Information processing apparatus, substrate processing system, and manufacturing method of article

Abstract

To provide an information processing apparatus capable of outputting information on inter-device differences regarding components configured in multiple devices.SOLUTION: The information processing apparatus has: a processing unit for estimating, when an abnormality is detected in a first device, a first component that is a cause of the abnormality occurring in the first device based on first information in which the abnormality is associated with at least one component; and a generation unit for generating, based on the estimation by the processing unit, inter-device component information for displaying on a display unit in which information on an exchange history of the first component in the first device and information on an exchange history of a second component in a second device corresponding to the first component are associated.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an information processing apparatus, a substrate processing system, and a method for manufacturing an article. [Background technology]

[0002] When multiple semiconductor manufacturing devices are used in parallel on a semiconductor manufacturing line, there is known a technique for monitoring the components of each device. Patent Document 1 discloses an anomaly detection system that compares the yields of multiple manufacturing devices used in parallel for each period when each device was used, and extracts devices that tend to have significantly lower yields than the other manufacturing devices. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2005-32925 Summary of the Invention [Problem to be solved by the invention]

[0004] However, with the method described in Patent Document 1, in devices with a large number of component parts, it is difficult to grasp component information such as serial numbers and change information (correction number information) due to component improvements or fine adjustments, making it difficult to ensure traceability. Furthermore, the investigation to grasp component change information and current component information is a manual process performed by humans, which takes time and may lead to errors. Furthermore, it is not possible to grasp all the information about the components configured in devices currently being used on the production line, and there is a possibility that components not intended by the designer may be configured.

[0005] Furthermore, parts may have been replaced during maintenance, etc. When information regarding inter-device differences between parts configured in multiple pieces of equipment installed in a semiconductor manufacturing line is required, there is a problem in that it is not possible to respond quickly because the system does not have a function to output inter-device differences between parts of multiple pieces of equipment.

[0006] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide an information processing device capable of outputting information relating to inter-device differences regarding components configured in a plurality of devices. [Means for solving the problem]

[0007] The information processing device of the present invention is characterized by having a processing unit that, when an abnormality is detected in a first device, estimates a first component that is the cause of the abnormality that occurred in the first device based on first information in which the abnormality corresponds to at least one component, and a generation unit that generates inter-device component information to be displayed on a display unit that corresponds information on the replacement history of the first component in the first device with information on the replacement history of a second component in a second device that corresponds to the first component, based on the estimation by the processing unit. [Effects of the Invention]

[0008] The present invention can provide an information processing device capable of outputting information regarding inter-device differences regarding components configured in a plurality of devices. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a diagram illustrating a configuration of an information processing device according to a first embodiment. [Figure 2] FIG. 10 is a diagram illustrating an example of a defective part candidate list. [Figure 3] FIG. 10 is a diagram illustrating an example of a part replacement history. [Figure 4] FIG. 10 is a diagram illustrating an example of inter-device difference information. [Figure 5] FIG. 4 is a flowchart showing a process for determining inter-device difference information according to the first embodiment. [Figure 6] FIG. 4 is a diagram illustrating an example of inter-device difference information according to the first embodiment. [Figure 7] FIG. 4 is a diagram illustrating an example of inter-device difference information according to the first embodiment. [Figure 8] FIG. 10 is a diagram illustrating a method for generating an abnormal part candidate list according to the second embodiment. [Figure 9]FIG. 10 is a diagram illustrating a method for generating an abnormal part candidate list according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] First Embodiment FIG. 1 shows a block diagram of an information processing device 150 according to a first embodiment of the present invention. The information processing device 150 includes a defective part candidate list storage unit 104 , a device event storage unit (history holding unit) 105 , a part replacement history processing unit 106 , a calculation unit (processing unit, generating unit) 110 , and a display unit 111 .

[0011] A first apparatus 100, a second apparatus 200, and an n-th apparatus 210 are installed in parallel as multiple manufacturing apparatuses in a semiconductor manufacturing line. The first apparatus 100, the second apparatus 200, and the n-th apparatus 210 are apparatuses having the same specifications, but the components incorporated within the apparatuses may have different design correction numbers or different serial numbers. The first apparatus 100 has a unit 101 and an abnormality detection unit 102 that detects an abnormality in the unit 101. When an abnormality occurs in the unit 101 in the first apparatus 100, the abnormality detection unit 102 outputs (notifies) abnormality detection information to the calculation unit 110 of the information processing device 150. The abnormality detection information is information that includes at least the type of abnormality that has occurred.

[0012] When a part replacement of unit 101 occurs during maintenance and inspection work of first apparatus 100 in a semiconductor production line, part replacement information 120 related to the part replacement is stored in apparatus event storage unit 105 of information processing device 150. Part replacement information 120 may be saved manually or automatically. Part replacement history processing unit 106 of information processing device 150 generates a part replacement history of unit 101 of first apparatus 100 based on part replacement information 120 stored in apparatus event storage unit 105, or updates and saves an already generated part replacement history.

[0013] Even when replacement of a part of the unit 101 occurs during maintenance and inspection work on another second device 200 on the same production line, the part replacement information 202 is stored in the device event storage unit 105. Thereafter, the part replacement history processing unit 106 generates a part replacement history of the unit 201 of the second device 200 based on the part replacement information 202 stored in the device event storage unit 105, or updates and stores an already generated part replacement history.

[0014] Similarly, when replacement of a part of a unit 211 occurs during maintenance and inspection work on another n-th device 210 on the same production line, part replacement information 212 is stored in the device event storage unit 105. Thereafter, the part replacement history processing unit 106 generates a part replacement history of the unit 211 of the n-th device 210 based on the part replacement information 212 stored in the device event storage unit 105, or updates and stores an already generated part replacement history.

[0015] The calculation unit 110 can generate and output inter-device part information (inter-device part information) between the first device 100, the second device 200, and the n-th device 210 based on the part replacement history stored in the part replacement history processing unit 106. The inter-device part information generated by the calculation unit 110 can be output to the display unit 111 and displayed, for example.

[0016] The abnormal part candidate list storage unit 104 of the information processing device 150 stores an abnormal part candidate list (first information) which is a list of parts that may be the cause of a certain abnormality (first abnormality) and is created arbitrarily by the user. The abnormal part candidate list may be created arbitrarily by the user based on, for example, past failure data, abnormality data, etc.

[0017] 2 shows an example of an abnormal part candidate list stored in the abnormal part candidate list storage unit 104. For example, the abnormal part candidate list storage unit 104 stores abnormal part correspondence table 1 and abnormal part correspondence table 2 as abnormal part candidate lists. Here, the abnormal part correspondence table shows two types of abnormalities, with parts that may be the cause of the abnormalities listed, but the number of abnormalities is not limited to two, and there may be multiple types of abnormalities, or any number of abnormalities greater than one.

[0018] Abnormal component correspondence table 1 lists components that may be the cause of abnormality 1 if it occurs in unit 101 of first device 100, unit 201 of second device 200, or unit 211 of nth device 210. In the example of FIG. 2, the components that may be the cause of abnormality 1 are shown to be component 1, component A, and component α. There is no limit to the number of components that may be set as components that may be the cause of abnormality 1, and the user can set any number of components.

[0019] Similarly, abnormal part correspondence table 2 lists parts that may be the cause of abnormality 2, which is different from abnormality 1, when it occurs in unit 101 of first device 100, unit 201 of second device 200, or unit 211 of nth device 210. Here, it shows that the parts that may be the cause of abnormality 2 are part 2, part B, and part β.

[0020] Here, in the example shown in FIG. 2, the parts listed in Abnormal Parts Correspondence Table 1 and Abnormal Parts Correspondence Table 2 are illustrated as different parts, but the same parts may be listed. For example, part 1 may be included in both Abnormal Parts Correspondence Table 1 and Abnormal Parts Correspondence Table 2. Furthermore, the abnormal parts correspondence tables are created and updated based on design information and the equipment history such as past maintenance and replacement. This does not necessarily deny the possibility that parts other than those listed in the abnormal parts correspondence tables may be the cause of the abnormality.

[0021] 3 shows an example of a part replacement history created by part replacement history processing unit 106 based on part replacement information stored in equipment event storage unit 105. Part replacement history processing unit 106 creates a part replacement history based on the part replacement information stored in equipment event storage unit 105 in response to a request from a user or in response to input of failure event information from, for example, first equipment 100 included in the semiconductor production line.

[0022] In the example shown in FIG. 3, the part replacement history includes part configuration information 160 and part replacement information 161, each of which includes a date and in-device part information. Part configuration information 160 indicates that part 1 was configured as a unit on date 1, when the first device was first installed. Part replacement information 161 indicates that part 1 of the unit was replaced with part 1' on date 2, which was later than date 1. Part configuration information 160 and part replacement information 161 may be recorded based on, for example, a vendor's shipping record or a user's installation record. While a date is used as an example of data specifying the timing of part replacement, the present invention is not limited to this, and time may also be recorded in addition to the date.

[0023] When abnormality detection information indicating that the abnormality detection unit 102 of the first device 100 has detected an abnormality is input, the calculation unit (processing unit) 110 compares the content of the abnormality held in the abnormal part candidate list stored in the abnormal part candidate list storage unit 104 with the content of the abnormality in the abnormality detection information.

[0024] If the abnormal part candidate list contains an abnormality that matches the abnormality detection information, it is checked whether or not part information that matches (corresponds to) the part registered in the abnormal part candidate list is included in part configuration information 160 and part replacement information 161. When an abnormality is detected in first device 100 through this matching by calculation unit 110, it is possible to estimate the part that may be the cause of the abnormality that occurred in first device 100 based on the first information in which the abnormality corresponds to at least one part. Here, estimating the part that may be the cause of the abnormality refers to presenting one or more parts that may be the cause of the abnormality. If the part configuration information 160 and part replacement information 161 relating to the first device 100 contain matching (corresponding) parts, the calculation unit 110 displays the part replacement history (FIG. 3) of the first device 100 on the display unit 111.

[0025] Based on the part replacement information of the first device 100, the second device 200, and the n-th device 210 stored in the device event storage unit 105, the calculation unit (generation unit) 110 generates inter-device difference information regarding the part information configured in each device, and can output and display this information on, for example, the display unit 111. This allows the user to recognize the inter-device differences in the component parts, and can also check, for example, which parts may be the cause of an abnormality in the devices, or whether or not there is a part that may be the cause of the abnormality.

[0026] 4 shows an example of inter-device difference information generated by the calculation unit 110 based on the part replacement information of the first device 100, the second device 200, and the nth device 210 stored in the device event storage unit 105. This can be acquired as the latest information of the part replacement history information generated by the part replacement history processing unit 106. This example shows that the first device 100, the second device 200, and the nth device 210 each have a unit, and that currently the unit of the first device 100 is configured with part 1 (first part), the unit of the second device 200 is configured with part 1' (second part), and the unit of the nth device 210 is configured with part 1.

[0027] It can also be seen that the unit of the second device 200 has a history of replacing part 1 with part 1' based on the part replacement information stored in the device event storage unit 105. If part 1 is an old product and part 1' is a new product, it can also be shown that the first device 100 and the second device 200 are configured with old or possibly defective parts.

[0028] 5 shows a flowchart of processing related to part replacement history information and inter-device difference information, which is executed by the calculation unit 110 of the information processing device 150. This processing is started when the information processing device 150 is activated, and may be executed repeatedly. Alternatively, it may be executed when a command requesting the start of processing is input from an input unit (not shown).

[0029] When the process starts, in step S1, it is determined whether a command requesting the start of the process has been input from an input unit (not shown). If an input has been input, the process proceeds to step S2, and if no input has been input, the process proceeds to step S5. Here, the process to be started is assumed to be a process of generating at least one of part replacement history information and inter-device difference information and displaying it on display unit 111. However, the present invention is not limited to this. Instead of displaying the generated information on display unit 111, at least one of part replacement history information and inter-device difference information may be output as a signal, or may be made visible to the user on a display device external to information processing device 150.

[0030] Furthermore, a command to start processing can be input from an input unit (not shown) at a desired timing by the user of the information processing device 150. For example, when an abnormality occurs in a certain device on a certain semiconductor manufacturing line, it may be necessary to collect data on similar abnormalities or to take measures for equipment maintenance in other devices on the same semiconductor manufacturing line or in similar devices on other semiconductor manufacturing lines.

[0031] In step S2, based on the input command, at least one of generating part replacement history information by the part replacement history processing unit 106 and generating inter-device difference information by the calculation unit 110 is executed, and the process proceeds to step S3. In step S2, for example, if an abnormality has occurred during the period from any date specified by the user to the present, information about the abnormality is generated. Also, if a specific abnormality is included in the abnormal part candidate list, information about the abnormality is generated. Also, if a part that may be the cause of an abnormality in the abnormal part candidate list is included in the part replacement history, corresponding data is generated. If none of these conditions apply, no data is generated.

[0032] In step S3, it is determined whether at least one of part replacement history information and inter-device difference information has been generated based on the input command. If data has been generated in step S2, the process proceeds to step S4; if not, the process ends.

[0033] In step S4, at least one of the part replacement history information and the inter-device difference information generated based on the input command is displayed on the display unit 111, and the process ends.

[0034] In step S5, if calculation unit 110 has not received abnormality detection information from abnormality detection unit 102 of first device 100, the process returns to step S1, and if calculation unit 110 has received abnormality detection information, the process proceeds to step S6. Here, the abnormality detection information is not limited to information transmitted from abnormality detection unit 102 of first device 100, and may be information transmitted from an abnormality detection unit included in second device 200 or nth device 210.

[0035] In step S6, similarly to step S2, at least one of part replacement history information is generated by part replacement history processing unit 106 and inter-device difference information is generated by calculation unit 110. What differs from step S2 is that, because an abnormality has occurred, part replacement history information related to the abnormality is generated by part replacement history processing unit 106, and inter-device difference information is generated by calculation unit 110. That is, in step S6, which is reached after receiving the abnormality detection notification from step S5, inter-device difference information related to the abnormality that has occurred in at least one of first device 100, second device 200, and nth device 210 is generated.

[0036] In step S6, for example, if there is no part replacement history information related to the abnormality, or if there is no abnormal part candidate list related to the abnormality and therefore inter-machine difference information related to the corresponding part cannot be generated, data indicating that there is no corresponding data is generated. This allows the user to recognize that the abnormality that has occurred is an abnormality in the same production line that has not yet been associated with a part that may be the cause of the abnormality. Following step S6, the process proceeds to step S4.

[0037] 4 is information that lists component information about the units of the first device 100, the second device 200, and the nth device 210 so that it can be compared as an inter-device difference. The calculation unit 110 generates the inter-device difference information based on data of component replacement history 301 of the first device 100, component replacement history 302 of the second device 200, and component replacement history 303 of the nth device 210. This inter-device difference information allows the user to check the latest state of the components installed in the units of each device at that time.

[0038] FIG. 6(1) is an example of inter-device difference information indicating that the unit of the first device 100 is configured with part 1, the unit of the second device 200 is configured with part 1', and the unit of the n-th device 210 is configured with part 1''. However, the inter-device difference information in the present invention is not limited to being output in this format. For example, any device may be used for comparison, and it may be possible to select the device to be compared based on various conditions, as shown in the three examples of (2) to (4) in FIG. 6. For example, it may be possible to select a device that includes a part included in the abnormal part candidate list, and generate data that includes only that device.

[0039] Furthermore, the inter-device difference information may be configured to include chronological part information. FIG. 7 shows an example in which the inter-device difference information includes part information of the units of each device as of date 1, date 2, date 3, and date 4 in chronological order. On date 1, it shows that part 1 is used in the unit of the first device 100, part 1' is used in the unit of the second device 200, and part 1" is used in the unit of the n-th device 210.

[0040] On date 2, which is later than date 1, part 1 of the unit of the first device 100 is shown to have been replaced with part 1'. On date 3, which is later than date 2, part 1' of the unit of the second device 200 is shown to have been replaced with part a, and on date 4, which is later than date 3, part 1'' of the unit of the nth device 210 is shown to have been replaced with part α.

[0041] Furthermore, the date may be the date of part replacement stored in the part replacement information in the device event storage unit 105, or a date unrelated to the date of part replacement stored in the part replacement information may be specified. The number of dates to be output may also be freely specified by the user. The device or number of devices to be output may also be freely specified by the user.

[0042] The information processing device of the present invention has the configuration of this embodiment, and when inter-machine difference information regarding components configured in the device is required, it is possible to quickly output inter-machine difference information for components. This makes it possible, for example, to quickly develop countermeasures and responses for devices in the same system based on abnormality information for a certain device, and can bring about effects such as preventing abnormalities from occurring, checking the situation early, and maintaining equipment and quality, improving yield and productivity.

[0043] Second Embodiment An information processing device 450 according to the second embodiment of the present invention will be described with reference to Figures 8 and 9. Descriptions of devices that are the same as those in the information processing device of the first embodiment will be omitted, and only different configurations will be described.

[0044] The information processing device 450 of this embodiment differs from the information processing device 150 of the first embodiment in that it has an abnormal part candidate list generation unit (list generation unit) 460. The abnormal part candidate list generation unit 460 updates the abnormal part candidate list by adding a new part that may be the cause of a certain abnormality.

[0045] 9, the abnormal part candidate list generation unit 460 will now be described for updating the abnormal part candidate list by adding a new part that may be the cause of an abnormality. The abnormal part candidate list generation unit 460 updates the abnormal part candidate list based on part replacement information 1, part replacement information 2, and abnormality information. Here, part replacement information 1, part replacement information 2, and abnormality information are created by part replacement history processing unit 106 based on the part replacement information stored in device event storage unit 105, and the abnormal part candidate list generation unit 460 acquires this information via calculation unit 110.

[0046] Here, date 3 in part replacement information 1, date 4 in part replacement information 2, and date 5 in the abnormality information are the dates on which the respective events occurred, and in chronological order they are date 3, date 5, date 4. From this, it can be seen that part Z was being used in the unit of the first device on date 3, but then abnormality 1 occurred on date 5, and then part Y was being used on date 4. It shows that abnormality 1 occurred when part Z was being used in the unit of the first device, part Z was replaced with part Y, and the unit is now operating without any abnormalities.

[0047] Based on this information and the abnormal part candidate list for abnormality 1 stored in the abnormal part candidate list storage unit 104, the abnormal part candidate list generation unit 460 adds part Z, which is not yet in the abnormal part candidate list for abnormality 1, to the list to update it. The process by the abnormal part candidate list generation unit 460 to add a new part to the abnormal part candidate list may be performed every time an abnormality event occurs, or may be performed when a user issues a command via an input unit (not shown).

[0048] Furthermore, the defective part candidate list generation unit 460 may use data from any of the first device 100, the second device 200, and the nth device 210 of this embodiment. Furthermore, although the present embodiment has been described as including three devices, the present invention is not limited to this number and any number of devices may be included. In other words, the defective part candidate list may be generated based on the replacement history of parts in at least one of the first device 100, the second device 200, and the nth device 210.

[0049] Furthermore, the first apparatus 100, the second apparatus 200, and the n-th apparatus 210 may be apparatuses installed in the same semiconductor manufacturing line, or may be apparatuses installed in different semiconductor manufacturing lines.

[0050] [Production method] Next, a method for manufacturing an article using a substrate processing system including the information processing apparatus according to the first or second embodiment will be described.

[0051] The products manufactured here include semiconductor devices, display devices, color filters, optical components, and MEMS (Micro Electro Mechanical Systems). For example, semiconductor devices are manufactured through a front-end process in which an image of a master pattern is projected onto a substrate to create a circuit pattern on the substrate, and a back-end process that includes processing steps to complete the circuit chips created in the front-end process as products.

[0052] The pre-processing includes an exposure process in which a substrate coated with a photosensitive agent is exposed using a substrate processing system equipped with an information processing apparatus according to the first or second embodiment, and a development process in which the photosensitive agent exposed by the exposure process is developed. Then, by using the developed photosensitive agent pattern as a mask to carry out etching processes, ion implantation processes, etc., a circuit pattern is formed on the substrate.

[0053] By repeating these steps of exposure, development, etching, etc., a circuit pattern consisting of multiple layers is formed on the substrate. In the post-process, the substrate on which the circuit pattern is formed is diced, and chip mounting, bonding and inspection processes are carried out.

[0054] In a production line for manufacturing these articles, a plurality of manufacturing apparatuses (exposure apparatuses) are installed in parallel. The plurality of manufacturing apparatuses may include the information processing apparatus described in the first or second embodiment within the apparatus, or may be connected to the information processing apparatus located outside the plurality of manufacturing apparatuses.

[0055] According to the method for manufacturing articles of this embodiment, it is possible to output information regarding differences between devices regarding parts configured in multiple devices, provide information related to device abnormalities, and enable rapid response to abnormalities, thereby providing an environment for manufacturing articles of higher quality and higher productivity than before.

[0056] Although the preferred embodiments have been described above, the present invention is not limited to these embodiments and various modifications and changes are possible within the scope of the gist thereof.

[0057] The disclosure of this embodiment includes the following configurations and methods. (Configuration 1) a processing unit that, when an abnormality is detected in a first device, estimates a first part that is the cause of the abnormality that occurred in the first device, based on first information in which the abnormality corresponds to at least one part; and a generation unit that generates inter-device part information to be displayed on a display unit that associates information on a replacement history of the first part in the first device with information on a replacement history of a second part in a second device that corresponds to the first part, based on the estimation by the processing unit. (Configuration 2) 2. The information processing apparatus according to configuration 1, wherein the inter-device part information is information related to an abnormality that has occurred in at least one of the first device and the second device. (Configuration 3) 3. The information processing device according to configuration 1 or 2, wherein the first information is generated based on a track record of replacement of a part of at least one of the first device and the second device. (Configuration 4) 4. The information processing device according to any one of configurations 1 to 3, wherein the first device and the second device are devices installed in parallel on the same manufacturing line. (Configuration 5) 4. The information processing device according to any one of configurations 1 to 3, wherein the first device and the second device are devices installed in different manufacturing lines. (Configuration 6) 6. The information processing device according to any one of configurations 1 to 5, further comprising a storage unit that stores first information that associates a first abnormality that may occur in the first device and the second device with one or more components that may be the cause of the first abnormality. (Configuration 7) a history storage unit that stores a history of replacement of the first part of the first device and a history of replacement of the second part of the second device; The information processing device according to any one of configurations 1 to 6, wherein the processing unit generates the inter-device part information including history information of the first part of the first device and history information of the second part corresponding to the first part of the second device corresponding to the first device, based on the history stored in the history storage unit. (Configuration 8) The information processing device according to any one of configurations 1 to 7, characterized in that the inter-device component information further includes information on components corresponding to the first components, which are components of one or more devices corresponding to the first device. (Configuration 9) 10. The information processing device according to any one of configurations 1 to 9, wherein, when a signal notifying the occurrence of a first abnormality is input from the first device, the processing unit generates the inter-device component information for one or more components corresponding to the first abnormality. (Configuration 10) The information processing device according to any one of configurations 1 to 3, characterized in that the first information includes information that corresponds one or more types of abnormalities of the first device with one or more components that may be the cause of each of the one or more types of abnormalities. (Configuration 11) a history storage unit that stores a history of replacement of the first part of the first device; 4. The information processing device according to any one of configurations 1 to 3, further comprising a list generation unit that generates and updates the first information based on the history stored in the history storage unit. (Configuration 12) 13. The information processing apparatus according to claim 1, wherein the first device and the second device are exposure devices that project an image of a pattern of an original onto a substrate and expose the substrate to light. (Configuration 13) 13. The information processing device according to claim 12, A substrate processing system including the first device and the second device. (Method 1) exposing the substrate using the substrate processing system according to Configuration 13; developing the exposed substrate; processing the developed substrate to obtain an article; A method for manufacturing an article, comprising: [Explanation of symbols]

[0058] 100 1st device 200 2nd device 110 Calculation unit (processing unit, generation unit) 111 Display section 150 Information processing equipment

Claims

1. a processing unit that, when an abnormality is detected in a first device, estimates a first part that is the cause of the abnormality that occurred in the first device, based on first information in which the abnormality corresponds to at least one part; and a generation unit that generates inter-device part information to be displayed on a display unit that associates information on the replacement history of the first part in the first device with information on the replacement history of a second part in a second device that corresponds to the first part, based on the estimation by the processing unit.

2. 2. The information processing apparatus according to claim 1, wherein the inter-device part information is information relating to an abnormality that has occurred in at least one of the first device and the second device.

3. 2 . The information processing apparatus according to claim 1 , wherein the first information is generated based on a record of replacement of parts of at least one of the first device and the second device.

4. 2. The information processing apparatus according to claim 1, wherein the first device and the second device are devices installed in parallel on the same manufacturing line.

5. 2. The information processing apparatus according to claim 1, wherein the first device and the second device are installed in different manufacturing lines.

6. 2. The information processing device according to claim 1, further comprising a storage unit for holding first information that associates a first abnormality that may occur in the first device and the second device with one or more components that may be the cause of the first abnormality.

7. a history storage unit that stores a history of replacement of the first part of the first device and a history of replacement of the second part of the second device; The information processing device according to claim 1, characterized in that the processing unit generates the inter-device part information including information on the history of the first part of the first device and information on the history of the second part corresponding to the first part of the second device corresponding to the first device, based on the history stored in the history storage unit.

8. The information processing apparatus according to claim 1 , wherein the inter-device part information further includes information on parts that correspond to the first device and are parts of one or more devices corresponding to the first device.

9. 2. The information processing device according to claim 1, wherein when a signal notifying the occurrence of a first abnormality is input from the first device, the processing unit generates the inter-device component information for one or more components corresponding to the first abnormality.

10. 2. The information processing apparatus according to claim 1, wherein the first information includes information that corresponds one or more types of abnormalities of the first device with one or more components that may be the cause of each of the one or more types of abnormalities.

11. a history storage unit that stores a history of replacement of the first part of the first device; 2. The information processing apparatus according to claim 1, further comprising a list generating unit that generates and updates the first information based on the history stored in the history storage unit.

12. 2. The information processing apparatus according to claim 1, wherein the first device and the second device are exposure devices that project an image of a pattern of an original onto a substrate and expose the substrate.

13. The information processing device according to claim 12; A substrate processing system including the first device and the second device.

14. exposing the substrate using the substrate processing system of claim 13; developing the exposed substrate; processing the developed substrate to obtain an article; A method for manufacturing an article, comprising:

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