Image analyzer, analyzer, shape measuring device, image analysis method, measurement condition determination method, shape measuring method, and program

Abstract

To easily set a measurement condition according to which shape measurement can be accurately performed.SOLUTION: An image analyzer comprises: an image analysis unit 83 that, when an image formed by light projected on an object to be measured is picked up, detects an image inappropriate for shape measurement of the object to be measured on the basis of design information of and a measurement condition for the object to be measured; and an output unit 88 that outputs detection result information that is information based on a result of detection performed by the image analysis unit 83.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an image analysis device, an analysis device, a shape measurement device, an image analysis method, a measurement condition determination method, a shape This invention relates to a method and program for measuring the state of a vehicle. [Background technology]

[0002] For example, as shown in Patent Document 1, a shape measuring device includes a measuring light source that projects a measuring light onto an object to be measured. an imaging unit that captures an image of the measurement light projected onto the object to be measured and outputs image data; The shape of the test object is determined by the light section method based on the position of the image of the measurement light in the image data. The image of the measurement light captured by the imaging unit is projected onto the object to be measured. Therefore, when capturing an image of the measurement light, Measurement conditions are set in advance before imaging is performed, allowing accurate shape measurement. There is a demand for measurement conditions to be easily set. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-68654 Summary of the Invention

[0004] According to a first aspect of the present invention, an image analysis device includes an image analysis unit that analyzes an image assumed to be captured by light projected onto an object to be measured based on design information and measurement conditions of the object to be measured, and an output unit that outputs result information based on the analysis results of the image analysis unit, wherein the result information includes information regarding an image that is inappropriate for measuring the shape of the object to be measured, and the image analysis unit calculates the trend of change in the evaluation result of the inappropriate image assumed to be changed without receiving an instruction from an operator to evaluate the inappropriate image assumed to be changed when the measurement conditions are changed, and the output unit outputs change information indicating the trend of change in the evaluation result of the inappropriate image based on the calculation results of the image analysis unit as information regarding the inappropriate image.

[0005] According to a second aspect of the present invention, an analysis device comprises the image analysis device according to the first aspect and a display device that displays the result information.

[0006] According to a third aspect of the present invention, a shape measuring device comprises an analysis device according to the second aspect, an input unit that accepts input from an operator, an optical probe having a projection unit that projects light onto the object to be measured and an imaging unit that captures an image formed by the light projected onto the object to be measured, and a condition setting unit that sets the measurement conditions based on input to the input unit.

[0007] According to a fourth aspect of the present invention, an image analysis method includes an image analysis step of analyzing an image assumed to be captured by light projected onto an object to be measured based on design information and measurement conditions of the object to be measured, and an output step of outputting result information based on the analysis results of the image analysis step, wherein the result information includes information regarding an image that is inappropriate for measuring the shape of the object to be measured, and in the output step, change information indicating the trend of change in the evaluation result of the inappropriate image based on the trend of change in the evaluation result of the inappropriate image assumed to be changed when the measurement conditions are changed is output as information regarding the inappropriate image, without receiving an instruction from an operator to evaluate the inappropriate image assumed to be changed when the measurement conditions are changed, the change information being calculated in the image analysis step.

[0008] According to a fifth aspect of the present invention, a measurement condition determination method includes an image analysis method according to the fourth aspect, and a measurement condition determination step of determining the measurement conditions based on the result information output in the output step.

[0009] According to a sixth aspect of the present invention, a shape measurement method includes the measurement condition determination method according to the fifth aspect, and a shape measurement step of measuring the shape of the object to be measured under the measurement conditions determined in the measurement condition step.

[0010] According to a sixth aspect of the present invention, a program causes a computer to execute the image analysis method according to the fourth aspect. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a diagram showing the appearance of a shape measuring instrument according to a first embodiment. [Figure 2] 1 is a schematic diagram showing a general configuration of a shape measuring device according to an embodiment of the present invention; [Figure 3A] FIG. 1 is a block diagram of an analysis device according to an embodiment of the present invention. [Figure 3B] 10 is a flowchart showing a flow of shape measurement according to the present embodiment. [Figure 4] 1A to 1C are diagrams illustrating an example of an operation for measuring the shape of an object to be measured by a shape measuring device. [Figure 5A] FIG. 2 is a schematic diagram illustrating light incident on the imaging device. [Figure 5B] FIG. 2 is a schematic diagram illustrating light incident on the imaging device. [Figure 5C] FIG. 10 is a diagram showing an example of an image actually captured by the imaging device. [Figure 6] 10 is a flowchart showing an analysis method performed by the image analysis execution unit. [Figure 7] 10 is a flowchart showing a method for evaluating a detection unit according to the present embodiment. [Figure 8] FIG. 10 is a diagram illustrating an example of redevelopment. [Figure 9A] FIG. 10 is a diagram illustrating an example of a menu image. [Figure 9B] FIG. 10 is a diagram for explaining a scan margin. [Figure 10] FIG. 10 is a diagram showing an example of a measurement check result screen. [Figure 11] FIG. 10 is a diagram showing an example of a measurement check result screen. [Figure 12] 1 is a flowchart illustrating a flow for setting measurement conditions according to the present embodiment. [Figure 13] FIG. 10 is a diagram showing an example of a measurement check result screen according to a modified example of the first embodiment. [Figure 14] FIG. 10 is a diagram showing an example of a measurement check result screen according to a modified example of the first embodiment. [Figure 15] FIG. 10 is a diagram showing an example of a measurement check result screen according to a modified example of the first embodiment. [Figure 16] FIG. 10 is a diagram showing an example of a measurement check result screen according to a modified example of the first embodiment. [Figure 17] FIG. 10 is a diagram showing an example of a measurement check result screen according to a modified example of the first embodiment. [Figure 18A] FIG. 10 is a diagram showing an example of a measurement check result screen according to a modified example of the first embodiment. [Figure 18B] FIG. 10 is a diagram showing an example of a measurement check result screen according to a modified example of the first embodiment. [Figure 18C] FIG. 10 is a diagram showing an example of a measurement check result screen according to a modified example of the first embodiment. [Figure 19] FIG. 10 is a diagram showing an example of a measurement check result screen according to a modified example of the first embodiment. [Figure 20] FIG. 10 is a diagram showing an example of a measurement check result screen according to a modified example of the first embodiment. [Figure 21] FIG. 10 is a block diagram of an analysis device according to a second embodiment. [Figure 22] 10 is a flowchart illustrating a flow for setting measurement conditions according to the third embodiment. [Figure 23] FIG. 1 is a block diagram of a structure manufacturing system. [Figure 24] 10 is a flowchart showing a processing flow by the structure manufacturing system. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The components in the form include those that a person skilled in the art can easily imagine, those that are substantially the same, or Furthermore, the components disclosed in the following embodiments may be combined as appropriate. It is possible to match.

[0013] In the following explanation, an XYZ orthogonal coordinate system is set up, and the following points are referenced. The positional relationship of each part will now be described. The Z-axis direction is set, for example, vertically, and the X-axis direction is set, for example, vertically. The X and Y axis directions are set, for example, parallel to the horizontal direction and perpendicular to each other. The rotation (tilt) directions around the X, Y, and Z axes are called the θX, θY, and θZ axis directions, respectively. Let's say.

[0014] (First embodiment) FIG. 1 is a diagram showing the appearance of a profile measuring device 1 according to a first embodiment. 1 is a schematic diagram showing a general configuration of a shape measuring device 1 according to an embodiment.

[0015] The shape measuring device 1 uses, for example, a light cutting method to measure the three-dimensional shape of an object to be measured (object M). The shape measuring device 1 is a device for measuring the fundamental shape of a target object. The shape measuring device 1 includes a probe 3, an analyzing device 4, and a holding and rotating device 7. The shape measuring device 1 includes a base BS The optical probe 3 captures an image of the object M to be measured held by the holding and rotating device 7 provided in the In this embodiment, the probe moving device 2 and the holding and rotating device 7 are optical probes. This serves as a movement mechanism for moving the probe 3 and the object to be measured M relative to each other.

[0016] The probe moving device 2 moves the optical probe 3 to move the object to be measured M and the optical probe. This is to adjust the relative position and attitude with respect to the robot arm 3.

[0017] The relative position is the position of the optical probe 3 relative to the object M to be measured. This is the relative position between the measurement object M and the optical probe 3. The relative position is determined by the equipment of the optical probe 3. The position (coordinate) of the measurement target M is in the X-axis, Y-axis, and Z-axis directions. It changes when there is a change in at least one of the directions.

[0018] The relative attitude is the relative angle of the optical probe 3 with respect to the object M to be measured, in other words, , the relative posture (relative angle) between the object to be measured M and the optical probe 3. The orientation of the device provided in the probe 3 is different from the orientation of the object to be measured M in the θX axis direction, the θY axis direction, and It changes when there is a change in at least one of the θZ axis directions.

[0019] The optical probe 3 is equipped with a projection device 8 and an imaging device 9, which will be described later. The relative position between the object to be measured M and the optical probe 3 is the relative position between the object to be measured M and the projection device 8, or can also be said to be the relative position between the object to be measured M and the imaging device 9. The relative position between the object M and the optical probe 3 is the same as the relative position between the object M and the projection device 8, or It can also be said that the relative posture between the object M and the imaging device 9 is Therefore, the relative position of the object to be measured M and the optical probe 3 is indicates the relative position between the table 71 and the optical probe 3, and the relative position between the table 71 and the projection device 8. It can also be said that the relative position of the table 71 and the imaging device 9. The relative position of the measurement object M and the optical probe 3 is the relative position of the table 71 and the optical probe, The relative position between the table 71 and the projection device 8 or the relative position between the table 71 and the imaging device 9 It can also be said that there is.

[0020] As shown in FIG. 2, the probe moving device 2 includes a driving unit 10 and a position detecting unit 11. The drive unit 10 includes an X moving unit 50X, a Y moving unit 50Y, a Z moving unit 50Z, a first rotating unit 53, and and a second rotating portion 54.

[0021] The X-moving section 50X is movable relative to the base BS in the direction of the arrow 62, i.e., in the X-axis direction. The X-axis moving unit 50X moves the optical probe 3 in the X-axis direction. The Y-movement unit 50Y changes the relative position between the optical probe 3 and the object to be measured M along the X-axis. is provided so as to be movable in the direction of arrow 63, i.e., the Y-axis direction, relative to X-movement unit 50X. The Y-axis moving unit 50Y moves the optical probe 3 in the Y-axis direction. The Y moving section 50Y changes the relative position of the object M along the Y axis. The Z movement part 50Z is provided with a holder 52 extending in the arrow direction. The Z-moving unit 50Z is provided so as to be movable in the direction of the mark 64, i.e., in the Z-axis direction. By moving the probe 3 in the Z-axis direction, the optical probe 3 and the object to be measured M are aligned along the Z-axis direction. These X moving section 50X, Y moving section 50Y, and Z moving section 50Z change the relative positions. The optical probe 3 is configured with a movement mechanism that allows it to move in the X-axis, Y-axis, and Z-axis directions. The X-moving unit 50X and the Y-moving unit 50Y change the relative position between the optical probe 3 and the object to be measured M. The moving unit 50Y and the Z moving unit 50Z move the optical probe 3 to move the object to be measured M and the rear. At least a relative position between the object M and the projection device 8 described later and a relative position between the object M and the imaging device 9 described later At least one of them changes.

[0022] In this manner, in this embodiment, the X moving section 50X, the Y moving section 50Y, and the Z moving section 50Z are By moving the optical probe 3 by the However, the shape measuring device 1 is changed in at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction. By moving the object M in the direction, the relative position between the object M and the optical probe 3 can be adjusted. The position may be changed.

[0023] The first rotating unit 53 rotates the optical probe 3 supported by a holding member (holding unit) 55 (to be described later) in the X direction. The optical probe rotates around a rotation axis (rotation axis) 53a parallel to the axis, that is, in the direction of arrow 65. That is, the first rotating part 53 changes the position of the optical probe 3 and the object to be measured. The second rotating unit 54 changes the relative position of the optical projector 51 and the object M. The tube 3 is rotated around an axis parallel to the direction in which a first holding portion 55A (described later) extends, that is, around an axis parallel to the direction in which an arrow 66 extends. The second rotating unit 54 rotates in the direction to change the attitude of the optical probe 3. The relative posture of the optical probe 3 and the object M to be measured is changed. A reference sphere used to correct the relative position between the optical probe 3 and the holding member 55 that holds the optical probe 3. 73a or reference sphere 73b.

[0024] These include the X moving unit 50X, the Y moving unit 50Y, the Z moving unit 50Z, the first rotating unit 53, and the second rotating unit 54. The driving of the rotation unit 54 is determined based on the detection result of the position detection unit 11, which is constituted by an encoder device or the like. The analysis device 4 controls the process based on the results.

[0025] The optical probe 3 includes a projection device 8 and an imaging device 9, and is supported by a holding member 55. The projection device 8 and the image capture device 9 are held by the holding member 56, and are therefore in a predetermined positional relationship. However, the position of the projection device 8 and the imaging device 9 is fixed at a predetermined base line length. The holding member 55 extends in a direction perpendicular to the rotation axis 53a. A first holding portion (first portion, first member) 55A supported by the first rotating portion 53, and the first holding portion 5 A second support 53a is provided at the end of the 5A on the side farther from the object to be measured M and extends parallel to the rotation axis 53a. The second holding portion (second portion, second member) 55B is formed in a substantially L-shape so as to intersect with the second holding portion (second portion, second member) 55B at right angles. The optical probe 3 is supported on the end of the +X side of the first rotating part 53. The position of 3a is located closer to the object to be measured M than the optical probe 3. A counterbalance 55c is provided at the end of the holding part 55A that is closer to the object to be measured M. Therefore, when no driving force is generated in the first rotating portion 53, the As shown, the extension direction of the first holding portion 55A is aligned with the Z-axis direction.

[0026] In this way, the positional relationship between the projection device 8 and the image capture device 9 is fixed by the holding member 56. Therefore, changing the relative position between the optical probe 3 and the object M to be measured allows the projection device 8 to The relative position of the object to be measured M or the relative position of the image pickup device 9 and the object to be measured M can be changed. Similarly, the projection device 8 and the image capture device 9 are held in positional relation by the holding member 56. Since the relationship is fixed, the relative position between the optical probe 3 and the object to be measured M cannot be changed. , the relative posture between the projection device 8 and the object M to be measured, or the relative posture between the imaging device 9 and the object M to be measured, is changed. This means to make it into a

[0027] The holding and rotating device 7 includes a table 71 for holding the object M to be measured, as shown in FIGS. a rotation drive unit 72 that rotates the table 71 in the θZ axis direction, i.e., in the direction of the arrow 68; and a position detection unit 73 that detects the position of the table 71 in the rotation direction. is an encoder device that detects the rotation of the rotary shaft of the table 71 or the rotary drive unit 72. The holding and rotating device 7 is driven by the rotation driving unit 72 based on the result of detection by the position detecting unit 73. The holding and rotating device 7 rotates the table 71. The object M to be measured is rotated in the direction of the arrow 68 around the rotation axis center AX. The moving unit 72 changes the relative posture of the optical probe 3 and the object M to be measured.

[0028] The first rotating unit 53 and the second rotating unit 54 constitute a moving mechanism that enables the optical probe 3 to rotate. The holding and rotating device 7 changes the relative position between the optical probe 3 and the object to be measured M. , a moving mechanism that enables the object M to be measured held on the table 71 to be rotated, and optical The relative position between the probe 3 and the object to be measured M is changed. The holding and rotating device 7 rotates the object M to be measured held on the table 71. By changing the position of the optical probe 3 (projection device 8 described later), the measurement light projected by the optical probe 3 The projection direction of L onto the object M to be measured and the direction in which the optical probe 3 (the imaging device 9 to be described later) captures the object M to be measured are determined. The holding and rotating device 7 changes at least one of the posture of the object M to be measured and the imaging direction. By changing the value of the angle, the target of the measurement light L projected by the optical probe 3 (projection device 8 described later) can be adjusted. The projection direction onto the measurement object M and the direction in which the optical probe 3 (the imaging device 9 described later) images the measurement object M are At least one of the imaging direction and the imaging direction is changed.

[0029] In this manner, in this embodiment, the first rotating part 53 and the second rotating part 54 form an optical probe. The relative position is changed by rotating the measuring object M by the holding and rotating device 7. However, if the shape measuring device 1 changes the relative position, the optical probe 3 Alternatively, only one of the optical axis and the object M may be rotated. By rotating at least one of the probe 3 and the object to be measured M, the relative posture is changed. The shape measuring device 1 rotates both the optical probe 3 and the object to be measured M. The rotation axis for rotating the optical probe 3 and the rotation axis for rotating the object to be measured M are the same as those described above. It is not limited to this and can be set arbitrarily.

[0030] The projection device 8 as a projection unit is controlled by the analysis device 4 and is held by the holding and rotating device 7. The light source 12, the projection optical system 13, and the projection optical system 14 are arranged to irradiate light onto at least a part of the object M to be measured. The light source 12 of this embodiment includes, for example, a laser diode. 2 may include solid-state light sources other than laser diodes, such as light-emitting diodes (LEDs). good.

[0031] The projection optical system 13 adjusts the spatial light intensity distribution of the light emitted from the light source 12. The projection optical system 13 of the embodiment includes, for example, a cylindrical lens. It may be one optical element or may include multiple optical elements. The light spot is expanded in the direction in which the cylindrical lens has positive power. The light is emitted as measurement light L from the projection device 8 along a first direction toward the object M. As shown in the figure, when light is emitted from the projection device 8 and projected onto the object M, the light emitted from the projection device 8 When projected onto the object M having a surface perpendicular to the projection direction, the measurement light L rotates The direction parallel to the axis 53a is the longitudinal direction, and the shape of the line is parallel to the rotation axis 53a. This linear measuring light L has a predetermined length in the longitudinal direction on the object M to be measured.

[0032] The longitudinal direction of the linear measuring light L is determined by the second rotating unit 54 described above. The longitudinal direction of the linear measuring light L can be changed according to the direction of the spread of the surface of the object to be measured M. By changing the temperature, measurements can be made efficiently.

[0033] The projection optical system 13 includes a diffractive optical element such as a CGH, and projects the measured light emitted from the light source 12. The spatial light intensity distribution of the constant light L may be adjusted by a diffractive optical element. In this case, the projected light with the spatial light intensity distribution adjusted is sometimes called pattern light. The light L is an example of pattern light. In this specification, the direction of the pattern is referred to as When the arrow indicates the longitudinal direction of the linear measuring light L, the arrow indicates the longitudinal direction of the linear measuring light L.

[0034] The measurement light L irradiated onto the object M from the projection device 8 is projected onto the surface of the object M. The imaging device 9 as an imaging section captures an image of the measurement light L projected onto the surface of the object M to be measured. Specifically, the image capturing device 9 includes an image capturing element 20 and an imaging optical system 21. The illumination light beam irradiated onto the object to be measured M, i.e., the measurement light L, is diffusely reflected on the surface of the object to be measured M. Then, at least a part of the diffusely reflected measuring light L is incident on the imaging optical system 21. 21 is an imaging optical system 2 for projecting an image of the measurement light L onto the surface of the object M by the projection device 8. The image sensor 20 receives the image formed by the imaging optical system 21. The image signal is output.

[0035] The imaging optical system 21 is configured to project the measurement light L from the projection device 8 in the direction (traveling direction) of the measurement object M. The object surface 21a on the plane including the longitudinal direction of the projected measurement light L and the light receiving surface 2 of the image sensor 20 0a (image plane) is in a conjugate relationship. and the longitudinal direction of the measurement light L projected onto the object M, is approximately parallel to the propagation direction of the measurement light L. The plane is parallel to the light receiving surface 20a of the image sensor 20 along the propagation direction of the measurement light L. By forming the lens in this way, a focused image can be obtained regardless of the position of the surface of the object to be measured M. do.

[0036] The analysis device 4 controls each part of the shape measurement device 1 to perform shape measurement. The analysis device 4 is configured to project the image of the measurement light L onto the object M from the projection device 8 of the optical probe 3. When the image is captured by the imaging device 9, the analysis result data of the image is calculated.

[0037] FIG. 3A is a block diagram of the analysis device 4 according to this embodiment. 10 is a flowchart showing the flow of the shape measurement. As shown in FIG. 3A, the hardware includes an input unit 32 and a display unit 33. The shape measuring device 1 has a memory unit 34 and a control unit 36. The analysis device 4, for example, It may be a computer connected to the shape measuring device 1, or a computer in which the shape measuring device 1 is installed. The host computer may be a host computer provided in the building, or the building in which the shape measuring device 1 is installed. It is not limited to the above, but may be located at a location separate from the shape measuring device 1, and may be accessed via a computer via the Internet, etc. The shape measuring device 1 may be connected to the device by using the above communication means. The input unit 32, the display unit 33, the storage unit 34, and the control unit 36 ​​are arranged in separate locations. It's okay if it gets worse.

[0038] The input unit 32 is a device that allows an operator to input information, such as a mouse or a keyboard. The operator operates the input unit 32 to input the shape measurement information of the shape measurement device described later. The measurement conditions are adjusted by inputting the measurement conditions of the probe moving device 2 and the storage device 3. When the holding and rotating device 7 is moved manually, the input unit 32 is connected to the probe moving device 2 and the holding and rotating device 7. The display unit 33 may have a movement mechanism for moving the device 7. The display unit 33 displays the control results of the control unit 36 ​​and the information from the operator. In this embodiment, the display device is a display device that displays input contents from the The memory unit 34 is a memory that stores the calculation contents of the control unit 36, program information, etc. For example, RAM (Random Access Memory) and ROM (Read Only Memory) and Flash Memory (Flash Memory y) and an external storage device such as the control unit 36. The computing device is a CPU (Central Processing Unit). do.

[0039] The control unit 36 ​​includes a measurement control unit 38 and an analysis unit 40 serving as an image analysis device. The measurement control unit 38 and the analysis unit 40 execute the processes described below by reading software (programs) stored in the memory unit 34. When measuring the shape of the object M, as shown in FIG. 3B , the operator teaches the shape measurement device 1 (step S2), determines the measurement conditions for the shape measurement device 1 through the teaching, and then measures the shape of the object M under the determined measurement conditions for the shape measurement device 1 (step S4). Here, teaching refers to the process of adjusting and determining the measurement conditions for the shape measurement device 1 based on the analysis by the analysis unit 40, as described below, in order to accurately measure the three-dimensional shape of the object M. In other words, teaching refers to the process of setting the measurement conditions for the shape measurement device 1. Teaching is performed by the operator operating the input unit 32.

[0040] As shown in FIG. 3A, the measurement control unit 38 includes a condition setting unit 42 and an operation control unit 44. The condition setting unit 42 is configured to set the temperature of the shape measuring device 1 set by the operator operating the input unit 32. Based on the measurement conditions of the shape measuring device 1 determined by the measurement, the measurement is performed as shown in step S2 of FIG. The measurement conditions of the shape measuring device 1 are set. These are various conditions for measuring the shape of the object M by the shape measuring device 1. For example, the relative position between the optical probe 3 and the object M to be measured, the relative position of the object M, the intensity of the measurement light L, the exposure and exposure time of the image capture device 9, and the measurement area. Hereinafter, the measurement conditions of the shape measuring device 1 will be simply referred to as the measurement conditions. .

[0041] Here, in order to explain the measurement area, the imaging area will be explained first. The imaging area of ​​the imaging device 9, i.e., the range imaged by the imaging device 9, is the area to be measured. The imaging area is the area where an image is captured by the light projected onto the object M. The imaging device 9 captures the image of the object to be measured M at the position and posture of the optical probe 3 set under the measurement conditions. When capturing an image of the measurement light L projected onto a surface, the area that includes the captured image of the measurement light L is This imaging area is used to determine the relative position between the object to be measured M and the optical probe 3, and the The size of the range changes depending on the relative position of M and the optical probe 3. is the area (range) of the imaging area used to measure the shape of the object M to be measured. The measurement area is a region (range) of the imaging area that includes the image of the measurement light L. The shape of the object M is measured by generating a point cloud from the image of the measurement light L included in the fixed area. That is, a point cloud is a set of points on an image for calculating the coordinate values ​​of the captured image. The shape of the object M is measured based on the coordinate values ​​of each point group. It can also be said that it is a region (range) used to generate a group. Since a point cloud is generated within the measurement area, the measurement area can be rephrased as a point cloud area. If the size and position of the measurement area are the same as the imaging area, the measurement area is considered to be the imaging area. This can also be rephrased as follows.

[0042] The measurement conditions are the scan start position and scan distance of the measurement light L irradiated by the optical probe 3. However, the measurement conditions may include the end position and the measurement end position. The relative position between the imaging device 9 or the projection device 8 and the object M to be measured is At least the pairing attitude, the intensity of the measurement light L, the exposure and exposure time of the image capturing device 9, and the measurement area are determined. In this embodiment, the condition setting unit 42 is configured to set the condition when the operator operates the input unit 32. The measurement conditions determined by teaching the shape measuring device 1 are used as the measurement conditions. The condition setting unit 42 sets the parameters and stores them in the storage unit 34. The measurement conditions stored in the memory may be read out and the measurement conditions may be set based on the read out measurement conditions. The measurement conditions may be set by calculation.

[0043] Here, the operator operates the input unit 32 to teach the shape measuring device 1. The determined measurement conditions are referred to as determined measurement conditions. The determined measurement conditions are input by the operator through the input unit 32. The imaging device 9 (imaging device) is determined by teaching the shape measuring device 1 by operating the The relative position of the imaging device 9 or the projection device 8 (projection unit) and the object M to be measured, the relative position of the object M to be measured, the intensity of the measurement light L, the exposure and exposure time of the image pickup device 9, The condition setting unit 42 sets the determined measurement conditions to the operation control unit 44. The measurement conditions are set as the measurement conditions to be performed by the above method, and the set measurement conditions are stored in the storage unit 34. That is, the condition setting unit 42 determines the relationship between the optical probe 3 and the object M to be measured under the determined measurement conditions. The relative position and the relative posture between the optical probe 3 and the object M to be measured are The relative position between the optical probe 3 and the object M and the relative posture between the optical probe 3 and the object M are set and recorded. The condition setting unit 42 stores the measurement conditions from the projection device 8 under the determined measurement conditions. The intensity of the measurement light L irradiated onto the object M from the projection device 8 is calculated by The condition setting unit 42 sets the intensity of the constant light L and stores it in the storage unit 34. The exposure and exposure time of the imaging device 9 under the measurement conditions are defined as the exposure and exposure time of the imaging device 9. The condition setting unit 42 sets the measurement conditions in the determined measurement conditions and stores them in the storage unit 34. The conditions are set as the measurement region and stored in the memory unit 34.

[0044] 4 is a diagram illustrating an example of the operation of measuring the shape of the object M by the shape measuring apparatus 1. The operation control unit 44 controls each unit of the shape measuring apparatus 1 under the measurement conditions set by the condition setting unit 42, thereby performing the shape measurement of the object M shown in step S4 of FIG. 3B. That is, the operation control unit 44 reads the measurement conditions set by the condition setting unit 42 from the memory unit 34, and performs the shape measurement of the object M under the read measurement conditions. The operation control unit 44 controls at least one of the X moving unit 50X, the Y moving unit 50Y, the Z moving unit 50Z, the first rotating unit 53, the second rotating unit 54, and the holding and rotating device 7 so that the relative position and relative orientation between the optical probe 3 and the object M become the relative position and relative orientation between the optical probe 3 and the object M set by the condition setting unit 42. Furthermore, the operation control unit 44 controls the aperture of the projection device 8 and the like so that the intensity of the measurement light L irradiated from the projection device 8 onto the object M to be measured becomes the intensity of the measurement light L irradiated from the projection device 8 onto the object M to be measured set by the condition setting unit 42. Furthermore, the operation control unit 44 controls the time for which the shutter of the imaging device 9 is open so that the exposure and exposure time of the imaging device 9 become the exposure and exposure time of the imaging device 9 set by the condition setting unit 42.

[0045] As shown in FIG. 4 , the operation control unit 44 projects the measurement light L onto the object M under measurement at the relative position and orientation between the optical probe 3 and the object M under measurement set by the condition setting unit 42. The operation control unit 44 moves the optical probe 3 and the object M relative to each other, moves (scans) the position where the measurement light L is projected, detects the position where the measurement light L is projected within the imaging area, and generates coordinate values ​​of each part of the object M, i.e., a point cloud, thereby measuring the shape of the object M. The operation control unit 44 causes the imaging device 9 to repeatedly capture images at a predetermined frame rate. The operation control unit 44 obtains the maximum pixel value of each pixel row included in the dimming range from the captured image data and outputs dimming control information to the projection device 8 and the imaging device 9. Next, based on the dimming conditions, the imaging device 9 captures an image of the measurement light L projected onto the object M, more specifically, a diffuse reflection light image T1, which will be described later, and sends the image data at that time to the analysis device 4. Next, the operation control unit 44 determines the position of the diffuse reflected light image T1 from the image data based on the measurement area set in the condition setting unit 42, and calculates the three-dimensional coordinate values ​​of the portion of the object M onto which the measurement light L is projected from the position information of the probe moving device 2 and the position information of the diffuse reflected light image T1. In this way, the shape of the object M is measured.

[0046] In the example of FIG. 4, the object to be measured M has teeth of approximately the same shape arranged in a predetermined circumferential direction by design. The shape measuring device 1 of this embodiment is a bevel gear formed with a bevel. Although a gear is used as the measurement target M, the shape of various objects can be measured. Of course, when the object to be measured M is a gear, the type of gear is not particularly limited. For example, a bevel gear In addition, we also offer spur gears, helical gears, double helical gears, worm gears, pinions, hypoid gears, etc. The object to be measured M is not limited to gears, but may be any object with irregularities formed at predetermined intervals. The object may be any object that has been cut, for example a turbine blade.

[0047] 5A and 5B are schematic diagrams illustrating light incident on the imaging device 9. 5B is a diagram showing an example of measuring the shape of a portion M1 of an object M to be measured. When performing shape measurement, the measurement device 1 controls the projection device under the measurement conditions set by the measurement control unit 38. The measuring device 8 projects the measuring light L onto a portion M1 of the object M to be measured, and the imaging device 9 projects the measuring light L onto the object M to be measured. The image of the measuring light L captured by the imaging device 9 is displayed as an image. The captured image is taken by the imaging device 9 (captured image T shown in the example of FIG. 5C). The captured light image includes an image of the measurement light L projected onto the location M1. The image of the measurement light L projected onto the point M1 is detected, and the detected image of the measurement light L is A point cloud is generated from the point cloud, and the coordinates of the point cloud are calculated to obtain the shape of the object M at the location M1. Furthermore, when measuring the shape of the portion M1, the shape measuring device 1 measures the shape of the portion M The measurement object is so arranged that the diffuse reflected light L1 of the measurement light L projected onto the object 1 is incident on the imaging device 9. It is necessary to set measurement conditions such as the relative position and relative posture between the object M and the optical probe 3. The reasons for this are explained below.

[0048] As shown in FIG. 5A, the diffuse reflected light L1 is the measurement light L irradiated from the projection device 8 onto the object to be measured. The light is diffusely reflected only once at a point M1 of the object M. When the measurement light L is irradiated onto the point M1, the reflected light is diffusely reflected at the point M1. Therefore, the light that reaches the imaging device 9 without being reflected by other parts is the diffuse reflected light L1. In this case, the diffuse reflected light L1 is the diffuse reflected light that has been reflected only once at the point M1 and reached the imaging device 9. When the diffuse reflected light L1 is incident on the imaging device 9, the portion M displayed in the captured image is The image of the measuring light L projected onto the object 1 becomes an image of the diffuse reflected light L1. A point cloud is generated from the image of the diffuse reflected light L1 displayed on the image, and shape measurement is performed. The shape measuring device 1 measures the image of the diffuse reflected light L1 displayed in the captured image at a location M of the object M to be measured. The image representing the shape of the object in the image 1 is the image of the diffuse reflected light L1 displayed in the captured image. The composition is carried out.

[0049] However, measurement conditions such as the relative position and relative orientation of the object M to be measured with respect to the imaging device 9, Depending on the shape of the object M to be measured, the imaging device 9 may receive reflected light other than the diffuse reflected light L1, i.e. The specular reflection light L2 and the multiple reflection light L3 are incident, and the captured image contains an image of light other than the diffuse reflection light L1. That is, the image of the specular reflection light L2 and the image of the multiple reflection light L3 may be included. There is a risk that the measuring device 1 will not be able to properly measure the shape of the portion M1. , will be explained in detail.

[0050] FIG. 5A shows an example in which specularly reflected light L2 is incident on the imaging device 9. When the measuring light L is incident on the imaging device 9, the image of the measuring light L captured by the imaging device 9 includes an image of the specularly reflected light L2. Therefore, the captured image includes an image of the specularly reflected light L2. The specular reflected light L2 is the light that is specularly reflected by the object M. The specular reflected light L2 is The specular reflected light L2 is, for example, the diffuse reflected light of the same intensity as the measuring light L. The light intensity is about 10 to 1000 times that of the incident light L1. When the intensity of the measurement light L is set based on the intensity of the specular reflected light L2, , compared to when the dimming conditions are set based on the intensity of the diffuse reflected light L1, In this case, the brightness of the image may be reduced to about 1 / 1000. If the image of the incident measurement light L is expressed using pixel values ​​with only a few hundred gradations, the captured image will In this case, the brightness of the image of the diffuse reflected light L1 becomes too low, and the image of the diffuse reflected light L1 cannot be detected. Therefore, in the captured image, the image of the measuring light L captured by the imaging device 9 may If the image of the specular reflected light L2 is included, the image of the diffuse reflected light L1 cannot be detected. The image of the diffuse reflected light L1 is not generated properly. In the image, the image represents the shape of the portion M1 of the object M, so the diffuse reflected light L1 If the point cloud of the image cannot be generated, it will be impossible to properly measure the shape of the portion M1. The light control conditions include the intensity of the measurement light L from the projection device 8, the exposure amount of the imaging device 9, The input / output characteristics of the device 9 (sensitivity of the image sensor 20 or amplification factor for the signal detected by the image sensor 20) These are various conditions when the image of the measuring light L is captured by the imaging device 9. The specularly reflected light L2 is reflected again within the imaging optical system 21 (lens) of the imaging device 9 and is received by the imaging device 9. The image of the light that is incident on the light surface 20a and then reflected back to the light receiving surface 20a is included in the captured image. The image of the light that is re-reflected and incident on the light receiving surface 20a is expressed as follows in the captured image: In the captured image, the diffuse reflected light L1 is displayed as a bright image called flare. When the image and the flare are superimposed, the image of the diffuse reflected light L1 superimposed on the flare is In this case, the flare and the overlay may cause overexposure, making it impossible to detect. Since it becomes impossible to generate a point cloud of the image of the diffuse reflected light L1 at the location where the object is reflected, it is difficult to perform shape measurement properly. It will no longer be possible to do so.

[0051] 5A shows an example in which multiple reflected light L3 is incident on the imaging device 9. When L3 is incident on the imaging device 9, the image of the measuring light L captured by the imaging device 9 includes the multiple reflection light L3. The image of the multiple reflected light L3 is included in the captured image. 3 is a part of the reflected light of the measurement light L that is reflected by the object M to be measured multiple times and then enters the imaging device 9. Specifically, the light specularly reflected by the object M is reflected to another part of the object M. The light that is incident and diffusely reflected at that point is the multiple reflected light L3. The diffusely reflected light is incident on another part of the object M, and the diffusely reflected light at that part is The multiple reflected light L3 is incident on the light receiving surface 20a of the imaging device 9. Since the incident position is different from that of the diffuse reflected light L1, the multiple reflected light L3 displayed in the captured image The image of the diffusely reflected light L1 is displayed at a different position from the image of the diffusely reflected light L1. The image of the diffuse reflected light L1 represents the shape of the object M at a point M1, whereas the image of the multiplexed reflected light L2 represents the shape of the object M at a point M1. It can be said that the image of the reflected light L3 does not represent the shape of the object M at the point M1. During shape measurement, the image of the diffuse reflected light L1 and the image of the multiple reflected light L3 cannot be distinguished, resulting in multiple reflections. There is a risk that the point cloud will be generated from the image of the reflected light L3. When shape measurement is performed based on the point cloud, the measurement object M is measured based on an image that is not the shape at the point M1. Therefore, it becomes impossible to appropriately measure the shape of the portion M1.

[0052] Also, as shown in FIG. 5B, depending on the measurement conditions, i.e., the relative position and relative posture conditions, That is, as shown in FIG. 5B, a part of the measurement light L is There is a case where the light is irradiated to a point M2 instead of the point M1. Here, the point M2 is the object to be measured. This refers to a location other than the location M1 of M, where shape measurement is not performed. The diffused reflected light L1 of the irradiated measuring light L is incident on the imaging device 9, but is irradiated at a point M2. The diffusely reflected light L1 of the irradiated measuring light L is not incident on the imaging device 9. In this case, a part of the image captured by the imaging device 9 is divided by the amount of the light beam of the measurement light L irradiated onto the point M2. This phenomenon is called vignetting. In other words, in the example of Figure 5B, the light The line (diffuse reflected light L1) is incident on the imaging device 9, but the portion indicated by the dashed arrow is actually incident on the imaging device 9. 9. In addition, for example, when the intensity of the measurement light L irradiated from the projection device 8 is low, Depending on the measurement conditions, such as when the image of the diffuse reflected light L1 is low in brightness, The brightness of an image is the intensity of the light that forms the image. Therefore, the brightness of the image of the diffuse reflected light L1 is the In addition, in FIGS. 5A and 5B, for the sake of convenience, The image of the specular reflection light L2, the image of the multiple reflection light L3, and the case where vignetting occurs are shown in Fig. The explanation has been given by changing the relative position and relative posture of the imaging device 9 with respect to the fixed object M (location M1). However, the measurement conditions such as the relative position and relative orientation of the imaging device 9 with respect to the object to be measured M (location M1) are Even when the conditions are fixed, the image of the specular reflection light L2, the image of the multiple reflection light L3, and the vignetting are formed. In some cases, only one type of image is captured, either the image of diffuse reflected light L1 or the image of diffuse reflected light L2, which has a low intensity of light generated by the reflection. Then, the image of the regular reflection light L2, the image of the multiple reflection light L3, the vignetting, and the intensity of the light that formed the image are In some cases, two or more types of images may be captured, including an image of low diffuse reflected light L1. Even when the measurement conditions such as the relative position and relative posture of the device 9 are fixed, the image of the specularly reflected light L2 and The image of the multiple reflected light L3, the vignetting, and the image of the diffuse reflected light L1 with low intensity of the light that formed the image are , and sometimes all of them are imaged at once.

[0053] FIG. 5C is a diagram showing an example of a captured image T actually captured by the imaging device 9. The image T is an image showing the light image captured by the imaging device 9 as described above, and is located in the imaging region TR The diffuse reflection light image T1 is an image of the light incident on the imaging device 9. The specular reflection light image T2 is an image of the specular reflection light L2 incident on the imaging device 9. The multiple reflection light image T3 is an image of the multiple reflection light L3 incident on the imaging device 9. In the example of 5C, the image TA includes a specular reflection image T2 and a multiple reflection image T3. Therefore, for the reasons mentioned above, it may be difficult to perform shape measurement using the diffuse reflected light image T1. In the example of FIG. 5C, a vignetting image T4 is captured in the image TB. The vignetting image T4 is , the image is vignetted. In other words, the diffuse reflection is missing due to vignetting. It can be said that this is an image of light L1. In the vignetting image T4, the dotted line part is missing due to vignetting. The dotted line part is not actually visible in the image. Because it is an image of diffuse reflected light L1, it is difficult to measure the shape of the missing part, i.e., to detect the point cloud. Furthermore, when the brightness of the diffuse reflected light image T1 is low, the image capturing device 9 captures the diffuse reflected light image T1. Therefore, it becomes difficult to measure the shape using the diffuse reflection light image T1. The inappropriately luminance image T5 is hereinafter referred to as an inappropriately luminance image T5. For example, the diffuse reflection light image T1 has a brightness lower than a predetermined value. Considering the influence of the image T5 on the measurement accuracy of the object M, the operator may set the value. It may be a value calculated based on the design tolerance of the measurement object M. That is, the specular reflection light image T2 The multiple reflection light image T3, the vignetting image T4, and the inappropriate brightness image T5 are images that are inappropriate for shape measurement. In addition, the reflected light of the measurement light L may become an image that is inappropriate for shape measurement. Images other than those that are potentially suitable for shape measurement are images suitable for shape measurement. The appropriate image is the diffuse reflection image T1 that is not the vignetting image T4 (i.e., the image that is not vignetting due to vignetting). (Image with no missing parts or few missing parts) and is not an inappropriate brightness image T5 In this embodiment, the vignetting image T4 is an image that is partially missing due to vignetting. The image is the image of the diffuse reflected light L1 that has been lost, but the missing part (area), that is, the point The line portion itself may be called a vignetting image T4.

[0054] Furthermore, the imaging device 9 detects light other than the measurement light L from a light source other than the projection device 8. Light emitted from a light source other than the projection device 8 may also be reflected by the object M to be measured and diffused. Reflected light (including diffuse reflected light reflected only once by the object M and multiple reflected light) and regular reflected light The light may be incident on the imaging device 9 and captured by the imaging device 9. The images of diffuse reflected light and specular reflected light are also unsuitable for shape measurement. The light source other than the projection device 8 is the sun, lighting in a factory, etc. If so, there are a variety of things.

[0055] Therefore, in order to measure the shape appropriately, it is necessary to obtain a diffuse reflection image T1 that is an image suitable for measuring the shape. It is necessary to set measurement conditions that allow for appropriate imaging. By checking the image captured by the imaging device 9 while adjusting the conditions, it is possible to select an image suitable for shape measurement. However, for example, an unskilled operator may not be able to see the diffuse reflection. It is not possible to distinguish whether the image is of incident light L1, specularly reflected light L2, or multiple reflected light L3. It can be difficult to recognize which image is appropriate. It can be difficult to recognize how to adjust the measurement conditions to obtain an appropriate image. To cope with such a problem, the analysis unit 40 according to this embodiment executes the process described below. This allows the operator to easily set measurement conditions that allow accurate shape measurement. The analyzing unit 40 will now be described in detail.

[0056] Returning to FIG. 3A, the analysis unit 40 includes a design information acquisition unit 80, a condition acquisition unit 82, and an image analysis unit 83. The analysis unit 40 has an image analysis unit 83 and an output unit 88. Images inappropriate for shape measurement are detected by analysis from the images of the measurement light L under the acquired measurement conditions, The output unit 88 causes the display unit 33 to display the detection result information based on the detection result. By checking the display on the display unit 33, the operator can accurately measure the shape. The conditions can be easily set.

[0057] Specifically, the design information acquiring section 80 acquires the design information of the device under test M. The unit 80 reads out the design information of the object M to be measured from the storage unit 34, and stores the design information of the object M to be measured. The design information of the object M to be measured is information required for analysis by the image analysis unit 83, which will be described later. The design information of the object to be measured M may be stored in advance in the storage unit 34, or may be stored in advance in this process. The information may be acquired by communication at the time of the operation, or may be acquired by inputting the information into the input unit 32 by the operator. The design information also includes shape data of the object M and reflectance data of the object M. The shape data is data that indicates the design shape of the object M to be measured. For example, the data includes CAD data, mesh data, and point cloud data. However, the design values ​​that indicate the shape (for example, the specifications of the object M to be measured, such as a gear or turbine blade) are taken. The shape data may be calculated based on the design value. This data shows the designed reflectance of the object M. The reflectance data is actually measured by a separate measuring instrument. The data may be obtained by measuring the object M or may be a value based on the material or quality. For example, the reflectance may be different depending on the surface roughness or material. In such cases, the reflectance data is obtained from multiple areas with different surface roughness and materials. However, the design information acquisition unit 80 may use the following design information: Other data such as the tolerance, linear expansion coefficient, and thermal expansion coefficient of the object M may also be acquired. The information acquisition unit 80 only needs to acquire shape data as design information, and reflectance data. It is not necessary to obtain the data.

[0058] The condition acquisition unit 82 acquires measurement conditions. In this embodiment, the condition acquisition unit 82 acquires measurement conditions. The predetermined condition, that is, the Tee of the shape measuring device 1 performed by the operator by operating the input unit 32, The measurement conditions acquired by the condition acquisition unit 82 are The condition acquisition unit 82 uses the determined measurement conditions for analysis by the image analysis unit 83. The condition acquisition unit 82 acquires the measurement data used for the analysis by the image analysis unit 83. As a condition, in addition to the determined measurement condition, the measurement light L other than that irradiated from a light source other than the projection device 8 Information on light other than the measurement light L emitted from a light source other than the projection device 8 may also be included. The other light source information is the relative position between a light source other than the projection device 8 and the object M to be measured. the relative posture of the light source other than the projection device 8 and the object M to be measured, and the light from the light source other than the projection device 8 The other light source information may be input by the operator operating the input unit 32. The other light source information may be stored in advance in the storage unit 34, or may be set by calculation. In addition, the measurement conditions acquired by the condition acquisition unit 82 other than the other light source information may also be, for example, For example, the measurement conditions may be those stored in advance in the storage unit 34, or the condition acquisition unit 82 may use the measurement conditions stored in advance in the calculation. More specific measurement conditions may be used.

[0059] When an image of the object M is captured by the light projected thereon, the image analysis unit 83 Images unsuitable for measuring the shape of the object M are detected based on the design information and measurement conditions of the object M. In addition, the image analysis unit 83 detects the object M when capturing an image of the object M by the light projected thereon. The image suitable for measuring the shape of the object M is also determined based on the design information and measurement conditions of the object M. That is, the image analysis unit 83 detects the image based on the design information and measurement conditions of the object M. The image processing device performs an analysis to detect images that are inappropriate for shape measurement and images that are appropriate for shape measurement. It does not analyze the images captured by the device 9.

[0060] As shown in FIG. 3A, the image analysis unit 83 includes an image analysis execution unit 84 and a detection unit 86. The image analysis execution unit 84 analyzes the design information of the object M acquired by the design information acquisition unit 80 and the condition acquisition The image analysis execution unit 84 acquires the acquired design information and measurement conditions. The analysis is performed based on the conditions, and the analysis result data of the image of the measurement light L is calculated. The image analysis result data is the data obtained under the predetermined measurement conditions, i.e., the measurement conditions obtained by the condition obtaining unit 82. Under these conditions, the measurement light L is irradiated onto the object M to be measured, and the image of the measurement light L projected onto the object M is captured. Assuming that the image is captured by the imaging device 9, the information of the image of the measuring light L calculated by analysis is More specifically, the analysis result data is obtained by capturing an image of the measurement light L projected onto the object M. Assuming that an image is captured by the imaging device 9, the position on the light receiving surface 20a of the imaging element 20 is In other words, the analysis result data is information indicating the brightness of the object M. Assuming that the image of the projected measuring light L is captured by the imaging device 9, the imaging element 20 is information indicating the intensity of the measurement light L incident on the light receiving surface 20a for each position on the light receiving surface 20a. In this way, the analysis result data consists of the brightness information of the image and the reception The image analyzer 83 can be said to include position information indicating the position (coordinates) on the light surface 20a. The analysis result data is calculated for all positions on the surface 20a where the measurement light L is incident. The analysis result data is obtained by capturing an image of the measurement light L projected onto the object M by the imaging device 9. If we assume that the brightness of each position on the captured image T is The analysis result data can be said to be information on the brightness of the image at each position on the light receiving surface 20a. It can also be said to be the intensity distribution (brightness distribution) of the image on the image region TR or on the captured image T. The unit 86 uses this analysis result data to detect inappropriate images as will be described later.

[0061] The analysis unit 40 outputs the analysis result data for each position on the light-receiving surface 20a as image data to the display unit 33 via the output unit 88 (described later), thereby displaying the redeveloped image C0 on the display unit 33. That is, the analysis unit 40 matches coordinates on the light-receiving surface 20a in the position information contained in the analysis result data with coordinates on the screen of the display unit 33, and turns on light of a luminance specified by the luminance information contained in the analysis result data for each coordinate on the screen of the display unit 33, i.e., for each pixel. This causes the display unit 33 to display the redeveloped image C0 on the screen. The redeveloped image C0 can be said to be the captured image T that would be generated by analysis and captured by the imaging device 9 when the imaging device 9 captures an image of the measurement light L projected onto the object M under the analysis conditions acquired by the condition acquisition unit 82. That is, the redeveloped image C0 is not the captured image T actually captured by the imaging device 9, but an image reproduced by analysis of the captured image T under the set measurement conditions. The analysis unit 40 only needs to calculate the analysis result data, and does not necessarily need to generate the redevelopment C0.

[0062] 6 is a flowchart showing the analysis method performed by the image analysis execution unit 84. The image analysis execution unit 84 in the The image analysis execution unit 84 acquires the result data. 6, the image analysis execution unit 84 acquires the information and the measurement conditions. The measurement light L to be irradiated from the projection device 8 under the measurement conditions acquired by the acquisition unit 82 is divided into a plurality of light rays at predetermined intervals (step S10). is a method for determining whether there is an intersection point between one of the split beams and the object M. The image analysis execution unit 84 determines which position on the object M is irradiated with the light beam (step S12). By calculating the intersection point between the light beam and the object M, it is determined whether there is an intersection point between the light beam and the object M. 84 is capable of calculating the direction from which the light beam is incident based on the measurement conditions, and Since the shape of the object M is also known from the design information of M, the intersection of the ray and the object M is In other words, if there is an intersection between the ray and the object M, it is possible to calculate whether there is an intersection. This refers to the case where the light is projected onto the part of the object M where the shape is to be measured. When there is no intersection, the light beam is not projected onto the part of the object M whose shape is to be measured. Hereinafter, the intersection point between the light ray and the object M to be measured will be simply referred to as the intersection point.

[0063] If there is no intersection (step S12; No), that is, if there is no ray If the object M is not irradiated with the light beam, the calculation for this light beam is terminated and the step to be described later is carried out. Go to step S20.

[0064] If an intersection exists (step S12; Yes), the image analysis execution unit 84 The normal direction of the object M, the incident angle of the ray at the intersection point, and the exit angle of the ray at the intersection point are calculated (step Step S14). The image analysis execution unit 84 calculates the incidence of the ray at the intersection point based on the normal direction and the direction of the ray. Calculate the angle of incidence and, according to the law of reflection, calculate the angle of emergence of the ray at the intersection point. Then, image analysis The execution unit 84 calculates the traveling direction and intensity of the specular reflection light and the diffuse reflection light of the light beam reflected at the intersection point. Specifically, the image analysis execution unit 84 calculates the exit angle of the ray at the intersection point. The direction of travel of the specularly reflected light and the direction of travel of the diffusely reflected light are calculated based on the above. is a light ray that is incident on the intersection point with the object M and is specularly reflected at the intersection point with the object M. In addition, the diffuse reflected light here is the light ray incident on the intersection point with the object to be measured M. The image analysis execution unit 84 then analyzes the reflection of the object M to be measured in the design information. Based on the reflectance, the intensities of the specularly reflected light and the diffusely reflected light are calculated.

[0065] Then, the image analysis execution unit 84 determines whether the calculated intensity of the specular reflection light is equal to or less than a predetermined intensity threshold value. If the intensity is not equal to or less than the intensity threshold (step S18; No), , that is, if it is greater than the intensity threshold, the process returns to step S12, and the specularly reflected light is treated as a light ray. The intensity of the specularly reflected light is attenuated each time it is reflected. The image analysis execution unit 84 , step S1 until the intensity of the specularly reflected light is attenuated below the intensity threshold by reflection at the intersection point. On the other hand, if the intensity of the specular reflection light is equal to or less than the intensity threshold (step S18), Step S18: Yes), the image analysis execution unit 84 determines whether the reflected light of this light ray is undetectable due to reflection. It is determined that the light has been attenuated to the maximum extent possible, and the analysis of this light ray is terminated. Of the multiple rays divided by 0, the calculations in steps S12 to S18 have not yet been performed. It is determined whether there are any undetected rays, i.e., other rays (step S20). The intensity threshold may be set by the operator, taking into consideration the influence on the measurement accuracy of the object M to be measured, for example. However, it may be a value calculated based on the design of the object to be measured M. , other rays, i.e., the multiple rays split in step S10, which have not yet been split in step S12 If there is a ray that has not been calculated in step S18 (step S20; No ), return to step S12, calculate the intersection of the ray and the object M to be measured, and return to step S1 2 and onwards. If there are no other rays (step S20; Y es), that is, among the multiple rays split in step S10, If there are no rays that have not been calculated in step S18, the traveling direction and Of the specular reflected light and diffuse reflected light whose intensities have been calculated, the specular reflected light and diffuse reflected light that enter the imaging device 9 are The image analysis execution unit 84 extracts the reflected light from the image pickup device 9 based on the measurement conditions (step S22). The position of the image pickup device 9 and the specular reflection light and the diffuse reflection light calculated in step S16 are calculated. Based on the traveling direction of the light, the specular reflected light and the diffuse reflected light incident on the imaging device 9 are extracted. The image analysis execution unit 84 then calculates the specular reflection light and the diffuse reflection light incident on the imaging device 9. The incident position (coordinates) on the light receiving surface 20a is calculated for each of the above, and the analysis result data is calculated ( Step S24). That is, the image analysis execution unit 84 analyzes the specular reflection light and the diffuse reflection light incident on the imaging device 9. Based on the direction of travel of the diffusely reflected light and the position of the image capturing device 9, the received light is divided into the specularly reflected light and the diffusely reflected light. The image analysis execution unit 84 calculates the position (coordinates) on the light plane 20a. The positions of the specularly reflected light and the diffusely reflected light on the light receiving surface 20a are calculated as position information of the analysis result data. The intensities of the specular reflected light and the diffuse reflected light calculated in step S16 are used as the brightness of the analysis result data. The image analysis execution unit 84 calculates the analysis result data as information of the degree of accuracy. Based on the traveling directions of the incident specularly reflected light and diffusely reflected light and the position of the imaging device 9, The positions (coordinates) of the specular reflected light and the diffuse reflected light on the imaging area TR are calculated, and the calculated specular reflected light and The position of the diffusely reflected light on the imaging region TR may be used as position information of the analysis result data. The image analysis execution unit 84 analyzes light other than the measurement light L, i.e., the projection light, based on the other light source information. The process from step S10 may also be performed for light from a light source other than the device 8. In this case, the analysis result data also includes information on the position and brightness of light from a light source other than the projection device 8. The data can be

[0066] The image analysis execution unit 84 calculates the analysis result data in this way. Based on the result data, the detection unit 86 detects images that are inappropriate for shape measurement. Based on the data, the detector 86 detects an image suitable for shape measurement. In other words, in the following explanation, we will evaluate the inappropriate images and the appropriate images based on the analysis result data. The process of detecting inappropriate images and appropriate images based on the above is called detection, and the detected inappropriate images and appropriate images are called detection. The process of evaluating the proper and improper images is called evaluation. The detection unit 86 may detect only inappropriate images, or Only the appropriate image may be detected. That is, the detection unit 86 may detect a small number of appropriate images and inappropriate images. In the following, an image that is inappropriate for shape measurement is referred to as an inappropriate image, and an image that is inappropriate for shape measurement is referred to as an inappropriate image. Let the image that is appropriate for be the appropriate image.

[0067] The detector 86 detects a diffuse reflection light image P1, a specular reflection light image P2, and a multiple reflection light image P3, which will be described below. By detecting P3, inappropriate images and appropriate images are detected. The detection method is as follows. explain.

[0068] When the light ray reflected at the intersection and incident on the imaging device 9 is diffuse reflected light L1, the detection unit 86 The image formed by the light beam is detected as a diffuse reflected light image P1. 1 is an image of the diffuse reflected light L1, that is, an image obtained by analytically reproducing the diffuse reflected light image T1. The diffuse reflected light L1 here is irradiated from the projection device 8 and is not reflected even once by the object M to be measured. The light beam that is not reflected is the light that is diffused and reflected at the intersection point (the intersection point between the light beam and the object M to be measured).

[0069] The detector 86 detects whether the light reflected at the intersection with the object M and incident on the imaging device 9 is a normal or reverse light. If the reflected light is L2, the image formed by the light is detected as a specular reflected light image P2. The specular reflection image P2 is an analytical reproduction of the image of the specular reflection light L2, i.e., the specular reflection image T2. The specularly reflected light L2 here is light that is specularly reflected at the intersection with the object M to be measured.

[0070] The detecting unit 86 detects that the light beams reflected at the intersection with the object M and incident on the imaging device 9 are multiplexed. In the case of reflected light L3, the image formed by that light ray is detected as a multiple reflected light image P3. The multiple reflection light image P3 is an image of the multiple reflection light L3, that is, the multiple reflection light image T3, The image is reproduced by the multiple reflection light L3, which is the regular reflection light at the intersection with the object M. The light is diffusely reflected by the

[0071] The detecting section 86 detects whether the light beam reflected at the intersection with the object to be measured M and incident on the imaging device 9 is incident on the object to be measured M. When the light is emitted from a light source other than the projection device 8, the image formed by the light is projected. The light source other than the projection device 8 is detected as an image produced by the light. An image formed by light from the outside may be regarded as an inappropriate image.

[0072] As described above, the captured image T includes the specular reflection light image T2, the multiple reflection light image T3, and the projection device Images made from light sources other than 8 may be inappropriate for shape measurement. The diffuse reflection light image T1 may be an image suitable for shape measurement. A specular reflection image P2 corresponding to the incident light image T2 and a multiple reflection image P3 corresponding to the multiple reflection image T3 and an image of light from a light source other than the projection device 8 are detected as inappropriate images. The detector 86 detects the diffuse reflection image P1 as a suitable image. The image of light L is divided into a specular reflection light image P2, a multiple reflection light image P3, and a diffuse reflection light image P1.

[0073] However, the diffuse reflection light image P1 may contain a vignetting image P4 and an inappropriate brightness image P5. The vignetting image P4 is an image of the diffuse reflected light L1 that has been partially lost due to vignetting. In other words, the vignetting image T4 is reproduced analytically. As mentioned above, the captured image T is a reproduced image of the vignetting image T4 and the bright The diffuse reflection light image T1 with low resolution may be an image that is not suitable for shape measurement. In this case, the detection unit 86 evaluates the diffuse reflection light image P1 that is determined to be an appropriate image in the detection. It is evaluated (determined) whether the reflected light image P1 includes a vignetting image P4 and an inappropriate brightness image P5. When the vignetting image P4 and the inappropriate brightness image P5 are included, the vignetting image P4 and the inappropriate brightness image P5 and are evaluated (determined) as inappropriate images.

[0074] 7 is a flowchart showing a method for evaluating the detection unit 86 according to this embodiment. 86 is an evaluation based on the detection results to determine whether the image is inappropriate or appropriate ( The detection result is a judgment of whether the detection unit 86 has detected an inappropriate image or an appropriate image. In other words, the detection result refers to at least one of the image and the cross-section image. The diffuse reflection light image P1 detected by the detector 86, the specular reflection light image P2 detected by the detector 86, and the specular reflection light image P3 detected by the detector 86 are shown. The detecting unit 86 detects the diffuse reflected light image P1, i.e., the detected The appropriate image is evaluated, and the diffuse reflection light image P1 includes a vignetting image P4 and an inappropriate brightness image P5. If the vignetting image P4 and the inappropriate brightness image P5 are included, The detection unit 86 evaluates (determines) the appropriate brightness image P5 as an inappropriate image. The image P2 and the multiple reflection light image P3, i.e., the detected improper image, are evaluated to determine the specular reflection light image P2 and The multiple reflection light image P is evaluated (determined) as to whether it is actually an inappropriate image.

[0075] As shown in FIG. 7, the detection unit 86 detects whether the detected specular reflection light image P2 is given to the diffuse reflection light image P1. The detection unit 86 calculates the influence V1 of the specular reflection light image P2 (step S32). The higher the intensity of the light that forms the specular reflection image P2, and the closer the specular reflection image P2 is to the diffuse reflection image P3, the The closer to the position of P1, the higher the influence V1 is calculated. calculates the influence V1 using the following formula (1).

[0076] V1=Σ(U1 / exp(D12 / s) (1)

[0077] Here, U1 is the intensity of the light that formed the specularly reflected light image P2. More specifically, in the analysis by the image analysis execution unit 84, U1 is the intensity of the ray of specularly reflected light L2 that is reflected at the intersection and enters the imaging device 9. D1 is the distance between the position (coordinate) on the light-receiving surface 20a of the ray of specularly reflected light L2 that is reflected at the intersection and enters the imaging device 9 and the position (coordinate) on the light-receiving surface 20a of the ray of diffusely reflected light L1 that is reflected at the intersection and enters the imaging device 9. D1 can also be said to be the distance between the position (coordinate) on the imaging region PL of the ray of specularly reflected light L2 that is reflected at the intersection and enters the imaging device 9 and the position (coordinate) on the imaging region PL of the ray of diffusely reflected light L1 that is reflected at the intersection and enters the imaging device 9. In the analysis by the image analysis execution unit 84, the measurement light L is split into multiple rays, and therefore there may be multiple rays of diffusely reflected light L1 that are reflected at the intersection and enter the imaging device 9. In this case, the detection unit 86 calculates the distance between the position on the light-receiving surface 20a of the ray of specularly reflected light L2 that reflects at the intersection point and enters the imaging device 9 and the position on the light-receiving surface 20a of the ray of diffusely reflected light L1 that reflects at the intersection point and enters the imaging device 9 for each ray of diffusely reflected light L1, and calculates the shortest distance among the distances calculated for each ray of diffusely reflected light L1 as D1. Here, s is a predetermined constant. Here, the specularly reflected light image P2 is formed by a collection of multiple images formed by the ray of specularly reflected light L2 that reflects at the intersection point and enters the imaging device 9. In this case, the detection unit 86 calculates the product of the light intensity and the distance to the ray of diffusely reflected light L1 for each ray of specularly reflected light L2 that reflects at the intersection point and enters the imaging device 9, more specifically, the value of (U1 / exp(D1 2 / s)), and then sums these values ​​for all the rays of specularly reflected light L2 to calculate the influence V1. The intensity of the rays of the specularly reflected light L2 corresponds to the luminance of the image formed by the rays of the specularly reflected light L2. Therefore, the influence V1 may be calculated by calculating the product of the luminance of the image and the distance between the image on the light-receiving surface 20a and the rays of the diffusely reflected light L1 for each image formed by the rays of the specularly reflected light L2 that are reflected at the intersection point and enter the imaging device 9, and then summing the product for all images formed by the rays of the specularly reflected light L2.That is, in this case, U1 in equation (1) is the luminance of the image formed by the rays of specularly reflected light L2 that reflect at the intersection and enter the imaging device 9, and D1 is the distance between the position (coordinate) on the light-receiving surface 20a of the image formed by the rays of specularly reflected light L2 and the position (coordinate) on the light-receiving surface 20a of the rays of diffusely reflected light L1 that reflect at the intersection and enter the imaging device 9. Furthermore, when a measurement region PL is set, the detection unit 86 preferably calculates the distance between the rays of diffusely reflected light L1 that form the diffusely reflected light image P1 (diffusely reflected light image PA in FIG. 8 described below) in the measurement region PL used for measurement and the specularly reflected light image P2 in calculating D1. That is, in this case, D1 is the distance between the position on the light-receiving surface 20a of the rays of specularly reflected light L2 that reflect at the intersection and enter the imaging device 9 and the position on the light-receiving surface 20a of the rays of diffusely reflected light L1 that reflect at the intersection and enter the measurement region PL. If an image of specularly reflected light from a light source other than the projection device 8 is included, the detection unit 86 may also include that image in the calculation of the influence V1. Furthermore, D1 does not have to be the shortest distance between the position on the light-receiving surface 20a of the ray of specularly reflected light L2 that enters the image capturing device 9 and the position on the light-receiving surface 20a of the ray of diffusely reflected light L1 that is reflected at the intersection and enters the image capturing device 9. In this case, for example, the operator may set D1 in consideration of the effect of the specularly reflected light image P2 on the measurement accuracy of the object M to be measured.

[0078] The detecting unit 86 then calculates the degree of influence V2 of the detected multiple reflection light image P3 on the diffuse reflection light image P1 (step S34). The detecting unit 86 calculates the degree of influence V2 so that the higher the luminance of the multiple reflection light image P3 (the intensity of the light that formed the multiple reflection light image P3) and the closer the multiple reflection light image P3 is to the position of the diffuse reflection light image P1, the higher the degree of influence V2. Specifically, the detecting unit 86 calculates the degree of influence V2 using the following formula (2) in the same way as the degree of influence V1.

[0079] V2=Σ(U2 / exp(D22 / s) (2)

[0080] Here, U2 is the intensity of the light that formed the multiple reflection light image P3. More specifically, in the analysis by the image analysis execution unit 84, it is the intensity of the ray of multiple reflection light L3 that is reflected at the intersection point and enters the imaging device 9. D2 is the distance between the position (coordinate) on the light receiving surface 20a of the ray of multiple reflection light L3 that is reflected at the intersection point and enters the imaging device 9 and the position (coordinate) on the light receiving surface 20a of the ray of diffuse reflection light L1 that is reflected at the intersection point and enters the imaging device 9. D2 can also be said to be the distance between the position (coordinate) on the imaging region PL of the ray of multiple reflection light L3 that is reflected at the intersection point and enters the imaging device 9 and the position (coordinate) on the imaging region PL of the ray of diffuse reflection light L1 that is reflected at the intersection point and enters the imaging device 9. In the analysis by the image analysis execution unit 84, the measurement light L is split into multiple light rays, and therefore there may be multiple rays of diffuse reflection light L1 that are reflected at the intersection point and enters the imaging device 9. In this case, the detection unit 86 calculates the distance on the light-receiving surface 20a between the position on the light-receiving surface 20a of the ray of multiple reflected light L3 that reflects at the intersection point and enters the imaging device 9 and the position on the light-receiving surface 20a of the ray of diffuse reflected light L1 that reflects at the intersection point and enters the imaging device 9 for each ray of diffuse reflected light L1, and calculates the shortest distance D2 among the distances calculated for each ray of diffuse reflected light L1. Here, the multiple reflected light image P3 is also formed by a collection of multiple images formed by the ray of multiple reflected light L3 that reflects at the intersection point and enters the imaging device 9. In this case, the detection unit 86 calculates the product of the light intensity and the distance to the diffuse reflected light image P1 for each ray of multiple reflected light L3 that reflects at the intersection point and enters the imaging device 9, more specifically, the value (U2 / exp(D2 2 / s)), and then calculates the influence V2 by summing these values ​​for all the ray of multiple reflected light L3. The intensity of the ray of multiple reflected light L3 corresponds to the brightness of the image formed by that ray of multiple reflected light L3. Therefore, the influence V2 may be calculated by calculating the product of the brightness of each image formed by the rays of the multiple-reflected light L3 that are reflected at the intersection and enter the imaging device 9 and the distance between the image on the light receiving surface 20a and the rays of the diffusely reflected light L1, and then summing this for all images formed by the rays of the multiple-reflected light L3.That is, in this case, U2 in equation (2) is the luminance of the image formed by the rays of multiple reflected light L3 that reflect at the intersection point and enter the imaging device 9, and D2 is the distance between the position (coordinate) on the light-receiving surface 20a of the image formed by the rays of multiple reflected light L3 and the position (coordinate) on the light-receiving surface 20a of the rays of diffuse reflected light L1 that reflect at the intersection point and enter the imaging device 9. Furthermore, when a measurement region PL is set, the detection unit 86 preferably calculates the distance between the rays of diffuse reflected light L1 that form the diffuse reflected light image P1 (diffuse reflected light image PA in FIG. 8 described below) in the measurement region PL used for measurement and the multiple reflected light image P3 in calculating D2. That is, in this case, D2 is the distance between the position on the light-receiving surface 20a of the rays of multiple reflected light L3 that reflect at the intersection point and enter the imaging device 9 and the position on the light-receiving surface 20a of the rays of diffuse reflected light L1 that reflect at the intersection point and enter the measurement region PL. If multiple reflection light or diffuse reflection light images of light from a light source other than the projection device 8 are included, the detection unit 86 may also include such images in the calculation of the influence V2. Note that D2 does not necessarily have to be the shortest distance between the position on the light-receiving surface 20a of the ray of multiple reflection light L3 incident on the imaging device 9 and the position on the light-receiving surface 20a of the ray of diffuse reflection light L1 reflected at the intersection and incident on the imaging device 9. In this case, for example, the operator may set D2 in consideration of the influence of the multiple reflection light image P3 on the measurement accuracy of the object M. Furthermore, the calculation method of the influences V1 and V2 is not limited to the above formulas (1) and (2). The influence V1 may be calculated based on the relative distance between the specular reflection light image P2 and the diffuse reflection light image P1 and the luminance of the specular reflection light image P2 (the intensity of light forming the specular reflection light image P2). The influence V2 may be calculated based on the relative distance between the multiple reflected light image P3 and the diffuse reflected light image P1 and the luminance of the multiple reflected light image P3 (the intensity of the light forming the multiple reflected light image P3).

[0081] In this way, the detection unit 86 detects the specular reflection light image P2 and the multiple reflection light image P3 (detected The influence V1 and V2 of the detected diffuse reflection image P1 (detected appropriate image) on the detected diffuse reflection image P2 (detected appropriate image) Calculate.

[0082] The detection unit 86 then detects the luminance of the diffuse reflection light image P1 (the luminance of the light that forms the diffuse reflection light image P1). By calculating the influence V3 of the light intensity (influence V3 of the light intensity) (step S36), it is possible to determine whether the light intensity is inappropriate, as will be described later. The presence of the luminance image P5 is evaluated. The diffuse reflection image P1 is also reflected at the intersection and sent to the image pickup device 9. An image formed by the rays of the incident diffusely reflected light L1 is formed by gathering multiple images. The detector 86 detects the diffuse reflection light that is reflected at the intersection and enters the imaging device 9 as shown in the following equation (3). The brightness (luminance) of the diffuse reflected light image P1, i.e., the brightness of the diffuse reflected light image P1, is calculated by adding up the intensities of the rays of the diffuse reflected light L1. The total intensity of the light that forms the image of the incident light L1 is calculated, and this total intensity is set as the influence V3. Here, U3 is the intensity of one ray of the diffuse reflected light L1 that is reflected at the intersection and enters the imaging device 9. is formed by one ray of diffuse reflected light L1 that is reflected at the intersection and enters the imaging device 9. It can also be said that the brightness of the diffuse reflection light image P1 is the brightness of the measurement area. When the measurement area PL is set, the intensity of the light forming the image of the diffuse reflected light L1 in the measurement area PL , that is, the intensity of the light beam of the diffuse reflected light L1 reflected at the intersection and incident on the measurement area PL is summed up as It is preferable to calculate the influence V3 based on the above.

[0083] V3=Σ(U3) (3)

[0084] Then, the detection unit 86 calculates the influence V4 of the area of ​​the diffuse reflected light image P1 (step S 38), it is evaluated whether or not a vignetting image P4 exists, as will be described later. As shown in equation (4), the measurement area P1 is the area of ​​the imaging area PL that is occupied by the diffuse reflection light image P1. The range is calculated, and the calculated measurement range is set as the influence V4. Here, R1 is the imaging area. R1 is the area of ​​the image pickup area PL, and R2 is the area of ​​the diffuse reflection light image P1 in the image pickup area PL. The image P4 is a partially missing diffuse reflection image P1. The area of ​​the diffuse reflection image P1 with a missing part is smaller than that of the diffuse reflection image P1 with a missing part. Therefore, by calculating the influence V4 in this way, it is possible to evaluate whether or not there is a vignetting image P4. When the measurement region PL is set, the detection unit 86 can set the measurement range as follows: It may also be calculated as the area of ​​the measurement region PL occupied by the diffuse reflected light image P1.

[0085] V4=R2 / R1 (4)

[0086] In this way, the detection unit 86 detects the influence V of the detected diffuse reflection light image P1 (detected appropriate image). 3. Calculate V4.

[0087] The detection unit 86 calculates the influence levels V1, V2, V3, and V4 as described above. The calculation order of V1, V2, V3, and V4 is not limited to the order described above and can be arbitrary. After calculating V2, V3, and V4, the detection unit 86 calculates the respective influences V1, V2, V3, and V4. Evaluate (judge) whether the value is above the threshold, and evaluate (judge) whether there is an inappropriate image or an appropriate image. ) (step S40). The detection unit 86 calculates the influence levels V1, V2, V3, and V4. The detection unit 86 determines whether the degree of influence is equal to or greater than the threshold value. If the difference is smaller than the threshold, the image is evaluated (determined) as an inappropriate image. The information indicating the evaluation (judgment) of an inappropriate or appropriate image is the evaluation result (judgment result). Furthermore, the evaluation results include information on images that are evaluated as inappropriate and information on appropriate images. It can also be said that the information on the image is evaluated as an inappropriate image. If there is at least one of the information of the image evaluated as "appropriate" and the information of the image evaluated as "appropriate" That is, the detection unit 86 only evaluates whether there is an inappropriate image, and outputs the evaluation result of the inappropriate image. Alternatively, you can simply evaluate whether there is a suitable image and derive the evaluation result of the suitable image. In other words, the detection unit 86 evaluates whether there is an inappropriate image and whether there is a suitable image. In addition, it is sufficient to evaluate whether the impact V1, V2, V3, and V4 are The respective threshold values ​​for the determination are, for example, the specular reflection light image P2, the multiple reflection light image P3, the diffuse reflection light image P4, and the specular reflection light image P5. The brightness of the light image P1 (the intensity of the light that formed the diffuse reflection light image P1) and the object to be measured by the vignetting image P4 The operator sets the influence of V1, V2, V3, and V Each threshold value for the judgment of 4 is a value calculated based on the design tolerance of the object to be measured M. The thresholds for determining the impact levels V1, V2, V3, and V4 may be different. The values ​​may be different or may be the same.

[0088] For example, when the influence level V1 is equal to or greater than a threshold value, the detection unit 86 determines that the specular reflection light image P2 is inappropriate. If the influence level V1 is equal to or greater than the threshold value, the brightness of the specular reflection image P2 is evaluated (determined) as a specular reflection image. The specular reflection image P2 is located close to the diffuse reflection image P1. When the brightness of the image P2 is high, the brightness of the image of the diffuse reflected light L1 becomes too low, and the diffuse reflected light image P In addition, if the specular reflection image P2 is not at the position of the diffuse reflection image P1, If the distance is too close, the diffuse reflection image P1 and the bright specular reflection image P2 are likely to overlap. If the diffuse reflection light image P1 is overexposed, it may become impossible to detect it. When the influence level V1 is equal to or greater than a threshold value, the detection unit 86 detects that the diffuse reflection light image P1 cannot be detected. The possibility is evaluated to be high, and the detected specular reflection light image P2 is evaluated to be an inappropriate image. If the influence level V1 is not equal to or greater than the threshold, that is, if it is smaller than the threshold, the output unit 86 outputs the specular reflection image P 2 is evaluated as not an inappropriate image (an appropriate image).

[0089] Furthermore, when the influence level V2 is equal to or greater than the threshold value, the detection unit 86 determines that the multiple reflection light image P3 is inappropriate. If the influence level V2 is equal to or greater than the threshold, the multiple reflection light image P3 is evaluated (determined) as a cross section image. The brightness is high, or the multiple reflected light image P3 is close to the position of the diffuse reflected light image P1. When the brightness of the reflected light image P3 is high, the multiple reflected light image P3 is easily detected. There is a high possibility that a point cloud will be generated from P3, making it difficult to properly measure the shape of the object M. When the multiple reflected light image P3 is close to the position of the diffuse reflected light image P1, , the multiple reflection light image P3 is likely to be located within the measurement area PL for generating the point cloud. Therefore, there is a high possibility that a point cloud will be generated from the multiple reflected light image P3, and the shape measurement of the object M will be difficult. In other words, the detection unit 86 is likely to be unable to appropriately determine the degree of influence. When V2 is equal to or greater than the threshold, there is a high possibility that a point cloud will be generated from the multiple reflection light image P3. Therefore, it is highly likely that the shape of the object M will not be measured properly. The detected multiple reflection light image P3 is evaluated as an inappropriate image. If the value is not equal to or greater than the threshold value, that is, if the value is smaller than the threshold value, the multiple reflection light image P3 is not an inappropriate image (appropriate It is a heartwarming image.

[0090] In this way, the detection unit 86 evaluates the detected defects using the influence levels V1 and V2. The appropriate image (specular reflection light image P2 and multiple reflection light image P3) and the detected appropriate image (diffuse reflection light image P1) the relative distance, the brightness of the detected inappropriate image (or the intensity of the light forming the detected inappropriate image), However, the detection unit 86 evaluates the detected inappropriate image based on the above. If the system evaluates the detected inappropriate images based on the detected inappropriate images and appropriate images, The influence levels V1 and V2 may not be used to evaluate the appropriateness of the image. The detection is performed based on the relative distance between the detected inappropriate image and the detected appropriate image and the brightness of the detected inappropriate image. It is sufficient if it evaluates the inappropriate image that is produced.

[0091] Furthermore, when the influence level V3 is smaller than the threshold value, the detection unit 86 detects that the diffuse reflected light image P1 is dark. The darkened diffused light was judged to be unsuitable for measurement because it was too dark (low in brightness). The reflected light image P1 is evaluated (determined) to be an inappropriate brightness image P5, and the inappropriate brightness image P5 is If the influence level V3 is not smaller than the threshold value, the detection unit 86 evaluates (determines) the image as inappropriate. , that is, if it is equal to or greater than the threshold value, the inappropriate brightness image P5 is not an inappropriate image, that is, it is inappropriate It is evaluated that there is no luminance image P5.

[0092] Furthermore, when the influence level V4 is smaller than the threshold value, the detection unit 86 determines whether the diffuse reflection image is vignetted. It is evaluated (determined) that the area of ​​P1 is getting smaller, and the diffusion reaction The projected light image P1 is evaluated (determined) as a vignetting image P4, and the vignetting image P4 is determined as an inappropriate image. The detection unit 86 evaluates (determines) that the influence V4 is not smaller than the threshold value, that is, If the value is equal to or greater than the threshold, the vignetting image P4 is not an inappropriate image, that is, there is no vignetting image P4. That is, the detection unit 86 evaluates whether the detected diffuse reflection light image P1 is a vignetting image P4 or a shading image P5. The diffuse reflection image P1 does not correspond to the inappropriate brightness image P5, i.e., it is not evaluated as an inappropriate image. The resulting diffuse reflection light image P1 is evaluated as an appropriate image.

[0093] In this way, the detection unit 86 performs evaluation using the influence level V3, and detects the appropriate image ( Based on the brightness of the diffuse reflection light image P1), the detected appropriate image is evaluated and evaluated by the influence V4. By performing the above, based on the area of ​​the detected appropriate image (diffuse reflected light image P1) on the light receiving surface 20a, However, the detection unit 86 does not evaluate the detected appropriate image. If the evaluation of the detected appropriate image is based on the The influence levels V3 and V4 do not need to be used to evaluate whether there is an image P4 with inappropriate brightness or an image P5 with inappropriate brightness. For example, the detection unit 86 determines the brightness of the detected appropriate image and the area of ​​the detected appropriate image as follows: Any method may be used as long as it evaluates the detected appropriate image.

[0094] In this manner, the detection unit 86 evaluates (determines) the values ​​of the influence levels V1, V2, V3, and V4. By doing so, it can be determined whether the diffuse reflection light image P1, the specular reflection light image P2, or the multiple reflection light image P3 is an inappropriate image. The influences V1, V2, V3, and V4 are the influences that the inappropriate image has on the diffuse reflection image P1. The detection unit 86 evaluates the detection result of the detection unit 86. Furthermore, it is possible to evaluate the detected inappropriate images (specular reflection light image P2, multiple reflection light image P3). It can also be said that the detected appropriate image (diffuse reflected light image P1) is evaluated. The detector 86 detects the specular reflection light image P2, the multiple reflection light image P3, the vignetting image P4, and the inappropriate brightness image P5. , and the diffuse reflection image P4 and the inappropriate brightness image P5 were evaluated as not being vignetting images. The projected light image P1 is evaluated as an appropriate image. Hereinafter, the influence levels V1, V2, V3, and V4 are compared with each other. When no distinction is made, the impact level is written as V0.

[0095] The impact V0 changes when the measurement conditions are changed. For example, On the other hand, if the intensity of the measurement light L is increased as a measurement condition, the specular reflection light Since the intensity of the specular reflected light L2 is higher than the intensity of L2, the shadow is smaller than the determined measurement conditions. Therefore, the detection unit 86 detects the intensity V1 of the measurement light L when the intensity of the measurement light L is increased. By calculating the influence V1, the influence V1 increases, and the image of the diffuse reflected light L1 The brightness of the diffuse reflection light becomes too low to detect the diffuse reflection light image P1, making it difficult to measure the shape. It can be appreciated that there is a high risk that it will not be possible to carry out the work properly. Since the influence V0 changes when the measurement conditions are changed, the detection unit 86 By calculating the value of the influence V0 when the measurement conditions are changed, the influence of the object M to be measured can be It is possible to properly measure the shape of the object M. It is possible to evaluate whether or not the system will be able to do this.

[0096] FIG. 8 is a diagram showing an example of the redevelopment C0. The redevelopment C0 is a comparison of the evaluated inappropriate images and the appropriate images. The image is displayed on the display unit 33 based on the analysis result data for each position on the light receiving surface 20a. This is an image of the measuring light L that is predicted to be captured by the imaging device 9. The imaging area PR of the redeveloped image C0 is determined by the measurement conditions acquired by the condition acquisition unit 82. Based on the relative position between the object M and the optical probe 3 and the relative posture between the object M and the optical probe 3, The redevelopment C0 is performed within the imaging area PR whose range has been set in this way. As shown in the example of Figure 8, the redevelopment C0 is the redevelopment of the diffuse reflection light image P The image may include a specular reflection image P1, a specular reflection image P2, a multiple reflection image P3, and a vignetting image P4. Although not shown in FIG. 8, the redevelopment C0 is a process for analyzing an image of light from a light source other than the projection device 8. Although not shown in Figure 8, the redevelopment C0 may include the image reproduced above. It may contain a cut-off luminance image P5. Also, when the measurement area PL is set in the measurement conditions, In this case, the measurement area PL may be displayed superimposed on the redeveloped image C0. 0 is an example, and when the measurement conditions are changed, the redevelopment C0 changes. When the conditions are changed, the diffuse reflection image P1, the specular reflection image P2, the multiple reflection image P3, and the vignetting image P The intensity of the light forming the image 4 and the position of the image change or disappear.

[0097] Here, the detection unit 86 detects an inappropriate image (specular reflection light image P2 and multiple reflection light image P3) based on the analysis result data. The detecting unit 86 detects the improper images P3. The evaluation is not required for the detected appropriate image (diffuse reflection light image P1). The presence or absence of the vignetting image P4 and the inappropriate brightness image P5 may be derived by evaluation (determination). In other words, the detection unit 86 only detects appropriate images and inappropriate images, and the detected inappropriate images are It is not necessary to evaluate both the appropriate image and the image. The detection unit 86 detects appropriate and inappropriate images, and the operator can refer to the detection results. By doing so, the measurement conditions can be set appropriately.

[0098] Furthermore, the detection unit 86 detects the diffuse reflection light image P1 as an appropriate image based on the analysis result data. Therefore, it can be said that inappropriate images are detected from images other than the diffuse reflected light image P1. The images other than the diffuse reflection light image P1 are the specular reflection light image P2 and the multiple reflection light image P3. In the detection based on the analysis result data, the detection unit 86 detects the vignetting image P4 and the inappropriate brightness The image P5 may be detected as an inappropriate image.

[0099] When detecting the vignetting image P4, the detection unit 86 performs detection based on the analysis result data. When detecting the vignetting image P4, the detection unit 86 calculates the number of incident light rays, which is the number of rays of the diffusely reflected light L1 that are reflected at the intersection points and enter the imaging device 9, extracted in step S22 of FIG. 6. The detection unit 86 then divides this number of incident light rays by the total number of light rays divided in step S10 of FIG. 6, to calculate an incident ratio value. This incident ratio value can be said to be a value indicating the ratio of light that enters the imaging device 9 as diffusely reflected light, out of the measurement light L. If this incident ratio value is smaller than a predetermined threshold, the detection unit 86 detects the image formed by the rays of the diffusely reflected light L1 that enter the imaging device 9 as the vignetting image P4 and detects the vignetting image P4 as an inappropriate image. If this incidence ratio value is equal to or greater than a predetermined threshold, the detection unit 86 does not detect the vignetting image P4 (detects that there is no vignetting image P4) and detects the image formed by the rays of the diffusely reflected light L1 incident on the imaging device 9 as the diffusely reflected light image P1, i.e., the appropriate image. This threshold may be set by an operator, for example, taking into consideration the influence of the vignetting image P4 on the measurement accuracy of the object M. If the vignetting image P4 is detected, the detection unit 86 uses the area of ​​the detected vignetting image P4 as R1 in calculating the influence V4 in step S38 of FIG. 7 in evaluating the vignetting image P4. If the vignetting image P4 is not detected, the detection unit 86 uses the detected diffusely reflected light image P1 as R1 in evaluating the vignetting image P4, as described above. Note that the vignetting image P4 may be detected using the same method as the method used to evaluate the vignetting image P4 (step S38 of FIG. 7). When the vignetting image P4 is detected using the same method as that for evaluating the vignetting image P4, it is not necessary to perform both the detection of the vignetting image P4 and the evaluation of the vignetting image P4, and it is sufficient to perform at least one of them.

[0100] Furthermore, when detecting the inappropriate brightness image P5, the detection unit 86 performs the detection based on the analysis result data. In detecting the inappropriate brightness image P5, the detection unit 86 detects the image P5 reflected at the intersection and incident on the imaging device 9. The intensity of the light beam of the diffuse reflected light L1 incident on the imaging device 9 is calculated by The average intensity is calculated by averaging all of the diffused light incident on the image pickup device 9. The intensity of the reflected light L1 is calculated for all the rays of the diffuse reflected light L1 incident on the imaging device 9. The sum is then divided by the number of rays of the diffuse reflected light L1 incident on the imaging device 9. However, it may be, for example, a geometric mean value. If this average intensity is smaller than a predetermined threshold, the diffuse reflected light L1 incident on the image capture device 9 is The image formed by the light beam is detected as an inappropriate brightness image P5, and the inappropriate brightness image P5 is If the average intensity is equal to or greater than a predetermined threshold, the detection unit 86 detects the image as an inappropriate image. The image P5 with appropriate brightness is not detected (the image P5 with inappropriate brightness is detected to be absent), and the image P5 is incident on the imaging device 9. The image formed by the light rays of the diffuse reflected light L1 is called the diffuse reflected light image P1, i.e., the proper image. This threshold value is set based on, for example, the influence of an inappropriate brightness image P5 on the measurement accuracy of the object M to be measured. When an inappropriate brightness image P5 is detected, the detection unit 86 In the evaluation of the inappropriate brightness image P5, the detection unit 86 detects the inappropriate brightness image P5. The intensity of the light rays is summed up as U3 in equation (3) to calculate the influence V3. If P5 is not detected, the detection unit 86 performs the above-described evaluation of the inappropriate brightness image P5. Similarly, the intensity of the light rays forming the detected diffuse reflection light image P1 is summed as U3 in equation (3). Then, the impact V3 is calculated.

[0101] In addition, in detecting the inappropriate brightness image P5, the detector 86 detects the light reflected at the intersection and directed to the imaging device 9. For each of the intensities of the incident diffusely reflected light L1, i.e., U3 in equation (3), The detecting unit 86 may detect whether the intensity of the reflected light at the intersection is equal to or greater than a predetermined intensity. Among the images formed by the rays of the diffuse reflected light L1 incident on the imaging device 9, An image having an intensity equal to or greater than the predetermined intensity is detected as a diffuse reflection image P1, i.e., a proper image. An image having an intensity less than the predetermined value is detected as an inappropriate brightness image P5, i.e., an inappropriate image. The detection unit 86 determines the intensity of the light ray forming the detected inappropriate brightness image P5 as U3 in equation (3). In this case, the detection unit 86 calculates the influence V3 by adding up the intensity of one light ray. For images with low brightness (detected as inappropriate brightness image P5), but with high brightness overall, , it can be evaluated that it is not an inappropriate brightness image P5.

[0102] In this way, when the brightness of the diffuse reflection light image P1 is low, the detection unit 86 detects an inappropriate brightness image P 5. That is, when the luminance of the diffuse reflected light image P1 is low, the detection unit 86 detects that In other words, when the intensity of the ray of the diffuse reflected light L1 is low, it is detected as an inappropriate brightness image P5. However, the intensity of the ray of diffuse reflected light L1 also varies. For example, The light is reflected again in the imaging optical system 21 (lens) of the imaging device 9 and forms an image as a flare. Therefore, the detecting unit 86 detects the diffuse reflection If the intensity of the light L1 is too high (the brightness of the diffuse reflection image P1 is too high), it will be considered inappropriate. In this case, the detection unit 86 may detect the luminance image P5 by using the average intensity or the When U3 is outside the predetermined range, the image formed by the rays of the diffuse reflected light L1 (diffuse reflected light image P1) is detected as an inappropriate brightness image P5. When U3 in formula (3) is within a predetermined range, the image ( The diffuse reflection light image P1) is a reflection light image without an inappropriate brightness image P5, i.e., the inappropriate brightness image P5 is an inappropriate image. It is to be noted that this predetermined range is a number between a predetermined upper limit value and a predetermined lower limit value. The upper and lower limits of the value range affect the measurement accuracy of the object M due to the inappropriate brightness image P5. The operator may set this value taking into consideration the influence of the above.

[0103] The inappropriate brightness image P5 was detected by the method used to evaluate the inappropriate brightness image P5 (the step in FIG. 7). The same method as in step S36 may be used. Therefore, when an inappropriate brightness image P5 is detected, It is not necessary to evaluate the inappropriate brightness image P5 at the same time. When detecting the vignetting image P4 using the vignetting image detection method, the detection of the vignetting image P4 and the evaluation of the vignetting image P4 are combined. It is not necessary to perform both of them at the same time; it is sufficient to perform at least one of them.

[0104] In this way, the detection unit 86 detects the specular reflection light image P2, the multiple reflection light image P3, the vignetting image P4, and the improper reflection light image P5. The low-luminance image P5 is detected as an inappropriate image, and the vignetting image P4 and the inappropriate luminance image P5 are not evaluated. The detected diffuse reflection light image P1 may be detected as a suitable image. Based on the result data, a specular reflection image P2, a multiple reflection image P3, a vignetting image P4, and a desired brightness are obtained. Determine whether a diffuse reflection light image P1 (inappropriate brightness image P5) with a certain intensity or less is present within the measurement area PL. If the detected image is within the measurement area PL, it may be detected as an inappropriate image. 86 is a specular reflection image P2, a multiple reflection image P3, and a vignetting image P4 based on the analysis result data. , and a diffuse reflection light image P1 (inappropriate brightness image P5) having a brightness lower than a predetermined intensity is included in the imaging region PR. If the image is within the imaging region PR, it may be detected as an inappropriate image. .

[0105] In this embodiment, the image analysis execution unit 84 also uses the measurement conditions acquired by the condition acquisition unit 82. Analysis is also performed under measurement conditions other than those listed above, and the analysis results data are also obtained. Measurement conditions other than the measurement conditions acquired by the acquisition unit 82 are described as other measurement conditions, and the condition acquisition unit 82 The measurement conditions acquired by the image analysis execution unit 84 are referred to as acquired measurement conditions. At least one of them (the relative position of the object M to be measured with respect to the optical probe 3 and the optical probe 3, the relative orientation of the object M to be measured, the intensity of the measurement light L, and the exposure and exposure time of the imaging device 9. and at least one of the measurement area) by a predetermined value, different measurement conditions can be obtained. Then, the detection unit 86 sets the value of the measurement result data under the different measurement conditions. Then, the detection unit 86 detects an inappropriate image under different measurement conditions. Based on the result of the image detection, the detection unit 86 evaluates the inappropriate image. The inappropriate and appropriate images detected under the conditions were evaluated in the same manner as under the acquisition measurement conditions. , calculate each influence V0.

[0106] The detection unit 86 determines how the influence V0 under the different measurement conditions differs from the influence V0 under the acquisition measurement conditions. That is, the detection unit 86 detects how the influence V0 under different measurement conditions changes. Calculate how the influence V0 changes under the measurement conditions.

[0107] The detection unit 86 detects whether the influence V1 under the different measurement conditions is greater than the influence V1 under the acquisition measurement conditions. In this case, it is determined that the impact V1 will increase if the measurement conditions are changed to other measurement conditions. When the influence V1 under the acquisition measurement conditions is smaller than the threshold value (the specular reflection image P2 is determined to be an inappropriate image), In the case where the influence V1 under the other measurement conditions is greater than the influence V1 under the acquisition measurement conditions, If it is large, the specular reflection image P2 is likely to be regarded as an inappropriate image under the different measurement conditions. It can be said that the influence V1 under the acquired measurement conditions is equal to or greater than the threshold (specular reflection light In the case where image P2 is determined to be an inappropriate image, the influence V1 under different measurement conditions is If the influence V1 of the threshold value is larger than the influence V1 of the threshold value under the other measurement conditions, the influence V1 will be even larger than the threshold value. Therefore, the other measurement conditions are such that the specular reflection image P2 is less likely to be regarded as an appropriate image. In other words, the influence V1 under different measurement conditions is the influence V2 under the acquisition measurement conditions. If it is larger than V1, the specular reflection image P2 may be considered an inappropriate image. becomes higher, or the specular reflection image P2 becomes less likely to be regarded as a suitable image. It can be said that.

[0108] The detection unit 86 detects whether the influence V1 under the different measurement conditions is smaller than the influence V1 under the acquisition measurement conditions. In this case, it is judged that the influence V1 will be smaller if the measurement conditions are changed to other measurement conditions. When the influence V1 under the acquisition measurement conditions is smaller than the threshold value (the specular reflection image P2 is determined to be an inappropriate image), In the case where the influence V1 under the other measurement conditions is greater than the influence V1 under the acquisition measurement conditions, If the threshold value is smaller, the influence V1 will be smaller than the threshold value under the other measurement conditions. The other measurement conditions are those under which the possibility that the specular reflection image P2 will be judged as an inappropriate image is further reduced. When the influence V1 under the acquisition measurement conditions is equal to or greater than the threshold value (when the specular reflection image P2 is In the case where the image is deemed appropriate, the influence V1 under different measurement conditions is calculated as the influence V If it is smaller than 1, the specular reflection image P2 is likely to be the appropriate image under the different measurement conditions. In other words, the influence V1 under the other measurement conditions is If the influence level is smaller than V1, the specular reflection image P2 may be regarded as an inappropriate image under the other measurement conditions. Either the likelihood of the specular reflection image P2 being regarded as the correct image increases or the likelihood of the specular reflection image P2 being regarded as the correct image increases. It can be said that this is the case.

[0109] The detection unit 86 detects whether the influence V2 under the different measurement conditions is greater than the influence V2 under the acquisition measurement conditions. In this case, it is determined that the impact V2 will increase if the measurement conditions are changed to other measurement conditions. When the influence V2 under the acquisition measurement conditions is smaller than the threshold value (the multiple reflection light image P3 is determined to be an inappropriate image), In the case where the influence V2 under different measurement conditions is greater than the influence V2 under the acquisition measurement conditions, If the difference is too large, the multiple reflection light image P3 may be regarded as an inappropriate image under the different measurement conditions. When the impact V2 under the acquired measurement conditions is equal to or greater than the threshold (multiple In the case where the reflected light image P3 is determined to be an inappropriate image, the influence V2 under different measurement conditions is obtained. If the influence V2 under the other measurement conditions is greater than the threshold, the influence V2 under the other measurement conditions is Therefore, the other measurement conditions make it more likely that the multiple reflection light image P3 will be an appropriate image. In other words, the influence V2 under different measurement conditions is If the influence level under the condition is greater than V2, the other measurement condition is inappropriate for the multiple reflection light image P3. Will the possibility of the multiple reflection light image P3 being regarded as a proper image increase, or will the possibility of the multiple reflection light image P4 being regarded as a proper image decrease? It can be said that either

[0110] Similarly, the detection unit 86 detects whether the influence V2 under the different measurement conditions is greater than the influence V2 under the acquisition measurement conditions. If it becomes smaller, it is determined that the influence V2 will become smaller if the measurement conditions are changed to other measurement conditions. For example, if the influence V2 under the acquisition measurement conditions is smaller than the threshold value (the multiple reflection light image P3 is inappropriate), In the case where the image is not cut off, the influence V2 under different measurement conditions is the influence under the acquisition measurement conditions. If the influence level V2 is smaller than the threshold value under the other measurement conditions, the influence level V2 will be even smaller than the threshold value. Therefore, under the different measurement conditions, the possibility that the multiple reflection light image P3 will be determined as an inappropriate image is further reduced. When the influence V2 under the acquired measurement conditions is equal to or greater than the threshold (multiple reflections), In the case where the incident light image P3 is determined to be an inappropriate image, the influence V2 under different measurement conditions is When the influence level V2 is smaller than the influence level V1 under the other measurement conditions, the multiple reflection light image P3 is considered to be an appropriate image. In other words, the influence V2 under different measurement conditions is If the influence V2 under the acquisition measurement conditions is smaller than that under the other measurement conditions, the multiple reflection light image P3 The possibility that the multiple reflection light image P3 will be determined as an appropriate image is reduced, or the possibility that the multiple reflection light image P4 will be determined as an appropriate image is increased. It can be said that either

[0111] The detection unit 86 detects whether the influence V3 under the different measurement conditions is greater than the influence V3 under the acquisition measurement conditions. In this case, it is judged that the impact V3 will increase if the measurement conditions are changed to other measurement conditions. When the influence V3 under the acquisition measurement conditions is smaller than the threshold value (the inappropriate brightness image P5 is determined as an inappropriate image), In the case where the influence V3 under different measurement conditions is greater than the influence V3 under the acquisition measurement conditions, If it becomes larger, the other measurement condition is that the inadequate brightness image P5 is regarded as an appropriate image (i.e., It can be said that this is a measurement condition that increases the possibility of evaluating that there is no luminance image P5. In the case where the influence V3 in the condition is equal to or greater than the threshold value (the inappropriate brightness image P5 is not determined as an inappropriate image, and In the case where it is evaluated that there is no luminance image P5, the influence V3 under different measurement conditions is obtained. If the impact V3 under the other measurement conditions is greater than the threshold, the impact V3 under the other measurement conditions is Therefore, another measurement condition is the presence of an inappropriate brightness image P5 (the inappropriate brightness image P5 is It can be said that these are measurement conditions that further reduce the possibility of the image being deemed appropriate. If the influence V3 under the separate measurement conditions is greater than the influence V3 under the acquisition measurement conditions, The condition is whether the inappropriate brightness image P5 is likely to be regarded as a suitable image or whether the inappropriate brightness image P5 is likely to be regarded as a suitable image. It can be said that either the image is less likely to be deemed inappropriate or the image is less likely to be deemed inappropriate.

[0112] The detection unit 86 detects whether the influence V3 under the different measurement conditions is smaller than the influence V3 under the acquisition measurement conditions. In this case, it is judged that the impact V3 will be smaller if the measurement conditions are changed to other measurement conditions. When the influence V3 under the acquisition measurement conditions is smaller than the threshold value (the inappropriate brightness image P5 is determined as an inappropriate image), In the case where the influence V3 under different measurement conditions is greater than the influence V3 under the acquisition measurement conditions, If the threshold value is smaller, the influence V3 becomes even smaller under the different measurement conditions. Another measurement condition is that the inappropriate brightness image P5 is considered to be an appropriate image (i.e., there is no inappropriate brightness image P5). It can be said that these are measurement conditions that further reduce the possibility of the measurement being evaluated as "unclear." When the intensity V3 is equal to or greater than the threshold value (when the inappropriate brightness image P5 is not determined to be an inappropriate image, and the inappropriate brightness image P5 In the case where it is evaluated that there is no influence under different measurement conditions, the influence V3 under the acquisition measurement conditions When the degree is smaller than V3, another measurement condition is that there is an inappropriate brightness image P5 (inappropriate brightness image P 5 is considered to be an inappropriate image). If the influence V3 under the separate measurement conditions is smaller than the influence V3 under the acquisition measurement conditions, The predetermined condition is that the possibility that the inappropriate brightness image P5 is determined to be an appropriate image is low, or the inappropriate brightness image P5 is determined to be an appropriate image. It can be said that either there is a high possibility that the image will be deemed inappropriate or

[0113] The detection unit 86 detects whether the influence V4 under the different measurement conditions is greater than the influence V4 under the acquisition measurement conditions. In this case, it is determined that the impact V4 will increase if the measurement conditions are changed to other measurement conditions. When the influence V4 under the acquisition measurement conditions is smaller than the threshold value (the vignetting image P4 is determined to be an inappropriate image), In the case where the influence V4 under the other measurement conditions is greater than the influence V4 under the acquisition measurement conditions, When the vignetting image P4 is larger than the vignetting image P4, the other measurement condition is set to be the appropriate image (i.e., when the vignetting image P4 is It can be said that these are measurement conditions that increase the possibility of the effect being evaluated as non-existent. When V4 is equal to or greater than the threshold value (the vignetting image P4 is not judged as an inappropriate image and is judged as not having the vignetting image P4), In the case where the impact V4 under different measurement conditions is greater than the impact V4 under the acquisition measurement conditions, If it becomes larger, the influence V4 becomes even larger than the threshold value under the different measurement conditions. Another measurement condition is that there is a vignetting image P4 (the vignetting image P4 is considered to be an inappropriate image). In other words, the influence V4 under different measurement conditions is taken into account. If the influence of the vignetting image P4 is greater than V4 under the measurement conditions, the other measurement conditions are Will the vignetting image P4 be more likely to be regarded as an inappropriate image, or will the vignetting image P4 be less likely to be regarded as an inappropriate image? It can be said that it is either one of the following.

[0114] The detection unit 86 detects whether the influence V4 under the different measurement conditions is smaller than the influence V4 under the acquisition measurement conditions. In this case, it is judged that the impact V4 will be reduced if the measurement conditions are changed to other measurement conditions. When the influence V4 under the acquisition measurement conditions is smaller than the threshold value (the vignetting image P4 is determined to be an inappropriate image), In the case where the influence V4 under the other measurement conditions is smaller than the influence V4 under the acquisition measurement conditions, When the threshold value is increased, the influence V4 becomes smaller than the threshold value under the other measurement conditions. The condition is that the vignetting image P4 is considered to be an appropriate image (i.e., it is evaluated that there is no vignetting image P4). It can be said that this is a measurement condition in which the possibility of the measurement being performed is low. The influence V4 under the measurement conditions obtained is equal to or greater than the threshold. In this case (when the vignetting image P4 is not judged to be an inappropriate image and is evaluated as not having vignetting image P4), Therefore, if the influence V4 under the different measurement conditions is smaller than the influence V4 under the acquisition measurement conditions, The measurement conditions are such that the possibility increases if there is a vignetting image P4 (the vignetting image P4 is considered an inappropriate image). In other words, the influence V4 under different measurement conditions is the influence under the acquisition measurement conditions. If the vignetting level is smaller than V4, the other measurement conditions are that the vignetting image P4 may be considered an appropriate image. Either the value of the vignetting image P4 is lower, or the vignetting image P4 is more likely to be regarded as an inappropriate image. It can be said that.

[0115] In this way, the detection unit 86 detects how the influence V0 changes when the measurement conditions are changed. The evaluation result of the detection unit 86 in this embodiment is calculated based on the influence V0 and the threshold value. Since the inappropriate image and the appropriate image are evaluated based on the comparison, the detection unit 86 determines whether the influence V0 is By calculating how the evaluation result of the detection unit 86 changes, the change in the evaluation result of the detection unit 86 is calculated. That is, as described above, when the influence V4 becomes large, the detection unit The evaluation result of 86 is that the vignetting image P4 is less likely to be regarded as a suitable image, or the vignetting image P4 is The probability that the image will be deemed inappropriate increases. The information on the change in the influence V0 when the fixed condition is changed is hereinafter referred to as change information. This can also be said to be information on the change in the evaluation results when the measurement conditions are changed.

[0116] Returning to FIG. 3A, the output unit 88 outputs the detection result information, which is information based on the detection result of the image analysis unit 83. The output unit 88 outputs the information to the display unit 33, thereby displaying an image on the display unit 33. The image displayed on the display unit 33 will now be described.

[0117] 9A is a diagram showing an example of a menu image A. The output unit 88 allows the operator to select the shape measurement When setting the measurement conditions, information for displaying the menu image A on the display unit 33 is output. Then, the display unit 33 displays the menu image A. A is an instruction image A1, a scan margin setting image A2, and measurement check images A3 and A4. The menu includes an initial condition image A5, a verification scanned image A6, and an OK image A7. In image A, when the operator selects measurement check images A3 and A4 using the input unit 32, The analysis unit 40 performs a measurement check. In addition, in the menu image A, the operator inputs the When the verification scan image A6 is selected by the above, the measurement control unit 38 performs a verification scan. The measurement check refers to the analysis by the image analysis unit 83. Specifically, the design information acquisition unit 80 Based on the acquired design information and the measurement conditions acquired by the condition acquisition unit 82, the image analysis execution unit 84 The analysis result data is calculated, and the detection unit 86 detects the inappropriate image and the appropriate image to obtain the detection result. and derives the evaluation result by performing an evaluation based on the detection result. As described above, in this embodiment, the measurement conditions acquired by the condition acquisition unit 82, i.e., the analysis The measurement conditions to be performed are the measurement conditions determined by the operator through teaching (determined measurement conditions). A proof scan is a projection scan using the measurement conditions determined by the operator through teaching (determined measurement conditions). The measuring light L from the device 8 is projected onto the object M to be measured, and the measuring light L projected onto the object M is captured by an imaging device. This refers to a process of generating a point cloud from a captured image T captured by the imaging device 9. Each image in the menu image A will be explained below.

[0118] The instruction image A1 is an image that displays information informing the operator of the operation that he or she should perform next. In the example of FIG. 9A, the instruction image A1 includes the information "Teaching will be conducted." This is information to let the operator know that teaching is being performed. Instruction image A1 is "Adjust the stage and sensor position.", "Adjust the light intensity." "Please adjust the measurement area." "Please set the measurement speed." This information allows the operator to decide what measurement conditions to adjust during teaching. The instruction image A1 is information to be recognized by the user. After setting the measurement conditions, please perform a measurement check. The instruction image A1 is information to make the operator aware of what to do. Please scan and check the actual point cloud. Once you're done, run a verification scan to make sure there are no problems with the generated point cloud. The instruction image A1 is information to prompt the user to press OK when completed. This information is used after the measurement conditions have been determined and the verification scan has been completed. If there are no problems, it is OK and the information prompts you to start the actual shape measurement. The information displayed by the instruction image A1 is not limited to these. A1 may not be included.

[0119] FIG. 9B is a diagram illustrating the scan margin. The scan margin setting image A2 is an image that can be selected by the operator through operation of the input unit 32, allowing the operator to determine the scan margin. As shown in FIG. 9B, the scan margin is a margin between the scan start position SC1 and scan end position SC4 of the measurement light L, i.e., the position where scanning of the measurement light L starts and the position where scanning ends, relative to the measurement position of the object M. That is, during measurement, the measurement light L is moved (scanned) on a trajectory from the scan start position SC1 to the scan end position SC4. However, the object M is actually located between the measurement start position SC2 and the measurement end position SC3. The scan margin is a value that indicates how far upstream the scan start position SC1 is from the measurement start position SC2 on the trajectory and how far downstream the scan end position SC4 is from the measurement end position SC3 on the trajectory. As shown in FIG. 9A , the scan margin setting image A2 includes a start setting image A2a and an end setting image A2b. When the input unit 32 includes a mouse and a keyboard, the operator operates the mouse of the input unit 32 to superimpose the mouse cursor on the start setting image A2a or end setting image A2b of the scan margin setting image A2 on the screen of the display unit 33, i.e., on the menu image A. The start setting image A2a is an image that allows the operator to set the scan margin at the scan start position SC1 as a percentage, i.e., how far forward the scan start position SC1 is from the measurement start position SC2. The end setting image A2b is an image that allows the operator to set the scan margin at the scan end position SC4 as a percentage, i.e., how far behind the measurement end position SC3 the scan end position SC4 is from the measurement end position SC3. With the cursor superimposed on the start setting image A2a, the operator can click the mouse button and operate the keyboard to input, for example, a numerical value to set the scan margin at the scan start position SC1.Furthermore, the operator can set the scan margin at the scan end position SC4 by clicking the mouse button with the cursor superimposed on the end setting image A2b and operating the keyboard included in the input unit 32, for example, to input a numerical value. If the display unit 33 is a touch panel, the operator can set the scan margin by touching the position on the display screen of the display unit 33 where the start setting image A2a or the end setting image A2b is displayed, to select the start setting image A2a or the end setting image A2b, and then touching the operation panel displayed on the display screen of the display unit 33 to input a numerical value. However, the menu image A does not have to include the scan margin setting image A2.

[0120] As shown in FIG. 9A, the measurement check images A3 and A4 are used to perform a measurement check. When the input unit 32 includes a mouse, the operator operates the mouse of the input unit 32. Then, on the screen of the display unit 33, that is, on the menu image A, the cursor of the mouse is moved to the measurement The operator superimposes the measurement check image A3 or the measurement check image A4. 3 Or, with the cursor over the measurement check image A4, click the mouse button. By doing so, the analysis unit 40 selects the measurement check image A3 or the measurement check image A4. When Measurement Check Image A3 or Measurement Check Image A4 is selected, the measurement check is performed. In addition, if the display unit 33 is a touch panel, the operator can operate the display screen of the display unit 33. By touching the position where measurement check image A3 or measurement check image A4 is displayed, Select the measurement check image A3 or the measurement check image A4. The check image A3 was analyzed under the measurement condition of scanning one tooth at a time, as shown in Figure 9B. On the other hand, the measurement check image A4 is a display for rotating the object to be measured M. This is a display for performing analysis with the measurement condition being to scan all teeth and measure at high speed. The menu image A has at least one of the measurement check images A3 and A4. That's fine.

[0121] The initial condition image A5 is a display for resetting the measurement conditions to the initial settings. If the data includes the above, the operator operates the mouse of the input unit 32 and inputs the following on the screen of the display unit 33: The operator places the mouse cursor on the initial condition image A5. With the cursor overlaid, click the mouse button to display the initial condition image A5. In addition, if the display unit 33 is a touch panel, the operator can select By touching the position where the initial condition image A5 is displayed on the screen, you can select the initial condition image A5. When the operator selects this initial condition image A5, the measurement conditions are changed to the initially set measurement conditions. Return to (initial conditions).

[0122] The verification scan image A6 is a display for performing a verification scan. When the input unit 32 includes a mouse, the operator operates the input unit 32 to input a character using the mouse on the screen of the display unit 33. The operator superimposes the cursor on the verification scan image A6. With the cursor over 6, click the mouse button to start the verification scan. If the display unit 33 is a touch panel, the operator selects the image A6. By touching the location where the verification scan image A6 is displayed on the display screen of 33, the verification scan image A6 Select the scan image A6. After the operator selects the verification scan image A6, the measurement control The measurement control unit 38 executes a verification scan under the determined measurement conditions. 8 is a projection device 8 that projects measurement light L onto the object M to be measured, and a measurement image projected onto the object M to be measured. The image of the constant light L is captured by the imaging device 9. Then, the measurement control unit 38 A point cloud is generated from the captured image T. The operator can confirm the measurement by checking the generated point cloud. Determine whether the set conditions are appropriate.

[0123] The OK image A7 is a display to end teaching and move on to actual measurement. When the input unit 32 includes a mouse, the operator operates the input unit 32 to input a command on the screen of the display unit 33. The operator places the cursor of the mouse on the OK image A7. With the OK image A7 superimposed, click the mouse button to select the OK image A7. In addition, if the display unit 33 is a touch panel, the operator touches the OK button on the display screen of the display unit 33. By touching the position where the image A7 is displayed, the OK image A7 is selected. When K image A7 is selected, the measurement conditions are determined by teaching and the determined measurement conditions are This will allow shape measurements to begin.

[0124] 10 and 11 are diagrams showing an example of the measurement check result screen B. As described above, The operator operates the mouse of the input unit 32, for example, to move the cursor to the measurement check images A3 and A4. With the image superimposed, click the mouse button to display the measurement check image A3. The image analysis unit 83 selects the measurement check images A3 and A4 in this way. That is, the image analysis unit 83 starts the measurement check by executing the image analysis execution unit 84. The image analyzer 83 then analyzes the image and generates analysis result data. Based on the analysis result data, inappropriate images and appropriate images are detected, and based on the detection results, inappropriate images are detected. When the measurement check is completed, the output unit 88 displays the following on the display unit 33: , the detection result information is output and the measurement check result screen B shown in FIG. 10 is displayed. As will be described later, the detection result information is information based on the detection result of the detection unit 86. The measurement check result screen B displayed by is an image showing the detection result information (detection result image to be described later). The operator checks the detection result image C on the measurement check result screen B. By doing so, the measurement conditions in the measurement check may be deemed inappropriate or inappropriate. The operator can visually confirm that there is a cut image. The contents are checked, and if, for example, an inappropriate image is found, the measurement conditions are readjusted.

[0125] FIG. 10 shows an example of a measurement check result screen B when an inappropriate image is detected. 10, the specular reflection light image P2, the multiple reflection light image P3, and the vignetting image P4 are detected as inappropriate images. As shown in Fig. 10, the measurement check result screen B shows the detection result image C. The image C shows the measurement condition image D and the OK image E. In other words, the image is an image that displays the contents of the detection result information based on the result of the detection by the detection unit 86. This is an image that displays information about the inappropriate image that was displayed.

[0126] The output unit 88 outputs the detection result information to the display unit 33, thereby displaying the detection result on the display unit 33. As described above, the detection result information is information based on the detection result of the detection unit 86. The detection result of the detection unit 86 is, as described above, the detected diffuse reflection light image P1 (detected The detected specular reflection light image P2 and the multiple reflection light image P3 (detected inappropriate images) are compared. Point.

[0127] The detection result information also includes the evaluation result of the detection unit 86 as information based on the detection result. The evaluation result is, as mentioned above, information indicating the evaluation (judgment) of an inappropriate image or an appropriate image. In other words, the information on whether there are images evaluated as inappropriate and whether there are images evaluated as appropriate is The evaluation results can be said to be information on whether there is any inappropriate image. It also includes information on whether the image was evaluated, i.e., the type of image that was determined to be inappropriate by the evaluation. Therefore, the information indicating the type of image that was judged to be inappropriate by the evaluation is The images are divided into a regular reflection image P2, a multiple reflection image P3, a vignetting image P4, and an inappropriate brightness image P5. In other words, the evaluation result is information that indicates whether the Information indicating whether or not a reflected light image P2 is evaluated to exist, and information indicating whether or not a multiple reflected light image P3 is evaluated to exist Information indicating whether or not a vignetting image P4 was detected, information indicating whether or not a vignetting image P4 was detected, and information indicating whether or not an inappropriate The evaluation result includes information indicating whether or not the luminance image P5 is present. It is not evaluated as having an appropriate image, that is, it is evaluated as having no inappropriate image (only an appropriate image). It also includes information indicating the

[0128] The detection result information includes change information indicating the change in the influence V0 when the measurement conditions are changed. The detection result information also includes image data for displaying the redevelopment C0 on the display unit 33. , that is, information based on the analysis result data for each position on the light receiving surface 20a. In this case, the image data for displaying the redeveloped image C0 on the display unit 33 is inappropriate for the detection unit 86. The image data of the inappropriate image evaluated as an inappropriate image and the image data of the appropriate image evaluated by the detection unit 86 are Therefore, the image displayed by this image data is The redevelopment C0 is a redevelopment C0 that includes both inappropriate and appropriate images. 0 is information based on the evaluation results, including the evaluated inappropriate images and the evaluated appropriate images. The image data for displaying the redeveloped image C0 on the display unit 33 is generated by the detection unit 86. The image data of the inappropriate image detected by the detector 86 and the image data of the appropriate image detected by the detector 86 are used. That is, the redevelopment C0 may include the detected inappropriate images and the detected appropriate images. It may also be information based on the detection results.

[0129] The detection result information may include the detection result. This is information indicating the inappropriate image and the appropriate image detected by the detection unit 86. The detection results included in the report include information on whether any images were detected as inappropriate and whether any images were detected as appropriate. The detection result information can be said to be information on whether there is an image that has been detected. Information indicating whether an inappropriate image is detected, i.e., whether an inappropriate image is detected. It also includes information indicating the type of image that was detected as inappropriate. The information is whether the image detected as an inappropriate image is a regular reflection light image P2 or a multiple reflection light image P3. In other words, the information contained in the detection result information is information indicating whether the The detection result includes information indicating whether the specular reflection light image P2 is detected or not, and information indicating whether the multiple reflection light image P3 is detected or not. The detection result information includes information indicating whether the detection result has been issued or not. It also includes information indicating whether or not an inappropriate image is detected, i.e., whether or not an inappropriate image is detected. The above evaluation results are information that evaluates whether there are inappropriate images and appropriate images. Therefore, if the detection result information includes the evaluation result, The detection result may not be included in the detection result information. In this case, the evaluation result does not need to be included in the detection result information. It is sufficient if at least one of the evaluation result and the detection result is included. In the following description, it is assumed that the result information includes evaluation results and does not include detection results.

[0130] As shown in FIG. 10, the detection result image C displayed by the display unit 33 based on the detection result information is It includes a redevelopment C0, a detection result notification image C1, an evaluation result image C2, and a change image C3. The output unit 88 outputs image data for displaying the redeveloped image C0 on the display unit 33 as detection result information. 10 is output to the display unit 33, and the redevelopment C0 is displayed on the display unit 33. The developed image C0 includes the specular reflection image P2, the multiple reflection image P3, and the vignetting image P4 as improper images. The redeveloped image C0 is displayed adjacent to the evaluation result image C2 and the modified image C3. However, the display position is arbitrary.

[0131] The output unit 88 outputs the evaluation result to the display unit 33 as detection result information. The detection result notification image C1 is displayed on the display 33. The detection result notification image C1 indicates whether or not an inappropriate image is detected. However, the image data for displaying the redevelopment C0 is also the image that is displayed when there is an inappropriate image. Therefore, both the redeveloped image C0 and the evaluation result image C2 described later are inappropriate. Therefore, in other words, the detection result image C is an image showing the presence or absence of an incision. It can be said that the image indicates information on whether or not there is an inappropriate image.

[0132] If it is determined that there is an inappropriate image, the output unit 88 outputs the inappropriate image as the evaluation result. Information indicating that there are images that have been evaluated and what inappropriate images have been evaluated , that is, information on the type of the evaluated inappropriate image is output to the display unit 33. The result notification image C1 is a type of inappropriate image that says, "Vignetting was detected in the measurement area." The image type is vignetting image P4, and the vignetting image P4 is evaluated as an inappropriate image. Multiple reflections were detected in the area. The type of inappropriate image is multiple reflection light image P3. , the message that the multiple reflection light image P3 was evaluated as an inappropriate image and the message "Specular reflection was detected in the measurement area" were displayed. The type of inappropriate image is the specular reflected light image P2, and the specular reflected light image P2 is inappropriate. The detection result notification image C1 also includes a message indicating that the image has been evaluated as a cut image. Please consider changing the position and orientation of the stage." The detection result notification image C1 is not limited to the display using the above-mentioned text example. The display may be made by other character strings. Also, the display is not limited to characters, and may be made by pictures or other means. The information that an inappropriate image has been detected and the type of inappropriate image detected will be displayed. The detection result notification image C1 may also display information indicating whether or not there is an inappropriate image. As shown in FIG. 10, the detection result image C may be a display of only the measurement result. It is displayed in the upper area of ​​the fixed check result screen B, but the display position is arbitrary.

[0133] The output unit 88 outputs the evaluation result to the display unit 33 as detection result information. The evaluation result image C2 is displayed. The evaluation result image C2 is an image showing the evaluation result of the inappropriate image. The evaluation result for displaying the evaluation result image C2 is, for each image evaluated as an inappropriate image, This information includes the evaluation by the detection unit 86. In the example of FIG. 10, the vignetting image P4 and the specular reflection image P2 and the multiple reflection light image P3 are evaluated as inappropriate images, and the inappropriate brightness image P5 is evaluated as inappropriate images. In other words, it is evaluated that there is no inappropriate brightness image P5. In the example of FIG. 10, the evaluation result for displaying the evaluation result image C2 is the polar opposite of the vignetting image P4. Information that the reflected light image P2 and the multiple reflected light image P3 are evaluated as inappropriate images, and information that the inappropriate brightness image P5 includes information that the image is not evaluated as an inappropriate image (there is no inappropriate brightness image P5).

[0134] Therefore, in the example of FIG. 10, the evaluation result image C2 is a vignetting image P4 ("vignetting" in FIG. 10). ), an inappropriate luminance image P5 ("brightness" in Fig. 10), and a specular reflection image P2 ("positive" in Fig. 10). Evaluation of the multiple reflection light image P3 ("multiple reflection" in FIG. 10) In the example of FIG. 10, the vignetting image P4, the specular reflection image P2, the multiple reflection image P3, and the specular reflection image P4 are displayed as images. The image P3 is judged to be an inappropriate image in the evaluation by the detection unit 86, and is therefore marked with an X. On the other hand, the inappropriate brightness image P5 is evaluated by the detection unit 86 as being inappropriate. Since it is not considered an appropriate image, it is marked as OK as there is no problem. In the evaluation result image C2, the types of images evaluated as inappropriate images are displayed in the first column. The second column shows the evaluation results of the images displayed in the first column that are evaluated as inappropriate (here, ○ or However, the evaluation result image C2 is evaluated as an inappropriate image. If the image shows the evaluation by the detection unit 86 for each image, the display method is a table such as that shown in FIG. The evaluation result image C2 is not limited to the symbols such as O and X, and may be any shape. However, other symbols may be used as long as the evaluation result by the detection unit 86 can be notified to the operator. In addition, it is not limited to symbols, but may be a character string. In this case, for example, If it is not evaluated as inappropriate, it will be displayed as "OK"; if it is evaluated as inappropriate, it will be displayed as "NG". The evaluation result image C2 may be displayed in color. In this case, for example, If it is not evaluated as an inappropriate image, the target part of the evaluation result image C2 is displayed in green. If the image is evaluated as inappropriate, the target area of ​​the evaluation result image C2 will be displayed in red. The evaluation result may be reported to the operator as visual information in the form of an evaluation result image C2. The evaluation result is not limited to being notified to the operator by voice whether or not there is an inappropriate image evaluated. In this case, for example, a sound may be output to the operator from a speaker (not shown). Outputs voice.

[0135] The output unit 88 outputs the change information to the display unit 33 as detection result information. The change image C3 is displayed. The change image C3 is an image showing change information. The change information is This is information on the change in the influence V0 when the measurement conditions are changed. More specifically, the change image The change information for displaying C3 is obtained by changing the values ​​of the measurement conditions of the shape measuring device 1. This information shows the tendency of change in the impact V0 of images evaluated as inappropriate when The devices included in the shape measuring device 1 are a first rotating unit 53 and a second rotating unit 54 that change the relative position. 54, and table 71 (holding and rotating device 7), and X-moving unit 50X that changes the relative position , a Y moving unit 50Y, and a Z moving unit 50Z, and a projection device 8 that changes the intensity of the measurement light L; An image capture device 9 that changes the exposure and exposure time. In the measuring device 1, the first rotating unit 53 and the table 71 (holding and rotating device 7) are used as a shape measuring device. The measurement conditions to be changed are the first rotating part 53 and the table Therefore, when the angle of the first rotating part 53 is changed, the change information is When the angle of the table 71 is changed, the influence V0 changes. The information on how the impact V0 changes for each image evaluated as inappropriate is included. The change information is stored in the form of the shape measuring device 1, and the devices other than the first rotating unit 53 and the table 71 are stored in the form of the shape measuring device 1. The device may be a device provided by

[0136] In the example of FIG. 10, the change image C3 indicates that the angle of the first rotating part 53 has been changed by +5° from the current measurement conditions. When the angle of the first rotating part 53 is changed by 5 degrees, when the angle of the first rotating part 53 is changed by 5 degrees, and when the table 71 is changed by 10 degrees, The change in each influence V0 when changing the temperature by +5 degrees and when changing the temperature by -5 degrees. Specifically, in the example of FIG. 10, information showing the trend of change in the impact V4 is The information is that the influence V4 of the vignetting image P4 ("vignetting" in FIG. 10) is When the table is changed by +5 degrees, the difference is larger than when the table is changed by +5 degrees. That is, the possibility that the vignetted image P4 is regarded as a suitable image is increased. Image C3 displays a symbol indicating an upward direction as information indicating the trend of change in influence V4. In addition, the influence V4 on the vignetting image P4 is when the first rotating part 53 is changed by −5 degrees. When the table 71 is changed by -5 degrees, the vignetting image P4 becomes smaller. Therefore, the change image C3 is less likely to be regarded as an appropriate image. A downward symbol is displayed as information indicating a trend.

[0137] The information indicating the change tendency of the influence V3 is the inappropriate luminance image P5 (the “brightness” in FIG. 10). The influence V3 of the first rotating part 53 is changed by -5 degrees, and the influence V3 of the first rotating part 53 is changed by -5 degrees. When the angle is changed by +5 degrees, the inappropriate brightness image P5 becomes larger, that is, the inappropriate brightness image P6 becomes larger. Therefore, the change image C3 shows the tendency of change in the influence V3. As information indicating this, a symbol indicating the upward direction is displayed. The influence V3 is obtained when the first rotating portion 53 is rotated by +5 degrees and when the table 71 is rotated by -5 degrees. In other words, the possibility that the inappropriate brightness image P5 is determined to be an inappropriate image is small. Therefore, the change image C3 provides the following information indicating the change tendency of the influence V3: A symbol indicating a downward direction is displayed.

[0138] The information indicating the tendency of change in the influence V2 is provided by the multiple reflection light image P3 (the “multiple reflection” in FIG. 10). The influence V2 of the first rotating part 53 is changed by -5 degrees, and the influence V2 of the first rotating part 53 is changed by -5 degrees. When the angle θ is changed by -5 degrees, the image P3 of the multiple reflection light becomes smaller, that is, the image P4 of the multiple reflection light becomes an appropriate image. Therefore, the change image C3 shows the tendency of the change in the influence V2. For information, a symbol indicating the upward direction is displayed. The degree V2 is the difference between when the first rotating portion 53 is changed by +5 degrees and when the table 71 is changed by +5 degrees. In other words, the possibility that the multiple reflection light image P3 is regarded as an appropriate image becomes even lower. Therefore, the change image C3 is used as information showing the change tendency of the influence V2. A symbol indicating the direction is displayed.

[0139] The information indicating the tendency of change in the influence V1 is provided by the specular reflection image P2 ("specular reflection" in FIG. 10). ) the influence V1 of the first rotating part 53 is changed by +5 degrees, and the influence V2 of the first rotating part 53 is changed by +5 degrees. When the table 71 is changed by -5 degrees, when the table 71 is changed by +5 degrees, when the table 71 is changed by - In both cases where the angle is changed by 5 degrees, the influence V1 is low, so the specular reflection Furthermore, in the example of FIG. 10, the first image P2 is more likely to be the appropriate image. When the rotational part 53 is changed by +5 degrees, when the first rotational part 53 is changed by -5 degrees, and when the If you change Bull 71 by +5 degrees or Table 71 by -5 degrees, In this case, the influence V1 is zero, so the detection unit 86 detects the specular reflection image as Therefore, the change image C3 shown in FIG. 10 is a change of the influence level V1. The change image C3 shows the current measurement conditions. In this example, the influence V1 is zero (determined to be an appropriate image), and the influence If the impact level V1 becomes high, an X may be displayed. However, the change image C3 is displayed under the current measurement conditions. In some cases, the influence V1 is greater than zero, and if the measurement conditions are changed, the influence V1 value becomes zero. In this case, a symbol indicating the upward direction may be displayed. Also, the change image C3 indicates the influence of the current measurement conditions. If the influence V1 is zero and the value of the influence V1 increases when the measurement conditions are changed, the value is shown downward. Also, the change image C3 indicates the change when the influence V1 is greater than zero under the current measurement conditions. If the influence V1 value is larger than the reference value and does not change when the measurement conditions are changed, a downward sign is displayed. It may be displayed.

[0140] In the example of FIG. 10, the change image C3 is displayed in the same table as the evaluation result image C2. In the example of Figure 10, as mentioned above, the first column of the table shows the images that are evaluated as inappropriate. The types are displayed, and the second column shows the images that are evaluated as inappropriate and those displayed in the first column. The evaluation of the first rotating part 53 is displayed in the third column of the table. The information showing the trend of change in each influence V0 when changed by 5 degrees is displayed, and in the fourth column of the table, Displays information showing the tendency of change in each degree of influence V0 when the first rotating part 53 is changed by -5 degrees. The fifth column of the table shows the tendency of change in each influence V0 when Table 71 is changed by +5 degrees. The sixth column of the table shows the degree of influence when changing the table 71 by -5 degrees. The information showing the trend of change in V0 is displayed. However, the result of the change image C3 shown in Figure 10 As described above, the change image C3 has the same appearance as the evaluation result image C2. The image displayed in the center of the measurement check result screen B (below the detection result notification image C1) However, the display method and display position of the evaluation result image C2 and the change image C3 are not limited to this. For example, the evaluation result image C2 and the modified image C3 may be in separate tables.

[0141] The change information indicates whether the evaluation results of the inappropriate image change when the measurement conditions are changed. It is sufficient if the information indicates the change in the impact V0 for each image evaluated as inappropriate. For example, the change information may be, for example, a change in the evaluation result when the measurement conditions are changed. For example, the change image C3 may be information indicating whether or not there is an inappropriate image. The image that is a candidate for an inappropriate image under the measurement conditions is evaluated as an inappropriate image, and the measurement conditions are changed. If the image that is a candidate for inappropriate image is not evaluated as inappropriate, The change image C3 indicates the current measurement condition. If an image that is a candidate for an inappropriate image is not judged as an inappropriate image and the measurement conditions are changed, the inappropriate image is If the candidate image is evaluated as an inappropriate image, an inappropriate image will appear and the image will be displayed downward. A symbol indicating the direction is displayed.

[0142] In addition, the change information is not limited to symbols indicating an upward direction or a downward direction, but also includes the change in the influence V0 If it is possible to notify the operator of changes in the presence or absence of inappropriate images, other symbols may be used. In this case, for example, the change information may be displayed as an up arrow or a down arrow. The transformation information is not limited to symbols, but may be a character string. In this case, for example, the transformation information may be If the value of the impact V0 improves, it is an "improvement." If the value of the impact V0 worsens, The change information may be displayed as a color. In this case, for example, if the value of the influence V0 improves, a green If the value of the influence V0 becomes worse, a red mark is displayed on the target part of the change image C3. The change information is not limited to visual information, but may also include changes in the impact V0 and inappropriateness. The presence or absence of a cut image may be output as auditory information to notify the operator by voice. In this case, the change information is output to the operator as a voice, for example, from a speaker (not shown). In addition, if the change in the impact V0 is within a predetermined threshold, a symbol indicating that the impact V0 does not change is displayed. Visual information such as text, color, etc. may be displayed at the target location of the change image C3. In this case, for example, a symbol such as - or / , which indicates that the impact does not change, or "no change" In this case, the information is not limited to visual information, but can be used to change the influence V0. The operator may be notified by voice that the image will not be converted.

[0143] In this way, the detection result notification image C1 and the evaluation result image C2 are displayed based on the evaluation result. However, the detection result notification image C1 and the evaluation result image C2 are not evaluation results. The evaluation results may be displayed based on the impact V0. Therefore, when the evaluation results are used, it is possible to distinguish between inappropriate and appropriate images with high accuracy. On the other hand, the detection results can be detected based on the analysis result data, i.e., the intensity distribution of the image. Therefore, when using the detection results, In this case, it is possible to easily distinguish between inappropriate images and appropriate images.

[0144] The following describes how to display the detection results. Image C1 contains information indicating that there is an image detected as an inappropriate image (indicating whether or not there is an inappropriate image detected). It also displays information about the type of inappropriate image that has been detected. The evaluation result image C2 based on the result of the detection is the result of the detection by the detection unit 86 for each image of the candidate for the inappropriate image. The information includes the detection result. For example, if a multiple reflection light image P3 is detected, an X is displayed. If the multiple reflection light image P3 is not detected, a circle is displayed. If the specular reflected light image P2 is not detected, an × is displayed. is shown.

[0145] The change image C3 may also be displayed based on the detection result. For example, if the multiple reflection light image P3 is an inappropriate image under the current measurement conditions, In this case, the multiple reflected light L3 is detected on the light receiving surface 20a (imaging area PL). The measurement conditions are set so that the light is incident on the outside of the range (the direction away from the center of the light receiving surface 20a). When the relative position of the optical probe 3 and the object M to be measured changes, the multiple reflected light L3 The possibility of the light being incident on the surface 20a becomes low, and the possibility of the light not entering the imaging region PL becomes high. Therefore, the multiple reflection light image P3 is more likely to not be detected as an inappropriate image. As mentioned above, the detection results also change if the measurement conditions change, so the change image C3 also changes depending on the detection results. In this case, the change information for displaying the change image C3 is The information is obtained by changing the values ​​of the measurement conditions of the device of the shape measuring device 1. For example, the change image C3 indicates whether the detection result of the inappropriate image changes. Under the measurement conditions, an image that is a candidate for an inappropriate image is detected as an inappropriate image, and the measurement conditions are changed. If the image is changed, there is a high possibility that the image that is a candidate for inappropriate image will not be detected as an inappropriate image. If the image becomes larger, a symbol indicating an upward direction is displayed, as it is more likely that the inappropriate image will disappear. In addition, the change image C3 is an image that is a candidate for an inappropriate image under the current measurement conditions. If the measurement conditions are changed, the image that is a candidate for an inappropriate image will be regarded as an inappropriate image. If the possibility of detection increases, the possibility of detecting inappropriate images increases. , a downward symbol is displayed.

[0146] The output unit 88 also outputs information on the current measurement conditions to the display unit 33. The measurement condition image D showing the current measurement information is displayed. The current measurement conditions, i.e., the solution, are displayed below the result image C2 and the change image C3. The measurement condition image D shows the information of the measurement conditions set when the analysis was performed. Among the measurement conditions of each device that adjusts the shape measurement device 1 shown in the change image C3, In other words, in the example of FIG. 10, the measurement condition screen is Image D shows the current angle (60.5) of the first rotating part 53 and the current angle (30 However, the measurement condition image D shows the measurement condition shown in the change image C3. Measurement conditions for devices other than the devices for which conditions are adjusted may also be displayed.

[0147] The OK image E is displayed below the measurement condition image D, and the image displayed on the display unit 33 is displayed as a menu. This is a display for returning to the new image A. If the input unit 32 includes a mouse, the operator can By operating the input unit 32, the mouse cursor is superimposed on the OK image E on the screen of the display unit 33. The operator clicks the mouse button with the cursor over the OK image E. By clicking the OK button, the OK image E is selected. The author can select "OK" by touching the position where the OK image E is displayed on the display screen of the display unit 33. Select image E. When the operator selects image E, the output unit 88 outputs the measurement check result. The display on the display unit 33 is switched from the result screen B to the menu image A. The display position is arbitrary.

[0148] Figure 11 shows an example of the measurement check result screen B when no inappropriate images are evaluated. As shown in Figure 11, if the image is not judged to be inappropriate, that is, if the image is not judged to be inappropriate, If it is determined that there is no appropriate image, the output unit 88 outputs the detection result notification information indicating that there is no inappropriate image. In the example of FIG. 11, the detection result notification image C1 is output as information saying, Please confirm that there are no problems with the point cloud and complete teaching. The image indicates that the image will not be sent and prompts you to check the actual image by performing a verification scan. In addition, the evaluation result image C2 was evaluated as having no inappropriate images, so all items were It is marked as ○. Also, the redevelopment C0 is displayed, and the image does not contain any inappropriate images. In addition, as shown in Figure 11, even if it is evaluated that there is no inappropriate image, the change image C 3 is displayed, but it does not necessarily have to be displayed. In the example of FIG. 11, The influence V1 of the first rotating part 53 is changed by +5 degrees, and the influence V2 of the first rotating part 53 is changed by - When the table 71 is changed by 5 degrees, when the table 71 is changed by +5 degrees, when the table 71 is changed by -5 degrees In both cases, the value is zero, and the specular reflection image P2 is an inappropriate image. However, even under the current measurement conditions, the influence V1 is zero, so there is no change. Therefore, the change image C3 in FIG. 11 is the influence V1 of the specular reflection image P2 (the "specular reflection" in FIG. 11). However, the change image C3 displays - instead of - in this case. The display of the change image C3 in FIG. 11 is otherwise the same as in FIG. 10. be.

[0149] The processing of the control unit 36 ​​is as described above. Hereinafter, the measurement conditions will be set using the control unit 36. The flow of setting will be described based on a flowchart. 12 is a flowchart illustrating a flow for setting measurement conditions. When setting the measurement conditions, the control unit 36 ​​acquires the design information of the object to be measured M by the design information acquisition unit 80. Then, the control unit 36 ​​acquires the information, for example, when the operator performs shape measurement. When the software for performing the above is launched, the output unit 88 displays a menu screen on the display unit 33. The image A is displayed (step S52). Note that the design information of the object M to be measured is acquired before the analysis. Any timing is fine.

[0150] When the menu image A is displayed, the operator refers to, for example, the instruction image A1 and The measurement conditions are adjusted by operating the input unit 32 and inputting the measurement conditions. The analysis unit 40 determines the measurement conditions by adjusting the condition acquisition unit 82. The measurement conditions are acquired (step S54), and it is determined whether or not a measurement check is instructed. (Step S56). The control unit 36 ​​receives the measurement check on the menu image A from the operator. When image A3 (or A4) is selected, it is determined that a measurement check is being performed (step Step S56: Yes), and the image analysis execution unit 84 calculates the analysis result data (step S5 8), the detection unit 86 derives the detection result and the evaluation result (step S60). The image analysis execution unit 84 executes the process shown in FIG. 6 to calculate the analysis result data. The detection unit 86 detects inappropriate images and appropriate images based on the analysis result data, and outputs the detection result. The detection unit 86 also derives an evaluation result by performing an evaluation based on the detection result. The output unit 88 does not display the menu while the image analysis execution unit 84 and the detection unit 86 are executing the processes. -You can switch the image from image A to display the image indicating that analysis is in progress, or you can An image indicating that analysis is in progress may be displayed so as to be superimposed on image A. 0 indicates that the measurement check image A3 (or A4) on the menu image A is selected by the operator. If not, that is, if the measurement check is not performed (step S56; No), the The process proceeds to step S68, where it is determined whether or not a verification scan has been instructed. In the low state, the control unit 36 ​​detects the measurement check on the menu image A when the measurement check is not performed. However, it is not limited to this. The unit 36 ​​determines whether a measurement check is instructed and whether a verification scan is instructed. In other words, the control unit 36 ​​may display the measurement check image A to the operator. If 3 (or A4) is selected, a measurement check is performed and the operator is prompted to take a verification scan. If image A6 is selected, a verification scan can be performed.

[0151] When the detection and evaluation of the inappropriate image is completed, the control unit 36 ​​controls the output unit 88 to display the detected inappropriate image on the display unit 33. The result information is output, and the display unit 33 displays the measurement check result screen B (step S 62) The operator checks the detection result image C on the measurement check result screen B and selects the measurement The analysis unit 40 determines whether the set conditions need to be further changed. With B displayed, it is determined whether an instruction to end the confirmation has been given (step S64). 36 indicates that confirmation is complete when the operator selects OK image E on the measurement check result screen B. When it is determined that the instruction to finish has been given (step S64; Yes), the output unit 88 outputs the measurement check. The display is switched from the check result screen B to the menu image A, and the menu image A is displayed on the display unit 33. The operator may check the detection result image C to see if there is an inappropriate image, for example. If the evaluation is made as follows, the input unit 32 is operated to determine new measurement conditions. If the person evaluates that there is no inappropriate image in the detection result image C, for example, However, whether to determine new measurement conditions is up to the discretion of the operator. If an inappropriate image is found, new measurement conditions do not need to be determined. If it is determined that there is no image, new measurement conditions may be determined. If the operator does not select OK image E on the measurement check result screen B, the confirmation end instruction is displayed. It is determined that the indication has not been given (step S64; No), and the operator has not yet checked the measurement check result. It is assumed that confirmation of screen B is in progress, and in step S64 an instruction to end confirmation is awaited.

[0152] After displaying the menu image A, the control unit 36 ​​determines new measurement conditions by the operator. The control unit 36 ​​determines whether the user has selected the When new measurement conditions are stored in the storage unit 34, it is determined that new measurement conditions have been determined. However, the method for determining whether new measurement conditions have been determined is not limited to this and can be arbitrary. For example, when the operator inputs to the input unit 32 that new measurement conditions have been determined, the control unit 36 In this case, the control unit 36 ​​may determine that new measurement conditions have been determined. When the condition is determined (step S67; No), the process returns to step S54, and the condition acquisition unit 82 The new measurement conditions are acquired and the subsequent processing is continued. After determining the measurement conditions, if the measurement check image A3 (or A4) is selected, the control unit 36 Analysis is performed under the new measurement conditions, and measurement result check image B is displayed.

[0153] If new measurement conditions are not determined (step S67; Yes), the control unit 36 While displaying new image A, determine whether there is an instruction to perform a verification scan (step Step S68) When the operator selects the verification scan image A6, the operator is instructed to perform the verification scan. It is determined that there is an indication (step S68; Yes), and the measurement control unit 38 executes a verification scan. Execute the measurement and capture an actual image T under the set measurement conditions to determine the shape of the object M to be measured. Measurement is performed. That is, a point cloud of the object to be measured M is generated (step S70). The shape measurement results (point cloud) are checked to determine whether the set measurement conditions are appropriate. Thereafter, the control unit 36 ​​determines whether the determination of the measurement conditions has been completed, i.e., whether teaching has been completed. The control unit 36 ​​determines whether the verification scan image A6 is selected by the operator (step S72). If no instruction is given to execute a verification scan (step S68; No), The control unit 36 ​​proceeds to step 72. When the OK image A7 is selected by the operator on the menu image A, When this is done, it is determined that the determination of the measurement conditions, i.e., teaching, is completed (step S72; Y es), the process of setting the measurement conditions is completed. If the OK image A7 is not selected, the measurement conditions have not been determined, i.e. teaching has not been completed. It is determined that there is no menu image A (step S72; No), and the process returns to step S52. In this case, the operator determines new measurement conditions, and the control unit 36 ​​executes step S In step 54, new measurement conditions are acquired, and the subsequent processes are repeated. Since it is not necessary to execute the verification scan, steps S68 and S70 can be omitted. In this case, the next step after step S66 is step S72.

[0154] In this way, when the analysis is performed under the measurement conditions acquired by the condition acquisition unit 82, the control unit 36 ,Information based on the detection result is displayed as a detection result image C on the measurement check result screen B. The information based on this detection result is used to measure the actual captured image T under the measurement conditions acquired by the condition acquisition unit 82. It is also information derived through analysis to determine whether inappropriate images are included when imaging. Therefore, the operator can check the detection result image C to see if the measurement conditions are appropriate. The measurement conditions can be easily set to enable accurate shape measurement. It can be determined.

[0155] The control unit 36 ​​also controls the analysis unit 40 to check the measurement and the measurement control unit 38 to check the verification. Therefore, the operator can check the information based on the detection results and make a decision. By checking the point cloud generated from the actual captured image T under the specified measurement conditions, it is possible to confirm that the measurement conditions are The control unit 36 ​​can also display the change image C3. The change image C3 shows how the evaluation results change when the measurement conditions are changed. This change trend is highly likely to match the actual measurement. By checking the change image C3, the operator can determine how to change the measurement conditions. , can be determined easily and accurately.

[0156] As described above, the control unit 36 ​​(image analysis device) according to this embodiment includes the image analysis unit 83 and and an output unit 88. The image analysis unit 83 captures an image formed by the light projected onto the object M to be measured. In this case, an image that is inappropriate for measuring the shape of the object M (inappropriate image) is generated based on the design information of the object M. The output unit 88 outputs the result of the detection by the image analysis unit 83 based on the information and the measurement conditions. The control unit 36 ​​outputs the detection result information, i.e., the inappropriate information. Therefore, the control unit 36 ​​outputs information based on the detection result of the cut image. The operator can easily check the detection results by displaying the detection result information on another device, such as the display unit 33. Therefore, the operator can check the information, i.e., the detection result image C. It is possible to check whether the image is likely to be included. Therefore, the control unit 36 ​​allows the operator to easily determine whether the set measurement conditions are appropriate. This allows you to easily set measurement conditions that allow accurate shape measurement. Cut.

[0157] In the above embodiment, the analysis device 4 is provided with a display unit 33 and an output unit 88 outputs the detection result information to the display unit 33, but is not limited to this configuration. For example, The output unit 88 outputs the detection result information to a storage unit (for example, the storage unit 34) provided in the analysis device 4, 4A. In this case, the analysis device 4 may output the detection result information, and the storage unit may store the output detection result information. , 4A and the operator's PC (personal computer) or tablet connected to the network The memory unit is accessed from a terminal such as a laptop, and the detection result information is acquired by a PC via the network. The acquired detection result information may be displayed on the display unit (display) of the PC. That's fine.

[0158] Also, the image analysis unit 83 (image analysis step) evaluates the detected inappropriate image. The output unit 88 (output step) outputs the evaluation result of the detected inappropriate image as the detection result information. The control unit 36 ​​outputs the detection result image C to the display unit 33. By checking the results, you can check the evaluation results of inappropriate images under the set measurement conditions and It is easier to determine whether the

[0159] Furthermore, the image analysis unit 83 analyzes the measurement image projected onto the object M based on the design information and the measurement conditions. Among the images of the constant light L, an image (appropriate image) suitable for measuring the shape of the object M to be measured is detected. The analysis unit 83 calculates the relative distance between the detected inappropriate image and the detected appropriate image, and the The control unit 36 ​​evaluates the detected inappropriate image based on at least one of the brightness. To evaluate a suitable image based on the intensity of light forming an inappropriate image and the relative distance to the suitable image. , the influence of the inappropriate image on the appropriate image is suitably calculated, and the evaluation result is displayed on the display unit 33. This will inform the operator and allow them to more easily determine whether the setting conditions are appropriate. can.

[0160] The image analysis unit 83 calculates the relative distance between the detected inappropriate image and the detected appropriate image, It is preferable to evaluate the detected inappropriate image based on both the brightness of the inappropriate image and the image quality. By performing the evaluation in this manner, the control unit 36 ​​can evaluate the inappropriate image with high accuracy and eliminate the inappropriate image. The influence of the image on the image quality can be calculated.

[0161] In addition, the image analysis unit 83 calculates the change in the evaluation result of the inappropriate image when the measurement conditions are changed. The output unit 88 indicates the change in the evaluation result of the inappropriate image when the measurement conditions are changed. The control unit 36 ​​outputs the change information as the detection result information to the display unit 33. By changing the value of the parameter, the display unit 33 can display whether the evaluation result of the inappropriate image changes. Therefore, the control unit 36 ​​allows the operator to receive the evaluation result. By checking the changes in the measurement conditions, it is possible to obtain guidelines on how to adjust the measurement conditions. Therefore, it is easy to set the measurement conditions that allow accurate shape measurement. .

[0162] The output unit 88 also displays a screen on which the detection result information is displayed, i.e., a measurement check result screen. B further displays the redeveloped image C0 reproduced from the image analysis result data. 8 is a screen on which the detection result information is displayed, and the image pickup device is used under the measurement conditions used to detect the detection result information. The actual image of the measurement light L projected onto the object M, that is, the captured image T, is captured by the positioning device 9. In this case, the control unit 36 ​​may display the detection result image C. An actual image of the measurement light L is captured under the same measurement conditions as those for image C, and the image is used as the detection result. This allows the operator to see the actual captured image T on the same screen as the detected image C. Since it can be confirmed together with image C, it is easier to recognize that there is an inappropriate image. The output unit 88 may display the captured image T instead of the redeveloped image C0. Alternatively, the captured image T may be displayed so as to be superimposed on the redeveloped image C0.

[0163] The measurement conditions are the imaging device 9 or the projection device 8 (illumination unit) that irradiates the measurement light L and the object to be measured. The relative position of the object M and the relative position of the imaging device 9 or the projection device 8 that irradiates the measurement light L and the object M to be measured. At least one of the facing posture, the intensity of the measurement light L irradiated onto the object M, and the measurement area is determined. The measurement area is an area of ​​the imaging area that is used to measure the shape of the object to be measured M. The control unit 36 ​​allows the operator to appropriately set these measurement conditions.

[0164] The measurement conditions are the imaging device 9 or the projection device 8 (illumination unit) that irradiates the measurement light L and the object to be measured. The relative position of the object M and the relative position of the imaging device 9 or the projection device 8 that irradiates the measurement light L and the object M to be measured. It is preferable that the control unit 36 ​​includes both the measurement and the counter-measurement. The set conditions can be set appropriately.

[0165] The image analyzer 83 also detects at least one of the following as inappropriate images: an image generated by multiple reflections (multiple reflection light image P3), an image generated by specular reflections (specular reflection light image P2), an image generated by vignetting (vignetting image P4), and an inappropriate brightness image P5. The inappropriate brightness image P5 is an image of the diffuse reflection light L1 that has been reflected once (diffuse reflection light image P1) in which the intensity of light forming the image (or the brightness of the image) is lower than a predetermined value. However, it may also be an image of the diffuse reflection light L1 that has been reflected once (diffuse reflection light image P1) in which the intensity of light forming the image (or the brightness of the image) is outside a predetermined range. The controller 36 classifies such images as inappropriate images, thereby enabling the operator to appropriately set the measurement conditions. Note that the predetermined value here may be set by the operator, taking into account the effect of the inappropriate brightness image T5 on the measurement accuracy of the object M, or may be a value calculated based on the design tolerance of the object M.

[0166] In this embodiment, as shown in equation (3), the total value of the intensities of the rays of the diffusely reflected light L1 When the influence V3 is smaller than the threshold value, the image is evaluated as an inappropriate brightness image P5. That is, when the brightness of the diffuse reflected light image P1 is low, in other words, when the brightness of the diffuse reflected light image P1 is low, the detection unit 86 When the intensity of the ray of the incident light L1 is low, it is evaluated as an image with inadequate brightness P5. The intensity of the light beam of the diffuse reflected light L1 also depends on, for example, the amount of the light beam of the diffuse reflected light L1 that is reflected by the imaging device 9. The shape measurement is difficult due to the fact that the light is reflected again within the lens and forms an image as a flare. Therefore, the detection unit 86 detects the intensity of the ray of the diffuse reflected light L1. If the brightness is too high (the brightness of the diffuse reflection light image P1 is too high), it may be regarded as an inappropriate brightness image P5. In this case, the detection unit 86 detects the intensity of the ray of the diffuse reflected light L1 (or the brightness of the diffuse reflected light image P1). When the influence level V3, which is the sum of the influence levels (the degree of reflection) of the diffuse reflected light L1, is outside the specified range, The image (diffuse reflection light image P1) thus formed is evaluated as an inappropriate brightness image P5. 86 is the sum of the intensity of the ray of diffuse reflected light L1 (or the brightness of the diffuse reflected light image P1) in equation (3). When the influence level V3, which is a calculated value, is within a predetermined range, the reflection level formed by the rays of the diffuse reflected light L1 is The image (diffuse reflected light image P1) is a diffuse reflected light image P1 without the inappropriate brightness image P5, i.e., the inappropriate brightness image P5 is an inappropriate The predetermined range is between a predetermined upper limit value and a predetermined lower limit value. The upper and lower limits of the numerical range are set based on the measurement accuracy of the object M due to the inappropriate brightness image P5. This may be set by the operator, taking into consideration the effect on the degree of

[0167] The image analysis unit 83 also converts the image of the measurement light L projected onto the object M under measurement conditions into an image of the image pickup unit ( When an image is captured using an imaging device 9), the analysis result data (intensity distribution) of the image is calculated to Then, the image analysis unit 83 determines whether the image is a suitable image based on the analysis result data (intensity distribution). Inappropriate images other than the image of the measurement light L reflected only once by the object M (diffuse reflected light image P1) Detect the image.

[0168] The analysis device 4 according to this embodiment also includes a control unit 36 ​​and a display unit for displaying the detection result image C. The analysis device 4 has a display unit 33 (display unit). The analysis device 4 displays the detection result image C, The operator can easily set measurement conditions that allow accurate shape measurement. do.

[0169] The shape measuring device 1 according to this embodiment also includes a control unit 36 ​​and a control unit 37 for receiving input from an operator. an input unit 32 for projecting the measurement light L onto the object M; An optical probe having an imaging device 9 (imaging unit) that captures an image of the measurement light L projected onto the measurement object M. and a condition setting unit 42 for setting measurement conditions based on input to the input unit 32. According to this shape measuring device 1, measurement conditions for accurately measuring the shape can be easily set. Since the measurement is possible, shape measurement can be performed with high accuracy.

[0170] The image analysis method according to this embodiment includes an image analysis step by the image analysis unit 83 and an output step by the output unit and an output step by 88. The image analysis step analyzes the improper image by The output step is based on the information and measurement conditions detected in the image analysis step. This method allows accurate shape measurement. The program according to this embodiment allows easy setting of measurement conditions that can be performed easily. This image analysis method is executed by a computer such as the analysis device 4.

[0171] The measurement condition determination method according to this embodiment is also the same as the image analysis method described above, except that the output step and a measurement condition determination step of determining measurement conditions based on the input detection result information. According to this measurement condition determination method, measurement conditions that enable accurate shape measurement can be easily determined. It becomes possible to set.

[0172] The shape measurement method according to this embodiment includes the above-described measurement condition determination method and the measurement condition determination step. and a shape measurement step of measuring the shape of the object M to be measured under the measurement conditions determined in the shape measurement step. This shape measurement method makes it possible to perform shape measurement under appropriately set measurement conditions. Therefore, it is possible to suppress a decrease in measurement accuracy.

[0173] The control unit 36 ​​also realizes the functions of the measurement control unit 38 and the analysis unit 40 through hardware. These functions may be realized by software. The control unit 36 ​​performs some of the functions of the measurement control unit 38 and the analysis unit 40 by hardware. Other parts of the functions may be realized by software. When some or all of the functions of the constant control unit 38 and the analysis unit 40 are realized by hardware, The control may be realized by an ASIC or a programmable logic device. The control unit 36 ​​may integrate and realize all of the functions of the measurement control unit 38 and the analysis unit 40, or Some of these may be realized without integration.

[0174] (Variation) Next, modifications of the first embodiment will be described. Each of the modifications described below is a measurement check The display contents of the check result screen B are different from those of the first embodiment. The explanation of the common parts will be omitted.

[0175] 13 to 20 are diagrams showing examples of measurement check result screens according to modifications of the first embodiment. The output unit 88 displays on the display unit 33 a measurement check result screen according to a modified example shown in FIG. The detection result image Ca is displayed in Ba. The detection result image Ca includes the change image C3a. The change image C3a has a parameter of the measurement condition different from the change image C3 of the first embodiment. That is, the output unit 88 outputs the parameters of the measurement conditions in the change information in the first embodiment. The change image C3a may be different from the shape. In addition to the rotating part 53 and the table 71, the imaging device 9 is provided. The exposure is changed as a fixed condition. Here, exposure is the EV (Exposure Value). In the example of FIG. 13, the change image C3a displays the change in the influence V3 ("brightness" in FIG. 13). When the exposure becomes +1, the influence V3 becomes higher, so the symbol indicating an upward direction is used. When the exposure is -1, the influence V3 is low, and the symbol indicates a downward direction. Also, information indicating a change in the influence level V2 ("multiple reflection" in FIG. 13) displayed by the change image C3a is When the exposure becomes +1, the influence V2 becomes higher, so the symbol indicates a downward direction. If the result is -1, the influence V2 will be low, so the symbol will indicate an upward direction. The influence V4 ("vignetting" in Figure 13) and the influence V1 ("specular reflection" in Figure 13) are different depending on the exposure. Therefore, the information indicating the change in the influence V3 ("brightness" in Figure 13) is In this way, the imaging device 9 is included in the shape measuring device 1. By adding the exposure as a measurement condition to be changed, the operator can In the example of FIG. 13, the shape measuring device 1 has The imaging device 9 is added as a device, and exposure is added as a measurement condition to be changed. The devices of the shape measuring device 1 can be arbitrarily set by the operator. The measuring device 1 includes a first rotating unit 53 and a second rotating unit 54 that change the relative position. and table 71 (holding and rotating device 7), and X moving unit 50X, Y moving unit 51 for changing the relative position. a projector 8 for changing the intensity of the measuring light L; The imaging device 9 may include at least one of the imaging device 9 that changes the time between the image and the time. The measurement conditions indicated by 3a may include all the measurement conditions, or may be any one of all the measurement conditions. That is, the measurement conditions indicated by the change image C3a may be the image capturing device 9 or indicates the relative position and relative posture between the projection device 8 (illumination unit) that irradiates the measurement light L and the object M to be measured, The intensity of the measurement light L irradiated onto the object M, the measurement area PR, and the exposure and exposure of the imaging device 9. For example, the output unit 8 may include all of the above, or may include at least one of the above. 8 may be displayed as only one of the measurement conditions to be displayed in the change image C3a.

[0176] In the first embodiment, the inappropriate images are the specular reflection light image P2, the multiple reflection light image P3, and the vignetting light image P4. However, the detection unit 86 does not include the evaluation of the image P4 and the inappropriate brightness image P5. Therefore, the image to be determined as an inappropriate image is arbitrary. For example, the specular reflection light image P2 and the multiple reflection light image P3 are Either the image P4 or the image P5 with inappropriate brightness may be detected as an inappropriate image. In addition, images to be detected as inappropriate may be added to those listed above. When the image to be determined as the appropriate image is the multiple reflection light image P3 alone, the output unit 88 outputs the following as the detection result information: Then, information on the case where the inappropriate image is only the multiple reflection light image P3 is output. 88 is a detection result image C on the measurement check result screen Bb according to the modified example shown in FIG. The detection result image Cb is displayed as a detection result notification image C1b and an evaluation result image C2b. The output unit 88 outputs the inappropriate image in the detection result image Cb. Then, the output unit 88 outputs the evaluation result image C2b and In the change image C3b, only the multiple reflection light image P3 is displayed as a candidate for an inappropriate image. Even in such a case, the shape measuring device 1 prompts the operator whether or not there is a multiple reflected light image P3. Therefore, it is possible to easily determine the measurement conditions that allow accurate shape measurement. The control unit 36 ​​controls the detection unit 86 to detect the specular reflection light image P2 and the multiple reflection light image P3. P3, the vignetting image P4, and the inappropriate brightness image P5 are all detected as inappropriate images, and output The unit 88 displays only a part of them (here, the multiple reflection light image P3) as an inappropriate image. It may be shown.

[0177] The output unit 88 displays the redevelopment result on the measurement check result screen Bc according to the modified example shown in FIG. This embodiment differs from the first embodiment in that the output unit 88 does not display the detection result information. The information does not need to include image data for displaying the redeveloped image C0. Even if the image C0 is not displayed, other detection result images C are displayed, so the operator can It is possible to recognize whether there is a suitable image.

[0178] The output unit 88 displays the detection result on a measurement check result screen Bd according to the modified example shown in FIG. The detection result image Cd is different from the first embodiment in that it does not have the change image C3. That is, the output unit 88 does not need to include change information in the detection result information. Even if the change image C3 is not displayed in this way, the detection result image C is displayed. Therefore, the operator can recognize whether there is an inappropriate image.

[0179] The output unit 88 displays the detection result on a measurement check result screen Be according to the modified example shown in FIG. The detection result image Ce is different from the first embodiment in that it has an identification image C4. That is, the output unit 88 displays the identification image C4 in the detection result information. The identification information may include information for identifying inappropriate images in the redevelopment C0. Furthermore, the identification information is information for distinguishing between inappropriate images and appropriate images. In the case where there are multiple types of inappropriate images, this information is used to distinguish between the inappropriate images. The information for distinguishing between the specular reflection image P2, the multiple reflection image P3, and the vignetting image P 4 are detected as inappropriate images, which of the inappropriate images is the specular reflected light image P2, and which of the This is information indicating whether the inappropriate image is the multiple reflection light image P3.

[0180] The output unit 88 generates identification information based on the evaluation result of the detection unit 86 and the redevelopment C0. Specifically, the output unit 88 outputs the redeveloped image C0 of the evaluated inappropriate image based on the evaluation result. The position (coordinates) of each of the inappropriate images is read out for each type of inappropriate image. In the example of FIG. 17, the output unit 88 generates identification information indicating the position (coordinates) of the inappropriate image on the image. The identified image C4 is determined so that it becomes an elliptical shape surrounding the inappropriate image on the redeveloped image C0. More specifically, the identification image C4 is an image that displays the identification information. The result of the check is displayed on the fixed check result screen Be so that it overlaps with the redevelopment C0. The area surrounded by the ellipse in the identification image C4 is recognized as an image evaluated as inappropriate. Therefore, the operator can distinguish the specular reflection image P2 and the multiple reflection image P3, which are inappropriate images, from the vignetting. The image P4 and the redeveloped image C0 can be visually identified, and the image P4 is surrounded by the identification image C4 (pointing The inappropriate image (pointed at) and the appropriate image (not surrounded by the identification image C4) are identified. This allows the operator to recognize the location of the inappropriate image and correct the shape. This makes it easier to set measurement conditions that allow accurate measurement of the state of the sample.

[0181] In this way, the output unit 88 sets the ellipse surrounding the inappropriate image as the identification image C4. The identification image C4 is not limited to an ellipse surrounding the inappropriate image, as long as it is a display that can identify the inappropriate image. For example, the identification image C4 may be a shape other than an ellipse, such as a rectangle or a triangle. In addition, the identification image C4 is not limited to a figure surrounding the inappropriate image, but may be an arrow or other mark indicating the inappropriate image. The identification image C4 may be displayed as a color. In this case, for example, the discrimination image C4 is displayed in yellow in the area where the inappropriate image is displayed. The identification image C4 may be a character string. It may be displayed next to an inappropriate image, for example, as the string "inappropriate image". This character string may also be displayed together with a shape such as the oval or a color.

[0182] The output unit 88 may also change the display content of the identification image C4 for each inappropriate image that is pointed out. For example, the classification image C4 is a classification image of the type of inappropriate image. The shape of the identification image C4 may be changed for each class. In this case, for example, the specular reflection light image P2 may be surrounded by an ellipse. For example, it is possible to surround the multiple reflection light image P3 with a rectangle and the vignetting image P4 with a triangle. In addition, the ellipses surrounding the inappropriate images are distinguished by using solid and dashed lines for each inappropriate image. The identification image C4 may also be displayed in color. In this case, the identification image C4 The color may be superimposed on each inappropriate image in a different color. For example, the area where the specular reflection image P2 is displayed is colored yellow, and the area where the multiple reflection image P3 is displayed is colored yellow. The identification image C4 can be a character string, but the area where the image is displayed can be colored red. In this case, for example, the identification image C4 may include a note indicating the type of inappropriate image, such as Labels such as "specular reflection image," "multiple reflection image," and "vignetting" are used to distinguish between inappropriate images. The note may be displayed with a shape such as an oval or with a different color. When using both a note and a graphic or color to indicate the type of inappropriate image, the graphic or color should be used for each inappropriate image. In this case, the inappropriate image should be identifiable by a note indicating the type of inappropriate image. do.

[0183] The output unit 88 outputs the appropriate image on the redeveloped C0 image based on the evaluation result. The information indicating the position (coordinates) of the image is used to generate identification information, and the identification image C4 is created by dividing the image into an ellipse that encloses the appropriate image. Furthermore, the output unit 88 may output a redevelopment C of the detected inappropriate image based on the detection result. The output unit may generate identification information indicating the position (coordinates) of the appropriate image on the map. 88 is a diagram showing the position (coordinates) of the detected appropriate image on the redeveloped image C0 based on the detection result. The output unit 88 may generate identification information indicating the redevelopment C0. Even when an actual captured image T of the measurement light L captured under the same measurement conditions is displayed, An identification image C4 may be displayed so as to be superimposed on the image T.

[0184] The output unit 88 also displays a measurement check result screen Bf according to the modified example shown in FIG. 18A. In this way, when the identification image C4 is displayed, the evaluation result image C2 and the change image C3 must be displayed. In this case, the detection result notification image C1 does not need to be displayed. 0 and the discrimination image C4 can be said to be images of information based on the detection result of an inappropriate image. The operator can check whether there is an inappropriate image by simply checking the identification image C4. Based on this, the measurement conditions can be easily set.

[0185] The output unit 88 also displays a measurement check result screen Bf according to the modified example shown in FIG. 18B. In this way, when the redevelopment C0 is displayed, the identification image C4 does not need to be displayed either. By simply checking the development C0, you can check whether an inappropriate image has been detected, and based on that, This makes it easy to set measurement conditions.

[0186] In the above explanation, the redevelopment C0 is an image in which both an inappropriate image and an appropriate image are displayed. However, as shown in the redevelopment C0f of FIG. 18C, the redevelopment did not display the correct image. It may be an image that displays only the inappropriate image. Even in this case, the operator must select the image from the redevelopment C0f. This allows you to check whether an inappropriate image has been detected, and then easily set the measurement conditions based on that information. It is possible.

[0187] In the case of FIG. 18C, the image analysis unit 83 generates image data representing an inappropriate image, and outputs the image data to the output unit 88. The detection result is displayed so that the image (redeveloped C0f) showing the inappropriate image is displayed on the display unit 33. The control unit 36 ​​outputs image data to the display unit 33 as information. The image can be transmitted to the operator, allowing the operator to easily determine whether the settings are appropriate. The image data representing the inappropriate image here is detected by the detection unit 86 as an inappropriate image. The image data may be image data representing an inappropriate image detected by the detector 86, or may be image data representing an inappropriate image detected by the detector 86. In other words, the image data representing the inappropriate image detected by the detection unit 86 may be used. If the image data represents an inappropriate image, the redevelopment C0f is, for example, The specular reflection light image P2 and the multiple reflection light image P3 are displayed. If the image data represents an inappropriate image that has been evaluated as an inappropriate image, the redevelopment C0f For example, a specular reflection light image P2, a multiple reflection light image P3, and a vignetting image P4 are displayed. do.

[0188] In addition, when the redevelopment C0 includes both inappropriate images and appropriate images, the image analysis unit 83 Based on the information and measurement conditions, as shown in the first embodiment, a suitable image is displayed in addition to an unsuitable image. The output unit 88 generates image data showing the inappropriate image and the appropriate image on the display unit 33. Image data is output to the display unit 33 as detection result information so that (redevelopment C0) is displayed. According to this control unit 36, an image showing an inappropriate image and an appropriate image can be transmitted to the operator. This allows the operator to more easily determine whether the setting conditions are appropriate.

[0189] The output unit 88 also outputs, as the detection result information, identification information for distinguishing between inappropriate images and appropriate images. The control unit 36 ​​outputs the identification image C4 that displays the identification information to the display unit 33. By letting the operator see the image, the operator can better recognize the inappropriate image and can check whether the setting conditions are appropriate. This makes it easier to determine whether or not there is a problem.

[0190] The output unit 88 also outputs, as the detection result information, discrimination information for discriminating between multiple types of inappropriate images. The control unit 36 ​​outputs the identification information to the display unit 33. By letting the operator see 4, the operator can better recognize what kind of inappropriate image exists. This allows the user to more easily determine whether the set conditions are appropriate.

[0191] In addition, the redeveloped images C0 and Cf are images showing inappropriate images in the imaging area PR. That is, the image analysis unit 83 converts data indicating an inappropriate image in the imaging region PR into an image data. The image capture area PR is generated as the image data projected onto the object M under measurement conditions. The control unit 36 ​​controls the imaging area PR. In order to redevelop the images C0 and Cf, the reproduction accuracy of the redeveloped images C0 and Cf must be increased. This allows the user to more appropriately determine whether the setting conditions are appropriate.

[0192] Furthermore, the output unit 88 displays the following on the measurement check result screen Bg according to the modified example shown in FIG. The switching image F is further displayed. The switching image F is measured as displayed in the change image C3a. This is a display for switching to detection result information when conditions are changed. In the example of Figure 19, The switching image F includes switching images F1, F2, F3, and F4. When the input unit 32 includes a mouse, the operator operates the input unit 32 to input the displayed On the screen of part 33, move the mouse cursor to one of the switching images F1, F2, F3, or F4. The operator can place the cursor on any of the switching images F1, F2, F3, and F4. By clicking the mouse button while the mouse is pressed, you can switch between the F1, F2, F3, and F4 images. If the display unit 33 is a touch panel, the operator can select either one of them. Touch the position where one of the images F1, F2, F3, or F4 is displayed on the display screen of 3. By doing so, one of the switching images F1, F2, F3, and F4 is selected.

[0193] When the switching image F is selected by the operator, the control unit 36 The output unit 88 obtains the detection result information under the measurement conditions from the detection unit 86. The detection result information under the specified measurement conditions is output to the display unit 33. As a result, the display shown in FIG. As shown in the figure, the output unit 88 displays the measurement check result screen Bg under the measurement conditions specified in the switching image F. The screen is switched to a measurement check result screen Bg that shows the detection result information for each item. When the artist selects the switching image F1, the output unit 88 changes the first rotation unit 53 by +5 degrees. The detection result information under the measurement conditions is displayed on the display unit 33. In addition, the switching image F2 is displayed to the operator. Once selected, the output unit 88 outputs the detection result under the measurement condition in which the first rotating unit 53 is changed by -5 degrees. The information is displayed on the display unit 33. When the operator selects the switching image F3, the output unit 88 displays on the display unit 33 the detection result information under the measurement condition in which the table 71 is changed by +5 degrees. When the operator selects the switching image F4, the output unit 88 displays the table 71. The display unit 33 displays the detection result information under the measurement conditions changed by −5 degrees.

[0194] FIG. 20 shows the measurement results when the operator selects the switching image F1 and changes the first rotation unit 53 by +5 degrees. The measurement check result screen Bg shows the information on the detection results under the specified conditions. As shown in FIG. 19, the measurement check result screen Bg has the first rotating part 53. When the angle is changed by +5 degrees, the detection result image C and the measurement condition image D are displayed. The result image C, here a redeveloped image C0, a detection result notification image C1, an evaluation result image C2, and a change Image C3 is switched to information when the first rotating part 53 is rotated by +5 degrees. In the measurement conditions of FIG. 19, the vignetting image P4 and the specular reflection image P2 are judged to be not inappropriate images. That is, the detection result notification image C1 in FIG. The display shows that multiple reflections were detected in the area. The image C2 is a vignetting image P4 ("vignetting" in FIG. 20) compared to the evaluation result image C2 in FIG. and the specular reflection light image P2 ("specular reflection" in FIG. 20) are not inappropriate images and are marked with a circle. In addition, in the change image C3 of FIG. 20, the influence of the specular reflection light image P2 is 20. When the first rotating portion 53 is further changed by +5 degrees from the state of FIG. 20, the angle V1 is changed by +5 degrees. 20. When the first rotating portion 53 is further rotated by -5 degrees from the state of FIG. 20, When Bull 71 is changed by +5 degrees, and when Table 71 is changed by -5 degrees from the state of Figure 20 In both cases, the value is zero, and the specular reflection image P2 is determined to be an inappropriate image. However, even under the measurement conditions shown in Figure 20, the influence V1 is zero. , it is assumed that there is no change and - is displayed.

[0195] In addition, in FIG. 20, in the redevelopment C0, the vignetting image P4 and the regular reflection image P2 are inconsistent. The image is not displayed as a suitable image. The angle of the one rotation part 53 is switched to 65.5 degrees and displayed. When switching image F is selected on the screen, the measurement check results when the measurement conditions are further changed In this way, the output unit 88 switches to the screen Bg while displaying the detection result image C. When an input to change the measurement conditions is made to the input unit 32, the detection result information to be displayed is (Detection result image C) is switched to the detection result information when the measurement conditions are changed. This allows the operator to easily check the detection result information for each measurement condition, and the measurement conditions can be easily changed. The control unit 36 ​​can easily set the detection results when the measurement conditions are changed. The evaluation results may be derived in advance, or may be calculated each time an instruction to change the measurement conditions is received. , and analysis may be performed to derive the detection results and evaluation results. The modified example shown in FIG. 20 is also applicable to the second and third embodiments described below.

[0196] (Second embodiment) Next, a second embodiment will be described. An analysis device 4A according to the second embodiment is a shape measurement device. The second embodiment differs from the first embodiment in that it does not have a function to control the device 1. The description of the parts that are common to the first embodiment will be omitted. The device 4A can also be applied with the modifications described with reference to FIGS. 13 to 20. For example, the analysis device 4A displays the measurement check result screens Ba, Bb, and B described with reference to FIGS. 13 to 20. Any of c, Bd, Be, Bf, and Bg may be displayed.

[0197] FIG. 21 is a block diagram of an analysis device 4A according to the second embodiment. The control unit 36A includes an analysis unit 32, a display unit 33, a storage unit 34, and a control unit 36A. However, unlike the control unit 36 ​​of the first embodiment, the second embodiment has a measurement control unit 38. The analysis device 4A is a computer that is not connected to the shape measurement device 1, but It may be a computer connected to the measurement device 1. The analysis device 4A includes a measurement control unit 38 Since it does not have an analyzer 40, it does not control the shape measuring device 1. Therefore, the same processing as that of the analysis unit 40 in the first embodiment is executed. Even if the analyzing device 4A (image analyzing device) according to the present invention is used, shape measurement can be performed accurately in the same manner as in the first embodiment. In this case, the measurement conditions can be easily set. A computer having a measurement control unit 38 is provided separately from the device 4A.

[0198] (Third embodiment) Next, a third embodiment will be described. An analysis device 4 according to the third embodiment performs analysis. The third embodiment differs from the first embodiment in that the initial conditions for the actual measurement are set in advance. In this case, the explanation of the parts that are common to the first embodiment will be omitted. The analysis device 4 does not need to have the measurement control unit 38 as shown in the second embodiment. In addition, the analysis device 4 according to the third embodiment can apply the modifications described with reference to FIGS. 13 to 20. In other words, the analysis device 4 according to the third embodiment can be configured as shown in FIGS. Select one of the following measurement check result screens: Ba, Bb, Bc, Bd, Be, Bf, Bg It may be displayed.

[0199] FIG. 22 is a flowchart illustrating the flow of setting measurement conditions according to the third embodiment. As shown in FIG. 22, when setting the measurement conditions, the control unit 36 80, design information of the object to be measured M is acquired (step S50). The control unit 36 ​​according to the embodiment calculates the total influence V for each measurement condition (step S50A ) The total impact V will be explained below.

[0200] The detection unit 86 according to the third embodiment detects the temperature under the measurement conditions determined by the operator through teaching. Before executing the analysis, execute the analysis shown in Figure 6 under the preset measurement conditions and save the analysis result data. Then, the detection unit 86 derives the detection result based on the analysis result data. Then, the processes of steps S32 to S38 in FIG. 7 are executed, and the shadow is detected based on the detection result. Then, the detection unit 86 calculates the influence levels V1, V2, V3, and V4. 3. Based on V4, calculate the total impact V. The total impact V is calculated by dividing the impacts V1, V2, and V3. The impact factor is the factor that takes into account all of V1, V2, V3, and V4, and the impact factors V1, V2, V3, and V4 are weighted individually. The detection unit 86 calculates the total effect by the following formula (5): The detection unit 86 calculates the overall influence V for each preset measurement condition. .

[0201] V={1 / (1+V1)W1}·{1 / (1+V2)W2}·V3W3·V4W4

[0202] Here, W1, W2, W3, and W4 are individually set constants. The larger the impact V1 and impact V2 are, the smaller the overall impact V becomes. Therefore, the larger the total impact V, the more inappropriate the impact. This means that the presence of a cut image is unlikely to be evaluated.

[0203] Then, the control unit 36 ​​according to the third embodiment determines the measurement result based on the total influence V for each measurement condition. The initial conditions are set (step S50B), and the menu image A is displayed (step S52). The control unit 36 ​​selects the highest overall impact V among the overall impact V for each measurement condition. The measurement conditions are set as the initial conditions of the measurement conditions. In the first embodiment, the control unit 36 ​​does not set the measurement conditions, but the operation In contrast, in the third embodiment, the author determines the following through analysis: The measurement conditions that maximize the overall impact V are set as the initial conditions. It is possible to obtain measurement conditions that are unlikely to be evaluated as having an appropriate image as initial conditions in advance. Therefore, the operator can set the measurement conditions more easily. In the embodiment, if a measurement check is performed under the initial conditions, the detection results under the initial conditions are displayed. Therefore, the operator can check the respective influence levels V0. Therefore, it is possible to set the measurement conditions with higher accuracy. In step S54, the operator can set the measurement conditions, and the analysis can be started. Before or after the measurement, the measurement conditions can be changed from the initial conditions.

[0204] In this way, the image analysis unit 83 according to the third embodiment calculates the degree of influence V The overall impact V, which takes into account each of the different measurement conditions, is calculated for each of the different measurement conditions. Among the conditions, the measurement condition with the lowest overall impact V is set as the initial condition. According to the control unit 36, the default measurement conditions, i.e., the initial conditions, can be appropriately set. can be done.

[0205] Next, a structure manufacturing system equipped with the above-mentioned shape measuring device will be described with reference to FIG. FIG. 23 is a block diagram of the structure manufacturing system 200. The structure manufacturing system 200 includes the shape measuring device 20 as described in the above embodiment. 1, a design device 202, a molding device 203, a control device (inspection device) 204, and a repair device The control device 204 includes a coordinate storage unit 210 and an inspection unit 211.

[0206] The design device 202 creates design information relating to the shape of the structure, and then uses the created design information to The design device 202 transmits the created design information to the control device 204. The design information is stored in the coordinate storage unit 210. The design information includes information indicating the coordinates of each position of the structure.

[0207] The forming device 203 forms the above structure based on the design information input from the design device 202. The forming performed by the forming device 203 includes, for example, casting, forging, cutting, etc. The device 201 measures the coordinates of the created structure (measurement object) and generates information indicating the measured coordinates. The information (shape information) is transmitted to the control device 204.

[0208] The coordinate storage unit 210 of the control device 204 stores the design information. 211 reads out the design information from the coordinate storage unit 210. The inspection unit 211 is a shape measuring device 2 01 and the design information read from the coordinate storage unit 210. Based on the comparison result, the inspection unit 211 determines whether the structure is formed according to the design information. In other words, the inspection unit 211 determines whether the created structure is a non-defective product. If the structure is not formed according to the design information, the inspection unit 211 judges whether or not the structure is formed according to the design information. If the structure can be repaired, the inspection unit 211 compares the Based on the result, the defective portion and the repair amount are calculated, and the information indicating the defective portion and the repair amount are sent to the repair device 205. and information indicating the amount of recovery.

[0209] The repair device 205 receives information indicating the defective portion and the repair amount from the control device 204. Based on this information, defective parts of the structure are processed.

[0210] FIG. 24 is a flowchart showing the flow of processing by the structure manufacturing system 200. In the structure manufacturing system 200, first, the design device 202 acquires design information relating to the shape of the structure. Next, the molding device 203 creates the above-mentioned structure based on the design information (step S101). Next, the shape measuring device 201 measures the created structure (step S102). The shape of the structure is measured (step S103). Next, the inspection unit 211 of the control device 204 By comparing the shape information obtained by the shape measuring device 201 with the above design information, the structure It is checked whether the product has been created according to the design information (step S104).

[0211] Next, the inspection unit 211 of the control device 204 determines whether the created structure is a non-defective product. The structure manufacturing system 200 determines whether the created structure is a non-defective product (step S105). If the inspection unit 211 determines that the above is true (Yes in step S105), the process ends. Furthermore, if the inspection unit 211 determines that the created structure is not a good product (step S10 5), it is determined whether the created structure can be repaired (step S106).

[0212] In the structure manufacturing system 200, when the inspection unit 211 determines that the created structure can be repaired, If so (Yes in step S106), the repair device 205 reprocesses the structure (step S107). Step S107) and then return to the processing of step S103. If the inspection unit 211 determines that the inspected structure cannot be repaired (No in step S106), Then, the process is completed. With the above, the structure manufacturing system 200 executes the flow chart shown in FIG. The port processing ends.

[0213] The structure manufacturing system 200 of this embodiment is the same as the shape measuring device 20 of the above embodiment. 1 can measure the coordinates of the structure with high precision, so the created structure is a good product. In addition, the structure manufacturing system 200 can determine whether the structure is non-defective or not. In such cases, reworking of the structure can be carried out and repaired.

[0214] In this embodiment, the repair process performed by the repair device 205 is the same as that performed by the molding device 203. In this case, the detection by the control device 204 may be replaced by a step of re-executing the molding process. If the inspection unit 211 determines that the product can be repaired, the forming device 203 performs the forming process (forging, cutting, etc.). Specifically, for example, the forming device 203 is configured to cut the structure. This allows the structure manufacturing system 2 to cut the parts that should have been cut but have not been cut. 00 allows you to create structures accurately.

[0215] The present embodiment has been described above with reference to the accompanying drawings. The shapes and combinations of the components are merely examples and should not be construed as departing from the spirit of the present embodiment. Various modifications are possible within a reasonable range based on design requirements, etc.

[0216] For example, in the shape measuring device 1 in the above embodiment, the holding member 55 is a cantilevered optical probe. Although the configuration for holding the roller 3 is shown as an example, the present invention is not limited to this, and a configuration for holding the roller 3 at both ends is also possible. By holding it at both ends, deformation occurring in the holding member 55 during rotation can be reduced. This makes it possible to improve the measurement accuracy.

[0217] In the above embodiment, a linear light beam is projected from the optical probe 3 as the measurement light beam L. The image of the measurement light reflected from the measurement object is captured, but the type of the optical probe 3 is not limited to this. The illumination light emitted from the optical probe 3 may be irradiated all at once within a predetermined plane. For example, the method described in U.S. Patent No. 6,075,605 may be used. Optical probe The illumination light emitted from the light source 10 may be in the form of a point-like spot light.

[0218] Furthermore, as in the above embodiment, the shape measuring device is a device for measuring a shape having a repeated shape in the circumferential direction and a circular shape. Suitable for measuring objects with irregularities extending in directions other than the circumferential direction. The shape measurement device can set the measurement range, light control area setting for one of the repeating shapes. By setting the possible range and light control area, the set conditions can be used for measuring other repeating shapes. The object to be measured may have a shape that is repeated in the circumferential direction and has a shape that is different from the circumferential direction. The shape is not limited to a shape having a concave and convex shape extending in a certain direction, and various shapes, for example, a shape having a repeated It may also be a shape that does not have a shape.

[0219] In the above embodiment, the shape measuring device 1 uses a light section method to measure the shape of the object M to be measured. The shape measuring device 1 is a device that uses the light cutting method. is not limited to the above, but may be obtained by receiving light from the object M (for example, from an image of the object M). This can be applied to a shape measuring device that measures the shape of M. For example, stripe or dot patterns can be measured. The existing method for measuring the three-dimensional shape of the object M from the image of the object M projected with turning light is Measure the two-dimensional shape (dimensions) of the object M from a shape measuring device or an image of the object M. It can be applied to existing shape measurement devices such as existing image measurement devices. The present invention can also be applied to existing inspection and measurement devices other than the above. [Explanation of symbols]

[0220] 1 Shape measuring device 4 Analysis device 8 Projection device (projection section) 9. Imaging device (imaging section) 32 Input section 33 Display section 34 Storage section 36 Control unit (image analyzer) 38 Measurement control section 40 Analysis Department 80 Design information acquisition section 82 Condition acquisition section 83 Image analysis section 84 Image analysis execution unit 86 Detector 88 Output section B Measurement check result screen C. Detection result image C0 reproduction image L1 Diffuse L2 Specular reflection light L3 multiple reflected light M Object to be measured P1 Diffuse reflection image P2 Specular reflection image P3 Multiple reflection image

Claims

1. An analytical device used for shape measurement that measures the shape of an object to be measured by capturing an image formed by light projected onto the object, comprising: an image analysis unit that analyzes an image that would be obtained if an image formed by light projected onto the object to be measured were captured based on design information of the object to be measured, and generates information about the degree of influence of the image that is inappropriate for shape measurement on the shape measurement; an output unit that outputs information related to the degree of influence; An analysis device comprising:

2. An analysis device as described in Claim 1, wherein the information regarding the degree of impact includes information that identifies the type of the inappropriate image.

3. An analysis device as described in claim 1 or claim 2, wherein the image analysis unit generates information regarding the degree of influence based on the measurement conditions of the shape measurement.

4. An analysis device as described in Claim 3, wherein the information regarding the degree of impact includes change information indicating the tendency of change in the degree of impact when the measurement conditions are assumed to be changed.

5. The analysis device described in Claim 4, wherein the change information includes information indicating the change in the inappropriate image when it is assumed that the measurement conditions are changed.

6. The measurement condition is a first measurement condition, the image analysis unit determines a second measurement condition for the shape measurement based on the information on the degree of influence; The analysis device according to claim 3 , wherein the output unit outputs the second measurement condition.

7. The information regarding the impact level is information regarding a first impact level, the image analysis unit generates information regarding a second degree of influence that an inappropriate image has on the shape measurement when measurement is performed under the second measurement conditions; and The analysis device according to claim 6 , wherein the output unit outputs information relating to the second influence degree.

8. An analytical device as described in claim 6 or claim 7, which is provided with a measurement control unit that performs shape measurement of the object to be measured under the second measurement conditions.

9. An analytical device described in any one of claims 3 to 8, wherein the measurement conditions include at least one of the relative position of the object to be measured and an imaging unit that captures an image formed by light projected onto the object to be measured, and the relative attitude of the imaging unit and the object to be measured.

10. An analytical device described in any one of claims 1 to 9, wherein the inappropriate image includes an image generated by specular reflection of light projected onto the object to be measured.

11. An analytical device described in any one of claims 1 to 10, wherein the inappropriate image includes an image generated by multiple reflections of light projected onto the object to be measured.

12. The inappropriate image includes an image of the object to be measured that is partially missing due to vignetting. The analysis device according to any one of claims 1 to 11.

13. An analytical device described in any one of claims 1 to 12, wherein the inappropriate image includes at least one of an image in which the intensity of the reflected light of light projected onto the object to be measured is less than a predetermined value and an image in which the intensity of the reflected light is greater than a predetermined value.

14. An analysis device described in any one of claims 1 to 13, wherein the image analysis unit generates information regarding the degree of influence based on the brightness of the inappropriate image.

15. An analysis device described in any one of claims 1 to 14, wherein the image analysis unit generates information regarding the degree of influence based on the area of ​​the inappropriate image.

16. An analysis device described in any one of claims 1 to 15, wherein the image analysis unit determines the degree of influence based on a predetermined threshold value.

17. The analysis device described in Claim 16, wherein the threshold value is set by an operator.

18. An analytical device described in any one of claims 1 to 17, wherein the design information includes information regarding the shape of the object to be measured.

19. An analytical device described in any one of claims 1 to 18, wherein the design information includes information regarding the reflectivity of the object to be measured.

20. An analytical device described in any one of claims 1 to 19, wherein the design information includes information regarding the material of the object to be measured.

21. An analytical device described in any one of claims 1 to 20, wherein the design information includes information regarding the surface roughness of the object to be measured.

22. A shape measuring device that measures the shape of the object to be measured under second measurement conditions output by an analysis device described in any one of claims 6 to 8.

Images