X-ray generator

Abstract

To provide an X-ray generator which can suppress generation of discharge in an insulating part.SOLUTION: An X-ray generation device 1A includes a housing 2, an electron gun 3, a target 4, a power supply unit 6, and a conductive member 9. The power supply unit 6 includes a solid insulating part 61 and a circuit part 62 embedded in the insulating part 61, and the circuit part 62 includes a first voltage part 62a, a boosting part 62b, and a second voltage part 62c. The conductive member 9 has a self-supporting property in a natural state, and at least a part of the conductive member 9 is embedded in the insulating part 61, electrically connected to the second voltage part 62c, and electrically connected to the target 4.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an X-ray generating device. [Background technology]

[0002] Known X-ray generators include a housing, an electron gun that emits an electron beam within the housing, a target that generates X-rays when the electron beam is incident within the housing, and a power supply unit that generates a voltage to be applied to the electron gun or the target, where the power supply unit has a solid insulating unit and a circuit unit embedded in the insulating unit (see, for example, Patent Document 1). In such X-ray generators, the circuit unit and the electron gun or the target may be electrically connected by a cable embedded in the insulating unit. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 5-176540 Summary of the Invention [Problem to be solved by the invention]

[0004] When molding the insulating part during the manufacture of the X-ray generator described above, the cable may be misaligned within the insulating part, which may result in the desired insulation distance not being secured between the cable and other components, making discharge more likely to occur within the power supply unit.

[0005] An object of the present invention is to provide an X-ray generator that can suppress the occurrence of discharge within an insulating portion. [Means for solving the problem]

[0006] The X-ray generator of the present invention is [1] "an X-ray generator comprising: a housing; an electron gun that emits an electron beam within the housing; a target that generates X-rays within the housing when the electron beam is incident on it; a power supply unit that generates a voltage to be applied to the electron gun or the target; and a conductive member, wherein the power supply unit has a solid first insulating unit and a circuit unit embedded in the first insulating unit, and the circuit unit includes a first voltage unit that receives a first voltage from the outside, a boost unit that boosts the first voltage to a second voltage that is the above voltage, and a second voltage unit that outputs the second voltage to the electron gun or the target, and the conductive member is self-sustaining in its natural state, and is electrically connected to the second voltage unit and to the electron gun or the target with at least a portion of the conductive member embedded in the first insulating unit."

[0007] In the X-ray generator described in [1] above, the conductive member is self-supporting in its natural state, and is electrically connected to the second voltage unit and the electron gun or the target with at least a portion of the conductive member embedded in the first insulating portion. Therefore, for example, when molding the first insulating portion during manufacturing of the X-ray generator, the position of the conductive member within the first insulating portion is maintained constant. This ensures a desired insulation distance between the conductive member and other members. Therefore, the X-ray generator described in [1] above can suppress the occurrence of discharge within the first insulating portion.

[0008] The X-ray generator of the present invention may be [2] "the X-ray generator according to the above [1], further including a power supply unit that supplies the second voltage to the electron gun or the target, the power supply unit being embedded in the first insulating part so that a part of the power supply unit is exposed outside the first insulating part, and the conductive member being connected to the power supply unit." According to the X-ray generator according to [2], for example, when molding the first insulating part during manufacture of the X-ray generator, the position of the conductive member within the first insulating part can be kept constant by the circuit part and the power supply unit, and therefore, discharge within the first insulating part can be reliably suppressed.

[0009] The X-ray generator of the present invention may be [3] "the X-ray generator according to the above [1] or [2], further comprising a second insulating part made of a material different from the first insulating part, and a part of the housing is covered by the second insulating part." According to the X-ray generator according to [3], the second insulating part can be formed of a material suitable for insulating the housing from other members.

[0010] The X-ray generator of the present invention may be the X-ray generator described in [1] above, further including a power supply unit that supplies the second voltage to the electron gun or the target, wherein the housing and the power supply unit are fixed to each other, the power supply unit is embedded in the first insulating unit so that the entirety of the power supply unit is located within the first insulating unit, the housing is embedded in the first insulating unit so that a portion of the housing is exposed to the outside of the first insulating unit, and the conductive member is embedded in the first insulating unit so that the entirety of the conductive member is located within the first insulating unit and is connected to the power supply unit. According to the X-ray generator described in [4], for example, when molding the first insulating unit during manufacture of the X-ray generator, the position of the conductive member within the first insulating unit can be kept constant by the housing, the circuit unit, and the power supply unit, thereby reliably suppressing discharge within the first insulating unit.

[0011] The X-ray generator of the present invention may be [5] "the X-ray generator according to any one of [1] to [4] above, wherein the conductive member is a single rod member, and the single rod member is connected solely to the second voltage unit." According to the X-ray generator described in [5], since the conductive member is a single rod member, air bubbles are less likely to remain around the conductive member. For example, if the conductive member is made up of multiple rod members, air bubbles are likely to remain between the multiple rod members, but if the conductive member is a single rod member, such air bubbles are not generated. If air bubbles exist in the first insulating unit, the voltage resistance of the area where the air bubbles exist decreases, making it more likely that a discharge will occur within the first insulating unit. Furthermore, since the conductive member is connected solely to the second voltage unit, air bubbles are less likely to remain around the conductive member. For example, if the conductive member is connected to the second voltage unit together with a covering member covering the conductive member, air bubbles are likely to remain between the conductive member and the covering member, but if the conductive member is connected solely to the second voltage unit, such air bubbles are not generated. Therefore, it is possible to suppress the occurrence of discharge caused by bubbles in the first insulating portion, and therefore it is possible to more reliably suppress the occurrence of discharge in the first insulating portion.

[0012] The X-ray generator of the present invention may be [6] "the X-ray generator according to any one of the above [1] to [5], wherein the conductive member is a rod member having an outer diameter of 0.5 mm or more." According to the X-ray generator according to [6], it is possible to specifically realize a conductive member that is self-supporting in its natural state.

[0013] The X-ray generator of the present invention may be [7] "the X-ray generator according to any one of the above [1] to [6], wherein the conductive member is formed from a metal material." According to the X-ray generator described in [7], the conductive member is formed from a metal material, which has a higher surface free energy than an organic material, ensuring good wettability (i.e., good contact with the first insulating portion, which is a liquid before hardening). This makes it difficult for bubbles to form on the surface of the conductive member. This makes it possible to preferably form a first insulating portion in which bubbles are less likely to remain. Therefore, it is possible to suppress discharge caused by bubbles in the first insulating portion, and therefore it is possible to more reliably suppress discharge in the first insulating portion.

[0014] The X-ray generator of the present invention may be [8] "the X-ray generator according to the above [7], wherein the conductive member is made of stainless steel, hard steel, or Kovar." According to the X-ray generator according to [8], the conductive member is made of a highly rigid material, so that the dimensions of the conductive member can be reduced while specifically realizing a conductive member that is self-supporting in its natural state. For example, if the conductive member is a rod member, the outer diameter of the rod member can be reduced. [Effects of the Invention]

[0015] According to the present invention, it is possible to provide an X-ray generating device that can suppress the occurrence of discharge within an insulating portion. [Brief explanation of the drawings]

[0016] [Figure 1] 1 is a cross-sectional view of an X-ray generator according to a first embodiment. [Figure 2] FIG. 10 is a cross-sectional view of an X-ray generator according to a second embodiment. [Figure 3] 3 is a cross-sectional view of a portion of the X-ray generating device shown in FIG. 2. [Figure 4] FIG. 10 is a cross-sectional view of a modified X-ray generating device. [Figure 5] FIG. 10 is a cross-sectional view of a modified X-ray generating device. DETAILED DESCRIPTION OF THE INVENTION

[0017] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each drawing, the same or corresponding parts are designated by the same reference numerals, and duplicated explanations will be omitted. [X-ray generating device of the first embodiment]

[0018] 1, the X-ray generator 1A of the first embodiment includes a housing 2, an electron gun 3, a target 4, an anode 5, a power supply unit 6, a power supply unit 7, and a conductive member 9. The X-ray generator 1A is a microfocus X-ray source used, for example, in X-ray nondestructive testing.

[0019] The housing 2 accommodates the electron gun 3, the target 4, and the anode 5. The space within the housing 2 is a vacuum space. The housing 2 includes a head 21, a bulb 22, and a flange 23. The head 21 is formed into a cylindrical shape with a bottom from a metal material such as stainless steel. The bulb 22 is formed into a cylindrical shape with a bottom from an insulating material such as glass. The head 21 is airtightly joined to the bulb 22 so that the interior of the head 21 is in communication with the interior of the bulb 22. The flange 23 is formed into a circular shape along the outer edge of the head 21 from a metal material such as stainless steel. Here, the direction along the central axis (tube axis) A1 of the bulb 22 is referred to as the Z-axis direction (second direction), the direction perpendicular to the Z-axis direction is referred to as the X-axis direction (first direction), and the direction perpendicular to both the Z-axis direction and the X-axis direction is referred to as the Y-axis direction.

[0020] The electron gun 3 emits an electron beam toward the target 4 inside the housing 2. The electron gun 3 is composed of a hot cathode that emits thermal electrons, an extraction electrode that extracts electrons, and an electron lens that adjusts the convergence of the electron beam (all not shown). The electron gun 3 may have a cold cathode instead of the hot cathode. The electron gun 3 is fixed to the head 21 so that the central axis A2 of the electron gun 3 is perpendicular to the central axis A1 of the bulb 22. The central axis A2 of the electron gun 3 is aligned along the X-axis direction.

[0021] The target 4 generates X-rays when the electron beam emitted from the electron gun 3 is incident on it within the housing 2. The target 4 is formed into a plate shape from a high-melting point metal material such as tungsten. The target 4 is supported by the anode 5 within the housing 2 so as to face the electron gun 3 in the X-axis direction. The target 4 may be formed integrally with the anode 5.

[0022] The anode 5 applies a voltage generated in the power supply unit 6 to the target 4. Therefore, the anode 5 is electrically connected to the target 4. The anode 5 is formed in a rod shape extending along the Z-axis direction from a metal material such as copper. The anode 5 extends from the outside to the inside of the housing 2 so that the central axis of the anode 5 coincides with the central axis A1 of the bulb 22. The anode 5 is fixed to the bottom of the bulb 22. The tip surface of the anode 5 within the housing 2 is an inclined surface inclined with respect to both the central axis A1 and the central axis A2. The target 4 is embedded in the tip portion 5a of the anode 5 so as to be flush with the tip surface of the anode 5.

[0023] The power supply unit 6 generates a voltage to be applied to the target 4 via the conductive member 9, the power supply unit 7, and the anode 5. The power supply unit 6 is disposed on one side in the Z-axis direction (below the housing 2) with respect to the housing 2. The power supply unit 6 has an insulating unit (first insulating unit) 61, a circuit unit 62, and a power supply unit (not shown) that electrically connects the circuit unit 62 to an external power source.

[0024] The insulating section 61 is a solid insulating section that electrically insulates the circuit section 62 from other components. The insulating section 61 is formed in a rectangular parallelepiped shape from a resin material such as epoxy resin. The surface 61a of the insulating section 61 is composed of an upper surface 61b that faces the housing 2, a lower surface 61c that is opposite the upper surface 61b, and a side surface 61d that connects the upper surface 61b and the lower surface 61c to each other. A ring-shaped wall section 61e is formed in the center of the upper surface 61b.

[0025] The circuit unit 62 has a substrate 621, which is a rectangular printed circuit board. The surface of the substrate 621 is perpendicular to the Y-axis direction. A first voltage unit 62a, a boost unit 62b, and a second voltage unit 62c are mounted on the surface of the substrate 621. The first voltage unit 62a includes an input terminal to which a first voltage is input from outside via a power supply unit (not shown) and is electrically connected to the boost unit 62b. The boost unit 62b includes a boost circuit that boosts the first voltage to a second voltage. The boost unit 62b is, for example, a Cockcroft-Walton circuit. The second voltage unit 62c includes an output terminal that outputs a second voltage to be applied to the target 4 and is electrically connected to the boost unit 62b. The output terminal outputs the second voltage to the target 4 via the conductive member 9, the power supply unit 7, and the anode 5. In other words, relatively speaking, the first voltage section 62a can be said to be the low-voltage section of the circuit section 62, and the second voltage section 62c can be said to be the high-voltage section of the circuit section 62. The boost section 62b can also be said to be substantially included in the high-voltage section of the circuit section 62. In other words, the substrate 621 includes a relatively low-voltage region in which the first voltage section 62a is arranged, and a relatively high-voltage region in which the boost section 62b and the second voltage section 62c are arranged. Note that the surface of the substrate 621 may be orthogonal to either the X-axis direction or the Z-axis direction. It does not matter which of the two surfaces of the substrate 621 is the surface of the substrate 621 (the surface on which the first voltage section 62a, etc. are mounted).

[0026] The booster 62b is located in the center of the surface of the substrate 621. The first voltage unit 62a is located on one side (the lower surface 61c side) of the booster 62b in the Z-axis direction. The second voltage unit 62c is located on the other side (the upper surface 61b side) of the booster 62b in the Z-axis direction.

[0027] The circuit section 62 is embedded in the insulating section 61 so that the entire circuit section 62 is located within the insulating section 61. The circuit section 62 is embedded in the insulating section 61 so that the substrate 621 extends straight along the Z-axis direction.

[0028] The power supply unit 7 supplies the second voltage output from the second voltage unit 62c to the target 4. The power supply unit 7 is a cylindrical socket made of a metal material such as aluminum. The power supply unit 7 is embedded in the insulating part 61 so that a portion 7a of the power supply unit 7 is exposed outside the insulating part 61. The portion 7a protrudes from the upper surface 61b to the outside of the insulating part 61. The portion 7a is surrounded by the wall part 61e when viewed from the Z-axis direction. The base end 5b of the anode 5 (the portion of the anode 5 located outside the housing 2) is fitted into the portion 7a. The power supply unit 7 is fixed to the housing 2 via the anode 5. That is, the housing 2 and the power supply unit 7 are fixed to each other.

[0029] When viewed from the Z-axis direction, the target 4, the anode 5, and the power supply part 7 overlap with the insulating part 61. The circuit part 62 is embedded in the insulating part 61 so that the second voltage part 62c is located between the first voltage part 62a and the target 4 in the Z-axis direction.

[0030] The conductive member 9 is a single rod-shaped member made of a highly rigid metal material. The material of the conductive member 9 is, for example, stainless steel, hard steel, Kovar, etc. When the conductive member 9 is made of a highly rigid metal material, the outer diameter of the rod-shaped conductive member 9 is, for example, 0.5 mm or more and 3.0 mm or less. The material of the conductive member 9 may be copper. In this case, the outer diameter of the rod-shaped conductive member 9 is, for example, 1.0 mm or more and 5.0 mm or less.

[0031] The conductive member 9 electrically connects the second voltage unit 62c and the target 4 via the power supply unit 7 and the anode 5. Therefore, the conductive member 9 is conductive. One end of the conductive member 9 is electrically connected to the second voltage unit 62c, and the other end of the conductive member 9 is connected to the power supply unit 7. The conductive member 9 is connected independently to each of the second voltage unit 62c and the power supply unit 7. The conductive member 9 is embedded in the insulating unit 61 so that a portion of the conductive member 9 is located within the insulating unit 61. In the X-ray generator 1A, the conductive member 9 is embedded in the insulating unit 61 so that the portion of the conductive member 9 extends straight along the Z-axis direction. The other portion of the conductive member 9 is exposed outside the insulating unit 61. The portion of the conductive member 9 exposed outside the insulating unit 61 is electrically connected to the base end 5b of the anode 5 inside the power supply unit 7.

[0032] The conductive member 9 is self-supporting in its natural state. That is, when the conductive member 9 is not embedded in the insulating part 61 and is connected to predetermined members in the X-ray generator 1A (in the X-ray generator 1A, the second voltage part 62c and the power supply part 7), the positions of the parts of the conductive member 9 do not change due to the weight of the conductive member 9 itself and are maintained constant.

[0033] The X-ray generator 1A further includes a first plate member 11, a second plate member 12, a plurality of (four in this embodiment) support columns 13, a cylindrical member 14, insulating oil (second insulating portion) 15, and conductive paint 16. The conductive paint 16 is applied to a side surface 61d of the insulating portion 61, and the potential of the side surface 61d is set to ground potential.

[0034] The first plate member 11 is formed into a rectangular plate shape from a metal material such as aluminum. The insulating portion 61 is disposed on the first plate member 11 so that its lower surface 61c contacts the first plate member 11. The second plate member 12 is formed into a rectangular plate shape from a metal material such as aluminum. The second plate member 12 is disposed on the insulating portion 61 so that its upper surface 61b contacts the second plate member 12. An opening 12a is provided in the second plate member 12. The wall portion 61e and the power supply portion 7 are located inside the opening 12a when viewed from the Z-axis direction.

[0035] Each of the multiple support columns 13 is disposed between one of the four corners of the first plate member 11 and one of the four corners of the second plate member 12. The support columns 13 are formed in a rectangular parallelepiped shape from a metal material such as aluminum. The first plate member 11 and the second plate member 12 are fixed to each other via the support columns 13. Specifically, the shank of a screw S1 is inserted through a through hole provided in the first plate member 11 and the second plate member 12 and is screwed into a screw hole provided in the support columns 13. This fixes the first plate member 11 and the second plate member 12 to each other.

[0036] The tubular member 14 accommodates insulating oil 15. The tubular member 14 is formed into a cylindrical shape from a metal material such as aluminum. The tubular member 14 is disposed on the second plate member 12 so that the interior of the tubular member 14 is in communication with the opening 12a. A valve 22 and an anode 5 are located inside the tubular member 14. One end 14a of the tubular member 14 is tapered, with the diameter decreasing toward the tip end surface of the tubular member 14. A flange 23 is screwed to the tip end surface of the tubular member 14 via a sealing member (not shown). A flange 14b is formed at the other end of the tubular member 14. The flange 14b is screwed to the second plate member 12 via a sealing member (not shown). An internal space is defined by the inner surface of the opening 12a, the inner surface of the tubular member 14, the flange 23, and the insulating portion 61. The internal space is filled with insulating oil 15, the main component of which is, for example, mineral oil. Insulating oil 15 is made of a material different from that of insulating portion 61. Insulating oil 15 covers bulb 22, the portion of anode 5 exposed outside housing 2, and the portion of power supply portion 7 exposed outside insulating portion 61.

[0037] In the X-ray generator 1A configured as described above, the side surface 61d of the insulating unit 61 is set to ground potential, and a voltage of, for example, several hundred volts is input as a first voltage from an external power supply via a power supply unit to the first voltage unit 62a. The voltage booster 62b boosts the first voltage to a second voltage of, for example, several kV to several hundred kV. The second voltage unit 62c then outputs the second voltage to the target 4 via the conductive member 9, the power supply unit 7, and the anode 5. With the second voltage applied to the target 4, an electron beam from the electron gun 3 is incident on the target 4, causing X-rays to be generated from the target 4. The X-ray generator 1A is a so-called sealed reflection X-ray generator. Power may be supplied to the electron gun 3 by a transformer (not shown) included in the power supply unit 6 or by the circuit unit 62.

[0038] The power supply unit 6 of the X-ray generator 1A is manufactured, for example, as follows. First, the circuit unit 62, the power supply unit 7, and the conductive member 9 are placed at predetermined positions in a mold, and in this state, a thermosetting resin is introduced into the mold. Then, a degassing process is performed on the introduced thermosetting resin so that no air bubbles remain in the thermosetting resin inside the mold. Next, the thermosetting resin is thermally cured to form the insulating unit 61. [Action and effect]

[0039] As described above, in the X-ray generator 1A, the conductive member 9 is self-supporting in its natural state. A portion of the conductive member 9 is embedded in the insulating portion 61 and is electrically connected to the second voltage unit 62c and the target 4. Therefore, even if an inflow pressure is applied to the conductive member 9 when a thermosetting resin is poured into a mold to mold the insulating portion 61 during manufacturing of the X-ray generator 1A, or even if escaping bubbles collide with the conductive member 9 during a degassing process, the shape and position of the conductive member 9 do not change significantly, and the position of the conductive member 9 within the insulating portion 61 is maintained constant. This ensures a desired insulation distance between the conductive member 9 and other components. Therefore, the X-ray generator 1A can suppress discharge within the insulating portion 61.

[0040] X-ray generator 1A includes power supply unit 7 that supplies a second voltage to target 4, and power supply unit 7 is embedded in insulating section 61 such that a portion 7a of power supply unit 7 is exposed to the outside of insulating section 61, and conductive member 9 is connected to power supply unit 7. As a result, when insulating section 61 is molded during the manufacture of X-ray generator 1A, for example, the position of conductive member 9 within insulating section 61 can be maintained constant by circuit section 62 and power supply unit 7, and therefore, discharge within insulating section 61 can be reliably suppressed.

[0041] The X-ray generator 1A includes insulating oil 15 made of a material different from that of the insulating part 61, and a part of the housing 2 is covered with the insulating oil 15. As a result, in the X-ray generator 1A, the insulating oil 15 can be formed from a material suitable for insulating the housing 2 from other components.

[0042] In the X-ray generator 1A, the conductive member 9 is a single rod member, and this single rod member is connected solely to the second voltage unit 62c. Because the conductive member 9 is a single rod member, air bubbles are less likely to remain around the conductive member 9. For example, if the conductive member 9 is made up of multiple rod members, air bubbles are trapped between the multiple rod members and tend to remain even after a degassing process, making it more likely that air bubbles will be present in the insulating portion 61 formed after thermal curing. However, if the conductive member 9 is a single rod member, such air bubbles will not be generated. If air bubbles are present in the insulating portion 61, the voltage resistance of the area where the air bubbles exist will decrease, making it more likely that discharge will occur within the insulating portion 61. Furthermore, because the conductive member 9 is connected solely to the second voltage unit 62c, air bubbles are less likely to remain around the conductive member 9. For example, when the conductive member 9 is connected to the second voltage section 62c together with the covering member that covers the conductive member 9, bubbles that exist between the conductive member 9 and the covering member are not removed even by degassing treatment, and bubbles are likely to exist in the insulating section 61 formed after thermal curing. However, when the conductive member 9 is connected to the second voltage section 62c alone, no bubbles are generated. Therefore, discharge caused by bubbles in the insulating section 61 can be suppressed, and discharge in the insulating section 61 can be more reliably suppressed.

[0043] In the X-ray generating apparatus 1A, the conductive member 9 is a rod member having an outer diameter of, for example, 0.5 mm or more. In this case, it is possible to specifically realize a conductive member 9 that is self-supporting in its natural state.

[0044] In the X-ray generator 1A, the conductive member 9 is made of a metal material. In this case, the surface free energy is higher than when the conductive member 9 is made of an organic material, and good wettability can be ensured (i.e., good contact with the liquid resin before hardening), making it difficult for bubbles to form on the surface of the conductive member 9. This makes it possible to preferably form the insulating section 61 in which bubbles are less likely to remain. Therefore, it is possible to suppress the occurrence of discharge caused by bubbles in the insulating section 61, and therefore it is possible to more reliably suppress the occurrence of discharge in the insulating section 61.

[0045] In the X-ray generating device 1A, the conductive member 9 is made of, for example, stainless steel, hard steel, or Kovar. In this case, since the conductive member 9 is made of a highly rigid material, it is possible to specifically realize a conductive member 9 that is self-supporting in its natural state, while reducing the dimensions of the conductive member 9. For example, if the conductive member 9 is a rod member, the outer diameter of the rod member can be reduced. [X-ray generator according to the second embodiment]

[0046] 2 and 3, the X-ray generator 1B of the second embodiment differs from the X-ray generator 1A of the first embodiment mainly in that the housing 2 is configured so that the interior of the housing 2 can be opened and closed, and that the circuit unit 62 outputs a second voltage to the electron gun 3. The X-ray generator 1B of the second embodiment will be described below, focusing on the differences from the X-ray generator 1A of the first embodiment.

[0047] The X-ray generating device 1B further includes an exhaust pipe 17 and a power supply unit 18. The power supply unit 6 further includes a conductive member 64 and an electron emission control unit (not shown) electrically connected to the conductive members 9 and 64.

[0048] The housing 2 has a fixed part 24, a detachable part 25, a hinge 26, and a cap 27. The fixed part 24 and the detachable part 25 are each formed into a cylindrical shape from a metal material such as stainless steel. The detachable part 25 is attached to the fixed part 24 via the hinge 26. The detachable part 25 defines a passage 25a through which the electron beam passes. An exhaust pipe 17 is attached to the side wall of the fixed part 24. A vacuum pump (not shown) is connected to the exhaust pipe 17. A target 4, which is housed in a cap 27, is attached to the upper end of the detachable part 25. In the X-ray generator 1B, the detachable part 25 is tilted relative to the fixed part 24 to open the interior of the housing 2, allowing the filament and other components of the electron gun 3 to be replaced. A plurality of coils 28 are provided inside the detachable part 25. The multiple coil sections 28 function as electromagnetic deflection lenses to focus the electron beam traveling through the passage 25 a from the electron gun 3 toward the target 4 onto the target 4 .

[0049] The insulating part 61 is composed of a rectangular parallelepiped first part 61f and a cylindrical second part 61g provided on the first part 61f. The fixing part 24 is attached to the upper end of the first part 61f. The second part 61g is located inside the fixing part 24. A portion of each of the power supply parts 7 and 18 is embedded in the second part 61g.

[0050] The electron gun 3 is attached to the tip of the second section 61g. The electron gun 3 includes a grid base 31, screws 32, a heater socket 33, a heater pin (filament) 34, a heater base 35, a grid cap 36, and rings 37 and 38. The grid base 31 is fixed to the power supply unit 18 with the screws 32. The heater socket 33 is fitted to the power supply unit 7. The heater pin 34 is detachably attached to the heater socket 33. The heater base 35 supports the heater pin 34. The heater pin 34 and the heater base 35 form a cathode electrode. The grid cap 36 covers the heater pin 34 and the heater base 35. The ring 37 is screwed onto the grid base 31 and holds the grid cap 36 in place. This fixes the position of the heater base 35 within the grid cap 36 in cooperation with the ring 38.

[0051] The conductive member 64 electrically connects the second voltage section 62c and the electron gun 3 (screw 32) via the power supply section 18. One end of the conductive member 64 is electrically connected to the second voltage section 62c, and the other end of the conductive member 64 is connected to the power supply section 18. The conductive member 64 is embedded in the insulating section 61 so that the entire conductive member 64 is located within the insulating section 61. The configuration and material of the conductive member 64 are the same as the configuration and material of the conductive member 9, for example.

[0052] The conductive member 9 electrically connects the second voltage section 62c and the electron gun 3 (heater socket 33) via the power supply section 7. One end of the conductive member 9 is electrically connected to the second voltage section 62c, and the other end of the conductive member 9 is connected to the power supply section 7.

[0053] In the X-ray generator 1B configured as described above, the target 4 is set to ground potential, and a negative voltage of, for example, several hundred volts is input as a first voltage from an external power supply via a power supply unit to the first voltage unit 62a. The booster unit 62b boosts the first voltage to a second voltage of, for example, several kV to several hundred kV. The second voltage unit 62c then outputs the second voltage to the electron gun 3 via the conductive member 9 and the power supply unit 7. The heater pin 34 is heated via the heater socket 33, causing an electron beam to be emitted from the heater pin 34. The electron beam from the electron gun 3 is incident on the target 4, causing X-rays to be generated from the target 4. The X-ray generator 1B is a so-called open transmission type X-ray generator.

[0054] As described above, in the X-ray generator 1B, the housing 2 is configured so that the inside of the housing 2 can be opened and closed. This allows the filament and the like of the electron gun 3 to be replaced. [Variations]

[0055] The present invention is not limited to the above-described embodiment. In the X-ray generator 1A of the first embodiment, the circuit unit 62, a portion of the power supply unit 7, and a portion of the conductive member 9 are embedded in the insulating unit 61. However, the configuration of the insulating unit 61 is not limited thereto. For example, as shown in FIG. 4 , in the X-ray generator 1A, the power supply unit 7 may be embedded in the insulating unit 61 so that the entire power supply unit 7 is located within the insulating unit 61, the conductive member 9 may be embedded in the insulating unit 61 so that the entire conductive member 9 is located within the insulating unit 61, the anode 5 may be embedded in the insulating unit 61 so that the portion of the anode 5 located outside the housing 2 is located within the insulating unit 61, and the housing 2 may be embedded in the insulating unit 61 so that a portion of the housing 2 (the head 21 and the flange 23) is exposed outside the insulating unit 61. In this case, for example, when molding the insulating section 61 during the manufacture of the X-ray generating device 1A, the position of the conductive member 9 within the insulating section 61 can be maintained constant by the housing 2, the circuit section 62, and the power supply section 7, so that the occurrence of discharge within the insulating section 61 can be reliably suppressed.

[0056] In the X-ray generator 1A of the first embodiment and the X-ray generator 1B of the second embodiment, the conductive member 9 extends within the insulating portion 61 so as to extend straight along the Z-axis direction. However, the conductive member 9 may be bent and extend within the insulating portion 61 depending on the positional relationship between the housing 2 and the circuit unit 62. For example, as shown in FIGS. 5(a) and 5(b), in the X-ray generator 1A, the housing 2 may be located to the side of the insulating portion 61 so that the housing 2 overlaps with the side surface 61d when viewed from the X-axis direction. In this case, the conductive member 9 may be bent and extend within the insulating portion 61 so as to be connected to each of the second voltage unit 62c and the power supply unit 7. This configuration increases the flexibility in the placement of the circuit unit 62. Therefore, the circuit unit 62 can be placed in a position where discharge is less likely to occur, thereby further suppressing discharge within the insulating portion 61.

[0057] In the X-ray generator 1A of the first embodiment and the X-ray generator 1B of the second embodiment, the material of the conductive member 9 is a metal material such as stainless steel, hard steel, Kovar, copper, etc., but the material of the conductive member 9 may be any material that has conductivity. Furthermore, in the X-ray generator 1A of the first embodiment and the X-ray generator 1B of the second embodiment, the conductive member 9 is a rod member, but the conductive member 9 may be a plate member.

[0058] In the X-ray generator 1A of the first embodiment and the X-ray generator 1B of the second embodiment, the conductive member 9 is electrically connected to the electron gun 3 or the target 4 via the power supply unit 7. However, the conductive member 9 may be electrically connected to the electron gun 3 or the target 4 without the power supply unit 7. For example, the X-ray generator 1A may not be provided with the power supply unit 7, and the conductive member 9 may be directly connected to the base end 5b of the anode 5.

[0059] In the X-ray generator 1A of the first embodiment and the X-ray generator 1B of the second embodiment, the conductive member 9 may be formed integrally with the power supply unit 7. In other words, the conductive member 9 may also serve as the power supply unit 7.

[0060] The X-ray generator 1A of the first embodiment is a sealed reflection type X-ray generator, but the X-ray generator 1A may be a sealed transmission type X-ray generator. The X-ray generator 1B of the second embodiment is an open transmission type X-ray generator, but the X-ray generator 1B may be an open reflection type X-ray generator. [Explanation of symbols]

[0061] 1A, 1B...X-ray generator, 2...housing, 3...electron gun, 4...target, 6...power supply unit, 7...power supply unit, 9...conductive member, 15...insulating oil (second insulating unit), 61...insulating unit (first insulating unit), 62...circuit unit, 62a...first voltage unit, 62b...boosting unit, 62c...second voltage unit.

Claims

1. The housing and an electron gun that emits an electron beam within the housing; a target disposed within the housing and configured to generate X-rays when the electron beam is incident thereon; a power supply unit that generates a voltage to be applied to the electron gun or the target; a conductive member; the power supply unit has a solid first insulating portion and a circuit portion embedded in the first insulating portion, the circuit unit includes a first voltage unit to which a first voltage is input from an external device, a boost unit that boosts the first voltage to a second voltage that is the voltage, and a second voltage unit that outputs the second voltage to the electron gun or the target, An X-ray generating device in which the conductive member is self-supporting in its natural state, and at least a portion of the conductive member is embedded in the first insulating portion, and the conductive member is electrically connected to the second voltage portion and to the electron gun or the target.

2. a power supply unit that supplies the second voltage to the electron gun or the target; the power supply portion is embedded in the first insulating portion such that a portion of the power supply portion is exposed to the outside of the first insulating portion, The X-ray generating device according to claim 1 , wherein the conductive member is connected to the power supply unit.

3. Further provided is a second insulating portion made of a material different from the first insulating portion, The X-ray generating device according to claim 1 , wherein a part of the housing is covered by the second insulating part.

4. a power supply unit that supplies the second voltage to the electron gun or the target; the housing and the power supply unit are fixed to each other, the power supply portion is embedded in the first insulating portion such that the entire power supply portion is located within the first insulating portion, the housing is embedded in the first insulating portion so that a portion of the housing is exposed to the outside of the first insulating portion, 2. The X-ray generating device according to claim 1, wherein the conductive member is embedded in the first insulating portion so that the entire conductive member is located within the first insulating portion, and is connected to the power supply portion.

5. the conductive member is a single rod member, 5. The X-ray generating device according to claim 1, wherein the single rod member is connected solely to the second voltage section.

6. 5. The X-ray generating device according to claim 1, wherein the conductive member is a rod member having an outer diameter of 0.5 mm or more.

7. 5. The X-ray generating device according to claim 1, wherein the conductive member is made of a metal material.

8. 8. The X-ray generating device according to claim 7, wherein the conductive member is made of stainless steel, hard steel, or Kovar.

Images