Liquid discharge device and article manufacturing method

Abstract

To provide a technique suitable for preventing liquid discharged from a discharge member from infiltrating into a gap between a side surface of the discharge member and a frame member, and facilitating replacement of the discharge member in a liquid discharge device.SOLUTION: The liquid discharge device includes a discharge member having multiple discharge holes for discharging a first liquid, a frame member having an opening in which the discharge member is disposed, and a supply unit for supplying a second liquid to the gap between the side surface of the discharge member disposed in the opening and the frame member. While the second liquid supplied into the gap by the supply unit is retained in the gap, the first liquid is discharged from each of the multiple discharge holes of the discharge member.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a liquid ejection device and an article manufacturing method. [Background technology]

[0002] In recent years, when manufacturing various functional elements, attempts have been made to form patterns on substrates (patterning) using liquid ejection devices that eject (supply) liquid, which will be the material for the functional elements, as droplets onto the substrate using the inkjet method.Patterning using such liquid ejection devices has the advantages of being able to perform on-demand patterning, resulting in high material usage efficiency, being a non-vacuum process that allows for relatively small manufacturing equipment, and being able to coat large areas at high speeds.

[0003] In a liquid ejection head (inkjet head) of a liquid ejection device, an ejection member having a plurality of ejection holes for ejecting liquid can be disposed in each of a plurality of openings in a frame member to increase the density of droplets ejected onto a substrate. In this case, a gap can be provided between the side surface of the ejection member and the frame member to enable adjustment of the relative positions of the ejection members disposed in each opening of the frame member. However, providing such a gap can allow mist generated during ink ejection to enter the interior of the liquid ejection head through the gap and adhere to electrical contacts, potentially causing malfunction of the liquid ejection head. Patent Document 1 proposes sealing the gap with an elastic member to prevent mist from entering the interior of the liquid ejection head through the gap. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-107401 Summary of the Invention [Problem to be solved by the invention]

[0005] In the method of sealing the gap between the side of the discharge member and the frame member with an elastic member as described in Patent Document 1, it may be difficult to attach and detach the discharge member to and from the frame member when replacing the discharge member.

[0006] Therefore, the present invention aims to provide an advantageous technology for preventing liquid ejected from an ejection member from entering through the gap between the side of the ejection member and the frame member in a liquid ejection device, and for facilitating replacement of the ejection member. [Means for solving the problem]

[0007] In order to achieve the above object, one aspect of the present invention provides a liquid ejection device comprising an ejection member having a plurality of ejection holes for ejecting a first liquid, a frame member having an opening in which the ejection member is disposed, and a supply unit that supplies a second liquid to a gap between the frame member and a side surface of the ejection member disposed in the opening, wherein the first liquid is ejected from each of the plurality of ejection holes in the ejection member while the second liquid supplied to the gap by the supply unit is retained in the gap.

[0008] Further objects and other aspects of the present invention will become apparent from the following description of preferred embodiments with reference to the accompanying drawings. [Effects of the Invention]

[0009] According to the present invention, for example, in a liquid ejection device, it is possible to provide an advantageous technology for preventing liquid ejected from an ejection member from entering through the gap between the side of the ejection member and the frame member, and for facilitating replacement of the ejection member. [Brief explanation of the drawings]

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Mode for Carrying Out the Invention

[0011] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the invention according to the claims. Although a plurality of features are described in the embodiments, not all of these plurality of features are essential for the invention, and the plurality of features may be arbitrarily combined. Further, in the accompanying drawings, the same or similar configurations are denoted by the same reference numerals, and redundant descriptions are omitted.

[0012] In this specification and the accompanying drawings, directions are indicated in an XYZ coordinate system in which a plane parallel to the plane on which the substrate is disposed is defined as the XY plane. Directions parallel to the X-axis, Y-axis, and Z-axis in the XYZ coordinate system are defined as the X-direction, Y-direction, and Z-direction, respectively, and rotations around the X-axis, Y-axis, and Z-axis are defined as θX, θY, and θZ, respectively. Control and drive (movement) with respect to the X-axis, Y-axis, and Z-axis each mean control or drive (movement) in a direction parallel to the X-axis, Y-axis, and Z-axis, respectively. Also, control or drive with respect to the θX-axis, θY-axis, and θZ-axis each mean control or drive related to rotation around an axis parallel to the X-axis, rotation around an axis parallel to the Y-axis, and rotation around an axis parallel to the Z-axis, respectively.

[0013] <First Embodiment> A first embodiment according to the present invention will be described. FIG. 1 is a schematic diagram showing a configuration example of a liquid ejection device 1 according to this embodiment. The liquid ejection device 1 is a device that ejects (supplies, applies) a first liquid, which is a material for a functional element, onto a substrate to form a pattern, and functions as a substrate processing device that processes substrates such as display panels and semiconductor substrates. For example, the liquid ejection device 1 can be used for manufacturing display devices such as flat panel displays and OLED (Organic Light Emitting Diode) devices. In this specification, the first liquid ejected onto the substrate by the liquid ejection device 1 may be called ink, and its components are not particularly limited. For example, a liquid containing a solute and a solvent for forming an organic film on the substrate can be used as the first liquid.

[0014] The liquid ejection device 1 includes a substrate stage 3 that holds the substrate 2 and is movable in the XY directions. The substrate 2 can be appropriately selected from a glass substrate, a plastic substrate, a semiconductor wafer, etc., depending on the target product to be manufactured. The substrate 2 is typically a plate-shaped member, but is not limited to a specific shape as long as it can function as a substrate. For example, the substrate 2 may be a deformable film or a disk-shaped substrate. Further, the substrate stage 3 may include a substrate chuck 3a that holds the substrate 2 by a vacuum suction force, an electrostatic force, or the like, and a substrate drive unit 3b that drives the substrate chuck 3a in the XY directions. A receiving portion 8 (a tray, a recovery portion) for receiving the second liquid 22 discharged from a discharge head 10 described later may be provided in the substrate stage 3 (substrate drive unit 3b). The substrate drive unit 3b can function as a drive unit that drives the substrate 2 in the XY directions by driving the substrate chuck 3a and also drives the receiving portion 8 in the XY directions.

[0015] The liquid ejection device 1 includes a discharge head 10 capable of ejecting a first liquid 21 as droplets toward a substrate 2, a tank 4 for storing the first liquid 21, and a supply system 5 for supplying the first liquid 21 from the tank 4 to the discharge head 10. The discharge head 10 has a plurality of discharge members 11 that discharge the first liquid 21 as droplets according to a drive signal, and the discharge of the first liquid 21 (droplets) from each discharge member 11 is individually controlled by a control unit 7. Thereby, the first liquid 21 can be supplied (ejected) onto the substrate 2 with a desired distribution. The detailed configuration of the discharge head 10 will be described later. Here, the tank 4 may be disposed inside the liquid ejection device 1 or may be disposed outside the liquid ejection device 1. Further, the liquid ejection device 1 may be provided with a recovery unit 6 that performs a cleaning process or the like on the discharge head 10 to recover the discharge characteristics.

[0016] The control unit 7 is composed of a computer (information processing device) having a processor such as a CPU (Central Processing Unit) and a storage unit such as a memory, and controls each part of the liquid ejection device 1 to comprehensively control the ejection of the first liquid 21 onto the substrate 2. The control unit 7 may be configured by, for example, a PLD (abbreviation for Programmable Logic Device) such as an FPGA (abbreviation for Field Programmable Gate Array), or an ASIC (abbreviation for Application Specific Integrated Circuit), or a general-purpose computer into which a program is incorporated, or a combination of all or part of these.

[0017] In the liquid ejection device 1 configured as described above, while relatively driving (scanning) the discharge head 10 and the substrate 2 in the XY directions, the discharge control of the first liquid 21 in the discharge head 10 is performed. In the case of this embodiment, the control unit 7 drives the substrate 2 in the XY directions with respect to the discharge head 10 by a substrate stage 3 (substrate drive unit 3b), and causes the discharge head 10 to eject the first liquid 21 as droplets according to information indicating the arrangement of droplets on the substrate 2. Thereby, the first liquid can be supplied onto the substrate 2.

[0018] Next, a configuration example of the ejection head 10 in the liquid ejection device 1 of the present embodiment will be described. FIG. 2 is a schematic diagram showing a configuration example of the ejection head 10 of the present embodiment. The ejection head 10 includes an ejection member 11 and a frame member 12.

[0019] The ejection member 11 (ejection element, printed chip) has a plurality of ejection holes 11a for ejecting the first liquid 21 as droplets, and a piezoelectric element 11b for ejecting the first liquid 21 as droplets from each of the ejection holes 11a. Further, the frame member 12 has an opening 12a in which the ejection member 11 is disposed, and supports the ejection member 11 via a support member 13. The support member 13 is fixed to the upper surface of the frame member 12 and is connected by screws or the like to a part of the upper surface of the ejection member 11 disposed in the opening 12a of the frame member 12. Note that the support member 13 is disposed only above a part of the opening 12a and does not cover the entire opening 12a.

[0020] In recent years, in the liquid ejection device 1, since higher density of the ejected droplets on the substrate 2 is required, a plurality of ejection members 11 may be provided in the ejection head 10. In the ejection head 10 of the present embodiment shown in FIG. 2, a plurality (two) of openings 12a are provided in the frame member 12, and the ejection members 11 are disposed in each of the plurality of openings 12a. That is, in the ejection head 10 of the present embodiment, a plurality (two) of ejection members 11 are provided. Note that the number of ejection members 11 provided in the ejection head 10 is not limited to two, and may be one or three or more.

[0021] Thus, when a plurality of openings 12a are provided in the frame member 12, in order to enable adjustment of the relative positions in the XY direction between the ejection members 11 respectively disposed in the plurality of openings 12a, each opening 12a of the frame member 12 is formed with a dimension larger than that of the ejection member 11. That is, a gap G (hereinafter, sometimes simply referred to as "gap G") is provided between the side surface of the ejection member 11 and the frame member 12.

[0022] However, if the gap G is provided, mist 21a generated when the first liquid 21 is ejected from the ejection member 11 may enter the interior of the ejection head 10 through the gap G and adhere to electrical contacts, which may cause malfunction of the ejection head 10. Furthermore, since the ejection member 11 may be replaced from the ejection head 10, it is desirable that it be easy to attach and detach from the frame member 12. Therefore, the ejection head 10 of this embodiment further includes a liquid supply unit 14 that supplies the second liquid 22 to the gap G, and ejects the first liquid 21 from each ejection hole 11a of the ejection member 11 while the second liquid 22 supplied to the gap G by the liquid supply unit 14 is held in the gap G.

[0023] The liquid supply unit 14 (supply unit) supplies the second liquid 22 to the gap G between the side surface of the discharge member 11 and the frame member 12. In the case of the present embodiment, the liquid supply unit 14 supplies the second liquid 22 to the gap G via a supply nozzle 14a arranged in the gap G. The supply nozzle 14a can be supported by the frame member 12 via a support member 13.

[0024] Here, the second liquid 22 has the property of dissolving the first liquid 21 and is retained in the gap G in a liquid state, so it is preferable that the second liquid 22 be a liquid with as low volatility as possible. Furthermore, the second liquid 22 is preferable to have the property of not easily solidifying even after the first liquid 21 is dissolved (mixed) in it. The vapor pressure indicating the volatility of the second liquid 22 is preferably less than the vapor pressure of ethanol (6.4 kPa at 20°C), for example, and more preferably about 2.3 kPa at 20°C. Specifically, when the first liquid 21 is water-soluble, a liquid such as water can be used as the second liquid 22. On the other hand, when the first liquid 21 is water-insoluble, an organic solvent capable of dissolving the first liquid 21 can be used as the second liquid 22.

[0025] The ejection head 10 of this embodiment may further include a cover member 15 , an air pressure adjusting unit 16 , and a liquid suction unit 17 .

[0026] The cover member 15 is a member that covers the opening 12a of the frame member 12 so as to define a closed space 18 communicating with the gap G on the upper surface side of the frame member 12. In the case of this embodiment, the cover member 15 is configured to cover the entire upper surface of the frame member 12. Thereby, the closed space 18 communicating with the gap G is defined on the upper surface side of the frame member 12. Incidentally, hereinafter, the closed space 18 defined by the cover member 15 (that is, the internal space of the cover member 15) may be simply referred to as "closed space 18".

[0027] The air pressure adjustment unit 16 adjusts the air pressure in the closed space 18 defined by the cover member 15. The air pressure adjustment unit 16 of this embodiment may include an air supply system 16a that supplies gas (for example, air) to the closed space 18 and an exhaust system 16b that discharges gas from the closed space 18. For example, the air pressure adjustment unit 16 adjusts the air pressure in the closed space 18 so as to hold the second liquid 22 supplied to the gap G by the liquid supply unit 14 in the gap G in a state where the discharge member 11 discharges the first liquid 21. Further, in the supply process of supplying the second liquid 22 to the gap G, the air pressure adjustment unit 16 decreases the air pressure in the closed space 18 as the amount of the second liquid 22 in the gap G increases so as to hold the second liquid 22 supplied to the gap G by the liquid supply unit 14 in the gap G. On the other hand, in the removal process of removing the second liquid 22 from the gap G, the air pressure adjustment unit 16 increases the air pressure in the closed space 18 more than when holding the second liquid 22 in the gap G so as to discharge the second liquid 22 from the lower end of the gap G. Details of the supply process and the removal process will be described later.

[0028] The liquid suction unit 17 (suction unit) sucks the second liquid 22 from the gap G. In the case of this embodiment, the liquid suction unit 17 sucks the second liquid 22 from the gap G through a suction nozzle 17a disposed in the gap G. The liquid suction unit 17 can be used in the removal process of removing the second liquid from the gap G. That is, as a method of the removal process, there are a method of increasing the air pressure in the closed space 18 by the air pressure adjustment unit 16 and discharging the second liquid 22 from the lower end of the gap G, and a method of sucking the second liquid 22 from the gap G by the liquid suction unit 17. Two types of methods related to the removal process will be described later.

[0029] [Supply Process] The supply process will be described below. FIG. 3 is a diagram showing the supply process of this embodiment. In FIG. 3, only the discharge member 11, a part of the frame member 12 (the opening 12a and its periphery), the supply nozzle 14a, and the suction nozzle 17a are shown, and the illustration of other members (for example, the cover member 15, the air pressure adjustment unit 16, etc.) is omitted. As described above, the supply process is a process of supplying the second liquid 22 to the gap G between the side surface of the discharge member 11 and the frame member 12 by the liquid supply unit 14, and can be performed under the control of the control unit 7.

[0030] FIG. 3(a) shows the first stage of the supply process. In the first stage, the second liquid 22 is supplied to the gap G through the supply nozzle 14a by the liquid supply unit 14 without adjusting the air pressure in the closed space 18 (the internal space of the cover member 15) by the air pressure adjustment unit 16. The supply of the second liquid 22 to the gap G in the first stage is performed so as to satisfy the following conditional expression to prevent the second liquid 22 from leaking from the lower end of the gap G. The lower surface of the second liquid 22 supplied to the gap G in this first stage has a convex meniscus shape protruding downward. That is, a part of the second liquid 22 supplied to the gap G protrudes from the lower surface of the frame member 12 to -Z. F=(L in +L out )×ν×cosθ, F>SG×H×ρ×g

[0031] Each parameter in the above conditional expression is as shown in the partial enlarged view of FIG. 3(a). Specifically, "F" represents the force applied to the second liquid 22 in the gap G, "L in " represents the inner peripheral length (inner perimeter) of the gap G, and "L out " represents the outer peripheral length (outer perimeter) of the gap G. "ν" represents the surface tension of the second liquid 22, and "θ" represents the contact angle of the second liquid 22. "SG" represents the total area of the gap G when the discharge head 10 (the discharge member 11, the frame member 12) is viewed from below (-Z direction). "H" represents the water level (liquid film thickness) of the second liquid 22, "ρ" represents the liquid density of the second liquid 22, and "g" represents the acceleration due to gravity.

[0032] Here, the frame member 12 of this embodiment has a protrusion 12b at its lower part that protrudes toward the inside of the opening 12a so that the opening area of the opening 12a is smaller at the first height position h1 than at the second height position h2. The first height position h1 is the position of the bottom surface of the frame member 12 in the Z direction. The second height position h2 is a position higher than the first height position h1 in the Z direction, for example, the center position of the frame member 12 in the Z direction. The protrusion 12b of the frame member 12 can be configured so that the amount of protrusion toward the inside of the opening 12a increases the closer it is to the bottom surface at the bottom of the frame member 12 (i.e., the closer it is to the -Z direction).

[0033] 3(b) shows the second stage of the supply process. In the second stage, the air pressure in the closed space 18 is adjusted by the air pressure adjustment unit 16 so that the second liquid 22 supplied to the gap G via the supply nozzle 14a is retained within the gap G. At this time, the air pressure adjustment unit 16 preferably adjusts the air pressure in the closed space 18 so that the lower surface of the second liquid 22 in the gap G has a concave meniscus shape that is concave upward. For example, the air pressure adjustment unit 16 evacuates the closed space 18 to reduce the air pressure in the closed space 18 from atmospheric pressure to negative pressure P1 so that the lower surface of the second liquid 22 in the gap G has a concave meniscus shape.

[0034] Figure 3(c) shows the third stage of the supply process. In the third stage, the second liquid 22 is further supplied to the gap G through the supply nozzle 14a by the liquid supply unit 14. At this time, while the second liquid 22 is held in the gap G, the air pressure in the closed space 18 may be adjusted by the air pressure adjustment unit 16 so that the lower surface of the second liquid 22 maintains a concave meniscus shape. For example, as the amount of the second liquid 22 in the gap G (the supply amount of the second liquid 22 by the liquid supply unit 14) increases, the air pressure adjustment unit 16 adjusts the air pressure in the closed space 18 by exhausting the closed space 18 so as to decrease the air pressure in the closed space 18 from the negative pressure P1 to the negative pressure P0. By this third stage, the water level of the second liquid 22 in the gap G is raised, and a liquid film thickness capable of maintaining the second liquid 22 in the gap G even when there is an external disturbance input such as vibration or pressure fluctuation, that is, a liquid film thickness capable of maintaining the space blocking function can be obtained.

[0035] Also, after the implementation of the third stage, the air pressure adjustment unit 16 adjusts the air pressure in the closed space 18 so that the second liquid 22 is held in the gap G and the lower surface of the second liquid 22 maintains a concave meniscus shape. For example, the air pressure adjustment unit 16 can adjust the air pressure in the closed space 18 so that the air pressure in the closed space 18 maintains the negative pressure P0.

[0036] The second liquid 22 supplied to the gap G by the above supply process can function as a sealing part that prevents the mist 21a generated when the first liquid 21 is discharged from the discharge member 11 from entering the inside of the discharge head 10 through the gap G. Further, since the second liquid 22 in the gap G has the property of dissolving the first liquid 21 (mist 21a), it is possible to avoid the situation where the mist 21a adheres in the gap G and makes it difficult to replace (remove and attach) the discharge member 11 with respect to the discharge head 10 (frame member 12).

[0037] [Removal process] The removal process (recovery process) will be described below. As described above, the removal process is a process of removing (recovering) the second liquid 22 from the gap G between the side surface of the discharge member 11 and the frame member 12, and can be performed under the control of the control unit 7. The removal process is performed when replacing (attaching or removing) the discharge member 11. Furthermore, since the properties of the second liquid 22 in the gap G may change due to deterioration over time, the removal process can also be performed when the second liquid 22 in the gap G is replaced periodically. After the removal process is performed, the supply process can be performed.

[0038] As mentioned above, there are two methods for the removal process: a method using an air pressure adjustment unit 16 (hereinafter referred to as the gas adjustment method), and a method using a liquid suction unit 17 (hereinafter referred to as the liquid suction method).

[0039] First, the removal process of the gas adjustment method will be described. Fig. 4 is a diagram showing the removal process of the gas adjustment method in this embodiment. Fig. 4 shows only the discharge member 11, part of the frame member 12 (opening 12a and its periphery), supply nozzle 14a, suction nozzle 17a, receiving unit 8, and substrate driving unit 3b, and does not show other members (for example, cover member 15, air pressure adjustment unit 16, etc.).

[0040] 4(a) shows the first stage of the gas adjustment type removal process. In the first stage, the receiving unit 8 provided on the substrate stage 3 is driven by the substrate driving unit 3b so that the receiving unit 8 is positioned below the discharge head 10 (gap G). As described above, the receiving unit 8 is a member that receives (recovers) the second liquid 22 discharged from the lower end of the gap G. In this embodiment, the receiving unit 8 is provided on the substrate stage 3 and driven by the substrate driving unit 3b, but this is not limiting, and the receiving unit 8 may be provided separately from the substrate stage 3 and driven by a driving unit different from the substrate driving unit 3b.

[0041] FIG. 4(b) shows the second stage of the removal process using the gas adjustment method. In the second stage, the air pressure adjustment unit 16 adjusts the air pressure in the closed space 18 so that the air pressure in the closed space 18 is higher than when the second liquid 22 is retained in the gap G. This causes the second liquid 22 to be discharged from the lower end of the gap G. For example, in the second stage, the air pressure adjustment unit 16 adjusts the air pressure in the closed space 18 by supplying air to the closed space 18 so that the air pressure in the closed space 18 increases from a negative pressure P0 to a positive pressure P2. For example, the air pressure adjustment unit 16 may gradually increase the air pressure in the closed space 18 from a negative pressure P0 to a positive pressure P2 as the amount of the second liquid 22 in the gap G decreases. The reduction rate (time change) of the second liquid 22 in the gap G during the removal process may be obtained from the detection results of a sensor that detects the level of the second liquid 22 in the gap G, if one is provided, or may be obtained in advance by experiment, simulation, or the like.

[0042] Next, the removal process using the liquid suction method will be described. Fig. 5 is a diagram showing the removal process using the liquid suction method in this embodiment. Fig. 5 shows the discharge member 11, part of the frame member 12 (opening 12a and its surroundings), supply nozzle 14a, and suction nozzle 17a, but does not show other members (for example, cover member 15, air pressure adjustment unit 16, etc.).

[0043] In the removal process using the liquid suction method, the second liquid 22 is sucked from the gap G by the liquid suction unit 17 via the suction nozzle 17a. At this time, the air pressure adjustment unit 16 may adjust the air pressure in the closed space 18 so that the second liquid 22 does not leak out from the lower end of the gap G. For example, the air pressure adjustment unit 16 may increase the air pressure in the closed space 18 from negative pressure P0 to negative pressure P1.

[0044] Here, the above example has described the removal process of completely removing all of the second liquid 22 in the gap G by either the gas adjustment method or the liquid suction method. However, the removal process may be performed by using the gas adjustment method and the liquid suction method in combination. In this case, in the initial stage of the removal process, the liquid suction method can be used. For example, so that a certain amount of the second liquid 22 remains in the gap G, the second liquid 22 is suctioned from the gap G through the suction nozzle 17a by the liquid suction unit 17. The air pressure adjustment unit 16 sets the air pressure in the closed space 18 to the negative pressure P0 in the initial stage, and increases the air pressure in the closed space 18 from the negative pressure P0 to the negative pressure P1 after the initial stage ends. Next, in the later stage of the removal process, the gas adjustment method can be used. For example, the receiving portion 8 is disposed below the gap G, and in this state, the air pressure adjustment unit 16 increases the air pressure in the closed space 18 from the negative pressure P1 to the positive pressure P2. Thereby, the second liquid 22 is discharged from the lower end of the gap G.

[0045] As described above, in the liquid ejection device 1 of the present embodiment, the first liquid 21 is ejected from each ejection hole 11a of the ejection member 11 in a state where the second liquid 22 supplied to the gap G by the liquid supply unit 14 is held in the gap G. Thereby, in the liquid ejection device 1, it is possible to prevent the intrusion of the mist 21a from the gap G between the side surface of the ejection member 11 and the frame member 12, and to facilitate the replacement of the ejection member 11.

[0046] <Second Embodiment> The second embodiment according to the present invention will be described. In this embodiment, a modified example of the ejection member 11 will be described. Note that this embodiment basically follows the first embodiment, and may follow the first embodiment except for the matters mentioned below.

[0047] FIG. 6 shows the structure of the discharge member 11 and its surroundings in the discharge head 10 of this embodiment. In the discharge head 10 of this embodiment, the side (outer peripheral surface) of the discharge member 11 is covered with an outer peripheral member 19a, and a cable 19b for transmitting signals to the piezoelectric element 11b of the discharge member 11 is disposed between the discharge member 11 and the outer peripheral member 19a. Providing the outer peripheral member 19a on the side surfaces of the discharge member 11 and the cable 19b makes the side surfaces smoother, making them less likely to accumulate liquid compared to when the discharge member 11 and the cable 19b are exposed, and improving the replaceability of the discharge member 11. Therefore, it is desirable that the outer peripheral member 19a be a member that has no seams on the side surfaces of the discharge member 11 and can tightly cover the discharge member 11 and the cable 19b. For example, a resin heat-shrinkable tube can be used as the outer peripheral member 19a. The cable 19b is electrically connected to the piezoelectric element 11b of the discharge member 11, and the connection portion may be sealed with resin or the like to prevent electrical malfunctions. The cable 19b may be, for example, a flexible cable.

[0048] 6, a groove 11c for storing the first liquid 21 that has entered between the discharge member 11 and the outer peripheral member 19a due to capillary action may be provided on the side surface of the discharge member 11. By providing such a groove 11c, it is possible to prevent the first liquid 21 from entering the connection portion between the discharge member 11 (piezoelectric element 11b) and the cable 19b.

[0049] <Embodiment of an article manufacturing method> The article manufacturing method according to an embodiment of the present invention is suitable for manufacturing articles such as display panels such as organic ELs, microdevices such as semiconductor devices, and elements having fine structures. The article manufacturing method of the present embodiment includes a discharging step of discharging (supplying) a liquid onto a substrate using the above-described liquid discharging device, a processing step of processing the substrate on which the liquid has been discharged in the discharging step, and a step of manufacturing an article from the substrate processed in the processing step. Further, such an article manufacturing method includes other well-known steps (firing, cooling, washing, oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). The article manufacturing method of the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared with the conventional method.

[0050] <Summary of Embodiment> The disclosure of this specification includes at least the following liquid discharging device and article manufacturing method. (Item 1) A discharging member having a plurality of discharging holes for discharging a first liquid, A frame member having an opening in which the discharging member is disposed, A supply unit that supplies a second liquid to a gap between a side surface of the discharging member disposed in the opening and the frame member, and The first liquid is discharged from each of the plurality of discharging holes in the discharging member in a state where the second liquid supplied to the gap by the supply unit is held in the gap. A liquid discharging device characterized by that. (Item 2) The supply unit supplies the second liquid to the gap through a supply nozzle disposed in the gap. The liquid discharging device according to Item 1, characterized by that. (Item 3) A cover member that covers the opening so as to define a closed space communicating with the gap on the upper surface side of the frame member, and an air pressure adjustment unit that adjusts the air pressure in the closed space so that the second liquid is held in the gap. The liquid discharging device according to Item 1 or 2, further comprising that. (Item 4) 4. The liquid ejection device according to item 3, wherein the air pressure adjustment unit adjusts the air pressure in the closed space so that the lower surface of the second liquid held in the gap has a concave meniscus shape. (Item 5) The liquid ejection device described in item 3 or 4, characterized in that, in a supply process of supplying the second liquid to the gap, the air pressure adjustment unit reduces the air pressure in the closed space as the amount of the second liquid in the gap increases so that the second liquid supplied to the gap by the supply unit is retained in the gap. (Item 6) The liquid ejection device described in any one of items 3 to 5, characterized in that, during a removal process of removing the second liquid from the gap, the air pressure adjustment unit increases the air pressure in the closed space more than when the second liquid is retained in the gap, so as to discharge the second liquid from the lower end of the gap. (Item 7) a receiving section that receives the second liquid discharged from the lower end of the gap; and a driving section that drives the receiving section, 7. The liquid ejection device according to item 6, wherein the drive unit drives the receiving unit so that the receiving unit is positioned below the gap during the removal process. (Item 8) 6. The liquid ejection device according to any one of items 1 to 5, further comprising a suction unit that sucks the second liquid from the gap in a removal process that removes the second liquid from the gap. (Item 9) 9. The liquid ejection device according to item 8, wherein the suction unit sucks the second liquid from the gap through a suction nozzle disposed in the gap. (Item 10) the frame member has a protrusion at a lower portion thereof that protrudes toward the inside of the opening so that an opening area of the opening is smaller at a first height position than at a second height position; A liquid ejection device described in any one of items 1 to 9, characterized in that the first height position is the position of the lower surface of the frame member, and the second height position is a position above the first height position. (Item 11) 11. The liquid ejection device according to any one of items 1 to 10, wherein the second liquid has a property of dissolving the first liquid and is retained in the gap in a liquid state. (Item 12) the discharge member has a piezoelectric element that discharges the first liquid from each discharge hole, The side surface of the discharge member is surrounded by an outer peripheral member, 12. The liquid ejection device according to any one of items 1 to 11, wherein a cable for transmitting a signal to the piezoelectric element is disposed between the ejection member and the outer peripheral member. (Item 13) Item 13. The liquid ejection device according to item 12, characterized in that a groove is provided on the side of the ejection member for storing the first liquid that has entered between the ejection member and the outer peripheral member. (Item 14) a discharge step of discharging a liquid onto a substrate using the liquid discharge device according to any one of items 1 to 13; a processing step of processing the substrate onto which the liquid has been discharged in the discharging step; a manufacturing process for manufacturing an article from the substrate processed in the processing process; A method for manufacturing an article, comprising:

[0051] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0052] 1: liquid discharge device, 2: substrate, 3: substrate stage, 4: first liquid, 8: receiving section, 9: control section, 10: discharge head, 11: discharge member, 12: frame member, 13: second liquid, 14: liquid supply section, 15: cover member, 16: air pressure adjustment section, 17: liquid suction section

Claims

1. A discharge member having a plurality of discharge holes for discharging a first liquid; A frame member having an opening in which the discharge member is disposed; A supply unit for supplying a second liquid to a gap between a side surface of the discharge member disposed in the opening and the frame member, and comprising: The first liquid is discharged from each of the plurality of discharge holes in the discharge member in a state where the second liquid supplied to the gap by the supply unit is held in the gap. A liquid discharge device characterized by that.

2. The supply unit supplies the second liquid to the gap through a supply nozzle disposed in the gap. The liquid discharge device according to claim 1, characterized by that.

3. A cover member that covers the opening so as to define a closed space communicating with the gap on the upper surface side of the frame member; and an air pressure adjustment unit that adjusts the air pressure in the closed space so that the second liquid is held in the gap. The liquid discharge device according to claim 1, further comprising:

4. The air pressure adjustment unit adjusts the air pressure in the closed space so that the lower surface of the second liquid held in the gap has a concave meniscus shape. The liquid discharge device according to claim 3, characterized by that.

5. In the supply process of supplying the second liquid to the gap, the air pressure adjustment unit reduces the air pressure in the closed space as the amount of the second liquid in the gap increases so that the second liquid supplied to the gap by the supply unit is held in the gap. The liquid discharge device according to claim 3, characterized by that.

6. In the removal process of removing the second liquid from the gap, the air pressure adjustment unit increases the air pressure in the closed space more than when the second liquid is held in the gap so as to discharge the second liquid from the lower end of the gap. The liquid discharge device according to claim 3, characterized by that.

7. A receiving unit for receiving the second liquid discharged from the lower end of the gap; and a driving unit for driving the receiving unit, further comprising: The driving unit drives the receiving unit so that the receiving unit is disposed below the gap in the removal process. The liquid discharge device according to claim 6, characterized by that.

8. The liquid discharge device according to claim 1, further comprising a suction unit that sucks the second liquid in the gap in a removal process of removing the second liquid from the gap.

9. The suction unit sucks the second liquid from the gap through a suction nozzle disposed in the gap. The liquid discharge device according to claim 8, characterized in that.

10. The frame member has, at the lower part, a protruding portion protruding toward the inside of the opening such that the opening area of the opening is smaller at the first height position than at the second height position. The first height position is the position of the lower surface of the frame member, and the second height position is a position above the first height position. The liquid discharge device according to claim 1, characterized in that.

11. The second liquid has a property of dissolving the first liquid and is held in the gap in a liquid state. The liquid discharge device according to claim 1, characterized in that.

12. The discharge member has a piezoelectric element that discharges the first liquid from each discharge hole. The side surface of the discharge member is surrounded by an outer peripheral member. A cable for transmitting a signal to the piezoelectric element is disposed between the discharge member and the outer peripheral member. The liquid discharge device according to claim 1, characterized in that.

13. A groove for storing the first liquid that has entered between the discharge member and the outer peripheral member is provided on the side surface of the discharge member. The liquid discharge device according to claim 12, characterized in that.

14. A discharging step of discharging a liquid onto a substrate using the liquid discharge device according to any one of claims 1 to 13; A processing step of processing the substrate on which the liquid has been discharged in the discharging step; A manufacturing step of manufacturing an article from the substrate processed in the processing step; An article manufacturing method, characterized by including.

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