System, program, information processing method and construction method of system

Abstract

To provide a system which is interposed between a processing device model and a processed material model, and can facilitate data delivery between the models, and also to provide a program, an information processing method, and the like.SOLUTION: A system is interposed between a processing device model which is a model expressing a processing device, and a processed material model which is a model expressing a processed material. The system includes a first interface, a second interface, and a conversion class. The first interface is defined so as to receive output data which are data outputted from the processing device model. The second interface is defined so as to grasp a format of the data required for the processed material model. The second interface is defined so as to output required data which are the data suitable for the format to the processed material model. The conversion class is defined as a class which implements the first interface and the second interface. The conversion class converts the output data into the required data so as to fit the output data to the format.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a system, a program, an information processing method, and a system construction method. [Background technology]

[0002] When data is input from a processing device model, which is a model representing a processing device, to a processed object model, which is a model representing an object to be processed, a technology has been proposed that collectively defines multiple types of data, such as integers, real numbers, distributions, and time series, by setting the format of the data output from the processing device model to any type (see, for example, non-patent document 1). [Prior art documents] [Non-patent literature]

[0003] [Non-Patent Document 1] James R. Moyne, et al., "SEMI E133-The Process Control System Standard: Deriving a Software Interoperability Standard for Advanced Process Control in Semiconductor Manufacturing", 2007, Vol.20, p.408-420 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the technique of Non-Patent Document 1, it is necessary to create a model of an object to be processed that can process any type, and it is difficult to create such a model of an object to be processed.

[0005] In view of the above circumstances, the present invention provides a system, a program, an information processing method, etc. that intervenes between a processing device model and a processed object model and can facilitate the transfer of data between the models. [Means for solving the problem]

[0006] According to one aspect of the present invention, there is provided a system that intervenes between a processing device model, which is a model representing a processing device, and a processed object model, which is a model representing an object to be processed. The system includes a first interface, a second interface, and a conversion class. The first interface is defined to receive output data, which is data output from the processing device model. The second interface is defined to understand the format of data required for the processed object model. The second interface is defined to output required data, which is data that conforms to the format, to the processed object model. The conversion class is defined as a class that implements the first interface and the second interface. The conversion class converts the output data into the required data so that the output data conforms to the format.

[0007] According to this aspect, data can be exchanged smoothly between the processing device model and the processed object model. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a configuration diagram illustrating an information processing system 100. [Figure 2] FIG. 2 is a block diagram showing the hardware configuration of an information processing device 200. [Figure 3] FIG. 2 is a block diagram showing the hardware configuration of the terminal 300. [Figure 4] FIG. 4 is a block diagram showing the software configuration of the system 400. [Figure 5] 1 is an activity diagram showing the flow of a method for constructing a system 400, which is executed by an information processing device 200. FIG. [Figure 6] 4 is an activity diagram illustrating information processing between an annealing furnace model 511 and a semiconductor wafer model 611 using the modeled system 400. FIG. [Figure 7]1 is a diagram showing the relationship between an annealing furnace model 511 (an example of a processing apparatus model 510), a semiconductor wafer model 611 (an example of a processing object model 610), and the system 400. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0009] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the accompanying drawings. Various features shown in the following embodiments can be combined with each other.

[0010] Incidentally, the program for realizing the software appearing in this embodiment may be provided as a non-temporary recording medium readable by a computer, or may be provided so that it can be downloaded from an external server, or may be provided so that the program is started on an external computer and its functions are realized on a client terminal (so-called cloud computing).

[0011] In this embodiment, the term "unit" may also include, for example, a combination of hardware resources implemented by a circuit in the broad sense and software information processing that can be specifically realized by these hardware resources. In addition, various types of information are handled in this embodiment, and this information may be represented by, for example, physical values ​​of signal values ​​representing voltages and currents, high and low signal values ​​as a binary bit set consisting of 0 or 1, or quantum superposition (so-called quantum bits), and communication and calculations may be performed on a circuit in the broad sense.

[0012] In addition, a circuit in the broad sense is a circuit realized by at least appropriately combining a circuit, circuitry, a processor, a memory, etc. That is, it includes an application specific integrated circuit (ASIC), a programmable logic device (e.g., a simple programmable logic device (SPLD), a complex programmable logic device (CPLD), and a field programmable gate array (FPGA)), etc.

[0013] 1. Hardware Configuration In Section 1, the hardware configuration of this embodiment will be described.

[0014] 1-1. Information Processing System 100 FIG. 1 is a configuration diagram showing an information processing system 100. The information processing system 100 includes an information processing device 200 and a terminal 300, which are connected via a network. These components will be further described. Here, a system exemplified as the information processing system 100 is composed of one or more devices or components. Therefore, for example, even the information processing device 200 alone can become a system exemplified as the information processing system 100.

[0015] 1-2. Information processing device 200 2 is a block diagram showing the hardware configuration of information processing device 200. Information processing device 200 has a control unit 210, a storage unit 220, and a communication unit 250, and these components are electrically connected via a communication bus 260 inside information processing device 200. A system 400, which will be described later, will be described as being realized by information processing device 200. Each component will be further described.

[0016] The control unit 210 processes and controls the overall operations related to the information processing device 200. The control unit 210 is, for example, a central processing unit (CPU) not shown. The control unit 210 realizes various functions related to the information processing device 200 by reading out predetermined programs stored in the storage unit 220. In other words, information processing by software stored in the storage unit 220 is specifically realized by the control unit 210, which is an example of hardware, and can be executed as each functional unit included in the control unit 210. This will be further explained in Section 2. Note that the control unit 210 is not limited to being a single unit, and multiple control units 210 may be provided for each function. A combination of these may also be used.

[0017] The storage unit 220 stores various information necessary for information processing by the information processing device 200. This may be implemented, for example, as a storage device such as a solid state drive (SSD) that stores various programs related to the information processing device 200 executed by the control unit 210, or as a memory such as a random access memory (RAM) that stores information (arguments, arrays, etc.) temporarily required for program calculations. Alternatively, it may be implemented as a combination of these.

[0018] The communication unit 250 is preferably a wired communication means such as USB, IEEE1394, Thunderbolt (registered trademark), wired LAN network communication, etc., but may also include wireless LAN network communication, mobile communication such as 5G / LTE / 3G, Bluetooth (registered trademark) communication, etc. as necessary. In other words, it is more preferable to implement it as a collection of multiple communication means. In other words, the information processing device 200 communicates various information with the terminal 300 via the communication unit 250 over a network.

[0019] 1-3. Terminal 300 3 is a block diagram showing the hardware configuration of terminal 300. Terminal 300 has a control unit 310, a storage unit 320, a display unit 330, an input unit 340, and a communication unit 350, and these components are electrically connected inside terminal 300 via a communication bus 360. Terminal 300 will be described as being used for building a system 400 (described below) and for quality control using system 400. Descriptions of control unit 310, storage unit 320, and communication unit 350 will be omitted because they are substantially the same as the descriptions of control unit 210, storage unit 220, and communication unit 250 in information processing device 200.

[0020] The display unit 330 may be included in the housing of the terminal 300 or may be externally attached. The display unit 330 displays a screen of a graphical user interface (GUI) that can be operated by the user. This is preferably implemented by selectively using display devices such as a CRT display, a liquid crystal display, an organic EL display, and a plasma display depending on the type of terminal 300. In the following description, the display unit 330 is assumed to be included in the housing of the terminal 300.

[0021] The input unit 340 may be included in the housing of the terminal 300 or may be externally attached. For example, the input unit 340 may be implemented as a touch panel integrated with the display unit 330. A touch panel allows a user to input tapping, swiping, and the like. Of course, a switch button, a mouse, a QWERT keyboard, or the like may be used instead of a touch panel. That is, the input unit 340 accepts an operation input made by the user. The input is transferred as a command signal to the control unit 310 via the communication bus 360. The control unit 310 can then execute predetermined control and calculation as necessary.

[0022] 2. Software Configuration In Section 2, the software configuration of this embodiment will be described.

[0023] FIG. 4 is a block diagram showing the software configuration of system 400. System 400 is interposed between a processing device model 510, which is a model representing a processing device, and a processed object model 610, which is a model representing an object to be processed. System 400 includes a first interface 410, a second interface 420, and a conversion class 430. The processing device model 510 and the first interface 410 are included in a device package 500. The processed object model 610 and the second interface 420 are included in a product package 600. The first interface 410, the second interface 420, and the conversion class 430 are concepts defined as classes for designing objects in order to capture the attributes and behaviors of matters handled by software as a single object. Each component will be further described.

[0024] The first interface 410 is defined to receive output data, which is data output from the processing device model 510 .

[0025] The second interface 420 is defined to grasp the format of data required for the object to be processed 610. The second interface 420 is defined to output, to the object to be processed 610, required data that conforms to the format.

[0026] The conversion class 430 is defined as a class that implements the first interface 410 and the second interface 420. The conversion class 430 converts the output data into required data so that the output data conforms to the above format.

[0027] 3. Construction method Section 3 describes the flow of a method for constructing the system 400. This construction method is a method for constructing the system 400 that is interposed between the processing device model 510 and the processed object model 610. This construction method includes a first definition step, a second definition step, and a third definition step. In the first definition step, a first interface 410 is defined to receive output data, which is data output from the processing device model 510. In the second definition step, a second interface 420 is defined to grasp the format of data required for the processed object model 610. In the second definition step, the second interface 420 is defined to output required data, which is data that conforms to the format, to the processed object model 610. In the third definition step, a conversion class 430 is defined as a class that implements the first interface 410 and the second interface 420. In the third definition step, the conversion class 430 is defined to convert the output data into required data so that the output data conforms to the above format.

[0028] 5 is an activity diagram showing the flow of a method for constructing the system 400, which is executed by the information processing device 200. Section 3 will be explained along with each activity in this activity diagram.

[0029] First, the control unit 310 in the terminal 300 transmits information (hereinafter also referred to as "first definition information") for defining the first interface 410 so as to receive output data, which is data output from the processing device model 510, from the processing device model 510 to the information processing device 200 (activity A110). In activity A110, for example, the following two-stage information processing is executed: (1) The control unit 310 reads out the first definition information from the storage unit 320. (2) The control unit 310 transmits the first definition information to the information processing device 200 via the communication unit 350.

[0030] Next, the control unit 210 in the information processing device 200 receives the first definition information transmitted from the terminal 300 (activity A120). In activity A120, for example, the following two-stage information processing is executed: (1) The communication unit 250 receives the first definition information transmitted from the terminal 300. (2) The control unit 210 stores the received first definition information in the storage unit 220.

[0031] Next, the control unit 210 in the information processing device 200 defines the first interface 410 based on the received first definition information (activity A130). Activity A130 corresponds to the first definition step. In activity A130, for example, the following three stages of information processing are executed: (1) The control unit 210 reads the first definition information from the storage unit 220. (2) The control unit 210 executes the definition process and defines the first interface 410. (3) The control unit 210 stores the first interface 410 in the storage unit 220.

[0032] Next, the control unit 310 in the terminal 300 transmits to the information processing device 200 information for defining the second interface 420 so as to grasp the format of data required for the object to be processed 610, and information for defining the second interface 420 so as to output required data that conforms to the format to the object to be processed 610 (hereinafter collectively referred to as "second definition information") (activity A140). In activity A140, for example, the following two-stage information processing is executed: (1) The control unit 310 reads out the second definition information from the storage unit 320. (2) The control unit 310 transmits the second definition information to the information processing device 200 via the communication unit 350.

[0033] Next, the control unit 210 in the information processing device 200 receives the second definition information transmitted from the terminal 300 (activity A150). In activity A150, for example, the following two-stage information processing is executed: (1) The communication unit 250 receives the second definition information transmitted from the terminal 300. (2) The control unit 210 stores the received second definition information in the storage unit 220.

[0034] Next, the control unit 210 in the information processing device 200 defines the second interface 420 based on the received second definition information (activity A160). Activity A160 corresponds to the second definition step. In activity A160, for example, the following three stages of information processing are executed: (1) The control unit 210 reads the second definition information from the storage unit 220. (2) The control unit 210 executes the definition process and defines the second interface 420. (3) The control unit 210 stores the second interface 420 in the storage unit 220.

[0035] Next, the control unit 310 in the terminal 300 transmits to the information processing device 200 information for defining the conversion class 430 as a class that implements the first interface 410 and the second interface 420, and information for defining the conversion class 430 so as to convert output data output from the processing device model 510 into required data so that the output data conforms to the data format required by the processed object model 610 (hereinafter collectively referred to as "third definition information") (activity A170). In activity A170, for example, the following two-stage information processing is executed: (1) The control unit 310 reads out the third definition information from the storage unit 320. (2) The control unit 310 transmits the third definition information to the information processing device 200 via the communication unit 350.

[0036] Next, the control unit 210 in the information processing device 200 receives the third definition information transmitted from the terminal 300 (activity A180). In activity A180, for example, the following two-stage information processing is executed: (1) The communication unit 250 receives the third definition information transmitted from the terminal 300. (2) The control unit 210 stores the received third definition information in the storage unit 220.

[0037] Next, the control unit 210 in the information processing device 200 defines the conversion class 430 based on the received third definition information (activity A190). Activity A190 corresponds to the third definition step. In activity A190, for example, the following three stages of information processing are executed: (1) The control unit 210 reads the third definition information from the storage unit 220. (2) The control unit 210 executes the definition process and defines the conversion class 430. (3) The control unit 210 stores the conversion class 430 in the storage unit 220.

[0038] Next, the control unit 310 in the terminal 300 transmits a command signal (hereinafter also referred to as "command signal") for modeling the system 400 to the information processing device 200 (activity A200). In activity A200, for example, the following three stages of information processing are executed: (1) The control unit 310 reads the command signal from the storage unit 320. (2) The control unit 310 transmits the command signal to the information processing device 200 via the communication unit 350.

[0039] Next, the control unit 210 in the information processing device 200 receives the command signal transmitted from the terminal 300 (activity A210). In activity A210, for example, the following two-stage information processing is executed: (1) The communication unit 250 receives the command signal transmitted from the terminal 300. (2) The control unit 210 stores the received command signal in the storage unit 220.

[0040] Next, the control unit 210 in the information processing device 200 models each of the defined classes (first interface 410, second interface 420, and conversion class 430) (activity A220). In activity A220, for example, the following three stages of information processing are executed: (1) The control unit 210 reads a command signal from the storage unit 220. (2) The control unit 210 reads each of the defined classes from the storage unit 220. (3) The control unit 210 executes modeling processing to model the system 400.

[0041] The activities A110, A140, and A170 may be executed in any order or simultaneously. That is, the control unit 210 in the information processing device 200 may execute activities A120 to A130 after executing activity A110, execute activities A150 to A160 after executing activity A140, and execute activities A180 to A190 after executing activity A170.

[0042] 4. Information Processing Method Section 4 describes the information processing method of this embodiment, which executes the first interface 410, the second interface 420, and the conversion class 430 of the system 400.

[0043] Fig. 6 is an activity diagram showing information processing between an annealing furnace model 511 and a semiconductor wafer model 611 using a modeled system 400. Fig. 7 is a diagram showing the relationship between the annealing furnace model 511 (an example of a processing device model 510), the semiconductor wafer model 611 (an example of a workpiece model 610), and the system 400. Section 4 will explain each activity in this activity diagram with reference to Fig. 7.

[0044] Here, it is assumed that the annealing furnace model 511, the semiconductor wafer model 611, and the system 400 are realized by the information processing device 200. In other words, it is assumed that information processing by the software (annealing furnace model 511, the semiconductor wafer model 611, and the system 400) realized by the information processing device 200 is specifically realized by the hardware (control unit 210, storage unit 220, and communication unit 250) in the information processing device 200. Therefore, in the following explanation of each activity, for convenience of explanation, the software will be used as the subject, but in reality, it is assumed that the software is specifically realized by the hardware configuration of the information processing device 200.

[0045] The system 400, the device package 500, and the product package 600 are represented as a semiconductor manufacturing process and are used for quality control in the manufacturing process.

[0046] The equipment package 500 includes an annealing furnace model 511 and a first interface 410 in the system 400. Here, the processing equipment used in the expressed manufacturing process is assumed to be an annealing furnace. A function for receiving output data 431 output from the annealing furnace model 511 is described in the first interface 410.

[0047] Product package 600 includes semiconductor wafer model 611 and second interface 420 in system 400. Here, the workpiece used in the represented manufacturing process is assumed to be a semiconductor wafer. Second interface 420 describes a function for understanding the data format required for semiconductor wafer model 611.

[0048] The system 400 includes a first interface 410, a second interface 420, and a conversion class 430. The conversion class 430 implements the first interface 410 and the second interface 420.

[0049] First, the annealing furnace model 511 outputs output data 431 to the conversion class 430 via the first interface 410 (activity A310). The output data 431 is assumed to be data indicating the temperature inside the annealing furnace. The output data 431 includes, for example, a scalar representing the set temperature of the annealing furnace, a time series vector corresponding to a temperature measurement log acquired by a sensor, a spatial distribution vector acquired by a technique such as virtual measurement, and text indicating the set recipe of the annealing furnace. In this way, the annealing furnace model 511 outputs various formats related to the temperature inside the annealing furnace. In activity A310, for example, the following three-stage information processing is performed: (1) The control unit 210 reads the annealing furnace model 511 from the storage unit 220. (2) The control unit 210 executes the annealing furnace model 511 and outputs the output data 431. (3) The control unit 210 stores the output data 431 in the storage unit 220.

[0050] Next, the conversion class 430 receives the output data 431 via the first interface 410 (activity A320). In activity A320, for example, the following three stages of information processing are executed: (1) The control unit 210 reads out the first interface 410 and the conversion class 430 from the storage unit 220. (2) The control unit 210 reads out the output data 431 from the storage unit 220. (3) The control unit 210 inputs the output data 431 to the conversion class 430.

[0051] Next, conversion class 430 transmits a request signal (hereinafter also referred to as "request signal") to semiconductor wafer model 611 via second interface 420, requesting that the type of data format (hereinafter also referred to as "format") required by semiconductor wafer model 611 be returned (activity A330). In activity A330, for example, the following three-stage information processing is executed: (1) Control unit 210 reads second interface 420 and semiconductor wafer model 611 from storage unit 220. (2) Control unit 210 executes conversion class 430 and causes it to output the request signal. (3) Control unit 210 causes storage unit 220 to store the request signal.

[0052] Next, semiconductor wafer model 611 receives the request signal via second interface 420 (activity A340). In activity A340, for example, the following two-stage information processing is executed: (1) Control unit 210 reads the request signal from storage unit 220. (2) Control unit 210 inputs the request signal to semiconductor wafer model 611.

[0053] Next, semiconductor wafer model 611 transmits a type signal (hereinafter also referred to as "type signal") indicating the type of format to conversion class 430 via second interface 420 (activity A350). In activity A350, for example, the following two-stage information processing is executed. (1) Control unit 210 executes semiconductor wafer model 611 and causes it to output a type signal. (2) Control unit 210 causes memory unit 220 to store the type signal.

[0054] Next, the conversion class 430 receives the type signal via the second interface 420 (activity A360). In activity A360, for example, the following two-stage information processing is executed: (1) The control unit 210 reads the type signal from the storage unit 220. (2) The control unit 210 inputs the type signal to the conversion class 430.

[0055] Next, the conversion class 430 extracts data that conforms to the format from the data included in the output data 431 and sets it as required data 432 (activity A370). The required data 432 is set to "the maximum temperature equivalent to heating the central part of the surface for 30 minutes." In activity A370, for example, the following two-stage information processing is executed. (1) The control unit 210 executes a function described in the conversion class 430 using the output data 431 and the type signal. (2) The control unit 210 stores the data extracted by the function (required data 432) in the memory unit 220.

[0056] As described above, the output data 431 can be of various types, such as scalar, vector, text, etc. In addition to the data type, the output data 431 can also have various meanings, such as "actual measurement value acquired by a sensor" or "effective value acquired by calculation processing such as virtual measurement." Therefore, by processing the activity A370, it is possible to correct discrepancies between the output data 431 and the required data 432.

[0057] Next, conversion class 430 transmits required data 432 to semiconductor wafer model 611 via second interface 420 (activity A380). In activity A380, for example, the following two-stage information processing is executed: (1) Control unit 210 reads required data 432 from storage unit 220. (2) Control unit 210 executes conversion class 430 and causes required data 432 to be output.

[0058] Next, semiconductor wafer model 611 receives necessary data 432 via second interface 420 (activity A390). In activity A390, for example, the following information processing is executed: control unit 210 inputs the output necessary data 432 to semiconductor wafer model 611.

[0059] Next, semiconductor wafer model 611 estimates a change in state that will occur in the semiconductor wafer in accordance with necessary data 432 (activity A400). In activity A400, for example, the following information processing is executed. Control unit 210 executes semiconductor wafer model 611 based on necessary data 432 to estimate a change in state that will occur in the semiconductor wafer. The estimated result of the change in state that will occur in the semiconductor wafer is displayed on display unit 330 of terminal 300 and is fed back to annealing furnace model 511.

[0060] According to this embodiment, temperature data, which is important in the annealing process, can be transferred between models.

[0061] According to this embodiment, data can be exchanged smoothly between the processing device model and the workpiece model. Furthermore, the existence of an interface ensures the scalability of the system. Furthermore, due to the simple configuration, the saved resources can be used for other core functions.

[0062] Although the embodiment of the present invention has been described above, the present invention is not limited to this and can be modified as appropriate within the scope of the technical idea of ​​the invention.

[0063] 5. Variations In Section 5, a modification of this embodiment will be described.

[0064] An aspect of this embodiment may be a program configured to cause a computer to execute the first interface 410, the second interface 420, and the conversion class 430 of the system 400.

[0065] The control unit 210 performs write processing (storage processing) and read processing of various data and information to the memory unit 220, but this is not limited to this, and for example, the information processing of each activity may be performed using a register or cache memory within the control unit 210.

[0066] The processing equipment represented as a model is not limited to an annealing furnace, but may be any equipment that processes semiconductor wafers. Examples of equipment that processes semiconductor wafers include plasma etching equipment and sputtering equipment. This embodiment is suitable for use in representing semiconductor manufacturing processes.

[0067] The output data 431 output from the annealing furnace model 511 is not limited to data indicating the temperature inside the annealing furnace, but may be data indicating the atmosphere inside the annealing furnace. Examples of data indicating the atmosphere inside the annealing furnace include gas composition ratios, gas partial pressures, and plasma amounts. This embodiment can be suitably used when a model representing an annealing furnace is used.

[0068] In activity A370, conversion class 430 may combine multiple data included in output data 431 to generate required data 432. For example, a time series vector and text may be combined to generate time series text, or a time series vector and a spatial distribution vector may be combined to generate time series spatial distribution vector. According to this embodiment, it is possible to correct discrepancies between the output data and required data.

[0069] 6.Other It may be provided in the following manner.

[0070] (1) A system that intervenes between a processing device model, which is a model representing a processing device, and a processed object model, which is a model representing an object to be processed, comprising a first interface, a second interface, and a conversion class, wherein the first interface is defined to receive output data, which is data output from the processing device model, the second interface is defined to grasp the format of data required for the processed object model, and the second interface is defined to output required data, which is data that conforms to the format, to the processed object model, the conversion class is defined as a class that implements the first interface and the second interface, and the conversion class converts the output data into the required data so as to conform to the format.

[0071] According to this aspect, data can be exchanged smoothly between the processing device model and the workpiece model. Furthermore, the existence of an interface ensures the scalability of the system. Furthermore, because of the simple configuration, the saved resources can be used for other core functions.

[0072] (2) In the system described in (1) above, the object to be processed is a semiconductor wafer, and the processing device is a device that processes the semiconductor wafer.

[0073] According to this aspect, it can be suitably used when expressing the manufacturing process of a semiconductor.

[0074] (3) In the system described in (2) above, the processing device is an annealing furnace, and the output data is data indicating the atmosphere inside the annealing furnace.

[0075] According to this aspect, it can be suitably used when using a model that represents an annealing furnace.

[0076] (4) In the system described in (3) above, the atmosphere is a temperature.

[0077] According to this embodiment, temperature data, which is important in the annealing process, can be transferred between models.

[0078] (5) A system according to any one of (1) to (4) above, wherein the conversion class extracts data that conforms to the format from the data contained in the output data and uses the extracted data as the required data.

[0079] According to this aspect, it is possible to correct any discrepancy between the output data and the required data.

[0080] (6) A system according to any one of (1) to (4) above, wherein the conversion class combines multiple pieces of data contained in the output data to obtain the required data.

[0081] According to this aspect, it is possible to correct any discrepancy between the output data and the required data.

[0082] (7) A program configured to cause a computer to execute the first interface, the second interface, and the conversion class of the system described in any one of (1) to (6) above.

[0083] According to this aspect, data can be exchanged smoothly between the processing device model and the workpiece model. Furthermore, the existence of an interface ensures the scalability of the system. Furthermore, because of the simple configuration, the saved resources can be used for other core functions.

[0084] (8) An information processing method, which executes the first interface, the second interface, and the conversion class of the system described in any one of (1) to (6) above.

[0085] According to this aspect, data can be exchanged smoothly between the processing device model and the workpiece model. Furthermore, the existence of an interface ensures the scalability of the system. Furthermore, because of the simple configuration, the saved resources can be used for other core functions.

[0086] (9) A method for constructing a system that intervenes between a processing device model, which is a model representing a processing device, and a processed object model, which is a model representing an object to be processed, comprising a first definition step, a second definition step, and a third definition step, in which the first definition step defines a first interface to receive output data, which is data output from the processing device model, from the processing device model, the second definition step defines a second interface to grasp the format of data required for the processed object model, the second definition step defines the second interface to output required data, which is data that conforms to the format, to the processed object model, the third definition step defines a conversion class as a class that implements the first interface and the second interface, and the third definition step defines the conversion class to convert the output data into the required data so as to conform the output data to the format.

[0087] According to this aspect, data can be exchanged smoothly between the processing device model and the workpiece model. Furthermore, the existence of an interface ensures the scalability of the system. Furthermore, because of the simple configuration, the saved resources can be used for other core functions. Of course, this is not the case. [Explanation of symbols]

[0088] 100: Information Processing Systems 200: Information processing device 210: Control unit 220: Storage section 250: Communications Department 260: Communication bus 300: Terminal 310: Control unit 320: Storage section 330: Display section 340: Input section 350: Communications Department 360: Communication bus 400: System 410: First interface 420: Second interface 430: Conversion Class 431: Output data 432: Required data 500: Equipment package 510: Processing unit model 511: Annealing furnace model 600: Product packaging 610: Processing object model 611: Semiconductor wafer model

Claims

1. A system intervening between a processing device model, which is a model representing a processing device, and a processed object model, which is a model representing an object to be processed, a first interface, a second interface, and a conversion class; the first interface is defined to receive output data, the output data being data output from the processing device model; the second interface is defined to grasp a format of data required for the object model; the second interface is defined to output necessary data that is data that conforms to the format to the object model; the conversion class is defined as a class that implements the first interface and the second interface; the conversion class converts the output data into the required data so as to conform the output data to the format; system.

2. 10. The system of claim 1, the workpiece is a semiconductor wafer, the processing device is a device for processing the semiconductor wafer; system.

3. 3. The system of claim 2, the processing apparatus is an annealing furnace, The output data is data indicating the atmosphere in the annealing furnace. system.

4. 4. The system of claim 3, The atmosphere is at temperature. system.

5. 10. The system of claim 1, the conversion class extracts data that conforms to the format from the data included in the output data and sets it as the required data. system.

6. 10. The system of claim 1, The conversion class combines a plurality of data included in the output data to generate the required data. system.

7. A program, 7. A system according to claim 1, configured to cause a computer to execute the first interface, the second interface and the conversion class. program.

8. An information processing method, comprising:

7. Implementing the first interface, the second interface and the conversion class of the system according to claim 1. Information processing methods.

9. A method for constructing a system that is interposed between a processing device model, which is a model representing a processing device, and a processed object model, which is a model representing an object to be processed, comprising: The method includes a first definition step, a second definition step, and a third definition step, In the first definition step, a first interface is defined to receive output data from the processing device model, the output data being data output from the processing device model; In the second definition step, a second interface is defined so as to grasp a format of data required for the object model; In the second definition step, the second interface is defined so as to output necessary data that is data that conforms to the format to the object model; In the third definition step, a conversion class is defined as a class that implements the first interface and the second interface; In the third definition step, the conversion class is defined so as to convert the output data into the required data so as to conform the output data to the format. How to build it.

Images