Vibration element

Abstract

To achieve a vibration element that is low in loss and has a high Q value.SOLUTION: A vibration element 100 uses a piezoelectric body formed of a sphalerite-type single crystal, and comprises a vibration part 1 that has a plurality of first vibration parts and a plurality of second vibration parts arranged alternately. The first vibration parts have first electrodes 41a, 41c, 41e, and second electrodes 42a, 42c, 42e. The second vibration parts have third electrodes 42b, 42d, and fourth electrodes 41b, 41d. The first electrodes are arranged on a first surface that is on the positive side of the [001] axis of the single crystal and perpendicular to the [001] axis of the single crystal. The second electrodes are arranged on a second surface that is on the negative side of the [001] axis of the single crystal and perpendicular to the [001] axis of the single crystal. The third electrodes are arranged on the second surface. The fourth electrodes are arranged on the first surface. The first electrodes and the third electrodes are electrically connected to each other. The second electrodes and the fourth electrodes are electrically connected to each other.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a vibration element. [Background technology]

[0002] Various vibration elements using piezoelectric materials have been known for some time. For example, Patent Document 1 discloses a resonator having an AlN layer as a piezoelectric material and a plurality of electrodes on a sapphire substrate. In the resonator of Patent Document 1, the main surface of the AlN layer is a hexagonal (0001) plane or a cubic (111) plane, and electrodes are arranged parallel to the main surface. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-6001 Summary of the Invention [Problem to be solved by the invention]

[0004] As in the resonator of Patent Document 1, by arranging electrodes parallel to the main surface of the AlN layer as the (0001) plane of a hexagonal crystal or the (111) plane of a cubic crystal, it is possible to maximize polarization and create a vibration element that vibrates the piezoelectric body with a large displacement. However, vibration elements with this configuration have large losses within the material that makes up the piezoelectric body. As losses in the vibration element increase, the Q value, which is the value of the quality factor Q, decreases. [Means for solving the problem]

[0005] The vibration element of the present invention, which solves the above-mentioned problems, is a vibration element using a piezoelectric material made of a zinc blende-type single crystal, and includes a vibration part in which a plurality of first vibration parts and a plurality of second vibration parts are arranged alternately, the first vibration part has a first electrode and a second electrode, the second vibration part has a third electrode and a fourth electrode, the first electrode is arranged on a first surface which is a positive surface of the

[0001] axis of the single crystal and is perpendicular to the

[0001] axis of the single crystal, the second electrode is arranged on a second surface which is a negative surface of the

[0001] axis of the single crystal and is perpendicular to the

[0001] axis of the single crystal, the third electrode is arranged on the second surface, and the fourth electrode is arranged on the first surface, the first electrode and the third electrode are electrically connected, and the second electrode and the fourth electrode are electrically connected. [Brief explanation of the drawings]

[0006] [Figure 1] 1 is a perspective view of a vibration element according to an embodiment of the present invention, viewed from the (001) plane side of a cubic crystal. [Figure 2] 1 is a perspective view of a vibration element according to an embodiment of the present invention, viewed from the (00-1) plane side of a cubic crystal. [Figure 3] FIG. 2 is a schematic plan view of a vibration part of a vibration element according to an embodiment of the present invention, showing a state before voltage application. [Figure 4] FIG. 2 is a schematic plan view of a vibration part of a vibration element according to an embodiment of the present invention, illustrating a state when a voltage is applied. [Figure 5] 5 is a schematic plan view of a vibration part of a vibration element according to an embodiment of the present invention, showing a state when a voltage is applied in a direction opposite to that of FIG. 4. FIG. [Figure 6] FIG. 2 is a diagram showing the crystal structure of a single crystal of a piezoelectric body of a vibration element according to an embodiment of the present invention. [Figure 7] FIG. 1 is a schematic diagram showing a vibration element according to an embodiment of the present invention, viewed from the (001) plane side of a cubic crystal, for explaining the deformation state of each vibrator unit. DETAILED DESCRIPTION OF THE INVENTION

[0007] First, the present invention will be briefly described. A first aspect of the vibration element of the present invention for solving the above problem is a vibration element using a piezoelectric material made of a zinc blende-type single crystal, and is provided with a vibration part in which a plurality of first vibration parts and a plurality of second vibration parts are arranged alternately, the first vibration part having a first electrode and a second electrode, the second vibration part having a third electrode and a fourth electrode, the first electrode being arranged on a first surface which is a positive surface of the single crystal's

[0001] axis and perpendicular to the

[0001] axis, the second electrode being arranged on a second surface which is a negative surface of the single crystal's

[0001] axis and perpendicular to the

[0001] axis, the third electrode being arranged on the second surface, the fourth electrode being arranged on the first surface, the first electrode and the third electrode being electrically connected, and the second electrode and the fourth electrode being electrically connected.

[0008] According to this aspect, a piezoelectric body made of a zinc blende single crystal is used, and the piezoelectric body has two electrodes formed along two faces perpendicular to the

[0001] axis of the single crystal, with a vibrating portion disposed between the two electrodes. The first vibrating portion and the second vibrating portion, each provided with a different electrode, are alternately disposed. This configuration prevents distortion associated with a change in volume of the vibrating portion as a whole, even when a voltage is applied to each electrode to vibrate the first vibrating portion and the second vibrating portion. Therefore, loss within the material constituting the piezoelectric body can be suppressed, resulting in a vibrating element with low loss and a high Q value.

[0009] A second aspect of the vibration element of the present invention is an aspect dependent on the first aspect, characterized in that the plurality of first vibration parts and the plurality of second vibration parts are arranged in the piezoelectric body parallel to the

[0110] axis of the single crystal or the [-110] axis of the single crystal.

[0010] According to this aspect, the plurality of first vibration parts and the plurality of second vibration parts are arranged in the piezoelectric body parallel to the

[0110] axis or the [-110] axis of the single crystal. By adopting such a configuration, even when a voltage is applied to each electrode to vibrate the first vibration part and the second vibration part, distortion accompanied by a change in volume can be prevented from occurring in the vibration part as a whole.

[0011] A vibration element of a third aspect of the present invention is an aspect dependent on the first or second aspect, and is characterized in that it comprises a base portion which is provided around at least a part of the periphery of the vibration portion when viewed from a direction parallel to the

[0001] axis of the single crystal, and on which a plurality of the first vibration portions and a plurality of the second vibration portions are not arranged, and a support portion which bridges the vibration portion and the base portion.

[0012] According to this aspect, the device includes a base portion provided around at least a portion of the periphery of the vibrating portion when viewed from a direction parallel to the

[0001] axis of the single crystal, on which the plurality of first vibrating portions and the plurality of second vibrating portions are not disposed, and a support portion bridging the vibrating portion and the base portion. With this configuration, it is possible to preferably provide a vibrating portion that vibrates when a voltage is applied to the electrodes, and a base portion that does not vibrate even when a voltage is applied to the electrodes.

[0013] A vibration element according to a fourth aspect of the present invention is an aspect dependent on the third aspect, characterized in that the support portion bridges the nodal points of the vibration portion and the base portion.

[0014] According to this aspect, the support section bridges the nodal points of the vibration section and the base section. This configuration bridges the base section and the areas of the vibration section that do not vibrate even when the vibration section vibrates due to application of a voltage to the electrodes. Therefore, it is possible to prevent the base section from vibrating even when a voltage is applied to the electrodes.

[0015] A fifth aspect of the vibration element of the present invention is an aspect dependent on the third aspect, characterized in that the support portion extends parallel to the

[0100] axis of the single crystal or the

[0010] axis of the single crystal.

[0016] According to this aspect, the support portion extends parallel to the <0100> axis or the <0010> axis of the single crystal, and this configuration allows the vibrating portion and the base portion to be suitably bridged.

[0017] The vibration element of the sixth aspect of the present invention is an aspect dependent on the first or second aspect, characterized in that the piezoelectric body is made of any of SiC, GaN, GaAs, ZnS, CdS, and AlN.

[0018] According to this aspect, the piezoelectric body is made of any one of SiC, GaN, GaAs, ZnS, CdS, and AlN. With this configuration, a suitable piezoelectric body can be obtained.

[0019] Hereinafter, a vibration element 100 according to an embodiment of the present invention will be described with reference to the accompanying drawings, with reference to FIGS. 1 to 6. The vibration element 100 of this embodiment is a piezoelectric vibration element using a piezoelectric material made of a zinc blende single crystal. First, an overview of the vibration element 100 of this embodiment will be described with reference to FIGS. 1 and 2. As shown in FIGS. 1 and 2, the vibration element 100 of this embodiment is composed of a vibration section 1 that vibrates mainly when a voltage is applied, a base section 3 that does not vibrate even when a voltage is applied, and a support section 2 that bridges the vibration section 1 and the base section 3. Note that "does not vibrate even when a voltage is applied" does not strictly mean that it does not vibrate at all, but means that vibration is suppressed to a level that does not cause any problems.

[0020] The vibration unit 1 is composed of a zinc-blende single crystal (point group F-43m). Examples of zinc-blende single crystals that can be used include cubic 3C-SiC single crystals. As shown in FIG. 1, the vibration unit 1 includes five adjacent vibrator units 1a, 1b, 1c, 1d, and 1e aligned in a row along the [1-10] axis of the single crystal. In each of FIGS. 1 to 6, the a1 axis corresponds to the

[0100] axis of the single crystal, the a2 axis corresponds to the

[0010] axis of the single crystal, and the a3 axis corresponds to the

[0001] axis of the single crystal.

[0021] Here, the vibrator element 100 of this embodiment is a one-dimensional array in which five vibrator units 1a to 1e are arranged one-dimensionally, but it may also be a two-dimensional array. As shown in Fig. 1, electrodes 41a, 41b, 41c, 41d, and 41e are formed as electrode 4 on the surfaces of vibrator units 1a, 1b, 1c, 1d, and 1e in the positive direction of the a3 axis. On the other hand, as shown in Fig. 2, electrodes 42a, 42b, 42c, 42d, and 42e are formed on the surfaces of vibrator units 1a, 1b, 1c, 1d, and 1e in the negative direction of the a3 axis, respectively.

[0022] These electrodes can be made of metal materials such as Au, Pt, and Al. A layer of Ti, Cr, or a compound thereof can be provided between the metal material and the single crystal to strengthen adhesion. Focusing on oscillator unit 1a, for example, electrodes 41a and 42a are formed to sandwich the single crystal oscillator unit 1a. By creating a potential difference between electrodes 41a and 42a, an electric field can be applied to the single crystal oscillator unit 1a in the axial direction of the a3 axis.

[0023] This action enables the single crystal of each vibrator unit 1a, 1b, 1c, 1d, and 1e to operate in contour vibration. Contour vibration corresponds to a vibration mode in which, when the single crystal expands in the

[0110] axis direction at a certain phase, it contracts in the [-110] axis direction of the single crystal, and when the direction of the electric field is reversed, the single crystal contracts in the

[0110] axis direction and expands in the [-110] direction of the single crystal. In this contour vibration, expansion and contraction occur simultaneously in different directions by the same amount in a localized region within the vibrating part 1. Therefore, there is no volume change in the vibrating part 1 due to the contour vibration, which is advantageous from the viewpoints of thermoelastic loss and Akhiezer loss.

[0024] In this embodiment, in order to obtain constructive vibrations by linking all of the vibrator units 1a, 1b, 1c, 1d, and 1e, the electrodes 4 are connected so that the electric field is applied in opposite directions to adjacent vibrator units. This configuration causes adjacent antinodes of the standing wave to have opposite phases. For example, electrodes 41a, 42b, 41c, 42d, and 41e are connected to lead electrode 5a provided on base portion 3 as shown in FIG. 1. Meanwhile, electrodes 42a, 41b, 42c, 41d, and 42e are connected to lead electrode 5b, which is different from lead electrode 5a as shown in FIG. 1.

[0025] By applying an AC voltage of a frequency at which the vibrating unit 1 resonates to the lead electrodes 5a and 5b, the desired vibration operation becomes possible. For example, the displacement state of the vibrating unit 1 is shown in Figures 3 and 4. In Figures 3 and 4, the same hatching indicates that electrodes of the same polarity are formed. Also, as shown in Figures 1 and 2, electrodes 4 of different polarities are arranged alternately.

[0026] When no voltage is applied, each oscillator unit 1a, 1b, 1c, 1d, and 1e remains rectangular and does not displace, as shown in Figure 3. In contrast, when voltage is applied, a displacement state occurs, as shown in Figure 4. Note that the displacement is exaggerated in Figure 4. Then, when the direction of voltage application is reversed, the warping direction of the outline of each oscillator unit 1a, 1b, 1c, 1d, and 1e also reverses, as shown in Figure 5. As shown in Figures 4 and 5, when voltage is applied, the boundary surfaces of adjacent oscillator units are smooth and the warping is consistent, resulting in an uneven relationship and no unnecessary distortion. Similarly, by repeatedly reversing the direction of voltage application in accordance with the resonant frequency, all oscillator units 1a, 1b, 1c, 1d, and 1e cooperate and constructively interact with each other, enabling stable, low-loss vibration.

[0027] Next, we will explain the appropriate crystal orientation for achieving the above-mentioned vibration operation. Figure 6 shows the crystal structure of 3C-SiC used in the vibration element 100 of this example. The single crystal's

[0100] axis, single crystal's

[0010] axis, and single crystal's

[0001] axis correspond to the a1 axis, a2 axis, and a3 axis, respectively, and confirm the displacement when an electric field is applied.

[0028] In general, the piezoelectric tensor e of e form in a crystal of point group F-43m is described by Equation 1 below:

[0029]

number

[0030] On the other hand, the piezoelectric tensor d of the d-form is the elastic compliance tensor S E Using the following equation 2, the following equation 3 can be derived:

[0031]

number

[0032]

number

[0033] Here, the displacement tensor S when an electric field E having components E1, E2, and E3 in the directions of the a1, a2, and a3 axes, respectively, is applied can be expressed by the following equation 4.

[0034]

number

[0035] Here, when an electric field is applied in the axial direction of the a3 axis, only the component of E3 becomes non-zero, and therefore only the component S6 of the displacement tensor S becomes non-zero. The definition equation for this component S6 is Equation 5 below.

[0036]

number

[0037] Here, u1 and u2 represent the amount of displacement in the axial direction of the a1 axis and the a2 axis, respectively. Next, we will use Figure 7 to explain how the above-mentioned amount of displacement actually causes deformation of the vibrating part 1. In particular, since component S6 does not have a component in the axial direction of the a3 axis, it is expressed in a two-dimensional plane including the a1 axis and the a2 axis. First, from the defining formula 5, we obtain the following formula 6, and from formula 6, we obtain the following formula 7.

[0038]

number

[0039]

number

[0040] Here, if we assume that component S6 is a positive value, then S12 and S21 will also be positive values. When moving only a small distance of +Δa1 from the S12 component in the defining equation (Equation 5), the change in displacement will be +Δu2, and similarly, when moving +Δa2 from the S21 component, the displacement will be +Δu1. The displacement obtained by combining these will be in the positive direction of the a1' axis in Figure 7. Conversely, at positions (-Δa1, -Δa2), the displacements will be -Δu1 and -Δu2, so the combined displacement will be in the negative direction of the a1' axis. As a result, the small area within the oscillator unit will undergo an elongation deformation in the axial direction of the a1' axis.

[0041] On the other hand, at position (Δa1, -Δa2), there is a positive displacement along the a2' axis, and at position (-Δa1, Δa2), there is a negative displacement along the same axis, resulting in contraction deformation along the a2' axis. Then, when the direction of applied voltage is reversed, the sign of component S6 is also reversed, and the expansion and contraction directions are swapped.

[0042] As explained above, by assigning the

[0001] axis to the a3 axis, the

[0110] axis to the a1' axis, and the [-110] axis to the a2' axis shown in Figures 1 and 2, the displacement required for the desired contour vibration can be obtained. Furthermore, at points (Δa1, 0), (-Δa1, 0), (0, Δa2), and (0, -Δa2), contour vibration occurs but there is no displacement at all, i.e., they are vibration nodes. Therefore, providing the support 2 in this direction can suppress vibration leaking to the base 3. Therefore, it is desirable to provide the support 2 in one of the crystal orientations

[0100] , [-100],

[0010] , or [0-10] from the center of gravity of any oscillator unit. As shown in Figures 1 and 2, the vibration element 100 of this embodiment has such a configuration, and for example, the vibrator unit 1e has a support portion 2 provided in the direction of the crystal orientation

[0100] from its center of gravity.

[0043] In this specification, the

[0100] axis may refer to the direction of the arrow on the a1 axis, the [-100] axis may refer to the direction opposite to the direction of the arrow on the a1 axis, and the

[0100] axis may refer to the direction along the arrow on the a1 axis and its opposite direction. The

[0010] axis may refer to the direction of the arrow on the a2 axis, the [0-10] axis may refer to the direction opposite to the direction of the arrow on the a2 axis, and the

[0010] axis may refer to the direction along the arrow on the a3 axis and its opposite direction. The

[0001] axis may refer to the direction of the arrow on the a3 axis, the [00-1] axis may refer to the direction opposite to the direction of the arrow on the a3 axis, and the

[0001] axis may refer to the direction along the arrow on the a3 axis and its opposite direction.

[0044] That is, in the vibration element 100 of this embodiment, the support portion 2 bridges the nodal points of the vibration portion 1 and the base portion 3. With this configuration, the vibration element 100 of this embodiment can bridge the base portion 3 and an area of the vibration portion 1 that does not vibrate even when the vibration portion 1 vibrates by applying a voltage to the electrode 4. Therefore, the vibration element 100 of this embodiment can prevent the base portion 3 from vibrating even when a voltage is applied to the electrode 4.

[0045] From another perspective, the support portion 2 is connected to the four corners of the vibrating portion 1, two of which extend along the <0100> axis of the single crystal, and the remaining two extend parallel to the <0010> axis of the single crystal. With this configuration, the vibrating element 100 of this embodiment can suitably bridge the vibrating portion 1 and the base portion 3.

[0046] An oscillator can be constructed by combining the above-described vibration element 100 with an oscillation circuit. Furthermore, a more stable oscillator can be obtained by housing these in a vacuum package. While this embodiment uses a piezoelectric body made of a 3C-SiC single crystal, materials other than 3C-SiC single crystal may be used as long as the piezoelectric body is made of a zinc blende single crystal.

[0047] Here, the vibration element 100 of this embodiment will be described from another perspective. As shown in Figures 1 and 2, the vibration element 100 of this embodiment includes a vibration section 1 in which a plurality of first vibration sections corresponding to vibrator units 1a, 1c, and 1e and a plurality of second vibration sections corresponding to vibrator units 1b and 1d are alternately arranged. The first vibration section also includes electrodes 41a, 41c, and 41e as first electrodes arranged on a first surface that is a positive surface of the

[0001] axis of the single crystal and perpendicular to the

[0001] axis of the single crystal, and electrodes 42a, 42c, and 42e as second electrodes arranged on a second surface that is a negative surface of the

[0001] axis of the single crystal and perpendicular to the

[0001] axis of the single crystal. On the other hand, the second vibrating section has electrodes 42b and 42d as third electrodes arranged on a first surface that is the positive surface of the

[0001] axis of the single crystal and perpendicular to the

[0001] axis of the single crystal, and electrodes 41b and 41d as fourth electrodes arranged on a second surface that is the negative surface of the

[0001] axis of the single crystal and perpendicular to the

[0001] axis of the single crystal. The first electrodes 41a, 41c, and 41e are electrically connected to the third electrodes 42b and 42d, and the second electrodes 42a, 42c, and 42e are electrically connected to the fourth electrodes 41b and 41d.

[0048] As described above, the vibration element 100 of this embodiment uses a piezoelectric material made of a zinc blende single crystal, has two electrodes 4 formed along two planes perpendicular to the

[0001] axis of the single crystal, and has a vibration portion 1 disposed between the two electrodes 4. The first vibration portion and the second vibration portion, each provided with a different electrode 4, are alternately disposed. This configuration of the vibration element 100 of this embodiment prevents distortion of the entire vibration portion 1 in the direction in which the first vibration portion and the second vibration portion are aligned, even when a voltage is applied to each electrode 4 to vibrate the first vibration portion and the second vibration portion. Therefore, the vibration element 100 of this embodiment can suppress loss within the material constituting the piezoelectric material, thereby achieving a vibration element with low loss and a high Q value.

[0049] 1 and 2, in the vibration element 100 of this embodiment, the plurality of first vibration portions and the plurality of second vibration portions are arranged in the piezoelectric body parallel to the

[0110] axis of the single crystal. This configuration of the vibration element 100 of this embodiment makes it possible to effectively prevent distortion of the entire vibration portion in the direction in which the first vibration portion and the second vibration portion are arranged, even when a voltage is applied to each electrode 4 to vibrate the first vibration portion and the second vibration portion. In this embodiment, the plurality of first vibration portions and the plurality of second vibration portions are arranged in the piezoelectric body parallel to the

[0110] axis of the single crystal. However, a similar effect can be obtained with a configuration in which the plurality of first vibration portions and the plurality of second vibration portions are arranged in the piezoelectric body parallel to the [-110] axis of the single crystal.

[0050] 1 and 2, the vibration element 100 of this embodiment includes a base portion 3 that is provided around at least a part of the periphery of the vibration portion 1 when viewed in a direction parallel to the

[0001] axis of the single crystal, and on which a plurality of first vibration portions and a plurality of second vibration portions are not arranged, and a support portion 2 that bridges the vibration portion 1 and the base portion 3. By being configured in this way, the vibration element 100 of this embodiment can preferably include the vibration portion 1 that vibrates when a voltage is applied to the electrodes 4, and the base portion 3 that does not vibrate even when a voltage is applied to the electrodes 4.

[0051] Although there are no particular limitations on the material of the piezoelectric body as long as it is made of a zinc blende single crystal, it is preferable that the piezoelectric body be made of any of SiC, GaN, GaAs, ZnS, CdS, and AlN, as this configuration will result in a suitable piezoelectric body.

[0052] As described above, by configuring the vibrating unit 1 as an electrode arrangement that allows voltage to be applied in the axial direction of the

[0001] axis of the zinc blende single crystal, it is possible to obtain a high Q value by operating it in contour vibration mode. Furthermore, by arranging these in an array in the axial direction of the

[0110] axis of the single crystal, the vibrations reinforce each other, resulting in a vibrating unit 1 with a high Q value. In addition, by providing the support unit 2 in any of the crystal orientations

[0100] , [-100],

[0010] , or [0-10], it is possible to suppress vibration leakage from the vibrating unit 1 to the base unit 3. These effects increase the output amplitude of the vibrating unit 1, thereby obtaining an oscillator with low phase noise.

[0053] The present invention is not limited to the above-described embodiments, and can be realized in various configurations without departing from the spirit of the present invention. The technical features in the embodiments corresponding to the technical features in each aspect described in the Summary of the Invention can be appropriately replaced or combined to solve some or all of the above-described problems or achieve some or all of the above-described effects. Furthermore, if a technical feature is not described as essential in this specification, it can be deleted as appropriate. [Explanation of symbols]

[0054] 1...vibration unit, 1a...vibrator unit (first vibration unit), 1b...vibrator unit (second vibration unit), 1c...vibrator unit (first vibration unit), 1d...vibrator unit (second vibration unit), 1e...vibrator unit (first vibration unit), 2...support unit, 3...base unit, 4...electrode, 5a...lead electrode, 5b...lead electrode, 41a...electrode (first electrode), 41b...electrode (fourth electrode), 41c...electrode (first electrode), 41d...electrode (fourth electrode), 41e...electrode (first electrode), 42a...electrode (second electrode), 42b...electrode (third electrode), 42c...electrode (second electrode), 42d...electrode (third electrode), 42e...electrode (second electrode), 100...vibration element

Claims

1. A vibration element using a piezoelectric body made of a zinc blende single crystal, a vibration section in which a plurality of first vibration sections and a plurality of second vibration sections are alternately arranged, the first vibration portion has a first electrode and a second electrode, the second vibration portion has a third electrode and a fourth electrode, the first electrode is disposed on a first surface that is a positive surface of the [001] axis of the single crystal and is perpendicular to the [001] axis of the single crystal; the second electrode is disposed on a second surface that is a negative surface of the [001] axis of the single crystal and is perpendicular to the [001] axis of the single crystal; the third electrode is disposed on the second surface; the fourth electrode is disposed on the first surface; the first electrode and the third electrode are electrically connected; The vibration element is characterized in that the second electrode and the fourth electrode are electrically connected to each other.

2. The vibration element according to claim 1 , The vibration element characterized in that the plurality of first vibration parts and the plurality of second vibration parts are arranged in the piezoelectric body parallel to the [110] axis of the single crystal or the [-110] axis of the single crystal.

3. The vibration element according to claim 1 or 2, A vibration element characterized by comprising: a base portion that is provided around at least a portion of the vibration portion when viewed from a direction parallel to the [001] axis of the single crystal, and on which multiple first vibration portions and multiple second vibration portions are not arranged; and a support portion that bridges the vibration portion and the base portion.

4. The vibration element according to claim 3, The vibration element is characterized in that the support portion bridges the nodal points of the vibration portion and the base portion.

5. The vibration element according to claim 3, The vibration element, wherein the support portion extends parallel to the [100] axis or the [010] axis of the single crystal.

6. The vibration element according to claim 1 or 2, A vibration element characterized in that the piezoelectric body is made of any one of SiC, GaN, GaAs, ZnS, CdS, and AlN.

Images