Code generation support device and code generation support program

The code generation support device and program simplify measurement setup by importing shape data, setting geometric elements, and generating text code, addressing the challenge of automating measurement across multiple devices.

JP2025128927APending Publication Date: 2025-09-03KEYENCE CORP
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Patent Information

Application Number
JP2024025945
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-02-22
Publication Date
2025-09-03

AI Technical Summary

Technical Problem

Existing measuring devices face difficulties in automating measurement setups when multiple types of devices are combined, as users must create their own programs for each device, making it challenging to process shape data appropriately for three-dimensional shapes.

Method used

A code generation support device and program that import shape data, set geometric elements and measurement items, calculate values, and generate text code for processing, with display areas for visualization and result representation, facilitating easy and appropriate measurement setup across different devices.

Benefits of technology

Enables easy and appropriate measurement setting work for shape data, allowing desired measurements to be performed efficiently across multiple devices.

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Abstract

To provide a code generation support device and a code generation support program that enable easy and appropriate measurement setting work on shape data obtained from a measurement head for performing desired measurement on an object to be measured.SOLUTION: A measurement screen MS including a height image of a workpiece is displayed. On the measurement screen MS, a geometric element and a measurement item are set. A value of the measurement item in the workpiece is calculated on the basis of a setting. A text code for calculating the value of the measurement item is generated. The measurement screen MS includes a first display region AR1 and a second display region AR2. Indexes m1 and m2, indicating the height image and the geometric element, and an index r1, indicating a measurement result, are displayed in the first display region AR1. A tool list indicating the geometric element and the measurement item is displayed in the second display region AR2. A plurality of thumbnail images SI for selecting shape data used in measurement are displayed on the measurement screen MS.SELECTED DRAWING: Figure 29
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Description

[Technical Field]

[0001] The present invention relates to a code generation support device and a code generation support program that support the generation of code for measuring and processing shape data obtained from a measuring head that measures the shape of a measurement object. [Background technology]

[0002] Optical measuring devices are used to measure the shape of a measurement object (hereinafter referred to as a workpiece). For example, Patent Document 1 describes an optical displacement measurement system as an example of a measuring device capable of measuring the shape of a workpiece. In this optical displacement measurement system, a measuring head emits a strip of light extending in one direction. When the workpiece passes through an area illuminated by the light, multiple profile data are acquired based on the light reflected from the workpiece to the measuring head. The multiple profile data (cross-sectional shape data) are arranged in a direction corresponding to the direction of movement of the workpiece, thereby generating three-dimensional data (shape data) that indicates the three-dimensional shape of the workpiece. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-138028 Summary of the Invention [Problem to be solved by the invention]

[0004] The above-described measuring device can sequentially measure the three-dimensional shapes of multiple workpieces moving at a constant speed, for example, on a belt conveyor. Furthermore, based on the results of the three-dimensional shape measurements, it can inspect the shape of the workpieces for abnormalities.

[0005] When measuring and inspecting workpieces using a measuring device, appropriate processing of shape data enables the desired measurements to be performed automatically. To appropriately process shape data, it is preferable to use dedicated application software compatible with the measuring device. However, when using a combination of multiple different types of measuring devices and image processing devices, it may not be possible to use dedicated application software. Therefore, users must create their own programs for each device involved in the combination. However, it is not easy for users to create appropriate processing programs for each measurement content for shape data representing three-dimensional shapes. Therefore, even if users attempt to automate desired measurements using a measuring device, the setup process is highly difficult.

[0006] An object of the present invention is to provide a code generation support device and a code generation support program that enable easy and appropriate measurement setting work for shape data obtained from a measuring head for performing desired measurements on a measurement object. [Means for solving the problem]

[0007] A code generation assistance device according to one aspect of the present invention includes an import unit that imports shape data representing a three-dimensional shape of a measurement object; a first setting unit that sets one or more geometric elements and one or more measurement items related to the one or more geometric elements for the measurement object; an execution unit that identifies the one or more geometric elements set by the first setting unit for one piece of shape data imported by the import unit and executes a process of calculating values ​​of the one or more measurement items for the measurement object based on the identified one or more geometric elements; a code generation unit that generates text code representing the process of identifying the one or more geometric elements and the process of calculating values ​​of the one or more measurement items for the measurement object; and a first display area, a second display area, a first display image, and a second display area. and a screen generating unit that generates a measurement screen including the first and second display images and displays the result on the display unit, wherein the first display area is an area where a height image of the object to be measured based on the one shape data is displayed and one or more element indices indicating the one or more geometric elements set by the first setting unit are superimposed on corresponding portions of the height image, the second display area is an area where the one or more measurement items are displayed in a list, the first display image is an image for selecting the one shape data to be processed by the execution unit from the multiple shape data when multiple shape data are imported by the importing unit, and the second display image is an image that represents at least a portion of the one or more measurement results obtained by executing the processing of the execution unit.

[0008] A code generation assistance program according to another aspect of the present invention is a code generation assistance program executable by a processing device, the code generation assistance program including: a process of importing shape data representing a three-dimensional shape of a measurement object; a process of setting one or more geometric elements and one or more measurement items related to the one or more geometric elements for the measurement object; a process of specifying the one or more geometric elements set by the setting process for one piece of shape data imported by the importing process and calculating values ​​of the one or more measurement items for the measurement object based on the specified one or more geometric elements; a process of generating text code representing the process of specifying the one or more geometric elements and the process of calculating the values ​​of the one or more measurement items for the measurement object; and a display area including a first display region, a second display region, a first display region, a second display region, a third display region, a fourth display region, a fifth display region, a fifth display region, a sixth ... and generating a measurement screen including a display image and a second display image, and displaying the measurement screen on a display unit, wherein the first display area is an area where a height image of the object to be measured based on the one shape data is displayed, and one or more element indices indicating the one or more geometric elements set by the setting process are superimposed on corresponding portions of the height image, the second display area is an area where the one or more measurement items are displayed in a list, the first display image is an image for selecting the one shape data to be the subject of the calculation process from the multiple shape data when multiple shape data are imported by the importing process, and the second display image is an image representing at least a portion of the one or more measurement results obtained by executing the calculation process. [Effects of the Invention]

[0009] According to the present invention, it is possible to easily and appropriately perform measurement setting work for shape data obtained from a measuring head for performing a desired measurement on a measurement object. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 2 is a diagram for explaining an outline of the configuration of a main measurement system and a sub-measurement system. [Figure 2] FIG. 10 is a diagram for explaining the relationship between text code and a library. [Figure 3] FIG. 2 is a block diagram showing the configuration of a control system of a main measurement device of the main measurement system. [Figure 4] FIG. 2 is a block diagram showing the configuration of a control system of the sub-measuring device. [Figure 5] 10 is a flowchart showing the general flow of a code generation support process. [Figure 6] FIG. 10 is a diagram for explaining the flow of operations required of a user when executing the code generation assistance process. [Figure 7] FIG. 1 is a perspective view of the appearance of a workpiece illustrated in an example of generating a text code. [Figure 8] FIG. 10 is a diagram showing an initial state of a measurement screen displayed on the display device. [Figure 9] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device in a first phase. [Figure 10] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device in a first phase. [Figure 11] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device in a first phase. [Figure 12] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device in a first phase. [Figure 13] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device in a first phase. [Figure 14] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device in a first phase. [Figure 15] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device in a first phase. [Figure 16] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device in a first phase. [Figure 17] 10 is a flowchart illustrating an example of a shape data import process. [Figure 18] 10 is a flowchart illustrating an example of a shape data import process. [Figure 19]10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the second phase. [Figure 20] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the second phase. [Figure 21] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the second phase. [Figure 22] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the second phase. [Figure 23] 10 is a flowchart illustrating an example of a correction setting process. [Figure 24] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 25] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 26] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 27] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 28] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 29] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 30] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 31] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 32] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 33] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 34] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 35] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 36] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 37] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 38] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the third phase. [Figure 39] 10 is a flowchart illustrating an example of a measurement condition setting process. [Figure 40] 10 is a flowchart illustrating an example of a measurement condition setting process. [Figure 41] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the fourth phase. [Figure 42] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the fourth phase. [Figure 43] 10A and 10B are diagrams showing an example of transition of the measurement screen displayed on the display device in the fourth phase. [Figure 44] 10 is a flowchart illustrating an example of a text code generation process. [Figure 45] 4 is a diagram showing an example of a text code generated by the code generating unit of FIG. 3. FIG. [Figure 46] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device by a function of synthesizing a plurality of shape data. [Figure 47] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device by a function of synthesizing a plurality of shape data. [Figure 48] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device by a function of synthesizing a plurality of shape data. [Figure 49] 10A to 10C are diagrams showing an example of transition of a measurement screen displayed on a display device by a function of synthesizing a plurality of shape data. [Figure 50] 10 is a flowchart illustrating an example of a synthesis condition setting process. DETAILED DESCRIPTION OF THE INVENTION

[0011] A code generation support device and a code generation support program according to an embodiment of the present invention will be described below with reference to the drawings. The code generation support device is incorporated into one measurement system that performs a predetermined measurement of the shape of an object to be measured (hereinafter referred to as a workpiece). The code generation support device is also used to support the setting work of a measurement device provided in another measurement system so that the above-mentioned one measurement is performed in the other measurement system. In the following description, the one measurement system including the configuration of the code generation support device will be referred to as the main measurement system, and the other measurement system including the object (measurement device) for which the setting work is supported will be referred to as the sub-measurement system.

[0012] 1. Overview of the hardware configuration of the main measurement system and the secondary measurement system Fig. 1 is a diagram for explaining the outline of the configuration of the main measurement system and the sub-measurement system. As shown in Fig. 1, the main measurement system 1 of this example is capable of measuring and inspecting the shapes of each of a plurality of workpieces W transported, for example, by a belt conveyor, and includes a measuring head 11, a display device 13, an operation device 14, and a main measurement device 20.

[0013] In this example, the measuring head 11 is fixed at a position facing the transport path of the workpiece W. The measuring head 11 also has a light-projecting unit (not shown). The light-projecting unit of the measuring head 11 irradiates a strip-shaped measurement light extending in one direction toward the workpiece W moving along the transport path. The measuring head 11 also has a light-receiving unit (not shown). The light-receiving unit of the measuring head 11 receives the measurement light reflected by the workpiece W and outputs a distribution of the amount of received light. The light-receiving unit of the measuring head 11 is connected to the main measuring device 20. In the main measuring device 20, shape data indicating the three-dimensional shape of the workpiece W is generated based on the distribution of the amount of received light output from the measuring head 11.

[0014] Here, the shape data according to this embodiment is composed of planar position information according to a predetermined planar coordinate system for the measuring head 11 and height information corresponding to each planar position in the planar coordinate system. More specifically, the shape data may be composed of XY coordinates of a sequence of points arranged in a grid pattern and a Z coordinate corresponding to each sequence of points as planar position information according to the grid pattern. Since each sequence of points in the shape data is arranged in a grid pattern, they are arranged at equal intervals in the X direction and also at equal intervals in the Y direction. In this case, the pitch in the X direction and the pitch in the Y direction may be the same or different. In addition to the planar position information and height information, the shape data may also include brightness information corresponding to each planar position.

[0015] The main measurement device 20 is an example of a code generation support device according to one embodiment of the present invention. The main measurement device 20 is configured, for example, as a personal computer and includes an acquisition unit 21, a storage device 22, and a control unit 23. The acquisition unit 21 includes a communications interface and memory, and is configured to receive the light intensity distribution output from the measurement head 11, generate profile data from the received light intensity distribution, and temporarily store the profile data. The storage device 22 is configured as a recording medium such as a non-volatile memory or a hard disk, and stores a code generation support program. The code generation support program is a program for generating and outputting setting support information to support various setting operations of the sub-measurement devices 20A, 20B, etc., described below.

[0016] Control unit 23 includes CPU 23a, ROM (Read Only Memory) 23b, and RAM (Random Access Memory) 23c. In control unit 23, RAM 23c is used as a work area for CPU 23a. ROM 23b stores a system program. CPU 23a executes a code generation support program stored in storage device 22, thereby realizing various functional units for generating setting support information. The configuration of the control system of main measuring device 20, including these functional units, will be described later.

[0017] The code generation support program may be stored in the ROM 23b of the control unit 23 instead of the storage device 22. The code generation support program may be provided in a state stored in a recording medium 29 such as a CD-ROM or a USB memory, and may be installed in the storage device 22 or the ROM 23b.

[0018] The display device 13 is configured with an LCD (liquid crystal display) panel or an organic EL (electroluminescence) panel, and is connected to the main measuring device 20. The operating device 14 includes a keyboard and a pointing device, and is configured to be operable by the user, and is connected to the main measuring device 20.

[0019] 1 shows a plurality of sub-measurement systems 1A, 1B, ... having a common configuration. The configuration of the sub-measurement system 1A will be described as a representative of the plurality of sub-measurement systems 1A, 1B, ....

[0020] The sub-measurement system 1A includes a measurement head 11 and a sub-measurement device 20 A. The measurement head 11 of the sub-measurement system 1A has the same configuration as the measurement head 11 of the main measurement system 1.

[0021] The sub-measuring device 20A is, for example, a personal computer, and has basically the same configuration as the main measuring device 20, but the code generation support program described above is not stored in the memory device of the sub-measuring device 20A. The configuration of the control system of the sub-measuring device 20A will be described later.

[0022] As described above, in the main measuring device 20, the code generation support program is executed, whereby setting support information is generated and output based on the user's operation. In the sub-measuring device 20A, various settings related to the measurement of the workpiece W are made using the setting support information output from the main measuring device 20 of the main measuring system 1. After setting using the setting support information, the sub-measuring device 20A performs a predetermined measurement (or inspection) of the shape of the workpiece W based on the shape data obtained from the measuring head 11.

[0023] The sub-measuring device 20A is connected to an external device 2A. The external device 2A is, for example, a PLC (programmable logic controller). The measurement results (or test results) from the sub-measuring device 20A are provided to the external device 2A. Similar to the sub-measuring device 20A, the external device 2B is also connected to the sub-measuring device 20B.

[0024] The setting support information generated by the main measuring device 20 includes text code (source code), a library, and reference shape data. The text code is data generated by the main measuring device 20 based on user operations. The library is data prepared in advance by, for example, the manufacturer of the main measuring device 20. The reference shape data is shape data of the workpiece W that is mainly used when generating the text code in the main measuring device 20.

[0025] Here, an overview of the relationship between the text code and the library will be explained. FIG. 2 is a diagram for explaining the relationship between the text code and the library. The library includes a plurality of processing programs capable of appropriately performing a plurality of predetermined processes on the shape data of the workpiece W. The library may be provided, for example, in the form of a DLL (Dynamic Link Library) file. In this example, the plurality of processing programs in the library include processing programs classified into three groups (first group GR1, second group GR2, and third group GR3). Note that text code can be easily modified by the user, making it easy to combine and use a plurality of different types of measuring devices and image processing devices, for example, to perform an inspection.

[0026] The processing programs classified into the first group GR1 are used to identify each of multiple types of geometric shapes from the shape data of the workpiece W, and exist for each type of geometric shape (geometric element). Geometric elements include points, lines, planes, circles, etc. In the example of Figure 2, a "point identification processing program," a "line identification processing program," and a "plane identification processing program" are shown.

[0027] The processing programs classified into the second group GR2 are used to perform multiple types of measurements on the shape of the workpiece W from the shape data of the workpiece W, and exist for each type of measurement (measurement item). Measurement items include height, flatness, area, distance, angle, etc. In the example of FIG. 2, a "height calculation processing program," a "flatness calculation processing program," and an "area calculation processing program" are shown.

[0028] The multiple processing programs classified in the third group GR3 are used to correct the position of the shape data of the workpiece W using multiple methods, and one program exists for each position correction method. The position correction methods include a correction method based on pattern matching. In the example of Figure 2, a "pattern matching processing program" is shown. Here, the position correction includes correction of the position in a planar coordinate system. Furthermore, the position correction may include correction of the rotational orientation in the planar coordinate system in addition to correction of the position in the planar coordinate system. Furthermore, the position correction may include correction of the position in a height coordinate system corresponding to the height information in addition to correction of the position in the planar coordinate system. Furthermore, the position correction may include correction of the orientation (three-dimensional orientation) in a three-dimensional coordinate system including the planar coordinate system and the height coordinate system. Note that there may only be one processing program classified in the third group GR3.

[0029] The text code includes character information (processing program information, described later) that indicates a processing program to be called from a library in order to identify one or more geometric elements or perform one or more measurements from the shape data. This character information can be said to be information that indicates a "function" required for processing to identify one or more geometric elements or perform one or more measurements.

[0030] The text code also includes character information (designation information, described later) indicating parameters required to specify one or more geometric elements or to perform one or more measurements. This character information can be said to be information indicating "arguments" associated with the above-mentioned "function" for specifying one or more geometric elements or performing one or more measurements.

[0031] In the example of FIG. 2, the character information i11, i12, i13, and i14 included in the text code are "identification of plane," "information required to identify plane," "calculation of height," and "information required to calculate height."

[0032] According to this text code, by reading the character information i11 "Identifying a plane," it is possible to select and call a "plane identification processing program" from multiple processing programs in the library. Furthermore, based on the called "plane identification processing program" and character information i12 including the content of "information required for plane identification," it is possible to identify a desired plane portion of the workpiece W.

[0033] Furthermore, according to the above text code, by reading the character information i13 "calculation of height," it is possible to select and call a "height calculation processing program" from multiple processing programs in the library. Also, based on the called "height calculation processing program" and character information i14 including the contents of "information required for calculating height," it is possible to measure the height of a desired part of the workpiece W from the shape data of the workpiece W.

[0034] 2. Control system of the main measuring device 20 3 is a block diagram showing the configuration of the control system of the main measurement device 20 of the main measurement system 1. As shown in FIG. 3, the control unit 23 of the main measurement system 1 includes, as functional units, a reception unit 31, a screen generation unit 32, a reference data storage unit 33, a measurement setting generation unit 34, an index assignment unit 35, an execution unit 36, a library storage unit 37, a code generation unit 38, an output unit 39, and a data preprocessing unit 40. As described above, the functional units of the control unit 23 are realized by the CPU 23a (FIG. 1) of the control unit 23 executing the code generation support program stored in the storage device 22. Note that some or all of the functional units of the control unit 23 may be realized by hardware such as electronic circuits.

[0035] As described above, the main measurement system 1 measures the shapes of multiple workpieces W transported by, for example, a belt conveyor. Here, an encoder is provided on a transport device for the workpieces W, such as a belt conveyor. The main measurement device 20 can determine the travel distance of each workpiece W transported by the transport device in the transport direction based on the output from the encoder of the transport device. The data preprocessing unit 40 imports profile data generated and temporarily stored in the acquisition unit 21 at a predetermined interval. Specifically, the data preprocessing unit 40 imports the profile data generated in the acquisition unit 21 based on the output from the encoder of the transport device every time each workpiece W travels a predetermined distance (the set interval). The data preprocessing unit 40 also generates shape data from the imported profile data and processes the shape data as needed (e.g., filtering). The data preprocessing unit 40 does not necessarily have to process the generated shape data. When a synthesis condition for synthesizing multiple shape data is set, the data preprocessing unit 40 synthesizes the multiple shape data in accordance with the set synthesis condition. The synthesis of multiple shape data will be described later.

[0036] The screen generator 32 generates a measurement screen including an image of the workpiece W based on the shape data processed as necessary by the data preprocessing unit 40, and displays the measurement screen on the display device 13. Note that when the screen generator 32 generates an image or measurement screen, it means that the screen generator 32 generates image data so that the image or measurement screen is displayed on the display device 13. The image of the workpiece W generated by the screen generator 32 includes a two-dimensional height image and a three-dimensional height image. A three-dimensional height image is an image in which multiple images showing the heights of each part of the workpiece W as viewed from multiple directions are displayed in a switching manner. A two-dimensional height image is an image that shows the height of each part of the workpiece W as viewed from one direction. In the following description, when there is no need to distinguish between two-dimensional height images and three-dimensional height images, these images will be collectively referred to as height images.

[0037] The reception unit 31 receives input of various information, various specifications, various selections, etc., based on the user's operation of the operation device 14. For example, the reception unit 31 receives, as specification information, the specification of one or more geometric elements and the specification of one or more measurement items on the measurement screen displayed on the display device 13, based on the user's operation of the operation device 14. In response to the reception of the specification information by the reception unit 31, the index assignment unit 35 displays an index indicating the received specification information on the measurement screen displayed on the display device 13. The reception unit 31 also receives a command to output setting assistance information based on the user's operation of the operation device 14.

[0038] The reference data storage unit 33 stores the reference shape data. When the reference shape data is stored in the reference data storage unit 33, the receiving unit 31 can receive, as correction information, a specification of a correction method for correcting the position of the shape data based on the reference shape data. This causes the correction information for the shape data to be set in the main measuring device 20. In this case, the data preprocessing unit 40 corrects the shape data acquired from the acquiring unit 21 based on the correction information.

[0039] The measurement setting generation unit 34 generates measurement setting data for calculating values ​​of one or more measurement items for the workpiece W based on the designation information received by the reception unit 31. The execution unit 36 ​​calculates values ​​of one or more measurement items for the workpiece W based on the shape data obtained through the data pre-processing unit 40 and the measurement setting data generated by the measurement setting generation unit 34.

[0040] The library holding unit 37 holds a library including the above-mentioned processing programs. The number of libraries held by the library holding unit 37 may be one or more.

[0041] The code generation unit 38 generates text code including multiple pieces of processing program information and one or more pieces of designation information accepted by the acceptance unit 31. The processing program information is information for selecting and calling some processing programs from the library.

[0042] In response to the reception of a command to output setting support information by the reception unit 31, the output unit 39 associates the library and the reference shape data with the text code generated by the code generation unit 38. Furthermore, the output unit 39 outputs the associated text code, library, and reference shape data as setting support information to a predetermined output destination (for example, within the storage device 22). This allows the user to retrieve desired setting support information from the storage device 22 of the main measuring device 20 when setting up the sub-measuring devices 20A and 20B.

[0043] 3. Control system of the secondary measuring devices 20A and 20B Fig. 4 is a block diagram showing the configuration of the control system of the sub-measuring devices 20A and 20B. As shown in Fig. 4, the control unit 23 of the sub-measuring devices 20A and 20B in this example includes, as functional units for measuring the shape of the workpiece W, a screen generation unit 32, an execution unit 36, a library holding unit 37, a data pre-processing unit 40, a reading unit 41, and an analysis unit 42. These functional units are realized, for example, by the CPU of the control unit 23 of the sub-measuring devices 20A and 20B executing a program for measuring the shape of the workpiece W that is stored in advance in the storage device 22. Note that some or all of the functional units of the control unit 23 may be realized by hardware such as electronic circuits.

[0044] When setting the sub-measuring devices 20A, 20B for measuring the shape of the workpiece W, setting support information retrieved from the storage device 22 of the main measuring device 20 is input to the sub-measuring devices 20A, 20B. The input setting support information is stored in the storage device 22. The reading unit 41 reads the setting support information stored in the storage device 22. The library holding unit 37 holds a library of the setting support information read into the reading unit 41.

[0045] The acquisition units 21 of the sub-measuring devices 20A and 20B have the same configuration and functions as the acquisition unit 21 of the main measuring device 20. Furthermore, the data pre-processing units 40 of the sub-measuring devices 20A and 20B, like the data pre-processing unit 40 of the main measuring device 20, import, at a preset pitch, profile data that is generated in the acquisition unit 21 and temporarily stored. Furthermore, the data pre-processing unit 40 generates shape data from the imported multiple profile data, and performs processing (filtering, etc.) on the generated shape data as necessary.

[0046] Furthermore, the data preprocessing unit 40 performs position correction or synthesis of the shape data taken in from the acquisition unit 21 based on the text code and reference shape data read by the reading unit 41 .

[0047] The execution unit 36 ​​calculates values ​​of one or more measurement items for the workpiece W based on the shape data obtained through the data pre-processing unit 40, the text code read by the reading unit 41, and the library stored in the library storage unit 37.

[0048] The analysis unit 42 performs various analyses based on the calculation results (measurement results) obtained by the execution unit 36. The screen generation unit 32 displays an image of the workpiece W on the display device 13 based on the shape data obtained through the data pre-processing unit 40. The screen generation unit 32 also displays the calculation results obtained by the execution unit 36 ​​and the analysis results obtained by the analysis unit 42 on the display device 13.

[0049] 4. Code generation support process and user operation procedure of main measuring device 20 In the main measuring device 20, the code generation support program is executed to perform the code generation support process described below. Figure 5 is a flowchart showing the main flow of the code generation support process. The code generation support process is started based on a command entered by the user.

[0050] As shown in Fig. 5, when the code generation support process is started, the control unit 23 in Fig. 1 performs a shape data import process (step S1). The shape data import process is a process for importing profile data of the workpiece W, setting import conditions, and generating shape data. The shape data import process will be described in detail later.

[0051] Next, the control unit 23 in Fig. 1 determines whether or not to perform position correction of the shape data generated in step S1 (step S2). This determination is made based on whether or not a command to perform position correction of the shape data has been issued by a user's operation. Specifically, this determination is made based on whether or not the user has operated the operation device 14 to operate a second phase button fb2 (Fig. 8) described later.

[0052] If it is determined in step S2 that the position of the shape data is not to be corrected, the process proceeds to step S4, which will be described later. On the other hand, if it is determined in step S2 that the position of the shape data is to be corrected, the control unit 23 in FIG. 1 performs a correction setting process (step S3). The correction setting process is a process for setting correction information for the shape data. The correction setting process will be described in detail later.

[0053] Next, the control unit 23 in Fig. 1 determines whether or not to set measurement conditions (step S4). This determination is made based on whether or not a command to set measurement conditions has been issued by the user. Specifically, this determination is made based on whether or not the user has operated the operation device 14 to operate the third phase button fb3 (Fig. 8), which will be described later.

[0054] If it is determined in step S4 that measurement conditions are not to be set, the process proceeds to step S6, which will be described later. On the other hand, if it is determined in step S4 that measurement conditions are to be set, the control unit 23 in FIG. 1 performs a measurement condition setting process (step S5). The measurement condition setting process is a process for setting measurement conditions for the workpiece W using designation information based on various user specifications. The measurement condition setting process will be described in detail later. Here, if multiple pieces of correction information are set in the correction setting process, for each measurement condition in the measurement condition setting process, it may be possible to select correction information to be applied in association with the measurement condition from the multiple pieces of correction information that have already been set.

[0055] 1 determines whether or not to perform position correction of the shape data acquired in step S1, similarly to step S2 (step S6). If it is determined in step S6 that the position correction of the shape data is to be performed, the process proceeds to step S3.

[0056] On the other hand, if the position of the shape data is not corrected in step S6, the control unit 23 in Fig. 1 determines whether to generate a text code (step S7). This determination is made based on whether or not a command to generate a text code has been issued by the user. Specifically, this determination is made based on whether or not the user has operated the operation device 14 to operate the fourth phase button fb4 (Fig. 8), which will be described later.

[0057] If it is determined in step S7 that a text code is not to be generated, the process proceeds to step S2 described above. On the other hand, if it is determined in step S7 that a text code is to be generated, the control unit 23 in FIG. 1 performs a text code generation process (step S8). The text code generation process is a process of generating a text code for setting support information based on the correction information set in the correction setting process and the measurement conditions set in the measurement condition setting process. The text code generation process in this example also includes a process of outputting the library and reference shape data together with the text code, i.e., a process of outputting the setting support information. The details of the text code generation process will be described later. The code generation support process ends when the text code generation process ends.

[0058] When executing the code generation support process, the user of the main measuring device 20 must perform operations corresponding to the shape data import process, correction setting process, measurement condition setting process, and text code generation process.

[0059] Fig. 6 is a diagram for explaining the flow of operations required of the user when executing the code generation support process. As shown in Fig. 6, the user performs operations corresponding to the shape data import process of Fig. 5, such as specifying the source of importing shape data and specifying the import conditions for the profile data of the workpiece W (step S11). The stage in which the user operates the main measuring device 20 at this time is called the first phase.

[0060] Next, the user specifies a correction method for the shape data to be imported (step S12), as an operation corresponding to the correction setting process of Fig. 5. This stage of operation of main measuring device 20 by the user is called the second phase.

[0061] Next, the user specifies geometric elements and measurement items according to the desired measurement content (step S13), as an operation corresponding to the measurement condition setting process of Fig. 5. This operation stage of main measuring device 20 by the user is called the third phase.

[0062] Finally, the user issues commands to generate a text code and output setting support information (step S14), which correspond to the text code generation process in Fig. 5. This stage of operation of main measuring device 20 by the user is called the fourth phase.

[0063] Basically, the user can generate a text code by operating the main measuring device 20 in the order of the first, second, third, and fourth phases. The order of the second and third phases may be reversed or repeated. The second and third phases may be the same phase. In this case, the process corresponding to the second phase and the process corresponding to the third phase may be selectively executed depending on the selection of a tool described below.

[0064] The user inputs the setting support information obtained by the above series of operations into, for example, the sub-measuring devices 20A and 20B of the sub-measuring systems 1A and 1B, respectively. Alternatively, if the measurement of the workpiece W by the sub-measuring systems 1A and 1B is incorporated into the operation of another system such as a production line, the setting support information is incorporated into the operation program of the other system. This allows the user to easily perform the setting work for performing the desired measurement with each sub-measuring device 20A and 20B.

[0065] 5. Example of generating text code Below, an example of the operation procedure of the main measuring device 20 by the user to generate a text code will be described along with the transition of the measurement screen displayed on the display device 13. First, the shape of the workpiece W to be measured in the example of generating a text code described below will be described.

[0066] <1> Workpiece W to be measured 7 is a perspective view of the appearance of a workpiece W illustrated in an example of generating a text code. As shown in FIG. 7, the workpiece W in this example is a rectangular plate-like member extending in one direction, and includes a first portion 90a, a second portion 90b, and a third portion 90c aligned in that direction.

[0067] The workpiece W also has a bottom surface portion 91. The bottom surface portion 91 is formed flat across the entire first portion 90a, the second portion 90b, and the third portion 90c. The workpiece W also has a first top surface portion 92, a second top surface portion 93, and a third top surface portion 94 that face in the opposite direction from the bottom surface portion 91.

[0068] The first upper surface portion 92, the second upper surface portion 93, and the third upper surface portion 94 are upper surface portions of the first portion 90a, the second portion 90b, and the third portion 90c, respectively. The first portion 90a and the third portion 90c have the same thickness, and the second portion 90b has a smaller thickness than the first portion 90a and the third portion 90c. As a result, steps are formed between the first upper surface portion 92 and the second upper surface portion 93, and between the second upper surface portion 93 and the third upper surface portion 94.

[0069] In the first portion 90a, a groove 95 extending in a direction inclined relative to one direction is formed in the central portion of the first upper surface portion 92. In the third portion 90c, a groove 96 extending in one direction is formed in the central portion of the third upper surface portion 94. The height of the bottom of each groove 95, 96 is equal to the height of the second upper surface portion 93 and is flush with it.

[0070] <2> Initial state of the measurement screen 8 is a diagram showing the initial state of the measurement screen displayed on display device 13. When a text code is generated in main measuring device 20, measurement screen MS including phase display area ARF, first display area AR1, second display area AR2, third display area AR3, and fourth display area AR4 is displayed on display device 13.

[0071] As shown in Fig. 8, the phase display area ARF is a strip-shaped area extending horizontally at a fixed width at the top edge of the measurement screen MS. The first display area AR1 is a rectangular area extending over a relatively wide range from the left edge of the measurement screen MS to the center of the measurement screen MS. The second display area AR2 is a rectangular area located between the first display area AR1 and the right edge of the measurement screen MS.

[0072] The third display area AR3 is a strip-shaped area located between the first display area AR1 and the bottom edge of the measurement screen MS. The fourth display area AR4 is a relatively small rectangular area located in the bottom right corner of the measurement screen MS and adjacent to the first display area AR1, the second display area AR2, and the third display area AR3.

[0073] In the initial state, the phase display area ARF has a first phase button fb1, a second phase button fb2, a third phase button fb3, and a fourth phase button fb4 arranged in this order from left to right. Also, an arrow pointing from right to left is displayed between each pair of adjacent phase buttons.

[0074] The first phase button fb1 indicates the first phase of the user's operation and corresponds to the shape data import process. The first phase button fb1 is labeled "shape import" to allow the user to intuitively understand the contents of the shape data import process.

[0075] The second phase button fb2 indicates the second phase of the user's operation and corresponds to the correction setting process described above. The second phase button fb2 is labeled "Position Correction" to allow the user to intuitively understand the contents of the correction setting process.

[0076] The third phase button fb3 indicates the third phase of the user's operation and corresponds to the measurement condition setting process described above. The third phase button fb3 is labeled "Measurement Setting" to allow the user to intuitively understand the contents of the measurement condition setting process.

[0077] The fourth phase button fb4 indicates the fourth phase of the user's operation and corresponds to the text code generation process described above. The fourth phase button fb4 is labeled "Code Output" to allow the user to intuitively understand the contents of the text code generation process.

[0078] This allows the user to visually check the phase display area ARF on the measurement screen MS to understand that there are four major phases in the operation steps for generating a text code, and what needs to be done in each phase.

[0079] The four phase buttons fb1 to fb4 can be operated by the user using a pointer. When the user operates one of the phase buttons fb1 to fb4, the display state of the measurement screen MS changes so that an image corresponding to the operated phase button is displayed. Furthermore, of the phase buttons fb1 to fb4, the operated phase button is displayed in a different display mode (for example, highlighted display) from the other phase buttons. This allows the user to perform various operations while understanding the current operation stage.

[0080] In the initial state, if none of the phase buttons fb1 to fb4 is operated, no image is displayed in the first display area AR1, the second display area AR2, the third display area AR3, and the fourth display area AR4.

[0081] <3> First Phase The shape data import process is started by operating the first phase button fb1 in Fig. 8. Figs. 9 to 16 are diagrams showing an example of transition of the measurement screen MS displayed on the display device 13 in the first phase. As shown in Fig. 9, when the first phase button fb1 is operated, the display mode of the first phase button fb1 changes so that it can be distinguished from the other phase buttons. In addition, a setting window w1 prompting instructions regarding the import of the shape data of the workpiece W is superimposed and displayed in the center of the measurement screen MS.

[0082] The setting window w1 displays a head button b11 and a file button b12. The head button b11 is a button for importing shape data of the workpiece W from one or more measuring heads 11 connected to the main measuring device 20. In this example, the head button b11 includes a radio button for selecting whether or not to combine multiple pieces of shape data imported from the measuring heads 11. Here, it is assumed that the shape data is not combined. An example of combining multiple pieces of shape data imported from the measuring heads 11 will be described later. The file button b12 is a button for importing shape data that has been pre-stored in the storage device 22 of the main measuring device 20 in FIG. 3. Note that the option for selecting whether or not to combine may be displayed only the first time the data import source is set. When the data import source setting is changed, the option for selecting whether or not to combine may not be displayed. In other words, once the data import source for generating one text code has been set, the option for selecting whether or not to combine may not be displayed until the data import source for generating a new text code is set (until the next new creation).

[0083] The user can specify the source of the shape data by operating the head button b11 or the file button b12. For example, the user operates the head button b11. In this case, as shown in FIG. 10, the names of the measuring heads 11 currently connected to the main measuring device 20 are displayed selectably in the setting window w1. In addition, next to each name of the measuring head 11, an IP address indicating the connection destination of the measuring head 11 is displayed. Furthermore, the decision button b14 is displayed at the bottom of the setting window w1. The user then selects the desired measuring head 11 and operates the decision button b14. This allows the user to import the shape data of the workpiece W using the desired measuring head 11.

[0084] On the other hand, when the user operates the file button b12 in the setting window w1 of Fig. 9, an image and operation buttons for specifying a folder or the like from which shape data is to be acquired are displayed in the setting window w1. This allows the user to import the desired shape data by specifying the acquisition source.

[0085] When it is decided to import shape data using the measuring head 11 on the measurement screen MS in Fig. 10, the data pre-processing unit 40 in Fig. 3 imports profile data from the acquisition unit 21 at a predetermined pitch and generates shape data. In this case, an image of the workpiece W based on the generated shape data is displayed in the first display area AR1, as shown in Fig. 11. Also displayed in the first display area AR1 are a display switch button b15 and a data import button b16.

[0086] Here, the first display area AR1 basically displays at least one of a two-dimensional height image and a three-dimensional height image based on shape data. In the example of FIG. 11, a two-dimensional height image is displayed in the first display area AR1. In the height image, differences in height of various parts of the surface of the workpiece W are indicated by differences in brightness or color. In the height images shown in the specified figures from FIG. 11 onwards, differences in height of various parts of the surface of the workpiece W are indicated by differences in the density of the hatching and dot patterns. A higher density of the hatching and dot patterns indicates a lower height of the corresponding part, and a lower density of the hatching and dot patterns indicates a higher height of the corresponding part.

[0087] In this example, it is assumed that shape data of the top surface of the table member and the surface of the workpiece W is captured with the workpiece W shown in Fig. 7 placed on the table member. Therefore, the height image described below includes an image IB of the table member on which the workpiece W is placed, as well as an image IW of the workpiece W shown in Fig. 7.

[0088] The display switching button b15 in Figure 11 is a button for switching the image of the workpiece W displayed in the first display area AR1. By operating the display switching button b15, the user can display a three-dimensional height image in the first display area AR1 instead of the two-dimensional height image. Alternatively, the user can display the two-dimensional height image and the three-dimensional height image side by side in the first display area AR1.

[0089] For example, the user operates the display switching button b15 in Fig. 11 using the operation device 14. In this case, as shown in Fig. 12, a three-dimensional height image is displayed in place of the two-dimensional height image in the first display area AR1.

[0090] As described above, the three-dimensional height image is an image in which a plurality of images showing the heights of the various parts of the workpiece W as viewed from a plurality of directions are switched between and displayed. Therefore, by performing, for example, a drag operation, the user can switch the three-dimensional height image displayed in the first display area AR1 to an image corresponding to the desired viewing direction (switching the viewpoint), as shown in FIG.

[0091] On the measurement screen MS in Fig. 12 or 13, the user further operates the display switching button b15 using the operation device 14. In this case, a two-dimensional height image and a three-dimensional height image are displayed side by side in the first display area AR1, as shown in Fig. 14. In the example of Fig. 14, the three-dimensional height image is located on the left, and the two-dimensional height image is located on the right.

[0092] To generate a text code, shape data (the above-mentioned reference shape data) is required as a reference for determining what kind of measurement should be performed on which part of the workpiece W. The data import button b16 in FIGS. 11 to 15 is a button for temporarily storing part of the shape data that is sequentially generated in the main measuring device 20. This allows the user to stock shape data that are candidates for reference shape data by operating the data import button b16.

[0093] For example, the user operates the data import button b16 using the operation device 14. In this case, shape data corresponding to the image displayed in the first display area AR1 when the data import button b16 is operated is temporarily stored. Furthermore, as shown in FIG. 15, a thumbnail image SI based on the shape data is displayed in the third display area AR3. The thumbnail image SI may be, for example, a reduced image of one of the images displayed in the first display area AR1 when the data import button b16 is operated.

[0094] In the example of FIG. 15, a plurality of shape data are held, and four thumbnail images SI corresponding to the held plurality of shape data are arranged in the third display area AR3.

[0095] In the third display area AR3, the multiple thumbnail images SI can be selected by the user. For example, the user clicks on one of the multiple thumbnail images SI. In this case, the selected thumbnail image SI is displayed in a different display mode (e.g., highlighted display) from the other thumbnail images SI. In addition, a height image corresponding to the selected thumbnail image SI is displayed in the first display area AR1.

[0096] When the first phase button fb1 is operated, a setting window w2 for setting the pitch (acquisition pitch) for importing profile data may be superimposed and displayed in the center of the measurement screen MS as shown in FIG. 16, following the setting window w1 shown in FIG. 10. An input field c1 for inputting the acquisition pitch and a decision button b17 are displayed in the setting window w2. The user then inputs the desired acquisition pitch into the input field c1 using the operation device 14. The user also operates the decision button b17. This sets the acquisition pitch for the profile data. The data preprocessing unit 40 calculates the movement distance of the workpiece W based on an output signal (encoder signal) from an encoder provided on a conveying device such as a belt conveyor, and generates shape data based on the calculated movement distance and the set acquisition pitch. The setting of the acquisition pitch is reflected in the pitch in the Y direction in the point sequence of the acquired shape data.

[0097] As described above, the first phase is an operation stage corresponding to the shape data import process of FIG. 5. The shape data import process will now be described in detail. FIGS. 17 and 18 are flowcharts showing an example of the shape data import process. In the shape data import process of this example, the conditions for generating shape data basically involve setting the import source (shape data import source) for importing the profile data of the workpiece W and the import pitch of the profile data. Thereafter, shape data is generated based on the user's operation.

[0098] The shape data import process is initiated, for example, in response to the user operating the first phase button fb1. The shape data import process is terminated, for example, in response to the user operating any of the phase buttons fb2, fb3, and fb4 other than the first phase button fb1.

[0099] When the shape data import process is started, that is, when the first phase button fb1 is operated, the accepting unit 31 in FIG. 3 determines whether or not a source of shape data import has been designated (step S21). If a source of shape data import has not been designated, the process of step S20 is repeated. On the other hand, if a source of shape data import has been designated, the accepting unit 31 accepts the designation of the source of import (step S22). The designation of the source of shape data import is performed, for example, based on the operation of a user interface displayed on the measurement screen MS in FIGS. 9 and 10.

[0100] Next, the receiving unit 31 determines whether or not the profile data import pitch has been designated (step S23). If the import pitch has not been designated, the process proceeds to step S21. On the other hand, if the import pitch has been designated, the receiving unit 31 accepts the designation of the import pitch (step S24). The profile data import pitch is designated, for example, based on an operation of a user interface displayed on the measurement screen MS of FIG. 16. Note that if the profile data import pitch is predetermined or has been set in advance separately from this shape data import process, the processes of steps S23 and S24 may not be performed.

[0101] The processing of steps S21 to S24 described above enables the generation of shape data based on the output from the measuring head 11. Next, the data preprocessing unit 40 in FIG. 3 sequentially generates shape data based on multiple profile data obtained from the specified import source via the acquisition unit 21 (step S25). This shape data generation process continues thereafter. Furthermore, the screen generation unit 32 in FIG. 3 displays a two-dimensional height image in the first display area AR1 of the measurement screen MS based on the sequentially generated shape data (step S26).

[0102] Next, the receiving unit 31 determines whether or not there is a command to switch images (step S27). This determination is made based on, for example, whether or not the display switch button b15 in FIG. 11 has been operated. If there is no command to switch images, the process proceeds to step S31, which will be described later. On the other hand, if there is a command to switch images, the screen generating unit 32 displays a three-dimensional height image in place of the two-dimensional height image in the first display area AR1 of the measurement screen MS (step S28).

[0103] Next, the receiving unit 31 determines whether or not there is a command to switch images (step S29). This determination is made based on whether or not the display switch button b15 in FIG. 12 or 13 has been operated, for example. If there is no command to switch images, the process proceeds to step S31, which will be described later. On the other hand, if there is a command to switch images, the screen generating unit 32 simultaneously displays the two-dimensional height image and the three-dimensional height image side by side in the first display area AR1 of the measurement screen MS (step S30).

[0104] Next, the receiving unit 31 determines whether or not there is a command to import shape data (step S31). This determination is made based on, for example, whether or not the data import button b16 in FIGS. 11 to 15 has been operated. If there is no command to import shape data, the process proceeds to step S34, which will be described later. On the other hand, if there is a command to import shape data, the data preprocessing unit 40 imports the shape data generated at the timing of the command (step S32).

[0105] Next, the screen generator 32 displays the thumbnail image SI in the third display area AR3 of the measurement screen MS based on the shape data acquired in the immediately preceding step S32 (step S33).

[0106] Next, the reception unit 31 determines whether or not a thumbnail image SI displayed in the third display area AR3 has been selected (step S34). If a thumbnail image SI has not been selected, the process proceeds to step S36, which will be described later. On the other hand, if a thumbnail image SI has been selected, the screen generation unit 32 displays a two-dimensional height image of the shape data corresponding to the selected thumbnail image SI in the first display area AR1 (step S35). Here, the process of step S35 includes the processes of steps S26 to S30 described above. This allows the image displayed in the first display area AR1 to be switched based on a switching command from the user.

[0107] Next, the receiving unit 31 determines whether or not there is a command to import new shape data (step S36). This determination is made based on the user's operation of the operation device 14. If there is a command to import new shape data, the process proceeds to step S26. If there is no command to import new shape data, the process proceeds to step S34.

[0108] <4> Second Phase By operating the second phase button fb2 on the measurement screen MS in the first phase, the shape data import process is ended and the correction setting process is started. Figures 19 to 22 are diagrams showing examples of transitions of the measurement screen MS displayed on the display device 13 in the second phase.

[0109] 19, when the second phase button fb2 is operated, the display mode of the first phase button fb1 returns to the initial display mode. Meanwhile, the display mode of the second phase button fb2 changes so that it can be distinguished from the other phase buttons (for example, highlighted). Furthermore, if no reference shape data has been set at the time the second phase button fb2 is operated, a setting window w3 prompting the user to set the reference shape data is superimposed on the second display area AR2.

[0110] The setting window w3 displays a message to the user for setting the reference shape data. The setting window w3 in FIG. 19 displays the message "Do you want to use the shape data of the image displayed in the first display area as the reference shape data?" The setting window w3 also displays an OK button b21 and a Cancel button b22. The OK button b21 is a button for setting the shape data corresponding to the height image displayed in the first display area AR1 as the reference shape data. The Cancel button b22 is a button for canceling the setting operation of the reference shape data.

[0111] This allows the user to select multiple thumbnail images SI while viewing the height image displayed in the first display area AR1, and set the desired shape data as the reference shape data by operating the OK button b21. The set reference shape data is stored in the reference data storage unit 33 in FIG.

[0112] 19, the operations permitted to the user are limited to selecting one of the thumbnail images SI displayed in the third display area AR3, operating the OK button b21, and operating the Cancel button b22, thereby preventing erroneous operations by the user.

[0113] Furthermore, if the reference shape data has already been set when the second phase button fb2 is operated, the display of the setting window w3 is omitted. Therefore, the measurement screen MS in Fig. 20, which will be described later, is displayed on the display device 13.

[0114] In the following description, a function to be realized using one of the multiple processing programs included in the library (a function to be set) is referred to as a tool. When the setting of the reference shape data is completed, height images of the set reference shape data (in this example, a two-dimensional height image and a three-dimensional height image) are displayed in the first display area AR1, as shown in FIG. 20. Also displayed in the first display area AR1 is a reference update button b23 for resetting the reference shape data together with a display switch button b15. When the user operates the reference update button b23, the setting window w3 of FIG. 19 is superimposed on the measurement screen MS. This allows the user to set the reference shape data again.

[0115] Furthermore, on the measurement screen MS in Fig. 20, a tool catalog is displayed in the second display area AR2. The tool catalog displays a list of the types of tools that can be set at the present time. In the tool catalog of this example, a display block DB1 including a tool icon TI indicating the type of tool that can be set at the present time and a character string indicating that type is displayed in a selectable manner.

[0116] In the tool catalog of Fig. 20, only the display block DB1 corresponding to the correction based on pattern matching is displayed, so that the user can specify the setting of the correction method based on pattern matching by operating the display block DB1.

[0117] When the display block DB1 in Fig. 20 is operated, a setting work flow f1 corresponding to the display block DB1 is displayed in the second display area AR2, as shown in Fig. 21. Also, a tool name input field c2 is displayed so that the tool currently being set can be distinguished from other tools.

[0118] Furthermore, in this example, a message and illustrations are displayed for setting the area of ​​the characteristic portion that will be the search reference when performing the position correction process by pattern matching. Furthermore, a Next button b24 is displayed.

[0119] This allows the user to input the tool name in the input field c2. The user then specifies the area to be used as the search base on the two-dimensional height image in the first display area AR1 by dragging or other operations, following the messages and illustrations displayed in the second display area AR2. Then, the user operates the Next button b24. In the example of Figure 21, as shown by the thick two-dot chain line, approximately half of the first portion 90a (Figure 7) of the workpiece W is set as the area to be used as the search base. Note that it is preferable that the height image of the workpiece W to be operated on when setting the tool is a two-dimensional height image, considering ease of specification.

[0120] By operating the Next button b24 in Fig. 21, various input fields and selection sections for setting further conditions for the correction method are displayed in the second display area AR2, as shown in Fig. 22. In addition, an OK button b25 and a Cancel button b26 are displayed.

[0121] The OK button b25 is a button for setting the details of the correction method, etc., specified based on the details displayed in the second display area AR2 in Figures 21 and 22 as correction information. The Cancel button b26 is a button for canceling the setting of the correction method based on pattern matching. This allows the user to set the correction information (setting the tool for correcting the position of shape data) according to the messages, etc., displayed in the second display area AR2.

[0122] As described above, the second phase is an operation stage corresponding to the correction setting process of Fig. 5. The correction setting process will now be described in detail. Fig. 23 is a flowchart showing an example of the correction setting process.

[0123] The correction setting process is started in response to, for example, the user operating the second phase button fb2. When the correction setting process is started, the reference data storage unit 33 in Fig. 3 determines whether or not reference shape data has been set (step S41). This determination is made based on whether or not reference shape data is stored in the reference data storage unit 33.

[0124] If the reference shape data has already been set, the process proceeds to step S44, which will be described later. On the other hand, if the reference shape data has not already been set, the accepting unit 31 in FIG. 3 accepts the designation of the reference shape data (step S42). The designation of the reference shape data is performed, for example, based on an operation of a user interface displayed on the measurement screen MS in FIG. 19. Thereafter, the reference data holding unit 33 holds the designated reference shape data (step S43).

[0125] Next, the receiving unit 31 determines whether or not a command to reset the reference shape data has been received (step S44). This determination is made based on, for example, whether or not the reference update button b23 in FIG. 20 has been operated. If a command to reset the reference shape data has been received, the process proceeds to step S42. On the other hand, if a command to reset the reference shape data has not been received, the receiving unit 31 accepts designation of correction information for the shape data (step S45). Furthermore, the measurement setting generation unit 34 in FIG. 3 stores the accepted correction information (step S46). Thereafter, the correction setting process ends in response to the user operating any of the phase buttons fb1, fb3, and fb4 other than the second phase button fb2.

[0126] As described above, the order of the second and third phases may be reversed or repeated. Therefore, when the second phase is performed after the third phase, the execution order of the tools set in the second phase is adjusted so that the tools are executed with priority over the tools set in the third phase.

[0127] <5> Third Phase By operating the third phase button fb3 on the measurement screen MS in the second phase, the correction setting process ends and the measurement condition setting process starts. Figures 24 to 38 are diagrams showing transition examples of the measurement screen MS displayed on the display device 13 in the third phase.

[0128] When the third phase button fb3 is operated, the display mode of the second phase button fb2 returns to its initial display mode. Meanwhile, the display mode of the third phase button fb3 changes so that it can be distinguished from the other phase buttons (for example, highlighted). If no reference shape data has been set at the time the third phase button fb3 is operated, the setting window w3 of FIG. 19 is superimposed on the second display area AR2. This requires the user to set the reference shape data by operating the setting window w3, etc.

[0129] When the reference shape data is set in advance, as shown in FIG. 24, height images (in this example, a two-dimensional height image and a three-dimensional height image) of the set reference shape data are displayed in the first display area AR1. Also, a display switch button b30 for switching the image of the workpiece W displayed in the first display area AR1 and a reference update button b31 for resetting the reference shape data are displayed in the first display area AR1. The display switch button b30 may be present as one of the window menus at the top of the measurement screen MS. The reference update button b31 may be present as one of the function menus at the bottom of the measurement screen MS. In addition to the reference update button b31, the function menu may include a button for outputting the measurement results in a spreadsheet format and a button for resetting the data import source setting of whether to combine (a setting that can only be set the first time).

[0130] When the user operates the display switching button b30, the height image displayed in the first display area AR1 is switched, as explained in the examples of Figures 11 to 14. When the user operates the reference update button b31, the setting window w3 in Figure 19 is superimposed on the measurement screen MS, allowing the user to set the reference shape data again.

[0131] Furthermore, on the measurement screen MS in FIG. 24, an add tool button b32, a delete all button b33, a delete button b34, and a tool list are displayed on the second display area AR2. The tool list displays a list of tools that have been set at the current time. In the tool list in FIG. 24, a display block DB2 indicating the tool (tool that corrects the position of shape data) set in the second phase of FIGS. 19 to 22 is displayed in a selectable manner. The display block DB2 includes a tool icon TI corresponding to the set tool and the tool name. This allows the user to easily understand the tools that have been set at the current time.

[0132] The Add Tool button b32 is a button for setting a new tool related to the measurement of the workpiece W. The Delete All button b33 is a button for canceling the settings of all tools displayed in the tool list.

[0133] As described above, the display block DB2 displayed in the tool list can be selected by the user. The Delete button b34 is a button for canceling the setting of the tool of the display block DB2 selected by the user.

[0134] The user operates the add tool button b32 to perform a desired measurement on the workpiece W. In this case, a tool catalog is displayed in the second display area AR2, as shown in Fig. 25. In the tool catalog of Fig. 25, a display block DB1 corresponding to height measurement, a display block DB1 corresponding to plane specification, and a display block DB1 corresponding to flatness measurement are displayed in a selectable manner.

[0135] The user selects a desired tool type from among the multiple tool types displayed in the tool catalog, and images guiding the user to perform appropriate operations to set the selected tool type are displayed sequentially in the second display area AR2.

[0136] For example, if a user wants to set a tool to measure height, he or she operates the display block DB1 corresponding to height measurement in FIG. 25. When the display block DB1 corresponding to height measurement in the tool catalog in FIG. 25 is operated, a flow f2 of the height measurement setting work is displayed in the second display area AR2, as shown in FIG. 26. Here, in order to measure the height of the workpiece W, it is necessary to identify the surface that serves as the reference for the height (reference surface) and then identify the part whose height is to be measured. In other words, it is first necessary to set a tool that identifies a plane that will serve as the reference surface.

[0137] Therefore, in the second display area AR2 in FIG. 26, a message, illustration, etc. for prompting the user to specify a plane is displayed, and an input field c3 for the tool name of the tool for specifying the plane is also displayed.

[0138] This allows the user to input the tool name in the input field c3. The user then performs the setting operations required for the tool to identify the plane, following the messages and illustrations displayed in the second display area AR2. For example, the user specifies three points on the two-dimensional height image to identify the plane. An indicator m1 representing the plane specified by the three specified points is then superimposed on the two-dimensional height image and the three-dimensional height image. In the example of FIG. 26, a reference plane is set on the top surface of the platform member on which the workpiece W is placed, as shown by a grid pattern in the first display area AR1. It should be noted that the height image of the workpiece W to be operated on when setting up the tool is preferably a two-dimensional height image, considering ease of specification.

[0139] In addition to the above, the second display area AR2 in Fig. 26 displays a Next button b35, a Cancel button b36, and an Existing Reference button b37. The Next button b35 is a button for proceeding with subsequent setting work. The Cancel button b36 is a button for canceling the height measurement setting.

[0140] The Reference Existing button b37 is a button for loading a currently set tool. For example, if a tool for identifying a plane has been set in the past, this button is operated to call up that tool. Therefore, by operating the Reference Existing button b37, the user can set a reference plane for height measurement using a past tool. Note that when setting the tool, it may be possible to select whether to refer to an existing reference plane, a new reference plane, or no reference plane.

[0141] When the Next button b35 in Fig. 26 is operated, the setting work flow f2 continues to be displayed in the second display area AR2, as shown in Fig. 27. Furthermore, messages and illustrations that prompt the user to specify the area where the height should be measured (measurement area) are displayed, and an input field c4 for the tool name of the tool that will measure the height is displayed.

[0142] This allows the user to input the tool name in the input field c4. The user then follows the messages and illustrations displayed in the second display area AR2 to specify the height measurement area, a setting required for the tool to measure height. For example, the user may specify the desired area by dragging or otherwise manipulating the two-dimensional height image. An indicator m2 representing the specified area is then superimposed on the two-dimensional height image and the three-dimensional height image. In the example of FIG. 27, as indicated by the thick dashed two-dot line, a portion of the area including the second top surface 93 (FIG. 7) and the third top surface 94 (FIG. 7) of the workpiece W is set as the height measurement area.

[0143] In addition to the above, a Next button b38 and a Cancel button b39 are displayed in the second display area AR2 in Fig. 27. The Next button b38 is a button for proceeding with subsequent setting work. The Cancel button b39 is a button for canceling the height measurement setting.

[0144] After the height measurement area is specified, when the Next button b38 in FIG. 27 is operated, the setting work flow f2 continues to be displayed in the second display area AR2, as shown in FIG. 28. An input field c4 for the tool name of the tool used to measure height is also displayed, along with the current settings. In this example, it is shown that the tool "Plane 001" for specifying a plane has been set as the reference plane for height, and that a rectangular area has been set as the height measurement area. Edit buttons b40 and b41 are also displayed near these descriptions, respectively.

[0145] The edit buttons b40 and b41 are buttons for editing the settings for identifying the plane and the settings for the height measurement area. Therefore, by operating the edit button b40, the user can return the display state of FIG. 28 to the display state of FIG. 26. Also, by operating the edit button b41, the user can return the display state of FIG. 28 to the display state of FIG. 27.

[0146] When the measurement screen MS of Fig. 28 is displayed, all the necessary settings for the tool to measure height (reference plane and height measurement area) have been set. As a result, on the measurement screen MS of Fig. 28, all of the measurement results calculated based on the settings made up to this point are displayed in the fourth display area AR4. According to the settings in this example, the following measurement results are calculated: "peak height," "bottom height," "average height," "maximum peak height," "minimum peak height," "maximum bottom height," "minimum bottom height," "maximum average height," and "maximum average height."

[0147] "Peak height" is the maximum value of the height from the reference plane within the height measurement area. "Bottom height" is the minimum value of the height from the reference plane within the height measurement area. "Average height" is the average value of the height from the reference plane within the height measurement area.

[0148] The "maximum peak height" is the maximum value of the multiple peak heights in the multiple measurement regions when multiple height measurement regions are set. Also, the "minimum peak height" is the minimum value of the multiple peak heights in the multiple measurement regions when multiple height measurement regions are set. Therefore, when only one height measurement region is set, the "maximum peak height" and "minimum peak height" are equal to the "peak height."

[0149] The "maximum bottom height" is the maximum value of the multiple bottom heights in the multiple measurement areas when multiple height measurement areas are set. Also, the "minimum bottom height" is the minimum value of the multiple bottom heights in the multiple measurement areas when multiple height measurement areas are set. Therefore, when only one height measurement area is set, the "maximum bottom height" and "minimum bottom height" are equal to the "bottom height."

[0150] The "maximum average height" is the maximum value of the multiple average heights of the multiple measurement areas when multiple height measurement areas are set. Also, the "minimum average height" is the minimum value of the multiple average heights of the multiple measurement areas when multiple height measurement areas are set. Therefore, when only one height measurement area is set, the "maximum average height" and "minimum average height" are equal to the "average height."

[0151] 28, an indicator r1 indicating the measurement result of "average height" is superimposed on the two-dimensional height image and the three-dimensional height image as a predetermined representative measurement result in the first display area AR1. Also, a leader line is displayed between each indicator r1 and an indicator m2 representing the set measurement area.

[0152] This allows the user to easily determine whether the desired measurement will be performed using the tools that have been set up to this point by visually checking the measurement results shown in the first display area AR1 and the fourth display area AR4 of Figure 28.

[0153] In addition, the first display area AR1 may display an indicator showing the measurement result of "peak height" or "bottom height" as a predetermined representative measurement result. Also, multiple measurement results may be displayed. For example, all the measurement results displayed in the fourth display area AR4 may be displayed.

[0154] 28, an OK button b42 and a Cancel button b43 are further displayed in the second display area AR2. The OK button b42 is a button for confirming the current tool settings. The Cancel button b43 is a button for canceling the current tool settings.

[0155] When the OK button b42 in Fig. 28 is operated, the display content of the second display area AR2 changes as shown in Fig. 29. Specifically, the second display area AR2 displays the Add Tool button b32, Delete All button b33, Delete button b34, and tool list, similar to the example in Fig. 24.

[0156] In the tool list of Fig. 29, the number of display blocks DB2 for tools that are displayed as already set has increased compared to the tool list of Fig. 24. The tool list of Fig. 29 includes display blocks DB2 that show the tools that were set in the third phase of Figs. 24 to 28. This allows the user to easily grasp the tools that have currently been set.

[0157] As described above, each display block DB2 in the tool list can be selected by the user. When multiple display blocks DB2 are displayed in the tool list and one of the display blocks DB2 is selected, the display mode of the selected display block DB2 changes (for example, becomes highlighted) so that it can be distinguished from the other display blocks DB2.

[0158] In the first display area AR1, an index related to the selected display block DB2 is superimposed. In the example of Fig. 29, by selecting the display block DB2 corresponding to the tool for measuring height, an index m1 indicating the plane serving as the reference for height and an index m2 indicating the height measurement area are displayed. Furthermore, an index r1 indicating the measurement result actually measured when the tool (the tool for measuring height) of the selected display block DB2 was set is displayed.

[0159] Here, predetermined representative measurement results are displayed together with the tool name in the display block DB2 corresponding to the tool for measuring physical quantities such as height and flatness. In the example of Fig. 29, the measurement result of "average height" is displayed in the display block DB2 corresponding to the tool for measuring height.

[0160] In addition, the display block DB2 corresponding to the tool for measuring a physical quantity displays a result display setting button b44 for setting the items of the measurement results to be displayed in the first display area AR1 and the display block DB2.

[0161] When the result display setting button b44 is operated, a result display setting window w4 is superimposed on the second display area AR2, as shown in Fig. 30. The result display setting window w4 displays all types of measurement results calculated based on the target tool, selectable, for example, by check boxes. The result display setting window w4 also displays a close button b45.

[0162] For example, the user selects "peak height" and "average height" from the multiple measurement result types displayed in the result display setting window w4 and operates the close button b45. This closes the result display setting window w4, and in the first display area AR1, an indicator r1 indicating the measurement results of "peak height" and "average height" is superimposed on the two-dimensional height image and three-dimensional height image, as shown in Figure 31. In addition, in the second display area AR2, the measurement results of "peak height" and "average height" are displayed in the display block DB2 corresponding to the tool used to measure height.

[0163] In the first display area AR1, the measurement result indicator r1 superimposed on the two-dimensional height image and the three-dimensional height image does not need to be displayed with a leader line. For example, as shown in FIG. 32, it may be displayed in a predetermined area of ​​each height image (the upper right corner in this example) without using a leader line. Also, in the first display area AR1, indicators such as a "+" mark and a "-" mark may be added to the part of the height measurement area where the "peak height" is calculated and the part where the "bottom height" is calculated, respectively.

[0164] Assume that the user switches the viewpoint of the three-dimensional height image displayed in the first display area AR1 while the measurement screen MS of Fig. 29 is displayed. In this case, the indices m1, m2, and r1 attached to the three-dimensional height image of Fig. 29 are displayed following the image switching, as shown in Fig. 33. This allows the user to easily and in detail grasp the measurement content and measurement results of the workpiece W.

[0165] If a correction method based on pattern matching is set in the second phase, the positions of the other shape data are corrected so that the planar position information of the characteristic parts of the other shape data matches the planar position information of the characteristic parts of the reference shape data. Now, assume that, while the measurement screen MS of Figure 29 is displayed, the user selects a thumbnail image SI displayed in the third display area AR3 that corresponds to shape data other than the reference shape data.

[0166] In this case, a new height image based on the selected other shape data is displayed in the first display area AR1, as shown in Fig. 34. Furthermore, the new height image displays the indices m1, m2, and r1 attached to the height image in Fig. 29, taking into account the position correction of the other shape data.

[0167] This allows the user to check the height images of multiple shape data and understand the measurement results, etc., obtained by the set tool. In addition, the user can understand that the position correction settings have been made appropriately.

[0168] Assume that multiple tools have been set in the third phase. In this case, multiple display blocks DB2 corresponding to the multiple tools that have been set are displayed in the second display area AR2, as shown in Fig. 35. In the example of Fig. 35, a display block DB2 for a tool "height 002" that measures height is additionally displayed compared to the example of Fig. 29.

[0169] Among the multiple display blocks DB2, a display block DB2 corresponding to a tool for measuring physical quantities such as height and flatness is selected, and all measurement results related to the selected tool are displayed in the fourth display area AR4. In the first display area AR1, indices m1, m2, r1 related to the selected tool are superimposed on each height image.

[0170] In the example of FIG. 35, the added display block DB2 is selected. By visually checking the height image and various indicators m1, m2, and r1 displayed in the first display area AR1, the user can easily understand the settings made by the tool in that display block DB2. Specifically, the user can understand that the selected tool measures the height of a portion of the workpiece W, including the first upper surface portion 92 (FIG. 7) and the second upper surface portion 93 (FIG. 7), using the top surface of the base member as the reference plane. The user can also understand what the average height measurement results are obtained by that tool.

[0171] In main measuring unit 20 according to the present embodiment, a priority is assigned to each of the multiple settable tool types. Therefore, when multiple tools are set sequentially in main measuring unit 20, the order in which these tools are executed is determined based on the actual setting order and the priority assigned to each tool.

[0172] For example, it is undesirable for shape data that should be position-corrected to be used in measurement calculations without being position-corrected, so tools that correct shape data are given the highest priority over other types of tools.

[0173] For example, as shown in Fig. 36, assume that a tool for specifying a plane (the "Plane 001" tool) and two tools for measuring height (the "Height 001" and "Height 002" tools) are set in a state where no position correction tool is set. In the example of Fig. 36, the "Plane 001" tool is used as a tool for specifying a common reference plane for the "Height 001" and "Height 002" tools.

[0174] In this case, when the user sets a tool to correct the position of the shape data by returning to the second phase, the set position correction tool is added as the tool to be executed first, as shown in Figure 37 (see the white arrow in Figure 37).

[0175] Furthermore, for example, when a tool for measuring height is executed, data on the reference surface corresponding to the measurement is required. Therefore, a tool for identifying a reference surface is given a higher priority than a tool for measuring height using the reference surface. Therefore, for example, if a tool for measuring height is set and then the tool for identifying the reference surface used for the measurement is changed, the execution order of the changed tool for identifying the reference surface is adjusted so that it is executed earlier than the execution order of the previously set height measurement. The display order of the tools may be the same as or different from the execution order of the tools. The display order of the tools may be selected from the order of tool creation or the order of tool type. If the order of tool type is selected as the display order of the tools, the measurement tool, position correction tool, and reference surface may be displayed in this order.

[0176] As shown in FIG. 36, assume that one tool for identifying a plane and two tools for measuring height are set without a position correction tool. Here, a tool for identifying a plane is set to newly set a reference plane for the "Height 002" tool for measuring height. In this case, the newly set tool for identifying a plane (the "Plane 002" tool) is added as a tool to be executed before the "Height 002" tool for measuring height, as shown in FIG. 38 (see the white arrow in FIG. 38). In the example of FIG. 38, the plane identified by the "Plane 002" tool is set in a partial area of ​​the second upper surface portion 93 (FIG. 7) of the workpiece W, as shown by the grid pattern in the first display area AR1.

[0177] As described above, the third phase is an operation stage corresponding to the measurement condition setting process in Fig. 5. The measurement condition setting process will now be described in detail. Fig. 39 and Fig. 40 are flowcharts showing an example of the measurement condition setting process.

[0178] The measurement condition setting process is started, for example, in response to the user operating the third phase button fb3. When the correction setting process is started, the same processes as steps S41 to S43 of the correction setting process are first performed. Specifically, the reference data holding unit 33 in FIG. 3 determines whether reference shape data has been set (step S50). If reference shape data has been set, the process proceeds to step S53, which will be described later. On the other hand, if reference shape data has not been set, the receiving unit 31 in FIG. 3 receives designation of reference shape data (step S51). Thereafter, the reference data holding unit 33 holds the designated reference shape data (step S52).

[0179] 3 displays a height image in response to a user command to switch the display based on the reference shape data in the first display area AR1, a tool list in the second display area AR2, and thumbnail images in the third display area AR3 (step S53). The user command to switch the display is, for example, a command received by operating the display switch button b30 in FIG. 24.

[0180] Next, the receiving unit 31 in FIG. 3 determines whether or not a command to reset the reference shape data has been received (step S54). This determination is made based on, for example, whether or not the reference update button b31 in FIG. 24 has been operated. If a command to reset the reference shape data has been received, the process proceeds to step S51. On the other hand, if a command to reset the reference shape data has not been received, the receiving unit 31 determines whether or not a command to add a tool setting has been received (step S55). This determination is made based on, for example, whether or not the tool addition button b32 in FIG. 24 has been operated. If there is no command to add a tool setting, the process proceeds to step S50. On the other hand, if there is a command to add a tool setting, the screen generation unit 32 displays a tool catalog in the second display area AR2 (step S56).

[0181] Next, the accepting unit 31 determines whether or not one tool type has been selected from one or more tool types displayed in the tool catalog (step S57). This determination is made based on whether or not one of the display blocks DB1 in FIG. 25 has been selected, for example.

[0182] If no tool type is selected in step S57, the receiving unit 31 repeats the process of step S57. On the other hand, if a tool type is selected, the receiving unit 31 receives various specifications related to the tool. Receiving this specification corresponds to receiving the specification of one or more geometric elements and one or more measurement items. Furthermore, the measurement setting generation unit 34 in FIG. 3 generates measurement setting data based on the specifications received by the receiving unit 31 (step S58). Various specifications related to the tool are made based on the operation of the user interface displayed on the measurement screen MS in FIGS. 26 to 28, for example.

[0183] At this time, in response to the acceptance of the designation by the accepting unit 31, the screen generating unit 32 displays an indicator indicating the accepted designation superimposed on the height image in the first display area AR1 (step S59). The indicator displayed here corresponds to the indicators m1 and m2 superimposed on the height image in FIGS. 26 and 27, for example.

[0184] Next, the execution unit 36 ​​in Fig. 3 determines whether the tool associated with the received designation is a tool for measuring a physical quantity (step S60). If the tool associated with the received designation is not a tool for measuring a physical quantity, the process proceeds to step S63, which will be described later. If the tool associated with the received designation is a tool for measuring a physical quantity, the execution unit 36 ​​measures physical quantities such as height and flatness based on the received designation (step S61).

[0185] Furthermore, the screen generator 32 displays at least a part of the measurement results (calculation results) of the physical quantities calculated in step S62 in a superimposed manner on a predetermined portion of the height image in the first display area AR1 (step S62). The measurement results displayed here correspond to, for example, the index r1 superimposed on the height image in FIG.

[0186] The measurement results superimposed on the height image in step S62 may be measurement results specified by the user using the result display setting window w4 of Figure 30, or may be predetermined measurement results.

[0187] When the acceptance of various specifications for one tool is completed, the measurement setting generation unit 34 in FIG. 3 adjusts the execution order of the currently set tools based on the predetermined priority of each tool (step S63). The display order of the tools may be the same as or different from the execution order of the tools. The display order of the tools may be selected from the order of tool creation or the order of tool type. When the order of tool type is selected as the display order of the tools, the measurement tools, position correction tools, and reference surfaces may be displayed in this order.

[0188] Next, the screen generator 32 displays a tool list in the second display area AR2 (step S64). When a tool for measuring a physical quantity is set, the screen generator 32 also displays in the second display area AR2 a predetermined representative measurement result from among a plurality of measurement results calculated when the tool was set (step S65). The measurement result displayed here corresponds to, for example, the measurement result (average height) displayed in a display block DB2 that is part of the second display area AR2 in FIG. 29.

[0189] The measurement results displayed in the second display area AR2 in step S64 may be the measurement results specified by the user using the result display setting window w4 in FIG.

[0190] Next, if the tool set immediately before is a tool for measuring a physical quantity, the screen generator 32 displays all of the measurement results calculated in the process of step S61 in the fourth display area AR4 (step S66). The measurement results displayed here correspond to, for example, the multiple measurement results (peak height, bottom height, average height, etc.) displayed in the fourth display area AR4 in FIG.

[0191] Next, the accepting unit 31 determines whether any tool has been selected from the tool list in the second display area AR2 (step S67). This determination is made based on, for example, whether one of the multiple display blocks DB2 in FIG. 29 has been selected. If no tool has been selected from the tool list, the process proceeds to step S69, which will be described later. On the other hand, if any tool has been selected from the tool list, the screen generating unit 32 changes the display mode of the display block DB2 corresponding to the selected tool and displays various indices related to that tool on the measurement screen MS (step S68). The various indices displayed here correspond to, for example, the index m1 indicating the plane serving as the height reference, the index m2 indicating the height measurement area, and the index r1 indicating the measurement result, which are displayed in the first display area AR1 in FIG. 29.

[0192] Next, the reception unit 31 determines whether or not a command to add a new tool setting has been received (step S69). This determination is made based on, for example, whether or not the add tool button b32 in FIG. 29 has been operated. If there is a command to add a tool setting, the process proceeds to step S56 above. On the other hand, if there is no command to add a tool setting, the process proceeds to step S67 above. In the series of processes above, the correction setting process ends in response to the user operating any of the phase buttons fb1, fb2, and fb4 other than the third phase button fb3.

[0193] <6> Phase 4 By operating the fourth phase button fb4 on the measurement screen MS in the second or third phase, the correction setting process or the measurement condition setting process ends and the text code generation process starts. Figures 41 to 43 are diagrams showing transition examples of the measurement screen MS displayed on the display device 13 in the fourth phase.

[0194] For example, assume that the user operates the fourth phase button fb4 while the measurement screen MS in Fig. 38 is displayed. In this case, as shown in Fig. 41, the display mode of the third phase button fb3 returns to the initial display mode, and the display mode of the fourth phase button fb4 changes to be distinguishable from the other phase buttons (for example, highlighted).

[0195] In the fourth phase, the user must perform an operation to generate a text code corresponding to one or more tools set in the first to third phases. When the fourth phase button fb4 is operated as described above, a code generation window w5 is superimposed on the center of the measurement screen MS to prompt the user to give instructions regarding the generation of the text code.

[0196] The code generation window w5 displays a namespace input field c11, a folder input field c12, a file name input field c13, and a generate button b50. The namespace input field c11 is an input field for setting a namespace for the text code to be generated. The folder input field c12 is an input field for specifying a file name to identify the file of the text code to be generated. The file name input field c13 is an input field for specifying the address of the folder or other location where the generated text code will be saved (output destination).

[0197] This allows the user to enter information about the text code to be created in the namespace input field c11, folder input field c12, and file name input field c13 of the code generation window w5. In the following explanation, the information entered in each input field (c11, c12, c13) of the code generation window w5 will be referred to as file generation information.

[0198] The Generate button b50 is a button for issuing a command to generate a text code file. The user inputs file generation information into the input fields (c11, c12, c13) of the code generation window w5, and then operates the Generate button b50. This creates a text code file with a desired file name in a desired folder in the storage device 22 of FIG. 3, for example.

[0199] As described above, when the generate button b50 is operated, an information output window w6 is displayed in the center of the measurement screen MS in place of the code generation window w5, as shown in Fig. 42. A character string indicating how to use the setting support information is displayed in the information output window w6. That is, the text code file generated by a series of operations, the corresponding library, and a character string indicating how to use the corresponding reference shape data are displayed in the information output window w6.

[0200] In addition to the above character string, an output button b51 is also displayed in the information output window w6. The user operates the output button b51 after checking the usage instructions displayed in the information output window w6. When the output button b51 is operated, the information output window w6 is closed, and the display state of the measurement screen MS returns to the original display state (the display state of FIG. 38). In addition, the setting support information is output to a predetermined output destination. This allows the user to easily and smoothly perform the setting work of the secondary measuring devices 20A, 20B (FIG. 1) according to the usage instructions displayed in the information output window w6.

[0201] Furthermore, a code display button b52 is displayed in the information output window w6. The code display button b52 is a button for displaying the contents of the generated text code on the measurement screen MS. When the code display button b52 is operated, a code display window w7 is displayed in the center of the measurement screen MS, as shown in FIG. 43. The generated text code is displayed in the code display window w7. This allows the user to check the contents of the generated text code on the screen of the display device 13. The code display window w7 also displays a close button b53 for closing the code display window w7.

[0202] As described above, the fourth phase is an operation stage corresponding to the text code generation process of Fig. 5. The text code generation process will now be described in detail. Fig. 44 is a flowchart showing an example of the text code generation process.

[0203] The text code generation process is started in response to, for example, the user operating the fourth phase button fb4. When the text code generation process is started, the reception unit 31 in Fig. 3 receives file generation information (step S81). The file generation information is received based on, for example, the operation of the code generation window w5 displayed on the measurement screen MS in Fig. 41.

[0204] Next, the receiving unit 31 determines whether or not there is a command to generate a text code file (step S82). This determination is made based on, for example, whether or not the generate button b50 in FIG. 41 has been operated. If there is no command to generate a file, the receiving unit 31 repeats the process of step S82. On the other hand, if there is a command to generate a file, the code generating unit 38 generates a text code file based on the file generation information received in step S81 (step S83).

[0205] More specifically, in step S83, the code generation unit 38 generates, as processing program information, character information indicating a processing program to be called from the library, based on information (types of tools) of the multiple tools that have been set. The code generation unit 38 also generates, as specification information, character information indicating parameters, etc., obtained by user specification in association with each processing program information. The code generation unit 38 also combines processing program information and specification information that are related to each other.

[0206] In this embodiment, the library includes a processing program for setting the shape data import source (import source setting) and for setting the process for generating shape data (shape data generation process setting). In this case, the code generation unit 38 includes information indicating the shape data import source and the profile data import pitch set by the user in the examples of FIGS. 10 and 16 in the text code as data import conditions. Note that the library does not need to include processing programs for import source setting and shape data generation process setting. If the library does not include processing programs for import source setting and shape data generation process setting, the code generation unit 38 does not include information indicating the shape data import source and the profile data import pitch set by the user in the examples of FIGS. 10 and 16 in the text code as data import conditions. Therefore, this information must be set by the user through a separate setting operation when setting up the sub-measuring device 20A, etc.

[0207] In this embodiment, the library may include a processing program related to the synthesis of shape data. In this case, when a synthesis condition for multiple pieces of shape data, which will be described later, is set, the code generation unit 38 includes the synthesis condition in the text code. Note that the library does not have to include a processing program related to the synthesis of shape data. In this case, even when a synthesis condition for multiple pieces of shape data, which will be described later, is set, the code generation unit 38 does not include the synthesis condition in the text code.

[0208] When specific measurement results are designated as display targets in the result display setting window w4 in Fig. 30 in the third phase, the code generation unit 38 may include information indicating the designated measurement results as measurement result information in the text code. The text code including the measurement result information makes it easy to understand notable measurement results.

[0209] As described above, when the measurement result information is included in the text code, the code generating unit 38 handles the measurement result information as a structure in the text code. Specifically, the measurement result includes information (values, units, and item names) for each measurement item, such as "peak height," "bottom height," "average height," "maximum peak height," "minimum peak height," "maximum bottom height," "minimum bottom height," "maximum average height," and "maximum average height."

[0210] The value of each measurement item is a floating-point number, and the units and item names are strings. The language of the item names may be selected in conjunction with the language used in the code generation assistance program, or a language different from the language used in the code generation assistance program may be selected. The code generation unit 38 may identify notable measurement results in the text code using a measurement result structure containing the value, unit, and item name of each measurement item, and an identifier for identifying the notable measurement item. For example, an enumerator (enum constant) of an enumeration type (enum type) may be used as an identifier to identify notable measurement items from the measurement result structure containing the value, unit, and item name of each measurement item.

[0211] In this embodiment, the library may include a processing program that executes a function that takes an enumerator as an argument and returns a measurement result corresponding to a measurement item of interest from an enumerated processing result structure. The function that returns the measurement result may include a function that outputs the measurement result as a floating-point value and a function that outputs the measurement result as a character string indicating a value with a unit such as "mm." The function that returns the measurement result may also include a function that takes an enumerator as an argument and returns a character string indicating the item name. In this case, the code generation unit 38 outputs an identifier such as an enumerator corresponding to the measurement item of interest, and can generate text code that uses the identifier to obtain the item name of the measurement item of interest and the value of the measurement result with a unit.

[0212] In this embodiment, the library may include a processing program that executes processing to display measurement results. This processing program may display a list of the names of measurement items of interest and the values ​​of the measurement results with units. The library may also include a processing program that executes a function that takes shape data, tool areas, and measurement results for each area as arguments and returns image data that displays the measurement results for each set tool area on a two-dimensional height image or a three-dimensional height image as shown in FIG. 31.

[0213] Next, the screen generating unit 32 in FIG. 3 displays how to use the setting support information on the measurement screen MS (step S84). The receiving unit 31 also determines whether there is a command to display a text code (step S85). This determination is made, for example, based on whether the code display button b52 in FIG. 42 has been operated. If there is no command to display the text code, the process proceeds to step S87, which will be described later. On the other hand, if there is a command to display the text code, the screen generating unit 32 displays the generated text code on the measurement screen MS (step S86). The display of the text code is ended, for example, in response to a command to stop displaying the text code (for example, operation of the close button b53 in FIG. 43).

[0214] Next, the reception unit 31 determines whether or not a command to output the setting support information has been issued (step S87). This determination is made based on, for example, whether or not the output button b51 in FIG. 42 has been operated. If a command to output the setting support information has not been issued, the process proceeds to step S85. On the other hand, if a command to output the setting support information has been issued, the output unit 39 associates the library and reference shape data with the text code generated by the code generation unit 38, and outputs the setting support information including the text code, library, and reference shape data (step S88). This completes the text code generation process.

[0215] <7> Text Code Fig. 45 is a diagram showing an example of a text code generated by the code generation unit 38 of Fig. 3. As shown in Fig. 45, in the text code generated by the main measuring device 20, a group of character strings indicating a plurality of set tools are arranged in the order of tool execution, as shown by the multiple dotted-line frames. Furthermore, the dotted-line frame of each tool contains the tool name set by the user when the code generation support program is executed, as shown in the dash-dotted-line frame.

[0216] This allows the user to easily understand the contents of the multiple tools included in the text code, i.e., one or more geometric elements and one or more measurement items to be set, by visually checking the text code. In addition, the user can easily understand the execution order of the multiple tools.

[0217] As shown by the solid-line frames within some of the multiple dotted-line frames, the text code includes processing program information corresponding to the set tools. Furthermore, the dotted-line frames corresponding to some of the tools include designation information corresponding to those tools. Here, the designation information includes, for example, planar position information of the area designated by the user, as shown in the example of Figure 27.

[0218] In addition to the above, the text code includes, as data import conditions, information indicating the source of shape data and the import pitch of profile data, which are set by the user in the examples of Figures 10 and 16, depending on the content of the processing program included in the library. The text code also includes information indicating the synthesis conditions for multiple shape data, which will be described later, depending on the content of the processing program included in the library.

[0219] Here, information indicating the address of a predetermined save destination (hereinafter referred to as the "default save destination") for the reference shape data is incorporated into the text code generated in this embodiment. Also, the information output window w6 in Fig. 42 displays a message instructing the user to save the reference shape data in the default save destination. This allows the user to proceed with the setup work for the sub-measuring device 20A, for example, by setting the default save destination indicated in the information output window w6 in the sub-measuring device 20A and storing the reference shape data in the set save destination.

[0220] 6. Function to combine multiple shape data The size of the shape data that can be generated in one measurement operation by the measuring head 11 is determined, for example, according to the specifications of the light-emitting unit and light-receiving unit of the measuring head 11. Therefore, when measuring the entire shape of a workpiece W that is too large to be generated in one measurement operation, it is desirable to perform multiple measurement operations on multiple parts of the workpiece W and combine the multiple shape data generated by these measurement operations. Therefore, the main measuring device 20 according to this embodiment has a function of combining the multiple shape data acquired from the measuring head 11.

[0221] When using the function of combining multiple shape data, the user needs to set the combining conditions that indicate how to combine the multiple shape data acquired from the measuring head 11. The combining conditions are generated, for example, when the user selects to combine multiple shape data using the radio buttons in FIG. 9 and operates the head button b11.

[0222] 46 to 49 are diagrams showing examples of transitions of the measurement screen MS displayed on the display device 13 by the function of combining multiple shape data. When the head button b11 in Fig. 9 is operated with the radio button selected to combine multiple shape data, a combination setting window w8 for determining the method of combining multiple shape data is displayed in the center of the measurement screen MS.

[0223] The synthesis setting window w8 displays radio buttons for selecting one synthesis method from multiple synthesis methods for multiple shape data. In this example, three synthesis methods (first synthesis method, second synthesis method, and third synthesis method) are shown with illustrations as multiple synthesis methods.

[0224] The first synthesis method is a method in which the measuring head 11 is moved in one direction in a rectangular wave pattern, shape data is generated each time the measuring head 11 moves in a direction perpendicular to the one direction, and the generated multiple shape data are synthesized. In the first synthesis method, the moving direction of the measuring head 11 is reversed each time shape data is generated.

[0225] The second synthesis method is a method in which, each time the measuring head 11 is moved a predetermined distance in one direction on one virtual straight line, the measuring head 11 is moved in a direction perpendicular to the one direction from the virtual straight line to generate shape data, and the generated multiple shape data are synthesized. In the second synthesis method, the moving direction of the measuring head 11 is maintained in a common direction when generating the shape data.

[0226] The third synthesis method is a method in which multiple measurement heads 11 are moved in one direction while adjacent to each other, thereby generating multiple shape data corresponding to each of the multiple measurement heads 11, and synthesizing the generated multiple shape data.

[0227] Directly below the illustration showing each synthesis method is displayed an input field c21 for specifying the number of shape data to be synthesized. This allows the user to select a desired synthesis method from the multiple synthesis methods displayed in the synthesis setting window w8 and input the number of shape data to be synthesized using that synthesis method in the input field c21.

[0228] The synthesis setting window w8 also displays a Next button b61 and a Cancel button b62. In the synthesis setting window w8, for example, the first synthesis method is selected and the number of shape data to be synthesized is entered as "3," and then the Next button b61 is operated. In this case, the setting window w1 in FIG. 10 is displayed on the measurement screen MS. This allows the user to set a measuring head for importing shape data from one or more measuring heads 11 currently connected to the main measuring device 20.

[0229] When the measuring head from which the shape data will be imported is set and the enter button b14 (Fig. 10) in the setting window w1 is operated, a message prompting the user to generate multiple pieces of shape data to be combined is displayed in the second display area AR2, as shown in Fig. 47. Furthermore, a shape data generation button b63, a next button b64, and a cancel button b65 are displayed in the second display area AR2.

[0230] The shape data generation button b63 is a button that the user uses to generate shape data using the set measuring head 11. In this example, the user repeatedly operates the shape data generation button b63 and moves the measuring head 11 and the workpiece W relatively in accordance with the first synthesis method set in the synthesis setting window w8, thereby generating three pieces of shape data. Furthermore, in this example, it is assumed that the information required to generate shape data (such as the profile data import pitch) is set in advance as a default.

[0231] In this case, multiple (three in this example) two-dimensional height images im1, im2, and im3 based on the multiple generated shape data are displayed in the first display area AR1. Also, a thumbnail image SI corresponding to the image displayed in the first display area AR1 is displayed in the third display area AR3. Note that the images displayed in the first display area AR1 and the second display area AR2 in FIGS. 47 to 49 are images based on the shape data of a workpiece different from the workpiece W in FIG. 7.

[0232] When the Next button b64 is operated in the display state of Figure 47, three two-dimensional height images im1, im2, and im3 are displayed in the first display area AR1, lined up on a common planar coordinate system, as shown in Figure 48.

[0233] At this time, the planar position information of each shape data is adjusted to match each other based on the set synthesis method. As a result, the orientation of each 2D height image im1, im2, im3 is appropriately reversed. In the example of Figure 48, the 2D height image im2 located in the center is vertically reversed compared to the display example of Figure 47.

[0234] In the second display area AR2, a plurality of input fields c22 for adjusting the planar position information for each of the first imported shape data, the second imported shape data, and the third imported shape data are displayed. The user can adjust the planar position information for each of the three shape data by inputting numerical values, i.e., offset values ​​relative to the initial planar position information, into each of the plurality of input fields c22.

[0235] In this example, the results of adjusting the planar position information are reflected in the three two-dimensional height images im1, im2, and im3 displayed in the first display area AR1, respectively. This allows the user to adjust the planar position information of the three shape data while visually checking the three two-dimensional height images im1, im2, and im3 displayed in the first display area AR1.

[0236] The second display area AR2 also displays a combine button b66 and a cancel button b67. The combine button b66 is a button for determining the offset values ​​entered in the input fields c22 of the second display area AR2 as part of the combine conditions and for combining multiple shape data. When the combine button b66 is operated, multiple shape data with adjusted planar position information are combined.

[0237] 49, a two-dimensional height image im4 based on the synthesized shape data is displayed in the first display area AR1. At this time, an OK button b68 and a display switch button b69 are displayed in the first display area AR1. By operating the display switch button b69, the user can switch the image displayed in the first display area AR1 to a three-dimensional height image, or to a state in which the two-dimensional height image and the three-dimensional height image are displayed side by side.

[0238] The above series of operations sets the synthesis conditions, including the synthesis method for multiple shape data, the measuring head 11 to be used for the multiple shape data, the number of shape data to be synthesized, and offset values ​​for the multiple shape data. The OK button b68 is a button for issuing a command to complete the setting of the synthesis conditions. By operating the OK button b68, the set synthesis conditions are stored.

[0239] When the synthesis conditions are stored as described above, the correction setting process, measurement condition setting process, and text code generation process can be performed on the shape data synthesized based on the synthesis conditions.

[0240] The code generation support process according to this embodiment includes a process for setting the synthesis conditions (hereinafter referred to as synthesis condition setting process) in addition to the multiple processes shown in Fig. 5. The synthesis condition setting process is a process that is executed in place of the shape data import process of Fig. 5 based on, for example, a user's command. The synthesis condition setting process will now be described.

[0241] 50 is a flowchart showing an example of a synthesis condition setting process. The synthesis condition setting process is started in response to a command from the user to set synthesis conditions. In the above example, the command to set synthesis conditions corresponds to the user selecting to synthesize multiple shape data using the radio buttons in FIG. 9 and operating the head button b11.

[0242] When the synthesis condition setting process is started, the screen generator 32 in Fig. 3 displays an operation panel on the measurement screen MS to guide the user to set the synthesis conditions (step S91). The accepting unit 31 in Fig. 3 accepts various specifications for the synthesis conditions (step S92). The operation panel displayed here corresponds to the user interface displayed on the measurement screen MS in Figs. 46 to 48, for example.

[0243] Furthermore, when the receiving unit 31 receives various specifications, the data preprocessing unit 40 combines multiple pieces of shape data under the specified combining conditions. The screen generating unit 32 then displays a two-dimensional height image based on the temporary shape data combined under the specified combining conditions on the display device 13 (step S93). This two-dimensional height image corresponds to, for example, the two-dimensional height images im1, im2, and im3 displayed on the measurement screen MS in FIG. 48 and the two-dimensional height image im4 in FIG. 49.

[0244] Next, the reception unit 31 determines whether the setting of the synthesis conditions is complete (step S94). This determination is made based on, for example, whether the OK button b68 in FIG. 49 is operated. If the setting of the synthesis conditions is not complete, the process proceeds to step S92. On the other hand, if the setting of the synthesis conditions is complete, the data preprocessing unit 40 stores the specified synthesis conditions (step S95). This ends the synthesis condition setting process.

[0245] During the synthesis process in step S93, the data preprocessing unit 40 may determine whether or not there is a pitch mismatch between the planar coordinate systems of each of two adjacent pieces of shape data. If it is determined that there is a pitch mismatch between the two planar coordinate systems, the data preprocessing unit 40 may automatically perform position correction between the two pieces of shape data to offset the pitch mismatch. Alternatively, the data preprocessing unit 40 may perform processing (such as interpolation processing) to reduce the gap between the two pieces of shape data due to the pitch mismatch.

[0246] 7.Effects (a) In the above-described main measuring device 20, one or more shape data of the workpiece W is imported, and reference shape data is set from the imported one or more shape data. One or more tools are set to the reference shape data, and measurement setting data is generated. When one or more tools are set, indicators m1, m2 (FIG. 29) indicating the designation information corresponding to the settings are displayed on the measurement screen MS. This allows the user to easily understand the content of their designation.

[0247] One or more measurement results are calculated based on the generated measurement setting data. At least a portion of the calculated one or more measurement results is displayed on the measurement screen MS. This allows the user to check whether the settings of each tool are appropriate.

[0248] Furthermore, the code generation support device generates text code including processing program information and specification information corresponding to the set tool. This allows the user to use the generated text code to easily and appropriately perform the setting work of the sub-measuring devices 20A, 20B to perform the desired measurement on the workpiece W.

[0249] (b) A measurement screen MS for generating setting support information is displayed on the display device 13 of the main measuring device 20. A height image is mainly displayed in the first display area AR1 of the measurement screen MS. When setting various tools, indices m1 and m2 representing one or more geometric elements specified by the user are superimposed on the height image. Therefore, the user can easily and accurately grasp the tool setting content (the specification of one or more element indices) by visually checking the height image and indices m1 and m2.

[0250] Additionally, the second display area AR2 of the measurement screen MS displays a tool list in the second and third phases, allowing the user to easily grasp the currently set tools (specifications for one or more geometric elements and one or more measurement items) by visually checking the tool list.

[0251] In the tool list, predetermined representative measurement results are displayed in display blocks DB2 corresponding to tools for measuring physical quantities such as height and flatness. When a display block DB2 corresponding to a tool for measuring a physical quantity is selected, an indicator r1 indicating the representative measurement result corresponding to that display block DB2 is superimposed on the height image in the first display area AR1. This allows the user to easily determine whether various settings are appropriate by visually checking the tool list and the indicator r1.

[0252] Furthermore, in the third display area AR3 of the measurement screen MS, thumbnail images SI of multiple pieces of shape data that can be used as reference shape data are displayed in a selectable manner, allowing the user to select desired shape data from the multiple pieces of shape data as reference shape data.

[0253] (c) The main measuring device 20 outputs the generated text code and setting support information including the library and reference shape data corresponding to the text code. Therefore, by using the output setting support information, the setting work of the sub-measuring devices 20A, 20B for performing the desired measurement can be easily performed without separately preparing the library and reference shape data.

[0254] (d) As described above, the text code generated by the main measuring device 20 can include processing program information and specification information corresponding to a tool for correcting the position of shape data. This allows the user to easily perform the setting work of the sub-measuring devices 20A, 20B for correcting the position of shape data.

[0255] (e) Furthermore, data import conditions can be included in the text code generated by the main measuring device 20. This allows the user to easily perform the setting work of the sub-measuring devices 20A and 20B for importing shape data.

[0256] (f) In the text code generated by the main measuring device 20, the execution order of multiple processing programs corresponding to multiple tools is determined based on the actual setting order and the priority assigned to each tool in advance. This eliminates the need for the user to consider the appropriate setting order when setting multiple tools to generate the text code.

[0257] 8. Other Embodiments (a) In the above embodiment, a plurality of processing programs that can be used to measure the shape of the workpiece W are collected into a library and stored in the library storage unit 37, but the present invention is not limited to this. Each of the plurality of processing programs may be stored individually in a predetermined storage area without using a library.

[0258] (b) Although the setting support information in the above embodiment includes a text code and a library and reference shape data corresponding to the text code, the present invention is not limited to this. The setting support information does not have to include the library and reference shape data. In this case, when setting up the sub-measuring devices 20A and 20B, the library and reference shape data must be prepared separately.

[0259] Alternatively, the setting support information may include only the processing programs to be called by the generated text code, instead of the library. In this case, there is no need to store extra processing programs in the sub-measuring devices 20A and 20B when setting up the sub-measuring devices 20A and 20B.

[0260] (c) In the above embodiment, the measuring head 11 capable of acquiring profile data by irradiating the workpiece W with band-shaped light is used as a configuration for generating shape data, but the present invention is not limited to this. Instead of the measuring head 11, a configuration capable of acquiring point cloud data indicating the three-dimensional shape of the workpiece W by irradiating the workpiece W with measurement light having a pattern can also be used. In this case, setting support information can be generated for various measurements using the point cloud data.

[0261] (d) In the main measurement system 1 according to the above embodiment, a shape data generation device capable of receiving output from the measuring head 11 and generating shape data may be provided between the measuring head 11 and the main measurement device 20. In this case, the acquisition unit 21 of the main measurement device 20 may acquire the shape data generated by the shape data generation device. Furthermore, the data pre-processing unit 40 may import the shape data acquired by the acquisition unit 21. In this way, when a shape data generation device is used, the process of generating shape data in the data pre-processing unit 40 becomes unnecessary.

[0262] 9. Correspondence between each part of the embodiment and each element of the claims The following describes examples of correspondence between the elements of the claims and the elements of the embodiments. Various other elements having the configurations or functions described in the claims may also be used as the elements of the claims.

[0263] In the above embodiment, the workpiece W is an example of an object to be measured, the sub-measuring devices 20A and 20B are examples of measuring devices, the acquisition unit 21 and the data pre-processing unit 40 are examples of an import unit, the measurement setting generation unit 34 is an example of a first setting unit and a second setting unit, the execution unit 36 ​​is an example of an execution unit, and the code generation unit 38 is an example of a code generation unit.

[0264] Furthermore, the first display area AR1 is an example of a first display area, the second display area AR2 is an example of a second display area, the thumbnail image SI is an example of a first display image, the indicator r1 superimposed on the height image and the measurement results displayed in some of the display blocks DB2 are examples of a second display image, the measurement screen MS is an example of a measurement screen, and the display device 13 is an example of a display unit.

[0265] Furthermore, the screen generation unit 32 is an example of a screen generation unit, the indicators m1 and m2 superimposed on the height image are examples of one or more element indicators, the main measuring device 20 is an example of a code generation support device and a processing device, the reception unit 31 is an example of a first reception unit and a second reception unit, the third display area AR3 is an example of a third display area, and the multiple thumbnail images SI are examples of multiple object images.

[0266] Furthermore, the fourth display area AR4 is an example of the fourth display area, the first phase button fb1 is an example of the first setting indicator, the second phase button fb2 is an example of the second setting indicator, the third phase button fb3 is an example of the third setting indicator, the fourth phase button fb4 is an example of the fourth setting indicator, the images displayed on the measurement screen MS in Figures 9 to 16 are examples of guidance images corresponding to the first setting indicator, and the images displayed on the measurement screen MS in Figures 19 to 22 are examples of guidance images corresponding to the second setting indicator.

[0267] In addition, the image displayed on the measurement screen MS in Figures 24 to 38 is an example of a guidance image corresponding to the third setting indicator, the image displayed on the measurement screen MS in Figures 41 to 43 is an example of a guidance image corresponding to the fourth setting indicator, the reference data storage unit 33 is an example of a reference data storage unit, the data pre-processing unit 40 is an example of a shape data synthesis unit, the measurement screen MS in Figures 46 to 49 is an example of a synthesis setting screen, and the multiple input fields c22 in Figure 48 are an example of an input area.

[0268] 10. Summary of the embodiment (1) The code generation support device according to paragraph 1 is an import unit that imports shape data representing a three-dimensional shape of the measurement object; a first setting unit that sets one or more geometric elements for the measurement object and one or more measurement items related to the one or more geometric elements; an execution unit that specifies the one or more geometric elements set by the first setting unit for one piece of shape data imported by the import unit, and executes a process of calculating values ​​of the one or more measurement items of the measurement object based on the specified one or more geometric elements; a code generation unit that generates a text code representing a process of identifying the one or more geometric elements and a process of calculating values ​​of the one or more measurement items in the measurement object; a screen generator that generates a measurement screen including the first display area, the second display area, the first display image, and the second display image, and displays the measurement screen on the display unit; the first display area is an area in which a height image of the object to be measured based on the one shape data is displayed, and one or more element indices indicating the one or more geometric elements set by the first setting unit are superimposed on corresponding portions of the height image, the second display area is an area in which the one or more measurement items are displayed in a list; the first display image is an image for selecting one piece of shape data to be processed by the execution unit from the plurality of shape data when the acquisition unit acquires a plurality of shape data, The second display image is an image that represents at least a part of one or more measurement results obtained by executing the processing of the execution unit.

[0269] The code generation assistance device imports shape data, sets one or more geometric elements and one or more measurement items for the imported shape data, and calculates the values ​​of the set one or more measurement items, allowing the user to check whether the settings of the one or more geometric elements and one or more measurement items are appropriate based on the calculated values.

[0270] Furthermore, the code generation support device generates text codes that represent processes for identifying one or more geometric elements and calculating values ​​of one or more measurement items for a measurement object. This allows a user to input the generated text codes into a measurement device to perform setup work for performing desired measurements on the measurement object.

[0271] Furthermore, according to the code generation assistance device, a measurement screen is displayed on the display unit. By visually checking the height image and one or more element indices displayed in the first display area, the user can easily and accurately grasp the settings of one or more element indices. By visually checking the one or more measurement items displayed in the second display area, the user can easily and accurately grasp the settings of one or more measurement items. Based on the first display image, the user can easily select one piece of shape data to be used in the measurement value calculation process from among multiple pieces of shape data. Based on the second display image, the user can easily grasp whether various settings are appropriate by visually checking at least a portion of one or more measurement results obtained based on the settings of one or more element indices and the settings of one or more measurement items.

[0272] As a result, the setting work of the measurement device for performing the desired measurement on the measurement object can be easily and appropriately performed.

[0273] (2) In the code generation assistance device according to the first paragraph, The code generation assistance device includes: a first receiving unit that receives, on the measurement screen, a command to set the one or more geometric elements and the one or more measurement items; The height image corresponding to the one shape data includes a three-dimensional height image in which a plurality of images showing the heights of each part of the measurement object viewed from a plurality of directions are switched and displayed, and a two-dimensional height image which is an image showing the heights of each part of the measurement object viewed from a predetermined one direction, the three-dimensional height image and the two-dimensional height image of the measurement object are displayed side by side in the first display area; The one or more element indices may be displayed superimposed on the corresponding portion on the three-dimensional height image, and may also be displayed superimposed on the corresponding portion on the two-dimensional height image.

[0274] In this case, the user can simultaneously view the three-dimensional height image and the two-dimensional height image. Also, by viewing one or more element indices displayed on the display unit, the user can easily grasp the positions of the one or more set geometric elements on the measurement object.

[0275] (3) In the code generation assistance device according to the first paragraph, The code generation assistance device includes: a first receiving unit that receives, on the measurement screen, a command to set the one or more geometric elements and the one or more measurement items; The height image corresponding to the one shape data includes a three-dimensional height image in which a plurality of images showing the heights of each part of the measurement object viewed from a plurality of directions are displayed in a switching manner, and a two-dimensional height image which is an image showing the heights of each part of the measurement object viewed from a predetermined one direction, the first display area selectively displays either the three-dimensional height image or the two-dimensional height image of the measurement object; The one or more element indices may be displayed superimposed on a corresponding portion of the three-dimensional height image or the two-dimensional height image displayed in the first display area.

[0276] In this case, the user can selectively view either the three-dimensional height image or the two-dimensional height image. Also, by viewing one or more element indices displayed on the display unit, the user can easily grasp the positions of the one or more set geometric elements on the measurement object.

[0277] (4) In the code generation assistance device according to any one of paragraphs 1 to 3, The second display image may be an image showing one or more measurement results corresponding to the one or more measurement items displayed in a list in the second display area.

[0278] In this case, the user can visually check the measurement results to confirm whether the settings of one or more measurement elements and one or more measurement items are appropriate.

[0279] (5) In the code generation assistance device according to any one of paragraphs 1 to 4, The code generation assistance device includes: a second receiving unit that receives a designation of a measurement result to be displayed as the second display image on the measurement screen; The second display image may include an image representing a specified measurement.

[0280] This allows the user to specify the desired measurement result, and the user can grasp the desired measurement result by viewing the second display image.

[0281] (Item 6) In the code generation assistance device according to item 5, When the second accepting unit accepts the designation of the measurement result, the code generating unit may generate the text code so as to include information indicating the designated measurement result.

[0282] The text code allows the user to easily understand the measurement results that were to be displayed when the text code was generated. That is, the text code allows the user to easily understand the measurement results that should be focused on.

[0283] (7) In the code generation assistance device according to paragraph 5 or 6, The screen generating unit may generate the measurement screen so that, when the second receiving unit receives the designation of the measurement result, the second display image including the designated measurement result is displayed in the first display area.

[0284] This allows the user to check whether the settings of one or more measurement elements and one or more measurement items are appropriate by viewing the first display area.

[0285] (Item 8) In the code generation assistance device according to item 7, The screen generation unit may generate the measurement screen so that, when the second display image including the specified measurement results is displayed in the first display area, a leader line is further displayed between each specified measurement result and the element index corresponding to the measurement result.

[0286] In this case, by visually checking the first display area, the user can easily grasp the relationship between the one or more measurement parameters that have been set and the measurement results corresponding to the measurement parameters.

[0287] (Item 9) In the code generation assistance device according to any one of items 1 to 7, The screen generator may generate the measurement screen so that a measurement result calculated based on a geometric element of each element index is displayed as the second display image in correspondence with the element index.

[0288] In this case, the user can easily grasp the relationship between the one or more measurement parameters that have been set and the measurement results corresponding to the measurement parameters.

[0289] (10) In the code generation assistance device according to any one of paragraphs 1 to 9, when a plurality of pieces of shape data are acquired by the acquisition unit, the first display image includes a plurality of object images respectively corresponding to the plurality of pieces of shape data; The screen generator may generate the measurement screen so as to further include a third display area in which the plurality of object images are selectably displayed to select the one shape data.

[0290] In this case, the user can easily select a shape data item to be used to set one or more measurement elements and one or more measurement items by selecting a desired object image from multiple object images while viewing the third display area.

[0291] (11) In the code generation assistance device according to any one of paragraphs 1 to 10, The screen generator may generate the measurement screen so as to further include a fourth display area in which a plurality of types of measurement results obtained by executing the processing of the execution unit are displayed.

[0292] In this case, the user can check whether the settings of one or more measurement elements and one or more measurement items are appropriate by viewing the fourth display area.

[0293] (12) In the code generation assistance device according to any one of paragraphs 1 to 11, the screen generator generates the measurement screen to further include a first setting index, a second setting index, a third setting index, and a fourth setting index that are displayed in sequence in one direction; the first setting index is an index representing an operation phase of the code generation assistance device corresponding to a setting related to the import of shape data by the import unit; the second setting index is an index representing an operation phase of the code generation assistance device corresponding to a setting related to correction of the shape data imported by the import unit; the third setting index is an index representing an operation phase of the code generation assistance device corresponding to the setting of the one or more geometric elements and the one or more measurement items; the fourth setting index is an index representing an operation phase of the code generation assistance device corresponding to generation of a text code by the code generation unit, The code generation assistance device includes: a third receiving unit that receives a selection of one of the first setting index, the second setting index, the third setting index, and the fourth setting index on the measurement screen; When the third receiving unit receives a specification for selecting one of the indicators, the screen generating unit may display, on the measurement screen, operation guidance images corresponding to the first setting indicator, the second setting indicator, the third setting indicator, and the fourth setting indicator, respectively.

[0294] In this case, the user can proceed with the operation to set various conditions by visually checking the first setting indicator, the second setting indicator, the third setting indicator, and the fourth setting indicator. Also, the user can set various conditions by selecting one of the first setting indicator, the second setting indicator, the third setting indicator, and the fourth setting indicator in accordance with the guidance image displayed on the display unit.

[0295] (13) In the code generation assistance device according to any one of paragraphs 1 to 12, the shape data includes position information indicating the position of each part on the surface of the measurement object, The code generation assistance device includes: a second setting unit that sets correction information for correcting position information of the shape data by pattern matching between predetermined reference shape data and the shape data acquired by the acquisition unit; the code generation unit generates the text code so as to include the correction information when the correction information is set; The screen generator may generate the measurement screen so that the correction information set by the second setting unit is displayed in a list in the second display area.

[0296] In this case, the user can easily set correction information for correcting the position information of the shape data captured by the measuring device.

[0297] (14) In the code generation assistance device according to the 13th paragraph, The code generation assistance device includes: a reference data storage unit that stores the reference shape data; The measuring device may further include an output unit that outputs the text code generated by the code generation unit and the reference shape data used to generate the text code in association with each other. In this case, it is easy to set the reference shape data for the measuring device.

[0298] (15) In the code generation assistance device according to any one of paragraphs 1 to 14, the shape data is composed of planar position information according to a planar coordinate system and height information corresponding to each planar position in the planar coordinate system; The code generation assistance device includes: a shape data synthesis unit that synthesizes a plurality of shape data including planar position information according to a common planar coordinate system; the screen generation unit generates a synthesis setting screen for setting synthesis conditions for synthesizing the plurality of shape data by the shape data synthesis unit when the plurality of shape data is to be synthesized, and causes the display unit to display the generated synthesis setting screen; When the synthesis condition is set, the code generation unit may generate the text code so as to include information indicating the set synthesis condition.

[0299] In this case, the user can easily set the synthesis conditions for synthesizing multiple shape data by viewing the synthesis setting screen, and can easily obtain the text code containing information indicating the synthesis conditions.

[0300] (16) In the code generation assistance device according to the 15th paragraph, the synthesis condition includes a synthesis offset amount for adjusting a relationship of planar position information between the one shape data and the other shape data when the one shape data and the other shape data are synthesized, the screen generator generates the synthesis setting screen so as to include an input area for receiving input of the synthesis offset amount; When the synthesis offset amount is input in the input area, the code generation unit may generate the text code so as to include information indicating the synthesis offset amount.

[0301] In this case, the user can easily set the synthesis offset amount, and can easily obtain the text code including information indicating the synthesis offset amount.

[0302] (17) The code generation support program according to 17 is A code generation assistance program executable by a processing device, A process of acquiring shape data representing a three-dimensional shape of the measurement object; A process of setting one or more geometric elements for the measurement object and one or more measurement items related to the one or more geometric elements; a process of identifying the one or more geometric elements set by the setting process for one piece of shape data acquired by the acquisition process, and calculating values ​​of the one or more measurement items of the measurement object based on the identified one or more geometric elements; a process of generating a text code representing the process of identifying the one or more geometric elements and the process of calculating the values ​​of the one or more measurement items of the measurement object; generating a measurement screen including a first display area, a second display area, a first display image, and a second display image, and displaying the measurement screen on a display unit; the first display area is an area in which a height image of the object to be measured based on the one shape data is displayed, and one or more element indices indicating the one or more geometric elements set by the setting process are superimposed on corresponding portions of the height image, the second display area is an area in which the one or more measurement items are displayed in a list; the first display image is an image for selecting one of the plurality of shape data to be subjected to the calculation process when the plurality of shape data are imported by the import process, and The second display image is an image that represents at least a part of one or more measurement results obtained by executing the calculation process.

[0303] According to the code generation assistance program, shape data is imported, and one or more geometric elements and one or more measurement items are set for the imported shape data, and the values ​​of the set one or more measurement items are calculated, allowing the user to check whether the settings of the one or more geometric elements and one or more measurement items are appropriate based on the calculated values.

[0304] Furthermore, the code generation assistance program generates text codes that represent processes for identifying one or more geometric elements and calculating values ​​of one or more measurement items for a measurement object. This allows a user to input the generated text codes into a measurement device to perform setup work for performing desired measurements on the measurement object.

[0305] Furthermore, according to the code generation assistance program, a measurement screen is displayed on the display unit. By visually checking the height image and one or more element indices displayed in the first display area, the user can easily and accurately grasp the settings of one or more element indices. By visually checking the one or more measurement items displayed in the second display area, the user can easily and accurately grasp the settings of one or more measurement items. Based on the first display image, the user can easily select one shape data item to be used in the measurement value calculation process from among multiple shape data items. Based on the second display image, the user can easily grasp whether various settings are appropriate by visually checking at least a portion of one or more measurement results obtained based on the settings of one or more element indices and the settings of one or more measurement items.

[0306] As a result, the setting work of the measurement device for performing the desired measurement on the measurement object can be easily and appropriately performed. [Explanation of symbols]

[0307] 1...main measurement system, 1A, 1B...sub-measurement system, 2A, 2B...external device, 11...measuring head, 13...display device, 14...operation device, 20...main measurement device, 20A, 20B...sub-measurement device, 21...acquisition unit, 22...storage device, 23...control unit, 23a...CPU, 23b...ROM, 23c...RAM, 29...recording medium, 31...reception unit, 32...screen generation unit, 33...reference data Storage unit, 34... measurement setting generation unit, 35... index assignment unit, 36... execution unit, 37... library storage unit, 38... code generation unit, 39... output unit, 40... data preprocessing unit, 41... reading unit, 42... analysis unit, 90a... first part, 90b... second part, 90c... third part, 91... bottom part, 92... first top part, 93... second top part, 94... third top part, 95, 96... groove, AR 1...First display area, AR2...Second display area, AR3...Third display area, AR4...Fourth display area, ARF...Phase display area, DB1, DB2...Display block, GR1...First group, GR2...Second group, GR3...Third group, IB, IW...Image, MS...Measurement screen, SI...Thumbnail image, TI...Tool icon, W...Work, b11...Head button, b12...File button, b14...Decision button, b15...Display switch button, b16...Data import button, b17...Decision button, b21, b25, b42, b68...OK button, b22, b26, b36, b39, b43, b62, b65, b67...Cancel button, b23...Reference update button, b24, b35, b38, b61, b64...Next button, b30, b69...Display switch button, b31...Update criteria button, b32...Add tool button, b33...Delete all button, b34...Delete button, b37...Browse existing buttons, b40, b41...Edit button, b44...Result display setting button, b45, b53...Close button, b50...Generate button, b51...Output button, b52...Display code button, b63...Generate shape data button, b66...Synthesis Button, c1...input field, c11...namespace input field, c12...folder input field, c13...file name input field, c2, c21, c22, c3, c4...input field, f1, f2...flow, fb1...first phase button, fb2...second phase button, fb3...third phase button, fb4...fourth phase button, i11, i12, i13, i14...text information, im1, im2, im3,im4...2D height image, m1, m2, r1...indexes, w1, w2, w3...settings window, w4...result display setting window, w5...code generation window, w6...information output window, w7...code display window, w8...composite setting window

Claims

1. an import unit that imports shape data representing a three-dimensional shape of the measurement object; a first setting unit that sets one or more geometric elements and one or more measurement items related to the one or more geometric elements for the measurement object; an execution unit that specifies the one or more geometric elements set by the first setting unit for one piece of shape data imported by the import unit, and executes a process of calculating values ​​of the one or more measurement items of the measurement object based on the specified one or more geometric elements; a code generating unit that generates a text code representing a process of identifying the one or more geometric elements and a process of calculating values ​​of the one or more measurement items of the measurement object; a screen generator that generates a measurement screen including the first display area, the second display area, the first display image, and the second display image, and displays the measurement screen on the display unit; the first display area is an area in which a height image of the object to be measured based on the one shape data is displayed, and one or more element indices indicating the one or more geometric elements set by the first setting unit are superimposed on corresponding portions of the height image, the second display area is an area in which the one or more measurement items are displayed in a list; the first display image is an image for selecting one piece of shape data to be processed by the execution unit from the plurality of shape data when the acquisition unit acquires a plurality of pieces of shape data; The code generation assistance device, wherein the second display image is an image that represents at least a part of one or more measurement results obtained by executing the processing of the execution unit.

2. a first receiving unit that receives, on the measurement screen, a command to set the one or more geometric elements and the one or more measurement items; The height image corresponding to the one shape data includes a three-dimensional height image in which a plurality of images showing the heights of each part of the measurement object viewed from a plurality of directions are switched and displayed, and a two-dimensional height image which is an image showing the heights of each part of the measurement object viewed from a predetermined one direction, the three-dimensional height image and the two-dimensional height image of the measurement object are displayed side by side in the first display area; 2. The code generation support device according to claim 1, wherein the one or more element indices are displayed superimposed on corresponding portions of the three-dimensional height image and also superimposed on corresponding portions of the two-dimensional height image.

3. a first receiving unit that receives, on the measurement screen, a command to set the one or more geometric elements and the one or more measurement items; The height image corresponding to the one shape data includes a three-dimensional height image in which a plurality of images showing the heights of each part of the measurement object viewed from a plurality of directions are displayed in a switching manner, and a two-dimensional height image which is an image showing the heights of each part of the measurement object viewed from a predetermined one direction, the first display area selectively displays either the three-dimensional height image or the two-dimensional height image of the measurement object; 2. The code generation support device according to claim 1, wherein the one or more element indices are superimposed on a corresponding portion of the three-dimensional height image or the two-dimensional height image displayed in the first display area.

4. The code generation assistance device according to any one of claims 1 to 3, wherein the second display image is an image showing one or more measurement results corresponding to the one or more measurement items listed in the second display area.

5. a second receiving unit that receives a designation of a measurement result to be displayed as the second display image on the measurement screen; 4. The code generation assistance device according to claim 1, wherein the second display image includes an image representing a specified measurement result.

6. 6. The code generation support device according to claim 5, wherein when the second receiving unit receives the designation of the measurement result, the code generating unit generates the text code so as to include information indicating the designated measurement result.

7. 6. The code generation support device according to claim 5, wherein the screen generation unit generates the measurement screen when the second reception unit receives the designation of the measurement result so that the second display image including the designated measurement result is displayed in the first display area.

8. 8. The code generation assistance device according to claim 7, wherein the screen generation unit generates the measurement screen so that, when the second display image including the specified measurement results is displayed in the first display area, leader lines are further displayed between each specified measurement result and an element index corresponding to the measurement result.

9. The code generation support device according to any one of claims 1 to 3, wherein the screen generation unit generates the measurement screen so that measurement results calculated based on the geometric elements of each element index are displayed as the second display image corresponding to the element index.

10. when a plurality of pieces of shape data are acquired by the acquisition unit, the first display image includes a plurality of object images respectively corresponding to the plurality of pieces of shape data; The code generation support device according to any one of claims 1 to 3, wherein the screen generation unit generates the measurement screen so as to further include a third display area in which the plurality of object images are selectably displayed to select the one shape data.

11. The code generation assistance device according to any one of claims 1 to 3, wherein the screen generation unit generates the measurement screen so as to further include a fourth display area in which multiple types of measurement results obtained by executing the processing of the execution unit are displayed.

12. the screen generator generates the measurement screen to further include a first setting index, a second setting index, a third setting index, and a fourth setting index that are displayed in sequence in one direction; the first setting indicator is an indicator representing an operation phase of the code generation assistance device corresponding to a setting related to the import of shape data by the import unit; the second setting index is an index representing an operation phase of the code generation assistance device corresponding to a setting related to correction of the shape data imported by the import unit; the third setting index is an index representing an operation phase of the code generation assistance device corresponding to the setting of the one or more geometric elements and the one or more measurement items; the fourth setting indicator is an indicator representing an operation phase of the code generation assistance device corresponding to generation of a text code by the code generation unit, The code generation assistance device includes: a third receiving unit that receives a designation of a selection of one of the first setting index, the second setting index, the third setting index, and the fourth setting index on the measurement screen; The code generation support device according to any one of claims 1 to 3, wherein when the third receiving unit receives a specification for selecting one of the indicators, the screen generation unit displays operation guidance images corresponding to the first setting indicator, the second setting indicator, the third setting indicator, and the fourth setting indicator on the measurement screen.

13. the shape data includes position information indicating the position of each part on the surface of the measurement object, The code generation assistance device includes: a second setting unit that sets correction information for correcting position information of the shape data by pattern matching between predetermined reference shape data and the shape data acquired by the acquisition unit; the code generation unit generates the text code so as to include the correction information when the correction information is set; 4. The code generation assistance device according to claim 1, wherein the screen generation unit generates the measurement screen so that the correction information set by the second setting unit is displayed in a list in the second display area.

14. a reference data storage unit that stores the reference shape data; 14. The code generation support device according to claim 13, further comprising an output unit that outputs the text code generated by the code generation unit and the reference shape data used to generate the text code in association with each other.

15. the shape data is composed of planar position information according to a planar coordinate system and height information corresponding to each planar position in the planar coordinate system; The code generation assistance device includes: a shape data synthesis unit that synthesizes a plurality of shape data including planar position information according to a common planar coordinate system; the screen generation unit generates a synthesis setting screen for setting synthesis conditions for synthesizing the plurality of shape data by the shape data synthesis unit when the plurality of shape data is to be synthesized, and causes the display unit to display the generated synthesis setting screen; 4. The code generation support device according to claim 1, wherein, when the synthesis condition is set, the code generation unit generates the text code so as to include information indicating the set synthesis condition.

16. the synthesis condition includes a synthesis offset amount for adjusting a relationship of planar position information between the one shape data and the other shape data when the one shape data and the other shape data are synthesized, the screen generator generates the synthesis setting screen so as to include an input area for receiving input of the synthesis offset amount; 16. The code generation support device according to claim 15, wherein when the synthesis offset amount is input in the input area, the code generation section generates the text code so as to include information indicating the synthesis offset amount.

17. A code generation assistance program executable by a processing device, A process of acquiring shape data representing a three-dimensional shape of the measurement object; A process of setting one or more geometric elements and one or more measurement items related to the one or more geometric elements for the measurement object; a process of identifying the one or more geometric elements set by the setting process for one piece of shape data imported by the importing process, and calculating values ​​of the one or more measurement items of the measurement object based on the identified one or more geometric elements; a process of generating a text code representing a process of identifying the one or more geometric elements and a process of calculating values ​​of the one or more measurement items of the measurement object; generating a measurement screen including a first display area, a second display area, a first display image, and a second display image, and displaying the measurement screen on a display unit; the first display area is an area in which a height image of the object to be measured based on the one shape data is displayed, and one or more element indices indicating the one or more geometric elements set by the setting process are superimposed on corresponding portions of the height image, the second display area is an area in which the one or more measurement items are displayed in a list; the first display image is an image for selecting one of the plurality of shape data to be subjected to the calculation process when the plurality of shape data are imported by the import process, and The code generation assistance program, wherein the second display image is an image that represents at least a part of one or more measurement results obtained by executing the calculation process.

Citation Information

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