Micro-vibration detector

The micro-vibration detection unit addresses the challenge of minute vibrations by sensing and canceling them in multiple directions, enabling miniaturization and high density in semiconductor and electron microscope applications.

JP2025126866APending Publication Date: 2025-08-29森 博
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Patent Information

Application Number
JP2024035383
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-02-19
Publication Date
2025-08-29

AI Technical Summary

Technical Problem

Existing technologies face difficulties in eliminating minute vibrations, which hinder the miniaturization and high density of semiconductors and electron microscopes.

Method used

A micro-vibration detection unit is designed to be small and lightweight, with a miniaturized coil for magnetic-electrical conversion and enhanced detection amplitude, capable of sensing vibrations in multiple directions, and uses lead wires to connect sensing coils to a vibration canceling power amplifier.

Benefits of technology

The solution effectively senses and cancels out minute vibrations in all directions, facilitating the miniaturization and high density of semiconductor manufacturing equipment and electron microscopes.

✦ Generated by Eureka AI based on patent content.

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Abstract

To accurately and almost completely eliminate vibrations from precision machinery, from which micro-vibrations had previously been difficult to remove.SOLUTION: According to the present invention, each microcoil 1, 2 is appropriately driven in a direction opposite to vibration, using power excited by a vibration-canceling amplification unit simultaneously with voltage generation, thereby enabling an object to maintain a constant position.SELECTED DRAWING: Figure 1
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Description

[Technical Field]

[0001] The present invention is suitable for countering minute vibrations in semiconductor manufacturing equipment, electron microscopes, and the like. Summary of the Invention [Problem to be solved by the invention]

[0002] This invention is a solution to the difficulty of eliminating minute vibrations, which is thought to be one of the biggest obstacles to the miniaturization and high density of semiconductors in recent years. [Means for solving the problem]

[0003] The micro-vibration detection unit of the present invention is designed to be small and lightweight overall, and the detection amplitude is increased while the coil of the magnetic-electrical conversion unit is miniaturized. [Effects of the Invention]

[0004] The present invention can sense minute vibrations in all directions, including front, back, left, right, and up and down. [Brief explanation of the drawings]

[0005] [Figure 1] 1 is a diagram showing the entire present invention. DETAILED DESCRIPTION OF THE INVENTION

[0006] In this invention, lead wires are drawn from each of the sensing coils 1 and 2 by contacting the earthquake-proofing part, and connected to the vibration canceling power amplifier, thereby canceling out the vibration.

Claims

1. This highly sensitive minute vibration detection device generates electricity by detecting a small lightweight magnet 3 and its movement, has a small gap between it and the magnet 3, and is made up of microcoils 1 arranged at four positions on the top, bottom, left and right, a weight 5 attached to the end of a round bar spring 6, and a lightweight, highly hard bar 4 attached to the weight 5, which amplifies the amplitude of the weight 5 and transmits it to the magnet 3.

2. The micro-vibration detection device is made up of a vibration plate 7 and weight 5 that receive vertical vibrations, a lightweight, highly rigid bar 4 that increases the amplitude of these vibrations, a magnet 3 attached to the tip of the bar, and micro-coils 2 arranged vertically that convert magnetic changes caused by the movement of the magnet into electrical signals.