Processing device

Abstract

To easily carry a plate-like workpiece into a chuck table.SOLUTION: A dolly 40 which supports plate-like workpieces 2 is coupled with a first device base 4 of a polishing device 1 to receive the plate-like workpieces 2 from the dolly 40 by means of a delivery unit 10 to deliver the same to a conveyance unit. Therefore, when only one of the plate-like workpieces 2, for example, is processed, the plate-like workpiece 2 can be carried into the chuck table 20 easier than when using a cassette. Further, when the plate-like workpiece 2 is a large one difficult to store, the plate-like workpiece 2 can easily be handled.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a processing device. [Background technology]

[0002] As disclosed in Patent Document 1, in a grinding device that grinds plate-shaped workpieces with a grinding wheel, a cassette containing plate-shaped workpieces is placed on a cassette stage, and the plate-shaped workpieces in the cassette are transported to a chuck table by a transport mechanism. Furthermore, the plate-shaped workpieces after grinding are stored in the cassette by the transport mechanism.

[0003] Furthermore, as disclosed in Patent Document 2, there is a processing device in which a plate-shaped workpiece taken out of a cassette is transported by a belt conveyor and processed.

[0004] In this way, the plate-shaped workpiece is taken out of the cassette, processed, and then stored back into the cassette, thereby enabling continuous processing. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-165434 [Patent Document 2] Japanese Patent Application Publication No. 2018-098362 [Patent Document 3] Japanese Patent Application Publication No. 06-219513 Summary of the Invention [Problem to be solved by the invention]

[0006] However, before continuous machining, a single plate-shaped workpiece may be test-machined. In this case, in order to transport the single plate-shaped workpiece to the chuck table, the single plate-shaped workpiece is stored in a cassette and placed on a cassette stage. Therefore, when using a large plate-shaped workpiece that is difficult to store in a cassette, such as the liquid crystal substrate disclosed in Patent Document 3, performing test machining is time-consuming.

[0007] Therefore, an object of the present invention is to easily load a plate-shaped workpiece onto the chuck table even when machining only one large plate-shaped workpiece. [Means for solving the problem]

[0008] The processing apparatus of the present invention (the present processing apparatus) is a processing apparatus comprising a chuck table that holds a plate-shaped workpiece, a processing unit that processes the plate-shaped workpiece, and a transport unit that transports the plate-shaped workpiece into or out of the chuck table, and is also provided with a connecting portion for connecting a cart having a support portion that partially supports the underside of the plate-shaped workpiece, and a transfer unit that transfers the plate-shaped workpiece between the support portion of the cart connected by the connecting portion and the transport unit.

[0009] The processing device may further include a supply button for moving the plate-shaped workpiece from the support portion to a position where the transport unit can receive it by momentary operation of the transfer unit, and a discharge button for moving the plate-shaped workpiece from a position where the transport unit can deliver it to the support portion by momentary operation of the transfer unit. [Effects of the Invention]

[0010] In this processing device, a carriage supporting a plate-shaped workpiece is connected to the processing device, and the transfer unit receives the plate-shaped workpiece from the carriage and transfers it to the transport unit. Therefore, for example, when processing only one plate-shaped workpiece, the plate-shaped workpiece can be loaded onto the chuck table more easily than when using a cassette. Furthermore, even if the plate-shaped workpiece is large and difficult to store in a cassette, it is possible to easily load and unload the plate-shaped workpiece onto and from the chuck table. [Brief explanation of the drawings]

[0011] [Figure 1] FIG. 2 is a perspective view showing the configuration of a grinding device. [Figure 2] FIG. 2 is a perspective view showing the configuration of a transport unit. [Figure 3] 3(a) to 3(c) are perspective views showing the configuration of the carriage. [Figure 4] FIG. 2 is a perspective view showing the configuration of the front surface of the first device base. [Figure 5] FIG. 2 is a perspective view showing the configuration of a delivery unit 10. [Figure 6] 6(a) and 6(b) are perspective views showing the carrying-in step and the carrying-out step. DETAILED DESCRIPTION OF THE INVENTION

[0012] As shown in Fig. 1, a grinding apparatus 1 according to this embodiment is an example of a processing apparatus, and grinds a plate-shaped workpiece 2, which is an example of a workpiece. The plate-shaped workpiece 2 is, for example, a rectangular plate-shaped workpiece. Such a plate-shaped workpiece 2 may be, for example, a substantially square workpiece with each side measuring 700 mm.

[0013] The grinding device 1 has a first device base 4 and a second device base 5 arranged behind (on the +Y direction side of) the first device base 4. On the first device base 4, the plate-shaped workpiece 2 is loaded and unloaded. On the second device base 5, the plate-shaped workpiece 2 is machined.

[0014] A carriage 40 holding the plate-shaped workpiece 2 is connected to the first equipment base 4. A transfer unit 10 is also provided on the first equipment base 4. The transfer unit 10 is used to transfer the plate-shaped workpiece 2 to and from the carriage 40.

[0015] An opening 13 is provided on the second device base 5 on the +Y direction side of the transfer unit 10. A chuck table 20 that holds the plate-shaped workpiece 2 is disposed within the opening 13. The chuck table 20 has a holding surface 22 that holds the plate-shaped workpiece 2 by suction. The holding surface 22 is connected to a suction source (not shown) and is capable of holding the plate-shaped workpiece 2 by suction.

[0016] In addition, a driving member (not shown) that rotates and drives the chuck table 20 is provided below the chuck table 20. This driving member allows the chuck table 20, while holding the plate-shaped workpiece 2 by the holding surface 22, to rotate about a rotation axis that passes through the center of the holding surface 22 and extends in the Z-axis direction.

[0017] A cover plate 27 that moves along the Y-axis direction together with the chuck table 20 is provided around the periphery of the chuck table 20. A bellows cover 12 that expands and contracts along the Y-axis direction is connected to the cover plate 27. A table movement mechanism (not shown) is disposed below the chuck table 20. The table movement mechanism moves the chuck table 20 along the Y-axis direction.

[0018] In this embodiment, the chuck table 20 is moved along the Y-axis direction by a Y-axis movement mechanism between a holding position on the -Y direction side for holding the plate-shaped workpiece 2 on the holding surface 22 and a grinding position on the +Y direction side where the plate-shaped workpiece 2 is ground.

[0019] 1, a column 11 is erected on the +Y direction side of the second device base 5. The column 11 is provided with a grinding mechanism 70 that grinds the plate-shaped workpiece 2 and a grinding feed mechanism 30.

[0020] The grinding feed mechanism 30 is configured to move the grinding mechanism 70 in the Z-axis direction relative to the chuck table 20.

[0021] The grinding feed mechanism 30 includes a pair of guide rails 31 parallel to the Z-axis direction, a moving table 33 that slides on the guide rails 31, a ball screw 32 parallel to the guide rails 31, a motor 34, and a holder 36 attached to the moving table 33. The holder 36 supports the grinding mechanism 70.

[0022] The moving table 33 is slidably installed on the guide rail 31. A nut portion (not shown) is fixed to the moving table 33. A ball screw 32 is threadedly engaged with this nut portion. The motor 34 is connected to one end of the ball screw 32.

[0023] In the grinding feed mechanism 30, the motor 34 rotates the ball screw 32, causing the moving table 33 to move in the Z-axis direction along the guide rail 31. As a result, the holder 36 attached to the moving table 33 and the grinding mechanism 70 supported by the holder 36 move in the Z-axis direction together with the moving table 33.

[0024] The grinding mechanism 70 is an example of a processing unit that processes the plate-shaped workpiece 2, and grinds the plate-shaped workpiece 2 that is suction-held on the holding surface 22. The grinding mechanism 70 includes a spindle housing 71 fixed to the holder 36, a spindle 72 rotatably held in the spindle housing 71, a spindle motor 73 that rotates and drives the spindle 72, a wheel mount 74 attached to the lower end of the spindle 72, and a grinding wheel 75 supported by the wheel mount 74.

[0025] The spindle housing 71 is held by the holder 36 so as to extend in the Z-axis direction. The spindle 72 extends in the Z-axis direction so as to be perpendicular to the holding surface 22 of the chuck table 20, and is rotatably supported by the spindle housing 71.

[0026] The spindle motor 73 is connected to the upper end side of the spindle 72. The spindle motor 73 rotates the spindle 72 about a rotation axis extending in the Z-axis direction.

[0027] The wheel mount 74 is formed in a disk shape and is fixed to the lower end of the spindle 72. The wheel mount 74 supports a grinding wheel 75.

[0028] The grinding wheel 75 is formed to have an outer diameter that is approximately the same as the outer diameter of the wheel mount 74. The grinding wheel 75 includes a wheel base 76 formed from a metal material. A plurality of grinding stones 77 arranged in a ring shape are fixed to the underside of the wheel base 76 around the entire circumference. The grinding stones 77 are rotated together with the spindle 72 by the spindle motor 73, and grind the plate-shaped workpiece 2 held on the chuck table 20.

[0029] A thickness measuring device 9 is disposed at a position adjacent to the chuck table 20. The thickness measuring device 9 can measure the thickness of the plate-shaped workpiece 2 during grinding, for example, in a non-contact manner.

[0030] 1, a transfer space 170 indicated by a broken line is provided with a transfer unit 100 shown in FIG. 2. The transfer unit 100 is configured to transfer a plate-shaped workpiece 2 into or out of the chuck table 20.

[0031] The transport unit 100 includes a holder 140 for holding a plate-shaped workpiece 2 on the surface of a housing plate 101 extending in the Y-axis direction on the -X-direction side, and a movement mechanism 110 for moving the holder 140.

[0032] The movement mechanism 110 is used to move the holding unit 140 including the holding pad 142. The movement mechanism 110 includes a Z-axis movement mechanism 130 for moving the holding unit 140 in the Z-axis direction, and a Y-axis movement mechanism 120 for moving the holding unit 140 and the Z-axis movement mechanism 130 in the Y-axis direction.

[0033] The Y-axis movement mechanism 120 includes a pair of guide rails 123 extending in the Y-axis direction, a Y-axis table 124 placed on the guide rails 123, a ball screw 125 extending parallel to the guide rails 123, and a drive motor 126 that rotates the ball screw 125.

[0034] A pair of guide rails 123 are arranged on the housing plate 101 parallel to the Y-axis direction. A Y-axis table 124 is installed on the pair of guide rails 123 so as to be slidable along these guide rails 123. A Z-axis movement mechanism 130 and a holding unit 140 are attached to the Y-axis table 124.

[0035] Ball screw 125 is threadedly engaged with a nut portion (not shown) provided on Y-axis table 124. Drive motor 126 is connected to one end of ball screw 125 and rotates ball screw 125. As ball screw 125 is rotated, Y-axis table 124, Z-axis movement mechanism 130, and holding portion 140 move in the Y-axis direction along guide rail 123.

[0036] The Z-axis movement mechanism 130 includes a mounting plate 134, a guide rail 131 extending in the Z-axis direction, a Z-axis table 132 attached to the guide rail 131, a ball screw 133 extending parallel to the guide rail 131, a drive motor 135 that rotates the ball screw 133, and an arm 137 that supports the holding portion 140.

[0037] Mounting plate 134 is fixed to Y-axis table 124. Guide rails 131 are arranged on mounting plate 134 parallel to the Z-axis direction. Z-axis table 132 is installed on guide rails 131 so as to be slidable along guide rails 131. An arm 137 extending along the X-axis direction is attached to Z-axis table 132.

[0038] Ball screw 133 is threadedly engaged with a nut portion (not shown) provided on Z-axis table 132. Drive motor 135 is connected to one end of ball screw 133 and rotates ball screw 133. When ball screw 133 is rotated, Z-axis table 132, arm 137, and holding portion 140 supported by arm 137 move in the Z-axis direction along guide rail 131.

[0039] The holding unit 140 is supported by a rotation mechanism 138 connected to the tip of an arm 137 of the Z-axis movement mechanism 130. The holding unit 140 has a pair of holding pads 142 arranged to sandwich the rotation mechanism 138. The holding pads 142 are capable of suction-holding the plate-shaped workpiece 2. Furthermore, by rotating the rotation mechanism 138, one holding pad 142 and the other holding pad 142 can be reversed.

[0040] The transport unit 100 having such a configuration holds the plate-shaped workpiece 2 held by the delivery unit 10 with the holding part 140 , and transports and places the workpiece 2 on the holding surface 22 of the chuck table 20 .

[0041] Furthermore, after the grinding process on the plate-shaped workpiece 2 by the grinding mechanism 70 , the conveying unit 100 holds the plate-shaped workpiece 2 on the holding surface 22 of the chuck table 20 by the holding part 140 , and causes the plate-shaped workpiece 2 to be held by the delivery unit 10 .

[0042] 1, the grinding apparatus 1 has a housing (not shown) that covers the first apparatus base 4 and the second apparatus base 5, and a touch panel 8 that is disposed on the side of the housing. The touch panel 8 displays various information such as processing conditions related to the grinding apparatus 1. The touch panel 8 is also used to set various information. In this way, the touch panel 8 functions as a display member for displaying information and also as an input member for inputting information.

[0043] Next, the carriage 40 connected to the first device base of the grinding device 1 will be described. As shown in Figures 3(a) and 3(b), the carriage 40 includes a main body 41 and a plurality of wheels 42 (four in this embodiment) arranged at the lower end of the main body. The main body 41 has a generally rectangular parallelepiped shape with approximately the same height as the first device base 4. The wheels 42 are rotatably attached to the four corners of the lower end of the main body 41, and movably support the entire carriage 40 including the main body 41.

[0044] 3(a), a handle 43 is attached to a surface 41a of the main body 41. The handle 43 is a part that is grasped by an operator, and is used, for example, when the operator moves the cart 40.

[0045] 3(b) is the surface that faces and comes into contact with the front surface 4a of the first device base 4 when the dolly 40 is connected to the first device base 4. As shown in FIG.

[0046] As shown in Fig. 4, the front surface 4a of the first device base 4 is provided with a pair of recesses 17, a pair of upper magnets 15 formed above the recesses 17, and a pair of lower magnets 16 formed below the recesses 17. The recesses 17 are, for example, V-shaped grooves that have a rectangular opening that is long in the Z-axis direction and narrows toward the back. The opening of the recesses 17 may be circular or square.

[0047] In contrast, as shown in Figure 3(b), the back surface 41b of the main body 41 of the trolley 40 is provided with a pair of protrusions 47 that can be fitted into a pair of recesses 17, an upper magnetic plate 45 formed above the protrusions 47, and a lower magnetic plate 46 formed below the protrusions 47.

[0048] The pair of protrusions 47 are formed on the back surface 41b so as to fit into the pair of recesses 17 of the first device base 4 when the carriage 40 is connected to the first device base 4. That is, the pair of recesses 17 of the first device base 4 function as connecting portions for connecting the carriage 40 to the grinding device 1 (first device base 4). Note that the protrusions 47 may have a wedge shape corresponding to the shape of the recesses 17 so as to fit well into the recesses 17.

[0049] Furthermore, the upper magnetic plate 45 and the lower magnetic plate 46 are formed on the back surface 41b so as to be able to be adhered to the pair of upper and lower magnets 15 and 16 of the first device base 4 when the carriage 40 is connected to the first device base 4. Therefore, the upper and lower magnets 15 and 16 also function as connecting parts for connecting the carriage 40 to the grinding device 1.

[0050] Furthermore, a pair of thin plate-like support parts 44 are provided on the upper surface 41c of the main body 41, which partially support the lower surface of the plate-shaped workpiece 2. As shown in Fig. 1, the support parts 44 are formed on the upper surface 41c so as to extend along the Y-axis direction when the carriage 40 is connected to the first device base 4. As shown in Fig. 3(c), the pair of support parts 44 can partially support the lower surface of one plate-shaped workpiece 2 so as to create a gap below the plate-shaped workpiece 2.

[0051] Next, the transfer unit 10 shown in Fig. 1 will be described. The transfer unit 10 is intended to enable (perform) the transfer of the plate-shaped workpiece 2 to the transport unit 100 or the reception of the plate-shaped workpiece 2 from the transport unit 100. In particular, in this embodiment, the transfer unit 10 is configured to transfer the plate-shaped workpiece 2 between the support part 44 of the carriage 40 connected to the grinding device 1 by the recess 17 of the first device base 4 and the transport unit 100 shown in Fig. 2.

[0052] The transfer unit 10 is provided in a groove 4b formed on the upper surface of the first device base 4. As shown in Fig. 5, the transfer unit 10 has a belt moving mechanism 50 for carrying the plate-shaped workpiece 2 into and out of the support part 44 of the carriage 40, and a lifting mechanism 60 for raising and lowering the belt moving mechanism 50.

[0053] The belt moving mechanism 50 is supported by the lifting mechanism 60 so as to extend in the horizontal direction (Y-axis direction). The tip (the end on the -Y direction side) of the belt moving mechanism 50 protrudes in the -Y direction beyond the front surface 4a of the first device base 4 (see FIG. 1). The belt moving mechanism 50 includes an endless belt 51 , a rotation mechanism 52 that rotates the endless belt 51 , and a frame 56 that supports the endless belt 51 and the rotation mechanism 52 .

[0054] The rotation mechanism 52 includes a driven roller 53 provided at the end of the endless belt 51 on the −Y direction side, a drive roller 54 provided at the end of the endless belt 51 on the +Y direction side, and a motor 55 that drives the drive roller 54. The driven roller 53, the drive roller 54, and the motor 55 are supported by a frame 56.

[0055] The endless belt 51 is bridged over a driven roller 53 and a driving roller 54 that are provided so as to contact the inner peripheral surface of the endless belt 51. The endless belt 51 is configured so that the plate-shaped workpiece 2 is placed on the upper surface thereof.

[0056] In the belt moving mechanism 50 having such a configuration, the drive roller 54 is rotated by the motor 55, causing the endless belt 51 to rotate around the drive roller 54 and the driven roller 53 as a rotation axis. As a result, the plate-like workpiece 2 placed on the upper surface of the endless belt 51 is moved along the Y-axis direction.

[0057] The lifting mechanism 60 includes a pair of guide rails 61 parallel to the Z-axis direction, a moving table 63 that slides on the guide rails 61, a ball screw 62 parallel to the guide rails 61, and a motor 64. The belt moving mechanism 50 (frame body 56 of the belt moving mechanism 50) is attached to the moving table 63 so as to extend along the Y-axis direction.

[0058] The moving table 63 is slidably installed on the guide rail 61. A nut portion (not shown) is formed inside the moving table 63. A ball screw 62 is threadedly engaged with this nut portion. The motor 64 is connected to one end of the ball screw 62.

[0059] In the lifting mechanism 60, the motor 64 rotates the ball screw 62, causing the moving table 63 to move in the Z-axis direction along the guide rail 61. As a result, the belt moving mechanism 50 attached to the moving table 63 moves in the Z-axis direction together with the moving table 63.

[0060] By using this type of lifting mechanism 60, the belt moving mechanism 50 can be raised and lowered in the Z-axis direction while maintaining a posture extending in the Y-axis direction. In this embodiment, the lifting mechanism 60 is configured to be able to raise and lower the belt moving mechanism 50 at least between a position higher than the lower surface of the plate-shaped workpiece 2 supported by the support portion 44 of the carriage 40 and the upper surface 41c of the main body 41 of the carriage 40.

[0061] 3. Furthermore, the thickness (length in the Z-axis direction) of the belt moving mechanism 50 is shorter than the height of the support parts 44. Therefore, the tip side portion of the belt moving mechanism 50 of the delivery unit 10 can be inserted between the pair of support parts 44 of the cart 40 when the cart 40 is connected to the first device base 4.

[0062] The transfer unit 10 having such a configuration can receive the plate-shaped workpiece 2 supported on the support part 44 of the cart 40 using the endless belt 51 of the belt moving mechanism 50, move it to the grinding device 1 side, and hand it over to the conveying unit 100, and can also move the plate-shaped workpiece 2 received from the conveying unit 100 to the cart 40 side using the endless belt 51 and hand it over to the cart 40 (place it on the support part 44).

[0063] 1, the grinding apparatus 1 has therein a control unit 7 for controlling the grinding apparatus 1. The control unit 7 includes a CPU that performs calculations according to a control program, and a storage medium such as a memory. The control unit 7 executes various processes and controls each component of the grinding apparatus 1.

[0064] For example, the control unit 7 controls each component of the grinding device 1 to perform a grinding process on the plate-shaped workpiece 2. The grinding process controlled by the grinding device 1 will be described below.

[0065] [Connection process] First, a connecting step is carried out. In this step, the carriage 40 supporting one plate-shaped workpiece 2 by a support part 44 is connected to the first device base 4 of the grinding device 1, as shown in Fig. 6(a).

[0066] Specifically, the worker uses, for example, the handle 43 to bring the rear surface 41b of the dolly 40 into close contact with the front surface 4a of the first device base 4. At this time, the worker adjusts the position of the dolly 40 so that the convex portion 47 (see FIG. 3) formed on the rear surface 41b of the main body 41 of the dolly 40 faces the concave portion 17 (see FIG. 4) formed on the front surface 4a of the first device base 4.

[0067] As a result, the convex portion 47 of the carriage 40 is fitted into the concave portion 17 of the first device base 4. Furthermore, the upper magnetic plate 45 and the lower magnetic plate 46 formed on the back surface 41b of the carriage 40 are magnetically adhered to the upper magnet 15 and the lower magnet 16 formed on the front surface 4a of the first device base 4, respectively. As a result, the carriage 40 is connected to the first device base 4 of the grinding device 1.

[0068] In the connecting step, the control unit 7 controls the lifting mechanism 60 of the delivery unit 10 to set the position of the belt moving mechanism 50 to a position lower than the lower surface of the plate-shaped workpiece 2 supported by the support parts 44 of the carriage 40 and higher than the upper surface 41c of the main body 41 of the carriage 40. As a result, when the carriage 40 is connected to the first device base 4, the tip side portion of the belt moving mechanism 50 of the delivery unit 10 is inserted between the pair of support parts 44 of the carriage 40, i.e., below the plate-shaped workpiece 2 supported by the support parts 44. At this time, it is preferable that the tip of the endless belt 51 is positioned on the -Y direction side of the center of the plate-shaped workpiece 2 so that the plate-shaped workpiece 2 can be held well by the endless belt 51 of the belt moving mechanism 50 in the next process.

[0069] [Delivery process] After the connecting step, a carrying-in step is carried out. In this step, the plate-shaped workpiece 2 supported by the support portion 44 of the carriage 40 is delivered to the first device base 4 by the delivery unit 10.

[0070] Specifically, the control unit 7 controls the lifting mechanism 60 of the transfer unit 10 shown in Figure 6(a) to raise the belt moving mechanism 50, and the bottom surface of the plate-shaped workpiece 2 supported on the support part 44 is held by the endless belt 51, lifting it off the support part 44, thereby receiving the plate-shaped workpiece 2 from the support part 44 by the endless belt 51.

[0071] Next, as shown in Figure 6(b), the control unit 7 rotates the endless belt 51 using the rotation mechanism 52 of the belt moving mechanism 50, thereby moving the plate-shaped workpiece 2 held on the endless belt 51 in the +Y direction as shown by arrow 301, and placing it above the first device base 4, which is a position where it can be received by the conveying unit 100.

[0072] Next, the control unit 7 controls the movement mechanism 110 of the transport unit 100 shown in Fig. 2 to adjust the position of the holding part 140, so that the plate-shaped workpiece 2 placed above the first device base 4 is held by the holding part 140. This completes the transfer of the plate-shaped workpiece 2 from the support part 44 of the carriage 40 to the transport unit 100 by the delivery unit 10.

[0073] Thereafter, the control unit 7 controls the movement mechanism 110 of the transport unit 100 to move the holder 140 holding the plate-shaped workpiece 2, thereby transporting and placing the plate-shaped workpiece 2 on the holding surface 22 (see FIG. 1) of the chuck table 20 at the placement position. At this time, the control unit 7 places the plate-shaped workpiece 2 on the holding surface 22 so that the center of the plate-shaped workpiece 2 coincides with the center of the holding surface 22. Thereafter, the control unit 7 connects the holding surface 22 to a suction source, thereby suction-holding the plate-shaped workpiece 2 by the holding surface 22.

[0074] [Grinding process] After the carrying-in process, the grinding process is carried out. In this process, the control unit 7 first places the chuck table 20 holding the plate-shaped workpiece 2 at the grinding position below the grinding mechanism 70 shown in FIG. 1. Then, the control unit 7, for example, rotates the grinding wheel 75 of the grinding mechanism 70 and also rotates the chuck table 20. Then, the control unit 7 uses the grinding feed mechanism 30 to feed the grinding mechanism 70 including the grinding wheel 75 in the -Z direction for grinding. As a result, the grinding stone 77 of the rotating grinding wheel 75 comes into contact with the upper surface of the plate-shaped workpiece 2 held on the rotating chuck table 20 and grinds this surface.

[0075] Furthermore, in the grinding process, the control unit 7 measures the thickness of the plate-shaped workpiece 2 during grinding using a thickness measuring device 9. Then, the control unit 7 ends grinding of the plate-shaped workpiece 2 when the thickness of the plate-shaped workpiece 2 reaches a predetermined thickness.

[0076] [Export process] After the grinding process, a carrying-out process is carried out. In this process, the control unit 7 first places the chuck table 20, which holds the ground plate-shaped workpiece 2, at a holding position on the -Y direction side. Thereafter, the control unit 7 controls the movement mechanism 110 of the transport unit 100 shown in FIG. 2 to adjust the position of the holding part 140, thereby holding the plate-shaped workpiece 2 held on the holding surface 22 of the chuck table 20 by the holding part 140 and releasing the suction holding of the plate-shaped workpiece 2 by the holding surface 22.

[0077] Thereafter, the control unit 7 moves the holder 140 holding the plate-shaped workpiece 2 using the movement mechanism 110, thereby placing the plate-shaped workpiece 2 at a predetermined position on the endless belt 51 in the belt movement mechanism 50 of the delivery unit 10, as shown in FIG. 6(b). This predetermined position is a position on the endless belt 51 where the plate-shaped workpiece 2 can be delivered by the transport unit 100. Then, the control unit 7 rotates the endless belt 51 using the rotation mechanism 52 of the belt movement mechanism 50, thereby moving the plate-shaped workpiece 2 held by the endless belt 51 in the -Y direction as shown by arrow 302, and placing it above the support part 44 of the carriage 40.

[0078] Furthermore, in this state, the control unit 7 uses the lifting mechanism 60 to lower the belt moving mechanism 50, and causes the lower surface of the plate-shaped workpiece 2 supported by the endless belt 51 to be supported by the support part 44 of the carriage 40, thereby transferring the plate-shaped workpiece 2 to the support part 44. This completes the transfer of the plate-shaped workpiece 2 from the transport unit 100 to the support part 44 of the carriage 40 by the transfer unit 10.

[0079] Thereafter, the worker, for example, separates the carriage 40 supporting the plate-shaped workpiece 2 by the support portion 44 from the first device base 4 and transports it to a predetermined location.

[0080] As described above, in this embodiment, the carriage 40 supporting the plate-shaped workpiece 2 is connected to the first device base 4 of the grinding device 1, and the transfer unit 10 receives the plate-shaped workpiece 2 from the carriage 40 and delivers it to the transport unit 100. Therefore, for example, when machining only one plate-shaped workpiece 2, the plate-shaped workpiece 2 can be loaded onto the chuck table 20 more easily than when using a cassette. Furthermore, even when the plate-shaped workpiece 2 is large and difficult to store in a cassette, it is possible to easily load and unload the plate-shaped workpiece 2 onto and from the chuck table 20.

[0081] In addition, in the loading and unloading processes, when the plate-shaped workpiece 2 held by the endless belt 51 is moved along the Y-axis direction as shown by arrow 301 or arrow 302 in Figure 6(b), the control unit 7 may control this movement based on instructions from the worker. In this case, as shown in FIG. 1, the touch panel 8 is provided with a supply button 81 and a discharge button 82 for momentarily operating the delivery unit 10.

[0082] The supply button 81 is a button for moving the plate-shaped workpiece 2 in the +Y direction as shown by the arrow 301 by the momentary operation of the transfer unit 10 from the support part 44 of the cart 40 to a position where the transport unit 100 can receive it. That is, the control unit 7 continues to move the plate-shaped workpiece 2 in the +Y direction by the belt moving mechanism 50 of the transfer unit 10 while the worker continues to press the supply button 81, and stops the movement of the plate-shaped workpiece 2 in the +Y direction by the belt moving mechanism 50 when the worker stops pressing the supply button 81.

[0083] On the other hand, the discharge button 82 is a button for moving the plate-shaped workpiece 2 in the -Y direction as shown by the arrow 302 by the momentary operation of the transfer unit 10 from the position where the transport unit 100 can hand it over to the support part 44 of the cart 40. That is, while the worker continues to press the discharge button 82, the control unit 7 continues to move the plate-shaped workpiece 2 in the -Y direction by the belt moving mechanism 50 of the transfer unit 10, and when the worker stops pressing the discharge button 82, stops the movement of the plate-shaped workpiece 2 in the -Y direction by the belt moving mechanism 50.

[0084] In this case, in the loading process, after the endless belt 51 in the belt moving mechanism 50 of the transfer unit 10 receives the plate-shaped workpiece 2 from the support part 44, the worker continues to press the supply button 81 while checking the position of the plate-shaped workpiece 2 until the plate-shaped workpiece 2 held by the endless belt 51 is moved in the -Y direction and positioned above the first device base 4, which is a position where it can be received by the conveying unit 100.

[0085] Also, in the unloading process, after the conveying unit 100 places the plate-shaped workpiece 2 at a predetermined position on the endless belt 51 in the belt moving mechanism 50 of the transfer unit 10, the worker continues to press the discharge button 82 while checking the position of the plate-shaped workpiece 2 until the plate-shaped workpiece 2 held by the endless belt 51 is moved in the +Y direction and positioned above the support part 44 of the cart 40.

[0086] In this configuration, the endless belt 51 holding the plate-shaped workpiece 2 is driven only when the worker continues to press the supply button 81 or the discharge button 82. This allows the worker to easily control the movement of the plate-shaped workpiece 2 while checking the transport status of the plate-shaped workpiece 2. This makes it possible to prevent damage to the plate-shaped workpiece 2 due to transport errors.

[0087] In addition, in this embodiment, the transfer unit 10 is a belt conveyor mechanism having a belt moving mechanism 50. In this regard, the transfer unit 10 is not limited to a belt conveyor mechanism as long as it is capable of transferring the plate-shaped workpiece 2 between the support part 44 of the carriage 40 and the transport unit 100. For example, the transfer unit 10 may be a transport robot having a holding pad that holds the plate-shaped workpiece 2 and a robot arm that can move the holding pad.

[0088] Furthermore, the carriage 40 (supporting portion 44) may be configured to be able to place a cassette capable of storing a single or multiple plate-shaped workpieces 2 thereon. Alternatively, the carriage 40 may be a cassette carriage including such a cassette. In this case, the transfer unit 10 is configured to be able to transport the plate-shaped workpieces 2 into and out of the cassette storage shelf, which is the supporting portion of the carriage 40, by means of the belt moving mechanism 50. In other words, the transfer unit 10 is configured to be able to transfer the plate-shaped workpieces 2 between the cassette storage shelf and the transport unit 100. [Explanation of symbols]

[0089] 1: grinding device, 2: plate-shaped workpiece, 4: first device base, 4a: front surface, 4b: groove portion, 5: second device base, 7: control unit, 8: touch panel, 9: thickness measuring device, 10: Transfer unit, 11: Column, 12: Bellows cover, 13: Opening, 15: upper magnet, 16: lower magnet, 17: recess, 20: chuck table, 22: holding surface, 27: cover plate, 30: Grinding feed mechanism, 31: Guide rail, 32: Ball screw, 33: Moving table, 34: motor, 36: holder, 40: cart, 41: body, 41a: surface, 41b: back surface, 41c: upper surface, 42: wheels, 43: Handle, 44: Support, 45: Upper magnetic plate, 46: Lower magnetic plate, 47: convex portion, 50: belt moving mechanism, 51: endless belt, 52: rotation mechanism, 53: driven roller, 54: driving roller, 55: motor, 56: frame, 60: lifting mechanism, 61: Guide rail, 62: Ball screw, 63: Moving table, 64: Motor, 70: grinding mechanism, 71: spindle housing, 72: spindle, 73: spindle motor, 74: wheel mount, 75: grinding wheel, 76: Wheel base, 77: Grinding wheel, 81: Supply button, 82: Discharge button, 100: transport unit, 101: housing plate, 110: movement mechanism, 120: Y-axis movement mechanism, 123: Guide rail, 124: Y-axis table, 125: Ball screw, 126: drive motor, 130: Z-axis movement mechanism, 131: guide rail, 132: Z-axis table, 133: ball screw, 134: mounting plate, 135: drive motor, 137: arm, 138: rotation mechanism, 140: holding portion, 142: holding pad, 170:Transport space

Claims

1. A processing device comprising a chuck table that holds a plate-shaped workpiece, a processing unit that processes the plate-shaped workpiece, and a transport unit that carries the plate-shaped workpiece in and out of the chuck table, A connecting portion for connecting a carriage having a support portion that partially supports the underside of the plate-shaped workpiece; and a transfer unit that transfers a plate-shaped workpiece between the support portion of the carriage connected by the connecting portion and the transport unit. Processing equipment.

2. a supply button for moving the plate-shaped workpiece from the support portion to a position where the transport unit can receive the workpiece by a momentary operation of the transfer unit; a discharge button for moving the plate-shaped workpiece from a position where the transport unit can deliver it to the support part by a momentary operation of the transfer unit; Further provided with The processing device according to claim 1.

Images