Salt, acid generator, resin, resist composition, and method for producing resist pattern

Abstract

To form a resist pattern having good CD uniformity (CDU).SOLUTION: An acid generator contains a salt represented by formula (I) or a structural unit obtained by polymerizing formula (I).SELECTED DRAWING: None

Description

[Technical Field]

[0001] The present invention relates to a salt, an acid generator, a resin, a resist composition, and a method for producing a resist pattern. [Background technology]

[0002] Patent Document 1 describes a resist composition containing a resin that includes the following structural unit.

[0003] [ka]

[0004] Patent Document 2 describes a resist composition containing a resin containing the following structural unit.

[0005] [ka] [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2013-082893 [Patent Document 2] Japanese Patent Publication No. 2023-131576 Summary of the Invention [Problem to be solved by the invention]

[0007] There is a need for a technology that can produce resist patterns with good CD uniformity (CDU). [Means for solving the problem]

[0008] The present invention includes the following inventions. [Invention 1] An acid generator comprising a salt represented by formula (I) or a structural unit represented by formula (IP).

[0009] [ka]

[0010] [ka]

[0011] [In formula (I) and formula (IP), X represents a sulfur atom or an iodine atom. When X is a sulfur atom, m10 is an integer of 1 to 3; when X is an iodine atom, m10 is 1 or 2.

[0012] m1 represents 0, 1 or 2. When X is a sulfur atom, m1+m10=3. When X is an iodine atom, m1+m10=2. When m1 is 2 or more, two R 1 may be the same or different from each other.

[0013] R 1 represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group is not selected from -O-, -CO-, -S-, -SO-, and -NR 11 It may be replaced by - or -SO2-.

[0014] When X is a sulfur atom and m1 is 2, two R 1 are combined to form S + and -CH2- contained in the ring may be -O-, -CO-, -S-, -SO-, -NR 11 It may be replaced by - or -SO2-.

[0015] R 11 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R 3 represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group is Ar 3 It contains an alkyl group having one or more carbon atoms bonded to an alkanediyl group bonded to the alkyl group.

[0016] R 6 represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, or -NR 11 It may be replaced by - or -SO2-.

[0017] R 9 represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, or -NR 11 It may be replaced by - or -SO2-.

[0018] When X is a sulfur atom and m10 is 2 or 3, two R 9 are combined to form S + The two R forming the ring may form a ring containing 9 is S + It may also be a single bond formed between two benzene rings connecting the

[0019] A 3 represents a hydrocarbon group having 1 to 20 carbon atoms, which may have a substituent, and -CH2- contained in the hydrocarbon group is not limited to -O-, -CO-, -S-, -SO-, -NR 11 It may be replaced by - or -SO2-.

[0020] Ar 3 represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m3 represents an integer of 0 to 5, and when m3 is 2 or greater, the groups in the parentheses may be the same or different.

[0021] m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R 6 may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R 9 may be the same or different from each other.

[0022] However, 1≦m3+m9≦5, and when m3=0, R is 1 or more. 9 At least one R 9 represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group includes an alkyl group having 1 or more carbon atoms bonded to an alkanediyl group bonded to a benzene ring.

[0023] Q b1 and Q b2 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. L b1 represents a saturated hydrocarbon group having 1 to 24 carbon atoms, wherein -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-, and wherein a hydrogen atom contained in the saturated hydrocarbon group may be substituted by a fluorine atom or a hydroxy group.

[0024] Y b1 represents a single bond or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group is not selected from -O-, -CO-, -S-, -SO-, -NR 11 It may be replaced by - or -SO2-.

[0025] mm1 represents 0 or 1. R 10 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0026] X 10 represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR 21 -**, *-NR 21 -CO-O-**, *-O-CO-NR 21 Represents -** or *-Ax-Ph-Ay-**.

[0027] R 21 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond.

[0028] * indicates R 10 represents the bonding site with the carbon atom to which it is bonded, and ** represents L 10 , Y b1 or L b1 represents the binding site with L 10 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group is not selected from -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be replaced.] [Invention 2] At least one m3 is an integer greater than or equal to 1, A 3 But **-X 03 -L 03 -or**-L 03 -X 03 - and X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and —CH— contained in the hydrocarbon group may be replaced by —O—, —CO—, —S—, or —SO—), ** is X + and a bonding site to the benzene ring to which the compound is bonded.

[0029] [Invention 3] X 03 is —O— or —S—. [Invention 4] L 03is a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-).

[0030] [Invention 5] The acid generator according to any one of [Invention 1] to [Invention 4], wherein the cation of the salt represented by formula (I) or the structural unit represented by formula (IP) is a cation represented by formula (IC-1) or formula (IC-2).

[0031] [ka]

[0032] [In formula (IC-1) and formula (IC-2), R 3 , R 6 , R 9 and the symbol m6 have the same meaning as in formula (I). X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-).

[0033] m3A, m3B, and m3C each independently represent an integer of 0 to 5, and when m3A, m3B, and m3C each are 2 or greater, the groups in the respective parentheses may be the same or different.

[0034] m9A, m9B and m9C each independently represent an integer of 0 to 5, and when m9A, m9B and m9C each is 2 or greater, the groups in the parentheses may be the same or different.

[0035] m3A, m3B, m3C, m9A, m9B, and m9C satisfy 1≦m3A+m9A≦5, 0≦m3B+m9B≦5, and 0≦m3C+m9C≦5, respectively. When m3A=0, R 9 One of the R 9 represents a linear alkyl group having 2 to 12 carbon atoms.

[0036] X 7 represents a single bond, -CH2-, -O-, -S-, -CO-, -SO- or -SO2-.] [Invention 6] The acid generator according to any one of [Invention 1] to [Invention 5], wherein the cation of the salt represented by formula (I) or the structural unit represented by formula (IP) is a cation represented by formula (IC-3).

[0037] [ka]

[0038] [In formula (IC-3), R 3 , R 6 , R 9 and the symbol m6 have the same meaning as in formula (I). X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-).

[0039] m3A and m3B each independently represent an integer of 0 to 5, and when m3A and m3B each are 2 or greater, the groups in the respective parentheses may be the same or different.

[0040] m9A and m9B each independently represent an integer of 0 to 5, and when m9A and m9B each are 2 or greater, the groups in the respective parentheses may be the same or different.

[0041] m3A, m3B, m9A, and m9B satisfy 1≦m3A+m9A≦5 and 0≦m3B+m9B≦5, respectively. When m3A=0, R 9 At least one R 9 represents a linear alkyl group having 2 to 12 carbon atoms.] [Invention 7] The acid generator according to any one of [Invention 1] to [Invention 6], wherein the cation of the salt represented by formula (I) or the structural unit represented by formula (IP) is a cation represented by formula (IC-4).

[0042] [ka]

[0043] [In formula (IC-4), R 3 , R 6 , R 9 and the symbol m6 have the same meaning as in formula (I). X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-).

[0044] m3A represents an integer of 0 to 5, and when m3A is 2 or more, the groups in the parentheses may be the same or different. m9A represents an integer of 0 to 5, and when m9A is 2 or more, a plurality of R 9 may be the same or different from each other.

[0045] m3A and m9A satisfy 1≦m3A+m9A≦5, respectively. When m3A=0, R 9 At least one R 9 represents a linear alkyl group having 2 to 12 carbon atoms.

[0046] X 7 represents a single bond, -CH2-, -O-, -S-, -CO-, -SO- or -SO2-.] [Invention 8] At least one m3 is an integer greater than or equal to 1, Ar 3 is a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

[0047] [Invention 9] mm is 1, Y b1 The acid generator according to any one of [Invention 1] to [Invention 8], wherein is a cyclohexanediyl group, an adamantanediyl group, a norbornanediyl group, an adamantanelactonediyl group, or a norbornanelactonediyl group.

[0048] [Invention 10] X 10 is a single bond or a group of the formula (X 10 -1)~Formula(X 10 The acid generator according to any one of [Invention 1] to [Invention 9], wherein the acid generator is a group represented by any one of [Invention 1] to [Invention 9].

[0049] [ka]

[0050] [Formula(X 10 -1)~Formula(X 10 -10) Medium, *, ** are binding sites, * is R 10 represents the bonding site between the carbon atom and the atom. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms.

[0051] mx represents an integer of 0 to 4. X 20 is -O- or -NR 21- represents. R 21 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.] [Invention 11] L 10 is a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, -CH2- contained in the alkanediyl group and the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-; The acid generator according to any one of [Invention 1] to [Invention 10], wherein the cyclic hydrocarbon group may have a substituent.

[0052] [Invention 12] A resist composition containing the acid generator according to any one of [Invention 1] to [Invention 11].

[0053] [Invention 13] A salt represented by formula (I) The resist composition according to [Invention 12], which contains a resin containing a structural unit having an acid labile group.

[0054] [Invention 14] A resin containing a structural unit represented by formula (IP), The resist composition according to [Invention 12] or [Invention 13], wherein the resin comprising the structural unit represented by formula (IP) further comprises a structural unit (a1) having an acid labile group.

[0055] [Invention 15] The resist composition according to [Invention 14], further comprising a salt represented by formula (I). [Invention 16] The resist composition according to [Invention 14] or [Invention 15], wherein the structural unit (a1) having an acid labile group comprises at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6).

[0056] [ka]

[0057] [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or -O-(CH2) k1 represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—.

[0058] R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof. The alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may contain a halogen atom.

[0059] R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom.

[0060] m1′ represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1′ represents an integer of 0 to 3.

[0061] [ka]

[0062] [In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0063] R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.

[0064] A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a18 - may be replaced with

[0065] R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36are bonded to each other to form, together with the -CO- to which they are bonded, a divalent hydrocarbon group having 2 to 20 carbon atoms, and the hydrocarbon group and the -CH2- contained in the divalent hydrocarbon group may be replaced with -O- or -S-.

[0066] na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different from each other. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R a17 may be the same or different from each other.

[0067] mc represents an integer between 0 and 2.

[0068] [ka]

[0069] [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom.

[0070] Z a1 is a single bond or -(CH2) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-.

[0071] s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3.

[0072] [ka]

[0073] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0074] R a62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached.

[0075] X a61 is a single bond, -CO-O-* or -CO-NR a65 -*, * represents the binding site with Ar, R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-OL a61 -or*-CO-OL a62 -, * represents the bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms.

[0076] Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.] [Invention 17] The resist composition according to any one of [Invention 12] to [Invention 16], further comprising a resin that includes a structural unit having a fluorine atom.

[0077] [Invention 18] The resist composition according to any one of [Invention 12] to [Invention 17], further comprising a salt that generates an acid that is weaker in acidity than the acid generated from the acid generator.

[0078] [Invention 19] (1) A step of applying the resist composition according to any one of [Invention 12] to [Invention 18] onto a substrate; (2) drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) heating the composition layer after exposure; and (5) developing the heated composition layer; A method for producing a resist pattern comprising:

[0079] [Invention 20] A salt represented by the above formula (I). [Invention 21] At least one m3 is an integer greater than or equal to 1, A 3 But **-X 03 -L 03 -or**-L 03 -X 03 - and X 03 represents -O-, -CO-, -S- or -SO2-; L 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and —CH— contained in the hydrocarbon group may be replaced by —O—, —CO—, —S—, or —SO—), ** is X + The salt according to [Invention 20], wherein the benzene ring is bonded to the

[0080] [Invention 22] X 03 is -O- or -S-. [Invention 23] L 03 is a single bond or an alkanediyl group having 1 to 6 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-).

[0081] [Invention 24] The salt according to any one of [Invention 20] to [Invention 23], wherein the salt represented by formula (I) or the cation of the structural unit represented by formula (IP) is the cation represented by formula (IC-1) or formula (IC-2) described above.

[0082] [Invention 25] The salt according to any one of [Invention 20] to [Invention 24], wherein the cation of the salt represented by formula (I) or the structural unit represented by formula (IP) is the cation represented by formula (IC-3) above.

[0083] [Invention 26] The salt according to any one of [Invention 20] to [Invention 25], wherein the salt represented by formula (I) or the cation of the structural unit represented by formula (IP) is the cation represented by formula (IC-4) above.

[0084] [Invention 27] At least one m3 is an integer greater than or equal to 1, Ar 3 is a group derived from a benzene ring, a naphthalene ring, a furan ring or a thiophene ring.

[0085] [Invention 28] Y b1 The salt according to any one of [Invention 20] to [Invention 27], wherein is a cyclohexanediyl group, an adamantanediyl group, a norbornanediyl group, an adamantanelactonediyl group, or a norbornanelactonediyl group.

[0086] [Invention 29] X 10 is a single bond or the above formula (X 10 -1)~Formula(X 10 The salt according to any one of [Invention 20] to [Invention 28], wherein the group is a group represented by any one of [Invention 21] to [Invention 22].

[0087] [Invention 30] L 10is a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, -CH2- contained in the alkanediyl group and the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-; The salt according to any one of [Invention 20] to [Invention 29], wherein the cyclic hydrocarbon group may have a substituent.

[0088] [Invention 31] A resin containing a structural unit represented by the above formula (IP). [Effects of the Invention]

[0089] According to the present invention, resist patterns can be produced with good CD uniformity (CDU). DETAILED DESCRIPTION OF THE INVENTION

[0090] In this specification, "(meth)acrylic monomer" means "at least one of an acrylic monomer and a methacrylic monomer." The terms "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. In the groups described in this specification, those that can have both a linear structure and a branched structure may have either. When -CH2- contained in a hydrocarbon group or the like is replaced with -O-, -S-, -CO-, -SO-, -NR 11When a group is replaced with - or -SO2-, the same examples apply to each group, and the number of carbon atoms before the replacement is the number of carbon atoms in the hydrocarbon group, etc. "Combined group" refers to a group formed by combining two or more of the exemplified groups, with their valence, bonding form, etc. appropriately modified. "Derived from" or "derived from" refers to the polymerizable C=C bond contained in the molecule becoming a single bond (-CC- group) through polymerization. When stereoisomers exist, all stereoisomers are included. "Acid labile group" refers to a group that has a leaving group and, upon contact with an acid (e.g., trifluoromethanesulfonic acid, etc.), the leaving group is eliminated to form a hydrophilic group (e.g., a hydroxy group, a carboxy group, etc.). "Base labile group" refers to a group that has a leaving group and, upon contact with a base (e.g., trimethylamine, tetramethylammonium hydroxide, etc.), the leaving group is eliminated to form a hydrophilic group (e.g., a hydroxy group, a carboxy group, etc.). In each group, any position and any number of hydrogen atoms contained in the group may be replaced with bonding sites depending on the number of substituents, etc. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the substituted group.

[0091] In this specification, the term "solid content of the resist composition" refers to the sum of all components in the resist composition excluding the solvent (E), which will be described later. [Salt represented by formula (I)] The present invention relates to a salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)").

[0092] In the salt (I), the negatively charged side is sometimes called the "anion (I)" and the positively charged side is sometimes called the "cation (I)". [Cation (I)] The cation (I) of the salt represented by formula (I) is a cation represented by formula (IC).

[0093] [ka]

[0094] [In formula (IC), all symbols have the same meanings as in formula (I)] R 3 The alkyl group having 2 to 12 carbon atoms is a linear alkyl group or Ar 3 Examples of the branched alkyl group include a branched alkyl group containing an alkanediyl group having 1 or more carbon atoms bonded to the alkyl group, and preferably represents a linear alkyl group having 2 to 12 carbon atoms. Examples of the linear alkyl group include an n-propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, an n-octyl group, an n-nonyl group, an n-decyl group, an n-undecyl group, and an n-dodecyl group. Examples of the branched alkyl group include a 2-methylpropyl group, a 2,2-dimethylpropyl group, and a 3,3-dimethylbutyl group. The number of carbon atoms in the alkyl group is preferably 2 to 8, and more preferably 3 to 6.

[0095] R 6 and R 9 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 1 , R 6 and R 9 Examples of the hydrocarbon group having 1 to 18 carbon atoms include chain hydrocarbon groups such as alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups.

[0096] The alkyl group is a linear or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 9, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0097] The chain hydrocarbon group preferably has 1 to 12 carbon atoms, more preferably 1 to 9 carbon atoms, even more preferably 1 to 6 carbon atoms, still more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.

[0098] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position.

[0099] [ka]

[0100] Specifically, examples of monocyclic alicyclic hydrocarbon groups include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Examples of polycyclic alicyclic hydrocarbon groups include polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl; cycloalkyl groups such as spirocyclohexane-1,2'-cyclopentane and spiroadamantane-2,3'-cyclopentane; and spiro rings having a cycloalkyl group bonded to a norbornyl or adamantyl group via a spiro bond. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, and even more preferably 3 to 12.

[0101] Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0102] Among chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, groups formed by combining two or more groups include groups formed by combining an aromatic hydrocarbon group with a chain hydrocarbon group (for example, aromatic hydrocarbon group-alkanediyl group-*, alkyl group-aromatic hydrocarbon group-*, alkyl group-aromatic hydrocarbon group-alkanediyl group-*, where -CH2- contained in the alkanediyl group and the alkyl group may be replaced by -O-, -CO-, -S-, or -SO2-. An alkanediyl group is formed by removing one hydrogen atom from the above-mentioned alkyl group. groups in which an alicyclic hydrocarbon group and a chain hydrocarbon group are combined (for example, alicyclic hydrocarbon group-alkanediyl group-*, alkyl group-alicyclic hydrocarbon group-*, alkyl group-alicyclic hydrocarbon group-alkanediyl group-*; -CH2- contained in the alkanediyl group and the alkyl group may be replaced by -O-, -CO-, -S- or -SO2-); and groups in which an aromatic hydrocarbon group and an alicyclic hydrocarbon group are combined (for example, aromatic hydrocarbon group-alicyclic hydrocarbon group-*, alicyclic hydrocarbon group-aromatic hydrocarbon group-*). * indicates a bonding site.

[0103] The aromatic hydrocarbon group -alkanediyl group-* includes aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group-aromatic hydrocarbon group-* include a tolyl group, a xylyl group, and a cumenyl group.

[0104] Examples of the alicyclic hydrocarbon group -alkanediyl group-* include cycloalkylalkyl groups such as a cyclohexylmethyl group, a cyclohexylethyl group, a 1-(adamantan-1-yl)methyl group, and a 1-(adamantan-1-yl)-1-methylethyl group.

[0105] Examples of the alkyl group-alicyclic hydrocarbon group-* include cycloalkyl groups having an alkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, and a 2-alkyladamantan-2-yl group.

[0106] Examples of the aromatic hydrocarbon group-alicyclic hydrocarbon group-* include a phenylcyclohexyl group. Examples of the alicyclic hydrocarbon group-aromatic hydrocarbon group-* include a cyclohexylphenyl group.

[0107] The alkanediyl group is a group obtained by removing one hydrogen atom from the alkyl group described above and bonding to an alicyclic hydrocarbon group or an aromatic hydrocarbon group, and is a straight-chain or branched alkanediyl group. Examples of the alkanediyl group include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl.

[0108] In addition, the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may each be a combination of two or more types, and any of the groups may be bonded to a benzene ring.

[0109] R 1 , R 6 and R 9 -CH2- contained in the hydrocarbon group represented by the formula: 11 When the hydrocarbon group is substituted with - or -SO2-, the number of carbon atoms before the substitution is the total number of carbon atoms in the hydrocarbon group.

[0110] R 11 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group.

[0111] The -CH2- contained in the hydrocarbon group can be -O-, -CO-, -S-, -SO-, or -NR 11 The group substituted with - or -SO2- includes a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 11 -), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), peptide group (a group in which -CH2-CH2- in an ethylene group is replaced with -CO-NR 7 -), carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR 11-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (alkanediyl group an alkanediyl group in which -CH2-CH2- at any position is replaced by -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced by -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced by -CO-O-), an alkanediylthio group (an alkanediyl group in which -CH2- at any position is replaced by -S-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced by -SO2-), an alkanediylamino group (an alkanediyl group in which -CH2- at any position is replaced by -NR 11 -substituted), cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups.

[0112] Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0113] Examples of the alkylthio group include alkylthio groups having 1 to 17 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0114] Examples of the alkylamino group include alkylamino groups having 1 to 17 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, etc. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0115] The alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.

[0116] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as acetyl, propionyl, and butyryl. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.

[0117] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 17 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0118] Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 17 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0119] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 17 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 17 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3.

[0120] Examples of the alkanediylthio group include alkanediylthio groups having 1 to 17 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0121] Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0122] Examples of the alkanediylamino group include alkanediylamino groups having 1 to 27 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a dimethyleneamino group, a propyleneamino group, a butyleneamino group, a pentyleneamino group, a hexyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0123] Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 18 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 17 carbon atoms, such as a phenyloxy group.

[0124] In addition, -CH2- contained in the alicyclic hydrocarbon group can be -O-, -S-, -SO2-, -SO-, -NR 11Examples of groups substituted with - or -CO- include the groups shown below. In the groups shown below, -O- or -CO- may be replaced with -S- or -SO2-. The binding site may be at any position.

[0125] [ka]

[0126] R 1 , R 6 and R 9 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, etc. 1 , R 6 and R 9 The -CH2- contained in the hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-, which essentially results in R 1 , R 6 and R 9 may have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkylamino group, an amino group, a thiol group, an alkylthio group, or an alkylsulfonyl group.

[0127] Examples of halogen atoms include the same groups as those described above. 9 When R is a hydrocarbon group having a halogen atom, 9 Examples of the hydrocarbon group having a halogen atom include a haloalkyl group, an alicyclic hydrocarbon group having a halogen atom, and an aromatic hydrocarbon group having a halogen atom.

[0128] Examples of the alkyl group having a halogen include a fluorinated alkyl group having 1 to 12 carbon atoms, a chlorinated alkyl group having 1 to 12 carbon atoms, a brominated alkyl group having 1 to 12 carbon atoms, and an iodinated alkyl group having 1 to 12 carbon atoms. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 12 carbon atoms (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, and a nonafluorobutyl group), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0129] -CH2- contained in the haloalkyl group may be replaced with -O- or -CO-, and examples of the haloalkoxy group, haloalkoxycarbonyl group, haloalkylcarbonyl group and haloalkylcarbonyloxy group include haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms and haloalkylcarbonyloxy groups having 2 to 11 carbon atoms.

[0130] The hydrocarbon group may have one or more substituents. R 1 represents an alkyl group having 1 to 12 carbon atoms (the —CH2— contained in the alkyl group is not limited to —O—, —CO—, —S—, —SO—, —NR 11 - or -SO2-, and two R 1 are combined to form S + It is preferable that the alkyl group is an aromatic hydrocarbon group which may have a substituent, or a group in which these are combined.

[0131] R 6represents a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-), -OR 10 , -O-CO-OR 10 or -OL 10 -CO-OR 10 is preferred, an iodine atom, a fluorine atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), and an iodine atom, a fluorine atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), is even more preferred, an iodine atom, a fluorine atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and an iodine atom, a fluorine atom, a hydroxy group, a It is more preferably an alkyl group having 1 to 6 carbon atoms, a haloalkyl group having 1 to 4 carbon atoms, or an alkoxy group having 1 to 3 carbon atoms, even more preferably an iodine atom, a fluorine atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkoxy group having 1 to 3 carbon atoms, and even more preferably an iodine atom, a fluorine atom, a trifluoromethyl group, a methyl group, an ethyl group, an n-propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, a methoxy group, an ethoxy group, or a hydroxy group.

[0132] R 9is preferably a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (-CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-), more preferably a halogen atom, a fluorinated alkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), still more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a hydroxy group, a methoxy group, a methyl group, an ethyl group, an n-propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, or a t-butyl group.

[0133] Also, R 9 When m3=0, R is 1 or more. 9 At least one R 9 represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group preferably contains an alkyl group having 1 or more carbon atoms bonded to an alkanediyl group bonded to a benzene ring, and more preferably represents a linear alkyl group having 2 to 12 carbon atoms; R 3 It is more preferable that the alkyl group is the same as the alkyl groups exemplified as the alkyl groups having 2 to 12 carbon atoms.

[0134] Ar 3 Examples of the aromatic hydrocarbon group having 6 to 10 carbon atoms include groups derived from a benzene ring or a naphthalene ring, such as a phenylene group or a naphthylene group. 3 Examples of the heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms include groups derived from a furan ring, a thiophene ring, a benzofuran ring, or a benzothiophene ring.

[0135] Ar 3 is preferably a group derived from a benzene ring, a naphthalene ring, a furan ring or a thiophene ring, and more preferably a group derived from a benzene ring. A 3 Examples of the hydrocarbon group include linear or branched chain hydrocarbon groups (e.g., alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may be a combination of two or more of these groups. The number of carbon atoms in the hydrocarbon group is preferably 1 to 19, more preferably 1 to 18, even more preferably 1 to 16, still more preferably 1 to 14, and even more preferably 1 to 12.

[0136] Examples of the chain hydrocarbon group include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl; Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group.

[0137] The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 9, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0138] The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups shown below: The bonding site may be at any position.

[0139] [ka]

[0140] Specifically, monocyclic alicyclic hydrocarbon groups such as monocyclic cycloalkanediyl groups, such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group, and Examples include polycyclic alicyclic hydrocarbon groups such as polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl; cycloalkyl groups such as spirocyclohexane-1,2'cyclopentane and spiroadamantane-2,3'-cyclopentane; and spiro rings having a cycloalkyl group bonded to a norbornyl group or an adamantyl group via a spiro bond.

[0141] The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, even more preferably 3 to 12 carbon atoms, and even more preferably 3 to 10 carbon atoms. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0142] Examples of groups formed by combining groups include a group formed by combining an alicyclic hydrocarbon group with an alkanediyl group, a group formed by combining an aromatic hydrocarbon group with an alkanediyl group, and a group formed by combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group. In the combination, two or more chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups may be combined. Furthermore, any of the groups may be bonded to a benzene ring.

[0143] Examples of groups combining an alicyclic hydrocarbon group and an alkanediyl group include -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent alicyclic hydrocarbon group-.

[0144] Examples of groups combining an aromatic hydrocarbon group and an alkanediyl group include -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, and -alkanediyl group-divalent aromatic hydrocarbon group-.

[0145] Examples of groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, and -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-.

[0146] A 3 In this case, -CH2- contained in the hydrocarbon group can be -O-, -CO-, -S-, -SO-, -NR 11 When the hydrocarbon group is substituted with - or -SO2-, the number of carbon atoms before the substitution is taken as the total number of carbon atoms in the hydrocarbon group. The number may be 1 or 2 or more, but is preferably 1 or 2.

[0147] The -CH2- contained in the hydrocarbon group can be -O-, -CO-, -S-, -SO-, or -NR 11 Examples of groups substituted with - or -SO2- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 11-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR 11 -), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (alkanediyl group an alkanediyl group in which -CH2-CH2- at any position is replaced by -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced by -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced by -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced by -SO2-), an alkanediylthio group (an alkanediyl group in which -CH2- at any position is replaced by -S-), an alkanediylamino group (an alkanediyl group in which -CH2- at any position is replaced by -NR 11-substituted), cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups.

[0148] Examples of the alkoxy group include alkoxy groups having 1 to 19 carbon atoms, such as a methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0149] Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0150] Examples of the alkylamino group include alkylamino groups having 1 to 19 carbon atoms, such as methylamino, ethylamino, dimethylamino, propylamino, butylamino, pentylamino, and hexylamino groups. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0151] The alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.

[0152] Examples of alkoxycarbonyl groups include alkoxycarbonyl groups having 2 to 19 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl. Examples of alkylcarbonyl groups include alkylcarbonyl groups having 2 to 20 carbon atoms, such as acetyl, propionyl, and butyryl. Examples of alkylcarbonyloxy groups include alkylcarbonyloxy groups having 2 to 19 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.

[0153] Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0154] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 19 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0155] Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 19 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0156] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 19 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 20 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 19 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3.

[0157] Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 19 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0158] Examples of the alkanediylthio group include alkanediylthio groups having 1 to 19 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0159] Examples of the alkanediylamino group include alkanediylamino groups having 1 to 19 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a dimethyleneamino group, a propyleneamino group, a butyleneamino group, a pentyleneamino group, a hexyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0160] Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 19 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 19 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 19 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 17 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 19 carbon atoms, such as a phenyloxy group.

[0161] In addition, -CH2- contained in the alicyclic hydrocarbon group can be -O-, -CO-, -S-, -SO-, -NR 11Examples of the group replaced by - or -SO2- include the groups shown below. Also included are groups in which -O- is replaced by -S- and -CO- is replaced by -SO2-. The bonding site can be at any position.

[0162] [ka]

[0163] A 3 The substituents that the hydrocarbon group may have include R 6 and R 9 Examples of the substituents include the same groups as those exemplified as the substituents that the hydrocarbon group may have. A 3 each independently represents a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is not limited to -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2-, provided that at least one of -CH2- contained in the hydrocarbon group is not -O-, -CO-, -S-, -SO-, or -NR2-. 11 - or -SO2- is preferably substituted.

[0164] Specifically, A 3 is **-L 031 -X 03 -L 032 -is (X 03 each independently represents -O-, -CO-, -S-, -SO-, or -NR 11 - or -SO2-. 031 and L 032 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2- may be replaced. 031 and L 032 The total number of carbon atoms in X is preferably 0 to 18. +It is more preferable that A 3 is **-X 03 -L 03 -or**-L 03 -X 03 -is (X 03 -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2-. 03 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is not -O-, -CO-, -S-, -SO-, or -NR 11 - or -SO2- may be replaced. ** represents X + It is more preferable that A represents the bonding site with the benzene ring to which it is bonded. 3 -O-, -CO-, -S-, -SO-, -NR 11 Preferred are those which have no substituents other than the - or -SO2- substitution.

[0165] L 031 , L 032 and L 03 a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group is not limited to -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2-) has a carbon number of 1 to 18, and A 3 Examples of the groups include the same groups as those listed in the above.

[0166] X 03 is preferably —O— or —S—, and more preferably —O—. L 031 , L 032 and L 03 are each independently a single bond or a hydrocarbon group having 1 to 18 carbon atoms (-CH2- contained in the hydrocarbon group is not limited to -O-, -CO-, -S-, -SO-, -NR 11- or -SO2-), and a single bond or a hydrocarbon group having 1 to 12 carbon atoms (the -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2-), more preferably a single bond, a chain hydrocarbon group having 1 to 9 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or a group in which a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 10 carbon atoms are combined (-CH2- contained in the chain hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S-, or -SO2-), even more preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (- contained in the alkanediyl group It is even more preferable that the alkyl group is a single bond or an alkanediyl group having 1 to 4 carbon atoms (wherein -CH2- may be replaced by -O- or -CO-), and it is even more preferable that the alkyl group is a single bond or an alkanediyl group having 1 to 3 carbon atoms (wherein -CH2- may be replaced by -O- or -CO-). Among these, a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, a carbonyl group, a carbonyloxy group, a carbonyloxymethylene group, an ethyleneoxy group, a methylenecarbonyloxymethylene group, or an ethyleneoxycarbonyl group is preferred, and a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, or a carbonyl group is more preferred. 031 and L 032 The total number of carbon atoms is preferably 0 to 18.

[0167] m3 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0168] m6 is preferably 0, 1, 2 or 4, and more preferably 0, 1 or 2. m9 is preferably 0, 1, 2, 3 or 4, more preferably 0, 1, 2 or 3, even more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0169] R 3 Ar 3 The bond position to Ar 3 is a group derived from a benzene ring, A 3 The bonding position of A may be ortho, meta or para. 3 It is preferably bonded at the para or meta position relative to the bonding position of (I), and more preferably at the para position.

[0170] R 6 Ar 3 The bonding position to Ar is not particularly limited. 3 is a group derived from a benzene ring, R 6 Ar 3 The binding position to A 3 The bonding position of R may be ortho, meta, or para. 6 is A 3 Preferably, the bond is at the para or meta position relative to the bonding position of R, and more preferably at the meta position. 6 is A 3 With respect to the bonding positions of R, it is preferred that one is bonded to the ortho- or meta-position and one is bonded to the para- or meta-position, and it is more preferred that two are bonded to the meta-position. 6 is A 3 Preferably, two are bonded at the ortho or meta position and one is bonded at the para or meta position, more preferably, one is bonded at the ortho position and two are bonded at the meta position relative to the bonding positions of R 6 is A 3With respect to the bonding positions of the above, it is preferred that two are bonded at the ortho or meta positions and two are bonded at the para or meta positions, and it is more preferred that two are bonded at the ortho positions and two are bonded at the meta positions.

[0171] R 9 The bonding position of to the benzene ring is X + The bonding position of R may be ortho, meta, or para. 9 The bonding position of the benzene ring is m3=0, and R 9 is a linear alkyl group having 2 to 12 carbon atoms, X + The bonding position of X may be ortho, meta or para. + It is preferably bonded at the para or meta position relative to the bonding position of (I), and more preferably at the para position.

[0172] Among them, when m9 is 1, R 9 is X + Preferably, the bond is at the para or meta position relative to the bonding position of R, more preferably at the para position. 9 is X + With respect to the bonding positions of R, it is preferred that one is bonded at the ortho or meta position and one is bonded at the para or meta position, and it is more preferred that one is bonded at the meta position and one is bonded at the para or meta position. 9 are each independently, X + Preferably, two are bonded at the ortho or meta position and one is bonded at the para or meta position, more preferably two are bonded at the meta position and one is bonded at the para position, relative to the bonding positions of R 9 are each independently, X + With respect to the bonding positions of the above, it is preferred that two are bonded at the ortho or meta positions and two are bonded at the para or meta positions, and it is more preferred that two are bonded at the meta positions, one is bonded at the ortho position, and one is bonded at the para position.

[0173] A 3 X + The bonding positions of X to the benzene ring are each independently + The bonding position of X may be ortho, meta or para. + More specifically, when m3 is 1, A 3 is X + It is preferably bonded at the para or meta position relative to the bonding position of A, and more preferably at the para position. 3 is X + With respect to the bonding positions of A, it is preferable that one is bonded at the ortho or meta position, and one is bonded at the ortho or meta position, and it is more preferable that two are bonded at the meta positions. 3 are each independently, X + Preferably, two are bonded at the ortho or meta position and one is bonded at the para or meta position, more preferably two are bonded at the meta position and one is bonded at the para position. 3 is X + With respect to the bonding positions of the above, it is preferred that two are bonded at the ortho or meta positions and two are bonded at the para or meta positions, and it is more preferred that two are bonded at the ortho positions and two are bonded at the meta positions.

[0174] Also, when X is a sulfur atom and m10=3, two R 9 and combine to form S + In particular, two R 9 are combined to form S + It is preferable that the cation is a cation represented by formula (IC′).

[0175] [ka]

[0176] [In formula (IC′), R 3 , R 6 , R 9 , m3, m6, m9, A 3 and Ar 3 The symbols have the same meanings as above.

[0177] X 7 represents a single bond, -CH2-, -O-, -S-, -CO-, -SO- or -SO2-.] X 7 is preferably a single bond, —CH 2 — or —O—.

[0178] The Two R's 1 and bond to each other together with the sulfur atom to which they are bonded to form a ring which may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may be a ring having 3 to 18 carbon atoms, preferably a ring having 4 to 18 carbon atoms. The ring containing a sulfur atom may be a 3- to 12-membered ring, preferably a 3- to 7-membered ring, for example, the following rings. * represents a bonding site.

[0179] [ka]

[0180] Examples of the cation (I) represented by formula (IC) include cations represented by formula (IC-1), formula (IC-2), formula (IC-3), and formula (IC-4) (hereinafter, these may be referred to as "cation (IC-1)," "cation (IC-2)," "cation (IC-3)," and "cation (IC-4)," respectively).

[0181] [ka]

[0182] [In formula (IC-1), formula (IC-2), formula (IC-3) and formula (IC-4), R 3 , R 6 , R9 , m6, L 03 , X 03 and X 7 The symbols have the same meanings as above. m3A, m3B and m3C each independently represent an integer of 0 to 5.

[0183] When m3A, m3B and m3C are each 2 or more, the groups in the respective parentheses may be the same or different. m9A, m9B and m9C each independently represent an integer of 0 to 5, and when m9A, m9B and m9C each is 2 or greater, the groups in the respective parentheses may be the same or different.

[0184] m3A, m3B, m3C, m9A, m9B, and m9C satisfy 1≦m3A+m9A≦5, 0≦m3B+m9B≦5, and 0≦m3C+m9C≦5, respectively. When m3A=0, R 9 One of the R 9 represents a linear alkyl group having 2 to 12 carbon atoms.] X 03 The bonding position of to the benzene ring is A 3 The bonding position to the benzene ring is the same as that of

[0185] In formulas (IC-1), (IC-2), (IC-3), and (IC-4), when m3A + m3B + m3C = 0, cations represented by formulas (IC-1'), (IC-2'), (IC-3'), and (IC-4') (hereinafter, these may be referred to as "cation (IC-1')," "cation (IC-2')," "cation (IC-3')," and "cation (IC-4')," respectively) are given.

[0186] [ka]

[0187] [In formula (IC-1′), formula (IC-2′), formula (IC-3′) and formula (IC-4′), R 9 , m9A, m9B, m9C and X 7 The symbols have the same meanings as above.

[0188] R 9A , R 9B and R 9C each independently represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group includes an alkanediyl group having 1 or more carbon atoms bonded to an alkanediyl group bonded to a benzene ring.] Examples of the cation of the salt (I) include cations represented by the following formulae (Ic-1) to (Ic-85).

[0189] [ka]

[0190] [ka]

[0191] [ka]

[0192] [ka]

[0193] [ka]

[0194] [ka]

[0195] [ka]

[0196] [Anion (I)] Q b1 and Q b2 Examples of the perfluoroalkyl group represented by include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. The number of carbon atoms in the perfluoroalkyl group is preferably 1 to 4, and more preferably 1 to 3.

[0197] Q b1 and Q b2 Examples of the alkyl group represented by include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group, and are preferably alkyl groups having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group.

[0198] Q b1 and Q b2 Preferably, at least one of the groups contains a fluorine atom or a perfluoroalkyl group, more preferably each independently is a fluorine atom or a perfluoroalkyl group, further preferably is a fluorine atom or a trifluoromethyl group, and even more preferably is both a fluorine atom.

[0199] L b1 Examples of the saturated hydrocarbon group in include divalent chain hydrocarbon groups such as linear alkanediyl groups and branched alkanediyl groups, and monocyclic or polycyclic (including spiro ring) divalent alicyclic saturated hydrocarbon groups, and may also be groups formed by combining two or more of these groups.

[0200] Specific examples include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group; branched alkanediyl groups such as ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl; monocyclic alicyclic saturated hydrocarbon groups such as cycloalkanediyl groups, such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; Examples include polycyclic alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl. The terminal of the branched alkanediyl group may be a methyl group.

[0201] L b1 Examples of the group in which -CH2- in the divalent saturated hydrocarbon group represented by the formula (b1-1) is replaced with -O- or -CO- include groups represented by any of formulas (b1-1) to (b1-3). In the groups represented by formulas (b1-1) to (b1-3) and specific examples thereof, groups represented by formulas (b1-4) to (b1-11), * and ** represent bonding sites, * indicates -Y b1 represents the binding site with

[0202] [ka]

[0203] [In formula (b1-1), L b2 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.

[0204] L b3 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and -CH2- contained in the saturated hydrocarbon group may be substituted with -O- or -CO-.

[0205] However, L b2 and L b3 The total number of carbon atoms is 22 or less. In formula (b1-2), L b4 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.

[0206] L b5 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and -CH2- contained in the saturated hydrocarbon group may be substituted with -O- or -CO-.

[0207] However, L b4 and L b5 The total number of carbon atoms is 22 or less. In formula (b1-3), L b6 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.

[0208] L b7represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and -CH2- contained in the saturated hydrocarbon group may be substituted with -O- or -CO-.

[0209] However, L b6 and L b7 The total number of carbon atoms is 23 or less. In the groups represented by formulae (b1-1) to (b1-3), when -CH2- contained in the saturated hydrocarbon group is replaced with -O- or -CO-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the saturated hydrocarbon group.

[0210] As the divalent saturated hydrocarbon group, L b1 Examples of the divalent saturated hydrocarbon group include the same as the divalent saturated hydrocarbon group. L b2 is preferably a single bond, a methylene group, *-CH(CF3)-, or *-C(CF3)2-.

[0211] L b3 is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b4 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom, and is preferably a methylene group, -CH(CF3)-, or -C(CF3)2-.

[0212] L b5 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b6 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.

[0213] L b7is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group, and -CH2- contained in the divalent saturated hydrocarbon group may be substituted with -O- or -CO-.

[0214] L b1 As the divalent saturated hydrocarbon group represented by the formula (b1-1) or (b1-3), in which one --CH.sub.2-- contained in the group is replaced by --O-- or --CO--, a group represented by the formula (b1-1) or (b1-3) is preferred. Examples of the group represented by formula (b1-1) include groups represented by formulas (b1-4) to (b1-8).

[0215] [ka]

[0216] [In formula (b1-4), L b8 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.

[0217] In formula (b1-5), L b9 represents a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-.

[0218] L b10 represents a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.

[0219] However, L b9 and L b10 The total number of carbon atoms is 20 or less. In formula (b1-6), L b11 represents a divalent saturated hydrocarbon group having 1 to 21 carbon atoms.

[0220] L b12 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.

[0221] However, L b11 and L b12 The total number of carbon atoms is 21 or less. In formula (b1-7), L b13 represents a divalent saturated hydrocarbon group having 1 to 19 carbon atoms.

[0222] L b14 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. L b15 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.

[0223] However, L b13 ~L b15 The total number of carbon atoms is 19 or less. In formula (b1-8), L b16 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-.

[0224] L b17 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms. L b18 represents a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group.

[0225] However, L b16 ~L b18 The total number of carbon atoms is 19 or less. Lb5 is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b9 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.

[0226] L b10 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b11 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms.

[0227] L b12 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b13 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b14 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 6 carbon atoms.

[0228] L b15 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b16 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms.

[0229] L b17 is preferably a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b18 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.

[0230] Examples of the group represented by formula (b1-3) include groups represented by formulas (b1-9) to (b1-11).

[0231] [ka]

[0232] [In formula (b1-9), L b19 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.

[0233] L b20 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom, a hydroxy group, or an alkylcarbonyloxy group. -CH2- contained in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and a hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group.

[0234] However, L b19 and L b20 The total number of carbon atoms is 23 or less. In formula (b1-10), L b21 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.

[0235] L b22 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b23 represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom, a hydroxy group, or an alkylcarbonyloxy group. -CH2- contained in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and a hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group.

[0236] However, L b21 , L b22 and L b23 The total number of carbon atoms is 21 or less. In formula (b1-11), L b24 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom.

[0237] L b25 represents a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b26 represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and a hydrogen atom contained in the saturated hydrocarbon group may be substituted with a fluorine atom, a hydroxy group, or an alkylcarbonyloxy group. -CH2- contained in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and a hydrogen atom contained in the alkylcarbonyloxy group may be substituted with a hydroxy group.

[0238] However, L b24 , L b25 and L b26 The total number of carbon atoms is 21 or less. In addition, in the groups represented by formulae (b1-9) to (b1-11), when a hydrogen atom contained in the saturated hydrocarbon group is substituted with an alkylcarbonyloxy group, the number of carbon atoms before substitution is regarded as the number of carbon atoms of the saturated hydrocarbon group.

[0239] Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, a butyryloxy group, a cyclohexylcarbonyloxy group, and an adamantylcarbonyloxy group.

[0240] Examples of the group represented by formula (b1-4) include the following.

[0241] [ka]

[0242] Examples of the group represented by formula (b1-5) include the following.

[0243] [ka]

[0244] Examples of the group represented by formula (b1-6) include the following.

[0245] [ka]

[0246] Examples of the group represented by formula (b1-7) include the following.

[0247] [ka]

[0248] Examples of the group represented by formula (b1-8) include the following.

[0249] [ka]

[0250] Examples of the group represented by formula (b1-2) include the following.

[0251] [ka]

[0252] Examples of the group represented by formula (b1-9) include the following.

[0253] [ka]

[0254] Examples of the group represented by formula (b1-10) include the following.

[0255] [ka]

[0256] Examples of the group represented by formula (b1-11) include the following.

[0257] [ka]

[0258] Y b1 Examples of the cyclic hydrocarbon group represented by the formula (I) include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, a heterocyclic aromatic hydrocarbon group, or a group formed by combining these groups. Y b1 The -CH2- contained in the alicyclic hydrocarbon group represented by the formula 11 Examples of the alicyclic hydrocarbon group not substituted with - or -CO- include groups represented by formulae (Y1) to (Y11) and (Y36) to (Y38).

[0259] Y b1 The -CH2- contained in the alicyclic hydrocarbon group represented by the formula 11 When it is replaced by - or -CO-, the number may be one or more. Examples of such groups include groups represented by formulae (Y12) to (Y35) and formulae (Y39) to (Y43). -O- or -CO- in the groups represented by formulae (Y12) to (Y35) and formulae (Y39) to (Y43) may be replaced by -S- or -SO2-. The bonding site may be at any position.

[0260] [ka]

[0261] Y b1The alicyclic hydrocarbon group represented by the formula (Y1) is preferably a group represented by any one of formulas (Y1) to (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y39) to formula (Y43), more preferably a group represented by formula (Y11), formula (Y15), formula (Y16), formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42) or formula (Y43), and even more preferably a group represented by formula (Y11), formula (Y15), formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42) or formula (Y43).

[0262] Y b1 is a spiro ring containing an oxygen atom, such as those of formulae (Y28) to (Y35), (Y39), (Y40), (Y42), and (Y43), the alkanediyl group between the two oxygen atoms preferably has one or more fluorine atoms. Furthermore, among the alkanediyl groups contained in the ketal structure, it is preferred that the methylene group adjacent to the oxygen atom is not substituted with a fluorine atom.

[0263] The alicyclic hydrocarbon group preferably has 3 to 24 carbon atoms, more preferably 3 to 20 carbon atoms, even more preferably 3 to 18 carbon atoms, and even more preferably 3 to 16 carbon atoms. Y b1 Examples of the aromatic hydrocarbon group represented by the formula (I) include a phenylene group, a naphthylene group, a biphenylene group, an anthrylene group, a phenanthrylene group, a binaphthylene group, etc. The aromatic hydrocarbon group preferably has 6 to 24 carbon atoms, more preferably 6 to 20 carbon atoms, even more preferably 6 to 18 carbon atoms, still more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0264] Y b1 Examples of the heterocyclic aromatic hydrocarbon group represented by the formula (I) include groups derived from a furan ring, a thiophene ring, a benzofuran ring, a benzothiophene ring, etc. The heterocyclic aromatic hydrocarbon group preferably has 4 to 9 carbon atoms, and more preferably has 4 to 8 carbon atoms.

[0265] Y b1 The aromatic hydrocarbon group or heterocyclic aromatic hydrocarbon group represented by the formula (I) is preferably a phenylene group, a naphthylene group, or a group derived from a furan ring or a thiophene ring, and more preferably a phenylene group.

[0266] Y b1 Examples of the substituent of the cyclic hydrocarbon group represented by the formula (I) include a halogen atom, a hydroxy group, a cyano group, an alkyl group having 1 to 16 carbon atoms which may be substituted with a hydroxy group (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, an aralkyl group having 7 to 21 carbon atoms, a glycidyloxy group, -(CH2) ja -CO-OR b1 group or -(CH2) ja -O-CO-R b1 group (in the formula, R b1 represents an alkyl group having 1 to 16 carbon atoms, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, wherein -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced by -O-, -SO2-, or -CO-, and a hydrogen atom contained in the alkyl group, the alicyclic hydrocarbon group, or the aromatic hydrocarbon group may be replaced by a hydroxy group or a fluorine atom. ja represents an integer of 0 to 4.

[0267] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a methylcyclohexyl group, a dimethylcyclohexyl group, a cycloheptyl group, a cyclooctyl group, a norbornyl group, and an adamantyl group. The alicyclic hydrocarbon group may have a chain hydrocarbon group, such as a methylcyclohexyl group or a dimethylcyclohexyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 12, and more preferably 3 to 10.

[0268] Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and aromatic hydrocarbon groups having a chain hydrocarbon group of 1 to 18 carbon atoms (such as tolyl, xylyl, cumenyl, mesityl, p-methylphenyl, p-ethylphenyl, p-tert-butylphenyl, 2,6-diethylphenyl, and 2-methyl-6-ethylphenyl) and aromatic hydrocarbon groups having an alicyclic hydrocarbon group of 3 to 18 carbon atoms (such as p-adamantylphenyl and p-cyclohexylphenyl) are preferred. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, and more preferably 6 to 10.

[0269] Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 6, and even more preferably 1 to 4.

[0270] Examples of the alkyl group substituted with a hydroxy group include hydroxyalkyl groups such as a hydroxymethyl group and a hydroxyethyl group. Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a naphthylmethyl group, and a naphthylethyl group.

[0271] Examples of groups in which -CH2- in an alkyl group is replaced by -O-, -SO2-, -CO-, etc. include an alkoxy group, an alkylsulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, or a combination thereof.

[0272] Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 12, more preferably 1 to 6, and even more preferably 1 to 4.

[0273] Examples of the alkylsulfonyl group include a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The alkylsulfonyl group preferably has 1 to 12 carbon atoms, more preferably 1 to 6 carbon atoms, and even more preferably 1 to 4 carbon atoms.

[0274] Examples of the alkoxycarbonyl group include a methoxycarbonyl group, an ethoxycarbonyl group, a butoxycarbonyl group, etc. The alkoxycarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and even more preferably 2 to 4 carbon atoms.

[0275] Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and even more preferably 2 to 4 carbon atoms.

[0276] Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, a butyryloxy group, etc. The alkylcarbonyloxy group preferably has 2 to 12 carbon atoms, more preferably 2 to 6 carbon atoms, and even more preferably 2 to 4 carbon atoms.

[0277] Examples of the combined group include a group combining an alkoxy group and an alkyl group, a group combining an alkoxy group and an alkoxy group, a group combining an alkoxy group and an alkylcarbonyl group, and a group combining an alkoxy group and an alkylcarbonyloxy group.

[0278] Examples of the group combining an alkoxy group and an alkyl group include alkoxyalkyl groups such as a methoxymethyl group, a methoxyethyl group, an ethoxyethyl group, an ethoxymethyl group, etc. The number of carbon atoms in the alkoxyalkyl group is preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4.

[0279] Examples of a group formed by combining an alkoxy group with another alkoxy group include alkoxyalkoxy groups such as a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, etc. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4.

[0280] Examples of the group combining an alkoxy group and an alkylcarbonyl group include alkoxyalkylcarbonyl groups such as a methoxyacetyl group, a methoxypropionyl group, an ethoxyacetyl group, an ethoxypropionyl group, etc. The number of carbon atoms in the alkoxyalkylcarbonyl group is preferably 3 to 13, more preferably 3 to 7, and even more preferably 3 to 5.

[0281] Examples of the group combining an alkoxy group and an alkylcarbonyloxy group include alkoxyalkylcarbonyloxy groups such as a methoxyacetyloxy group, a methoxypropionyloxy group, an ethoxyacetyloxy group, an ethoxypropionyloxy group, etc. The number of carbon atoms in the alkoxyalkylcarbonyloxy group is preferably 3 to 13, more preferably 3 to 7, and even more preferably 3 to 5.

[0282] Examples of the group in which -CH2- in the alicyclic hydrocarbon group is replaced by -O-, -SO2-, -CO- or the like include groups represented by formulae (Y12) to (Y35) and formulae (Y39) to (Y43).

[0283] Y b1 The cyclic hydrocarbon group (the -CH2- contained in the cyclic hydrocarbon group is not limited to -O-, -CO-, -S-, -SO-, -NR 11- or -SO2-) is, among others, an alicyclic hydrocarbon group having 3 to 24 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -NR 11 - or -SO2-) or an aromatic hydrocarbon group having 6 to 24 carbon atoms, and an alicyclic hydrocarbon group having 3 to 20 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -NR2-, ... 11 - or -SO2-) or an aromatic hydrocarbon group having 6 to 20 carbon atoms, and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO-, -NR2-, ...CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO-, -CO 11 - or -SO2- may be substituted.) or an aromatic hydrocarbon group having 6 to 18 carbon atoms is more preferred. Specifically, it is preferably a group represented by any of formulas (w1-1) to (w1-32), more preferably a group represented by any of formulas (w1-1) to (w1-6) and (w1-12) to (w1-30), and even more preferably a group represented by any of formulas (w1-1) to (w1-3), (w1-15) to (w1-17), (w1-22), (w1-25), and (w1-27) to (w1-29). Here, the cyclic hydrocarbon group may have a substituent.

[0284] [ka]

[0285] [In formulas (w1-1) to (w1-32), The —CH2— contained in the group is —O—, —S—, —CO—, —SO—, or —NR 11 - or -SO2-. The binding site may be at any position.] Y b1is preferably a single bond, an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, or an aromatic hydrocarbon group having 6 to 24 carbon atoms which may have a substituent, more preferably a single bond, an alicyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent, or an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent, even more preferably a single bond, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and even more preferably a cycloalkanediyl group having 5 or 6 carbon atoms, norbornanediyl group, adamantanediyl group, a polycyclic hydrocarbon group in which a cycloalkanediyl group having 5 or 6 carbon atoms and a cycloalkanediyl group having 5 to 8 carbon atoms are bonded together in a spiro ring; a polycyclic hydrocarbon group in which a norbornanediyl group and a cycloalkanediyl group having 5 to 8 carbon atoms are bonded together in a spiro ring; or a polycyclic hydrocarbon group in which an adamantanediyl group and a cycloalkanediyl group having 5 to 8 carbon atoms are bonded together in a spiro ring (-CH2- contained in the cycloalkanediyl group, norbornanediyl group, and adamantanediyl group may be replaced by -O- or -CO-, and the cycloalkanediyl group, norbornanediyl group, and adamantanediyl group may have a substituent).

[0286] Y b1 The substituent that may be possessed by is preferably a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 12 carbon atoms which may be substituted with a hydroxy group (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a hydroxy group, a halogen atom, a cyano group, an alkyl group having 1 to 6 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. Examples of the halogen atom, alkyl group, alkoxy group, and alicyclic hydrocarbon group are the same as those mentioned above. Of these, a fluorine atom, a hydroxy group, a methyl group, or an ethyl group is preferred.

[0287] R 10 Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 10The alkyl group of Q has 1 to 6 carbon atoms. b1 and Q b2 The same groups as those mentioned above can be mentioned.

[0288] R 10 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom include a fluorinated alkyl group having 1 to 6 carbon atoms, a chlorinated alkyl group having 1 to 6 carbon atoms, a brominated alkyl group having 1 to 6 carbon atoms, and an iodinated alkyl group having 1 to 6 carbon atoms. Specific examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a perchloromethyl group, a perbromomethyl group, and a periodomethyl group.

[0289] The alkyl group, alkyl fluoride, alkyl chloride, alkyl bromide, and alkyl iodide preferably have 1 to 4 carbon atoms, more preferably 1 to 3 carbon atoms, and even more preferably 1 or 2 carbon atoms.

[0290] R 10 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, even more preferably a hydrogen atom or a methyl group, and even more preferably a methyl group.

[0291] R 21 The alkyl group in R 10 Examples of the alkyl group include the same alkyl groups as those mentioned above. X 10 is a group represented by *-Ax-Ph-Ay-**, each is preferably a linking group represented by the following formula (X10).

[0292] [ka]

[0293] [In formula (X10), Ax is R 10 represents a bond type that bonds to the carbon atom to which is bonded, and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond.

[0294] Ay is L 10 , Y b1 or L b1 represents a bond type that bonds to the above, and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond.

[0295] Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4. When mx is an integer of 2 or more, multiple Rx may be the same or different. When either Ax or Ay is a single bond, the other is preferably one or more bonds selected from the group consisting of an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond.

[0296] When either Ax or Ay is an amide bond, -CO-NR 21 A bond represented by - is preferred. The bonding position of Ay in the phenylene group is preferably the meta or para position relative to the bonding position of Ax, and more preferably the para position.

[0297] Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1 or 2.

[0298] X 10 Examples of the group include a single bond or the group represented by the following formula (X 10 -1)~Formula(X 10 -10) is a group represented by *. 10represents the bonding site with the carbon atom to which L is bonded. 10 , Y b1 or L b1 represents the binding site with

[0299] [ka]

[0300] [Formula(X 10 -1)~Formula(X 10 -10) Medium, *, ** are binding sites, * is R 10 represents the bonding site with the carbon atom to which it is attached. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms.

[0301] mx represents an integer of 0 to 4. X 20 is -O- or -NR 3 - represents. R 21 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.] Expression(X 10 -1)~Formula(X 10 Specific examples of the group represented by -10) include the following groups:

[0302] [ka]

[0303] Among them, X 10 is a single bond or a group of the formula (X 10 -1′) and formula (X 10 -3′)~Formula(X 10 -10′), and is preferably a single bond or a group represented by the formula (X 10 -1′), formula (X 10 -4′), formula (X 10 -5′), formula (X 10 -6′) and formula (X 10-10'), a single bond, a group represented by the formula (X 10 -1′), a group represented by the formula (X 10 -5') or a group represented by the formula (X 10 It is more preferable that the group is a group represented by the formula (6').

[0304] L 10 Examples of the hydrocarbon group having 1 to 36 carbon atoms include aliphatic hydrocarbon groups (chain hydrocarbon groups and alicyclic hydrocarbon groups such as alkanediyl groups, alkenediyl groups, and alkynediyl groups), aromatic hydrocarbon groups, and the like, and may be a hydrocarbon group formed by combining two or more of these groups.

[0305] Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, and a dodecane-1,12-diyl group; Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, pentane-2,4-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. The terminal of the branched alkanediyl group may be a methyl group.

[0306] Examples of the alkenediyl group include an ethenediyl group, a propenediyl group, an isopropenediyl group, a butenediyl group, an isobutenediyl group, a tert-butenediyl group, a pentenediyl group, a hexenediyl group, a heptenediyl group, an octenediyl group, an isooctenediyl group, and a nonenediyl group.

[0307] Examples of the alkynediyl group include an ethynediyl group, a propynediyl group, an isopropynediyl group, a butynediyl group, an isobutynediyl group, a tert-butynediyl group, a pentynediyl group, a hexynediyl group, an octynediyl group, and a nonynediyl group.

[0308] The chain hydrocarbon group preferably has 1 to 12 carbon atoms, more preferably 1 to 9 carbon atoms, even more preferably 1 to 6 carbon atoms, even more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.

[0309] The alicyclic hydrocarbon group may be monocyclic, polycyclic, or spirocyclic. Examples of the alicyclic hydrocarbon group include the groups shown below. The bonding site can be any position.

[0310] [ka]

[0311] Specific examples of the monocyclic alicyclic hydrocarbon group include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, a cyclohexene-3,6-diyl group, and a cyclooctane-1,5-diyl group. Examples of the polycyclic divalent alicyclic hydrocarbon group include polycyclic cycloalkanediyl groups such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, a 5-norbornene-2,3-diyl group, an adamantane-1,5-diyl group, and an adamantane-2,6-diyl group.

[0312] The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms. Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The aromatic hydrocarbon group preferably has 6 to 18 carbon atoms, more preferably 6 to 14 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0313] Examples of hydrocarbon groups that combine two or more types include groups that combine an alkanediyl group with an alicyclic hydrocarbon group and / or an aromatic hydrocarbon group, such as -alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-, -alkanediyl group-alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-aromatic hydrocarbon group-, and -aromatic hydrocarbon group-alkanediyl group-.

[0314] L 10 The -CH2- contained in the hydrocarbon group having 1 to 36 carbon atoms is -O-, -S-, -CO-, -SO-, -NR 11 It may be replaced by - or -SO2-. L 10 When the hydrocarbon group having 1 to 36 carbon atoms has a substituent, or when —CH2— contained in the hydrocarbon group is not —O—, —S—, —CO—, —SO—, or —NR 11 When substituted with - or -SO2-, the number of carbon atoms before substitution is regarded as the number of carbon atoms of the hydrocarbon group.

[0315] The -CH2- contained in the hydrocarbon group can be -O-, -S-, -SO2-, -SO-, or -NR 11 Examples of the group substituted with - or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 11-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR 11 -), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (alkanediyl group an alkanediyl group in which -CH2-CH2- at any position is replaced by -O-CO-), an alkanediylcarbonyl group (an alkanediyl group in which -CH2- at any position is replaced by -CO-), an alkanediylcarbonyloxy group (an alkanediyl group in which -CH2-CH2- at any position is replaced by -CO-O-), an alkanediylsulfonyl group (an alkanediyl group in which -CH2- at any position is replaced by -SO2-), an alkanediylthio group (an alkanediyl group in which -CH2- at any position is replaced by -S-), an alkanediylamino group (an alkanediyl group in which -CH2- at any position is replaced by -NR 11-substituted), cycloalkoxy groups, cycloalkylalkoxy groups, alkoxycarbonyloxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups.

[0316] Examples of the alkoxy group include alkoxy groups having 1 to 17 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0317] Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, a pentylthio group, a hexylthio group, an octylthio group, a 2-ethylhexylthio group, a nonylthio group, a decylthio group, an undecylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0318] Examples of the alkylamino group include alkylamino groups having 1 to 27 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, etc. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0319] The alkoxycarbonyl group, alkylcarbonyl group and alkylcarbonyloxy group represent groups in which a carbonyl group or carbonyloxy group is bonded to the above-mentioned alkyl group or alkoxy group.

[0320] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 18 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. The number of carbon atoms in the alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 to 3.

[0321] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, a butylsulfonyl group, a pentylsulfonyl group, a hexylsulfonyl group, an octylsulfonyl group, a 2-ethylhexylsulfonyl group, a nonylsulfonyl group, a decylsulfonyl group, an undecylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0322] Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 17 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0323] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 17 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 17 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The alkanediyloxycarbonyl group, alkanediylcarbonyl group, and alkanediylcarbonyloxy group preferably have 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 to 3 carbon atoms.

[0324] Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 17 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0325] Examples of the alkanediylthio group include alkanediylthio groups having 1 to 17 carbon atoms, such as a methylenethio group, an ethylenethio group, a propylenethio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0326] Examples of the alkanediylamino group include alkanediylamino groups having 1 to 17 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a dimethyleneamino group, a propyleneamino group, a butyleneamino group, a pentyleneamino group, a hexyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0327] Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 17 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as a cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms in the cycloalkoxy group or cycloalkylalkoxy group is preferably 3 to 11, more preferably 3 to 6. The number of carbon atoms in the alkoxycarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 to 3. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 18 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 17 carbon atoms, such as a phenyloxy group.

[0328] In addition, -CH2- contained in the alicyclic hydrocarbon group can be -O-, -S-, -CO-, -SO-, -NR 11 Examples of groups substituted with - or -SO2- include the groups shown below. In the groups shown below, -O- or -CO- may be replaced with -S- or -SO2-. The binding site may be at any position.

[0329] [ka]

[0330] L 10 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, etc. 10 The -CH2- contained in the hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-, which essentially results in L 10 may have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkylamino group, an amino group, a thiol group, an alkylthio group, or an alkylsulfonyl group.

[0331] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 10 The hydrocarbon group having 1 to 36 carbon atoms may have one or more substituents.

[0332] L 10 represents a single bond, an alkanediyl group having 1 to 6 carbon atoms (provided that -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO-) or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms with a cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that the cyclic hydrocarbon group may have a substituent, and -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO-, -NR 11- or -CO-), and examples thereof include a single bond, an alkanediyl group having 1 to 4 carbon atoms (provided that -CH2- in the alkanediyl group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- in the alkanediyl group may be replaced by -O- or -CO-, and -CH2- in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO-), or a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent (provided that -CH2- in the alkanediyl group may be replaced with -O- or -CO-), more preferably a single bond, an alkanediyl group having 1 to 4 carbon atoms (provided that -CH2- in the alkanediyl group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- in the alicyclic hydrocarbon group may be replaced with -O- or -CO-), a phenylene group which may have a substituent, a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms and a phenylene group having a fluorine atom.

[0333] Examples of the anion (I1-a) include the following anions.

[0334] [ka]

[0335] [ka]

[0336] [ka]

[0337] In the anions represented by formulae (I1-a-1) to (I1-a-30), R in formula (I1) 10 Specific examples of the anion (I1-a) include anions in which the methyl group corresponding to the formula (I1-a) is replaced with a hydrogen atom. Among these, the anions represented by formulas (I1-a-1) to (I1-a-6) and (I1-a-16) to (I1-a-30) are preferred.

[0338] Specific examples of the salt (I) include salts formed by any combination of the above-mentioned cations and anions. Specific examples of the salt (I) are shown in the table below. In the table below, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation, and "~" indicates that the salt (I) corresponds to the anion (I) or cation (I), respectively. For example, salt (I-1) is a salt consisting of an anion represented by formula (I1-a-1) and a cation represented by formula (Ic-1), salt (I-2) is a salt consisting of an anion represented by formula (I1-a-1) and a cation represented by formula (Ic-2), and salt (I-81) is a salt consisting of an anion represented by formula (I1-a-2) and a cation represented by formula (Ic-1).

[0339] [ka]

[0340] [Table 1] JPEG2025114477000053.jpg88170

[0341] Among these, salt (I) is preferably a salt obtained by combining an anion represented by any one of formulas (I1-a-1) to (I1-a-6), (I1-a-16) to (I1-a-30) with a cation represented by any one of formulas (Ic-1) to (Ic-80).

[0342] <Method for producing salt (I)> The salt (I) can be produced by reacting a salt represented by formula (Ia) with a salt represented by formula (I-b1) or a salt represented by formula (I-b2) in a solvent.

[0343] [ka]

[0344] wherein all symbols have the same meanings as defined above. R A , R B and R C each independently represents a hydrocarbon group having 1 to 12 carbon atoms, or R A , R B and R C may combine to form an aromatic ring. D represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms. X 10 represents a halogen atom or CH3SO4. Examples of the solvent include chloroform, monochlorobenzene, acetonitrile, and water.

[0345] The reaction temperature is usually 15° C. to 80° C., and the reaction time is usually 0.5 to 24 hours. The compound represented by formula (Ia) includes, for example, salts represented by the following formula, and can be easily produced by known production methods.

[0346] [ka]

[0347] Examples of the salt represented by formula (I-b1) include salts represented by the following formula, which can be easily produced by known production methods.

[0348] [ka]

[0349] Examples of the salt represented by formula (I-b2) include salts represented by the following formula, which can be easily produced by known production methods.

[0350] [ka]

[0351] [Structural unit derived from a salt represented by formula (I)] The structural unit derived from the salt represented by formula (I) is CH2=CR contained in the salt (I). bb1 The double bond of the formula (IP) is cleaved, and an example thereof is a structural unit represented by the following formula (IP) (hereinafter, sometimes referred to as "structural unit (IP)").

[0352] [ka]

[0353] [In the formula, all symbols have the same meanings as defined above.] The structural unit (IP) functions as an acid generator like the salt (I), and also functions as a structural unit constituting a compound or a resin.

[0354] [Resin containing a structural unit (IP) derived from a salt represented by formula (I)] The resin of the present invention is a resin (hereinafter sometimes referred to as "resin (Ap)") that contains a structural unit (IP) derived from a salt represented by formula (I).

[0355] The resin (Ap) may be a homopolymer containing one type of structural unit (IP), or a copolymer containing two or more types of structural units (IP). Furthermore, the resin (Ap) may contain a structural unit other than the structural unit (IP). Examples of structural units other than the structural unit (IP) include, as will be described later, a structural unit having an acid labile group (hereinafter sometimes referred to as "structural unit (a1)"), a structural unit not having an acid labile group (hereinafter sometimes referred to as "structural unit (s)"), and structural units known in the art. Here, the term "acid labile group" refers to a group that has a leaving group and that is eliminated upon contact with an acid, converting the structural unit into a structural unit having a hydrophilic group (e.g., a hydroxy group or a carboxy group).

[0356] The content of the structural unit (IP) relative to all structural units in the resin (Ap) can be 0.1 mol% or more, preferably 0.5 mol% or more, more preferably 0.8 mol% or more, and even more preferably 1 mol% or more. It can also be 100 mol% or less, preferably 50 mol% or less, more preferably 30 mol% or less, and even more preferably 20 mol% or less. Specifically, it can be 0.1 to 100 mol%, preferably 0.5 to 50 mol%, more preferably 0.8 to 30 mol%, and even more preferably 1 to 20 mol%.

[0357] In particular, when the resin (Ap) is used in a resist composition, as described below, it can contain, in addition to the structural unit (IP), the structural unit (a1), the structural unit (s), and / or other structural units, etc. Preferably, the resin (Ap) further contains, for example, the structural unit (a1).

[0358] Furthermore, as will be described later, when resin (Ap) is used in a resist composition, it may be used in combination with a resin containing the structural unit (a1) (hereinafter sometimes referred to as "resin (A)"), regardless of whether it contains the structural unit (a1). Hereinafter, resin (Ap) and / or resin (A) may be referred to as "resin (A) etc."

[0359] Like the resin (Ap), the resin (A) may further contain a structural unit other than the structural unit (a1). <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid labile group (hereinafter sometimes referred to as "monomer (a1)").

[0360] The acid labile group contained in the resin (A) or the like is preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)).

[0361] [ka]

[0362] [In formula (1), R a1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining any of these; or R a1 and R a2 are bonded to each other to form, together with the carbon atoms to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a halogen atom.

[0363] ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * denotes a binding site.]

[0364] [ka]

[0365] [In formula (2), R a1′ and R a2′ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a3′ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2′ and R a3′ are bonded to each other to form, together with the carbon atom to which they are bonded and X, a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom.

[0366] X represents an oxygen atom or a sulfur atom. na' represents 0 or 1. * denotes a binding site.] R a1 , R a2 and R a3 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group.

[0367] R a1 , R a2 and R a3 Examples of the alkenyl group in the formula (I) include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups.

[0368] R a1 , R a2 and R a3 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site):a1 , R a2 and R a3 The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms.

[0369] [ka]

[0370] R a1 , R a2 and R a3 Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group.

[0371] Preferably, ma is 0 and na is 1. R a1 and R a2 -C(R a1 )(R a2 )(R a3 ) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-.

[0372] [ka]

[0373] R a1′ , R a2′ and R a3′ Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups.

[0374] Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these groups are R a1 , R a2 and R a3 Examples of the groups include the same as those listed in the above. R a2′ and R a3′ When they are bonded to each other to form a heterocyclic group together with the carbon atoms to which they are bonded and X, -C(R a1′ )(R a2′ )-XR a3′ Examples of the groups include the following: * represents a binding site.

[0375] [ka]

[0376] R a1′ and R a2′ At least one of these is preferably a hydrogen atom. na' is preferably 0. R a1 , R a2 , R a3 , R a1 , R a2′ and R a3′ The halogen atom that may be contained in the ring may be a fluorine atom, a chlorine atom, a bromine atom or an iodine atom.

[0377] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3is an alkyl group, ma=0, and na=1. The group is preferably a tert-butoxycarbonyl group.

[0378] In formula (1), R a1 , R a2 together with the carbon atom to which they are attached form an adamantyl group, and R a3 is an alkyl group, ma=0, and na=1. In formula (1), R a1 and R a2 are each independently an alkyl group, and R a3 is an adamantyl group, ma=0, and na=1.

[0379] Specific examples of the group (1) include the following: * represents a binding site.

[0380] [ka]

[0381] Specific examples of group (2) include the following groups: * represents a binding site.

[0382] [ka]

[0383] The monomer (a1) is preferably a monomer having an acid labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid labile group. Of the (meth)acrylic monomers having an acid labile group, preferred are those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. The use of a resin (A) or the like having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group in a resist composition can improve the resolution of the resist pattern.

[0384] Examples of structural units derived from a (meth)acrylic monomer having group (1) include a structural unit represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter sometimes referred to as structural unit (a1-2)). Preferably, at least one structural unit selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2) is used, and more preferably at least one or two structural units selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). These may be used alone or in combination of two or more.

[0385] [ka]

[0386] [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 are each independently -O- or -O-(CH2) k1 represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—.

[0387] R a01 , R a4 and R a5 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom.

[0388] R a6 and R a7each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom.

[0389] m1′ represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1′ represents an integer of 0 to 3. R a01 , R a4 , R a5 The halogen atom in the formula (I) may be a fluorine atom, a chlorine atom, a bromine atom or an iodine atom.

[0390] R a01 , R a4 , R a5 Examples of the alkyl group optionally having a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group.

[0391] R a01 , R a4 and R a5 is preferably a hydrogen atom or a methyl group, more preferably a methyl group. L a01 , L a1and L a2 is preferably an oxygen atom or —O—(CH2) k01 It is —CO—O— (wherein k01 is preferably an integer of any one of 1 to 4, more preferably 1), and more preferably an oxygen atom.

[0392] R a02 , R a03 , R a04 , R a6 and R a7 The alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group and combinations thereof in the formula (1) include R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above.

[0393] R a02 , R a03 , and R a04 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0394] R a6 and R a7 The alkyl group in the formula (I) is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group.

[0395] R a6 and R a7 The alkenyl group in the formula (I) is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group.

[0396] R a02 , R a03 , R a04 , R a6 and R a7 The alicyclic hydrocarbon group preferably has 5 to 12 carbon atoms, and more preferably 5 to 10 carbon atoms. R a02 , Ra03 , R a04 , R a6 and R a7 The aromatic hydrocarbon group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms.

[0397] In the group in which an alkyl group and an alicyclic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the alicyclic hydrocarbon group is preferably 18 or less. In the group in which an alkyl group and an aromatic hydrocarbon group are combined, the total number of carbon atoms in the combination of the alkyl group and the aromatic hydrocarbon group is preferably 18 or less.

[0398] R a02 and R a03 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, phenyl group or naphthyl group which may have a halogen atom.

[0399] R a04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, ethyl group, cyclohexyl group or adamantyl group which may have a halogen atom.

[0400] R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group, or naphthyl group which may have a halogen atom, and even more preferably an ethyl group, isopropyl group, t-butyl group, ethenyl group, or phenyl group which may have a halogen atom.

[0401] m1' is preferably an integer of 0 to 3, and more preferably 0 or 1. n1 is preferably an integer of 0 to 3, and more preferably 0 or 1.

[0402] n1' is preferably 0 or 1. Examples of the structural unit (a1-0) include structural units represented by any one of formulas (a1-0-1) to (a1-0-21) and R a01 and structural units in which the methyl group corresponding to the formula (a1-0-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom) or another alkyl group, and structural units represented by any of formulas (a1-0-1) to (a1-0-10), (a1-0-13), (a1-0-14), and (a1-0-19) to (a1-0-24) are preferred.

[0403] [ka]

[0404] Examples of the structural unit (a1-1) include structural units derived from monomers described in JP-A-2010-204646. Among these, structural units represented by any one of formulas (a1-1-1) to (a1-1-7) and R in the structural unit (a1-1) are preferred. a4 A structural unit in which the methyl group corresponding to the formula (a1-1-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group is preferred, and a structural unit represented by any one of formulas (a1-1-1) to (a1-1-4) is more preferred.

[0405] [ka]

[0406] The structural unit (a1-2) includes a structural unit represented by any one of formulas (a1-2-1) to (a1-2-20) and R a5and structural units in which the methyl group corresponding to the formula (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-20) are substituted with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group.

[0407] [ka]

[0408] When the resin (A) or the like contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these structural units relative to all structural units in the resin (A) or the like is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. Also, the total content may be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the total content may be 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, even more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%.

[0409] When the resin (A) or the like contains the structural unit (a1-0), the content thereof, based on all structural units of the resin (A) or the like, can be 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, even more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, and still more preferably 35 mol% or more. Also, the content can be 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, and still more preferably 60 mol% or less. Specifically, the content can be 5 to 80 mol%, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%.

[0410] When the resin (A) or the like contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content of these structural units, based on all structural units in the resin (A) or the like, can be 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. Also, the total content can be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the total content can be 10 to 95 mol%, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, even more preferably 20 to 80 mol%, and even more preferably 20 to 75 mol%.

[0411] An example of the structural unit (a1) having the group (2) is a structural unit represented by formula (a1-4) (hereinafter, sometimes referred to as "structural unit (a1-4)").

[0412] [ka]

[0413] [In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0414] R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.

[0415] A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a18 - may be replaced with

[0416] R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form, together with the -CO- to which they are bonded, a divalent hydrocarbon group having 2 to 20 carbon atoms, and the hydrocarbon group and the -CH2- contained in the divalent hydrocarbon group may be replaced with -O- or -S-.

[0417] na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R a17may be the same or different from each other.

[0418] mc represents an integer between 0 and 2. R a1 and R a17 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, and a bromine atom.

[0419] R a1 and R a17 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, still more preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0420] R a1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a17 Examples of the alkoxy group in include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, even more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group.

[0421] R a17Examples of the alkoxyalkyl group in the formula (I) include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably an alkoxyalkyl group having 2 to 4 carbon atoms, even more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group.

[0422] R a17 Examples of the alkoxyalkoxy group in include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, and even more preferably a methoxyethoxy group or an ethoxyethoxy group.

[0423] R a17 Examples of the alkylcarbonyl group in the formula (I) include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 4 carbon atoms, more preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and even more preferably an acetyl group.

[0424] R a17 Examples of the alkylcarbonyloxy group in the formula (I) include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 4 carbon atoms, more preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and even more preferably an acetyloxy group.

[0425] R a17is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0426] A a11 Examples of the alkanediyl group include straight-chain alkyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, decane-1,9-diyl, and undecane-1,10-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2.

[0427] R a18 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a11 -CH2- in the alkanediyl group is -O-, -CO- or -NR a18 When substituted with -, the number of carbon atoms before substitution is regarded as the number of carbon atoms of the alkanediyl group.

[0428] Aa11 -CH2- in the alkanediyl group is -O-, -CO- or -NR a18 The groups substituted with - include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), an oxy group (a group in which -CH2- in a methylene group is replaced with -O-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR a18 -), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylamino group (a group in which -CH2- at any position in an alkyl group is replaced with -NR a18 -), peptide group (-CH2-CH2- contained in the ethylene group is replaced by -CO-NR a18 -), alkanediyloxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -O-CO-), alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced with -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -SO2-), an alkanediylthio group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -S-), an alkanediylamino group (a group in which -CH2- at any position contained in an alkanediyl group is replaced with -NR a18These substituted groups include the same as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0429] Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as methylamino, ethylamino, propylamino, butylamino, pentylamino, hexylamino, and octylamino. The number of carbon atoms in the alkylamino group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0430] Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0431] For example, A a11 -CH2- in the alkanediyl group is -O-, -CO- or -NR a18 Groups substituted with - include *-O-, *-CO-O-, *-O-CO-, and *-CO-OA. a12 -CO-O-, *-O-CO-A a12 -O-, *-OA a12 -CO-O-, *-CO-OA a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 Among them, *-CO-O- and *-CO-OA a12 -CO-O-, *-OA a12 -CO-O-, *-CO-NR a18 - is preferred, where A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a1 A represents the bonding site with the carbon atom to which it is attached. a12 The alkanediyl group of A is, within the limits of the upper limit of the carbon number, a11Examples of the alkanediyl groups include the same alkanediyl groups as those shown in the above.

[0432] A a11 is a single bond, *-CO-O- or *-CO-OA a12 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0433] na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0434] mc is preferably 0 or 1. R a34 , R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group in which these groups are combined.

[0435] Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, and an octyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, and norbornyl groups, as well as the following groups (* indicates a bonding site):

[0436] [ka]

[0437] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a phenanthryl group. Examples of the combined group include a group in which the above-mentioned alkyl group and alicyclic hydrocarbon group are combined (for example, an alkylcycloalkyl group or cycloalkylalkyl group such as a methylcyclohexyl group, a dimethylcyclohexyl group, a methylnorbornyl group, a cyclohexylmethyl group, an adamantylmethyl group, an adamantyldimethyl group, or a norbornylethyl group), an aralkyl group such as a benzyl group, an aromatic hydrocarbon group having an alkyl group (a p-methylphenyl group, a p-tert-butylphenyl group, a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, or the like), an aromatic hydrocarbon group having an alicyclic hydrocarbon group (a p-cyclohexylphenyl group, a p-adamantylphenyl group, or the like), and an aryl-cycloalkyl group such as a phenylcyclohexyl group. In particular, R a36 Examples of the group include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these.

[0438] R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms that are formed by bonding together with the -CO- to which they are bonded include the following groups: * represents a bonding site, and one of the groups is R a34 This is the binding site for

[0439] [ka]

[0440] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group.

[0441] R a36The hydrocarbon group in R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36 The alkyl group and alicyclic hydrocarbon group in R are preferably unsubstituted. a36 The aromatic hydrocarbon group in is preferably an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0442] -OC(R a34 )(R a35 )-OR a36 is eliminated upon contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxy group or a carboxy group.

[0443] -X a1 -OC(R a34 )(R a35 )-OR a36 In the case of a benzene ring, A a11 It may be bonded to any of the ortho, meta, or para positions relative to the bonding position of A. Among these, it is preferable that at least one of them is bonded to the ortho or para position, and more preferably to the para position. In the case of a naphthalene ring, A a11 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a11 When the bonding position of A is the 2nd position, it may be bonded to any of the 1st position and the 3rd to 8th positions. a11 When the bonding position of A is position 1, at least one of A is preferably bonded to position 3 to 6, and more preferably bonded to position 3 or 4. a11 When the bonding position is the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0444] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP-A-2010-204646. Preferred are structural units represented by formulas (a1-4-1) to (a1-4-42) and R in the structural unit (a1-4). a1 and more preferably, the structural units represented by formulae (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20).

[0445] [ka]

[0446] When the resin (A) or the like contains the structural unit (a1-4), the content thereof, based on the total of all structural units in the resin (A) or the like, can be 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. It can also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and even more preferably 20 to 60 mol%.

[0447] Examples of the structural unit derived from a (meth)acrylic monomer having the group (2) include a structural unit represented by formula (a1-5) (hereinafter, sometimes referred to as "structural unit (a1-5)").

[0448] [ka]

[0449] [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom.

[0450] Z a1 is a single bond or -(CH2) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, * represents L 51 represents the binding site with L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-.

[0451] s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3. Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom, with a fluorine atom being preferred.

[0452] Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, and a perfluorohexyl group.

[0453] In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L51 is preferably an oxygen atom.

[0454] L 52 and L 53 Among these, it is preferred that one is —O— and the other is —S—. s1 is preferably 1. s1' is preferably an integer of 0 to 2.

[0455] Z a1 is preferably a single bond or —CH2—CO—O—. Examples of the structural unit (a1-5) include structural units derived from monomers described in JP-A-2010-61117. Among these, the structural units represented by formulas (a1-5-1) to (a1-5-4) are preferred, and the structural unit represented by formula (a1-5-1) or (a1-5-2) is more preferred.

[0456] [ka]

[0457] When the resin (A) or the like contains the structural unit (a1-5), the content thereof, based on the total structural units of the resin (A) or the like, can be 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, even more preferably 10 mol% or more, even more preferably 20 mol% or more, and even more preferably 25 mol% or more. Also, the content can be 80 mol% or less, preferably 70 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, the content is preferably 1 to 50 mol%, more preferably 3 to 45 mol%, even more preferably 5 to 40 mol%, and even more preferably 5 to 30 mol%.

[0458] An example of the structural unit (a1) having the group (1) is a structural unit represented by formula (a1-6) (hereinafter, sometimes referred to as "structural unit (a1-6)").

[0459] [ka]

[0460] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0461] R a62 , R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached.

[0462] X a61 is a single bond, -CO-O-* or -CO-NR a65 -*, * represents the binding site with Ar, R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 is a single bond, *-OL a61 -or*-CO-OL a62 -, * represents the bonding site with Ar, L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms.

[0463] Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.] R a61 Examples of the halogen atom in include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Of these, a fluorine atom is preferred.

[0464] R a61 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in the formula (I) include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, and a perfluorohexyl group.

[0465] R a61 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. R a62 , R a63 , R a64 and R a65 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, etc. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and even more preferably a methyl group or an ethyl group.

[0466] R a62 , R a63 and R a64 The cyclic hydrocarbon group in the formula (I) includes an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of polycyclic alicyclic hydrocarbon groups include a decahydronaphthyl group, an adamantyl group, and a norbornyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12.

[0467] Examples of the aromatic hydrocarbon group include a phenylene group and a naphthylene group. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0468] R a62 and R a63 Examples of the ring formed by bonding together include an adamantane ring, a cyclopentane ring, and a cyclohexane ring. a62 and R a63 -C(R a62 )(R a63 )(R a64 ) includes the following groups. * represents the bonding site with the oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, and more preferably 3 to 12.

[0469] [ka]

[0470] L a61 and L a62 Examples of the alkanediyl group having 1 to 4 carbon atoms in the formula include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group.

[0471] L a61 and L a62 are each preferably independently a methylene group or an ethylene group. X a61 is preferably a single bond or —CO—O—*, and more preferably a single bond.

[0472] X a62is preferably a single bond or *-OL a61 -, and more preferably a single bond. Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms for Ar include a phenylene group, a 1-naphthylene group, a 2-naphthylene group, a 1-anthrylene group, a 9-anthrylene group, a biphenylene group, a 1-phenanthrylene group, and a 2-phenanthrylene group.

[0473] Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0474] Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0475] Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group.

[0476] Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group.

[0477] Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group.

[0478] Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group.

[0479] Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group.

[0480] The substituent is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0481] Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group. Examples of the structural unit (a1-6) include structural units represented by formulas (a1-6-1) to (a1-6-44), preferably structural units represented by formulas (a1-6-1) to (a1-6-9), more preferably structural units represented by formulas (a1-6-1), (a1-6-2), (a1-6-4), (a1-6-5), (a1-6-7) or (a1-6-8), and even more preferably structural units represented by formulas (a1-6-1) or (a1-6-2). a61 In the structural units shown below, the hydrogen atom corresponding to R is replaced by a methyl group or the like. a61 The structural unit (a1-6) also includes a structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom:

[0482] [ka]

[0483] When the resin (A) or the like contains the structural unit (a1-6), the content thereof, based on all structural units of the resin (A) or the like, can be 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, even more preferably 10 mol% or more, still more preferably 20 mol% or more, even more preferably 30 mol% or more, and even more preferably 40 mol% or more. Also, the content can be 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, the content is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 65 mol%.

[0484] Further, examples of the structural unit (a1) include the following structural units.

[0485] [ka]

[0486] When the resin (A) or the like contains structural units represented by formulas (a1-7-1) to (a1-7-7), the content of these structural units relative to the total structural units of the resin (A) or the like is preferably 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. The content may also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, the content is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0487] Further, examples of the structural unit (a1) include the following structural units.

[0488] [ka]

[0489] When the resin (A) or the like contains structural units represented by formulas (a1-8-1) to (a1-8-3), the content of these structural units relative to the total structural units of the resin (A) or the like is typically 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, even more preferably 25 mol% or more, even more preferably 30 mol% or more, even more preferably 40 mol% or more, and even more preferably 50 mol% or more. The content may also be 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, even more preferably 80 mol% or less, even more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, the content is preferably 10 to 60 mol%, more preferably 15 to 55 mol%, even more preferably 20 to 50 mol%, even more preferably 20 to 45 mol%, and particularly preferably 20 to 40 mol%.

[0490] <Structural unit(s)> The structural unit (s) is derived from a monomer (hereinafter sometimes referred to as "monomer (s)") that does not have an acid labile group. As the monomer from which the structural unit (s) is derived, a monomer that does not have an acid labile group known in the resist field can be used.

[0491] The structural unit (s) preferably has a hydroxyl group, a carboxyl group, or a lactone ring. The resist composition of the present invention may contain a resin containing a structural unit having a hydroxyl group or a carboxyl group but no acid labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring but no acid labile group (hereinafter sometimes referred to as "structural unit (a3)"), thereby improving the resolution of the resist pattern and adhesion to the substrate. In addition to the structural units described above, structural units (s) may also include structural units having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), structural units having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), structural units having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), and structural units that decompose upon exposure to generate acid (hereinafter sometimes referred to as "structural unit (a7)").

[0492] <Structural unit (a2)> The structural unit (a2) is a structural unit represented by formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group, or a carboxy group.

[0493] [ka]

[0494] [In formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0495] A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with

[0496] R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced with -O-, -CO-, -S- or -SO2-.

[0497] L a22 represents a single bond or a chain hydrocarbon group of 1 to 12 carbon atoms which may have a fluorine atom, and -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-.

[0498] na2 represents an integer of 1 to 5. R a2 Examples of the halogen atom in the formula include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom.

[0499] R a2 Examples of the alkyl group having 1 to 6 carbon atoms, which may have a halogen atom, include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2.

[0500] R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. A a21Examples of the alkanediyl group include straight-chain alkyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. and branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, 2-methylbutane-1,4-diyl, heptane-1,6-diyl, octane-1,7-diyl, nonane-1,8-diyl, decane-1,9-diyl, and undecane-1,10-diyl. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, still more preferably 1 to 3, and even more preferably 1 or 2.

[0501] R a28 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, and a tert-butyl group. A a21 The alkanediyl group contains -CH2-, -O-, -CO-, or -NR a28 When the alkanediyl group is substituted with , the number of carbon atoms before substitution is regarded as the number of carbon atoms of the alkanediyl group.

[0502] A a21 -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 As described above, examples of the group substituted for include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group, a peptide group, an alkanediylamino group, etc. These substituted groups include the same as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0503] Among them, A a21 -CH2- in the alkanediyl group is -O-, -CO- or -NR a28 Groups substituted with - include *-O-, *-CO-O-, *-O-CO-, and *-CO-OA. a22 -CO-O-, *-O-CO-A a22 -O-, *-OA a22 -CO-O-, *-CO-OA a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 Among them, *-CO-O- and *-CO-OA a22 -CO-O-, *-OA a22 -CO-O-, *-CO-NR a28 - is preferred, where A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents R a2 A represents the bonding site with the carbon atom to which it is attached. a22 The alkanediyl group of A is, within the limits of the upper limit of the carbon number, a21 Examples of the alkanediyl groups include the same alkanediyl groups as those shown in the above.

[0504] A a21 is a single bond, *-CO-O- or *-CO-OA a22 -CO-O- is preferred, a single bond, *-CO-O- or *-CO-O-CH2-CO-O- is more preferred, and a single bond or *-CO-O- is even more preferred.

[0505] L a21 The hydrocarbon group in is a (na2+1)-valent hydrocarbon group, and examples thereof include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, and cyclic hydrocarbon groups such as aromatic hydrocarbon groups, and may also be a group combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group).

[0506] L a21Examples of the chain hydrocarbon group include divalent to hexavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, an alkanpentyl group, and an alkanehexyl group.

[0507] Examples of the alkanediyl group include A a21 The same alkanediyl groups as those shown in the above can be mentioned. Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decantriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, and a heptadecanetriyl group.

[0508] Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, and a heptadecanetetrayl group.

[0509] Examples of the alkanpentyl group include a methanepentyl group, an ethanepentyl group, a propanepentyl group, a butanepentyl group, a pentanepentyl group, and a hexanepentyl group.

[0510] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4.

[0511] L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in the above formula include the following alicyclic hydrocarbon groups: The binding site can be at any position.

[0512] [ka]

[0513] Examples include divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, a cycloalkanepentyl group, and a cycloalkanehexyl group.

[0514] Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, and cyclodecanetetrayl group; Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, and bicyclo[3.3.0]octanetetrayl group.

[0515] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, even more preferably 3 to 16 carbon atoms, still more preferably 3 to 12 carbon atoms, even more preferably 6 to 12 carbon atoms, and particularly preferably 6 to 10 carbon atoms.

[0516] L a21 Examples of the aromatic hydrocarbon group in include divalent to hexavalent aromatic hydrocarbon groups such as an arylene group, an arenetriyl group, an arenetetrayl group, an arenetyl group, and an arenehexyl group.

[0517] Specific examples include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetriyl group, a naphthalenetriyl group, an anthracenetriyl group, a biphenylenetriyl group, a phenanthrenetriyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, and a phenanthrenetetrayl group.

[0518] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The aromatic hydrocarbon group preferably has 6 to 20 carbon atoms, more preferably 6 to 18 carbon atoms, even more preferably 6 to 14 carbon atoms, still more preferably 6 to 12 carbon atoms, and even more preferably 6 to 10 carbon atoms.

[0519] Examples of the group combining two or more types include a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group, a group combining an aromatic hydrocarbon group with a chain hydrocarbon group, a group combining an alicyclic hydrocarbon group with an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group with a chain hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more types of each of the alicyclic hydrocarbon group, aromatic hydrocarbon group, and chain hydrocarbon group may be combined. In addition, when any group is A a21 and L a22 may be bound to

[0520] The -CH2- contained in the hydrocarbon group can be -O-, -S-, -SO2-, -SO-, or -NR 11 Examples of the group substituted with - or -CO- include a hydroxy group (a group in which -CH2- in a methyl group is replaced with -O-), a carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), a thiol group (a group in which -CH2- in a methyl group is replaced with -S-), an amino group (a group in which -CH2- in a methyl group is replaced with -NR 11 -), carboxy group (a group in which -CH2-CH2- in an ethyl group is replaced with -O-CO-), oxy group (a group in which -CH2- in a methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in a methylene group is replaced with -CO-), thio group (a group in which -CH2- in a methylene group is replaced with -S-), sulfonyl group (a group in which -CH2- in a methylene group is replaced with -SO2-), alkoxy group (a group in which -CH2- at any position in an alkyl group is replaced with -O- replaced by -SO-), alkylthio group (a group in which -CH2- at any position in the alkyl group is replaced by -S-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in the alkyl group is replaced by -O-CO-), alkylsulfonyl group (a group in which -CH2- at any position in the alkyl group is replaced by -SO2-), alkylcarbonyl group (a group in which -CH2- at any position in the alkyl group is replaced by -CO-), alkylamino group (a group in which -CH2- at any position in the alkyl group is replaced by -NR 11-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -CO-O-), alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position in an alkyl group is replaced with -O-CO-O-), alkanediyloxy group (a group in which -CH2- at any position in an alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -O-CO-), alkanediylcarbonyl group alkanediyl groups (a group in which -CH2- at any position in an alkanediyl group is replaced with -CO-), alkanediylcarbonyloxy groups (a group in which -CH2-CH2- at any position in an alkanediyl group is replaced with -CO-O-), alkanediylsulfonyl groups (a group in which -CH2- at any position in an alkanediyl group is replaced with -SO2-), alkanediylthio groups (a group in which -CH2- at any position in an alkanediyl group is replaced with -S-), alkanediylamino groups (a group in which -CH2- at any position in an alkanediyl group is replaced with -NR 11 -substituted), cycloalkoxy groups, cycloalkylalkoxy groups, aromatic hydrocarbon group-carbonyloxy groups, aromatic hydrocarbon group-carbonyl groups, aromatic hydrocarbon group-oxy groups, and groups combining two or more of these groups. Also included are groups in which one or more hydrogen atoms of these groups have been replaced with a bonding site.

[0521] Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0522] Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, etc. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0523] Examples of the alkylamino group include alkylamino groups having 1 to 27 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, etc. The number of carbon atoms in the alkylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0524] Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl, propionyl, and butyryl. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The alkylcarbonyloxy group preferably has 2 to 11 carbon atoms, more preferably 2 to 6 carbon atoms, even more preferably 2 to 4 carbon atoms, and even more preferably 2 or 3 carbon atoms.

[0525] Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, a propylsulfonyl group, etc. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0526] Examples of the alkanediyloxy group include alkanediyloxy groups having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediyloxy group, a butanediyloxy group, a pentanediyloxy group, etc. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0527] Examples of the alkanediyloxycarbonyl group include alkanediyloxycarbonyl groups having 2 to 27 carbon atoms, such as a methyleneoxycarbonyl group, an ethyleneoxycarbonyl group, a propanediyloxycarbonyl group, and a butanediyloxycarbonyl group. Examples of the alkanediylcarbonyl group include alkanediylcarbonyl groups having 2 to 28 carbon atoms, such as a methylenecarbonyl group, an ethylenecarbonyl group, a propanediylcarbonyl group, a butanediylcarbonyl group, and a pentanediylcarbonyl group. Examples of the alkanediylcarbonyloxy group include alkanediylcarbonyloxy groups having 2 to 27 carbon atoms, such as a methylenecarbonyloxy group, an ethylenecarbonyloxy group, a propanediylcarbonyloxy group, and a butanediylcarbonyloxy group. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3.

[0528] Examples of the alkanediylthio group include alkanediylthio groups having 1 to 27 carbon atoms, such as a methylenethio group, an ethylenethio group, a propanediylthio group, etc. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0529] Examples of the alkanediylsulfonyl group include alkanediylsulfonyl groups having 1 to 27 carbon atoms, such as a methylenesulfonyl group, an ethylenesulfonyl group, a propylenesulfonyl group, etc. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0530] Examples of the alkanediylamino group include alkanediylamino groups having 1 to 17 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a dimethyleneamino group, a propyleneamino group, a butyleneamino group, a pentyleneamino group, a hexyleneamino group, etc. The number of carbon atoms in the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0531] Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 28 carbon atoms, such as a benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 27 carbon atoms, such as a benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0532] In addition, -CH2- contained in the alicyclic hydrocarbon group can be -O-, -S-, -CO-, -SO-, -NR 11 Examples of groups replaced with - or -SO2- include the following groups. Also included are groups in which -O- is replaced with -S- and -CO- is replaced with -SO2- among the groups shown below. The binding site can be at any position.

[0533] [ka]

[0534] The —CH2— contained in the combined group is not —O—, —S—, —CO—, —SO—, or —NR 11 Examples of groups substituted with - or -SO2- include the following groups: The binding site can be at any position.

[0535] [ka]

[0536] L a21 The hydrocarbon group in may have one or more substituents, such as a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein —CH2— contained in the alkyl group may be replaced by —O— or —CO—).

[0537] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a21 The hydrocarbon group in the formula (I) may have a halogen atom as a substituent, thereby substantially having a substituent such as a haloalkyl group. Examples of the haloalkyl group include alkyl fluoride, alkyl chloride, alkyl bromide, and alkyl iodide, such as a chloromethyl group, bromomethyl group, iodomethyl group, fluoromethyl group, difluoromethyl group, trifluoromethyl group, perfluoroethyl group, perfluoropropyl group, and perfluorobutyl group. The number of carbon atoms in the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3.

[0538] L a21 The hydrocarbon group of L a21can substantially have a substituent such as an alkyl group. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms in the alkyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0539] L a21 The -CH2- contained in the hydrocarbon group is -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-, L a21 may substantially have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, a thiol group, a sulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an acryloyloxy group, or a methacryloyloxy group. The number of carbon atoms in the alkoxy group is preferably 1 to 12, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3. The number of carbon atoms in the alkoxycarbonyl group, alkylcarbonyl group, or alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 to 3. The number of carbon atoms in the alkoxyalkyl group or alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, even more preferably 2 to 6, and still more preferably 2 to 4.

[0540] The above groups also include the same groups as those exemplified in this specification. L a21The substituents that the hydrocarbon group in the formula (I) may have are preferably a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), more preferably a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (wherein —CH— contained in the alkyl group may be replaced with —O— or —CO—), still more preferably a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, still more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, still more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, or an ethoxyethoxy group.

[0541] Also, L a21 When the alkanediyl group is replaced by -O- or -CO-, etc., for example, *-L a23 -X a21 -(L a23 represents an alkanediyl group having 1 to 8 carbon atoms, and X a21 represents -O-, -O-CO-, -CO-O- or -O-CO-O-, * represents A a21 It is also preferred that the bond is

[0542] L a21 represents a single bond, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO-, -NR 11- or -SO2-) or a group formed by combining a chain hydrocarbon group of 1 to 8 carbon atoms which may have a substituent with a cyclic hydrocarbon group of 3 to 20 carbon atoms which may have a substituent (wherein -CH2- in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO-), and examples thereof include an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, -SO-, -NR 11 - or -SO2-) or a group formed by combining a chain hydrocarbon group of 1 to 6 carbon atoms which may have a substituent with a cyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent (provided that -CH2- in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO-, -NR 11 - or -CO- may be substituted.) is more preferred.

[0543] L a22Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include straight-chain alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, and dodecane-1,12-diyl. Examples of branched alkanediyl groups include ethane-1,1-diyl, propane-1,1-diyl, propane-1,2-diyl, propane-2,2-diyl, 1-methylpropane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-dimethylpropane-1,3-diyl, pentane-2,4-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, and even more preferably 1 to 4.

[0544] L a22 may have one or more fluorine atoms. L a22 The -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and these substituted groups may be in the range of L, as long as the upper limit of the number of carbon atoms allows. a21 Examples include the same as those exemplified above.

[0545] na2 is preferably an integer of 1 to 4, and more preferably an integer of 1 to 3. L a21 When R is a single bond or a chain hydrocarbon group, examples of the structural unit (a2) include the following structural units: a2 A structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom or the like is also a suitable structural unit of the structural unit (a2), similar to the structural unit below.

[0546] [ka]

[0547] When producing a resist pattern from the resist composition of the present invention, if a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet) is used as an exposure light source, the structural unit (a2) preferably has a phenolic hydroxy group, and more preferably the structural unit (a2-A) described below. Furthermore, if an ArF excimer laser (193 nm) or the like is used, the structural unit (a2) preferably has an alcoholic hydroxy group, and more preferably the structural unit (a2-1) described below. The structural unit (a2) may contain one type alone or two or more types.

[0548] In the structural unit (a2), L a21 is a cyclic hydrocarbon group, and examples of the structural unit having a phenolic hydroxy group or a carboxy group include a structural unit represented by formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)").

[0549] [ka]

[0550] [In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0551] R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group.

[0552] A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group is -O-, -CO- or -NR a28 - may be replaced with

[0553] R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents an integer of 1 to 5, and when nA2 is 2 or greater, the groups in the parentheses may be the same or different.

[0554] na21 represents an integer of 0 to 4, and when na21 is 2 or more, a plurality of R a27 may be the same or different from each other. mc represents an integer between 0 and 2. R a2 and A a21 The groups include the same groups as those exemplified in formula (a2).

[0555] R a27 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, an iodine atom, and a bromine atom. R a27Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, even more preferably a methyl group or an ethyl group, and even more preferably a methyl group.

[0556] R a27 Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, still more preferably a methoxy group or an ethoxy group, and still more preferably a methoxy group.

[0557] R a27 Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group.

[0558] R a27Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, and more preferably a methoxyethoxy group or an ethoxyethoxy group.

[0559] R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, a butyryl group, etc. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group.

[0560] R a27 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group.

[0561] R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0562] nA2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na21 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0563] mc is preferably 0 or 1. -X a2 -OH is a benzene ring, Aa21 They may be bonded to any of the ortho, meta, or para positions relative to the bonding position of A. Among these, it is preferable that at least one of them is bonded to the meta or para position, and it is more preferable that it is bonded to the meta position. In the case of a naphthalene ring, A a21 When the bonding position of A is the 1st position, it may be bonded to any of the 2nd to 8th positions. a21 When the bonding position of A is the 2nd position, it may be bonded to any of the 1st position and the 3rd to 8th positions. a21 When the bonding position of A is position 1, at least one of A is preferably bonded to position 3 to 6, and more preferably bonded to position 3 or 4. a21 When the bonding position is the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0564] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A Nos. 2010-204634 and 2012-12577. The structural unit (a2-A) includes structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), and structural units represented by formulae (a2-2-1) to (a2-2-32), (a2-3-1) to (a2-3-24), where R in the structural unit (a2-A) a2 and a structural unit in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group.

[0565] [ka]

[0566] [ka]

[0567] When the structural unit (a2-A) is contained in the resin (A) or the like, the content of the structural unit (a2-A) relative to all structural units is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and even more preferably 20 mol% or more. It is also preferably 80 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less, even more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%.

[0568] The structural unit (a2-A) may be a compound from which the structural unit (a2-A) is derived (e.g., -CH2-C(-R a2 )- is the double bond CH2=C(-R a2 The structural unit (a2-A) can be incorporated into the resin (A) by polymerizing a compound (a2-A') in the state of (a1-4). Alternatively, for example, the structural unit (a1-4) can be polymerized, followed by treatment with an acid such as p-toluenesulfonic acid, to thereby incorporate the structural unit into the resin (A). Alternatively, the structural unit (a2-A) can be polymerized using acetoxystyrene, followed by treatment with an alkali such as tetramethylammonium hydroxide, to thereby incorporate the structural unit into the resin (A).

[0569] In the structural unit (a2), L a21 is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include a structural unit represented by formula (a2-B) (hereinafter may be referred to as "structural unit (a2-B)"), a structural unit represented by formula (a2-C) (hereinafter may be referred to as "structural unit (a2-C)"), and a structural unit represented by formula (a2-D) (hereinafter may be referred to as "structural unit (a2-D)").

[0570] [ka]

[0571] [In formula (a2-B) and formula (a2-C), R a2 has the same meaning as formula (a2). R a27 has the same meaning as formula (a2-A).

[0572] L a25 is -O- or *-O-(CH2) k2 represents —CO—O—, and k2 represents an integer of 1 to 7. * represents the bonding site with —CO—. X a2 represents a single bond or -CO-.

[0573] R a25 and R a26 each independently represents a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer of 1 to 5. When nB2 is 2 or more, a plurality of X a2 may be the same or different from each other.

[0574] nB22 represents an integer of 0 to 8. When nB22 is 2 or more, a plurality of R a27 may be the same or different from each other. nC22 represents an integer of 0 to 10. When nC22 is 2 or more, a plurality of R a27 may be the same or different from each other. L a25 is preferably -O-, -O-(CH2) f1 It is —CO—O— (wherein f1 represents an integer of 1 to 4), and more preferably —O—.

[0575] R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom.

[0576] R a26 is preferably a hydrogen atom or a hydroxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0577] nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably an integer of 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1.

[0578] nC22 is preferably an integer of 0 to 6, more preferably an integer of 0 to 3, and even more preferably 0 or 1. Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from monomers described in JP-A-2010-204646, the following structural units, and R in the following structural units: a2 In particular, structural units represented by any one of formulas (a2-B-1) to (a2-B-5) and formulas (a2-C-1) to (a2-C-9) are preferred.

[0579] [ka]

[0580] When the resin (A) or the like contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on the total structural units of the resin (A) or the like. It may also be 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, it may be 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and even more preferably 1 to 10 mol%.

[0581] [ka]

[0582] [In formula (a2-D), R a2 and A a21 have the same meaning as in formula (a2). R a27 has the same meaning as formula (a2-A).

[0583] R a21 and R a22 each independently represents a fluorinated alkyl group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom.

[0584] nD2 represents an integer of 1 to 5. When nD2 is 2 or greater, the groups in the parentheses may be the same or different. nD22 represents an integer of 0 to 4. When nD22 is 2 or more, a plurality of R a27 may be the same or different, provided that 1≦nD2+nD22≦5. R a21 and R a22Examples of the fluorinated alkyl groups are each independently a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, and the like.

[0585] R a21 and R a22 As the aryl group, a trifluoromethyl group is preferred. L a24 Examples of the alkanediyl group include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group.

[0586] L a24 is preferably a single bond or a methylene group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0587] nD2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, even more preferably 1 or 2, and even more preferably 1. Also preferably, nD2 is 1, and the group in parentheses is bonded to the para position.

[0588] nD22 is preferably an integer of 0 to 3, more preferably an integer of 0 to 2, even more preferably 0 or 1, and even more preferably 0. The structural unit (a2-D) is more preferably a structural unit represented by the following formula (a2-D1) (hereinafter, sometimes referred to as "structural unit (a2-D1)").

[0589] [ka]

[0590] [In formula (a2-D1), R a2 , A a21 , R a27 , nD2 and nD22 have the same meaning as in formula (a2-D). In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group.

[0591] A a21 is preferably a single bond. Examples of the structural unit (a2-D) include the structural units shown below.

[0592] [ka]

[0593] In the structural units represented by formulae (a2-D-1) to (a2-D-8), R a2 In the structural units represented by formulas (a2-D-9) to (a2-D-16), the hydrogen atom corresponding to R a2 Specific examples of the structural unit (a2-D) include structural units in which the methyl group corresponding to the following formula is replaced with a hydrogen atom, etc. Among these, structural units represented by formulas (a2-D-1) to (a2-D-8) are preferred, structural units represented by formulas (a2-D-1) to (a2-D-4) are more preferred, and structural units represented by formula (a2-D-1) are even more preferred.

[0594] When the resin (A) or the like contains the structural unit (a2-D), its content relative to all structural units in the resin (A) or the like is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more. It is also preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0595] <Structural unit (a3)> The lactone ring contained in the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or a condensed ring of a monocyclic lactone ring with another ring. Preferred examples include a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0596] The structural unit (a3) is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3), or formula (a3-4). One of these may be contained alone, or two or more may be contained.

[0597] [ka]

[0598] [In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 , L a5 and L a6 are each independently -O- or -O-(CH2) k3 It represents a group represented by —CO—O— (k3 represents an integer of 1 to 7).

[0599] L a7 -O-, *-OL a8 -O-, *-OLa8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O-.

[0600] L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bonding site with the carbonyl group. R a18 , R a19 , R a20 and R a24 each independently represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0601] X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms.

[0602] p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3.

[0603] w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 may be the same as or different from each other. R a21 , R a22 , R a23 and R a25Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group.

[0604] R a18 , R a19 , R a20 and R a24 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a18 , R a19 , R a20 and R a24 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group, and preferably an alkyl group having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group.

[0605] R a18 , R a19 , R a20 and R a24 Examples of the alkyl group having a halogen atom in the formula (I) include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group.

[0606] L a8 and L a9 Examples of the alkanediyl group in the formula (I) include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group.

[0607] In formulas (a3-1) to (a3-3), L a4 ~L a6 are each independently preferably -O- or -O-(CH2) k3 In -CO-O-, k3 is a group in which k3 is any integer of 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and even more preferably an oxygen atom.

[0608] R a18 ~R a21 is preferably a methyl group. R a22 and R a23 are each independently preferably a carboxy group, a cyano group, or a methyl group.

[0609] p1, q1 and r1 each independently represent an integer of preferably 0 to 2, and more preferably 0 or 1. In formula (a3-4), R a24 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0610] R a25 is preferably a carboxy group, a cyano group or a methyl group. L a7 is preferably -O- or *-OL a8 It is —CO—O—, and more preferably —O—, —O—CH 2 —CO—O— or —O—C 2 H 4 —CO—O—.

[0611] w1 is preferably an integer of 0 to 2, and more preferably 0 or 1. In particular, the formula (a3-4) is preferably the formula (a3-4)'.

[0612] [ka]

[0613] (In the formula, R a24 , La7 has the same meaning as above.) Examples of the structural unit (a3) include structural units derived from monomers described in JP 2010-204646 A, JP 2000-122294 A, and JP 2012-41274 A. Examples of the structural unit (a3) include structural units represented by any of formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-2X-1), (a3-2X-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the structural units, R in formulas (a3-1) to (a3-4) a18 , R a19 , R a20 and R a24 A structural unit in which a methyl group corresponding to the following is replaced with a hydrogen atom is preferred.

[0614] [ka]

[0615] When the resin (A) or the like contains the structural unit (a3), the total content thereof, based on all structural units in the resin (A), can be 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more. It can also be 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it can be 1 to 70 mol% or 5 to 70 mol%, preferably 1 to 65 mol% or 10 to 65 mol%, and even more preferably 1 to 60 mol% or 10 to 60 mol%.

[0616] The content of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, even more preferably 5 mol% or more, and even more preferably 10 mol% or more, based on the total structural units of the resin (A). It is also preferably 60 mol% or less, more preferably 55 mol% or less, even more preferably 50 mol% or less, even more preferably 40 mol% or less, even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, it is preferably 1 to 60 mol%, more preferably 3 to 60 mol%, even more preferably 3 to 55 mol%, even more preferably 5 to 55 mol%, even more preferably 5 to 50 mol%, and even more preferably 10 to 50 mol%.

[0617] <Structural unit (a4)> The structural unit represented by formula (a4) is shown below.

[0618] [ka]

[0619] [In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents an aliphatic hydrocarbon group having 1 to 48 carbon atoms and containing a halogen atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-.] R 42 Examples of the aliphatic hydrocarbon group represented by the formula (I) include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these groups.

[0620] Examples of the chain hydrocarbon group include linear alkyl groups such as methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl, and octadecyl groups, and branched alkyl groups such as isopropyl and isobutyl groups.

[0621] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include monocyclic alicyclic hydrocarbon groups which are monocyclic cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group; and polycyclic alicyclic hydrocarbon groups which are polycyclic cycloalkyl groups such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following groups (* indicates a bonding site):

[0622] [ka]

[0623] Examples of groups formed by combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic hydrocarbon group-alkyl group.

[0624] Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl; and branched alkanediyl groups such as propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,2-diyl, 1-methylbutane-1,4-diyl, and 2-methylbutane-1,4-diyl. The terminal of the branched alkanediyl group may be a methyl group.

[0625] R 42 Examples of the halogen atom contained in the aliphatic hydrocarbon group include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 42 Examples of the aliphatic hydrocarbon group in which -CH- is replaced with -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, and a group combining two or more of these groups. These substituted groups include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0626] The structural unit (a4) is R 42 is preferably an aliphatic hydrocarbon group having a fluorine atom, and R 42 However, examples of the structural unit (a4) that is an aliphatic hydrocarbon group having a fluorine atom include a structural unit represented by formula (a4-1) (hereinafter, may be referred to as structural unit (a4-1)), a structural unit represented by formula (a4-2) (hereinafter, may be referred to as structural unit (a4-2)), a structural unit represented by formula (a4-3) (hereinafter, may be referred to as "structural unit (a4-3)"), and a structural unit represented by formula (a4-A) (hereinafter, may be referred to as "structural unit (a4-A)").

[0627] The structural unit represented by formula (a4-1) is a structural unit shown below.

[0628] [ka]

[0629] [In formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms.

[0630] L 42frepresents a fluorine atom-containing alkanediyl group having 1 to 8 carbon atoms or a fluorine atom-containing cycloalkanediyl group having 3 to 12 carbon atoms. R 42f represents a hydrogen atom or a fluorine atom. L 41 Examples of the alkanediyl group in the formula (I) include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, and butane-1,4-diyl, and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, and 2-methylpropane-1,2-diyl. The terminal of the branched alkanediyl group may be a methyl group.

[0631] L 42f Examples of the alkanediyl group having a fluorine atom in the formula (I) include a linear alkanediyl group having a fluorine atom, such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, and an octane-1,8-diyl group having a fluorine atom; Examples of branched alkanediyl groups having fluorine atoms include ethane-1,1-diyl groups having fluorine atoms, propane-1,1-diyl groups having fluorine atoms, propane-1,2-diyl groups having fluorine atoms, propane-2,2-diyl groups having fluorine atoms, pentane-2,4-diyl groups having fluorine atoms, 2-methylpropane-1,3-diyl groups having fluorine atoms, 2-methylpropane-1,2-diyl groups having fluorine atoms, pentane-1,4-diyl groups having fluorine atoms, and 2-methylbutane-1,4-diyl groups having fluorine atoms. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom.

[0632] L 42fExamples of the cycloalkanediyl group having a fluorine atom in the formula (I) include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cycloheptane-1,4-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom; Examples of polycyclic cycloalkanediyl groups having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom.

[0633] L 42f The number of fluorine atoms contained in the alkanediyl group and cycloalkanediyl group having a fluorine atom in the formula (I) may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group and cycloalkanediyl group having a fluorine atom in the formula (I) are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0634] L 42fExamples of the perfluoroalkanediyl group in the formula (I) include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3 ,3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group.

[0635] L 42f Examples of the perfluorocycloalkanediyl group in the formula (I) include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, and a perfluoroadamantanediyl group.

[0636] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group.

[0637] L 42f is preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms. The structural unit (a4-1) includes the structural units shown below and R in the structural unit (a4-1) in the structural units shown below. 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example.

[0638] [ka]

[0639] The structural unit represented by formula (a4-2) is a structural unit shown below.

[0640] [ka]

[0641] [In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-.

[0642] R 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. However, L 43f and R 43f At least one of L has a fluorine atom, 43f and R 43f The maximum total number of carbon atoms is 21. L 43f and R 43f Examples of the aliphatic hydrocarbon group in L include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these groups. 43f and R 43f Examples of the aliphatic hydrocarbon group in 43f and R 43f As long as the upper limit of the total number of carbon atoms in 42 Examples of the aliphatic hydrocarbon group include the same groups as the exemplified aliphatic hydrocarbon groups.

[0643] L43f The aliphatic hydrocarbon group is preferably an alkanediyl group having 1 to 6 carbon atoms or a group represented by formula (L43f-1).

[0644] [ka]

[0645] [In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom.

[0646] L 47f represents a single bond or a divalent saturated hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-.

[0647] However, L 45f , L 46f , L 47f , X 46f and X 47f The total number of carbon atoms is 7 or less. * and ** are binding sites, and ** is -O-CO-R 43f ] L in the group represented by formula (L43f-1) 45f , L 46f and L 47fExamples of the divalent aliphatic hydrocarbon group represented by include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic hydrocarbon group, and a divalent aliphatic hydrocarbon group formed by combining an alkanediyl group with a divalent alicyclic hydrocarbon group. Specific examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group.

[0648] Preferably, s is 0. Examples of the group represented by formula (L43f-1) include the following groups: In the following examples, * and ** each represent a bonding site, and ** represents -O-CO-R 43f This is the binding site for

[0649] [ka]

[0650] R 43f is preferably an aliphatic hydrocarbon group having a fluorine atom. In this case, examples of the structural unit represented by formula (a4-2) include structural units represented by formula (a4-2A) or (a4-2B).

[0651] [ka]

[0652] [In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represents the same as in formula (a4-2). R 43fA represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms and containing a fluorine atom.

[0653] A 43frepresents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-.

[0654] X 43 represents **-O-CO- or **-CO-O-, and ** represents A 43f represents the binding site with R 43fB represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may contain a fluorine atom.

[0655] However, in formula (a4-2A), L 43f and R 43fA The total number of carbon atoms in formula (a4-2B) is 21 or less, and in formula (a4-2B), L 43f , A 43f , X 43 and R 43fB The total number of carbon atoms in A is 21 or less. 43f and R 43fB At least one of them has at least one fluorine atom.] R 43fA The aliphatic hydrocarbon group of R in formula (a4) is as long as the upper limit of the number of carbon atoms permits. 42 Examples of the aliphatic hydrocarbon groups include the same aliphatic hydrocarbon groups as those exemplified above.

[0656] R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and containing a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and containing a fluorine atom, or a group combining these, and *-(CF2) n43f -R 42′ (* represents the bonding site with the carbonyl group. n43f represents an integer of 1 to 6. R 42′ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferred.

[0657] A 43f and R 43fB The aliphatic hydrocarbon group of R in formula (a4) is as long as the upper limit of the number of carbon atoms permits. 42Examples of the aliphatic hydrocarbon groups include the same aliphatic hydrocarbon groups as those exemplified above. A 43f is preferably a divalent chain hydrocarbon group which may have a fluorine atom, a divalent alicyclic hydrocarbon group, or a combination thereof, more preferably a divalent chain hydrocarbon group which has a fluorine atom, and even more preferably a fluorinated alkanediyl group having 1 to 6 carbon atoms.

[0658] R 43fB The aliphatic hydrocarbon group which may have a fluorine atom is preferably a chain hydrocarbon group which may have a fluorine atom, an alicyclic hydrocarbon group or a group combining these, more preferably an alkyl group having 1 to 12 carbon atoms which may have a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms or a group combining these, and more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluoropropyl group, a ... More preferred are fluorinated alkyl groups such as nonafluorobutyl, butyl, perfluoropentyl, 2,2,3,3,4,4,5,5,5-nonafluoropentyl, pentyl, hexyl, perfluorohexyl, heptyl, perfluoroheptyl, octyl, and perfluorooctyl groups, cyclopropylmethyl, cyclopropyl, cyclobutylmethyl, cyclopentyl, cyclohexyl, perfluorocyclohexyl, adamantyl, adamantylmethyl, adamantyldimethyl, norbornyl, norbornylmethyl, perfluoroadamantyl, and perfluoroadamantylmethyl groups.

[0659] In formula (a4-2B), *-A f43 -X 43 -R f43B An example of a structure that the group represented by the formula (I) can take is the following structure (* indicates the bonding site with the carbonyl group).

[0660] [ka]

[0661] The structural unit represented by formula (a4-2A) includes the structural units shown below and R in the structural unit represented by formula (a4-2A) in the structural units shown below. 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example.

[0662] [ka]

[0663] The structural unit represented by formula (a4-2B) includes the structural units shown below and R in the structural unit represented by formula (a4-2B) in the structural units shown below. 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example.

[0664] [ka]

[0665] The structural unit (a4) also includes a structural unit represented by formula (a4-3).

[0666] [ka]

[0667] [In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-.

[0668] R 44frepresents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may contain a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. However, L 44f and R 44f At least one of L has a fluorine atom, 44f and R 44f The maximum total carbon number is 21.

[0669] L 44f and R 44f Examples of the aliphatic hydrocarbon group in L include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these groups. 44f and R 44f Examples of the aliphatic hydrocarbon group in 43f and R 43f As long as the upper limit of the total number of carbon atoms in 42 Examples of the aliphatic hydrocarbon group include the same groups as the exemplified aliphatic hydrocarbon groups.

[0670] L 44f is preferably an alkanediyl group having 1 to 14 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and -(CH2) j1 -, -(CH2) j2 -O-(CH2) j3 -or-(CH2) j4 -CO-O-(CH2) j5 - (j1 to j5 each independently represent an integer of 1 to 6.) It is more preferable that it is an alkanediyl group having 1 to 4 carbon atoms (one -CH2- contained in the alkanediyl group may be replaced with -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced with -CO-O- or -O-CO-).

[0671] R 44fis preferably an aliphatic hydrocarbon group having 1 to 10 carbon atoms and having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, an alicyclic hydrocarbon group having 3 to 10 carbon atoms and having a fluorine atom, or a group combining these, further preferably an alkyl group having 1 to 10 carbon atoms and having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms and having a fluorine atom.

[0672] Examples of the structural unit represented by formula (a4-3) include the following structural units and structural units represented by the following formulas: 41 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example.

[0673] [ka]

[0674] [ka]

[0675] [In formula (a4-A), R 1 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0676] X 11 represents a single bond or *-CO-O-. * represents R 1 represents the bonding site with the carbon atom to which it is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-.

[0677] R 2 represents a fluorinated alkyl group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or a fluorinated alkyl group having 1 to 6 carbon atoms, and the fluorinated alkyl group is L 1may bond to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-.

[0678] mi represents an integer of 1 to 4. When mi is 2 or more, the groups in the parentheses may be the same or different.] R 1 Examples of the halogen atom and the alkyl group optionally having a halogen atom in the formula (a1-0) to the formula (a1-2) include R a01 , R a4 and R a5 Examples include the same as those exemplified above.

[0679] R 1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, further preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0680] L 1 Examples of the aliphatic hydrocarbon group in include chain hydrocarbon groups and monocyclic or polycyclic (including spiro rings, fused rings, bridged rings, etc.) alicyclic hydrocarbon groups, and may also be groups that combine two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group).

[0681] Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanpentyl group. Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, heptane-1,7-diyl, octane-1,8-diyl, nonane-1,9-diyl, decane-1,10-diyl, undecane-1,11-diyl, dodecane-1,12-diyl, tridecane-1,13-diyl, tetradecane-1,14-diyl, pentadecane-1,15-diyl, hexadecane-1,16-diyl, and heptadecane-1,17-diyl groups; Examples of branched alkanediyl groups include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group.

[0682] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4.

[0683] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups: The binding site can be any position.

[0684] [ka]

[0685] For example, divalent to pentavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, and a cycloalkanepentyl group can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, and the like; Examples include cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, spirocyclohexane-1,2'-cyclopentane-diyl group, and spiroadamantane-2,3'-cyclopentane-diyl group; and polycyclic alicyclic hydrocarbon groups such as spiro rings having cycloalkanediyl groups bonded to norbornanediyl groups or adamantanediyl groups via spiro bonds.

[0686] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. The alicyclic hydrocarbon group preferably has 3 to 20 carbon atoms, more preferably 3 to 18 carbon atoms, even more preferably 3 to 16 carbon atoms, and even more preferably 3 to 12 carbon atoms.

[0687] Examples of groups that combine two or more types include groups that combine an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups and chain hydrocarbon groups may be combined. In addition, when any of the groups is X 11 may be bound to

[0688] Examples of groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), Examples of such a group include a group having a hydrocarbon group bonded thereto (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), a group having an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group bonded to a chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), and a group having an alicyclic hydrocarbon group, a chain hydrocarbon group, and a chain hydrocarbon group bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.).

[0689] * is X 11 represents the binding site with Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. L 1 -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms may be replaced with -O-, -S-, -SO2- or -CO-.

[0690] L 1 When —CH2— contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms is replaced with —O—, —S—, —SO2— or —CO—, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the aliphatic hydrocarbon group.

[0691] Examples of groups in which -CH- in an aliphatic hydrocarbon group is replaced with -O-, -S-, -SO-, or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanediyloxy group, an alkanediyloxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, and groups in which two or more of these groups are combined. Examples of these substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0692] Further examples include groups in which one or more hydrogen atoms of the above groups are replaced with bonding sites. Furthermore, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O-, -S-, -CO- or -SO2- include the same groups as exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0693] L 1 The aliphatic hydrocarbon group in may have one or more substituents, such as a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms (wherein -CH2- in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-).

[0694] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of haloalkyl groups having 1 to 4 carbon atoms include fluorinated alkyl groups having 1 to 4 carbon atoms, chlorinated alkyl groups having 1 to 4 carbon atoms, brominated alkyl groups having 1 to 4 carbon atoms, and iodinated alkyl groups having 1 to 4 carbon atoms. Examples of haloalkyl groups include perfluoroalkyl groups having 1 to 4 carbon atoms (such as trifluoromethyl, pentafluoroethyl, heptafluoropropyl, and nonafluorobutyl), 2,2,2-trifluoroethyl, 3,3,3-trifluoropropyl, 4,4,4-trifluorobutyl, 3,3,4,4,4-pentafluorobutyl, chloromethyl, bromomethyl, and iodomethyl. The number of carbon atoms in the haloalkyl group is preferably 1 to 3, and more preferably 1 or 2.

[0695] Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and still more preferably 1 to 3.

[0696] Examples of the alicyclic hydrocarbon group having 3 to 18 carbon atoms include monocyclic cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl, and polycyclic cycloalkyl groups such as decahydronaphthyl, adamantyl, and norbornyl. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, and even more preferably 3 to 10.

[0697] Examples of aromatic hydrocarbon groups having 6 to 18 carbon atoms include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, a binaphthyl group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 12, and even more preferably 6 to 10.

[0698] When -CH2- in an alkyl group is replaced with -O- or -CO-, the number of carbon atoms before the replacement is counted as the total number of carbon atoms in the alkyl group. Examples of the substituted group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, and an alkylcarbonyloxy group. These substituted groups include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the carbon number. The alkoxy group preferably has 1 to 9 carbon atoms, more preferably 1 to 6 carbon atoms, even more preferably 1 to 4 carbon atoms, and even more preferably 1 to 3 carbon atoms.

[0699] The alkoxycarbonyl group has preferably 2 to 9 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkylcarbonyl group has preferably 2 to 10 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3. The alkylcarbonyloxy group has preferably 2 to 9 carbon atoms, more preferably 2 to 6, even more preferably 2 to 4, and still more preferably 2 or 3.

[0700] Furthermore, examples of groups in which -CH2- in an alicyclic hydrocarbon group is replaced with -O- or -CO- include the same groups as those exemplified in this specification, within the range permitted by the upper limit of the number of carbon atoms.

[0701] L 1The substituent that the aliphatic hydrocarbon group in the formula (I) may have is preferably a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (-CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced with -O- or -CO-), more preferably a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (-CH2- contained in the alkyl group may be replaced with -O- or -CO-), and even more preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group.

[0702] L 1 is R 3When the fluorinated alkyl group does not form an alicyclic hydrocarbon group with the fluorinated alkyl group, the alicyclic hydrocarbon group is a chain hydrocarbon group of 1 to 12 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a chain hydrocarbon group of 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent. and a group formed by combining a hydrocarbon group with a hydroxyl group (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-), and examples thereof include a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a hydrocarbon group with a hydroxyl group with a hydroxyl group (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-). It is more preferably a group formed by combining a chain hydrocarbon group of 1 to 6 carbon atoms with an alicyclic hydrocarbon group of 3 to 18 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), and examples thereof include a chain hydrocarbon group of 1 to 8 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group of 5 to 12 carbon atoms which may have a substituent, a chain hydrocarbon group of 1 to 6 carbon atoms and More preferably, it is a group formed by combining an alicyclic hydrocarbon group of 5 to 12 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), or a group formed by combining an alicyclic hydrocarbon group of 5 to 12 carbon atoms which may have a substituent, a chain hydrocarbon group of 1 to 6 carbon atoms, and an alicyclic hydrocarbon group of 5 to 12 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-).

[0703] R 2Examples of the fluorinated alkyl group having 1 to 8 carbon atoms in the formula (I) include a difluoromethyl group, a trifluoromethyl group, a 1,1-difluoroethyl group, a 2,2-difluoroethyl group, a 2,2,2-trifluoroethyl group, a perfluoroethyl group, a 1,1,2,2-tetrafluoropropyl group, a 1,1,2,2,3,3-hexafluoropropyl group, a perfluoroethylmethyl group, a 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 1,1,2,2-tetrafluorobutyl group, a 1,1,2,2,3,3-hexafluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluorobutyl group, a 1,1-bis(trifluoro)methyl group, a Examples of the fluorinated alkyl group include 2,2,2-trifluoroethyl, 2-(perfluoropropyl)ethyl, 1,1,2,2,3,3,4,4-octafluoropentyl, perfluoropentyl, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl, perfluoropentyl, 2-(perfluorobutyl)ethyl, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl, perfluoropentylmethyl, perfluorohexyl, perfluoroheptyl, and perfluorooctyl. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 6, more preferably 1 to 5, even more preferably 1 to 4, and even more preferably 1 to 3.

[0704] R 3 The fluorinated alkyl group having 1 to 6 carbon atoms in R is as large as possible within the upper limit of the carbon number. 2 The same fluorinated alkyl groups having 1 to 6 carbon atoms as those given as examples of the fluorinated alkyl groups in the above can also be used. R 2 is R 3When is a fluorinated alkyl group having 1 to 6 carbon atoms, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 3 carbon atoms, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group.

[0705] R 2 is R 3 When is a hydrogen atom, it is preferably a fluorinated alkyl group having 1 to 6 carbon atoms, more preferably a fluorinated alkyl group having 1 to 5 carbon atoms, and even more preferably a fluorinated alkyl group having 3 to 5 carbon atoms.

[0706] R 3 L 1 When R is bonded to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, 3 L 1 Examples of groups formed by bonding with include groups represented by the following formulae: In the following formulae, * and ** represent bonding sites, and one of the two ** represents a bonding site with a hydroxy group and the other represents a bonding site with R 2 represents the binding site with L 1A L 1 R is a part of the hydrocarbon group and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. 3 L 1 The alicyclic hydrocarbon group formed by bonding with the above preferably has 3 to 10 carbon atoms, more preferably 3 to 8 carbon atoms, and even more preferably 3 to 6 carbon atoms.

[0707] [ka]

[0708] R 3 is preferably a hydrogen atom or a fluorinated alkyl group having 1 to 3 carbon atoms. mi is preferably an integer of 1 to 3, more preferably 1 or 2, and even more preferably 1.

[0709] Examples of the structural unit (a4-A) include the following structural units. In these structural units, R 1 and structural units in which the methyl group corresponding to R is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or an alkyl group other than a methyl group. 1 Specific examples of the structural unit (a4-A) include structural units in which the hydrogen atom corresponding to the following is replaced with a halogen atom, a haloalkyl group, or an alkyl group.

[0710] [ka]

[0711] When the resin (A) or the like contains the structural unit (a4), the content thereof is preferably 1 to 20 mol %, more preferably 2 to 15 mol %, and even more preferably 3 to 10 mol %, based on all structural units in the resin (A) or the like.

[0712] <Structural unit (a5)> The non-leaving hydrocarbon group contained in the structural unit (a5) may be a group containing a linear, branched, or cyclic hydrocarbon group, and among these, the structural unit (a5) is preferably a group containing an alicyclic hydrocarbon group or a linear alkyl group.

[0713] Examples of the structural unit (a5) include a structural unit represented by formula (a5-1).

[0714] [ka]

[0715] [In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and a hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms.

[0716] L 55represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-.] R 52 The alicyclic hydrocarbon group in may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cyclopropyl, cyclobutyl, cyclopentyl, and cyclohexyl. Examples of polycyclic alicyclic hydrocarbon groups include adamantyl and norbornyl.

[0717] Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl.

[0718] Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and more preferably an adamantyl group, a norbornyl group, or a cyclohexyl group.

[0719] L 55 The divalent saturated hydrocarbon group in the formula (I) includes a divalent saturated chain hydrocarbon group and a divalent saturated alicyclic hydrocarbon group, and is preferably a divalent saturated chain hydrocarbon group. Examples of the divalent chain saturated hydrocarbon group include a methylene group, an ethylene group, and an alkanediyl group such as a propanediyl group, a butanediyl group, and a pentanediyl group.

[0720] The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkanediyl groups such as cyclopentanediyl and cyclohexanediyl. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include adamantanediyl and norbornanediyl.

[0721] L 55 Examples of the divalent saturated hydrocarbon group represented by formula (L1-1) in which one -CH2- is replaced with -O- or -CO- include groups represented by formula (L1-1) to formula (L1-4). In the following formulae, * and ** each represent a bonding site, and * represents a bonding site to an oxygen atom.

[0722] [ka]

[0723] [In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents L x1 represents the binding site with ).

[0724] L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 The total number of carbon atoms is 16 or less.

[0725] In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms.

[0726] However, L x3 and L x4 The total number of carbon atoms is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms.

[0727] L x6 and L x7 each independently represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, L x5 , L x6 and L x7 The total number of carbon atoms is 15 or less.

[0728] In formula (L1-4), L x8 and L x9 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms.

[0729] W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, L x8 , L x9 and W x1 The total number of carbon atoms is 15 or less. L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group.

[0730] L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms.

[0731] L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group.

[0732] L x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms.

[0733] L x8is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group.

[0734] W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group. Examples of the group represented by formula (L1-1) include the divalent groups shown below.

[0735] [ka]

[0736] Examples of the group represented by formula (L1-2) include the divalent groups shown below.

[0737] [ka]

[0738] Examples of the group represented by formula (L1-3) include the divalent groups shown below.

[0739] [ka]

[0740] Examples of the group represented by formula (L1-4) include the divalent groups shown below.

[0741] [ka]

[0742] L 55 is preferably a single bond or a group represented by formula (L1-1). The structural unit (a5-1) includes the structural units shown below and R in the structural unit (a5-1) in the structural units shown below. 51 The structural unit in which a methyl group corresponding to the above is replaced with a hydrogen atom is an example.

[0743] [ka]

[0744] When the resin (A) or the like contains the structural unit (a5-1), the content thereof is preferably 1 to 30 mol %, more preferably 2 to 20 mol %, and even more preferably 3 to 15 mol %, based on all structural units in the resin (A) or the like.

[0745] Examples of the structural unit (a5) include a structural unit represented by formula (a5-2).

[0746] [ka]

[0747] [In formula (a5-2), R 12 represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom.

[0748] L 11 is a single bond or *-L 2 -CO-O-(L 3 -CO-O) g * represents a bond to an oxygen atom. L 12 and L 13 each independently represents a divalent hydrocarbon group having 1 to 12 carbon atoms.

[0749] g represents 0 or 1. R 13 represents a linear alkyl group having 2 to 12 carbon atoms.] Halogen atoms include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms.

[0750] Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include unsubstituted alkyl groups having 1 to 6 carbon atoms, such as a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group, and haloalkyl groups having 1 to 6 carbon atoms, such as a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro-sec-butyl group, a perfluoro-tert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, and are preferably unsubstituted alkyl groups having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group.

[0751] R 12 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. L 12 and L 13 Examples of the divalent hydrocarbon group having 1 to 12 carbon atoms include an alkanediyl group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, or a divalent group formed by combining these.

[0752] Examples of the alkanediyl group include linear alkanediyl groups such as methylene, ethylene, propane-1,3-diyl, butane-1,4-diyl, pentane-1,5-diyl, and hexane-1,6-diyl groups; linear alkanediyl groups having an alkyl group (particularly, an alkyl group having 1 to 4 carbon atoms, a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, etc.) as a side chain; and branched alkanediyl groups such as ethane-1,1-diyl, propane-1,2-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl groups.

[0753] Examples of the divalent alicyclic hydrocarbon include monocyclic groups such as cycloalkanediyl groups, such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; and polycyclic groups such as norbornane-1,4-diyl, norbornane-2,5-diyl, adamantane-1,5-diyl, and adamantane-2,6-diyl.

[0754] Examples of the divalent aromatic hydrocarbon group include a phenylene group, a naphthylene group, an anthrylene group, a p-methylphenylene group, a p-tert-butylphenylene group, a p-adamantylphenylene group, a tolylene group, a xylylene group, a cumenylene group, a mesitylene group, a biphenylene group, a phenanthrylene group, a 2,6-diethylphenylene group, and a 2-methyl-6-ethylphenylene group.

[0755] L 11 is preferably a single bond or *-L 12 It is —CO—O—, more preferably a single bond or —CH2—CO—O—, and even more preferably a single bond. R 13 Examples of the alkyl group having 1 to 12 carbon atoms represented by the formula (I) include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, an n-octyl group, an n-nonyl group, an n-decyl group, an n-undecyl group, and an n-dodecyl group.

[0756] R 3 is preferably a linear alkyl group having 1 to 8 carbon atoms, more preferably a linear alkyl group having 2 to 8 carbon atoms, even more preferably a linear alkyl group having 3 to 8 carbon atoms, still more preferably a linear alkyl group having 4 to 8 carbon atoms, particularly preferably an n-propyl group, an n-butyl group, an n-hexyl group, or an n-octyl group, and even more particularly preferably an n-butyl group, an n-hexyl group, or an n-octyl group.

[0757] Specific examples of the structural unit (a5-2) include structural units represented by the following formulae (a5-2-1) to (a5-2-8), R in the structural units represented by the following formulae (a5-2-1) to (a5-2-8), 12 and the like, in which a methyl group corresponding to the following is replaced with a hydrogen atom.

[0758] [ka]

[0759] When the resin (A) or the like contains the structural unit (a5-2), the content thereof is preferably 0.5 to 18 mol %, more preferably 1 to 17 mol %, even more preferably 1 to 17 mol %, and still more preferably 1 to 10 mol %, based on all structural units of the resin (A) or the like.

[0760] <Structural unit (a6)> The structural unit (a6) is a structural unit having an -SO2- group, and preferably has an -SO2- group in a side chain.

[0761] The structural unit having an -SO2- group may have a linear structure having an -SO2- group, a branched structure having an -SO2- group, or a cyclic structure (monocyclic or polycyclic structure) having an -SO2- group. A structural unit having a cyclic structure having an -SO2- group is preferred, and a structural unit having a cyclic structure containing an -SO2-O- group (sultone ring) is more preferred.

[0762] The sultone ring may be a ring having the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and the formula (T 1 The bonding site can be any position. The sultone ring may be monocyclic, but is preferably polycyclic. A polycyclic sultone ring refers to a bridged ring containing -SO2-O- as an atomic group constituting the ring, and is represented by the formula (T 1 -1) and the formula (T 1 The sultone ring is represented by the formula (T1 As in the ring represented by formula (2), the atomic group constituting the ring may further contain a heteroatom in addition to —SO—O—. Examples of the heteroatom include an oxygen atom, a sulfur atom, and a nitrogen atom, and an oxygen atom is preferred.

[0763] [ka]

[0764] The sultone ring may have a substituent, and examples of the substituent include an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms.

[0765] Halogen atoms include fluorine atoms, chlorine atoms, bromine atoms, and iodine atoms. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group, and preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group.

[0766] Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, and preferably a trifluoromethyl group.

[0767] Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group.

[0768] Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group.

[0769] Aralkyl groups include benzyl, phenethyl, phenylpropyl, naphthylmethyl, and naphthylethyl groups. Examples of the alkoxycarbonyl group include groups in which an alkoxy group, such as a methoxycarbonyl group or an ethoxycarbonyl group, is bonded to a carbonyl group, and preferred are alkoxycarbonyl groups having 6 or less carbon atoms, more preferably a methoxycarbonyl group.

[0770] Alkylcarbonyl groups include acetyl, propionyl and butyryl groups. From the viewpoint of ease of production of the monomer from which the structural unit (a6) is derived, a sultone ring having no substituent is preferred.

[0771] The sultone ring is preferably a ring represented by the following formula (T1').

[0772] [ka]

[0773] [In formula (T1′), X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms.

[0774] ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41 may be the same or different. The binding site is at any position.] X 11 is preferably an oxygen atom or a methylene group, more preferably a methylene group.

[0775] R 41 Examples of the substituent include the same as the substituent on the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group is preferred. ma is preferably 0 or 1, and more preferably 0.

[0776] Examples of the ring represented by formula (T1') include the following rings. The binding site may be any position. Among these, the binding site is preferably the 1st or 3rd position.

[0777] [ka]

[0778] The structural unit having an -SO2- group preferably further has a group derived from a polymerizable group, such as a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, or a methacryloylthio group.

[0779] Among these, the monomer from which the structural unit (a6) is derived is preferably a monomer having an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer. The structural unit (a6) is preferably a structural unit represented by the formula (a6-0).

[0780] [ka]

[0781] [In formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom.

[0782] A xx is an oxygen atom, -N(R c )- or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group is not -O-, -CO- or -N(R d )- may be replaced.

[0783] X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41 represents the same meaning as above. ma represents an integer of 0 to 9. When ma is 2 or more, multiple R 41 may be the same or different.

[0784] R c and R d each independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R x Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

[0785] R xExamples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group, and are preferably alkyl groups having 1 to 4 carbon atoms, and more preferably a methyl group or an ethyl group.

[0786] R x Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group.

[0787] R x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. A x Examples of the divalent saturated hydrocarbon group include a linear alkanediyl group, a branched alkanediyl group, and a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and may be a combination of two or more of these groups.

[0788] Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group linear alkanediyl groups such as a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, a heptadecane-1,17-diyl group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group; branched alkanediyl groups such as butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl; monocyclic divalent alicyclic saturated hydrocarbon groups such as cycloalkanediyl groups, such as cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; Examples include polycyclic divalent alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group.

[0789] A x The bonding position of to the sultone ring can be any position, but the 1-position is preferred. Examples of the structural unit (a6-0) include the following structural units.

[0790] [ka]

[0791] Of these, structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8), and formula (a6-12) are preferred, and structural units represented by formula (a6-1), formula (a6-2), formula (a6-7), and formula (a6-8) are more preferred.

[0792] When the resin (A) or the like contains the structural unit (a6), the content thereof is preferably 1 to 50 mol %, more preferably 2 to 40 mol %, and even more preferably 3 to 30 mol %, based on all structural units in the resin (A) or the like.

[0793] <Structural unit (a7)> The resin (A) may further contain a structural unit other than the structural unit (I) that decomposes upon exposure to generate an acid (hereinafter, sometimes referred to as "structural unit (a7)"). Specific examples of the structural unit (a7) include the structural units described in JP 2016-79235 A, and the structural unit (a7) is preferably a structural unit having a sulfonate group or carboxylate group and an organic cation in the side chain, or a structural unit having a sulfonio group and an organic anion in the side chain.

[0794] The structural unit having a sulfonate group or carboxylate group and an organic cation on the side chain is preferably a structural unit represented by formula (a7-A).

[0795] [ka]

[0796] [In formula (a7-A), R a7 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom.

[0797] X a71 represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR a71 -**, *-NR a71 -CO-O-**, *-O-CO-NR a71 Represents -** or *-Ax-Ph-Ay-**.

[0798] R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond.

[0799] * and ** represent binding sites, * represents R a7represents the bonding site with the carbon atom to which it is attached. L a71 and L a72 each independently represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-.

[0800] X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, and *** represents L a71 represents the binding site with na7 represents an integer of 0 to 2. When na7 is 2, the groups in the parentheses may be the same or different.

[0801] RA - represents a sulfonate anion or a carboxyl anion. ZA + represents an organic cation. R a7 and R a71 Examples of the alkyl group having 1 to 6 carbon atoms in the formula include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group.

[0802] R a7 Examples of the halogen atom in the formula include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a7Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in the formula (I) include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group.

[0803] R a7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, further preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0804] X a71 is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10).

[0805] [ka]

[0806] [In formula (X10), Ax is R a7 represents a bond type that bonds to the carbon atom to which is bonded, and represents one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond.

[0807] Ay is L a71 and represents one or more bond species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond.

[0808] Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4, and when mx is an integer of 2 or greater, multiple Rx's may be the same or different. When either Ax or Ay is a single bond, the other is preferably one or more bonds selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond.

[0809] When either Ax or Ay is an amide bond, -CO-NR a71 A bond represented by - is preferred. The bonding position of Ay in the phenylene group is preferably the meta or para position relative to the bonding position of Ax, and more preferably the para position.

[0810] Among these, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1 or 2.

[0811] X a71 Examples of the group include a single bond and a group represented by the following formula (X 10 -1)~Formula(X 10 -10) is a group represented by *. a7 represents the bonding site with the carbon atom to which L is bonded. a71 represents the binding site with X 20 is -O- or -NR a71 - represents.

[0812] [ka]

[0813] Expression(X 10 -1)~Formula(X 10 Specific examples of the group represented by -10) include the following groups:

[0814] [ka]

[0815] Among them, X a71 is a single bond and a group of formula (X 10 -1′), formula (X 10 -3′)~Formula(X 10 -9′), and is preferably a single bond or a group represented by the formula (X 10 -1′), formula (X 10 -4′), formula (X 10 -5′), formula (X 10 -6′) and formula (X 10 -9′), and more preferably a single bond, a group represented by the formula (X 10 -1′), a group represented by the formula (X 10 -5'), a group represented by the formula (X 10 -6') or formula (X 10 -9') is more preferred.

[0816] L a71 The hydrocarbon group may be a group formed by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups to form X. a71 and X a72 In addition, L a72 The hydrocarbon group may be a group formed by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups to form X. a72 and R.A. - Examples of such groups include groups that bond to the following:

[0817] L a71 and L a72Examples of the chain hydrocarbon group include groups in which one hydrogen atom has been removed from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, isobutyl, tert-butyl, pentyl, hexyl, heptyl, octyl, nonyl, decyl, undecyl, dodecyl, tridecyl, tetradecyl, pentanedecyl, and heptadecyl. Examples of the alkenyl group include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl.

[0818] The chain hydrocarbon group preferably has 1 to 20 carbon atoms, more preferably 1 to 18 carbon at...

Claims

1. An acid generator comprising a salt represented by formula (I) or a structural unit represented by formula (IP). 【Chemical 1】 【Chemistry 2】 [In formula (I) and formula (IP), X represents a sulfur atom or an iodine atom. When X is a sulfur atom, m10 is an integer of 1 to 3; when X is an iodine atom, m10 is 1 or 2. m1 represents 0, 1 or 2. When X is a sulfur atom, m1+m10=3. When X is an iodine atom, m1+m10=2. When m1 is 2 or more, two R １ may be the same or different from each other. R １ represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and —CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. When X is a sulfur atom and m1 is 2, two R １ is bonded to form S ＋ may form a ring containing -CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. R １１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ３ represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group is Ar ３ and an alkyl group having one or more carbon atoms bonded to an alkanediyl group bonded to the alkyl group. R ６ represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. R ９ represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. When X is a sulfur atom and m10 is 2 or 3, two R ９ is bonded to form S ＋ The two R forming the ring may form a ring containing ９ is S ＋ and a single bond formed between two benzene rings connecting the two. A ３ represents a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. Ar ３ represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 1≦m3+m9≦5, and when m3=0, R is 1 or more. ９ At least one R ９ represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group includes an alkyl group having 1 or more carbon atoms bonded to an alkanediyl group bonded to a benzene ring. Q ｂ１ and Q ｂ２ each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. L ｂ１ represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and —CH ２ The - may be replaced by -O- or -CO-, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted by a fluorine atom or a hydroxy group. Y ｂ１ represents a single bond or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. mm1 represents 0 or 1. R １０ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ２１ -**, *-NR ２１ -CO-O-**, *-O-CO-NR ２１ -** or *-Ax-Ph-Ay-**. R ２１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. * indicates R １０ represents the bonding site with the carbon atom to which it is bonded, and ** represents L １０ , Y ｂ１ or L ｂ１ represents the binding site with L １０ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ - or -CO- may be substituted.]

2. At least one m3 is an integer of 1 or more, A ３ But, **-X ０３ -L ０３ - or **-L ０３ -X ０３ - and X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . ** is X ＋ and a benzene ring bonded to the aryl group.

3. X ０３ 3. The acid generator according to claim 2, wherein is —O— or —S—.

4. L ０３ is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH ２ 3. The acid generator according to claim 2, wherein - may be replaced by -O- or -CO-.

5. 2. The acid generator according to claim 1, wherein the cation of the salt represented by formula (I) or the structural unit represented by formula (IP) is a cation represented by formula (IC-1) or formula (IC-2). 【Chemistry 3】 [In formula (IC-1) and formula (IC-2), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A, m3B, and m3C each independently represent an integer of 0 to 5, and when m3A, m3B, and m3C each represent 2 or more, the groups in the respective parentheses may be the same or different. m9A, m9B and m9C each independently represent an integer of 0 to 5, and when m9A, m9B and m9C each represent 2 or more, the groups in the respective parentheses may be the same or different. m3A, m3B, m3C, m9A, m9B, and m9C satisfy 1≦m3A+m9A≦5, 0≦m3B+m9B≦5, and 0≦m3C+m9C≦5, respectively. When m3A=0, R ９ One of the R ９ represents a linear alkyl group having 2 to 12 carbon atoms. X ７ is a single bond, -CH ２ -, -O-, -S-, -CO-, -SO- or -SO ２ - represents.

6. 2. The acid generator according to claim 1, wherein the cation of the salt represented by formula (I) or the structural unit represented by formula (IP) is a cation represented by formula (IC-3). 【Chemistry 4】 [In formula (IC-3), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A and m3B each independently represent an integer of 0 to 5, and when m3A and m3B each represent 2 or more, the groups in the respective parentheses may be the same or different. m9A and m9B each independently represent an integer of 0 to 5, and when m9A and m9B each represent 2 or more, the groups in the respective parentheses may be the same or different. m3A, m3B, m9A, and m9B satisfy 1≦m3A+m9A≦5 and 0≦m3B+m9B≦5, respectively. When m3A=0, R ９ At least one R ９ represents a linear alkyl group having 2 to 12 carbon atoms.

7. 2. The acid generator according to claim 1, wherein the cation of the salt represented by formula (I) or the structural unit represented by formula (IP) is a cation represented by formula (IC-4). 【Chemistry 5】 [In formula (IC-4), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A represents an integer of 0 to 5, and when m3A is 2 or more, the groups in the parentheses may be the same or different. m9A represents an integer of 0 to 5, and when m9A is 2 or more, a plurality of R ９ may be the same or different from each other. m3A and m9A each satisfy 1≦m3A+m9A≦5, and when m3A=0, R ９ At least one R ９ represents a linear alkyl group having 2 to 12 carbon atoms. X ７ is a single bond, -CH ２ -, -O-, -S-, -CO-, -SO- or -SO ２ - represents.

8. At least one m3 is an integer of 1 or more, Ar ３ 2. The acid generator according to claim 1, wherein is a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

9. mm is 1, Y ｂ１ 2. The acid generator according to claim 1, wherein is a cyclohexanediyl group, an adamantanediyl group, a norbornanediyl group, an adamantanelactonediyl group, or a norbornanelactonediyl group.

10. X １０ is a single bond or a group represented by the formula (X １０ -1) ~Formula (X １０ 2. The acid generator according to claim 1, wherein the acid generator is a group represented by any one of the following formulas: 【Chemistry 6】 [Formula (X １０ -1)~Formula(X １０ -10) in *, ** are binding sites, * is R １０ represents the bonding site between the carbon atom and the atom. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4. X ２０ is —O— or —NR ２１ Represents -. R ２１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

11. L １０ is a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, The —CH contained in the alkanediyl group and the cyclic hydrocarbon group ２ - is -O-, -S-, -SO ２ may be replaced by - or -CO-, The acid generator according to claim 1 , wherein the cyclic hydrocarbon group may have a substituent.

12. A resist composition comprising the acid generator according to any one of claims 1 to 11.

13. A salt represented by formula (I) 13. The resist composition according to claim 12, comprising a resin containing a structural unit having an acid labile group.

14. A resin containing a structural unit represented by formula (IP) 13. The resist composition according to claim 12, wherein the resin containing the structural unit represented by formula (IP) further contains a structural unit (a1) having an acid labile group.

15. The resist composition according to claim 14, further comprising a salt represented by formula (I).

16. The resist composition according to claim 14, wherein the structural unit (a1) having an acid labile group comprises at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). 【Chemistry 7】 [In formula (a1-0), formula (a1-1) and formula (a1-2), L ａ０１ , L ａ１ and L ａ２ are each independently —O— or *—O—(CH ２ ) ｋ１ represents —CO—O—, k1 represents an integer of 1 to 7, and * represents the bonding site with —CO—. R ａ０１ , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ０２ , R ａ０３ and R ａ０４ each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a combination thereof. The alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may contain a halogen atom. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, alkenyl group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may contain a halogen atom. m1′ represents an integer of 0 to 14. n1 represents an integer of 0 to 10. n1′ represents an integer of 0 to 3.] 【Chemistry 8】 [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and —CH ２ - represents -O-, -CO- or -NR ａ１８ May be replaced with -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R ａ３４ and R ａ３５ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms; R ａ３６ represents a hydrocarbon group having 1 to 20 carbon atoms, or R ａ３５ and R ａ３６ are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the —C—O— to which they are bonded, and the hydrocarbon group and —CH contained in the divalent hydrocarbon group ２ - may be replaced by -O- or -S-. na1 represents an integer of 1 to 5, and when na1 is 2 or more, the groups in the parentheses may be the same or different. na11 represents an integer of 0 to 4, and when na11 is 2 or more, a plurality of R ａ１７ may be the same or different from each other. mc represents an integer of 0 to 2. 【Chemistry 9】 [In formula (a1-5), R ａ８ represents an alkyl group having 1 to 6 carbon atoms which may have one or more halogen atoms, a hydrogen atom, or a halogen atom. Z ａ１ is a single bond or *-(CH ２ ) ｈ３ -CO-L ５４ -, h3 represents an integer of 1 to 4, * represents L ５１ represents the binding site with L ５１ , L ５２ , L ５３ and L ５４ each independently represents —O— or —S—. s1 represents an integer of 1 to 3. s1′ represents an integer of 0 to 3.] 【Chemistry 10】 [In formula (a1-6), R ａ６１ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ６２ , R ａ６３ and R ａ６４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R ａ６２ and R ａ６３ are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are attached. X ａ６１ represents a single bond, —CO—O—*, or —CO—NR ａ６５ - represents *, * represents the bonding site with Ar, R ａ６５ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ６２ is a single bond, *-O-L ａ６１ - or *-CO-O-L ａ６２ -, * represents a bonding site with Ar, L ａ６１ and L ａ６２ each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.]

17. The resist composition according to claim 12, further comprising a resin containing a structural unit having a fluorine atom.

18. 13. The resist composition according to claim 12, further comprising a salt that generates an acid that is weaker in acidity than the acid generated from the acid generator.

19. (1) a step of applying the resist composition according to claim 12 onto a substrate; (2) drying the applied resist composition to form a composition layer; (3) exposing the composition layer to light; (4) a step of heating the composition layer after exposure; and (5) developing the composition layer after heating; A method for producing a resist pattern comprising the steps of:

20. A salt represented by formula (I): 【Chemistry 11】 [In formula (I), X represents a sulfur atom or an iodine atom. When X is a sulfur atom, m10 is an integer of 1 to 3; when X is an iodine atom, m10 is 1 or 2. m1 represents 0, 1 or 2. When X is a sulfur atom, m1+m10=3. When X is an iodine atom, m1+m10=2. When m1 is 2 or more, two R １ may be the same or different from each other. R １ represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and —CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. When X is a sulfur atom and m1 is 2, two R １ is bonded to S ＋ may form a ring containing -CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. R １１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ３ represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group is Ar ３ and an alkyl group having one or more carbon atoms bonded to an alkanediyl group bonded to the alkyl group. R ６ represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. R ９ represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. When X is a sulfur atom and m10 is 2 or 3, two R ９ is bonded to form S ＋ The two R forming the ring may form a ring containing ９ is S ＋ and a single bond formed between two benzene rings connecting the two. A ３ represents a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. Ar ３ represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 1≦m3+m9≦5, and when m3=0, R is 1 or more. ９ At least one R ９ represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group includes an alkyl group having 1 or more carbon atoms bonded to an alkanediyl group bonded to a benzene ring. Q ｂ１ and Q ｂ２ each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. L ｂ１ represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and —CH ２ The - may be replaced by -O- or -CO-, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted by a fluorine atom or a hydroxy group. Y ｂ１ represents a single bond or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. mm1 represents 0 or 1. R １０ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ２１ -**, *-NR ２１ -CO-O-**, *-O-CO-NR ２１ -** or *-Ax-Ph-Ay-**. R ２１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. * indicates R １０ represents the bonding site with the carbon atom to which it is bonded, and ** represents L １０ , Y ｂ１ or L ｂ１ represents the binding site with L １０ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ - or -CO- may be substituted.]

21. At least one m3 is an integer of 1 or more, A ３ But, **-X ０３ -L ０３ - or **-L ０３ -X ０３ - and X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having a prime number of 1 to 18 (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . ** is X ＋ 21. The salt of claim 20, wherein the benzene ring is bonded to

22. X ０３ The salt according to claim 21, wherein is —O— or —S—.

23. L ０３ is a single bond or an alkanediyl group having 1 to 6 carbon atoms (the —CH ２ The salt according to claim 21, wherein - may be replaced by -O- or -CO-.

24. The salt according to claim 20, wherein the cation of the salt represented by formula (I) or the structural unit represented by formula (IP) is a cation represented by formula (IC-1) or formula (IC-2). 【Chemistry 12】 [In formula (IC-1) and formula (IC-2), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A, m3B, and m3C each independently represent an integer of 0 to 5, and when m3A, m3B, and m3C each represent 2 or more, the groups in the respective parentheses may be the same or different. m9A, m9B and m9C each independently represent an integer of 0 to 5, and when m9A, m9B and m9C each represent 2 or more, the groups in the respective parentheses may be the same or different. m3A, m3B, m3C, m9A, m9B, and m9C satisfy 1≦m3A+m9A≦5, 0≦m3B+m9B≦5, and 0≦m3C+m9C≦5, respectively. When m3A=0, R ９ One of the R ９ represents a linear alkyl group having 2 to 12 carbon atoms. X ７ is a single bond, -CH ２ -, -O-, -S-, -CO-, -SO- or -SO ２ - represents.

25. The salt according to claim 20, wherein the cation of the salt represented by formula (I) or the structural unit represented by formula (IP) is a cation represented by formula (IC-3). 【Chemistry 13】 [In formula (IC-3), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A and m3B each independently represent an integer of 0 to 5, and when m3A and m3B each represent 2 or more, the groups in the respective parentheses may be the same or different. m9A and m9B each independently represent an integer of 0 to 5, and when m9A and m9B each represent 2 or more, the groups in the respective parentheses may be the same or different. m3A, m3B, m9A, and m9B satisfy 1≦m3A+m9A≦5 and 0≦m3B+m9B≦5, respectively. When m3A=0, R ９ At least one R ９ represents a linear alkyl group having 2 to 12 carbon atoms.

26. The salt according to claim 20, wherein the cation of the salt represented by formula (I) or the structural unit represented by formula (IP) is a cation represented by formula (IC-4). 【Chemistry 14】 [In formula (IC-4), R ３ , R ６ , R ９ and the symbol m6 have the same meaning as in formula (I). X ０３ represents -O-, -CO-, -S- or -SO ２ represents -, L ０３ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and the —CH ２ - represents -O-, -CO-, -S- or -SO ２ - may be replaced by . m3A represents an integer of 0 to 5, and when m3A is 2 or more, the groups in the parentheses may be the same or different. m9A represents an integer of 0 to 5, and when m9A is 2 or more, a plurality of R ９ may be the same or different from each other. m3A and m9A each satisfy 1≦m3A+m9A≦5, and when m3A=0, R ９ At least one R ９ represents a linear alkyl group having 2 to 12 carbon atoms. X ７ is a single bond, -CH ２ -, -O-, -S-, -CO-, -SO- or -SO ２ - represents.

27. At least one m3 is an integer of 1 or more, Ar ３ The salt according to claim 20, wherein is a group derived from a benzene ring, a naphthalene ring, a furan ring, or a thiophene ring.

28. Y ｂ１ The salt according to claim 20, wherein is a cyclohexanediyl group, an adamantanediyl group, a norbornanediyl group, an adamantanelactonediyl group, or a norbornanelactonediyl group.

29. X １０ is a single bond or a group represented by the formula (X １０ -1) ~Formula (X １０ The salt according to claim 20, wherein the group is a group represented by any one of the following: 【Chemistry 15】 [Formula (X １０ -1)~Formula(X １０ -10) in *, ** are binding sites, * is R １０ represents the bonding site between the carbon atom and the atom. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of 0 to 4.

30. L １０ is a single bond, an alkanediyl group having 1 to 6 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group formed by combining an alkanediyl group having 1 to 6 carbon atoms and a cyclic hydrocarbon group having 3 to 18 carbon atoms, The —CH contained in the alkanediyl group and the cyclic hydrocarbon group ２ - is -O-, -S-, -SO ２ may be replaced by - or -CO-, The salt according to claim 20 , wherein the cyclic hydrocarbon group optionally has a substituent.

31. A resin containing a structural unit represented by formula (IP): 【Chemistry 16】 [In the formula (IP), X represents a sulfur atom or an iodine atom. When X is a sulfur atom, m10 is an integer of 1 to 3; when X is an iodine atom, m10 is 1 or 2. m1 represents 0, 1 or 2. When X is a sulfur atom, m1+m10=3. When X is an iodine atom, m1+m10=2. When m1 is 2 or more, two R １ may be the same or different from each other. R １ represents a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and —CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. When X is a sulfur atom and m1 is 2, two R １ is bonded to form S ＋ may form a ring containing -CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. R １１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ３ represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group is Ar ３ and an alkyl group having one or more carbon atoms bonded to an alkanediyl group bonded to the alkyl group. R ６ represents a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. R ９ represents a halogen atom or a hydrocarbon group having 1 to 18 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. When X is a sulfur atom and m10 is 2 or 3, two R ９ is bonded to S ＋ The two R forming the ring may form a ring containing ９ is S ＋ and a single bond formed between two benzene rings connecting the two. A ３ represents a hydrocarbon group having 1 to 20 carbon atoms, and the hydrocarbon group may have a substituent. ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. Ar ３ represents an aromatic hydrocarbon group having 6 to 10 carbon atoms or a heterocyclic aromatic hydrocarbon group having 4 to 9 carbon atoms. m3 represents an integer of 0 to 5, and when m3 is 2 or more, the groups in the parentheses may be the same or different. m6 represents an integer of 0 to 4, and when m6 is 2 or more, a plurality of R ６ may be the same or different from each other. m9 represents an integer of 0 to 5, and when m9 is 2 or more, a plurality of R ９ may be the same or different from each other. However, 1≦m3+m9≦5, and when m3=0, R is 1 or more. ９ At least one R ９ represents an alkyl group having 2 to 12 carbon atoms, and the alkyl group includes an alkyl group having 1 or more carbon atoms bonded to an alkanediyl group bonded to a benzene ring. Q ｂ１ and Q ｂ２ each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. L ｂ１ represents a saturated hydrocarbon group having 1 to 24 carbon atoms, and —CH ２ The - may be replaced by -O- or -CO-, and the hydrogen atom contained in the saturated hydrocarbon group may be substituted by a fluorine atom or a hydroxy group. Y ｂ１ represents a single bond or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and —CH ２ - is -O-, -CO-, -S-, -SO-, -NR １１ -or-SO ２ It may be replaced with -. mm1 represents 0 or 1. R １０ represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X １０ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ２１ -**, *-NR ２１ -CO-O-**, *-O-CO-NR ２１ -** or *-Ax-Ph-Ay-**. R ２１ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. * indicates R １０ represents the bonding site with the carbon atom to which it is bonded, and ** represents L １０ , Y ｂ１ or L ｂ１ represents the binding site with L １０ represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and —CH ２ - is -O-, -S-, -SO ２ -, -SO-, -NR １１ - or -CO- may be substituted.]

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