Long-sized magnetic wire with micro coil, and manufacturing method of the same

Abstract

To provide a method for forming a micro coil directly on a magnetic wire surface by a semiconductor process, and a long-sized magnetic wire with a micro coil.SOLUTION: In a long-sized magnetic wire 2 with a micro coil, a magnetic wire 21 with insulation coating has a magnetic wire 211 as a magnetic core, and its outer periphery is coated with an insulating material 212 such as glass, resin and oxide having the film thickness 2 mm or less. A diameter of the magnetic wire 21 is 5 μm to 1 mm, and 100 μm to 500 μm is preferable for application to a micro generator, a micro vibrator and an electromagnet. Length is from 10 cm to 2 m. Effective magnetic permeability is 20 or more, and is preferably 25 to 100. In the case where coating by the insulating material of the film thickness 2 mm or less is insufficient, an insulation material such as resin may be additionally coated on a surface of the insulation material 211, and a conductive coil may be formed on the surface thereof. In the case where the insulating material is an insulating glass, 0.5 to 1.5 μm is preferable.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a technique for forming a microcoil directly on the surface of a magnetic wire using a semiconductor process. [Background technology]

[0002] Microcoil components are widely used in magnetic sensors, microelectromagnets, microgenerators, inductance components, etc. In all cases, their performance is greatly influenced by the number of coil turns or coil pitch (density of coil turns per unit length) and the effective permeability and volume of the magnetic wire. In the case of microcoils, since the volume of the magnetic wire is very small, in order to improve performance, it is necessary to reduce the coil pitch and increase the number of coil turns.

[0003] When a mechanically wound microcoil is made by attaching a bobbin to the surface of a magnetic wire with a diameter of 1 mm or less and mechanically winding the microcoil around it, the coil pitch is limited to 10 μm, taking into account the diameter of the enameled wire. Furthermore, considering the need for a bobbin, the magnetic wire diameter increases by approximately 100 μm to 200 μm, making it difficult to achieve micro-sizing.

[0004] A microcoil made using a semiconductor process is disclosed in Patent Document 1 (Patent No. 5747294). Currently, a coil pitch of 3 μm has been achieved, making it more promising than mechanical coils, which have a coil pitch limit of 10 μm. However, because the microcoil is formed on a substrate, the substrate must be 200 μm wide and 200 μm thick, making the overall size large. When used as a magnetic sensor, microgenerator, microvibrator, or microelectromagnet in in-vivo medical devices such as catheters and gastroscopes, the space in which they are inserted is extremely narrow, so it is desirable to omit the substrate and attach the microcoil directly to the magnetic wire. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 5747294 Summary of the Invention [Problem to be solved by the invention]

[0006] To eliminate the need for a substrate for microcoils formed using semiconductor processes, it is necessary to form the microcoil directly on the surface of an insulating coated magnetic wire. The semiconductor process is a technology for printing microwiring patterns onto a flat substrate, but it is necessary to develop a new technology for printing the microcoil onto the surface of a three-dimensional magnetic wire using this technology. [Means for solving the problem]

[0007] As a result of intensive research into the above technical problems, the inventors arrived at the technical idea of ​​the present invention that a microcoil can be formed by performing rotational exposure while feeding a magnetic wire laterally. The idea is to first laminate a conductive thin film on the surface of an insulating coated magnetic wire, then apply a resist on top of that, and perform rotational exposure while feeding the wire. After that, an etching process is performed, and a protective coating is attached to the coil to form a microcoil.

[0008] The long magnetic wire with microcoil is The magnetic core is made of a magnetic wire, a conductive coil, and an outer insulating coating. The magnetic wire has an insulating coating and a diameter of 5 μm to 1 mm, and a length of 10 cm to 1 m. The conductive coil is made of a conductive material with excellent conductivity, such as Cu, Al, or Au, with a coil pitch of 2 μm to 200 μm. The outer insulating coating electrically insulates the coil from the outside and also protects the membrane from environmental damage, and has a thickness of 100 μm or less.

[0009] When using photolithography to pattern microcoil wiring on the surface of a magnetic wire with large curvature and unevenness, the curvature creates a gap between the mask and the wire resist coating at areas other than the vertices of the wire, resulting in insufficient exposure during exposure.To avoid this, the exposure time and rotational feed speed are adjusted by rotating the wire so that the exposure width remains constant.For example, in the case of a feed pitch of 5 μm, it was discovered that this can be achieved by synchronizing the rotational speed per rotation with the feed amount of 5 μm, and matching the feed time with the exposure time.

[0010] The metal film was deposited on the wire surface in a vacuum chamber while rotating using a rotating device to ensure uniform deposition on the surface. Next, a resist was applied to the metal film, and after exposure, it was developed. It was discovered that this could be achieved by creating slits in a rotary exposure mask on top of the insulating film that corresponded to the number of turns of each coil, using this mask for rotary exposure, and then chemically etching away the metal in the areas where the resist had been removed.

[0011] The final product, a long magnetic wire with a microcoil, was wound around a bobbin and packaged for easy handling.

[0012] To prevent electrical leakage to the external environment and to avoid mechanical, thermal, and chemical damage from the external environment, an external insulating coating is attached to each of the above microcoils while rotating. The thickness of the insulating coating is 100 μm or less, preferably 50 μm to 10 μm depending on the diameter of the magnetic wire.

[0013] Regarding electrical wiring between the microcoil and external equipment, electrical wiring can be performed without significantly changing the diameter of the microcoil by joining an external lead-in wire to the electrode terminal of the open pad portion of the coil in the outer insulating coating and then performing an insulating process. [Effects of the Invention]

[0014] By utilizing semiconductor processes, it is now possible to attach a microcoil with a diameter of 10 μm and a coil pitch of approximately 5 μm directly to a magnetic wire. This extremely small microcoil with a high magnetic conversion rate is an extremely useful invention for improving the functionality of magnetic sensors, microelectromagnets, microgenerators, and inductance components used in living organisms. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 1 is a conceptual perspective view showing a long magnetic wire with a microcoil. [Figure 2] 1 is a cross-sectional view of a coil portion of a long magnetic wire with a microcoil taken along line A1-A2. [Figure 3] 10 is a cross-sectional view of the coil wiring portion B1-B2 of the long magnetic wire with a microcoil. FIG. [Figure 4] 10 is a cross-sectional view of an external connection electrode terminal portion of a long magnetic wire with a microcoil taken along line C1-C2. FIG. [Figure 5] 1 is a conceptual diagram showing a long magnetic wire on which coil wiring, internal connection electrodes, and external connection electrodes are formed. [Figure 6] FIG. 1 is a manufacturing flow diagram of a long magnetic wire with a microcoil. DETAILED DESCRIPTION OF THE INVENTION

[0016] The long magnetic wire with a microcoil of the present invention comprises: A long magnetic wire with a microcoil includes a magnetic wire with an insulating coating (hereinafter referred to as magnetic wire), a coil at one end of the magnetic wire, the coil being composed of a coil body and coil electrodes at both ends thereof, an external connecting electrode at the other end, two coil wires extending to connect an internal connecting electrode connected to the coil electrode and the external connecting electrode, an internal insulating coating that coats the coil wires, and an external insulating coating that coats the coil, The magnetic wire has a diameter of 5 μm to 1 mm and a length of 10 cm to 2 m, and the magnetic wire has an effective permeability of 20 or more, and is coated on its outer periphery with an insulating material such as glass, resin, or oxide having a thickness of 2 μm or less, the coil wiring is provided with the external connecting electrode and the internal connecting electrode at both ends, and a coil wiring main body is formed on the surface of the insulating coating that covers the magnetic wire, extending long between the two electrodes, and has a width of 2 μm to 5 μm, a thickness of 0.2 μm to 3 μm, and a length of 10 cm to 2 m, and is made of a conductive material with excellent conductivity such as Cu, Al, or Au; the inner insulating coating is an insulating coating formed to electrically insulate the coil formed on the coil wiring from the coil wiring, and has a film thickness of 2 μm to 10 μm; The coil comprises the coil body formed on the outer periphery of the inner insulating coating and the coil electrodes at both ends of the coil body, the length of the coil body being 50 μm to 10 mm, the coil pitch being 2 μm to 10 μm, and made of a conductive material with excellent conductivity such as Cu, Al, Au, etc. the outer insulating coating is a coating for electrically insulating the coil and the coil wiring from the outside and for protecting them from damage caused by the external environment, and has a thickness of 100 μm or less; The external connection electrodes and the internal connection electrodes of the coil wiring have a size of 10 μm. 2 ~100μm 2 The thickness is 0.2 μm to 3 μm. the coil electrode and the internal connection electrode are connected through a hole in the internal insulating coating; the external connection electrode and the external connection electrode terminal are connected via a hole in the internal insulating coating or a hole in the internal insulating coating and the external connection electrode. It is characterized by:

[0017] A method for manufacturing a long magnetic wire with a microcoil includes the steps of: The first step is a step of forming a coil wiring portion, (1) A magnetic wire with an insulating coating (hereinafter referred to as magnetic wire A) is placed in a vapor deposition device. (2) While rotating the magnetic wire (a), a metal coating having excellent conductivity is uniformly vapor-deposited on the surface of the magnetic wire (a) in the longitudinal direction; (3) Subsequently, a uniform resist film is formed on the metal film; (4) Using a wire feeder attached to the exposure device and a mask having an exposure slit for the coil wiring, the magnetic wire a is fed while being exposed, Next, both ends of the coil wiring are exposed to light using a mask corresponding to the formation of the external connection electrodes and the internal connection electrodes. (5) After exposure, development is performed to form a pattern, and then the metal in the area where the resist has been removed is removed by chemical etching, thereby forming the coil wiring body, external connection electrodes, and internal connection electrodes directly on the surface of the magnetic wire a; (6) Next, an internal insulating coating resist is applied to electrically insulate the coil wiring over its entire length. (7) Place the wire again in the exposure device, expose the external connection electrodes and the internal connection electrodes with a mask, develop the mask, form holes, and then perform a curing process to harden the resist (this state is called magnetic wire b). The second step is a process of forming a coil portion (coil element forming portion), (8) Place the magnetic wire (b) on which the coil wiring portion has been formed in the deposition device again, and while rotating the magnetic wire (b), deposit a highly conductive metal coating uniformly on the surface of the magnetic wire (b) at the position of the coil portion, so that the metal coating fills the holes at the positions of the internal connecting electrodes and connects the metal coating to the internal connecting electrodes; (9) Subsequently, a uniform resist film is formed on the metal film; (10) Using a wire feed device that can rotate and feed at a constant speed installed in the exposure device and a mask with a slit for exposing the coil body, the magnetic wire b is rotated once while being exposed, and the feed amount at that time is the pitch amount of the coil body, and the exposure time is set to match the feed time, Next, a mask having slits for exposing the coil electrodes is used to expose the coil electrodes on both ends of the coil. (11) After exposure, development is performed, and after pattern formation, the metal in the area where the resist has been removed is removed by chemical etching, thereby forming a coil body and a coil electrode directly on the surface of the magnetic wire b; (12) Next, an outer insulating coating is applied to electrically insulate the coil and the coil wiring portion from the outside. The third step is a step of forming an external connection electrode terminal, (13) An external connection electrode terminal (pad) is attached through a hole opened at the position of the external connection electrode to facilitate connection with external wiring; It is characterized by three steps.

[0018] Hereinafter, a detailed description will be given with reference to FIGS. <Magnetic wire with insulating coating (magnetic wire)> The insulating coated magnetic wire 11 (21, 31, 41) has a magnetic wire 211 (311, 411) as a magnetic core, and the outer periphery of the magnetic wire is coated with an insulating material 212 (312, 412) such as glass, resin or oxide with a thickness of 2 mm or less. The diameter of the magnetic wire 11 (21, 31, 41) is 5 μm to 1 mm, and preferably 100 μm to 500 μm for use in micro-generators, micro-oscillators, and electromagnets. The length is 10 cm to 2 m. The effective magnetic permeability is 20 or more, preferably 25 to 100.

[0019] If a coating of insulating material with a thickness of 2 mm or less is insufficient, the surface of this insulating material 211 may be additionally coated with an insulating material such as resin, and a conductive coil may be formed on that surface. When the insulating material is insulating glass, the thickness is preferably 0.5 to 1.5 μm.

[0020] <Conductive coil (coil)> The conductive coil (coil) 12 (22) is composed of a coil body 121 (221) wound around an insulating coated magnetic wire 11 (21) and coil electrodes 122a and 122b arranged on both ends of the coil body.

[0021] The conductive coil 12 (22) is made of a conductive material with excellent conductivity, such as Cu, Al, or Au, with a coil pitch of 2 μm to 10 μm. The finer the coil pitch, the better, but it varies depending on the application, taking into account the coil resistance. For applications such as micro-generators, micro-oscillators, and electromagnets, a coil pitch of 3 μm to 6 μm is preferred. The wire width is approximately half the coil pitch, and the wire thickness is preferably approximately 1 / 10 the coil pitch.

[0022] The coil electrodes 122a and 122b are attached to both ends of the coil in a manner that connects them as coil terminals, and their size is approximately 5 to 10 times the coil wire width.

[0023] <Coil wiring> Coil wiring bodies 131a, 131b (531a, 531b) are provided with external connection electrodes 132a, 132b (532a, 532b) and internal connection electrodes 533a, 531b at both ends, and are made of a conductive material with excellent conductivity such as Cu, Al, or Au. The coil wiring bodies 131a, 131b (531a, 531b) have a width of 2 μm to 5 μm, a thickness of 0.2 μm to 3 μm, and a length of 10 cm to 2 m. The length is shorter than that of the magnetic wire, and is preferably 9.9 cm to 1.999 m. The external connection electrodes 132a, 132b (532a, 532b) and the internal connection electrodes 533a, 531b have a size of 10 μm. 2 ~100μm 2 Preferably 16 μm 2 ~50μm 2 The thickness is from 0.2 μm to 3 μm.

[0024] <Internal insulating coating> The inner insulating coating 24 (34, 44) is an insulating coating formed to electrically insulate the coil wiring from the coil, and has a thickness of 2 μm to 10 μm formed on the coil wiring.

[0025] <Outer insulating coating> The outer insulating coating 25 electrically insulates the conductive coil from the outside and also protects the conductive coil and the insulating coating itself from environmental damage, and has a thickness of 100 μm or less, preferably 50 μm to 10 μm. As shown in FIGS. 3 and 4, in addition to the inner insulating coating of the coil wiring where no coil is formed, a thick outer insulating coating (35, 45) is formed to protect the inner insulating coating. This allows the formation of an outer insulating coating over the entire length of the long magnetic wire, providing sufficient electrical insulation between the conductive coil and the coil wiring and protection from environmental damage, etc. It also simplifies the manufacturing process.

[0026] <Connection between coil electrodes and internal connection electrodes> The coil electrode and the internal connecting electrode are connected through holes formed in the internal insulating coating. When vapor deposition is performed on the internal insulating coating to form the coil, holes are pre-formed in the internal insulating coating and vapor deposition is performed inside the holes at the same time.

[0027] <Connection between external connection electrode terminal and external connection electrode> The external connection electrode terminal 46b for external wiring and the external connection electrode 422b for coil wiring are connected by metal vapor deposition or metal plating through a hole in the inner insulating coating 44 or a hole 47 in the inner insulating coating 44 and the outer insulating coating 45.

[0028] <Method of manufacturing a long magnetic wire with a microcoil> A method for producing a long magnetic wire with a microcoil will be described with reference to the flow chart of FIG. The manufacturing method includes step 1, a step of forming a coil wiring portion, step 2, a step of forming a coil portion, and step 3, a step of forming an external connection electrode.

[0029] First, step 1 of forming the coil wiring portion is as follows. (1) Process 601; A magnetic wire with an insulating coating (hereinafter referred to as magnetic wire a) is placed in a vapor deposition device. The length of the magnetic wire a is 10 cm to 2 m, taking into consideration the internal size of the deposition device, the coil pitch, the number of coil turns, and the length of the coil wiring portion. If the thickness of the insulating coating of the magnetic wire a is thin in consideration of the diameter of the magnetic wire a, the insulating coating may be thickened by coating an insulating resin or the like on the insulating coating in advance.

[0030] (2) Step 602; While the magnetic wire (a) is being rotated, a metal having excellent conductivity is uniformly vapor-deposited onto the surface of the wire to form a metal coating. The thickness of the metal coating is 0.5 μm to 2 μm.

[0031] (3) Step 603; Subsequently, a resist is uniformly applied onto the metal coating to form a resist coating. The application method includes spraying the magnetic wire evenly, or applying it to the magnetic wire a and rotating it to make it even.

[0032] (4) Step 604; The magnetic wire a is fed while being exposed using a wire feeder installed in the exposure tool and a mask with an exposure slit for the coil wiring. Subsequently, both ends of the coil wiring are exposed to light using a mask corresponding to the formation of the external connection electrodes and the internal connection electrodes.

[0033] (5) Process 605; After exposure, development is performed, and after pattern formation, the metal in the areas where the resist has been removed is removed by chemical etching, thereby forming the coil wiring body, external connecting electrodes, and internal connecting electrodes directly on the surface of magnetic wire a (Figure 5).

[0034] (6) Process 606; Next, an internal insulating coating resist is applied to electrically insulate the coil wiring over its entire length.

[0035] (7) Process 607; The wire is then placed in the exposure device again, and the positions of the external connection electrodes and internal connection electrodes are exposed to light using a mask and developed, holes are formed, and a curing process is performed to harden the resist (this state is referred to as magnetic wire b).

[0036] Next, the process of forming the coil portion in step 2 is as follows. (8) Process 608; The magnetic wire b with the coil wiring portion formed thereon is again placed in the deposition device, and while the magnetic wire b is rotated, a highly conductive metal coating is uniformly deposited on the surface of the magnetic wire b at the position of the coil portion, and the metal coating fills the hole at the position of the internal connecting electrode, connecting the metal coating to the internal connecting electrode.

[0037] (9) Process 609; A uniform resist coating is then formed over the metal coating.

[0038] (10) Process 610; Using a wire feed device that can rotate and feed at a constant speed installed in the exposure device and a mask with a slit for exposing the coil body, the magnetic wire b is rotated once while being exposed, and the feed amount at that time is the pitch amount of the coil body, and the exposure time is set to match the feed time, Subsequently, a mask having slits for exposing the coil electrodes is used to expose the coil electrodes on both ends of the coil.

[0039] (11) Step 611; After exposure, development is performed, and the resist is removed from areas other than the exposed areas.The metal from the areas where the resist has been removed is then removed by chemical etching, thereby forming the coil body and coil electrodes directly on the surface of the magnetic wire b.

[0040] (12) Step 612; Next, an external insulating coating is applied to electrically insulate the coil wiring and the coil from the outside. That is, the external insulating coating is applied over the entire length of the magnetic wire b, and a resist is applied to a thickness of 100 μm or less to protect the conductive coil and coil wiring from environmental damage as well as the external insulating coating itself.

[0041] Finally, step 3, the process of connecting the external connection electrodes, is as follows. (13) Step 613; External connection electrode terminals (pads) are attached to holes opened at the positions of the external connection electrodes to facilitate connection with external wiring. [Example]

[0042] Examples of the present invention will be described below. A long magnetic wire 1 with a microcoil according to the embodiment is shown in FIGS. The magnetic wire 211 is a long magnetic wire with a microcoil, and is made up of a magnetic wire 11 (21) as a magnetic core, a conductive coil 12 (22), coil wiring 13 (23), an inner insulating coating 24, an outer insulating coating 23, and external connection electrode terminals 46a, 46b. The magnetic wire 211 is coated with a glass insulating material 212 having a thickness of 1.0 μm. The magnetic wire 211 has a diameter of 500 μm, a length of 50 cm, and is covered with glass having a thickness of 1.5 μm. Applications include micro-generators, micro-oscillators and electromagnets.

[0043] Coil body 121 of conductive coil 12 is made of Au, a highly conductive material, with a coil pitch of 10 μm and 2000 turns.

[0044] The coil electrodes 122 are attached to the conductive coil 12 in such a way that they are connected to the coil ends on both sides, and their size is 25 μm. 2 Let's say.

[0045] The coil wirings 131a and 131b are 478 mm and 488 mm long, 4 μm wide, and 0.5 μm thick, respectively. The electrodes at both ends (external connecting electrodes 532a and 532b and internal connecting electrodes 533a and 533b) are 25 μm in size. 2 Let's say.

[0046] The inner insulating coating 24 was formed by applying an insulating resist having a thickness of 5 μm to insulate the coil wiring. The outer insulating coating 25 electrically insulates the conductive coil 12 (32) from the outside and also protects the conductive coil and the insulating coating itself from environmental damage, and is coated with an insulating resist having a thickness of 30 μm. In addition, in order to protect the coil wirings 131a, 131b and the inner insulating coating 24 from environmental damage, an insulating resist having a thickness of 30 μm was applied together with the above coating to form the outer insulating coating 25.

[0047] The coil electrodes 122a, 122b and the internal connecting electrodes 533a, 533b are connected via Au vapor deposition in holes formed in the internal insulating coating 24. The external connecting electrodes 432a, 432b and the external connecting electrode terminals 46a, 46b are connected via Au vapor deposition in holes 47 formed in the internal insulating coating 44 and the external insulating coating 45, respectively.

[0048] A method for manufacturing the long magnetic wire 1 with a microcoil of the above embodiment will be described with reference to FIG. 5 and FIGS. 1 to 4. FIG. First, the coil wiring portion is formed. A magnetic wire with a diameter of 500 μm, a length of 50 cm, and a coating of 1.0 μm-thick glass is coated with a 1.5 μm-thick insulating resist and dried, and then placed in a vapor deposition device (hereinafter referred to as magnetic wire a). While rotating the magnetic wire a, a metal with excellent conductivity is uniformly vapor-deposited onto the surface of the wire to form a metal coating with a thickness of 0.5 μm.

[0049] A resist is uniformly applied onto the metal coating by a spray method to form a resist coating. The magnetic wire a is fed while being exposed using a wire feeder installed in the exposure tool and a mask with an exposure slit for the coil wiring. Subsequently, both ends of the coil wiring are exposed to light using a mask corresponding to the formation of the external connection electrodes and the internal connection electrodes.

[0050] After exposure, development is performed, and after pattern formation, the metal in the areas where the resist has been removed is removed by chemical etching, thereby forming coil wiring bodies 531a, 531b, external connecting electrodes 532a, 532b, and internal connecting electrodes 533a, 533b directly on the surface of the magnetic wire a.

[0051] Next, an inner insulating coating resist 34 is applied to electrically insulate the coil wiring over its entire length.

[0052] The wire is then placed in the exposure device again, and the positions of the external connection electrodes 532a, 532b and the internal connection electrodes 533a, 533b are exposed to light using a mask and developed, holes are formed, and a curing process is performed to harden the resist (this state is referred to as magnetic wire b).

[0053] Next, the coil portion is formed. The magnetic wire b on which the coil wiring portion is formed is placed in a deposition device, and while the magnetic wire b is rotated, a highly conductive metal coating is uniformly deposited on the surface of the magnetic wire b at the position of the coil portion, and the metal coating fills the hole at the position of the internal connecting electrode, connecting the metal coating to the internal connecting electrode. A uniform resist coating is then formed over the metal coating.

[0054] Using a wire feed device that can rotate and feed at a constant speed installed in the exposure device and a mask with a slit for exposing the coil body, the magnetic wire b is rotated once while being exposed, and the feed amount at that time is the pitch amount of the coil body, and the exposure time is set to match the feed time, Subsequently, a mask having slits for exposing the coil electrodes is used to expose the coil electrodes on both ends of the coil.

[0055] After exposure and development, the pattern is formed, and the metal in the areas where the resist has been removed is removed by chemical etching, thereby forming the coil body 121 and the coil electrodes 122a, 122b directly on the surface of the magnetic wire b.

[0056] Next, an outer insulating coating 25 is applied over the entire length of the magnetic wire 11 to electrically insulate the coil 12 from the outside and to insulate and protect the coil wiring. At the same time, holes are opened at the positions of the external connection electrodes.

[0057] Finally, the external connection electrode is connected to an external connection electrode terminal. Further holes connecting to the holes formed at the positions of the external connection electrodes 432a and 432b are formed in the external insulating coating above the holes, and external connection electrode terminals (pads) 46a and 46b are attached through both holes 47 to facilitate connection to external wiring.

[0058] Holes 47 formed at the positions of the external connection electrodes are plated with Au to connect the external connection electrodes 432a, 432b to the external connection electrode terminals 46a, 46b. This makes it possible to easily connect to external wiring. [Industrial Applicability]

[0059] The long magnetic wire with a microcoil of the present invention is ultra-small and has high-performance electro-magnetic conversion capability, making it applicable in a wide range of fields such as micro-generators, micro-oscillators, and micro-electromagnets. [Explanation of symbols]

[0060] 1. Long magnetic wire with microcoil 11: Long magnetic wire with insulating coating 12; Conductive coil (coil) 121; Coil body 122a, 122b; Coil electrodes 131a, 131b: Coil wiring body 132a, 132b; External connection electrode 2: Long magnetic wire with microcoil (A1-A2 cross section) 21: Magnetic wire with insulating coating 211;Magnetic wire 212;Insulating coating (insulating glass) 22: Conductive coil (coil) 23: Coil wiring 24; Internal insulating coating 25;Outer insulating coating 3: Long magnetic wire with microcoil (B1-B2 cross section) 31: Magnetic wire with insulating coating 311;Magnetic wire 312;Insulating coating (insulating glass) 33: Coil wiring 34; Internal insulating coating 35: Outer insulating coating 4: Long magnetic wire with microcoil (B1-B2 cross section) 41: Magnetic wire with insulating coating 411;Magnetic wire 412;Insulating coating (insulating glass) 432a;External connection electrode 432b;External connection electrode 44; Internal insulating coating 45: Outer insulating coating 46a: External connection electrode terminal (pad) 46b: External connection electrode terminal (pad) 47 Hall 5. Coil wiring 51: Magnetic wire with insulating coating 531a; Coil wiring body 531b; Coil wiring body 532a;External connection electrode 532b;External connection electrode 533a; Internal connection electrode 533b; Internal connection electrode

Claims

1. A long magnetic wire with a microcoil includes a magnetic wire with an insulating coating (hereinafter referred to as magnetic wire), a coil at one end of the magnetic wire, the coil being composed of a coil body and coil electrodes at both ends thereof, an external connecting electrode at the other end, two coil wires extending to connect an internal connecting electrode connected to the coil electrode and the external connecting electrode, an internal insulating coating covering the coil wires, an external insulating coating covering the coil, and an external connecting electrode terminal, The magnetic wire has a diameter of 5 μm to 1 mm and a length of 10 cm to 2 m, and the magnetic wire has an effective permeability of 20 or more, and is coated on its outer periphery with an insulating material such as glass, resin, or oxide having a thickness of 2 μm or less, the coil wiring is provided with the external connecting electrode and the internal connecting electrode at both ends, and a coil wiring main body is formed on the surface of an insulating coating that covers the magnetic wire, extending long between the two electrodes, and has a width of 2 μm to 5 μm, a thickness of 0.2 μm to 3 μm, and a length of 10 cm to 2 m, and is made of a conductive material with excellent conductivity such as Cu, Al, or Au; the inner insulating coating is an insulating coating formed on the coil wiring to electrically insulate the coil, and has a film thickness of 2 μm to 10 μm; The coil comprises the coil body formed on the outer periphery of the inner insulating coating and the coil electrodes on both ends of the coil body, the length of the coil body being 50 μm to 10 mm, and the coil pitch being 2 μm to 10 μm, and the coil is made of a conductive material with excellent conductivity such as Cu, Al, or Au, the outer insulating coating is a coating for electrically insulating the coil wiring and the coil from the outside and for protecting the coil from damage caused by the external environment, and has a thickness of 100 μm or less; The external connection electrode and the internal connection electrode of the coil wiring have a size of 10 μm. ２ ~100μm ２ The thickness is 0.2 μm to 3 μm, The coil electrodes and the internal connection electrodes are connected to each other through holes in the internal insulating coating. Connected, the external connection electrode and the external connection electrode terminal are connected via a hole in the internal insulating coating or a hole in the internal insulating coating and the external connection electrode. A long magnetic wire with a microcoil.

2. A method for manufacturing a long magnetic wire with a microcoil includes the steps of: The first step comprises a step of forming a coil wiring portion, (1) A magnetic wire with an insulating coating (hereinafter referred to as magnetic wire a) is placed in a vapor deposition device. (2) While rotating the magnetic wire a, a metal coating having excellent conductivity is uniformly vapor-deposited on the surface of the magnetic wire a in the longitudinal direction; (3) Subsequently, a uniform resist film is formed on the metal film; (4) Using a wire feeder attached to the exposure device and a mask having an exposure slit for the coil wiring, the magnetic wire a is fed while being exposed; Next, both ends of the coil wiring are exposed to light using a mask corresponding to the formation of the external connection electrodes and the internal connection electrodes. (5) After exposure, development is performed, and after pattern formation, the metal in the area where the resist has been removed is removed by chemical etching, thereby forming the coil wiring body, the external connecting electrode, and the internal connecting electrode directly on the surface of the magnetic wire a; (6) Next, an inner insulating coating resist is applied to electrically insulate the coil wiring over its entire length. (7) The substrate is again placed in the exposure device, and the positions of the external connection electrodes and the internal connection electrodes are exposed to light using a mask and developed, holes are formed, and a curing process is performed to harden the resist (this state is referred to as magnetic wire b). The second step comprises forming a coil portion; (8) Place the magnetic wire (b) on which the coil wiring portion has been formed in the deposition device again, and while rotating the magnetic wire (b), deposit a highly conductive metal coating uniformly on the surface of the magnetic wire (b) at the position of the coil portion, so that the metal coating fills the holes at the positions of the internal connecting electrodes and connects the metal coating to the internal connecting electrodes. (9) Subsequently, a uniform resist film is formed on the metal film; (10) Using a wire feed device that can rotate and feed at a constant speed installed in the exposure device and a mask having a slit for exposing the coil body, the magnetic wire b is rotated once while being exposed, and the feed amount at this time is the pitch amount of the coil body, and the exposure time is set to match the feed time, Next, a mask having slits for exposing the coil electrodes is used to expose the coil electrodes on both ends of the coil. (11) After exposure, development is performed, and after pattern formation, the metal in the area where the resist has been removed is removed by chemical etching, thereby forming a coil body and a coil electrode directly on the surface of the magnetic wire b; (12) Next, an outer insulating coating is applied to electrically insulate the coil portion and the coil wiring portion from the outside. The third step is a step of forming an external connection electrode terminal, (13) External connection electrode terminals (pads) are attached through holes formed at the positions of the external connection electrodes to facilitate connection with external wiring. A method for manufacturing a long magnetic wire with a microcoil, comprising three steps.

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