Information processing apparatus, information processing method, and program

Abstract

To provide a technique to improve the ease of checking the operating state of substrate processing apparatuses.SOLUTION: An information processing apparatus displays the operating state of one or more substrate processing apparatuses, and has: an acquisition unit that acquires information on the history of a plurality of apparatus states to which the substrate processing apparatuses have made a transition; and a display control unit that, on the basis of the acquired history information, displays the time zone during which the substrate processing apparatuses are in the plurality of apparatus states on a time-series basis so as to make the plurality of apparatus states identifiable.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to an information processing device, an information processing method, and a program. [Background technology]

[0002] Conventionally, in order to allow a user to easily grasp the idle state of a substrate processing apparatus, a technique has been known in which a first idle time indicating the time during which no processing is being performed and a second idle time indicating the time from the end of a job to the start of execution of the next job are calculated based on first history information indicating when the substrate processing apparatus has performed processing and second history information indicating when the substrate processing apparatus has received an instruction to perform a job, and the first idle time and the second idle time are displayed (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-134502 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique for improving the ease of checking the operating status of a substrate processing apparatus. [Means for solving the problem]

[0005] One aspect of the present disclosure is an information processing device that displays the operating status of one or more substrate processing devices, and includes an acquisition unit that acquires historical information about multiple device states through which the substrate processing device has transitioned, and a display control unit that, based on the acquired historical information, displays in chronological order the time periods during which the substrate processing device was in the multiple device states so that each of the multiple device states can be identified. [Effects of the Invention]

[0006] According to the present disclosure, it is possible to provide a technique that improves the ease of checking the operating status of a substrate processing apparatus. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a configuration diagram of an example of a substrate processing system according to an embodiment of the present invention. [Figure 2] FIG. 2 is a diagram illustrating a hardware configuration of an example of a computer. [Figure 3] FIG. 2 is a functional block diagram illustrating an example of a worker terminal according to the present embodiment. [Figure 4] 10 is a flowchart illustrating an example of a process in which an operator terminal according to the present embodiment displays the operating status of one or more substrate processing apparatuses. [Figure 5] FIG. 10 is an image diagram of an example of a tool board screen. [Figure 6] FIG. 10 is an image diagram of an example of an operation analysis screen. [Figure 7] FIG. 10 is a diagram illustrating an example of coloring of a portion of a chart that indicates an alarm state. [Figure 8] FIG. 10 is a diagram illustrating an example of a tooltip display. [Figure 9] FIG. 10 is a diagram illustrating an example of an alarm log list display. [Figure 10] FIG. 10 is a diagram illustrating an example of changing the display settings of a chart. [Figure 11] FIG. 10 is a diagram illustrating an example of a scroll display setting. [Figure 12] FIG. 10 is a diagram illustrating an example of display settings for scale intervals. [Figure 13] FIG. 10 is a diagram illustrating an example of display settings for display units. [Figure 14] FIG. 10 is a diagram illustrating an example of adding a device. [Figure 15] FIG. 10 is a diagram illustrating an example of a chart to which a plurality of substrate processing apparatuses are added. [Figure 16] FIG. 10 is a diagram illustrating an example of a chart in which different periods are designated for each substrate processing apparatus. [Figure 17] FIG. 10 is a diagram illustrating an example of device deletion. [Figure 18] FIG. 10 is a diagram illustrating an example of a period change. [Figure 19] FIG. 10 is a diagram illustrating an example of starting point alignment. [Figure 20] FIG. 10 is a diagram illustrating an example of starting point alignment. [Figure 21] FIG. 10 is a diagram illustrating an example of starting point alignment. [Figure 22] FIG. 10 is a diagram illustrating an example of starting point alignment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, the present embodiment will be described with reference to the drawings.

[0009] <System configuration> 1 is a configuration diagram of an example of a substrate processing system 1 according to this embodiment. The substrate processing system 1 shown in FIG. 1 includes a substrate processing apparatus 10, an apparatus controller 12, a server apparatus 16, and an operator terminal 18.

[0010] The substrate processing apparatus 10 and the apparatus controller 12 are installed in the manufacturing factory 2. The server apparatus 16 and the operator terminal 18 may be installed in the manufacturing factory 2 or may be installed outside the manufacturing factory 2. The operator terminal 18 is an information processing terminal such as a PC (Personal Computer) or a smartphone operated by an operator such as an equipment operator or an analyst of the substrate processing apparatus 10 installed in the manufacturing factory 2.

[0011] The substrate processing apparatus 10, the apparatus controller 12, the server apparatus 16, and the operator terminal 18 are communicably connected via networks 20 and 22 such as the Internet or a LAN (Local Area Network).

[0012] The substrate processing apparatus 10 is an apparatus that performs processes such as film formation, etching, or ashing, and processes substrates such as semiconductor wafers. The substrate processing apparatus 10 is, for example, a semiconductor manufacturing apparatus, a heat treatment apparatus, or a film formation apparatus.

[0013] The substrate processing apparatus 10 executes a process by receiving a control command (setting value) according to, for example, a recipe from the apparatus controller 12. The substrate processing apparatus 10 is equipped with a plurality of sensors, such as a temperature sensor for measuring temperature and a pressure sensor for measuring pressure.

[0014] The equipment controller 12 receives instructions for the substrate processing apparatus 10 from an operator. The equipment controller 12 has a man-machine interface function that provides information about the substrate processing apparatus 10 to the operator. The equipment controller 12 receives sensor data output from a plurality of sensors installed in the substrate processing apparatus 10. The equipment controller 12 may optimize the setting values of the substrate processing apparatus 10, detect anomalies, or predict anomalies.

[0015] The equipment controller 12 may also store history information (log information) of the substrate processing apparatus 10 required to display, as described below, the operating status of the substrate processing apparatus 10. The history information of the substrate processing apparatus 10 required to display, as described below, the operating status of the substrate processing apparatus 10 may include, for example, history information of a plurality of apparatus states, history information of a process job state, and history information of an alarm state.

[0016] 1 is provided for each substrate processing apparatus 10, it may be provided for each of a plurality of substrate processing apparatuses 10. The equipment controller 12 may be provided inside or outside the housing of the substrate processing apparatus 10.

[0017] The server device 16 may also receive and store information about a plurality of substrate processing apparatuses 10 in one or more manufacturing factories 2. For example, the server device 16 stores history information about the substrate processing apparatuses 10 required to display the operating statuses of the plurality of substrate processing apparatuses 10 in one or more manufacturing factories 2 as described below.

[0018] The server device 16 may have a man-machine interface function for providing information about the substrate processing apparatus 10 to an operator using a web application or the like. The server device 16 may also have a man-machine interface function for displaying the operating status of the substrate processing apparatus 10 using a web application or the like.

[0019] The operator terminal 18 may store history information on the status of a plurality of apparatuses required for displaying, as will be described later, the operating status of a plurality of substrate processing apparatuses 10 in one or more manufacturing factories 2. The operator terminal 18 may have a man-machine interface function for displaying information related to the substrate processing apparatuses 10 using a web application or the like. The operator terminal 18 may also have a man-machine interface function for displaying the operating status of the substrate processing apparatuses 10 using a web application or the like.

[0020] The equipment controller 12 and the server device 16 may display information related to the substrate processing apparatus 10 and the operating status of the plurality of substrate processing apparatuses 10 on the operator terminal 18. The equipment controller 12, the server device 16, and the operator terminal 18 shown in FIG. 1 are an example of an information processing apparatus according to this embodiment.

[0021] 1 is just one example, and it goes without saying that there are various system configurations depending on the application and purpose. The division of the equipment into the equipment controller 12, server device 16, and operator terminal 18 shown in Fig. 1 is just one example. Various configurations are possible, such as a configuration in which at least two of the equipment controller 12, server device 16, and operator terminal 18 are integrated, or a configuration in which they are further separated.

[0022] <Hardware configuration> The equipment controller 12, server device 16, and operator terminal 18 shown in Fig. 1 may be realized by a computer having the hardware configuration shown in Fig. 2. Fig. 2 is a hardware configuration diagram of an example of a computer 500.

[0023] 2 includes an input device 501, an output device 502, an external I / F (interface) 503, a RAM (random access memory) 504, a ROM (read only memory) 505, a CPU (central processing unit) 506, a communication I / F 507, and an HDD (hard disk drive) 508, all of which are interconnected by a bus B. The input device 501 and the output device 502 may be connected and used when necessary.

[0024] The input device 501 is a keyboard, mouse, touch panel, etc., and is used by an operator or the like to input operation signals. The output device 502 is a display, etc., and displays the results of processing by the computer 500. The communication I / F 507 is an interface that connects the computer 500 to the networks 20 and 22 shown in Figure 1. The HDD 508 is an example of a non-volatile storage device that stores programs and data.

[0025] The external I / F 503 is an interface with an external device. The computer 500 can read from a recording medium 503a such as an SD (Secure Digital) memory card via the external I / F 503. The external I / F 503 may also be able to write to the recording medium 503a such as an SD memory card via the external I / F 503.

[0026] The ROM 505 is an example of a non-volatile semiconductor memory (storage device) that stores programs and data. The RAM 504 is an example of a volatile semiconductor memory (storage device) that temporarily stores programs and data. The CPU 506 is an arithmetic unit that reads programs and data from a storage device such as the ROM 505 or HDD 508 onto the RAM 504 and executes processing to realize overall control and functions of the computer 500.

[0027] The equipment controller 12, the server device 16, and the operator terminal 18 of the substrate processing system 1 shown in FIG. 1 realize various functions by executing programs on the computer 500 shown in FIG.

[0028] <Functional configuration> In the following, an example will be described in which the information processing device that displays the operating status of one or more substrate processing apparatuses 10 is the operator terminal 18. Note that the information processing device that displays the operating status of one or more substrate processing apparatuses 10 may be the equipment controller 12 or the server device 16.

[0029] The operator terminal 18 of the substrate processing system 1 according to this embodiment is realized by, for example, functional blocks as shown in Fig. 3. Fig. 3 is a functional block diagram showing an example of the operator terminal 18 according to this embodiment. Note that the functional block diagram of Fig. 3 omits illustration of components that are not necessary for explaining this embodiment.

[0030] The worker terminal 18 in Figure 3 realizes an acquisition unit 30, a data storage unit 32, an operation analysis processing unit 34, a screen data generation unit 36, an input acceptance unit 38, and a display control unit 40 by executing a program for the worker terminal 18.

[0031] The acquiring unit 30 acquires history information of the substrate processing apparatus 10, which is necessary to display, as will be described later, the operating status of the substrate processing apparatus 10. The acquiring unit 30 may acquire the history information of the substrate processing apparatus 10 from the substrate processing apparatus 10, from the apparatus controller 12, or from the server device 16.

[0032] The history information of the substrate processing apparatus 10 acquired by the acquisition unit 30 includes, for example, history information of multiple apparatus states, history information of process job states, and history information of alarm states. The acquisition unit 30 stores the acquired history information of the substrate processing apparatus 10 in the data storage unit 32.

[0033] The input receiving unit 38 receives various operations from the worker. For example, the operations received from the worker include an operation to launch an app, various operations for the launched app, etc. The input receiving unit 38 notifies the operation analysis processing unit 34 and the display control unit 40 of the contents of the various operations received from the worker.

[0034] The operation analysis processing unit 34 reads out history information of the substrate processing apparatus 10 from the data storage unit 32 based on the contents of various operations received from the operator, and analyzes the operation status of the substrate processing apparatus 10, which will be described later.

[0035] The screen data generation unit 36 generates screen data including the results of the analysis by the operation analysis processing unit 34 and transmits it to the display control unit 40. The display control unit 40 causes the output device 502 to display the screen data including the results of the analysis by the operation analysis processing unit 34.

[0036] <Processing> The operator terminal 18 displays the operation status of one or more substrate processing apparatuses 10, for example, in accordance with the processing procedure shown in Fig. 4. Fig. 4 is a flowchart of an example of processing in which the operator terminal 18 according to the present embodiment displays the operation status of one or more substrate processing apparatuses 10.

[0037] In step S10, the display control unit 40 of the operator terminal 18 causes the output device 502 to display, for example, a tool board screen 1000 shown in FIG. 5 based on the content of the operation received from the operator. FIG. 5 is an image diagram of an example of the tool board screen 1000. The tool board screen 1000 shown in FIG. 5 displays equipment performance information 1002 of the substrate processing apparatus 10. The equipment performance information 1002 displays the availability rate and the cumulative total and trends of the percentages of multiple equipment states. The tool board screen 1000 of FIG. 5 lists, as examples of multiple equipment states, Standby, Overhead, Depo, Shutter Purge, PM Recipe, Non-production, Scheduled Down, Unscheduled Down, and Non-scheduled. The equipment state "Depo" is an example of a state in which the substrate processing apparatus 10 performs manufacturing according to a recipe.

[0038] By referring to the equipment performance information 1002 on the tool board screen 1000 in FIG. 5, the operator can check the operating rate of the substrate processing apparatus 10 and the percentage of each equipment state during a specified period.

[0039] When the worker performs an operation such as clicking on the icon 1004 of the operation analysis application on the tool board screen 1000, the display control unit 40 displays an operation analysis screen 2000 such as that shown in FIG. 6, for example.

[0040] Fig. 6 is an image diagram of an example of an operation analysis screen 2000. The operation analysis screen 2000 shown in Fig. 6 displays a chart 2002. The chart 2002 displays a specified period and the operating status of the substrate processing apparatus 10 in chronological order, including multiple apparatus states, process job (PJ) states, and alarm states.

[0041] The multiple equipment states can be generated from history information of multiple equipment states that the substrate processing apparatus 10 has transitioned through. The portion of the chart 2002 showing the equipment states displays the time periods during which the substrate processing apparatus 10 was in multiple equipment states, visually distinguishing each equipment state using colors or the like so that each equipment state can be identified. The portion of the chart 2002 showing the process job states displays the time periods during which the substrate processing apparatus 10 was executing process jobs so that each process job can be identified. The portion of the chart 2002 showing the alarm states displays the time periods during which an alarm occurred in the substrate processing apparatus 10 (the period during which an alarm existed that had not been cleared).

[0042] An alarm of the substrate processing apparatus 10 is issued when a specific event occurs in the substrate processing apparatus 10. The alarm is used, for example, by an operator to identify a problem location in the substrate processing apparatus 10.

[0043] Fig. 7 is a diagram illustrating an example of coloring of the portion 2001 showing the alarm state of the chart 2002. As shown in Fig. 7, the portion 2001 showing the alarm state of the chart 2002 is colored to represent the period during which the alarm occurred, from when the alarm occurred until when it was cleared. When there are multiple alarms, the period during which one or more alarms occurred is colored, as shown in Fig. 7.

[0044] 7, the portion 2001 showing the alarm status of the chart 2002 is displayed in a distinguishable manner so that the relationship between the generated alarm and the portion 2001 showing the alarm status of the chart 2002 can be easily understood. As shown in FIG. 7, the portion 2001 showing the alarm status of the chart 2002 displays the time periods in which one or more alarms occurred within the displayed period in a distinguishable manner using color or the like.

[0045] Returning to step S14 in Fig. 4, the operator can perform various operations on the operation analysis screen 2000 in Fig. 6. The input receiving unit 38 of the operator terminal 18 receives various operations on the operation analysis screen 2000 from the operator.

[0046] In step S16, the display control unit 40 of the worker terminal 18 updates the operation analysis screen 2000 of FIG. 6 in the following manner in response to the operation received from the worker.

[0047] <Tooltip display> The operator can display, for example, tooltips 2004-1 to 2004-3 shown in FIG. 8 by pointing the cursor of a pointing device such as a mouse over the chart 2002 on the operation analysis screen 2000 of FIG.

[0048] 8 is a diagram illustrating an example of a tooltip display. Tooltips 2004-1 to 2004-3 are one of the display elements in the graphical user interface of computer 500, and are displayed when the cursor or the like is placed over an object.

[0049] Tool tip 2004-1 is an area that is displayed when a cursor or the like is placed over a portion of chart 2002 that indicates the device status, and displays information about the device status of the portion over which the cursor or the like is placed.

[0050] Furthermore, tooltip 2004-2 is an area that is displayed by hovering a cursor or the like over a portion of chart 2002 that indicates the process job status, and displays information about the process job status of the portion that the cursor or the like is hovered over. Furthermore, tooltip 2004-3 is an area that is displayed by hovering a cursor or the like over a portion of chart 2002 that indicates the alarm status, and displays information about the alarm status of the portion that the cursor or the like is hovered over. Note that although Fig. 8 shows an example in which multiple tooltips 2004-1 to 2004-3 are displayed at once, they may also be displayed one by one.

[0051] The tooltip display shown in FIG. 8 allows an operator to easily check information for determining the operating status of the substrate processing apparatus 10 by positioning the cursor of a pointing device such as a mouse over the chart 2002 on the operation analysis screen 2000.

[0052] <Alarm log list display> As shown in the operation analysis screen 2000 of FIG. 9, the operator can select a portion 2006 showing the alarm status of a chart 2002 and operate a list display button 2008 to display an alarm log list 2010 of the portion 2006.

[0053] 9 is a diagram illustrating an example of an alarm log list display. The display control unit 40 of the operator terminal 18 receives from the operator an operation to select a portion 2006 showing the alarm state of the chart 2002 and an operation to select a list display button 2008, thereby displaying an alarm log list 2010 of the portion 2006.

[0054] 《Display settings》 The operator can change the display settings of the chart 2002 by operating a display setting field 2012 of the operation analysis screen 2000 in Fig. 10. As shown in Fig. 10, the display setting field 2012 of the operation analysis screen 2000 is an example in which the display settings of scrolling, scale intervals, display units, and display switching can be changed.

[0055] The scroll display setting of the display setting field 2012 will be described with reference to FIG. 11. FIG. 11 is a diagram illustrating an example of the scroll display setting. The display control unit 40 of the worker terminal 18 can switch to a vertically scrolling (vertical display) display of the chart 2003 by changing the scroll display setting of the display setting field 2012 of the operation analysis screen 2000 of FIG. 10 from "horizontal" to "vertical." Furthermore, the display control unit 40 of the worker terminal 18 can switch to a horizontally scrolling (horizontal display) display of the chart 2002 by changing the scroll display setting of the display setting field 2012 of the operation analysis screen 2000 of FIG. 10 from "vertical" to "horizontal."

[0056] The display setting of the scale interval in the display setting field 2012 will be described with reference to Fig. 12. Fig. 12 is a diagram illustrating an example of the display setting of the scale interval. When the display setting of the scale interval in the display setting field 2012 of the operation analysis screen 2000 in Fig. 10 is switched, the display control unit 40 of the operator terminal 18 switches the scale interval of the chart 2002.

[0057] For example, the display control unit 40 of the operator terminal 18 switches the display setting for the scale interval in the display setting field 2012 of the operation analysis screen 2000 in Fig. 10 to "1 hour," thereby shortening the time range per scale as shown in Fig. 12. This allows the operator to check the details of the chart 2002.

[0058] 10 to "24 hours," thereby increasing the time range per division on the chart 2002. This allows the worker to view the chart 2002 from a bird's-eye view.

[0059] The display setting of the display unit in the display setting field 2012 will be described with reference to Fig. 13. Fig. 13 is a diagram illustrating an example of the display setting of the display unit. When the display setting of the display unit in the display setting field 2012 of the operation analysis screen 2000 in Fig. 10 is switched, the display control unit 40 of the operator terminal 18 switches the display unit of the scale of the chart 2002.

[0060] For example, when the display setting for the display unit in the display setting field 2012 of the operation analysis screen 2000 in Fig. 10 is switched to "elapsed time," the display control unit 40 of the operator terminal 18 switches the chart 2002 displayed by time to a chart 2014 displayed by elapsed time, as shown in Fig. 13. The operator can use the chart 2014 displayed by elapsed time to compare, for example, the charts 2014 of a plurality of substrate processing apparatuses 10.

[0061] In addition, the display control unit 40 of the worker terminal 18 switches the display setting for the display unit in the display setting field 2012 of the operation analysis screen 2000 in Figure 10 to "time", thereby switching the chart 2014, which displays elapsed time, to the chart 2002, which displays time.

[0062] The display setting for display switching in the display setting field 2012 will be described with reference to Fig. 10. When the display setting for display switching in the display setting field 2012 of the operation analysis screen 2000 in Fig. 10 is switched, the display control unit 40 of the operator terminal 18 switches between displaying and hiding the PJ status row in the chart 2002.

[0063] For example, when the display control unit 40 of the worker terminal 18 checks the display setting "Display Project Status" in the display switch of the display setting field 2012 of the operation analysis screen 2000 of Fig. 10, the line of the project status in the chart 2002 is displayed as shown in Fig. 10. When the display control unit 40 of the worker terminal 18 unchecks the display setting "Display Project Status" in the display switch of the display setting field 2012 of the operation analysis screen 2000 of Fig. 10, the line of the project status in the chart 2002 is hidden.

[0064] 《Additional device》 14, an operator operates an add apparatus button 2016 to display an add apparatus field 2017. The operator can add a substrate processing apparatus 10 to be displayed in the chart 2002 by inputting necessary information into the add apparatus field 2017.

[0065] 14 is a diagram illustrating an example of adding an apparatus. The display control unit 40 of the operator terminal 18 displays an add apparatus field 2017 when the operator operates an add apparatus button 2016. The display control unit 40 can add a substrate processing apparatus 10 to be displayed on the chart 2002 when the operator inputs necessary information into the add apparatus field 2017.

[0066] In the added equipment field 2017 in Fig. 14, it is possible to specify the range of data to be displayed by selecting a period such as the last week, the last 30 days, etc. The display control unit 40 adds a chart 2002 of the substrate processing apparatus 10 specified by the operator in the added equipment field 2017 in Fig. 14. The added equipment field 2017 may be configured to allow multiple substrate processing apparatuses 10 to be specified at once.

[0067] Fig. 15 is a diagram illustrating an example of a chart 2002 to which a plurality of substrate processing apparatuses 10 have been added. As shown in Fig. 15, the display control unit 40 of the operator terminal 18 can display the operating statuses of a plurality of substrate processing apparatuses 10 in a comparable manner.

[0068] For example, in mass production, it is important that the multiple substrate processing apparatuses 10 are operated as efficiently as possible. Therefore, if there is a substrate processing apparatus 10 in a mass production operation that is operating poorly, it is necessary to improve the operating status as soon as possible.

[0069] For example, in chart 2002 of FIG. 15, the time periods of the "Depo" state in which three substrate processing apparatuses 10 perform manufacturing according to a recipe can be easily compared, and the time period of the "Depo" state is longer than that of the substrate processing apparatuses "AAA" and "BBB" that perform manufacturing according to the same recipe, making it easy to find the substrate processing apparatus "BBB" that is operating poorly.

[0070] Furthermore, when different periods are specified for each substrate processing apparatus 10, the display control unit 40 of the operator terminal 18 displays information for each specified period, as shown in chart 2002 of Fig. 16. For the second substrate processing apparatus 10 in chart 2002 of Fig. 16, 3 / 14 is outside the specified period, so no information is displayed in area 2018.

[0071] "Device deletion" 17, the operator operates the delete equipment button 2020 on the operation analysis screen 2000 to display the delete equipment field 2022. The operator can delete the substrate processing apparatus 10 displayed in the chart 2002 from the delete equipment field 2022.

[0072] 17 is a diagram illustrating an example of apparatus deletion. When the operator operates the apparatus deletion button 2020, the display control unit 40 of the operator terminal 18 displays an apparatus deletion field 2022. When the operator selects the substrate processing apparatus 10 to be deleted from the apparatus deletion field 2022, the display control unit 40 can delete the substrate processing apparatus 10 selected by the operator from the chart 2002.

[0073] <<Change in period>> The operator operates the change period button 2024 on the operation analysis screen 2000 in Fig. 18 to display a change period field 2026. The operator can change the period by selecting the substrate processing apparatus 10 for which the period is to be changed from the change period field 2026 to display a period designation field 2028.

[0074] 18 is a diagram illustrating an example of a period change. The display control unit 40 of the worker terminal 18 displays a period change field 2026 by receiving an operation of a period change button 2024 from the worker. Furthermore, when the substrate processing apparatus 10 whose period is to be changed is selected from the period change field 2026, the display control unit 40 displays a period designation field 2028 for designating the period of the substrate processing apparatus 10 selected by the worker. When a period is designated from the period designation field 2028, the display control unit 40 can change the period of the chart 2002 of the substrate processing apparatus 10 selected by the worker.

[0075] "Aligning the starting point" When displaying multiple substrate processing apparatuses 10 as in chart 2002 on the operation analysis screen 2000 of FIG. 19, the operator can select the target for start point adjustment and operate start point adjustment button 2030 to perform start point adjustment as in chart 2002 on the operation analysis screen 2000 of FIG. 20.

[0076] 19 and 20 are diagrams illustrating an example of starting point adjustment. The operator can select the target for starting point adjustment by placing a cursor or the like on the target for starting point adjustment on a chart 2002 of an operation analysis screen 2000 in Fig. 19 and clicking or the like.

[0077] For example, the operator selects the time period in which the substrate processing apparatuses "AAA" and "BBB" are in the "Depo" state as the target for starting point adjustment from chart 2002 in Fig. 19. With the time period in which the substrate processing apparatuses "AAA" and "BBB" are in the "Depo" state selected as the target for starting point adjustment from chart 2002 in Fig. 19, the operator can adjust the starting point as shown in chart 2002 on the operation analysis screen 2000 in Fig. 20 by operating start point adjustment button 2030.

[0078] The display control unit 40 of the worker terminal 18 adjusts the display range so that the time period for the "Depo" status of the substrate processing devices "AAA" and "BBB" selected from the chart 2002 as the targets for starting point adjustment becomes the starting point, and displays the chart 2002 shown in FIG. 20.

[0079] By adjusting the starting point as shown in Figures 19 and 20, the operator can display the charts 2002 of multiple substrate processing apparatuses 10 side by side for comparison by setting the display unit to "elapsed time," even if the periods of the historical information of the substrate processing apparatuses 10 are different.

[0080] 19 and 20, the operator can specify the target for which the start point adjustment is to be performed, and after performing the start point adjustment, the charts 2002 of the plurality of substrate processing apparatuses 10 can be displayed side by side for comparison. By checking the chart 2002 after performing the start point adjustment, the operator can easily understand the difference in the timing at which the apparatus state switches. Note that the target for which the start point adjustment is to be performed is not limited to the time period of the "Depo" state, but may also be, for example, the time period of the "PM Recipe" state.

[0081] In addition, in the start point adjustment shown in Fig. 20, the display range is adjusted so that the target for start point adjustment selected from chart 2002 in Fig. 19 becomes the start point. The start point adjustment described using Figs. 19 and 20 may also be performed as shown in Figs. 21 and 22, for example.

[0082] 21 and 22 are diagrams illustrating an example of starting point adjustment. In Fig. 21, similar to Fig. 20, the display range is adjusted so that the target for starting point adjustment selected from the chart 2002 becomes the starting point.

[0083] In Fig. 22, the start point is adjusted for each device state, not just for the target for which the start point is adjusted selected from chart 2002. Since the start point adjustment shown in Fig. 22 is performed for each device state, it becomes easier for the operator to compare the length of time for each device state.

[0084] Note that chart 2002 in FIG. 22 has gaps between device states that are not actually present, resulting in a different display from the actual state. However, because the start point is aligned for each device state, it is easier for the operator to intuitively compare the length of time for each device state.

[0085] 22, when the operating statuses of a plurality of substrate processing apparatuses 10 are comparatively displayed, by aligning the start points (head alignment) for each apparatus state, it is possible to check at a glance the difference in the length of time for each apparatus state among the plurality of substrate processing apparatuses 10. Furthermore, according to the chart 2002 in Fig. 22, it is possible to grasp at a glance the difference in the length of time for each apparatus state among the plurality of substrate processing apparatuses 10, making it easier to grasp areas for improvement in the substrate processing apparatus 10 in mass production operations.

[0086] 4, the input receiving unit 38 of the worker terminal 18 determines whether a new operation has been received from the worker. If a new operation has been received from the worker, the worker terminal 18 returns to step S16 and continues the process.

[0087] If no new operation has been received from the worker, the process proceeds to step S20, where the input receiving unit 38 of the worker terminal 18 determines whether or not an operation to end the display of the operation analysis screen 2000 has been received from the worker. If an operation to end the display of the operation analysis screen 2000 has not been received from the worker, the worker terminal 18 returns to step S18. If an operation to end the display of the operation analysis screen 2000 has been received from the worker, the process of the flowchart in FIG. 4 ends.

[0088] The operator terminal 18 can display the timings at which the state of the substrate processing apparatus 10 changes in chronological order in a chart 2002 on the operation analysis screen 2000. Furthermore, since the process execution timings differ among the plurality of substrate processing apparatuses 10, the chart 2002 can be displayed so that the differences can be easily seen by aligning the start points.

[0089] According to the substrate processing system 1 of this embodiment, the aforementioned chart 2002 displayed on the operation analysis screen 2000 can display the device status of the substrate processing device 10 so that the operating status of the substrate processing device 10 can be easily confirmed, thereby improving the ease of checking the operating status of the substrate processing device 10.

[0090] Furthermore, the substrate processing system 1 according to this embodiment makes it easier to identify problem areas in the substrate processing apparatus 10 that are operating poorly in mass production, and is expected to improve the operating rate. As a result, the substrate processing system 1 according to this embodiment can reduce production losses.

[0091] Although the preferred examples of this embodiment have been described in detail above, this embodiment is not limited to the above-described examples, and various modifications and substitutions can be made to the above-described examples without departing from the scope of this embodiment.

[0092] The substrate processing apparatus 10 of the present disclosure can be applied to any type of apparatus, such as an atomic layer deposition (ALD) apparatus, a capacitively coupled plasma (CCP), an inductively coupled plasma (ICP), a radial line slot antenna (RLSA), an electron cyclotron resonance plasma (ECR), or a helicon wave plasma (HWP).The substrate processing apparatus 10 of the present disclosure can also be applied to a chemical vapor deposition (CVD) apparatus and an oxidation / annealing apparatus.

[0093] The substrate processing system 1 of the present disclosure is not limited to the configuration shown in Fig. 1, and there are various system configuration examples depending on the application and purpose. The substrate processing apparatus 10 of the present disclosure can be applied to any of a single-wafer apparatus that processes substrates one by one, a batch apparatus that processes multiple substrates at once, and a semi-batch apparatus. Processes performed by the substrate processing apparatus 10 of the present disclosure include, for example, a film formation process or an etching process. [Explanation of symbols]

[0094] 1. Substrate Processing System 10. Substrate processing equipment 12 Equipment Controller 16 Server equipment 18 Worker terminal 30 Acquisition Department 32 Data storage unit 34 Operation analysis processing section 36 Screen data generation unit 40 Display control unit 2000 Operation Analysis Screen

Claims

1. An information processing device that displays the operating status of one or more substrate processing devices, an acquisition unit that acquires history information of a plurality of apparatus states that the substrate processing apparatus has transitioned through; a display control unit that displays, based on the acquired history information, time periods during which the substrate processing apparatus was in the plurality of apparatus states in chronological order so that each of the plurality of apparatus states can be identified; An information processing device having the above.

2. the plurality of apparatus states includes at least a state in which the substrate processing apparatus performs manufacturing according to a recipe; 2. The information processing device according to claim 1.

3. The display control unit displays time periods during which the plurality of substrate processing apparatuses were in the plurality of apparatus states so as to be comparable among the plurality of substrate processing apparatuses.

3. The information processing device according to claim 1.

4. The display control unit displays a time period in which the device was in one of the device states selected by the worker from the plurality of device states in chronological order, starting from a starting point.

3. The information processing device according to claim 1.

5. The display control unit displays time periods during which the plurality of substrate processing apparatuses were in the plurality of apparatus states by aligning the start points of the plurality of substrate processing apparatuses for each of the plurality of apparatus states.

5. The information processing device according to claim 4.

6. the acquiring unit acquires history information of an alarm state that has occurred in the substrate processing apparatus; The display control unit displays, in chronological order, time periods during which alarms have occurred in the substrate processing apparatus based on the acquired history information.

3. The information processing device according to claim 1, wherein:

7. the acquiring unit acquires history information of a process job state of the substrate processing apparatus; The display control unit displays, based on the acquired history information, time periods during which the substrate processing apparatus executed process jobs in chronological order so that each of the process jobs can be identified.

3. The information processing device according to claim 1, wherein:

8. The display control unit displays time periods during which the substrate processing apparatus was in the plurality of apparatus states by time or elapsed time.

3. The information processing device according to claim 1, wherein:

9. 1. An information processing method in which an information processing device displays the operating status of one or more substrate processing devices, acquiring history information of a plurality of transitions of the substrate processing apparatus; and displaying, based on the acquired history information, time periods during which the substrate processing apparatus was in the plurality of apparatus states in chronological order so that each of the plurality of apparatus states can be identified.

10. An information processing device that displays the operating status of one or more substrate processing devices, an acquiring step of acquiring history information of a plurality of apparatus states that the substrate processing apparatus has transitioned through; a display control step of displaying, in chronological order, time periods during which the substrate processing apparatus was in the plurality of apparatus states based on the acquired history information so that each of the plurality of apparatus states can be identified; A program that executes the following.

Images