Element array circuit and sensor

Abstract

To provide an element array circuit having high operation reliability.SOLUTION: In an element array circuit 1, a plurality of impedance elements R (1 and 1) to R (m and n) are connected to both one of first wirings A (A1-Am) and one of a plurality of second wirings B (B1-Bn). Each of a first selection parts SL1 is connected to a corresponding one of the first ends of the first wiring A, and selects one of a first option to apply a first potential and a second option to apply a second potential. Each of second selection parts SL2 is connected to a corresponding one of the second ends of the first wiring A, and selects one of a third option to apply the first potential and a fourth option to apply the second potential.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an element array circuit having an element array in which a plurality of impedance elements are arranged, and a sensor including the same.

Background Art

[0002] Conventionally, a resistor element array circuit having a plurality of resistor elements arranged in a matrix has been disclosed. Such a resistor element array circuit is used, for example, as an infrared detection circuit (see, for example, Patent Document 1). In such an infrared detection circuit, a plurality of infrared-sensitive resistors such as a thermistor whose resistance value changes according to a temperature change are arranged.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, in an element array circuit including a plurality of sensor elements, it is desired to obtain outputs from more sensor elements even when a part thereof is damaged such as a disconnection.

Means for Solving the Problems

[0005] The first element array circuit according to an embodiment of the present disclosure includes one or more first wirings, a plurality of second wirings, a plurality of impedance elements, one or more operational amplifiers, one or more first selection units, and one or more second selection units. Each of the one or more first wirings includes one first end and one second end. The plurality of second wirings extend in a direction different from that of the one or more first wirings. Each of the plurality of impedance elements is connected to both one of the one or more first wirings and one of the plurality of second wirings. Each of the one or more operational amplifiers has one positive input terminal set to a first potential and one negative input terminal connectable to one of the plurality of second wirings. Each of the one or more first selection units is connected to a corresponding one of the one or more first ends and selects one option from a first option group including a first option of applying the first potential to the corresponding one of the one or more first ends and a second option of applying a second potential different from the first potential to the corresponding one of the one or more first ends. Each of the one or more second selection units is connected to a corresponding one of the one or more second ends and selects one option from a second option group including a third option of applying the first potential to the corresponding one of the one or more second ends and a fourth option of applying the second potential to the corresponding one of the one or more second ends.

[0006] The second element array circuit according to an embodiment of the present disclosure includes a plurality of first wirings, one or more second wirings, a plurality of impedance elements, one or more operational amplifiers, a plurality of first selection units, and a plurality of second selection units. Each of the plurality of first wirings includes one first end portion and one second end portion. The one or more second wirings extend in a direction different from each of the plurality of first wirings. Each of the plurality of impedance elements is connected to both one of the plurality of first wirings and one of the one or more second wirings. Each of the one or more operational amplifiers has one positive input terminal set to a first potential and one negative input terminal connectable to one of the one or more second wirings. Each of the plurality of first selection units is connected to a corresponding one of the plurality of first end portions and includes a first option of applying the first potential to the corresponding one of the plurality of first end portions and a second option of applying a second potential different from the first potential to the corresponding one of the plurality of first end portions, and selects one option from the first option group. Each of the plurality of second selection units is connected to a corresponding one of the plurality of second end portions and includes a third option of applying the first potential to the corresponding one of the plurality of second end portions and a fourth option of applying the second potential to the corresponding one of the plurality of second end portions, and selects one option from the second option group.

Advantages of the Invention

[0007] According to the element array circuit according to an embodiment of the present disclosure, even when a disconnection occurs in a part of each first wiring, outputs can be obtained from more impedance elements. Therefore, the element array circuit according to an embodiment of the present disclosure has high operation reliability.

Brief Description of the Drawings

[0008]

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[0009] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The description will be made in the following order. 1. First Embodiment (First Example of an Element Array Circuit Having a Plurality of Column Lines and a Plurality of Operational Amplifiers) 2. Second Embodiment (Second Example of Element Array Circuit Comprising a Plurality of Row Lines and a Plurality of Operational Amplifiers) 3. Third Embodiment (Example of Sensor Device Comprising an Element Array Circuit) 4. Modification Example

[0010] <1. First Embodiment> [Overall Configuration Example of Element Array Circuit 1] FIG. 1 is a circuit diagram schematically showing a configuration example of an element array circuit 1 according to the first embodiment of the present disclosure. The element array circuit 1 is mounted on, for example, an infrared thermograph, and is configured to output an output voltage according to the intensity of infrared rays irradiated on the element array circuit 1.

[0011] As shown in FIG. 1, the element array circuit 1 includes, for example, a plurality of row lines A (denoted as A1 to Am in FIG. 1), a plurality of column lines B (denoted as B1 to Bn in FIG. 1), a plurality of resistance elements R (denoted as R(1,1) to R(m,n) in FIG. 1), a plurality of first selection units SL1 (denoted as SL1-1 to SL1-m in FIG. 1), a plurality of second selection units SL2 (denoted as SL2-1 to SL2-m in FIG. 1), a plurality of third selection units SL3 (denoted as SL3-1 to S3-n in FIG. 1), a plurality of fourth selection units SL4 (denoted as SL4-1 to S4-n in FIG. 1), a plurality of operational amplifiers OP (OP1 (denoted as OP1-1 to OP1-n in FIG. 1), OP2 (denoted as OP2-1 to OP2-n in FIG. 1)), a plurality of capacitor elements CP (CP1 (denoted as CP1-1 to CP1-n in FIG. 1), CP2 (CP2-1 to CP2-n in FIG. 1)), and a control unit CTRL. Note that FIG. 1 illustrates a state in which m row lines A are arranged, but the number of the plurality of row lines A can be arbitrarily set. Similarly, FIG. 1 illustrates a state in which n column lines B are arranged, but the number of the plurality of column lines B can be arbitrarily set. Also, in FIG. 1, the resistance element R connected to both the a-th row line Aa among the m row lines A1 to Am and the b-th column line Bb among the n column lines B1 to Bn is denoted as R(a,b). The same notation is used in the drawings after FIG. 1. Also, the plurality of row lines A and the plurality of column lines B are not in direct contact.

[0012] (Solder wire A) The solder wire A is a specific example corresponding to the "first wiring" of the present disclosure. Each of the plurality of solder wires A extends in a first direction, and the plurality of solder wires A are arranged adjacent to each other in a second direction different from the first direction. In the example of FIG. 1, the plurality of solder wires A each extend in the Y-axis direction, for example, and are arranged adjacent to each other in the X-axis direction orthogonal to the Y-axis direction.

[0013] The first end SA (denoted as SA1 to SAm in FIG. 1) of each of the plurality of solder wires A (denoted as A1 to Am in FIG. 1) can be connected to the DC power supply PS1 via the first switch SWR1 (denoted as SWR1-1 to SWR1-m in FIG. 1) of the first selection unit SL1 and can be connected to the DC power supply PS2 via the switch SWR2 (denoted as SWR2-1 to SWR2-m in FIG. 1) of the first selection unit SL1. In addition, the first ends of the plurality of resistance elements R are connected to each of the plurality of solder wires A. In the example of FIG. 1, n resistance elements R are connected in parallel to one solder wire A. Specifically, for the solder wire A1 extending in the Y-axis direction, the first ends of the resistance elements R(1,1) to R(1,n) arranged in the Y-axis direction in order from the side closer to the first end SA1 are connected. Similarly, for the solder wire A2 extending in the Y-axis direction, the first ends of the resistance elements R(2,1) to R(2,n) arranged in the Y-axis direction in order from the side closer to the first end SA2 are connected, and for the solder wire Am extending in the Y-axis direction, the first ends of the resistance elements R(m,1) to R(m,n) arranged in the Y-axis direction in order from the side closer to the first end SAm are connected.

[0014] In the example of FIG. 1, the second end EA (denoted as EA1 to EAm in FIG. 1) on the side opposite to the first end SA of each of the plurality of solder wires A (denoted as A1 to Am in FIG. 1) can be connected to the DC power supply PS1 via the third switch SWR3 (denoted as SWR3-1 to SWR3-m in FIG. 1) of the second selection unit SL2 and can be connected to the DC power supply PS2 via the fourth switch SWR4 (denoted as SWR4-1 to SWR4-m in FIG. 1) of the second selection unit SL2.

[0015] When measuring a resistance element R (for convenience, referred to as a selected resistance element RS) selected from a plurality of resistance elements R in the element array circuit 1, the first to fourth switches SWR1 to 4 are each in the following state (for convenience, referred to as state A). First, one first switch SWR1 corresponding to the selected lead wire AS is set to the conducting state so that a first potential V1 is applied from the DC power supply PS1 to the first end SA of one lead wire A (for convenience, referred to as the selected lead wire AS) corresponding to the selected resistance element RS. Also, one second switch SWR2 corresponding to the non-selected lead wire AU is set to the conducting state so that a second potential V2 (≠V1) is applied from the DC power supply PS2 to the first end SA of all lead wires A other than the selected lead wire AS (for convenience, referred to as the non-selected lead wire AU). Therefore, one second switch SWR2 corresponding to the selected lead wire AS is set to the non-conducting state, and one first switch SWR1 corresponding to the non-selected lead wire AU is set to the non-conducting state. On the other hand, one third switch SWR3 corresponding to the selected lead wire AS is set to the conducting state so that a first potential V1 is also applied from the DC power supply PS1 to the second end EA of the selected lead wire AS. One fourth switch SWR4 corresponding to the non-selected lead wire AU is set to the conducting state so that a second potential V2 is also applied from the DC power supply PS2 to the second end EA of the non-selected lead wire AU. Therefore, the fourth switch SWR4 corresponding to the selected lead wire AS is set to the non-conducting state, and the third switch SWR3 corresponding to the non-selected lead wire AU is set to the non-conducting state. However, the fourth switch SWR4 corresponding to the non-selected lead wire AU may be in the non-conducting state. The above is state A. State A is a state in which the first potential V1 is applied to both the first end SA and the second end EA of the selected lead wire AS. State A is a specific example corresponding to the "second state" of the present disclosure. Note that, as an example of State A, FIG. 1 shows a state in which resistance elements R(1,1) to R(1,n) are selected. That is, in FIG. 1, when the first switch SWR1-1 is turned on, a first potential V1 is applied from the DC power supply PS1 to the first end SA1 of the selection row line A1 corresponding to the selected resistance elements R(1,1) to R(1,n). At the same time, when the second switches SWR2-2 to SWR2-m are turned on, a second potential V2 (≠V1) is applied from the DC power supply PS2 to the first ends SA2 to SAm of all non-selection row lines A2 to Am other than the selection row line A1. At this time, all of the first switches SWR1-2 to SWR1-m connected to the non-selection row lines A2 to Am are in the non-conducting state, and the switch SWR2-1 connected to the selection row line A1 is also in the non-conducting state. Either one of the first potential V1 and the second potential V2 may be 0V.

[0016] Also, when measuring the selected resistance element RS in the element array circuit 1, the first to fourth switches SWR1 to 4 may be set to the following states (for convenience, referred to as State B). In State B, first, one first switch SWR1 corresponding to the selection row line AS is turned on, the second switch SWR2 corresponding to the non-selection row line AU is turned on, one second switch SWR2 corresponding to the selection row line AS is in the non-conducting state, and the first switch SWR1 corresponding to the non-selection row line AU is in the non-conducting state. That is, the states of the first switch SWR1 and the second switch SWR2 in State B are the same as those in State A. However, in State B, the second end EA of the selection row line AS is an open end. That is, one third switch SWR3 corresponding to the selection row line AS is in the non-conducting state, and one fourth switch SWR4 corresponding to the selection row line AS is in the non-conducting state. All third switches SWR3 are in the non-conducting state. The fourth switch SWR4 corresponding to the non-selection row line AU may be either in the conducting state or in the non-conducting state. The above is in state B. State B is a state in which a first potential V1 is applied to the first end SA of the selection row line AS, and the second end EA of the selection row line AS is an open end. State B is a specific example corresponding to the "first state" of the present disclosure.

[0017] (Column line B) Column line B is a specific example corresponding to the "second wiring" of the present disclosure. Each of the plurality of column lines B extends in a direction different from that of the plurality of row lines A. For example, each of the plurality of column lines B extends in a second direction, and the plurality of column lines B are arranged adjacent to each other in a first direction different from the second direction. In the example of FIG. 1, the plurality of column lines B each extend, for example, in the X-axis direction and are arranged adjacent to each other in the Y-axis direction.

[0018] The third end SB (denoted as SB1 to SBn in FIG. 1) of each of the plurality of column lines B is connected to a corresponding one of the plurality of operational amplifiers OP1 (denoted as OP1-1 to OP1-n in FIG. 1) via a third selection unit SL3. Specifically, the third end SB1 of column line B1 is connected to the negative input terminal T2 of operational amplifier OP1-1 via a fifth switch SWC1-1 to be described later. The third end SB2 of column line B2 is connected to the negative input terminal T2 of operational amplifier OP1-2 via a fifth switch SWC1-2 to be described later. The third end SBn of column line Bn is connected to the negative input terminal T2 of operational amplifier OP1-n via a fifth switch SWC1-n to be described later.

[0019] Also, for each of the plurality of column lines B, the second ends of the plurality of resistance elements R are connected. The second end of the resistance element R is the end on the side opposite to the first end connected to the brazing wire A among the resistance elements R. In the example of FIG. 1, m resistance elements R are connected in parallel to one column line B. Specifically, for the column line B1 extending in the X-axis direction, the second ends of the resistance elements R(1,1) to R(m,1) arranged in the X-axis direction in order from the side closer to the third end SB1 are connected. Similarly, for the column line B2 extending in the X-axis direction, the second ends of the resistance elements R(1,2) to R(m,2) arranged in the X-axis direction in order from the side closer to the third end SB2 are connected, and for the column line Bn extending in the X-axis direction, the second ends of the resistance elements R(1,n) to R(m,n) arranged in the X-axis direction in order from the side closer to the third end SBn are connected. In the configuration example of FIG. 1, the second end of the resistance element R(1,1) is connected to the third end SB1 of the column line B1, the second end of the resistance element R(1,2) is connected to the third end SB2 of the column line B2, and the second end of the resistance element R(1,n) is connected to the third end SBn of the column line Bn.

[0020] The fourth ends EB (denoted as EB1 to EBn in FIG. 1) of the plurality of column lines B are connected to a corresponding one of the plurality of operational amplifiers OP2 (denoted as OP2-1 to OP2-n in FIG. 1) via the fourth selection unit SL4. Specifically, the fourth end EB1 of the column line B1 is connected to the negative input terminal T5 of the operational amplifier OP2-1 via a sixth switch SWC2-1 described later. The fourth end EB2 of the column line B2 is connected to the negative input terminal T5 of the operational amplifier OP2-2 via a sixth switch SWC2-2 described later. The fourth end EBn of the column line Bn is connected to the negative input terminal T5 of the operational amplifier OP2-n via a sixth switch SWC2-n described later. In the configuration example of FIG. 1, the second end of the resistance element R(m,1) is connected to the third end SB1 of the column line B1, the second end of the resistance element R(m,2) is connected to the fourth end EB2 of the column line B2, and the second end of the resistance element R(m,n) is connected to the fourth end EBn of the column line Bn.

[0021] (Resistance element R) The resistance element R is a specific example corresponding to the "impedance element" of the present disclosure. Each of the plurality of resistance elements R is connected to both one of the plurality of brazing wires A and one of the plurality of column wires B. Each of the plurality of resistance elements R has a first end connected to the brazing wire A and a second end connected to the column wire B. As described above, in the example of FIG. 1, n resistance elements R are connected to each of the plurality of brazing wires A, and m resistance elements R are connected to each of the plurality of column wires B. There is one resistance element R connected to both one of the plurality of brazing wires A and one of the plurality of column wires B. Therefore, by selecting one brazing wire A from the plurality of brazing wires A and one column wire B from the plurality of column wires B, one resistance element R can be specified.

[0022] The resistance element R is a part of an infrared light receiving element that converts infrared light condensed by, for example, a lens or the like into an electrical signal. Specifically, it is a resistance change layer that exhibits a resistance change due to, for example, a temperature change. The resistance change layer is, for example, a thermistor film. The thermistor film contains, for example, vanadium oxide, amorphous silicon, polycrystalline silicon, an oxide having a spinel-type crystal structure containing manganese, titanium oxide, or yttrium-barium-copper oxide. Further, an infrared absorption layer that absorbs infrared light and generates heat is provided adjacent to the thermistor film. The infrared absorption layer contains, for example, silicon oxide (SiO2), aluminum oxide (Al2O3), silicon nitride (Si3N4), or aluminum nitride (AlN). The resistance element R is configured such that a temperature change of the infrared absorption layer and a temperature change of the resistance change layer occur according to the intensity of the received infrared light, and as a result, the resistance value of the resistance change layer changes.

[0023] (First selection unit SL1) Each of the plurality of first selection units SL1 (SL1-1 to SL1-m) is connected to a corresponding one of the first ends SA (SA1 to SAm) of the plurality of brazing wires A (A1 to Am). Each of the plurality of first selection units SL1 (SL1-1 to SL1-m) includes a first option of applying a first potential V1 to a corresponding one of the first ends SA (SA1 to SAm) of the plurality of brazing wires A based on a command from the control unit CTRL, and a second option of applying a second potential V2 to a corresponding one of the first ends SA (SA1 to SAm). The second potential V2 is different from the first potential V1. The first selection unit SL1-1 has, for example, a first switch SWR1-1 and a second switch SWR2-1. The first selection unit SL1-2 has, for example, a first switch SWR1-2 and a second switch SWR2-2. The first selection unit SL1-m has, for example, a first switch SWR1-m and a second switch SWR2-m.

[0024] Each of the plurality of first switches SWR1 (SWR1-1 to SWR1-m) is provided between the first end SA of the corresponding one brazing wire A (A1 to Am) and a DC power supply PS1 as a first potential part set to the first potential V1. Each of the plurality of second switches SWR2 (SWR2-1 to SWR2-m) is provided between the first end SA of the corresponding one brazing wire A (A1 to Am) and a DC power supply PS2 as a second potential part set to the second potential V2. A corresponding one of the first ends SA (SA1 to SAm) of the plurality of brazing wires A is connected to each of the plurality of first switches SWR1 (SWR1-1 to SWR1-m) and each of the plurality of second switches SWR2 (SWR2-1 to SWR2-m). Each of the plurality of first switches SWR1 (SWR1-1 to SWR1-m) performs a selection operation of selecting either a conductive state or a non-conductive state between a corresponding one of the first ends SA (SA1 to SAm) of the plurality of brazing wires A and the DC power supply PS1. Each of the plurality of second switches SWR2 (SWR2-1 to SWR2-m) performs a selection operation of selecting either a conductive state or a non-conductive state between a corresponding one of the first ends SA (SA1 to SAm) of the plurality of brazing wires A and the DC power supply PS2.

[0025] Of the plurality of first selection units SL1 (SL1-1 to SL1-m), one first selection unit SL1 corresponding to the first end SA of the selection row line AS selected by the control unit CTRL applies a first potential V1 to the first end SA of the selection row line AS by connecting the first end SA of the selection row line AS to the DC power supply PS1. On the other hand, among the plurality of first selection units SL1 (SL1-1 to SL1-m), one or more first selection units SL1 corresponding to the first end SA of the non-selection row line AU apply a second potential V2 to the first end SA of the non-selection row line AU by connecting the first end SA of the non-selection row line AU to the DC power supply PS2. Note that each of the plurality of first selection units SL1 can also select an option in which the first end SA of the corresponding one row line A is an open end. In that case, each of the plurality of first selection units SL1 sets both the first switch SWR1 and the second switch SWR2 corresponding to the first end SA of the corresponding one row line A to a non-conductive state. The operation of each of the plurality of first selection units SL1 (SL1-1 to SL1-m) is controlled by the control unit CTRL. That is, the switching operation of each of the plurality of first switches SWR1 (SWR1-1 to SWR1-m) and the plurality of second switches SWR2 (SWR2-1 to SWR2-m) in the plurality of first selection units SL1 (SL1-1 to SL1-m) is executed based on a command from the control unit CTRL.

[0026] (Second selection unit SL2) Each of the plurality of second selection units SL2 (SL2-1 to SL2-m) is connected to a corresponding one of the second ends EA (EA1 to EAm) of the plurality of brazing wires A (A1 to Am). Each of the plurality of second selection units SL2 (SL2-1 to SL2-m) selects one option from a group of second options that includes a third option of applying a first potential V1 to a corresponding one of the second ends EA (EA1 to EAm) of the plurality of brazing wires A based on a command from the control unit CTRL, and a fourth option of applying a second potential V2 to a corresponding one of the second ends EA (EA1 to EAm). The second selection unit SL2-1 has, for example, a third switch SWR3-1 and a fourth switch SWR4-1. The second selection unit SL2-2 has, for example, a third switch SWR3-2 and a fourth switch SWR4-2. The second selection unit SL2-m has, for example, a third switch SWR3-m and a fourth switch SWR4-m. Each of the plurality of third switches SWR3 (SWR3-1 to SWR3-m) is provided between the second end EA of the corresponding one brazing wire A (A1 to Am) and the DC power supply PS1. Each of the plurality of fourth switches SWR4 (SWR4-1 to SWR4-m) is provided between the second end EA of the corresponding one brazing wire A (A1 to Am) and the DC power supply PS2. A corresponding one of the second ends EA (EA1 to EAm) of the plurality of brazing wires A is connected to each of the plurality of third switches SWR3 (SWR3-1 to SWR3-m) and each of the plurality of fourth switches SWR4 (SWR4-1 to SWR4-m). Each of the plurality of third switches SWR3 (SWR3-1 to SWR3-m) performs a selection operation of selecting either a conductive state or a non-conductive state between a corresponding one of the second ends EA (EA1 to EAm) of the plurality of brazing wires A and the DC power supply PS1. Each of the plurality of fourth switches SWR4 (SWR4-1 to SWR4-m) performs a selection operation of selecting either a conductive state or a non-conductive state between a corresponding one of the second ends EA (EA1 to EAm) of the plurality of brazing wires A and the DC power supply PS2. Incidentally, each of the plurality of second selection units SL2 can also select an option in which the second end EA of the corresponding one brazing wire A is an open end.In that case, each of the plurality of second selection units SL2 sets both the third switch SWR3 and the fourth switch SWR4 corresponding to the second end EA of the corresponding one row wire A to the non-conductive state.

[0027] Among the plurality of second selection units SL2 (SL2-1 to SL2-m), one second selection unit SL2 corresponding to the second end EA of the selected row wire AS selected by the control unit CTRL applies a first potential V1 to the second end EA of the selected row wire AS by connecting the second end EA of the selected row wire AS to the DC power supply PS1. On the other hand, among the plurality of second selection units SL2 (SL2-1 to SL2-m), one or more second selection units SL2 corresponding to the second end EA of the non-selected row wire AU apply a second potential V2 to the second end EA of the non-selected row wire AU by connecting the second end EA of the non-selected row wire AU to the DC power supply PS2. The operations of each of the plurality of second selection units SL2 (SL2-1 to SL2-m) are controlled by the control unit CTRL. That is, the switching operations of each of the plurality of third switches SWR3 (SWR3-1 to SWR3-m) and the plurality of fourth switches SWR4 (SWR4-1 to SWR4-m) in the plurality of second selection units SL2 (SL2-1 to SL2-m) are executed based on commands from the control unit CTRL.

[0028] In the element array circuit 1, the application of the first potential V1 to the first end SA of the selected row wire AS by the first selection unit SL1 and the application of the first potential V1 to the second end EA of the selected row wire AS by the second selection unit SL2 may be performed synchronously. However, the application of the first potential V1 to the first end SA of the selected row wire AS by the first selection unit SL1 and the application of the first potential V1 to the second end EA of the selected row wire AS by the second selection unit SL2 may be performed independently.

[0029] In the element array circuit 1, a selection operation in which one first switch SWR1 connected to one first end SA selected from a plurality of first ends SA selects a conduction state, a selection operation in which one second switch SWR2 connected to one first end SA to be selected selects a non-conduction state, a selection operation in which one third switch SWR3 connected to one second end EA corresponding to one first end SA to be selected selects a conduction state, and a selection operation in which one fourth switch SWR4 connected to one second end EA corresponding to one first end SA to be selected selects a non-conduction state may be performed synchronously.

[0030] (Operational amplifier OP1) Each of the plurality of operational amplifiers OP1 (OP1-1 to OP1-n) is connected to a corresponding one of the plurality of column lines B (B1 to Bn) via a corresponding one of the third selection units SL3 (SL3-1 to SL3-n). Each of the plurality of operational amplifiers OP1 (OP1-1 to OP1-n) includes a positive input terminal T1, a negative input terminal T2, and an output terminal T3. The positive input terminal T1 is connected to a DC power supply PS2, and a second potential V2 is applied to the positive input terminal T1. Each of the negative input terminals T2 of the plurality of operational amplifiers OP1 (OP1-1 to OP1-n) is connected to a corresponding one of the column lines B via a fifth switch SWC1 (SWC1-1 to SWC1-n) of the corresponding third selection unit SL3 (SL3-1 to SL3-n). The negative input terminal T2 of the operational amplifier OP1 (OP1-1 to OP1-n) and the third end SB (SB1 to SBn) of the column line B are electrically connected via a connection line WB1 (WB1-1 to WB1-n) and the fifth switch SWC1 (SWC1-1 to SWC1-n) of the third selection unit SL3 (SL3-1 to SL3-n). The fifth switch SWC1 (SWC1-1 to SWC1-n) is provided in the middle of the connection line WB1 (WB1-1 to WB1-n). Each of the operational amplifiers OP1 (OP1-1 to OP1-n) operates so that the positive input terminal T1 and the negative input terminal T2 have the same potential, and thus the potential of the negative input terminal T2 is approximately the second potential V2. The output terminal T3 is connected to the negative input terminal T2 via a capacitive element CP1 (CP1-1 to CP1-n).

[0031] (Operational Amplifier OP2) Each of the plurality of operational amplifiers OP2 (OP2-1 to OP2-n) is connected to a corresponding one of the plurality of column lines B (B1 to Bn) via a corresponding one of the fourth selection units SL4 (SL4-1 to SL4-n). Each of the plurality of operational amplifiers OP2 (OP2-1 to OP2-n) includes a positive input terminal T4, a negative input terminal T5, and an output terminal T6. The positive input terminal T4 is connected to a DC power supply PS2, and a second potential V2 is applied to the positive input terminal T4. Each of the negative input terminals T5 of the plurality of operational amplifiers OP2 (OP2-1 to OP2-n) is connected to a corresponding one of the column lines B via a sixth switch SWC2 (SWC2-1 to SWC2-n) of the corresponding fourth selection unit SL4 (SL4-1 to SL4-n). The negative input terminal T5 of the operational amplifier OP2 (OP2-1 to OP2-n) and the fourth end EB (EB1 to EBn) of the column line B (B1 to Bn) are electrically connected via a connection line WB2 (WB2-1 to WB2-n) and the sixth switch SWC2 (SWC2-1 to SWC2-n) of the fourth selection unit SL4. The sixth switch SWC2 (SWC2-1 to SWC2-n) is provided in the middle of the connection line WB2 (WB2-1 to WB2-n). Each of the operational amplifiers OP2 (OP2-1 to OP2-n) operates so that the positive input terminal T4 and the negative input terminal T5 have the same potential, so the potential of the negative input terminal T5 is approximately the second potential V2. The output terminal T6 is connected to the negative input terminal T5 via a capacitive element CP2 (CP2-1 to CP2-n).

[0032] (Capacitive Element CP1) Each of the plurality of capacitive elements CP1 is connected to both the negative input terminal T2 and the output terminal T3 of a corresponding one of the operational amplifiers OP1, and converts the current flowing through the column line B connected to the negative input terminal T2 into a voltage. Specifically, in the example of FIG. 1, the capacitive element CP1-1 is connected to both the negative input terminal T2 and the output terminal T3 of the operational amplifier OP1-1, and converts the current flowing through the column line B1 into a voltage. Similarly, the capacitive element CP1-2 is connected to both the negative input terminal T2 and the output terminal T3 of the operational amplifier OP1-2, and converts the current flowing through the column line B2 into a voltage. Further, the capacitive element CP1-n is connected to both the negative input terminal T2 and the output terminal T3 of the operational amplifier OP1-n, and converts the current flowing through the column line Bn into a voltage.

[0033] (Capacitive element CP2) Each of the plurality of capacitive elements CP2 is connected to both the negative input terminal T5 and the output terminal T6 of a corresponding one of the operational amplifiers OP2, and converts the current flowing through the column line B connected to the negative input terminal T5 into a voltage. Specifically, in the example of FIG. 1, the capacitive element CP2-1 is connected to both the negative input terminal T5 and the output terminal T6 of the operational amplifier OP2-1, and converts the current flowing through the column line B1 into a voltage. Similarly, the capacitive element CP2-2 is connected to both the negative input terminal T5 and the output terminal T6 of the operational amplifier OP2-2, and converts the current flowing through the column line B2 into a voltage. Further, the capacitive element CP2-n is connected to both the negative input terminal T5 and the output terminal T6 of the operational amplifier OP2-n, and converts the current flowing through the column line Bn into a voltage.

[0034] (Third selection unit SL3) Each of the third selection units SL3 (SL3-1 to SL3-n) performs a selection operation of selecting either a conductive state or a non-conductive state between a corresponding one of the third ends SB (SB1 to SBn) of the plurality of column lines B and a corresponding one of the negative input terminals T2 of the plurality of operational amplifiers OP1 (OP1-1 to OP1-n) based on a command from the control unit CTRL. Specifically, the fifth switch SWC1-1 performs a selection operation of selecting either a conductive state or a non-conductive state between the third end SB1 of the column line B1 and the negative input terminal T2 of the operational amplifier OP1-1, the fifth switch SWC1-2 performs a selection operation of selecting either a conductive state or a non-conductive state between the third end SB2 of the column line B2 and the negative input terminal T2 of the operational amplifier OP1-2, and the fifth switch SWC1-n performs a selection operation of selecting either a conductive state or a non-conductive state between the third end SBn of the column line Bn and the negative input terminal T2 of the operational amplifier OP1-n.

[0035] (Fourth selection unit SL4) Each of the fourth selection units SL4 (SL4-1 to SL4-n) performs a selection operation of selecting either a conductive state or a non-conductive state between a corresponding one of the fourth ends EB (EB1 to EBn) of the plurality of column lines B and a corresponding one of the negative input terminals T5 of the plurality of operational amplifiers OP2 (OP2-1 to OP2-n) based on a command from the control unit CTRL. Specifically, the sixth switch SWC2-1 performs a selection operation of selecting either a conductive state or a non-conductive state between the fourth end EB1 of the column line B1 and the negative input terminal T5 of the operational amplifier OP2-1, the sixth switch SWC2-2 performs a selection operation of selecting either a conductive state or a non-conductive state between the fourth end EB2 of the column line B2 and the negative input terminal T5 of the operational amplifier OP2-2, and the sixth switch SWC2-n performs a selection operation of selecting either a conductive state or a non-conductive state between the fourth end EBn of the column line Bn and the negative input terminal T5 of the operational amplifier OP2-n.

[0036] (Control unit CTRL) The control unit CTRL is, for example, a microcomputer, and the CPU (Central Processing Unit) executes a control program to perform predetermined control processing. The control unit CTRL controls, for example, the switching operations of the first selection units SL1 to SL4. The outputs of the first operational amplifier OP1 and the second operational amplifier OP2 are directly or indirectly input to the control unit CTRL.

[0037] The control unit CTRL causes each of the first selection units SL1 (SL1-1 to SL1-m) to select one option from a first group of options including a first option of applying a first potential V1 to a corresponding one of the first ends SA (SA1 to SAm) of the plurality of row lines A, and a second option of applying a second potential V2 to a corresponding one of the first ends SA (SA1 to SAm). Note that the first group of options also includes an option of setting a corresponding one of the first ends SA (SA1 to SAm) of the plurality of row lines A as an open end. Further, the control unit CTRL causes each of the second selection units SL2 (SL2-1 to SL2-m) to select one option from a second group of options including a third option of applying a first potential V1 to a corresponding one of the second ends EA (EA1 to EAm) of the plurality of row lines A, and a fourth option of applying a second potential V2 to a corresponding one of the second ends EA (EA1 to EAm). Note that the second group of options also includes an option of setting a corresponding one of the second ends EA (EA1 to EAm) of the plurality of row lines A as an open end. Moreover, the control unit CTRL causes each of the third selection units SL3 (SL3-1 to SL3-n) to perform a selection operation of selecting either a conductive state or a non-conductive state between a corresponding one of the third ends SB (SB1 to SBn) of the plurality of column lines B and a corresponding one of the negative input terminals T2 of the plurality of operational amplifiers OP1 (OP1-1 to OP1-n). Furthermore, the control unit CTRL causes each of the fourth selection units SL4 (SL4-1 to SL4-n) to perform a selection operation of selecting either a conductive state or a non-conductive state between a corresponding one of the fourth ends EB (EB1 to EBn) of the plurality of column lines B and a corresponding one of the negative input terminals T5 of the plurality of operational amplifiers OP2 (OP2-1 to OP2-n).

[0038] Each of the DC power supplies PS1 and PS2 may be provided inside or outside the element array circuit 1.

[0039] [Measurement operation in element array circuit 1] In the element array circuit 1, for example, the resistance values of the plurality of resistance elements R can be measured as follows. The following measurement operation is performed according to a command from the control unit CTRL. In this specification, for ease of understanding, the current flowing through the row line A, the voltage drop due to the resistance of the row line A, and the current flowing through the column line B and the voltage drop due to the resistance value of the column line B are ignored in the description.

[0040] [Example of measurement operation in state A] First, an example of performing measurement in the state A described above with reference to FIGS. 1 and 2 will be described. FIG. 2 is a flowchart for explaining an example of the measurement operation of the element array circuit 1 shown in FIG. 1. First, for example, all the switches of the first to fourth selection units SL1 to SL4 are set to the non-conducting state (step S101). Specifically, all of the first switch SWR1 (SWR1-1 to SWR1-m), the second switch SWR2 (SWR2-1 to SWR2-m), the third switch SWR3 (SWR3-1 to SWR3-m), the fourth switch SWR4 (SWR4-1 to SWR4-m), the fifth switch SWC1 (SWC1-1 to SWC1-m), and the sixth switch SWC2 (SWC2-1 to SWC2-m) shown in FIG. 1 are set to the non-conducting state.

[0041] Next, a selection row line AS corresponding to the selection resistance element RS to be measured is selected (step S102). Specifically, as shown in FIG. 1, the control unit CTRL conducts the first switch SWR1 corresponding to the selection row line AS to which the selection resistance element RS is connected and maintains the second switch SWR2 corresponding to the selection row line AS in a non-conducting state. By performing a selection operation, a first potential V1 is applied to the first end SA of the selection row line AS. On the other hand, the control unit CTRL maintains the first switch SWR1 corresponding to the non-selection row line AU in a non-conducting state and conducts the second switch SWR2 corresponding to the non-selection row line AU. By performing a selection operation, a second potential V2 is applied to the first end SA of the non-selection row line AU. Further, the control unit CTRL conducts the third switch SWR3 corresponding to the selection row line AS and maintains the fourth switch SWR4 corresponding to the selection row line AS in a non-conducting state. By performing a selection operation, a first voltage V1 is applied to the second end EA of the selection row line AS. On the other hand, for the third switch SWR3 corresponding to the non-selection row line AU, the non-conducting state is maintained, and the fourth switch SWR4 corresponding to the non-selection row line AU is conducted. By performing a selection operation, a second potential V2 is applied to the second end EA of the non-selection row line AU. In this way, in synchronization with the selection operation of conducting the first switch SWR1 corresponding to the selection row line AS and maintaining the second switch SWR2 corresponding to the selection row line AS in a non-conducting state, a selection operation of conducting the third switch SWR3 corresponding to the selection row line AS and maintaining the fourth switch SWR4 corresponding to the selection row line AS in a non-conducting state is performed. Note that FIG. 1 illustrates the case where the selection row line AS is the row line A1. Therefore, in the first selection units SL1-1 to SL1-m, the first switch SWR1-1 is in a conducting state, the first switches SWR1-2 to 1-m are in non-conducting states, the second switch SWR2-1 is in a non-conducting state, and the second switches SWR2-2 to 2-m are in conducting states. Also, in the second selection units SL2-1 to SL2-m, the third switch SWR3-1 is in a conducting state, the third switches SWR3-2 to 3-m are in non-conducting states, the fourth switch SWR4-1 is in a non-conducting state, and the fourth switches SWR4-2 to 4-m are in conducting states.

[0042] Next, the control unit CTRL sets all of the fifth switches SWC1-1 to SWC1-n of the third selection units SL3-1 to SL3-n, for example, to the conductive state (step S103). In the element array circuit 1, the potential of each negative input terminal T2 of the operational amplifiers OP1-1 to 1-n is the second potential V2. Therefore, a voltage (V2 - V1) corresponding to the difference between the first potential V1 and the second potential V2 is applied to the resistor elements R(1,1) to R(1,n), and a current depending on the respective resistance values of the resistor elements R(1,1) to R(1,n) flows through each of the resistor elements R(1,1) to R(1,n), flows through one corresponding one of the column lines B1 to Bn, and flows toward one corresponding one of the capacitor elements CP1-1 to CP1-n. On the other hand, the second potential V2 is applied to each of the row lines A2 to Am other than the row line A1 which is the selection row line AS, and the column lines B1 to Bn. For this reason, since the voltage applied to the resistor elements R other than the resistor elements R(1,1) to R(1,n) serving as the selection resistor elements RS becomes 0, no current flows through the resistor elements R other than the resistor elements R(1,1) to R(1,n).

[0043] Finally, the output voltage corresponding to each selection resistance element RS is measured (step S104). Specifically, the output voltage from the output terminal T3 of one operational amplifier OP1 corresponding to each column line B, which is caused by the selection resistance element RS connected to both the selection row line AS and each column line B, is measured. In the example of FIG. 1, the output voltage Vout from the output terminal T3 of the operational amplifier OP1-1 corresponding to the resistance element R(1,1) connected to both the row line A1 and the column line B1 is measured. Similarly, the output voltage Vout from the output terminal T3 of the operational amplifier OP1-2 corresponding to the resistance element R(1,2) connected to both the row line A1 and the column line B2 is measured, and the output voltage Vout from the output terminal T3 of the operational amplifier OP1-n corresponding to the resistance element R(1,n) connected to both the row line A1 and the column line Bn is measured. The current flowing through each of the column lines B1 to Bn is converted into a voltage by a corresponding one of the capacitor elements CP1-1 to CP1-n, and is output as the output voltage Vout from the output terminals T3 of the operational amplifiers OP1-1 to OP1-n corresponding to the resistance elements R(1,1) to R(1,n) respectively. The resistance value of each selection resistance element RS or the intensity of the electromagnetic wave (infrared ray) irradiated to each selection resistance element RS can be calculated from the output voltage Vout.

[0044] Thus, the measurement operation in the element array circuit 1 in state A is completed. When measuring the output voltage Vout corresponding to other resistance elements R other than the resistance elements R(1,1) to R(1,n), the above steps S101 to S104 are repeated. Note that the measurement method of the resistance element R in the above element array circuit 1 is an example, and the present embodiment is not limited to the above measurement method. The above measurement example is an example of measurement in state A, that is, in a state where the first potential V1 is applied to both the first end SA and the second end EA of the selection row line AS. In this measurement example, even if one disconnection occurs in the selection row line AS, the measurement operation can be continued as it is.

[0045] Note that when the output voltage Vout from the output terminals T3 of the operational amplifiers OP1-1 to OP1-n corresponding to the resistance elements R(1,1) to R(1,n) as the selected resistance element RS is an abnormal value in state A, the control unit CTRL makes the sixth switch SWC2 connected to the fourth end EB of the column line B corresponding to the operational amplifier OP1 indicating the abnormal value conductive. By doing so, the output voltage Vout corresponding to the resistance element R for which the output voltage Vout from the operational amplifier OP1 indicates an abnormal value can be output from the output terminal T6 of the second operational amplifier OP2 corresponding to the sixth switch SWC2. At this time, the conductive state of the fifth switch SWC1 connected to the third end SB of the column line B corresponding to the operational amplifier OP1 indicating the abnormal value may be maintained or switched to a non-conductive state. If the output voltage Vout from the output terminal T6 of the second operational amplifier OP2 is a normal value, the measurement operation of the selected resistance element RS can be continued. Here, the abnormal value refers to a value below a predetermined threshold, for example, when the output voltage Vout becomes substantially 0 (zero).

[0046] Also, in the example of the measurement operation in the element array circuit 1 in the above-described state A, after selecting the selected row line AS in step S102, the output voltage Vout from the output terminal T3 of the operational amplifier OP1 is measured by bringing the fifth switch SWC1 into a conductive state in step S103 (step S104). However, the output voltage Vout from the output terminal T6 of the operational amplifier OP2 may be measured by bringing the sixth switch SWC2 into a conductive state in step S103 (step S104). At this time, if the output voltage Vout from the output terminal T6 of the operational amplifier OP2 is an abnormal value, the fifth switch SWC1 connected to the third end SB of the column line B corresponding to the operational amplifier OP2 showing the abnormal value is brought into a conductive state. By doing so, the output voltage Vout corresponding to the resistor element R for which the output voltage Vout from the operational amplifier OP2 shows an abnormal value can be output from the output terminal T3 of the first operational amplifier OP1 corresponding to the fifth switch SWC1. At this time, the conductive state of the sixth switch SWC2 connected to the fourth end EB of the column line B corresponding to the operational amplifier OP2 showing the abnormal value may be maintained or switched to a non-conductive state. If the output voltage Vout from the output terminal T3 of the first operational amplifier OP1 is a normal value at this stage, the measurement operation of the selected resistor element RS can be continued.

[0047] (Example of measurement operation in state B) Next, an example of the measurement operation in state B will be described with reference to FIGS. 2 and 3. FIG. 3 is a circuit diagram for explaining an example of the measurement operation in state B. Similar to the example of the measurement operation in state A described above, for example, all the switches of the first to fourth selection units SL1 to SL4 are brought into a non-conductive state (step S101). Specifically, all of the first switch SWR1 (SWR1-1 to SWR1-m), the second switch SWR2 (SWR2-1 to SWR2-m), the third switch SWR3 (SWR3-1 to SWR3-m), the fourth switch SWR4 (SWR4-1 to SWR4-m), the fifth switch SWC1 (SWC1-1 to SWC1-m), and the sixth switch SWC2 (SWC2-1 to SWC2-m) are brought into a non-conductive state.

[0048] Next, a selection row line AS corresponding to the selection resistance element RS to be measured is selected (step S102). Specifically, as shown in FIG. 3, the control unit CTRL conducts the first switch SWR1 corresponding to the selection row line AS to which the selection resistance element RS is connected and maintains the second switch SWR2 corresponding to the selection row line AS in a non-conductive state. By performing a selection operation, a first potential V1 is applied to the first end SA of the selection row line AS. On the other hand, the control unit CTRL maintains the first switch SWR1 corresponding to the non-selection row line AU in a non-conductive state and performs a selection operation to make the second switch SWR2 corresponding to the non-selection row line AU conductive, thereby applying a second potential V2 to the first end SA of the non-selection row line AU. At this time, the control unit CTRL performs a selection operation to maintain all the third switches SWR3 corresponding to all the row lines A in a non-conductive state and all the fourth switches SWR4 corresponding to all the row lines A in a non-conductive state. That is, the control unit CTRL makes all the second ends EA of the selection row line AS and the non-selection row line AU open ends. Note that FIG. 3 illustrates the case where the selection row line AS is the row line A1. Therefore, in the first selection units SL1-1 to SL1-m, the first switch SWR1-1 is in a conductive state, the first switches SWR1-2 to 1-m are in non-conductive states, the second switch SWR2-1 is in a non-conductive state, and the second switches SWR2-2 to 2-m are in conductive states. Also, in the second selection units SL2-1 to SL2-m, all of the third switches SWR3-1 to 3-m and the fourth switches SWR4-1 to 4-m are in non-conductive states.

[0049] In the same procedure as described in the example of the measurement operation in state A, the control unit CTRL makes all of the fifth switches SWC1-1 to SWC1-n of the third selection units SL3-1 to SL3-n conductive (step S103) and measures the output voltage corresponding to each selection resistance element RS (step S104). Thus, the measurement operation in the element array circuit 1 in state B is completed.

[0050] The above measurement example is an example of measurement in state B, that is, a state in which the first potential V1 is applied only to the first end SA of the selection row line AS among the first end SA and the second end EA of the selection row line AS. In this measurement example, when a disconnection occurs at one location in the selection row line AS, the output voltage Vout from the output terminal T3 of the operational amplifier OP1 will show an abnormal value. In that case, the control unit CTRL may shift the element array circuit 1 from state B to state A. That is, the first potential V1 is applied to the second end EA of the selection row line AS. Specifically, in the second selection unit SL, a selection operation is performed in which the third switch SWR3 corresponding to the selection row line AS is set to the conductive state and the fourth switch SWR4 corresponding to the selection row line AS is maintained in the non-conductive state, thereby applying the first voltage V1 to the second end EA of the selection row line AS. On the other hand, the control unit CTRL maintains the non-conductive state for the third switch SWR3 corresponding to the non-selection row line AU and also maintains the non-conductive state for the fourth switch SWR4 corresponding to the non-selection row line AU. After that, if the output voltage Vout from the output terminal T3 of the operational amplifier OP1 becomes a normal value, the measurement operation can be continued as it is.

[0051] However, if the output voltage Vout from the output terminal T3 of the operational amplifier OP1 is still an abnormal value even after the first voltage V1 is applied to the second end EA of the selection row line AS, the control unit CTRL sets the sixth switch SWC2 connected to the fourth end EB of the column line B corresponding to the operational amplifier OP1 showing the abnormal value to the conductive state. At this time, the conductive state of the fifth switch SWC1 connected to the third end SB of the column line B corresponding to the operational amplifier OP1 showing the abnormal value may be maintained, or it may be switched to the non-conductive state. By doing so, the output voltage Vout corresponding to the resistor element R for which the output voltage Vout from the operational amplifier OP1 shows an abnormal value can be output from the output terminal T6 of the second operational amplifier OP2 corresponding to the sixth switch SWC2. If the output voltage Vout from the output terminal T6 of the second operational amplifier OP2 is a normal value, the measurement operation of the selection resistor element RS can be continued.

[0052] When the output voltage Vout from the output terminal T3 of the operational amplifier OP1 shows an abnormal value when the measurement operation in state B is performed, the following measures may be taken to continue the measurement operation. Specifically, the control unit CTRL first makes the sixth switch SWC2 connected to the fourth end EB of the column line B corresponding to the operational amplifier OP1 showing the abnormal value conductive. At this time, the conduction state of the fifth switch SWC1 connected to the third end SB of the column line B corresponding to the operational amplifier OP1 showing the abnormal value may be maintained or switched to a non-conductive state. After that, if the output voltage Vout from the output terminal T6 of the operational amplifier OP2 becomes a normal value, the measurement operation can be continued as it is.

[0053] However, if the output voltage Vout from the output terminal T6 of the operational amplifier OP2 is an abnormal value after the sixth switch SWC2 connected to the fourth end EB of the column line B corresponding to the operational amplifier OP1 showing the abnormal value is made conductive, the control unit CTRL may shift the element array circuit 1 from state B to state A. That is, the control unit CTRL applies the first potential V1 to the second end EA of the selection row line AS. After that, if the output voltage Vout from the output terminal T6 of the operational amplifier OP2 becomes a normal value, the measurement operation can be continued as it is.

[0054] Even if the output voltage Vout from the output terminal T6 of the operational amplifier OP2 is still an abnormal value, the control unit CTRL maintains the state of applying the first potential V1 to the second end EA of the selection row line AS, makes the fifth switch SWC1 connected to the third end SB of the column line B corresponding to the operational amplifier OP2 showing the abnormal value conductive, and obtains the output voltage Vout from the output terminal T3 of the operational amplifier OP1. At this time, the conduction state of the sixth switch SWC2 connected to the fourth end EB of the column line B corresponding to the operational amplifier OP2 showing the abnormal value may be maintained or switched to a non-conductive state. If the output voltage Vout from the output terminal T3 is a normal value at this stage, the measurement operation can be continued as it is. In the measurement example in the above state B, the fourth switch SWR4 corresponding to the non-selection row line AU is maintained in a non-conductive state. However, the fourth switch SWR4 corresponding to the non-selection row line AU may be set to a conductive state after step S102.

[0055] Also, in the measurement operation example of the element array circuit 1 in the above-described state B, after selecting the selection row line AS in step S102, the output voltage Vout from the output terminal T3 of the operational amplifier OP1 is measured by setting the fifth switch SWC1 to a conductive state in step S103 (step S104). However, the output voltage Vout from the output terminal T6 of the operational amplifier OP2 may be measured by setting the sixth switch SWC2 to a conductive state in step S103 (step S104). At this time, when the output voltage Vout from the output terminal T6 of the operational amplifier OP2 is an abnormal value, the control unit CTRL may shift the element array circuit 1 from state B to state A. If the output voltage Vout from the output terminal T6 of the operational amplifier OP2 is still an abnormal value even after shifting to state A, the control unit CTRL sets the fifth switch SWC1 connected to the third end SB of the column line B corresponding to the operational amplifier OP2 showing the abnormal value to a conductive state. By doing so, the output voltage Vout corresponding to the resistor element R for which the output voltage Vout from the operational amplifier OP2 shows an abnormal value can be output from the output terminal T3 of the first operational amplifier OP1 corresponding to the fifth switch SWC1. If the output voltage Vout from the output terminal T3 of the first operational amplifier OP1 is a normal value at that stage, the measurement operation of the selection resistor element RS can be continued.

[0056] In the measurement operation of the element array circuit 1 in the above-described state B, when the output voltage Vout from the output terminal T6 of the operational amplifier OP2 shows an abnormal value in step S104, the control unit CTRL may set the fifth switch SWC1 connected to the third end SB of the column line B corresponding to the operational amplifier OP2 showing the abnormal value to the conductive state. If the output voltage Vout from the output terminal T3 of the operational amplifier OP1 becomes a normal value at this stage, the measurement operation can be continued as it is. However, if the output voltage Vout from the output terminal T3 of the operational amplifier OP1 is an abnormal value after setting the fifth switch SWC1 connected to the third end SB of the column line B corresponding to the operational amplifier OP2 showing the abnormal value to the conductive state, the control unit CTRL may shift the element array circuit 1 from state B to state A. After this, if the output voltage Vout from the output terminal T3 of the operational amplifier OP1 becomes a normal value, the measurement operation can be continued as it is. However, if the output voltage Vout from the output terminal T3 of the operational amplifier OP1 is still an abnormal value, the control unit CTRL maintains the state of applying the first potential V1 to the second end EA of the selected row line AS, sets the sixth switch SWC2 connected to the fourth end EB of the column line B corresponding to the operational amplifier OP1 showing the abnormal value to the conductive state, and obtains the output voltage Vout from the output terminal T6 of the operational amplifier OP2. If the output voltage Vout from the output terminal T6 is a normal value at this stage, the measurement operation can be continued as it is. [Determination of the Disconnection Location in the Element Array Circuit 1]

[0057] [Determination of the Disconnection Location of the Element Array Circuit 1] Next, when it is estimated that there is a disconnection location in the element array circuit 1, a method for determining the disconnection location will be described.

[0058] (1) First Example First, a method for determining the disconnection location in the element array circuit 1 in the above-described state A will be described. FIG. 4A and FIG. 4B are flowcharts showing a first example of a procedure for determining a disconnection location in the element array circuit 1. First, as shown in FIG. 4A, it is determined whether the element array circuit 1 is in state A (step S201). When the element array circuit 1 is in state A (step S201Y), it is determined whether the output from one operational amplifier OP1 corresponding to the selection resistance element RS is a normal value (step S202). When the output from one operational amplifier OP1 corresponding to the selection resistance element RS is a normal value (step S202Y), the control unit CTRL shifts the element array circuit 1 to state B (step S203). That is, the control unit CTRL maintains a state in which a first potential V1 is applied to the first end SA of the selection row line AS connected to the selection resistance element RS via the first selection unit SL1, and sets the second end EA of the selection row line AS as an open end. Thereafter, it is determined again whether the output from one operational amplifier OP1 corresponding to the selection resistance element RS is a normal value (step S204). When the output from one operational amplifier OP1 corresponding to the selection resistance element RS is not a normal value (step S204N), that is, when it is an abnormal value, the control unit CTRL determines that there is a disconnection location in the first portion of the selection row line AS from the selection resistance element RS to one first selection unit SL1 corresponding to the selection resistance element RS (step S205), and ends (end). Specifically, as illustrated in FIG. 5, in the element array circuit 1 in state B where a first potential V1 is applied to the first end portion SA1 of the brazing wire A1 as the selection brazing wire and the second end portion EA1 of the brazing wire A1 as the selection brazing wire is an open end, when the output voltage Vout corresponding to the resistance element R(1,1) output from the operational amplifier OP1-1 along the path indicated by the solid line is an abnormal value (step S204N), the control unit CTRL determines that there is a disconnection point P1 in the first portion from the resistance element R(1,1) to the first selection unit SL1-1 in the brazing wire A1 (step S205). In FIG. 5, the selection brazing wire AS is the brazing wire A1 and the selection resistance element RS is the resistance element R(1,1). FIG. 5 illustrates a case where the first switch SWR1-1 of the first selection unit SL1-1 corresponding to the brazing wire A1 is in a conductive state and the first potential V1 is applied to the first end portion SA1, while the second switch SWR2-1 of the first selection unit SL1-1 corresponding to the brazing wire A1 is in a non-conductive state and the third switch SWR3-1 and the fourth switch SWR4-1 of the second selection unit SL2-1 corresponding to the brazing wire A1 are both in non-conductive states. Note that a second potential V2 is applied to each of the first end portions SA2 to SAm of the brazing wires A2 to Am as the non-selection brazing wires AU, and the second end portions EA2 to EAm of the brazing wires A2 to Am as the non-selection brazing wires AU are open ends. Specifically, the first switches SWR1-2 to SWR1-m of the first selection units SL1-2 to SL1-m are in non-conductive states, the second switches SWR2-2 to SWR2-m of the first selection units SL1-2 to SL1-m are in conductive states, the third switches SWR3-2 to SWR3-m of the second selection units SL2-2 to SL2-m are in non-conductive states, and the fourth switches SWR4-2 to SWR4-m of the second selection units SL2-2 to SL2-m are in non-conductive states. However, by making the fourth switches SWR4-2 to SWR4-m of the second selection units SL2-2 to SL2-m in conductive states, the second potential V2 may be applied to the second end portions EA2 to EAm of the brazing wires A2 to Am as the non-selection brazing wires AU. Also, all of the fifth switches SWC1-1 to 1-n of the third selection units SL3-1 to 3-n are in conductive states, and all of the sixth switches SWC2-1 to 2-n of the fourth selection units SL4-1 to 4-n are in non-conductive states. In addition, when the output from one operational amplifier OP1 corresponding to the selected resistance element RS in step S204 is a normal value (step S204Y), it is determined that there is no disconnection in the second part from the selected resistance element RS to the one operational amplifier OP1 corresponding to the selected resistance element RS among one column line B and connection line WB1 connected to the selected resistance element RS, and the selection row line AS, and the process ends (END).

[0059] Also, when the output from one operational amplifier OP1 corresponding to the selected resistance element RS in step S202 is not a normal value (step S202N), that is, when it is an abnormal value, the process proceeds to step S206 (FIG. 4B). In step S206, one fourth selection unit SL4 corresponding to the selected resistance element RS is set to a conductive state. At this time, the conductive state of one third selection unit SL3 corresponding to the selected resistance element RS may be maintained or switched to a non-conductive state. Then, it is determined whether the output from one operational amplifier OP2 connected to one fourth selection unit SL4 corresponding to the selected resistance element RS is a normal value (step S207). When the output from one operational amplifier OP2 corresponding to the selected resistance element RS is a normal value (step S207Y), the control unit CTRL determines that there is a disconnection in the second part from the selected resistance element RS to the one operational amplifier OP1 corresponding to the selected resistance element RS among one column line B and connection line WB1 connected to the selected resistance element RS (step S208). Specifically, as illustrated in FIG. 6, in the element array circuit 1 in state A where a first potential V1 is applied to the first end portion SA1 of the brazing wire A1 as the selection brazing wire and a second potential is applied to the second end portion EA1 of the brazing wire A1 as the selection brazing wire, for example, when the output voltage Vout from the operational amplifier OP1-1 corresponding to the resistance element R(1,1) as the selection resistance element RS shows an abnormal value (step S202N), the sixth switch SWC2-1 connected to the fourth end portion EB1 of the column wire B1 corresponding to the operational amplifier OP1-1 showing the abnormal value is brought into a conductive state by a command from the control unit CTRL (step S206). At that time, the fifth switch SWC1-1 corresponding to the operational amplifier OP1-1 showing the abnormal value may remain in a conductive state or may be in a non-conductive state. By bringing the sixth switch SWC2-1 into a conductive state, the output voltage Vout reflecting the resistance value of the resistance element R(1,1) can be output from the terminal T6 of the operational amplifier OP2-1 along the path shown by the solid line in FIG. 8. When the output voltage Vout corresponding to the resistance element R(1,1) output from the operational amplifier OP2-1 along the path shown by the solid line in FIG. 6 is a normal value (step S207Y), the control unit CTRL determines that there is a disconnection point P2 in the second part of the connection line WB1-1 (step S208) and ends (end). Also, in step S207, when the output from one of the operational amplifiers OP2 corresponding to the selection resistance element RS is not a normal value (step S207N), that is, when it is an abnormal value, the control unit CTRL determines that the disconnection point cannot be specified (step S209) and ends (end).

[0060] Also, as shown in FIG. 6, when there is a disconnection point P2 in the connection line WB1-1, the output voltage Vout from the operational amplifier OP1-1 also shows an abnormal value for the resistance elements R(2,1) to R(m,1). Therefore, the control unit CTRL can sequentially output the output voltages Vout reflecting the respective resistance values of the resistance elements R(2,1) to R(m,1) from the terminal T6 of the operational amplifier OP2-1 by sequentially selecting each of the brazing wires A2 to Am as the selection brazing wire AS while keeping the sixth switch SWC2-1 in a conductive state.

[0061] (2) Second Example Figures 7A to 7C are flowcharts showing a second example of the procedure for determining the disconnection location of the element array circuit 1. First, as shown in Figure 7A, it is determined whether the element array circuit 1 is in state B (step S301). When the element array circuit 1 is in state B (step S301Y), it is determined whether the output from one operational amplifier OP1 corresponding to the selection resistance element RS is an abnormal value (step S302). If the output from one operational amplifier OP1 corresponding to the selection resistance element RS is an abnormal value (step S302Y), the process proceeds to step S303. In step S303, one fourth selection unit SL4 corresponding to the selection resistance element RS is set to the conductive state. At that time, one third selection unit SL3 corresponding to the selection resistance element RS may remain in the conductive state or may be set to the non-conductive state. Thereafter, it is determined whether the output from one operational amplifier OP2 connected to one fourth selection unit SL4 corresponding to the selection resistance element RS is a normal value (step S304). If the output from one operational amplifier OP2 corresponding to the selection resistance element RS is a normal value (step S304Y), the control unit CTRL determines that there is a disconnection location in the second portion from the selection resistance element RS to one operational amplifier OP1 corresponding to the selection resistance element RS among one column line B and one connection line WB1 connected to the selection resistance element RS (step S305). Specifically, as illustrated in Figure 8, in the element array circuit 1 in state B where the first potential V1 is applied to the first end SA1 of the row line A1 as the selection row line and the second end EA1 of the row line A1 as the selection row line is an open end, when the output voltage Vout corresponding to the resistance element R(1,1) output from the operational amplifier OP2-1 along the path shown by the solid line is a normal value (step S304Y), the control unit CTRL determines that there is a disconnection location P2 in the second portion of the connection line WB1-1 (step S305).

[0062] In step S304 (Fig. 7A), if the output from one operational amplifier OP2 corresponding to the selection resistor element RS is an abnormal value (step S304N), the process proceeds to step S306 (Fig. 7B). In step S306, the control unit CTRL shifts the element array circuit 1 to state A. That is, the control unit CTRL applies the first potential V1 to the first end SA of the selection row line AS via the first selection unit SL1 and applies the first potential V1 to the second end EA of the selection row line AS via the second selection unit SL2. Thereafter, it is determined whether the output from one operational amplifier OP2 connected to one fourth selection unit SL4 corresponding to the selection resistor element RS is a normal value (step S307). If the output from one operational amplifier OP2 corresponding to the selection resistor element RS is a normal value (step S307Y), the control unit CTRL determines that there is a disconnection point in the first portion of the selection row line AS from the selection resistor element RS to the one first selection unit SL1 corresponding to the selection resistor element RS (step S308), and ends (end). Specifically, as illustrated in Fig. 9, in the element array circuit 1 in state A where the first potential V1 is applied to the first end SA1 of the row line A1 as the selection row line and the first potential is applied to the second end EA1 of the row line A1 as the selection row line, if the output voltage Vout corresponding to the resistor element R(1,1) output from the operational amplifier OP2-1 along the path indicated by the solid line is a normal value (step S307Y), the control unit CTRL determines that there is a disconnection point P1 in the first portion of the row line A1 from the resistor element R(1,1) to the first selection unit SL1-1 (step S30�).

[0063] If the output from one of the operational amplifiers OP2 corresponding to the selected resistance element RS is an abnormal value in step S307 (Fig. 7B) (step S307N), the process proceeds to step S309. In step S309, one of the third selection parts SL3 corresponding to the selected resistance element RS is set to the conducting state. At that time, one of the fourth selection parts SL4 corresponding to the selected resistance element RS may remain in the conducting state or may be set to the non-conducting state. Thereafter, it is determined whether the output from one of the operational amplifiers OP1 connected to one of the third selection parts SL3 corresponding to the selected resistance element RS is a normal value (step S310). If the output from one of the operational amplifiers OP1 corresponding to the selected resistance element RS is a normal value (step S310Y), the control unit CTRL determines that there are disconnection points in both the first part from the selected resistance element RS to one of the first selection parts SL1 corresponding to the selected resistance element RS in the selected row line AS and the third part from the selected resistance element RS to one of the operational amplifiers OP2 corresponding to the selected resistance element RS in one of the column lines B and the connection line WB2 connected to the selected resistance element RS (step S311), and ends (END). Specifically, as illustrated in Fig. 10, in the element array circuit 1 in state A where the first selection part SL1-1 applies the first potential V1 to the first end SA1 of the row line A1 as the selected row line AS and the second selection part SL2-1 applies the first potential V1 to the second end EA1 of the row line A1 as the selected row line AS, when the output voltage Vout corresponding to the resistance element R(1,1) output from the operational amplifier OP1-1 along the path indicated by the solid line is a normal value (step S310Y), the control unit CTRL determines that there is a disconnection point P1 in the first part from the resistance element R(1,1) to the first selection part SL1-1 in the row line A1 and there is a disconnection point P3 in the third part from the resistance element R(1,1) to the operational amplifier OP2-1 in the column line B1 and the connection line WB2-1 (step S311), and ends (END). If the output voltage Vout corresponding to the resistance element R(1,1) output from the operational amplifier OP1-1 in step S310 is an abnormal value (step S310N), the control unit CTRL determines that the disconnection point cannot be specified (step S312), and ends (END).Also, when the output voltage Vout corresponding to the resistor element R(1,1) output from the operational amplifier OP1-1 in step S310 is a normal value (step S310Y), if the output voltage Vout from the operational amplifier OP2-1 reflecting the resistance value of the resistor element R(2,1) is a normal value when the resistor element R(2,1) is further used as the selection resistor element RS, the control unit CTRL can determine that there is a disconnection point P3 in the portion between the resistor element R(1,1) and the resistor element R(2,1) in the column line B1.

[0064] Also, when the output from one operational amplifier OP1 corresponding to the selection resistor element RS in step S302 is a normal value (step S302N), the process proceeds to step S313 (FIG. 7C). In step S313, one fourth selection unit SL4 corresponding to the selection resistor element RS is set to the conductive state. At this time, one third selection unit SL3 corresponding to the selection resistor element RS may remain in the conductive state or may be set to the non-conductive state. Then, it is determined whether the output from one operational amplifier OP2 connected to one fourth selection unit SL4 corresponding to the selection resistor element RS is a normal value (step S314). When the output from one operational amplifier OP2 corresponding to the selection resistor element RS in step S314 is a normal value (step S314Y), it is determined that there is no disconnection point in the column line B and the connection lines WB1 and WB2 connected to the selection resistor element RS and the first portion from the selection resistor element RS to the first selection unit SL1 among the selection row lines, and the process ends (end). When the output from one operational amplifier OP2 corresponding to the selection resistor element RS in step S314 is an abnormal value (step S314N), it is determined that there is a disconnection point in the third portion from the selection resistor element RS to one operational amplifier OP2 corresponding to the selection resistor element RS among one column line B and the connection line WB2 connected to the selection resistor element RS (step S315), and the process ends (end). Specifically, as illustrated in FIG. 11, in the element array circuit 1 in state B where a first potential V1 is applied to the first end portion SA1 of the brazing wire A1 as the selection brazing wire and the second end portion EA1 of the brazing wire A1 as the selection brazing wire is an open end, when the output voltage Vout corresponding to the resistance element R(1,1) output from the operational amplifier OP2-1 along the path indicated by the solid line is an abnormal value (step S314N), the control unit CTRL determines that there is a disconnection point P3 in the third portion from the resistance element R(1,1) to the operational amplifier OP2-1 among the column line B1 and the connection line WB2-1 (step S315).

[0065] Also, when the output voltage Vout corresponding to the resistance element R(1,1) output from the operational amplifier OP1-1 in step S302 is a normal value (step S302N), and further when the resistance element R(2,1) is used as the selection resistance element RS, if the output voltage Vout from the operational amplifier OP2-1 reflecting the resistance value of the resistance element R(2,1) is a normal value, the control unit CTRL can determine that there is a disconnection point P3 in the portion between the resistance element R(1,1) and the resistance element R(2,1) in the column line B1. Among the resistance elements R(1,1) to R(m,n), when the output voltages Vout corresponding to all the resistance elements R other than the resistance element R(1,1) are normal values, and both the output voltage Vout from the operational amplifier OP1-1 corresponding to the resistance element R(1,1) and the output voltage Vout from the operational amplifier OP2-1 are abnormal values, the control unit CTRL determines that both the disconnection point P2 and the disconnection point P3 exist.

[0066] (3) Third Example FIG. 12 is a flowchart showing a third example of the procedure for determining a disconnection location in the element array circuit 1. First, it is determined whether the element array circuit 1 is in state B (step S401). When the element array circuit 1 is in state B (step S401Y), it is determined whether the output from one operational amplifier OP1 corresponding to the selection resistance element RS is an abnormal value (step S402). If the output from one operational amplifier OP1 corresponding to the selection resistance element RS is an abnormal value (step S402Y), the control unit CTRL determines that there is a disconnection location in either one of the first portion from the selection resistance element RS to one first selection unit SL1 among the selection row lines AS or the second portion from the selection resistance element RS to the operational amplifier OP1 among one column line B and the connection line WB1 connected to the selection resistance element RS, or in both the first portion and the second portion (step S403), and ends (end). Specifically, as illustrated in FIG. 13, in the element array circuit 1 in state B where a first potential V1 is applied to the first end SA1 of the row line A1 as the selection row line and the second end EA1 of the row line A1 as the selection row line is an open end, when the output voltage Vout corresponding to the resistance element R(1,1) output from the operational amplifier OP1-1 along the path indicated by the solid line is an abnormal value (step S402Y), the control unit CTRL determines that there is a disconnection location in either one of the first portion from the resistance element R(1,1) to the first selection unit SL1-1 among the row line A1 or the second portion from the resistance element R(1,1) to the operational amplifier OP1-1 among the connection line WB1-1, or in both the first portion and the second portion (step S403).

[0067] (4) Fourth Example FIG. 14A and FIG. 14B are flowcharts showing a fourth example of the procedure for determining a disconnection location in the element array circuit 1. In this example, as in the above-described third example (FIG. 12), it is determined whether the element array circuit 1 is in state B (step S501). When the element array circuit 1 is in state B (step S501Y), it is determined whether the output from one operational amplifier OP1 corresponding to the selection resistance element RS is an abnormal value (step S502). If the output from one operational amplifier OP1 corresponding to the selection resistance element RS is an abnormal value (step S502Y), the control unit CTRL shifts the element array circuit 1 to state A (step S503). That is, the control unit CTRL shifts to a state in which a first potential V1 is applied to the first end SA of the selection row line AS via the first selection unit SL1 and a first potential V1 is applied to the second end EA of the selection row line AS via the second selection unit SL2. After shifting to state A, it is determined whether the output from one operational amplifier OP1 corresponding to the selection resistance element RS is a normal value (step S504). If it is determined in step S504 that the output from the operational amplifier OP1 is a normal value (step S504Y), it is determined that there is a disconnection location in the first portion of the selection row line AS from the selection resistance element RS to one first selection unit SL1 corresponding to the selection resistance element RS (step S505), and the process ends (end). If it is determined in step S504 that the output from the operational amplifier OP1 is an abnormal value (step S504N), the control unit CTRL determines that there is a disconnection location in at least one of the second portion of the selection resistance element RS to one operational amplifier OP1 corresponding to the selection resistance element RS among one column line B and the connection line WB1 connected to the selection resistance element RS, and the fourth portion of the selection row line AS from the selection resistance element RS to one second selection unit SL2 corresponding to the selection resistance element RS (step S506). Thereafter, the control unit CTRL sets one fourth selection unit SL4 corresponding to the selection resistance element RS to a conductive state (step S507). At that time, one third selection unit SL3 corresponding to the selection resistance element RS may remain in a conductive state or may be set to a non-conductive state.Subsequently, it is determined whether the output from one operational amplifier OP2 connected to one fourth selection unit SL4 corresponding to the selection resistance element RS is a normal value (step S508). If the output from one operational amplifier OP2 corresponding to the selection resistance element RS is a normal value in step S508 (step S508Y), the control unit CTRL determines that there is a disconnection point in the second part (step S509) and ends (end). Further, if the output from one operational amplifier OP2 corresponding to the selection resistance element RS is an abnormal value in step S508 (step S508N), the control unit CTRL determines that there is a disconnection point in at least one of the second part and the fourth part (step S510) and ends (end).

[0068] Specifically, as illustrated in FIG. 15, in state A where the first selection unit SL1-1 applies the first potential V1 to the first end SA1 of the brazing wire A1 as the selection brazing wire AS and the second selection unit SL2-1 applies the first potential V1 to the second end EA1 of the brazing wire A1 as the selection brazing wire AS, when the output voltage Vout corresponding to the resistance element R(1,1) output from the operational amplifier OP1-1 along the path indicated by the solid line is a normal value (step S504Y), it is determined that there is a disconnection point P1 in the first part (step S505), and the process ends (END). Also, when the output voltage Vout corresponding to the resistance element R(1,1) output from the operational amplifier OP1-1 along the path indicated by the solid line in FIG. 15A is an abnormal value (step S504N), the control unit CTRL determines that there is a disconnection point in at least one of the second part and the fourth part (step S506). Thereafter, as illustrated in FIG. 15B, the control unit CTRL makes the switch SWC2-1 of the fourth selection unit SL4-1 corresponding to the resistance element R(1,1) conductive (step S507). If the output from the operational amplifier OP2-1 corresponding to the resistance element R(1,1) is a normal value at this stage (step S508Y), the control unit CTRL determines that there is a disconnection point P2 in the second part (step S509), and the process ends (END). Also, if the output from the operational amplifier OP2-1 is an abnormal value at this stage (step S508N), the control unit CTRL determines that there is a disconnection point in at least one of the second part and the fourth part (step S510), and the process ends (END).

[0069] [Operation and Effect of Element Array Circuit 1] As described above, in the element array circuit 1 of the present embodiment, a plurality of row lines A, a plurality of column lines B, a plurality of resistance elements R, a plurality of operational amplifiers OP, a first selection unit SL1, and a second selection unit SL2 are provided. Here, the first selection unit SL1 is connected to each of the first ends SA of the plurality of row lines A, and is capable of applying a first potential V1 to each of the first ends SA, and applying a second potential V2 (≠V1) to each of the first ends SA. Further, the second selection unit SL2 is connected to each of the second ends EA of the plurality of row lines A, and is capable of applying a first potential V1 to each of the second ends EA, and applying a second potential V2 (≠V1) to each of the second ends EA. Therefore, each of the plurality of resistance elements R can be set to the first potential V1 through two paths. Thus, even when there is one disconnection point in each of the plurality of row lines A, an output voltage reflecting the resistance value of each of the plurality of resistance elements R can be output from the operational amplifier OP corresponding to each of the plurality of resistance elements R. Further, even when there are two or more disconnection points in one row line A, an output voltage reflecting the resistance value of the resistance element R can be obtained for more resistance elements R connected to that row line A. Therefore, the element array circuit 1 of the present embodiment has excellent operation reliability.

[0070] In the element array circuit 1, an operational amplifier OP1 is connected to each of the third ends SB of the plurality of column lines B, and an operational amplifier OP2 is connected to each of the fourth ends EB of the plurality of column lines B. For this reason, even if there is one disconnection point in the column line B in the element array circuit 1, an output voltage reflecting the resistance value of the selected resistance element RS can be output from the operational amplifier OP1 or the operational amplifier OP2. As a result, more excellent operation reliability can be obtained.

[0071] Further, according to the element array circuit 1 of the present disclosure, when an abnormal value is recognized in the output from the operational amplifier OP, by performing the switching operations of the first to fourth switches SWR1 to SWR4 and the fifth to sixth switches SWC1 to SWC2 in the first to fourth selection units SL1 to SL4 in a predetermined procedure, it is possible to determine the range where a disconnection exists in the row line A, the column line B, or the connection lines WB1 and WB2.

[0072] As described above, four examples of the method for determining the disconnection location of the element array circuit 1 have been exemplified and explained. However, the method for determining the disconnection location of the element array circuit 1 of the present disclosure is not limited to the above-described method. Further, the control unit CTRL may perform the determination of the disconnection location in the element array circuit 1 during the normal measurement operation of measuring the resistance value for each of the resistance elements R, or during an inspection operation that is separate from the normal measurement operation and checks that there are no defects such as disconnection locations in a plurality of row lines A, a plurality of column lines B, and the connection lines WB1 and WB2.

[0073] <2. Second Embodiment> [Example of the overall configuration of the element array circuit 2] FIG. 16 is a circuit diagram schematically showing an overall configuration example of an element array circuit 2 according to a second embodiment of the present disclosure. As shown in FIG. 16, the configuration of the element array circuit 2 is different from that of the element array circuit 1 in FIG. 1 in that a seventh switch SWC3 (SWC3-1 to SWC3-n) as a fifth selection unit SL5 is further provided, an eighth switch SWC4 (SWC4-1 to SWC4-n) as a sixth selection unit SL6 is further provided, and the number of each of the capacitor element CP1, the capacitor element CP2, the operational amplifier OP1, and the operational amplifier OP2 is set to 1. Therefore, in the following description, for the element array circuit 2, mainly the components different from those of the element array circuit 1 in FIG. 1 will be described, and the description of the other components will be omitted as appropriate. Note that FIG. 16 illustrates a state in which m row lines A are arranged, but the number of a plurality of row lines A can be arbitrarily set. Similarly, FIG. 16 illustrates a state in which n column lines B are arranged, but the number of a plurality of column lines B can be arbitrarily set. In the example shown in FIG. 16, one capacitor element CP1, one capacitor element CP2, one operational amplifier OP1, and one operational amplifier OP2 are provided for each of the n column lines B. However, k (where k is a natural number of 2 or more and less than n) capacitor elements CP1, k capacitor elements CP2, k operational amplifiers OP1, and k operational amplifiers OP2 may be provided for each of the n column lines B. For example, when n is a multiple of k, (n / k) column lines B may be connected to each of the k capacitor elements CP1, the k capacitor elements CP2, the k operational amplifiers OP1, and the k operational amplifiers OP2.

[0074] In the element array circuit 2, each of the plurality of seventh switches SWC3 (SWC3-1 to SWC3-n) is provided between a corresponding one of the column lines B (B1 to Bm) and the DC power supply PS2. Each of the plurality of seventh switches SWC3 (SWC3-1 to SWC3-n) performs a selection operation of selecting either a conductive state or a non-conductive state between the third end SB (SB1 to SBn) of each of the plurality of column lines B (B1 to Bn) and the DC power supply PS2. Specifically, the seventh switch SWC3-1 performs a selection operation of selecting either a conductive state or a non-conductive state between the third end SB1 of the column line B1 and the operational amplifier OP1, the seventh switch SWC3-2 performs a selection operation of selecting either a conductive state or a non-conductive state between the third end SB2 of the column line B2 and the operational amplifier OP1, and the seventh switch SWC3-n performs a selection operation of selecting either a conductive state or a non-conductive state between the third end SBn of the column line Bn and the operational amplifier OP1.

[0075] In the element array circuit 2, each of the plurality of eighth switches SWC4 (SWC4-1 to SWC4-n) is provided between a corresponding one of the column lines B (B1 to Bm) and the DC power supply PS2. Each of the plurality of eighth switches SWC4 (SWC4-1 to SWC4-n) performs a selection operation of selecting either a conductive state or a non-conductive state between the fourth end EB (EB1 to EBn) of each of the plurality of column lines B (B1 to Bn) and the DC power supply PS2. Specifically, the eighth switch SWC4-1 performs a selection operation of selecting either a conductive state or a non-conductive state between the fourth end EB1 of the column line B1 and the operational amplifier OP2, the eighth switch SWC4-2 performs a selection operation of selecting either a conductive state or a non-conductive state between the fourth end EB2 of the column line B2 and the operational amplifier OP2, and the eighth switch SWC4-n performs a selection operation of selecting either a conductive state or a non-conductive state between the fourth end EBn of the column line Bn and the operational amplifier OP2.

[0076] In the element array circuit 2, both the fifth switch SWC1 (SWC1-1 to SWC1-n) and the seventh switch SWC3 (SWC3-1 to SWC3-n) connected to the same third end SB (SB1 to SBn) do not become conductive states. However, it is possible that both the fifth switch SWC1 (SWC1-1 to SWC1-n) and the seventh switch SWC3 (SWC3-1 to SWC3-n) connected to the same third end SB (SB1 to SBn) become non-conductive states. That is, at least one of the fifth switch SWC1 (SWC1-1 to SWC1-n) and the seventh switch SWC3 (SWC3-1 to SWC3-n) connected to the same third end SB (SB1 to SBn) becomes non-conductive. Here, when the fifth switch SWC1 (SWC1-1 to SWC1-n) is in a conductive state and the seventh switch SWC3 (SWC3-1 to SWC3-n) is in a non-conductive state, each of the third ends SB (SB1 to SBn) of the plurality of column lines B (B1 to Bn) becomes the first potential V1. Conversely, when the fifth switch SWC1 (SWC1-1 to SWC1-n) is in a non-conductive state and the seventh switch SWC3 (SWC3-1 to SWC3-n) is in a conductive state, each of the third ends SB (SB1 to SBn) of the plurality of column lines B (B1 to Bn) becomes the second potential V2. Therefore, for example, the third selection unit SL3 can set each of the third ends SB (SB1 to SBn) of the plurality of column lines B to either the first potential V1 or the second potential V2 based on a command from the control unit CTRL.

[0077] In the element array circuit 2, both the sixth switch SWC2 (SWC2-1 to SWC2-n) and the eighth switch SWC4 (SWC4-1 to SWC4-n) connected to the same fourth end EB (EB1 to SBn) do not become conductive at the same time. However, it is possible for both the sixth switch SWC2 (SWC2-1 to SWC2-n) and the eighth switch SWC4 (SWC4-1 to SWC4-n) connected to the same fourth end EB (EB1 to EBn) to be non-conductive. That is, at least one of the sixth switch SWC2 (SWC2-1 to SWC2-n) and the eighth switch SWC4 (SWC4-1 to SWC4-n) connected to the same fourth end EB (EB1 to EBn) is non-conductive. Here, when the sixth switch SWC2 (SWC2-1 to SWC2-n) is conductive and the eighth switch SWC4 (SWC4-1 to SWC4-n) is non-conductive, each of the fourth ends EB (EB1 to EBn) of the plurality of column lines B (B1 to Bn) becomes the first potential V1. Conversely, when the sixth switch SWC2 (SWC2-1 to SWC2-n) is non-conductive and the eighth switch SWC4 (SWC4-1 to SWC4-n) is conductive, each of the fourth ends EB (EB1 to EBn) of the plurality of column lines B (B1 to Bn) becomes the second potential V2. Therefore, for example, the fourth selection unit SL4 can set each of the fourth ends EB (EB1 to EBn) of the plurality of column lines B to either the first potential V1 or the second potential V2 based on a command from the control unit CTRL.

[0078] [Measurement operation in the element array circuit 2] In the element array circuit 2, for example, measurements for each of the plurality of resistance elements R can be performed as follows. The following measurement operations are performed according to a command from the control unit CTRL.

[0079] FIG. 17 is a flowchart for explaining the measurement operation of the element array circuit 2. First, for example, all switches of the first to fourth selection units SL1 to SL4 are set to a non-conductive state (step S701). Specifically, all of the first switch SWR1 (SWR1-1 to SWR1-m), the second switch SWR2 (SWR2-1 to SWR2-m), the third switch SWR3 (SWR3-1 to SWR3-m), the fourth switch SWR4 (SWR4-1 to SWR4-m), the fifth switch SWC1 (SWC1-1 to SWC1-m), the sixth switch SWC2 (SWC2-1 to SWC2-m), the seventh switch SWC3 (SWC3-1 to SWC3-m), and the eighth switch SWC4 (SWC4-1 to SWC4-m) shown in FIG. 16 are set to a non-conductive state.

[0080] Next, a selection row line AS corresponding to the selection resistance element RS to be measured is selected (step S702). This step S302 is performed in the same manner as step 102 in FIG. 2 described in the first embodiment. Note that in FIG. 16, the case where the selection row line AS is the row line A1 is illustrated.

[0081] Next, a selection column line BS corresponding to the selection resistance element RS to be measured is selected (step S703). Specifically, the fifth switch SWC1 corresponding to the selection column line BS to which the selection resistance element RS is connected is set to the conductive state, and the seventh switch SWC3 corresponding to the selection column line BS is set to the non-conductive state. Thereby, the selection column line BS is connected to the operational amplifier OP. Also, the fifth switch SWC1 corresponding to the non-selection column line BU is maintained in the non-conductive state, and the seventh switch SWC3 corresponding to the non-selection column line BU is set to the conductive state. In FIG. 16, the case where the selection column line BS is the column line B1 is illustrated. Therefore, the fifth switches SWC1-1 and the seventh switches SWC3-2 to 3-n are in the conductive state, and the fifth switches SWC1-2 to 1-n and the seventh switch SWC3-1 are in the non-conductive state. In the element array circuit 2, a voltage (V2 - V1) which is the difference between the first potential V1 and the second potential V2 is applied to the resistance element R(1,1) as the selection resistance element RS, and a current depending on the resistance value of the resistance element R(1,1) flows through the resistance element R(1,1) and flows toward the capacitance element CP1 via the column line B1. On the other hand, the second potential V2 is applied to each of the other row lines A2 to Am other than the row line A1 which is the selection row line AS, and the column lines B1 to Bn. Therefore, since the voltage applied to the resistance elements R other than the resistance element R(1,1) as the selection resistance element RS becomes 0, no current flows through the resistance elements R other than the resistance element R(1,1).

[0082] Finally, the output voltage corresponding to the selection resistance element RS is measured (step S704). Specifically, the output voltage from the output terminal T3 of the operational amplifier OP1 due to the selection resistance element RS connected to both the selection row line AS and the selection column line BS is measured. The current flowing through the selection column line BS is converted into a voltage by the capacitance element CP1 and output as the output voltage Vout from the output terminal T3 of the operational amplifier OP1. The resistance value of the selection resistance element RS or the intensity of the electromagnetic wave (infrared ray) irradiated to each selection resistance element RS can be calculated from the output voltage Vout.

[0083] As described above, the measurement operation in the element array circuit 1 is completed. When measuring the output voltage Vout corresponding to other resistance elements R other than the resistance element R(1,1), the above steps S301 to S304 are repeated. Note that the method for measuring the resistance value of the resistance element R in the element array circuit 2 described above is an example, and the present embodiment is not limited to the above measurement method.

[0084] [Function and Effect of Element Array Circuit 2] In the element array circuit 2 of the present embodiment as well, the same effects as those of the element array circuit 1 of the first embodiment can be expected. Furthermore, in the element array circuit 2 of the present embodiment, since each of the plurality of column lines B is selectively connected to one operational amplifier OP1 and one operational amplifier OP2, compared with the element array circuit 1 of the first embodiment, a more compact configuration can be achieved.

[0085] <3. Third Embodiment> FIG. 18 is a schematic diagram schematically showing a configuration example of a sensor device 101 including the element array circuit of the present invention. As shown in FIG. 18, the sensor device 101 includes a detection unit 10, an arithmetic unit 20, a storage unit 30, and an output unit 40. The sensor device 101 is, for example, an electromagnetic wave sensor that detects the intensity of received electromagnetic waves. Note that the configuration of the sensor device 101 shown in FIG. 18 is an example and is not limited thereto.

[0086] The detection unit 10 has at least one of the element array circuits 1 to 2 described in the first and second embodiments. The detection unit 10 is, for example, an infrared detection unit that receives infrared rays and outputs a voltage that changes according to the intensity of the received infrared rays. However, the detection unit 10 may receive electromagnetic waves other than infrared rays (for example, terahertz waves) and output a voltage that changes according to the intensity of the received electromagnetic waves.

[0087] The arithmetic unit 20 receives the output voltage from the detection unit 10 and performs arithmetic processing such as converting it into data of a desired parameter. The storage unit 30 stores the data generated by the arithmetic unit 20. The output unit 40 outputs the data generated by the arithmetic unit 20 to an external device as an electrical signal.

[0088] According to the sensor device 101 of the present embodiment, since it includes the detection unit 10 having at least one of the element array circuits 1 to 4, the operation reliability is high.

[0089] Here, the case where the resistance element R in the detection unit 10 is a light receiving element that converts electromagnetic waves such as infrared rays into an electrical signal is exemplified, but the sensor device 101 of the present embodiment is not limited to that case.

[0090] For example, as the resistance elements R of the element array circuits 1 to 2 in the detection unit 10, a thermosensitive resistor using a thermistor material, a temperature-sensitive conductive ink material, or the like may be employed. Such a thermosensitive resistor is configured to change its electrical resistance value according to the level of temperature. In that case, the sensor device 101 becomes a temperature sensor capable of detecting the temperature distribution in the plane.

[0091] Alternatively, as the resistance elements R of the element array circuits 1 to 2 in the detection unit 10, a pressure-sensitive element using a pressure-sensitive conductive ink material or the like may be employed. Such a pressure-sensitive element is configured to change its electrical resistance value according to the intensity of the applied pressure. The sensor device 101 including the detection unit 10 using the pressure-sensitive element as the resistance element R becomes a pressure sensor capable of detecting the pressure distribution in the plane.

[0092] Furthermore, a strain gauge may be employed as the resistance element R of the element array circuits 1 to 2 in the detection unit 10. Such a strain gauge is configured to change its electrical resistance value according to the intensity of the applied stress. The sensor device 101 including the detection unit 10 using the strain gauge as the resistance element R becomes a strain sensor capable of detecting the stress distribution in the plane.

[0093] <4. Modification Example> The present disclosure has been described above by way of several embodiments, but the present disclosure is not limited to these embodiments and various modifications are possible.

[0094] For example, in the drawings describing the element array circuits 1 to 2 of the first and second embodiments above, the case where the extending directions of a plurality of row lines are parallel to each other is illustrated, but the present disclosure is not limited thereto, and the plurality of row lines may be non-parallel to each other. Further, the plurality of row lines are not limited to extending linearly, and may extend in a curved shape as a whole, or may have a shape including a curved portion or a bent portion in part. Similarly, in the drawings describing the element array circuits 1 to 2, the case where the extending directions of a plurality of column lines are parallel to each other is illustrated, but the present disclosure is not limited thereto, and the plurality of column lines may be non-parallel to each other. Further, the present disclosure is not limited to the case where the plurality of row lines and the plurality of column lines extend in directions orthogonal to each other. Furthermore, the plurality of column lines are not limited to extending linearly, and may extend in a curved shape as a whole, or may have a shape including a curved portion or a bent portion in part.

[0095] Also, the element array circuits 1 to 2 of the first and second embodiments above have a plurality of row lines and a plurality of column lines, but the present disclosure is not limited thereto. For example, the element array circuit 3 shown in FIG. 19 is configured to include only one row line A. The configuration of the element array circuit 3 is substantially the same as the configuration of the element array circuit 1 (FIG. 1) except that it has only one row line A instead of the plurality of row lines A1 to Am. Further, the element array circuit 4 shown in FIG. 20 is configured to include only one column line B. The configuration of the element array circuit 4 is substantially the same as the configuration of the element array circuit 1 except that it has only one column line B instead of the plurality of column lines B1 to Bn.

[0096] Also, while the element array circuits 1 and 2 of the above-described first and second embodiments have a plurality of resistance elements R as a plurality of impedance elements, the present disclosure is not limited thereto. For example, the element array circuit 5 shown in FIG. 21 has a plurality of semiconductor elements SC. The configuration of the element array circuit 5 is substantially the same as the configuration of the element array circuit 1 except that it has a plurality of semiconductor elements SC instead of a plurality of resistance elements R. The semiconductor element SC is, for example, one whose electrical characteristics change depending on temperature, such as a diode. For example, instead of the thermistor film cited as an example of the resistance element R in the first embodiment, a diode whose impedance value changes depending on temperature is used, and the temperature in the diode is detected as an output voltage resulting from the impedance value of the diode, and it may be applied to an electromagnetic wave sensor for detecting the intensity of electromagnetic waves such as infrared rays or a temperature sensor capable of detecting a temperature distribution in a plane.

[0097] Note that the effects described in this specification are merely illustrative and not limiting, and there may be other effects.

Explanation of Reference Numerals

[0098] 1 to 5... Element array circuits, A (A1 to Am)... Bump wires, B (B1 to Bn)... Column wires, CTRL... Control unit, CP (CP1-1 to CP1-n, CP2-1 to CP2-n)... Capacitive elements, OP (OP1-1 to OP1-n, OP2-1 to OP2-n)... Operational amplifiers, PS1, PS2... DC power supplies, R (R(1,1) to R(m,n))... Resistance elements, SL1 to SL4... First to fourth selection units, SWR1 (SWR1-1 to SWR1-m)... First switch, SWR2 (SWR2-1 to SWR2-m)... Second switch, SWR3 (SWR3-1 to SWR3-m)... Third switch, SWR4 (SWR4-1 to SWR4-m)... Fourth switch, SWC1 (SWC1-1 to SWC1-n)... Fifth switch, SWC2 (SWC2-1 to SWC2-n)... Sixth switch, WB1 (WB1-1 to WB1-n), WB2 (WB2-1 to WB2-n)... Connection wires, V1... First potential, V2... Second potential.

Claims

1. One or more first wirings, each including one first end and one second end, A plurality of second wirings each extending in a direction different from that of the one or more first wirings, A plurality of impedance elements each connected to both one of the one or more first wirings and one of the plurality of second wirings, One or more operational amplifiers each having one positive input terminal set to a first potential and one negative input terminal connectable to one of the plurality of second wirings, One or more first selection units each connected to a corresponding one of the one or more first ends, and selecting one option from a first option group including a first option of applying the first potential to the corresponding one of the one or more first ends and a second option of applying a second potential different from the first potential to the corresponding one of the one or more first ends, One or more second selection units each connected to a corresponding one of the one or more second ends, and selecting one option from a second option group including a third option of applying the first potential to the corresponding one of the one or more second ends and a fourth option of applying the second potential to the corresponding one of the one or more second ends, having an element array circuit.

2. Further comprising a control unit, The control unit, causes the one or more first selection units to apply the first potential to one of the one or more first ends and apply the second potential to the other one or more first ends other than the one first end, causes the one or more second selection units to apply the first potential to one of the one or more second ends corresponding to the one first end to which the first potential is applied, and apply the second potential to the other one or more second ends other than the one second end The element array circuit according to Claim 1.

3. The control unit, performs the application of the first potential to the one first end and the application of the first potential to the one second end in synchronization. The element array circuit according to Claim 2.

4. Further comprising one or more third selection units, one or more fourth selection units The one or more operational amplifiers include one or more first operational amplifiers and one or more second operational amplifiers, Each of the plurality of second wirings includes one third end and one fourth end, Each of the one or more third selection units, ​ Provided between each of the plurality of said third ends and the negative input terminal of the first operational amplifier, and performing a selection operation of selecting either a conductive state or a non-conductive state between each of the plurality of third ends and the negative input terminal of the first operational amplifier, Each of the one or more fourth selection units, Provided between each of the plurality of said fourth ends and the negative input terminal of the second operational amplifier, and performing a selection operation of selecting either a conductive state or a non-conductive state between each of the plurality of fourth ends and the negative input terminal of the second operational amplifier, The element array circuit according to claim 1.

5. The one or more first operational amplifiers are a plurality of first operational amplifiers, The negative input terminal of each of the plurality of first operational amplifiers is connected to a corresponding one of the plurality of second wirings via one of the third selection units. The element array circuit according to claim 4.

6. The one or more second operational amplifiers are a plurality of second operational amplifiers, The negative input terminal of each of the plurality of second operational amplifiers is connected to a corresponding one of the plurality of second wirings via one of the fourth selection units. The element array circuit according to claim 4 or claim 5.

7. Further comprising a control unit, The control unit, In a state where the first potential is applied to the first end of one selected first wiring selected from the one or more first wirings by one of the one or more first selection units, and in a state where the first potential is applied to the second end of the one selected first wiring by one of the one or more second selection units, at least in one of the states, When the conductive state is selected for one of the third selection units connected to the third end of one selected second wiring selected from the plurality of second wirings, and the output from one of the first operational amplifiers connected to the one third selection unit is an abnormal value, the conductive state is selected for one of the fourth selection units connected to the fourth end of the one selected second wiring. The element array circuit according to claim 4.

8. Further comprising a control unit, The second option group further includes a fifth option having a corresponding one of the one or more second ends as an open end, The control unit, One of the first selection units among the one or more first selection units applies the first potential to the first end of one of the first wirings connected to one selected impedance element selected from the plurality of impedance elements, and one of the one or more second selection units sets the second end of the first wiring connected to the selected impedance element to an open end in a first state. When the output from one of the first operational amplifiers corresponding to the selected impedance element is an abnormal value, it is determined that there is a disconnection in either one of the first portion from the selected impedance element to the one first selection unit in the first wiring connected to the selected impedance element or the second portion from the selected impedance element to the first operational amplifier in the second wiring connected to the selected impedance element, or in both the first portion and the second portion. The element array circuit according to claim 1.

9. further comprising a control unit, the second option group further includes a fifth option in which a corresponding one of the one or more second ends is an open end, the control unit, one of the one or more first selection units applies the first potential to the first end of one of the first wirings connected to one selected impedance element selected from the plurality of impedance elements, and one of the one or more second selection units sets the second end of the first wiring connected to the selected impedance element to an open end in a first state. When the output from one of the first operational amplifiers corresponding to the selected impedance element is an abnormal value, one of the first selection units applies the first potential to the first end of the first wiring connected to the selected impedance element, and one of the second selection units applies the first potential to the second end of the first wiring connected to the selected impedance element. When the output from the first operational amplifier corresponding to the selected impedance element is a normal value in a second state, it is determined that there is a disconnection in the first portion from the selected impedance element to the one first selection unit in the first wiring connected to the selected impedance element. The element array circuit according to claim 1.

10. the control unit, When one of the third selection units corresponding to the selected impedance element selects a conductive state, the output from the first operational amplifier connected to the one third selection unit corresponding to the selected impedance element is an abnormal value. When one of the fourth selection units corresponding to the selected impedance element selects a conductive state and the output from the second operational amplifier connected to the one fourth selection unit corresponding to the selected impedance element is a normal value, It is determined that there is a disconnection point in the second part from the selected impedance element to the first operational amplifier among the one second wirings connected to the selected impedance element. The element array circuit according to claim 4.

11. A plurality of first wirings, each including one first end and one second end; One or more second wirings extending in a direction different from each of the plurality of first wirings; A plurality of impedance elements each connected to one of the plurality of first wirings and one of the one or more second wirings; One or more operational amplifiers each having one positive input terminal set to a first potential and one negative input terminal connectable to one of the one or more second wirings; A plurality of first selection units each connected to a corresponding one of the plurality of first ends and selecting one option from a first option group including a first option of applying the first potential to the corresponding one of the plurality of first ends and a second option of applying a second potential different from the first potential to the corresponding one of the plurality of first ends; A plurality of second selection units each connected to a corresponding one of the plurality of second ends and selecting one option from a second option group including a third option of applying the first potential to the corresponding one of the plurality of second ends and a fourth option of applying the second potential to the corresponding one of the plurality of second ends; having an element array circuit.

12. further comprising a control unit, wherein the control unit applies the first potential to one of the plurality of first ends by the plurality of first selection units and applies the second potential to one or more of the first ends other than the one first end. By the plurality of second selection units, for one of the plurality of second ends corresponding to the one first end to which the first potential is applied among the plurality of second ends, the first potential is applied, and the second potential is applied to one or more other second ends other than the one second end The element array circuit according to claim 11.

13. The control unit Performs the application of the first potential to the one first end and the application of the first potential to the one second end in synchronization. The element array circuit according to claim 12. Selective resistance element

14. One or more third selection units, and One or more fourth selection units And further has The one or more operational amplifiers include one or more first operational amplifiers and one or more second operational amplifiers. Each of the one or more second wirings includes one third end and one fourth end. Each of the one or more third selection units Is provided between each of the one or more third ends and the negative input terminal of the first operational amplifier, and performs a selection operation of selecting either a conductive state or a non-conductive state between each of the one or more third ends and the negative input terminal of the first operational amplifier. Each of the one or more fourth selection units Is provided between each of the one or more fourth ends and the negative input terminal of the second operational amplifier, and performs a selection operation of selecting either a conductive state or a non-conductive state between each of the one or more fourth ends and the negative input terminal of the second operational amplifier. The element array circuit according to claim 11.

15. A sensor having the element array circuit according to claim 1 or claim 11.

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