays UV. The energy applying device 33 may include a third applying device 33C that applies ultraviolet rays UV to the adhesive sheet AS from the outer peripheral surface WK1 side of the adherend WK as shown by the two-dot chain line in FIG. 1(C). The energy applying device 33 may be composed only of the first applying device 33A. After applying ultraviolet rays UV to one surface WK2, either the first applying device 33A or the adherend WK may be turned upside down to apply ultraviolet rays UV to the other surface WK3. Considering the thickness of the adherend WK, the energy applying device 33 may be provided with a driving device that moves the energy applying device 33 in the thickness direction (vertical direction) of the adherend WK. The energy applying device 33 may be separated from and approximated to the adherend center WKC direction according to the size of the adherend WK by relative movement means. Instead of or in combination with the rotation motor 22 and the support table 23, the relative movement means may be provided with a driving device that moves the energy applying device 33 along the circumferential direction of the outer peripheral surface WK1.

[0025] The adhesive sheet AS may not be pasted so as to wrap around both one surface and the other surface of the adherend, or may be pasted so as to wrap around either one surface or the other surface of the adherend, or may be pasted so as not to wrap around either one surface or the other surface of the adherend. The planar shape may be any shape such as a straight line shape, a curved shape, a refracted shape, etc. The surface shape of the adhesive sheet AS pasted on the outer peripheral surface WK1 of the adherend WK may be the same as or different from the shape of the outer peripheral surface WK1 of the adherend WK. The change specific to the predetermined energy caused by the adhesive sheet AS may be any change such as curing, softening, shrinking, expanding, vaporizing, liquefying, solidifying, discoloring, oxidizing, permeating, fixing, decreasing adhesive force, or increasing adhesive force.

[0026] The peeling sheet PS may be a pressure-sensitive adhesive sheet or a heat-sensitive adhesive sheet. In addition to the adhesive sheet, for example, in addition to adhesive tapes, adhesive sheets, and adhesive tapes, those in which an adhesive medium such as an adhesive or an adhesive is laminated on a base material such as metal, resin, or rubber may also be used. As the predetermined energy, any energy such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, heating media such as hot water or hot air, or cooling media such as cold water or cold air may be applied to improve the adhesive force, or the adhesive force may not be improved by the predetermined energy.

[0027] On the adherend WK, a convex portion CV may be provided at the outer edge portion of one surface WK2, or convex portions CV may be provided on both the outer edge portion of one surface WK2 and the outer edge portion of the other surface WK2. Or convex portions CV may be provided in portions other than the outer edge portion of one surface WK2 or portions other than the outer edge portion of the other surface WK2, etc. Or convex portions CV may not be provided on one surface WK2 or the other surface WK2. Or a cover sheet CS may be attached to a region not including the convex portion CV, or a cover sheet CS may be attached to at least one of one surface WK2 and the other surface WK3, or the cover sheet CS may not be attached. The change specific to the predetermined energy caused by the cover sheet CS may be any change such as curing, softening, shrinking, expanding, vaporizing, liquefying, solidifying, discoloring, oxidizing, permeating, fixing, decreasing the adhesive force, or increasing the adhesive force. The cover sheet CS may not cause a change specific to the predetermined energy by the application of the predetermined energy, or may not be attached to the adherend WK.

[0028] In the present invention, the materials, types, shapes, etc. of the adhesive sheet AS, the release sheet PS, the cover sheet CS, and the adherend WK are not particularly limited. For example, the adhesive sheet AS, the release sheet PS, and the adherend WK may be circular, elliptical, polygonal such as triangular or quadrilateral, or other shapes. Also, the adhesive sheet AS and the release sheet PS may be of an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When heat-sensitive adhesive adhesive sheet AS, release sheet PS, and cover sheet CS are employed, they may be adhered by an appropriate method such as providing heating means such as a suitable coil heater or the heating side of a heat pipe for heating the adhesive sheet AS, the release sheet PS, or the cover sheet CS. Further, such an adhesive sheet AS, release sheet PS, or cover sheet CS may be, for example, a single-layer one consisting only of an adhesive layer, a two-layer one in which a base material and an adhesive layer are laminated, a three-layer or more-layer one in which one or more intermediate layers are laminated between the base material and the adhesive layer, a three-layer or more-layer one in which one or more cover layers are laminated on the upper surface of the base material, one in which the base material, the intermediate layer, or the cover layer is detachably provided, a single-layer double-sided adhesive sheet consisting only of an adhesive layer, a double-sided adhesive sheet in which adhesive layers are laminated on both outermost surfaces of one or more intermediate layers, or the like, and may be of any type. Furthermore, as the adherend WK, for example, it may be a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, pottery, a wooden board, or resin, or a composite formed of two or more of them, and any form of member or article, etc. may also be targeted. Note that the adhesive sheet AS or the cover sheet CS may be, for example, any sheet, film, tape, etc. such as an information description label, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a resin sheet for forming a recording layer.

[0029] The drive equipment in the above-described embodiment may employ, individually, electric equipment such as a rotary motor, a linear motor, a linear motor, a single-axis robot, a so-called multi-joint robot having two or three or more joints, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder, or a combination of those electric equipment and actuators directly or indirectly, or equipment capable or incapable of torque control, speed control, etc. for the output parts of those electric equipment and actuators may be employed.

[0030] In the above-described embodiment, any object (hereinafter referred to as "object A") and an object that moves relative to the object A (hereinafter referred to as "object B"), that is, the relatively moving objects A and B, may be such that object B moves relative to object A which does not move, or object A moves relative to object B which does not move, or both object A and object B may move. As long as the results achieved by the movement are the same, either object A or object B may move. When a rotating member such as a roller is employed, a driving device for rotationally driving the rotating member may be provided. The surface of the rotating member or the rotating member itself may be composed of a deformable member such as rubber or resin, or may be composed of a member that does not deform. Instead of a roller, other members such as a shaft or blade that rotates or does not rotate may be employed. When a pressing means or pressing member such as a pressing roller or pressing head that presses an object to be pressed is employed, in addition to or in combination with those exemplified above, in addition to a roller, round bar, blade material, brush-shaped member, a means by blowing a gas such as air or gas may be employed. The pressing member may be composed of a deformable member such as rubber, resin, or sponge, or may be composed of a member that does not deform. When a peeling means or peeling member such as a peeling plate or peeling roller that peels an object to be peeled is employed, in addition to or in combination with those exemplified above, members such as a plate-shaped member, round bar, or roller may be employed. The peeling member may be composed of a deformable member such as rubber or resin, or may be composed of a member that does not deform. When a supporting (holding) means or supporting (holding) member that supports (holds) a supported member (held member) is employed, a configuration that supports (holds) the supported member by a gripping means such as a chuck motor or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving device, etc. may be adopted. When a cutting means or cutting member that cuts a member to be cut or forms a notch or cutting line in the member to be cut is employed, in addition to or in combination with those exemplified above, a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying of gas or liquid, etc. for cutting may be adopted, orIt may be moved and cut by combining appropriate driving devices, or when biasing means are employed, it may be constituted by a spring, rubber, resin, driving device, or the like.

Explanation of Signs

[0031] EA... Sheet peeling device 10... Sheet holding means 20... Peeling means 30... Energy imparting means AS... Adhesive sheet ASA... Laminated area UV... Ultraviolet rays (predetermined energy) WK... Adherend WK1... Outer peripheral surface

Claims

1. Sheet holding means for holding an adhesive sheet attached to the outer peripheral surface of an adherend; Peeling means for applying tension to the adhesive sheet held by the sheet holding means and peeling the adhesive sheet from the adherend; Energy applying means for applying predetermined energy to the adhesive sheet, comprising: The adhesive sheet is configured to undergo a change specific to the predetermined energy by application of the predetermined energy, and has a laminated region laminated on the adherend; The energy applying means applies more of the predetermined energy to the laminated region than to other regions, a sheet peeling device characterized by this.

2. The energy applying means applies the predetermined energy to the laminated region a plurality of times, the sheet peeling device according to claim 1, characterized by this.

3. A sheet holding step of holding an adhesive sheet attached to the outer peripheral surface of an adherend; A peeling step of applying tension to the adhesive sheet held in the sheet holding step and peeling the adhesive sheet from the adherend; An energy applying step of applying predetermined energy to the adhesive sheet, implementing: The adhesive sheet is configured to undergo a change specific to the predetermined energy by application of the predetermined energy, and has a laminated region laminated on the adherend; In the energy applying step, more of the predetermined energy is applied to the laminated region than to other regions, a sheet peeling method characterized by this.

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