Fluid control valve

Abstract

To provide a fluid control valve which can couple a cylinder part and a body part without using a fixing tool such as a bolt.SOLUTION: A inner member 4 is provided which is fitted to a fluid control valve 1 in a state of being sandwiched between a body part 3A and a cylinder part 2A. The body part 3A includes a body flange 313 at an end face 311 on the cylinder part 2A side. The cylinder part 2A includes a cylinder snap 216 which holds the body part 3A by engaging with the body flange 313 at an end face 211 on the body part 3A side. When the cylinder snap 216 and the body flange 313 are engaged, the inner member 4 holds and fixes a diaphragm valve body 5 with the body part 3A by being pressed against the cylinder part 2A, cylinder notch parts 217 are formed on both end faces in a direction perpendicular to a control fluid flow direction of the cylinder part 2A, and thin parts 314 are formed on both end faces in a direction perpendicular to a flow direction of the body flange 313.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a fluid control valve.

Background Art

[0002] Conventionally, for the supply of chemical solutions and cleaning solutions in semiconductor manufacturing processes, a fluid control valve such as that disclosed in Patent Document 1 has been used. The fluid control valve according to the prior art includes a body portion having a valve seat and a diaphragm valve body that comes into contact with and separates from the valve seat inside, and a cylinder portion as a drive source for performing the above contact and separation. The body portion and the cylinder portion are generally coupled by bolts inserted vertically in a vertically stacked state.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] However, in the fluid control valve as described above, since bolts are used for the connection between the body portion and the cylinder portion, a structure for inserting the bolts must be provided, resulting in a problem that the size of the fluid control valve increases accordingly. When the size of the fluid control valve increases, the occupied area for installing the fluid control valve increases, hindering the high density of semiconductor manufacturing equipment.

[0005] In addition, when using bolts, there are problems such as an increase in the number of parts of the fluid control valve and an increase in manufacturing cost, and a risk of bolt corrosion due to contact with chemical solutions or the like.

[0006] The present invention has been made in view of the above problems, and an object thereof is to provide a fluid control valve capable of coupling a cylinder portion and a body portion without using a fixture such as a bolt.

Means for Solving the Problems

[0007] In order to solve the above problems, a fluid control valve according to an aspect of the present invention has the following configuration.

[0008] (1) In a fluid control valve in which a body portion including a valve seat and a diaphragm valve body that comes into contact with and separates from the valve seat is stacked with a cylinder portion for causing the diaphragm valve body to come into contact with and separate from the valve seat, the cylinder portion includes a snap structure for holding the body portion, and the body portion includes a body-side engaging portion that engages with the snap structure.

[0009] (2) In the fluid control valve described in (1), in a state of being sandwiched between the body portion and the cylinder portion, it includes an internal member loaded inside the fluid control valve. The body portion includes a body flange as the body-side engaging portion on a first end surface on the side of the cylinder portion. The cylinder portion includes a snap structure for holding the body portion by engaging with the body flange on a second end surface on the side of the body portion. When the snap structure and the body flange are engaged, the surface of the large-diameter portion formed on the outer periphery of the internal member on the side of the cylinder portion is pressed against the cylinder portion, so that the surface of the internal member on the side of the body portion sandwiches and fixes the diaphragm valve body together with the body portion. Cylinder cutouts are formed on both end surfaces of the cylinder portion in a direction perpendicular to the flow direction of the control fluid. It is preferable that thin portions are formed on both end surfaces of the body flange in the perpendicular direction.

[0010] (3) In the fluid control valve described in (2), it is preferable that the snap structure is a pair of cylinder snaps erected from both ends of the second end surface in the flow direction.

[0011] (4) In the fluid control valve described in (3), it is preferable that the cylinder snap is divided into a plurality of parts by slits.

[0012] (5) In the fluid control valve described in (2), it is preferable that the snap structure is erected at the four corners of the second end face.

[0013] (6) In the fluid control valve described in (1), the body portion is sandwiched between the cylinder portion and a base member for fixing the fluid control valve. The base member preferably includes a holding portion for suppressing deformation of the snap structure in a direction in which the engagement between the snap structure and the body-side engaging portion is released.

[0014] (7) In the fluid control valve described in (6), the snap structure extends from the second end face on the body portion side of the cylinder portion to the third end face on the base member side of the body portion, and the tip portion of the snap structure engages with the third end face with the third end face serving as the body-side engaging portion. The holding portion preferably projects toward the body portion and is a convex body into which the tip portion can be inserted or a hole into which the tip portion can be inserted.

[0015] (8) In the fluid control valve described in (6), it is preferable that the body portion includes a body engaging portion for engaging with the base member.

Advantages of the Invention

[0016] According to the fluid control valve of the present invention, since the cylinder portion holds the body portion by the snap structure, the cylinder portion and the body portion can be coupled without using a fixing tool such as a bolt.

Brief Description of the Drawings

[0017]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Mode for Carrying Out the Invention

[0018] Embodiments of the fluid control valve according to the present invention will be described in detail with reference to the drawings. Note that the drawings used in the description are simplified for the purpose of explanation and do not accurately represent the shape, dimensions, etc.

[0019] (First Embodiment) First, the configuration of the fluid control valve 1A according to the first embodiment will be described with reference to FIGS. 1 to 3. FIG. 1 is a perspective view of the fluid control valve 1A according to the first embodiment. FIG. 2 is a sectional view taken along line A-A of FIG. 1. FIG. 3 is a sectional view taken along line B-B of FIG. 1. Note that the "flow direction" shown in the figure is the direction in which the control fluid (for example, chemical solution, cleaning solution, etc.) flows. In the following description, when simply referring to the "flow direction", it all means this meaning.

[0020] The fluid control valve 1A is, for example, a chemical solution valve used for supplying chemical solutions and cleaning solutions in semiconductor manufacturing processes. The fluid control valve 1A is a normally closed type air-operated on-off valve, and as shown in FIGS. 1 and 2, it is configured such that the cylinder part 2A and the body part 3A are stacked in the vertical direction in the drawing. Further, inside the fluid control valve 1A, there are a diaphragm valve body 5 that blocks or opens the flow of the control fluid by coming into contact with and separating from a valve seat 316 described later, and an internal member 4 for fixing the diaphragm valve body 5 inside the fluid control valve 1A. Note that the vertical direction described above is a direction parallel to the direction in which the diaphragm valve body 5 comes into contact with and separates from the valve seat 316, and the term "vertical direction" in the following description always has the same meaning. Also, the upper side in the drawing is the separation direction, and the lower side is the contact direction.

[0021] (Regarding the cylinder part) First, the cylinder part 2A will be described. The cylinder part 2A is a pneumatically driven air cylinder. As shown in FIG. 2, this cylinder part 2A mainly includes a case 21A, a piston 22, and a compression coil spring 23.

[0022] The case 21A is formed in a substantially rectangular parallelepiped shape using polyphenylene sulfide (PPS resin). Both end faces of the case 21A in the flow direction are made to be on substantially the same plane as both end faces of the main body part 31 of the body part 3A described later in the same direction, and both end faces of the case 21A in the direction perpendicular to the flow direction are made to be on substantially the same plane as both end faces of the main body part 31 of the body part 3A described later in the same direction.

[0023] A piston chamber 212 for loading the piston 22 is formed on the end face 211 (second end face) of the case 21A on the side of the body part 3A, facing the opposite end face. This piston chamber 212 is a cylindrical space having an axial direction in the vertical direction in the drawing.

[0024] The end of the piston chamber 212 on the end face 211 side is enlarged in diameter to form a step, and this step is a pressing portion 215 for fixing the internal member 4 (details will be described later). Further, an insertion groove 214 is formed in the central portion of the top surface 213 of the piston chamber 212, and a compression coil spring 23 is inserted into the insertion groove 214.

[0025] On the end face 211 of the case 21, a cylinder snap 216 (an example of a snap structure) is erected toward the body portion 3A side. The cylinder snap 216 is a pair that is erected at both ends in the flow direction of the end face 211 of the case 21A by cylinder cutouts 217 provided on both end faces of the case 21A in the direction perpendicular to the flow direction (refer to the "vertical direction" in the figure; hereinafter, simply referred to as the "vertical direction"). In addition, claw portions 216a for engaging with the body portion 3A are provided at the tips of the pair of cylinder snaps 216.

[0026] Furthermore, the case 21A is provided with a pilot port 218 for introducing operating air into the piston chamber 212 on one of the end faces in the flow direction.

[0027] The piston 22 is loaded slidably in the vertical direction into the piston chamber 212 of the case 21A. The piston 22 is formed in a substantially cylindrical shape and includes a sliding portion 221 having the largest diameter and a rod portion 222 protruding from the sliding portion 221 toward the body portion 3A side.

[0028] An insertion groove 223 is formed in the central portion of the surface of the sliding portion 221 opposite to the rod portion 222, and a compression coil spring 23 is inserted into the insertion groove 223. Therefore, the piston 22 is urged in the abutting direction by the elastic force of the compression coil spring 23.

[0029] The end face on the rod part 222 side of the sliding part 221 is a pressure receiving face 224 that receives the pressure of the operating air introduced into the piston chamber 212. When the operating air is introduced into the piston chamber 212, the pressure receiving face 224 receives the pressure, and the piston 22 moves in the separating direction against the biasing force of the compression coil spring 23. On the other hand, when the introduction of the operating air is stopped, the piston 22 moves in the abutting direction by the elastic force of the compression coil spring 23. An annular seal member 24 is disposed between the outer peripheral surface of the sliding part 221 and the inner peripheral surface of the piston chamber 212 to maintain the airtightness of the piston chamber 212.

[0030] The rod part 222 extends toward the body part 3A side, and a male screw part 222a is formed at the tip end. A diaphragm valve body 5 is screwed onto the male screw part 222a.

[0031] (Regarding the body part) Next, the body part 3A will be described. The body part 3A is made of perfluoroalkoxy alkane (PFA). As shown in FIGS. 1 and 2, it includes a substantially rectangular parallelepiped main body part 31, and an input port 32 and an output port 33 protruding from both end faces in the flow direction of the main body part 31.

[0032] The input port 32 is used to input the control fluid into the fluid control valve 1A. The control fluid input from the input port 32 passes through the input flow path 321 and is introduced into the fluid control valve 1A. The output port 33 is used to output the control fluid from the fluid control valve 1A. The control fluid introduced into the fluid control valve 1A passes through the output flow path 331 and is output from the output port 33.

[0033] A valve chamber 312 is formed in the end face 311 (the first end face) on the cylinder part 2A side of the main body part 31. This valve chamber 312 is a columnar space having an axial direction in the vertical direction in the figure.

[0034] The valve chamber 312 communicates with the input flow path 321 through a valve hole 315 provided at the center of the bottom surface of the valve chamber 312. Thus, the control fluid input to the fluid control valve 1A flows into the valve chamber 312 through the input flow path 321 and the valve hole 315. Further, an annular valve seat 316 for the diaphragm valve body 5 to abut and separate is provided on the bottom surface of the valve chamber 312 so as to surround the valve hole 315. Furthermore, the valve chamber 312 communicates with the output flow path 331 on the radially outer side of the valve seat 316. Thus, the control fluid that has flowed into the valve chamber 312 is output to the outside of the fluid control valve 1A through the output flow path 331.

[0035] On the end face 311 of the main body portion 31, a substantially cylindrical body flange 313 projects toward the cylinder portion 2A side. The body flange 313 has a groove portion 313b formed therein such that a flange portion 313a extends outward in the radial direction of the body flange 313 so that the claw portion 216a of the cylinder snap 216 can be engaged therewith. Since the body flange 313 has thin wall portions 314 on both end faces in the vertical direction, the body flange 313 has the flange portion 313a and the groove portion 313b only on both side faces in the flow direction of the control fluid.

[0036] Also, since the vertical dimension of the main body portion 31 is reduced by the thin wall portions 314, the occupied area when arranging the fluid control valve 1A can be suppressed. Also, since the occupied area per unit is suppressed, it is easy to arrange a plurality of fluid control valves 1A in parallel.

[0037] The space on the inner peripheral side of the body flange 313 is an internal space 317 for loading the internal member 4 and the diaphragm valve body 5. This internal space 317 is a cylindrical space having an axial direction in the vertical direction in the drawing. Since the inner diameter of the internal space 317 is larger than the inner diameter of the valve chamber 312, a stepped portion 317a is formed between the internal space 317 and the valve chamber 312. And the diaphragm valve body 5 is arranged on this stepped portion 317a (details will be described later).

[0038] (Regarding the diaphragm valve body) The diaphragm valve body 5 is formed of a fluororesin such as PFA or PTFE, and includes a shaft portion 51, a thin film portion 52, and a fixing portion 53. The shaft portion 51 is formed in a substantially cylindrical shape. A female screw portion 51a is formed in the end surface of the shaft portion 51 on the cylinder portion 2A side. A male screw portion 222a of the piston 22 is screwed into the female screw portion 51a. By this screwing, the piston 22 and the diaphragm valve body 5 are coupled. Since the piston 22 and the diaphragm valve body 5 are coupled, as the piston 22 slides up and down, the shaft portion 51 moves up and down. And by this up and down movement, the end surface (contact surface 51b) of the shaft portion 51 on the valve seat 316 side comes into contact with and separates from the valve seat 316.

[0039] The thin film portion 52 extends radially outward from the outer peripheral edge of the contact surface 51b in the radial direction of the shaft portion 51. And the outer peripheral edge of the thin film portion 52 serves as a fixing portion 53 for fixing the diaphragm valve body 5 in the fluid control valve 1A. The fixing portion 53 is sandwiched between the internal member 4 and the stepped portion 317a in a state of being placed on the stepped portion 317a of the body portion 3A. Thereby, the diaphragm valve body 5 is fixed in the fluid control valve 1A. By fixing the diaphragm valve body 5 in this way, the thin film portion 52 partitions the inside of the fluid control valve 1A into a liquid contact portion (the space below the thin film portion 52) and a non-liquid contact portion (the space above the thin film portion 52), and is elastically deformed as the shaft portion 51 moves up and down.

[0040] (Regarding the internal member) The internal member 4 is formed in a substantially cylindrical shape of, for example, polypropylene (PP), polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene (ETFE), PPS, etc., and a seal portion 41, a large diameter portion 42, and a pressing portion 43 are arranged in the axial direction in order from the cylinder portion 2A side.

[0041] The seal portion 41 is inserted into the piston chamber 212 and holds an annular seal member 44. The seal member 44 maintains the airtightness of the piston chamber 212 by being compressed between the outer peripheral surface of the seal portion 41 and the inner peripheral surface of the piston chamber 212.

[0042] The pressing portion 43 is inserted into the internal space 317 of the body portion 3A. And the tip surface of the pressing portion 43 is in contact with the fixing portion 53 of the diaphragm valve body 5. The outer diameter of the pressing portion 43 is substantially the same as the inner diameter of the internal space 317. By inserting the pressing portion 43 into the internal space 317, the radial positioning of the internal member 4 is achieved.

[0043] The large-diameter portion 42 is formed to have a larger diameter than the seal portion 41. Thereby, the end surface (upper end surface) of the large-diameter portion 42 on the cylinder portion 2A side receives the seal member 44 and comes into contact with the pressing portion 215 of the case 21A. The distance from the step portion 317a to the pressing portion 215 is substantially the same as or slightly smaller than the distance from the surface of the fixing portion 53 of the diaphragm valve body 5 facing the step portion 317a to the upper end surface of the large-diameter portion 42. For this reason, the upper end surface of the large-diameter portion 42 is pressed in the contact direction by coming into contact with the pressing portion 215 of the case 21A. By pressing the large-diameter portion 42 in the contact direction, the pressing portion 43 of the internal member 4 clamps and fixes the fixing portion 53 of the diaphragm valve body 5 from above and below together with the step portion 317a. Note that the entire surface of the pressing portion 215 of the case 21A may press the large-diameter portion 42, or several minute protrusions protruding toward the large-diameter portion 42 may be provided on the pressing portion 215 and the large-diameter portion 42 may be pressed by these protrusions.

[0044] The internal member 4 is provided with an insertion hole 45 penetrating the internal member 4 in the axial direction. The rod portion 222 of the piston 22 is inserted into this insertion hole 45. An annular seal member 25 is disposed between the outer peripheral surface of the rod portion 222 and the inner peripheral surface of the insertion hole 45, maintaining the airtightness of the piston chamber 212.

[0045] (Regarding the assembly of the fluid control valve) The assembly of the fluid control valve 1A is performed by first assembling all the members except the case 21A to the body portion 3A, and finally assembling the case 21A to the body portion 3A. When assembling the case 21A to the body portion 3A, the cylinder snap 216 of the case 21A elastically deforms so as to be expanded and pressed against the body flange 313. However, since the material (PFA) of the body portion 3A has a lower hardness than the material (PPS) of the case 21A, the body flange 313 of the body portion 3A is more likely to deform. Specifically, for example, it deforms as follows.

[0046] When the claw portion 216a of the cylinder snap 216 passes over the flange portion 313a, the flange portion 313a elastically deforms so as to be crushed inward in the radial direction of the body flange 313. After the claw portion 216a passes over the flange portion 313a, the crushed flange portion 313a returns to its original shape.

[0047] Also, when the claw portion 216a of the cylinder snap 216 passes over the flange portion 313a, since the claw portion 216a and the flange portion 313a are in contact with each other as curved surfaces, as shown by the arrow F in FIG. 3, the flange portion 313a receives a load so as to be compressed inward in the radial direction. Then, since the body flange 313 is easily deformed at the thin portion 314, as shown by the arrow D, the thin portion 314 elastically deforms so as to bulge in the vertical direction. At this time, the cylinder notch 217 of the case 21A serves as a relief for the bulged thin portion 314, so that the case 21A can be smoothly assembled to the body portion 3.

[0048] (Second Embodiment) The configuration of the fluid control valve 1B according to the second embodiment will be described with reference to FIG. 4. FIG. 4 is a perspective view of the fluid control valve 1B according to the second embodiment.

[0049] As shown in Fig. 4, the fluid control valve 1B has a pair of cylinder snaps 219, 219 provided in the case 21B of the cylinder part 2B. Each of them is divided into three cylinder snaps 219a, 219b, 219c by slits 220, 220 extending in the vertical direction. By dividing the cylinder snap 219, when assembling the case 21B to the body part 3A, the cylinder snap 219 is easily expanded by the body flange 313. As a result, the load on the flange part 313a of the body flange 313 is reduced, so that damage to the flange part 313a can be prevented and the assembly of the case 21B can be smoothly performed. Note that the other configurations of the fluid control valve 1B are the same as those of the fluid control valve 1A according to the first embodiment. Also, each of the cylinder snaps 219, 219 is divided by two slits 220, 220, but the number of slits 220 is not limited to this. For example, the cylinder snap 219 may be divided into two by one slit, or three or more slits may be provided.

[0050] (Third Embodiment) The configuration of the fluid control valve 1C according to the third embodiment will be described with reference to Fig. 5. Fig. 5 is a perspective view of the fluid control valve 1C according to the third embodiment.

[0051] On the end face 261 (second end face) of the case 21C of the cylinder part 2C on the body part 3C side, a cylinder snap 262 (an example of a snap structure) is erected toward the body part 3C side. This cylinder snap 262 is provided so as to stand at the four corners of the end face 261 of the case 21C by the cylinder cutouts 263A provided at both end faces in the flow direction of the case 21A and the cylinder cutouts 263B provided at both end faces in the vertical direction of the case 21A. In addition, claw portions (not shown) for engaging with the body part 3C are provided at the tips of each of the four cylinder snaps 262.

[0052] The body part 3C includes a substantially rectangular parallelepiped main body part 34, an input port 32 and an output port 33 protruding from both end faces in the flow direction of the main body part 34. On the end face 341 (the first end face) of the main body part 34 on the cylinder part 2C side, a substantially cylindrical body flange 343 protrudes toward the cylinder part 2C side. The body flange 343 is provided with a flange part and a groove part in the same manner as the fluid control valve 1A according to the first embodiment. However, since the body flange 343 has thin-walled parts 344 on both end faces in the flow direction and both end faces in the vertical direction, the body flange 343 has the flange part and the groove part only at positions corresponding to the four cylinder snaps 262. By providing the flange part and the groove part, it becomes possible to engage the claw parts of the cylinder snap 262 with the body flange 313.

[0053] As described above, by limiting the portions where the cylinder snap 262 and the body part 3 engage to the four corners, when assembling the case 21C to the body part 3C, the cylinder snap 262 is easily expanded against the body flange 343. As a result, the load on the flange part of the body flange 343 is reduced, so that damage to the flange part can be prevented and the assembly of the case 21C can be performed smoothly. Note that the other configurations of the fluid control valve 1C are the same as those of the fluid control valve 1A according to the first embodiment.

[0054] (Fourth Embodiment) The configuration of the fluid control valve 1D according to the fourth embodiment will be described with reference to FIGS. 6 - 8. FIG. 6 is a perspective view of the fluid control valve 1D according to the fourth embodiment. FIG. 7 is a cross-sectional view taken along line C - C of FIG. 6, particularly showing the tip of the cylinder snap 265. FIG. 8 is a cross-sectional view taken along line D - D of FIG. 6, particularly showing the engaging portion between the body part 3D and the base plate 6.

[0055] As shown in FIG. 6, the fluid control valve 1D is configured such that the cylinder part 2D, the body part 3D, and the base plate 6 (an example of a base member) are stacked in the vertical direction in the drawing.

[0056] The cylinder section 2D includes a case 21D. On an end face 264 (an example of a second end face) on the body section 3D side of this case 21D, four cylinder snaps 265 (an example of a snap structure) are erected toward the body section 3D side.

[0057] The cylinder snaps 265 are provided so as to stand at the four corners of the end face 264 of the case 21D by cylinder cutouts 266A provided at both end faces in the flow direction of the case 21D and cylinder cutouts 266B provided at both end faces in the vertical direction of the case 21D. And each of the four cylinder snaps 265 extends from the end face 264 of the case 21D to a bottom face 318 (see FIG. 7. An example of a third end face) on the side of a base plate 6 of the body section 3D (a main body section 35 described later). Further, at the tip of each of the four cylinder snaps 265, a claw portion 265a (see FIG. 7. An example of a tip portion) for engaging with the bottom face 318 of the body section 3D (main body section 35) is provided.

[0058] On the tip face on the base plate 6 side of the cylinder snap 265 (claw portion 265a), a concave groove 265b into which a convex portion 62 (described later) of the base plate 6 can be inserted is bored toward the root direction (upward in the figure) of the cylinder snap 265.

[0059] The body section 3D includes a substantially cylindrical main body section 35 having an axis along the vertical direction, and an input port 32 and an output port 33 protruding from both end faces in the flow direction of the main body section 35. On the outer peripheral edge of the bottom face 318 of the main body section 35, the claw portions 265a of the cylinder snaps 265 are engaged as described above. The body section 3D also includes a pair of locking pieces 319 (an example of a body engaging portion) erected on the bottom face 318.

[0060] The base plate 6 is formed in a flat plate shape, and a locking portion 64 with which the claw portion 319a of the locking piece 319 engages is formed through the center of the back surface (the surface opposite to the body portion 3D side). Since the locking portion 64 can be accessed from the surface (the surface on the body portion 3D side) of the base plate 6 through the through hole 63, the locking piece 319 can be passed through the through hole 63 from the side of the surface of the base plate 6, and the claw portion 319a can be engaged with the locking portion 64.

[0061] Further, the base plate 6 is provided with a stepped portion 61 at the four corners corresponding to the positions of the cylinder snaps 265 as a clearance for the claw portions 265a that engage with the body portion 3D (main body portion 35). And a convex portion 62 (an example of a holding portion) projects toward the cylinder snap 265 on the stepped portion 61. This convex portion 62 is inserted into the concave groove 265b of the claw portion 265a located within the stepped portion 61.

[0062] Also, the base plate 6 is provided with fixing portions 65 at both ends in the vertical direction for fixing the fluid control valve 1D to the installation location. The fixing portion 65 is provided with a through hole 66 that penetrates the fixing portion 65 in the thickness direction (the vertical direction in the figure), and it is possible to insert a fixing tool such as a bolt therethrough.

[0063] The assembly of the fluid control valve 1D with the above-described configuration is performed in the order of assembling the cylinder portion 2D and the body portion 3D, and then assembling the body portion 3D and the base plate 6.

[0064] The assembly of the cylinder part 2D and the body part 3D is performed by engaging the cylinder snap 265 with the bottom surface 318 of the body part 3D (main body part 35). When engaging the cylinder snap 265 with the body part 3D (main body part 35), the cylinder part 2D is brought close from the upper end face side of the body part 3D, and the main body part 35 of the body part 3D is inserted inside the four cylinder snaps 265. At this time, the cylinder snap 265 (claw part 265a) is pushed and expanded in a direction orthogonal to the axial center (vertical direction) of the body part 3D by the outer peripheral surface of the body part 3D (hereinafter referred to as the engagement release direction). Then, when the claw part 265a gets over the body part 3D, the claw part 265a is engaged with the bottom surface 318.

[0065] The assembly of the body part 3D and the base plate 6 is performed by engaging the claw part 319a of the locking piece 319 with the locking part 64. Specifically, first, with the surface of the base plate 6 and the bottom surface 318 of the body part 3D facing each other, the positions of the claw part 319a engaged with the body part 3D and the step part 61 of the base plate 6 are aligned. Then, the body part 3D is brought closer to the base plate 6, and the pair of locking pieces 319 are inserted into the through holes 63. At this time, the pair of locking pieces 319 are displaced in a direction approaching each other by the through holes 63. Then, when the claw part 319a of the locking piece 319 gets over the through hole 63, the claw part 319a is engaged with the locking part 64. Further, as the locking piece 319 is inserted into the through hole 63, the convex part 62 of the step part 61 is inserted into the concave groove 265b of the cylinder snap 265 (claw part 265a). By being inserted into the concave groove 265b, the convex part 62 prevents the cylinder snap 265 (claw part 265a) from expanding in the engagement release direction. Therefore, it is possible to strengthen the connection between the cylinder part 2D and the body part 3D.

[0066] As described above, the fluid control valve 1A (1B, 1C, 1D) according to the above-described embodiment is (1) In a fluid control valve 1A (1B, 1C, 1D) formed by stacking a body part 3A (3C) including a valve seat 316 and a diaphragm valve body 5 that contacts and separates from the valve seat 316, and a cylinder part 2A (2B, 2C) for causing the diaphragm valve body 5 to contact and separate, the cylinder part 2A (2B, 2C, 2D) includes a snap structure (cylinder snap 216 (219, 262, 265)) for holding the body part 3A (3C, 3D), and the body part 3A (3C, 3D) includes a body-side engaging part (e.g., body flange 313 (343) or bottom surface 318) that engages with the snap structure (e.g., cylinder snap 216 (219, 262, 265)).

[0067] (2) In the fluid control valve 1A (1B, 1C) described in (1), an internal member 4 loaded inside the fluid control valve 1 is provided while being sandwiched between the body part 3A (3C) and the cylinder part 2A (2B, 2C). The body part 3A (3C) includes a body flange 313 (343) as a body-side engaging part at a first end surface (end surface 311 (341)) on the side of the cylinder part 2A (2B, 2C). The cylinder part 2A (2B, 2C) includes a snap structure (cylinder snap 216 (219, 262)) for holding the body part 3A (3C) by engaging with the body flange 313 (343) at a second end surface (end surface 211 (261)) on the side of the body part 3A (3C). When the snap structure (cylinder snap 216 (219, 262)) and the body flange 313 (343) are engaged, the surface of the large-diameter part 42 formed on the outer periphery of the internal member 4 on the side of the cylinder part 2A (2B, 2C) is pressed by the cylinder part (pressing part 215), so that the surface of the internal member 4 on the side of the body part 3A (3C) sandwiches and fixes the diaphragm valve body 5 together with the body part (step part 317a). Cylinder cutouts 217 (263B) are formed at both end surfaces of the cylinder part 2A (2B, 2C) in a direction perpendicular to the flow direction of the control fluid, and thin parts 314 (344) are formed at both end surfaces of the body flange 313 (343) in a direction perpendicular to the flow direction, which is preferable.

[0068] (3) In the fluid control valve 1A described in (2), it is preferable that the snap structure is a pair of cylinder snaps 216 erected respectively from both end portions in the flow direction of the second end face (end face 211).

[0069] (4) In the fluid control valve 1B described in (3), it is preferable that the cylinder snap 219 is divided into a plurality of pieces by the slit 220.

[0070] (5) In the fluid control valve 1C described in (2), it is preferable that the snap structure (cylinder snap 262) is erected at the four corners of the second end face (end face 261).

[0071] (6) In the fluid control valve 1D described in (1), the body portion 3D is sandwiched and positioned between the cylinder portion 2D and a base member (for example, base plate 6) for fixing the fluid control valve 1D. The base member (base plate 6) preferably includes a holding portion (for example, convex portion 62) for suppressing deformation of the snap structure (cylinder snap 265) in a direction (for example, a direction orthogonal to the axial center (vertical direction) of the body portion 3D) in which the engagement between the snap structure (cylinder snap 265) and the body-side engagement portion (bottom face 318) is released.

[0072] (7) In the fluid control valve 1D described in (6), the snap structure (cylinder snap 265) extends from the second end face (end face 264) on the body portion 3D side of the cylinder portion 2D to the third end face (bottom face 318) on the base member (base plate 6) side of the body portion 3D, and the tip portion (claw portion 265a) of the snap structure (cylinder snap 265) engages with the third end face (bottom face 318) with the third end face (bottom face 318) as the body-side engagement portion. The holding portion (convex portion 62) preferably protrudes toward the body portion 3D and is a convex body into which the tip portion (claw portion 265a) can be inserted. Note that the above-described holding portion is not limited to a convex body, and may be a hole into which the tip portion (claw portion 265a) can be inserted. In this case, it does not matter whether the hole penetrates the base member (base plate 6) or not.

[0073] In the fluid control valve 1D described in (8)(6), it is preferable that the body portion 3D includes a body engagement portion (locking piece 319) for engaging with the base member (base plate 6).

[0074] According to the above-described fluid control valves 1A, 1B, 1C, 1D, since the cylinder portion 2A (2B, 2C) holds the body portion 3A (3C) by the snap structure (cylinder snap 216 (219, 262)), the cylinder portion 2A (2B, 2C) and the body portion 3A (3C) can be coupled without using a fixture such as a bolt.

[0075] Note that the above-described embodiments are merely illustrative and do not limit the present invention in any way. Therefore, the present invention can naturally be variously improved and modified without departing from the gist thereof. For example, although the fluid control valves 1A, 1B, 1C are described as a normally closed type, they may also be a normally open type.

[0076] Also, in the above-described embodiments, it is described that the material of the body portion is harder than the material of the case, but by adjusting the shape such as the wall thickness, the material of the case may be made harder than the material of the body portion. In the above-described embodiments, the material of the case is PPS, but it may also be PP, PVDF, ETFE, or other materials. Also, the material of the body portion is not limited to PFA, and PTFE or other materials may be used.

Explanation of Reference Numerals

[0077] 1A Fluid control valve 2A Cylinder portion 3A Body portion 4 Internal member 5 Diaphragm valve body 216 Cylinder snap (snap structure) 217 Cylinder notch 313 Body flange 314 Thin portion 316 Valve seat

Claims

1. A body part including a valve seat and a diaphragm valve body that makes contact with and separates from the valve seat, A cylinder part for making the diaphragm valve body make contact with and separate from the valve seat, In a fluid control valve formed by stacking these, The cylinder part includes a snap structure for holding the body part, The body part includes a body-side engaging part that engages with the snap structure, A fluid control valve characterized by the above.

2. In the fluid control valve described in Claim 1, It includes an internal member loaded inside the fluid control valve while being sandwiched between the body part and the cylinder part, The body part includes a body flange as the body-side engaging part on a first end face on the side of the cylinder part, The cylinder part includes the snap structure for holding the body part by engaging with the body flange on a second end face on the side of the body part, When the snap structure and the body flange are engaged, the internal member is pressed by the cylinder part against the surface on the cylinder part side of a large-diameter part formed on the outer periphery of the internal member, so that the surface of the internal member on the body part side sandwiches and fixes the diaphragm valve body together with the body part, Cylinder cutouts are formed on both end faces of the cylinder part in a direction perpendicular to the flow direction of the control fluid, Thin-walled parts are formed on both end faces of the body flange in the perpendicular direction, A fluid control valve characterized by the above.

3. In the fluid control valve described in Claim 2, The snap structure is a pair of cylinder snaps erected respectively from both end parts in the flow direction of the second end face, A fluid control valve characterized by the above.

4. In the fluid control valve described in Claim 3, The cylinder snap is divided into a plurality of parts by slits, A fluid control valve characterized by the above.

5. In the fluid control valve described in Claim 2, The snap structure is erected at the four corners of the second end face, A fluid control valve characterized by the above.

6. In the fluid control valve described in Claim 1, The body part is sandwiched and positioned between the cylinder part and a base member for fixing the fluid control valve, The base member includes a holding part for suppressing deformation of the snap structure in a direction in which the engagement between the snap structure and the body-side engaging part is released, A fluid control valve characterized by the above.

7. In the fluid control valve according to claim 6, the snap structure extends from a second end face on the body part side of the cylinder part to a third end face on the base member side of the body part, and a tip end part of the snap structure engages with the third end face with the third end face as a body-side engaging part; the holding part is a convex body protruding toward the body part side and insertable into the tip end part, or a hole into which the tip end part can be inserted, and is a fluid control valve characterized by this.

8. In the fluid control valve according to claim 6, the body part includes a body engaging part for engaging with the base member, and is a fluid control valve characterized by this.

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