Controller, heating system, program, and heating method

Abstract

To make time variation in a heating temperature at the time of a heating unit heating a heating object be time variation in a shape close to a top hat form.SOLUTION: A controller 20 controls a heater tool 22 for heating a heating object W. The controller 20 comprises: a temperature measurement unit 42 for measuring a heating temperature when the heater tool 22 heats the heating object W, using a temperature sensor 25; and a power control unit 42B for controlling supply power on the basis of the measured heating temperature. The power control unit 42B increases the supply power to first power before performing holding at the first power; on the basis of the heating temperature measured by the temperature measurement unit 42A reaching a predetermined threshold temperature, reduces the supply power held at the first power to second power before performing holding at the second power; and, after that, terminates heating to the heating object W.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a controller, a heating system, a program, and a heating method. [Background technology]

[0002] As disclosed in Patent Document 1, a technique for controlling the supply power supplied to a heating unit that heats an object to be heated with thermal energy according to the supply power is known. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2018-20358 Summary of the Invention [Problem to be solved by the invention]

[0004] The heating described in Patent Document 1 is for thermocompression bonding, but a complex heating pattern is used to control the amount of heat applied to the heating target and the peak temperature, and bonding during thermocompression bonding is performed while the heating temperature (the temperature of the heating part or the temperature of the heating target) is rising. However, for example, in thermocompression bonding using heat pulses, the time change in heating temperature preferably follows a top-hat pattern. Here, the top-hat pattern of time change refers to a time change in which the heating temperature rises (i.e., rises sharply) at the start of heating, remains constant for a certain period, and then falls (i.e., decreases sharply), as shown in FIG. 5. This top-hat pattern of time change prevents insufficient heating during thermocompression bonding. Note that the fact that it is sometimes preferable to change the heating temperature in a top-hat pattern of time is not limited to heating for thermocompression bonding.

[0005] An object of the present invention is to make the change in heating temperature over time when a heating unit heats a heating target have a shape similar to a top hat shape. [Means for solving the problem]

[0006] In order to solve the above problem, the controller of the present invention is a controller that controls a heating unit that heats a heating object with thermal energy according to the supplied power, and includes a temperature measurement unit that measures the heating temperature when the heating unit heats the heating object using a temperature sensor, and a power control unit that controls the supplied power based on the measured heating temperature, wherein when the heating unit heats the heating object, the power control unit increases the supplied power to a first power and maintains it at the first power, and based on the measured heating temperature reaching a predetermined threshold temperature, reduces the supplied power that has been maintained at the first power to a second power and maintains it at the second power, and then terminates heating of the heating object.

[0007] The heating device according to the present invention includes the controller and a joining machine that includes the heating unit and joins a first part and a second part that constitute the heating object by heating the heating object with the heating unit.

[0008] A program according to the present invention causes a computer to function as the controller.

[0009] A heating method according to the present invention is a heating method for heating an object to be heated using a heating unit that heats the object to be heated with thermal energy according to supplied power, and includes the steps of increasing the supplied power to a first power and maintaining it at the first power, and reducing the supplied power, which has been maintained at the first power, to a second power and maintaining it at the second power based on the fact that the heating temperature when the heating unit heats the object to be heated has reached a predetermined threshold temperature, and then terminating heating of the object to be heated. [Effects of the Invention]

[0010] According to the present invention, the change in heating temperature over time when the heating unit heats the heating target can be made to have a shape similar to a top hat shape. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 1 is a configuration diagram of a heating system according to an embodiment of the present invention. [Figure 2] FIG. 2 is another configuration diagram of the heating system of FIG. 1, showing the outline details of the heater. [Figure 3] FIG. 3 is a flowchart of the thermocompression bonding process. [Figure 4] FIG. 4 is a graph showing the changes over time in the heating temperature and the supplied power in the thermocompression bonding process. [Figure 5] FIG. 5 is a graph showing the time change of a top hat shape, which is an ideal time change of the heating temperature. [Figure 6] FIG. 6 is a graph showing the relationship between the change over time in the actual temperature of the heater tool and the change over time in the temperature detected by the temperature sensor. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Note that the up-down direction shown in Fig. 2 is for convenience's sake and may or may not coincide with the actual top-bottom direction.

[0013] As shown in FIGS. 1 and 2, a heating system 10 according to this embodiment includes a heater 20, a power supply circuit 30, a controller 40, and a user interface 50.

[0014] The heater 20 is configured as a bonding machine that heats a heating object W (FIG. 2) and thermocompresses components W1 and W2 that constitute the heating object W using pulse heat. The components W1 and W2 constitute a chip inductor. The component W1 is a coated wire that constitutes a coil and includes a core wire W11 and a coating film W12. The component W2 is a plate-like member that includes an electrode W21 to which the core wire W11 is bonded by thermocompression. During thermocompression bonding, the coating film W12 is removed by heat, and the core wire W11 is thermocompression bonded to the electrode W21. The chip inductor is completed by thermocompression bonding. Specific examples of the heating object W are not limited to these.

[0015] 2, the heater 20 includes a stage 21 that supports the heating target W on its upper surface, a heater tool 22 that heats the heating target W, and a drive mechanism 23 that pressurizes the heating target W by pressing the heater tool 22 against the heating target W. The drive mechanism 23 is formed of a linear motor or the like. The heater tool 22 is formed of a resistor made of, for example, molybdenum (Mo) or tungsten (W). The heater tool 22 heats the heating target W by generating heat energy corresponding to the power supplied from a power supply circuit 30 (more specifically, the current flowing from the power supply circuit 30 to the heater tool 22).

[0016] The heater 20 also includes a temperature sensor 25 such as a thermocouple that detects the temperature of the heater tool 22, i.e., the heating temperature when the heater tool 22 heats the heating object W. The temperature sensor 25 is fixed to the heater tool 22. The temperature sensor 25 outputs the detected temperature to the controller 40. The heating temperature may be the temperature of the heater tool 22 or the temperature of the heating object W. When the heating temperature is the temperature of the heating object W, the temperature sensor 25 is provided to detect the temperature of the heating object W. The temperature sensor 25 may be a thermocouple or a radiation thermometer.

[0017] The power supply circuit 30 controls the power supplied to the heater tool 22 based on AC power from an external power source E such as a commercial power source. By controlling the power supply, the heat temperature generated by the heater tool 22, i.e., the heating temperature of the heating target W, is adjusted.

[0018] The power supply circuit 30 includes a switch 31 connected to an external power source E such as a commercial power source, a rectifier circuit 32 provided downstream of the switch 31, a smoothing capacitor 33 provided downstream of the rectifier circuit 32, and an inverter 34 provided downstream of the smoothing capacitor 33. The power supply circuit 30 further includes a transformer 35 provided downstream of the inverter 34, and a rectifier unit 36 including a plurality of (here, two) diodes provided downstream of the transformer. The rectifier unit 36 is connected to the heater tool 22.

[0019] When switch 31 is in an on state, it supplies AC power (here, three-phase AC power) from external power supply E to rectifier circuit 32, and when it is in an off state, it does not supply the AC power to rectifier circuit 32. Rectifier circuit 32 is made up of bridge diodes and rectifies the AC power from external power supply E. Smoothing capacitor 33 smoothes the AC power rectified by rectifier circuit 32. The smoothed AC power, i.e., DC power, is input to inverter 34. Inverter 34 is made up of a plurality of bridge-connected switching elements and converts the input DC power into AC power by switching the switching elements. Inverter 34 may further include free wheeling diodes and inductors or capacitors connected in series or in parallel to each switching element, and may be configured as a current-type or voltage-type inverter.

[0020] The converted AC power is input to the primary side of the transformer 35 and transformed. The transformed AC power is output from the secondary side of the transformer 35. The AC power output from the secondary side is half-wave rectified by the rectifier 36. The power half-wave rectified by the rectifier 36 is supplied to the heater tool 22. As a result, a current flows through the heater tool 22, and the heater tool 22 heats up due to Joule heat generated by this current. The rectifier 36 may be configured to full-wave rectify the power, or may include a capacitor that smoothes the rectified power.

[0021] The power supplied to the heater tool 22 is controlled by the switching mode (frequency and / or duty ratio) of each switching element of the inverter 34. By this control, the power supplied to the heater tool 22 is controlled.

[0022] The current flowing through the heater tool 22 is detected by an ammeter 91. The voltage across the heater tool 22 is detected by a voltmeter 92. The detected current and voltage are input to the controller 40.

[0023] The controller 40 is configured to control the heater tool 22 (particularly, the power supplied to the heater tool 22). The controller 40 includes a nonvolatile storage device 41 that stores various data, including various parameters described below, programs, and the like, and a processor 42 that executes the programs and performs the processing described below using the various data. The processor 42 includes a CPU (Central Processing Unit) and the like. The controller 40 further includes a main memory 43 that provides a working area for the processor 42, and an I / O (Input / Output) 44 that relays data exchanged between the processor 42 and the outside of the controller 40. The I / O (Input / Output) 44 may include an analog-to-digital conversion circuit that converts analog signals representing the temperature, current, and voltage input to the controller 40 into digital signals and supplies the digital signals to the processor 42.

[0024] The user interface 50 includes a display device 51 that displays various operation screens, and an operation device 52 that accepts operations from the user. The operation device 52 is provided on the screen of the display device 51 and may be a transparent touch panel that accepts touch operations from the user, or may be an operation input device that has various operation keys.

[0025] The processor 42 of the controller 40 executes the program in the storage device 41 to operate as a temperature measurement unit 42A, a power control unit 42B, a pressure control unit 42C, and a reception unit 42D shown in FIG.

[0026] The temperature measurement unit 42A measures the heating temperature when the heater tool 22 heats the heating target W using the temperature sensor 25. More specifically, the temperature measurement unit 42A acquires the temperature of the heater tool 22 (or the heating target W) detected by the temperature sensor 25 and input to the controller 40 as the heating temperature.

[0027] The power control unit 42B controls the power supply to the heater tool 22 by controlling the power supply circuit 30, more specifically, the switching mode of the inverter 34. The power control unit 42B controls the power supply to the heater tool 22 based on the heating temperature measured by the temperature measurement unit 42A. The power control unit 42B detects the power consumed by the heater tool 22, which is the power supplied to the heater tool 22, for example, by multiplying the current and voltage detected by the ammeter 91 and voltmeter 92 and input to the controller 40, and performs feedback control of the supply power by feedback-controlling the switching of the switching elements of the inverter 34 using the detected power consumption as a feedback value.

[0028] The pressure control unit 42C controls the drive mechanism 23 to press the heater tool 22 against the heating target W. This applies pressure to the heating target W on the stage 21. The pressure control unit 42C may control the drive mechanism 23 using an output value of a pressure sensor provided in the heater tool 22 as a feedback value.

[0029] The reception unit 42D receives various parameters used in the thermocompression bonding process described below. The various parameters are input, for example, via the operation device 52 and the I / O 44, or input from an external device via the I / O 44. The reception unit 42D receives the input various parameters and stores them in the storage device 41. This storage sets the various parameters. The various parameters include values for a threshold temperature and a predetermined period, described below. The various parameters may include values for a first power and a second power, described below, and values required for feedback control. The various parameters may include values specifying the switching modes of the switching elements of the inverter 34, described below.

[0030] The temperature measurement unit 42A, the power control unit 42B, and the pressure control unit 42C cooperate to perform a thermocompression bonding process (for example, the process of FIG. 3). The thermocompression bonding process is started based on a user operation. For example, the user places the heating target W on the stage 21 and inputs an instruction to start thermocompression bonding to a touch panel or the like of the operation device 52. The instruction to start thermocompression bonding is supplied from the operation device 52 to the controller 40. In response to the supply of this instruction, the power control unit 42B of the controller 40 turns on the switch 31. After the switch 31 is turned on, the thermocompression bonding process is started.

[0031] An example of thermocompression bonding will be described below with reference to Figures 3 and 4. The upper graph in Figure 4 shows the change over time in the heating temperature of the heating target W by the heater tool 22 during the thermocompression bonding process, and the lower graph shows the change over time in the power supplied to the heater tool 22 during the thermocompression bonding process.

[0032] In the thermocompression bonding process, first, the pressure control unit 42C controls the drive mechanism 23 to move the heater tool 22 toward the heating target W, and the heater tool 22 applies pressure to the heating target W (step S11). As a result, the component W1 on the heater tool 22 side of the heating target W is pressed against the component W2 on the opposite side.

[0033] Thereafter, the power control unit 42B operates the power supply circuit 30, more specifically the inverter 34, to start supplying power to the heater tool 22, increasing the supplied power to a first power (T1 to T2 in FIG. 4), and maintaining the first power (steps S12, T2 to T3). The first power is preset as a power that increases the heating temperature to a temperature higher than the bonding temperature required for thermocompression bonding of the heating target W. This allows the temperature of the heater tool 22 to quickly reach the desired temperature required for bonding (a threshold temperature, described below). The first power is preferably set to the highest power within a range that allows stable operation of the inverter 34. This allows the temperature of the heater tool 22 to quickly reach the desired temperature required for bonding.

[0034] Thereafter, the temperature measurement unit 42A measures the temperature of the heater tool 22 by acquiring the temperature of the heater tool 22 detected by the temperature sensor 25 from the temperature sensor 25 (step S13). The temperature is the heating temperature when the heater tool 22 heats the heating target W.

[0035] Thereafter, the power control unit 42B determines whether the heating temperature measured by the temperature measurement unit 42A has reached a predetermined threshold temperature (step S14). The power control unit 42B waits until the heating temperature reaches the threshold temperature (step S14; No). When the power control unit 42B determines that the heating temperature has reached the threshold temperature (step S14; Yes, timing T3), it reduces the power supplied to the heater tool 22 from the currently held first power to the second power (T3 to T4) and then maintains the second power (steps S15, T4 to T5). The second power is preset as the power that sets the heating temperature (here, the temperature of the heater tool 22) to the threshold temperature. The threshold temperature is preset as a bonding temperature required for thermocompression bonding. The second power may be set as the power that sets the heating temperature to a bonding temperature different from the threshold temperature. In this case, the threshold temperature may be any desired temperature.

[0036] The power control unit 42B determines whether a predetermined period of time has elapsed since the timing (T3) at which it was determined that the heating temperature had reached the threshold temperature (step S16). The predetermined period of time is set in advance as a fixed period of time required for thermocompression bonding. The fixed period of time is, for example, a period of time whose length does not change while heating (thermocompression bonding) is being performed on one or more heating targets W.

[0037] The power control unit 42B waits before the predetermined period has elapsed (step S16; No), and after the predetermined period has elapsed (step S16; Yes), performs a process to terminate the thermocompression bonding (step S17). In this termination process, for example, the power control unit 42B reduces the power supplied to the heater tool 22 or turns off all switching elements of the inverter 34 to cut off the power supply. In addition, the pressure control unit 42C controls the drive mechanism 23 to move the heater tool 22 away from the heating target W. In this termination process, the heater tool 22 and the heating target W may be cooled by a cooling device.

[0038] In the above series of processes, when the power control unit 42B performs feedback control of the supplied power, the power control unit 42B may set the target value of power consumption to a first power value at time T1, or may increase the target value of power consumption between T1 and T2 and maintain the first power value at time T2. The power control unit 42B may set the target value of power consumption to a second power value at time T3, or may decrease the target value of power consumption between T3 and T4 and maintain the second power value at time T4. The power control unit 42B may control the inverter 34 in a predetermined control mode (switching mode) between T1 and T2 or between T1 and T3, or may control the inverter 34 in a predetermined control mode between T3 and T4 or between T3 and T5.

[0039] Through the above process, the heating temperature of the heating object W rises in a short time until it reaches the threshold temperature (desired bonding temperature) (T1 to T3 in FIG. 4), and then heating at the threshold temperature (bonding temperature) continues for a predetermined period of time (T3 to T5). During heating, pressure is applied to the heating object W. The heating removes the coating film W12 of the component W1 from around the core wire W11, and the heating and pressure thermocompression bond the core wire W11 to the electrode W21 of the component W2.

[0040] In the above control, the value of the first power, the value of the second power, the threshold temperature, the predetermined period, the switching mode of each switching element of the inverter 34, and the like may be identified and set by a previously conducted experiment, etc. For example, the receiving unit 42D may receive and set these parameters from outside the controller 40 (for example, from a user) via the I / O 44, etc.

[0041] The threshold temperature and the predetermined period may be specified by the user, and the first and second power values may be automatically set by the reception unit 42D. In this case, the reception unit 42D receives a specification of the bonding temperature and heating period during thermocompression bonding, which is specified from outside the controller 40 (e.g., a user) via the I / O 44 or the like. The bonding temperature and heating period are determined depending on the material of the heating target W, etc. The reception unit 42D sets the specified bonding temperature and heating period as the threshold temperature and heating period (stores them in the storage device 41). Thereafter, the power control unit 42B controls the switching of the switching elements of the inverter 34 of the power supply circuit 30 to gradually increase the power supplied to the heater tool 22, and the temperature measurement unit 42A measures the temperature of the heater tool 22 using the temperature sensor 25. The power control unit 42B sets the power consumption of the heater tool 22 when the temperature measured by the temperature measurement unit 42A reaches a certain threshold temperature (see the description of step S12 for the detection method) as the second power. The value of the first power may be set to any value higher than the value of the second power, or may be set to a fixed value that is always higher than the second power regardless of the value of the compression bonding temperature.

[0042] When the temperature sensor 25 is a thermocouple or the like, there is a delay in the timing at which the temperature of the heater tool 22 is actually detected by the temperature sensor 25 (FIG. 6). This delay is called a detection delay time. Due to this detection delay time, when the temperature of the heater tool 22 is changing, the temperature detected by the temperature sensor 25 and input to the controller 40 will be lower than the actual temperature of the heater tool 22. For this reason, it is advisable to take this detection delay time into consideration during thermocompression bonding.

[0043] The detection delay time is measured and set by any method. The detection delay time may be determined and set in advance through experiments or the like. The detection delay time may be set by the power control unit 42B. The power control unit 42B controls the inverter 34 to gradually increase the power supplied to the heater tool 22 (more specifically, the power consumption detected by the above method) and maintain it at the third power. The value of the third power may be the same as the first power or the second power, or may be another value. The power control unit 42B measures the time from the first timing when the supplied power (power consumption) reaches the third power. In parallel with the above control, the power control unit 42B monitors the temperature (heating temperature) of the heater tool 22 sequentially measured by the temperature measurement unit 42A and detects the second timing when the temperature becomes constant. The power control unit 42B sets the time from the first timing to the second timing as the detection delay time.

[0044] The temperature measurement unit 42A may measure the heating temperature by correcting the temperature detected by the temperature sensor 25 based on the detection delay time set above and obtaining the corrected temperature value as the heating temperature. The correction is performed when the supplied power is set to the first power. That is, the temperature measurement unit 42A performs the correction in step S13 of the thermocompression bonding process in FIG. 3. For example, in step S13, which is repeatedly performed, the temperature measurement unit 42A calculates the increase in the heating temperature per unit time, multiplies the increase by the detection delay time, and obtains the value obtained by multiplication as the correction value. The increase may be preset as a fixed value. After obtaining the correction value, in step S13, the temperature measurement unit 42A adds the correction value to the temperature value detected by the temperature sensor 25 and obtains the value obtained by this addition (the corrected temperature value) as the heating temperature.

[0045] The compression temperature may be corrected based on the detection delay time. For example, when the reception unit 42D receives a specification of the compression temperature during thermocompression bonding (the heating temperature at which the heating target W is heated), the reception unit 42D sets the compression temperature as a provisional temperature threshold. The power control unit 42B may correct this provisional temperature threshold based on the detection delay time set above, and perform the process of step S14 based on the corrected temperature threshold. In this case, for example, the temperature measurement unit 42A obtains the increase in heating temperature per unit time using a method similar to that described above. The power control unit 42B sets the value obtained by multiplying the increase in heating temperature per unit time obtained by the temperature measurement unit 42A by the detection delay time as a correction value, and sets the value obtained by subtracting the correction value from the provisional temperature threshold as the temperature threshold used in the comparison in step S14. The increase may be preset as a fixed value.

[0046] A process similar to the thermocompression bonding process may be performed using a dummy heating target W or without a heating target W, and a correction value taking into account the detection delay time, the increase in heating temperature per unit time, and the detection delay time may be derived from the heating temperatures sequentially measured by the temperature measurement unit 42A during the process. Then, during actual thermocompression bonding, a correction based on the correction value may be performed.

[0047] As described above, in this embodiment, the power control unit 42B increases the supplied power to the heating target W up to the first power and maintains it at the first power. Then, based on the heating temperature measured by the temperature measurement unit 42A reaching a predetermined threshold temperature, the power control unit 42B reduces the supplied power, which has been maintained at the first power, to the second power and maintains it at the second power, and then terminates heating of the heating target. The first power, which is greater than the second power, can quickly increase the temperature of the heater tool 22, and the subsequent second power can maintain the temperature of the heater tool 22 at a temperature corresponding to this second power. This allows the temperature of the heater tool 22, i.e., the heating temperature of the heating target W, to change over time in a manner similar to a top hat pattern (a time change that rises at the start of heating, remains constant for a certain period of time, and then drops, as shown in FIG. 5). This prevents the temperature of the heater tool 22 from becoming unnecessarily high and suppresses unnecessary deterioration of the heater tool 22. Furthermore, maintaining the temperature in a top hat pattern improves bonding and stabilizes the amount of heat generated during thermocompression bonding. In this way, this embodiment enables appropriate heating of the heating target W. Note that the power control unit 42B may perform pre-heating to heat the heater tool 22 to a certain extent before heating the heating target W, that is, before main heating in which the supplied power is increased to the first power.

[0048] When multiple heating targets W are sequentially thermocompression bonded, thermocompression bonding of the next heating target W may begin before the temperature of the heater tool 22 has sufficiently dropped. Conventionally, thermocompression bonding is performed by current control or the like, without taking into consideration the heating temperature of the heating target W. Therefore, if thermocompression bonding of the next heating target W begins before the temperature of the heater tool 22 has sufficiently dropped, there is a risk that the heating temperature during thermocompression bonding may rise more than necessary. In this embodiment, the power control unit 42B reduces the supplied power, which is maintained at the first power, to the second power based on the heating temperature measured by the temperature measurement unit 42A reaching a predetermined threshold temperature, thereby eliminating the above-mentioned inconvenience. This prevents unnecessary deterioration of the heater tool 22.

[0049] As described above, temperature measurement unit 42A may measure the heating temperature by correcting the temperature detected by temperature sensor 25 based on the detection delay time of temperature sensor 25, particularly during the period T1 to T3, and obtaining the corrected temperature value as the heating temperature of heating target W. This allows an accurate temperature to be measured even if temperature sensor 25 has a detection delay time.

[0050] As described above, power control unit 42B may correct the temperature received by reception unit 42D, which receives a designation of the temperature (desired bonding temperature) to which heating target W is heated, based on the detection delay time of temperature sensor 25, and use the corrected value as the threshold temperature. This allows an accurate temperature measurement even if there is a detection delay time in temperature sensor 25.

[0051] As described above, power control unit 42B terminates heating of the heating target when it detects that a predetermined period of time has elapsed since the heating temperature reached the threshold temperature. This allows the heating temperature to be maintained with simple processing, and the change in heating temperature over time becomes a time change with a shape similar to a top hat shape.

[0052] As described above, the power control unit 42B detects the power consumption of the heater tool 22 and uses the detected power consumption as a feedback value to feedback-control the power supplied to the heater tool 22. This configuration allows the supplied power to be changed between the first power and the second power through power feedback control. In particular, the heating temperature of the heater tool 22, i.e., the heating temperature of the heating target W, when the supplied power is the second power can be kept constant regardless of the resistance value of the heater tool 22. Therefore, even if the resistance value of the heater tool 22 changes due to deterioration, thermocompression bonding can be achieved at a desired temperature, achieving high-precision heating. The power control unit 42B may also control the supplied power through current or voltage feedback control using the current (current detected by the ammeter 91) or voltage (voltage detected by the voltmeter 92) output to the heater tool 22 as a feedback value. In this case, the power control unit 42B feedback-controls the current or voltage using the current value or voltage value corresponding to the first power and the second power as a target value so that the supplied power becomes the first power and the second power. The power control unit 42B may periodically measure the resistance value of the heater tool 22 and correct the second power (more specifically, the switching mode of each switching element of the inverter 34) based on the measured resistance value. For example, the power control unit 42B controls the power supply circuit 30 to supply power to the heater tool 22, derives the resistance of the heater tool 22 from the current and voltage at that time, and calculates a target voltage or current value for setting the power supplied to the heater tool 22 to the second power based on the derived resistance. When setting the power supplied to the heater tool 22 to the second power, the power control unit 42B may perform feedback control using the calculated target value. Feedback control using voltage or current eliminates the need for power calculation processing compared to feedback control using power, thereby reducing the processing burden of feedback control during heating.

[0053] The configuration of the above embodiment can be modified as appropriate. For example, the configuration of the power supply circuit 30 is arbitrary. Furthermore, at least a portion of the units 42A to 42D of the controller 40 may be configured using an ASIC (Application Specific Integrated Circuit) and / or an FPGA (Field Programmable Gate Array).

[0054] The present invention can be applied to a controller that controls the power supplied to a heating unit that heats a heating target with thermal energy corresponding to the power supply, and to a heating system generally equipped with the controller. For example, the present invention can be applied to controllers for various joining machines, such as resistance welding machines and soldering machines. In the above embodiment, a heater tool 22 is used as the heating unit. However, when the present invention is applied to a resistance welding machine, the heating unit is a pair of electrodes that pass a current through the heating target W according to the power supply. When the present invention is applied to a soldering machine, the heating unit is a heater tool that heats the heating target W according to the power supply. The heating unit can be a resistance heating element that generates heat by Joule heat corresponding to the power supply, and the heating system can be a system that heats the heating target by the heat generated by the resistance heating element. A space such as an incubation chamber can also be used as the heating unit. Furthermore, a laser can be used as the heating unit, and a laser welding system or laser cutting system can be used as the heating system. In the case of a laser, the heating temperature is the temperature of the heating target.

[0055] (Addendum) Configurations as examples of the above-described embodiments and modified examples are appended. The appended configurations can be combined with each other. The reference numerals in parentheses in the following appendix indicate an example of the correspondence between the elements described in the appendix and the elements of the above-described embodiments and modified examples, and are not intended to limit the elements described in the appendix to the elements of the above-described embodiments and modified examples to which the reference numerals in parentheses are appended. (Appendix 1) A controller (40) for controlling a heating unit (22) that heats a heating target (W) with thermal energy according to supplied power, a temperature measuring unit (42A) that measures a heating temperature when the heating unit heats the heating object using a temperature sensor (25); a power control unit (42B) that controls the supplied power based on the measured heating temperature, The power control unit When the heating target is heated by the heating unit, the supplied power is increased to a first power and maintained at the first power; based on the measured heating temperature reaching a predetermined threshold temperature, reducing the supplied power, which has been maintained at the first power, to a second power and maintaining the second power, and then terminating heating of the heating target. controller. (Appendix 2) the temperature measurement unit corrects the temperature detected by the temperature sensor based on a detection delay time of the temperature sensor, and obtains the corrected temperature value as the heating temperature. 10. The controller of claim 1. (Appendix 3) Further provided is a reception unit (42D) that receives a designation of a temperature to heat the heating object, the power control unit corrects the temperature received by the reception unit based on a detection delay time of the temperature sensor, and sets the corrected value as the threshold temperature. 3. The controller of claim 1 or 2. (Appendix 4) the power control unit terminates heating of the heating object when it detects that a predetermined period of time has elapsed since the heating temperature reached the threshold temperature. 4. The controller according to any one of Supplementary notes 1 to 3. (Appendix 5) the power control unit detects power consumption in the heating unit and performs feedback control of the supplied power using the detected power consumption as a feedback value. 5. The controller according to any one of appendices 1 to 4. (Appendix 6) the power control unit controls the supplied power by feedback-controlling the voltage or current using the voltage or current output to the heating unit as a feedback value. 5. The controller according to any one of appendices 1 to 4. (Appendix 7) A controller according to any one of Supplementary Notes 1 to 6; a joining machine including the heating unit, the joining machine joining a first component and a second component that constitute the heating target by heating the heating target with the heating unit; A heating system comprising: (Appendix 8) A program that causes a computer to function as the controller according to any one of appendices 1 to 7. (Appendix 9) A heating method for heating a heating target using a heating unit that heats the heating target with thermal energy corresponding to supplied power, comprising: increasing the supplied power to a first power and maintaining it at the first power; a step of reducing the supply power, which has been maintained at the first power, to a second power and maintaining the second power based on the fact that the heating temperature when the heating unit heats the heating target has reached a predetermined threshold temperature, and then terminating heating of the heating target; A heating method comprising:

[0056] (Scope of the present invention) Although the present invention has been described above with reference to the embodiments and modifications, the present invention is not limited to the above embodiments and modifications. For example, the present invention includes various modifications to the above embodiments and modifications that can be understood by a person skilled in the art within the scope of the technical concept of the present invention. The configurations listed in the above embodiments and modifications can be combined as appropriate within a range that does not contradict. Furthermore, the omission of each configuration is optional. [Explanation of symbols]

[0057] 10 heating system, 20 heater, 21 stage, 22 heating unit, 22 heater tool, 23 drive mechanism, 25 temperature sensor, 30 power supply circuit, 31 switch, 32 rectifier circuit, 33 smoothing capacitor, 34 inverter, 35 transformer, 36 rectifier unit, 40 controller, 41 storage device, 42 processor 42A...temperature measurement unit, 42B...power control unit, 42C...pressure control unit, 42D...reception unit, 43...main memory, 50...user interface, 51...display unit, 52...operation device, 91...ammeter, 92...voltmeter, E...external power supply, W...heating object, W1...components, W11...core wire, W12...coating film, W2...components, W21...electrodes.

Claims

1. A controller that controls a heating unit that heats a heating target with thermal energy according to supplied power, a temperature measuring unit that measures a heating temperature when the heating unit heats the heating target using a temperature sensor; a power control unit that controls the supplied power based on the measured heating temperature, The power control unit When the heating target is heated by the heating unit, the supplied power is increased to a first power and maintained at the first power; based on the measured heating temperature reaching a predetermined threshold temperature, the supply power maintained at the first power is reduced to a second power and maintained at the second power, and thereafter heating of the heating target is terminated. controller.

2. the temperature measurement unit corrects the temperature detected by the temperature sensor based on a detection delay time of the temperature sensor, and obtains the corrected temperature value as the heating temperature. The controller of claim 1 .

3. Further, a reception unit is provided to receive a designation of a temperature to which the heating object is heated, the power control unit corrects the temperature received by the reception unit based on a detection delay time of the temperature sensor, and sets the corrected value as the threshold temperature. The controller of claim 1 .

4. the power control unit terminates heating of the heating object when it detects that a predetermined period of time has elapsed since the heating temperature reached the threshold temperature. The controller of claim 1 .

5. the power control unit detects power consumption in the heating unit and performs feedback control of the supplied power using the detected power consumption as a feedback value. The controller of claim 1 .

6. the power control unit controls the supplied power by feedback-controlling the voltage or current using the voltage or current output to the heating unit as a feedback value. The controller of claim 1 .

7. The controller of claim 1; a joining machine including the heating unit, the joining machine joining a first component and a second component that constitute the heating target by heating the heating target with the heating unit; A heating system comprising:

8. A program that causes a computer to function as the controller according to claim 1.

9. A heating method for heating a heating target using a heating unit that heats the heating target with thermal energy corresponding to supplied power, comprising: increasing the supplied power to a first power and maintaining it at the first power; a step of reducing the supply power, which has been maintained at the first power, to a second power and maintaining the second power based on the fact that the heating temperature when the heating unit heats the heating target has reached a predetermined threshold temperature, and then terminating heating of the heating target; A heating method comprising:

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